Processing equipment

Abstract

The present disclosure provides a processing device that can efficiently remove moisture generated within the device. [Solution] The processing device comprises a first container having a first internal space for accommodating the object to be processed, a heating unit for heating the first internal space, a second container having a second internal space for accommodating the first container, and a pressure reduction unit for reducing the pressure of the first internal space by reducing the pressure of the second internal space, and when the side of the loading surface of the second container in a direction perpendicular to the loading surface is positioned downward, an inner bottom surface located below the second container and inside the second container is separated from an outer bottom surface located below the first container and outside the first container.

Description

[Technical Field]

[0001] The following disclosure relates to processing devices. [Background technology]

[0002] For example, Patent Document 1 proposes a combined steam and microwave reduced pressure dryer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-194966 Summary of the Invention [Problem to be solved by the invention]

[0004] The reduced-pressure dryer described in Patent Document 1 includes a dryer body with an opening for accommodating the material to be dried, an opening / closing door for opening and closing the opening, a microwave irradiation device for irradiating microwaves toward the material to be dried, a steam supply device for supplying steam toward the material to be dried, and a pressure reduction device for creating a reduced-pressure atmosphere inside the drying chamber body with the opening closed. In this reduced-pressure dryer, steam supplied into the drying chamber body during reduced-pressure drying turns into condensed water (moisture) and adheres to the inside of the drying chamber body. This condensed water remains inside the drying chamber body even after the drying of the material is completed, so it is necessary to wipe off the condensed water remaining inside the drying chamber body.

[0005] An object of the present disclosure is to provide a processing device that can efficiently remove moisture generated within the device. [Means for solving the problem]

[0006] The processing apparatus of the present disclosure comprises a first container having a first internal space for accommodating an object to be processed, a heating unit for heating the first internal space, a second container having a second internal space for accommodating the first container, and a pressure reduction unit for reducing the pressure of the first internal space by reducing the pressure of the second internal space, and when the side of the loading surface of the second container in a direction perpendicular to the loading surface is considered downward, an inner bottom surface located below the second container and inside the second container is separated from an outer bottom surface located below the first container and outside the first container. [Effects of the Invention]

[0007] According to the present disclosure, it is possible to provide a processing device that can efficiently remove moisture generated within the device. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a side view schematically showing a processing apparatus according to a first embodiment. [Figure 2] FIG. 1 is a side view schematically showing a conventional microwave heating device. [Figure 3] 4 is a timing chart showing time-dependent changes in the states of a heating unit, a decompression unit, a condensation unit, and a drainage unit provided in the treatment apparatus according to the first embodiment. [Figure 4] 1 is a side view schematically showing a state before the start of operation of a treatment device according to a first embodiment. [Figure 5] 4 is a side view schematically showing a state in which the processing apparatus according to the first embodiment reduces the pressure in the first internal space. FIG. [Figure 6] 3 is a side view schematically showing a state in which the processing apparatus according to the first embodiment heats the first internal space. FIG. [Figure 7] 4 is a side view schematically showing a state in which the processing apparatus according to the first embodiment returns the pressure in the first internal space to normal pressure. FIG. [Figure 8] 1 is a side view schematically showing a state in which the treatment device according to the first embodiment discharges water collected from an object to be treated through a drainage section. [Figure 9]10 is a conceptual diagram showing a cross section of a suction device provided in a processing device according to a second embodiment. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of a processing device 1 according to the present disclosure will be described with reference to the drawings. The present disclosure is not limited to the contents described in the following embodiment, and appropriate design changes can be made within the scope of the configuration of the present disclosure. In the drawings, identical or equivalent elements are given the same reference numerals, and redundant explanations will be omitted. Only the main parts are shown in the drawings. The following description will focus on the main parts and parts related to the present disclosure.

[0010] In this specification, when expressing directions, among the directions perpendicular to the surface on which the second container is placed (also referred to as the up-down direction), the side toward the surface, i.e., downward, is designated Z2, and the opposite side to downward, i.e., upward, is designated Z1. Furthermore, among the directions parallel to the surface on which the second container is placed, as viewed from the user of the processing device 1, the left is designated X1, the right is designated X2, the front is designated Y1, and the rear is designated Y2.

[0011] In this specification, a direction perpendicular to the mounting surface is a direction that forms an angle of 90° with respect to the mounting surface, and a direction parallel to the mounting surface is a direction that forms an angle of 0° with respect to the mounting surface.

[0012] (Embodiment) Fig. 1 is a side view schematically showing a processing device according to embodiment 1. As shown in Fig. 1, the processing device 1 includes a housing 10, a first container 20, a second container 30, a heating section 40, and a decompression section 50. Examples of the processing device 1 according to this embodiment include a vacuum dryer, a microwave heating device, a thawing machine, and a decompression cooker. The object to be processed X that is the target of the processing device 1 is not particularly limited, but may be, for example, food.

[0013] Inside the housing 10, a first container 20, a second container 30, and accessories 80 for operating the processing device 1 are provided.

[0014] The first container 20 is disposed within the second container 30 and includes a first internal space 20a for accommodating the workpiece X and a first opening 24a connected to the first internal space 20a. More specifically, the first container 20 includes an upper wall 23, a side wall 22, and a lower wall 21. The upper wall 23 also functions as a lid (also referred to as a first lid) 25 for opening and closing the first opening 24a. The first lid 25 can be switched between an open state in which the first opening 24a is open and a closed state in which the first opening 24a is closed. The area surrounded by the side wall 22, the lower wall 21, and the first lid 25 (upper wall 23) forms the first internal space 20a. The area surrounded by the side wall 22 and the lower wall 21 and including the first opening 24a is also referred to as a first main body 24. The upper wall 23, the side wall 22, and the lower wall 21 of the first container 20 are also simply referred to as the walls of the first container 20.

