Test circuit, test apparatus, and test method

Abstract

SOLUTION: A voltage supply unit configured to generate an output voltage; a pulse generation unit configured to generate a pulse signal by using the output voltage from the voltage supply unit in a functional test of a device under test and supply the pulse signal to the device under test; And a measurement circuit that performs the voltage application and current measurement test or the current application and voltage measurement test using the test voltage or the test current, in which the measurement circuit is connected at least between the voltage supply unit and the pulse generation unit.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a test circuit, a test device, and a test method. [Background technology]

[0002] Patent Document 1 and other documents state, "The ATE system 150 of this embodiment is connected to a device under test (DUT) 160 to be tested, and includes a DUT power supply (DPS) 170, pin electronics (PE) 180, a parametric measurement unit (PMU) 190, and a controller 200." (Column 6, lines 60-65 of Cited Document 1). [Prior art document] [Patent Documents] [Patent Document 1] U.S. Patent No. 9,851,401 [Patent Document 2] U.S. Patent No. 7,480,583 Summary of the Invention

[0003] In a first aspect of the present invention, there is provided a test circuit comprising: a voltage supply unit that generates an output voltage; a pulse generation unit that generates a pulse signal using the output voltage from the voltage supply unit and supplies it to the device under test during a functional test of the device under test; and a measurement circuit that adjusts the voltage or current supplied to the device under test to a test voltage or test current during a voltage application current measurement test or current application voltage measurement test of the device under test, and performs the voltage application current measurement test or the current application voltage measurement test using the test voltage or the test current, wherein the measurement circuit is connected at least between the voltage supply unit and the pulse generation unit.

[0004] The test circuit may further include a connection terminal for a device under test, and the pulse generating section and the connection terminal may be electrically and fixedly connected to each other.

[0005] Any of the above test circuits may further include a first relay provided between the voltage supply unit and the pulse generation unit.

[0006] Any of the above test circuits may further include a second relay provided between the pulse generating section and the voltage supplying section and the measuring circuit.

[0007] In any of the above test circuits, the measurement circuit may be connected between the voltage supply unit and the pulse generating unit, and between the pulse generating unit and the device under test via a first line for supplying a voltage or current to the device under test and a second line for measuring the voltage of the device under test.

[0008] In the above test circuit, the second line may be connected between the pulse generating section and the device under test, and to the measuring circuit.

[0009] In any of the above test circuits, the voltage supply section and the pulse generating section may be connected in series.

[0010] In any of the above test circuits, the voltage supply section, the pulse generation section, and the measurement circuit may be provided on a common substrate.

[0011] In any of the above test circuits, the measurement circuit may adjust the test voltage or the test current using the voltage supplied from the voltage supply section.

[0012] In a second aspect of the present invention, there is provided a test device including any one of the above test circuits.

[0013] In a third aspect of the present invention, there is provided a testing method comprising: a pulse generating circuit generating a pulse signal using an output voltage from a voltage supply unit in a functional test of the device under test, and supplying the pulse signal to the device under test; and a measuring circuit connected at least between the voltage supply unit and the pulse generating circuit adjusting the voltage or current supplied to the device under test in a voltage application current measurement test or current application voltage measurement test of the device under test to a test voltage or test current, and performing the voltage application current measurement test or the current application voltage measurement test using the test voltage or the test current.

[0014] The above summary of the invention does not list all of the necessary features of the present invention, and subcombinations of these features may also constitute inventions. [Brief explanation of the drawings]

[0015] [Figure 1] 1 shows the configuration of a test apparatus 1 according to an embodiment together with a device under test 10. [Figure 2] 1 shows the configuration of a pin electronics device 200 according to a comparative example of the embodiment. [Figure 3] 1 shows the configuration of a pin electronics device 300 according to an embodiment. [Figure 4] The operational flow of the functional test of the device under test 10 by the test apparatus 1 according to the embodiment will be described with a focus on the operation of the pin electronics device 300 in FIG. [Figure 5] The operational flow of a voltage application current measurement test of the device under test 10 by the test apparatus 1 according to the embodiment will be described with a focus on the operation of the pin electronics device 300 in FIG. [Figure 6] The operational flow of a current application voltage measurement test of a device under test 10 by the test apparatus 1 according to the embodiment will be described with a focus on the operation of the pin electronics device 300. [Figure 7] 1 shows the configuration of a pin electronics device 400 according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0016] The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the scope of the invention according to the claims. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0017] 1 shows the configuration of a test apparatus 1 according to this embodiment together with a device under test (DUT) 10. The device under test 10 is a device on which a circuit to be tested by the test apparatus 1 is formed. The device under test 10 may be a wafer on which a circuit is formed, an IC / LSI chip obtained by dividing the wafer, or an IC / LSI package in which an IC / LSI chip is packaged. In the example shown in this figure, the test apparatus 1 is equipped with one device under test 10, but instead, the test apparatus 1 may be equipped with multiple devices under test 10 and test them simultaneously.

[0018] The test apparatus 1 performs an electrical test on the device under test 10. Alternatively, or in addition, the test apparatus 1 may perform an optical input / output test on the device under test 10. In this embodiment, a case where the test apparatus 1 performs an electrical test on the device under test 10 will be described as an example. When the test apparatus 1 performs an optical input / output test on the device under test 10, the test apparatus 1 and the device under test 10 may be connected by an optical connection in addition to an electrical connection.

[0019] The test apparatus 1 includes a test head 100, a plurality of pin electronics devices 110, a connection device 120, and a main frame 150. The test head 100 is a housing capable of mounting a plurality of pin electronics devices 110. In the example shown in the figure, the test head 100 has a plurality of slots for inserting the plurality of pin electronics devices 110.

[0020] Each of the multiple pin electronics devices 110 is inserted into a slot in the test head 100 and removably connected to the backplane of the test head 100. The pin electronics devices 110 may also be called a "pin electronics card," a "tester board," or a "test module." Each pin electronics device 110 is electrically connected to the device under test 10 via a connection device 120. Each pin electronics device 110 inputs and outputs signals to and from the device under test 10, and tests the device under test 10 by inspecting signals input from the device under test 10.

