Processing system and robot system

Abstract

To provide a processing system that appropriately controls a relative positional relationship between an object and a member used for performing processing on the object.SOLUTION: The processing system includes a branching optical system configured to branch measurement light into first light traveling in a first optical path and second light traveling in a second optical path, an irradiation optical system configured to irradiate a surface of an object with processing light and the second light, a position changing device configured to change a relative positional relationship between the object and the irradiation optical system, a detection device configured to detect interference light between the first light and third light traveling in a third optical path out of light generated by the second light with which the surface of the object is irradiated, and a control device configured to control the position changing device by using an output from the detection device.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to the technical field of processing systems and robot systems that perform processing on objects. [Background technology]

[0002] An example of a processing system that processes an object is a processing system that can process the object. For example, Patent Document 1 describes a processing system that forms a structure by irradiating the surface of an object with processing light. This type of processing system requires appropriate control of the relative positional relationship between the object and a member used to process the object. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Patent No. 4,994,639 Summary of the Invention

[0004] According to a first aspect, there is provided a processing system for processing an object by irradiating processing light from a processing light source onto at least a portion of the object, the processing system comprising: a branching optical system that branches measurement light from a measurement light source into a first light traveling through a first optical path and a second light traveling through a second optical path; an irradiation optical system that irradiates the processing light onto the surface of the object and irradiates the second light onto the surface of the object; a position changing device that changes the relative positional relationship between the object and the irradiation optical system; a detection device that detects interference light between the first light and a third light traveling through a third optical path among the light generated by the second light irradiated onto the surface of the object; and a control device that controls the position changing device using output from the detection device.

[0005] According to a second aspect, there is provided a processing system for processing an object by irradiating processing light from a processing light source onto at least a portion of the object, the processing system comprising: a branching optical system that branches measurement light from a measurement light source into a first light traveling through a first optical path and a second light traveling through a second optical path; an irradiation optical system that irradiates the processing light onto at least a portion of the surface of the object and irradiates the second light onto the surface of the object; a position changing device that changes the relative positional relationship between the object and the focusing position of the processing light; a detection device that detects interference light between the first light and a third light traveling through a third optical path among the light generated by the second light irradiated onto the surface of the object; and a control device that controls the position changing device using output from the detection device.

[0006] According to a third aspect, there is provided a processing system that performs at least one of processing using an acting member that acts on an object and processing using an acquisition member that acquires information about the object, the processing system comprising: a branching optical system that branches measurement light from a measurement light source into a first light that travels through a first optical path and a second light that travels through a second optical path; an irradiation optical system that irradiates the second light onto the surface of the object; a detection device that detects interference light between the first light and a third light that travels through a third optical path among the light generated by the second light irradiated onto the surface of the object; a position changing device that changes the relative positional relationship between the object and at least one of the acting member and the acquisition member; and a control device that controls the position changing device using output from the detection device. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a cross-sectional view schematically showing the overall structure of a processing system according to a first embodiment. [Figure 2] FIG. 2 is a system configuration diagram showing the system configuration of the machining system according to the first embodiment. [Figure 3] FIG. 3 is a cross-sectional view showing the structure of the machining head of the first embodiment. [Figure 4] FIG. 4 is a timing chart showing the measurement light incident on the detector and the interference light detected by the detector. [Figure 5] FIG. 5 is a cross-sectional view showing the structure of the head drive system. [Figure 6] FIG. 6 is a cross-sectional view showing the structure of a second drive system included in the head drive system. [Figure 7] FIG. 7(a) is a plan view showing a plurality of irradiated regions on a workpiece, and FIG. 7(b) is a perspective view showing a plurality of irradiated regions on a workpiece. [Figure 8] 8(a) and 8(b) are cross-sectional views showing a machining head and a workpiece whose positional relationship is controlled so that the distances between a plurality of irradiated regions and the machining head are the same. [Figure 9] FIG. 9 is a cross-sectional view showing a processed region where removal processing has been performed and an unprocessed region where removal processing has not been performed. [Figure 10] FIG. 10 is a cross-sectional view showing a workpiece and a machining head whose positional relationship is controlled so that the distance between the machined area and the machining head is the same as the distance between the unmachined area and the machining head. [Figure 11] FIG. 11 is a cross-sectional view showing a processed area where additional processing has been performed and an unprocessed area where additional processing has not been performed. [Figure 12] FIG. 12 is a cross-sectional view showing a workpiece and a machining head whose positional relationship is controlled so that the distance between the machined area and the machining head is the same as the distance between the unmachined area and the machining head. [Figure 13] FIG. 13 is a plan view showing a plurality of irradiated areas on a workpiece. [Figure 14] FIG. 14 is a plan view showing a plurality of irradiated areas on a workpiece. [Figure 15] FIG. 15 is a plan view showing an example of a movement locus of the target irradiation area of ​​the measurement light. [Figure 16] FIG. 16 is a plan view showing an example of the positional relationship between the target shot area and the measurement shot area. [Figure 17] FIG. 17 is a plan view showing a workpiece being irradiated with processing light. [Figure 18]FIG. 18(a) is a top view showing an example of a workpiece, and FIG. 18(b) is a perspective view showing an example of a workpiece. [Figure 19] FIG. 19 is a plan view showing a plurality of irradiated areas on a workpiece when the third alignment operation is performed. [Figure 20] FIG. 20 is a plan view showing a workpiece on which alignment marks are formed. [Figure 21] FIG. 21 is a cross-sectional view schematically showing the overall structure of the processing system of the second embodiment. [Figure 22] FIG. 22 is a cross-sectional view showing an example of the structure of a processing device equipped with an end effector. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, embodiments of a processing system, a robot system, a control device, and a computer program will be described with reference to the drawings. Hereinafter, embodiments of a processing system, a robot system, a control device, and a computer program will be described using a processing system SYS that processes a workpiece W using processing light EL (i.e., performs processing on the workpiece W). However, the present invention is not limited to the embodiments described below.

[0009] In the following description, the positional relationships of the various components that make up the machining system SYS will be explained using an XYZ Cartesian coordinate system defined by mutually orthogonal X, Y, and Z axes. For ease of explanation, the X-axis and Y-axis directions are assumed to be horizontal (i.e., predetermined directions within a horizontal plane), and the Z-axis direction is assumed to be vertical (i.e., a direction perpendicular to the horizontal plane, essentially an up-and-down direction). The rotation directions around the X-axis, Y-axis, and Z-axis (in other words, tilt directions) are referred to as the θX direction, θY direction, and θZ direction, respectively. Here, the Z-axis direction may be the direction of gravity. The XY plane may also be assumed to be horizontal.

[0010] (1) Machining system SYSa of the first embodiment First, a machining system SYS of a first embodiment (hereinafter, the machining system SYS of the first embodiment will be referred to as a "machining system SYSa") will be described.

[0011] (1-1) Structure of the processing system SYSa First, the structure of the machining system SYSa of the first embodiment will be described with reference to Figures 1 and 2. Figure 1 is a cross-sectional view schematically showing the structure of the machining system SYSa of the first embodiment. Figure 2 is a system configuration diagram showing the system configuration of the machining system SYSa of the first embodiment.

[0012] 1 and 2, the processing system SYSa includes a processing device 1, a stage device 3, and a control device 5. The processing device 1 and the stage device 3 are housed in a housing 4. However, the processing device 1 and the stage device 3 do not have to be housed in the housing 4. In other words, the processing system SYSa does not have to include a housing 4 that houses the processing device 1 and the stage device 3.

[0013] The processing device 1 is capable of processing the workpiece W under the control of the control device 5. The processing device 1 is capable of performing processing on the workpiece W under the control of the control device 5. The workpiece W may be, for example, a metal, an alloy (for example, duralumin, etc.), a semiconductor (for example, silicon), a resin (for example, CFRP (Carbon Fiber Reinforced Plastic) or paint (for example, a paint layer applied to a base material), etc.), glass, or an object made of any other material.

[0014] The processing device 1 irradiates the workpiece W with processing light EL in order to process the workpiece W. The processing light EL may be any type of light as long as it can process the workpiece W when irradiated onto the workpiece W. In the first embodiment, the processing light EL is explained using an example in which the processing light EL is laser light, but the processing light EL may be a type of light other than laser light. Furthermore, the wavelength of the processing light EL may be any wavelength as long as it can process the workpiece W when irradiated onto the workpiece W. For example, the processing light EL may be visible light or invisible light (e.g., at least one of infrared light and ultraviolet light). The processing light EL includes pulsed light, but may not include pulsed light. In other words, the processing light EL may be continuous light.

[0015] The processing device 1 may irradiate the workpiece W with processing light EL to perform a removal process (typically, a cutting process or a grinding process) that removes a portion of the workpiece W. When performing a removal process, the processing device 1 may form a riblet structure on the workpiece W. The riblet structure is a structure that can reduce the resistance (particularly, frictional resistance and turbulent frictional resistance) of the surface of the workpiece W to a fluid. The riblet structure may include, for example, a structure in which grooves extending in a first direction (e.g., the Y-axis direction) along the surface of the workpiece W are arranged in a plurality of rows along a second direction (e.g., the X-axis direction) that is along the surface of the workpiece W and intersects the first direction. When the workpiece W includes a substrate and a coating film (paint layer) applied to the surface of the substrate, the processing device 1 may remove a portion of the coating film so that the substrate is not exposed from the coating film, thereby forming a riblet structure on the surface of the substrate that is composed of the remaining coating film that is not removed.

[0016] In addition to or instead of the subtractive processing, the processing device 1 may perform additional processing, which adds a new structure to the workpiece W, by irradiating the workpiece W with processing light EL. In this case, the processing device 1 may perform additional processing to form the above-mentioned riblet structure on the surface of the workpiece W. In addition to or instead of at least one of the subtractive processing and the additional processing, the processing device 1 may perform marking processing, which forms a desired mark on the surface of the workpiece W by irradiating the workpiece W with processing light EL.

[0017] The processing device 1 can also measure the workpiece W under the control of the control device 5. The processing device 1 irradiates the workpiece W with measurement light ML in order to measure the workpiece W. The measurement light ML may be any type of light as long as it can measure the workpiece W when irradiated onto the workpiece W. In the first embodiment, an example will be described in which the measurement light ML is laser light, but the measurement light ML may be a type of light other than laser light. Furthermore, the wavelength of the measurement light ML may be any wavelength as long as it can measure the workpiece W when irradiated onto the workpiece W. For example, the measurement light ML may be visible light or invisible light (for example, at least one of infrared light and ultraviolet light). The measurement light ML includes pulsed light.

[0018] The wavelength of the measurement light ML may be different from the wavelength of the processing light EL. For example, the wavelength of the measurement light ML may be shorter than the wavelength of the processing light EL. As an example, light in the wavelength band of 266 nm or 355 nm may be used as the measurement light ML, and light in the wavelength band of 532 nm, 1 μm, or 10 μm may be used as the processing light EL. In this case, the spot diameter of the measurement light ML on the workpiece W is smaller than the spot diameter of the processing light EL on the workpiece W. As a result, the measurement resolution of the measurement light ML is higher than the processing resolution of the processing light EL. However, the wavelength of the measurement light ML does not have to be shorter than the wavelength of the processing light EL. The wavelength of the measurement light ML may be the same as the wavelength of the processing light EL.

[0019] The processing apparatus 1 may be capable of measuring the state of the workpiece W. The state of the workpiece W may include the position of the workpiece W. The position of the workpiece W may include the position of the surface of the workpiece W. The position of the surface of the workpiece W may include the position of each surface portion obtained by dividing the surface of the workpiece W in at least one of the X-axis direction, Y-axis direction, and Z-axis direction. The state of the workpiece W may include the distance D between the processing head 11 described below and the workpiece W. The distance D between the processing head 11 and the workpiece W may mean the distance in the direction along the Z-axis, which is the axis connecting the processing head 11 and the workpiece W. The distance D between the processing head 11 and the workpiece W is typically the distance between a reference portion of the processing head 11 and the surface of the workpiece W. The distance between the reference portion of the processing head 11 and the surface of the workpiece W may include the distance between the reference portion of the processing head 11 and each surface portion obtained by dividing the surface of the workpiece W. The state of the workpiece W may include the shape (e.g., three-dimensional shape) of the workpiece W. The shape of the workpiece W may include the shape of the surface of the workpiece W. The shape of the surface of the workpiece W may include, in addition to or instead of the position of the surface of the workpiece W described above, the orientation of each surface portion obtained by dividing the surface of the workpiece W (for example, the orientation of the normal to each surface portion, which is substantially equivalent to the amount of inclination of each surface portion with respect to at least one of the X-axis, Y-axis, and Z-axis). The state of the workpiece W may include the size of the workpiece W (for example, the size in at least one of the X-axis direction, Y-axis direction, and Z-axis direction).

[0020] In order to process and measure the workpiece W, the processing apparatus 1 includes a processing head 11 that emits a processing light EL and a measurement light ML toward the workpiece W, and a head drive system 12 that moves the processing head 11. The processing head 11 refers to any component capable of emitting the processing light EL and the measurement light ML toward the workpiece W. Therefore, although the processing head 11 includes the term "head," it does not necessarily refer to a component attached to the tip of another component. Therefore, the processing head 11 may also be referred to as a processing component. The processing head 11 can also be considered a device that performs processing on the workpiece W. The processing head 11 can also be considered a device that measures the workpiece W. Furthermore, the processing head 11 includes a processing light source 111, a processing optical system 112, a measurement light source 113, a measurement optical system 114, a composite optical system 115, and a common optical system 116. The structures of the processing head 11 and the head drive system 12 will be described in detail later with reference to FIGS. 3 to 6. However, the processing head 11 may have any structure as long as it is capable of emitting each of the processing light EL and the measurement light ML toward the workpiece W. The processing head 11 does not have to include at least one of the processing light source 111, the processing optical system 112, the measurement light source 113, the measurement optical system 114, the composite optical system 115, and the common optical system 116, as long as it is capable of emitting each of the processing light EL and the measurement light ML toward the workpiece W.

[0021] The head drive system 12 moves the machining head 11 along at least one of the X-axis direction, Y-axis direction, Z-axis direction, θX direction, θY direction, and θZ direction. When the machining head 11 moves, the positional relationship between the machining head 11 and a stage 32 (described later) (and further, a workpiece W placed on the stage 32) changes. In other words, when the machining head 11 moves, the relative positions of the stage 32, the workpiece W, and the machining head 11 change. Therefore, moving the machining head 11 may be considered equivalent to changing the positional relationship between the stage 32, the workpiece W, and the machining head 11. Furthermore, when the positional relationship between the stage 32, the workpiece W, and the machining head 11 changes, the positional relationship between the stage 32, the workpiece W, and each optical system included in the machining head 11 (i.e., at least one of the machining optical system 112, the measurement optical system 114, the composite optical system 115, and the common optical system 116) changes. Therefore, moving the machining head 11 may be considered equivalent to changing the positional relationship between the stage 32, the workpiece W, and each optical system included in the machining head 11. Furthermore, when the positional relationship between the stage 32, workpiece W, and machining head 11 changes, the positional relationship between the stage 32, workpiece W, and housing 117 of the machining head 11 changes. Therefore, moving the machining head 11 may be considered equivalent to changing the positional relationship between the stage 32, workpiece W, and housing 117 of the machining head 11. Furthermore, when the positional relationship between the stage 32, workpiece W, and machining head 11 changes, the positions on the workpiece W of the target irradiation area EA and target irradiation area MA set on the workpiece W change. The target irradiation area EA is an area onto which the machining head 11 is scheduled to irradiate the processing light EL. The target irradiation area MA is an area onto which the machining head 11 is scheduled to irradiate the measurement light ML. Therefore, moving the machining head 11 may be considered equivalent to changing the positions of the target irradiation area EA and target irradiation area MA on the workpiece W. Furthermore, when the positional relationship between the stage 32, workpiece W, and machining head 11 changes, the irradiation positions onto which the processing light EL and measurement light ML are actually irradiated on the workpiece W change. Therefore, moving the processing head 11 may be considered to be equivalent to changing the irradiation positions on the workpiece W of the processing light EL and the measurement light ML.

[0022] The stage device 3 includes a base plate 31 and a stage 32. The base plate 31 is placed on the bottom surface of the housing 4 (or on a support surface such as a floor on which the housing 4 is placed). The stage 32 is placed on the base plate 31. A vibration isolation device (not shown) may be installed between the base plate 31 and the bottom surface of the housing 4 or a support surface such as a floor on which the housing 4 is placed. Furthermore, a support frame (not shown) that supports the processing device 1 may be placed on the base plate 31.

[0023] A workpiece W is placed on the stage 32. The stage 32 may hold the placed workpiece W. For example, the stage 32 may hold the workpiece W by vacuum suction and / or electrostatic suction. Alternatively, the stage 32 may not hold the placed workpiece W.

[0024] The stage 32, with the workpiece W placed thereon, can move over the base plate 31 under the control of the control device 5. The stage 32 can move relative to at least one of the base plate 31 and the processing device 1. The stage 32 can move along both the X-axis direction and the Y-axis direction. In this case, the stage 32 can move along a stage running plane (movement plane) parallel to the XY plane. The stage 32 may also be movable along at least one of the Z-axis direction, the θX direction, the θY direction, and the θZ direction. To move the stage 32, the stage device 3 includes a stage drive system 33. The stage drive system 33 moves the stage 32 using, for example, any motor (e.g., a linear motor, etc.). Furthermore, the stage device 3 may include a stage position measurement device for measuring the position of the stage 32. The stage position measurement device may include, for example, at least one of an encoder and a laser interferometer.

[0025] When the stage 32 moves, the positional relationship between the stage 32 (and further, the workpiece W placed on the stage 32) and the machining head 11 changes. In other words, when the stage 32 moves, the relative positions of the machining head 11, the stage 32, and the workpiece W change. Therefore, moving the stage 32 may be considered equivalent to changing the positional relationship between the stage 32, the workpiece W, and the machining head 11. Furthermore, when the positional relationship between the stage 32, the workpiece W, and the machining head 11 changes, the positional relationship between the stage 32, the workpiece W, and each optical system provided in the machining head 11 changes. Therefore, moving the stage 32 may be considered equivalent to changing the positional relationship between the stage 32, the workpiece W, and each optical system provided in the machining head 11. Furthermore, when the positional relationship between the stage 32, the workpiece W, and the machining head 11 changes, the positional relationship between the stage 32, the workpiece W, and the housing 117 of the machining head 11 changes. Therefore, moving the stage 32 may be considered equivalent to changing the positional relationship between the stage 32, the workpiece W, and each housing 117 of the machining head 11. Furthermore, when the positional relationship between the stage 32, the workpiece W, and the machining head 11 changes, the positions of the target irradiation area EA and the target irradiation area MA on the workpiece W change. Therefore, moving the stage 32 may be considered equivalent to changing the positions of the target irradiation area EA and the target irradiation area MA on the workpiece W. Furthermore, when the positional relationship between the stage 32, the workpiece W, and the machining head 11 changes, the irradiation positions on the workpiece W where the processing light EL and the measurement light ML are actually irradiated change. Therefore, moving the stage 32 may be considered equivalent to changing the irradiation positions on the workpiece W where the processing light EL and the measurement light ML are irradiated.

[0026] The control device 5 controls the operation of the machining system SYSa. For example, the control device 5 sets machining conditions for the workpiece W and controls the machining device 1 and the stage device 3 so that the workpiece W is machined in accordance with the set machining conditions. For example, the control device 5 sets measurement conditions for the workpiece W and controls the machining device 1 and the stage device 3 so that the workpiece W is measured in accordance with the set measurement conditions.

[0027] The control device 5 may include, for example, an arithmetic device and a storage device. The arithmetic device may include, for example, at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The control device 5 functions as a device that controls the operation of the machining system SYSa by the arithmetic device executing a computer program. This computer program is a computer program for causing the control device 5 (e.g., the arithmetic device) to perform (i.e., execute) the operations to be performed by the control device 5, which will be described later. In other words, this computer program is a computer program for causing the control device 5 to function so as to cause the machining system SYSa to perform the operations to be performed later. The computer program executed by the arithmetic device may be recorded in a storage device (i.e., a recording medium) included in the control device 5, or may be recorded in any storage medium (e.g., a hard disk or semiconductor memory) built into or externally attachable to the control device 5. Alternatively, the arithmetic device may download the computer program to be executed from a device external to the control device 5 via a network interface.

[0028] The control device 5 does not have to be provided inside the machining system SYSa, and may be provided, for example, as a server outside the machining system SYSa. In this case, the control device 5 and the machining system SYSa may be connected via a wired and / or wireless network (or a data bus and / or a communication line). The wired network may be a network using a serial bus interface, such as at least one of IEEE1394, RS-232x, RS-422, RS-423, RS-485, and USB. The wired network may be a network using a parallel bus interface. The wired network may be a network using an interface compliant with Ethernet (registered trademark), such as at least one of 10BASE-T, 100BASE-TX, and 1000BASE-T. The wireless network may be a network using radio waves. An example of a network using radio waves is a network compliant with IEEE802.1x (for example, at least one of wireless LAN and Bluetooth (registered trademark)). The wireless network may be an infrared network. A network using optical communication may be used as the wireless network. In this case, the control device 5 and the machining system SYSa may be configured to be able to send and receive various information via the network. The control device 5 may also be able to send information such as commands and control parameters to the machining system SYSa via the network. The machining system SYSa may also include a receiving device that receives information such as commands and control parameters from the control device 5 via the network. Alternatively, a first control device that performs part of the processing performed by the control device 5 may be provided inside the machining system SYSa, while a second control device that performs another part of the processing performed by the control device 5 may be provided outside the machining system SYSa.

[0029] The recording medium for recording the computer program executed by the arithmetic unit may be at least one of a CD-ROM, CD-R, CD-RW, flexible disk, optical disk such as MO, DVD-ROM, DVD-RAM, DVD-R, DVD+R, DVD-RW, DVD+RW, and Blu-ray (registered trademark), magnetic medium such as magnetic tape, magneto-optical disk, semiconductor memory such as USB memory, and any other medium capable of storing a program. The recording medium may also include a device capable of recording the computer program (e.g., a general-purpose device or a dedicated device in which the computer program is implemented in an executable state in at least one of software and firmware). Furthermore, each process or function included in the computer program may be realized by a logical processing block realized within the control device 5 (i.e., a computer) when the control device 5 executes the computer program, or by hardware such as a predetermined gate array (FPGA, ASIC) included in the control device 5, or may be realized in a form in which the logical processing block and a partial hardware module that realizes some of the hardware elements are mixed.

[0030] (1-2) Structure of the processing head 11 Next, an example of the structure of the processing head 11 will be described with reference to Fig. 3. Fig. 3 is a cross-sectional view showing an example of the structure of the processing head 11.

[0031] 3, the processing head 11 includes a processing light source 111, a processing optical system 112, a measurement light source 113, a measurement optical system 114, a composite optical system 115, and a common optical system 116. The processing light source 111, the processing optical system 112, the measurement light source 113, the measurement optical system 114, the composite optical system 115, and the common optical system 116 are housed in a housing 117. However, at least one of the processing light source 111, the processing optical system 112, the measurement light source 113, the measurement optical system 114, the composite optical system 115, and the common optical system 116 does not have to be housed in the housing 117.

[0032] Because the processing head 11 is equipped with each optical system (that is, because each optical system is disposed in the processing head 11), each optical system is disposed at a fixed position relative to the processing head 11 (for example, relative to the housing 117). In other words, as the head drive system 12 moves the processing head 11, each optical system also moves in the same manner as the processing head 11 (for example, the housing 117).

[0033] The processing light source 111 is capable of generating processing light EL. When the processing light EL is laser light, the processing light source 111 may include, for example, a laser diode. Furthermore, the processing light source 111 may be a light source capable of pulse oscillation. In this case, the processing light source 111 is capable of generating pulsed light (for example, pulsed light having an emission time of picoseconds or less) as the processing light EL. The processing light source 111 emits the generated processing light EL toward the processing optical system 112.

