Ultrasonic water jet apparatus

Abstract

To satisfactorily supply high frequency power to an ultrasonic vibration plate.SOLUTION: The first terminal 31 and the second terminal 32 of the upper cylindrical part 30 serve as a member for holding the ultrasonic vibration plate 70 and a member for supplying power to the first electrode 75 and the second electrode 77 of the ultrasonic vibration plate 70, and are in surface contact with the first electrode 75 and the second electrode 77. This eliminates the need for wiring connection by soldering to the first electrode 75 and the second electrode 77. Therefore, even when the high-frequency power supplied to the ultrasonic vibrator 70 is increased and the amplitude of the ultrasonic vibrator 70 is increased, the solder is not peeled off. Therefore, the high-frequency power can be satisfactorily supplied to the first electrode 75 and the second electrode 77.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an ultrasonic water jetting device. [Background technology]

[0002] As disclosed in Patent Documents 1 to 3, in a cleaning device for cleaning a wafer, ultrasonic water in which ultrasonic vibrations are propagated is sprayed from a nozzle toward a rotating wafer to clean the wafer.

[0003] In such a cleaning device, an ultrasonic vibration plate is disposed within a nozzle that sprays ultrasonic water, and wiring for supplying high-frequency power is soldered to the ultrasonic vibration plate.

[0004] In addition, the ultrasonic water jetting devices disclosed in Patent Documents 4 and 5 jet ultrasonic water to separate wafers from an ingot. In this case, the power supplied to the ultrasonic vibration plate is greater than that used for cleaning. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2021-041353 [Patent Document 2] Japanese Patent Publication No. 2023-082482 [Patent Document 3] Patent No. 6507358 [Patent Document 4] Patent Publication No. 2021-176165 [Patent Document 5] Japanese Patent Application Publication No. 2023-167868 Summary of the Invention [Problem to be solved by the invention]

[0006] In conventional ultrasonic water injection devices, as the power supplied to the ultrasonic vibration plate increases, the amplitude of the ultrasonic vibration plate increases, causing the solder attaching the wiring to the ultrasonic vibration plate to peel off, making it difficult to supply high-frequency power to the ultrasonic vibration plate.

[0007] Therefore, an object of the present invention is to supply high frequency power to an ultrasonic vibration plate in a satisfactory manner even when the amplitude of the ultrasonic vibration plate is large. [Means for solving the problem]

[0008] The ultrasonic water jetting device of the present invention (the present ultrasonic water jetting device) is an ultrasonic water jetting device that jets ultrasonic water that has propagated ultrasonic vibrations, and is equipped with a water reservoir that temporarily stores water supplied from a water supply source, a jet nozzle that jets the water from the bottom of the water reservoir, an ultrasonic vibration plate that is arranged opposite the jet nozzle at the top of the water reservoir and propagates ultrasonic vibrations into the water stored in the water reservoir, and a supply port for supplying water to the water reservoir, and the ultrasonic vibration plate has a ring-shaped first electrode arranged on the outer periphery of the ultrasonic vibration plate, a ring-shaped insulating part arranged inside the first electrode, and a supply port that is arranged inside the insulating part. and a ring-shaped second electrode attached to the ultrasonic vibration plate, the water reservoir portion being formed by the ultrasonic vibration plate and a cylindrical portion that holds the ultrasonic vibration plate, the cylindrical portion including a lower cylindrical portion that has the injection port and supports the lower surface of the outer circumferential portion of the ultrasonic vibration plate, and an upper cylindrical portion that is disposed opposite the lower cylindrical portion and in contact with the upper surface of the outer circumferential portion of the ultrasonic vibration plate so as to sandwich the ultrasonic vibration plate together with the lower cylindrical portion, the upper cylindrical portion including a ring-shaped first terminal that supplies high-frequency power to the first electrode of the ultrasonic vibration plate that is sandwiched between the upper cylindrical portion and the lower cylindrical portion, and a ring-shaped second terminal that supplies high-frequency power to the second electrode of the ultrasonic vibration plate.

[0009] In the ultrasonic water jetting device, at least one of the first terminal and the second terminal may include an elastic member.