[0021] The connection device 120 is mounted on the test head 100 and electrically connected to the multiple pin electronics devices 110. The connection device 120 mounts the device under test 10 and is electrically connected to multiple terminals of the device under test 10. The connection device 120 serves to interface terminals between the multiple pin electronics devices 110 and the device under test 10, and electrically connects each terminal of one or more devices under test 10 to corresponding terminals of the multiple pin electronics devices 110 via signal cables, board wiring, or the like.

[0022] The mainframe 150 controls each unit in the test apparatus 1 to test the device under test 10. In this embodiment, the mainframe 150 is a separate housing from the housing in which the test head 100 and the like are provided. Alternatively, each component in the mainframe 150 may be provided in the same housing as the test head 100. The mainframe 150 has a main power supply unit 160 and a control unit 170.

[0023] The main power supply unit 160 receives power from a commercial power source or the like, and supplies power to each device and circuit within the test apparatus 1. The control unit 170 is connected to the main power supply unit 160 and receives power from the main power supply unit 160. The control unit 170 controls the testing of the device under test 10. When the control unit 170 is implemented by a computer, it may control the testing of the device under test 10 by executing a test control program. The control unit 170 supplies a test program to each pin electronics device 110, and causes each pin electronics device 110 to execute the supplied test program and test the device under test 10. The control unit 170 collects and records test results of the device under test 10 from each pin electronics device 110.

[0024] 2 shows the configuration of a pin electronics device 200 according to a comparative example of this embodiment. The pin electronics device 200 according to the comparative example may be used as the pin electronics device 110 in the test apparatus 1. The pin electronics device 200 includes a power supply unit 205, a test circuit 220, and a test control circuit 210.

[0025] The power supply unit 205 receives power from the main power supply device 160, generates power to be supplied to each circuit in the pin electronics device 200, and supplies the power to each circuit in the pin electronics device 200. The power supply unit 205 may have multiple power supplies and output multiple types of power with different rated voltages or rated currents, etc.

[0026] The test circuit 220 is connected to the device under test 10 via the connection apparatus 120, and tests the device under test 10 by receiving power from the power supply unit 205. This diagram representatively shows a circuit portion of the test circuit 220 that corresponds to one terminal of the device under test 10. The test circuit 220 may be connected to multiple terminals and may have circuit portions corresponding to each of the terminals.

[0027] The test circuit 220 may have a connection terminal Py (also simply referred to as terminal Py) for the device under test 10, and may be connected to the device under test 10 via the terminal Py. The test circuit 220 has a test signal generator 230 to perform an operation test (also referred to as a "functional test") of the device under test 10. The test signal generator 230 receives power supply from the power supply unit 205 and is controlled by the test control circuit 210, and generates test signals to be supplied to the device under test 10 in the functional test of the device under test 10, and supplies the test signals to the terminals of the device under test 10. Here, the test signals generated by the device under test 10 may be pulse signals having a desired signal pattern, such as a digital signal or a multi-value signal to be supplied to the device under test 10.

[0028] The test signal generator 230 includes a voltage generation circuit 240, a pattern generator 245, a timing generator 250, and a pulse generation circuit 255. The voltage generation circuit 240 is an example of a voltage supply unit and generates an output voltage. The voltage generation circuit 240 may receive power from the power supply unit 205 and be controlled by the test control circuit 210, and generate as an output voltage a power supply voltage required by the pulse generation circuit 255 in a functional test. The voltage generation circuit 240 may supply as an output voltage to the pulse generation circuit 255 a power supply voltage corresponding to the high-level voltage of a pulse signal to be supplied to a terminal of the device under test 10.

[0029] The pattern generator 245 receives power supply from the power supply unit 205 and is controlled by the test control circuit 210 to generate a test pattern that specifies the waveform of a pulse signal to be supplied to the terminals of the device under test 10 during a functional test. The pattern generator 245 may execute a test command for each test cycle having a predetermined period and output a test pattern associated with the test command. The test pattern for each test cycle specifies a change pattern of the test signal within the test cycle. Although this differs depending on the model, the pattern generator 245 may be able to specify a pattern identifier that indicates the waveform shape, such as RZ (Return to Zero) or NRZ (Non Return to Zero), as well as the polarity of the waveform shape, as the change pattern of the test signal.

[0030] The timing generator 250 receives power supply from the power supply unit 205 and is controlled by the test control circuit 210, and generates change timings of pulse signals to be supplied to terminals of the device under test 10 during functional testing. The timing generator 250 generates waveforms of pulse signals to be supplied to the device under test 10 by adding real-time change timings to the change patterns of the test signals for each test cycle. Depending on the model of the test apparatus 1, the pattern generator 245 may generate a test pattern for each test cycle, the timing generator 250 may generate timing for each test cycle, and the waveform shaper may shape the waveform of the pulse signal to be supplied to the device under test 10 using the timing generated by the timing generator 250.

[0031] The pulse generation circuit 255 is an example of a pulse generating section, and generates a pulse signal using the output voltage from the voltage generation circuit 240 during a functional test of the device under test 10, and supplies the pulse signal to the device under test 10. The pulse generation circuit 255 may receive the output voltage from the voltage generation circuit 240, and generate a pulse signal using the output voltage from the voltage generation circuit 240 during a functional test, and supply the pulse signal to a terminal of the device under test 10. The pulse generation circuit 255 may drive its output to a high level or a low level (in the case of two values) or to each of multiple levels in accordance with the waveform of a test signal to which real-time change timing has been added for each test cycle, thereby outputting a pulse signal obtained by changing the test pattern created by the pattern generator 245 at the timing created by the timing generator 250.

[0032] The test signal generator 230 described above may be realized by a combination of discrete ICs, LSIs, or ASICs, or may be realized by a single test signal generation ASIC. The test signal generator 230 may further have a function of receiving a response signal output from the device under test 10 in response to the test signal and judging the pass / fail of the device under test 10. In this case, the test signal generator 230 may have a comparator that compares the response signal from the device under test 10 with a target value, and a judger that judges the pass / fail of the device under test 10 using the comparison result from the comparator.

