Glass article, method for manufacturing glass article, and imaging device

Abstract

To provide a technique capable of improving weather resistance of a glass article.SOLUTION: The glass article includes a transparent glass body and a light-shielding film provided inside the transparent glass body. The light shielding film includes an inorganic multilayer film.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a glass article, a method for manufacturing a glass article, and an imaging device. [Background technology]

[0002] The optical unit described in Patent Document 1 includes a transparent first substrate, a transparent second substrate, and an aperture formed of black resin that fills the area around the convex portion between the first and second substrates. The first and second substrates are transparent glass substrates or transparent resin substrates. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2021 / 176704 Summary of the Invention [Problem to be solved by the invention]

[0004] In Patent Document 1, an optical element is constructed from a transparent resin substrate and black resin, or an optical unit is constructed from a transparent glass substrate and black resin. If the substrate is a resin substrate, the optical characteristics change significantly with temperature changes. Therefore, it is preferable that the substrate is a glass substrate. However, if the optical unit is constructed from a glass substrate and black resin, the black resin is prone to deterioration due to moisture.

[0005] One embodiment of the present disclosure provides a technique that can improve the weather resistance of glass articles. [Means for solving the problem]

[0006] A glass article according to one embodiment of the present disclosure includes a transparent glass body and a light-shielding film provided inside the transparent glass body. The light-shielding film has an inorganic multilayer film. [Effects of the Invention]

[0007] According to one embodiment of the present disclosure, the weather resistance of a glass article can be improved. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1A is a plan view of an optical element according to an embodiment, and FIG. 1B is a cross-sectional view of the optical element according to an embodiment. [Figure 2] FIG. 2(A) is a cross-sectional view showing an example of a tapered portion, and FIG. 2(B) is a graph showing an example of a change in transmittance in the tapered portion. [Figure 3] FIG. 3 is a flowchart illustrating a manufacturing method according to one embodiment. [Figure 4] FIG. 4 is a flowchart showing an example of the detailed process of step S103. [Figure 5] FIG. 5(A) is a cross-sectional view showing an example of S101, FIG. 5(B) is a cross-sectional view showing an example of S102, FIG. 5(C) is a cross-sectional view showing an example of S103, and FIG. 5(D) is a cross-sectional view showing an example of S104. [Figure 6] FIG. 6(A) is a cross-sectional view showing a first example of a light-shielding film, FIG. 6(B) is a cross-sectional view showing a second example of a light-shielding film, and FIG. 6(C) is a cross-sectional view showing a third example of a light-shielding film. [Figure 7] FIG. 7(A) is a cross-sectional view showing a fourth example of the light-shielding film, and FIG. 7(B) is a cross-sectional view showing a fifth example of the light-shielding film. [Figure 8] FIG. 8(A) is a cross-sectional view showing an example of a lens surface, and FIG. 8(B) is a cross-sectional view showing an example of a third transparent substrate. [Figure 9] Figure 9(A) is a plan view showing a first example of a transmissive region and a light-blocking region, Figure 9(B) is a plan view showing a second example of a transmissive region and a light-blocking region, Figure 9(C) is a plan view showing a third example of a transmissive region and a light-blocking region, and Figure 9(D) is a plan view showing a fourth example of a transmissive region and a light-blocking region. [Figure 10] FIG. 10(A) is a plan view showing a fifth example of the transmissive region and the light-blocking region, and FIG. 10(B) is a plan view showing a sixth example of the transmissive region and the light-blocking region. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In each drawing, the same or similar components are denoted by the same reference numerals, and their description may be omitted. In the specification, the symbol "to" indicating a numerical range means that the numerical values ​​before and after it are included as the lower and upper limits. The numerical range includes the range rounded up or down.

[0010] A glass article 10 according to one embodiment will be described with reference to FIGS. 1(A) and 1(B). The glass article 10 is, for example, an optical element. The glass article 10 is used, for example, in the optical system of an imaging device. The glass article 10 comprises a transparent glass body 20 and a light-shielding film 30 provided inside the transparent glass body 20. The light-shielding film 30 has an inorganic multilayer film 30A. The inorganic multilayer film 30A is made of an inorganic material. Inorganic materials have better weather resistance than organic materials, and can improve the weather resistance of the glass article 10. Here, weather resistance includes resistance to moisture.

