Fluid Control Device

Abstract

A fluid control device is provided in which an opening through which a terminal is inserted is more reliably filled with adhesive. [Solution] The fluid control device includes a housing (30), a top surface member, an actuator, and an adhesive. The adhesive bonds the housing (30), the top surface member, and the connection terminals together at an opening (341). The side walls (31) of the housing (30) protrude from the upper surface on which the connection terminals are placed toward the top surface member, are arranged on both sides of the opening (341) in the width direction, and include first wall portions (3111) with which the adhesive comes into contact.

Description

[Technical Field]

[0001] The present invention relates to a fluid control device including an actuator and a housing. [Background technology]

[0002] Patent Document 1 describes a pump. The pump described in Patent Document 1 includes a drive unit having a piezoelectric element, a housing, and an upper case. The drive unit is housed in the housing. The upper case covers an opening of the housing. As a result, the drive unit is disposed in a space surrounded by the upper case and the housing.

[0003] A terminal block is formed on the exterior of the housing, and an opening is formed in the side wall of the housing at a portion where the terminal block is connected.

[0004] A plate-shaped terminal connected to the drive unit passes through the opening, protrudes to the outside of the housing, and is placed on a terminal block. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] International Publication No. 2019 / 124060 Summary of the Invention [Problem to be solved by the invention]

[0006] The pump uses an adhesive to bond the housing, the upper case, and the terminals together and to improve the sealing of the space enclosed by the housing and the upper case.

[0007] The adhesive is applied in a fluid state, and is then cured to bond the housing, the upper case, and the terminals together, thereby sealing the openings through which the terminals pass.

[0008] However, it is difficult to fill the entire opening through which the terminal is inserted with adhesive.

[0009] SUMMARY OF THE INVENTION It is therefore an object of the present invention to more reliably fill with adhesive the opening through which the terminal passes. [Means for solving the problem]

[0010] A fluid control device according to one embodiment of the present invention includes a housing, a top member, an actuator, and an adhesive. The housing includes a bottom wall, an annular side wall extending from the bottom wall, a mounting portion formed by a portion of the side wall protruding from the outer surface, and an opening formed in the side wall at a location where the mounting portion connects and penetrating the side wall in the thickness direction. The top member is connected to the side wall and is disposed spaced apart from the bottom wall. The actuator is disposed between the bottom wall and the top member, and a connection terminal is inserted through the opening and disposed on the mounting portion. The adhesive bonds the housing, the top member, and the connection terminal together at the opening.

[0011] The side walls of the housing protrude from the upper surface on which the connection terminals are placed toward the top surface member, are arranged on both sides of the opening in the width direction, and include first wall portions that come into contact with the adhesive.

[0012] In this configuration, when adhesive is applied to the upper surface of the bottom wall and the connection terminal of the actuator is placed on it, the first wall portion prevents the adhesive from flowing. [Effects of the Invention]

[0013] According to this invention, the openings through which the terminals are inserted can be filled with adhesive more reliably. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 1 is an exploded perspective view of a fluid control device according to an embodiment. [Figure 2] FIG. 2(A) is a partially exploded perspective view of a fluid control device according to an embodiment, and FIG. 2(B) is a perspective view of the appearance of the fluid control device according to an embodiment. [Figure 3] FIG. 3 is an external perspective view of the housing according to the embodiment. [Figure 4] FIG. 4 is an enlarged perspective view of the mounting portion of the housing according to the embodiment. [Figure 5] FIG. 5(A) is an enlarged plan view of a portion including a mounting portion of a housing according to the embodiment, and FIG. 5(B) is an enlarged side view of a portion including a mounting portion of a housing according to the embodiment. [Figure 6] FIG. 6(A) is a partially enlarged perspective view of the top surface member according to the embodiment, and FIG. 6(B) is a partially enlarged side view of the top surface member according to the embodiment. [Figure 7] FIG. 7 is an enlarged side view showing the adhesive structure of the housing, the connection terminal, and the top surface member according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0015] A fluid control device according to an embodiment of the present invention will be described with reference to the drawings.

[0016] Fig. 1 is an exploded perspective view of a fluid control device according to an embodiment. Fig. 2(A) is a partially exploded perspective view of a fluid control device according to an embodiment. Fig. 2(B) is an external perspective view of the fluid control device according to an embodiment.

