Discharge tube diagnosis apparatus and discharge tube diagnosis method

Abstract

To provide a discharge tube diagnostic device and a discharge tube diagnostic method capable of predicting a progress state of deterioration of a discharge tube.SOLUTION: The discharge tube diagnosis device includes a light emission unit, a light reception unit, a generation unit, a diagnosis unit, and a display unit. The light emitting unit irradiates the discharge unit with light. The light receiving portion receives light emitted from the light emitting portion and transmitted through the discharging portion. The generation unit obtains a transmissivity of light based on a received light amount obtained by the light receiving unit for each of a plurality of regions obtained by dividing a target range in which a degree of deterioration of the discharge unit is diagnosed, and generates first two-dimension mapping in which the transmissivity in each of the plurality of regions arranged on a two-dimension plane on which the discharge unit is developed is mapped. The diagnostic part processes the first two-dimension mapping date so that one or a plurality of colors are displayed in gradations according to the respective transmittances of the plurality of regions. The display unit displays the first two-dimension mapping processed by the diagnostic unit.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] An embodiment of the present invention relates to a discharge tube diagnostic device and a discharge tube diagnostic method. [Background technology]

[0002] The ozone generator comprises a discharge tube including a discharge part having a dielectric and a metal film (dielectric electrode) overlaid on the dielectric, and a ground electrode separated from the discharge tube by a specified discharge gap. When a high-frequency high voltage from a power supply is applied between the dielectric electrode and the ground electrode, a silent discharge occurs in the discharge gap, and ozone molecules are generated from the oxygen molecules in the source gas. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-012159 Summary of the Invention [Problem to be solved by the invention]

[0004] The discharge tubes of this type of ozone generator may deteriorate as the metal film gradually disappears over time, resulting in a decrease in ozone generation efficiency. If the progress of discharge tube deterioration could be understood, an operator could predict the deterioration of the discharge tube and replace the discharge tube at the appropriate time. However, with conventional diagnostic methods, while the operator could determine the deterioration status of the discharge tube at the time of diagnosis, it was difficult to accurately grasp the progress of discharge tube deterioration and predict its deterioration.

[0005] An object of the present invention is to provide a discharge tube diagnostic device and a discharge tube diagnostic method that can predict the progress of deterioration of a discharge tube. [Means for solving the problem]

[0006] To achieve the above object, a discharge tube diagnosis device according to an embodiment of the present invention includes a light-emitting unit, a light-receiving unit, a generation unit, a diagnosis unit, and a display unit. The light-emitting unit is located either inside or outside a cylindrical discharge unit having a dielectric and a metal film overlaid on the dielectric, and irradiates light onto the discharge unit. The light-receiving unit is located either inside or outside the discharge unit, and receives light irradiated from the light-emitting unit and transmitted through the discharge unit. The generation unit calculates light transmittance based on the amount of light received by the light-receiving unit for each of a plurality of regions defining a target range for diagnosing the degree of deterioration of the discharge unit, and generates first two-dimensional mapping data in which the transmittance of each of the plurality of regions arranged on a two-dimensional plane in which the discharge unit is laid out is mapped. The diagnosis unit processes the first two-dimensional mapping data so that one or more colors are displayed in gradations according to the transmittance of each of the plurality of regions. The display unit displays the first two-dimensional mapping data processed by the diagnosis unit. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a perspective view of an example of a discharge tube diagnostic device according to the first embodiment. [Figure 2] FIG. 2 is a cross-sectional view of an example of a discharge tube to be diagnosed by the discharge tube diagnosis device of the first embodiment. [Figure 3] FIG. 3 is a cross-sectional view of a portion of an example of the discharge tube diagnostic device of the first embodiment. [Figure 4] FIG. 4 is a detailed cross-sectional view of a portion of an example of the discharge tube diagnostic device of the first embodiment. [Figure 5] FIG. 5 is a diagram illustrating an example of the hardware configuration of the control device in the discharge tube diagnosis device of the first embodiment. [Figure 6] FIG. 6 is a diagram illustrating an example of the functional configuration of the control device in the discharge tube diagnosis device of the first embodiment. [Figure 7] FIG. 7 is a diagram showing the light transmittance of the discharge part in the discharge tube of the first embodiment. [Figure 8] FIG. 8 is a diagram for explaining two-dimensional mapping in the discharge tube diagnostic processing of the first embodiment. [Figure 9] FIG. 9 is a diagram showing an example of two-dimensional mapping data in the discharge tube diagnosis processing of the first embodiment. [Figure 10] FIG. 10 is an enlarged view of a portion of the two-dimensional mapping data of FIG. [Figure 11] FIG. 11 is a diagram showing an example of a case where two-dimensional mapping data is displayed in gradation in the discharge tube diagnostic processing of the first embodiment. [Figure 12] FIG. 12 is a diagram showing an example of two-dimensional mapping data in which gradation display is performed in the discharge tube diagnosis processing of the first embodiment. [Figure 13] FIG. 13 is a diagram showing an example of two-dimensional mapping data in which gradation display is performed based on the change in transmittance over time in the discharge tube diagnostic processing of the second embodiment. [Figure 14] FIG. 14 is a diagram showing an example of two-dimensional mapping data in which areas with high transmittance are extracted and displayed in gradation in the discharge tube diagnostic processing of the third embodiment. [Figure 15] FIG. 15 is a flowchart showing the flow of processing by the control device. [Figure 16] FIG. 16 is a diagram showing the relationship between the discharge elapsed time and the transmittance threshold excess area ratio. [Figure 17] FIG. 17 is a diagram showing an example of two-dimensional mapping data in which another gradation display is performed in the discharge tube diagnosis processing of the first embodiment. [Figure 18] FIG. 18 is a diagram showing an example of the functional configuration of the control device 20 in the discharge tube diagnosis device according to the first modification of the first embodiment. [Figure 19] FIG. 19 is a diagram showing an example of two-dimensional mapping data in which another gradation display is performed in the discharge tube diagnosis processing of the first embodiment. [Figure 20] FIG. 20 is a diagram showing an example of two-dimensional mapping data obtained by extracting and displaying in gradation a region where a high transmittance region extends in the circumferential direction of a discharge tube in the discharge tube diagnostic processing of the third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] (First embodiment) Hereinafter, an embodiment of the discharge tube diagnostic device 1 of the present invention will be described in detail with reference to the accompanying drawings. The configuration of the embodiment described below, and the actions and results (effects) brought about by said configuration, are merely examples, and are not limited to the following description. Note that in this specification, ordinal numbers are used only to distinguish between parts and components, and do not indicate order or priority.

[0009] The structure of a discharge tube diagnostic device 1 according to a first embodiment of the present invention will be described with reference to Fig. 1. Fig. 1 is a perspective view of an example of the discharge tube diagnostic device 1 according to the first embodiment. The discharge tube diagnostic device 1 shown in Fig. 1 is a device that diagnoses the degree of deterioration of a discharge tube 10 provided in an ozone generator (not shown).

