Optical adjustment device and optical adjustment method

Abstract

The optical adjustment can be performed more efficiently and effectively.SOLUTION: The optical adjustment device includes an optical power detector that detects an optical power of the laser light, a plurality of apertures having different sizes, at least a part of which is provided on an optical path of the laser light, and a control unit that outputs an optical power detection result of the laser light emitted to the optical power detector via each of the plurality of apertures having different sizes.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to an optical adjustment device and an optical adjustment method. [Background technology]

[0002] Patent Document 1 discloses an optical adjustment device and an optical adjustment method. In this optical adjustment method, in order to quickly and accurately align the optical axes and focal points of multiple laser beams or beams with large output differences, an adjustment plate having a slit and a pinhole is provided. The first optical axis of a first adjusted beam, which has a first optical axis substantially perpendicular to the plate surface, is positioned at the end of the slit, and the adjustment plate is adjusted so that the first optical axis and the first focal point of the first adjusted beam are positioned at the end while measuring the output of an optical power detector that receives the first adjusted beam. Furthermore, the adjustment plate is adjusted so that the first optical axis and the first focal point are aligned with the pinhole while measuring the output of the optical power detector. Finally, a second optical axis of a second adjusted beam, which has a second optical axis substantially perpendicular to the plate surface of the adjustment plate whose first optical axis and first focal point are aligned with the pinhole, is adjusted to the end of the slit. Furthermore, while measuring the output of an optical power detector that receives the second adjusted light beam, the position of the second adjusted light beam is adjusted so that the second optical axis and the second focal point of the second adjusted light beam are positioned at the end of the slit, and while measuring the output of the optical power detector, the position of the second adjusted light beam is adjusted so that the second optical axis and the second focal point coincide with the pinhole. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-104168 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure has been devised in view of the above-described conventional circumstances, and aims to provide an optical adjustment device and an optical adjustment method that can perform optical adjustment more efficiently and effectively. [Means for solving the problem]

[0005] The present disclosure provides an optical adjustment device comprising an optical power detector that detects the optical power of laser light, a plurality of apertures of different sizes that are at least partially provided on the optical path of the laser light, and a control unit that adjusts the irradiation position of the laser light using the optical power detection results of the laser light that is irradiated onto the optical power detector through each of the plurality of apertures of different sizes.

[0006] The present disclosure also provides an optical adjustment method performed by an optical adjustment device, the optical adjustment method comprising: detecting the optical power of laser light through a plurality of apertures of different sizes, at least a portion of which is provided on the optical path of the laser light; and outputting the optical power detection results of the detected laser light. [Effects of the Invention]

[0007] According to the present disclosure, optical adjustment can be performed more efficiently and effectively. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a block diagram illustrating an example of an optical adjustment device according to an embodiment of the present invention. [Figure 2] 1 is a schematic cross-sectional view showing an example of an optical adjustment device according to an embodiment of the present invention; [Figure 3] 1A and 1B are explanatory cross-sectional views of an optical adjustment device and an optical power detector according to an embodiment of the present invention; FIG. 1B is a front view of the optical power detector; [Figure 4] 1A and 1B are diagrams for explaining an example of an optical power detector and an aperture in the XY direction according to the present embodiment, in which (a) is a diagram for a case of a plurality of apertures, and (b) is a diagram for a case of a single aperture; [Figure 5]1A and 1B are diagrams illustrating the relationship between optical power detection and aperture size when there is one aperture as a comparative example, (a) a diagram when the aperture is large, and (b) a diagram when the aperture is small. [Figure 6] 1A and 1B are diagrams illustrating the relationship between apertures and optical power in the X and Y directions according to the present embodiment, where (a) is a diagram for multiple apertures, (b) is a diagram for one large aperture, and (c) is a diagram for one small aperture. [Figure 7] 1A and 1B are flow diagrams illustrating an optical adjustment method according to an embodiment of the present invention, in which (a) adjustment is performed without repeating X and Y, and (b) adjustment is performed with repeating X and Y. [Figure 8] 1A and 1B are diagrams illustrating an example of optical adjustment according to the present embodiment, in which (a) is a diagram illustrating the first adjustment in the X direction, (b) is a diagram illustrating the first adjustment in the Y direction, and (c) is a diagram illustrating the second adjustment in the X direction when there is no peak value in the first adjustment in the X direction. [Figure 9] 1A and 1B are diagrams illustrating an example of final XY optical adjustment according to the present embodiment, in which (a) is a diagram illustrating final Y-direction adjustment, and (b) is a diagram illustrating initial X-direction adjustment. [Figure 10] FIG. 10 is a sequence diagram illustrating the initial X-direction adjustment according to the present embodiment. [Figure 11] FIG. 10 is a sequence diagram illustrating the initial Y-direction adjustment according to the present embodiment. [Figure 12] FIG. 10 is a sequence diagram illustrating the shortest final X-direction adjustment according to the present embodiment. [Figure 13] FIG. 10 is a sequence diagram illustrating the shortest final Y-direction adjustment according to the present embodiment. [Figure 14] FIG. 10 is a sequence diagram illustrating the initial Y-direction adjustment when there is no peak value in the previous X-direction adjustment according to the present embodiment. [Figure 15] FIG. 10 is a sequence diagram illustrating an X-direction adjustment when there is no peak value in the previous X-direction adjustment according to the present embodiment. [Figure 16] FIG. 10 is a sequence diagram illustrating the final Y-direction adjustment when there is no peak value in the previous X-direction adjustment according to the present embodiment. [Figure 17]FIG. 10 is a sequence diagram illustrating the final X-direction adjustment when there is no peak value in the previous X-direction adjustment according to the present embodiment. [Figure 18] 1A and 1B are diagrams illustrating a case where Z-direction adjustment is required according to the present embodiment, in which (a) the image is sufficiently in focus, (b) the image is not sufficiently in focus, and (c) the image is significantly out of focus. [Figure 19] 1A and 1B are diagrams illustrating an example of an optical power detector and an aperture in Z-direction adjustment when no adjustment is required according to the present embodiment, where (a) is a diagram for multiple apertures, and (b) is a diagram for one aperture. [Figure 20] 1A and 1B are diagrams illustrating an example of an optical power detector and an aperture in Z-direction adjustment when adjustment according to the present embodiment is desirable, where (a) is a diagram for a plurality of apertures, and (b) is a diagram for a single aperture. [Figure 21] 1A and 1B are diagrams illustrating the relationship between optical power detection and aperture size when there is one aperture as a comparative example, (a) a diagram when the aperture is large, and (b) a diagram when the aperture is small. [Figure 22] 1A and 1B are diagrams illustrating the relationship between apertures and optical power in the Z direction according to the present embodiment, where (a) is a diagram for multiple apertures, (b) is a diagram for one large aperture, and (c) is a diagram for one small aperture. [Figure 23] 1A and 1B are diagrams illustrating an example of optical adjustment according to the present embodiment, in which (a) is a diagram illustrating the first adjustment in the X direction, (b) is a diagram illustrating the first adjustment in the Y direction, and (c) is a diagram illustrating the second adjustment in the X direction when there is no peak value in the first adjustment in the X direction. [Figure 24] FIG. 10 is a sequence diagram illustrating the initial Z-direction adjustment according to the present embodiment. [Figure 25] FIG. 10 is a sequence diagram illustrating Z-direction adjustment when there is no peak value in the previous Z-direction adjustment according to the present embodiment. [Figure 26] FIG. 10 is a sequence diagram illustrating Z-direction adjustment when a peak value was detected in the previous Z-direction adjustment according to the present embodiment. [Figure 27]1A and 1B are diagrams showing a case where the aperture according to the present embodiment is a virtual aperture, in which (a) the aperture is square, and (b) the aperture is round; [Figure 28] 1A and 1B are diagrams for explaining an example of an optical adjustment device and a rotating aperture according to the present embodiment, in which (a) is an explanatory cross-sectional view of the optical adjustment device and the rotating aperture, and (b) is a front view of the rotating aperture. [Figure 29] FIG. 1 is a diagram for explaining an example of an optical adjustment device, a prism, and an aperture according to the present embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] (Background to this disclosure) Patent Document 1 relates to an optical adjustment device and an optical adjustment method, and describes a technology for quickly and highly accurately aligning the optical axis and focus of laser light or other light by arranging the optical axis of a light beam to be adjusted, which has an optical axis approximately perpendicular to an adjustment plate having a slit and a pinhole, at the end of the slit, adjusting the position of the adjustment plate so that the optical axis and focus of the light beam to be adjusted are located at the end while measuring the output of an optical power detector that receives the light beam to be adjusted, and adjusting the position of the adjustment plate so that the optical axis and focus coincide with the pinhole while measuring the output of the optical power detector.

