Measurement system, control device, measurement method, and program

Abstract

It provides water with a stable water quality. [Solution] The system includes a water quality measuring instrument 300 for measuring the first water quality of a sample solution, a storage unit 400 for storing the measured values ​​measured by the water quality measuring instrument 300, a supply unit 200 for switching and supplying a sample solution from among a plurality of sample solutions to the water quality measuring instrument 300, and a control device 100 for calculating statistical data using the measured values ​​measured by the water quality measuring instrument 300 stored in the storage unit 400, and for controlling the timing of switching the sample solution supplied by the supply unit 200 to the water quality measuring instrument 300 based on the calculated statistical data.

Description

Technical Field

[0001] The present invention relates to a measurement system, a control device, a measurement method, and a program.

Background Art

[0002] A system for monitoring water quality is disclosed in which the residual chlorine concentrations of a plurality of systems of water having different water qualities are measured by a single measuring device by controlling the opening and closing of a solenoid valve according to a selection signal (see, for example, Patent Document 1). By controlling the opening and closing of this solenoid valve, the water to be measured by the measuring device is switched. This switching is performed according to the operation plan data. Patent Document 1 describes that when the water quality exceeds the management limit as a result of water quality monitoring, the schedule is changed so that the system is monitored at a short cycle until the measured value returns to the normal range.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] As described in Patent Document 1, even if the switching frequency is changed when the water quality measured by the measuring device exceeds the management limit, control based on the subsequent measurement results will be performed, which may affect the water quality of the supplied water.

[0005] An object of the present invention is to provide a measurement system, a control device, a measurement method, and a program capable of providing water with stable water quality.

Means for Solving the Problems

[0006] The measurement system of the present invention is A first measuring instrument for measuring the first water quality of the sample solution, A storage unit that stores the measurement values ​​measured by the first measuring instrument, A supply unit that switches and supplies the sample solution to be supplied to the first measuring instrument from among several sample solutions, The system includes a control device that calculates statistical data using the measurement values ​​measured by the first measuring instrument stored in the storage unit, and controls the timing of switching the sample liquid supplied by the supply unit to the first measuring instrument based on the calculated statistical data.

[0007] Furthermore, the control device of the present invention is A data acquisition unit that acquires measurement values ​​of multiple sample solutions measured by a measuring instrument, which are stored in the memory unit, A data calculation unit calculates statistical data using the measured values ​​acquired by the data acquisition unit, The system includes a timing control unit that controls the timing for switching the sample solution supplied to the measuring instrument from among the plurality of sample solutions, based on the statistical data calculated by the data calculation unit.

[0008] Furthermore, the measurement method of the present invention is The process of obtaining the measurement values ​​of multiple sample solutions measured by the measuring instrument, which are stored in the memory unit, The process of calculating statistical data using the acquired measurement values, Based on the statistical data calculated above, the system controls the timing for switching the sample solution supplied to the measuring instrument from among the multiple sample solutions.

[0009] Furthermore, the program of the present invention, On the computer, A procedure for obtaining measurement values ​​of multiple sample solutions measured by the measuring instrument, which are stored in the memory unit, A procedure for calculating statistical data using the acquired measurements, Based on the statistical data calculated above, the procedure is executed to control the timing of switching the sample solution supplied to the measuring instrument from among the multiple sample solutions.

Advantages of the Invention

[0010] In the present invention, water with stable water quality can be provided.

Brief Description of the Drawings

[0011] [Figure 1] It is a diagram showing a first embodiment of the measurement system of the present invention. [Figure 2] It is a diagram showing an example of the components included in the control device shown in FIG. 1. [Figure 3] It is a flowchart for explaining an example of the measurement method in the measurement system shown in FIG. 1. [Figure 4] It is a diagram showing a second embodiment of the measurement system of the present invention. [Figure 5] It is a diagram showing an example of the components included in the control device shown in FIG. 4. [Figure 6] It is a flowchart for explaining an example of the measurement method in the measurement system shown in FIG. 4. [Figure 7] It is a diagram showing a third embodiment of the measurement system of the present invention. [Figure 8] It is a diagram showing an example of the components included in the control device shown in FIG. 7. [Figure 9] It is a flowchart for explaining an example of the measurement method in the measurement system shown in FIG. 7. [Figure 10] It is a diagram showing a fourth embodiment of the measurement system of the present invention. [Figure 11] It is a diagram showing an example of the components included in the control device shown in FIG. 10. [Figure 12] It is a flowchart for explaining an example of the measurement method in the measurement system shown in FIG. 10. [Figure 13] It is a diagram showing an example of a liquid production and supply system to which the measurement system of the present invention is applied. [Figure 14] It is a diagram showing another example of a liquid production and supply system to which the measurement system of the present invention is applied.

Best Mode for Carrying Out the Invention

[0012] Hereinafter, embodiments of the present invention will be described with reference to the drawings. (First Embodiment)

[0013] FIG. 1 is a diagram showing a first embodiment of the measurement system of the present invention. As shown in FIG. 1, the measurement system in this embodiment includes a control device 100, a supply unit 200, a water quality measuring device 300, and a storage unit 400. The control device 100 and the supply unit 200 are connected to each other such that the supply unit 200 receives a control signal from the control device 100 and operates based on the received control signal. The control device 100 and the storage unit 400 are connected to each other such that the control device 100 can read the information stored in the storage unit 400. The water quality measuring device 300 and the storage unit 400 are connected to each other such that the storage unit 400 can store the measurement values measured by the water quality measuring device 300. These connections are made via wireless or wired connections.

[0014] The water quality measuring device 300 is a first measuring device that measures the first water quality of the sample liquid supplied from the supply unit 200. The water quality measuring device 300 measures the TOC (Total Organic Carbon) concentration of the sample liquid as the first water quality. The water quality measuring device 300 measures parameters that are difficult to measure continuously.