[0010] In the following description, an X-axis, Y-axis, and Z-axis Cartesian coordinate system is defined. The axial direction of the discharge tube 10 is defined as the X-axis direction, and the extension direction of the stage 131 is defined as the Y-axis direction. The direction perpendicular to the X-axis and Y-axis directions is defined as the Z-axis direction. The X-axis direction may also be referred to as the depth direction. The Y-axis direction may also be referred to as the left-right direction. The Z-axis direction may also be referred to as the height direction. Note that the X-axis, Y-axis, and Z-axis Cartesian coordinate system is a coordinate system used for convenience, and embodiments of the present invention can also be applied to discharge tube diagnostic devices to which this coordinate system cannot be applied.

[0011] As shown in Fig. 1, the discharge tube diagnostic device 1 of this embodiment includes a discharge tube 10, a light-emitting unit 11, a plurality of light-receiving units 12, a camera 12B, and a support unit 13. The discharge tube 10 is provided in an ozone generator. The discharge tube 10 is formed in a substantially cylindrical (tubular) shape with one end closed and the other end open. More specifically, the discharge tube 10 has a cylindrical portion 10a and a closed portion 10b that closes one end of the cylindrical portion 10a.

[0012] The light-emitting unit 11 irradiates light of a constant intensity from inside the discharge tube 10 toward the inner surface of the discharge tube 10. The light-emitting unit 11 is configured in a ring shape that can irradiate the inner surface of the discharge tube 10 with annular light centered on the central axis Ax of the discharge tube 10. The light-emitting unit 11 is, for example, a blue LED (Light Emitting Diode). However, the light-emitting unit 11 may also be an LED of another color, an incandescent lamp, a fluorescent lamp, a mercury lamp, an ultraviolet lamp, an infrared lamp, or the like.

[0013] The multiple light receiving units 12 include multiple photodetectors 12A-1, 12A-2, 12A-3, 12A-4, 12A-5, and 12A-6 and camera 12B. In other words, light receiving unit 12 is a collective term for the multiple photodetectors 12A-1, 12A-2, 12A-3, 12A-4, 12A-5, and 12A-6 and camera 12B. Hereinafter, light receiving unit 12 will be used as a collective term for the multiple photodetectors 12A-1, 12A-2, 12A-3, 12A-4, 12A-5, and 12A-6 and camera 12B.

[0014] Each of the plurality of light receiving sections 12 has one or more light receiving elements (not shown). The light receiving elements are, for example, photodiodes. However, the light receiving elements are not limited to photodiodes. Elements according to the type of light may be used as the light receiving elements.

[0015] The plurality of light receiving sections 12 are arranged in the circumferential direction of the cylindrical section 10a of the discharge tube 10. The plurality of photodetectors 12A are arranged so as to be able to detect light on half of the circumferential direction of the cylindrical section 10a.

[0016] The plurality of light receiving sections 12 are located outside the discharge section 10e and receive light that is emitted from the light emitting section 11 and transmitted through the discharge section 10e.

[0017] The support portion 13 supports the light emitting portion 11, the light receiving portion 12, and the discharge tube 10 so as to enable relative movement between the light emitting portion 11, the light receiving portion 12, and the discharge tube 10.

[0018] The support unit 13 has a stage 131 on which the discharge tube 10 is placed, and a moving body 132. The stage 131 is disposed so that the direction of the central axis Ax of the discharge tube 10 is along the X-axis direction, and supports the discharge tube 10. The stage 131 supports the discharge tube 10 so that the discharge tube 10 can rotate around the central axis Ax of the discharge tube 10.

[0019] The movable body 132 is provided so as to be movable in the X-axis direction relative to the stage 131. Therefore, when the movable body 132 moves in the X-axis direction, the light-emitting unit 11 and the light-receiving unit 12 move together in the X-axis direction. At this time, the discharge tube 10 is supported by the stage 131 and does not move. That is, the light-emitting unit 11 and the light-receiving unit 12 move together relative to the discharge tube 10. The movable body 132 is moved manually, for example. The movable body 132 may also be moved by the driving force of a driving source such as a motor.

[0020] The movable body 132 has two rods 132a and 132b and two plates 132c and 132d. The two rods 132a and 132b extend parallel to each other in the X-axis direction. The two rods 132a and 132b are spaced apart in the Y-axis direction. The ends of the two rods 132a and 132b in the +X direction are connected by plate 132c. Furthermore, plate 132d is fixed to the end of rod 132b in the -X direction.

[0021] The end of the rod 132a in the -X direction is provided with a light emitting unit 11. The plate 132d is provided with a light receiving unit 12.

[0022] Fig. 2 is a cross-sectional view of an example of a discharge tube 10 to be diagnosed by the discharge tube diagnosis device 1 of the first embodiment. As shown in Fig. 2, the discharge tube 10 has a dielectric 10c and a metal film 10d. The dielectric 10c is formed in a substantially cylindrical (tubular) shape with one end closed and the other end open, and constitutes a part of the cylindrical portion 10a and a part of the closed portion 10b. The dielectric 10c includes a dielectric material such as silica glass, borosilicate glass, high silicate glass, or aluminosilicate glass, and has electrical insulation properties.

[0023] The metal film 10d is overlaid on the inner surface of the dielectric 10c. The metal film 10d is formed in a substantially cylindrical shape with one end closed and the other end open, and constitutes a part of the cylindrical portion 10a and a part of the closed portion 10b.

[0024] The metal film 10d is conductive and contains a conductive material such as stainless steel, nickel, carbon, or aluminum. The metal film 10d is adhered to the inner surface of the dielectric 10c by sputtering, spraying, vapor deposition, electroless plating, electrolytic plating, or paint application of the conductive material. The metal film 10d functions as a high-voltage electrode. The discharge unit 10e is formed by a laminated portion of the dielectric 10c and the metal film 10d superimposed on the dielectric. The discharge unit 10e is formed in a cylindrical shape. The light-emitting unit 11 irradiates light onto the discharge unit 10e.

[0025] Fig. 3 is a cross-sectional view of a portion of an example of the discharge tube diagnosis device 1 of the first embodiment. As shown in Fig. 3, a pulley 132a1 is provided on the rod 132a. The discharge tube diagnosis device 1 is also provided with a distance sensor 30 (see Fig. 5) that can measure the relative movement distance between the discharge tube 10 and the moving body 132. The measurement result of this distance sensor 30 makes it possible to position the moving body 132 in the X-axis direction. The discharge tube diagnosis device 1 is also provided with an angle sensor 31 (see Fig. 5) that can measure the relative rotation angle between the discharge tube 10 and the moving body 132 in the circumferential direction of the discharge tube 10. The measurement result of this angle sensor 31 makes it possible to position the light receiving unit 12 in the circumferential direction of the discharge tube 10.