[0011] The inorganic multilayer film 30A has multiple inorganic layers 30A1, 30A2, and 30A3 made of different materials. The inorganic layer 30A1 is, for example, an absorbing layer that absorbs light LB of a desired wavelength. The absorbing layer is preferably a metal layer, a semimetal layer, or a semiconductor layer. The number of absorbing layers does not have to be one, but may be two or more. In this embodiment, the light LB is visible light, but it may also be ultraviolet light or infrared light. The absorbing layer may have a metallic luster. Therefore, it is preferable to use the absorbing layer in combination with an anti-reflection layer.

[0012] The inorganic layers 30A2 and 30A3 are, for example, anti-reflection layers that prevent reflection of light LB. The anti-reflection layer has a refractive index different from that of the absorption layer. The difference in refractive index can be utilized to prevent reflection of light LB. The anti-reflection layer is preferably a dielectric layer. The material of the dielectric layer is preferably an oxide, nitride, fluoride, phosphide, sulfide, arsenide, selenide, antimonide, or telluride, and more preferably an oxide or nitride. An example of an oxide is Al2O3. An example of a fluoride is MgF2. The number of dielectric layers does not have to be two, and may be one or three or more.

[0013] The antireflection layer prevents the reflection of light LB, thereby preventing the generation of stray light. It is preferable that the antireflection layer is provided on both sides of the absorbing layer (see FIGS. 1(B) and 6(A)). However, if light LB is incident on only one side of the absorbing layer, the antireflection layer may be provided on only one side of the absorbing layer (see FIGS. 6(B) and 6(C)).

[0014] Preferably, inorganic layers 30A1, 30A2, and 30A3 contain at least one metal element or semi-metal element selected from Cr, Ni, Ti, Nb, Ta, Si, Mo, and Zr. For example, inorganic layer 30A1 is a Cr layer, inorganic layer 30A2 is a Cr2O3 layer, and inorganic layer 30A3 is a SiO2 layer.

[0015] Cr, Ni, Ti, Nb, Ta, Si, Mo, and Zr have small average linear expansion coefficients, which reduces the difference in average linear expansion coefficient between the transparent glass body 20 and the inorganic multilayer film 30A, improving the durability of the glass article 10 against temperature changes. The average linear expansion coefficient of the inorganic multilayer film 30A is represented by αave below.

[0016] αave is the sum of αi×di / Σ(di), where i is a natural number between 1 and n. n is the total number of inorganic layers constituting the inorganic multilayer film 30A. di is the thickness (nm) of the i-th inorganic layer. Σ(di) is the total thickness (nm) of the first to n-th inorganic layers. αi is the average linear expansion coefficient (ppm / °C) of the i-th inorganic layer at 20°C to 300°C.

[0017] αave is preferably 3 ppm / °C to 15 ppm / °C. If αave is within the above range, the difference in the average linear expansion coefficient between the transparent glass body 20 and the inorganic multilayer film 30A can be reduced, and the durability of the glass article 10 against temperature changes can be improved. αave is more preferably 5 ppm / °C to 12 ppm / °C.

[0018] It is preferable that two adjacent inorganic layers constituting the inorganic multilayer film 30A do not contain the same metal element but different valences, or the same metalloid element but different valences. For example, in this embodiment, the Cr layer and the CrO layer are adjacent to each other, but it is preferable that they are not adjacent to each other. This can prevent a change in valence due to element diffusion, for example, in step S103a of FIG. 4 described later.

[0019] The light-shielding film 30 has a constant thickness portion 31 with a constant thickness. The constant thickness portion 31 has two parallel planes 31a and 31b. Each of the planes 31a and 31b is entirely in contact with the transparent glass body 20. Hereinafter, a predetermined direction perpendicular to each of the planes 31a and 31b will also be referred to as the first axis direction. In FIG. 1(B), the arrow direction indicates the transmission direction of light LB. The transmission direction of light LB coincides with the first axis direction, but may also be oblique to the first axis direction.

[0020] As will be described later, when the light-shielding film 30 has a tapered portion 32, the constant thickness portion 31 is positioned farther from the boundary line A3 than the tapered portion 32. The transmittance of the light LB in the constant thickness portion 31 is preferably 0.1% or less. The transmission of the light LB can be sufficiently suppressed in the constant thickness portion 31. The thickness of the constant thickness portion 31 is preferably 1 μm or more in order to suppress the transmittance of the light LB in the constant thickness portion 31 to 0.1% or less.