[0015] The partition Y arranged in the first internal space 20a can separate the first internal space 20a into a reduced pressure space 20p in which the object to be treated X is placed, and a non-reduced pressure space 20q. A user can remove the objects (e.g., the object to be treated X and the antenna 44 in the non-reduced pressure space 20q) contained in the first internal space 20a through the first lid 25 and the first opening 24a. The object to be treated X may be placed on the inner bottom surface 21x located below Z2 of the first container 20 and inside the first container 20.

[0016] In this embodiment, the first container 20 is a shielding container (also referred to as a microwave-shielding container) that shields microwaves. The wall of the first container 20 has a portion made of a conductor such as metal in order to shield microwaves. The wall of the first container 20 is formed of, for example, a metal plate, a metal mesh, a punched metal, or the like. The wall of the first container 20 can suppress leakage of microwaves from the first internal space 20a to the outside of the first container 20.

[0017] The first container 20 is provided with a vent 20b. The vent 20b allows gas in the first internal space 20a to circulate to the second container 30. The vent 20b blocks microwaves. For example, the vent 20b is formed of a plurality of small punched holes or the like so as to prevent microwaves from leaking outside the first container 20. As the pressure reducing unit 50 operates, the gas in the first internal space 20a is discharged from the vent 20b to the outside of the first container 20. The vent 20b may be provided in a wall (for example, the side wall 22 and the bottom wall 21) that constitutes the first container 20.

[0018] The non-reduced pressure space 20q is provided below the upper wall 23 of the first container 20, and houses the antenna 44. Specifically, the non-reduced pressure space 20q is composed of a partition Y, legs Z that support it, and the upper wall 23 of the first container 20. The non-reduced pressure space 20q is not reduced, and is under atmospheric pressure.

[0019] A portion of the non-reduced pressure space 20q is made of a material that is transparent to microwaves. For example, at least the lower part of the antenna 44 is made of a material that is transparent to microwaves, and the partition Y is made of a material that is transparent to microwaves. The material that is transparent to microwaves is, for example, a material made of a dielectric material with a small loss coefficient. Examples of dielectric materials with a small loss coefficient include ceramic glass and Teflon (registered trademark).

[0020] The antenna 44 is a member that radiates microwaves and is provided in the non-reduced pressure space 20q. The antenna 44 is, for example, a patch antenna. The antenna 44 is connected to the high-frequency oscillator circuit 41 of the accessory 80 via a transmission line such as a connecting member 43 and a cable 42. An example of the cable 42 is a coaxial cable. An example of the microwave source of the antenna 44 is a magnetron formed of a vacuum tube or a gallium nitride (GaN) semiconductor. The microwaves output from the magnetron are radiated into the first internal space 20a, which is shielded by metal, for example. As shown in FIG. 1, when the antenna 44 is provided at the top of the first container 20, the antenna 44 radiates microwaves from top to bottom.

[0021] An opening 20c is provided in the non-reduced pressure space 20q. The opening 20c penetrates the first container 20 and the second container 30, and connects the housing 10 to the non-reduced pressure space 20q. The opening 20c allows heat to be dissipated through the gas around the antenna 44 and the gas inside the housing 10 outside the non-reduced pressure space 20q, thereby efficiently cooling the antenna 44. This improves the efficiency of microwave supply. The opening 20c is preferably provided, for example, at an end of the non-reduced pressure space 20q that is away from the antenna 44. For example, it is preferable that the antenna 44 is provided in the center of the non-reduced pressure space 20q, and the opening 20c is provided at the end of the non-reduced pressure space 20q. This improves the cooling efficiency of the antenna 44.

[0022] The second container 30 has a second internal space 30a that accommodates the first container 20 and a second opening 34a that communicates with the second internal space 30a. More specifically, the second container 30 has an upper wall 33, a side wall 32, and a lower wall 31. The upper wall 33 also functions as a lid (also referred to as a second lid) 35 that opens and closes the second opening 34a. The second lid 35 can be switched between an open state in which the second opening 34a is open and a closed state in which the second opening 34a is closed. The area surrounded by the side wall 32, the lower wall 31, and the second lid 35 (upper wall 33) forms the second internal space 30a. A user can remove items contained in the second internal space 30a through the second lid 35 and the second opening 34a. The upper wall 33, the side wall 32, and the lower wall 31 of the second container 30 are also simply referred to as the walls of the second container 30.

[0023] The top wall 23 of the first container 20 and the top wall 33 of the second container 30 are in contact with each other. Therefore, the second internal space 30a accommodates the first container 20 with the top wall 33 of the second container 30 placed on the top wall 23 of the first container 20.