[0026] 1 and 3, rod 132a and light-emitting unit 11 are located inside discharge tube 10, and pulley 132a1 contacts the inner surface of cylindrical portion 10a of discharge tube 10. Rod 132b, plates 132c and 132d, and light-receiving unit 12 are located outside discharge tube 10.

[0027] Fig. 4 is a detailed cross-sectional view of a portion of an example of the discharge tube diagnosis device 1 of the first embodiment. As shown in Fig. 4, the photodetector 12A receives light that is irradiated from the light-emitting unit 11 and transmitted through the discharge unit 10e. The arrow in Fig. 4 indicates the traveling direction of the light irradiated from the light-emitting unit 11. The photodetector 12A converts the amount of received light as the light detection result into the light transmittance of the discharge unit 10e, and outputs it to the control device 20 (see Fig. 5), which will be described later. The transmittance is an example of data obtained by light reception by the photodetector 12A.

[0028] As shown in Fig. 4, the photodetector 12A is located on the opposite side of the light-emitting section 11 with respect to the discharge section 10e of the discharge tube 10. The light-emitting section 11 is located inside the discharge section 10e. That is, the discharge tube 10 (discharge section 10e) is located between the photodetector 12A and the light-emitting section 11. The position of the photodetector 12A in the radial direction of the discharge tube 10 is adjusted as follows. That is, the position of the photodetector 12A on the cylindrical section 10a of the discharge tube 10 is adjusted by an adjustment screw 121 so that it comes into contact with the outer surface of the cylindrical section 10a of the discharge tube 10.

[0029] Fig. 5 is a diagram showing an example of the hardware configuration of the control device 20 in the discharge tube diagnosis device 1 of the first embodiment. As shown in Fig. 5, the discharge tube diagnosis device 1 includes the control device 20. The control device 20 controls each part of the discharge tube diagnosis device 1 and performs various calculations.

[0030] The control device 20 includes a processor 21, a display unit 22, an operation unit 23, a light-emitting unit controller 24, a photodetector controller 25, a camera controller 26, a sensor controller 27, a communication unit 28, and a memory unit 29. The processor 21 and the memory unit 29 constitute a computer.

[0031] The processor 21 is a control device such as a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), or an ASIC (Application Specific Integrated Circuit). The display unit 22 is an example of a display device, and is realized by a display device (output device) such as a liquid crystal display or a touch panel display. The display unit 22 displays two-dimensional mapping data processed by a diagnosis unit 43 (described later). The operation unit 23 is realized by an input device (input device) such as a keyboard or a pointing device. The operation unit 23 may be a touch panel provided on the screen of the display unit 22.

[0032] The light-emitting unit controller 24 is connected to the light-emitting unit 11 and controls the operation of the light-emitting unit 11 under the control of the processor 21. The photodetector controller 25 is connected to the plurality of photodetectors 12A and controls the operation of the plurality of photodetectors 12A under the control of the processor 21. The camera controller 26 is connected to the camera 12B and controls the operation of the camera 12B under the control of the processor 21. The sensor controller 27 is connected to the distance sensor 30 and the angle sensor 31 and controls the operation of the distance sensor 30 and the angle sensor 31 under the control of the processor 21.

[0033] The communication unit 28 is a communication interface for connecting to other devices (not shown). Under the control of the processor 21, the communication unit 28 exchanges various data with other devices.

[0034] The storage unit 29 is realized by, for example, a main storage device such as a RAM (Random Access Memory), a semiconductor memory element such as a flash memory, an auxiliary storage device such as a hard disk, etc. The storage unit 29 stores programs and setting information related to the operation of the discharge tube diagnosis device 1.

[0035] Next, the functional configuration of the control device 20 will be described with reference to Fig. 6. Fig. 6 is a diagram showing an example of the functional configuration of the control device 20 in the discharge tube diagnosis device 1 of the first embodiment. This functional configuration may be a software configuration realized by the processor 21 executing a program stored in the storage unit 29, or may be a hardware configuration realized by a dedicated circuit provided in the processor 21 or the like.

[0036] As shown in FIG. 6, the control device 20 has a functional configuration including an acquisition unit 41, a generation unit 42, and a diagnosis unit 43. The acquisition unit 41 acquires the amount of received light detected by the photodetector 12A. The generation unit 42 calculates the light transmittance based on the amount of received light obtained by the light receiving unit 12 for each of a plurality of regions that define a target range for diagnosing the degree of deterioration of the discharge unit 10e, and generates two-dimensional mapping data in which the transmittance of each of a plurality of regions Da arranged on a two-dimensional plane on which the discharge unit 10e is laid out is mapped. The diagnosis unit 43 processes the two-dimensional mapping data so that one or more colors are displayed in gradations according to the transmittance of each of the plurality of regions Da.

[0037] (Discharge tube diagnostic method) An example of a method for diagnosing the discharge tube 10 using the detection results of the photodetector 12A will be described below.

[0038] The acquisition unit 41 acquires, via the photodetector controller 25, the detection result of the photodetector 12A, i.e., the amount of light received by the photodetector 12A that is irradiated from the light emitting unit 11 and transmitted through the discharge unit 10e.

[0039] Next, the generation unit 42 obtains the light transmittance in each region based on the amount of light received by the photodetector 12A. More specifically, the generation unit 42 calculates the light transmittance from the amount of light received by the photodetector 12A acquired by the acquisition unit 41. If the amount of light emitted from the light-emitting unit 11 is Iin and the amount of light that passes through the metal film 10d of the discharge unit 10e and is irradiated onto the photodetector 12A is Iout, the light transmittance of the discharge unit 10e is defined by the following equation 1. Transmittance=(1-(Iin-Iout) / Iin)×100(%)...(Formula 1)

[0040] Then, the generating unit 42 generates two-dimensional mapping data in which the transmittance in each region is mapped.

[0041] Next, the diagnosis unit 43 processes the two-dimensional mapping data generated by the generation unit 42 so that one or more colors are displayed in gradation according to the transmittance. Then, the display unit 22 displays the gradation-displayed two-dimensional mapping data on, for example, a liquid crystal display.

[0042] The worker visually checks the two-dimensional mapping data processed by the diagnosis unit 43 on the display unit 22. This allows the worker to recognize the distribution of transmittance in the discharge unit 10e, i.e., the distribution of the degree of disappearance of the metal film 10d. Using the above method, the worker diagnoses the degree of deterioration of the discharge tube 10.

[0043] Generally, the metal film in the discharge section becomes thinner over time and eventually disappears. Therefore, the degree of metal film disappearance can be evaluated by measuring light transmittance. When the transmittance exceeds a certain threshold, the area exceeding the threshold loses sufficient electrical conductivity and no longer contributes to discharge. Furthermore, metal film disappearance also occurs in areas that do not exceed the threshold. By observing the distribution and time-dependent changes in transmittance in those areas, an operator can detect the progression of deterioration of the discharge tube and signs of performance degradation.