[0010] In the ultrasonic water jetting device, the second terminal may be screwed to the first terminal, and the first terminal may be screwed to the lower tube portion. [Effects of the Invention]

[0011] In this ultrasonic water jetting device, the ultrasonic vibration plate is held in the cylindrical part by being sandwiched between the upper and lower cylindrical parts, and the first and second terminals of the upper cylindrical part are configured to contact the first and second electrodes of the ultrasonic vibration plate and supply high-frequency power thereto.

[0012] That is, in this ultrasonic water jetting device, the upper cylinder serves both as a member for holding the ultrasonic vibration plate and as a member for supplying power to the first and second electrodes of the ultrasonic vibration plate. This eliminates the need for soldered wiring connections to the first and second electrodes. Therefore, even if the high-frequency power supplied to the ultrasonic vibration plate increases and the amplitude of the ultrasonic vibration plate increases, solder peeling does not occur. This prevents poor supply of high-frequency power to the first and second electrodes, ensuring good supply of high-frequency power to the first and second electrodes.

[0013] Furthermore, since soldering wiring connections are not required, the ultrasonic water jetting device is easy to assemble, and the ultrasonic vibration plate can be easily replaced. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a cross-sectional view showing the configuration of an ultrasonic water jetting device. [Figure 2] FIG. 2 is an exploded cross-sectional view showing the configuration of the ultrasonic water jet device. [Figure 3] FIG. DETAILED DESCRIPTION OF THE INVENTION

[0015] The ultrasonic water jetting device 1 shown in Fig. 1 jets ultrasonic water, which is water that has been subjected to ultrasonic vibrations. The ultrasonic water jetting device 1 is used, for example, to clean wafers after processing by jetting ultrasonic water, and to peel wafers from ingots by jetting ultrasonic water onto the ingots.

[0016] As shown in Figures 1 and 2, the ultrasonic water jetting device 1 includes a case 10 having a second chamber 12 which is a water storage section that temporarily stores water 500 supplied from a water supply source 100 via a water supply pipe (joint) 16, an injection port 17 that sprays water 500 from the bottom of the second chamber 12, a dome-shaped ultrasonic vibration plate 70 arranged at the top of the second chamber 12 in the case 10, and a water supply section 80 having a ring flow path 83 that supplies water from the water supply pipe 16 to the second chamber 12 of the case 10.

[0017] The case 10 includes a cylindrical portion 13 that holds an ultrasonic vibration plate 70 , and a wiring cover 19 that is connected to the top of the cylindrical portion 13 .

[0018] The interior of the case 10 is divided into two upper and lower chambers by the ultrasonic vibration plate 70, i.e., a first chamber 11 above the ultrasonic vibration plate 70 and a second chamber 12 below the ultrasonic vibration plate 70. The second chamber 12, which is a water reservoir, is formed by the ultrasonic vibration plate 70 and a cylindrical portion 13.

[0019] A water supply unit 80 that is in communication with the second chamber 12 is formed around the second chamber 12 in the cylindrical portion 13. A water supply source 100 is connected to the water supply unit 80 via a water supply pipe 16. Therefore, water 500 supplied from the water supply source 100 passes through the water supply unit 80 and is temporarily stored in the second chamber 12, which is the water reservoir of the case 10.

[0020] The cylindrical portion 13 has a nozzle portion 14 in the shape of a roughly conical cylinder below it. The nozzle portion 14 is formed at the lower end of the cylindrical portion 13 so as to protrude in the -Z direction. The diameter of the nozzle portion 14 gradually decreases toward the tip. The nozzle portion 14 has an ejection port 17 at its tip that ejects water 500 stored in the second chamber 12 of the case 10 from the bottom of the second chamber 12. The second chamber 12 of the case 10 is mainly configured as the space inside the nozzle portion 14.

[0021] The ultrasonic vibration plate 70 is disposed opposite the nozzle 17 at the top of the second chamber 12, which is the water reservoir, and propagates ultrasonic vibrations to the water stored in the second chamber 12. The ultrasonic vibration plate 70 has a dome shape with a concave spherical lower side facing the nozzle 17, and propagates ultrasonic vibrations to the water 500 stored in the second chamber 12 upon receiving high-frequency power.

