Processing system and processing method

Abstract

The object is to provide a processing system and a processing method that can track information related to the transport route used to transport an item. [Solution] The processing system 1 has an information providing unit A that provides identification information of the plates 21 (22, 23), a conveying path 20 including the plates 21 (22, 23) that are arranged above the processing device 10, a transport vehicle 30 that has a reading unit 35 that reads the identification information of the plates 21 (22, 23) and transports items to the processing device 10 by traveling on the conveying path 20, and a memory unit 42 that stores the identification information of the plates 21 (22, 23) read by the reading unit 35 from the information providing unit A.

Description

[Technical Field]

[0001] The present invention relates to a processing system and a processing method. [Background technology]

[0002] In recent years, automatic transport systems have been provided that automatically transport articles such as semiconductor wafers. The automatic transport systems described in Patent Documents 1 and 2 are composed of a transport path and a transport vehicle that travels on the transport path. The transport path connects multiple devices, and the transport vehicle travels on this transport path to transport articles between the devices. This allows the transport of articles to be performed fully automatically, minimizing human involvement in the transport process. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-130160 [Patent Document 2] Japanese Patent Publication No. 2020-178108 Summary of the Invention [Problem to be solved by the invention]

[0004] The above-mentioned conveying path is made of plates. If the plates used in the conveying path are not appropriate, there is a risk that the articles will be damaged during transportation. For this reason, users want to know whether the plates constituting the conveying path are appropriate.

[0005] The present invention has been made in view of the above, and an object of the present invention is to provide a processing system and a processing method that are capable of tracking information related to a transport path used to transport an item. [Means for solving the problem]

[0006] A processing system according to one embodiment of the present invention comprises: a transport path including the plate and positioned above the processing device, the transport path having an information providing unit that provides identification information of the plate; a transport vehicle having a reading unit that reads the identification information of the plate and that transports items to the processing device by traveling along the transport path; and a memory unit that stores the identification information of the plate read by the reading unit from the information providing unit.

[0007] A processing method according to one aspect of the present invention includes a reading step in which a reading unit of a transport vehicle reads identification information of a plate from an information providing unit of the plate; a storage step in which a storage unit stores the identification information of the plate read from the information providing unit; and a transport step in which the transport vehicle travels along a transport path including the plate positioned above the processing device, thereby transporting an item to the processing device. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a processing system and a processing method that are capable of tracing information about a transport route used to transport an item. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a perspective view showing the overall configuration of a processing system. [Figure 2] FIG. 2 is a top view showing a detailed configuration of a plate that constitutes a transport path. [Figure 3] FIG. 2 is a perspective view showing a detailed configuration of the transport vehicle. [Figure 4] FIG. 2 is a block diagram showing a control configuration of the processing system. [Figure 5] FIG. 2 is a top view illustrating the operation of the processing system according to the first embodiment. [Figure 6] FIG. 10 is a top view illustrating the operation of the processing system according to the second embodiment. [Figure 7] FIG. 10 is a top view illustrating the operation of the processing system according to the third embodiment. [Figure 8] FIG. 10 is a top view illustrating the operation of the processing system according to the fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] (First embodiment) The processing system of the first embodiment will be described below with reference to the accompanying drawings. The processing system 1 shown in FIG.

[0011] An article is transported to the processing apparatus 10. The article may be any of various processing objects P, such as semiconductor wafers, inorganic material substrates, and package substrates, that are to be processed by the processing apparatus 10. In the example of FIG. 1, the processing object P is handled in the form of a frame unit. The frame unit is formed by attaching the processing object P to a tape T that covers the opening of a ring frame R, integrating the tape T and the ring frame R. Note that the article may be anything that can be transported to the processing apparatus 10, regardless of whether it is to be processed by the processing apparatus 10. For example, the article may be a cutting blade used in the processing apparatus 10, consumables such as a grinding wheel or a dresser board, or maintenance parts such as cleaning parts or inspection supplies.

[0012] The processing device 10 may be any device that transports an article, and may be, for example, a cutting device that cuts the processing object P, a grinding device that grinds it, a polishing device that polishes it, a stocker that stores the processing object P, an inspection device that performs inspection, a tape mounter that applies tape T, a tape peeling device that peels off tape T, a cleaning device that cleans it, etc. In other words, the configuration of the processing device 10 can be changed as appropriate depending on the purpose of use of the processing system 1.

[0013] As shown in FIGS. 1 and 2(A) to 2(C), the transport path 20 includes plates 21 (22, 23), which are disposed above the processing devices 10. The plates 21 and 22, which are different in length, are linearly formed as shown in FIG. 2(A) and are connected by a connector (not shown). The plate 22 has an opening 221. The plate 23 connects adjacent plates 21 and serves as a relay between processing devices 10. As shown in FIGS. 2(B) and 2(C), the plate 23 is linearly formed or perpendicularly formed and is used appropriately depending on the arrangement of each processing device 10. Side walls 24 are provided on the outer edges of each of the plates 21, 22, and 23 thus formed. The side walls 24 prevent the transport vehicle 30 from falling off the plates 21, 22, and 23 even if the transport vehicle 30 is about to jump out of the plates 21, 22, and 23.