[0034] The processing optical system 112 is an optical system into which the processing light EL emitted from the processing light source 111 is incident. The processing optical system 112 is an optical system that emits the processing light EL that has entered the processing optical system 112 toward the combining optical system 115. In other words, the processing optical system 112 is an optical system that guides the processing light EL emitted from the processing light source 111 to the combining optical system 115. The processing light EL emitted by the processing optical system 112 is irradiated onto the workpiece W via the combining optical system 115 and the common optical system 116. For this reason, the processing optical system 112 can also be said to be an optical system that emits (irradiates) the processing light EL toward the workpiece W via the combining optical system 115 and the common optical system 116.

[0035] The processing optical system 112 includes a position adjustment optical system 1121, an angle adjustment optical system 1122, and a focus adjustment optical system 1123. The position adjustment optical system 1121 can adjust the emission position of the processing light EL from the processing optical system 112. The position adjustment optical system 1121 may include, for example, a parallel plane plate that can be tilted with respect to the traveling direction of the processing light EL, and the emission position of the processing light EL may be changed by changing the tilt angle of the parallel plane plate. In the example of FIG. 3 , the position adjustment optical system 1121 can set the emission position of the processing light EL to any position within the YZ plane using multiple parallel plane plates with different tilt directions. Changing the emission position of the processing light EL from the processing optical system 112 changes the incident angle of the processing light EL (e.g., the incident angle with respect to the workpiece W). The angle adjustment optical system 1122 can adjust the emission angle of the processing light EL from the processing optical system 112. The angle adjustment optical system 1122 may include, for example, a mirror that can be tilted with respect to the traveling direction of the processing light EL, and the exit angle of the processing light EL may be changed by changing the tilt angle of this mirror. In the example of FIG. 3, the angle adjustment optical system 1122 uses multiple mirrors with different tilt directions to set the exit angle of the processing light EL to any angle at which the processing light EL exits in any direction around the θX axis and the θY axis. Changing the exit angle of the processing light EL from the processing optical system 112 changes the irradiation position of the processing light EL (e.g., the irradiation position on the workpiece W). The focus adjustment optical system 1123 can adjust (typically change) the focusing position of the processing light EL. Therefore, the focus adjustment optical system 1123 functions as a focus changing member that can adjust the focusing position of the processing light EL. The focus adjustment optical system 1123 includes multiple lenses, at least one of which is movable along the optical axis. The focus adjustment optical system 1123 adjusts the focusing position of the processing light EL in the optical axis direction relative to the surface of the workpiece W by moving at least one lens. Specifically, the focus adjustment optical system 1123 adjusts the focus position of the processing light EL relative to the surface of the workpiece W in a direction along the optical axis AX of the fθ lens 1162 (in the example shown in Figure 3, this is the Z-axis direction, a direction intersecting the surface of the workpiece W) by moving at least one lens.The focus adjustment optical system 1123 may typically adjust the focus position of the processing light EL so that the focus position of the processing light EL is located on the surface of the workpiece W. However, the processing optical system 112 does not have to include at least one of the position adjustment optical system 1121, the angle adjustment optical system 1122, and the focus adjustment optical system 1123. The processing optical system 112 may include other optical elements or optical members (these may also be referred to as optical systems, the same applies hereinafter) in addition to or instead of at least one of the position adjustment optical system 1121, the angle adjustment optical system 1122, and the focus adjustment optical system 1123.

[0036] The processing light EL emitted from the processing optical system 112 enters the combining optical system 115. The combining optical system 115 includes a beam splitter (e.g., a polarizing beam splitter) 1151. The beam splitter 1151 emits the processing light EL incident on the beam splitter 1151 toward the common optical system 116. In the example shown in FIG. 3, the processing light EL incident on the beam splitter 1151 passes through a polarization separation surface and is thereby emitted toward the common optical system 116. Therefore, in the example shown in FIG. 3, the processing light EL enters the polarization separation surface of the beam splitter 1151 in a state having a polarization direction that can be transmitted through the polarization separation surface (a polarization direction that becomes p-polarized light with respect to the polarization separation surface).

[0037] The processing light EL emitted from the combining optical system 115 is incident on the common optical system 116. The common optical system 116 emits the processing light EL that has entered the common optical system 116 toward the workpiece W. The common optical system 116 includes a galvanometer mirror 1161 and an fθ lens 1162.

[0038] The processing light EL emitted from the combining optical system 115 is incident on the galvanometer mirror 1161. The galvanometer mirror 1161 deflects the processing light EL (i.e., changes the emission angle of the processing light EL) to change the irradiation position of the processing light EL on the workpiece W. In other words, by deflecting the processing light EL, the galvanometer mirror 1161 changes the position of the target irradiation area EA, which is set on the workpiece W or on the optical path of the processing light EL as the area to be irradiated with the processing light EL. Note that because the galvanometer mirror 1161 is disposed at or near the entrance pupil position of the fθ lens 1162, a change in the emission angle of the processing light EL caused by the galvanometer mirror 1161 is converted by the fθ lens 1162 into a change in the irradiation position of the processing light EL (i.e., the position of the target irradiation area EA). For example, the galvanometer mirror 1161 includes an X-scanning mirror 1161X and a Y-scanning mirror 1161Y. Each of the X scanning mirror 1161X and the Y scanning mirror 1161Y is a variable tilt angle mirror whose angle with respect to the optical path of the processing light EL incident on the galvanometer mirror 1161 is changed. The X scanning mirror 1161X deflects the processing light EL by swinging or rotating so as to change the irradiation position of the processing light EL on the workpiece W along the X axis direction (i.e., changing the angle of the X scanning mirror 1161X with respect to the optical path of the processing light EL). The Y scanning mirror 1161Y deflects the processing light EL by swinging or rotating so as to change the irradiation position of the processing light EL on the workpiece W along the Y axis direction (i.e., changing the angle of the Y scanning mirror 1161Y with respect to the optical path of the processing light EL).

[0039] The processing light EL from the galvanometer mirror 1161 is incident on the fθ lens 1162. For this reason, the galvanometer mirror 1161 is disposed on the optical path of the processing light EL between the combining optical system 115 and the fθ lens 1162. The fθ lens 1162 is disposed on the optical path of the processing light EL between the galvanometer mirror 1161 and the workpiece W. The fθ lens 1162 is disposed on the optical path of the processing light EL between the galvanometer mirror 1161 and the target irradiation area EA. The fθ lens 1162 is an optical system for irradiating the processing light EL from the galvanometer mirror 1161 onto the workpiece W. The fθ lens 1162 is an optical system for irradiating the processing light EL from the galvanometer mirror 1161 onto the target irradiation area EA. In particular, the fθ lens 1162 is an optical system for focusing the processing light EL from the galvanometer mirror 1161 onto the workpiece W. For this reason, the fθ lens 1162 irradiates the workpiece W with the converging processing light EL. As a result, the workpiece W is processed by the processing light EL. The fθ lens 1162 may be referred to as an irradiation optical system because it irradiates the workpiece W with the processing light EL (particularly, irradiates the surface of the workpiece W with the processing light EL). The range of movement of the target irradiation area EA that moves on the workpiece W due to the deflection of the processing light EL by the galvanometer mirror 1161 may be referred to as a processing shot area ESA (see FIG. 7, described later). In other words, the target irradiation area EA may be considered to move within the processing shot area ESA.

[0040] Next, the measurement light source 113 can generate the measurement light ML. If the measurement light ML is laser light, the measurement light source 113 may include, for example, a laser diode. In particular, since the measurement light ML includes pulsed light as described above, the measurement light source 113 is a light source capable of pulse oscillation. In this case, the measurement light source 113 can generate pulsed light (for example, pulsed light having an emission time of picoseconds or less) as the measurement light ML. The measurement light source 113 emits the generated measurement light ML toward the measurement optical system 114.

[0041] In the first embodiment, the measurement light source 113 includes an optical frequency comb light source. The optical frequency comb light source is a light source that can generate light including frequency components that are evenly spaced on the frequency axis (hereinafter referred to as an "optical frequency comb") as pulsed light. In this case, the measurement light source 113 emits pulsed light including frequency components that are evenly spaced on the frequency axis as measurement light ML. However, the measurement light source 113 does not have to include an optical frequency comb light source.

[0042] In the example shown in FIG. 1 , the processing head 11 includes a plurality of measurement light sources 113. For example, the processing head 11 includes a measurement light source 113#1 and a measurement light source 113#2. The plurality of measurement light sources 113 each emit a plurality of measurement light beams ML that are phase-synchronized and coherent with each other. For example, the plurality of measurement light sources 113 may have different oscillation frequencies. Therefore, the plurality of measurement light beams ML emitted by the plurality of measurement light sources 113 are measurement light beams ML with different pulse frequencies (e.g., the number of pulsed lights per unit time, which is the reciprocal of the emission period of the pulsed lights). As an example, the measurement light source 113#1 may emit measurement light beam ML#1 with a pulse frequency of 25 GHz, and the measurement light source 113#2 may emit measurement light beam ML#2 with a pulse frequency of 25 GHz+α (e.g., +100 kHz). However, the processing head 11 may include a single measurement light source 113.

[0043] The measurement optical system 114 is an optical system into which the measurement light ML emitted from the measurement light source 113 is incident. The measurement optical system 114 is an optical system that emits the measurement light ML incident on the measurement optical system 114 toward the combining optical system 115. In other words, the measurement optical system 114 is an optical system that guides the measurement light ML emitted from the measurement light source 113 to the combining optical system 115. The measurement light ML emitted by the measurement optical system 114 is irradiated onto the workpiece W via the combining optical system 115 and the common optical system 116. Therefore, it can also be said that the measurement optical system 114 is an optical system that emits the measurement light ML toward the workpiece W via the combining optical system 115 and the common optical system 116.

[0044] The measurement optical system 114 is optically separated from the processing optical system 112. Therefore, the optical path of the processing light EL between the processing light source 111 and the combining optical system 115 is optically separated from the optical path of the measurement light ML between the measurement light source 113 and the combining optical system 115. Note that optical separation between one optical system and another optical system may also mean that the optical path of one optical system and the optical path of another optical system do not overlap with each other.

[0045] The measurement optical system 114 includes, for example, a beam splitter 1141 , a beam splitter 1142 , a detector 1143 , a beam splitter 1144 , a mirror 1145 , a detector 1146 , a mirror 1147 , and a galvanometer mirror 1148 .

[0046] The measurement light ML emitted from the measurement light source 113 is incident on the beam splitter 1141. Specifically, the measurement light ML emitted from the measurement light source 113#1 (hereinafter referred to as "measurement light ML#1") and the measurement light ML emitted from the measurement light source 113#2 (hereinafter referred to as "measurement light ML#2") are incident on the beam splitter 1141. The beam splitter 1141 emits the measurement light ML#1 and ML#2 incident on the beam splitter 1141 toward the beam splitter 1142.

[0047] The beam splitter 1142 reflects measurement light ML#1-1, which is a part of measurement light ML#1 that is incident on the beam splitter 1142, toward the detector 1143. The beam splitter 1142 emits measurement light ML#1-2, which is another part of measurement light ML#1 that is incident on the beam splitter 1142, toward the beam splitter 1144. In other words, the beam splitter 1142 functions as a branching optical system that branches measurement light ML#1 into measurement light ML#1-1 that travels along an optical path extending from the beam splitter 1142 to the detector 1143, and measurement light ML#1-2 that travels along an optical path from the beam splitter 1142 to the beam splitter 1144. The beam splitter 1142 reflects measurement light ML#2-1, which is a part of measurement light ML#2 that is incident on the beam splitter 1142, toward the detector 1143. The beam splitter 1142 emits measurement light ML#2-2, which is another part of measurement light ML#2 incident on the beam splitter 1142, toward the beam splitter 1144. In other words, the beam splitter 1142 functions as a branching optical system that branches measurement light ML#2 into measurement light ML#2-1 that travels along an optical path extending from the beam splitter 1142 to the detector 1143, and measurement light ML#2-2 that travels along an optical path from the beam splitter 1142 to the beam splitter 1144.

[0048] The measurement beams ML#1-1 and ML#2-1 emitted from the beam splitter 1142 are incident on the detector 1143. The detector 1143 detects interference light generated by the interference between the measurement beams ML#1-1 and ML#2-1. That is, the detector 1143 detects an interference signal based on the interference light generated by the interference between the measurement beams ML#1-1 and ML#2-1. Specifically, the detector 1143 detects the interference light by receiving the interference light. For this reason, the detector 1143 may be provided with a light-receiving element (a light-receiving unit, typically a photoelectric conversion element) capable of receiving light. The detection result of the detector 1143 is output to the control device 5.

[0049] The measurement beams ML#1-2 and ML#2-2 emitted from the beam splitter 1142 are incident on the beam splitter 1144. The beam splitter 1144 emits at least a portion of the measurement beam ML#1-2 incident on the beam splitter 1144 toward a mirror 1145. The beam splitter 1144 emits at least a portion of the measurement beam ML#2-2 incident on the beam splitter 1144 toward a mirror 1147. In other words, the beam splitter 1144 functions as a branching optical system that branches the measurement light ML#1-2 and ML#2-2 (i.e., essentially, the measurement light ML from the measurement light source 113) incident on the beam splitter 1144 from the same direction into the measurement light ML#1-2 that travels along an optical path extending from the beam splitter 1144 to the mirror 1145 and the measurement light ML#2-2 that travels along an optical path from the beam splitter 1144 toward the mirror 1147.

[0050] The measurement light ML#1-2 emitted from the beam splitter 1144 is incident on the mirror 1145. The measurement light ML#1-2 incident on the mirror 1145 is reflected by the reflecting surface of the mirror 1145 (the reflecting surface may also be referred to as a reference surface). Specifically, the mirror 1145 reflects the measurement light ML#1-2 incident on the mirror 1145 toward the beam splitter 1144. That is, the mirror 1145 emits (returns) the measurement light ML#1-2 incident on the mirror 1145 toward the beam splitter 1144 as the reflected light, that is, the measurement light ML#1-3. The measurement light ML#1-3 emitted from the mirror 1145 is incident on the beam splitter 1144. The beam splitter 1144 emits the measurement light ML#1-3 incident on the beam splitter 1144 toward the beam splitter 1142. The measuring beams ML#1-3 emitted from the beam splitter 1144 are incident on the beam splitter 1142. The beam splitter 1142 emits the measuring beams ML#1-3 incident on the beam splitter 1142 toward the detector 1146.

[0051] On the other hand, measurement light ML#2-2 emitted from beam splitter 1144 is incident on mirror 1147. Mirror 1147 reflects measurement light ML#2-2 incident on mirror 1147 toward galvanometer mirror 1148. That is, mirror 1147 emits measurement light ML#2-2 incident on mirror 1147 toward galvanometer mirror 1148.

[0052] The galvanometer mirror 1148 deflects the measurement light ML#2-2 (i.e., changes the emission angle of the measurement light ML#2-2) to change the irradiation position of the measurement light ML#2-2 on the workpiece W. In other words, by deflecting the measurement light ML#2-2, the galvanometer mirror 1148 changes the position of a target irradiation area MA that is set on the workpiece W or on the optical path of the measurement light ML#2-2 as an area to be irradiated with the measurement light ML. For example, the galvanometer mirror 1148 includes an X-scanning mirror 1148X and a Y-scanning mirror 1148Y. Each of the X-scanning mirror 1148X and the Y-scanning mirror 1148Y is a tilt-angle variable mirror that changes the angle of the measurement light ML#2-2 incident on the galvanometer mirror 1148 with respect to the optical path of the measurement light ML#2-2. The X-scanning mirror 1148X deflects the measurement light ML#2-2 by swinging or rotating so as to change the irradiation position of the measurement light ML#2-2 on the workpiece W along the X-axis direction (i.e., changing the angle of the X-scanning mirror 1148X with respect to the optical path of the measurement light ML#2-2). The Y-scanning mirror 1148Y deflects the measurement light ML#2-2 by swinging or rotating so as to change the irradiation position of the measurement light ML#2-2 on the workpiece W along the Y-axis direction (i.e., changing the angle of the Y-scanning mirror 1148Y with respect to the optical path of the measurement light ML#2-2). Because the irradiation position of the measurement light ML#2-2 is changed by the galvanometer mirror 1148, the galvanometer mirror 1148 may also be referred to as an irradiation position changing optical system.

[0053] The galvanometer mirror 1148 emits the deflected measurement light ML#2-2 toward the combining optical system 115. The measurement light ML#2-2 emitted from the galvanometer mirror 1148 is incident on the combining optical system 115. The beam splitter 1151 of the combining optical system 115 emits the measurement light ML#2-2 incident on the beam splitter 1151 toward the common optical system 116. In the example shown in FIG. 3, the measurement light ML#2-2 incident on the beam splitter 1151 is reflected on the polarization separation surface and is thereby emitted toward the common optical system 116. Therefore, in the example shown in FIG. 3, the measurement light ML#2-2 is incident on the polarization separation surface of the beam splitter 1151 while having a polarization direction that can be reflected on the polarization separation surface (a polarization direction that becomes s-polarized light with respect to the polarization separation surface).

[0054] As described above, the processing light EL is incident on the beam splitter 1151 in addition to the measurement light ML#2-2. That is, both the measurement light ML#2-2 and the processing light EL pass through the beam splitter 1151. The beam splitter 1151 outputs the processing light EL and the measurement light ML#2-2, which have entered the beam splitter 1151 from different directions, in the same direction (i.e., toward the same common optical system 116). Therefore, the beam splitter 1151 essentially functions as an optical system that combines the processing light EL and the measurement light ML#2-2. Note that the directions in which the processing light EL and the measurement light ML#2-2 are emitted from the beam splitter 1151 may be set to directions in which the processing light EL and the measurement light ML#2-2 are emitted so that the processing light EL and the measurement light ML#2-2 are incident on the common optical system 116 located on the exit side of the combining optical system 115. As long as processing light EL and measurement light ML#2-2 are incident on common optical system 116, the directions in which processing light EL and measurement light ML#2-2 are emitted may be slightly different.

[0055] Note that combining optical system 115 may have any structure as long as it can combine processing light EL and measurement light ML#2-2. For example, in addition to or instead of using beam splitter 1151, combining optical system 115 may combine processing light EL and measurement light ML#2-2 using a dichroic mirror that reflects light in a certain wavelength band and transmits light in another wavelength band.

[0056] The measurement light ML#2-2 emitted from the combining optical system 115 is incident on the common optical system 116. The common optical system 116 emits the measurement light ML#2-2 incident on the common optical system 116 toward the workpiece W.

[0057] Specifically, the measurement light ML#2-2 emitted from the combining optical system 115 is incident on the galvanometer mirror 1161. The galvanometer mirror 1161 deflects the measurement light ML#2-2 to change the irradiation position of the measurement light ML#2-2 on the workpiece W. In other words, the galvanometer mirror 1161 deflects the measurement light ML#2-2 to change the position of the target irradiation area MA that is set on the workpiece W or on the optical path of the measurement light ML#2-2 as the area to be irradiated with the measurement light ML#2-2. Note that, because the galvanometer mirror 1161 is disposed at or near the entrance pupil position of the fθ lens 1162, a change in the emission angle of the measurement light ML#2-2 caused by the galvanometer mirror 1161 is converted by the fθ lens 1162 into a change in the irradiation position of the measurement light ML#2-2 (i.e., the position of the target irradiation area MA). For example, the X-scanning mirror 1161X deflects the measurement light ML#2-2 by swinging or rotating so as to change the irradiation position of the measurement light ML#2-2 on the workpiece W along the X-axis direction (i.e., changing the angle of the X-scanning mirror 1161X with respect to the optical path of the measurement light ML#2-2). The Y-scanning mirror 1161Y deflects the measurement light ML#2-2 by swinging or rotating so as to change the irradiation position of the measurement light ML#2-2 on the workpiece W along the Y-axis direction (i.e., changing the angle of the Y-scanning mirror 1161Y with respect to the optical path of the measurement light ML#2-2). Note that because the irradiation position of the measurement light ML#2-2 (and further the irradiation position of the processing light EL) is changed by the galvanometer mirror 1161, the galvanometer mirror 1161 may also be referred to as an irradiation position changing optical system.

[0058] The measurement light ML#2-2 from the galvanometer mirror 1161 is incident on the fθ lens 1162. The fθ lens 1162 is an optical system for concentrating the measurement light ML#2-2 from the galvanometer mirror 1161 onto the workpiece W. The fθ lens 1162 is an optical system for irradiating the measurement light ML#2-2 from the galvanometer mirror 1161 onto the workpiece W. The fθ lens 1162 is an optical system for irradiating the measurement light ML#2-2 from the galvanometer mirror 1161 onto the target irradiation area MA. For this reason, the fθ lens 1162 is disposed on the optical path of the measurement light ML#2-2 between the galvanometer mirror 1161 and the target irradiation area MA. In particular, the fθ lens 1162 irradiates the workpiece W with the measurement light ML#2-2 in a convergent state. As a result, the workpiece W is measured by the measurement light ML (specifically, the measurement light ML#2-2). The fθ lens 1162 may be referred to as an irradiation optical system because it irradiates the workpiece W with the measurement light ML#2-2 (particularly, irradiates the surface of the workpiece W with the measurement light ML#2-2). The range of movement of the target irradiation area MA that moves on the workpiece W due to the deflection of the measurement light ML#2-2 by the galvanometer mirror 1161 may be referred to as a measurement shot area MSA (see FIG. 7, which will be described later). In other words, the target irradiation area MA may be considered to move within the measurement shot area MSA.

[0059] Here, as described above, in addition to measurement light ML#2-2, processing light EL is incident on common optical system 116. That is, processing light EL and measurement light ML#2-2 combined by combining optical system 115 are incident on common optical system 116. Therefore, both measurement light ML#2-2 and processing light EL pass through the same common optical system 116 (specifically, the same galvanometer mirror 1161 and the same fθ lens 1162).

[0060] Therefore, the galvanometer mirror 1161 can synchronously change the irradiation position of the processing light EL on the workpiece W and the irradiation position of the measurement light ML#2-2 on the workpiece W. The galvanometer mirror 1161 can interlockingly change the irradiation position of the processing light EL on the workpiece W and the irradiation position of the measurement light ML#2-2 on the workpiece W. In other words, the galvanometer mirror 1161 can synchronously and / or interlockingly change the relative position of the target irradiation area EA with respect to the workpiece W and the relative position of the target irradiation area MA with respect to the workpiece W.

[0061] Furthermore, in order to irradiate both the processing light EL and the measurement light ML onto the workpiece W, the fθ lens 1162 emits both the processing light EL and the measurement light ML from the fθ lens 1162 in a direction toward the workpiece W. In other words, the fθ lens 1162 emits both the processing light EL and the measurement light ML in the same direction. The fθ lens 1162 emits the measurement light ML in the same direction as the processing light EL is emitted from the fθ lens 1162. The fθ lens 1162 emits the processing light EL in the same direction as the measurement light ML is emitted from the fθ lens 1162.

[0062] On the other hand, as described above, the measurement light ML#2-2 is irradiated onto the workpiece W via the galvanometer mirror 1148, while the processing light EL is irradiated onto the workpiece W without passing through the galvanometer mirror 1148. Therefore, the processing system SYSa can independently move the irradiation position of the measurement light ML#2-2 on the workpiece W relative to the irradiation position of the processing light EL on the workpiece W. The processing system SYSa can independently move the target irradiation area MA of the measurement light ML#2-2 relative to the target irradiation area EA of the processing light EL. The processing system SYSa can independently change the irradiation position of the processing light EL on the workpiece W and the irradiation position of the measurement light ML#2-2 on the workpiece W. The processing system SYSa can independently change the position of the target irradiation area EA and the position of the target irradiation area MA. The processing system SYSa can change the positional relationship between the irradiation position of the processing light EL on the workpiece W and the irradiation position of the measurement light ML#2-2 on the workpiece W.