[0022] The water supply unit 80 is used to supply water 500 to the second chamber 12, which is a water reservoir between the ultrasonic vibration plate 70 and the jet nozzle 17 inside the case 10.

[0023] The water supply unit 80 is provided at the lower end of the cylindrical portion 13 of the case 10. The water supply unit 80 has a supply port 81 provided on the outer wall of the cylindrical portion 13, a ring water passage 82 communicating with the supply port 81, and a ring flow path 83 extending from the ring water passage 82 to the second chamber 12 inside the cylindrical portion 13.

[0024] The supply port 81 is a portion for supplying water to the second chamber 12, which is a water reservoir, and is a portion to which the water supply pipe 16 is detachably connected. The supply port 81 supplies water 500, which flows in from the water supply source 100 via the water supply pipe 16, to the ring water passage 82.

[0025] The ring water passage 82 is a circumferential pipe, and is provided in the side wall at the lower end of the cylindrical portion 13 in the shape of a ring that surrounds the entire circumference of the second chamber 12. A portion of the ring water passage 82 is connected to the supply port 81, and is configured so that water 500 is supplied from the water supply source 100 via the water supply pipe 16 and the supply port 81. The water 500 supplied to the ring water passage 82 spreads around the entire circumference of the ring water passage 82 and is supplied into the interior of the second chamber 12 from the ring flow path 83.

[0026] The ring flow path 83 opens in a ring shape into the second chamber 12, which is a water reservoir. Specifically, the ring flow path 83 is a ring-shaped slit formed so as to extend obliquely upward within the side wall of the cylindrical portion 13 from the entire circumference of the ring water path 82 toward the second chamber 12, and opens below the ultrasonic vibration plate 70 within the second chamber 12. The ring flow path 83 supplies water to the second chamber 12 from the outer periphery of the ultrasonic vibration plate 70 toward the center.

[0027] Here, the detailed structures of the ultrasonic vibration plate 70 and the cylindrical portion 13 of the case 10 will be described. As shown in FIG. 2, the ultrasonic vibration plate 70 has a dome portion 73 which is a main body portion, a second flange portion 72 on the outer periphery side of the dome portion 73, and a first flange portion 71 on the outer periphery side of the second flange portion 72.

[0028] Dome portion 73 is formed to have a circular dome shape when viewed from above, and its lower surface, which is the surface facing outlet 17, is a downward-facing concave spherical surface (radiation surface). Dome portion 73 radiates ultrasonic vibrations from this concave spherical surface toward water 500 temporarily remaining in second chamber 12 between dome portion 73 and outlet 17.

[0029] The second flange 72 is a ring-shaped plate portion that protrudes outward in the radial direction from the outer periphery of the dome 73. The thickness of the second flange 72 is thinner than that of the dome 73. The first flange 71 is a ring-shaped plate portion that protrudes outward in the radial direction from the outer periphery of the second flange 72. The thickness of the first flange 71 is thinner than the thickness of the second flange 72.

[0030] A first electrode 75, which is a ring-shaped electrode arranged on the outer periphery of the ultrasonic vibration plate 70, is provided on the outer portion of the upper surface of the first flange portion 71. In addition, an insulating portion 76 serving as a ring-shaped insulating portion arranged inside the first electrode 75 is provided on the side of the second flange portion 72, which is the boundary between the first flange portion 71 and the second flange portion 72, and on the inner portion of the upper surface of the first flange portion 71. Furthermore, a second electrode 77, which is a ring-shaped electrode arranged inside the insulating portion 76, is provided on the upper surface of the second flange portion 72. The first electrode 75 and the second electrode 77 are insulated from each other by an insulating portion 76 disposed therebetween. The first flange 71 and the second flange 72 may be integrally formed. That is, the first electrode 75, the insulating portion 76, and the second electrode 77 may be arranged from the outside on the same surface.

[0031] As shown in FIGS. 1 and 2, the cylindrical portion 13 has a lower cylindrical portion 20 including the second chamber 12 and an upper cylindrical portion 30 disposed above the lower cylindrical portion 20.