[0033] The relay 260 is provided between the terminal Py of the test circuit 220, which is connected to the terminal of the device under test 10, and the test signal generator 230. The relay 260 may be a mechanical relay or a semiconductor relay using a semiconductor switch or the like. When a functional test of the device under test 10 is performed, the relay 260 is turned on by the test control circuit 210 or the like, and connects the test signal generator 230 and the terminal of the device under test 10. When a parametric test (such as a voltage application current measurement test or a current application voltage measurement test) of the device under test 10 is performed by the measurement circuit 270, the relay 260 is turned off by the test control circuit 210 or the like, and disconnects the test signal generator 230 from the terminal of the device under test 10.

[0034] The measurement circuit 270 is connected to wiring between a terminal to which the test signal generator 230 outputs a pulse signal and a terminal of the device under test 10. In the example shown in the figure, the measurement circuit 270 is connected to a force line that applies a voltage or current to the terminal of the device under test 10 via a relay 280, and to a sense line that senses the voltage at the terminal of the device under test 10 via a resistor 290. The force line and sense line are connected to wiring between the relay 260 and a terminal Py of the test circuit 220 that is connected to the terminal of the device under test 10.

[0035] The measurement circuit 270 performs a parametric test on the device under test 10 under the control of the test control circuit 210 and power supplied from the power supply unit 205. The measurement circuit 270 may include various circuits, depending on the model, including at least one of a voltage generator that generates a voltage to be supplied to the terminals of the device under test 10, a current generator that generates a current to be supplied to the device under test 10, a voltage meter that measures the voltage output by the device under test 10, a current meter that measures the current output by the device under test 10, and a frequency meter that measures the frequency of the signal output by the device under test 10. In the example shown in the figure, the measurement circuit 270 is provided within the pin electronics device 200. Alternatively, the measurement circuit 270 may be realized by another pin electronics device 110 within the test apparatus 1.

[0036] When performing a voltage application current measurement test, the measurement circuit 270 outputs a desired test voltage via the force wire and measures the current flowing through the terminal of the device under test 10 that has received the test voltage. When performing a current application voltage measurement test, the measurement circuit 270 flows a desired test current between the terminal of the device under test 10 via the force wire and measures the voltage at the terminal of the device under test 10 via the sense wire.

[0037] The relay 280 is provided on a force line between the measurement circuit 270 and a connection point on the terminal Py side of the relay 260 in the wiring between the terminal Py of the test circuit 220 and the test signal generator 230. The relay 280 may be a mechanical relay or a semiconductor relay using a semiconductor switch or the like. When a functional test of the device under test 10 is performed, the relay 280 is turned off by the test control circuit 210 or the like, and disconnects the measurement circuit 270 from the terminal of the device under test 10. When a parametric test of the device under test 10 is performed, the relay 280 is turned on by the test control circuit 210 or the like, and connects the measurement circuit 270 to the terminal of the device under test 10.

[0038] The resistor 290 is provided on a sense line between the measurement circuit 270 and a connection point on the terminal Py side of the relay 260 in the wiring between the terminal Py of the test circuit 220 and the test signal generator 230. The resistor 290 may be a relatively large resistor, such as 10 kΩ, and allows the voltage at the terminal of the device under test 10 to be input to the measurement circuit 270 while substantially isolating the terminal of the device under test 10 and the measurement circuit 270.

[0039] The test control circuit 210 controls the testing of the device under test 10 by the test circuit 220. The test control circuit 210 may also be called a "site controller." The test control circuit 210 executes a test program supplied from the control device 170 and controls each unit in the test circuit 220, thereby causing the test circuit 220 to perform tests such as an operational test or a parametric test on the device under test 10.

[0040] In the pin electronics apparatus 200 described above, the measurement circuit 270 is connected to a wiring between the terminal Px, to which the test signal generator 230 outputs a pulse signal, and a terminal of the device under test 10. In a functional test of the device under test 10, a high-speed pulse signal is transmitted through the wiring between the terminal Px of the test signal generator 230 and the terminal of the device under test 10. Here, in the functional test of the device under test 10, the relay 260 is turned on and the relay 280 is turned off, but the relay 260 has parasitic capacitance even when on, and the relay 280 has parasitic capacitance even when off. For this reason, an RC delay occurs in the wiring between the terminal Px of the test signal generator 230 and the terminal of the device under test 10 due to the parasitic capacitance of the relay 260 and the relay 280, which inhibits the transmission of the high-speed pulse signal.

[0041] 3 shows the configuration of a pin electronics device 300 according to this embodiment. The pin electronics device 300 is a modified example of the pin electronics device 200. The test apparatus 1 may include the pin electronics device 300 instead of the pin electronics device 200. The pin electronics device 300 has a power supply unit 205, a test circuit 320, and a test control circuit 310. In this figure, components with the same reference numerals as those in FIG. 2 have the same functions and configurations as those in FIG. 2, and therefore will not be described below except for the differences.

[0042] The test circuit 320 is connected to the device under test 10 via the connection apparatus 120, and tests the device under test 10 by receiving power from the power supply unit 205. This diagram representatively shows a circuit portion of the test circuit 320 that corresponds to one terminal of the device under test 10. The test circuit 320 may be connected to multiple terminals and may have circuit portions corresponding to each of the terminals.

[0043] The test circuit 320 includes a test signal generator 330. The test signal generator 330 according to this embodiment receives power from the power supply unit 205 and is controlled by the test control circuit 310 to perform both functional and parametric tests on the device under test 10. The test circuit 320 may perform both functional and parametric tests on the same device under test 10, depending on how the user uses the device. The test circuit 320 may perform a functional test on one device under test 10 and a parametric test on another device under test. Depending on how the user uses the device, the test circuit 320 may perform only one of a functional test or a parametric test, and the function for performing the other test may not be used. The test signal generator 330 includes a measurement circuit 370, a pattern generator 245, a timing generator 250, a pulse generation circuit 255, and a resistor 290.