[0010] If such optical axis adjustment is possible, it would be possible to accurately calculate the thickness of a board, for example, in a mounting machine that mounts electronic components (hereinafter sometimes simply referred to as "components") on a board. However, the technology disclosed in the above-mentioned Patent Document 1 requires a slit and a pinhole. In particular, there was a problem in that it was not a practical configuration when optical adjustment was used in a mounting machine.

[0011] Therefore, in the following embodiments, examples of an optical adjustment device, a mounting machine, and an optical adjustment method that can perform optical adjustment more efficiently and effectively will be described.

[0012] Hereinafter, with reference to the drawings as appropriate, detailed descriptions of embodiments that specifically disclose the configurations and operations of an optical adjustment device, mounting machine, and optical adjustment method according to the present disclosure will be provided. However, unnecessary detailed descriptions may be omitted. For example, detailed descriptions of well-known matters or redundant descriptions of substantially identical configurations may be omitted. This is to avoid unnecessary redundancy in the following description and to facilitate understanding by those skilled in the art. Note that the accompanying drawings and the following description are provided to enable those skilled in the art to fully understand the present disclosure and are not intended to limit the subject matter recited in the claims.

[0013] In the following drawings, the X and Y directions are directions that define a horizontal plane for the substrate and are perpendicular to each other, and the Z direction is the height direction (up and down direction) of the substrate that is perpendicular to the X and Y directions.

[0014] (Embodiment 1) First, an optical adjustment device 1 according to a first embodiment will be described with reference to Fig. 1. Fig. 1 is a block diagram for explaining an example of an optical adjustment device according to the present embodiment. The optical adjustment device 1 includes a mounting machine 10, an optical power detector 20, an XYZ stage 30, and a terminal device 40. Note that the mounting machine 10 may also include the optical power detector 20, the XYZ stage 30, and the terminal device 40 as the optical adjustment device 1.

[0015] The mounter 10 has at least one nozzle 19 (see FIG. 2 ) and a mounting head 11 that transports a component C (see FIG. 2 ), such as a chip, from a supply position of the component C to a mounting position on the substrate S. The mounting head 11 has a communication unit 12, an LD (Laser Diode) driver 13, and a holder 14. The communication unit 12 communicates with another terminal, such as a terminal device 40, and outputs information data from the terminal device 40 to the LD driver 13. The LD driver 13 controls an LD 16, which will be described later. A laser barrel 15 is provided inside the holder 14, and the LD 16 and a lens 17 are provided inside the laser barrel 15. The distance between the LD 16 and the lens 17 may be fixed or variable. The laser light output from the LD 16 reaches and is received by an image sensor 21 of an optical power detector 20 via the lens 17. The communication unit 12 may transmit and receive information data to and from communication devices other than the terminal device 40.

[0016] The optical power detector 20 detects the optical power of the irradiated laser light. The optical power detector 20 includes an image sensor 21 that detects the optical power, and a communication unit 22. The image sensor 21 may be configured with a photodiode. The detection result is transmitted to the terminal device 40 via the communication unit 22. The communication unit 22 may transmit and receive information data to and from communication devices other than the terminal device 40.

[0017] The XYZ stage 30 moves the laser barrel 15 so that the laser light output from the LD 16 can move in the X, Y, and Z directions (see FIG. 2) on a horizontal plane, with the X and Y directions being the directions. The XYZ stage 30 includes a motor 31 for moving the laser barrel 15, and a communication unit 32 for receiving movement instructions from the terminal device 40. The communication unit 32 may transmit and receive information data to and from communication devices other than the terminal device 40.

[0018] The terminal device 40 is realized by, for example, a PC (Personal Computer), a notebook PC, a server, a tablet, a smartphone, etc. The terminal device 40 includes a communication unit 41, a processor 42, and a memory 43.

[0019] The communication unit 41 is connected to the mounting machine 10, the optical power detector 20, and the XYZ stage 30 so as to be able to communicate with each other via wired or wireless communication, and transmits and receives data. The wired communication referred to here corresponds to at least one of communication via a wired local area network (hereinafter referred to as "LAN"), a wired wide area network (hereinafter referred to as "WAN"), or power line communication (PLC), and may be performed via other network configurations capable of wired communication. On the other hand, the wireless communication corresponds to at least one of communication via a wireless LAN such as Wi-Fi (registered trademark), a wireless WAN, or a mobile communication network such as 4G or 5G, and may be performed via other network configurations capable of wireless communication.

[0020] The communication unit 41 transmits the control command (electrical signal) output from the processor 42 to each device (the mounting machine 10, the optical power detector 20, and the XYZ stage 30). The communication unit 41 outputs various information data or various electrical signals transmitted from each device to the processor 42.