[0063] When the workpiece W is irradiated with the measurement light ML#2-2, light resulting from the irradiation of the measurement light ML#2-2 is generated from the workpiece W. In other words, when the workpiece W is irradiated with the measurement light ML#2-2, light resulting from the irradiation of the measurement light ML#2-2 is emitted from the workpiece W. The light emitted from the workpiece W due to the irradiation of the measurement light ML#2-2 (i.e., light resulting from the irradiation of the measurement light ML#2-2) may include at least one of the measurement light ML#2-2 reflected by the workpiece W (i.e., reflected light), the measurement light ML#2-2 scattered by the workpiece W (i.e., scattered light), the measurement light ML#2-2 diffracted by the workpiece W (i.e., diffracted light), and the measurement light ML#2-2 transmitted through the workpiece W (i.e., transmitted light).

[0064] At least a portion of the light emitted from the workpiece W due to irradiation with the measurement light ML#2-2 (hereinafter, this light will be referred to as "measurement light ML#2-3") enters the common optical system 116. The measurement light ML#2-3 that entered the common optical system 116 enters the combining optical system 115 via an fθ lens 1162 and a galvanometer mirror 1161. The beam splitter 1151 of the combining optical system 115 emits the measurement light ML#2-3 that entered the beam splitter 1151 toward the measurement optical system 114. In the example shown in FIG. 3, the measurement light ML#2-3 that entered the beam splitter 1151 is reflected at the polarization separation surface and is thereby emitted toward the measurement optical system 114. Therefore, in the example shown in FIG. 3, the measurement light ML#2-3 enters the polarization separation surface of the beam splitter 1151 in a state in which it has a polarization direction that allows it to be reflected at the polarization separation surface.

[0065] The measurement light ML#2-3 emitted from the combining optical system 115 is incident on a mirror 1147 via a galvanometer mirror 1148 of the measurement optical system 114. The mirror 1147 reflects the measurement light ML#2-3 incident on the mirror 1147 toward a beam splitter 1144. The beam splitter 1144 emits at least a portion of the measurement light ML#2-3 incident on the beam splitter 1144 toward a beam splitter 1142. The beam splitter 1142 emits at least a portion of the measurement light ML#2-3 incident on the beam splitter 1142 toward a detector 1146. That is, at least a portion of the light generated by measurement light ML#2-2 that travels along optical path OP#2-2 passing from the beam splitter 1144 through the mirror 1147, the galvanometer mirror 1148, the combining optical system 115, and the common optical system 116 in this order to reach the workpiece W and is irradiated onto the surface of the workpiece W is incident on the detector 1146 as measurement light ML#2-3. Of the light generated by measurement light ML#2-2 that travels along optical path OP#2-2 and is irradiated onto the surface of the workpiece W, measurement light ML#2-3 that travels along optical path OP#2-3 that passes through the common optical system 116, the combining optical system 115, the galvanometer mirror 1148, the mirror 1147, the beam splitter 1144, and the beam splitter 1142 in this order to reach the detector 1146 is incident on the detector 1146. Note that measurement light ML#2-3 may also be referred to as measurement light or object light.

[0066] Furthermore, as described above, in addition to measurement beams ML#2-3, measurement beams ML#1-3 are incident on detector 1146. Specifically, measurement beams ML#1-3 are incident on detector 1146 after traveling along optical paths OP#1-3 that pass from beam splitter 1144 through mirror 1145, beam splitter 1144, and beam splitter 1142 in this order to detector 1146. Measurement beams ML#1-3 are incident on detector 1146 after traveling along optical paths OP#1-3 formed by mirror 1145 (in other words, optical paths OP#1-3 via mirror 1145) to detector 1146. Note that measurement beams ML#1-3 may be referred to as reference beams.

[0067] Here, the measurement light ML#1-3 and the measurement light ML#2-3 correspond to a plurality of measurement light ML (particularly, a plurality of optical frequency combs) that are phase-synchronized and coherent with each other. This is because, as described above, the measurement light sources 113#1 and 113#2 respectively emit the measurement light ML#1 and ML#2 that are phase-synchronized and coherent with each other. As a result, the detector 1146 detects interference light generated by the interference between the measurement light ML#1-3 and the measurement light ML#2-3. In other words, the detector 1146 detects an interference signal based on the interference light generated by the interference between the measurement light ML#1-3 and the measurement light ML#2-3. Specifically, the detector 1146 detects the interference light by receiving the interference light. For this reason, the detector 1146 may be provided with a light-receiving element (light-receiving unit) capable of receiving light. The detection result of the detector 1146 is output to the control device 5.

[0068] The control device 5 calculates the state of the workpiece W based on the detection result of the detector 1143 (i.e., the output of the detector 1143) and the detection result of the detector 1146 (i.e., the output of the detector 1146). Here, the principle of calculating the state of the workpiece W based on the detection result of the detector 1143 and the detection result of the detector 1146 will be described with reference to FIG. 4.

[0069] 4 is a timing chart showing measurement light ML#1-1 incident on detector 1143, measurement light ML#2-1 incident on detector 1143, interference light detected by detector 1143, measurement light ML#1-3 incident on detector 1146, measurement light ML#2-3 incident on detector 1146, and interference light detected by detector 1146. Because the pulse frequency of measurement light ML#1 is different from the pulse frequency of measurement light ML#2, the pulse frequency of measurement light ML#1-1 is different from the pulse frequency of measurement light ML#2-1. Therefore, the interference light between measurement light ML#1-1 and measurement light ML#2-1 is interference light in which pulse light appears in synchronization with the timing when the pulse light constituting measurement light ML#1-1 and the pulse light constituting measurement light ML#2-1 are simultaneously incident on detector 1143. Similarly, the pulse frequency of measurement light ML#1-3 is different from the pulse frequency of measurement light ML#2-3. Therefore, the interference light between the measurement light ML#1-3 and the measurement light ML#2-3 becomes interference light in which pulsed light appears in synchronization with the timing when the pulsed light constituting the measurement light ML#1-3 and the pulsed light constituting the measurement light ML#2-3 simultaneously enter the detector 1146.

[0070] Here, the position (position on the time axis) of the pulsed light that creates the interference light detected by the detector 1146 varies depending on the difference between the length of the optical path OP#1-3, which includes the optical path through which the measurement light ML#1-3 passes, and the length of the optical paths OP#2-2 and OP#2-3, which include the optical path through which the measurement light ML#2-3 passes. Furthermore, while the lengths of the optical paths OP#2-2 and OP#2-3 vary depending on the positional relationship between the measurement optical system 114 (particularly, the detector 1146) and the workpiece W, the length of the optical path OP#1-3 does not vary depending on the positional relationship between the measurement optical system 114 (particularly, the detector 1146) and the workpiece W. This is because the measurement light ML#2-3 is incident on the detector 1146 via the workpiece W, while the measurement light ML#1-3 is incident on the detector 1146 without passing through the workpiece W. As a result, the position of the pulsed light that creates the interference light detected by the detector 1146 varies depending on the positional relationship between the measurement optical system 114 (particularly, the detector 1146) and the workpiece W. On the other hand, the position (position on the time axis) of the pulsed light that creates the interference light that the detector 1143 detects does not vary depending on the positional relationship between the measurement optical system 114 and the workpiece W. This is because the measurement lights ML#1-1 and ML#2-1 are incident on the detector 1143 without passing through the workpiece W. For this reason, it can be said that the time difference between the pulsed light that creates the interference light detected by the detector 1146 and the pulsed light that creates the interference light detected by the detector 1143 indirectly indicates the positional relationship between the measurement optical system 114 and the workpiece W (typically, the distance between the measurement optical system 114 and the workpiece W). Furthermore, because each optical system, such as the measurement optical system 114, is disposed in the housing 117 of the machining head 11 (that is, the position of each optical system is fixed relative to the machining head 11), it can be said that the time difference between the pulsed light that creates the interference light detected by the detector 1146 and the pulsed light that creates the interference light detected by the detector 1143 indirectly indicates the positional relationship between the machining head 11 and the workpiece W (typically, the distance D between the machining head 11 and the workpiece W). For example, it can be said that the time difference between the pulsed light that creates the interference light detected by the detector 1146 and the pulsed light that creates the interference light detected by the detector 1143 indirectly indicates the positional relationship between the fθ lens 1162 of the machining head 11 and the workpiece W (typically, the distance D between the fθ lens 1162 and the workpiece W).

[0071] Therefore, the control device 5 can calculate the state of the workpiece W based on the time difference between the pulsed light that creates the interference light detected by the detector 1146 and the pulsed light that creates the interference light detected by the detector 1143. Specifically, the control device 5 can calculate the difference between the length of the optical path OP#1-3 and the lengths of the optical paths OP#2-2 and OP#2-3 based on the time difference between the pulsed light that creates the interference light detected by the detector 1146 and the pulsed light that creates the interference light detected by the detector 1143. Furthermore, the control device 5 can calculate the state of the workpiece W based on optical path difference information regarding the calculated difference (i.e., the measured amount of the difference between the length of the optical path OP#1-3 and the lengths of the optical paths OP#2-2 and OP#2-3). More specifically, the control device 5 can calculate the relative positional relationship between the workpiece W and the machining head 11 based on the optical path difference information. For example, the control device 5 can calculate the distance between the irradiation area WA (irradiated portion, the same applies hereinafter) of the workpiece W irradiated with the measurement light ML#2-2 and the machining head 11 based on the optical path difference information. That is, the control device 5 can obtain information regarding the position of the irradiated area WA irradiated with the measurement light ML#2-2 on the workpiece W. Furthermore, if the measurement light ML#2-2 is irradiated to multiple locations on the workpiece W and / or if the measurement light ML#2-2 is irradiated so as to scan the surface of the workpiece W, the control device 5 can also calculate the shape of at least a part of the workpiece W based on the distance D between each of the multiple irradiated areas WA on the workpiece W and the machining head 11.

[0072] Distance information regarding the distance D between the workpiece W and the machining head 11 calculated based on the optical path difference information (i.e., position information regarding the relative positional relationship between the workpiece W and the machining head 11 calculated based on the optical path difference information; the same applies below) may be used to control the machining system SYSa. Specifically, the distance information may be used to control the machining device 1. The distance information may be used to control the machining head 11. The distance information may be used to control the head drive system 12. The distance information may be used to control the stage device 3. The distance information may be used to control the stage drive system 33.

[0073] For example, the control device 5 may control the relative positional relationship between the workpiece W and the machining head 11 based on the distance information. In other words, the control device 5 may control a device that can control (typically, change) the relative positional relationship between the workpiece W and the machining head 11 based on the distance information. An example of a device that can control the relative positional relationship between the workpiece W and the machining head 11 is at least one of the head drive system 12 and the stage drive system 33. Note that, because the machining head 11 is equipped with each optical system (e.g., at least one of the machining optical system 112, the measurement optical system 114, the composite optical system 115, and the common optical system 116), the operation of controlling the relative positional relationship between the workpiece W and the machining head 11 may be considered to be substantially equivalent to the operation of controlling the relative positional relationship between the workpiece W and each optical system equipped in the machining head 11. In particular, the operation of controlling the relative positional relationship between the workpiece W and the machining head 11 may be considered to be substantially equivalent to the operation of controlling the relative positional relationship between the workpiece W and the fθ lens 1162.

[0074] The operation of controlling the relative positional relationship between the workpiece W and the machining head 11 may include an operation of controlling (typically changing) the relative positional relationship between the workpiece W and the machining head 11 so that the relative positional relationship between the workpiece W and the machining head 11, which is not in a predetermined positional relationship, becomes the predetermined positional relationship. The operation of controlling the relative positional relationship between the workpiece W and the machining head 11 may include an operation of controlling the relative positional relationship between the workpiece W and the machining head 11 so that the relative positional relationship between the workpiece W and the machining head 11, which is in a predetermined positional relationship, is maintained at the predetermined positional relationship.

[0075] When the relative positional relationship between the workpiece W and the processing head 11 is maintained at a predetermined positional relationship, the processing head 11 can irradiate the processing light EL onto the workpiece W that is substantially stationary relative to the processing head 11. In other words, the processing head 11 can process the workpiece W that is substantially stationary relative to the processing head 11. Therefore, the processing quality (e.g., processing accuracy) of the workpiece W is improved compared to when processing a workpiece W that is not substantially stationary (e.g., moving) relative to the processing head 11. Note that an example of a "predetermined positional relationship" is a positional relationship that allows the processing light EL to be appropriately irradiated onto a processing shot area ESA set at a desired position on the workpiece W. As described above, the processing shot area ESA indicates the movement range of the target irradiation area EA that moves on the workpiece W by the galvanometer mirror 1161. In other words, the processing shot area ESA indicates the area on the workpiece W that the galvanometer mirror 1161 can scan with the processing light EL without moving the processing head 11 and the stage 32.

[0076] In this case, the processing system SYSa may process the workpiece W through the following procedure. First, the processing system SYSa changes the relative positional relationship between the workpiece W and the processing head 11 using the head drive system 12 and / or the stage drive system 33 so that a first processing shot area ESA is set at a first position on the workpiece W. Then, the processing system SYSa irradiates a desired area within the first processing shot area ESA with the processing light EL using the galvanometer mirror 1161 while controlling the head drive system 12 and / or the stage drive system 33 so as to maintain a state in which the processing light EL can be appropriately irradiated onto the first processing shot area ESA. In other words, the processing system SYSa irradiates a desired area within the first processing shot area ESA with the processing light EL using the galvanometer mirror 1161 while controlling the head drive system 12 and / or the stage drive system 33 so that the relative positional relationship between the workpiece W and the processing head 11 is maintained as a first positional relationship in which the processing light EL can be appropriately irradiated onto the first processing shot area ESA set at the first position on the workpiece W. As a result, the first processing shot area ESA is processed. Thereafter, the head drive system 12 and / or the stage drive system 33 are used to change the relative positional relationship between the workpiece W and the processing head 11 so that the second processing shot area ESA is set at a second position different from the first position on the workpiece W. Thereafter, the processing system SYSa irradiates a desired area within the second processing shot area ESA with the processing light EL using the galvanometer mirror 1161 while controlling the head drive system 12 and / or the stage drive system 33 so as to maintain a state in which the second processing shot area ESA can be appropriately irradiated with the processing light EL. In other words, the processing system SYSa irradiates a desired area within the second processing shot area ESA with the processing light EL using the galvanometer mirror 1161 while controlling the head drive system 12 and / or the stage drive system 33 so that the relative positional relationship between the workpiece W and the processing head 11 is maintained at the second positional relationship in which the second processing shot area ESA set at the second position on the workpiece W can be appropriately irradiated with the processing light EL. As a result, the second processing shot area ESA is processed. After that, the same operation is repeated until the processing of the workpiece W is completed.

[0077] In the first embodiment, the operation of irradiating the workpiece W with measurement light ML, calculating the difference between the length of optical path OP#1-3 and the lengths of optical paths OP#2-2 and OP#2-3 based on the detection results of the measurement light ML (i.e., the detection results of detectors 1143 and 1146), and controlling the relative positional relationship between the workpiece W and the machining head 11 based on optical path difference information related to the calculated difference is referred to as the "alignment operation." For ease of explanation, the following will particularly describe an example in which the operation of irradiating the workpiece W with measurement light ML, calculating the distance D between the machining head 11 and the workpiece W based on the detection results of the measurement light ML (i.e., based on the optical path difference information calculated from the detection results of the measurement light ML), and controlling the relative positional relationship between the workpiece W and the machining head 11 based on the distance information related to the calculated distance D is the alignment operation. The alignment operation will be described in detail later with reference to FIG. 7, etc. Here, the distance D between the machining head 11 and the workpiece W may be the distance along a direction parallel to the optical axis AX of the fθ lens 1162 from the optical surface on the workpiece W side of the optical member that is arranged closest to the workpiece among the optical members that make up the fθ lens 1162 as the irradiation optical system to the workpiece W. Note that the distance D may also be the length along the optical path of the measurement light ML from any optical surface of any optical member among the optical members that make up the irradiation optical system (fθ lens 1162) and the measurement optical system 114 to the workpiece W. Alternatively, the distance D may be the length along the optical path of the measurement light ML from any position in the optical path of the measurement light ML to the workpiece W. In this way, the distance D can be an amount obtained by adding a known offset to the optical path difference calculated from the detection result of the measurement light ML.

[0078] The machining system SYSa may perform an alignment operation during at least a part of a machining period in which the machining system SYSa is machining the workpiece W. The machining system SYSa may irradiate the workpiece W with a measurement light ML during at least a part of the machining period, calculate a distance D between the machining head 11 and the workpiece W, and control the relative positional relationship between the workpiece W and the machining head 11 based on distance information regarding the calculated distance D. The machining period may include a period in which the machining system SYSa is performing a machining process on the workpiece W. The machining period may include at least a part of the period from when the machining system SYSa starts a machining process on the workpiece W to when the machining process is completed. However, the machining system SYSa may perform an alignment operation during at least a part of a period different from the machining period.

[0079] More specifically, the machining system SYSa may perform, as part of the alignment operation, an operation to maintain the relative positional relationship between the workpiece W and the machining head 11 at a predetermined positional relationship during at least a part of a machining shot period in which the machining system SYSa processes the machining shot area ESA. On the other hand, the machining system SYSa may perform, as part of the alignment operation, an operation to change the relative positional relationship between the workpiece W and the machining head 11 from a positional relationship in which the machining head 11 can process one machining shot area ESA to a positional relationship in which the machining head 11 can process the next machining shot area ESA during at least a part of a period from the completion of machining of one machining shot area ESA to the start of machining of the next machining shot area ESA.

[0080] Furthermore, as described above, when the relative positional relationship between the workpiece W and the machining head 11 changes, the position of the target irradiation area EA on the workpiece W (i.e., the irradiation position on the workpiece W where the processing light EL is actually irradiated) changes. For this reason, the alignment operation may include an operation of irradiating the workpiece W with the measurement light ML, calculating the distance D between the machining head 11 and the workpiece W based on the detection result of the measurement light ML, and controlling the position of the target irradiation area EA on the workpiece W (i.e., the irradiation position of the processing light EL on the workpiece W) based on distance information regarding the calculated distance D. In this case, the control device 5 may change the position of the target irradiation area EA on the workpiece W (i.e., the irradiation position of the processing light EL on the workpiece W) based on the distance information so that the target irradiation area EA is set at a desired position on the workpiece W (i.e., the processing light EL is irradiated). In other words, the control device 5 may control a device that can change the position of the target irradiation area EA on the workpiece W (i.e., the irradiation position of the processing light EL on the workpiece W) based on the distance information so that the target irradiation area EA is set at a desired position on the workpiece W. Examples of devices that can change the position of the target irradiation area EA on the workpiece W (i.e., the irradiation position of the processing light EL on the workpiece W) include the angle adjustment optical system 1122 of the processing optical system 112, the focus adjustment optical system 1123 of the processing optical system 112, the galvanometer mirror 1161 of the common optical system 116, the head drive system 12, and the stage drive system 33.

[0081] Furthermore, as described above, when the relative positional relationship between the workpiece W and the machining head 11 changes, the position of the target irradiation area MA on the workpiece W (i.e., the irradiation position on the workpiece W where the measurement light ML is actually irradiated) changes. For this reason, the alignment operation may include an operation of irradiating the workpiece W with the measurement light ML, calculating the distance D between the machining head 11 and the workpiece W based on the detection result of the measurement light ML, and controlling the position of the target irradiation area MA on the workpiece W (i.e., the irradiation position on the workpiece W where the measurement light ML is irradiated) based on distance information regarding the calculated distance D. In this case, the control device 5 may change the position of the target irradiation area MA on the workpiece W (i.e., the irradiation position on the workpiece W where the measurement light ML is irradiated) based on the distance information. In other words, the control device 5 may control a device that can change the position of the target irradiation area MA on the workpiece W (i.e., the irradiation position on the workpiece W where the measurement light ML is irradiated) based on the distance information so that the target irradiation area MA is set at a desired position on the workpiece W. Examples of devices that can change the position of the target irradiation area MA on the workpiece W (i.e., the irradiation position of the measurement light ML on the workpiece W) include the galvanometer mirror 1161 of the common optical system 116, the galvanometer mirror 1148 of the measurement optical system 114, the head drive system 12, and the stage drive system 33.

[0082] (1-3) Structure of head drive system 12 (1-3-1) Overall structure of head drive system 12 Next, an example of the structure of the head driving system 12 will be described with reference to Fig. 5. Fig. 5 is a cross-sectional view showing an example of the structure of the head driving system 12.

[0083] As shown in FIG. 5 , the head drive system 12 includes a first drive system 121 and a second drive system 122. The second drive system 122 is attached to the first drive system 121. The first drive system 121 supports the second drive system 122. The machining head 11 is attached to the second drive system 122. The second drive system 122 supports the machining head 11. Therefore, the second drive system 122 may essentially function as a connection device that connects the first drive system 121 and the machining head 11.

[0084] The first drive system 121 moves the second drive system 122 relative to the workpiece W under the control of the control device 5. In other words, the first drive system 121 functions as a moving device that moves the second drive system 122 relative to the workpiece W. Because the machining head 11 is attached to the second drive system 122, it can be said that the first drive system 121 moves the second drive system 122, thereby moving the machining head 11 relative to the workpiece W. In other words, the first drive system 121 moves the machining head 11 together with the second drive system 122. The first drive system 121 moves the machining head 11 via the second drive system 122. The first drive system 121 functions as a drive unit that moves (in other words, drives) each optical system provided in the machining head 11 via the second drive system 122.

[0085] The second drive system 122 moves the machining head 11 relative to the workpiece W under the control of the control device 5. In other words, the second drive system 122 functions as a moving device that moves the machining head 11 relative to the workpiece W. The second drive system 122 functions as a moving device that moves the machining head 11 relative to the workpiece W. Since the second drive system 122 supports the machining head 11 as described above, it can be said that the second drive system 122 supports the machining head 11 in a state in which the machining head 11 is displaceable relative to the workpiece W. In this case, the second drive system 122 functions as a support unit that supports each optical system provided in the machining head 11 in a state in which each optical system provided in the machining head 11 is displaceable relative to the workpiece W.

[0086] The first drive system 121 and the second drive system 122 will be described below in order.

[0087] (1-3-1-1) Structure of the first drive system 121 As shown in FIG. 5, the first drive system 121 includes a base 1211 and an arm drive system 1212 .

[0088] The base 1211 is attached to the housing 4 (for example, a ceiling member of the housing 4) or a support frame (support structure) not shown. An arm drive system 1212 is attached to the base 1211. The base 1211 supports the arm drive system 1212. The base 1211 is used as a base member for supporting the arm drive system 1212.

[0089] The arm drive system 1212 includes a plurality of arm members 12121. The arm members 12121 are connected to each other via at least one joint member 12122 so as to be able to swing freely. Therefore, the arm drive system 1212 is a robot having a so-called vertical multi-joint structure. Note that the arm drive system 1212 is not limited to robots having a vertical multi-joint structure, and may be, for example, a polar coordinate robot, a cylindrical coordinate robot, a Cartesian coordinate robot, or a parallel link robot having a horizontal multi-joint structure. The arm drive system 1212 may include a single joint (i.e., a drive axis defined by the joint member 12122). Alternatively, the arm drive system 1212 may include multiple joints. Figure 5 shows an example in which the arm drive system 1212 includes three joints. Two arm members 12121 connected via each joint are swung by actuators 12123 corresponding to each joint. Figure 5 shows an example in which the arm drive system 1212 includes three actuators 12123 corresponding to the three joints. As a result, at least one arm member 12121 moves. Therefore, at least one arm member 12121 is movable relative to the workpiece W. In other words, at least one arm member 12121 is movable so that the relative positional relationship between the at least one arm member 12121 and the workpiece W is changed.

[0090] A second drive system 122 is attached to the arm drive system 1212. Specifically, the second drive system 122 is attached to one of the multiple arm members 12121 that is located farthest from the base 1211. For ease of explanation, the arm member 12121 to which the second drive system 122 is attached will be referred to as the distal arm member 12124 below. The second drive system 122 may be attached directly to the distal arm member 12124, or may be attached indirectly to the distal arm member 12124 via another member.