[0017] As shown in FIGS. 1, 2(A) and 2(B), the fluid control device 10 includes an actuator 20, a housing 30 and a top surface member 40.

[0018] The housing 30 includes a bottom wall 300, a side wall 31, a top surface member support portion 38, a nozzle 321, a nozzle 322, and a mounting portion 33. The bottom wall 300, the side wall 31, the nozzle 321, the nozzle 322, and the mounting portion 33 are integrally molded from, for example, an insulating resin.

[0019] The bottom wall 300 is a plate-like wall with a predetermined thickness, and has a circular recess in the center in a plan view.

[0020] The side wall 31 is generally annular and follows the outer periphery of the bottom wall 300, and stands at a predetermined height from the bottom wall 300. The space surrounded by the bottom wall 300, the side wall 31, and the top surface member 40 defines an internal space 310 of the housing 30.

[0021] A nozzle 321, a nozzle 322, and a mounting portion 33 are connected to the outer wall surface of the side wall 31.

[0022] Nozzle 321 and nozzle 322 have through holes. The through hole of nozzle 321 communicates with internal space 310 of housing 30 through a recess in bottom wall 300. The through hole of nozzle 322 passes through internal space 310.

[0023] The mounting portion 33 has a generally rectangular parallelepiped shape, with the side wall 31 partially protruding from the outer surface Fo31. The top surface of the mounting portion 33 is lower than the top end of the side wall 31.

[0024] The top surface of the mounting portion 33 has a first top surface Fu1 and a second top surface Fu2 that are located at different heights. The first top surface Fu1 is located at a lower position than the second top surface Fu2.

[0025] The portion of the mounting portion 33 having the first upper surface Fu1 corresponds to the "first mounting portion" of the present invention, and the portion of the mounting portion 33 having the second upper surface Fu2 corresponds to the "second mounting portion" of the present invention.

[0026] Openings 341 and 342 are formed in the side wall 31 at locations where the mounting portion 33 is connected. The openings 341 and 342 penetrate the side wall 31 in the thickness direction. More specifically, the opening 341 is formed in a portion of the side wall 31 where the first upper surface Fu1 comes into contact. The opening 342 is formed in a portion of the side wall 31 where the second upper surface Fu2 comes into contact.

[0027] The top surface member support portion 38 is annular in plan view, and is disposed along the inner surface of the side wall 31. The top surface of the top surface member support portion 38 is disposed at a position higher than the top surface of the bottom wall 300 and lower than the upper end of the side wall 31.

[0028] The top surface member 40 includes a frame body 41 and a flat plate 42. The frame body 41 is attached to the flat plate 42 so as to surround the outer periphery of the flat plate 42. The frame body 41 is made of, for example, an insulating resin, and the flat plate 42 is made of a metal.

[0029] The top surface member 40 is attached to the housing 30 by connecting it along the inner peripheral edge of the side wall 31 of the housing 30 and placing it on the top surface member support part 38. With this configuration, the top surface member 40 is placed at a position separated from the bottom wall 300. As a result, the internal space 310 is a space surrounded by the top surface member 40 and the housing 30.

[0030] The actuator 20 includes a first flat plate 21, a piezoelectric element 22, a second flat plate 23, a frame 24, an auxiliary plate 25, a valve membrane 26, and a valve membrane fixing member 260. The frame 24 includes a connection terminal 249.

[0031] The first flat plate 21 is made of metal. The first flat plate 21 includes a main flat plate 211, a frame body 212, and a plurality of connecting members 213. The main flat plate 211 is a flat plate that has a circular shape in a plan view (shape when viewed in the thickness direction). The main flat plate 211 includes a central portion and a peripheral portion. The peripheral portion is disposed along the outer edge of the central portion. The thickness of the central portion is greater than the thickness of the peripheral portion. Note that the main flat plate may have a uniform thickness throughout.

[0032] The frame body 212 is a flat plate, and is disposed outside the outer edge (the outer edge of the peripheral portion 2112) of the main flat plate 211. In a plan view, the frame body 212 surrounds the main flat plate 211.

[0033] The multiple connecting members 213 are beam-shaped. The multiple connecting members 213 are arranged between the main plate 211 and the frame body 212. The multiple connecting members 213 connect the outer edge of the main plate 211 and the inner edge of the frame body 212. The multiple connecting members 213 are arranged at intervals along the outer edge of the main plate 211.

