Electrolyzed water generator

Abstract

To improve assembling easiness, to reduce a manufacturing cost and to reduce power consumption.SOLUTION: A first electrolytic bath 10 having a first chamber 11 and a second chamber 12 partitioned via an anion exchange membrane 13, wherein an anodic 11p is disposed in the first chamber 11 and a cathodic 12m is disposed in the second chamber 12, and a third chamber 21 and a fourth chamber 22 partitioned via a cation exchange membrane 23, wherein an anodic 21p is disposed in the third chamber 21, A second electrolytic bath 20 in which a cathode 22m is disposed in the fourth chamber 22, an electrolytic water supplying section that supplies an electrolytic solution Wx to the second chamber 12 and supplies the electrolytic solution Wa1 from the second chamber 12 to the third chamber 21, a pure water supplying section that supplies ultrapure water W0 to the first chamber 11 and the fourth chamber 22, and a DC power source 50 that applies a DC voltage between the anodes 11p and 21p and the cathodes 12m and 22m, An acidic electrolytic solution W1 can be generated in the first chamber 11, and an alkaline electrolytic solution W2 can be generated in the fourth chamber 22.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an electrolyzed water generating device configured to generate acidic electrolyzed water and alkaline electrolyzed water by electrolyzing electrolyzed water to be treated. [Background technology]

[0002] A device is widely known that is equipped with a two-compartment electrolytic cell divided into an anode cell and a cathode cell by a diaphragm and is capable of producing acidic electrolyzed water and alkaline electrolyzed water by electrolysis. In the device equipped with this two-compartment electrolytic cell, for example, acidic electrolyzed water is produced in the anode cell and alkaline electrolyzed water is produced in the cathode cell by electrolyzing a potassium chloride aqueous solution. However, in the electrolysis of a potassium chloride aqueous solution using the two-compartment electrolytic cell, a trace amount of "K+" remains in the acidic electrolyzed water produced in the anode cell, and a trace amount of "Cl-" remains in the alkaline electrolyzed water produced in the anode cell. Therefore, although the two-compartment electrolytic cell has a simple structure and is inexpensive to manufacture, it has a problem that it is difficult to produce high-purity acidic electrolyzed water or alkaline electrolyzed water.

[0003] Meanwhile, the following patent document discloses an electrolyzed water production device (hereinafter simply referred to as "production device") that has a three-compartment electrolytic cell partitioned into an electrolyte cell, an anode cell, and a cathode cell by a pair of ion exchange membranes (an anion exchange membrane and a cation exchange membrane), and can produce acidic electrolyzed water and alkaline electrolyzed water by electrolysis using the anode in the anode cell and the cathode in the cathode cell. In this production device, electrolyzed water to be treated (such as a potassium chloride aqueous solution: hereinafter also referred to as "electrolyzed water to be treated") is supplied to the electrolyte cell, and treated water (such as tap water passed through a water softener) is supplied to the anode cell and the cathode cell, respectively, and electrolysis is performed, whereby anions move from the electrolyte cell to the anode cell to produce acidic electrolyzed water in the anode cell, and cations move from the electrolyte cell to the cathode cell to produce alkaline electrolyzed water in the cathode cell. As a result, this production device can produce high-purity acidic electrolyzed water and alkaline electrolyzed water. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2002-307060 A (pages 2-3, Figures 1-2) Summary of the Invention [Problem to be solved by the invention]

[0005] However, the manufacturing apparatus disclosed in the above-mentioned patent document has the following problems to be solved.

[0006] Specifically, the manufacturing apparatus disclosed in the above-mentioned patent document is configured with a three-compartment electrolytic cell in which an anode cell and a cathode cell are provided on either side of an electrolyte cell partitioned by a pair of ion exchange membranes. In this case, the three-compartment electrolytic cell requires the joining and integration of at least five components: a component constituting the anode cell, a component constituting the electrolyte cell, a component constituting the cathode cell, an anion exchange membrane, and a cation exchange membrane, making the assembly process complicated. Furthermore, to prevent leakage of electrolyzed water or the like from the joints of each component, sealing members such as packings or O-rings must be inserted at the joints of each component, further complicating the assembly process, including the positioning of the numerous components. Therefore, this aspect needs to be improved.

[0007] Furthermore, in a three-compartment electrolytic cell, the distance between the anode and the cathode is longer due to the presence of an electrolyte cell between the anode in the anode cell and the cathode in the cathode cell, resulting in a higher resistance between the anode and the cathode compared to a typical two-compartment electrolytic cell. Therefore, during electrolysis using a three-compartment electrolytic cell, it is more difficult for current to flow between the two electrodes than during electrolysis using a two-compartment electrolytic cell, making it necessary to pass a large current to ensure optimal electrolysis. This requires an expensive power cable capable of conducting a large current to supply current between the two electrodes, making it difficult to reduce manufacturing costs. Furthermore, conducting a large current during electrolysis also makes it difficult to reduce power consumption. Therefore, these points also need to be improved.

[0008] The present invention has been made in consideration of these problems to be solved, and its main object is to provide an electrolyzed water generator that can produce high-purity acidic electrolyzed water and alkaline electrolyzed water, while improving ease of assembly, reducing manufacturing costs, and reducing power consumption. [Means for solving the problem]

[0009] In order to achieve the above object, the electrolyzed water generating apparatus according to claim 1 is an electrolyzed water generating apparatus configured to be able to generate acidic electrolyzed water and alkaline electrolyzed water by electrolyzing electrolyzed water to be treated, and comprises a first electrolytic cell having a first chamber and a second chamber separated by an anion exchange membrane, in which a first anode electrode is disposed in the first chamber and a first cathode electrode is disposed in the second chamber; a second electrolytic cell having a third chamber and a fourth chamber separated by a cation exchange membrane, in which a second anode electrode is disposed in the third chamber and a second cathode electrode is disposed in the fourth chamber; The electrolytic water supply unit supplies the electrolyzed water to the second chamber and supplies the electrolyzed water passed through the second chamber to the third chamber, a pure water supply unit supplies pure water to the first chamber and the fourth chamber, and a power supply unit applies a DC voltage between the first and second anode electrodes and the first and second cathode electrodes, and is configured to produce acidic electrolyzed water in the first chamber by electrolysis in the first electrolytic cell and alkaline electrolyzed water in the fourth chamber by electrolysis in the second electrolytic cell.