[0091] When the distal arm member 12124 is moved by the actuator 12123 described above, the second drive system 122 attached to the distal arm member 12124 also moves. Therefore, the arm drive system 1212 (i.e., the first drive system 121) can move the second drive system 122. Specifically, the arm drive system 1212 can move the second drive system 122 relative to the workpiece W. The arm drive system 1212 can move the second drive system 122 so that the relative positional relationship between the second drive system 122 and the workpiece W is changed. Furthermore, when the second drive system 122 moves, the machining head 11 attached to the second drive system 122 also moves. Therefore, the arm drive system 1212 (i.e., the first drive system 121) can move the machining head 11.

[0092] The first drive system 121 is not limited to an articulated robot, and may have any structure as long as it is capable of moving the second drive system 122 relative to the workpiece W.

[0093] (1-3-1-2) Structure of the second drive system 122 Next, the structure of the second drive system 122 will be described with reference to Fig. 6. Fig. 6 is a cross-sectional view showing the structure of the second drive system 122.

[0094] As shown in FIG. 6, the second driving system 122 includes a support member 1221 , a support member 1222 , an air spring 1223 , a damper member 1224 , and a driving member 1225 .

[0095] The support member 1221 is attached to the first drive system 121. Specifically, the support member 1221 is attached to a distal arm member 12124 of the first drive system 121. The support member 1222 is attached to the processing head 11.

[0096] The support member 1221 and the support member 1222 are coupled (in other words, linked or connected) via the air spring 1223, the damper member 1224, and the drive member 1225. That is, the air spring 1223, the damper member 1224, and the drive member 1225 are attached to the support members 1221 and 1222, respectively, so as to couple the support member 1221 and the support member 1222. Since the first drive system 121 is attached to the support member 1221 and the machining head 11 is attached to the support member 1222, it can be said that the air spring 1223, the damper member 1224, and the drive member 1225 are essentially attached to the support members 1221 and 1222, respectively, so as to couple the first drive system 121 and the machining head 11.

[0097] The air spring 1223, under the control of the control device 5, applies an elastic force caused by the pressure of a gas (air, for example) to at least one of the support members 1221 and 1222. The air spring 1223, under the control of the control device 5, applies an elastic force caused by the pressure of the gas to at least one of the first drive system 121 and the machining head 11 via at least one of the support members 1221 and 1222. In particular, the air spring 1223 may apply an elastic force caused by the pressure of the gas to at least one of the support members 1221 and 1222 along the direction in which the support members 1221 and 1222 are aligned (the Z-axis direction, the direction of gravity, in the example shown in FIG. 6). That is, the air spring 1223 may apply an elastic force caused by gas pressure to at least one of the first drive system 121 and the processing head 11 via at least one of the support members 1221 and 1222 along the direction in which the first drive system 121 (particularly the distal arm member 12124) and the processing head 11 are aligned (the Z-axis direction, the direction of gravity, in the example shown in FIG. 6). The air spring 1223 may also be referred to as an elastic member.

[0098] In order to impart an elastic force resulting from the gas pressure, gas is supplied to the air spring 1223 from a gas supply device 12261 via a pipe 12262 and a valve 12263. The control device 5 controls at least one of the gas supply device 12261 and the valve 12263 based on the measurement result of a pressure gauge 1226 that measures the pressure of the aircraft body inside the air spring 1223. Note that the gas supply device 12261, the pipe 12262, and the valve 12263 may be omitted. In this case, the air spring 1223 may impart an elastic force resulting from the internal gas pressure to at least one of the support members 1221 and 1222, regardless of the control of the control device 5.

[0099] The air spring 1223 may support the weight of the support member 1222 using its elastic force under the control of the control device 5. Specifically, the air spring 1223 may support the weight of the support member 1222 using its elastic force along the direction in which the support members 1221 and 1222 are aligned. Since the machining head 11 is attached to the support member 1222, the air spring 1223 may support the weight of the machining head 11 attached to the support member 1222 using its elastic force. Specifically, the air spring 1223 may support the weight of the machining head 11 along the direction in which the first drive system 121 (particularly, the distal arm member 12124) and the machining head 11 are aligned. In this case, the air spring 1223 may function as a weight canceller that cancels the weight of the machining head 11. Note that the air spring 1223 may support the weight of the support member 1222 using its elastic force regardless of the control of the control device 5.

[0100] The air spring 1223 may, under the control of the control device 5, use its elastic force to reduce vibrations transmitted between the first drive system 121 and the machining head 11 via the second drive system 122. That is, the air spring 1223 may use its elastic force to damp vibrations transmitted between the first drive system 121 and the machining head 11 via the second drive system 122. Specifically, the air spring 1223 may use its elastic force to reduce (dampen) vibrations traveling (i.e., transmitted) from the first drive system 121 to the machining head 11 via the second drive system 122. That is, the air spring 1223 may use its elastic force to reduce (dampen) vibrations traveling from a portion of the first drive system 121 to which the second drive system 122 is attached (i.e., the distal arm member 12124) to a portion of the machining head 11 to which the second drive system 122 is attached. In this case, the control device 5 may control at least one of the gas supply device 12261 and the valve 12263 based on the measurement result of the pressure gauge 1226 so that vibrations transmitted between the first drive system 121 and the machining head 11 via the second drive system 122 are reduced (i.e., damped). The air spring 1223 (or the second drive system 122 including the air spring 1223) may be referred to as a vibration reduction device or a vibration damping device. The air spring 1223 may reduce vibrations transmitted between the first drive system 121 and the machining head 11 via the second drive system 122 by using its elastic force, regardless of the control of the control device 5.

[0101] The damper member 1224 applies an elastic force caused by a factor other than air pressure to at least one of the support members 1221 and 1222. The damper member 1224 applies an elastic force caused by a factor other than air pressure to at least one of the first drive system 121 and the machining head 11 via at least one of the support members 1221 and 1222. In particular, the damper member 1224 may apply an elastic force to at least one of the support members 1221 and 1222 along the direction in which the support members 1221 and 1222 are aligned (the Z-axis direction, the direction of gravity, in the example shown in FIG. 6). That is, the damper member 1224 may apply an elastic force to at least one of the first drive system 121 and the machining head 11 via at least one of the support members 1221 and 1222 along the direction in which the first drive system 121 (particularly the distal arm member 12124) and the machining head 11 are aligned (the Z-axis direction, the direction of gravity, in the example shown in FIG. 6). The damper member 1224 may also be referred to as an elastic member.

[0102] The damper member 1224 may be any member that can apply elastic force. For example, the damper member 1224 may include a compression spring coil. For example, the damper member 1224 may include a leaf spring.

[0103] The damper member 1224 may use elastic force to support the weight of the support member 1222. Specifically, the damper member 1224 may use elastic force to support the weight of the support member 1222 along the direction in which the support members 1221 and 1222 are aligned. Since the machining head 11 is attached to the support member 1222, the damper member 1224 may use elastic force to support the weight of the machining head 11 attached to the support member 1222. Specifically, the damper member 1224 may use elastic force to support the weight of the machining head 11 along the direction in which the first drive system 121 (particularly, the distal arm member 12124) and the machining head 11 are aligned. In this case, the damper member 1224 may function as a weight canceller that cancels the own weight of the machining head 11.

[0104] The damper member 1224 may use elastic force to reduce vibrations transmitted between the first drive system 121 and the machining head 11 via the second drive system 122. That is, the damper member 1224 may use elastic force to attenuate vibrations transmitted between the first drive system 121 and the machining head 11 via the second drive system 122. Specifically, the damper member 1224 may use elastic force to reduce (attenuate) vibrations traveling (i.e., transmitted) from the first drive system 121 to the machining head 11 via the second drive system 122. For this reason, the damper member 1224 (or the second drive system 122 including the damper member 1224) may be referred to as a vibration reduction device or a vibration damping device.

[0105] The damper member 1224 may use its elastic force to convert the vibration of the air spring 1223 into damped vibration. In other words, the damper member 1224 may use its elastic force to convert the vibration transmitted between the first drive system 121 and the machining head 11 via the second drive system 122 into damped vibration.

[0106] The driving member 1225 is capable of generating a driving force under the control of the control device 5. The driving member 1225 is capable of applying the generated driving force to at least one of the support members 1221 and 1222. The driving member 1225 is capable of applying the generated driving force to at least one of the first drive system 121 and the machining head 11 via at least one of the support members 1221 and 1222. The driving member 1225 may have any structure as long as it is capable of generating a driving force. For example, the driving member 1225 may have a structure capable of electrically generating a driving force. For example, the driving member 1225 may have a structure capable of magnetically generating a driving force. As an example, FIG. 6 shows an example in which the driving member 1225 is a voice coil motor (VCM) capable of electrically generating a driving force. Note that while a voice coil motor is a type of linear motor, the driving member 1225 may be a linear motor other than a voice coil motor. The drive member 1225 may generate a drive force along a linear axis.

[0107] The driving member 1225 may have a structure in which there is no physical contact between a component of the driving member 1225 attached to the support member 1221 and a component of the driving member 1225 attached to the support member 1222. For example, if the driving member 1225 is a voice coil motor, there is no physical contact between a component of the driving member 1225 attached to the support member 1221 (for example, a component including either a coil or a magnetic pole) and a component of the driving member 1225 attached to the support member 1222 (for example, a component including the other of a coil or a magnetic pole).

[0108] The driving member 1225 may use a driving force to move at least one of the support members 1221 and 1222 under the control of the control device 5. The driving member 1225 may use a driving force to move at least one of the support members 1221 and 1222 under the control of the control device 5, thereby moving at least one of the first driving system 121 and the machining head 11. In this case, the driving member 1225 may use a driving force to move at least one of the first driving system 121 and the machining head 11, thereby changing the relative position between the first driving system 121 and the machining head 11. In this case, it can be said that the second driving system 122 including the driving member 1225 couples the first driving system 121 and the machining head 11 so that the relative position between the first driving system 121 and the machining head 11 is changeable. In other words, it can be said that the above-mentioned air spring 1223 and damper member 1224 (and further, the drive member 1225) couple the first drive system 121 and the machining head 11 together so that the relative positions of the first drive system 121 and the machining head 11 can be changed by the drive member 1225. The drive member 1225 may also be called a position change device.

[0109] The driving member 1225 may change the relative position between the first drive system 121 and the machining head 11 under the control of the control device 5 based on the measurement result of a position measurement device 1227 provided in the second drive system 122. The position measurement device 1227 measures the relative position between the first drive system 121 and the machining head 11. For example, the position measurement device 1227 may be an encoder including a detection unit 12271 attached to the support member 1221 and a scale unit 12272 attached to the support member 1222. The measurement result of the position measurement device 1227 includes information regarding the relative position between the support member 1221 and the support member 1222. Because the first drive system 121 is attached to the support member 1221 and the machining head 11 is attached to the support member 1222, the information regarding the relative position between the support member 1221 and the support member 1222 includes information regarding the relative position between the first drive system 121 and the machining head 11. Therefore, the control device 5 can appropriately identify the relative position between the first drive system 121 and the machining head 11. As a result, the control device 5 can appropriately change the relative position between the first drive system 121 and the machining head 11 based on the measurement result of the position measurement device 1227.

[0110] The driving member 1225 may change the relative position between the first drive system 121 and the machining head 11 (typically, move the machining head 11 with respect to the first drive system 121) under the control of the control device 5, thereby moving the machining head 11 with respect to the workpiece W. The driving member 1225 may move the machining head 11 so that the relative positional relationship between the machining head 11 and the workpiece W is changed.

[0111] The driving member 1225 may, under the control of the control device 5, use the driving force to change the relative position between the first drive system 121 and the machining head 11, thereby reducing vibrations transmitted between the first drive system 121 and the machining head 11 via the second drive system 122. In other words, the driving member 1225 may use the driving force to damp vibrations transmitted between the first drive system 121 and the machining head 11 via the second drive system 122. Specifically, the driving member 1225 may use the driving force to reduce (dampen) vibrations traveling from the first drive system 121 to (that is, transmitted through) the second drive system 122 to the machining head 11. For this reason, the driving member 1225 (or the second drive system 122 including the driving member 1225) may be referred to as a vibration reduction device or a vibration damping device.

[0112] The driving member 1225 may convert the vibration of the air spring 1223 into damped vibration by using the driving force to change the relative position between the first drive system 121 and the machining head 11. That is, the driving member 1225 may convert the vibration transmitted between the first drive system 121 and the machining head 11 via the second drive system 122 into damped vibration by using the driving force. In this case, it can be said that the driving member 1225 uses the driving force to reduce the amount of relative displacement between the first drive system 121 and the machining head 11 caused by the vibration from the first drive system 121 toward the machining head 11. Specifically, it can be said that the driving member 1225 uses the driving force to reduce the amount of relative displacement between a portion of the first drive system 121 to which the second drive system 122 is connected (i.e., the distal arm member 12124) and a portion of the machining head 11 to which the second drive system 122 is connected, caused by the vibration from the first drive system 121 toward the machining head 11. If the driving member 1225 can convert the vibration of the air spring 1223 into damped vibration, the second driving system 122 does not need to include the damper member 1224. However, even if the driving member 1225 cannot convert the vibration of the air spring 1223 into damped vibration, the second driving system 122 does not need to include the damper member 1224. Furthermore, the number of air springs 1223, the number of damper members 1224, and the number of driving members 1225 do not need to be equal to one another.

[0113] The driving member 1225 may apply a driving force acting along a direction including a component in the direction in which the air spring 1223 and / or the damper member 1224 apply an elastic force. In the example shown in FIG. 6 , since the air spring 1223 and / or the damper member 1224 apply an elastic force along the Z-axis direction, the driving member 1225 may apply a driving force acting along a direction including a component in the Z-axis direction. When the driving member 1225 generates a driving force acting along a direction including a component in the direction in which the air spring 1223 and / or the damper member 1224 apply an elastic force, the driving member 1225 can use this driving force to convert the vibration of the air spring 1223 into damped vibration. When converting the vibration of the air spring 1223 into damped vibration, the driving member 1225 may use the driving force to change the resonant frequency of the air spring 1223. Typically, the driving member 1225 may use the driving force to increase the resonant frequency of the air spring 1223.

[0114] A device that actively reduces vibrations using an elastic member such as the air spring 1223 and the drive member 1225 may be called an active vibration isolation device. Therefore, the second drive system 122 may be called an active vibration isolation device. An active vibration isolation device may also be called an active vibration isolation system (AVIS).

[0115] (1-4) Alignment operation Next, the alignment operation will be described. In the first embodiment, the processing system SYSa may perform at least one of the first alignment operation to the fourth alignment operation as the alignment operation. Therefore, the first alignment operation to the fourth alignment operation will be described in order below.

[0116] (1-4-1) First alignment operation The first alignment operation is an operation in which measurement light ML is irradiated onto any number of locations on the surface of the workpiece W, the distance D between the processing head 11 and the workpiece W is calculated based on the detection results of the measurement light ML, and the relative positional relationship between the workpiece W and the processing head 11 is controlled based on distance information regarding the calculated distance D.

[0117] When performing the first alignment operation, the processing head 11 irradiates the measurement light ML onto each of three or more irradiation areas WA on the workpiece W. In other words, the processing head 11 irradiates the measurement light ML onto three or more locations on the surface of the workpiece W. For example, as shown in FIG. 7(a), which is a plan view showing multiple irradiation areas WA on the workpiece W, and FIG. 7(b), which is a perspective view showing multiple irradiation areas WA on the workpiece W, the processing head 11 may irradiate the measurement light ML onto each of four irradiation areas WA on the workpiece W (specifically, irradiation areas WA#1 to WA#4).

[0118] Specifically, the processing head 11 deflects the measurement light ML#2-2 using the galvanometer mirror 1148, thereby irradiating the irradiation area WA#1 with measurement light ML#2-2-1, which is the measurement light ML#2-2 in a first deflection state. That is, the processing head 11 irradiates the irradiation area WA#1 with measurement light ML#2-2-1 traveling in a direction from the fθ lens 1162 toward the irradiation area WA#1. The processing head 11 deflects the measurement light ML#2-2 using the galvanometer mirror 1148, thereby irradiating the irradiation area WA#2 with measurement light ML#2-2-2, which is the measurement light ML#2-2 in a second deflection state. That is, the processing head 11 irradiates the irradiation area WA#2 with measurement light ML#2-2-2 traveling in a direction from the fθ lens 1162 toward the irradiation area WA#2. The processing head 11 deflects the measurement light ML#2-2 using the galvanometer mirror 1148, thereby irradiating the irradiation area WA#3 with measurement light ML#2-2-3, which is the measurement light ML#2-2 in a third deflection state. That is, the processing head 11 irradiates the irradiation area WA#3 with measurement light ML#2-2-3 traveling in a direction from the fθ lens 1162 toward the irradiation area WA#3. The processing head 11 deflects the measurement light ML#2-2 using the galvanometer mirror 1148, thereby irradiating the irradiation area WA#4 with measurement light ML#2-2-4, which is the measurement light ML#2-2 in a fourth deflection state. That is, the processing head 11 irradiates the irradiation area WA#4 with measurement light ML#2-2-4 traveling in a direction from the fθ lens 1162 toward the irradiation area WA#4.

[0119] The irradiated area WA does not necessarily have to be set in advance on the workpiece W, and the area on the surface of the workpiece W that is actually irradiated with the measurement light ML may be referred to as the irradiated area WA. In other words, the area on the surface of the workpiece W that overlaps with the target irradiation area MA at the time when the measurement light ML is irradiated onto the workpiece W may be referred to as the irradiated area WA.

[0120] The processing head 11 deflects the measurement light ML (specifically, measurement light ML#2-2) using the galvanometer mirror 1148 so that the measurement light ML is sequentially irradiated onto three or more irradiation areas WA. In the example shown in FIGS. 7(a) and 7(b), the processing head 11 deflects the measurement light ML using the galvanometer mirror 1148 so that the measurement light ML is sequentially irradiated onto irradiation areas WA#1 to WA#4. In this case, the processing head 11 controls the galvanometer mirror 1148 so that the target irradiation area MA overlaps with the irradiation area WA#1, and irradiates the irradiation area WA#1 with the measurement light ML when the target irradiation area MA overlaps with the irradiation area WA#1. Thereafter, the processing head 11 controls the galvanometer mirror 1148 so that the target irradiation area MA moves from the irradiation area WA#1 to the irradiation area WA#2, and irradiates the irradiation area WA#2 with the measurement light ML when the target irradiation area MA overlaps with the irradiation area WA#2. Thereafter, the processing head 11 controls the galvanometer mirror 1148 so that the target irradiation area MA moves from the irradiation area WA#2 to the irradiation area WA#3, and irradiates the irradiation area WA#3 with the measurement light ML when the target irradiation area MA overlaps the irradiation area WA#3. Thereafter, the processing head 11 controls the galvanometer mirror 1148 so that the target irradiation area MA moves from the irradiation area WA#3 to the irradiation area WA#4, and irradiates the irradiation area WA#4 with the measurement light ML when the target irradiation area MA overlaps the irradiation area WA#4. Thereafter, the processing head 11 controls the galvanometer mirror 1148 so that the target irradiation area MA moves from the irradiation area WA#4 to the irradiation area WA#1, and irradiates the irradiation area WA#1 with the measurement light ML when the target irradiation area MA overlaps the irradiation area WA#4. Thereafter, the same operation may be repeated.

[0121] Here, because the measurement light ML contains pulsed light as described above, the machining head 11 irradiates three or more irradiation areas WA on the workpiece W with different pulsed light, respectively. That is, the machining head 11 irradiates a first irradiation area WA with a first pulsed light contained in the measurement light ML, and irradiates a second irradiation area different from the first irradiation area WA with a second pulsed light different from the first pulsed light contained in the measurement light ML. In the example shown in FIGS. 7(a) and 7(b), the machining head 11 irradiates irradiation areas WA#1 to WA#4 with different pulsed light, respectively. That is, the machining head 11 irradiates irradiation area WA#1 with the first pulsed light contained in the measurement light ML, irradiates irradiation area WA#2 with the second pulsed light contained in the measurement light ML, irradiates irradiation area WA#3 with the third pulsed light contained in the measurement light ML, and irradiates irradiation area WA#4 with the fourth pulsed light contained in the measurement light ML.

[0122] When the measurement light ML is irradiated onto three or more irradiated areas WA on the workpiece W in this manner, the detector 1146 detects interference light between the measurement light ML (specifically, measurement light ML#2-3) and the reference light (specifically, measurement light ML#1-3) from each of the three or more irradiated areas WA. In the example shown in Figures 7(a) and 7(b), the detector 1146 detects interference light between the measurement light ML#2-3 and the measurement light ML#1-3 from the irradiated area WA#1, interference light between the measurement light ML#2-3 and the measurement light ML#1-3 from the irradiated area WA#2, interference light between the measurement light ML#2-3 and the measurement light ML#1-3 from the irradiated area WA#3, and interference light between the measurement light ML#2-3 and the measurement light ML#1-3 from the irradiated area WA#4.

[0123] As a result, the control device 5 can calculate the distance D between each of the three or more irradiated areas WA and the processing head 11. In the example shown in FIG. 7, the control device 5 calculates the difference between the length of the optical path OP#1-3 and the lengths of the optical paths OP#2-2 and OP#2-3 via the irradiated area WA#1 based on the detection result of the interference light between the measurement light ML#2-3 and the measurement light ML#1-3 from the irradiated area WA#1, and can calculate the distance D#1 between the irradiated area WA#1 and the processing head 11 based on the calculated difference. The control device 5 calculates the difference between the length of the optical path OP#1-3 and the lengths of the optical paths OP#2-2 and OP#2-3 via the irradiated area WA#2 based on the detection result of the interference light between the measurement light ML#2-3 and the measurement light ML#1-3 from the irradiated area WA#2, and can calculate the distance D#2 between the irradiated area WA#2 and the processing head 11 based on the calculated difference. Based on the detection result of the interference light between measurement light ML#2-3 and measurement light ML#1-3 from irradiated area WA#3, the control device 5 calculates the difference between the length of optical path OP#1-3 and the lengths of optical paths OP#2-2 and OP#2-3 via irradiated area WA#3, and based on the calculated difference, can calculate the distance D#1 between irradiated area WA#3 and processing head 11. Based on the detection result of the interference light between measurement light ML#2-3 and measurement light ML#1-3 from irradiated area WA#4, the control device 5 calculates the difference between the length of optical path OP#1-3 and the lengths of optical paths OP#2-2 and OP#2-3 via irradiated area WA#4, and based on the calculated difference, can calculate the distance D#1 between irradiated area WA#4 and processing head 11.

[0124] Thereafter, the control device 5 controls the relative positional relationship between the workpiece W and the processing head 11 based on distance information regarding three or more distances D corresponding to the three or more irradiation areas WA, respectively. For example, as described above, the control device 5 may control the relative positional relationship between the workpiece W and the processing head 11 based on the distance information so that the relative positional relationship between the workpiece W and the processing head 11 becomes a predetermined positional relationship. As an example of the "predetermined positional relationship," as described above, there is a positional relationship that allows the processing light EL to be appropriately irradiated onto the processing shot area ESA set at a desired position on the workpiece W.

[0125] Another example of a "predetermined positional relationship" is a positional relationship in which, in addition to or instead of being able to appropriately irradiate the processing shot area ESA set at a desired position on the workpiece W with the processing light EL, three or more distances D corresponding to three or more irradiation areas WA respectively have a predetermined distance relationship. In this case, the control device 5 may control the relative positional relationship between the workpiece W and the processing head 11 based on the distance information so that the three or more distances D have a predetermined distance relationship. In the example shown in FIGS. 7(a) and 7(b), the control device 5 may control the relative positional relationship between the workpiece W and the processing head 11 so that distances D#1 to D#4 have a predetermined distance relationship. Here, as shown in FIGS. 7(a) and 7(b), the surface of the workpiece W is typically a plane along the XY plane and intersects with the Z axis. In this case, the control device 5 can control the relative positional relationship between the workpiece W and the processing head 11 in each of the Z axis direction, the θX direction, and the θY direction by controlling the relative positional relationship between the workpiece W and the processing head 11 so that the three or more distances D have a predetermined distance relationship.