[0021] The processor 42 generates control commands such as the position of the irradiation point of the laser beam from the LD 16, the number of irradiation points, etc., and outputs the control commands to the communication unit 41, which then transmits the commands to the LD driver 13. As a result, the processor 42 controls the position of the irradiation point of the laser beam from the LD 16, the number of irradiation points, etc. In particular, the processor 42, as a control unit, adjusts the irradiation position of the laser beam using the optical power detection results of the laser beams detected by the optical power detector 20 when the laser beams are irradiated onto the optical power detector 20 through each of the plurality of apertures 20a to 20f (see FIG. 3) with different sizes. Alternatively, the processor 42 may simply output the optical power detection results of the laser beams detected by the optical power detector 20 when the laser beams are irradiated onto the optical power detector 20 through each of the plurality of apertures 20a to 20f (see FIG. 3) with different sizes via an output device (not shown in FIG. 1). Note that this output device may include a display device (not shown in FIG. 1) included in the terminal device 40, or may include a display device (not shown in FIG. 1) connected to the terminal device 40. When outputting to an output device, a person can adjust the irradiation position of the laser light while checking the output device.

[0022] The memory 43 includes, for example, a RAM as a work memory used when executing each process of the processor 42, and a ROM for storing programs and data that define the operation of the processor 42. The RAM temporarily stores data or information generated or acquired by the processor 42. The ROM has written therein programs that define the operation of the processor 42. The memory 43 stores information about the position of the irradiation point of the laser light, information about the imaging area of ​​the camera 18 (see FIG. 2), production data for the substrate S, etc.

[0023] Next, a case where the height of the board S of the mounting machine 10 is measured will be described. FIG. 2 is a cross-sectional schematic diagram showing an example of an optical adjustment device according to this embodiment. The mounting machine 10 further includes a camera 18 and a nozzle 19. The nozzle 19 sucks the component C and places it on the board S. The camera 18 captures images of the board S and the component C to be mounted. The processor 42 acquires position information of the irradiation point of the laser light based on the captured image sent from the camera 18. The processor 42 calculates the board height of the board S using triangulation based on the position information of the irradiation point of the laser light at the board height included in the production data and the acquired position of the irradiation point.

[0024] Furthermore, processor 42 calculates the amount of displacement of the mounting position on the XY plane of component C, which is the mounting target, based on the calculated board height of board S and the position of the irradiation point of the laser light from LD 16. Processor 42 corrects the mounting position of component C based on the calculated amount of displacement of the mounting position, and generates a control command to cause camera 18 to capture an image of an imaging area including the corrected mounting position of component C, outputs the control command to communication unit 41, and causes camera 18 to transmit the image.

[0025] The processor 42 acquires information on the mounting position of the component C (for example, the position of a land, etc.) or the mounting position of the already-mounted component C (i.e., information on the actual measurement value) based on the captured image transmitted from the camera 18. The processor 42 uses triangulation to calculate the amount of displacement between the mounting position of the component C included in the production data of the board S or the mounting position of the already-mounted component C and the mounting position of the component C measured by the camera 18 (for example, the position of a land, etc.) or the mounting position of the already-mounted component C (i.e., the actual measurement value).

[0026] Based on the calculated displacement of the mounting position, the processor 42 determines the transport position (mounting position) of the component C by the mounting head 11 and the elevation height of the nozzle 19. The processor 42 generates a control command for mounting the component C on the board S, including the determined transport position (mounting position) of the component C and the elevation height of the nozzle 19, outputs the command to the communication unit 41, and causes it to be transmitted to the communication unit 12 of the mounting machine 10.

[0027] Furthermore, after mounting the component C, the processor 42 determines whether there is a change in the board height of the board S, and whether the already-mounted component C is mounted at the mounting position, based on the displacement amount of the mounting position of the component C transmitted from the camera 18. If the processor 42 determines that there is a change in the board height of the board S, it corrects the mounting position of the component when mounting other components that are to be mounted within a predetermined distance from this component C, and determines the transport position (mounting position) of the component P by the mounting head 34 and the elevation height of the nozzle 35.

[0028] At this time, it goes without saying that if the spot of the laser light does not fall within the imaging range of the camera 18, the height of the substrate S cannot be calculated. Therefore, optical adjustment of the laser light becomes important. Note that the XYZ directions are the XY directions on a horizontal plane, but as shown in FIG. 2, the XY directions for the XYZ stage 30 are the movement directions of the XYZ stage 30 required when the laser light irradiated by the LD 16 moves on a horizontal plane. Therefore, the XYZ directions for the substrate S, which expands its surface in the XY directions, and the XYZ directions for the XYZ stage 30 appear to be different.

[0029] Next, optical adjustment in the XY directions will be described. FIG. 3 is a diagram illustrating an example of an optical adjustment device and an optical power detector according to this embodiment, where (a) is a cross-sectional view of the optical adjustment device and the optical power detector, and (b) is a front view of the optical power detector. FIG. 4 is a diagram illustrating an example of an optical power detector and an aperture in the XY directions according to this embodiment, where (a) is a diagram for multiple apertures and (b) is a diagram for one aperture. FIG. 5 is a diagram illustrating the relationship between optical power detection and aperture size in the case of one aperture as a comparative example, where (a) is a diagram for a large aperture and (b) is a diagram for a small aperture. FIG. 6 is a diagram illustrating the relationship between aperture and optical power in the XY directions according to this embodiment, where (a) is a diagram for multiple apertures, (b) is a diagram for one large aperture, and (c) is a diagram for one small aperture.

[0030] As shown in FIG. 3, laser light output from the LD 16 is irradiated onto the optical power detector 20. The optical power detector 20 is provided with six apertures 20a-20f. Note that in the following description, six apertures is merely an example; the number of apertures is preferably about ten to improve or ensure the detection accuracy of the laser light. However, the desirable number of apertures is not limited to ten. Each of the apertures 20a-20f, which have different sizes, is approximately circular. The apertures 20a-20f are frames that limit the size of the laser light from the LD 16. That is, suppose that laser light is irradiated at a position within the optical power detector 20 as shown in FIG. 4(a). The apertures 20d-20f can detect this laser light, but the apertures 20a-20c cannot. As a result, the optical power detector 20 detects an optical power of "3" detected by the apertures 20a-20f. That is, the closer the laser light output from LD 16 is irradiated onto a position at the center of optical power detector 20, the larger the optical power value detected by optical power detector 20. That is, processor 42 adjusts the irradiation position of the laser light using the sum of the optical powers of the laser light irradiated onto optical power detector 20 through each of a plurality of apertures 20a to 20f of different sizes.