[0044] Here, diagnosing the degree of deterioration of the discharge tube 10 means that the worker recognizes the distribution of the degree of loss of the metal film 10d in the discharge portion 10e from the two-dimensional mapping data displayed in gradation by the diagnosing unit 43, and evaluates the progress of the deterioration and the degree of performance degradation of the discharge tube 10. Diagnosis also includes the worker predicting the life of the discharge tube 10 due to deterioration of the discharge tube 10, i.e., the remaining useful life until the discharge tube 10 can fully demonstrate its ozone generating performance.

[0045] (Flow of discharge tube diagnosis process) Next, the flow of the diagnostic process for the discharge tube 10 will be described in detail. First, the premise of the diagnostic process for the discharge tube 10 will be described. The worker removes the discharge tube 10 to be diagnosed from the ozone generator. Next, the worker checks whether there is any dirt or attachment on the inner and outer surfaces of the discharge tube 10. If there is any dirt or attachment on the discharge tube 10, the worker wipes it off. Next, the worker sets the discharge tube 10 in the discharge tube diagnostic device 1.

[0046] Next, an operator calibrates the discharge tube diagnostic device 1. Specifically, since the light transmittance varies depending on the amount of light emitted by the light-emitting unit 11, the relationship between the amount of light emitted by the light-emitting unit 11 and the amount of light received by the photodetector 12A is measured under a certain environment, and calibration is performed so that the relationship between these becomes a predetermined relationship.

[0047] Next, when the operator sets the discharge tube 10 in the discharge tube diagnosis device 1, he or she determines a reference point for the discharge tube 10. This is to ensure that the next time the light transmittance is measured (re-measured), the measurement can be performed under the same conditions as the current measurement of the light transmittance.

[0048] Then, the worker operates the discharge tube diagnosis device 1 to measure the light transmittance of the discharge portion 10e of the discharge tube 10. Specifically, when the worker has finished measuring the light transmittance at the position where the movable body 132 is disposed, he moves the movable body 132 in the X-axis direction by an amount corresponding to the length (width) of the light receiving element of the photodetector 12A in the X-axis direction, and again operates the discharge tube diagnosis device 1 to measure the light transmittance. The worker repeats the above-described procedure to measure the light transmittance for half the circumference of the cylindrical portion 10a of the discharge portion 10e.

[0049] Next, the worker rotates the discharge tube 10 circumferentially by 180 degrees around the central axis Ax of the discharge tube 10. Then, in the same manner as described above, the light transmittance is measured for the remaining half of the circumference of the cylindrical portion 10a of the discharge unit 10e. In this way, the photodetector 12A detects the light irradiated from the light-emitting unit 11 over the entire circumference of the cylindrical portion 10a of the discharge unit 10e.

[0050] Next, the generation unit 42 calculates the light transmittance based on the amount of received light acquired by the acquisition unit 41. Fig. 7 is a diagram showing the light transmittance of the discharge unit 10e in the discharge tube 10 of the first embodiment. First, the generation unit 42 converts the amount of received light acquired by the acquisition unit 41 into a light transmittance using the above formula 1. Then, each converted value is recorded in a table as shown in Fig. 7.

[0051] The distance in Fig. 7 indicates the movement distance of the support part 13 from the reference position, and PD-1 to PD-6 indicate the photodetectors 12A-1, 12A-2, 12A-3, 12A-4, 12A-5, and 12A-6. Fig. 7 shows the amount of light received by the photodetectors 12A-1 to 12A-6 at each movement distance of the support part 13, converted into light transmittance (%) and recorded. This allows the worker to recognize the position where deterioration of the discharge tube 10 has occurred.

[0052] Next, the generation unit 42 generates two-dimensional mapping data in which the light transmittance is mapped. FIG. 8 is a diagram for explaining two-dimensional mapping in the discharge tube diagnosis process of the first embodiment. As shown in FIG. 8, two-dimensional mapping is a process of mapping (showing) the light transmittance on a two-dimensional plane obtained by expanding the cylindrical portion 10a of the discharge unit 10e into a planar shape. This process generates two-dimensional mapping data D1 shown in FIG. 9. The two-dimensional mapping data D1 is an example of first two-dimensional mapping data.

[0053] FIG. 9 is a diagram showing an example of two-dimensional mapping data D1 in the discharge tube diagnostic processing of the first embodiment. (a) of FIG. 9 shows the movement distance of the support portion 13 from the reference position, i.e., the X-coordinate position. (b) of FIG. 9 shows the light transmittance of one half of the region in the circumferential direction of the cylindrical portion 10a of the discharge portion 10e. (c) of FIG. 9 shows the light transmittance of the other half of the region in the circumferential direction of the discharge portion 10e. The two-dimensional mapping data D1 of FIG. 9 includes a plurality of regions Da arranged in a matrix. The two-dimensional mapping data D1 is data representing the light transmittance of each measurement point (region Da) in the discharge portion 10e. Furthermore, the region Da displays the numerical value of the light transmittance.

[0054] Fig. 10 is an enlarged view of a portion of the two-dimensional mapping data D1 in Fig. 9. The diagnosis unit 43 processes the two-dimensional mapping data D1 shown in Fig. 10 so that one or more colors are displayed in gradations according to the transmittance of each of the multiple regions.

[0055] Fig. 11 is a diagram showing an example of a case where two-dimensional mapping data is displayed in gradation in the discharge tube diagnosis process of the first embodiment. More specifically, Fig. 11 shows two-dimensional mapping data D2 which is an example of a gradation display in which the area shown in Fig. 10 is displayed in white as the transmittance increases and in black as the transmittance decreases. Here, a transmittance of 40% or more is displayed in white, 0% is displayed in black, and a gradation display is performed in the range from 0 to 40%.

[0056] Fig. 12 is a diagram showing an example of two-dimensional mapping data in which gradation display is performed in the discharge tube diagnostic processing of the first embodiment. More specifically, Fig. 12 is two-dimensional mapping data D2 in which the gradation display shown in Fig. 11 is displayed for the entire area of ​​the discharge tube 10. This two-dimensional mapping data D2 is presented to the operator by the display unit 22.

[0057] By visually checking the two-dimensional mapping data D2, the worker can recognize areas with high transmittance (white areas) and areas with low transmittance (black areas). Furthermore, the worker can visually check the color density of areas displayed in gradations other than white and black to recognize the approximate magnitude of the transmittance. This allows the worker to easily grasp the distribution of the magnitude of the transmittance of each area Da in the discharge unit 10e.