[0014] Furthermore, each of the boards 21, 22, and 23 has an information providing unit A. The information providing unit A is formed of an identifier such as a barcode (one-dimensional code), a QR code (registered trademark) (two-dimensional code), or an RFID. Each of the information providing units A provides identification information for each of the boards 21, 22, and 23. For example, the information providing unit A included in the board 21 provides the identification information for the board 21, the information providing unit A included in the board 22 provides the identification information for the board 22, and the information providing unit A included in the board 23 provides the identification information for the board 23.

[0015] The identification information of the boards 21, 22, and 23 may be any information that can distinguish and identify the type of board, and may include, for example, various information such as the model number, manufacturer, external shape, external dimensions, presence or absence of opening 221, and quality of the board 21 (22, 23).

[0016] The information providing section A may be any identifier that indicates the identification information of the board 21 (22, 23), but it is preferable to encrypt the information providing section A so that it can be read by a specific code reader or RFID scanner. The advantages of encrypting the information providing section A will be described later.

[0017] As shown in Fig. 3, the transport vehicle 30 has a rectangular parallelepiped body 31. A plurality of wheels 32 are provided on the sides of the body 31, at least two of which are driving wheels. A traveling motor is connected to the driving wheels 32. The traveling motor is driven, and power is transmitted to the driving wheels 32, causing the transport vehicle 30 to travel.

[0018] A recessed space is provided in the bottom surface of the vehicle body 31, and a storage section 33 is provided in this space. The storage section 33 is configured to be able to store the object to be treated P, and the object to be treated P is put in and taken out through an opening 331 provided in the side surface of the storage section 33.

[0019] An elevator mechanism 34 is provided on the bottom surface of the car body 31. The elevator mechanism 34 is a mechanism for raising and lowering the storage section 33. The elevator mechanism 34 is composed of a belt 341 that supports the storage section 33, a reel (not shown) that unwinds or winds the belt 341, a rotating shaft (not shown) that supports the reel, and an elevator motor (not shown). The reel is connected to the elevator motor, and when the elevator motor is driven, the reel rotates together with the rotating shaft. When the reel is rotated, the belt 341 is unwound or wound onto the reel, and the storage section 33 moves up and down.

[0020] A reading unit 35 is provided on the side of the vehicle body 31. The reading unit 35 is composed of an optically readable barcode reader, an RFID scanner that can read via wireless communication, or the like. The reading unit 35 senses the information providing unit A of each board 21, 22, 23, and reads to obtain identification information of each board 21, 22, 23 included in the information providing unit A. The read identification information of the boards 21, 22, 23 is transmitted to the control unit 36.

[0021] The reading unit 35 may be any identifier that can read the identification information of the board 21 (22, 23), but it is preferable to configure the reading unit 35 so that it can read the identification information of the board 21 (22, 23) from the encrypted information providing unit A. The advantages of this will be described later along with the advantages obtained by encrypting the information providing unit A.

[0022] The processing device 10 and the transport vehicle 30 configured as described above are connected to the control unit 40 by wire or wirelessly (FIG. 4). More specifically, the control unit 11 of the processing device 10 and the control unit 36 ​​of the transport vehicle 30 are connected to the control unit 41 of the control unit 40 by wire or wirelessly. The processing device 10 and the transport vehicle 30 each have a control unit 11, 36 that controls their own operations and tasks, and the control unit 40 performs overall control of the processing system 1 by sending and receiving control signals between these control units 11, 36. The control unit 40 also has a memory unit 42, and stores the identification information of the board 21 (22, 23) read by the reader 35 in the memory unit 42 via the control units 36 and 41. Each of the control units 11, 36, 41 is configured by a processor such as a CPU that executes various processes, and the memory unit 42 is configured by one or more storage media such as ROM or RAM. Each of the control units 11, 36, and 41 directly or indirectly reads out a program from the storage unit 42 and executes it to perform various processes.

[0023] Next, the processing method of the processing system 1 of the first embodiment will be described with reference to Fig. 5. In the following description, unless a subject of an operation is specified, it is assumed that the operation is controlled by the control unit 40. In Fig. 5, it is assumed that processing devices 10 are respectively arranged below the transport path 20.

[0024] The transport vehicle 30 transports the processing object P to the processing device 10 by traveling along the transport path 20. Specifically, with the processing object P stored in the storage section 33, the transport vehicle 30 is set on the transport path 20 (FIG. 5). Then, the travel motor is driven to rotate the wheels 32, causing the transport vehicle 30 to travel along the transport path 20. For example, the transport vehicle 30 located at the bottom of FIG. 5 travels straight along the transport path 20 (plate 21) and pauses when it is adjacent to the connecting portion between plates 21 and 22 indicated by the dashed line. In this state, it turns and moves toward plate 22. It then travels straight again and moves from the connecting portion between plates 21 and 22 to plate 22. It then pauses again at an arbitrary position on plate 22. It then turns again and moves toward opening 221. It then travels straight again until it is located directly above opening 221.