[0034] The plurality of through holes 214 penetrate the main plate 211. The plurality of through holes 214 are arranged between the main plate 211 and the frame body 212. The plurality of through holes 214 are in the area between the main plate 211 and the frame body 212, in a portion surrounded by the main plate 211, the frame body 212, and the plurality of connecting members 213.

[0035] The piezoelectric element 22 includes a disk-shaped piezoelectric body and a pair of driving electrodes. One of the pair of driving electrodes is formed on one main surface of the piezoelectric body, and the other driving electrode is formed on the other main surface of the piezoelectric body.

[0036] The piezoelectric element 22 is placed on one main surface of the main plate 211 of the first plate 21. The piezoelectric element 22 is physically fixed to the main plate 211, and the driving electrode is electrically connected to the main plate 211.

[0037] The second flat plate 23 is made of metal and includes a main body portion 231 and a connection terminal 239. The main body portion 231 and the connection terminal 239 are, for example, integrally molded.

[0038] The main body portion 231 has a disk shape and is similar in shape to the piezoelectric element 22 in a plan view (viewed in the Z-axis direction in the drawing).

[0039] The main body part 231 is disposed so as to overlap the piezoelectric element 22. In this case, it is preferable that the center of the main body part 231 and the center of the piezoelectric element 22 substantially coincide with each other. This electrically connects the main body part 231 and the driving electrode of the piezoelectric element 22 (the driving electrode on the opposite side to the driving electrode connected to the first flat plate).

[0040] The connection terminal 239 is strip-shaped and extends outward from the outer edge of the main body portion 231. The connection terminal 239 protrudes outward beyond the outer circumferential end OL22 of the piezoelectric element 22 in plan view.

[0041] The frame 24 is made of metal. The frame 24 is mainly annular with a through hole 240, and further includes a connection terminal 249. The connection terminal 249 is integrally molded with the annular portion. The connection terminal 249 is strip-shaped and protrudes outward from the outer edge of the annular portion.

[0042] The annular portion of the frame body 24 has the same shape as the frame body 212 of the first flat plate 21. In a plan view, the annular portion of the frame body 24 overlaps with the frame body 212 of the first flat plate 21 and is physically and electrically connected to the frame body 212.

[0043] The auxiliary plate 25 is made of metal. The auxiliary plate 25 is a flat plate having a through-hole 250 of a predetermined size. The auxiliary plate 25 is physically and electrically connected to the frame body 24. The through-hole 250 of the auxiliary plate 25 and the through-hole 240 of the frame body 24 communicate with each other.

[0044] The valve membrane 26 is made of a highly flexible material. The valve membrane 26 is fixed to the first flat plate 21 using a valve membrane fixing member 260. In this case, the center of the valve membrane 26 and the center of the main flat plate 211 of the first flat plate 21 approximately coincide with each other in a plan view.

[0045] The actuator 20 having the above-described configuration is housed in the internal space 310 of the housing 30 as will be described below.

[0046] The actuator 20 is disposed so that the auxiliary plate 25 abuts against the upper surface of the bottom wall 300. The auxiliary plate 25 is adhered and fixed to the upper surface of the bottom wall 300 with an adhesive.

[0047] As a result, the main plate 211 of the first plate 21 of the actuator 20 is supported so as to be capable of bending vibration by the frame 212 and the plurality of connecting members 213. That is, the main plate 211 on which the piezoelectric element 22 is arranged is fixed to the housing 30 in a state in which the main plate 211 is capable of bending vibration.

[0048] Furthermore, with this structure, the actuator 20 divides the internal space 310 surrounded by the housing 30 and the top surface member 40 into an upper space on the top surface member 40 side and a lower space on the bottom wall 300 side. In this case, the upper space communicates with the through-hole of the nozzle 322. The lower space communicates with the through-hole of the nozzle 321. The upper and lower spaces communicate with each other via a plurality of through-holes 214 formed in the actuator 20.

[0049] The connection terminal 239 is inserted through an opening 342 in the side wall 31 of the housing 30 and drawn out to the outside of the side wall 31. A predetermined length of the tip of the connection terminal 239 is arranged on the second upper surface Fu2 of the mounting portion 33.

[0050] The connection terminal 249 is inserted through an opening 341 in the side wall 31 of the housing 30 and drawn out to the outside of the side wall 31. A predetermined length of the tip of the connection terminal 249 is arranged on the first upper surface Fu1 of the mounting portion 33.