[0021] As shown in Fig. 1(A), when viewed from the first axis direction, glass article 10 has a transmissive region A1 that transmits a portion of light LB of a desired wavelength and a light-shielding region A2 that blocks another portion of the light LB. Glass article 10 adjusts the shape of light LB by means of light-shielding region A2. In Fig. 1(A), A3 is the boundary between transmissive region A1 and light-shielding region A2 when viewed from the first axis direction.

[0022] The shape of the glass article 10 as viewed from the first axis direction is, for example, rectangular, as shown in FIG. 1(A). The rectangle includes a square. The light-shielding region A2 may be provided along all four sides of the rectangle. However, as shown in FIGS. 9(A) to 9(C), the light-shielding region A2 may be provided along one, two, or three sides of the rectangle. As shown in FIG. 9(D), one transmitting region A1 may be provided in a rectangular shape, the light-shielding region A2 may be provided in a square frame shape so as to surround the transmitting region A1, and another transmitting region A1 may be provided in a square frame shape so as to surround the light-shielding region A2. As shown in FIG. 10(A), the light-shielding region A2 may be provided in a rectangular shape, and the transmitting region A1 may be provided in a square frame shape so as to surround the light-shielding region A2. As shown in FIGS. 9(D) and 10(A), the light-shielding region A2 may be provided away from the periphery of the glass article 10.

[0023] The shape of the glass article 10 as viewed in the first axial direction is not limited to a rectangular shape. The shape of the glass article 10 as viewed in the first axial direction may be circular, for example, as shown in FIG. 10(B). As shown in FIG. 10(B), the transmissive region A1 may be circular, and the light-shielding region A2 may be annularly arranged to surround the transmissive region A1. The arrangement of the transmissive region A1 and the light-shielding region A2 may be reversed, and the light-shielding region A2 may be circular, and the transmissive region A1 may be annularly arranged to surround the light-shielding region A2.

[0024] As shown in FIGS. 1(A) and 1(B), the light-shielding film 30 forms a light-shielding region A2 inside the transparent glass body 20. The light-shielding region A2 is an area where the light-shielding film 30 is provided. The transparent glass body 20 is provided on both the upstream and downstream sides of the light-shielding film 30 in the transmission direction of light LB. The transparent glass body 20 has a first transparent substrate 21 and a second transparent substrate 22. The first transparent substrate 21 and the second transparent substrate 22 are provided in the first axial direction with the light-shielding film 30 sandwiched therebetween and are continuously adjacent in the transmission region A1. In the transmission region A1, nothing need be present between the first transparent substrate 21 and the second transparent substrate 22.

[0025] The first transparent substrate 21 and the second transparent substrate 22 have bonding surfaces 21a and 22a, respectively, that face each other. The bonding surfaces 21a and 22a have flat surfaces. The flat surfaces of the bonding surfaces 21a and 22a are provided in the transmissive region A1. If the bonding surfaces 21a and 22a have flat surfaces, the first transparent substrate 21 and the second transparent substrate 22 can be uniformly pressed against each other and bonded together in the transmissive region A1. In the transmissive region A1, the bonding surfaces 21a and 22a may be perpendicular to the first axis direction.

[0026] The first transparent substrate 21 and the second transparent substrate 22 have opposite surfaces 21b and 22b facing opposite to the bonding surfaces 21a and 22a. In this embodiment, both of the opposite surfaces 21b and 22b have flat surfaces, but at least one of them may have a curved surface. The curved surface may be a lens surface, and the glass article 10 may function as a lens. The lens may be any of a plano-convex lens, a biconvex lens, a plano-concave lens, and a biconcave lens. Furthermore, if the opposite surface 21b or 22b is flat, it may have a predetermined angle with respect to the bonding surface 21a or 22a.

[0027] The opposite surfaces 21b and 22b may each be a flat surface, a convex curved surface, or a concave curved surface. Any combination of these may be used. For example, one of the opposite surfaces 21b and 22b may be a flat surface and the other a convex curved surface or a concave curved surface. Alternatively, one of the opposite surfaces 21b and 22b may be a convex curved surface and the other a concave curved surface. The opposite surfaces 21b and 22b may both be convex curved surfaces, as shown in FIG. 8(A), or both may be concave curved surfaces, as not shown.