[0015] The storage unit 400 stores the measurement values measured by the water quality measuring device 300. The storage unit 400 stores the measurement values in a manner that enables identification of which sample liquid the measurement values are for. For example, the storage unit 400 assigns unique identification information to each sample liquid and stores the measurement values in association with the identification information when storing the measurement values. The storage unit 400 stores the measurement values together with time information indicating the time when the measurement values were measured when storing the measurement values.

[0016] The supply unit 200 switches and supplies the sample solution to the water quality meter 300 from among several sample solutions. Figure 1 shows the case where there are two sample solutions, but there may be three or more. The number of sample solutions is the same in the following explanation. The supply unit 200 switches the sample solution to be supplied to the water quality meter 300 based on the control signal transmitted from the control device 100. The supply unit 200 has multiple input ports and one output port, and may select one sample solution from the sample solutions supplied from each of the multiple input ports and supply it to the water quality meter 300 from the output port.

[0017] The control device 100 controls the timing of switching the sample liquid supplied by the supply unit 200 to the water quality meter 300 based on the measured values ​​measured by the water quality meter 300 stored in the memory unit 400. Figure 2 is a diagram showing an example of the components of the control device 100 shown in Figure 1. As shown in Figure 2, the control device 100 shown in Figure 1 has a data acquisition unit 110, a data calculation unit 120, a timing control unit 130, and an output unit 140. Note that Figure 2 shows only the components of the control device 100 shown in Figure 1 that are relevant to this embodiment.

[0018] The data acquisition unit 110 reads and acquires the measurement values ​​of multiple sample solutions measured by the water quality measuring instrument 300 from the storage unit 400. If the storage unit 400 stores the measurement values ​​in association with the aforementioned identification information, the data acquisition unit 110 also reads and acquires the identification information associated with the measurement values ​​from the storage unit 400. The data acquisition unit 110 outputs the acquired measurement values ​​and identification information to the data calculation unit 120.

[0019] The data calculation unit 120 calculates statistical data using the measured values ​​output from the data acquisition unit 110. Statistical data includes data that shows the characteristics of each sample solution's measured values, such as the maximum value, minimum value, variance, fluctuation trend, number of peak detections (detection frequency), peak occurrence probability, recent fluctuation range, difference from control value, and time-series data of the measured values. The statistical data may also include the measured values ​​themselves. The data calculation unit 120 outputs the calculated statistical data to the timing control unit 130.

[0020] The timing control unit 130 controls the timing of switching the sample solution supplied by the supply unit 200 to the water quality meter 300 based on the statistical data and identification information output from the data calculation unit 120. The specific algorithm used by the timing control unit 130 to calculate the switching timing is not specified. For example, if the variance in the statistical data is large, it means that there is a large variation in the water quality measurement results, so the timing control unit 130 may control the timing of switching the sample solution supplied by the supply unit 200 to the water quality meter 300 to increase the measurement frequency of the sample solution for which that variance was measured. Also, if the difference between the measured value and the control value in the statistical data is small, there is a risk that the measured value may exceed the control value with even a small fluctuation, so the timing control unit 130 may control the timing of switching the sample solution supplied by the supply unit 200 to the water quality meter 300 to increase the measurement frequency of the sample solution for which that measured value was measured. Furthermore, if the fluctuation of the measured value per unit time is large, the timing control unit 130 may control the timing of switching the sample solution supplied by the supply unit 200 to the water quality meter 300 in order to increase the measurement frequency of the sample solution for that measured value. Alternatively, the timing control unit 130 may pre-set the correspondence between each statistical data and the switching timing and calculate the switching timing based on that correspondence. Alternatively, the timing control unit 130 may create a learning model that outputs the switching timing when each statistical data is input and use that learning model to calculate the switching timing. The timing control unit 130 may also combine multiple statistical data to control the timing of switching the sample solution supplied by the supply unit 200 to the water quality meter 300. It is preferable that the timing control unit 130 calculates the switching timing based on the most recent statistical data.

[0021] The timing control unit 130 may calculate the ratio of time (time ratio) for which the supply unit 200 selects a sample solution to supply to the water quality meter 300 based on the number of sample solutions to be supplied, and control the timing of switching the sample solutions based on the calculated ratio. In addition to the time for which the supply unit 200 selects a sample solution to supply to the water quality meter 300, the timing control unit 130 may also control the order in which the samples are selected. Specifically, if the timing control unit 130 controls the supply unit 200 to select and supply sample solution A three times and sample solution B twice per unit time to the water quality meter 300, it may control the switching of the sample solutions supplied to the water quality meter 300 in the order ABABA, or in the order AAABB.

[0022] The timing control unit 130 notifies the supply unit 200 which sample solution to select and at what timing (the timing to start and end the selection). The timing control unit 130 includes this notification in the control signal and transmits the control signal to the supply unit 200.

[0023] The output unit 140 outputs statistical data. The output unit 140 may output statistical data acquired by the timing control unit 130 from the data calculation unit 120, or it may acquire statistical data from the data calculation unit 120 and output it. The method of outputting statistical data in the output unit 140 may be display on a screen, transmitted to another device, printed, or output as audio. In addition, the output unit 140 may output only the most recently measured statistical data, or only statistical data specified externally. Furthermore, the output unit 140 may calculate and output the range of predictable measured values ​​as predicted values ​​based on the statistical data.

[0024] The statistical data output from the output unit 140 may be used for the operation management of water treatment systems and water treatment equipment that use the sample liquid.

[0025] The measurement method in the measurement system shown in Figure 1 will be described below. Figure 3 is a flowchart illustrating an example of the measurement method in the measurement system shown in Figure 1.