[0025] Once the transport vehicle 30 is positioned directly above the opening 221, the transport vehicle 30 is stopped again. In this state, the lifting mechanism 34 is activated to lower the storage unit 33. The lowered storage unit 33 passes through the opening 221 in the plate 22 and is placed on the stage 12. This completes the transport of the processing object P to the processing device 10. The processing object P is then removed from the opening 331 of the storage unit 33 and subjected to processing (grinding, polishing, cutting, storage, inspection, tape mounting, tape peeling, cleaning, etc.) by the processing device 10. After processing, the processing object P is again stored in the storage unit 33, and the lifting mechanism 34 is driven to raise the storage unit 33, whereby the processing object P is transported into the transport vehicle 30. This completes the transport to the processing device 10.

[0026] Although the flow of transportation of the transport vehicle 30 to one processing device 10 has been described above, the same applies to the case where the processing object P is transported from one processing device 10 to another processing device 10.

[0027] Here, as the transport vehicle 30 travels along the transport path 20, the reading unit 35 also performs a reading operation to read the identification information of the plate 21 (22, 23) from the information providing unit A. In the transport vehicle 30 located at the bottom of the paper in FIG. 5, the transport vehicle 30 travels over the plate 21 and the plate 22 before traveling to the opening 221 of the plate 22 at the bottom of the paper, so the reading unit 35 can read the identification information of the plate 21 from the information providing unit A of the plate 21 and the identification information of the plate 22 from the information providing unit A of the plate 22. Note that the reading operation of the reading unit 35 may be performed while traveling at a low speed so as to reliably read the identification information of the plate 21 (22, 23) from the information providing unit A, or may be performed after temporarily stopping near the information providing unit A.

[0028] The identification information of the board 21 (22, 23) read by the reading unit 35 is sent to the memory unit 42 by the reading unit 35 via the control unit 36 ​​and the control unit 41, and is stored in the memory unit 42. For example, in the case of the board 21, the memory unit 42 stores various pieces of information constituting the identification information of the board 21, such as "Model number: XX, Manufacturer: Made by XX, External shape: linear, External dimensions XX mm, Presence or absence of opening 221: none, Quality: medium." Note that the identification information of the board 21 (22, 23) does not necessarily have to be composed of multiple pieces of information, and may be composed of at least one piece of information (for example, the model number).

[0029] The storage unit 42 is not limited to a specific storage method as long as it stores the identification information of the plates 21 (22, 23) read by the reader 35, but when storing identification information for the multiple plates 21 (22, 23) that make up the transport path 20, it is desirable to assign a common code (e.g., ID1) to the identification information read from each plate 21 (22, 23) and store the information together for each transport path. Furthermore, when there are multiple different transport paths, it is even more desirable to store the identification information of the plates 21 (22, 23) in a manner that allows them to be distinguished for each transport path 20 (e.g., assigning a code ID2 to different transport paths). Furthermore, the memory unit 42 only needs to store the identification information of at least the board 21 (22, 23), but it is desirable to store the date and time when the reading unit 35 read the identification information of the board 21 (22, 23), the model number of the transport vehicle 30 that was read, the coordinates of the transport vehicle 30 that was read, the travel path of the transport vehicle 30, the type of processing device 10 located below the transport path 20, the number of processing devices 10, the processing conditions of the processing device 10, and other various information regarding the processing system 1 in association with the identification information of the board 21 (22, 23).

[0030] The identification information of the board 21 (22, 23) stored in the memory unit 42 in this manner only needs to be accessible to the user, and the identification information of the board 21 (22, 23) stored in the memory unit 42 may be displayed via a display or the like.

[0031] As described above, according to the processing system 1 of the first embodiment, the reading unit 35 reads the identification information of the boards 21 (22, 23) from the information providing unit A, and stores the read identification information in the memory unit 42, thereby allowing the user to refer to the identification information of the boards 21 (22, 23) that make up the transport path 20. This makes it possible to understand the types of the boards 21 (22, 23) that make up the transport path 20. In other words, by focusing on the types of the boards 21 (22, 23) one by one, it becomes possible to understand what types of boards 21 (22, 23) make up the entire transport path 20. Therefore, it becomes possible to track information about the transport path 20 used to transport the processing object P.

[0032] Furthermore, by associating the identification information of the plate 21 (22, 23) stored in the memory unit 42 with the date and time of reading by the reading unit 35, the model number of the transport vehicle 30 that was read, the coordinates of the transport vehicle 30 that was read, the travel route of the transport vehicle 30, etc., it becomes possible to know when the transport vehicle 30 traveled over which plate 21 (22, 23), or which transport vehicle 30 traveled over which plate 21 (22, 23), and it becomes possible to track information regarding the transport vehicle 30 used to transport the processing object P.

[0033] Next, embodiments different from the first embodiment will be described. In each embodiment described below, parts common to the processing system 1 of the first embodiment will be denoted by the same reference numerals, and description thereof will be omitted.

[0034] (Second embodiment) A processing system 2 according to the second embodiment will be described with reference to Fig. 6. The processing system 2 according to the second embodiment differs from the processing system 1 according to the first embodiment in that it further includes a first error storage unit 43.