[0058] In the above-described embodiment, the discharge tube diagnostic device 1 includes a light-emitting unit 11, a light-receiving unit 12, a generating unit 42, a diagnostic unit 43, and a display unit 22. The light-emitting unit 11 is located either inside or outside a cylindrical discharge unit 10e having a dielectric 10c and a metal film 10d overlaid on the dielectric 10c, and irradiates the discharge unit 10e with light. The light-receiving unit 12 is located either inside or outside the discharge unit 10e and receives light irradiated from the light-emitting unit 11 and transmitted through the discharge unit 10e. The generating unit 42 calculates the light transmittance based on the amount of light received by the light-receiving unit 12 for each of a plurality of regions that define a target range for diagnosing the degree of deterioration of the discharge unit 10e, and generates two-dimensional mapping data D1 in which the transmittance of each of the plurality of regions arranged on a two-dimensional plane on which the discharge unit 10e is laid out is mapped. The diagnostic unit 43 processes the two-dimensional mapping data D1 so that one or more colors are displayed in gradations according to the transmittance of each of the plurality of regions Da. The display unit 22 displays the two-dimensional mapping data D2 processed by the diagnosis unit 43.

[0059] With the above-described configuration, the worker visually checks the two-dimensional mapping data D2, in which the color gradation is displayed according to the transmittance, thereby enabling the worker to easily grasp the distribution of the magnitude of the transmittance of the discharge section 10e by grasping the color gradation of each region, and thus to predict the progress of deterioration of the discharge tube 10.

[0060] In the conventional method of extracting only the portions above a threshold, if the threshold is set too high, it is not possible to detect portions where the discharge tube is deteriorating but only to a small extent. Conversely, if the threshold is set too low, it will detect both areas where there are signs of discharge tube deterioration and areas where the ozone generation capacity has already decreased, without distinguishing between them.

[0061] Generally, it is rare for the discharge tube in an ozone generator to deteriorate uniformly throughout, and in most cases deterioration progresses more significantly in certain areas. When observing the degree of deterioration of a discharge tube, it is desirable to predict not only the deterioration of the ozone generation capacity at the time of observation, but also the possibility of a decrease in the ozone generation capacity during subsequent operation.

[0062] In this embodiment, the diagnostic unit 43 displays the two-dimensional mapping data D1 in gradation according to the transmittance in each region Da. This makes it possible for the operator to easily confirm which region of the entire region of the metal film 10d of the discharge tube 10 has deteriorated, to what extent, and to what extent, even when there is a mixture of regions where the degree of deterioration is relatively small and no impact is being shown on the ozone generation capacity, and regions where the ozone generation capacity has decreased.

[0063] (Second embodiment) Next, a discharge tube diagnosis device 1A according to a second embodiment will be described with reference to Fig. 13. The discharge tube diagnosis device 1A according to the second embodiment is obtained by partially modifying the functions of the generation unit 42 and diagnosis unit 43 according to the first embodiment described with reference to Figs. 9 to 17, and a description of the same configuration as in the first embodiment will be omitted.

[0064] Fig. 13 is a diagram showing an example of two-dimensional mapping data D3 in which a gradation display is performed based on the change in transmittance over time in the discharge tube diagnostic processing of Embodiment 2. More specifically, Fig. 13 shows two-dimensional mapping data D3 in which the amount of transmission is acquired after operation has continued for a certain period of time in the same regions Da as those in the two-dimensional mapping data D1 of Fig. 9, and the difference in the amount of transmission from the two-dimensional mapping data D1 is mapped and a gradation display is performed based on the magnitude of the difference.

[0065] In the second embodiment, the generator 42 calculates the transmittance differences, which are values ​​that indicate changes in transmittance over time, in multiple regions Da, and generates two-dimensional mapping data D3 in which the values ​​are mapped onto a two-dimensional plane. The two-dimensional mapping data D3 is an example of second two-dimensional mapping data. In FIG. 13, the numerical values ​​of the differences in each region Da are represented by "...".

[0066] In addition, the diagnosis unit 43 processes the two-dimensional mapping data D3 generated by the generation unit 42 so that one or more colors are displayed in gradation according to a value (difference in transmittance) that indicates the change in transmittance over time mapped to each of the multiple areas Da.

[0067] In this way, by calculating the difference in transmittance over time in each region Da, the discharge tube diagnosis device 1 can extract regions where the increase in transmittance is significant. Furthermore, by displaying the extracted regions in gradation, the operator can easily grasp the distribution of regions where the increase in transmittance over time is significant. As will be described later, it is expected that the discharge tube 10 will reach the end of its life due to the progression of deterioration in a specific region. Therefore, it is significant to extract regions where new deterioration is occurring or where deterioration is progressing rapidly.

[0068] The value obtained by the generation unit 42 as an index of the change in transmittance over time does not have to be a difference in transmittance, and may be, for example, a ratio that indicates the change in transmittance over time. Even in this case, the discharge tube diagnosis device 1 can extract areas where the increase in transmittance is significant. Furthermore, the operator can easily grasp the distribution of areas where the increase in transmittance over time is significant.

[0069] In the above-described embodiment, the generator 42 obtains values ​​that use as indexes changes in transmittance over time in the multiple regions Da, and generates two-dimensional mapping data D3 in which the values ​​are mapped onto a two-dimensional plane. The diagnostic unit 43 processes the two-dimensional mapping data D3 generated by the generator 42 so that one or more colors are displayed in gradations according to the values ​​mapped to each of the multiple regions Da.

[0070] In the above configuration, the worker visually checks the two-dimensional mapping data D3, in which the color is displayed in gradation according to the value that indicates the change in transmittance over time. By understanding the color gradation of each area, the worker can easily grasp the distribution of areas where the increase in transmittance over time is significant, and can therefore predict the progress of deterioration of the discharge tube 10.

[0071] (Third embodiment) Next, a discharge tube diagnostic device 1B according to a third embodiment will be described with reference to Fig. 14. The discharge tube diagnostic device 1B according to the third embodiment is obtained by modifying part of the functions of the diagnostic unit 43 according to the first embodiment described with reference to Figs. 9 to 12, and a description of the same configuration as that of the first embodiment will be omitted.

[0072] 14 is a diagram showing an example of two-dimensional mapping data D4 in which regions with high transmittance are extracted and displayed in gradation in the discharge tube diagnostic process of the third embodiment. In the third embodiment, the diagnostic unit 43 calculates the area ratio of regions in which the transmittance exceeds an arbitrary threshold for a specific region among the multiple regions Da. More specifically, in the third embodiment, the generation unit 42 obtains a value (e.g., a difference in transmittance) that indexes the change in transmittance over time in the multiple regions Da. Furthermore, the diagnostic unit 43 calculates the area ratio of regions in which the transmittance exceeds an arbitrary threshold for regions among the multiple regions Da where the above-mentioned value is greater than a predetermined value. The diagnostic unit 43 then diagnoses the degree of deterioration of the discharge tube 10 based on the above-mentioned area ratio.