[0031] Here, as a comparative example, Figure 5 will be referred to. As shown in Figure 5(a), when there is one large aperture, it is easy to detect laser light, but it is not possible to detect whether the laser light is irradiated at a position close to the center. On the other hand, as shown in Figure 5(b), when there is one small aperture, it is possible to detect laser light when it is irradiated at a position close to the center, but it is difficult to detect the laser light in the first place.

[0032] In both Figures 5(a) and 5(b), it is difficult to adjust the irradiation position closer to the center. That is, as shown in Figure 6(a), since there are six apertures 20a to 20f arranged in concentric circles, the detected optical power increases as the laser light spot approaches the center of the concentric circles, i.e., the target of the laser light. The target can be estimated by measuring the optical power at three points and performing quadratic curve approximation using the measurement results. On the other hand, in Figures 6(b) and 6(c), there is only one aperture, so quadratic curve approximation is difficult, making it difficult to effectively estimate the target of laser light irradiation. Note that in this embodiment, quadratic curve approximation is not required for target position estimation, as shown in Figure 6(a). Quadratic curve approximation uniquely determines the peak position, eliminating dependence on automatic adjustment or individual differences between adjusters.

[0033] Next, a flow for optical adjustment in the X and Y directions will be described. FIG. 7 is a flow diagram illustrating an optical adjustment method according to this embodiment, where (a) illustrates adjustment without repeating X and Y, and (b) illustrates adjustment with repeating X and Y. FIG. 8 is a diagram illustrating an example of optical adjustment according to this embodiment, where (a) illustrates the initial X-direction adjustment, (b) illustrates the initial Y-direction adjustment, and (c) illustrates the second X-direction adjustment when no peak value was found in the initial X-direction adjustment. FIG. 9 is a diagram illustrating an example of final X and Y optical adjustment according to this embodiment, where (a) illustrates the final Y-direction adjustment, and (b) illustrates the initial X-direction adjustment. FIG. 10 is a sequence diagram illustrating the initial X-direction adjustment according to this embodiment. FIG. 11 is a sequence diagram illustrating the initial Y-direction adjustment according to this embodiment. FIG. 12 is a sequence diagram illustrating the shortest final X-direction adjustment according to this embodiment. FIG. 13 is a sequence diagram illustrating the shortest final Y-direction adjustment according to this embodiment. Fig. 14 is a sequence diagram illustrating the initial Y-direction adjustment when no peak value was found in the previous X-direction adjustment according to this embodiment. Fig. 15 is a sequence diagram illustrating the X-direction adjustment when no peak value was found in the previous X-direction adjustment according to this embodiment. Fig. 16 is a sequence diagram illustrating the final Y-direction adjustment when no peak value was found in the previous X-direction adjustment according to this embodiment. Fig. 17 is a sequence diagram illustrating the final X-direction adjustment when no peak value was found in the previous X-direction adjustment according to this embodiment.

[0034] As shown in FIG. 7(a), the optical adjustment in the XY direction may be performed by first completing the stage movement amount adjustment in the X direction (ST11) and then completing the stage movement amount adjustment in the Y direction (ST12) so that the irradiation spot of the laser light approaches the target.

[0035] 7(b), the stage movement amount adjustment in the X direction and the stage movement amount adjustment in the Y direction may be performed alternately little by little so that the irradiation spot of the laser light approaches the target. In FIG. 7(b), the processor 42 first determines whether to perform the stage movement amount adjustment in the X direction (ST13). For example, if the stage movement amount adjustment in the X direction has already been completed, the result is NO. If the processor 42 determines to perform the stage movement amount adjustment in the X direction (ST13: YES), the processor 42 performs the stage movement amount adjustment in the X direction (ST14). If the processor 42 determines not to perform the stage movement amount adjustment in the X direction (ST13: NO) or after ST14 is completed, the processor 42 determines whether to perform the stage movement amount adjustment in the Y direction (ST15). If the processor 42 determines to perform the stage movement amount adjustment in the Y direction (ST15: YES), the processor 42 performs the stage movement amount adjustment in the Y direction (ST16). If the processor 42 determines that the stage movement amount adjustment in the Y direction will not be performed (ST13: NO) or if ST16 is completed, the processor 42 determines whether the stage movement amount adjustment in both the X and Y directions has been completed (ST17). If the processor 42 determines that the adjustment has not been completed (ST17: NO), the processor 42 returns to ST13. If the processor 42 determines that the adjustment has been completed (ST17: YES), the processor 42 determines that the stage movement amount adjustment in both the X and Y directions has been completed.

[0036] The movement amount adjustment will be described in detail below using as an example an adjustment in which the stage movement amount adjustment in the X direction and the stage movement amount adjustment in the Y direction are performed little by little alternately. Figure 8(a) shows the first stage movement amount adjustment in the X direction (ST14). In one step of the stage movement amount adjustment in the X direction, the optical power detector 20 detects the optical power at three positions moved in the X direction. The XYZ stage 30 moves to change the irradiation position of the laser light.

[0037] As shown in Figure 8(a), when the optical power is detected at each of the laser irradiation positions X1, X2, and X3 moved in the X direction, there is no peak value among X1 to X3, that is, it is determined that there is no laser irradiation target position between X1 and X3. In this case, the position X3 with the highest optical power is adopted as the initial value of X for the next detection.

[0038] Next, we will explain the first stage movement amount adjustment in the Y direction (ST16) shown in Figure 8(b). The X direction position is set to X3, and the optical power is detected at positions Y1, Y2, and Y3 after movement in the Y direction. At this time, it is estimated from the detection results that there is a peak value between Y1, Y2, and Y3. The peak value is estimated by performing quadratic curve approximation, and the Y direction position corresponding to the peak value is set to Y4. In this case, the Y4 position is used as the center position for the next detection.

[0039] Next, we will explain the second X-direction stage movement amount adjustment (ST14) shown in Figure 8(c). The Y-direction position is set to Y4, and then optical power is detected at three points: X3, which is set as the initial value, and X4 and X5, which are points moved from X3 in the direction where the peak value is estimated to be. The detection results at X3, X4, and X5 are fitted with a quadratic curve to calculate position X6, which is estimated to correspond to the peak value. In this case, the position X6 is used as the center position for the next detection.

[0040] Once the peak value is estimated, the distance between the three points is narrowed and detailed adjustments are made. The optical power is detected at three points, two of which are a short distance away from the already estimated target (here, X6 and Y4), and quadratic curve approximation is performed to estimate the target. In FIG. 9(a), the optical power is detected at three points, Y5 and Y6, which are a short distance away from Y4, and quadratic curve approximation is performed. As a result, Y7 is estimated as the target in the Y direction. In FIG. 9(b), the optical power is detected at three points, X7 and X8, which are a short distance away from X6, and quadratic curve approximation is performed. As a result, X9 is estimated as the target in the Y direction. As a result, point (X9, Y7) is estimated to be the target. The XYZ stage 30 can be fixed at this position. In this way, the processor 42, which is the control unit, may move at least one of the laser light oscillator (LD 16) and the optical power detector 20 at three points on the same line, and calculate the irradiation position of the laser light in the same linear direction using the detection results of the optical power detector at the three points. Note that the LD 16 does not need to be moved alone, and the laser barrel 15 or holder 14 that houses the LD 16 may be moved instead. The processor 42, which is the control unit, may also calculate the irradiation position of the laser light in the same linear direction by performing quadratic curve approximation on the detection results of the optical power detector 20 at the three points.