[0035] In the processing system 2, first, as in the first embodiment, the transport vehicle 30 is caused to travel along the transport path 20, while the reading unit 35 reads the identification information of the board 21 (22, 23) from the information providing unit A. At this time, an error determination process is performed based on a predetermined time set in advance for error determination.

[0036] The predetermined time may be the time it takes for the transport vehicle 30 to complete the travel of at least one of the plates 21 (22, 23) that make up the transport path 20. The predetermined time is determined in advance based on the overall length of the plates 21 (22, 23) and the travel speed of the transport vehicle 30. Alternatively, instead of the predetermined time, a predetermined distance may be set as the distance traveled by the transport vehicle 30. In this case, instead of determining an error based on the elapsed time and the set predetermined time, an error may be determined based on the travel distance that can be determined by measuring the rotation speed and rotation angle of the travel motor and the set predetermined distance.

[0037] 6 includes a board 21 (22) that does not have an information provider A. For example, if the time required for one board 21 to travel is set as the predetermined time for the transport vehicle 30 at the bottom of the drawing, even if the transport vehicle 30 travels over a board 21 that does not have an information provider A, the reading unit 35 cannot read the identification information of the board 21 because the board 21 does not have an information provider A. In this case, the control unit 40 determines that the transport path 20 includes a board 21 whose type cannot be identified. The fact that the reading unit 35 was unable to read the identification information of the board 21 even after the predetermined time had elapsed is stored as an error in the first error memory unit 43.

[0038] In addition, if the reading unit 35 is able to read the identification information of the board 21 from the information providing unit A within a predetermined time while the transport vehicle 30 is traveling on the transport path 20, the read identification information of the board 21 is stored in the memory unit 42, as in the first embodiment.

[0039] As described above, according to the processing system 2 of the second embodiment, the inability to read the identification information of the plate 21 (22, 23) can be stored as an error in the first error storage unit 43. By referring to the first error storage unit 43, the user can track information regarding whether or not there are plates on the transport path 20 whose identification information cannot be read, that is, whether or not there are plates of unknown type mixed in the transport path 20 used to transport the processing object P.

[0040] Generally, boards of unknown type are often of lower quality than boards of known type. For this reason, boards of unknown type tend to destabilize the travel of the transport vehicle 30 and increase the risk of damage to the processing object P. In the processing system 2, the inability to read the identification information of the board 21 (22, 23) is stored as an error in the first error memory unit 43. By referring to the first error memory unit 43, the user can recognize that boards of unknown type are mixed in the transport path 20. As a result, the user can identify the boards of unknown type and remove them from the transport path 20. This can help reduce the risk of damage.

[0041] The inability of the reading unit 35 to read includes both the above-mentioned cases where the board 21 (22, 23) does not include the information providing unit A and is therefore unable to read, and the board 21 (22, 23) includes an identifier different from the information providing unit A and is therefore unable to read. As a method for making an identifier different from the information providing unit A unreadable, as explained above with reference to Figures 2 and 3, there is a method for encrypting the information providing unit A and configuring the reading unit 35 so that the identification information of the board 21 (22, 23) can be read from the encrypted information providing unit A.

[0042] By configuring the reading unit 35 in this manner, it is also possible to store in the first error storage unit 43 an error that the identification information of a plate having an identifier different from that of the information providing unit A could not be read. This allows for error processing of the plate having the similar identifier, even if an identifier similar to that of the information providing unit A is formed on the plate in order to avoid the error processing by the control unit 40 (storage in the first error storage unit 43). As a result, by referring to the first error storage unit 43, the user can identify the plate having the similar identifier and remove the plate from the transport path 20, which can also be useful in reducing the risk of damage to the processing object P caused by the plate having the similar identifier.

[0043] (Third embodiment) Next, a processing system 3 according to a third embodiment will be described with reference to Fig. 7. The processing system 3 according to the third embodiment differs from the processing systems 1 and 2 according to the first and second embodiments in that the processing system 3 according to the third embodiment further includes a recommended condition storage unit 44 and a second error storage unit 45.

[0044] For example, when the processing object P transported by the transport vehicle 30 is an on-board wafer, stricter quality control than usual is required. Therefore, it is recommended to use higher quality plates for the plates that make up the transport path 20. On the other hand, when the processing object P to be transported can be transported with normal quality control, it is recommended to use lower cost plates rather than high quality plates from the viewpoint of cost reduction.

[0045] As described above, the appropriate plate varies depending on the type of processing object P being handled, and therefore, users want to confirm whether the transport path 20 is designed to be compatible with the type of processing object P. In other words, users want to confirm whether the transport path 20 contains any plates that are incompatible with the processing object P.

[0046] The processing system 3 of the third embodiment can meet the above demands. The processing method of the processing system 3 of the third embodiment will be described below.