[0024] In this embodiment, the second container 30 is a container capable of maintaining a reduced pressure (also referred to as a vacuum container). An intake / exhaust port 30b is provided in the side wall 32 of the second container 30. The intake / exhaust port 30b penetrates the side wall 32 in its thickness direction, allowing air to pass through and guide air from the second internal space 30a to the outside of the second container 30. The intake / exhaust port 30b is connected to a connecting pipe 53 connected to the attachment 80. As the pressure reducing unit 50 operates, the second internal space 30a is depressurized via the connecting pipe 53 and the intake / exhaust port 30b. Furthermore, when a pressure regulating valve 58 is open, the intake / exhaust port 30b allows air to pass through and guide air from the outside of the second container 30 to the second internal space 30a. The intake / exhaust port 30b and the pressure regulating valve 58 allow the depressurized state of the second internal space 30a to be released from the outside of the second container 30.

[0025] In the processing apparatus 1, when the side of the mounting surface 1000 of the second container 30 in a direction 1000a perpendicular to the mounting surface 1000 is defined as downward, an inner bottom surface 31x located below the second container 30 and inside the second container 30 is spaced apart from an outer bottom surface 21y located below the first container 20 and outside the first container 20 in Z2. The processing apparatus 1 of this aspect can condense water vapor released from the workpiece X between the inner bottom surface 31x of the second container 30 and the outer bottom surface 21y of the first container 20 and collect it as condensed moisture W, thereby efficiently removing moisture generated within the apparatus while preventing the workpiece X from being wetted by the condensed moisture W. The condensed moisture W is also simply referred to as moisture or water.

[0026] The inner bottom surface of a container refers to the surface of the bottom wall of the container that faces the internal space of the container. For example, the inner bottom surface 31x of the second container 30 is the surface of the bottom wall 31 of the second container 30 that faces the second internal space 30a. The outer bottom surface of a container refers to the surface of the bottom wall of the container that faces the opposite side to the internal space of the container. For example, the outer bottom surface 21y of the first container 20 is the surface of the bottom wall 21 of the first container 20 that faces the first internal space 20a.

[0027] Here, a conventional microwave heating apparatus will be described. FIG. 2 is a side view schematically showing a conventional microwave heating apparatus. As shown in FIG. 2, the conventional microwave heating apparatus 1R includes a first container 20R having a first internal space 20aR for accommodating an object to be treated X, a heating unit 40R for heating the first internal space 20aR, a second container 30R having a second internal space 30aR for accommodating the first container 20R, and a decompression unit 50R for decompressing the first internal space 20aR by decompressing the second internal space 30aR. The decompression unit 50R includes a cold trap 52R for capturing moisture in the air, including water vapor generated from the object to be treated X.

[0028] When treating a workpiece X with a particularly high moisture content using a conventional microwave heating apparatus 1R, the processing capacity of the cold trap 52R is at least temporarily unable to keep up with the water vapor generated from the workpiece X, causing the water vapor to condense into water inside the second container 30R. The water adhering to the inside of the second container 30R is gradually removed once the processing capacity of the cold trap 52R catches up. However, some of the water adhering to the inside of the second container 30R remains inside the second container 30R even after the drying of the workpiece X is completed. Therefore, a removal operation is required to wipe off the moisture remaining inside the second container 30R.

[0029] Furthermore, in the conventional microwave heating apparatus 1R, as shown in FIG. 2, it is necessary to secure a space required for installing the cold trap 52R, making it difficult to reduce the size of the processing apparatus.

[0030] On the other hand, the processing apparatus 1 of this embodiment can guide water vapor released from the workpiece X in the first container 20 to the second container 30 through the vent 20b, and condense the water vapor between the inner bottom surface 31x of the second container 30 and the outer bottom surface 21y of the first container 20 to recover it as condensed water W. Therefore, in the processing apparatus 1, there is no need to separately provide a cold trap outside the second container 30 to capture water vapor released from the workpiece X, and the apparatus can be made smaller.

[0031] Furthermore, when the object to be treated X is food, the condensed water W collected on the inner bottom surface 31x of the second container 30 may contain nutrients of the object to be treated X. A user can also use the condensed water W collected from the object to be treated X for cooking or the like.

[0032] In this embodiment, a configuration will be described in which the first lid 25 becomes at least a part of the top wall 23 of the first container 20 when the first lid 25 is placed in the closed state, but the first lid 25 may also become a part of the side wall 22 when the first lid 25 is placed in the closed state. In this case, the first lid 25 is preferably placed at a position higher than the water level of water (condensed water W) that may accumulate on the inner bottom surface 31x of the second container 30.

[0033] In this embodiment, a configuration will be described in which the second lid 35 becomes at least a part of the upper wall 33 of the second container 30 when the second lid 35 is placed in the closed state, but the second lid 35 may also become a part of the side wall 32 when the second lid 35 is placed in the closed state. In this case, the second lid 35 is preferably placed at a position higher than the water level of water (condensed water W) that may accumulate on the inner bottom surface 31x of the second container 30.

[0034] In a direction 1000b parallel to the mounting surface 1000 of the second container 30, it is preferable that the inner side surface 32x located inside the second container 30 and the outer side surface 22y located outside the first container 20 are spaced apart. The processing device 1 of this aspect can condense and collect water vapor released from the workpiece X between the inner side surface 32x of the second container 30 and the outer side surface 22y of the first container 20, so that the workpiece X can be dried efficiently.

[0035] The inner side surface of a container refers to the surface of the side wall of the container that faces the internal space of the container. For example, the inner side surface 32x of the second container 30 is the surface of the side wall 32 of the second container 30 that faces the second internal space 30a. The outer side surface of a container refers to the surface of the side wall of the container that faces the opposite side to the internal space of the container. For example, the outer side surface 22y of the first container 20 is the surface of the side wall 22 of the first container 20 that faces the first internal space 20a.

