Electromagnetic wave irradiation device and electromagnetic wave irradiation method

Abstract

To provide an electromagnetic wave irradiation device and an electromagnetic wave irradiation method capable of conveying an irradiation object by a new method and irradiating the irradiation object with an electromagnetic wave.SOLUTION: An electromagnetic radiation device EA includes an irradiated body support means 10 having an opening 11A for taking in an irradiated body WK and supporting the irradiated body WK, a closing means 20 for closing the opening 11A of the irradiated body support means 10 with a closing member 21, an irradiating means 30 for irradiating the irradiated body WK supported by the irradiated body support means 10 with electromagnetic waves, and a conveying means 40 for conveying the irradiated body WK. The closing means 20 includes a holding means 22 supported by a closing member 21 and capable of holding the object WK to be irradiated, and a moving means 23 for moving the closing member 21 close to and away from the 11A of the opening, and is provided so as to be capable of at least one of receiving the object WK to be irradiated from the conveying means 40 and delivering the object WK to be irradiated to the conveying means 40.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an electromagnetic wave irradiation device and an electromagnetic wave irradiation method. [Background technology]

[0002] Electromagnetic wave irradiation devices that irradiate an object to be irradiated with electromagnetic waves are known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Publication number 6-43143 Summary of the Invention [Problem to be solved by the invention]

[0004] In the adhesive force control device (electromagnetic wave irradiation device) described in Patent Document 1, one work transport device 13a transports the work 14 (irradiated object) to a container 6 (adherend support means), and the irradiated object irradiated with ultraviolet rays (electromagnetic waves) can be transported from the adherend support means by the other work transport device 13b.However, in recent years, there has been a demand for technology that uses a new method to transport the irradiated object and irradiate the irradiated object with electromagnetic waves.

[0005] An object of the present invention is to provide an electromagnetic wave irradiation device and an electromagnetic wave irradiation method that are capable of transporting an object to be irradiated by a new method and irradiating the object with electromagnetic waves. [Means for solving the problem]

[0006] The present invention employs the configurations described in the claims. [Effects of the Invention]

[0007] According to the present invention, the irradiated object is held by a holding means supported by a blocking member that blocks the opening of the irradiated object support means, and the blocking member is moved toward or away from the opening, making it possible to at least one of receive the irradiated object from the conveying means and hand over the irradiated object to the conveying means, thereby enabling the irradiated object to be transported by a new method and electromagnetic waves to be irradiated to the irradiated object. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is an explanatory diagram of an electromagnetic wave irradiation device according to an embodiment of the present invention. [Figure 2] FIG. 2 is an explanatory diagram of the operation of the electromagnetic wave irradiation device. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Furthermore, in this embodiment, when viewed from the front direction of Fig. 1(A) parallel to the Y-axis, "up" is the direction of the arrow of the Z-axis, "down" is the opposite direction, "left" is the direction of the arrow of the X-axis, "right" is the opposite direction, "front" is the direction toward the front of Fig. 1(A) parallel to the Y-axis, and "rear" is the opposite direction.

[0010] The electromagnetic wave irradiation device EA has an opening 11A for taking in the irradiated object WK and is equipped with an irradiated object support means 10 that performs an irradiated object support step of supporting the irradiated object WK, a closing means 20 that performs a closing step of closing the opening 11A of the irradiated object support means 10 with a closing member 21, an irradiation means 30 that performs an irradiation step of irradiating the irradiated object WK supported by the irradiated object support means 10 with ultraviolet rays as electromagnetic waves, a transport means 40 that performs a transport step of transporting the irradiated object WK, a storage means 50 that performs a storage step of storing multiple irradiated objects WK, and a relay means 60 that performs a relay step that allows the irradiated object WK to be taken in and out of the storage means 50 and the irradiated object WK to be transferred to the transport means 40. In this embodiment, the irradiated object WK is formed by integrating the ring frame RF as a frame member with the adherend WF placed in the opening of the ring frame RF by an adhesive sheet AS affixed to them. The adhesive strength of the adhesive sheet AS of the irradiated object WK is reduced by ultraviolet light.

[0011] The irradiation object support means 10 includes a table 11 having an opening 11A and a through hole 11B formed therein.