[0047] First, when there are plates 21 (22, 23) of different qualities that can be used on the transport path 20 and they can be used interchangeably, the control unit 40 determines the plate 21 (22, 23) that is recommended for use depending on the type of processing object P to be transported in the processing system 3. For example, when the processing object P transported by the transport vehicle 30 shown in FIG. 7 is an on-board wafer, the control unit 40 recommends the use of the plate 21 (22, 23) that has the information providing unit B. Then, the identification information of the plate 21 (22, 23) that has the information providing unit B is stored in the recommended condition storage unit 44 as the plate 21 (22, 23) that is recommended for use. Note that the boards 21 (22, 23) having information provider A and the boards 21 (22, 23) having information provider B are of different quality, with the boards 21 (22, 23) having information provider B being of higher quality than the boards 21 (22, 23) having information provider A. The boards 21 (22, 23) having information provider A are of slightly lower quality than the boards 21 (22, 23) having information provider B, but still meet a certain level of quality and are lower-cost boards. Correspondingly, the identification information of the boards 21 (22, 23) indicated by each information provider A and B also indicates different qualities. Furthermore, the quality of the plates 21 (22, 23) is considered to be higher the less damage they cause to the object to be processed P when the transport vehicle 30 travels over them. For example, the stronger the plates 21, 22, 23 are, or the flatter the surfaces of the plates 21, 22, 23 are, the more vibrations can be suppressed while the transport vehicle 30 is traveling, and therefore the higher the quality of the plates 21 (22, 23).

[0048] Next, the control unit 40 causes the reading unit 35 to read the identification information of the plates 21 (22, 23) that form the conveying path 20, as shown in FIG.

[0049] After the reading operation of the reading unit 35 is completed, the control unit 40 compares the identification information of the board 21 (22, 23) read by the reading unit 35 with the identification information of the board 21 (22, 23) recommended for use stored in the recommended condition memory unit 44. For example, if the reading unit 35 reads from the board 21 (22, 23) owned by the information providing unit A, the identification information of the board 21 (22, 23) read by the reading unit 35 differs from the identification information of the board 21 (22, 23) recommended for use stored in the recommended condition memory unit 44 as described above, and therefore the control unit 40 stores the identification information of the board 21 (22, 23) owned by the information providing unit A read in the second error memory unit 45 as an error.

[0050] When normal quality control is sufficient for the processing object P to be transported in the processing system 3, the control unit 40 stores the identification information of the plate 21 (22, 23) possessed by the information providing unit A in the recommended condition memory unit 44, and causes the reading unit 35 to read the identification information of the plate 21 (22, 23) that constitutes the transport path 20. After the reading by the reading unit 35 is completed, the control unit 40 compares the identification information of the plate 21 (22, 23) read by the reading unit 35 with the identification information stored in the recommended condition memory unit 44 of the plate 21 (22, 23) possessed by the information providing unit A that is recommended for use. When the reading unit 35 reads the identification information of the board 21 (22, 23) from the information providing unit B, the identification information of the board 21 (22, 23) read by the reading unit 35 differs from the identification information of the board 21 (22, 23) recommended for use stored in the recommended condition memory unit 44, so the control unit 40 stores the identification information of the board 21 (22, 23) owned by the information providing unit B read by the reading unit 35 in the second error memory unit 45 as an error.

[0051] As described above, according to the processing system 3 of the third embodiment, if the identification information of the board 21 (22, 23) read by the reading unit 35 from the information providing unit A (B) differs from the identification information of the board 21 (22, 23) recommended for use stored in the recommended condition storage unit 44, the identification information of the board 21 (22, 23) read by the reading unit 35 from the information providing unit A (B) can be stored as an error in the second error storage unit 45. By referring to the second error storage unit 45, the user can determine whether or not the transport path 20 contains a board 21 (22, 23) that is incompatible with the type of object P to be processed.

[0052] (Fourth embodiment) Next, a processing system 4 according to a fourth embodiment will be described with reference to Fig. 8. The processing system 4 according to the fourth embodiment is a modified example of the processing system 3 according to the third embodiment, in which the transport vehicle 30 further includes a transport vehicle position identifying unit 37, and the control unit 40 further includes a position memory unit 46.

[0053] The transport vehicle position identifying unit 37 is configured with an optical sensor or the like, and reads the lines 291, 292 provided on the upper surface of each plate 21 (22, 23). The transport vehicle 30 travels while the transport vehicle position identifying unit 37 reads the lines 291, 292, so that the transport vehicle 30 can confirm its own position and travel as planned. In more detail, by reading the line 291, the transport vehicle 30 can travel along the line 291, and by reading the line 291 that intersects with the line 291, the transport vehicle 30 can turn at the intersection and change its direction of travel. In addition, the transport vehicle 30 can identify its position by counting the number of lines 292 that it has read.