[0044] The measurement circuit 370 is connected at least between the voltage generation circuit 240 and the pulse generation circuit 255. Connecting between the voltage generation circuit 240 and the pulse generation circuit 255 may mean connecting to the wiring between the voltage generation circuit 240 and the pulse generation circuit 255. The measurement circuit 370 according to this embodiment is configured to include the voltage generation circuit 240, and in addition to being connected from the voltage generation circuit 240 to the pulse generation circuit 255, may also be connected to the wiring connecting the voltage generation circuit 240 and the pulse generation circuit 255 and the wiring connecting the pulse generation circuit 255 and the device under test 10. In this embodiment, as an example, the measurement circuit 370 is connected between the voltage generation circuit 240 and the pulse generation circuit 255 and between the pulse generation circuit 255 and the device under test 10 via a first line L1 (also referred to as a force line L1) for supplying a voltage or current to the device under test 10 and a second line L2 (also referred to as a sense line L2) for measuring the voltage of the device under test 10.

[0045] Force line L1 may be connected between the measurement circuit and voltage generation circuit 240 and pulse generation circuit 255. Force line L1 may function as an input terminal feedback line that feeds back the voltage on the input terminal side of pulse generation circuit 255 to measurement circuit 370. In this case, measurement circuit 370 may adjust its output voltage using the voltage fed back from the force line during a functional test. Note that force line L1 may be provided with a resistor similar to resistor 290 shown in FIG. 2.

[0046] The sense line L2 may be connected between the measurement circuit 370 and the pulse generation circuit 255 and the device under test 10. The sense line L2 may have a function similar to that of the voltage sense line shown in FIG. 2 , and is connected to a connection point on the wiring between the output end of the pulse generation circuit 255 and the terminal of the device under test 10, and feeds back the voltage at this connection point to the measurement circuit 370. This connection point may be provided near the output end of the pulse generation circuit 255 within the test signal generator 330. Alternatively, this connection point may be provided outside the test signal generator 330 within the test circuit 320, or may be provided outside the test circuit 320, for example, near the terminal of the device under test 10. The force line L1 may be provided with a resistor 290 having a function and configuration similar to that of the resistor 290 shown in FIG. 2.

[0047] The measurement circuit 370 adjusts the voltage or current supplied to the device under test 10 to a test voltage or test current in a parametric test (such as a voltage application current measurement test or a current application voltage measurement test) of the device under test 10, and performs the parametric test using the test voltage or test current. Adjusting the voltage or current supplied to the device under test 10 to a test voltage or test current may mean adjusting the voltage or current supplied to the device under test 10 so that the test voltage or test current is applied to the device under test 10.

[0048] The measurement circuit 370 according to this embodiment may share the voltage generation circuit 240 with the pulse generation circuit 255, and may adjust the test voltage or test current using the voltage supplied from the voltage generation circuit 240. As an example, in this embodiment, the measurement circuit 370 is configured to include the voltage generation circuit 240, and adjusts the output voltage generated from the voltage generation circuit 240 to supply the test voltage or test current to the device under test 10.

[0049] The measurement circuit 370 may receive power from the power supply unit 205 and may be controlled by the test control circuit 310. The measurement circuit 370 may differ depending on the type of parametric test it supports, but may further include various circuits, including at least one of a current generator that generates a current to be supplied to the device under test 10, a voltage meter that measures the voltage output by the device under test 10, a current meter that measures the current output by the device under test 10, and a frequency meter that measures the frequency of the signal output by the device under test 10, for example.

[0050] The measurement circuit 370 according to this embodiment may be capable of performing at least one of a voltage-sourced current measurement test or a current-sourced voltage measurement test as a parametric test. In a voltage-sourced current measurement test, the measurement circuit 370 generates an output voltage and performs a voltage-sourced current measurement test on the device under test 10 using the output voltage. The output voltage of the measurement circuit 370 is supplied to the terminals of the device under test 10 as a test voltage via the pulse generation circuit 255. In a current-sourced voltage measurement test, the measurement circuit 370 generates an output current and performs a current-sourced voltage measurement test on the device under test 10 using this output current. The output current of the measurement circuit 370 is supplied to the terminals of the device under test 10 as a test current via the pulse generation circuit 255. Here, the output current of the measurement circuit 370 may be a positive current, i.e., a current flowing from the measurement circuit 370 to the terminal of the device under test 10 (source current), or a negative current, i.e., a current flowing from the terminal of the device under test 10 to the measurement circuit 370 (sink current).

[0051] In a functional test, the voltage generation circuit 240 of the measurement circuit 370 generates, as an output voltage, a power supply voltage required by the pulse generation circuit 255. The voltage generation circuit 240 may supply, as an output voltage to the pulse generation circuit 255, a power supply voltage corresponding to the high-level voltage of a pulse signal to be supplied to a terminal of the device under test 10.

[0052] Here, the voltage generation circuit 240 in the measurement circuit 370 may be connected in series with the pulse generation circuit 255, and a first relay 360 may be provided between the voltage generation circuit 240 and the pulse generation circuit 255. The first relay 360 may be provided on the voltage generation circuit 240 side of the connection point with the force line L1 in the wiring between the voltage generation circuit 240 and the pulse generation circuit 255. The first relay 360 may be a mechanical relay or a semiconductor relay using a semiconductor switch or the like. When a functional test of the device under test 10 is performed, the first relay 360 is turned on by the test control circuit 310 or the like, and connects the voltage generation circuit 240 and the pulse generation circuit 255. In addition, the first relay 360 is turned off by the test control circuit 310 etc. when a parametric test (voltage application current measurement test or current application voltage measurement test, etc.) of the device under test 10 is performed by the measurement circuit 270, thereby disconnecting the voltage generation circuit 240 and the pulse generation circuit 255.

[0053] A second relay 380 may be provided between the measurement circuit 370 and the pulse generation circuit 255 and the voltage generation circuit 240. The second relay 380 may be provided on a force line L1 between the measurement circuit 370 and a connection point on the wiring between the pulse generation circuit 255 and the voltage generation circuit 240 that is closer to the pulse generation circuit 255 than the first relay 360. The second relay 380 may be a mechanical relay or a semiconductor relay using a semiconductor switch or the like. When a functional test of the device under test 10 is performed, the second relay 380 is turned off by the test control circuit 310 or the like to disconnect the measurement circuit 270 and the pulse generation circuit 255. When a parametric test of the device under test 10 is performed, the second relay 380 is turned on by the test control circuit 310 or the like to connect the measurement circuit 270 and the pulse generation circuit 255.