[0012] The blocking means 20 comprises a blocking member 21, an adsorption pad 22 as a holding means supported by the blocking member 21 and capable of holding the irradiated object WK by suction force applied by a pressure reduction means (not shown) such as a vacuum pump or vacuum ejector, and a linear motor 23 as a moving means and driving device that supports the blocking member 21 with a slider 23A and moves the blocking member 21 toward and away from the opening 11A, and is configured so that the irradiated object WK can be handed over to the conveying means 40.

[0013] The irradiation means 30 includes a linear motor 31 as a driving device, a case 32 supported by a slider 31A of the linear motor 31, a high-pressure mercury lamp 33 as an electromagnetic wave emitting means housed in the case 32, and a focusing means 34 such as a reflector or lens housed in the case 32 for focusing the ultraviolet rays emitted by the high-pressure mercury lamp 33.

[0014] The conveying means 40 includes a linear motor 41 as a driving device, a linear motor 42 as a driving device supported by a slider 41A of the linear motor 41, an arm 43 supported by the slider 42A of the linear motor 42, a first suction pad 44 supported on the underside of the arm 43 and capable of being adsorbed and held by a pressure reduction means (not shown) such as a vacuum pump or a vacuum ejector, and a second suction pad 45 supported on the upper side of the arm 43 and capable of being adsorbed and held by a pressure reduction means (not shown) such as a vacuum pump or a vacuum ejector.

[0015] The storage means 50 includes a cassette 51 that stores irradiation objects WK in multiple stages using a plurality of shelves 51A.

[0016] The relay means 60 comprises a linear motor 61 as a driving device, a suction pad 62 supported on the output shaft 61A of the linear motor 61 and capable of being adsorbed and held by a pressure reducing means (not shown) such as a pressure reducing pump or a vacuum ejector, a linear motor 63 as a driving device, a base 64 supported on the output shaft 63A of the linear motor 63, a linear motor 65 as a driving device supported on the base 64, a chuck cylinder 66 as a gripping means supported on the slider 65A of the linear motor 65 and having a pair of gripping members 66A, 66B that grip the irradiated object WK in the cassette 51, and a pair of slide plates 68 arranged in the front-to-rear direction on the base 64 via pillar members 67 and having an L-shaped cross section in the X-axis direction, and is configured so that the irradiated object WK can be removed from the storage means 50 and received from the conveying means 40 while the irradiation means 30 is irradiating the irradiated object WK with ultraviolet rays.

[0017] The operation of the electromagnetic wave irradiation device EA will now be described. First, a user of the electromagnetic wave irradiation device EA (hereinafter simply referred to as "user") inputs a signal to start automatic operation via an operation means (not shown), such as an operation panel or a personal computer, to the electromagnetic wave irradiation device EA, whose components are arranged in the initial positions shown by the solid lines in Fig. 1(A). Then, the relay means 60 drives the linear motor 63 to move the chuck cylinder 66 and the slide plate 68 to a height position of the first irradiation object WK to be removed (hereinafter referred to as the first irradiation object WK1), which is a transfer position for the irradiation object WK with respect to the conveying means 40. Next, the relay means 60 drives the linear motor 65 to move the chuck cylinder 66 leftward, and then drives the chuck cylinder 66 to grip the first irradiation object WK1 in the cassette 51 with the gripping members 66A and 66B. Thereafter, the relay means 60 drives the linear motor 65 to move the chuck cylinder 66 to the right, and the first irradiation object WK1 is removed from the cassette 51 along the slide plate 68.

[0018] Next, the conveying means 40 drives the linear motor 42 to lower the arm 43, bringing the lower first suction pad 44 into contact with the ring frame RF of the first irradiation object WK1, as shown by the two-dot chain line in FIG. 1(A). Then, the pressure reducing means (not shown) is driven to start suction-holding of the first irradiation object WK1 by the first suction pad 44. Then, the relay means 60 drives the linear motor 65 and the chuck cylinder 66 to release the grip of the first irradiation object WK1 and return the chuck cylinder 66 to its initial position. Next, the conveying means 40 drives the linear motors 41 and 42 to convey the first irradiation object WK1 and place it in a predetermined position on the table 11. Then, the driving of the pressure reducing means (not shown) is stopped, and the suction-holding of the first irradiation object WK1 by the first suction pad 44 is released. Thereafter, the conveying means 40 drives the linear motors 41 and 42 to return the arm 43 to its initial position, and the blocking means 20 drives the linear motor 23 to lower the blocking member 21 as shown by the two-dot chain line in Fig. 1(A). As a result, the blocking member 21 comes into contact with the upper surface of the table 11 to cover the opening 11A, and the suction pad 22 comes into contact with the ring frame RF of the first irradiated object WK1.