[0126] However, in order to control the relative positional relationship between the workpiece W and the machining head 11 in the θX direction, the measurement light ML may be irradiated onto each of at least two irradiation areas WA that are separated along the Y-axis direction. Therefore, when the control device 5 controls the relative positional relationship between the workpiece W and the machining head 11 in the θX direction, the machining head 11 may be irradiated with the measurement light ML onto each of at least two irradiation areas WA that are separated along the Y-axis direction. Similarly, in order to control the relative positional relationship between the workpiece W and the machining head 11 in the θY direction, the measurement light ML may be irradiated onto each of at least two irradiation areas WA that are separated along the X-axis direction. Therefore, when the control device 5 controls the relative positional relationship between the workpiece W and the machining head 11 in the θY direction, the machining head 11 may be irradiated with the measurement light ML onto each of at least two irradiation areas WA that are separated along the X-axis direction.

[0127] An example of the predetermined distance relationship is a relationship in which three or more distances D corresponding to three or more irradiated areas WA are the same as each other. In the example shown in Figures 7(a) and 7(b), an example of the predetermined distance relationship is a relationship in which distances D#1 to D#4 are the same as each other. Such a distance relationship may be used, for example, when the surface of the workpiece W is flat.

[0128] 8(a) and 8(b) are cross-sectional views showing the machining head 11 and the workpiece W whose positional relationship is controlled so that the distances D#1 to D#4 are the same (specifically, the target value D_target). As a result, as shown in FIGS. 8(a) and 8(b), the distance D between the machining head 11 and the workpiece W can be set to the target value D_target.

[0129] Note that when the relative positional relationship between the workpiece W and the machining head 11 in the Z-axis direction (typically, the distance D described above) changes, the focal position of the processing light EL with respect to the surface of the workpiece W in the Z-axis direction changes. For this reason, the operation of controlling the relative positional relationship between the workpiece W and the machining head 11 in the Z-axis direction may be considered to be substantially equivalent to the operation of controlling the focal position of the processing light EL with respect to the surface of the workpiece W in the Z-axis direction. In this case, in addition to or instead of controlling the relative positional relationship between the workpiece W and the machining head 11 in the Z-axis direction so that the distance D between the machining head 11 and the workpiece W becomes the target value D_target, the control device 5 may also control the focal position of the processing light EL with respect to the surface of the workpiece W in the Z-axis direction so that the relative positional relationship between the surface of the workpiece W and the focal position of the processing light EL in the Z-axis direction becomes the same as the relative positional relationship between the surface of the workpiece W and the focal position of the processing light EL in the Z-axis direction when the distance D becomes the target value D_target. The focus adjustment optical system 1123 of the processing optical system 112 described above is an example of a device that can control the focusing position of the processing light EL on the surface of the workpiece W in the Z-axis direction.

[0130] Furthermore, when three or more distances D corresponding to three or more irradiated areas WA are identical to each other, unintended tilt of the machining head 11 relative to the workpiece W is less likely to occur. For example, as shown in FIG. 8(a), unintended tilt of the machining head 11 in the θY direction relative to the workpiece W is less likely to occur. In other words, the machining head 11 and the workpiece W have an appropriate positional relationship in a plane along the XZ plane. Similarly, as shown in FIG. 8(b), unintended tilt of the machining head 11 in the θX direction relative to the workpiece W is less likely to occur. In other words, the machining head 11 and the workpiece W have an appropriate positional relationship in a plane along the YZ plane.

[0131] However, as described above, the machining system SYSa of the first embodiment machines the workpiece W. As a result of machining the workpiece W, the surface of the workpiece W may no longer be flat. In other words, the surface of the workpiece W may include an uneven surface. This is because the height (height in the Z-axis direction) of the machined area FA1 on the surface of the workpiece W that has already been machined may differ from the height of the unmachined area FA2 on the surface of the workpiece W that has not yet been machined. In this case, if the relative positional relationship between the workpiece W and the machining head 11 is controlled so that the distances D between the machining head 11 and each of the three or more irradiated areas WA are the same, the following technical problem may occur.

[0132] For example, as shown in Fig. 9, which is a cross-sectional view showing a machined area FA1 where removal processing has been performed and an unmachined area FA2 where removal processing has not been performed, the height of the machined area FA1 may be lower than the height of the unmachined area FA2. As a result, even though the machining head 11 is not inclined with respect to the workpiece W as shown in Fig. 9, the distance D between the machined area FA1 and the machining head 11 (distance D#2 in Fig. 9) may be greater than the distance D between the unmachined area FA2 and the machining head 11 (distance D#4 in Fig. 9). Specifically, the distance D#2 between the machined area FA1 and the machining head 11 may be greater than the distance D#4 between the unmachined area FA2 and the machining head 11 by the removal amount Ra (or an amount corresponding to the removal amount Ra), which corresponds to the size in the thickness direction of the workpiece W removed by removal processing. As another example, if a riblet structure is formed in the machined area FA1 by removal processing, the distance D#2 between the machined area FA1 and the processing head 11 may become larger by the removal amount Ra (or an amount corresponding to the removal amount Ra) than the distance D between the processing head 11 and a virtual surface (typically a surface corresponding to the surface of the unmachined area FA2) obtained by fitting the portion corresponding to the peaks of the riblet structure formed in the machined area FA1. Under such circumstances, if the relative positional relationship between the workpiece W and the processing head 11 is controlled so that the distance D#2 between the machined area FA1 and the processing head 11 and the distance D#4 between the unmachined area FA2 and the processing head 11 are the same, there is a possibility that the processing head 11, which was not initially tilted relative to the workpiece W, may end up tilting relative to the workpiece W, as shown in FIG. 10.

[0133] Alternatively, if a riblet structure is formed in the machined area FA1, the height of the portion of the machined area FA1 corresponding to the grooves of the riblet structure (i.e., the portion of the machined area FA1 that has actually been removed) may be lower than the height of the portion of the machined area FA1 corresponding to the peaks of the riblet structure (i.e., the portion of the machined area FA1 that has not actually been removed). Specifically, the distance D between the portion of the machined area FA1 corresponding to the grooves of the riblet structure and the machining head 11 may be greater than the distance D between the portion of the machined area FA1 corresponding to the peaks of the riblet structure and the machining head 11 by the removal amount Ra (or an amount corresponding to the removal amount Ra). Under such circumstances, if the relative positional relationship between the workpiece W and the machining head 11 is controlled so that the distance D between the portion of the machined area FA1 corresponding to the grooves of the riblet structure and the machining head 11 is the same as the distance D between the portion of the machined area FA1 corresponding to the peaks of the riblet structure and the machining head 11, the machining head 11, which was not initially tilted relative to the workpiece W, may end up tilting relative to the workpiece W.

[0134] 11, which is a cross-sectional view showing a machined area FA1 where additional machining has been performed and an unmachined area FA2 where additional machining has not been performed, for example, the height of the machined area FA1 may be higher than the height of the unmachined area FA2. As a result, even though the machining head 11 is not inclined with respect to the workpiece W, the distance D (distance D#4 in FIG. 9) between the machined area FA1 and the machining head 11 may be smaller than the distance D (distance D#2 in FIG. 9) between the unmachined area FA2 and the machining head 11. Specifically, the distance D#4 between the machined area FA1 and the machining head 11 may be smaller than the distance D#2 between the unmachined area FA2 and the machining head 11 by an additional amount Aa (or an amount corresponding to the additional amount Aa) corresponding to the size in the thickness direction of the structure added by additional machining. Under such circumstances, if the relative positional relationship between the workpiece W and the machining head 11 is controlled so that the distance D#4 between the machined area FA1 and the machining head 11 and the distance D#2 between the unmachined area FA2 and the machining head 11 are the same, there is a possibility that the machining head 11, which was not initially inclined relative to the workpiece W, will become inclined relative to the workpiece W.

[0135] Alternatively, if a riblet structure is formed in the machined area FA1, the height of the portion corresponding to the peaks of the riblet structure (i.e., the portion of the machined area FA1 that has actually been machined) may be higher within the machined area FA1 than the height of the portion corresponding to the grooves of the riblet structure (i.e., the portion of the machined area FA1 that has not actually been machined). Specifically, the distance D between the portion corresponding to the peaks of the riblet structure and the machining head 11 may be smaller than the distance D between the portion corresponding to the grooves of the riblet structure and the machining head 11 by the additional amount Aa (or an amount corresponding to the additional amount Aa). Under such circumstances, if the relative positional relationship between the workpiece W and the machining head 11 is controlled so that the distance D between the portion corresponding to the grooves of the riblet structure and the machining head 11 is the same as the distance D between the portion corresponding to the peaks of the riblet structure and the machining head 11, the machining head 11, which was not initially tilted relative to the workpiece W, may end up tilting relative to the workpiece W.

[0136] Therefore, the control device 5 may control the relative positional relationship between the workpiece W and the processing head 11 based on the above-mentioned removal amount Ra and / or addition amount Aa in addition to the distance information. Specifically, in order to control the relative positional relationship between the workpiece W and the processing head 11 based on the removal amount Ra and / or addition amount Aa, the control device 5 may first correct the distance information based on the removal amount Ra and / or addition amount Aa.

[0137] For example, as described above, the distance D between the processed area FA1 where removal processing has been performed and the processing head 11 is greater by the removal amount Ra (or an amount corresponding to the removal amount Ra) than the distance D between the unprocessed area FA2 where removal processing has not been performed and the processing head 11. Therefore, the control device 5 may perform a removal amount reflection process on the distance D calculated from the detection result of the measurement light ML to eliminate the influence of the removal amount Ra. The removal amount reflection process may include a process of subtracting the removal amount Ra (or an amount corresponding to the removal amount Ra) from the distance D between the irradiated area WA located in the processed area FA1 and the processing head 11, but not subtracting the removal amount Ra (or an amount corresponding to the removal amount Ra) from the distance D between the irradiated area WA located in the unprocessed area FA2 and the processing head 11. Furthermore, the removal amount reflection process may include a process of subtracting the removal amount Ra (or an amount corresponding to the removal amount Ra) from the distance D between the irradiated area WA located in the portion corresponding to the groove of the riblet structure and the machining head 11, while not subtracting the removal amount Ra (or an amount corresponding to the removal amount Ra) from the distance D between the irradiated area WA located in the portion corresponding to the peak of the riblet structure and the machining head 11. Thereafter, the control device 5 may control the relative positional relationship between the workpiece W and the machining head 11 so that the distances D after the removal amount reflection process are the same. As a result, even if removal processing has already been performed on at least a portion of the workpiece W, unintended tilting of the machining head 11 with respect to the workpiece W is less likely to occur.

[0138] Similarly, for example, as described above, the distance D between the machined area FA1 where additional processing has been performed and the machining head 11 becomes smaller by the additional amount Aa (or an amount corresponding to the additional amount Aa) than the distance D between the unmachined area FA2 where additional processing has not been performed and the machining head 11. Therefore, the control device 5 performs an additional amount reflection process on the distance D calculated from the detection result of the measurement light ML to eliminate the influence of the additional amount Aa. The additional amount reflection process may include a process of adding the additional amount Aa (or an amount corresponding to the additional amount Aa) to the distance D between the irradiated area WA located in the machined area FA1 and the machining head 11, while not adding the additional amount Aa (or an amount corresponding to the additional amount Aa) to the distance D between the irradiated area WA located in the unmachined area FA2 and the machining head 11. Furthermore, the additional amount reflection process may include a process of adding the additional amount Aa (or an amount corresponding to the additional amount Aa) to the distance D between the irradiated area WA located in the portion corresponding to the peak of the riblet structure and the machining head 11, while not adding the additional amount Aa (or an amount corresponding to the additional amount Aa) to the distance D between the irradiated area WA located in the portion corresponding to the groove of the riblet structure and the machining head 11. Thereafter, the control device 5 may control the relative positional relationship between the workpiece W and the machining head 11 so that the distances D after the additional amount reflection process are the same. As a result, even if additional machining has already been performed on at least a portion of the workpiece W, unintended tilting of the machining head 11 with respect to the workpiece W is less likely to occur.

[0139] Considering that the distance D is calculated based on the optical path difference information as described above, the operation of correcting the distance information may be considered to be substantially equivalent to the operation of indirectly correcting the optical path difference information. Alternatively, the control device 5 may directly correct the optical path difference information in addition to or instead of correcting the distance information. That is, the control device 5 may indirectly correct the distance information by directly correcting the optical path difference information. In this case, the removal amount reflection process may include a process of subtracting the removal amount Ra (or an amount corresponding to the removal amount Ra) from the difference between the lengths of the optical paths OP#2-2 and OP#2-3 via the irradiated area WA located within the processed area FA1 and the optical path OP#1-3, but not subtracting the removal amount Ra (or an amount corresponding to the removal amount Ra) from the difference between the lengths of the optical paths OP#2-2 and OP#2-3 via the irradiated area WA and the optical path OP#1-3. The removal amount reflection process may include a process of subtracting the removal amount Ra (or an amount corresponding to the removal amount Ra) from the difference between the length of the optical paths OP#2-2 and OP#2-3 through the irradiated areas WA located in the parts corresponding to the grooves of the riblet structure and the length of the optical paths OP#1-3, while not subtracting the removal amount Ra (or an amount corresponding to the removal amount Ra) from the difference between the length of the optical paths OP#2-2 and OP#2-3 through the irradiated areas WA located in the parts corresponding to the peaks of the riblet structure and the length of the optical paths OP#1-3. The additional amount reflection process may include adding additional amount Aa (or an amount corresponding to additional amount Aa) to the difference between the length of optical paths OP#2-2 and OP#2-3 through the irradiated area WA located within the processed area FA1 and the length of optical path OP#1-3, while not adding additional amount Aa (or an amount corresponding to additional amount Aa) to the difference between the length of optical paths OP#2-2 and OP#2-3 through the irradiated area WA located within the unprocessed area FA2 and the length of optical path OP#1-3.The additional amount reflection process may also include a process of adding the additional amount Aa (or a quantity corresponding to the additional amount Aa) to the difference between the length of the optical paths OP#2-2 and OP#2-3 through the irradiated areas WA located in the portions corresponding to the peaks of the riblet structure and the length of the optical paths OP#1-3, while not adding the additional amount Aa (or a quantity corresponding to the additional amount Aa) to the difference between the length of the optical paths OP#2-2 and OP#2-3 through the irradiated areas WA located in the portions corresponding to the grooves of the riblet structure and the length of the optical paths OP#1-3. The control device 5 may then calculate the distance D based on the optical path difference information that has been subjected to the removal amount reflection process or the additional amount reflection process. The calculated distance D is substantially the same as the distance D that has been subjected to the removal amount reflection process or the additional amount reflection process. The control device 5 may then control the relative positional relationship between the workpiece W and the machining head 11 so that the calculated distances D are the same.

[0140] When performing such removal amount reflection processing and / or addition amount reflection processing, the control device 5 may determine whether the irradiated area WA irradiated with the measurement light ML is located within the processed area FA1 or within the unprocessed area FA2.

[0141] For example, the machining head 11 machines the workpiece W under the control of the control device 5. Therefore, it can be said that the position of the machined area FA1 on the workpiece W is known information to the control device 5. Therefore, the control device 5 may determine whether the irradiated area WA irradiated with the measurement light ML is located within the machined area FA1 or within the unmachined area FA2, based on information used to control the machining head 11 to machine the workpiece W. Typically, the control device 5 may determine whether the irradiated area WA irradiated with the measurement light ML is located within the machined area FA1 or within the unmachined area FA2, based on internal information that directly or indirectly indicates the position of the machined area FA1 on the workpiece W.

[0142] For example, the control device 5 may determine whether the irradiated area WA irradiated with the measuring light ML is located within the machined area FA1 or the unmachined area FA2 based on the observation results of an observation device capable of observing the surface state of the workpiece. An example of such an observation device is an imaging device such as a camera. Note that the position measurement device 6b described in the second embodiment may also be used as the observation device.

[0143] For example, the control device 5 may determine whether the irradiated area WA irradiated with the measurement light ML is located within the processed area FA1 or the unprocessed area FA2 based on the relationship between the multiple distances D corresponding to the multiple irradiated areas WA (i.e., based on the distance information). Specifically, if (i) the multiple distances D corresponding to multiple first irradiated areas WA among the multiple irradiated areas WA are the same, (ii) the multiple distances D corresponding to multiple second irradiated areas WA other than the multiple first irradiated areas WA among the multiple irradiated areas WA are the same, and (iii) the difference between the distance D corresponding to each of the multiple first irradiated areas WA and the distance D corresponding to each of the multiple second irradiated areas WA matches the above-mentioned removal amount Ra or addition amount Aa (or is a constant amount), it is estimated that there is a relatively high possibility that the multiple first irradiated areas WA are located either within the processed area FA1 or the unprocessed area FA2, and that the multiple second irradiated areas WA are located either within the processed area FA1 or the unprocessed area FA2. In particular, when the processing head 11 performs removal processing, if the distance D corresponding to each of the multiple first irradiated areas WA is larger by a certain amount than the distance D corresponding to each of the multiple second irradiated areas WA (for example, larger by the above-mentioned removal amount Ra), it is estimated that there is a relatively high possibility that the multiple first irradiated areas WA are located in the processed area FA1 and the multiple second irradiated areas WA are located in the unprocessed area FA2. On the other hand, when the processing head 11 performs additional processing, if the distance D corresponding to each of the multiple first irradiated areas WA is larger by a certain amount than the distance D corresponding to each of the multiple second irradiated areas WA (for example, larger by the above-mentioned additional amount Aa), it is estimated that there is a relatively high possibility that the multiple first irradiated areas WA are located in the unprocessed area FA2 and the multiple second irradiated areas WA are located in the processed area FA1. In this way, the control device 5 can determine (in other words, estimate) whether the irradiated area WA irradiated with the measurement light ML is located within the processed area FA1 or the unprocessed area FA2 based on the relationship between the multiple distances D corresponding to each of the multiple irradiated areas WA.

[0144] In addition, the surface of the workpiece W may not be flat due to factors other than the processing performed by the processing head 11. The surface of the workpiece W may not be flat even when the processing head 11 is not processing. For example, the shape of the surface of the workpiece W may not be flat to begin with. In this case, the above-mentioned technical problem may occur, in that the processing head 11, which was not initially tilted relative to the workpiece W, may become tilted relative to the workpiece W. However, unlike the above-mentioned removal amount Ra and addition amount Aa, the shape of the surface of the workpiece W is not necessarily known to the control device 5. On the other hand, if the measurement light ML is irradiated onto a flat portion of the surface of the workpiece W, the possibility of the above-mentioned technical problem occurring is reduced. In other words, if the measurement light ML is irradiated while avoiding non-flat portions of the surface of the workpiece W, the possibility of the above-mentioned technical problem occurring is reduced. This is because the above-mentioned technical problem occurs when the measurement light ML is irradiated onto multiple portions of the surface of the workpiece W that have different heights (e.g., an uneven surface).

[0145] Therefore, the control device 5 may exclude at least one distance D that can be considered to be clearly abnormal compared to the other distances D (for example, the difference from the other distances D is clearly large) from among the multiple distances D corresponding to the multiple irradiated areas WA. The control device 5 may control the positional relationship between the workpiece W and the machining head 11 based on the distances D that were not excluded, without using the excluded distances D. As a result, unintended tilting of the machining head 11 relative to the workpiece W becomes relatively less likely to occur. Note that when the difference between one distance D and the other distances D is larger than a predetermined value, the one distance D may be determined to be an abnormal value and excluded.

[0146] Alternatively, in addition to or instead of eliminating distances D that can be considered to be abnormal values ​​(for example, distances D that are excessively large in difference from other distances D), the control device 5 may perform processing to increase the likelihood that the measurement light ML will be irradiated onto a flat portion of the surface of the workpiece W.

[0147] One example of a process for increasing the likelihood that the measurement light ML will be irradiated onto a flat portion of the surface of the workpiece W is a process for changing the position of at least one of the three or more irradiated areas WA onto which the measurement light ML is irradiated. In this case, the control device 5 may change the position of at least one irradiated area WA on the workpiece W. More specifically, the control device 5 may change the position of at least one irradiated area WA on the workpiece W along at least one of the X-axis direction and the Y-axis direction. For example, FIG. 13 is a plan view showing how the position of the irradiated area WA#1 is changed. When the position of at least one irradiated area WA changes, the distribution of the three or more irradiated areas WA on the workpiece W also changes. Therefore, the control device 5 may change the distribution of the three or more irradiated areas WA on the workpiece W. When the position of at least one irradiated area WA changes, the trajectory connecting the three or more irradiated areas WA on the workpiece W also changes. Therefore, the control device 5 may change the trajectory connecting the three or more irradiated areas WA. As a result, the likelihood that the measurement light ML will be irradiated onto a flat portion of the surface of the workpiece W is increased compared to when the three or more irradiated areas WA are always fixed. In particular, in a situation where multiple different types of workpieces W are placed sequentially on the stage 32, if the position of at least one of the three or more irradiated areas WA is changed for each workpiece W placed on the stage 32, the possibility that the measurement light ML will be irradiated onto each of the multiple types of workpieces W increases.

[0148] It should be noted that a measurement device other than the measurement device using the measurement light ML (measurement light source 113, measurement optical system 114, composite optical system 115, common optical system 116) may be used to identify the flat portion of the surface of the workpiece W. This measurement device may be connected to the control device 5. In this case, the control device 5 may use the output from the measurement device to identify the flat portion of the surface of the workpiece W, and control the position of the irradiated area WA to be irradiated with the measurement light ML to be positioned within that portion.

[0149] The control device 5 may change the position of at least one of the three or more irradiated areas WA by changing the irradiation position of the measurement light ML. In this case, the control device 5 may change the irradiation position of the measurement light ML by controlling the galvanometer mirror 1148. As described above, the irradiated area WA is irradiated with pulsed light contained in the measurement light ML. Therefore, the control device 5 may change the position of at least one of the three or more irradiated areas WA by changing the irradiation position of the pulsed light contained in the measurement light ML. In this case, the control device 5 may change the irradiation position of the pulsed light by controlling the galvanometer mirror 1148. Alternatively, in addition to or instead of controlling the galvanometer mirror 1148, the control device 5 may change the irradiation position of the pulsed light by controlling the measurement light source 113 to change the emission frequency of the pulsed light (i.e., change the emission period). This is because, when the moving speed of the target irradiation area MA on the workpiece W (i.e., the scanning speed of the measurement light ML by the galvanometer mirror 1148) is constant, the irradiation position of the pulsed light also changes when the emission frequency of the pulsed light changes. For example, the control device 5 may change the position of at least one of the three or more irradiation areas WA by changing the movement trajectory MT of the target irradiation area MA. In this case, the control device 5 may change the movement trajectory MT by controlling the galvanometer mirror 1148.

[0150] As described above, the measurement light ML is irradiated within the measurement shot area MSA. In other words, the irradiated area WA is included in the measurement shot area MSA. In this case, the process of changing the position of at least one irradiated area WA on the workpiece W may include a process of changing the position of at least one irradiated area WA within the measurement shot area MSA. In other words, the control device 5 may change the position of at least one irradiated area WA within the measurement shot area MSA. Furthermore, the control device 5 may change the position of the measurement shot area MSA itself on the workpiece W. In this case, the position of at least one irradiated area WA included in the measurement shot area MSA is changed on the workpiece W in accordance with the change in the position of the measurement shot area MSA.