[0051] When a drive signal is supplied to the actuator 20 via the connection terminal 239 and the connection terminal 249, the actuator 20 undergoes bending vibration. As a result, the fluid control device 10, for example, sucks in gas (fluid) from the nozzle 321 and discharges the gas (fluid) from the nozzle 322.

[0052] Specifically, the portions of the connection terminals 239 and 249 that protrude to the outside of the housing 30 have the following configuration.

[0053] (More specific configuration of the housing 30) Fig. 3 is an external perspective view of a housing according to an embodiment. Fig. 4 is an enlarged perspective view of a mounting portion of the housing according to an embodiment. Fig. 4 is a view seen from inside the housing. Fig. 5(A) is an enlarged plan view of a portion including the mounting portion of the housing according to an embodiment, and Fig. 5(B) is an enlarged side view of a portion including the mounting portion of the housing according to an embodiment. Fig. 5(B) is a view seen from outside the housing.

[0054] As shown in Figures 3, 4(A), 4(B), and 5, in the portion of the housing 30 where the mounting portion 33 is arranged, the first upper surface Fu1 extends further inward than the side wall 31 of the housing 30 (into the internal space 310).

[0055] The first upper surface Fu1 of the mounting portion 33 and the first upper surface Fu1 inside the side wall 31 have the same height and form a single plane. The first upper surface Fu1 of the mounting portion 33 and the first upper surface Fu1 inside the side wall 31 are connected through an opening 341.

[0056] The height of the first upper surface Fu1 on the inner side of the side wall 31 is lower than the upper surface of the top surface member support portion .

[0057] As shown in FIG. 5(A), the width W341 of the opening 341 (the length in the direction along the outer surface (circumferential surface) of the side wall 31) is narrower than the width WFui1 of the first upper surface Fu1 inside the side wall 31. As a result, the side wall 31 has a shape in which both ends of the opening 341 in the width direction protrude from both ends of the first upper surface Fu1 inside the side wall 31 toward the center. These protruding portions of the side wall 31 form first wall portions 3111, 3112. The first wall portion 3111 is a wall portion on the first upper surface Fu1 that is connected to the second wall portion 319, and the first wall portion 3112 is a wall portion on the step DL side (the second upper surface Fu2 side) of the first upper surface Fu.

[0058] Further, the height between the first upper surface Fu1 and the upper surface of the top surface member support portion 38 constitutes a second wall portion 319.

[0059] As shown in Figures 3, 4(A), 4(B), and 5, the second upper surface Fu2 in the portion of the housing 30 where the mounting portion 33 is arranged extends further inward than the side wall 31 of the housing 30 (into the internal space 310).

[0060] The second upper surface Fu2 of the mounting portion 33 and the second upper surface Fu2 inside the side wall 31 have the same height and form a single plane. The second upper surface Fu2 of the mounting portion 33 and the second upper surface Fu2 inside the side wall 31 are connected through an opening 342.

[0061] The height of the second upper surface Fu2 on the inner side of the side wall 31 is lower than the upper surface of the top surface member support portion .

[0062] The second upper surface Fu2 is higher than the first upper surface Fu1. Due to this difference in height, a step DL is formed between the first upper surface Fu1 and the second upper surface Fu2.

[0063] With this configuration, the housing 30 has first walls 3111, 3112, a second wall 319, and a step DL, each of which protrudes from the first top surface Fu1 toward the top surface member 40. The space on the first top surface Fu1 inside the side wall 31 is surrounded on three sides by the first walls 3111, 3112, the second wall 319, and the step DL, except for a portion that communicates with the opening 341. In other words, the first top surface Fu1 inside the side wall 31 is surrounded on three sides by the first walls 3111, 3112, the second wall 319, and the step DL, except for the opening 341, in a plan view.

[0064] (More specific configuration of the top surface member 40) FIG. 6(A) is a partially enlarged perspective view of the top surface member according to the embodiment, and FIG. 6(B) is a partially enlarged side view of the top surface member according to the embodiment.

[0065] As shown in FIGS. 6(A) and 6(B), the frame 41 of the top surface member 40 includes a main body 410, a first protruding portion 411, a second protruding portion 4121, a second protruding portion 4122, and a third protruding portion 413.

[0066] The main body 410 is annular, and has a constant thickness and width around the entire circumference.