[0036] The intake and exhaust port 30b of the second container 30 is preferably located at a position Z1 above the outer bottom surface 21y of the first container 20. Because the upper limit of the water level of the condensed water W is below the outer bottom surface 21y of the first container 20, by positioning the intake and exhaust port 30b of the second container 30 at a position Z1 above the outer bottom surface 21y of the first container 20, the processing device 1 can prevent the intake and exhaust port 30b from being blocked by the condensed water W accumulated on the bottom wall 31 of the second container 30, and can efficiently reduce the pressure inside the second container 30. Furthermore, the intake and exhaust port 30b of the second container 30 is more preferably located at a position Z1 above the centroid of the second container 30 in a cross section in a direction 1000a perpendicular to the mounting surface 1000 of the second container 30. The processing device 1 of this aspect can prevent water from being sucked into the intake and exhaust port 30b due to splashing on the water surface of the condensed water W.

[0037] The drain outlet 30e of the second container 30 is provided on the bottom wall 31 located below Z2 of the second container 30, or on the bottom Z2 of the side wall 32 of the second container 30 located in the direction 1000b parallel to the placement surface 1000. Here, "below the side wall" refers to a portion of the member constituting the side wall that is located below. Specifically, it refers to a portion located below the centroid of the side wall in the vertical cross section of the member constituting the side wall.

[0038] The drain outlet 30e penetrates the lower wall 31 or the lower portion Z2 of the side wall 32 of the second container 30 in the thickness direction. The drain outlet 30e connects from the second internal space 30a to the outside of the second container 30. The drain outlet 30e of the second container 30 is connected to the drain hose 122 of the drain unit 120. More specifically, the drain outlet 30e is connected to the drain hose 122 via a connecting pipe 121 (e.g., a drain nipple) of the drain unit 120. In this way, the drain outlet 30e of the second container 30 connects from the second internal space 30a to the outside of the second container 30.

[0039] It is preferable that the second container 30 is a heat-resistant container. The second container 30 provided in the processing device 1 of this embodiment can be used as a cooking utensil as it is after collecting the condensed water W.

[0040] The accessory 80 includes a high-frequency oscillation circuit 41, a heat sink 45, a cooling fan 46 of the accessory 80, a control unit 60, a power supply 70, a vacuum pump 51, etc. As will be described later, the high-frequency oscillation circuit 41, the heat sink 45, and the cooling fan 46 are components that make up the heating unit 40, and the vacuum pump 51 is a component that makes up the pressure reduction unit 50. The accessory 80 is connected to the second container 30 via a connecting pipe 53 (e.g., a vacuum nipple), and is also connected to the non-pressure reduced space 20q of the first container 20 via a transmission line such as the connecting member 43 and the cable 42.

[0041] The heating unit 40 heats the first internal space 20a. The heating unit 40 heats (e.g., dielectric heating) the workpiece X accommodated in the first internal space 20a, which can cause water to evaporate from the workpiece X. The heating unit 40 includes a high-frequency oscillation circuit 41, a heat sink 45, a cooling fan 46, a transmission line (e.g., a connection member 43 and a cable 42, etc.) that connects the high-frequency oscillation circuit 41 and the antenna 44, the antenna 44, etc.

[0042] The heating unit 40 is, for example, a dielectric heating unit that irradiates microwaves into the first internal space 20a. In this case, the first container 20 is a shielding container that shields microwaves (referred to as a microwave shielding container). The heating unit 40 may heat the first internal space 20a by a method other than dielectric heating. For example, the heating unit 40 may generate an AC magnetic field in the first internal space 20a to inductively heat the first internal space 20a. In this case, the first container 20 is a shielding container that shields the AC magnetic field.

[0043] The heating unit 40 preferably heats the workpiece X from an upper side Z1 opposite to a lower side Z2 in a direction 1000a perpendicular to the mounting surface 1000 of the second container 30. In the processing device 1 of this aspect, the heating unit 40 is prevented from getting wet by the condensed moisture W accumulated in the second container 30.

[0044] The pressure reducing unit 50 reduces the pressure of the first internal space 20a by reducing the pressure of the second internal space 30a. This lowers the boiling point of water in the first internal space 20a, making it easier for water to evaporate from the workpiece X accommodated in the first internal space 20a. The pressure reducing unit 50 includes a connecting pipe 53 (e.g., a vacuum nipple), a vacuum hose 54, a branching unit 55, a vacuum hose 56, a vacuum pump 51, a vacuum hose 57, a pressure adjustment valve 58, a vacuum hose 59, etc.

[0045] The branching portion 55 is connected to a vacuum hose 56 that guides air from the branching portion 55 to the vacuum pump 51, and a vacuum hose 59 that guides air from the branching portion 55 to the pressure regulating valve 58, and can be switched between a state in which air is guided only to the vacuum hose 56 and a state in which air is guided only to the vacuum hose 59.

[0046] The processing apparatus 1 preferably further includes a condenser 110 located below the second container 30 in the lower portion Z2 and adjacent to the outer bottom surface 31y located outside the second container 30. The condenser 110 has a cooling function. In the processing apparatus 1 of this embodiment, the condenser 110 can cool the outer bottom surface 31y of the second container 30, so that water vapor from the object to be processed X released into the second container 30 is likely to condense near the outer bottom surface 31y of the second container 30. As a result, the processing apparatus 1 can efficiently capture water vapor released from the object to be processed X on the inner bottom surface 31x of the second container 30. The outer bottom surface 31y of the second container 30 is the surface of the lower wall 31 of the second container 30 opposite the second internal space 30a.