[0054] The pattern generator 245, timing generator 250, and pulse generation circuit 255 have the same functions and configurations as the pattern generator 245, timing generator 250, and pulse generation circuit 255 shown in FIG. 2. In a functional test of the device under test 10, the pulse generation circuit 255 generates a pulse signal using the output voltage of the measurement circuit 370 and supplies the generated pulse signal to the terminal of the device under test 10. In a voltage source current measurement test, the pulse generation circuit 255 passes the output voltage of the measurement circuit 370 and supplies the passed output voltage as a test voltage to the terminal of the device under test 10. In a current source voltage measurement test, the pulse generation circuit 255 passes the output current of the measurement circuit 370 and supplies the passed output current as a test current to the terminal of the device under test 10. Note that the test circuit 320 may use any circuit other than the pattern generator 245 and timing generator 250 to generate a pulse signal using the pulse generation circuit 255.

[0055] Since the pulse generation circuit 255 has the function of outputting a digital signal or a multi-level signal during a functional test, it passes the output voltage supplied from the measurement circuit 370 through at least one resistor or switching element in the pulse generation circuit 255 for at least one signal value (e.g., a high level for a digital signal or a maximum value for a multi-level signal), and outputs the passed output voltage to a terminal of the device under test 10. The control device 170, the test control circuit 310, the pattern generator 245, the timing generator 250, etc., control the pulse generation circuit 255 to always output such a signal value during a parametric test, thereby connecting the input terminal and output terminal of the pulse generation circuit 255 through at least one resistor or switching element, and can supply the output voltage or output current of the measurement circuit 370 as a test voltage or test current to the device under test 10 via the pulse generation circuit 255.

[0056] Here, the pulse generation circuit 255 according to this embodiment and the terminal Py of the device under test 10 may be electrically and fixedly connected. Being electrically and fixedly connected may mean that they are electrically connected and the connection state is maintained fixedly. Therefore, a relay for interrupting the connection, such as a relay for switching between a functional test and a voltage application / current measurement test or a current application / voltage measurement test (e.g., the relay 260 in FIG. 2 ), may not be interposed between the pulse generation circuit 255 and the terminal Py.

[0057] At least the measurement circuit 370 and the pulse generation circuit 255 in the above-described test circuit 320 may be provided on a common board. As an example, in this embodiment, each unit in the test signal generator 330 may be provided on a common board and may be realized by a single ASIC.

[0058] According to the pin electronics device 300 described above, the measurement circuit 370, which performs a parametric test by adjusting the voltage or current supplied to the device under test 10 to a test voltage or test current, is connected between the voltage generation circuit 240 and the pulse generation circuit 255, which generates a pulse signal using the output voltage from the voltage generation circuit 240 and supplies it to the device under test 10 during a functional test. Therefore, whether to perform a functional test or a parametric test on the device under test 10 can be switched by switching between the voltage generation circuit 240 and the pulse generation circuit 255, that is, in an area where high-speed pulse signals do not pass. Therefore, unlike when switching is performed by switching in an area where pulse signals pass, it is possible to prevent the relay terminals from acting as capacitance and impeding transmission of high-speed signals, thereby improving the accuracy of the functional test.

[0059] Furthermore, the terminal Py for the device under test 10 is electrically and fixedly connected to the pulse generating circuit 255. Therefore, there is no relay between the terminal Py and the pulse generating circuit 255, and therefore it is possible to reliably prevent the terminal of the relay from acting as capacitance to a high-speed signal and impeding the transmission of the pulse signal.

[0060] Furthermore, since the first relay 360 is provided between the voltage generating circuit 240 and the pulse generating circuit 255, by switching the first relay 360, it is possible to switch whether or not to perform a functional test.

[0061] In addition, a second relay 380 is provided between the pulse generating circuit 255 and the voltage generating circuit 240 and the measuring circuit 370, so that by switching the second relay 380, it is possible to determine whether or not to perform a parametric test.

[0062] Furthermore, a measurement circuit 370 is connected between the voltage generation circuit 240 and the pulse generation circuit 255 and between the pulse generation circuit 255 and the device under test 10 via a force line L1 for applying a voltage or current to the device under test 10 and a sense line L2 for measuring the voltage of the device under test 10. Therefore, a parametric test can be performed by applying a voltage or current to the device under test 10 from the force line L1 and measuring it via the sense line L2.

[0063] Furthermore, a sense line L2 for measuring the voltage of the device under test 10 is connected between the measurement circuit 370 and the pulse generation circuit 255 and the device under test 10. Therefore, unlike when the sense line L2 is connected between the voltage generation circuit 240 and the pulse generation circuit 255, the measured voltage is prevented from fluctuating due to the resistance component of the pulse generation circuit 255. Therefore, the voltage of the device under test 10 can be accurately measured.

[0064] Furthermore, since the voltage generating circuit 240 and the pulse generating circuit 255 are connected in series, the structure can be simplified and the test circuit 320 can be made smaller than when the voltage generating circuit 240 and the pulse generating circuit 255 are connected in parallel.

[0065] Furthermore, since the voltage generating circuit 240, the pulse generating circuit 255, and the measuring circuit 370 are provided on a common substrate, the test circuit 320 can be made smaller than when they are provided on separate substrates.

[0066] Furthermore, since the measurement circuit 370 adjusts the test voltage or test current using the voltage supplied from the voltage generation circuit 240, the test circuit 320 can be made smaller than when a power supply unit 0 for the measurement circuit 370 is provided separately from the voltage generation circuit 240.

[0067] Fig. 4 shows an operation flow of a functional test of a device under test 10 by the test apparatus 1 according to this embodiment, focusing on the operation of the pin electronics device 300 in Fig. 3. Before starting this operation flow, the test apparatus 1 electrically connects one or more pin electronics devices 300 to the device under test 10 via the connection apparatus 120.