[0026] First, the data acquisition unit 110 reads and acquires the measured values ​​of each sample liquid to be measured by the water quality meter 300 from the storage unit 400 (step S1). At this time, the data acquisition unit 110 uses the identification information assigned to each sample liquid to be measured by the water quality meter 300 as a search key, and reads and acquires the measured values ​​associated with the said identification information from the storage unit 400. Then, the data calculation unit 120 calculates statistical data using the measured values ​​read by the data acquisition unit 110 from the storage unit 400 (step S2). Next, the timing control unit 130 calculates the timing for switching the sample liquid supplied by the supply unit 200 to the water quality meter 300 based on the statistical data calculated by the data calculation unit 120 (step S3). Then, the timing control unit 130 controls the supply unit 200 to switch the sample liquid supplied to the water quality meter 300 at the calculated timing (step S4).

[0027] In this configuration, the measured water quality values ​​for each sample solution are stored in the storage unit 400. Statistical data is calculated using the measured values ​​stored in the storage unit 400, and the timing of switching the sample solution supplied to the water quality meter 300 by the supply unit 200 is controlled based on the calculated statistical data. This allows for measuring water quality at a timing appropriate to the characteristics of the sample solution, enabling more stable water quality management. By performing this type of water quality management, it is possible to provide water with stable quality. (Second Embodiment)

[0028] Figure 4 shows a second embodiment of the measurement system of the present invention. As shown in Figure 4, the measurement system in this embodiment includes a control device 101, a supply unit 201, a water quality meter 300, and a storage unit 400. The control device 101 and the supply unit 201 are connected to each other so that the supply unit 201 receives control signals from the control device 101 and operates based on the received control signals. The control device 101 and the storage unit 400 are connected to each other so that information stored in the storage unit 400 can be read from the control device 101. These connections are made wirelessly or via wired connections. The water quality meter 300 and the storage unit 400 are the same as those in the first embodiment.

[0029] The supply unit 201 switches and supplies one of several sample solutions to the water quality meter 300. The supply unit 201 switches the sample solution to be supplied based on a control signal transmitted from the control device 101. The supply unit 201 also blows out (discharges) the sample solution that was being supplied to the water quality meter 300 based on a control signal transmitted from the control device 101. The supply unit 201 has multiple input ports and two output ports, and supplies one sample solution from each of the multiple input ports to the water quality meter 300 from one of the two output ports. The sample solution that was being supplied to the water quality meter 300 is blown out from the other output port of the supply unit 201.

[0030] The control device 101 controls the timing of switching the sample liquid supplied by the supply unit 201 to the water quality meter 300 and the timing of blowing the sample liquid by the supply unit 201, based on the measured values ​​of the water quality meter 300 stored in the memory unit 400. Figure 5 is a diagram showing an example of the components of the control device 101 shown in Figure 4. As shown in Figure 5, the control device 101 shown in Figure 4 has a data acquisition unit 110, a data calculation unit 120, a timing control unit 131, and an output unit 140. The data acquisition unit 110, the data calculation unit 120, and the output unit 140 are the same as those in the first embodiment. Note that Figure 5 shows only the components of the control device 101 shown in Figure 4 that are relevant to this embodiment.

[0031] The timing control unit 131 controls the timing of switching the sample liquid supplied by the supply unit 201 to the water quality meter 300 and the timing of the supply unit 201 blowing the sample liquid, based on the statistical data and identification information output from the data calculation unit 120. The specific algorithm used by the timing control unit 131 to calculate the switching timing is not specifically defined. For example, the timing control unit 131 controls the timing of the supply unit 201 blowing the sample liquid while simultaneously controlling the timing of switching the sample liquid supplied by the supply unit 201 to the water quality meter 300, as in the first embodiment. The timing control unit 131 may also control the supply unit 201 to blow the sample liquid during periods when it does not supply sample liquid to the water quality meter 300. This blowing time may be a preset time, or it may be a time calculated by the timing control unit 131 based on the statistical data output from the data calculation unit 120. Furthermore, the timing control unit 131 may also control the number of blows. The number of blows may be a predetermined number, or it may be a number calculated by the timing control unit 131 based on statistical data output from the data calculation unit 120.

[0032] The timing control unit 131 notifies the supply unit 201 which sample solution to select and at what timing (the timing to start and end the selection), and for how long to blow the sample solution. The timing control unit 131 includes this notification in the control signal and transmits the control signal to the supply unit 201.

[0033] The measurement method in the measurement system shown in Figure 4 will be described below. Figure 6 is a flowchart illustrating an example of the measurement method in the measurement system shown in Figure 4.

[0034] First, the data acquisition unit 110 reads and acquires the measured values ​​of each sample liquid to be measured by the water quality meter 300 from the storage unit 400 (step S11). At this time, the data acquisition unit 110 uses the identification information assigned to each sample liquid to be measured by the water quality meter 300 as a search key, and reads and acquires the measured values ​​associated with the said identification information from the storage unit 400. Then, the data calculation unit 120 calculates statistical data using the measured values ​​read by the data acquisition unit 110 from the storage unit 400 (step S12). Next, the timing control unit 131 calculates the timing for switching the sample liquid supplied by the supply unit 200 to the water quality meter 300 and the timing for the supply unit 201 to blow out the sample liquid based on the statistical data calculated by the data calculation unit 120 (step S13). Then, the timing control unit 131 controls the supply unit 201 to switch the sample liquid supplied to the water quality meter 300 or blow out the sample liquid at the calculated timing (step S14).

[0035] Thus, in addition to the functions of the first embodiment, this embodiment includes a function to control the timing at which the supply unit 201 blows out the sample liquid based on statistical data calculated using the measured values ​​stored in the memory unit 400. This makes it possible to measure the water quality at a timing appropriate to the characteristics of the water quality of the sample liquid, enabling more stable water quality management. Furthermore, the supply unit 201 can be utilized more effectively. By performing water quality management in this manner, it is possible to provide water with stable quality. (Third embodiment)

[0036] Figure 7 shows a third embodiment of the measurement system of the present invention. As shown in Figure 7, the measurement system in this embodiment includes a control device 102, a supply unit 200, a water quality measuring instrument 300, a storage unit 400, and measuring instruments 500-1 and 500-2. The control device 102 and the supply unit 200 are connected to each other so that the supply unit 200 receives control signals from the control device 102 and operates based on the received control signals. The control device 102 and the storage unit 400 are connected to each other so that information stored in the storage unit 400 can be read from the control device 102. The control device 102 and the measuring instruments 500-1 and 500-2 are connected to each other so that the control device 102 receives the measured values ​​measured and transmitted by the measuring instruments 500-1 and 500-2, respectively. These connections are made wirelessly or via wired connections. The supply unit 200, the water quality measuring instrument 300, and the storage unit 400 are the same as those in the first embodiment.