[0019] Next, the irradiation means 30 drives the linear motor 31 and the high-pressure mercury lamp 33, and as shown in FIG. 2(A), the high-pressure mercury lamp 33 is reciprocated left and right to irradiate the first irradiation object WK1 with ultraviolet light. At this time, the blocking member 21 covers the opening 11A, preventing the irradiated ultraviolet light from leaking from the opening 11A. While the irradiation means 30 is irradiating the first irradiation object WK1 with ultraviolet light, the relay means 60 drives the linear motor 63, the linear motor 65, and the chuck cylinder 66, and as shown in FIG. 2(A), the relay means 60 removes the irradiation object WK to be removed next after the first irradiation object WK1 (hereinafter referred to as the second irradiation object WK2) from the cassette 51 along the slide plate 68, and then moves the second irradiation object WK2 to the delivery position as indicated by the two-dot chain line in the figure. Then, the conveying means 40 drives the linear motor 42 and the pressure reducing means (not shown), lowers the arm 43, and starts suction holding of the second irradiation object WK2 by the first suction pad 44. Next, the relay means 60 drives the linear motor 65 and the chuck cylinder 66, releases the grip of the second irradiation object WK2, and returns the chuck cylinder 66 to its initial position.

[0020] When irradiation of the first object WK1 with ultraviolet light is completed, the irradiation means 30 stops driving the high-pressure mercury lamp 33, then drives the pressure reducing means (not shown), and starts suction and holding of the first object WK1 with the suction pad 22. Thereafter, the closing means 20 drives the linear motor 23, and as shown in FIG. 2(B), returns the closing member 21 to its initial position, and moves the first object WK1, which has been irradiated with ultraviolet light, upward from the table 11. Next, the transport means 40 drives the linear motors 41 and 42, and as shown in FIG. 2(B), transports the second object WK2 to be irradiated before ultraviolet light irradiation and places it in a predetermined position on the table 11. Then, the drive of the pressure reducing means (not shown) is stopped, and the suction and holding of the second object WK2 with the first suction pad 44 is released. Then, the conveying means 40 drives the linear motor 42 to raise the arm 43 and bring the upper second suction pad 45 into contact with the adhesive sheet AS of the first irradiation object WK1, and then drives the pressure reducing means (not shown) to start suction-holding the first irradiation object WK1 with the second suction pad 45. Next, the closing means 20 stops driving the pressure reducing means (not shown), releases the suction-holding of the first irradiation object WK1 with the suction pad 22, and hands over the first irradiation object WK1 to the conveying means 40. Thereafter, the conveying means 40 drives the linear motor 41 to convey the first irradiation object WK1 to the left, as shown by the two-dot chain line in FIG. 2(B), until it is positioned below the suction pad 62.

[0021] Next, the blocking means 20 drives the linear motor 23 to lower the blocking member 21, and then the irradiation means 30 drives the linear motor 31 and the high-pressure mercury lamp 33 to move the high-pressure mercury lamp 33 back and forth to irradiate the second irradiation object WK2 with ultraviolet rays. While the irradiation means 30 is irradiating the second irradiation object WK2 with ultraviolet rays, the relay means 60 drives the linear motor 61 and the pressure reducing means (not shown) to lower the suction pad 62 and begin suction-holding the first irradiation object WK1 on the suction pad 62, and receives the first irradiation object WK1 from the transport means 40. Then, the transport means 40 stops driving the pressure reducing means (not shown) and releases the suction-holding of the first irradiation object WK1 on the second suction pad 45. Next, the relay means 60 drives the direct-acting motor 63, the linear motor 65 and the chuck cylinder 66, and as shown in Figure 2 (B), the next irradiated object WK to be removed after the second irradiated object WK2 (hereinafter referred to as the third irradiated object WK3) is removed from the cassette 51 along the slide plate 68, and then the third irradiated object WK3 is moved to the delivery position.