[0028] The transparent glass body 20 has a recess (also called a cavity) on at least one bonding surface between the first transparent substrate 21 and the second transparent substrate 22. A light-shielding film 30 is embedded in the recess. The recess is formed, for example, by thermal deformation of the bonding surface when the first transparent substrate 21 and the second transparent substrate 22 are bonded together. However, the recess may also be formed before the first transparent substrate 21 and the second transparent substrate 22 are bonded together.

[0029] The first transparent substrate 21 and the second transparent substrate 22 preferably include the same first glass. Generally, glass exhibits smaller changes in optical properties (e.g., refractive index and extinction coefficient) due to temperature changes than resin. The first glass is not particularly limited, but may be, for example, soda-lime glass, borosilicate glass, aluminosilicate glass, lead glass, optical glass, synthetic quartz glass, or crystallized glass.

[0030] 8(B), the transparent glass body 20 may further include a third transparent substrate 23 in addition to the first transparent substrate 21 and the second transparent substrate 22. The first transparent substrate 21, the second transparent substrate 22, and the third transparent substrate 23 are laminated in this order. In this case, the glass article 10 may further include a light-shielding film 30 between the second transparent substrate 22 and the third transparent substrate 23.

[0031] As shown in FIG. 2(A), the light-shielding film 30 preferably has a tapered portion 32. The tapered portion 32 is provided on at least a portion (preferably the entirety) of the boundary line A3 between the light-shielding region A2 and the transmission region A1 when viewed from the first axis direction. The tapered portion 32 is in contact with the boundary line A3, and the thickness of the tapered portion 32 increases with increasing distance L from the boundary line A3. As a result, as shown in FIG. 2(B), the transmittance of the light LB in the tapered portion 32 decreases with increasing distance L from the boundary line A3. Compared to when the transmittance of the light LB changes discontinuously at the boundary line A3, diffraction of the light LB can be suppressed, and the generation of stray light can be suppressed.

[0032] The tapered portion 32 may be formed of, for example, an inorganic multilayer film 30A. As shown in FIG. 2(B), in the tapered portion 32, the thickness of each of the inorganic layers 30A1, 30A2, and 30A3 increases as the distance L increases. However, as shown in FIGS. 6(A) and 6(B), only some of the inorganic layers (e.g., the absorption layer) in the tapered portion 32 may have varying thicknesses, and the remaining inorganic layers (e.g., the antireflection layer) may have a constant thickness. This is because a change in the thickness of the antireflection layer reduces the antireflection function.

[0033] The tapered portion 32 may be composed of multiple inorganic layers 30A1, 30A2, and 30A3 as shown in Figures 6(A) and 6(B), or may be composed of a single inorganic layer (e.g., an absorbing layer) as shown in Figure 6(C). One inorganic layer (e.g., an absorbing layer) may be provided across both the constant thickness portion 31 and the tapered portion 32, with the remaining inorganic layer (e.g., an anti-reflection layer) being provided only in the constant thickness portion 31. In the tapered portion 32, the transmittance of light LB should decrease as the distance L from the boundary line A3 increases.

[0034] As shown in FIG. 7(A), the light-shielding film 30 may have a light-shielding glass layer 30B in addition to the inorganic multilayer film 30A. The tapered portion 32 may be formed of the light-shielding glass layer 30B. The light-shielding glass layer 30B includes a second glass. The content of the second glass in the light-shielding glass layer 30B is 50% by volume or more. When the light-shielding glass layer 30B mainly includes the second glass, the difference in linear expansion coefficient between the transparent glass body 20 and the light-shielding glass layer 30B can be reduced. The light-shielding glass layer 30B may be partially crystallized.

[0035] To suppress reflection at the interface between the transparent glass body 20 and the light-blocking glass layer 30B, it is preferable to select the second glass with a refractive index close to that of the first glass. Therefore, it is preferable that the second glass be as transparent as the first glass. It is particularly preferable that the first glass and the second glass have the same composition.

[0036] When the second glass is transparent, the light-shielding glass layer 30B contains a pigment dispersed in the second glass. The pigment is, for example, a black pigment. The pigment is preferably an inorganic pigment. The inorganic pigment is, for example, a metal oxide, a metal, or a carbon-based material. The carbon-based material is graphite or carbon black. Graphite is crystalline, and carbon black is amorphous. The light-shielding glass layer 30B may contain multiple types of pigments to adjust the wavelength dependency of the transmittance of light LB. The second glass may be black glass. In black glass, the glass itself is black, and the coloring component is not a pigment dispersed in the glass but a metal ion solid-dissolved in the glass.