[0037] Measuring instruments 500-1 and 500-2 are each second measuring instruments. Measuring instrument 500-1 measures the water quality (second water quality) of sample solution A upstream of the supply unit 200. Measuring instrument 500-2 measures the water quality (second water quality) of sample solution B upstream of the supply unit 200. The second water quality measured by measuring instruments 500-1 and 500-2 includes the conductivity, pH value, and water temperature of sample solutions A and B, respectively. Measuring instruments 500-1 and 500-2 each measure at least one of these water quality parameters. Measuring instruments 500-1 and 500-2 each notify the control device 102 of the identification information assigned to them for self-identification and the measured water quality value.

[0038] The control device 102 controls the timing of switching the sample liquid supplied by the supply unit 200 to the water quality meter 300, based on the measured values ​​of the water quality meter 300 stored in the memory unit 400 and the measured values ​​notified from the meter 500-1 and 500-2, respectively. Figure 8 is a diagram showing an example of the components of the control device 102 shown in Figure 7. As shown in Figure 8, the control device 102 shown in Figure 7 has a data acquisition unit 112, a data calculation unit 122, a timing control unit 132, and an output unit 140. The output unit 140 is the same as that in the first embodiment. Note that Figure 8 shows only the components of the control device 102 shown in Figure 7 that are relevant to this embodiment.

[0039] In addition to the functions of the data acquisition unit 110 in the first embodiment, the data acquisition unit 112 has the function of acquiring measurement values ​​and identification information notified from measuring instruments 500-1 and 500-2, respectively. The data acquisition unit 112 outputs the measurement values ​​and identification information acquired from the storage unit 400 to the data calculation unit 122. The data acquisition unit 112 also outputs the measurement values ​​acquired from measuring instruments 500-1 and 500-2, respectively, to the data calculation unit 122 along with identification information for identifying the measuring instruments 500-1 and 500-2 that notified the measurement values.

[0040] The data calculation unit 122 calculates statistical data using the measured values ​​acquired by the data acquisition unit 112 from the storage unit 400. This calculation method is the same as that in the first embodiment. The data calculation unit 120 outputs the calculated statistical data to the timing control unit 132 along with identification information for the sample liquid that is the subject of the statistical data. The data calculation unit 122 also outputs the measured values ​​that the data acquisition unit 112 has received from measuring instruments 500-1 and 500-2, respectively, to the timing control unit 132 along with identification information for identifying the measuring instruments 500-1 and 500-2 that notified the measured values.

[0041] The timing control unit 132 controls the timing of switching the sample liquid supplied by the supply unit 200 to the water quality measuring instrument 300, based on the statistical data and identification information output from the data calculation unit 120 and the measured values ​​and identification information measured by measuring instruments 500-1 and 500-2, respectively. The specific algorithm used by the timing control unit 132 to calculate the switching timing is not specifically defined. In addition to statistical data as in the first embodiment, the timing control unit 132 may, for example, control the timing of switching the sample liquid supplied by the supply unit 200 to the water quality measuring instrument 300 to increase the measurement frequency of the sample liquid whose conductivity has been measured, since a large variance in the conductivity measured by measuring instruments 500-1 and 500-2 means a large variation in the water quality measurement results. Furthermore, in addition to statistical data as in the first embodiment, the timing control unit 132 may also control the timing of switching the sample solution supplied by the supply unit 200 to the water quality meter 300, for example, if the fluctuation per unit time of the pH value measured by measuring instruments 500-1 and 500-2 is large, to increase the measurement frequency of the sample solution for which that pH value has been measured. The timing control unit 132 may also pre-set the correspondence between each statistical data and measured value and the switching timing, and calculate the switching timing based on that correspondence. Alternatively, the timing control unit 132 may create a learning model that outputs the switching timing when each statistical data and measured value is input, and calculate the switching timing using that learning model. The timing control unit 132 may also combine multiple statistical data and measured values ​​to control the timing of switching the sample solution supplied by the supply unit 200 to the water quality meter 300. It is preferable that the timing control unit 132 calculates the switching timing based on the most recent statistical data and measured value. Furthermore, the timing control unit 132 may control the timing of switching the sample liquid supplied by the supply unit 200 to the water quality measuring instrument 300 based solely on the measured values ​​and identification information measured by measuring instruments 500-1 and 500-2, respectively.

[0042] The timing control unit 132 may calculate the ratio of time (time ratio) of the time that the supply unit 200 selects to supply to the water quality meter 300 based on the number of target sample solutions, and control the timing of switching the sample solutions based on the calculated ratio. In addition to the time that the supply unit 200 selects to supply the sample solutions to the water quality meter 300, the timing control unit 132 may also control the order in which the samples are selected. Specifically, if the timing control unit 132 controls the supply unit 200 to select and supply sample solution A three times and sample solution B twice per unit time to the water quality meter 300, it may control the switching of the sample solutions supplied to the water quality meter 300 in the order ABABA, or in the order AAABB.

[0043] The timing control unit 132 notifies the supply unit 200 which sample solution to select and at what timing (the timing to start and end the selection). The timing control unit 132 includes this notification in the control signal and transmits the control signal to the supply unit 200.

[0044] The measurement method in the measurement system shown in Figure 7 will be described below. Figure 9 is a flowchart illustrating an example of the measurement method in the measurement system shown in Figure 7.