[0022] Thereafter, the conveying means 40 drives the linear motor 42 and the pressure reducing means (not shown) to lower the arm 43 and start suction holding of the third irradiation object WK3 by the first suction pad 44. Next, the relay means 60 drives the linear motor 65 and the chuck cylinder 66 to return the chuck cylinder 66 to its initial position, and the conveying means 40 drives the linear motors 41 and 42 to move the third irradiation object WK3 to the standby position (see FIG. 2(C)). Then, the relay means 60 drives the linear motor 61 to lower the first irradiation object WK1 and place it in a predetermined position on the slide plate 68, and then drives the linear motor 65 and the chuck cylinder 66 to grip the first irradiation object WK1, as shown in FIG. 2(C).

[0023] Next, the relay means 60 stops driving the pressure reducing means (not shown), releases the suction pad 62 from suction and holds the first irradiation object WK1, and then drives the linear motor 61 to return the suction pad 62 to its initial position. The relay means 60 then drives the linear motor 63 and linear motor 65 to insert the UV-irradiated first irradiation object WK1 back into its original position in the cassette 51. Next, the relay means 60 drives the linear motor 63, linear motor 65, and chuck cylinder 66 to release the grip on the first irradiation object WK1 and return the chuck cylinder 66 to its initial position. After UV irradiation of the second irradiation object WK2 is complete, the closing means 20 returns the closing member 21 to its initial position in the same manner as described above, thereby lifting the second irradiation object WK2. Next, the transport means 40 drives the linear motors 41 and 42 to transport the third irradiation object WK3 from its standby position and place it in a predetermined position on the table 11. The same operations as described above are then repeated.

[0024] According to the above embodiment, the irradiated object WK is held by an adsorption pad 22 supported by a blocking member 21 that blocks the opening 11A of the irradiated object support means 10, and the blocking member 21 is moved toward or away from the opening 11A, enabling the irradiated object WK to be handed over to the conveying means 40. This makes it possible to convey the irradiated object WK by a new method and irradiate ultraviolet rays onto the irradiated object WK.

[0025] Furthermore, by moving the blocking member 21 away from the opening 11A, the irradiated object WK that has been irradiated with ultraviolet rays can be moved from the table 11 together with the blocking member 21, so there is no need to move the irradiated object WK separately from the operation of moving the blocking member 21 away, and the irradiated object WK before being irradiated with ultraviolet rays can be placed on the table 11 immediately after the blocking member 21 is opened.

[0026] As described above, the best configurations, methods, and the like for implementing the present invention have been disclosed in the above description, but the present invention is not limited thereto. That is, although the present invention has been particularly illustrated and described mainly with reference to specific embodiments, those skilled in the art can make various modifications to the above-described embodiments in terms of shape, material, quantity, and other detailed configurations without departing from the scope of the technical idea and purpose of the present invention. Furthermore, the above-disclosed descriptions limiting the shape, material, and the like are provided as examples to facilitate understanding of the present invention and are not intended to limit the present invention. Therefore, descriptions using names of components that are free from some or all of the limitations on shape, material, and the like are included in the present invention. Furthermore, the means and steps of the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are in no way limited to the components and steps of a single embodiment shown in the above embodiment. For example, the containing means may be any means that can contain multiple irradiated objects, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0027] The blocking means 20 may, for example, be supported by the slider 23A of the linear motor 23 and equipped with a rotary motor as a driving device that supports the blocking member 21 with its output shaft, and by turning the blocking member 21 upside down, it may be possible to receive the irradiated object WK from the conveying means 40, or it may be possible to both transfer the irradiated object WK to the conveying means 40 and receive the irradiated object WK from the conveying means 40.

[0028] The irradiation means 30 may be equipped with a gas supply means such as a pressure pump or turbine that supplies gas such as nitrogen gas or argon gas, and the gas may be filled into the opening 11A covered by the blocking member 21, or the table 11 may be moved while the high-pressure mercury lamp 33 is moved or not moved to irradiate the adhesive sheet AS with ultraviolet light, or the electromagnetic wave emitting means may be, for example, an LED (Light Emitting Diode) lamp, a high-pressure mercury lamp, a low-pressure mercury lamp, a metal halide lamp, a xenon lamp, a halogen lamp, etc., or an appropriate combination thereof, or may irradiate electromagnetic waves containing visible light, sound waves, microwaves, X-rays, gamma rays, infrared rays, etc. as the main electromagnetic waves, and any electromagnetic waves may be irradiated as long as they can reduce the adhesive strength of the adhesive sheet AS depending on the characteristics, properties, nature, material, composition, etc. of the adhesive sheet AS.