[0010] The electrolyzed water generating device according to claim 2 is an electrolyzed water generating device configured to be able to generate acidic electrolyzed water and alkaline electrolyzed water by electrolyzing electrolyzed water to be treated, and includes a first electrolytic cell having a first chamber and a second chamber separated by an anion exchange membrane, in which a first anode electrode is disposed in the first chamber and a first cathode electrode is disposed in the second chamber; a second electrolytic cell having a third chamber and a fourth chamber separated by a cation exchange membrane, in which a second anode electrode is disposed in the third chamber and a second cathode electrode is disposed in the fourth chamber; The electrolytic water supply unit supplies the electrolyzed water to be treated and supplies the electrolyzed water passed through the third chamber to the second chamber, a pure water supply unit supplies pure water to the first chamber and the fourth chamber, and a power supply unit applies a DC voltage between the first and second anode electrodes and the first and second cathode electrodes, and is configured to produce acidic electrolyzed water in the first chamber by electrolysis in the first electrolytic cell and alkaline electrolyzed water in the fourth chamber by electrolysis in the second electrolytic cell.

[0011] The electrolyzed water generating device according to claim 3 is an electrolyzed water generating device configured to be able to generate acidic electrolyzed water and alkaline electrolyzed water by electrolyzing electrolyzed water to be treated, and comprises a first electrolytic cell having a first chamber and a second chamber separated by an anion exchange membrane, in which a first anode electrode is disposed in the first chamber and a first cathode electrode is disposed in the second chamber, and a third chamber and a fourth chamber separated by a cation exchange membrane, in which a second anode electrode is disposed in the third chamber and a second cathode electrode is disposed in the fourth chamber. the first and second anode electrodes and the first and second cathode electrodes, and the second electrolytic cell is configured to produce acidic electrolyzed water in the first chamber by electrolysis in the first electrolytic cell, and alkaline electrolyzed water in the fourth chamber by electrolysis in the second electrolytic cell.

[0012] Furthermore, the electrolytic water generating apparatus of claim 4 is an electrolytic water generating apparatus of any one of claims 1 to 3, wherein the pure water supply unit is configured to be able to adjust at least one of the amount of pure water supplied to the first chamber and the amount of pure water supplied to the fourth chamber. [Effects of the Invention]

[0013] The electrolyzed water generator according to claim 1 comprises a first electrolytic cell having a first chamber and a second chamber separated by an anion exchange membrane, a second electrolytic cell having a third chamber and a fourth chamber separated by a cation exchange membrane, an electrolyzed water supply unit supplying electrolyzed water to be treated to the second chamber and supplying the electrolyzed water passed through the second chamber to the third chamber, a pure water supply unit supplying pure water to the first chamber and the fourth chamber, and a power supply unit applying a DC voltage between a first anode electrode in the first chamber and a second anode electrode in the third chamber and a first cathode electrode in the second chamber and a second cathode electrode in the fourth chamber, and is configured to produce acidic electrolyzed water in the first chamber by electrolysis in the first electrolytic cell and alkaline electrolyzed water in the fourth chamber by electrolysis in the second electrolytic cell.

[0014] In the electrolyzed water generating apparatus of claim 2, the electrolyzed water supply unit is configured to supply electrolyzed water to be treated to the third chamber and to supply the electrolyzed water to be treated that has passed through the third chamber to the second chamber. In the electrolyzed water generating apparatus of claim 3, the electrolyzed water supply unit is configured to supply electrolyzed water to be treated to the second and third chambers.

[0015] Therefore, according to the electrolyzed water generator of claims 1 to 3, the first electrolytic cell capable of performing the electrolysis process to produce acidic electrolyzed water and the second electrolytic cell capable of performing the electrolysis process to produce alkaline electrolyzed water are separately configured, so that the first electrolytic cell and the second electrolytic cell can be assembled separately. Since the first electrolytic cell and the second electrolytic cell have the same configuration as a typical two-compartment electrolytic cell, the positioning of each component is easy, and the assembly is easier than a three-compartment electrolytic cell. Therefore, the electrolyzed water generator can be easily manufactured and its manufacturing cost can be sufficiently reduced. Furthermore, since there are no liquid tanks corresponding to the electrolyte tanks in a three-compartment electrolytic cell between the first anode electrode and the first cathode electrode, and between the second anode electrode and the second cathode electrode, the first anode electrode and the first cathode electrode can be arranged sufficiently close to each other, and the second anode electrode and the second cathode electrode can be arranged sufficiently close to each other. Therefore, the electrolysis process in the first electrolytic cell and the electrolysis process in the second electrolytic cell can be performed effectively without passing a large current, which eliminates the need for expensive power cables, thereby further reducing the manufacturing cost of the electrolyzed water generator, and also reduces the power consumption during the production of acidic electrolyzed water or alkaline electrolyzed water, allowing high-purity acidic electrolyzed water or alkaline electrolyzed water to be produced inexpensively.

[0016] In the electrolyzed water generator of claim 4, the pure water supply unit is configured to be able to adjust at least one of the amount of pure water supplied to the first chamber and the amount of pure water supplied to the fourth chamber. Therefore, the electrolyzed water generator of claim 4 can arbitrarily adjust the pH of acidic electrolyzed water or alkaline electrolyzed water, and arbitrarily adjust the ratio of the amount of acidic electrolyzed water produced to the amount of alkaline electrolyzed water produced per unit time. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a diagram showing the configuration of an electrolyzed water generating device 1A. [Figure 2] FIG. 2 is a diagram showing the configuration of an electrolyzed water generating device 1B. [Figure 3] FIG. 2 is a diagram showing the configuration of an electrolyzed water generating device 1C. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, an embodiment of the "electrolyzed water generating device" will be described with reference to the accompanying drawings.