[0068] In step S400, under the control of the test control circuit 310, the voltage generation circuit 240 of the measurement circuit 370 generates, as an output voltage, a power supply voltage for pulse generation required by the pulse generation circuit 255 during a functional test. During a functional test, the measurement circuit 370 may adjust the output voltage using a voltage fed back from the force line L1. For example, the measurement circuit 370 compares the feedback voltage fed back from the force line L1 with a target output voltage, and increases the output voltage if the feedback voltage is lower than the target output voltage, and decreases the output voltage if the feedback voltage is higher than the target output voltage. This allows the measurement circuit 370 to adjust the output voltage so that it approaches the target output voltage. Note that the measurement circuit 370 may also perform feedback and adjustment of the output voltage internally.

[0069] In S410, the pattern generator 245 generates a test pattern for each test cycle under the control of the test control circuit 310. In S420, the timing generator 250 generates the timing of a pulse signal according to the test pattern for each test cycle under the control of the test control circuit 310. In S260, the pulse generation circuit 255 uses the output voltage of the voltage generation circuit 240 in the measurement circuit 370 to generate a pulse signal according to the timing from the timing generator 250 for each test cycle, and supplies this generated pulse signal to the terminal of the device under test 10. The pin electronics device 300 may receive a response signal output by the device under test 10 in response to the test signal and judge the pass / fail of the device under test 10.

[0070] According to the pin electronics device 300 described above, the power supply voltage required by the pulse generation circuit 255 in the functional test can be supplied using the voltage generation circuit 240 in the measurement circuit 370 used in the parametric test of the device under test 10. Furthermore, the measurement circuit 370 can adjust the output voltage using the feedback voltage from the force line L1, thereby reducing the error with respect to the target output voltage.

[0071] 5 shows an operation flow of a voltage application / current measurement test of a device under test 10 by the test apparatus 1 according to this embodiment, focusing on the operation of the pin electronics device 300 in Fig. 3. Before starting this operation flow, the test apparatus 1 electrically connects one or more pin electronics devices 300 to the device under test 10 via the connection apparatus 120.

[0072] In S500, the voltage generation circuit 240 of the measurement circuit 370 adjusts the voltage supplied to the device under test 10 to a test voltage. As an example, the voltage generation circuit 240 of the measurement circuit 370 may generate an output voltage for a voltage application current measurement test taking into account a voltage drop caused by the pulse generation circuit 255, etc. As a result, the output voltage from the voltage generation circuit 240 passes through the pulse generation circuit 255 to become a test voltage, which is then supplied to the device under test 10.

[0073] In S520, the measurement circuit 370 adjusts the output voltage using the test voltage fed back from the sense line L2. For example, the measurement circuit 370 compares the test voltage fed back from the sense line L2 with a target test voltage, and increases the output voltage if the fed back test voltage is lower than the target test voltage, and decreases the output voltage if the fed back test voltage is higher than the target test voltage. In this way, in a configuration in which a test voltage is supplied to a terminal of the device under test 10 via the pulse generation circuit 255, the measurement circuit 370 can adjust the test voltage at the output end of the pulse generation circuit 255 so that it approaches the target value, even if there is a resistor between the input end and output end of the pulse generation circuit 255.

[0074] In S530, the measurement circuit 370 measures the current flowing through the terminal of the DUT 10 while a test voltage is being supplied to the terminal of the DUT 10. The measurement circuit 370 according to this embodiment measures the current flowing through the terminal of the DUT 10 using a resistor connected between the input and output terminals of the pulse generation circuit 255 as a sense resistor. In this case, the measurement circuit 370 measures the current flowing through the terminal of the DUT 10 using the potential difference between the force line L1 and the sense line L2. For example, when the output voltage of the measurement circuit 370 is passed from the input terminal to the output terminal, the internal resistance of the pulse generation circuit 255 is R, the voltage at the input terminal of the pulse generation circuit 255 measured using the force line L1 is Vi, and the voltage at the output terminal of the pulse generation circuit 255 measured using the sense line L2 is Vo. The current flowing through the terminal of the DUT 10 is substantially the same as the current flowing through the pulse generation circuit 255 and is calculated by dividing the potential difference (Vi - Vo) between the force line L1 and the sense line L2 by the internal resistance R. This allows a voltage application current measurement test to be performed using the test voltage.

[0075] The pin electronics device 300 described above allows a voltage application and current measurement test of the device under test 10 to be performed via the pulse generation circuit 255 used for functional testing of the device under test 10. The measurement circuit 370 can measure the test voltage at the output terminal side of the pulse generation circuit 255 and adjust the output voltage. The measurement circuit 370 can also calculate the current flowing through the terminals of the device under test 10 by using the internal resistance of the pulse generation circuit 255.

[0076] 6 shows the operation flow of a current application and voltage measurement test of a device under test 10 by the test apparatus 1 according to this embodiment, focusing on the operation of the pin electronics device 300. Before starting this operation flow, the test apparatus 1 electrically connects one or more pin electronics devices 300 to the device under test 10 via the connection apparatus 120.

[0077] In S600, the measurement circuit 370 adjusts the current supplied to the device under test 10 to a test current. As an example, the measurement circuit 370 may generate the test current as an output current, or may generate an output voltage for a current application voltage measurement test by taking into account current flowing to destinations other than the device under test 10 due to shunt current. As a result, the output current from the measurement circuit 370 becomes a test current and is supplied to the terminals of the device under test 10. The test current may be either a positive current or a negative current depending on the test content. In S610, the pulse generation circuit 255 passes the output current of the measurement circuit input from the measurement circuit 370 and supplies this passed output current to the terminals of the device under test 10 as a test current.

[0078] In S620, the measurement circuit 370 measures the voltage fed back from the sense line L2. The measurement circuit 370 may use the measured voltage to measure or calculate the voltage at the terminal of the device under test 10. For example, if the wiring resistance from the connection point of the sense line L2 in the wiring from the output terminal of the pulse generation circuit 255 to the terminal of the device under test 10 to the terminal of the device under test 10 can be ignored, the measurement circuit 370 may measure the voltage fed back from the sense line L2 as the voltage at the terminal of the device under test 10. If the wiring resistance from the connection point of the sense line L2 in the wiring from the output terminal of the pulse generation circuit 255 to the terminal of the device under test 10 to the terminal of the device under test 10 is taken into consideration, the measurement circuit 370 may calculate the voltage at the terminal of the device under test 10 by adding to the measured voltage the voltage drop (in the case of a positive current) or voltage rise (in the case of a negative current) caused by the test current flowing through a known wiring resistance. In this way, a current application voltage measurement test is performed using the test current.