[0151] One example of a process for increasing the likelihood that the measurement light ML will be irradiated onto a flat portion of the surface of the workpiece W is a process for changing the number of irradiation areas WA. In this case, the control device 5 may change the number of irradiation areas WA. For example, the control device 5 may change the number of irradiation areas WA so that it increases. For example, FIG. 14 is a plan view showing an example in which the number of irradiation areas WA is changed from four to eight. That is, FIG. 14 is a plan view showing an example in which, under a situation in which the measurement light ML is irradiated onto irradiation areas WA#1 to WA#4, the number of irradiation areas WA is changed so that the measurement light ML is newly irradiated onto irradiation areas WA#5 to WA#8. As a result, compared to when the number of irradiation areas WA is relatively small, the likelihood that the measurement light ML will be irradiated onto a flat portion of the surface of the workpiece W is increased. Note that in addition to the number of irradiation areas WA, FIG. 14 also shows how the shape of the movement trajectory MT of the target irradiation area MA is changed from rectangular to circular.

[0152] Furthermore, the number of irradiated areas WA may be changed so that the flat portions of the surface of the workpiece W are identified using another measuring device as described above, and the irradiated areas WA onto which the measuring light ML is irradiated are positioned within those portions.

[0153] The control device 5 may change the number of irradiated areas WA by controlling the scanning speed of the measurement light ML by the galvanometer mirror 1148. That is, the control device 5 may change the number of irradiated areas WA by controlling the galvanometer mirror 1148. Alternatively, in addition to or instead of controlling the galvanometer mirror 1148, the control device 5 may change the number of irradiated areas WA by controlling the measurement light source 113 to change the emission frequency of the pulsed light (that is, to change the emission period). This is because, in a situation where the moving speed of the target irradiation area MA on the workpiece W (that is, the scanning speed of the measurement light ML by the galvanometer mirror 1148) is constant, if the emission frequency of the pulsed light changes, the number of pulsed lights irradiated onto the workpiece W within a certain period of time also changes.

[0154] The control device 5 may change the position of at least one irradiated area WA and / or the number of irradiated areas WA for a purpose other than the purpose of increasing the possibility that the measurement light ML will be irradiated onto a flat portion of the surface of the workpiece W. In this way, when the processing head 11 irradiates the measurement light ML onto three or more irradiated areas WA, the control device 5 can appropriately control the relative positional relationship between the workpiece W and the processing head 11 in each of the Z-axis direction, the θX direction, and the θY direction.

[0155] However, the machining head 11 may also irradiate two irradiation areas WA with the measurement light ML. In other words, the machining head 11 may irradiate two locations on the surface of the workpiece W with the measurement light ML. In this case, the control device 5 can appropriately control the relative positional relationship between the workpiece W and the machining head 11 in each of the Z-axis direction and the direction around an axis perpendicular to the Z axis. Specifically, the control device 5 can appropriately control the relative positional relationship between the workpiece W and the machining head 11 in each of the Z-axis direction and the direction around an axis perpendicular to both the Z axis and the axis connecting the two irradiation areas WA.

[0156] Alternatively, the machining head 11 may irradiate a single irradiation area WA with the measurement light ML. In other words, the machining head 11 may irradiate the measurement light ML to only one location on the surface of the workpiece W. In this case, the control device 5 can appropriately control the relative positional relationship between the workpiece W and the machining head 11 in the Z-axis direction.

[0157] As shown in FIGS. 7 and 14 , the processing head 11 may irradiate the measurement light ML so that the trajectory connecting three or more irradiation areas WA surrounds the processing shot area ESA that will be processed or is currently being processed (the processing shot area ESA to be processed or the processing shot area ESA being processed, hereinafter referred to as the target shot area ESA). Because the target irradiation area MA of the measurement light ML moves through three or more irradiation areas WA, the processing head 11 may irradiate the measurement light ML so that the movement trajectory MT of the target irradiation area MA surrounds the target shot area ESA. As described above, the target irradiation area MA moves within the measurement shot area MSA. Therefore, the processing head 11 may irradiate the measurement light ML in a state in which the measurement shot area MSA at least partially overlaps with the target shot area ESA. In this case, compared to when the trajectory connecting three or more irradiation areas WA does not surround the target shot area ESA, the likelihood that the multiple irradiation areas WA will be distributed over a relatively wide range on the surface of the workpiece W is relatively high. In other words, the machining head 11 is more likely to be able to irradiate the measurement light ML onto positions that are relatively widely dispersed on the surface of the workpiece W. As a result, the control device 5 can more accurately determine the positional relationship of the workpiece W with respect to the machining head 11 based on the distance information. This is because, if multiple irradiated areas WA are concentrated in a relatively narrow range on the surface of the workpiece W, the range of the surface of the workpiece W whose positional relationship with the machining head 11 can be determined based on the distance information is limited to the relatively narrow range irradiated by the measurement light ML. Therefore, if the measurement light ML is irradiated onto positions that are relatively widely dispersed on the surface of the workpiece W, the control device 5 can more appropriately control the relative positional relationship between the workpiece W and the machining head 11 based on the distance information.

[0158] 7 shows an example in which the movement trajectory MT of the target irradiation area MA is rectangular. Such a rectangular movement trajectory MT is an example of a movement trajectory MT that can surround the target shot area ESA. Other examples of the movement trajectory MT that can surround the target shot area ESA include at least one of a circular movement trajectory MT (see FIG. 14), an elliptical movement trajectory MT, a polygonal movement trajectory MT, and a loop-shaped movement trajectory MT.

[0159] However, the movement trajectory MT does not have to surround the target shot area ESA. A trajectory connecting three or more irradiation areas WA does not have to surround the target shot area ESA. At least a portion of the movement trajectory MT may cross the target shot area ESA. At least a portion of the movement trajectory MT may be located inside the target shot area ESA. At least a portion of the movement trajectory MT may be located outside the target shot area ESA. For example, as shown in FIG. 15, which is a plan view showing another example of the movement trajectory MT, the movement trajectory MT may be a trajectory in which the target irradiation area MA moves in a first direction (which may be referred to as the scanning direction) and a trajectory in which the target irradiation area MA moves in a direction including a directional component of a second direction (which may be referred to as the stepping direction) that intersects the first direction are alternately repeated.

[0160] The processing head 11 may irradiate the measurement light ML so that at least one of the three or more irradiation areas WA is positioned within the target shot area ESA. In other words, the processing head 11 may irradiate the measurement light ML one or more times within the target shot area ESA. The processing head 11 may irradiate the measurement light ML so that at least one of the three or more irradiation areas WA is positioned near or around the target shot area ESA. In other words, the processing head 11 may irradiate the measurement light ML one or more times near or around the target shot area ESA. The processing head 11 may irradiate the measurement light ML so that at least one of the three or more irradiation areas WA is positioned at a position away from the target shot area ESA along at least one of the X-axis direction and the Y-axis direction. In other words, the processing head 11 may irradiate the measurement light ML one or more times at a position away from the target shot area ESA along at least one of the X-axis direction and the Y-axis direction.

[0161] 7 and 13 to 14 show an example in which each of the irradiation areas WA#1 to WA#4 is arranged near or around the target shot area ESA. That is, FIGS. 7 and 13 to 14 show an example in which the processing head 11 irradiates the measurement light ML multiple times near or around the target shot area ESA. In particular, FIGS. 7 and 13 to 14 show an example in which the irradiation area WA#1 is arranged at a position away from the target shot area ESA toward the -Y side, the irradiation area WA#2 is arranged at a position away from the target shot area ESA toward the -X side, the irradiation area WA#3 is arranged at a position away from the target shot area ESA toward the +Y side, and the irradiation area WA#4 is arranged at a position away from the target shot area ESA toward the +X side. 7 and 13 to 14 show examples in which processing head 11 irradiates measurement light ML to a position away from target shot area ESA toward the -Y side, and to a position in which irradiation area WA#2 is away from target shot area ESA toward the -X side, a position away from target shot area ESA toward the +Y side, and a position away from target shot area ESA toward the +X side. On the other hand, Fig. 15 shows an example in which some of the multiple irradiation areas WA are arranged in the vicinity of or around target shot area ESA, and other parts of the multiple irradiation areas WA are arranged within target shot area ESA.

[0162] Alternatively, all of the above-described FIGS. 7 and 13 to 15 show examples in which the entire target shot area ESA is included in the measurement shot area MSA. However, at least a portion of the target shot area ESA may be located outside the measurement shot area MSA. For example, as shown in FIG. 16, which is a plan view showing an example of the positional relationship between the target shot area ESA and the measurement shot area MSA, the entire target shot area ESA may be located outside the measurement shot area MSA. In this case, the position of the measurement shot area MSA may be set based on the position of the target shot area ESA. The processing head 11 may irradiate the measurement light ML to a position determined based on the position of the target shot area ESA. Alternatively, the position of the measurement shot area MSA may be set regardless of the position of the target shot area ESA. The processing head 11 may irradiate the measurement light ML to a desired position on the workpiece W regardless of the position of the target shot area ESA.

[0163] The processing head 11 may irradiate the measurement light ML so that at least one of the three or more irradiated areas WA is positioned away from the area affected by the processing light EL along at least one of the X-axis and Y-axis directions, in order to avoid the area affected by the processing light EL. That is, the processing head 11 may irradiate the measurement light ML at a position away from the area affected by the processing light EL along at least one of the X-axis and Y-axis directions, in order to avoid the area affected by the processing light EL. Typically, the measurement shot area MSA itself may be positioned away from the area affected by the processing light EL along at least one of the X-axis and Y-axis directions. In this case, the processing head 11 can irradiate the workpiece W with the measurement light ML without being affected by the processing light EL. That is, the processing head 11 can irradiate the workpiece W with the measurement light ML that is not affected by the processing light EL. As a result, the control device 5 can calculate the distance D between the workpiece W and the processing head 11 with higher accuracy. As a result, the control device 5 can more appropriately control the relative positional relationship between the workpiece W and the machining head 11.

[0164] An example of an area affected by the processing light EL is an area into which fumes (or other unnecessary substances) generated by irradiating the workpiece W with the processing light EL flow. For example, FIG. 17 is a plan view showing the workpiece W being irradiated with the processing light EL. As shown in FIG. 17, fumes (or other unnecessary substances) may be generated when the processing light EL is irradiated onto the workpiece W. Such fumes may interfere with the irradiation of the measurement light ML onto the workpiece W. Therefore, the processing head 11 may irradiate the measurement light ML so that the optical path of the measurement light ML does not overlap with the fumes. Specifically, the processing head 11 may irradiate the measurement light ML so that at least one of the three or more irradiated areas WA is positioned away from the area into which the fumes flow along at least one of the X-axis direction and the Y-axis direction. The measurement shot area MSA may be positioned away from the area into which the fumes flow along at least one of the X-axis direction and the Y-axis direction. In the example shown in Fig. 17, the processing head 11 irradiates the measurement light ML so that all of the irradiated areas WA#1 to #4 are positioned along the +X side away from the area where the fumes flow in (that is, away in the direction opposite to the direction where the fumes flow out from the processing shot area ESA). That is, in the example shown in Fig. 17, the processing head 11 irradiates the measurement light ML at a position away from the area where the fumes flow in along the +X side. In particular, in the example shown in Fig. 17, the measurement shot area MSA itself is positioned along the +X side away from the area where the fumes flow in (that is, away in the direction opposite to the direction where the fumes flow out from the processing shot area ESA).

[0165] 17, gas may be supplied along the surface of the workpiece W from a gas supply device (not shown) located on the +X-axis direction side of the processing shot area ESA. In this case, at least one of the irradiated areas WA may be located between the processing shot area ESA and the gas supply device (particularly, its gas supply port) (between the irradiation optical system and the gas supply device (particularly, its gas supply port) when viewed from the optical axis direction of the irradiation optical system).

[0166] Another example of an area affected by the processing light EL is an area affected by heat generated when the processing light EL is irradiated onto the workpiece W. In this case, the processing head 11 may also irradiate the measurement light ML so that at least one of the three or more irradiated areas WA is positioned at a distance along at least one of the X-axis and Y-axis directions from the area affected by the heat generated when the processing light EL is irradiated onto the workpiece W. In other words, the processing head 11 may irradiate the measurement light ML at a position away from the area affected by the heat generated when the processing light EL is irradiated onto the workpiece W in at least one of the X-axis and Y-axis directions. The measurement shot area MSA may also be positioned at a distance along at least one of the X-axis and Y-axis directions from the area affected by the heat generated when the processing light EL is irradiated onto the workpiece W.

[0167] (1-4-2) Second alignment operation Next, the second alignment operation will be described. The second alignment operation is an operation for controlling the relative positional relationship between the workpiece W and the machining head 11 based on shape information related to the shape of the workpiece W in addition to the optical path difference information described above (i.e., distance information related to the distance D calculated based on the optical path difference information).

[0168] When performing the second alignment operation, the control device 5 acquires shape information regarding the shape of the workpiece W. The shape information may include model data (e.g., CAD (Computer Aided Design) data) regarding the workpiece model WM, which is a three-dimensional model of the workpiece W. The control device 5 may acquire the shape information from a device external to the processing system SYSa. Alternatively, if the processing system SYSa is equipped with a three-dimensional shape measuring device, the control device 5 may acquire the shape information from the three-dimensional shape measuring device equipped in the processing system SYSa. An example of a three-dimensional shape measuring device is a contact-type three-dimensional shape measuring device that is movable relative to the workpiece W and has a probe that can contact the workpiece W. Another example of a three-dimensional shape measuring device is a non-contact-type three-dimensional shape measuring device. Examples of non-contact-type three-dimensional shape measuring devices include a pattern projection-type three-dimensional shape measuring device, a light-section-type three-dimensional shape measuring device, a time-of-flight-type three-dimensional shape measuring device, a moire topography-type three-dimensional shape measuring device, and a holographic interferometry-type three-dimensional shape measuring device. When the processing system SYSa is equipped with a three-dimensional shape measuring device, the relative positional relationship of this three-dimensional shape measuring device to the processing head 11 and, in turn, to the common optical system 116 (particularly, the fθ lens 1162) may be fixed. Furthermore, when this three-dimensional shape measuring device is an optical three-dimensional shape measuring device, the positional relationship between the optical axis of this optical three-dimensional shape measuring device and the optical axis AX of the optical system of the processing head 11 (particularly, the common optical system 116 (particularly, the fθ lens 1162)) may be fixed.

[0169] Furthermore, when the second alignment operation is performed, the control device 5 calculates the distance D between each of the three or more irradiation areas WA and the processing head 11, in the same manner as when the first alignment operation is performed.

[0170] Thereafter, the control device 5 estimates the shape of the workpiece W (particularly, the shape of the surface of the workpiece W including the area irradiated with the measurement light ML) based on the distance information regarding the calculated distance D. Note that a known method may be used as a method for estimating the shape of an object based on the distances to multiple points on the object, and therefore a detailed description thereof will be omitted.

[0171] The control device 5 then performs a matching process (e.g., a shape matching process or a pattern matching process) between the shape of the workpiece W estimated from the distance information and the shape of the workpiece model WM indicated by the shape information. Specifically, the control device 5 performs a matching process to identify which part of the surface of the workpiece W, the shape of which is estimated from the distance information, corresponds to which part of the surface of the workpiece model WM indicated by the shape information. The control device 5 then fits the workpiece model WM to at least a part of the surface of the workpiece W, the shape of which is estimated from the distance information, based on the results of the matching process. As a result, the control device 5 can identify the relative positional relationship between the machining head 11 and the workpiece model WM. Here, because the workpiece model WM is fitted to at least a part of the surface of the workpiece W, the relative positional relationship between the machining head 11 and the workpiece model WM is equivalent to the relative positional relationship between the machining head 11 and the workpiece W. Therefore, the control device 5 can identify the current relative positional relationship between the machining head 11 and the workpiece W. In particular, the control device 5 can identify the current relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, Y-axis direction, Z-axis direction, θX direction, θY direction, and θz direction.

[0172] Thereafter, the control device 5 controls the relative positional relationship between the machining head 11 and the workpiece W based on the current relative positional relationship between the machining head 11 and the workpiece W. In particular, the control device 5 can control the relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, Y-axis direction, Z-axis direction, θX direction, θY direction, and θz direction. This is because, as described above, the control device 5 can identify the current relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, Y-axis direction, Z-axis direction, θX direction, θY direction, and θz direction based on the distance information and shape information.

[0173] According to this second alignment operation, the control device 5 can control the relative positional relationship between the machining head 11 and a workpiece W having an arbitrary shape. Specifically, regardless of the shape of the workpiece W placed on the stage 32, the control device 5 can control the relative positional relationship between the machining head 11 and the workpiece W. For example, the control device 5 can control the relative positional relationship between the machining head 11 and a workpiece W whose surface is not flat. For example, the control device 5 can control the relative positional relationship between the machining head 11 and a workpiece W whose surface includes at least one of an uneven surface, a curved surface, and an inclined surface.

[0174] However, if the measurement light ML is irradiated only onto a portion of the surface of the workpiece W with few features (e.g., a portion that is simply flat), the control device 5 may not be able to properly complete the matching process. Specifically, the control device 5 may not be able to properly identify which portion of the surface of the workpiece W, the shape of which is estimated from the distance information, corresponds to which portion of the surface of the workpiece model WM indicated by the shape information. For this reason, the machining head 11 may irradiate the measurement light ML onto a feature point on the surface of the workpiece W that has a characteristic shape and / or the vicinity of the feature point. In other words, at least one irradiated area WA irradiated with the measurement light ML may be located at a feature point on the surface of the workpiece W that has a characteristic shape or the vicinity of the feature point. For example, as shown in FIG. 18(a), a top view showing an example of the workpiece W, and FIG. 18(b), a perspective view showing an example of the workpiece W, if the vertex P of the workpiece W, which has a cone shape, is used as the feature point, the machining head 11 may irradiate the measurement light ML onto the vertex P and / or the vicinity of the vertex P. Other examples of feature points include at least one of the sides, corners, concave points, and convex points of the workpiece W.

[0175] In addition to or instead of using a portion of the surface of the workpiece W having a characteristic shape as a feature point, a portion of the surface of the workpiece W having a characteristic property may be used as a feature point. For example, a portion of the surface of the workpiece W having a characteristic color (i.e., a color different from that of other portions) may be used as a feature point. The portion having a characteristic color may include at least one of a portion having a characteristic spectral transmittance and a portion having a characteristic reflectance property. For example, a portion of the surface of the workpiece W having a characteristic refractive index (i.e., a refractive index different from that of other portions) may be used as a feature point.

[0176] However, the control device 5 may not be able to identify the position of the feature point of the workpiece W until it identifies the current relative positional relationship between the machining head 11 and the workpiece W based on the distance information and shape information. For this reason, the control device 5 may increase the possibility that the measurement light ML will be irradiated onto the feature point and / or the vicinity of the feature point by performing the above-mentioned "processing for increasing the possibility that the measurement light ML will be irradiated onto a flat portion of the surface of the workpiece W." In other words, the control device 5 may increase the possibility that the measurement light ML will be irradiated onto the feature point and / or the vicinity of the feature point by changing the position of at least one irradiated area WA and / or changing the number of irradiated areas WA.

[0177] When the measurement light ML is irradiated onto the characteristic points and / or the vicinity of the characteristic points, the control device 5 may control the relative positional relationship between the processing head 11 and the workpiece W based on the characteristic points of the workpiece W. In other words, the control device 5 may control the relative positional relationship between the processing head 11 and the workpiece W so that the relative positional relationship between the characteristic points of the workpiece W and the processing head 11 (more specifically, the relative positional relationship between the processing head 11 and an area of ​​the surface of the workpiece W that includes the characteristic points) becomes a predetermined positional relationship.

[0178] (1-4-3) Third alignment operation Next, the third alignment operation will be described. The third alignment operation is an operation for controlling the relative positional relationship between the workpiece W and the processing head 11 based on not only the optical path difference information (i.e., distance information related to the distance D calculated based on the optical path difference information) but also processing mark information related to the processing mark on the workpiece W by the processing light EL.

[0179] When performing the third alignment operation, as in the case of performing the first alignment operation, the control device 5 calculates the distance D between each of the three or more irradiated areas WA and the machining head 11. As a result, the control device 5 controls the relative positional relationship between the machining head 11 and the workpiece W in each of the Z-axis direction, the θX direction, and the θY direction based on the distance information regarding the calculated distance D.

[0180] When performing the third alignment operation, the control device 5 further identifies the position of the processing trace on the workpiece W caused by the processing light EL based on the distance information. For example, the control device 5 may identify the position of the processed area FA1. Furthermore, because the area on the surface of the workpiece W other than the unprocessed area FA2 becomes the processed area FA1, the position of the unprocessed area FA2 can also be said to indirectly indicate the position of the processing trace. Therefore, for example, the control device 5 may identify the position of the unprocessed area FA2 based on the distance information. Furthermore, because the processed area FA1 is adjacent to the unprocessed area FA2 via the boundary B, the position of the boundary B (see FIG. 19) between the processed area FA1 and the unprocessed area FA2 can also be said to indirectly indicate the position of the processing trace. Therefore, for example, the control device 5 may identify the position of the boundary B between the processed area FA1 and the unprocessed area FA2 based on the distance information. Note that, as described with reference to FIGS. 8 and 11, the distance D between the processed area FA1 and the processing head 11 differs by a certain amount from the distance D between the unprocessed area FA2 and the processing head 11. Therefore, the control device 5 can determine, based on the distance information, whether the irradiated area WA irradiated with the measurement light ML is located within the processed area FA1 or the unprocessed area FA2. Therefore, the control device 5 can specify the position of the processing traces using this determination result.

[0181] Considering that the fact that the distance D between the machined area FA1 and the machining head 11 and the distance D between the unmachined area FA2 and the machining head 11 differ by a certain amount is used to identify the position of the machining marks, the control device 5 may control the machining head 11 so that the measurement light ML is irradiated onto both the machined area FA1 and the unmachined area FA2. For example, as shown in FIG. 19, which is a plan view showing multiple irradiation areas WA on the workpiece W when performing the third alignment operation, the machining head 11 may irradiate the measurement light ML so that the target irradiation area MA moves across the boundary B between the machined area FA1 and the unmachined area FA2. The machining head 11 may irradiate the measurement light ML so that the movement trajectory MT of the target irradiation area MA intersects with the boundary B between the machined area FA1 and the unmachined area FA2. As a result, the measurement light ML is appropriately irradiated onto both the machined area FA1 and the unmachined area FA2.

[0182] Thereafter, the control device 5 controls the relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, the Y-axis direction, and the θZ direction based on machining mark information related to the machining marks (typically, information related to the position of the identified machining marks). Specifically, the machining marks form a predetermined pattern on the surface of the workpiece W, which is a surface along the XY plane. For example, in the example shown in FIG. 19, the machining marks form a pattern including a boundary B1 extending along the Y-axis direction, a boundary B2 extending from the -Y side end of the boundary B1 toward the +X side along the X-axis direction, and a boundary B3 extending from the +Y side end of the boundary B1 toward the -X side along the X-axis direction. Such a machining mark pattern is known to the control device 5. This is because, as described above, such a machining mark pattern is formed when the machining head 11 processes the workpiece W under the control of the control device 5. Therefore, the control device 5 can identify the current relative positional relationship between the machining head 11 and the workpiece W based on such a machining mark pattern. In particular, the control device 5 can identify the current relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, Y-axis direction, and θZ direction based on such a pattern of machining marks. This is because the pattern of machining marks is formed on the surface of the workpiece W along the XY plane. As a result, the control device 5 can control the relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, Y-axis direction, and θZ direction based on the current relative positional relationship between the machining head 11 and the workpiece W identified based on the machining mark information.

