Induction-type position measuring device and method for operating the induction-type position measuring device

Abstract

The present invention provides an induction-type position measuring device and a method for operating the induction-type position measuring device. [Solution] An inductive position measuring device comprising a first assembly having a first interaction surface and a second assembly having a second interaction surface. The two assemblies are arranged facing each other in a third measuring direction and are movable relative to each other. The first assembly includes a plurality of first electromagnetic field interacting means arranged parallel to the first interaction surface. The second assembly includes a plurality of second electromagnetic field interacting means arranged planarly and dispersed across the second interaction surface. The inductive position measuring device comprises at least one first electromagnetic field interacting means arranged along a first measuring direction and at least one further first electromagnetic field interacting means arranged along a second measuring direction, and each first electromagnetic field interacting means comprises at least one excitation means and at least one receiving means.

Description

Technical Field

[0001] The present invention relates to an inductive position measuring device as described in the preamble of claim 1 and a method for operating an inductive position measuring device as described in the preamble of claim 11.

Background Art

[0002] From WO2020088869A1, a moving device comprising a positioning system having a static assembly and a moving assembly is known. Both assemblies are provided with their own power supplies and include a plurality of coils or capacitor plates configured in a circular shape, and they interact electromagnetically with each other.

[0003] The disadvantage of the above prior art is that both the moving assembly and the stationary assembly utilize electrical components that need to be connected to active electronic devices. As a result, each assembly requires its own power supply and its own data connection function, which makes the structure considerably more complex, especially in the case of the stationary assembly.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] The problem underlying the present invention is to provide an inductive position measuring device that enables positioning of a moving assembly with multiple degrees of freedom and is at the same time cost-effective in production.

Means for Solving the Problems

[0006] This problem is solved according to the features of claim 1 or claim 11 of the present invention. Advantageous embodiments and variations are described in their respective dependent claims. The inductive position measuring device according to the present invention includes a first assembly having a first interaction surface and a second assembly having a second interaction surface. The two assemblies are arranged facing each other in a third measuring direction and are movable relative to each other. The second interaction surface is larger than the first interaction surface. The first assembly includes a plurality of first electromagnetic field interacting means arranged parallel to the first interaction surface. The second assembly includes a plurality of second electromagnetic field interacting means arranged planarly and dispersed across the second interaction surface. The first and second electromagnetic field interacting means can interact electromagnetically. The inductive position measuring device is characterized in that at least one first electromagnetic field interacting means is arranged along a first measuring direction, at least one further first electromagnetic field interacting means is arranged along a second measuring direction, and each first electromagnetic field interacting means includes at least one excitation means for generating an electromagnetic field and at least one receiving means for receiving an electromagnetic field.

[0007] According to an advantageous evolution of the present invention, the first electromagnetic field interaction means is configured as an elongated linear sensor, with the first and second measurement directions extending perpendicular to each other. A linear sensor refers to a sensor configured to generate an electrical signal depending on its relative position with respect to one of the measurement directions and its distance to a second assembly. Here, the linear sensor is structurally configured such that its dimension along the measurement direction in which it is positioned parallel is greater than its other dimensions.

[0008] In a further form, the first electromagnetic field interaction means is Each includes a first receiving means and a second receiving means, each having a periodic orbit with a fixed period length, wherein these receiving means are positioned offset from each other by one-quarter of their period lengths in the first or second measuring direction. Each includes an excitation means, and the excitation means surrounds two receiving means, particularly those with a rectangular shape.

[0009] Advantageously, the first assembly includes four first electromagnetic field interacting means arranged perpendicular to each other within the first interaction surface. If an embodiment comprising four first electromagnetic field interacting means is intended, advantageously, the receiving means of the four first electromagnetic field interacting means are configured such that their oscillation amplitudes correspond to at least one period length.

[0010] Alternatively, the first assembly includes eight first electromagnetic field interacting means arranged on the first interaction surface as paired parallel electromagnetic field interacting pairs, with four pairs of electromagnetic field interacting means each arranged perpendicular to one another.

[0011] The vertical arrangement of the four electromagnetic field interaction means or four electromagnetic field interaction pairs is carried out such that each electromagnetic field interaction means or electromagnetic field interaction pair extends perpendicularly to exactly two adjacent electromagnetic field interaction means or electromagnetic field interaction pairs, i.e., the electromagnetic field interaction means or electromagnetic field interaction pairs as a whole form a square arrangement.