[0079] According to the pin electronics device 300 described above, a current application and voltage measurement test of the device under test 10 can be performed via the pulse generation circuit 255 used for a functional test of the device under test 10. The measurement circuit 370 can measure the voltage of the terminal of the device under test 10 on the output end side of the pulse generation circuit 255.

[0080] 5, the measurement circuit 370 may measure the current flowing through the terminal of the device under test 10 using the potential difference between the force line L1 and the sense line L2, and adjust the test current using the measured current. For example, the measurement circuit 370 compares the measured current with a target test current, and increases the output current if the measured current is smaller than the target test current, and decreases the output current if the measured current is larger than the target test current. In this way, the measurement circuit 370 can adjust the test current so that it approaches the target value in a configuration in which the test current is supplied to the terminal of the device under test 10 via the pulse generation circuit 255.

[0081] 7 shows the configuration of a pin electronics device 400 according to a modified example. The pin electronics device 400 is a modified example of the pin electronics device 300. The test apparatus 1 may include the pin electronics device 400 instead of the pin electronics device 200. The pin electronics device 400 has a power supply unit 205, a test circuit 420, and a test control circuit 310. In this figure, components with the same reference numerals as those in FIGS. 2 and 3 have the same functions and configurations as those in FIGS. 2 and 3, and therefore will not be described below except for the differences.

[0082] The test circuit 420 is connected to the device under test 10 via the connection apparatus 120, and tests the device under test 10 by receiving power from the power supply unit 205. This diagram representatively shows a circuit portion of the test circuit 420 that corresponds to one terminal of the device under test 10. The test circuit 420 may be connected to multiple terminals and may have circuit portions corresponding to each of the terminals.

[0083] The test circuit 420 includes a test signal generator 430 and a measurement circuit 470. The test signal generator 430 according to this modification receives power from the power supply unit 205 and is controlled by the test control circuit 310, and performs a functional test of the device under test 10. The test signal generator 430 includes a voltage generation circuit 240, a pattern generator 245, a timing generator 250, and a pulse generation circuit 255, which are similar to those shown in FIG.

[0084] The measurement circuit 470 is connected at least between the voltage generation circuit 240 and the pulse generation circuit 255. The measurement circuit 470 may be connected between the voltage generation circuit 240 and the pulse generation circuit 255, and between the pulse generation circuit 255 and the device under test 10. In this modification, as an example, the measurement circuit 470 is connected between the voltage generation circuit 240 and the pulse generation circuit 255, and between the pulse generation circuit 255 and the device under test 10, via a force line L1 for supplying a voltage or current to the device under test 10 and a sense line L2 for measuring the voltage of the device under test 10.

[0085] Force line L1 may be connected between measurement circuit 470 and voltage generation circuit 240 and pulse generation circuit 255. Force line L1 may function as an input terminal feedback line that feeds back the voltage on the input terminal side of pulse generation circuit 255 to measurement circuit 370. In this case, measurement circuit 370 may adjust its output voltage using the voltage fed back from the force line during a functional test. Note that force line L1 may be provided with a resistor similar to resistor 290 shown in FIG. 2.

[0086] The sense line L2 may be connected between the measurement circuit 470 and the pulse generation circuit 255 and the device under test 10. The sense line L2 may have a function similar to that of the voltage sense line shown in FIG. 2 , and is connected to a connection point on the wiring between the output end of the pulse generation circuit 255 and the terminal of the device under test 10, and feeds back the voltage at this connection point to the measurement circuit 370. This connection point may be provided near the output end of the pulse generation circuit 255 within the test signal generator 330. Alternatively, this connection point may be provided outside the test signal generator 330 within the test circuit 320, or may be provided outside the test circuit 320, for example, near the terminal of the device under test 10. The force line L1 may be provided with a resistor 290 having a function and configuration similar to that of the resistor 290 shown in FIG. 2.

[0087] The measurement circuit 470 adjusts the voltage or current supplied to the device under test 10 to a test voltage or test current during a parametric test (such as a voltage application current measurement test or a current application voltage measurement test) of the device under test 10, and performs the parametric test using the test voltage or test current.

[0088] The measurement circuit 470 according to this modification may have a voltage supply unit and a current supply unit (not shown) for generating the voltage and current to be supplied to the device under test 10, and adjusts the output voltage and output current generated by these voltage supply unit and current supply unit to supply a test voltage or test current to the device under test 10.

[0089] The measurement circuit 470 may receive power from the power supply unit 205 and may be controlled by the test control circuit 310. The measurement circuit 470 may differ depending on the type of parametric test it supports, but may further include various circuits, including at least one of a voltage meter that measures the voltage output by the device under test 10, a current meter that measures the current output by the device under test 10, and a frequency meter that measures the frequency of the signal output by the device under test 10, for example.

[0090] The measurement circuit 470 according to this modification may be capable of performing at least one of a voltage-sourced current measurement test or a current-sourced voltage measurement test as a parametric test. In a voltage-sourced current measurement test, the measurement circuit 470 generates an output voltage and performs a voltage-sourced current measurement test on the device under test 10 using the output voltage. The output voltage of the measurement circuit 470 is supplied to the terminals of the device under test 10 as a test voltage via the pulse generation circuit 255. In a current-sourced voltage measurement test, the measurement circuit 470 generates an output current and performs a current-sourced voltage measurement test on the device under test 10 using the output current. The output current of the measurement circuit 470 is supplied to the terminals of the device under test 10 as a test current via the pulse generation circuit 255. Here, the output current of the measurement circuit 470 may be a positive current, i.e., a current flowing from the measurement circuit 470 to the terminal of the device under test 10 (source current), or a negative current, i.e., a current flowing from the terminal of the device under test 10 to the measurement circuit 470 (sink current).