[0047] It is more preferable that the condensation section 110 is disposed in contact with the outer bottom surface 31y of the second container 30. The processing apparatus 1 of this aspect can efficiently capture water vapor released from the object to be processed X on the inner bottom surface 31x of the second container 30.

[0048] The processing device 1 preferably further includes a drainage section 120 connected to the bottom wall 31 located below Z2 of the second container 30 or the bottom Z2 of the side wall 32 of the second container located in a direction parallel to the placement surface 1000. The processing device 1 of this aspect can discharge condensed moisture W accumulated in the second container 30 to outside the second container 30 from the bottom Z2 of the bottom wall 31 or the side wall 32 of the second container 30.

[0049] 1, the drain unit 120 includes a drain outlet 30e and a drain hose 122. In addition to the drain outlet 30e and the drain hose 122, the drain unit 120 includes, for example, a connecting pipe 121 (e.g., a drain nipple), an on-off valve 123, a drain hose 124, and a connecting pipe 125 (e.g., a drain nipple).

[0050] The on-off valve 123 is switchable between an open state in which the condensed water W in the second internal space 30a is discharged to the outside of the second internal space 30a, and a closed state in which the condensed water W is retained in the second internal space 30a.

[0051] One end of the drain hose 122 is connected to the connecting pipe 121. The connecting pipe 121 is attached to the drain outlet 30e of the second container 30. The other end of the drain hose 122 is connected to the on-off valve 123. This allows the connecting pipe 121 and the drain hose 122 to pass condensed moisture W between the second container 30 and the on-off valve 123.

[0052] The on-off valve 123 is connected to a drain hose 124 that guides the condensed water W from the on-off valve 123 to the connecting pipe 125. When the on-off valve 123 is opened, the condensed water W accumulated on the inner bottom surface 31x of the second container 30 is discharged to the outside of the second container 30 via the connecting pipe 121, the drain hose 122, the on-off valve 123, the drain hose 124, and the connecting pipe 125. The opening degree of the on-off valve 123 is controlled by the control unit 60.

[0053] As described above, the processing apparatus 1 of this embodiment can efficiently store the condensed moisture W in the second container 30 (on the inner bottom surface 31x of the second container 30), making it easier to process the condensed moisture W in the processing apparatus 1 than in conventional microwave heating apparatuses. Also, the processing apparatus 1 is provided with the drainage unit 120 on the premise that moisture will be captured in the second container 30, making it easier to process the condensed moisture W in the processing apparatus 1 than in conventional microwave heating apparatuses. Furthermore, the processing apparatus 1 does not require the cold trap 52R that is provided in conventional microwave heating apparatuses, making it possible to make the configuration of the processing apparatus 1 more compact and simpler than when a cold trap for capturing moisture is provided outside the second container 30.

[0054] The control unit 60 controls the decompression unit 50 and the heating unit 40 to perform the decompression drying operation. The control unit 60 is provided, for example, in the attachment 80, and includes, for example, a chip-like control component and a board on which the control component is mounted. The control unit 60 may be a microcomputer.

[0055] The control unit 60 controls the operation of the heating unit 40, for example, by controlling the power supplied to the high-frequency oscillation circuit 41. The control unit 60 also controls the operation of the pressure reducing unit 50, for example, by controlling the power supplied to the vacuum pump 51 and the pressure regulating valve 58 and the opening degree of the pressure regulating valve 58. In addition, the power source 70 supplies power to the control unit 60.

[0056] The control unit 60 can switch the state of the on-off valve 123 between the open state and the closed state, and preferably switches the on-off valve 123 from the closed state to the open state when the second internal space 30a is at normal pressure. The treatment device 1 of this aspect can efficiently discharge moisture (condensed moisture W) stored in the second container 30 to the outside of the second container 30.

[0057] Preferably, the control unit 60 further controls the heating unit 40 and the decompression unit 50 to execute the reduced-pressure drying process while the on-off valve 123 is in the closed state. The processing device 1 of this embodiment can store the condensed moisture W in the second internal space 30a. Furthermore, when the reduced-pressure drying process is completed, the control unit 60 preferably controls the decompression unit 50 to return the second internal space 30a to normal pressure, and then switches the on-off valve 123 from the closed state to the open state. When the reduced-pressure drying process is completed, the processing device 1 of this embodiment can open the first lid 25 and the second lid 35, and can efficiently discharge the moisture (condensed moisture W) stored in the second container 30 to the outside of the second container 30.

[0058] FIG. 3 is a timing chart showing time changes in the states of the heating unit, decompression unit, condensation unit, and drainage unit provided in the treatment device according to the first embodiment. FIG. 4 is a side view schematically showing a state before the start of operation of the treatment device according to the first embodiment. FIG. 5 is a side view schematically showing a state in which the treatment device according to the first embodiment decompresses the first internal space. FIG. 6 is a side view schematically showing a state in which the treatment device according to the first embodiment heats the first internal space. FIG. 7 is a side view schematically showing a state in which the treatment device according to the first embodiment returns the pressure in the first internal space to normal pressure. FIG. 8 is a side view schematically showing a state in which the treatment device according to the first embodiment discharges moisture recovered from the treatment object through the drainage unit. The method for drying the treatment object X under reduced pressure using the treatment device 1 of this embodiment will be described below. In FIGS. 5 to 7, the outline arrows indicate the flow of air. In FIG. 8, the outline arrows indicate the flow of condensed moisture. In FIGS. 5 to 8, some of the reference numerals used in FIG. 4 are omitted to make the outline arrows more noticeable.