[0037] The second glass is, for example, a glass containing SiO2 as its main component, a bismuth-based glass, or a vanadium-based glass. Bismuth-based glass contains Bi2O3. Vanadium-based glass contains V2O5. Glass containing SiO2 as its main component tends to have a lower refractive index than bismuth-based glass and vanadium-based glass. Lanthanum borate glass may also be used as the second glass. In this specification, the term "main component" refers to the component that is contained in the largest amount among the components, preferably 50 mass % or more.

[0038] The light-blocking glass layer 30B is obtained, for example, by firing a glass paste containing glass powder and a pigment. The glass powder is also called glass frit. The glass paste may contain additives other than the glass powder and the pigment, such as a resin binder. The resin binder is removed before firing the glass paste. Note that if the second glass is black glass and the light-blocking glass layer 30B does not contain a pigment, the light-blocking glass layer 30B may be obtained by processing a block of the second glass.

[0039] As shown in FIG. 7(B), the light-shielding glass layer 30B may have a concentration gradient portion 30Ba. The concentration gradient portion 30Ba is provided on at least a part (preferably the entirety) of the boundary line A3 between the light-shielding region A2 and the transmission region A1 when viewed from the first axis direction. The concentration gradient portion 30Ba is in contact with the boundary line A3, and the concentration of the coloring component increases with increasing distance L from the boundary line A3. The coloring component is, for example, a pigment. The coloring component may be a metal ion that is solid-dissolved in the glass, rather than a pigment that is dispersed in the glass.

[0040] As described above, the concentration gradient portion 30Ba is in contact with the boundary line A3, and the concentration of the coloring component increases as the distance L from the boundary line A3 increases. As a result, in the concentration gradient portion 30Ba, the transmittance of the light LB decreases as the distance L from the boundary line A3 increases. This makes it possible to suppress diffraction of the light LB and to suppress the generation of stray light. Unlike the tapered portion 32, the concentration gradient portion 30Ba may have a constant thickness regardless of the distance L from the boundary line A3. However, like the tapered portion 32, the concentration gradient portion 30Ba may have a thickness that increases as the distance L from the boundary line A3 increases.

[0041] When the light-shielding film 30 has the gradient concentration portion 30Ba, the constant thickness portion 31 may be disposed farther from the boundary line A3 than the gradient concentration portion 30Ba. The constant thickness portion 31 preferably has a constant transmittance in the first axis direction.

[0042] A method for manufacturing a glass article 10 according to one embodiment will be described with reference to Fig. 3 to Fig. 5. As shown in Fig. 3, the manufacturing method includes, for example, steps S101 to S104. Note that the manufacturing method does not necessarily include all of steps S101 to S104. For example, when manufacturing glass articles 10 one by one, step S104 may be omitted. The manufacturing method may include steps other than steps S101 to S104.

[0043] 5(A), for example, a first transparent substrate 21 and a second transparent substrate 22 are prepared. Although not shown, a recess for accommodating the light-shielding film 30 may be provided on at least one bonding surface between the first transparent substrate 21 and the second transparent substrate 22. The recess may be provided in a grid pattern, for example.

[0044] Step S102 includes forming the light-shielding film 30, as shown in FIG. 5B, for example. The light-shielding film 30 has an inorganic multilayer film 30A. The inorganic multilayer film 30A is formed by a PVD (Physical Vapor Deposition) method such as a sputtering method or a CVD (Chemical Vapor Deposition) method. If the inorganic multilayer film 30A is formed using an overhanging mask 40, the tapered portion 32 can be formed by the inorganic multilayer film 30A.

[0045] As described above, the light-shielding film 30 may have a light-shielding glass layer 30B in addition to the inorganic multilayer film 30A. The light-shielding glass layer 30B is obtained, for example, by applying a glass paste, degreasing it, and firing it.

[0046] 5(C), step S103 includes bonding the first transparent base material 21 and the second transparent base material 22 with the light-shielding film 30 sandwiched between them. Step S103 preferably includes steps S103a to S103b, for example, as shown in FIG.

[0047] Step S103a includes heating the first transparent substrate 21 and the second transparent substrate 22 with the light-shielding film 30 sandwiched between them. The heating temperature is preferably equal to or higher than the glass transition temperature Tg of the first transparent substrate 21 and the second transparent substrate 22 (in other words, the transparent glass body 20). The heating temperature is preferably equal to or lower than the softening point Ts of the first transparent substrate 21 and the second transparent substrate 22 (in other words, the transparent glass body 20) by +100°C. The softening point Ts is higher than the glass transition temperature Tg.