[0067] The first protrusion 411 protrudes outward and downward from the main body 410. The first protrusion 411 has a predetermined length in the circumferential direction of the main body 410.

[0068] The amount by which first protrusion 411 protrudes outward is based on the thickness of first wall portions 3111 and 3112. The amount by which first protrusion 411 protrudes downward is based on the height of opening 341 and the thickness of connection terminal 249. The length of first protrusion 411 is based on width W341 of opening 341.

[0069] The second protruding portion 4121 is connected to one end in the width direction of the first protruding portion 411. The second protruding portion 4121 protrudes downward from the main body 410. The second protruding portion 4121 has a predetermined length in the circumferential direction of the main body 410.

[0070] The amount by which the second protrusion 4121 protrudes downward is based on the height of the first wall 3111. The length of the second protrusion 4121 is based on the amount by which the first wall 3111 protrudes from the second wall 319.

[0071] The second protruding portion 4122 is connected to the other end in the width direction of the first protruding portion 411. The second protruding portion 4122 protrudes downward relative to the main body 410. The second protruding portion 4122 has a predetermined length in the circumferential direction of the main body 410.

[0072] The downward protrusion amount of the second protrusion portion 4122 is based on the height of the first wall portion 3112. The length of the second protrusion portion 4122 is based on the protrusion amount of the first wall portion 3112 from the step DL.

[0073] The third protrusion 413 is disposed on the opposite side of the first protrusion 411 with the second protrusion 4122 interposed therebetween.

[0074] The third protrusion 413 protrudes outward and downward from the main body 410. The third protrusion 413 has a predetermined length in the circumferential direction of the main body 410.

[0075] The amount by which the third protrusion 413 protrudes outward is based on the thickness of the portions of the side wall 31 on both sides of the opening 342. The amount by which the third protrusion 413 protrudes downward is based on the height of the opening 342 and the thickness of the connection terminal 239. The length of the third protrusion 413 is based on the width of the opening 342.

[0076] (Adhesion configuration of the housing 30, the connection terminals 239, 249, and the top surface member 40) 7 is an enlarged side view showing the adhesive structure of the housing, the connection terminal, and the top surface member according to the embodiment, as viewed from outside the housing 30.

[0077] The connection terminal 249 passes through the opening 341, protrudes outward from the side wall 31 of the housing 30, and is disposed on the first upper surface Fu1 of the mounting portion 33. At this time, a portion of the connection terminal 249 that is more inward than the side wall 31 of the housing 30 is disposed on the first upper surface Fu1 inside the side wall 31.

[0078] The connection terminal 239 passes through the opening 342, protrudes outward from the side wall 31 of the housing 30, and is disposed on the second upper surface Fu2 of the mounting portion 33. At this time, a portion of the connection terminal 239 that is more inward than the side wall 31 of the housing 30 is disposed on the second upper surface Fu2 inside the side wall 31.

[0079] The first protrusion 411 of the top surface member 40 is inserted into the opening 341. The third protrusion 413 of the top surface member 40 is inserted into the opening 342.

[0080] The second protrusion 4121 is disposed on the first upper surface Fu1 inside the side wall 31, along the inner surface Fi31 (see FIG. 4) of the first wall 3111 on the side connected to the second wall 319 and the second wall 319. That is, the second protrusion 4121 fits into the recessed shape formed by the first wall 3111 and the second wall 319.

[0081] The second protrusion 4122 is disposed along the step DL and the inner surface Fi31 (see FIG. 4) of the first wall portion 3111 connected to the step DL, on the first upper surface Fu1 inside the side wall 31. That is, the second protrusion 4122 fits into the recessed shape formed by the first wall portion 3111 and the step DL.

[0082] In this configuration, the housing 30, the connection terminals 239, 249, and the top surface member 40 are bonded together with the adhesive ADH.

[0083] Specifically, through the following process, the housing 30, the connection terminals 239, 249, and the top surface member 40 are bonded together with the adhesive ADH.

[0084] First, adhesive ADH is applied to the upper surface of the top surface member support portion 38 of the housing 30, the inner portion of the side wall 31 on the first upper surface Fu1, and the inner portion of the side wall 31 on the second upper surface Fu2. Also, adhesive ADH is applied in a frame shape to the upper surface of the bottom wall 300. The adhesive ADH is, for example, an adhesive using a silicone-based material.