[0183] It should be noted that the third alignment operation can also be said to be an operation that substantially uses the machining traces of the workpiece W as the feature points of the workpiece W. For example, the third alignment operation can also be said to be an operation that substantially uses at least a portion of the machined area FA1 and / or at least a portion of the unmachined area FA2 as the feature points of the workpiece W. For example, the third alignment operation can also be said to be an operation that substantially uses a portion of the workpiece W that is located at least partly on the boundary B as the feature points of the workpiece W. In this case, the third alignment operation can also be said to be an operation common to the second alignment operation in that the relative positional relationship between the machining head 11 and the workpiece W is controlled using the feature points of the workpiece W. However, the third alignment operation does not necessarily require shape information regarding the shape of the workpiece W.

[0184] Furthermore, the machining system SYSa may perform the second alignment operation together with the third alignment operation. Specifically, the machining system SYSa may control the relative positional relationship between the machining head 11 and the workpiece W in each of the Z-axis direction, the θX direction, and the θY direction based on at least one of the distance information and the shape information. The machining system SYSa may control the relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, the Y-axis direction, and the θz direction based on at least one of the shape information and the machining mark information.

[0185] (1-4-4) Fourth alignment operation Next, the fourth alignment operation will be described. The fourth alignment operation is an operation for controlling the relative positional relationship between the workpiece W and the processing head 11 based on the mark information related to the alignment marks AM formed on the workpiece W in addition to the optical path difference information described above (i.e., distance information related to the distance D calculated based on the optical path difference information). Therefore, when a workpiece W on which an alignment mark AM is formed is placed on the stage 32, the processing system SYSa may perform the fourth alignment operation on the workpiece W. On the other hand, when a workpiece W on which no alignment mark AM is formed is placed on the stage 32, the processing system SYSa does not need to perform the fourth alignment operation on the workpiece W.

[0186] An example of the alignment mark AM is shown in FIG. 20. As shown in FIG. 20, the alignment mark AM may be formed on the surface of the workpiece W. The alignment mark AM may be formed in a mark area AMA on the surface of the workpiece W, which is used to form the alignment mark AM. The mark area AMA may or may not be processed by the processing light EL. At least three alignment marks AM are formed in the mark area AMA. For example, at least three alignment marks AM may be formed in the mark area AMA, including two alignment marks AM spaced apart along the X-axis direction (i.e., at different positions in the X-axis direction). For example, at least three alignment marks AM may be formed in the mark area AMA, including two alignment marks AM spaced apart along the Y-axis direction (i.e., at different positions in the Y-axis direction). However, two or fewer alignment marks AM may be formed in the mark area AMA. In the example shown in FIG. 19, three alignment marks AM are formed in the mark area AMA.

[0187] When performing the fourth alignment operation, as in the case of performing the first alignment operation, the control device 5 calculates the distance D between each of the three or more irradiated areas WA and the machining head 11. As a result, the control device 5 controls the relative positional relationship between the machining head 11 and the workpiece W in each of the Z-axis direction, the θX direction, and the θY direction based on the distance information regarding the calculated distance D.

[0188] When performing the fourth alignment operation, the control device 5 further identifies the position of the alignment mark AM based on the distance information. Therefore, when performing the fourth alignment, the processing head 11 irradiates the mark area AMA with the measurement light ML. The processing head 11 irradiates the measurement light ML in a state in which the mark area AMA and the measurement shot area MSA at least partially overlap.

[0189] In addition, in order to identify the position of the alignment mark AM based on the distance information, the alignment mark AM may be a structure (a convex or concave structure) that protrudes a certain amount from the surface of the workpiece W along the Z-axis direction or is recessed a certain amount. Furthermore, this protrusion amount and / or recess amount may be information known to the control device 5. In this case, the control device 5 can identify the position of the alignment mark AM based on the distance information in a manner similar to that used to identify the position of the processing trace based on the distance information. In other words, the control device 5 can determine whether the measurement light ML is irradiated onto the surface of the workpiece W or onto the alignment mark AM based on the distance information.

[0190] Thereafter, the control device 5 controls the relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, Y-axis direction, and θZ direction based on the mark information about the alignment marks AM (typically, information about the positions of the identified alignment marks AM). Specifically, the alignment marks AM are arranged in a predetermined array pattern on the surface of the workpiece W, which is a surface along the XY plane. This array pattern is assumed to be information known to the control device 5. In this case, the control device 5 can identify the relative positional relationship between the machining head 11 and the alignment marks AM based on the mark information (i.e., based on the actual positions of the alignment marks AM). Furthermore, because the alignment marks AM are formed on the surface of the workpiece W, the control device 5 can identify the relative positional relationship between the machining head 11 and the workpiece W based on the mark information. In particular, the control device 5 can identify the current relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, Y-axis direction, and θZ direction based on the mark information. This is because the alignment marks AM are arranged in a predetermined array pattern on the surface of the workpiece W along the XY plane. As a result, the control device 5 can control the relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, Y-axis direction, and θZ direction based on the current relative positional relationship between the machining head 11 and the workpiece W identified based on the mark information.

[0191] The fourth alignment operation can also be said to be an operation that essentially uses alignment marks AM formed in advance on the workpiece W as feature points of the workpiece W. In this case, the fourth alignment operation can also be said to be an operation common to the second alignment operation in that it uses feature points of the workpiece W to control the relative positional relationship between the machining head 11 and the workpiece W. However, the fourth alignment operation does not necessarily require shape information regarding the shape of the workpiece W.

[0192] Furthermore, the machining system SYSa may perform at least one of the second alignment operation and the third alignment operation together with the fourth alignment operation. Specifically, the machining system SYSa may control the relative positional relationship between the machining head 11 and the workpiece W in each of the Z-axis direction, the θX direction, and the θY direction based on at least one of the distance information and the shape information. The machining system SYSa may control the relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, the Y-axis direction, and the θz direction based on at least one of the shape information, the machining trace information, and the mark information.

[0193] Additionally, an arbitrary index different from the alignment mark AM may be formed on the workpiece W. As long as the arbitrary index can be measured by the measurement light ML, the processing system SYSa can perform the fourth alignment operation on the workpiece W on which the arbitrary index is formed.

[0194] (1-5) Technical effects of the processing system SYSa The processing system SYSa described above can appropriately process the workpiece W using processing light EL. Furthermore, the processing system SYSa can appropriately measure the workpiece W using measurement light ML. In particular, in the first embodiment, an optical frequency comb is used as the measurement light ML, which improves the measurement accuracy of the workpiece W. However, light other than an optical frequency comb may be used as the measurement light ML.

[0195] Furthermore, the machining system SYSa can appropriately control the relative positional relationship between the workpiece W and the machining head 11 based on the difference in the optical paths calculated from the measurement results of the measurement light ML (i.e., the difference between the length of the optical path OP#1-3 and the length of the optical paths OP#2-2 and OP#2-3). As a result, the machining head 11 can appropriately machine the workpiece W. For example, the machining head 11 can machine a workpiece W that is substantially stationary relative to the machining head 11. The machining head 11 can machine the workpiece W in a state where it is substantially stationary relative to the workpiece W. Therefore, the machining quality (e.g., machining accuracy) of the workpiece W is improved compared to when a workpiece W that is not substantially stationary (e.g., moving) relative to the machining head 11 is machined.

[0196] (2) Machining system SYSb of the second embodiment Next, a machining system SYS of a second embodiment (hereinafter, the machining system SYS of the second embodiment will be referred to as a "machining system SYSb") will be described with reference to Fig. 21. Fig. 21 is a cross-sectional view schematically showing the overall structure of the machining system SYSb of the second embodiment.

[0197] 21, the machining system SYSb of the second embodiment differs from the machining system SYSa of the first embodiment in that it further includes a position measurement device 6b. Other features of the machining system SYSb may be the same as other features of the machining system SYSa.

[0198] The position measuring device 6b measures the relative positional relationship between the workpiece W and the machining head 11. In the second embodiment, the position measuring device 6b measures the position of the workpiece W relative to the machining head 11. In order to measure the position of the workpiece W relative to the machining head 11, the position measuring device 6b may measure the workpiece W. Since the machining head 11 is equipped with each optical system, the operation of measuring the relative positional relationship between the workpiece W and the machining head 11 may be considered to be substantially equivalent to the operation of measuring the relative positional relationship between the workpiece W and each optical system equipped in the machining head 11. In other words, the operation of measuring the position of the workpiece W relative to the machining head 11 essentially measures the position of the workpiece W relative to each optical system equipped in the machining head 11. The operation of measuring the relative positional relationship between the workpiece W and the machining head 11 may be considered to be substantially equivalent to the operation of measuring the relative positional relationship between the workpiece W and the fθ lens 1162.

[0199] The position measuring device 6b may be disposed at a fixed position relative to the processing head 11 (particularly, each optical system provided in the processing head 11). The position measuring device 6b may be disposed at a position where its relative position relative to the processing head 11 is fixed. The position measuring device 6b may be disposed at a position where the relative position between the processing head 11 and the position measuring device 6b does not change even if the head drive system 12 moves the processing head 11. For example, FIG. 21 shows an example in which the position measuring device 6b is attached to the outer surface of the processing head 11 (for example, the outer surface of the housing 117).

[0200] When the position measuring device 6b is arranged at a fixed position relative to the machining head 11, the output from the position measuring device 6b (i.e., the measurement result of the position measuring device 6b) will include information about the position of the workpiece W relative to the machining head 11. Specifically, the measurement result of the position measuring device 6b includes information about the position of the workpiece W relative to the position measuring device 6b. In other words, the measurement result of the position measuring device 6b includes information about the position of the workpiece W in the measurement coordinate system of the position measuring device 6b. Here, when the position measuring device 6b is arranged at a fixed position relative to the machining head 11, the information about the position of the workpiece W relative to the position measuring device 6b will essentially include information about the position of the workpiece W relative to the machining head 11, which is arranged at a fixed position relative to the position measuring device 6b. Therefore, the control device 5 can appropriately identify the position of the workpiece W relative to the machining head 11.

[0201] The position measurement device 6b may be any type of measurement device as long as it is capable of measuring the workpiece W. For example, the position measurement device 6b may include an imaging device (i.e., a camera) capable of capturing an image of the surface of an object such as the workpiece W. The position measurement device 6b may include an irradiation device that irradiates the workpiece W with measurement light that draws a predetermined pattern on the workpiece W, and an imaging device that captures an image of the pattern drawn on the workpiece W by the measurement light. In this way, the position measurement device 6b may be a measurement device that measures the workpiece W using a non-contact method (for example, at least one of a light detection method, a sound wave detection method, and a radio wave detection method).

[0202] The measurement results of the position measuring device 6b (i.e., information regarding the position of the workpiece W relative to the machining head 11) may be used to control the machining system SYSa. Specifically, the measurement results of the position measuring device 6b may be used to control the machining device 1. The measurement results of the position measuring device 6b may be used to control the machining head 11. The measurement results of the position measuring device 6b may be used to control the head drive system 12. The measurement results of the position measuring device 6b may be used to control the stage device 3. The measurement results of the position measuring device 6b may be used to control the stage drive system 33.

[0203] For example, the control device 5 may control the relative positional relationship between the workpiece W and the processing head 11 based on the measurement results of the position measurement device 6b. For example, the control device 5 may change the relative position of the target irradiation area EA with respect to the workpiece W based on the measurement results of the position measurement device 6b so that the target irradiation area EA is set at a desired position on the workpiece W (i.e., the processing light EL is irradiated). For example, the control device 5 may change the relative position of the target irradiation area MA with respect to the workpiece W based on the measurement results of the position measurement device 6b so that the target irradiation area MA is set at a desired position on the workpiece W (i.e., the measurement light ML#2-2 is irradiated).

[0204] In particular, in the second embodiment, when performing an alignment operation for controlling the relative positional relationship between the workpiece W and the processing head 11, the control device 5 may use the measurement results of the position measurement device 6b in addition to the distance information.

[0205] When the measurement results of the position measuring device 6b are used for the alignment operation, the position measuring device 6b may measure the position of the above-mentioned machining marks. In this case, the position measuring device 6b can measure the relative positional relationship between the workpiece W and the machining head 11 in each of the X-axis direction and the Y-axis direction. In other words, the position measuring device 6b can measure the relative positional relationship between the workpiece W and the machining head 11 in each of the X-axis direction and the Y-axis direction that intersect with the Z-axis, which is the axis connecting the workpiece W and the machining head 11 (particularly, the axis connecting the workpiece W and the fθ lens 1162, and essentially the axis along the optical axis AX of the fθ lens 1162). Furthermore, the position measuring device 6b can measure the relative positional relationship between the workpiece W and the machining head 11 in the θZ direction. That is, the position measurement device 6b can measure the relative positional relationship between the workpiece W and the machining head 11 in the rotation direction around the Z axis, which is the axis connecting the workpiece W and the machining head 11 (particularly, the axis connecting the workpiece W and the fθ lens 1162, which is essentially the axis along the optical axis AX of the fθ lens 1162). The reason for this has been explained in the third alignment operation described above. As a result, the control device 5 can control the relative positional relationship between the machining head 11 and the workpiece W in each of the X axis direction, Y axis direction, Z axis direction, θX direction, θY direction, and θZ direction. For example, the control device 5 may control the relative positional relationship between the machining head 11 and the workpiece W in each of the Z axis direction, θX direction, and θY direction based on distance information, and control the relative positional relationship between the machining head 11 and the workpiece W in each of the X axis direction, Y axis direction, and θz direction based on the measurement result of the position measurement device 6b (i.e., information that can be considered to be substantially equivalent to the above-mentioned machining mark information).

[0206] Alternatively, the position measuring device 6b may measure the position of the alignment mark AM described above, in addition to or instead of measuring the position of the machining trace. In this case, the position measuring device 6b can also measure the relative positional relationship between the workpiece W and the machining head 11 in each of the X-axis direction, Y-axis direction, and θZ direction. The reason for this has been explained in the fourth alignment operation described above. As a result, the control device 5 may control the relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, Y-axis direction, Z-axis direction, θX direction, θY direction, and θZ direction. For example, the control device 5 may control the relative positional relationship between the machining head 11 and the workpiece W in each of the Z-axis direction, θX direction, and θY direction based on distance information, and control the relative positional relationship between the machining head 11 and the workpiece W in each of the X-axis direction, Y-axis direction, and θz direction based on the measurement results of the position measuring device 6b (i.e., information that can be considered substantially equivalent to the above-mentioned mark information).

[0207] In the second embodiment, the position measuring device 6b is attached to the outer surface of the processing head 11, but a part of the position measuring device 6b may be attached inside the processing head 11 (inside the housing 117), or the entire position measuring device 6b may be attached inside the processing head 11 (inside the housing 117).

[0208] The machining system SYSb of the second embodiment can achieve the same effects as those achieved by the machining system SYSa of the first embodiment described above. Furthermore, the machining system SYSb of the seventh embodiment can machine the workpiece W using the detection results of the position measurement device 6b in addition to the detection results of the detectors 1143 and 1146. Therefore, the machining system SYSb can machine the workpiece W more appropriately. For example, the machining system SYSb can machine the workpiece W with higher precision.

[0209] (3) Variations In the above description, the machining head 11 deflects a single measurement light ML using the galvanometer mirror 1148, thereby irradiating the measurement light ML onto each of three or more irradiation areas WA on the workpiece W. However, the machining head 11 may also emit three or more measurement light beams ML that are irradiated onto three or more irradiation areas WA, respectively. For example, the machining head 11 may be equipped with three or more light sources and / or three or more optical systems that respectively emit three or more measurement light beams ML that are irradiated onto three or more irradiation areas WA, respectively.

[0210] In the above description, the machining head 11 includes the machining light source 111 and the measurement light source 113 inside the housing 117. However, the machining head 11 does not necessarily have to include at least one of the machining light source 111 and the measurement light source 113 inside the housing 117. The machining head 11 may emit, toward the workpiece W, the machining light EL emitted by the machining light source 111 arranged outside the housing 117 or outside the machining head 11. In this case, the machining light EL emitted from the external machining light source 111 may be incident on the machining optical system 112 inside the housing 117 from outside the housing 117 via an optical transmission member such as an optical fiber. The machining head 11 may emit, toward the workpiece W, the measurement light ML emitted by the measurement light source 113 arranged outside the housing 117 or outside the machining head 11. In this case, the measurement light ML emitted from the external measurement light source 113 may be incident on the measurement optical system 114 inside the housing 117 from outside the housing 117 via an optical transmission member such as an optical fiber.

[0211] In the above description, the machining head 11 is provided with the machining optical system 112 and the measurement optical system 114 inside the housing 117. However, the machining head 11 does not have to include at least one of the machining optical system 112 and the measurement optical system 114 inside the housing 117. The machining head 11 may emit, toward the workpiece W, the machining light EL emitted by the machining optical system 112 arranged outside the housing 117 or outside the machining head 11. In this case, the machining light EL emitted from the external machining optical system 112 may be incident on the composite optical system 115 inside the housing 117 from outside the housing 117 via an optical transmission member such as an optical fiber. The machining head 11 may emit, toward the workpiece W, the measurement light ML emitted by the measurement optical system 114 arranged outside the housing 117 or outside the machining head 11. In this case, the measurement light ML emitted from the external measurement optical system 114 may be incident on the composite optical system 115 inside the housing 117 from outside the housing 117 via an optical transmission member such as an optical fiber. However, when the measurement optical system 114 is placed outside the housing 117 or outside the processing head 11, the measurement optical system 114 may be placed in a fixed position relative to the processing head 11 (particularly, each optical system and the housing 117 provided in the processing head 11).

[0212] In the above description, the machining head 11 irradiates the workpiece W with the processing light EL and the measurement light ML combined using the combining optical system 115. However, the machining head 11 irradiates the workpiece W with the processing light EL and the measurement light ML without combining them. In other words, the optical path of the processing light EL from the machining light source 111 to the workpiece W and the optical path of the measurement light ML from the measurement light source 113 to the workpiece W may be optically separated. In other words, the machining head 11 may include an optical system for irradiating the workpiece W with the processing light EL and an optical system for irradiating the workpiece W with the measurement light ML, with both optically separated. In this case, the machining head 11 may include, as the optical system for irradiating the workpiece W with the processing light EL, the above-mentioned machining optical system 112 and an irradiation optical system having the same configuration as the above-mentioned common optical system 116 and for irradiating the workpiece W with the processing light EL emitted from the machining optical system 112. The processing head 11 may include, as an optical system for irradiating the workpiece W with the measurement light ML, the above-described measurement optical system 114 and an irradiation optical system that has the same configuration as the above-described common optical system 116 and is for irradiating the workpiece W with the measurement light ML emitted from the measurement optical system 114. However, the optical system for irradiating the workpiece W with the measurement light ML may be arranged at a fixed position relative to the processing head 11 (particularly, the optical system for irradiating the workpiece W with the processing light EL and the housing 117).

[0213] The processing system SYS may be separately provided with a processing head that irradiates the workpiece W with processing light EL but does not irradiate the workpiece W with measurement light ML, and a measurement head that irradiates the workpiece W with measurement light ML but does not irradiate the workpiece W with processing light EL. However, the measurement head (particularly, the optical system provided in the measurement head) may be disposed at a fixed position relative to the processing head (particularly, the optical system and housing 117 provided in the processing head).

[0214] In the above description, the control device 5 calculates the distance D between the machining head 11 and the workpiece W based on the detection results of the measurement light ML irradiated onto the workpiece W via the measurement optical system 114, the composite optical system 115, and the common optical system 116. However, the method of calculating the distance is not limited to this example. The machining head 11 (particularly the measurement optical system 114, the composite optical system 115, and the common optical system 116) may have any structure as long as it is possible to calculate the distance between the machining head 11 and the workpiece W using the measurement light ML. For example, the machining head 11 may be equipped with a light receiving unit that receives the measurement light ML from the workpiece W instead of the measurement optical system 114, and the control device 5 may calculate the distance between the machining head 11 and the workpiece W using a distance measurement method such as a time-of-flight method based on the light receiving result of the light receiving unit.

[0215] In the above description, the processing system SYS forms a riblet structure on the surface of the workpiece W. However, the processing system SYS may also form any structure having any shape on the surface of the workpiece W. Even in this case, any structure having any shape can be formed as long as the control device 5 controls the processing head 11, etc. so that the processing light EL scans the surface of the workpiece W along a scanning trajectory corresponding to the structure to be formed. An example of an arbitrary structure is a regularly or irregularly formed micro- or nanometer-order fine texture structure (typically an uneven structure). Such a fine texture structure may include at least one of a shark skin structure and a dimple structure, which have the function of reducing resistance due to fluids (gas and / or liquid). The fine texture structure may also include a lotus leaf surface structure, which has at least one of liquid-repellent and self-cleaning functions (e.g., having the lotus effect). The fine texture structure may include at least one of a micro-protrusion structure having a liquid transport function (see U.S. Patent Publication No. 2017 / 0044002), a concave-convex structure having a lyophilic function, a concave-convex structure having an anti-fouling function, a moth-eye structure having at least one of a reflectance reducing function and a liquid repellent function, a concave-convex structure that exhibits a structural color by intensifying only light of a specific wavelength through interference, a pillar array structure having an adhesive function using van der Waals forces, a concave-convex structure having an aerodynamic noise reducing function, and a honeycomb structure having a droplet collecting function.

[0216] In the above description, the processing system SYS forms a riblet structure on the workpiece W to reduce the resistance of the surface of the workpiece W to the fluid. However, the processing system SYS may form another structure on the workpiece W that is different from a riblet structure for reducing the resistance of the surface to the fluid. For example, the processing system SYS may form a riblet structure on the workpiece W to reduce noise generated when the fluid and the surface of the workpiece W move relative to each other. For example, the processing system SYS may form a structure on the workpiece W that generates vortices in response to the flow of fluid on the surface of the workpiece W. For example, the processing system SYS may form a structure on the workpiece W to impart hydrophobic properties to the surface of the workpiece W.

[0217] The above description describes a processing system SYS that processes a workpiece W with processing light EL. That is, the above description describes an example in which the processing system SYS includes a processing head 11. However, the processing system SYS may include an end effector in addition to or instead of the processing head 11. For example, as shown in FIG. 22 , which shows an example of the structure of a processing device 1c including an end effector, the processing system SYS may include a processing device 1c including an end effector 13c. In the example shown in FIG. 22 , the end effector 13c is attached to the head 11c, and the second drive system 122 connects the end effector 13c to the first drive system 121 via the head 11c. However, the end effector 13c may also be attached to the second drive system 122 without going through the head 11c. A processing system SYS including such an end effector 13c may be referred to as a robot system. A robot system can also be said to be a system that performs processing on a workpiece W using the end effector 13c.

[0218] The head 11c may differ from the processing head 11 in that it may not have components related to the processing light EL (specifically, the processing light source 111 and the processing optical system 112). Furthermore, if the head 11c does not have components related to the processing light EL, the head 11c may not have the combining optical system 115 because it does not need to combine the processing light EL and the measurement light ML. However, the head 11c may have the components related to the processing light EL and the combining optical system 115.

[0219] The machining system SYS including such an end effector 13c may also perform the alignment operation described above. That is, the machining system SYS including the end effector 13c may also perform an alignment operation in which the measurement light ML is irradiated onto the workpiece W, the distance D between the end effector 13c and the workpiece W is calculated based on the detection result of the measurement light ML, and the relative positional relationship between the workpiece W and the end effector 13c is controlled based on distance information regarding the calculated distance D.

[0220] When the processing system SYS is equipped with the end effector 13c, the direction in which the end effector 13c is disposed relative to the workpiece W may be the same as the direction in which the common optical system 116 (particularly, the fθ lens 1162) is disposed relative to the workpiece W. In the example shown in FIG. 22 , both the end effector 13c and the common optical system 116 (particularly, the fθ lens 1162) are disposed on the +Z side of the workpiece W. In other words, both the end effector 13c and the common optical system 116 (particularly, the fθ lens 1162) are disposed above the workpiece W.