[0059] As shown in FIGS. 3 and 4, before the reduced pressure drying process is started by the processing device 1, the object to be processed X is placed in the first internal space 20a, and the first lid 25 and the second lid 35 are closed.

[0060] Before the reduced pressure drying process starts, i.e., before the control unit 60 receives an instruction to start the reduced pressure drying operation, the heating unit 40 and the decompression unit 50 are not driven, and the first internal space 20a (reduced pressure space 20p) is not heated or decompressed. In addition, the condenser unit 110 is not driven, so the lower wall 31 of the second container 30 is not cooled. Before the reduced pressure drying process starts, the on-off valve 123 is in an open state.

[0061] When the control unit 60 receives an instruction to start the reduced-pressure drying operation, first, as shown in Figures 3 and 5, the control unit 60 starts driving the decompression unit 50 at timing T1. This starts decompressing the first internal space 20a (reduced-pressure space 20p). More specifically, the control unit 60 closes the pressure adjustment valve 58 and starts driving the vacuum pump 51. Also, at timing T1, the control unit 60 closes the on-off valve 123. Note that the first internal space 20a remains unheated as it was before the operation started.

[0062] The control unit 60 may or may not start cooling at timing T1, but preferably starts cooling as shown in Figures 3 and 5. The processing apparatus 1 of this aspect can sufficiently cool the bottom wall 31 of the second container 30 before microwaves are radiated into the first container 20, and therefore can efficiently condense and recover water vapor in the second container 30.

[0063] The timing at which the control unit 60 starts depressurizing, the timing at which the control unit 60 starts cooling, and the timing at which the on-off valve 123 is closed may be the same, or at least one of the timings may be different from the others. These timings occur before timing T2 at which the control unit 60 starts heating, which will be described later.

[0064] 3 and 6, the control unit 60 starts heating the first internal space 20a at timing T2 after timing T1. That is, the control unit 60 starts depressurization and cooling, closes the on-off valve 123, and then starts heating.

[0065] Specifically, at timing T2, the control unit 60 starts driving the heating unit 40. For example, the control unit 60 drives the high-frequency oscillation circuit 41 to drive the antenna 44. This starts heating the first internal space 20a. When heating starts, moisture in the workpiece X turns into gas (water vapor) and is released. The water vapor is cooled by the condenser 110 on the bottom wall 31 of the second container 30 to become condensed moisture W.

[0066] Furthermore, continuing from timing T1, the first internal space 20a (decompressed space 20p) is decompressed, the lower wall 31 of the second container 30 is cooled, and the pressure adjustment valve 58 and the on-off valve 123 are set to the closed state.

[0067] Next, as shown in Figures 3 and 7, at timing T3 after timing T2, the control unit 60 ends the decompression of the first internal space 20a (decompressed space 20p), ends the heating of the first internal space 20a, and ends the cooling of the lower wall 31 of the second container 30.

[0068] Specifically, at timing T3, the control unit 60 stops the operation of the pressure reducing unit 50 (i.e., opens the pressure adjustment valve 58 and stops the operation of the vacuum pump 51), thereby completing the decompression of the first internal space 20a (decompressed space 20p). As a result, the decompressed space 20p is restored to normal pressure. Also, at timing T3, the control unit 60 stops the operation of the heating unit 40 (i.e., stops the operation of the high-frequency oscillation circuit 41, thereby stopping the operation of the antenna 44), thereby completing the heating of the first internal space 20a. Also, at timing T3, the control unit 60 stops the operation of the condenser unit 110, thereby completing the cooling of the bottom wall 31 of the second container 30. Note that the on-off valve 123 remains closed from timing T2.

[0069] The timings at which the control unit 60 ends the depressurization, heating, and cooling may be the same, or at least one of the timings may be different from the others. These timings are before timing T4 at which the control unit 60 starts draining water, which will be described later.

[0070] Next, as shown in FIGS. 3 and 8, the control unit 60 starts draining the condensed water W accumulated in the second container 30 at timing T4 after timing T3.

[0071] Specifically, at timing T4, the control unit 60 opens the on-off valve 123. The treatment device 1 configured as described above can discharge the condensed moisture W accumulated on the inner bottom surface 31x of the second container 30 to the outside of the second container 30 via the drainage unit 120. Note that at timing T4, the first internal space 20a (reduced pressure space 20p) is in the process of being restored to normal pressure or has been restored to normal pressure, the first internal space 20a is not heated, and the bottom wall 31 of the second container 30 is not cooled.

[0072] (Embodiment 2) FIG. 9 is a conceptual diagram showing a cross section of a suction device included in a processing apparatus according to the second embodiment. A suction device 300 may be used instead of the vacuum pump 51 included in the pressure reducing unit 50. The suction device 300 includes a housing 311 having a water storage unit 310 therein for storing water, a nozzle 340, a flow path 320 connecting the water storage unit 310 and the nozzle 340, a pump 330 for causing the water from the water storage unit 310 to flow into the nozzle 340 via the flow path 320, and a cooling unit 360 for cooling the water flowing into the suction space E2 of the nozzle 340 (see FIG. 9). One or more of each component may be provided in the suction device 300. The processing apparatus 1 according to this embodiment is substantially similar to the processing apparatus 1 according to the first embodiment, except that the pressure reducing unit 50 includes the suction device 300 instead of the vacuum pump 51, and therefore, a redundant description will be omitted.