[0085] Next, the actuator 20 is placed on the upper surface of the bottom wall 300 of the housing 30. The adhesive ADH is applied to the connection terminals 239 and 249 of the actuator 20 on the inner side of the side wall 31.

[0086] Next, the top surface member 40 is placed on the top surface of the top surface member support portion 38 of the housing 30 .

[0087] The adhesive ADH is then cured.

[0088] The fluid control device 10 manufactured through these processes includes the first wall portion 3111 as described above, which can prevent undesired outflow of the adhesive ADH applied to the inner portion of the side wall 31 on the first upper surface Fu1. This allows the fluid control device 10 to more reliably fill the gaps between the housing 30, the connection terminal 249, and the top surface member 40 at the opening 341 with the adhesive ADH. Therefore, the fluid control device 10 can more reliably achieve the sealing of the internal space 310.

[0089] By providing the second wall portion 319, the fluid control device 10 can make it easier for the adhesive ADH applied to the inner portion of the side wall 31 on the first upper surface Fu1 to flow around to the upper side of the connection terminal 249. This allows the fluid control device 10 to more reliably fill the gaps between the housing 30, the connection terminal 249, and the top surface member 40 at the opening 341 with the adhesive ADH. Therefore, the fluid control device 10 can more reliably achieve the sealing of the internal space 310.

[0090] The fluid control device 10 is provided with the step DL, so that part of the adhesive ADH applied to the inner part of the side wall 31 on the second upper surface Fu2 flows down to the inner part of the side wall 31 on the first upper surface Fu1.

[0091] The first top surface Fu1 is farther from the main body 410 of the frame body 41 of the top surface member 40 than the second top surface Fu2. Therefore, a larger gap is more likely to occur in the opening 341 than in the opening 342. However, by supplying a portion of the adhesive ADH applied to the inner portion of the side wall 31 on the second top surface Fu2 to the inner portion of the side wall 31 on the first top surface Fu1, the gap in the opening 341 can be more reliably filled with the adhesive ADH. Therefore, the fluid control device 10 can more reliably achieve the hermetic sealing of the internal space 310.

[0092] The fluid control device 10 includes a first protrusion 411 on the top surface member 40 that fits into the opening 341. This makes it possible to reduce the gap at the opening 341, and to more reliably fill the gap at the opening 341 with the adhesive ADH.

[0093] The fluid control device 10 includes a third protrusion 413 on the top surface member 40 that fits into the opening 342. This makes it possible to reduce the gap at the opening 342, and to more reliably fill the gap at the opening 342 with the adhesive ADH.

[0094] The fluid control device 10 includes second protrusions 4121, 4122 on the top surface member 40 that fit along the first wall portion 3111 of the housing 30. This reduces the gap on the inner surface Fi31 side of the first wall portion 311. Therefore, the gap where the internal space 310 communicates with the outside through the opening 341 can be reduced, and the adhesive ADH can be more reliably filled into the gap.

[0095] In this embodiment, a configuration is adopted in which a first wall portion 3111 and a second wall portion 319 are provided on the opening 341 side, but as shown in Figure 4, a similar configuration is also adopted for opening 342, although it is lower in height.

[0096] This allows the fluid control device 10 to more reliably fill the gap at the opening 342 with the adhesive ADH. Therefore, the fluid control device 10 can more reliably achieve hermetic sealing of the internal space 310.

[0097] Furthermore, the viscosity of the adhesive ADH is preferably, for example, about 50 Pa·s. By setting the viscosity of the adhesive ADH at this level (medium viscosity), it is possible to achieve appropriate spreading into narrow gaps and ensure reliable filling of narrow gaps. However, for example, if the size of the gaps varies due to the structure of the fluid control device 10, a problem may arise in which the adhesive ADH cannot be reliably filled into large gaps. However, the fluid control device 10 can solve this problem by using an adhesive ADH with such viscosity and by having the above-mentioned configuration.

[0098] <1> a housing including a bottom wall, an annular side wall extending from the bottom wall, a mounting portion formed by a portion of the side wall protruding from an outer surface, and an opening formed in the side wall at a location where the mounting portion is connected, the opening penetrating the side wall in a thickness direction and having a predetermined width in a direction along the outer surface; a top surface member connected to the side wall and spaced apart from the bottom wall; an actuator disposed between the bottom wall and the top surface member, the actuator having a connection terminal inserted through the opening and disposed on the placement portion; an adhesive that bonds the housing, the top surface member, and the connection terminal in the opening; Equipped with The side walls of the housing protrude from the top surface on which the connection terminal is placed toward the top surface member, and are arranged on both sides of the opening in the width direction, and have first wall portions with which the adhesive comes into contact.