[0045] First, the data acquisition unit 112 reads and acquires the measured values ​​of each sample liquid to be measured by the water quality measuring instrument 300 from the storage unit 400. At this time, the data acquisition unit 112 uses the identification information assigned to each sample liquid to be measured by the water quality measuring instrument 300 as a search key, and reads and acquires the measured values ​​associated with the said identification information from the storage unit 400. In addition, the data acquisition unit 112 acquires the measured values ​​notified from measuring instruments 500-1 and 500-2 respectively (step S21).

[0046] Then, the data calculation unit 122 calculates statistical data using the measured values ​​read from the storage unit 400 by the data acquisition unit 112 (step S22). Subsequently, the timing control unit 132 calculates the timing for switching the sample liquid supplied by the supply unit 200 to the water quality measuring instrument 300, based on the statistical data calculated by the data calculation unit 122 and the measured values ​​acquired by the data acquisition unit 112 from measuring instruments 500-1 and 500-2, respectively (step S23). Then, the timing control unit 132 controls the supply unit 200 to switch the sample liquid supplied to the water quality measuring instrument 300 at the calculated timing (step S24).

[0047] In this configuration, when the supply unit 200 calculates the timing for switching the sample liquid supplied to the water quality measuring instrument 300, the timing of the switch is controlled based on the currently measured values ​​for each sample liquid, in addition to statistical data calculated using the measured values ​​stored in the memory unit 400. This allows for measuring water quality at a timing that corresponds to the characteristics and fluctuations of the current sample liquid's water quality, enabling more stable water quality management. By performing water quality management in this manner, it is possible to provide water with stable quality. (Fourth embodiment)

[0048] Figure 10 shows a fourth embodiment of the measurement system of the present invention. As shown in Figure 10, the measurement system in this embodiment includes a control device 103, a supply unit 200, a water quality measuring instrument 300, a storage unit 400, measuring instruments 500-1, 500-2, 610-1, 610-2, and water treatment devices 600-1, 600-2. The control device 103 and the supply unit 200 are connected to each other so that the supply unit 200 receives control signals from the control device 103 and operates based on the received control signals. The control device 103 and the storage unit 400 are connected to each other so that information stored in the storage unit 400 can be read from the control device 103. The control device 103 and the measuring instruments 500-1, 500-2, 610-1, and 610-2 are connected to each other so that the control device 103 receives the measured values ​​that each measuring instrument measures and transmits. These connections are made wirelessly or via wired connections. The supply unit 200, the water quality measuring instrument 300, and the storage unit 400 are the same as those in the first embodiment. The measuring instruments 500-1 and 500-2 are the same as those in the third embodiment.

[0049] Each of the water treatment devices 600-1 and 600-2 is a device that produces each of the multiple sample solutions that the supply unit 200 supplies to the water quality measuring instrument 300. Each of the water treatment devices 600-1 and 600-2 is operated according to a predetermined operating process. The operating process includes, for example, the process of injecting chemicals into the water to be treated, the process of concentrating the water to be treated, the process of washing the ion exchange resin, the process of regenerating the ion exchange resin, and other processes commonly performed in water treatment devices. Each of the water treatment devices 600-1 and 600-2, or the device that manages the operating process of the water treatment devices 600-1 and 600-2, notifies the control device 103 of the current operating process of each of the water treatment devices 600-1 and 600-2. At the time of this notification, the device identification information that has been pre-assigned to each of the water treatment devices 600-1 and 600-2 in which the operating process is being executed is also notified to the control device 103. The information notified to the control device 103 may include not only the current operating process of the water treatment devices 600-1 and 600-2, but also information indicating the startup status of the pumps installed in each of the water treatment devices 600-1 and 600-2, as well as the open / closed status of the on / off valves.

[0050] Measuring instruments 610-1 and 610-2 are third measuring instruments, respectively. Measuring instrument 610-1 measures at least one of the flow rate and water pressure of sample liquid A in the water treatment device 600-1. Measuring instrument 610-2 measures at least one of the flow rate and water pressure of sample liquid B in the water treatment device 600-2. Measuring instruments 610-1 and 610-2 each notify the control device 103 of the measured water quality values. Measuring instruments 610-1 and 610-2 each notify the control device 103 of the identification information assigned to them for self-identification and the measured water quality values. Fluctuations in the flow rate and water pressure of sample liquids A and B often have a significant impact on the water quality of sample liquids A and B. Therefore, by increasing the measurement frequency triggered by fluctuations in flow rate and water pressure, fluctuations in water quality can be appropriately measured.

[0051] The control device 103 controls the timing of switching the sample liquid supplied by the supply unit 200 to the water quality measuring instrument 300, based on the measured values ​​measured by the water quality measuring instrument 300 stored in the memory unit 400, the measured values ​​notified from measuring instruments 500-1, 500-2, 610-1, and 610-2 respectively, and the operating process of the water treatment devices 600-1 and 600-2. Figure 11 is a diagram showing an example of the components of the control device 103 shown in Figure 10. As shown in Figure 11, the control device 103 shown in Figure 10 has a data acquisition unit 113, a data calculation unit 123, a timing control unit 133, and an output unit 140. The output unit 140 is the same as that in the first embodiment. Note that Figure 11 shows only the components of the control device 103 shown in Figure 10 that are relevant to this embodiment.

[0052] In addition to the functions of the data acquisition unit 110 in the third embodiment, the data acquisition unit 113 has the function of acquiring measured values ​​notified by measuring instruments 610-1 and 610-2, respectively, and information indicating the current operating process of water treatment devices 600-1 and 600-2, respectively, notified by the water treatment devices 600-1 and 600-2 or the device managing the operating process of water treatment devices 600-1 and 600-2. The data acquisition unit 113 outputs the measured values ​​and identification information acquired from the storage unit 400 to the data calculation unit 123. The data acquisition unit 113 also outputs the measured values ​​acquired by measuring instruments 500-1 and 500-2, respectively, to the data calculation unit 123, along with identification information for identifying the measuring instruments 500-1 and 500-2 that notified the measured values. Furthermore, the data acquisition unit 113 outputs the measured values ​​obtained from measuring instruments 610-1 and 610-2, respectively, to the data calculation unit 123, along with identification information to identify each of the measuring instruments 610-1 and 610-2 that notified the measured values. In addition, the data acquisition unit 113 outputs information indicating the current operating process of each of the water treatment devices 600-1 and 600-2, which has been notified by the water treatment devices 600-1 and 600-2 or the device that manages the operating process of the water treatment devices 600-1 and 600-2, to the data calculation unit 123, along with the device identification information that has been pre-assigned to each of the water treatment devices 600-1 and 600-2.