[0032] The lower cylinder portion 20 has the second chamber 12 and the injection port 17, and supports the lower surface of the outer periphery of the ultrasonic vibration plate , that is, the lower surfaces of the first flange portion 71 and the second flange portion 72 of the ultrasonic vibration plate . In addition, the upper tube portion 30 is arranged opposite the lower tube portion 20 so as to contact the upper surfaces of the first flange portion 71 and the second flange portion 72, which are the outer peripheral portions of the ultrasonic vibration plate 70, and to sandwich the ultrasonic vibration plate 70 together with the lower tube portion 20.

[0033] More specifically, lower cylinder portion 20 includes first lower cylinder member 21 which is the main body of lower cylinder portion 20, and second lower cylinder member 22 which is fitted onto first lower cylinder member 21 from above.

[0034] The first lower cylinder member 21 has a roughly bottomed cylindrical shape and has an inner wall cylinder 210 therein that forms the nozzle portion 14. The inner wall cylinder 210 has a roughly conical cylindrical shape and is formed to penetrate a bottom plate 215 of the first lower cylinder member 21. The inner wall cylinder 210 has an outer wall 211 and an inner wall 212. The outer wall 211 of the inner wall cylinder 210 extends in the Z-axis direction above the bottom plate 215, and extends below the bottom plate 215 so as to slope inward toward the -Z direction. The inner wall 212 also extends so as to slope inward toward the -Z direction, and its lower end forms a vertical surface along the Z-axis direction.

[0035] The part of inner wall cylinder 210 that protrudes from bottom plate 215 of first lower cylinder member 21 forms nozzle portion 14 described above, and its tip forms jet nozzle 17. The inside of inner wall 212 of inner wall cylinder 210 forms second chamber 12, which is a water reservoir for case 10. Furthermore, ring water passage 82 and ring flow path 83 of water supply unit 80 are formed between side wall 216 of first lower cylinder member 21 and inner wall cylinder 210 (outside outer wall 211).

[0036] Second lower cylinder member 22 has a generally cylindrical shape with a bottom, and has opening 220 formed in bottom plate 221. Therefore, bottom plate 221 of second lower cylinder member 22 has a ring shape surrounding opening 220.

[0037] Second lower cylinder member 22 having this shape is attached to the inside of first lower cylinder member 21 so as to fit from above into first step portion 213 formed on the inside of side wall 216 of first lower cylinder member 21. Alternatively, a female thread may be formed on the inner surface of the side wall 216 of the first lower tube member 21, a male thread may be formed on the outer surface of the second lower tube member 22, and the male thread of the second lower tube member 22 may be screwed into the female thread of the first lower tube member 21, thereby attaching the second lower tube member 22 to the inside of the first lower tube member 21.

[0038] Furthermore, ring-shaped bottom plate 221 of second lower cylinder member 22 supports the underside of the outer circumferential portion of ultrasonic vibration plate 70, i.e., the undersides of first flange 71 and second flange 72 of ultrasonic vibration plate 70, via ring-shaped first seal member 300 made of, for example, sponge. The underside of dome portion 73 of ultrasonic vibration plate 70 supported by second lower cylinder member 22 faces second chamber 12 and injection port 17 via opening 220 of second lower cylinder member 22.

[0039] Additionally, upper cylinder portion 30 has ring-shaped (cylindrical) first terminal 31 and second terminal 32 arranged concentrically. In this embodiment, first terminal 31 and second terminal 32 are made of metal and contact the upper surface of the outer periphery of ultrasonic vibration plate 70 supported by second lower cylinder member 22, sandwiching ultrasonic vibration plate 70 together with lower cylinder portion 20.

[0040] That is, the first terminal 31 is in contact with the first electrode 75 formed on the upper surface of the first flange 71 of the ultrasonic vibration plate 70 via the ring-shaped conductive sheet 33, and clamps the first flange 71 of the ultrasonic vibration plate 70 together with the second lower tube member 22 of the lower tube portion 20. The first terminal 31 then supplies high-frequency power to the first electrode 75 of the ultrasonic vibration plate 70 that is clamped between the upper tube portion 30 (first terminal 31) and the lower tube portion 20 in this manner.