[0019] 1 is an example of an "electrolyzed water generator" and is configured to electrolyze electrolyzed water Wx, such as a potassium chloride aqueous solution or a sodium chloride aqueous solution, which is an example of "electrolyzed water to be treated," to produce electrolyzed water W1, which is an example of "acidic electrolyzed water," and electrolyzed water W2, which is an example of "alkaline electrolyzed water." Specifically, the electrolyzed water generator 1A is configured to include a first electrolytic bath 10, a second electrolytic bath 20, a pump 31, a water tank 32, a pump 41, a water tank 42, flow rate adjustment valves 43a and 43b, water tanks 44a and 44b, and a DC power supply 50.

[0020] The first electrolytic cell 10 is an example of a "first electrolytic cell" and has a first chamber 11 (an example of a "first chamber") and a second chamber 12 (an example of a "second chamber") separated by an anion exchange membrane 13 (an example of an "anion exchange membrane"), with an anode electrode 11p (an example of a "first anode electrode") disposed in the first chamber 11 and a cathode electrode 12m (an example of a "first cathode electrode") disposed in the second chamber 12. In this case, because the first electrolytic cell 10 has the same configuration as a typical two-compartment electrolytic cell, it is basically only necessary to join and integrate three components: the components constituting the first chamber 11, the components constituting the second chamber 12, and the anion exchange membrane 13. Even when sealing components (gaskets or O-rings) are interposed between the components constituting the first chamber 11 and the anion exchange membrane 13, or between the components constituting the second chamber 12 and the anion exchange membrane 13, to prevent exposure of the ultrapure water W0 or the electrolyzed water Wx, the first electrolytic cell 10 can be manufactured simply by incorporating two sealing components in addition to the above three components. Therefore, the first electrolytic cell 10 can be easily assembled with each component positioned accurately.

[0021] The second electrolytic cell 20 is an example of a "second electrolytic cell," and includes a third chamber 21 (an example of a "third chamber") and a fourth chamber 22 (an example of a "fourth chamber") separated by a cation exchange membrane 23 (an example of a "cation exchange membrane"), with an anode electrode 21p (an example of a "second anode electrode") disposed in the third chamber 21 and a cathode electrode 22m (an example of a "second cathode electrode") disposed in the fourth chamber 22. In this case, like the first electrolytic cell 10, the second electrolytic cell 20 also has a configuration similar to that of a typical two-compartment electrolytic cell, and therefore each component can be positioned accurately and easily assembled.

[0022] The pump 31 transfers the electrolyzed water Wx stored in the water tank 32 to the second chamber 12 of the first electrolytic cell 10. In this case, in the electrolyzed water generator 1A of this example, the electrolyzed water Wx transferred from the water tank 32 by the pump 31 is introduced into the second chamber 12 through the inlet 12i, passed through the second chamber 12, discharged from the outlet 12o as electrolyzed water Wa1, introduced into the third chamber 21 through the inlet 21i, passed through the third chamber 21, and then discharged from the outlet 21o as electrolyzed water Wa2, and transferred to the water tank 32, forming an electrolyzed water circulation path Ra. In the electrolyzed water generator 1A of this example, the pump 31, the water tank 32, and the piping constituting the electrolyzed water circulation path Ra work together to form an "electrolyzed water supply unit."

[0023] The pump 41 transfers ultrapure water W0 (an example of "pure water") stored in the water storage tank 42 to the first chamber 11 of the first electrolytic cell 10 and the fourth chamber 22 of the second electrolytic cell 20. In this case, the electrolyzed water generator 1A of this example is configured so that a portion of the ultrapure water W0 transferred by the pump 41 is introduced into the first chamber 11 from the inlet 11i, passed through the first chamber 11, converted into electrolyzed water W1 by an electrolysis process described below, and then discharged from the outlet 11o and transferred to the water storage tank 44a. The electrolyzed water generator 1A of this example is configured so that another portion of the ultrapure water W0 transferred by the pump 41 is introduced into the fourth chamber 22 from the inlet 22i, passed through the fourth chamber 22, converted into electrolyzed water W2 by an electrolysis process, and then discharged from the outlet 22o and transferred to the water storage tank 44b.

[0024] The flow rate adjustment valve 43a adjusts the flow rate of the ultrapure water WO that is delivered to the first chamber 11 by the pump 41, and the flow rate adjustment valve 43b adjusts the flow rate of the ultrapure water WO that is delivered to the fourth chamber 22 by the pump 41. In the electrolyzed water generating apparatus 1A of this example, the pump 41, the water tank 42, the piping from the water tank 42 to the first chamber 11, the flow rate adjustment valve 43a, the piping from the water tank 42 to the fourth chamber 22, and the flow rate adjustment valve 43b work together to form a "pure water supply unit."

[0025] The DC power supply 50 is an example of a "power supply unit," and as an example, by applying DC voltages of the same voltage value between the anode electrode 11p and the cathode electrode 12m and between the anode electrode 21p and the cathode electrode 22m, DC current is conducted between the anode electrodes 11p, 21p and the cathode electrodes 12m, 22m. Note that an actual electrolyzed water production apparatus 1A includes a control unit that controls the operation of the pumps 31, 41 and the flow rate adjustment valves 43a, 43b, and the application of DC voltage by the DC power supply 50; however, to facilitate understanding of the configuration of the electrolyzed water production apparatus 1A, illustrations and detailed description of this control unit are omitted.

[0026] When generating electrolyzed water W1, W2 using this electrolyzed water generator 1A, first, electrolyzed water Wx is stored in the water tank 32, and ultrapure water W0 is stored in the water tank 42. In this case, as an example, a potassium chloride aqueous solution is used as the electrolyzed water Wx. Next, the pump 31 starts to feed the electrolyzed water Wx, and the pump 41 starts to feed the ultrapure water W0, and at the same time, a DC voltage is applied between the anode electrodes 11p, 21p and the cathode electrodes 12m, 22m by the DC power supply 50, thereby conducting a DC current between the anode electrode 11p and the cathode electrode 12m and between the anode electrode 21p and the cathode electrode 22m.