[0053] The data calculation unit 123 calculates statistical data using the measured values ​​acquired by the data acquisition unit 113 from the storage unit 400. This calculation method is the same as in the first embodiment. The data calculation unit 120 outputs the calculated statistical data to the timing control unit 133 along with identification information for the sample liquid that is the subject of the statistical data. The data calculation unit 123 also outputs the measured values ​​that the data acquisition unit 113 has received from the measuring instruments 500-1, 500-2, 610-1, and 610-2, respectively, to the timing control unit 133 along with identification information for identifying the measuring instruments 500-1, 500-2, 610-1, and 610-2 that notified the measured values. Furthermore, the data calculation unit 123 outputs to the timing control unit 133 information indicating the current operating process of each of the water treatment devices 600-1 and 600-2, which has been output from the data acquisition unit 113, along with the device identification information that has been pre-assigned to each of the water treatment devices 600-1 and 600-2.

[0054] The timing control unit 133 controls the timing of switching the sample liquid supplied by the supply unit 200 to the water quality measuring instrument 300, based on statistical data and identification information output from the data calculation unit 123, measured values ​​and identification information measured by measuring instruments 500-1, 500-2, 610-1, and 610-2 respectively, and information indicating the current operating process and device identification information. The specific algorithm used by the timing control unit 133 to calculate the switching timing is not specifically defined. In addition to statistical data as in the third embodiment, the timing control unit 133 may, for example, if the information indicating the operating process of the water treatment device 600-1 indicates the end of the process of regenerating the ion exchange resin, control the timing of switching the sample liquid supplied by the supply unit 200 to the water quality measuring instrument 300, taking into consideration that water quality fluctuations are likely to occur when switching operating processes, by increasing the measurement frequency of sample liquid A from the water treatment device 600-1. The timing control unit 133 may also pre-set the correspondence between each statistical data, measured value, and operating process and the switching timing, and calculate the switching timing based on that correspondence. Alternatively, the timing control unit 133 may create a learning model that outputs the switching timing when information indicating each statistical data, measured value, and operating process is input, and calculate the switching timing using that learning model. The timing control unit 133 may also combine multiple statistical data, measured values, and operating processes to control the switching timing of the sample liquid supplied by the supply unit 200 to the water quality measuring instrument 300.

[0055] The timing control unit 133 may calculate the ratio of time (time ratio) for which the supply unit 200 selects a sample solution to supply to the water quality meter 300 based on the number of sample solutions to be supplied, and control the timing of switching the sample solutions based on the calculated ratio. In addition to the time for which the supply unit 200 selects a sample solution to supply to the water quality meter 300, the timing control unit 133 may also control the order in which the samples are selected. Specifically, if the timing control unit 133 controls the supply unit 200 to select and supply sample solution A three times and sample solution B twice per unit time to the water quality meter 300, it may switch the sample solutions supplied to the water quality meter 300 in the order ABABA, or it may switch the sample solutions supplied to the water quality meter 300 in the order AAABB.

[0056] The timing control unit 133 notifies the supply unit 200 which sample solution to select and at what timing (the timing to start and end the selection). The timing control unit 133 includes this notification in the control signal and transmits the control signal to the supply unit 200.

[0057] The measurement method in the measurement system shown in Figure 10 will be described below. Figure 12 is a flowchart illustrating an example of the measurement method in the measurement system shown in Figure 10.

[0058] First, the data acquisition unit 113 reads and acquires the measured values ​​of each sample liquid to be measured by the water quality measuring instrument 300 from the storage unit 400. At this time, the data acquisition unit 113 uses the identification information assigned to each sample liquid to be measured by the water quality measuring instrument 300 as a search key, and reads and acquires the measured values ​​associated with the said identification information from the storage unit 400. The data acquisition unit 113 also acquires the measured values ​​notified by measuring instruments 500-1, 500-2, 610-1, and 610-2, respectively. Furthermore, the data acquisition unit 113 acquires information indicating the current operating process of each water treatment device 600-1 and 600-2, notified by the water treatment devices 600-1 and 600-2 or the device that manages the operating process of the water treatment devices 600-1 and 600-2 (step S31).

[0059] Then, the data calculation unit 123 calculates statistical data using the measured values ​​read from the storage unit 400 by the data acquisition unit 113 (step S32). Subsequently, the timing control unit 133 calculates the timing for switching the sample liquid supplied by the supply unit 200 to the water quality measuring instrument 300, based on the statistical data calculated by the data calculation unit 122, the measured values ​​acquired by the data acquisition unit 113 from the measuring instruments 500-1, 500-2, 610-1, and 610-2 respectively, and the information acquired by the data acquisition unit 113 indicating the current operating process of the water treatment devices 600-1 and 600-2 respectively (step S33). Then, the timing control unit 133 controls the supply unit 200 to switch the sample liquid supplied to the water quality measuring instrument 300 at the calculated timing (step S34).

[0060] Thus, in this configuration, when the supply unit 200 calculates the timing for switching the sample liquid supplied to the water quality measuring instrument 300, the timing of the switch is controlled based on statistical data calculated using the measured values ​​stored in the memory unit 400, the currently measured values ​​for each sample liquid, and the operating process of the water treatment device that produces the sample liquid. This allows for measuring the water quality at a timing corresponding to the operating process of the device that produces the sample liquid, in addition to the characteristics and fluctuations of the current sample liquid's water quality, enabling even more stable water quality management. By performing water quality management in this manner, it is possible to provide water with more stable quality.