[0041] The conductive sheet 33 is intended to improve adhesion between the first terminal 31 and the first electrode 75. In this embodiment, a first elastic member 314 made of, for example, conductive rubber is formed on a portion of the first terminal 31 that comes into contact with the first electrode 75 via the conductive sheet 33 (the lower end of the side wall 310 of the first terminal 31). That is, the first terminal 31 comes into contact with the first electrode 75 via the first elastic member 314 and the conductive sheet 33.

[0042] First terminal 31 is formed in a ring shape, and has a first male screw 311 (see FIG. 2) formed on the outer surface of side wall 310. This first male screw 311 is screwed onto the lower end of first female screw 217 formed on the inner surface of side wall 216 of first lower tube member 21, so that first terminal 31 can be fitted into first lower tube member 21 and fixed with its lower end in contact with first electrode 75. That is, first terminal 31 is screwed to lower tube portion 20 (first lower tube member 21). At the same time, ultrasonic vibration plate 70 is fixed to ring-shaped bottom plate 221 of second lower tube member 22 via first seal member 300.

[0043] 1 and 2, a first energizing screw 315 is attached to the upper surface of the first terminal 31. The first energizing screw 315 is connected to a high-frequency power source (not shown) via a wiring bush 18 attached to the upper part of a wiring cover 19 (described later), and supplies high-frequency power to the first terminal 31.

[0044] The first terminal 31 also has an insulating member 34 for insulating the first terminal 31 from the second terminal 32. The insulating member 34 is made of, for example, resin (PEEK), and as shown in Figures 2 and 3, has a cylindrical main body 340 and a flange 341 provided at the upper end of the main body 340. The flange 341 is a ring-shaped plate-shaped portion that protrudes outward beyond the main body 340, and has four through-holes 342 as shown in Figure 3.

[0045] As shown in Figures 1 and 2, the insulating member 34 is fitted from above into a step portion 316 provided on the inside of the side wall 310 of the first terminal 31, and is attached to the inside of the first terminal 31 by screwing a headed screw passing through a through hole 342 provided in the flange portion 341 into a female screw hole (not shown) formed in the first terminal 31 and screwing it onto the upper surface of the side wall 310.

[0046] 3, arc-shaped notches 343 are formed in the main body 340 and flange 341 of the insulating member 34. The notches 343 have a diameter larger than the diameter of the head of the first energized screw 315 and are provided to avoid interference between the insulating member 34 and the first energized screw 315. That is, the insulating member 34 is attached to the first terminal 31 so that the first energized screw 315 attached to the first terminal 31 fits within the notches 343. Note that the first energized screw 315 may be attached to the first terminal 31 after the insulating member 34 is attached to the first terminal 31.

[0047] The second terminal 32 is in contact with a second electrode 77 formed on the upper surface of the second flange 72 of the ultrasonic vibration plate 70, and holds the second flange 72 together with the second lower tube member 22 of the lower tube portion 20. The second terminal 32 supplies high-frequency power to the second electrode 77 of the ultrasonic vibration plate 70 that is held between the upper tube portion 30 (second terminal 32) and the lower tube portion 20 in this manner.

[0048] In this embodiment, a second elastic member 324 made of, for example, conductive rubber is formed on the second terminal 32 at a contact portion with the second electrode 77 (at the lower end of the side wall 320 of the second terminal 32). That is, the second terminal 32 is in contact with the second electrode 77 via the second elastic member 324.

[0049] The second terminal 32 has a second male screw 321 (see FIG. 2) on the outer surface of the side wall 320, and this second male screw 321 is screwed into a second female screw 313 formed on the inner wall of the main body 340 of the insulating member 34 attached to the first terminal 31, so that the second terminal 32 can be fitted into the insulating member 34 of the first terminal 31 and fixed with its lower end in contact with the second electrode 77. In other words, the second terminal 32 is screwed into the insulating member 34 of the first terminal 31.

[0050] A conductive sheet similar to the conductive sheet 33 may be disposed between the second elastic member 324 of the second terminal 32 and the second electrode 77.