[0029] The conveying means 40 may, for example, comprise a rotary motor as a driving device supported by the slider 42A of the linear motor 42, and an arm 43 supported on the output shaft of the rotary motor, and the arm 43 may be configured to be inverted upside down, in which case one of the suction pads 44, 45 may be absent.

[0030] The storage means 50 may have one or more cassettes 51, or may be configured without shelves 51A so that multiple irradiated objects WK are stacked and stored by abutting each other, or may store multiple irradiated objects WK vertically instead of storing multiple irradiated objects WK horizontally as in the embodiment, and may or may not be provided in the electromagnetic wave irradiation device EA of the present invention, and if not provided, the irradiated objects WK may be stored in another storage means.

[0031] The relay means 60 may be configured to enable at least one of the insertion and removal of the irradiated object WK into and from the storage means 50, and at least one of the transfer of the irradiated object WK to and from the transport means 40, while the irradiation means 30 is irradiating the irradiated object WK with ultraviolet rays; the relay means 60 may be configured to enable the removal of the irradiated object WK from the storage means 50 and the transfer to the transport means 40, or the insertion of the irradiated object WK into the storage means 50 and the receipt of the irradiated object WK from the transport means 40, or the insertion of the irradiated object WK into the storage means 50 and the transfer of the irradiated object WK to the transport means 40, or the only removal of the irradiated object WK from the storage means 50, or the only insertion of the irradiated object WK into the storage means 50, or the only receipt of the irradiated object WK from the transport means 40, or the only transfer of the irradiated object WK to the transport means 40. The relay means 60 may be equipped with a driving device for raising and lowering the cassette 51 in place of or in combination with the linear motor 63, and may or may not be equipped with the electromagnetic wave irradiation device EA of the present invention.If it is not equipped with the device, while the irradiation means 30 is irradiating the irradiated object WK with ultraviolet rays, another device may be used to put the irradiated object WK into and take it out of the storage means 50, or to transfer the irradiated object WK to and from the conveying means 40. Gripping member 66B may be longer than gripping member 66A or may be the same length as gripping member 66A.

[0032] 1(A) and 1(B), the electromagnetic wave irradiation device EA may include an indication providing means 70 that performs an indication providing step of providing an indication indicating that ultraviolet light has been irradiated to the irradiated object WK. The indication providing means 70 includes a linear motor 71 as a driving device supported on the output shaft 61A of the linear motor 61 via a base, and a stamp 72 supported on the output shaft of the linear motor 71. For example, as shown in FIG. 2(C), the indication providing means 70 drives the linear motor 71 to grip the first irradiated object WK1 and bring the lower gripping member 66B into contact with the adhesive sheet AS of the first irradiated object WK1, and then drives the linear motor 71 to lower the stamp 72 and sandwich the adhesive sheet AS between the lower gripping member 66B and the stamp 72, as shown by the two-dot chain line in the figure, and transfers the ink of the stamp 72 to the adhesive sheet AS to provide an indication that ultraviolet light has been irradiated. The marking means 70 may not be configured so that the linear motor 71 is supported by the output shaft 61A of the linear motor 61 via a base, and may provide a mark by printing, writing, stamping, engraving, or the like on the adhesive sheet AS. Alternatively, instead of or in combination with the stamp 72, the marking means 70 may include, for example, a printing device that prints a mark on the adhesive sheet AS or a labeling device that affixes a label with a mark on it to the adhesive sheet AS. The marking means 70 may provide a mark by modifying, altering, melting, scorching, or coloring the adhesive sheet AS with a laser or ultrasonic waves, or the like. The marking may be provided on the ring frame RF or the adherend WF. Alternatively, the marking may be provided on the irradiated object WK without sandwiching the irradiated object WK between the gripping member 66B and the ring frame RF or the adherend WF. The marking indicating that ultraviolet light has been irradiated may be, for example, any symbol, letter, number, figure, logo, one-dimensional code such as a barcode, two-dimensional code such as a QR code (registered trademark) or a data matrix, or a combination thereof.

[0033] The object to be irradiated WK may not have the ring frame RF. The frame member may be a ring frame, but may also be non-annular (not connected at the outer periphery), circular, elliptical, polygonal, or other shape.

[0034] The adhesive sheet AS may have the property that its adhesive strength is reduced by electromagnetic waves other than ultraviolet rays, such as visible light, sound waves, microwaves, X-rays, gamma rays, and infrared rays.