[0041] Next, the operations of the optical power detector 20, the XYZ stage 30, and the terminal device 40 in this flow will be described.

[0042] As shown in FIG. 10, first, the processor 42 of the terminal device 40 positions (returns) the XYZ stage 30 to the start point (origin, X1, Y1) (ST101). Then, by irradiating laser light from the LD 16, the optical power detector 20 measures (detects) the optical power (ST102). The processor 42 of the terminal device 40 stores the measurement result in the memory 43 of the terminal device 40 (ST103). Next, the processor 42 of the terminal device 40 determines the movement amount of the XYZ stage 30 so that the irradiation position of the laser light changes (ST104), and moves the XYZ stage 30 in the X direction (from X1 to X2) (ST105). Then, the optical power detector 20 measures (detects) the optical power (ST106). The processor 42 of the terminal device 40 stores the measurement result in the memory 43 of the terminal device 40 (ST107). Next, the processor 42 of the terminal device 40 determines the amount of movement of the XYZ stage 30 so as to change the irradiation position of the laser light (ST108), and moves the XYZ stage 30 in the X direction (from X2 to X3) (ST109). Then, the optical power detector 20 measures (detects) the optical power (ST110). The processor 42 of the terminal device 40 stores the measurement result in the memory 43 of the terminal device 40 (ST111). Then, the processor 42 of the terminal device 40 performs quadratic curve approximation using the three optical power measurement values ​​(ST112). As a result, the processor 42 of the terminal device 40 determines whether a peak value was found within the current movement range (ST113). If a peak value was found within the current movement range (ST113: YES), the process proceeds to FIG. 11, and the position corresponding to the estimated peak value is set as the center of the next three points. Furthermore, Y-direction adjustment is performed at the estimated position. If there is no peak value within the current movement range (ST113: NO), the process proceeds to Fig. 14, and the position corresponding to the maximum optical power value is set as the start position of the next three points (X3 in Fig. 8(a)). Also, Y-direction adjustment is performed at this estimated position.

[0043] Next, FIG. 11 will be described. First, if a peak value is found within the movement range in ST113 (ST113: YES), the process proceeds to FIG. 11, and the position corresponding to the estimated peak value becomes the X position in FIG. 11. The processor 42 of the terminal device 40 calculates the amount of movement to the position corresponding to the estimated X-direction peak value (ST201). Then, the processor 42 of the terminal device 40 moves the XYZ stage 30 to the start point (ST202). Then, by irradiating laser light from the LD 16, the optical power detector 20 measures (detects) the optical power (ST203). The processor 42 of the terminal device 40 stores the measurement result in the memory 43 of the terminal device 40 (ST204). Next, the processor 42 of the terminal device 40 determines the amount of movement of the XYZ stage 30 so that the irradiation position of the laser light changes (ST205), and moves the XYZ stage 30 in the Y direction (from Y1 to Y2) (ST206). Then, the optical power detector 20 measures the optical power (ST207). The processor 42 of the terminal device 40 stores the measurement result in the memory 43 of the terminal device 40 (ST208). Next, the processor 42 of the terminal device 40 determines the movement amount of the XYZ stage 30 so as to change the irradiation position of the laser light (ST209), and moves the XYZ stage 30 in the Y direction (from Y2 to Y3) (ST210). Then, the optical power detector 20 measures the optical power (ST211). The processor 42 of the terminal device 40 stores the measurement result in the memory 43 of the terminal device 40 (ST212). Then, the processor 42 of the terminal device 40 performs quadratic curve approximation using the three optical power measurement values ​​(ST213). As a result, the processor 42 of the terminal device 40 determines whether a peak value was found within the current movement range (ST214). If a peak value is found within the current movement range (ST214: YES), the process proceeds to FIG. 12, where the Y-axis position corresponding to the estimated peak value is set as the center of the next three points. The next X-axis adjustment is performed at this estimated position. If a peak value is not found within the current movement range (ST214: NO), the process proceeds to FIG. 10, where the position corresponding to the maximum optical power value is set as the Y-axis start position of the next three points. The next X-axis adjustment is performed at this estimated position.

[0044] Next, FIG. 12 will be described. FIG. 12 shows a case where a peak value is found within the X-direction movement range in FIG. 10 and within the Y-direction movement range in FIG. 11. Therefore, since the peak value has already been found within the X-direction movement range, the movement amount is reduced to adjust the position. First, if a peak value is found within the movement range in ST214 (ST214: YES), the process proceeds to FIG. 12. The position corresponding to the estimated peak value becomes the Y position in FIG. 12, so the processor 42 of the terminal device 40 calculates the movement amount to the position corresponding to the estimated peak value (ST301). Then, the processor 42 of the terminal device 40 moves the XYZ stage 30 to the start point (ST302). Steps ST303 to ST313 are the same as ST102 to ST112 in FIG. 10. However, since the peak value has been found in FIG. 10, the sense of distance between the three positions for detecting optical power becomes smaller than in FIG. 10. Then, quadratic curve approximation is performed (ST313) and the calculated X position is determined as the X position of the target position (ST314).

[0045] Next, FIG. 13 will be described. FIG. 13 shows a case where the X position has been determined in FIG. 12 and a peak value is found within the Y-direction movement range in FIG. 11. Therefore, since the peak value has already been found within the Y-direction movement range, the movement amount is reduced to adjust the position. First, the processor 42 of the terminal device 40 calculates the movement amount to the position corresponding to the estimated peak value (ST401). Then, the processor 42 of the terminal device 40 moves the XYZ stage 30 to the start point (ST402). Steps ST403 to ST413 are the same as ST203 to ST213 in FIG. 11. However, since the peak value has been found in FIG. 11, the sense of distance between the three points where the optical power is detected is smaller than in FIG. 11. Then, the processor 42 of the terminal device 40 performs quadratic curve approximation (ST413) and determines the calculated Y position as the Y position of the target position (ST414). Then, the position adjustment is completed.