[0061] The following describes the configurations in which the above-described measurement system is used. Figure 13 shows an example of a liquid manufacturing and supply system to which the measurement system of the present invention is applied. The configuration shown in Figure 13 is a system in which ultrapure water is supplied to a semiconductor cleaning device (use point) via a non-regenerative ion exchange device CP1000 and an ultrafiltration device UF1100 within an ultrapure water production facility. The ultrapure water (liquid to be tested) supplied to CP1000 is supplied from a liquid manufacturing and supply facility located upstream. The liquid manufacturing and supply facility is also a facility that produces ultrapure water. The dashed lines shown in Figure 13 indicate the water flow path or control signal path for testing the water quality of the ultrapure water that will be the liquid to be tested.

[0062] There are two channels through which ultrapure water is supplied to the semiconductor cleaning apparatus. One of these channels is equipped with an impurity removal unit 1200, and the ultrapure water is supplied to the semiconductor cleaning apparatus via the impurity removal unit 1200. A shut-off valve 2000 is provided between CP1000 and UF1100. A shut-off valve 2300 is provided to control the recovery of ultrapure water from CP1000 to the ultrapure water recovery tank. A shut-off valve 2400 is provided to control the recovery of ultrapure water from UF1100 to the ultrapure water recovery tank. Furthermore, shut-off valves 2100 and 2200 are provided for each of the two channels that supply ultrapure water to the semiconductor cleaning apparatus.

[0063] Measurement system 1 corresponds to the measurement system shown in Figures 1, 4, 7, and 10, and performs the processing described in the first to fourth embodiments on the ultrapure water from CP1000 or UF1100, which is the liquid to be tested. Control device 1500 is a second control device that controls the opening and closing of on / off valves 2000, 2100, 2200, 2300, and 2400 based on the state of the liquid to be tested determined by measurement system 1.

[0064] If the measurement system 1 determines that the concentration of fine particles in the liquid to be tested exceeds a threshold, the control device 1500 controls the on-off valve 2000 to a closed state. At this time, the control device 1500 controls the on-off valve 2300 to an open state. Furthermore, if the measurement system 1 determines that the concentration of fine particles in the liquid to be tested is below the threshold, the control device 1500 opens the on-off valve 2000. At this time, the control device 1500 closes the on-off valve 2300. Furthermore, if the measurement system 1 determines that the concentration of fine particles in the liquid to be tested exceeds a threshold, the control device 1500 controls the on-off valves 2100 and 2200 to a closed state. At this time, the control device 1500 controls the on-off valve 2400 to an open state. Furthermore, if the measurement system 1 determines that the concentration of fine particles in the liquid to be tested is below the threshold, the control device 1500 opens the on-off valves 2100 and 2200. At this time, the control device 1500 controls the on-off valve 2400 to a closed state. Furthermore, the control device 1500 may control the on-off valve 2100 to the open state when the measurement system 1 determines that the concentration of impurities in the liquid to be inspected is below a first concentration threshold, control the on-off valve 2200 to the open state and control the on-off valve 2100 to the closed state when the measurement system 1 determines that the concentration of impurities in the liquid to be inspected exceeds the first concentration threshold but is below a second concentration threshold, and control the on-off valves 2100 and 2200 to the closed state when the measurement system 1 determines that the concentration of impurities in the liquid to be inspected exceeds the second concentration threshold. This utilizes the fact that even if the impurity concentration is somewhat high in the flow path where the impurity removal unit 1200 is installed, the impurities contained in the ultrapure water are removed by the impurity removal unit 1200, thus lowering the impurity concentration of the ultrapure water supplied to the semiconductor cleaning apparatus. Furthermore, the control device 1500 may control the open / closed state of the on / off valves 2000, 2100, 2200, 2300, and 2400 based on the signal strength acquired by the measurement system 1, the type of impurity identified by the measurement system 1, and the cause of the state change identified by the measurement system 1. For example, if the signal strength acquired by the measurement system 1, the type of impurity identified by the measurement system 1, and the cause of the state change identified by the measurement system 1 do not allow the liquid to be supplied to the semiconductor cleaning apparatus, which is the point of use, the on / off valve 2000 is controlled to a closed state.

[0065] Figure 14 shows another example of a liquid manufacturing and supply system to which the measurement system of the present invention is applied. In the application example shown in Figure 14, the measurement system 1, CP1000, UF1100, control device 1500, and on-off valve 2400 are the same as the measurement system 1, CP1000, UF1100, control device 1500, and on-off valve 2400 shown in Figure 10. Ultrapure water, which is the outlet water, is distributed from the UF1100 into multiple flow paths and supplied to multiple semiconductor cleaning devices connected to each flow path. Each of the multiple flow paths is branched to the measurement system 1, and the ultrapure water flowing in each flow path is subjected to the processing described in the first to fourth embodiments in the measurement system 1, with the respective ultrapure water as the liquid to be tested. The control device 1500 selects which ultrapure water flowing in which flow path is processed by controlling the opening and closing of on-off valves 2500-1 to 2500-4 provided in each branch flow path. Furthermore, the control device 1500 controls the opening and closing of the on-off valves 2100-1 to 2100-4 provided in each flow path based on the state of the liquid to be inspected determined by the measurement system 1, similar to the process described above. Alternatively, the control device 1500 may have conditions corresponding to each of the multiple semiconductor cleaning devices, and may control the opening and closing of the on-off valves 2100-1 to 2100-4 based on the state of the liquid to be inspected determined by the measurement system 1 and the conditions corresponding to each semiconductor cleaning device.