[0027] At this time, electrolysis in the first electrolytic cell 10 causes "Cl- (chloride ions)" to migrate from the second chamber 12 to the first chamber 11 through the anion exchange membrane 13, and strongly acidic electrolyzed water W1 within a pH range of 1 to 3 (for example, about pH 2) is generated in the first chamber 11. This electrolyzed water W1 is discharged from the outlet 11o as described above and stored in the water tank 44a. Furthermore, electrolyzed water Wa1 (electrolyzed water containing K and a trace amount of KCl) in which "Cl" has been reduced as a result of the migration of "Cl-" to the first chamber 11 as described above is discharged from the outlet 12o and introduced into the third chamber 21 through the inlet 21i.

[0028] At this time, due to electrolysis in the second electrolytic cell 20, "K+ (potassium)" moves from the third chamber 21 to the fourth chamber 22 through the cation exchange membrane 23, and strongly alkaline electrolyzed water W2 having a pH in the range of about 11 to 14 (for example, about pH 13) is generated in the fourth chamber 22. This electrolyzed water W2 is discharged from the outlet 22o as described above and stored in the water tank 44b. Furthermore, electrolyzed water Wa2 (low-concentration potassium chloride aqueous solution) in which "K" has been reduced by the movement of "K+" to the fourth chamber 22 as described above is discharged from the outlet 22o and sent to the water tank 32.

[0029] In this case, in the electrolyzed water generator 1A of this example, since there is no water reservoir corresponding to the electrolyte cell in a three-compartment electrolytic cell between the anode electrode 11p and the cathode electrode 12m in the first electrolytic cell 10, the anode electrode 11p and the cathode electrode 12m can be arranged closer to each other than the distance between the anode and the cathode in a three-compartment electrolytic cell. Similarly, since there is no water reservoir corresponding to the electrolyte cell in a three-compartment electrolytic cell between the anode electrode 21p and the cathode electrode 22m in the second electrolytic cell 20, the anode electrode 21p and the cathode electrode 22m can be arranged closer to each other than the distance between the anode and the cathode in a three-compartment electrolytic cell.

[0030] Therefore, in the electrolyzed water generator 1A of this example, compared to the manufacturing apparatus disclosed in the aforementioned patent document, current flows more easily between the anode electrodes 11p, 21p and the cathode electrodes 12m, 22m during electrolysis, and there is no need to pass a large current to ensure proper electrolysis. This makes it possible to sufficiently reduce the amount of power consumed during electrolysis, and eliminates the need for expensive cables capable of conducting large currents, thereby enabling a significant reduction in manufacturing costs.

[0031] When generating the electrolyzed waters W1 and W2 as described above, the flow rate control valves 43a and 43b are basically adjusted to the same opening (for example, both fully open) so that the amount of ultrapure water W0 supplied from the water tank 42 to the first chamber 11 and the amount of ultrapure water W0 supplied from the water tank 42 to the fourth chamber 22 are equal. On the other hand, when it is desired to increase the pH value of the generated electrolyzed water W1 (when it is desired to decrease the acidity), the amount of electrolyzed water Wx supplied per unit time by the pump 31 is reduced, and the opening of the flow rate control valve 43b relative to the opening of the flow rate control valve 43a is reduced to reduce the amount of ultrapure water W0 supplied per unit time to the fourth chamber 22. Furthermore, when it is desired to lower the pH value of the generated electrolyzed water W2 (when it is desired to lower the alkalinity), the amount of electrolyzed water Wx supplied per unit time by the pump 31 is reduced, and the opening of the flow control valve 43a relative to the opening of the flow control valve 43b is reduced to reduce the amount of ultrapure water W0 supplied per unit time to the first chamber 11.

[0032] Furthermore, instead of adjusting the pH values ​​of the electrolyte solutions W1 and W2 as described above, the ratio between the amount of electrolyte solution W1 produced per unit time and the amount of electrolyte solution W2 produced per unit time can be adjusted arbitrarily. For example, when a larger amount of electrolyte solution W1 is required than electrolyte solution W2, the opening of flow rate control valve 43b is made smaller than the opening of flow rate control valve 43a, thereby reducing the amount of ultrapure water W0 supplied per unit time from the water storage tank 42 to the fourth chamber 22 to be less than the amount of ultrapure water W0 supplied per unit time from the water storage tank 42 to the first chamber 11. This increases the amount of electrolyte solution W1 produced per unit time more than the amount of electrolyte solution W2 produced. Furthermore, when a larger amount of electrolyte W2 is required than electrolyte W1, the opening of flow rate adjustment valve 43a is made smaller than the opening of flow rate adjustment valve 43b, thereby reducing the amount of ultrapure water W0 supplied per unit time from water tank 42 to first chamber 11 to be less than the amount of ultrapure water W0 supplied per unit time from water tank 42 to fourth chamber 22. As a result, the amount of electrolyte W2 produced per unit time is greater than the amount of electrolyte W1 produced.

[0033] Meanwhile, by continuing the electrolysis process as described above, the amount of electrolyzed water W1 stored in the water tank 44a gradually increases, and the amount of electrolyzed water W2 stored in the water tank 44b gradually increases. Furthermore, as described above, the amount of "Cl" decreases in the first electrolytic bath 10 (second chamber 12) and the amount of "K" decreases in the second electrolytic bath 20 (third chamber 21), and thus electrolyzed water Wa2 with a reduced "KCl" concentration is sent to the water tank 32, and the "KCl" concentration of the electrolyzed water Wx pumped from the water tank 32 by the pump 31 gradually decreases. Therefore, when the "KCl" concentration in the water tank 32 decreases to a predetermined lower limit (or when a predetermined time has elapsed since the start of production of the electrolyzed waters W1 and W2), "KCl" is added to the water tank 32 to increase the concentration of the electrolyzed water Wx. Furthermore, when the ultrapure water W0 in the water tank 42 drops to a predetermined lower limit, new ultrapure water W0 is poured into the water tank 42. This allows the production of electrolyzed water W1 and W2 to continue.