[0054] For example, as shown in FIG. 8 , when the route of the transport vehicle 30 located in the lower part 201 is predetermined so that the transport vehicle 30 heads from the board 21 located in the lower part 201 to the board 22, the transport vehicle position identifying unit 37 first reads the line 292 on the board 21 located in the lower part 201. Based on the positional relationship between the board 21 and the transport vehicle 30, it is determined that the first line 292 to be read is the line 292 on the board 21 located in the lower part 201, and therefore it is determined that the transport vehicle 30 is located on the board 21 located in the lower part 201. Next, the transport vehicle position identifying unit 37 reads the line 292 on the board 22 located in the lower part 201. Because the route of the transport vehicle 30 is predetermined so that the transport vehicle 30 heads from the board 21 located in the lower part 201 to the board 22, it is determined that the second line 292 to be read is the line 292 on the board 22 located in the lower part 201. Therefore, it is determined that the transport vehicle 30 is located on the board 21 located in the lower part 201. In this way, the guided vehicle position identifying unit 37 can read the lines 292 and identify the position of the guided vehicle 30 based on the number of lines 292 that have been read.

[0055] The position memory unit 46 stores the positions of the information providing units A, B, and C formed at predetermined intervals on the conveying path 20 from the coordinate positions of the information providing units A, B, and C. In other words, the position memory unit 46 stores the positions of the information providing units A, B, and C scattered along the conveying path 20.

[0056] Unlike the recommended condition memory unit 44 of the third embodiment, the recommended condition memory unit 44 of this embodiment stores the position of the information providing unit A (B, C) stored in the position memory unit 46 and the identification information of the board 21 (board 22, 23) recommended for use at the position of the information providing unit A (B, C) stored in the position memory unit 46.

[0057] For example, if the processing device 10 at the lower part 201 in FIG. 8 is a stocker that stores the workpiece P, the shape and thickness of the workpiece P do not change before and after storage, so the required quality of the plate 21 (plates 22, 23) only needs to meet a certain standard. Furthermore, if the processing device 10 at the middle part 202 is a grinding device that grinds the workpiece P, the thickness of the workpiece P becomes thinner before and after grinding, so the required quality is higher than that of the plates 21, 22, 23 at the lower part 201. Furthermore, if the processing device 10 at the upper part 203 is a cutting device that cuts the workpiece P, the workpiece P is broken into small pieces before and after cutting. Furthermore, if the travel route of the workpiece P is such that it is transported from the processing device 10 at the middle part 202 (grinding device) to the processing device 10 at the upper part 203 (cutting device), the workpiece P is thinned and broken into small pieces after passing through the grinding device and cutting device, so more careful transport is required. Therefore, the plates 21, 22, 23 in the upper portion 203 are required to have the highest quality compared to the plates 21 (22, 23) in the lower portion 201 and the plates 21, 22, 23 in the middle portion 202.

[0058] From this, the control unit 40 determines that it is desirable to use the boards 21 (22, 23) having the information providing unit A in the lower portion 201 of the conveying path 20, the boards 21 (22, 23) having the information providing unit B in the middle portion 202, and the boards 21 (22, 23) having the information providing unit C in the upper portion 203 of the conveying path 20. Then, the control unit 40 stores the identification information of the boards 21 (boards 22, 23) recommended for use for each position of the information providing unit A (B, C) stored in the position memory unit 46. Note that each information providing unit A, B, C indicates the identification information of a different board 21 (22, 23), and the identification information of the boards 21, 22, 23 of the information providing unit A indicates that they meet a certain level of quality, while the identification information of the boards 21, 22, 23 of the information providing unit B indicates that they are of higher quality than the boards 21, 22, 23 of the information providing unit A. Furthermore, the identification information of the boards 21, 22, and 23 of the information provider C indicates that they are of higher quality than the boards 21, 22, and 23 of the information providers A and B.

[0059] The control unit 40 only needs to determine the identification information of the board 21 (22, 23) recommended for use based on at least the position of the information providing unit A (B, C) stored in the position memory unit 46, and may further determine the information based on the coordinates of each processing device 10, the number of processing devices 10, the type of processing device 10, and the travel route of the transport vehicle 30.

[0060] Next, a processing method using the processing system 4 having the above configuration will be described.

[0061] First, the control unit 40 determines a route from the initial position of the transport vehicle 30 to the information providing unit A (B, C) stored in the position memory unit 46 based on the position of the information providing unit A (B, C) stored in the position memory unit 46, and controls the transport vehicle 30 to travel along the determined route. For example, when controlling the transport vehicle 30 to read the information providing unit A of the board 21 located below 201, the control unit 40 controls the transport vehicle 30 to travel straight based on the position of the information providing unit A of the board 21 located below 201 stored in the position memory unit 46. Then, because a line 292 is formed on the way to the information providing unit A, the transport vehicle position identification unit 37 reads the line 292 before the reading unit 35 reads the identification information of the board 21 from the information providing unit A. Thereafter, when the transport vehicle 30 reaches the position of the information providing unit A, the reading unit 35 reads the identification information of the board 21 from the information providing unit A. Therefore, the position information of the transport vehicle 30 located on the line 292 in the lower part 201 and the identification information of the board 21 provided by the information providing unit A located in the lower part 201 are obtained. The position information of the transport vehicle 30 obtained in this manner and the identification information of the board 21 provided by the information providing unit A located in the lower part 201 are stored in the memory unit 42 in association with each other.