[0221] The end effector 13c may be a member having the function of directly acting (i.e., acting on) the workpiece W (or any object, the same applies hereinafter in this paragraph). In this case, the end effector 13c may be referred to as an acting member acting on the workpiece W. Examples of such a member having the function of directly acting on the workpiece W include at least one of a robot hand, a gripper, and a vacuum head. The end effector may also be a member for acquiring properties of the workpiece W (i.e., any information related to the workpiece W). In this case, the end effector 13c may be referred to as an acquisition member for acquiring the properties of the workpiece W. Here, the properties of the workpiece W may include at least one of the condition of the workpiece W, the size of the workpiece W, the shape of the workpiece W, the position of the workpiece W, the positions of feature points of the workpiece W, the posture of the workpiece W, the surface properties of the workpiece W (for example, at least one of reflectance, spectral reflectance, surface roughness, color, etc.), and the hardness of the workpiece W. Examples of components for acquiring the properties of the workpiece W include at least one of a measuring device that measures the workpiece W, a detecting device that detects the characteristics of the workpiece W, and an imaging device that images the workpiece W. The machining head 11 and the position measuring device 6b in the above description can be considered to be a type of end effector.

[0222] In the above description, the processing light source 111 and the measurement light source 113 are separate light sources. However, a single light source may be used as both the processing light source 111 and the measurement light source 113. In this case, the light generated by the single light source is used as both the processing light EL and the measurement light ML.

[0223] In the above description, a galvanometer mirror is used as the irradiation position changing optical system. However, a polygon mirror or an MEMS mirror may be used in addition to or instead of the galvanometer mirror as the irradiation position changing optical system. A position adjustment optical system capable of changing the light irradiation position may be used in addition to or instead of the galvanometer mirror as the irradiation position changing optical system. The position adjustment optical system used to change the irradiation position of the processing light EL may have a plane-parallel plate that can be tilted with respect to the traveling direction of the processing light EL in order to adjust the position of the processing light EL in a plane perpendicular to the optical path of the processing light EL (e.g., to set it to an arbitrary position). The position adjustment optical system used to change the irradiation position of the measurement light ML may have a plane-parallel plate that can be tilted with respect to the traveling direction of the measurement light ML in order to adjust the position of the measurement light ML in a plane perpendicular to the optical path of the measurement light ML (e.g., to set it to an arbitrary position).

[0224] In the above description, an fθ lens 1162 with a projection characteristic of fθ is used as the irradiation optical system that irradiates the processing light EL and / or measurement light ML onto the workpiece W. However, an optical system with other projection characteristics may also be used as the irradiation optical system. Furthermore, the irradiation optical system is not limited to a total refractive optical system (dioptric optical system) as described above, but may be a catadioptric optical system or a total reflection optical system (cataptric optical system).

[0225] In the above description, the head drive system 12 is a robot. However, the head drive system 12 is not limited to a robot as long as it is capable of moving the processing head 11. For example, the head drive system 12 may be an air vehicle that can fly at a position away from the workpiece W while supporting the processing head 11. Examples of the air vehicle include at least one of an airplane, a drone, a helicopter, a balloon, and an airship.

[0226] (9) Supplementary Notes The following additional notes are provided regarding the above-described embodiment. [Appendix 1] A control device that controls a processing system that processes an object by irradiating processing light from a processing light source onto at least a part of the object, The processing system includes: a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an irradiation optical system that irradiates a surface of the object with the processing light and irradiates the surface of the object with the second light; a position change device that changes the relative positional relationship between the object and the irradiation optical system; a detection device that detects interference light between a third light traveling along a third optical path and the first light, among the light generated by the second light irradiated onto the surface of the object; Equipped with The output from the detection device is used to control the position-changing device. Control device. [Appendix 2] A control device that controls a processing system that processes an object by irradiating processing light from a processing light source onto at least a part of the object, The processing system includes: a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an irradiation optical system that irradiates at least a part of a surface of the object with the processing light and irradiates the surface of the object with the second light; a position change device that changes a relative positional relationship between the object and a focusing position of the processing light; a detection device that detects interference light between a third light traveling along a third optical path and the first light, among the light generated by the second light irradiated onto the surface of the object; Equipped with The output from the detection device is used to control the position-changing device. Control device. [Appendix 3] A control device for controlling a processing system that performs at least one of a process using an acting member that acts on an object and a process using an acquisition member that acquires information about the object, The processing system includes: a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an illumination optical system that illuminates the surface of the object with second light; a detection device that detects interference light between a third light traveling along a third optical path and the first light, among the light generated by the second light irradiated onto the surface of the object; a position change device that changes a relative positional relationship between at least one of the action member and the acquisition member and the object; Equipped with The output from the detection device is used to control the position-changing device. Control device. [Appendix 4] A processing system that processes an object by irradiating at least a part of the object with processing light from a processing light source, a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an irradiation optical system that irradiates a surface of the object with the processing light and irradiates the surface of the object with the second light; a position change device that changes the relative positional relationship between the object and the irradiation optical system; a detection device that detects interference light between a third light traveling along a third optical path and the first light, among the light generated by the second light irradiated onto the surface of the object; a receiving device that receives a control signal for controlling the position changing device using an output from the detecting device; A processing system comprising: [Appendix 5] A processing system that processes an object by irradiating at least a part of the object with processing light from a processing light source, a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an irradiation optical system that irradiates at least a part of a surface of the object with the processing light and irradiates the surface of the object with the second light; a position change device that changes a relative positional relationship between the object and a focusing position of the processing light; a detection device that detects interference light between a third light traveling along a third optical path and the first light, among the light generated by the second light irradiated onto the surface of the object; a receiving device that receives a control signal for controlling the position changing device using an output from the detecting device; A processing system comprising: [Appendix 6] A processing system that performs at least one of a process using an acting member that acts on an object and a process using an acquisition member that acquires information about the object, a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an illumination optical system that illuminates the surface of the object with second light; a detection device that detects interference light between a third light traveling along a third optical path and the first light, among the light generated by the second light irradiated onto the surface of the object; a position change device that changes a relative positional relationship between at least one of the action member and the acquisition member and the object; a receiving device that receives a control signal for controlling the position changing device using an output from the detecting device; A processing system comprising: [Appendix 7] A computer program to be executed by a computer that controls a processing system that processes an object by irradiating processing light from a processing light source onto at least a part of the object, The processing system includes: a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an irradiation optical system that irradiates a surface of the object with the processing light and irradiates the surface of the object with the second light; a position change device that changes the relative positional relationship between the object and the irradiation optical system; a detection device that detects interference light between a third light traveling along a third optical path and the first light, among the light generated by the second light irradiated onto the surface of the object; Equipped with causing the computer to execute a process for controlling the position-changing device using an output from the detection device; Computer program. [Appendix 10] A computer program to be executed by a computer that controls a processing system that processes an object by irradiating processing light from a processing light source onto at least a part of the object, The processing system includes: a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an irradiation optical system that irradiates at least a part of a surface of the object with the processing light and irradiates the surface of the object with the second light; a position change device that changes a relative positional relationship between the object and a focusing position of the processing light; a detection device that detects interference light between a third light traveling along a third optical path and the first light, among the light generated by the second light irradiated onto the surface of the object; Equipped with causing the computer to execute a process for controlling the position-changing device using an output from the detection device; computer program [Appendix 9] A computer program to be executed by a computer that controls a processing system that performs at least one of a process using an acting member that acts on an object and a process using an acquisition member that acquires information about the object, The processing system includes: a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an illumination optical system that illuminates the surface of the object with second light; a detection device that detects interference light between a third light traveling along a third optical path and the first light, among the light generated by the second light irradiated onto the surface of the object; a position change device that changes a relative positional relationship between at least one of the action member and the acquisition member and the object; Equipped with causing the computer to execute a process for controlling the position-changing device using an output from the detection device; computer program The requirements of the above-described embodiments may be combined as appropriate. Some of the requirements of the above-described embodiments may not be used. The requirements of the above-described embodiments may be replaced with requirements of other embodiments as appropriate. Furthermore, to the extent permitted by law, the disclosures of all publications and U.S. patents relating to the devices, etc. cited in the above-described embodiments are incorporated herein by reference.

[0227] Furthermore, the present invention can be modified as appropriate within the scope that does not contradict the gist or idea of ​​the invention that can be read from the claims and the entire specification, and processing systems, robot systems, control devices, and computer programs that involve such modifications are also included in the technical idea of ​​the present invention. [Explanation of symbols]

[0228] 1 Processing equipment 11 Processing head 111 Processing light source 112 Processing optical system 113 Measurement Light Source 114 Measurement Optical System 115 Synthetic optical system 116 Common optical system 12 Head drive system 5. Control device EL processing light ML measurement light SYS Machining System

Claims

1. A processing system that processes an object by irradiating at least a part of the object with processing light from a processing light source, a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an irradiation optical system that irradiates a surface of the object with the processing light and irradiates the surface of the object with the second light; a position change device that changes the relative positional relationship between the object and the irradiation optical system; a detection device that detects interference light between a third light traveling along a third optical path and the first light, among the light generated by the second light irradiated onto the surface of the object; a control device that controls the position changing device using an output from the detection device; A processing system comprising:

2. The control device controls the position-changing device using a measurement of the difference between the lengths of the second and third optical paths and the length of the first optical path obtained from the output from the detection device. The processing system of claim 1 .

3. The control device controls the position changing device based on an output from the detection device so as to maintain a predetermined relative positional relationship between the object and the irradiation optical system. The processing system according to claim 1 or 2.

4. The illumination optical system illuminates the second light onto a plurality of portions of the surface of the object. The processing system according to any one of claims 1 to 3.

5. the illumination optical system illuminates a first portion of a plurality of portions of a surface of the object with the second light along a first direction, and illuminates a second portion of a plurality of portions of the surface of the object that is different from the first portion with the second light along a second direction; the detection device detects a first interference light between the third light and the first light generated from the first portion by the second light irradiated along the first direction, and detects a second interference light between the third light and the first light generated from the second portion by the second light irradiated along the second direction, The control device controls the position changing device using a first measurement amount related to the difference obtained from a first detection result of the first interference light from the detection device and a second measurement amount related to the difference obtained from a second detection result of the second interference light from the detection device. The processing system of claim 4 .

6. The control device controls the position changing device based on an output from the detection device so as to maintain a predetermined relative positional relationship between the object and the irradiation optical system in each of a direction along the optical axis of the irradiation optical system and a rotation direction around an intersecting axis along an intersecting direction intersecting the optical axis. The processing system of claim 5 .

7. The intersecting axis is a first intersecting axis. the illumination optical system illuminates a third portion, different from the first and second portions, of the plurality of portions on the surface of the object with the second light along a third direction; the detection device detects third interference light between the third light and the first light, which is generated from the third portion by the second light irradiated along the third direction; When the intersecting axis is a first intersecting axis, the control device controls the position changing device so as to maintain a predetermined relative positional relationship between the object and the illumination optical system in a rotation direction about a second intersecting axis that intersects with the optical axis and the first intersecting axis, using the first measurement amount, the second measurement amount, and a third measurement amount related to the difference obtained from a third detection result of the third interference light from the detection device. The processing system of claim 6 .

8. an illumination position changing optical system for changing an illumination position of the second light on the surface of the object; A processing system according to any one of claims 1 to 7.

9. The irradiation position changing optical system changes the irradiation position of the second light so as to change the positional relationship with the position where the processing light is irradiated on the object. The processing system of claim 8 .

10. The irradiation position changing optical system changes the position at which the processing light is irradiated on the object.

10. The processing system according to claim 8 or 9.

11. the illumination optical system illuminates the second light onto a plurality of portions of the surface of the object; The irradiation position changing optical system changes the irradiation position of the second light on the surface of the object so that the distribution of the plurality of portions irradiated with the second light is changed. A processing system according to any one of claims 8 to 10.

12. the illumination optical system illuminates the second light onto a plurality of portions of the surface of the object; The irradiation position changing optical system changes the irradiation position of the second light on the surface of the object so that a locus connecting the plurality of portions irradiated with the second light is changed. A processing system according to any one of claims 8 to 11.

13. the illumination optical system illuminates the second light onto a plurality of portions of the surface of the object; The irradiation position changing optical system changes the irradiation position of the second light on the surface of the object so that the number of the plurality of portions onto which the second light is irradiated is changed. A processing system according to any one of claims 8 to 12.

14. The irradiation position changing optical system deflects the second light to change the irradiation position of the second light on the surface of the object. A processing system according to any one of claims 8 to 13.

15. the second light includes pulsed light, The irradiation position changing optical system changes the irradiation position of the pulsed light on the surface of the object. A processing system according to any one of claims 8 to 14.

16. The irradiation position changing optical system changes the scanning speed at which the second light scans the surface of the object, thereby changing the irradiation position of the pulsed light on the surface of the object. The processing system of claim 15.

17. the illumination optical system illuminates the second light onto a plurality of portions of the surface of the object; The irradiation position changing optical system changes the irradiation position of the second light on the surface of the object so that the second light is sequentially irradiated onto the plurality of portions.

17. A processing system according to any one of claims 8 to 16.

18. The processing light and the second light that have entered the irradiation position changing optical system are then incident on the irradiation optical system.

18. A processing system according to any one of claims 8 to 17.

19. a processing optical system that emits the processing light from the processing light source toward the irradiation position changing optical system; a measurement optical system that includes the branching optical system and an optical member that forms the first optical path, and that emits the second light toward the irradiation position changing optical system; 19. The processing system of claim 8, further comprising:

20. The measurement optical system includes the detection device.

20. The processing system of claim 19.

21. a processing optical system that emits the processing light from the processing light source toward the irradiation optical system; a measurement optical system that includes the branching optical system and an optical member that forms the first optical path, and that emits the second light toward the irradiation optical system; 21. The processing system of claim 1, further comprising:

22. the second light includes pulsed light, By changing the light emission period of the pulsed light, the irradiation position of the second light on the surface of the object is changed.

22. A processing system according to any one of claims 1 to 21.

23. The irradiation optical system emits the processing light in the same direction as the direction in which the second light is emitted.

23. A processing system according to any one of claims 1 to 22.

24. The portion of the surface of the object onto which the second light is irradiated is located at the irradiation position of the processing light on the surface of the object or in the vicinity or periphery of the irradiation position of the processing light.

24. A processing system according to any one of claims 1 to 23.

25. the illumination optical system illuminates the second light onto a plurality of portions of the surface of the object; The plurality of portions are positioned so that a locus connecting the plurality of portions onto which the second light is irradiated surrounds an irradiation position of the processing light on the surface of the object.

25. A processing system according to any one of claims 1 to 24.

26. The portion of the surface of the object onto which the second light is irradiated is located at a position away from the irradiation position of the processing light on the surface of the object in a direction along the surface of the object.

26. A processing system according to any one of claims 1 to 25.

27. The portion of the surface of the object onto which the second light is irradiated is located at or near a feature point of the object.

27. A processing system according to any one of claims 1 to 26.

28. The feature points include parts of the object that have characteristic shapes.

28. The processing system of claim 27.

29. The feature points include indices formed on the object.

29. A processing system according to claim 27 or 28.

30. The feature points include processing marks due to the processing treatment.

30. A processing system according to any one of claims 27 to 29.

31. The feature point is located at the boundary between a portion of the surface of the object that has been subjected to the processing and a portion of the surface of the object that has not been subjected to the processing.

31. The processing system of claim 30.

32. The control device controls the position changing device so as to maintain a predetermined relative positional relationship between the feature point of the object and the irradiation optical system.

32. A processing system according to any one of claims 27 to 31.

33. The control device controls the position changing device so as to maintain a predetermined relative positional relationship between the object and the irradiation optical system, based on a measurement amount relating to a difference between the length of the second and third optical paths and the length of the first optical path, which is obtained from the output from the detection device, and shape information relating to a shape of the object.

33. A processing system according to any one of claims 1 to 32.

34. The control device specifies a relative positional relationship between the object and the irradiation optical system based on the measurement amount and the shape information, and controls the position changing device based on the specified positional relationship so as to maintain the relative positional relationship between the object and the irradiation optical system at a predetermined positional relationship.

34. The processing system of claim 33.

35. The control device specifies, based on the measurement amount and the shape information, a relative positional relationship between the object and the irradiation optical system in each of a first direction along the optical axis of the irradiation optical system, a second direction along a first intersecting axis intersecting the optical axis, a third direction along a second intersecting axis intersecting both the optical axis and the first intersecting axis, a first rotational direction around the optical axis, a second rotational direction around the first intersecting axis, and a third rotational direction around the second intersecting axis, and controls the position changing device, based on the specified positional relationships, to maintain the relative positional relationship between the object and the irradiation optical system in each of the first to third directions and the first to third rotational directions at a predetermined positional relationship.

35. A processing system according to claim 33 or 34.

36. The control device controls the position changing device so as to maintain a predetermined relative positional relationship between the object and the irradiation optical system, based on a measurement amount relating to a difference between the length of the second and third optical paths and the length of the first optical path, which is obtained from the output from the detection device, and on a processing amount of the object by the processing.

36. A processing system according to any one of claims 1 to 35.

37. the processing includes a removal process for removing a part of the object, The control device corrects the measurement amount for a removed portion for which the removal process has been performed, while performing a removal amount reflection process that does not correct the measurement amount for a non-removed portion for which the removal process has not been performed, and controls the position changing device to maintain the relative positional relationship between the object and the irradiation optical system at the predetermined positional relationship based on the measurement amount for which the removal amount reflection process has been performed.

37. The processing system of claim 36.

38. Correcting the measurement amount for the removed portion includes subtracting the measurement amount.

38. The processing system of claim 37.

39. The predetermined positional relationship includes a positional relationship in which the measurement amount after the removal amount reflection processing is constant.

39. A processing system according to claim 37 or 38.

40. the processing includes an addition process of adding a structure to the object, The control device corrects the measurement amount for an added portion on which the addition process has been performed, while performing an addition amount reflection process that does not correct the measurement amount for a non-added portion on which the addition process has not been performed, and controls the position change device to maintain the relative positional relationship between the object and the irradiation optical system at the predetermined positional relationship based on the measurement amount on which the addition amount reflection process has been performed.

40. A processing system according to any one of claims 36 to 39.

41. Correcting the measurement amount for the additional portion includes adding the measurement amount.

41. The processing system of claim 40.

42. The predetermined positional relationship includes a positional relationship in which the measurement amount after the additional amount reflection processing is constant.

42. The processing system of claim 41.

43. a position measurement device that measures a relative positional relationship between the object and the irradiation optical system; The control device controls the position changing device so as to maintain a predetermined relative positional relationship between the object and the illumination optical system, based on a measurement amount relating to a difference between the length of the second and third optical paths and the length of the first optical path, which is obtained from the output from the detection device, and a measurement result of the position measurement device.

43. A processing system according to any one of claims 1 to 42.

44. The position measurement device measures a relative positional relationship between the object and the irradiation optical system in a direction intersecting an axis connecting the object and the irradiation optical system.

44. The processing system of claim 43.

45. The position measurement device includes an imaging device that images the surface of the object.

45. A processing system according to claim 43 or 44.

46. the control device controls, based on the measurement amount, the position changing device to maintain the relative positional relationship between the object and the irradiation optical system at the predetermined positional relationship in a part of a first direction along the optical axis of the irradiation optical system, a second direction along a first intersecting axis intersecting the optical axis, a third direction along a second intersecting axis intersecting both the optical axis and the first intersecting axis, a first rotation direction around the optical axis, a second rotation direction around the first intersecting axis, and a third rotation direction around the second intersecting axis; The control device controls the position changing device based on the measurement result of the position measurement device so as to maintain the relative positional relationship between the object and the irradiation optical system in the first to third directions and another part of the first to third rotational directions at the predetermined positional relationship.

46. ​​A processing system according to any one of claims 43 to 45.

47. the control device controls the position changing device based on the measurement amount so as to maintain the relative positional relationship between the object and the irradiation optical system in the first direction, the second rotational direction, and the third rotational direction at the predetermined positional relationship; The control device controls the position changing device based on the measurement result of the position measurement device so as to maintain the relative positional relationship between the object and the irradiation optical system in the second direction, the third direction, and the first rotational direction at the predetermined positional relationship.

47. The processing system of claim 46.

48. the illumination optical system illuminates the object with the second light during at least a portion of a period during which the processing system is performing the processing; The control device controls the position changing device during at least a portion of the time period during which the processing system is performing the processing.

48. A processing system according to any one of claims 1 to 47.

49. A processing system that processes an object by irradiating at least a part of the object with processing light from a processing light source, a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an irradiation optical system that irradiates at least a portion of a surface of the object with the processing light and irradiates the surface of the object with the second light; a position change device that changes a relative positional relationship between the object and a focusing position of the processing light; a detection device that detects interference light between a third light traveling along a third optical path and the first light, the third light being generated by the second light irradiated onto the surface of the object; a control device that controls the position changing device using an output from the detection device; A processing system comprising:

50. The control device controls the position changing device using a measurement of the difference between the lengths of the second and third optical paths and the length of the first optical path, which is obtained from the output of the detection device.

50. The processing system of claim 49.

51. The position changing device is provided with a focus changing member that is disposed between the processing light source and the irradiation optical system and changes the focusing position of the processing light in the optical axis direction of the irradiation optical system.

51. A processing system according to claim 49 or 50.

52. A processing system that performs at least one of a process using an acting member that acts on an object and a process using an acquisition member that acquires information about the object, a branching optical system that branches measurement light from the measurement light source into a first light that travels along a first optical path and a second light that travels along a second optical path; an illumination optical system that illuminates a surface of the object with second light; a detection device that detects interference light between a third light traveling along a third optical path and the first light, the third light being generated by the second light irradiated onto the surface of the object; a position change device that changes a relative positional relationship between at least one of the action member and the acquisition member and the object; a control device that controls the position changing device using an output from the detection device; A processing system comprising:

53. The control device controls the position changing device using a measurement of the difference between the lengths of the second and third optical paths and the length of the first optical path, which is obtained from the output of the detection device.

53. The processing system of claim 52.

54. the illumination optical system illuminates a first portion of the surface of the object with the second light along a first direction, and illuminates a second portion of the surface of the object that is different from the first portion with the second light along a second direction; the detection device detects a first interference light between the third light and the first light generated from the first portion by the second light irradiated along the first direction, and detects a second interference light between the third light and the first light generated from the second portion by the second light irradiated along the second direction, The control device controls the position changing device using a first measurement amount related to the difference obtained from a first detection result of the first interference light from the detection device and a second measurement amount related to the difference obtained from a second detection result of the second interference light from the detection device.

54. The processing system of claim 53.

55. The control device controls the position changing device so as to maintain a predetermined relative positional relationship between the object and at least one of the action member and the acquisition member, based on a measurement amount relating to a difference between the length of the second and third optical paths and the length of the first optical path obtained from the output from the detection device.

55. A processing system according to any one of claims 52 to 54.

56. The direction in which the action member or the acquisition member is disposed relative to the object is the same as the direction in which the irradiation optical system is disposed relative to the object.

56. A processing system according to any one of claims 52 to 55.

57. a position measuring device that measures a relative positional relationship between the object and at least one of the working member and the acquisition member in a direction intersecting an axis connecting the object and at least one of the working member and the acquisition member; 57. A processing system according to any one of claims 52 to 56.

58. The control device controls the position changing device so as to maintain a predetermined relative positional relationship between the object and the acting member or the acquisition member, based on a measurement amount relating to a difference between the length of the second and third optical paths and the length of the first optical path, which is obtained from the output from the detection device, and a measurement result of the position measurement device.

58. The processing system of claim 57.

59. the first light includes an optical frequency comb as a reference light that is phase-locked and coherent with one another; the second light includes an optical frequency comb as measurement light, a reference surface onto which the first light from the branching optical system is incident, The detection device detects an interference signal based on interference light between the third light generated from the object by the second light irradiated onto the object and the first light returned from the reference surface.

59. A processing system according to any one of claims 1 to 58.

60. a support that supports at least a part of the processing system according to any one of claims 1 to 59 in a state in which at least a part of the processing system is displaceable relative to the object; a drive unit that drives at least a part of the processing system via the support unit; A robot system comprising:

61. The drive unit has a multi-joint structure 61. The robotic system of claim 60.

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