[0048] Step S103b includes bringing the first transparent substrate 21 and the second transparent substrate 22 into close contact with the light-shielding film 30 in the light-shielding region A2, and bringing the first transparent substrate 21 and the second transparent substrate 22 into close contact with the light-shielding film 30 in the transmission region A1. The first transparent substrate 21 and the second transparent substrate 22 have been heated and softened in advance in step S103a, and are therefore deformable along the light-shielding film 30. This reduces the inclusion of air bubbles, and allows the first transparent substrate 21 and the second transparent substrate 22 to be continuously in contact with each other in the transmission region A1.

[0049] Step S103b may include pressing the first transparent substrate 21 and the second transparent substrate 22 together with a press.

[0050] The glass transition temperature Tg of the first transparent substrate 21 and the second transparent substrate 22 (in other words, the transparent glass body 20) is preferably 800° C. or lower. If the glass transition temperature Tg is 800° C. or lower, the viscosity of the first transparent substrate 21 and the second transparent substrate 22 can be sufficiently reduced in step S103b at a temperature at which cemented carbide generally used as a mold for a press does not undergo plastic deformation, and at least one of the first transparent substrate 21 and the second transparent substrate 22 can be deformed along the light-shielding film 30. This reduces the inclusion of air bubbles.

[0051] The glass transition temperature Tg of the transparent glass body 20 is measured in accordance with JIS R3103-3 (2001). For example, when the assumed glass transition temperature Tg is 650°C, the test sample is heated at a constant rate of (5±1)°C / min in the range of 200°C to 700°C. From the viewpoint of reducing the inclusion of air bubbles, the glass transition temperature Tg of the transparent glass body 20 is preferably 800°C or lower, more preferably 700°C or lower, and even more preferably 650°C or lower. Furthermore, from the viewpoint of feasibility, the glass transition temperature Tg of the transparent glass body 20 is preferably 350°C or higher.

[0052] Furthermore, the maximum thickness of the light-shielding film 30 is preferably 5 μm or less. If the maximum thickness of the light-shielding film 30 is 5 μm or less, the step of the light-shielding film 30 is small and there is little trapped air. The maximum thickness of the light-shielding film 30 is more preferably 4 μm or less. From the viewpoint of light-shielding properties, the maximum thickness of the light-shielding film 30 is preferably 1 μm or more.

[0053] According to this embodiment, a homogeneous bonding surface with few voids and impurities is obtained, and the refractive index variation in the transmission region A1 is small. Note that the refractive index variation in the transmission region A1 leads to wavefront aberration of the light LB, which may cause blurred images when incorporated into an imaging device, for example.

[0054] The variation in refractive index (difference between the maximum and minimum values) Δn in the transmission region A1 is calculated by measuring the wavefront aberration (nm) of light with a wavelength of 633 nm that passes through the transmission region A1 in the first axis direction and dividing the wavefront aberration by the thickness (nm) of the measurement sample. The measurement sample is processed so that the light entrance and exit surfaces are parallel to the bonding surfaces 21a and 22a.

[0055] Δn is 1.0 x 10 -8 ~1.0×10 -3 Incidentally, when an inorganic multilayer film consisting of a Cr layer and a CrO layer was formed on a borosilicate glass plate (manufactured by Schott, product name: D263), and another borosilicate glass plate (manufactured by Schott, product name: D263) was placed on the inorganic multilayer film, heated to 600°C, and bonded in a nitrogen atmosphere, Δn was 8.5 × 10 -5 It was.

[0056] Step S104 includes cutting the bonded body obtained in step S103 into a plurality of glass articles 10, as shown in Fig. 5(D), for example. Cutting includes, for example, blade processing or laser processing.

[0057] Incidentally, the heat treatment in step S103 etc. may change the refractive index of the glass or may cause internal stress and birefringence. Therefore, after step S103, the bonded body obtained in step S103 may be heated and slowly cooled (so-called annealing).

[0058] Annealing restores the refractive index of the glass to the desired value and also removes internal stress and birefringence. Annealing may be performed before or after step S104. However, because annealing may cause dimensional changes, it is preferable to perform annealing before step S104.