[0062] Next, the control unit 40 calculates, from among the information providing units A (B, C) stored in the position memory unit 46, the information providing unit A (B, C) that is closest to the position of the line 292 on the plate 21 (22, 23) read by the transport vehicle position identifying unit 37. As described above, when the transport vehicle position identifying unit 37 reads the line 292 on the plate 21 in the lower part 201, by comparing the positions of the information providing units A (B, C) stored in the position memory unit 46 with the position of the line 292 on the plate 21 read by the transport vehicle position identifying unit 37, it is calculated that the position of the information providing unit A on the plate 21 in the lower part 201 is closest to the position of the transport vehicle 30 when the transport vehicle position identifying unit 37 read the line 292 on the plate 21 in the lower part 201. From this calculation result, the control unit 40 can determine that the identification information of the board 21 associated with the position of the transport vehicle 30 when the line 292 of the board 21 on the lower side 201 was read as described above was provided by the information providing unit A located on the board 21 on the lower side 201. In this way, it is possible to identify which information providing unit A (B, C) among the information providing units A (B, C) stored in the position memory unit 46 provided the identification information of the board 21 (22, 23) read by the reading unit 35.

[0063] The control unit 40 then compares the identification information of the boards 21 (22, 23) included in the information providing section A (B, C) in the position memory 46 specified above, i.e., the identification information of the boards 21 (22, 23) read by the reader 35 at the position of the information providing section A (B, C) stored in the position memory 46, with the identification information of the boards 21 (22, 23) recommended for use at the position of the information providing section A (B, C) stored in the position memory 46. Note that the recommended condition memory 44 stores the identification information of the boards 21 (22, 23) having the information providing section A in the lower section 201, the boards 21 (22, 23) having the information providing section B in the middle 202, and the boards 21 (22, 23) having the information providing section C in the boards 21 (22, 23) in the upper section 203.

[0064] For example, as shown in FIG. 8 , if the identification information of board 21 read by reader 35 at the upper position 203 is read from information provider A or B, the use of board 21 having information provider C is recommended at the upper position 203, and therefore the identification information of board 21 read by reader 35 at the upper position 203 differs from the identification information of board 21 recommended for use at the upper position 203. Therefore, control unit 40 determines that board 21 having information provider A or B at the upper position 203 is not installed in an appropriate location. Then, the read identification information of board 21 having information provider A or B is stored as an error in second error memory 45.

[0065] As described above, according to the processing system 4 of the fourth embodiment, if the identification information of the board 21 (22, 23) having the information providing unit A (B, C) at the position stored in the position memory unit 46 read by the reading unit 35 differs from the identification information of the board 21 (22, 23) recommended for use at the position of the information providing unit A (B, C) stored in the position memory unit 46 stored in the recommended condition memory unit 44, the identification information of the board 21 (22, 23) having the information providing unit A (B, C) at the position stored in the position memory unit 46 read by the reading unit 35 can be stored as an error in the second error memory unit 45. By referring to the second error memory unit 45, the user can determine which board 21 (22, 23) from among the boards 21 (22, 23) having the information providing unit A (B, C) is not installed in an appropriate location on the transport path 20.

[0066] In the above-described embodiment, the identification information of the board 21 (22, 23) read by the reading unit 35 is stored in the memory unit 42 of the control unit 40, but the identification information of the board 21 (22, 23) read by the reading unit 35 may be stored in the memory unit of the processing device 10, the memory unit of the transport vehicle 30, or in the memory unit of an external server other than the processing device 10, the transport vehicle 30, and the control unit 40. The same is true for the first error memory unit 43, the recommended condition memory unit 44, the second error memory unit 45, and the position memory unit 46.

[0067] In addition, in the above-described embodiment, the memory unit 42, the first error memory unit 43, the recommended condition memory unit 44, the second error memory unit 45, and the position memory unit 46 are configured as independent storage media for the sake of convenience of explanation, but they may be configured as any storage medium as long as they store identification information, etc., of the corresponding board 21 (22, 23), and the memory unit 42, the first error memory unit 43, the recommended condition memory unit 44, the second error memory unit 45, and the position memory unit 46 may be integrated into a single storage medium. In other words, the memory unit 42, the first error memory unit 43, the recommended condition memory unit 44, the second error memory unit 45, and the position memory unit 46 may be configured as one or more storage media.

[0068] In the above-described embodiment, the transport vehicle 30 transports the object to be processed P while reading the information from the reading unit 35, but it is sufficient for the reading unit 35 to read the identification information of the board 21 (22, 23) from the information providing unit A (B, C), and it does not matter whether or not the object to be processed P is transported.

[0069] In the processing system 2 of the second embodiment, the calculation of the predetermined distance is performed by measuring the number of rotations and the rotation angle of the traveling motor, but the predetermined distance may be calculated by reading the lines 291 and 292 by the transport vehicle position identifying unit 37 of the fourth embodiment. Similarly, the position of the transport vehicle 30 may be identified by measuring the number of rotations and the rotation angle of the traveling motor, instead of using the lines 291 and 292 and the transport vehicle position identifying unit 37 of the fourth embodiment. In other words, any method may be used as long as it is possible to set the predetermined distance and identify the position of the transport vehicle 30.