[0051] 1 and 2, the second terminal 32 has a top plate 323 with an opening 322 in the center, and a second energizing screw 325 is attached to the top plate 323. The second energizing screw 325 is connected to a high-frequency power supply (not shown) via a wiring bushing 18 attached to the top of the wiring cover 19, and supplies high-frequency power to the second terminal 32. Therefore, the second terminal 32 is connected to the high-frequency power supply via the second energizing screw 325, and as described above, the first terminal 31 is connected to the high-frequency power supply via the first energizing screw 315, and high-frequency power can be supplied from the high-frequency power supply to the first electrode 75 and the second electrode 77 of the ultrasonic vibration plate 70.

[0052] The wiring cover 19 has a generally lidded cylindrical shape and is fixed to the cylindrical portion 13 so as to close the upper part of the cylindrical portion 13. That is, a third male screw 191 (see FIG. 2) is formed in a lower part of a side wall 190 of the wiring cover 19. This third male screw 191 is screwed onto the upper end side of a first female screw 217 formed in the side wall 216 of the first lower cylindrical member 21 of the lower cylindrical portion 20 of the cylindrical portion 13, so that the wiring cover 19 can be fitted and fixed to the cylindrical portion 13 (first lower cylindrical member 21) via a second seal member 301 made of an O-ring. An opening 193 is formed in the top plate 192 of the wiring cover 19, and the above-mentioned wiring bush 18 is screwed into this opening 193.

[0053] In the above embodiment, the second terminal 32 has a second male screw 321, the insulating member 34 has a through hole 342, and the first terminal 31 has a female screw hole (not shown) so that the three components, the first terminal 31, the second terminal 32, and the insulating member 34, are integrated into one unit, but these three components may also be formed as one unit.

[0054] In addition, in the above embodiment, the first male screw 311 of the first terminal 31 is screwed into the first female screw 217 of the first lower tube member 21 to fix the ultrasonic vibration plate 70, but the first terminal 31 may not be formed with the first male screw 311. In that case, for example, the lower end of the side wall 190 of the wiring cover 19 screwed onto the first lower tube member 21 presses the first terminal 31, thereby fixing the first terminal 31 and the ultrasonic vibration plate 70.

[0055] Furthermore, in the above description, ultrasonic vibration plate 70 is sandwiched between first terminal 31 and second lower tube member 22 and fixed to second lower tube member 22, but ultrasonic vibration plate 70 may be fixed to second lower tube member 22 without using first terminal 31. For example, a female thread may be formed on the inner surface of second lower tube member 22, and a ring screw (not shown) may be threaded into the female thread below first terminal 31 to fix only ultrasonic vibration plate 70.

[0056] 1, the ultrasonic water jetting device 1 has a control unit 7. The control unit 7 includes a CPU that performs calculations according to a program, and a storage medium such as a memory. The control unit 7 controls the ultrasonic water jetting operation of the ultrasonic water jetting device 1.

[0057] The ultrasonic water jetting operation of the ultrasonic water jetting device 1 will be described below. When spraying ultrasonic water, the control unit 7 first starts sending water 500 from the water supply source 100. The water 500 passes through the water supply pipe 16 and is supplied to the ring water channel 82 via the supply port 81 of the water supply unit 80. The water 500 supplied to the ring water channel 82 spreads around the entire circumference of the ring water channel 82. The water 500 is then supplied from the ring flow path 83 into the second chamber 12 and stored therein.

[0058] Specifically, as shown by arrow 501 in Figure 1, water 500 supplied from ring flow channel 83 flows along the surface of dome portion 73 of ultrasonic vibration plate 70, from the outer periphery of dome portion 73 toward the center, and is supplied to and stored in second chamber 12.

[0059] Then, within the second chamber 12, a portion of the water 500 forms a vortex within the second chamber 12, while another portion of the water 500 flows down toward the nozzle 17 and is sprayed downward from the nozzle 17, as shown by the arrow 503. It should be noted that the amount of water 500 in the second chamber 12 is maintained at a predetermined amount by continuously supplying the predetermined amount of water 500 from the water supply source 100.