[0091] Here, in this modification, the voltage generation circuit 240 may be connected in series with the pulse generation circuit 255, and a first relay 360 may be provided between the voltage generation circuit 240 and the pulse generation circuit 255. The first relay 360 may be provided on the voltage generation circuit 240 side of the connection point with the force line L1 in the wiring between the voltage generation circuit 240 and the pulse generation circuit 255. The first relay 360 may be a mechanical relay or a semiconductor relay using a semiconductor switch or the like. When a functional test of the device under test 10 is performed, the first relay 360 is turned on by the test control circuit 310 or the like to connect the voltage generation circuit 240 and the pulse generation circuit 255. Furthermore, when a parametric test (such as a voltage application current measurement test or a current application voltage measurement test) of the device under test 10 is performed by the measurement circuit 270, the first relay 360 is turned off by the test control circuit 310 or the like to disconnect the voltage generation circuit 240 and the pulse generation circuit 255.

[0092] A second relay 380 may be provided between the measurement circuit 470 and the pulse generation circuit 255 and the voltage generation circuit 240. The second relay 380 may be provided on a force line L1 between the measurement circuit 470 and a connection point on the wiring between the pulse generation circuit 255 and the voltage generation circuit 240 that is closer to the pulse generation circuit 255 than the first relay 360. The second relay 380 may be a mechanical relay or a semiconductor relay using a semiconductor switch or the like. When a functional test of the device under test 10 is performed, the second relay 380 is turned off by the test control circuit 310 or the like to disconnect the measurement circuit 270 and the pulse generation circuit 255. When a parametric test of the device under test 10 is performed, the second relay 380 is turned on by the test control circuit 310 or the like to connect the measurement circuit 270 and the pulse generation circuit 255.

[0093] The pulse generating circuit 255 and the terminal Py for the device under test 10 may be electrically and fixedly connected. Therefore, a relay for interrupting the connection, such as a relay for switching between a functional test and a voltage application / current measurement test or a current application / voltage measurement test (for example, the relay 260 in FIG. 2 ), may not be required between the pulse generating circuit 255 and the terminal Py.

[0094] At least the measurement circuit 470 and the pulse generation circuit 255 in the above-described test circuit 420 may be provided on a common substrate. In this modification, as an example, each unit in the test signal generator 330 and the measurement circuit 470 may be provided on a common substrate and may be realized by a single ASIC.

[0095] The test apparatus 1 according to the above-described modified example may perform a functional test and a parametric test in the same manner as the test apparatus 1 according to the embodiment.

[0096] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various modifications and improvements can be made to the above embodiments. It is clear from the claims that such modifications and improvements can also be included within the technical scope of the present invention.

[0097] It should be noted that the execution order of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not specifically stated as "before," "prior to," etc., and that the processes can be performed in any order unless the output of a previous process is used in a subsequent process. Even if the operational flow in the claims, specifications, and drawings is described using "first," "next," etc. for convenience, this does not mean that the processes must be performed in this order. [Explanation of symbols]

[0098] 1 Test equipment 2 Line L 10 Device under test 100 test heads 110 pin electronics device 120 Connection Device 150 Mainframe 160 Main power supply 170 Control device 200 pin electronics device 205 Power Supply Unit 210 Test control circuit 220 Test Circuit 230 Test Signal Generator 240 Voltage Generation Circuit 245 Pattern Generator 250 Timing Generator 255 pulse generator circuit 260 Relay 270 Measurement circuit 280 Relay 290 Resistance 300 pin electronics device 310 Test control circuit 320 Test Circuit 330 Test Signal Generator 360 Relay 370 measurement circuit 380 Relay 400 pin electronics device 420 Test Circuit 430 Test Signal Generator 470 Measurement circuit L1 First Line (Force Line) L2 Second line (sense line)

Claims

1. a voltage supply unit that generates an output voltage; a pulse generating section that generates a pulse signal using the output voltage from the voltage supply section and supplies the pulse signal to the device under test during a functional test of the device under test; a measurement circuit that adjusts a voltage or current supplied to a device under test to a test voltage or test current in a voltage application current measurement test or a current application voltage measurement test of a device under test, and performs the voltage application current measurement test or the current application voltage measurement test using the test voltage or the test current; Equipped with The measurement circuit is connected at least between the voltage supply unit and the pulse generation unit.

2. further comprising a connection terminal for a device under test; 2. The test circuit according to claim 1, wherein the pulse generating section and the connection terminal are electrically and fixedly connected to each other.

3. 2. The test circuit according to claim 1, further comprising a first relay provided between the voltage supply unit and the pulse generating unit.

4. 2. The test circuit according to claim 1, further comprising a second relay provided between the pulse generating section and the voltage supply section and the measurement circuit.

5. 2. The test circuit according to claim 1, wherein the measurement circuit is connected between the voltage supply section and the pulse generating section, and between the pulse generating section and the device under test via a first line for supplying a voltage or current to the device under test and a second line for measuring the voltage of the device under test.

6. 6. The test circuit according to claim 5, wherein the second line is connected between the pulse generating section and the device under test and to the measuring circuit.

7. 2. The test circuit of claim 1, wherein the voltage supply section and the pulse generator section are connected in series.

8. 2. The test circuit according to claim 1, wherein the voltage supply section, the pulse generation section, and the measurement circuit are provided on a common substrate.

9. The test circuit according to claim 1 , wherein the measurement circuit adjusts the test voltage or the test current using the voltage supplied from the voltage supply unit.

10. A test device comprising the test circuit according to any one of claims 1 to 9.

11. a pulse generating circuit generating a pulse signal using an output voltage from a voltage supply unit during a functional test of the device under test and supplying the pulse signal to the device under test; a measurement circuit connected at least between the voltage supply unit and the pulse generation circuit adjusts the voltage or current supplied to the device under test in a voltage application current measurement test or a current application voltage measurement test of the device under test to a test voltage or test current, and performs the voltage application current measurement test or the current application voltage measurement test using the test voltage or the test current; A test method comprising:

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