[0059] The glass article, the method for manufacturing the glass article, and the imaging device according to the present disclosure have been described above, but the present disclosure is not limited to the above-described embodiments. Various changes, modifications, substitutions, additions, deletions, and combinations are possible within the scope of the claims. These naturally fall within the technical scope of the present disclosure. [Explanation of symbols]

[0060] 10 Glass items 20 Transparent glass body 21 First transparent base material 22 Second transparent base material 30 Light-shielding film 30A Inorganic multilayer film A1 transmission area A2 Shade area LB light

Claims

1. A glass article comprising a transparent glass body and a light-shielding film provided inside the transparent glass body, The glass article, wherein the light-shielding film has an inorganic multilayer film.

2. the light-shielding film has a constant thickness portion having a constant thickness, The glass article according to claim 1 , wherein the constant thickness portion has two parallel flat surfaces, and each of the flat surfaces is in contact with the transparent glass body in its entirety.

3. When viewed from a predetermined direction perpendicular to the plane of the constant thickness portion, the glass article has a transmission region that transmits a portion of light of a desired wavelength and a light-shielding region that blocks another portion of the light, 3. The glass article according to claim 2, wherein the transparent glass body has a first transparent substrate and a second transparent substrate, the first transparent substrate and the second transparent substrate being disposed on either side of the light-shielding film in the predetermined direction and being continuously in contact with each other in the transmission region.

4. The difference between the maximum and minimum values ​​of the refractive index of the transmission region is a value obtained by measuring the wavefront aberration of light with a wavelength of 633 nm that is transmitted through the transmission region in the predetermined direction and dividing the wavefront aberration by the thickness of the measurement sample, and is 1.0 × 10 －８ ~1.0 x 10 －３ The glass article according to claim 3, wherein

5. The glass article according to claim 3 , wherein the light-shielding film has a tapered portion in at least a part of a boundary line between the light-shielding region and the light-transmitting region when viewed from the predetermined direction, the thickness of the tapered portion increasing with increasing distance from the boundary line.

6. the inorganic multilayer film has a plurality of inorganic layers, The glass article according to claim 5 , wherein the tapered portion is formed by one or more of the inorganic layers.

7. the light-shielding film has a light-shielding glass layer in addition to the inorganic multilayer film, The glass article according to claim 5 , wherein the tapered portion is formed by the light-shielding glass layer.

8. the light-shielding film has a light-shielding glass layer in addition to the inorganic multilayer film, the light-shielding glass layer contains a coloring component, 4. The glass article according to claim 3, wherein the light-shielding glass layer has, at least in part of a boundary line between the light-shielding region and the light-transmitting region when viewed from the predetermined direction, a concentration gradient portion in which the concentration of the coloring component increases with increasing distance from the boundary line.

9. 2. The glass article according to claim 1, wherein the maximum thickness of the light-shielding film is 1 μm to 5 μm.

10. 2. The glass article according to claim 1, wherein the transparent glass body has a glass transition temperature of 350°C to 800°C.

11. The glass article according to claim 1 , wherein the inorganic multilayer film has at least one of a metal layer, a semi-metal layer, and a semiconductor layer.

12. The inorganic multilayer film is such that, when the total number of inorganic layers constituting the inorganic multilayer film is n (n is a natural number of 2 or more), the thickness (nm) of the i-th inorganic layer (i is a natural number of 1 to n), the total thickness (nm) of the 1st to n-th inorganic layers is Σ(di), the average linear expansion coefficient (ppm / °C) of the i-th inorganic layer at 20°C to 300°C is αi, and the sum (ppm / °C) of αi × di / Σ(di) is αave, αave is 3 ppm / °C to 15 ppm / °C. The glass article according to claim 1.

13. 2. The glass article according to claim 1, wherein the inorganic multilayer film has an absorption layer that absorbs light of a desired wavelength and an anti-reflection layer that prevents reflection of the light.

14. A method for producing a glass article according to any one of claims 3 to 8, heating the first transparent substrate and the second transparent substrate in a state in which the light-shielding film is sandwiched between the first transparent substrate and the second transparent substrate; the first transparent substrate and the second transparent substrate are brought into close contact with the light-shielding film in the light-shielding region, and the first transparent substrate and the second transparent substrate are brought into close contact with the light-transmitting region; A method for manufacturing a glass article, comprising the steps of:

15. An imaging device comprising the glass article according to any one of claims 1 to 13.

Images