[0012] If an embodiment is intended that comprises eight electromagnetic field interaction means or four electromagnetic field interaction pairs, advantageously, at least one first receiving means of an electromagnetic field interaction pair is identically configured and connected in series. Additionally, at least one second receiving means of an electromagnetic field interaction pair is identically configured and connected in series. The amplitude of at least one of the receiving means is less than half the period length, and the distance between two first receiving means or two second receiving means in at least one electromagnetic field interaction pair is half the period length.

[0013] This refers to the distance within the electromagnetic field interaction pair that is configured between a receiving means of one first electromagnetic field interaction means and a receiving means of another first electromagnetic field interaction means, with respect to a virtual zero crossing.

[0014] Preferably, in each of the four electromagnetic field interaction pairs, the first receiving means is identically configured, and the first receiving means within the electromagnetic field interaction pair are connected in series. Similarly, preferably, in each of the four electromagnetic field interaction pairs, the second receiving means is identically configured, and the first receiving means within the electromagnetic field interaction pair are connected in series.

[0015] In a further form, the second assembly is intended not to be connected to an active energy supply device and a data processing device. Therefore, only the first assembly is connected to the active energy supply device and the data processing device.

[0016] Advantageously, the second electromagnetic field interaction means is • Composed of quadrilaterals, especially square faces, • They are arranged on the second interaction surface in a lattice-like manner, with equal size and uniformly dispersed.

[0017] Advantageously, the second electromagnetic field interacting means is manufactured by planar technology, particularly thick film technology, and by thin film technology as a complement or alternative. A method for operating an inductive position measuring device according to the present invention is characterized in that a predetermined excitation signal is transmitted to a second assembly using at least one first electromagnetic field interaction means, and thereafter, the received signals applied to at least one first electromagnetic field interaction means are individually measured. By corresponding signal evaluations of at least one received signal, linear position information of at least one first electromagnetic field interaction means with respect to the second assembly, and distance information as complementary or alternative, are determined.

[0018] Preferably, a predetermined excitation signal is modulated by at least one second electromagnetic field interaction means before it is measured as a received signal by at least one receiving means. Here, preferably, the excitation signal is generated by excitation means belonging to the same electromagnetic field interaction pair, in particular the same first electromagnetic field interaction means, and the received signal is received by receiving means belonging to the same electromagnetic field interaction pair, in particular the same first electromagnetic field interaction means.

[0019] Advantageously, the modulation is performed depending on the position of at least one second electromagnetic field interaction means on the second interaction surface. Preferably, the inductive position measuring device determines the relative position of the first assembly and the second assembly with at least four degrees of freedom, for example six degrees of freedom.

[0020] The six degrees of freedom are preferably six spatial degrees of freedom, for example three orthogonal position coordinates and three Euler angles. Advantageously, at least one first quality parameter is derived or determined from the position information of the first electromagnetic field interaction means for determining position information or distance information regarding the same measurement direction, and as a complement or alternatively from distance information.

[0021] In addition thereto, it is contemplated that at least one rotational information about an axis directed towards one of the measurement directions is determined from the position information of at least two first electromagnetic field interaction means or two electromagnetic field interaction pairs, and as a complement or alternatively from distance information.

[0022] Advantageously, at least one second quality parameter is derived or determined from at least one rotational information. In a further form, an error signal is output and an optimization procedure is performed as a complement or alternatively depending on the first quality parameter and as a complement or alternatively the second quality parameter.

[0023] For example, the output of an error signal or the start of an optimization procedure may be performed when a predefined limit value is exceeded. The present invention will be described in more detail below, with reference to the attached schematic diagrams, based on the description of exemplary embodiments, with regard to further features and advantages. [Brief explanation of the drawing]

[0024] [Figure 1] This is a perspective view of an inductive position measuring device including a first assembly and a second assembly. [Figure 2] This is a plan view of the second assembly. [Figure 3] This is a plan view of a first exemplary embodiment of the first electromagnetic field interaction means. [Figure 4] This is a plan view of a second exemplary embodiment of the first electromagnetic field interaction means. [Figure 5] This is a diagram of the first interaction surface of the first assembly. [Figure 6] Figure 6a is a schematic plan view of the induction-type position measuring device, showing the relative rotation of the first assembly around the coordinate axis of the third measurement direction. Figure 6b is a schematic plan view of the induction-type position measuring device, showing the relative rotation of the first assembly around the coordinate axis of the third measurement direction. [Figure 7] This is a cross-sectional view through an inductive position measuring device, schematically showing the excitation signal and the received signal. [Modes for carrying out the invention]