[0034] In addition, by performing the above-described series of processes, the electrolyzed water generating device 1A of this example can generate electrolyzed water W1 that does not contain "K+" and electrolyzed water W2 that does not contain "Cl-". Therefore, the generated electrolyzed water W1, W2 can be effectively used as "high-purity electrolyzed water" such as "cleaning water" used in the cleaning process for cleaning semiconductor substrates during the manufacture of semiconductor devices.

[0035] As described above, the electrolyzed water generating device 1A includes a first electrolytic cell 10 having a first chamber 11 and a second chamber 12 separated by an anion exchange membrane 13, a second electrolytic cell 20 having a third chamber 21 and a fourth chamber 22 separated by a cation exchange membrane 23, an electrolyzed water supply unit (pump 31, water tank 32, and electrolyzed water circulation path Ra) that supplies electrolyzed water Wx to the second chamber 12 and also supplies electrolyzed water Wx (Wa1) that has passed through the second chamber 12 to the third chamber 21, and a pure water supply unit (pump 31, water tank 32, and electrolyzed water circulation path Ra) that supplies pure water Wx to the first chamber 11 and the fourth chamber 22. and a DC power supply 50 that applies a DC voltage between the anode electrode 11p in the first chamber 11 and the anode electrode 21p in the third chamber 21 and the cathode electrode 12m in the second chamber 12 and the cathode electrode 22m in the fourth chamber 22, and is configured to produce electrolyzed water W1 in the first chamber 11 by electrolysis in the first electrolytic cell 10, and to produce electrolyzed water W2 in the fourth chamber 22 by electrolysis in the second electrolytic cell 20.

[0036] Therefore, according to this electrolyzed water generator 1A, the first electrolytic cell 10 capable of performing the electrolysis process to produce electrolyzed water W1 and the second electrolytic cell 20 capable of performing the electrolysis process to produce electrolyzed water W2 are separately configured. Therefore, the first electrolytic cell 10 and the second electrolytic cell 20 can be assembled separately. Because the first electrolytic cell 10 and the second electrolytic cell 20 have the same configuration as a typical two-compartment electrolytic cell, the positioning of each component is easy, and assembly is easier than with a three-compartment electrolytic cell. This allows the electrolyzed water generator 1A to be easily manufactured and its manufacturing costs to be significantly reduced. Furthermore, because there are no liquid tanks equivalent to the electrolyte tanks in a three-compartment electrolytic cell between the anode electrode 11p and the cathode electrode 12m in the first electrolytic cell 10 and between the anode electrode 21p and the cathode electrode 22m in the second electrolytic cell 20, the anode electrodes 11p and 21p and the cathode electrodes 12m and 22m can be positioned sufficiently close to each other. Therefore, the electrolysis process in the first electrolytic cell 10 and the electrolysis process in the second electrolytic cell 20 can be performed efficiently without passing a large current, which further reduces the manufacturing cost of the electrolytic water generating device 1A by eliminating the need for expensive power cables, and also reduces the power consumption during the generation of electrolytic water W1, W2, allowing high-purity electrolytic water W1, W2 to be generated inexpensively.

[0037] Furthermore, in this electrolyzed water generator 1A, the "pure water supply unit" is equipped with flow control valves 43a, 43b and is configured to be able to adjust at least one (in this example, both) of the amount of pure water supplied to the first chamber 11 and the amount of pure water supplied to the fourth chamber 22. Therefore, with this electrolyzed water generator 1A, it is possible to arbitrarily adjust the pH of the electrolyzed water W1, W2, and arbitrarily adjust the ratio between the amount of electrolyzed water W1 produced per unit time and the amount of electrolyzed water W2 produced per unit time.

[0038] Next, another embodiment of the "electrolyzed water generator" will be described with reference to the accompanying drawings. Note that components similar to those of the electrolyzed water generator 1A described above will be assigned the same reference numerals and redundant description will be omitted.

[0039] 2 is another example of an "electrolyzed water generator," and is configured to generate electrolyzed water W1, an example of "acidic electrolyzed water," and electrolyzed water W2, an example of "alkaline electrolyzed water," by electrolyzing electrolyzed water Wx, such as a potassium chloride aqueous solution or a sodium chloride aqueous solution, which is an example of "electrolyzed water to be treated," in the same manner as the electrolyzed water generator 1A. In this electrolyzed water generator 1B, a pump 31, a first electrolyzed bath 10, a second electrolyzed bath 20, and a water tank 32 are connected by an electrolyzed water circulation path Rb, instead of the electrolyzed water circulation path Ra in the electrolyzed water generator 1A.

[0040] Specifically, in this electrolyzed water generator 1B, electrolyzed water Wx delivered from the water tank 32 by the pump 31 is introduced into the third chamber 21 through the inlet 21i, passed through the third chamber 21, discharged as electrolyzed water Wb2 through the outlet 21o, introduced into the second chamber 12 through the inlet 12i, passed through the second chamber 12, and then discharged as electrolyzed water Wb1 through the outlet 12o and delivered to the water tank 32, forming an electrolyzed water circulation path Rb. In the electrolyzed water generator 1B of this example, the pump 31, the water tank 32, and the piping that constitutes the electrolyzed water circulation path Rb work together to form an "electrolyzed water supply unit."

[0041] When the electrolyzed water generator 1B generates electrolyzed water W1 and W2, the pump 31 starts pumping electrolyzed water Wx and the DC power supply 50 starts applying a DC voltage between the anode electrodes 11p, 21p and the cathode electrodes 12m, 22m. Electrolysis in the second electrolytic cell 20 causes potassium K to migrate from the third chamber 21 to the fourth chamber 22 through the cation exchange membrane 23, producing strongly alkaline electrolyzed water W2 within a pH range of 11 to 14 (e.g., approximately pH 13) in the fourth chamber 22. This electrolyzed water W2 is discharged from the outlet 22o and stored in the water storage tank 44b. Furthermore, electrolyzed water Wb2 (electrolyzed water containing Cl and trace amounts of KCl) with reduced potassium due to the migration of potassium to the fourth chamber 22 is discharged from the outlet 21o and introduced into the second chamber 12 through the inlet 12i.