[0073] In the third embodiment, the generating unit 42 does not generate two-dimensional mapping data. In the third embodiment, diagnosing the degree of deterioration of the discharge tube 10 means that the diagnosing unit 43 in the discharge tube diagnostic device 1 determines the degree of loss of the metal film 10d in the discharge tube 10 from the above-mentioned area ratio, thereby evaluating the progress of deterioration of the discharge tube 10 and the degree of performance degradation of the ozone generation capacity.

[0074] The specific region described above, i.e., the region where the value (difference in transmittance) indicating the change in transmittance over time is greater than a predetermined value and where the transmittance exceeds an arbitrary threshold, corresponds to region D4a surrounded by a dotted line in Fig. 14. Region D4a is a rectangular region extracted so as to include regions with a transmittance of 40% or more.

[0075] (Controller processing) The flow of processing by the control device 20 in the third embodiment will be described below with reference to Fig. 15. Fig. 15 is a flowchart showing the flow of processing by the control device 20. First, in step S101, the light-emitting unit 11 irradiates light toward the outside of the discharge unit 10e. Then, in step S102, the light-receiving unit 12 located outside the discharge unit 10e receives the light irradiated from the light-emitting unit 11 and transmitted through the discharge unit 10e. As a result, the acquisition unit 41 obtains the detection result of the photodetector 12A, i.e., the amount of light received in each region Da.

[0076] Next, in step S103, the generation unit 42 calculates the light transmittance based on the amount of light received by the light receiving unit for each of the multiple regions Da. Then, in step S104, the diagnosis unit 43 calculates the area ratio of a specific region among the multiple regions Da, i.e., a region where a value (difference in transmittance) indicating a change in transmittance over time is greater than a predetermined value, where the area ratio is greater than an arbitrary threshold, and diagnoses the degree of deterioration of the discharge tube 10 based on the area ratio. This completes the processing by the control device 20.

[0077] If the ratio of the area with high transmittance is large in a certain range of region Da, there is a risk that the discharge tube 10 will generate abnormal discharge and reach the end of its life early. The diagnostic unit 43 can determine the area where the deterioration of the discharge tube 10 progresses quickly by obtaining a value (difference in transmittance) that indicates the change in transmittance over time in each region Da of the discharge unit 10e. Furthermore, the diagnostic unit 43 can predict the occurrence of abnormal discharge in the area where the change in transmittance is large, i.e., the area where the deterioration of the discharge tube 10 progresses quickly, by calculating the area ratio of the area where the transmittance exceeds an arbitrary threshold value for the regions among the multiple regions Da where the above-mentioned value is larger than a predetermined value.

[0078] In the above-described embodiment, the discharge tube diagnostic device 1 includes a light-emitting unit 11, a light-receiving unit 12, a generating unit 42, and a diagnosing unit 43. The light-emitting unit 11 is located either inside or outside a cylindrical discharge unit 10e having a dielectric 10c and a metal film 10d overlaid on the dielectric 10c, and irradiates the discharge unit 10e with light. The light-receiving unit 12 is located either inside or outside the discharge unit 10e and receives light irradiated from the light-emitting unit 11 and transmitted through the discharge unit 10e. The generating unit 42 calculates the light transmittance based on the amount of light received by the light-receiving unit 12 for each of a plurality of regions Da, which define a target range for diagnosing the degree of deterioration of the discharge unit 10e. The diagnosing unit 43 calculates the area ratio of a specific region among the plurality of regions Da where the transmittance exceeds an arbitrary threshold, and diagnoses the degree of deterioration of the discharge unit 10e based on the area ratio.

[0079] In the above-described configuration, the diagnostic unit 43 calculates the area ratio of the area where the transmittance exceeds an arbitrary threshold value in the specific area Da, and thus the diagnostic unit 43 can predict that the discharge tube 10 will generate an abnormal discharge when the area ratio of the area where the transmittance is high in the specific range of the area Da is large. Consequently, the operator can more accurately predict the life of the discharge tube 10 from the prediction of the occurrence of abnormal discharge by the diagnostic unit 43.

[0080] In the above embodiment, the generator 42 obtains a value that indicates a change in transmittance over time in the multiple regions Da. The diagnostic unit 43 calculates the area ratio of the region D4a in which the transmittance exceeds a predetermined threshold value among the multiple regions Da, and diagnoses the degree of deterioration of the discharge unit 10e based on the area ratio.

[0081] In the above-described configuration, the diagnostic unit 43 calculates the area ratio of the region D4a where the change in transmittance over time is greater than a predetermined value, in which the transmittance exceeds an arbitrary threshold value. This allows the diagnostic unit 43 to more accurately predict the progress of deterioration of the discharge tube 10 when the area ratio of the region D4a where the change in transmittance over time is greater than a predetermined value, in which the transmittance exceeds an arbitrary threshold value, is large. Consequently, the operator can more accurately predict the lifespan of the discharge tube 10 from the prediction of the progress of deterioration of the discharge tube 10 by the diagnostic unit 43.

[0082] Furthermore, in the above-described embodiment, the discharge tube diagnosis method includes the steps of: a light-emitting unit 11 irradiating light onto one of the inside and outside of a cylindrical discharge unit 10e having a dielectric 10c and a metal film 10d superimposed on the dielectric 10c; a light-receiving unit 12 located on the other of the inside and outside of the discharge unit 10e receiving the light irradiated from the light-emitting unit 11 and transmitted through the discharge unit 10e; a generation unit 42 calculating the light transmittance based on the amount of light received by the light-receiving unit 12 for each of a plurality of regions Da defined by dividing the target range for diagnosing the degree of deterioration of the discharge unit 10e; and a diagnosis unit 43 calculating the area ratio of regions where the transmittance exceeds an arbitrary threshold for a specific region among the plurality of regions Da, and diagnosing the degree of deterioration of the discharge unit 10e based on the area ratio.

[0083] In the above-described configuration, if the ratio of the area with high transmittance in a certain specific range of region Da is large, the discharge unit 10e may generate abnormal discharge and reach the end of its life early. By having the diagnostic unit 43 calculate the area ratio of the area with transmittance exceeding an arbitrary threshold in the specific range of region Da, the diagnostic unit 43 can predict that the discharge tube 10 will generate abnormal discharge if the area ratio of the area with high transmittance in the specific range of region Da is large. Consequently, the operator can more accurately predict the life of the discharge tube 10 from the diagnostic unit 43's prediction of the occurrence of abnormal discharge.

[0084] In general, abnormal discharge phenomena in discharge tubes may be caused by the progression of local deterioration of the discharge tube. In this case, even if the overall area ratio of high transmittance portions is small, if the area ratio of high transmittance portions in a specific range of the discharge tube is large, abnormal discharge will occur.

[0085] For this reason, for example, when the diagnostic unit 43 diagnoses deterioration of the entire discharge tube 10, the evaluation will include areas other than the extracted high transmittance portion described above, and the data will be averaged.