[0046] Next, FIG. 14 will be described. First, if there is no peak value within the movement range in ST113 of FIG. 10 (ST113: NO), the process proceeds to FIG. 14. The position corresponding to the peak value estimated in FIG. 10 becomes the X position in FIG. 14, and the optical network unit 40 calculates the amount of movement to the position corresponding to the estimated peak value (ST501). Steps ST502 to ST514 are the same as ST202 to ST214 of FIG. 11, and therefore their explanation will be simplified or omitted. If there is a peak value within the current movement range (ST514: YES), the process proceeds to FIG. 15, and the position corresponding to the estimated peak value is set as the center of the next three points. Furthermore, the next X-direction adjustment is performed at this Y-direction estimated position. If there is no peak value within the current movement range (ST514: NO), the process proceeds to FIG. 10, and the position corresponding to the maximum optical power value is set as the start position of the next three points. Furthermore, the next X-direction adjustment is performed at this estimated position.

[0047] Next, FIG. 15 will be described. First, if there is no peak value within the X-direction movement range in ST113 of FIG. 10 (ST113: NO) and there is a peak value within the Y-direction movement range in ST514 of FIG. 14 (ST514: YES), the process proceeds to FIG. 15, where the position corresponding to the peak value estimated in FIG. 14 becomes the Y position in FIG. 15, and the optical network unit 40 calculates the amount of movement to the position corresponding to the estimated peak value (ST601). Steps ST602 to ST614 are the same as ST101 to ST113 of FIG. 10, so their explanation will be simplified or omitted. If there is a peak value within the current movement range (ST614: YES), the process proceeds to FIG. 16, where the position corresponding to the estimated peak value is set as the center of the next three points. Furthermore, the next Y-direction adjustment is performed at that estimated X-direction position. If there is no peak value within the current movement range (ST514: NO), the process proceeds to FIG. 10, where the position corresponding to the maximum optical power value is set as the start position of the next three points. Also, the next Y-direction adjustment is performed at this estimated position.

[0048] Next, Fig. 16 will be described. Figs. 16 and 17 show the case where the Y position of the target is determined first, and then the X position of the target is determined. First, in Figs. 14 and 15, if there is a peak value within the movement range, the process proceeds to Figs. 16 and 17. Therefore, the position corresponding to the peak value estimated in Figs. 14 and 15 becomes the center position in Fig. 16. Steps ST701 to ST714 are the same as ST401 to ST414 in Fig. 13, so their explanation will be simplified or omitted. However, since the X position has not yet been determined, the process proceeds to Fig. 17.

[0049] Next, Fig. 17 will be described. Steps ST801 to ST814 are the same as steps ST301 to ST314 in Fig. 13. However, since the Y position has already been determined, the position adjustment is complete.

[0050] Next, we will explain the case where Z-direction adjustment is also performed. It is preferable to perform Z-direction adjustment after XY-direction adjustment is completed. FIG. 18 is a diagram illustrating a case where Z-direction adjustment is required according to this embodiment. (a) shows a case where the focus is sufficient, (b) shows a case where the focus is insufficient, and (c) shows a case where the focus is significantly out of focus. FIG. 19 is a diagram illustrating an example of an optical power detector and an aperture in Z-direction adjustment when adjustment according to this embodiment is not required. (a) shows a case where multiple apertures are used, and (b) shows a case where a single aperture is used. FIG. 20 is a diagram illustrating an example of an optical power detector and an aperture in Z-direction adjustment when adjustment according to this embodiment is recommended. (a) shows a case where multiple apertures are used, and (b) shows a case where a single aperture is used. Fig. 21 is a diagram for explaining the relationship between optical power detection and aperture size when there is one aperture as a comparative example, where (a) is a diagram for a large aperture and (b) is a diagram for a small aperture. Fig. 22 is a diagram for explaining the relationship between aperture and optical power in the Z direction according to this embodiment, where (a) is a diagram for multiple apertures, (b) is a diagram for one large aperture, and (c) is a diagram for one small aperture.

[0051] For example, even if the target can be irradiated with laser light in the X and Y directions, if the Z direction is misaligned, the laser light cannot be irradiated properly. In Figure 18(a), the laser light is concentrated at the center, but in Figure 18(b), the laser spot is much larger than the smallest aperture, and when the laser spot becomes as large as in Figure 18(c), it extends far beyond the target. In this case, the Z position of LD 16 and lens 17 must be adjusted.

[0052] As shown in Figure 19, when the Z positions of LD 16 and lens 17 are sufficiently aligned, the laser light is sufficiently irradiated inside all of the apertures, and the power value detected by optical power detector 20 is "6." On the other hand, when the Z positions of LD 16 and lens 17 are not sufficiently aligned, as shown in Figure 20, the laser light protrudes from the apertures with small openings, and an optical power of "1" cannot be detected for each. As a result, the power value detected by optical power detector 20 is "6" or less. In other words, the larger the diameter of the laser light spot, the smaller the power value detected by optical power detector 20.

[0053] Here, as a comparative example, FIG. 21 will be referred to. As shown in FIG. 21(a), when there is one large aperture, the optical power detected by the optical power detector 20 does not change whether the diameter of the laser spot is appropriate or not, so it is not possible to determine whether position adjustment in the Z-axis direction is necessary. Also, as shown in FIG. 21(b), when there is one small aperture, if the diameter of the laser spot is too large, the optical power detected by the optical power detector 20 becomes small, so it is possible to detect it. However, it is difficult to perform precise position adjustment.

[0054] As shown in Figure 22(a), where there are multiple apertures, there is a well-balanced correlation between the Z position deviation of the LD 16 and lens 17 and the detectable optical power, making detection and position adjustment easy. On the other hand, in Figures 22(b) and 22(c), there is only one aperture, making it difficult to perform quadratic curve approximation and effectively estimate the target of laser light irradiation.

[0055] Next, the flow of position adjustment in the Z direction will be described. The position adjustment in the Z direction may be performed by moving the XYZ stage 30 or by changing the positions (distance) between the LD 16 and the lens 17. FIG. 23 illustrates an example of optical adjustment according to this embodiment, where FIG. 23(a) illustrates the initial X-direction adjustment, FIG. 23(b) illustrates the initial Y-direction adjustment, and FIG. 23(c) illustrates the second X-direction adjustment when no peak value was found in the initial X-direction adjustment. FIG. 24 is a sequence diagram illustrating the initial Z-direction adjustment according to this embodiment. FIG. 25 is a sequence diagram illustrating the Z-direction adjustment according to this embodiment when no peak value was found in the previous Z-direction adjustment. FIG. 26 is a sequence diagram illustrating the Z-direction adjustment according to this embodiment when a peak value was found in the previous Z-direction adjustment.

[0056] 23(a), when the optical power is detected at each of the laser irradiation positions Z1, Z2, and Z3 moved in the Z direction, it is determined that there is no peak value among Z1 to Z3, that is, there is no target position for laser irradiation between X1 and X3. In this case, the position Z3 with the highest optical power is adopted as the initial value for the next time.