[0042] At this time, electrolysis in the first electrolytic cell 10 causes "Cl- (chloride ions)" to migrate from the second chamber 12 to the first chamber 11 through the anion exchange membrane 13, and strongly acidic electrolyzed water W1 within a pH range of 1 to 3 (for example, about pH 2) is generated in the first chamber 11. This electrolyzed water W1 is discharged from the outlet 11o and stored in the water tank 44a. Furthermore, electrolyzed water Wb1 (a low-concentration potassium chloride aqueous solution) in which "Cl" has been reduced as a result of the migration of "Cl-" to the first chamber 11 as described above is discharged from the outlet 12o and sent to the water tank 32.

[0043] As described above, the electrolytic water generating device 1B includes a first electrolytic cell 10 having a first chamber 11 and a second chamber 12 separated by an anion exchange membrane 13, a second electrolytic cell 20 having a third chamber 21 and a fourth chamber 22 separated by a cation exchange membrane 23, an electrolytic water supply unit (pump 31, water tank 32, and electrolytic water circulation path Rb) that supplies electrolytic water Wx to the third chamber 21 and also supplies electrolytic water Wx (Wb2) that has passed through the third chamber 21 to the second chamber 12, and a pump 31, a water storage tank 32, and an electrolytic water circulation path Rb that supplies pure water to the first chamber 11 and the fourth chamber 22. and a DC power supply 50 that applies a DC voltage between the anode electrode 11p in the first chamber 11 and the anode electrode 21p in the third chamber 21 and the cathode electrode 12m in the second chamber 12 and the cathode electrode 22m in the fourth chamber 22, and is configured to produce electrolyzed water W1 in the first chamber 11 by electrolysis in the first electrolytic cell 10, and to produce electrolyzed water W2 in the fourth chamber 22 by electrolysis in the second electrolytic cell 20.

[0044] Therefore, according to this electrolyzed water generator 1B, the first electrolytic cell 10 capable of performing the electrolysis process to produce electrolyzed water W1 and the second electrolytic cell 20 capable of performing the electrolysis process to produce electrolyzed water W2 are separately configured. Therefore, the first electrolytic cell 10 and the second electrolytic cell 20 can be assembled separately. Because the first electrolytic cell 10 and the second electrolytic cell 20 have the same configuration as a typical two-compartment electrolytic cell, the positioning of each component is easy, and assembly is easier than with a three-compartment electrolytic cell. This allows the electrolyzed water generator 1B to be easily manufactured and its manufacturing costs to be significantly reduced. Furthermore, because there are no liquid tanks equivalent to the electrolyte tanks in a three-compartment electrolytic cell between the anode electrode 11p and the cathode electrode 12m in the first electrolytic cell 10 and between the anode electrode 21p and the cathode electrode 22m in the second electrolytic cell 20, the anode electrodes 11p and 21p and the cathode electrodes 12m and 22m can be positioned sufficiently close to each other. Therefore, the electrolysis process in the first electrolytic cell 10 and the electrolysis process in the second electrolytic cell 20 can be performed efficiently without passing a large current, which further reduces the manufacturing cost of the electrolytic water generating device 1B by eliminating the need for expensive power cables, and also reduces the power consumption during the generation of electrolytic water W1, W2, allowing high-purity electrolytic water W1, W2 to be generated inexpensively.

[0045] Furthermore, in this electrolyzed water generator 1B, the "pure water supply unit" is equipped with flow control valves 43a, 43b and is configured to be able to adjust at least one (in this example, both) of the amount of pure water supplied to the first chamber 11 and the amount of pure water supplied to the fourth chamber 22. Therefore, with this electrolyzed water generator 1B, it is possible to arbitrarily adjust the pH of the electrolyzed water W1, W2, and arbitrarily adjust the ratio between the amount of electrolyzed water W1 produced per unit time and the amount of electrolyzed water W2 produced per unit time.

[0046] Next, still another embodiment of the "electrolyzed water generator" will be described with reference to the accompanying drawings. Note that components similar to those of the electrolyzed water generators 1A and 1B described above will be assigned the same reference numerals and redundant description will be omitted.

[0047] 3 is yet another example of the "electrolyzed water generator," and is configured to generate electrolyzed water W1, an example of "acidic electrolyzed water," and electrolyzed water W2, an example of "alkaline electrolyzed water," by electrolyzing electrolyzed water Wx, such as a potassium chloride aqueous solution or a sodium chloride aqueous solution, which is an example of "electrolyzed water to be treated," in the same manner as the electrolyzed water generators 1A and 1B. In this electrolyzed water generator 1C, a pump 31, a first electrolyzed bath 10, a second electrolyzed bath 20, and a water tank 32 are connected by an electrolyzed water circulation path Rc, instead of the electrolyzed water circulation path Ra in the electrolyzed water generator 1A and the electrolyzed water circulation path Rb in the electrolyzed water generator 1B.

[0048] Specifically, in this electrolyzed water generator 1C, an electrolyzed water circulation path Rc is formed in which electrolyzed water Wx, delivered from the water tank 32 by the pump 31, is introduced into the second chamber 12 through the inlet 12i, passed through the second chamber 12, and discharged as electrolyzed water Wc1 through the outlet 12o to be delivered to the water tank 32, and also introduced into the third chamber 21 through the inlet 21i, passed through the third chamber 21, and discharged as electrolyzed water Wc2 through the outlet 21o to be delivered to the water tank 32. In the electrolyzed water generator 1C of this example, the pump 31, the water tank 32, and the piping that constitutes the electrolyzed water circulation path Rc work together to form an "electrolyzed water supply unit."