[0099] <2> The top surface member includes a first protrusion that fits into the opening and comes into contact with the adhesive. <1> The fluid control device according to claim 1.

[0100] <3> The placement section includes a first placement section and a second placement section adjacent to each other, the first placement portion and the bottom wall have a first upper surface as the upper surface, the second placement portion and the bottom wall have a second upper surface as the upper surface, the first upper surface is located lower than the second upper surface, The bottom wall has a step portion at a connection position between the first upper surface and the second upper surface. <1> or <2> The fluid control device according to claim 1.

[0101] <4> a second wall portion that protrudes from an upper surface of the bottom wall toward the top surface member, surrounds the upper surface on which the connection terminal is placed, and is connected to the first wall portion, on the inside of the side wall; <1> ~ <3> The fluid control device according to any one of the preceding claims.

[0102] <5> the top surface member includes a second protrusion that fits into a recess formed by the first wall portion and the second wall portion; <4> The fluid control device according to claim 1.

[0103] <6> the upper surface has a first portion of the placement portion and a second portion located inside the side wall, The first portion and the second portion have the same height, form a single plane, and are connected through the opening. <1> ~ <5> The fluid control device according to any one of the preceding claims. [Explanation of symbols]

[0104] 10: Fluid control device 20: Actuator 21: 1st plate 22: Piezoelectric element 23:Second plate 24:Frame body 25: Auxiliary board 26: Valve 38: Top surface component support part 30: Cabinet 31: Side wall 33: Placement section 38: Top surface component support part 40: Top surface material 41:Frame body 42: Flat plate 211: Main plate 212: Frame 213: Connecting member 214: Through hole 231: Main part 239: Connection terminal 240:Through hole 249: Connection terminal 250:Through hole 260: Valve fixing member 300: Bottom wall 310: Interior space 311: 1st wall part 319:Second wall 321, 322: Nozzle 341, 342: Opening 410: Subject 411:First protrusion 4121, 4122: Second protrusion 413: Third protrusion 2112: Periphery 3111, 3112: 1st wall part ADH: Adhesive DL: Step Fi31:Interior Fo31: External surface Fu1: 1st top surface Fu2: 2nd top surface OL22: Outer edge

Claims

1. a housing including a bottom wall, an annular side wall extending from the bottom wall, a mounting portion formed by a portion of the side wall protruding from an outer surface, and an opening formed in the side wall at a location where the mounting portion is connected, the opening penetrating the side wall in a thickness direction and having a predetermined width in a direction along the outer surface; a top surface member connected to the side wall and spaced apart from the bottom wall; an actuator disposed between the bottom wall and the top surface member, the actuator having a connection terminal inserted through the opening and disposed on the placement portion; an adhesive that bonds the housing, the top surface member, and the connection terminal in the opening; Equipped with the side walls of the housing include first wall portions that protrude from an upper surface on which the connection terminals are placed toward the top surface member, are disposed on both sides of the opening in the width direction, and come into contact with the adhesive; Fluid control device.

2. The top surface member includes a first protrusion with which the adhesive comes into contact. The fluid control device according to claim 1 .

3. the placement portion includes a first placement portion and a second placement portion adjacent to each other, the first placement portion and the bottom wall have a first upper surface as the upper surface, the second placement portion and the bottom wall have a second upper surface as the upper surface, the first upper surface is located lower than the second upper surface, a step portion at a connection position between the first upper surface and the second upper surface of the bottom wall; The fluid control device according to claim 1 .

4. a second wall portion that projects from an upper surface of the bottom wall toward the top surface member and is connected to the first wall portion in a shape that surrounds the upper surface on which the connection terminal is placed, the second wall portion being located inside the side wall; The fluid control device according to claim 1 .

5. the top surface member includes a second protrusion that fits into a recess formed by the first wall portion and the second wall portion; The fluid control device according to claim 4 .

6. the upper surface has a first portion of the placement portion and a second portion located inside the side wall, The first portion and the second portion have the same height, form one plane, and are connected through the opening. The fluid control device according to claim 1 .

Images