[0086] Fig. 16 is a diagram showing the relationship between the elapsed time of discharge and the transmittance threshold exceeding area ratio. As shown in Fig. 16, when the diagnostic unit 43 determines an abnormality in the discharge tube 10 from the area ratio of the area exceeding the set threshold, or when diagnosing the degree of deterioration of the discharge tube 10 by gradation display, by diagnosing the high transmittance parts and their surrounding areas in each area Da of the cylindrical part 10a of the discharge tube 10, the diagnostic unit 43 can more clearly grasp the performance degradation caused by the generation of abnormal discharge in the discharge tube 10 and its signs than when the diagnostic unit 43 diagnoses the deterioration of the entire cylindrical part 10a of the discharge tube 10.

[0087] (Variation 1) Next, a first modification of the first embodiment will be described. FIG. 17 is a diagram showing an example of two-dimensional mapping data D5a and D5b in which another gradation display is performed in the discharge tube diagnosis processing of the first embodiment. More specifically, FIG. 17 shows two-dimensional mapping data D5a and D5b in which the maximum transmittance is changed when setting the gradation display for the transmittance data of FIG. 9. In FIG. 17, (A) shows the two-dimensional mapping data D5a, and (B) shows the two-dimensional mapping data D5b. FIG. 18 is a diagram showing an example of the functional configuration of a control device 20A in a discharge tube diagnosis device 1 in a first modification of the first embodiment. As shown in FIG. 18, in the first modification, the discharge tube diagnosis device 1 includes a transmittance range setting unit 45. The transmittance range setting unit 45 sets the range of transmittance for gradation display to an arbitrary range. In the two-dimensional mapping data D5a generated by the function of the transmittance range setting unit 45, areas Da with transmittance of 60% or more are displayed in white, areas Da with transmittance of 0% are displayed in black, and gradations are displayed in the range of 0 to 60%. In addition, in the two-dimensional mapping data D5b, areas Da with transmittance of 20% or more are displayed in white, areas Da with transmittance of 0% are displayed in black, and gradations are displayed in the range of 0 to 20%.

[0088] By setting the maximum value of the setting range of the gradation display low, the diagnostic unit 43 can extract an area where there is no effect on the ozone generation capacity but where deterioration of the discharge tube 10 is progressing. On the other hand, by setting the maximum value high, the diagnostic unit 43 can evaluate the deterioration of the ozone generation capacity of the ozone generator at the time of diagnosis.

[0089] In the above-described embodiment, the discharge tube diagnosis device 1 further includes a transmittance range setting unit 45 that sets the range of transmittance for performing gradation display to an arbitrary range.

[0090] In the above-described configuration, the operator can easily visually grasp the area in the discharge unit 10e where the ozone generation capacity is decreasing by setting the upper limit of the transmittance range displayed by gradation via the transmittance range setting unit 45 to the lower limit of the transmittance at which the ozone generation capacity is decreasing, by visually inspecting the two-dimensional mapping data D2. Furthermore, the operator can easily visually grasp the area in the metal film 10d where the deterioration is progressing by setting the lower limit of the transmittance range displayed by gradation via the transmittance range setting unit 45 to the transmittance at which the deterioration of the metal film 10d begins to progress, by visually inspecting the two-dimensional mapping data D2. Consequently, the operator can grasp the progress of the deterioration of the discharge tube 10 at the time of diagnosing the discharge tube 10.

[0091] (Variation 2) Fig. 19 is a diagram showing an example of two-dimensional mapping data in which another gradation display is performed in the discharge tube diagnostic processing of the first embodiment. More specifically, Fig. 19 is two-dimensional mapping data D6 in which the maximum and minimum transmittances are changed when setting the gradation display for the transmittance data of Fig. 9. In the two-dimensional mapping data D6, areas Da with a transmittance of 40% or more are displayed in white, areas Da with a transmittance of 10% are displayed in black, and gradation display is performed between 10% and 40%.

[0092] According to the two-dimensional mapping data D6 in the second variant example, the operator can detect areas where deterioration of transmittance is greater than or equal to a first threshold value (maximum value of the gradation display), and can also detect areas where deterioration of ozone generation capacity is greater than or equal to a second threshold value (minimum value of the gradation display).

[0093] (Variation 3) FIG. 20 shows an example of two-dimensional mapping data D7 obtained by extracting and displaying grayscale regions where high-transmittance regions Da extend in the circumferential direction of the discharge tube 10 in the discharge tube diagnostic process of the third embodiment. In Modification 3, the diagnostic unit 43 extracts regions where regions with transmittance greater than a predetermined value are continuous in the circumferential direction of the discharge unit 10e over a predetermined area or more. The region where high-transmittance regions Da extend in the circumferential direction of the discharge tube 10 corresponds to region D7a surrounded by a dotted line. Region D7a is a region where regions Da with transmittance of 20% or more are continuous over at least half the entire circumference (180 degrees). If deterioration progresses further in this region, current flow is more likely to be interrupted and electrical conduction is more likely to be interrupted than in other regions. As such, if there are continuous defects in the circumferential direction of the discharge tube 10, power will not be supplied to the side opposite the electrode, leading to a significant decrease in ozone generation capacity.

[0094] The diagnostic unit 43 extracts the region D7a and diagnoses the degree of deterioration of the discharge tube 10, which enables the diagnostic unit 43 to more clearly grasp the deterioration of the performance of the discharge tube 10 and its signs. Consequently, the operator can more accurately predict the life of the discharge tube 10 from the prediction of the progress of deterioration of the discharge tube 10 by the diagnostic unit 43.

[0095] In the above-described embodiment, the specific region Da is a region D7a in which a region having a transmittance higher than a predetermined value continues in the circumferential direction of the discharge unit 10e for a predetermined area or more.

[0096] In the above-described configuration, if the light transmittance of the discharge unit 10e increases, i.e., if the number of defects in the metal film 10d increases, there is a risk that electrical conduction will be interrupted at those locations. If regions with high light transmittance exist continuously in the circumferential direction of the discharge unit 10e, areas where electricity does not conduct will extend in the circumferential direction of the discharge unit 10e. In this case, power will not be supplied to the side of the electrode opposite the circumferentially continuous defects in the metal film 10d, and there is a risk that the ozone generation ability of the discharge tube diagnosis device 1 will be significantly reduced.

[0097] The diagnostic unit 43 diagnoses the degree of deterioration of the discharge tube 10 based on the transmittance of the region D7a where the region Da, where the light transmittance is greater than a predetermined value, is continuous in the circumferential direction of the discharge unit 10e. This allows the diagnostic unit 43 to diagnose the degree of deterioration of the discharge tube 10 while taking into consideration the risk that power will not be supplied to the opposite side of the electrode due to a defect in the circumferentially continuous metal film 10d. Consequently, the operator can more accurately predict the lifespan of the discharge tube 10 from the diagnosis of the deterioration of the discharge tube 10 by the diagnostic unit 43.