[0073] The pressure reducing unit 50 includes a connecting pipe 53 (e.g., a vacuum nipple), a vacuum hose 54, a branching unit 55, a vacuum hose 56, a suction device 300, a vacuum hose 57, a pressure adjusting valve 58, and a vacuum hose 59. In this embodiment, the vacuum pump 51 in FIG. 1 is replaced with the suction device 300. The vacuum hose 370 in FIG. 9 corresponds to the vacuum hose 54 in FIG. 1. The suction device 300 will be further described below.

[0074] Housing 311 is cubic or rectangular parallelepiped in shape with an opening at the top, and has inside water storage section 310 that stores water 300 W. At the top of housing 311, lid section 312 that closes the opening of housing 311 is arranged, and lid section 312 is provided with protrusion 313 that protrudes upward.

[0075] Nozzle 340 has inflow section 340a into which water flows, throttle section 341 that increases the flow rate of the inflowing water, suction space E2 that is connected to the external space of housing 311 and into which water that has passed through throttle section 341 flows, and discharge section 340b that discharges the water that has flowed into suction space E2 into water storage section 310. Nozzle 340 has an external shape that is, for example, cylindrical.

[0076] Inlet portion 340a is an opening connected to flow path 320, and the diameter of the opening is preferably larger than the cross section of flow path 320. Constriction portion 341 has a shape that tapers toward outlet portion 340b. This makes the flow rate of water flowing into nozzle 340 via inlet portion 340a greater than the flow rate of water in flow path 320. A space E1 is provided between inlet portion 340a and constriction portion 341. The water flowing into nozzle 340 via inlet portion 340a flows into suction space E2 via space E1.

[0077] The suction space E2 is connected to the external space of the housing 311, and is a space into which water flows that has passed through the throttle section 341. More specifically, the suction space E2 is connected to the external space of the housing 311, and is a space into which the water that has passed through the throttle section 341 flows, thereby sucking in air from the external space of the housing 311.

[0078] The nozzle 340 is provided with an opening 340c that communicates with the external space of the housing 311. The opening 340c is formed, for example, upstream of the tip of the throttle section 341 (i.e., the end of the throttle section 341 on the discharge section 340b side). Water that flows into the nozzle 340 via the inlet 340a passes through the throttle section 341 and is then discharged from the discharge section 340b into the water storage section 310, creating a negative pressure state around the throttle section 341. When a negative pressure state occurs around the throttle section 341, air is sucked into the nozzle 340 from the external space via the opening 340c. In this way, at least the space from the vicinity of the throttle section 341 to the discharge section 340b forms a suction space E2. The air sucked in from the opening 340c is discharged from the discharge section 340b together with water.

[0079] The opening 340c may be connected to an external device or the like via, for example, an intake path 352, an intake nozzle 351 provided on the upper surface or the like of the lid 312, a vacuum hose, or the like. The intake path 352 is, for example, a pipe.

[0080] Flow path 320 is a path connecting water storage section 310 and nozzle 340. More specifically, a base end side (i.e., upstream side) of flow path 320 is connected to an upper surface opening 333b of impeller cover 333 of pump 330, and a tip end side (i.e., downstream side) of flow path 320 is connected to inlet section 340a of nozzle 340. Flow path 320 is formed, for example, in a tubular shape.

[0081] Pump 330 causes water from water storage section 310 to flow into nozzle 340 via flow path 320. Pump 330 includes motor 331, impeller 332, and impeller cover 333 that covers impeller 332. Motor 331 is housed in protruding section 313 of lid section 312, and rotates impeller 332 via rotating shaft 334 provided above impeller 332. Bottom opening 333a is provided in the center of the bottom surface of impeller cover 333, and top opening 333b, which communicates with flow path 320, is provided on the top surface of impeller cover 333. Pump 330 is configured to rotate impeller 332 using motor 331, thereby guiding water in water storage section 310 into impeller cover 333 through bottom opening 333a of impeller cover 333, and then guiding the water guided into impeller cover 333 to circulation path 320 through top opening 333b.

[0082] The cooling unit 360 cools the water flowing into the suction space E2. When the motor 331 is driven, the water temperature in the water storage unit 310 rises. The suction device 300, equipped with the cooling unit 360, suppresses the rise in water temperature in the water storage unit 310. As the water temperature rises, the ultimate vacuum pressure in the nozzle 340 increases, reducing the air suction capacity. Therefore, suppressing the rise in water temperature suppresses the decline in suction capacity. Furthermore, the air sucked into the suction space E2 may contain water vapor. When the water flowing into the suction space E2 is cooled by the cooling unit 360, the nozzle 340 can effectively condense and capture the water vapor in the sucked air. To further enhance these effects, the cooling unit 360 preferably cools the water passing through the space E1. That is, in the suction device 300 of this embodiment, a space E1 is preferably provided between the inlet 340a and the throttle unit 341, and the cooling unit 360 preferably cools the water passing through the space E1. When the cooling section 360 cools the water passing through the space E1, the water flowing into the suction space E2 becomes cooled water.