[0066] Thus, if the state of the liquid to be inspected, as determined by the measurement system 1, is not suitable for supply to the semiconductor cleaning apparatus, which is the point of use, the supply of ultrapure water to the semiconductor cleaning apparatus can be blocked by controlling the on / off valve, thereby preventing contamination of semiconductor devices and components within the ultrapure water equipment. Note that the liquid (water) to be measured is not limited to ultrapure water; it may also be a chemical solution such as IPA (isopropyl alcohol), PGMA (polyglycerol methacrylate), or PGMEA (propylene glycol monomethyl ether acetate). Furthermore, although a configuration using a bottle for eluent recovery has been described, the recovered eluent may also be sprayed directly into the analyzer for quantitative analysis. In addition, the concentration of metal impurities measured in the measurement system 1 is not particularly limited, but it is desirable to have a concentration of 100 ng / L or less, preferably 1 ng / L or less, and more preferably 0.1 ng / L or less.

[0067] The above explanation describes how each component is assigned a specific function (process), but this assignment is not limited to those described above. Furthermore, the configurations of the components described above are merely examples and are not limited to them. Combinations of the various embodiments are also acceptable.

[0068] The processing performed by each of the control devices 100 to 103 described above may be carried out by logic circuits created according to their respective purposes. Alternatively, a computer program (hereinafter referred to as "program") describing the processing content as a procedure may be recorded on a recording medium readable by each of the control devices 100 to 103, and the program recorded on this recording medium may be read and executed by each of the control devices 100 to 103. The recording medium readable by each of the control devices 100 to 103 refers to portable recording media such as floppy disks, magneto-optical disks, DVDs (Digital Versatile Discs), CDs (Compact Discs), Blu-ray Discs (Registered Trademarks), USB (Universal Serial Bus) memory, and SD cards, as well as memory such as ROM (Read Only Memory), RAM (Random Access Memory), and HDDs (Hard Disc Drives) built into each of the control devices 100 to 103. The program recorded on this recording medium is read by the CPU provided in each of the control devices 100 to 103, and the same processing as described above is performed under the control of the CPU. Here, the CPU acts as a computer that executes programs read from a recording medium on which those programs are stored. [Explanation of symbols]

[0069] 1. Measurement System 100~103,1500 Control device 110, 112, 113 Data acquisition unit 120, 122, 123 Data Calculation Unit 130-133 Timing Control Unit 140 Output section 200,201 Supply section 300 Water quality meter 400 Storage section 500-1,500-2,610-1,610-2 Measuring equipment 600-1, 600-2 Water treatment equipment 1000 CP 1100 UF 1200 Impurity Removal Unit 2000, 2100, 2100-1~2100-4, 2200, 2300, 2400, 2500-1~2500-4 Shut-off valves

Claims

1. A first measuring instrument for measuring the first water quality of the sample solution, A storage unit that stores the measurement values ​​measured by the first measuring instrument, A supply unit that switches and supplies the sample solution to be supplied to the first measuring instrument from among several sample solutions, A measurement system comprising: a control device that calculates statistical data using the measured values ​​measured by the first measuring instrument stored in the memory unit, and controls the timing of switching the sample liquid supplied by the supply unit to the first measuring instrument based on the calculated statistical data.

2. In the measurement system according to claim 1, The first measuring instrument is a measuring system for measuring the TOC (Total Organic Carbon) concentration of the sample solution.

3. In the measurement system according to claim 1, The system includes a second measuring instrument for measuring the second water quality in front of the supply unit for each of the aforementioned plurality of sample solutions, The control device is a measurement system that controls the timing of the switching based on at least one of the calculated statistical data and the measured value measured by the second measuring instrument.

4. In the measurement system according to claim 3, The second measuring instrument is a measuring system that measures at least one of the following as a second water quality for each of the plurality of sample solutions: conductivity, pH value, and water temperature.

5. In the measurement system according to claim 3 or claim 4, The system includes multiple water treatment devices for producing each of the aforementioned multiple sample solutions, The control device is a measurement system that controls the timing of the switchover based on the operating process of each of the multiple water treatment devices, instead of the statistical data calculated above.

6. In the measurement system according to claim 5, The control device is a measurement system that controls the timing of the switching based on at least one of the calculated statistical data and the measured value measured by the second measuring instrument, and the operating process of each of the plurality of water treatment devices.

7. In the measurement system according to claim 5, Each of the aforementioned water treatment devices has a third measuring instrument that measures at least one of the flow rate and water pressure of each of the multiple sample liquids, The control device is a measurement system that controls the timing of the switching based on the measurement value measured by the third measuring instrument instead of the operating process of each of the plurality of water treatment devices.

8. In the measurement system according to claim 7, The control device is a measurement system that controls the timing of the switchover based on the calculated statistical data, the measured value measured by the second measuring instrument, at least one of the operating processes of each of the plurality of water treatment devices, and the measured value measured by the third measuring instrument.

9. In the measurement system according to claim 1 or claim 2, The control device is a measurement system that outputs the calculated statistical data.

10. In the measurement system according to claim 1 or claim 2, The control device is a measurement system that controls the timing of blowing the sample liquid from the supply unit based on the calculated statistical data.

11. A data acquisition unit that acquires measurement values ​​of multiple sample solutions measured by a measuring instrument, which are stored in the memory unit, A data calculation unit calculates statistical data using the measured values ​​acquired by the data acquisition unit, A control device having a timing control unit that controls the timing for switching the sample solution supplied to the measuring instrument from among the plurality of sample solutions based on the statistical data calculated by the data calculation unit.

12. The process of obtaining the measurement values ​​of multiple sample solutions measured by the measuring instrument, which are stored in the memory unit, The process of calculating statistical data using the acquired measurement values, A measurement method that includes a process to control the timing of switching the sample solution supplied to the measuring instrument from among the multiple sample solutions, based on the statistical data calculated above.

13. On the computer, A procedure for obtaining measurement values ​​of multiple sample solutions measured by the measuring instrument, which are stored in the memory unit, A procedure for calculating statistical data using the acquired measurements, A program for executing a procedure to control the timing of switching the sample solution supplied to the measuring instrument from among the multiple sample solutions, based on the statistical data calculated above.

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