[0057] Next, Figure 23(b) shows the second adjustment of the stage movement amount in the Z direction. The optical power is detected at three points: Z3, which is set to the initial value, and Z4 and Z5, which are points moved from Z3 in the direction where the peak value is estimated to be. The detection results at Z3, Z4, and Z5 are fitted with a quadratic curve to calculate position Z6, which is estimated to correspond to the peak value.

[0058] Once the peak value is estimated, the distance between the three points is narrowed and detailed adjustments are made. The optical power is detected at three points, two of which are a short distance away from the already estimated target (here, Z6), and a quadratic curve approximation is performed to estimate the target. In FIG. 23(c), the optical power is detected at three points, Z7 and Z8, which are a short distance away from Z6, and a quadratic curve approximation is performed. As a result, Y7 is estimated as the target in the Y direction. In FIG. 23(b), the optical power is detected at three points, X7 and X8, which are a short distance away from X6, and a quadratic curve approximation is performed. As a result, Z9 is estimated as the target in the Z direction. As a result, position Z9 is estimated to be the target. The XYZ stage 30 can be fixed at this position.

[0059] As shown in FIG. 24, first, the processor 42 of the terminal device 40 positions (returns) the XYZ stage 30 to the start point (origin, Z1) (ST901). Then, by irradiating laser light from the LD 16, the optical power detector 20 measures (detects) the optical power (ST902). The processor 42 of the terminal device 40 stores the measurement result in the memory 43 of the terminal device 40 (ST903). Next, the processor 42 of the terminal device 40 determines the movement amount of the XYZ stage 30 so that the Z-direction irradiation position of the laser light changes (ST904), and moves the XYZ stage 30 in the Z direction (from Z1 to Z2) (ST905). Then, the optical power detector 20 measures (detects) the optical power (ST906). The processor 42 of the terminal device 40 stores the measurement result in the memory 43 of the terminal device 40 (ST907). Next, the processor 42 of the terminal device 40 determines the amount of movement of the XYZ stage 30 in the Z direction so as to change the irradiation position of the laser light (ST908), and moves the XYZ stage 30 in the Z direction (from Z2 to Z3) (ST909). Then, the optical power detector 20 measures (detects) the optical power (ST910). The processor 42 of the terminal device 40 stores the measurement result in the memory 43 of the terminal device 40 (ST911). Then, the processor 42 of the terminal device 40 performs quadratic curve approximation using the three optical power measurement values ​​(ST912). As a result, the processor 42 of the terminal device 40 determines whether a peak value was found within the current movement range (ST913). If a peak value was found within the current movement range (ST913: YES), the process proceeds to FIG. 26, and the position corresponding to the estimated peak value is set as the center of the next three points. If there is no peak value within the current movement range (ST913: NO), the process proceeds to FIG. 25, and the position corresponding to the estimated peak value is set as the start position of the next three points.

[0060] Next, FIG. 25 will be described. If there is no peak value within the movement range in FIG. 24, the process proceeds to FIG. 25, where the processor 42 of the optical network device 40 calculates the amount of movement to the position corresponding to the estimated peak value (ST1001). Then, the XYZ stage 30 moves in the Z direction by the calculated amount of movement (ST1002). Then, the flow from ST1003 to ST1014 is the same as ST902 to ST913 in FIG. 24, so the description will be simplified or omitted. If there is a peak value within the current movement range (ST1014: YES), the process proceeds to FIG. 26, where the position corresponding to the estimated peak value is set as the center of the next three points. If there is no peak value within the current movement range (ST1014: NO), the process proceeds to FIG. 25 again. The position corresponding to the maximum optical power value is set as the start position of the next three points.

[0061] Next, FIG. 26 will be described. If a peak value was found within the movement range in the previous optical power detection, the process proceeds to FIG. 26. Because a peak value has already been found within the Z-direction movement range, the movement amount is reduced and the position is adjusted. First, the processor 42 of the optical network device 40 calculates the movement amount to the position corresponding to the estimated peak value (ST1101). Then, the XYZ stage 30 is moved to the start point (ST1102). Then, the flow from ST1103 to ST1114 is the same as ST902 to ST913 in FIG. 24, so the description will be simplified or omitted. However, because a peak value was found in FIG. 24 or 25, the sense of distance between the three positions for detecting optical power is smaller than in FIG. 24 or 25. Then, the processor 42 of the optical network device 40 performs quadratic curve approximation (ST1113) and determines the calculated Z position as the Z position of the target position (ST1114). Then, the position adjustment is completed.

[0062] It is preferable that the diameter of the laser light spot be approximately 0.1 mm by adjusting the position in the Z direction using the XYZ stage 30. In this case, the smallest aperture size is approximately 0.1 mm, which is approximately the same as the diameter of the laser light spot. The aperture diameter should increase at intervals of approximately 0.05 mm, 0.1 mm, 0.2 mm, and 0.5 mm. The maximum diameter should be 3 mm. The aperture shape may be other than circular, as long as the size is approximately the same.

[0063] Furthermore, when measuring the optical power at three positions, the movement distance between each point on the XYZ stage 30 should be 0.5 mm intervals until the peak is found, and then 0.1 mm or less. The aperture pitch should be smaller than the intervals between the three positions. The diameter of the largest aperture should be larger than the intervals between the three positions. The diameter of the smallest aperture should be smaller than the intervals between the three positions. The diameter of the smallest aperture should be the same size as the spot diameter of the laser light.

[0064] Next, the optical power detector 20 and the aperture will be described. Fig. 27 is a diagram showing a case where the aperture according to this embodiment is a virtual aperture, with Fig. 27(a) being a diagram showing a case where the aperture is square, and Fig. 27(b) being a diagram showing a case where the aperture is round. Fig. 28 is a diagram for explaining an example of an optical adjustment device and a rotating aperture according to this embodiment, with Fig. 28(a) being an explanatory cross-sectional view of the optical adjustment device and the rotating aperture, and Fig. 28(b) being a front view of the rotating aperture. Fig. 29 is a diagram for explaining an example of an optical adjustment device, a prism, and an aperture according to this embodiment.

[0065] 27, a plurality of virtual apertures 50 are provided in the image sensor 21 of the optical power detector 20. That is, when laser light is irradiated onto the image sensor 21, the optical power within the range of each virtual aperture 50 is detected and added together. That is, the optical power detected within aperture 50a, the optical power detected within aperture 50b, the optical power detected within aperture 50c, the optical power detected within aperture 50d, the optical power detected within aperture 50e, and the optical power detected within aperture 50f are added together to detect the optical power. Note that the virtual aperture 50 is not limited to a circular shape as shown in FIG. 27(a), and each of a plurality of apertures of different sizes may be a polygon, as shown in FIG. 27(b).