[0083] The cooling unit 360 includes an evaporator 361, a condenser 362, a compressor 363, and an expansion valve 364, and these components are connected by refrigerant piping 365 through which a refrigerant flows. The condenser 362, the compressor 363, and the expansion valve 364 are disposed above the lid 312 of the water storage unit 310. The evaporator 361 is disposed so as to be close to or in contact with the outer surface of the nozzle 340. In particular, it is preferable that the evaporator 361 be disposed so as to be close to or in contact with at least a portion of the outer surface of the nozzle 340 that is close to the space E1.

[0084] Although the embodiments of the present disclosure have been described above, the present disclosure is not limited to the above embodiments and can be implemented in various forms without departing from the spirit of the present disclosure. Furthermore, the components disclosed in the above embodiments can be modified as appropriate. For example, some of the components shown in one embodiment may be added to the components of another embodiment, or some of the components shown in one embodiment may be deleted from the embodiment.

[0085] Furthermore, the drawings mainly show each component in a schematic manner to facilitate understanding of the invention, and the thickness, length, number, spacing, etc. of each component shown in the drawings may differ from the actual ones due to the convenience of creating the drawings. Furthermore, the configurations of each component shown in the above embodiment are merely examples and are not particularly limited, and it goes without saying that various modifications are possible within a scope that does not substantially deviate from the effects of the present disclosure. [Explanation of symbols]

[0086] 1: Processing equipment 1R: Microwave heating device 10: Housing 20, 20R: First container 20a, 20aR: First interior space 20b: Ventilation hole 20c: opening 20p: Decompression space 20q: Non-decompressed space 21: Lower wall 21x: Inner bottom 21y: Outer bottom 22: Side wall 22y: Outer side 23: Upper wall 24: First main body 24a: First opening 25: First Lid 30, 30R: Second container 30a, 30aR: Second internal space 30b: Intake and exhaust port 30e: Drain port 31: Lower wall 31x:Inner bottom 31y: Outer bottom 32: Side wall 32x: Inside side 33: Upper wall 34a: Second opening 35: Second Lid 40, 40R: Heating section 41: High frequency oscillator circuit 42: Cable 43: Connection member 44: Antenna 45: Heat sink 46: Cooling fan 50, 50R: Pressure reduction section 51: Vacuum pump 52R: Cold Trap 53: Connecting pipe 54: Vacuum hose 55: Branch 56: Vacuum hose 57: Vacuum hose 58: Pressure regulating valve 59: Vacuum hose 60: Control unit 70: Power supply 80: Accessory 110: Condenser 120: Drainage section 121: Connecting pipe 122: Drainage hose 123: On-off valve 124: Drainage hose 125: Connecting pipe 300:Suction device 300W: water 310: Water storage section 311: Cabinet 312: Lid 313:Protrusion 320: Distribution Channels 330: Pump 331: Motor 332: Impeller 333: Impeller cover 333a: Bottom opening 333b: Top opening 334: Rotation axis 340: Nozzle 340a: Inlet 340b:Discharge part 340c:Aperture 341: Squeezing section 351: Intake nozzle 352: Intake path 360: Cooling section 361: Evaporator 362: Condenser 363: Compressor 364: Expansion valve 365: Refrigerant piping 370: Vacuum hose 1000:Placement surface 1000a: Orthogonal direction 1000b: parallel direction E1: Space E2: Suction space W: Condensed water X: Processing object Y: Partition Z: Leg

Claims

1. a first container having a first internal space for accommodating the object to be treated; a heating unit that heats the first internal space; a second container having a second interior space for accommodating the first container; a pressure reducing unit that reduces the pressure of the first internal space by reducing the pressure of the second internal space, A processing device in which, when the side of the mounting surface of the second container in a direction perpendicular to the mounting surface is considered downward, an inner bottom surface located below the second container and inside the second container is separated from an outer bottom surface located below the first container and outside the first container.

2. The processing apparatus according to claim 1 , wherein an inner side surface located inside the second container and an outer side surface located outside the first container are spaced apart in a direction parallel to the mounting surface of the second container.

3. The processing apparatus according to claim 1 , wherein the heating unit heats the object to be processed from above, opposite to the below in a direction perpendicular to the mounting surface of the second container.

4. the heating unit is a dielectric heating unit, The processing apparatus according to claim 1 , wherein the first container is a microwave-shielding container.

5. The processing apparatus of claim 1 , wherein the second container is a heat-resistant container.

6. The treatment device of claim 1 , further comprising a condensation section positioned below the second vessel and adjacent to an exterior bottom surface positioned outside the second vessel.

7. A processing device according to any one of claims 1 to 6, further comprising a drainage section connected to the lower wall located below the second container or the lower side wall of the second container located in a direction parallel to the placement surface.

8. the drainage unit further includes an on-off valve that can be switched between an open state in which moisture in the second internal space is discharged to the outside of the second internal space and a closed state in which the moisture is retained in the second internal space, The processing device further includes a control unit that switches the state of the on-off valve between the open state and the closed state, The processing apparatus according to claim 7 , wherein the control unit switches the on-off valve from the closed state to the open state when the second internal space is at normal pressure.

9. the control unit further controls the heating unit and the decompression unit to perform a reduced-pressure drying process with the on-off valve in the closed state; 9. The processing apparatus according to claim 8, wherein, when the reduced-pressure drying process is completed, the control unit controls the decompression unit to return the second internal space to normal pressure, and then switches the on-off valve from the closed state to the open state.

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