[0035] The materials, types, shapes, etc. of the irradiated object WK, adhesive sheet AS, and adherend WF in the present invention are not particularly limited. For example, the irradiated object WK, adhesive sheet AS, and adherend WF may be circular, elliptical, polygonal such as triangular or rectangular, or other shapes, and the adhesive sheet AS may be pressure-sensitive, heat-sensitive, or other adhesive. When a heat-sensitive adhesive sheet AS is used, the adhesive sheet AS may be adhered by an appropriate method, such as providing a heating means such as a coil heater or the heated side of a heat pipe to heat the adhesive sheet AS. Such adhesive sheets AS may be of any type, including single-layer adhesive sheets, two-layer adhesive sheets consisting of a substrate and an adhesive layer, three-layer or more adhesive sheets consisting of a substrate and an adhesive layer with one or more intermediate layers laminated between them, three-layer or more adhesive sheets consisting of a substrate with one or more cover layers laminated on top of the substrate, double-sided adhesive sheets with a substrate, intermediate layer, or cover layer provided in a peelable manner, single-layer adhesive sheets consisting of an adhesive layer, and double-sided adhesive sheets with adhesive layers laminated on both outermost surfaces of one or more intermediate layers. Furthermore, the adherend WF may be, for example, a single object such as food, a resin container, a semiconductor wafer (e.g., silicon semiconductor wafer or compound semiconductor wafer), a circuit board, an information recording substrate (e.g., optical disk), a glass plate, a steel plate, a ceramic, a wooden board, or a resin, or a composite formed from two or more of these, and may be any type of component or article. The adhesive sheet AS may also be any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer-forming resin sheet.

[0036] The driving equipment in the above embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called articulated robots with joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders and rotary cylinders, which may be used alone, or may be a direct or indirect combination of such electric equipment and actuators, or may be electric equipment, actuators, etc. that are capable of torque control, speed control, etc. for the output parts of such electric equipment, actuators, etc., or may not be capable of torque control, speed control, etc.

[0037] In the above-described embodiments, there is a certain object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A. In other words, object A and object B that move relatively may be such that object B moves relative to object A, which is stationary, or object A may move relative to object B, which is stationary, or both object A and object B may move. As long as the result achieved by the movement is the same, either object A or object B may move. When a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member) is used, a configuration may be adopted in which the supported member is supported (held) by a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure sensitive adhesive (adhesive sheet, adhesive tape), a magnetic force, Bernoulli suction, suction, a driving device, or the like. [Explanation of symbols]

[0038] EA…Electromagnetic wave irradiation device 10…Irradiated object support means 11A…Opening 20...Closure means 21...Blocking member 22...suction pad (holding means) 23...Linear motor (means of movement) 30…Irradiation means 40...Transportation means 50...Containment means 60...Relay means WK…Irradiated object

Claims

1. an irradiation object support means having an opening for receiving the irradiation object and supporting the irradiation object; a closing means for closing the opening of the irradiation object support means with a closing member; an irradiation means for irradiating the irradiation object supported by the irradiation object support means with electromagnetic waves; a conveying means for conveying the irradiated object, The blocking means comprises a holding means supported by the blocking member and capable of holding the irradiated object, and a moving means for moving the blocking member toward or away from the opening, and is configured to be able to at least one of receive the irradiated object from the conveying means and deliver the irradiated object to the conveying means.

2. a storage means for storing a plurality of the irradiation objects; a relay means for transferring the irradiation object to and from the storage means and for transferring the irradiation object to and from the transport means, 2. The electromagnetic wave irradiation device according to claim 1, wherein the relay means is configured to enable at least one of inserting and removing the irradiated object into and from the storage means and at least one of transferring the irradiated object to and from the transport means while the irradiation means is irradiating the irradiated object with electromagnetic waves.

3. an irradiation object supporting step of supporting the irradiation object with irradiation object supporting means having an opening for receiving the irradiation object; a closing step of closing the opening of the irradiation object support means with a closing member; an irradiation step of irradiating the irradiation object supported by the irradiation object support means with electromagnetic waves; a transport step of transporting the irradiated object by a transport means; In the closing step, the irradiated object is held by a holding means supported by the closing member, and the closing member is moved toward or away from the opening, thereby enabling at least one of receiving the irradiated object from the conveying means and handing over the irradiated object to the conveying means.

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