[0049] When the electrolyzed water generator 1C generates electrolyzed water W1 and W2, the pump 31 starts pumping the electrolyzed water Wx, and the DC power supply 50 starts applying a DC voltage between the anode electrodes 11p, 21p and the cathode electrodes 12m, 22m. Electrolysis in the first electrolytic cell 10 causes Cl- (chloride ions) to migrate from the second chamber 12 to the first chamber 11 through the anion exchange membrane 13, producing strongly acidic electrolyzed water W1 within a pH range of 1 to 3 (e.g., approximately pH 2) in the first chamber 11. This electrolyzed water W1 is discharged from the outlet 11o and stored in the water storage tank 44a. At the same time, electrolysis in the second electrolytic cell 20 causes K+ (potassium) to migrate from the third chamber 21 to the fourth chamber 22 through the cation exchange membrane 23, producing strongly alkaline electrolyzed water W2 within a pH range of 11 to 14 (e.g., approximately pH 13) in the fourth chamber 22. This electrolyzed water W2 is discharged from the outlet 22o and stored in the water tank 44b.

[0050] In addition, as described above, the electrolyzed water Wc1 (electrolyzed water containing K and a trace amount of KCl) in which "Cl" has been reduced due to the movement of "Cl-" to the first chamber 11 is discharged from the outlet 12o and sent to the water tank 32, and the electrolyzed water Wc2 (electrolyzed water containing Cl and a trace amount of KCl) in which "K" has been reduced due to the movement of "K+" to the fourth chamber 22 is discharged from the outlet 21o and sent to the water tank 32.

[0051] As described above, the electrolytic water generating device 1C includes a first electrolytic cell 10 having a first chamber 11 and a second chamber 12 separated by an anion exchange membrane 13, a second electrolytic cell 20 having a third chamber 21 and a fourth chamber 22 separated by a cation exchange membrane 23, an electrolytic water supply unit (pump 31, water storage tank 32, and electrolytic water circulation path Rc) that supplies electrolytic water Wx to the second chamber 12 and the third chamber 21, and a circuit for supplying pure water to the first chamber 11 and the fourth chamber 22. The electrolytic cell 10 is provided with a "pure water supply unit" that supplies pure water, and a DC power supply 50 that applies a DC voltage between the anode electrode 11p in the first chamber 11, the anode electrode 21p in the third chamber 21, and the cathode electrode 12m in the second chamber 12 and the cathode electrode 22m in the fourth chamber 22, and is configured to produce electrolyzed water W1 in the first chamber 11 by electrolysis in the first electrolytic cell 10, and to produce electrolyzed water W2 in the fourth chamber 22 by electrolysis in the second electrolytic cell 20.

[0052] Therefore, according to this electrolyzed water generator 1C, the first electrolytic cell 10 capable of performing the electrolysis process to produce acidic electrolyzed water and the second electrolytic cell 20 capable of performing the electrolysis process to produce electrolyzed water W2 are separately configured. Therefore, the first electrolytic cell 10 and the second electrolytic cell 20 can be assembled separately. Because the first electrolytic cell 10 and the second electrolytic cell 20 have the same configuration as a typical two-compartment electrolytic cell, the positioning of each component is easy, and assembly is easier than with a three-compartment electrolytic cell. Therefore, the electrolyzed water generator 1C can be easily manufactured and its manufacturing cost can be significantly reduced. Furthermore, because there are no liquid tanks equivalent to the electrolyte tanks in a three-compartment electrolytic cell between the anode electrode 11p and the cathode electrode 12m in the first electrolytic cell 10 and between the anode electrode 21p and the cathode electrode 22m in the second electrolytic cell 20, the anode electrodes 11p and 21p can be positioned sufficiently close to the cathode electrodes 12m and 22m. Therefore, the electrolysis process in the first electrolytic cell 10 and the electrolysis process in the second electrolytic cell 20 can be performed effectively without passing a large current, which eliminates the need for expensive power cables, thereby further reducing the manufacturing cost of the electrolyzed water generator 1C and reducing the power consumption during the production of acidic electrolyzed water W2, allowing high-purity acidic electrolyzed water W2 to be produced inexpensively.

[0053] In addition, in this electrolyzed water generator 1A, the "pure water supply unit" is equipped with flow control valves 43a, 43b, and is configured to be able to adjust at least one (in this example, both) of the amount of pure water supplied to the first chamber 11 and the amount of pure water supplied to the fourth chamber 22. Therefore, this electrolyzed water generator 1A makes it possible to arbitrarily adjust the pH of the acidic electrolyzed water W2 and arbitrarily adjust the ratio between the amount of electrolyzed water W1 and the amount of electrolyzed water W2 produced per unit time.

[0054] The configuration of the "electrolyzed water generator" is not limited to the examples of the configuration of the electrolyzed water generators 1A to 1C described above.

[0055] For example, the configuration has been described as an example in which the "electrolyte to be treated (in the above example, a potassium chloride aqueous solution)" that has passed through the first electrolytic cell 10 and the second electrolytic cell 20 is transferred to the water tank 32 and circulated between the first electrolytic cell 10, the second electrolytic cell 20 and the water tank 32, but it is also possible to adopt a configuration in which the "electrolyte to be treated" is transferred to the first electrolytic cell 10 or the second electrolytic cell 20 without circulating it, or a configuration in which the required amount of "electrolyte to be treated" is supplied in advance to the "second chamber" in the "first electrolytic cell" or the "third chamber" in the "second electrolytic cell" before starting the process to generate the electrolytes W1 and W2 (a configuration in which electrolysis is carried out by so-called "batch processing").