[0066] Alternatively, a rotating aperture 51 as shown in Fig. 28 may be used. The rotating aperture 51 has eight apertures provided on a circular plate-like object, and by rotating it with a motor M, all of the apertures are positioned between the optical power detector 20 and the laser light, and the optical power at each aperture is detected in turn. As shown in Fig. 27(b), all of the apertures are positioned so that their centers overlap on a circle drawn by a dotted line.

[0067] 29, prisms 53a to 53d are arranged so that the laser light reaches optical power detector 20 through each of a plurality of aligned apertures 52a to 52d of different diameters. For the sake of simplicity, four apertures 52a to 52d are shown, but six or any other number may be used. However, in order to achieve the arrangement shown in FIG. 29, not only is the optical power of the laser light split by each of prisms 53a to 53d the same, but the optical distance from the light source (in other words, laser barrel 15) to each of apertures 52a to 52d is also the same. With this configuration, optical power detection through all of the apertures can be performed simultaneously.

[0068] 27 to 29, the number of apertures varies, but this is merely an example, and in order to improve or ensure the detection accuracy of the laser light, the number of apertures is preferably about 10. However, the desirable number of apertures is not limited to 10.

[0069] (Addendum) The above description of each embodiment discloses the following technical concepts.

[0070] (Item 1) an optical power detector (20) for detecting the optical power of the laser light; a plurality of apertures (20a to 20f) of different sizes, at least a portion of which is provided on the optical path of the laser light; a control unit (processor 42) that outputs optical power detection results of the laser light irradiated to the optical power detector through each of the plurality of apertures of different sizes, Optical adjustment device (1). As a result, the optical adjustment device can output the optical power detection result of the laser light, and optical adjustment can be performed more efficiently and effectively by a person or via the optical adjustment device.

[0071] (Item 2) the control unit adjusts the irradiation position of the laser light using a result of the optical power detection of the laser light. Item 1. The optical adjustment device according to item 1. As a result, the optical adjustment device can automatically perform optical adjustment more efficiently and effectively.

[0072] (Item 3) the control unit adjusts the irradiation position of the laser light using an addition result value of the optical power of the laser light irradiated onto the optical power detector through each of the plurality of apertures having different sizes. Item 1 or 2. The optical adjustment device. As a result, the optical adjustment device can easily detect the optical power of the laser light emitted from the LD, and can perform optical adjustment more efficiently and effectively.

[0073] (Item 4) each of the plurality of different sized apertures is substantially circular; Item 1. The optical adjustment device according to item 1. As a result, the optical adjustment device can effectively and easily detect the optical power of the laser light using the substantially circular aperture, thereby making it possible to perform optical adjustment more efficiently and effectively.

[0074] (Item 5) each of the plurality of different sized apertures is a polygon; Item 1. The optical adjustment device according to item 1. As a result, the optical adjustment device can effectively detect the optical power of polygonal laser light, and can perform optical adjustment more efficiently and effectively.

[0075] (Item 6) the control unit moves the laser light oscillator (LD16) at three or more points on the same line, and calculates the irradiation position of the laser light in the same line direction using the detection results of the optical power detector at the three or more points. Item 1. The optical adjustment device according to item 1. As a result, the optical adjustment device can more efficiently and effectively bring the irradiation position of the laser light closer to the target, thereby enabling optical adjustment.

[0076] (Item 7) the control unit calculates the irradiation position of the laser light in the same linear direction by performing quadratic curve approximation on the detection results of the optical power detector at the three or more points. Item 7. The optical adjustment device according to item 6. As a result, the optical adjustment device can more efficiently and effectively bring the irradiation position of the laser light closer to the target with precision, thereby enabling optical adjustment.

[0077] (Item 8) An optical adjustment method performed by an optical adjustment device (1), comprising: Detecting the optical power of the laser light through a plurality of apertures (20a to 20f) of different sizes, at least a portion of which is provided on the optical path of the laser light; outputting the optical power detection result of the detected light; Optical adjustment method. As a result, the optical adjustment method makes it possible to output the optical power detection result of the laser light, and optical adjustment can be performed more efficiently and effectively by a person or an optical adjustment device.

[0078] Although various embodiments have been described above with reference to the accompanying drawings, the present disclosure is not limited to such examples. It is clear that those skilled in the art can conceive of various modifications, alterations, substitutions, additions, deletions, and equivalents within the scope of the claims, and it is understood that these also fall within the technical scope of the present disclosure. Furthermore, the components of the various embodiments described above may be combined in any manner without departing from the spirit of the invention. [Industrial Applicability]

[0079] The present disclosure is useful for an optical adjustment device and an optical adjustment method. [Explanation of symbols]

[0080] 1 Optical adjustment device 10 Mounting machine 11 Mounting head 12 Communications Department 13 LD driver 14 Holder 15 Laser tube 16LD 17 Lenses 18 Camera 19 nozzles 20 Optical Power Detector 21 Image sensor 22 Communications Department 30 XYZ stages 31 Motor 32 Communications Department 40 Terminal Equipment 41 Communications Department 42 processors 43 Memory 50 Virtual Apertures 51 Rotating Aperture 52 aperture 53 Prism C parts S board Medium motor

Claims

1. an optical power detector for detecting the optical power of the laser light; a plurality of apertures of different sizes, at least a portion of which is provided on the optical path of the laser light; a control unit that outputs an optical power detection result of the laser light irradiated through each of the plurality of apertures having different sizes to the optical power detector. Optical adjustment device.

2. the control unit adjusts the irradiation position of the laser light using a result of the optical power detection of the laser light. The optical adjustment device of claim 1 .

3. the control unit adjusts the irradiation position of the laser light using an addition result value of optical power detection results of the laser light irradiated onto the optical power detector through each of the plurality of apertures having different sizes.

3. The optical adjustment device according to claim 1 or 2.

4. each of the plurality of different sized apertures is substantially circular; The optical adjustment device of claim 1 .

5. each of the plurality of different sized apertures is a polygon; The optical adjustment device of claim 1 .

6. the control unit moves an oscillator optical power detector of the laser light at three or more points on the same line, and calculates an irradiation position of the laser light in the same line direction using detection results of the optical power detector at the three or more points. The optical adjustment device of claim 1 .

7. the control unit calculates the irradiation position of the laser light in the same linear direction by performing quadratic curve approximation on the detection results of the optical power detector at the three or more points. The optical adjustment device according to claim 6 .

8. An optical adjustment method performed by an optical adjustment device, comprising: detecting optical power of the laser light through a plurality of apertures of different sizes, at least a portion of which is provided on the optical path of the laser light; and outputting a detection result of the optical power of the detected laser light. Optical adjustment method.

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