[0098] (Variation 4) In addition, when diagnosing the deterioration of the discharge tube 10 in the third embodiment, the two-dimensional mapping data of the first embodiment can also be used in the following method. First, the generation unit 42 calculates the transmittance in a plurality of regions Da and generates two-dimensional mapping data D1 in which the calculated transmittances are mapped. Next, the diagnosis unit 43 processes the two-dimensional mapping data D1 so that one or more colors are displayed in gradations according to the values ​​of each of the plurality of regions Da. Furthermore, the diagnosis unit 43 calculates the area ratio of a specific region among the plurality of regions where the transmittance exceeds an arbitrary threshold. Then, the diagnosis unit 43 diagnoses the degree of deterioration of the discharge tube 10 based on the above-mentioned area ratio.

[0099] According to the above-described method, the worker can grasp the degree of deterioration of the discharge tube 10 at the time of diagnosis, and the diagnosis unit 43 of the discharge tube diagnosis device 1 can diagnose the degree of deterioration of the discharge tube 10 based on objective indicators.

[0100] (Variation 5) Furthermore, when diagnosing deterioration of the discharge tube 10 in the third embodiment, the two-dimensional mapping data of the first embodiment can be used to make the diagnosis in the following manner. First, the generation unit 42 obtains values ​​that indicate changes in transmittance over time in the multiple regions Da, and generates two-dimensional mapping data D1 in which the obtained values ​​are mapped. Next, the diagnosis unit 43 processes the two-dimensional mapping data D1 so that one or more colors are displayed in gradations according to the values ​​of each of the multiple regions Da. Furthermore, the diagnosis unit 43 calculates the area ratio of regions in which the transmittance exceeds an arbitrary threshold value for regions in which the above-mentioned value is greater than a predetermined value. Then, the diagnosis unit 43 diagnoses the degree of deterioration of the discharge tube 10 based on the above-mentioned area ratio.

[0101] According to the above-described method, the worker can grasp the progress of the deterioration of the discharge tube 10, and the diagnosis unit 43 of the discharge tube diagnosis device 1 can diagnose the degree of deterioration of the discharge tube 10 based on objective indicators.

[0102] The program for executing the above-described processes executed by the control device 20 may be stored in an installable or executable file format on a computer-readable storage medium such as a CD-ROM, CD-R, memory card, DVD, or flexible disk (FD) and provided as a computer program product. Alternatively, the program for executing the above-described processes executed by the control device 20 may be stored on a computer connected to a network such as the Internet and provided by downloading via the network. Alternatively, the program for executing the above-described processes executed by the control device 20 may be provided or distributed via a network such as the Internet.

[0103] In addition, in the above-described embodiment, an example is shown in which the light-emitting unit 11 is located inside the discharge tube 10 and the light-receiving unit 12 is located outside the discharge tube 10, but this is not limiting. For example, the light-emitting unit 11 may be located outside the discharge tube 10 and the light-receiving unit 12 may be located inside the discharge tube 10. In addition, the number of cameras 12B is not limited to the example in the above-described embodiment.

[0104] Although several embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0105] 1, 1A, 1B Discharge tube diagnostic equipment 10c Dielectric 10d metal film 10e Discharge section 11 Light-emitting part 12 Light receiving part 22 Display section 42 Generation part 43 Diagnostic Department 45 Transmittance range setting section Da, D4a, D7a area D1, D2, D3, D4, D5a, D5b, D6, D7 2D mapping data

Claims

1. a light-emitting portion that is located either inside or outside a cylindrical discharge portion and that has a dielectric and a metal film overlaid on the dielectric, and that irradiates light onto the discharge portion; a light receiving section that is located on the other of the inside and outside of the discharge section and receives the light that is irradiated from the light emitting section and transmitted through the discharge section; a generating unit that calculates the light transmittance based on the amount of light received by the light receiving unit for each of a plurality of regions that are partitioned into a target range in which the degree of deterioration of the discharge unit is diagnosed, and generates first two-dimensional mapping data in which the transmittance in each of the plurality of regions arranged on a two-dimensional plane on which the discharge unit is developed is mapped; a diagnostic unit that processes the first two-dimensional mapping data so that one or more colors are displayed in gradations according to the transmittance of each of the plurality of regions; a display unit that displays the first two-dimensional mapping data processed by the diagnosis unit; A discharge tube diagnostic device comprising:

2. a transmittance range setting unit that sets the transmittance range for performing the gradation display to an arbitrary range, The discharge tube diagnostic device according to claim 1 .

3. the generating unit obtains values ​​using as indexes changes in the transmittance over time in the plurality of regions, and generates second two-dimensional mapping data in which the values ​​are mapped onto a two-dimensional plane; the diagnosis unit processes the second two-dimensional mapping data generated by the generation unit so that one or more colors are displayed in gradations according to the values ​​mapped to each of the plurality of regions in the second two-dimensional mapping data; The discharge tube diagnostic device according to claim 2.

4. a light-emitting portion that is located either inside or outside a cylindrical discharge portion and that has a dielectric and a metal film overlaid on the dielectric, and that irradiates light onto the discharge portion; a light receiving section that is located on the other of the inside and outside of the discharge section and receives the light that is irradiated from the light emitting section and transmitted through the discharge section; a generation unit that calculates the light transmittance based on the amount of light received by the light receiving unit for each of a plurality of regions that are partitioned into a target range in which the degree of deterioration of the discharge unit is diagnosed; a diagnosis unit that calculates an area ratio of a specific region among the plurality of regions in which the transmittance exceeds an arbitrary threshold value, and diagnoses a degree of deterioration of the discharge unit based on the area ratio; A discharge tube diagnostic device comprising:

5. the generating unit calculates a value using a change in the transmittance over time as an index in the plurality of regions; the diagnostic unit calculates an area ratio of the region where the transmittance exceeds an arbitrary threshold value for the region where the value is greater than a predetermined value among the plurality of regions, and diagnoses a degree of deterioration of the discharge unit based on the area ratio.

5. The discharge tube diagnostic device according to claim 4.

6. The specific region is a region in which the region having the transmittance higher than a predetermined value continues over a predetermined area or more in the circumferential direction of the discharge section.

5. The discharge tube diagnostic device according to claim 4.

7. a step in which the light-emitting unit irradiates light onto one of the inside and outside of a cylindrically formed discharge unit having a dielectric and a metal film overlaid on the dielectric; a step in which a light receiving section located on the other of the inside and outside of the discharge section receives the light irradiated from the light emitting section and transmitted through the discharge section; a step in which a generation unit calculates the light transmittance based on the amount of light received by the light receiving unit for each of a plurality of regions into which a target range in which the degree of deterioration of the discharge unit is diagnosed is divided; a step in which a diagnostic unit calculates an area ratio of a specific region among the plurality of regions in which the transmittance exceeds an arbitrary threshold, and diagnoses a degree of deterioration of the discharge unit based on the area ratio; A discharge tube diagnostic method comprising:

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