[0070] In the control unit 40 according to the third and fourth embodiments described above, when the identification information of the board 21 (22, 23) read by the reading unit 35 differs from the identification information of the board 21 (22, 23) recommended for use stored in the recommended condition storage unit 44, the control unit 40 may be controlled to store the identification information of the board 21 (22, 23) read by the reading unit 35 as an error in the second error storage unit 45. If the identification information of the plate 21 (22, 23) recommended for use stored in the storage unit 44 is the same as the identification information of the plate 21 (22, 23) recommended for use, the control unit 40 determines that the plate 21 (22, 23) is suitable for the type of object P to be treated or the plate 21 (22, 23) provided in an appropriate location on the transport path 20, and desirably controls the storage unit 42 to store the identification information of the plate 21 (22, 23) suitable for the type of object P to be treated or the plate 21 (22, 23) provided in an appropriate location on the transport path 20 in a manner that allows it to be distinguished from other data stored in the storage unit 42. For example, a symbol such as "good" or "suitable" may be added to the identification information of the plate 21 (22, 23) suitable for the type of object P to be treated or the plate 21 (22, 23) provided in an appropriate location on the transport path 20.

[0071] In the control unit 40 according to the third and fourth embodiments described above, if the board 21 (22, 23) read by the reading unit 35 has higher quality than the board 21 (22, 23) stored in the recommended condition memory unit 44, the identification information of the board 21 (22, 23) read by the reading unit 35 is stored as an error in the second error memory unit 45, but it does not have to be treated as an error. In other words, the control unit 40 only needs to store the identification information of the board 21 (22, 23) read by the reading unit 35 as an error in the second error memory unit 45 if the board 21 (22, 23) read by the reading unit 35 has lower quality than the board 21 (22, 23) stored in the recommended condition memory unit 44, and if the board 21 (22, 23) read by the reading unit 35 has higher quality than the stored board 21 (22, 23) stored in the recommended condition memory unit 44, it does not matter whether or not to treat the identification information of the board 21 (22, 23) read by the reading unit 35 as an error.

[0072] Although the embodiments of the present invention have been described above, other embodiments of the present invention may be combinations of the above embodiments and modifications in whole or in part.

[0073] Furthermore, the embodiments of the present invention are not limited to the above-described embodiments and modifications, and may be variously changed, substituted, or modified within the scope of the spirit of the technical idea of ​​the present invention. Furthermore, if the technical idea of ​​the present invention can be realized in a different way due to technological advances or other derived technologies, it may be implemented using that method. Therefore, the claims cover all embodiments that may fall within the scope of the technical idea of ​​the present invention. [Industrial Applicability]

[0074] As described above, the processing system and processing method of the present invention make it possible to track information about the transport path used to transport an article, which is therefore useful in a processing method for transporting an article to a processing device. [Explanation of symbols]

[0075] 1~4: Processing system 10: Processing equipment 20: Transport path 21: Board 22: Board 23: Board 30: Transport vehicle 35: Reading unit 37: Vehicle position identification unit 40: Control unit 41: Control unit 42: Storage section 43: First error storage unit 44: Recommended condition memory section 45: Second error memory unit 46:Position memory section A~C: Information provision department P: Processing object R: Ring frame T: Tape

Claims

1. a conveyance path including the plate and disposed above the processing device, the conveyance path having an information providing unit that provides identification information of the plate; a transport vehicle having a reading unit that reads the identification information of the plate and that travels along the transport path to transport the article to the processing device; a storage unit that stores the identification information of the board read by the reading unit from the information providing unit. Processing system.

2. and a first error storage unit that stores, as an error, the fact that the identification information of the plate cannot be read when the identification information of the plate cannot be read even though the transport vehicle has traveled on the transport path for at least either a predetermined time or a predetermined distance. The processing system of claim 1 .

3. a recommended condition storage unit that stores identification information of boards that are recommended for use; and a second error storage unit that stores the identification information of the board read by the reading unit as an error if the identification information of the board read by the reading unit differs from the identification information of the board recommended for use stored in the recommended condition storage unit. The processing system according to claim 1 or 2.

4. a position storage unit that stores the positions of the information providing units formed at predetermined intervals on the conveying path; a vehicle position identifying unit that identifies the position of the vehicle on the transport path, the recommended condition storage unit stores identification information of a board recommended for use at the location of the information providing unit stored in the location storage unit; The second error storage unit stores, as an error, the identification information of the board having the information providing unit at the position stored in the position storage unit read by the reading unit when the identification information of the board having the information providing unit at the position stored in the position storage unit read by the reading unit differs from the identification information of the board recommended for use at the position of the information providing unit stored in the position storage unit stored in the recommended condition storage unit. The processing system of claim 3 .

5. a reading step in which a reading unit included in the transport vehicle reads identification information of the plate from an information providing unit included in the plate; a storage step in which a storage unit stores the identification information of the board read from the information providing unit; a transport step in which the transport vehicle travels on a transport path including the plate disposed above the processing device to transport the article to the processing device. Processing method.

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