[0056] In addition, the configuration has been described as an example in which DC voltages of the same voltage value are applied from DC power supply 50 between anode electrode 11p and cathode electrode 12m, and between anode electrode 21p and cathode electrode 22m (DC currents of the same current value are passed from DC power supply 50 between anode electrode 11p and cathode electrode 12m, and between anode electrode 21p and cathode electrode 22m), but the voltage value of the DC voltage applied between anode electrode 11p and cathode electrode 12m and the voltage value of the DC voltage applied between anode electrode 21p and cathode electrode 22m may be different. By adopting such a configuration and adjusting the opening of the flow control valves 43a, 43b (changing the amount of ultrapure water W0 supplied per unit time) and appropriately adjusting the voltage value of the DC voltage applied between the anode electrode 11p and the cathode electrode 12m, and between the anode electrode 21p and the cathode electrode 22m, it is possible to arbitrarily adjust the amount of electrolyte W1 and the amount of electrolyte W2 produced per unit time, while also arbitrarily adjusting the pH values ​​of the electrolytes W1, W2. [Industrial Applicability]

[0057] According to the present invention, The electrolytic cell is configured to produce an acidic electrolytic solution and an alkaline electrolytic solution, and is equipped with a first electrolytic cell having a first chamber and a second chamber separated by an anion exchange membrane, with a first anode electrode disposed in the first chamber and a first cathode electrode disposed in the second chamber; a second electrolytic cell having a third chamber and a fourth chamber separated by a cation exchange membrane, with a second anode electrode disposed in the third chamber and a second cathode electrode disposed in the fourth chamber; and an electrolyte supply unit that supplies the electrolytic solution to be treated to the second and third chambers.Since the first and second electrolytic cells can be assembled more easily than a three-compartment electrolytic cell, manufacturing costs can be significantly reduced.Furthermore, the anode and cathode can be positioned sufficiently close to each other, eliminating the need to pass a large current during electrolysis, and therefore manufacturing costs and power consumption can be significantly reduced.The electrolytic cell can be widely applied to electrolytic solution generation devices. [Explanation of symbols]

[0058] 1A~1C Electrolyzed water generator 10 1st electrolytic cell 11 Room 1 11i,12i,21i,22i Inlet 11o,12o,21o,22o outlet 11p,21p anode electrode 12 Room 2 12m,22m cathode electrode 13 Anion exchange membrane 20 Second electrolytic cell 21 Room 3 22 Room 4 23 Cation exchange membrane 31,41 Pump 32, 42, 44a, 44b Water tanks 43a, 43b Flow control valve 50 DC power supply Ra~Rc Electrolyzed water circulation path W0 Ultrapure water W1,W2,Wa1,Wa2,Wb1,Wb2,Wc1,Wc2,Wx Electrolyzed water

Claims

1. An electrolyzed water generating device configured to be able to generate acidic electrolyzed water and alkaline electrolyzed water by electrolyzing electrolyzed water to be treated, a first electrolytic cell comprising a first chamber and a second chamber separated by an anion exchange membrane, with a first anode electrode disposed in the first chamber and a first cathode electrode disposed in the second chamber; a second electrolytic cell comprising a third chamber and a fourth chamber separated by a cation exchange membrane, with a second anode electrode disposed in the third chamber and a second cathode electrode disposed in the fourth chamber; an electrolyzed water supply unit that supplies the electrolyzed water to be treated to the second chamber and supplies the electrolyzed water to be treated that has passed through the second chamber to the third chamber; a pure water supply unit that supplies pure water to the first chamber and the fourth chamber; a power supply unit that applies a DC voltage between the first anode electrode, the second anode electrode, and the first cathode electrode, and the second cathode electrode; The electrolyzed water generating device is configured to generate the acidic electrolyzed water in the first chamber by electrolysis in the first electrolytic cell, and to generate the alkaline electrolyzed water in the fourth chamber by electrolysis in the second electrolytic cell.

2. An electrolyzed water generating device configured to be able to generate acidic electrolyzed water and alkaline electrolyzed water by electrolyzing electrolyzed water to be treated, a first electrolytic cell comprising a first chamber and a second chamber separated by an anion exchange membrane, with a first anode electrode disposed in the first chamber and a first cathode electrode disposed in the second chamber; a second electrolytic cell comprising a third chamber and a fourth chamber separated by a cation exchange membrane, with a second anode electrode disposed in the third chamber and a second cathode electrode disposed in the fourth chamber; an electrolyzed water supply unit that supplies the electrolyzed water to be treated to the third chamber and supplies the electrolyzed water to be treated that has passed through the third chamber to the second chamber; a pure water supply unit that supplies pure water to the first chamber and the fourth chamber; a power supply unit that applies a DC voltage between the first anode electrode, the second anode electrode, and the first cathode electrode, and the second cathode electrode; The electrolyzed water generating device is configured to generate the acidic electrolyzed water in the first chamber by electrolysis in the first electrolytic cell, and to generate the alkaline electrolyzed water in the fourth chamber by electrolysis in the second electrolytic cell.

3. An electrolyzed water generating device configured to be able to generate acidic electrolyzed water and alkaline electrolyzed water by electrolyzing electrolyzed water to be treated, a first electrolytic cell comprising a first chamber and a second chamber separated by an anion exchange membrane, with a first anode electrode disposed in the first chamber and a first cathode electrode disposed in the second chamber; a second electrolytic cell comprising a third chamber and a fourth chamber separated by a cation exchange membrane, with a second anode electrode disposed in the third chamber and a second cathode electrode disposed in the fourth chamber; an electrolyzed water supply unit that supplies the electrolyzed water to be treated to the second chamber and the third chamber; a pure water supply unit that supplies pure water to the first chamber and the fourth chamber; a power supply unit that applies a DC voltage between the first anode electrode, the second anode electrode, and the first cathode electrode, and the second cathode electrode; The electrolyzed water generating device is configured to generate the acidic electrolyzed water in the first chamber by electrolysis in the first electrolytic cell, and to generate the alkaline electrolyzed water in the fourth chamber by electrolysis in the second electrolytic cell.

4. The electrolytic water generating apparatus according to any one of claims 1 to 3, wherein the pure water supply unit is configured to be able to adjust at least one of the amount of pure water supplied to the first chamber and the amount of pure water supplied to the fourth chamber.

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