[0060] At this time, the control unit 7 also causes the ultrasonic water obtained by propagating ultrasonic vibrations through the water 500 to be jetted from the jet nozzle 17. Specifically, the control unit 7 controls a high-frequency power supply (not shown) to supply high-frequency power to the first electrode 75 and the second electrode 77 of the ultrasonic diaphragm 70 via the first and second energizing screws 315 and 325 and the first and second terminals 31 and 32 of the upper cylinder portion 30. As a result, the control unit 7 generates an expansion and contraction movement in the up and down direction in the dome portion 73 of the ultrasonic diaphragm 70. This expansion and contraction movement then becomes mechanical ultrasonic vibration of the dome portion 73.

[0061] As a result, ultrasonic vibrations are propagated from the dome portion 73 of the ultrasonic vibration plate 70 to the water 500 temporarily stored in the second chamber 12 of the case 10, which serves as a water reservoir. The ultrasonic vibrations propagated to the water 500 are concentrated toward the nozzle 17. That is, a focal point of the ultrasonic vibrations is formed in the vicinity of the nozzle 17. Then, due to this propagation of ultrasonic vibrations, ultrasonic water, which is water through which the ultrasonic vibrations have propagated, is sprayed outward from the nozzle 17 of the nozzle portion 14.

[0062] As described above, in this embodiment, the first flange 71 and the second flange 72 of the ultrasonic vibration plate 70 are sandwiched between the first terminal 31 and the second terminal 32 of the upper cylinder portion 30 and the second lower cylinder member 22 of the lower cylinder portion 20, thereby holding the ultrasonic vibration plate 70 in the case 10. The first terminal 31 and the second terminal 32 are configured to contact the first electrode 75 and the second electrode 77 of the ultrasonic vibration plate 70 and supply high-frequency power thereto.

[0063] That is, in this embodiment, the first terminal 31 and the second terminal 32 serve both as a member for holding the ultrasonic vibration plate 70 and as a member for supplying power to the first electrode 75 and the second electrode 77 of the ultrasonic vibration plate 70, and are in surface contact with the first electrode 75 and the second electrode 77. This eliminates the need for wiring connections by soldering to the first electrode 75 and the second electrode 77 in this embodiment. Therefore, even if the high-frequency power supplied to the first electrode 75 and the second electrode 77 of the ultrasonic vibration plate 70 increases and the amplitude of the dome portion 73 of the ultrasonic vibration plate 70 increases, the solder on the wiring does not peel off.

[0064] For example, when ultrasonic water is sprayed to clean wafers after processing, the power supplied to the first electrode 75 and the second electrode 77 is 30 W to 50 W, and the amplitude of the dome portion 73 of the ultrasonic vibration plate 70 is 0.05 μm to 0.1 μm. On the other hand, when ultrasonic water is sprayed to peel wafers from an ingot, the power supplied to the first electrode 75 and the second electrode 77 is 100 W to 200 W, and the amplitude of the dome portion 73 is 0.2 μm to 0.4 μm.

[0065] In this embodiment, even when the amplitude of the dome portion 73 becomes large in this manner, peeling of the solder on the wiring of the first electrode 75 and the second electrode 77 does not occur, and therefore it is possible to prevent a failure in the supply of high frequency power to the first electrode 75 and the second electrode 77. Therefore, it is possible to supply high frequency power to the first electrode 75 and the second electrode 77 satisfactorily. Furthermore, since soldering wiring connections are not required, the ultrasonic water jetting device 1 can be easily assembled, and the ultrasonic vibration plate 70 can be easily replaced.

[0066] In addition, in this embodiment, first terminal 31 in contact with first electrode 75 is screwed to lower cylinder portion 20 (first lower cylinder member 21), and second terminal 32 in contact with second electrode 77 is screwed to first terminal 31. Therefore, first terminal 31 and second terminal 32 are in firm contact with first electrode 75 and second electrode 77, so that first terminal 31 and second terminal 32 can be prevented from separating from first electrode 75 and second electrode 77 even when the amplitude of ultrasonic vibration plate 70 increases.

[0067] Furthermore, the first terminal 31 has a first elastic member 314 at a contact point with the first electrode 75, and the second terminal 32 has a second elastic member 324 at a contact point with the second electrode 77. Therefore, the first terminal 31 and the second terminal 32 can come into contact with the first electrode 75 and the second electrode 77 while elastically pressing them. This makes it possible to increase the adhesion (pressing force) between the first terminal 31 and the second terminal 32 and the first electrode 75 and the second electrode 77.

[0068] Note that both first terminal 31 and second terminal 32 may include an elastic member as in this embodiment, or either first terminal 31 or second terminal 32 may include an elastic member. In other words, it is preferable that at least one of first terminal 31 and second terminal 32 includes an elastic member.

[0069] Furthermore, the portions of first terminal 31 and second terminal 32 that contact the electrodes do not need to be elastic members. For example, first terminal 31 and second terminal 32 may have springs therein as elastic members for pressing the electrodes. Even in this case, the adhesion (pressing force) between first terminal 31 and second terminal 32 and first electrode 75 and second electrode 77 can be improved. [Explanation of symbols]

[0070] 1: ultrasonic water injection device, 7: control unit, 10: case, 11: first chamber, 12: second chamber, 13: cylindrical portion, 14: nozzle portion, 16: water supply pipe, 17: jet nozzle, 18: Wiring bushing, 19: Wiring cover, 20: Lower cylinder portion, 21: First lower cylinder member, 22: second lower cylinder member, 30: upper cylinder portion, 31: first terminal, 32: second terminal, 33: conductive sheet, 34: insulating member, 70: ultrasonic vibration plate, 71: first flange portion, 72: second flange portion, 73: dome portion, 75: first electrode, 76: insulating portion, 77: second electrode, 80: water supply portion, 81: supply port, 82: ring water channel, 83: ring flow channel, 100: water supply source, 190: side wall, 191: third male screw, 192: top plate, 193: opening, 210: inner wall tube, 211: outer wall, 212: inner wall, 213: first stage portion, 215: bottom plate, 216: side wall, 217: first female screw, 220: opening, 221: bottom plate, 300: first seal member, 301: second seal member, 310: side wall, 311: first male screw, 313: second female screw, 314: first elastic member, 315: first conductive screw, 316: step portion, 320: side wall, 321: second male screw, 322: opening, 323: top plate, 324: second elastic member, 325: second conductive screw, 340: Main body, 341: Flange, 342: Through hole, 343: Notch, 500: Water

Claims

1. An ultrasonic water jetting device that jets ultrasonic water by propagating ultrasonic vibrations, a water reservoir that temporarily stores water supplied from a water supply source; an injection port for injecting the water from a lower portion of the water reservoir; an ultrasonic vibration plate disposed above the water reservoir opposite the injection port and configured to propagate ultrasonic vibrations to the water stored in the water reservoir; a supply port for supplying water to the water reservoir; Equipped with The ultrasonic vibration plate includes a ring-shaped first electrode arranged on an outer periphery of the ultrasonic vibration plate, a ring-shaped insulating part arranged inside the first electrode, and a ring-shaped second electrode arranged inside the insulating part, The water reservoir is formed by the ultrasonic vibration plate and a cylindrical portion that holds the ultrasonic vibration plate, The cylindrical portion is a lower cylinder portion having the injection port and supporting the lower surface of the outer periphery of the ultrasonic vibration plate; an upper cylinder portion disposed opposite the lower cylinder portion so as to contact the upper surface of the outer circumferential portion of the ultrasonic vibration plate and sandwich the ultrasonic vibration plate together with the lower cylinder portion; The upper cylindrical portion is a ring-shaped first terminal for supplying high-frequency power to the first electrode of the ultrasonic vibration plate sandwiched between the upper and lower cylindrical portions; a ring-shaped second terminal for supplying high-frequency power to the second electrode of the ultrasonic vibration plate; Ultrasonic water injection device.

2. At least one of the first terminal and the second terminal includes an elastic member.

2. The ultrasonic water jetting device of claim 1.

3. the second terminal is screwed to the first terminal; The first terminal is screwed to the lower tube portion.

3. The ultrasonic water jetting device according to claim 1 or 2.

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