[0025] The inductive position measuring device 1 of the exemplary embodiment presented below, as shown in Figure 1, comprises a first assembly 10 and a second assembly 20, which are opposite each other in a third measuring direction z and can move relative to each other. The first assembly 10 and the second assembly 20 are spaced apart from each other, and a gap is formed between the two assemblies 10 and 20.

[0026] The first assembly 10 includes a first interaction surface 11 having a plurality of first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'', the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' arranged parallel to and flat within the first interaction surface 11. The first assembly 10 is supplied with electrical energy to generate at least one excitation signal S1 and to receive at least one reception signal S2. This can be done, for example, via a cable or wirelessly. The energy source may be, for example, a battery within the first assembly 10 or it may be outside the first assembly 10.

[0027] The second assembly 20 includes a second interaction surface 21 having a plurality of second electromagnetic field interacting means 20.1 to 20.n. The second electromagnetic field interacting means 20.1 to 20.n are arranged planarly on or within the second interaction surface 21 and are distributed planarly across the second interaction surface 21. Since the second assembly 20 interacts with the first assembly 10 entirely passively, the second assembly 20 does not independently generate its own magnetic field, nor is electrical energy actively supplied to it via cables or the like.

[0028] The second interaction surface 21 of the second assembly 20 is, in principle, larger than the first interaction surface 11 of the first assembly 10, and therefore, even when the first assembly 10 is positioned in the edge region of the second assembly 20, there is always sufficient overlap between the two assemblies 10, 20.

[0029] The two interaction surfaces 11 and 21 are positioned opposite each other and spaced apart so that their positioning can be determined by electromagnetic interaction between the first electromagnetic field interaction means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' and the second electromagnetic field interaction means 20.1 to 20.n. This is especially true when the first electromagnetic field interaction means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' and the second electromagnetic field interaction means 20.1 to 20.n overlap at least partially in a plan view in a third measurement direction z.

[0030] During the operation of the inductive position measuring device 1, the position and orientation of assemblies 10 and 20 can change relative to each other in three measurement directions x, y, and z. Advantageously, the three measurement directions x, y, and z are orthogonal to each other. Through electromagnetic interaction between the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' and the second electromagnetic field interacting means 20.1 to 20.n, the current position and orientation are determined and evaluated by the inductive position measuring device 1 in six degrees of freedom. To evaluate the position and orientation of the first assembly 10, an evaluation device can be provided inside or outside the first assembly 10. Data transfer can be performed, for example, via cable, or alternatively, wirelessly.

[0031] Preferably, one of the assemblies is stationary and fixed, while the other assembly is freely movable. In particular, if the second interaction surface 21 of the second assembly 20 is several times larger than the first interaction surface 11 of the first assembly 10, a stationary and fixed arrangement of the second assembly 20 is beneficial. However, alternatively, the first assembly 10 may be stationary and fixed, and the second assembly 20 may be moved relative to the first assembly 10. This is beneficial, for example, when it is not possible to supply electrical energy to the movable assembly.

[0032] Figure 2 shows a preferred embodiment of the second interaction surface 21 of the second assembly 20. The second interaction surface 21 may have substantially any topology or may be arbitrarily curved, but is preferably configured to be flat.

[0033] The second interaction surface 21 is preferably the surface of a printed circuit board manufactured by thin-film technology and, as a complement or alternative, by thick-film technology. The printed circuit board comprises an electrically insulating base material 19, such as a fiber-reinforced epoxy resin. A conductive layer, particularly made of copper, is coated onto the base material 19 of the printed circuit board, and this conductive layer is structured to constitute a plurality of second interaction means 20.1 to 20.n.

[0034] Alternatively, the individual second electromagnetic field interacting means 20.1-20.n and the second interaction surface 21 may be made of a substrate. In particular, this may be a metal substrate in which the individual second electromagnetic field interacting means 20.1-20.n are formed in the form of raised portions, and there is no metal substrate between the individual second electromagnetic field interacting means 20.1-20.n. The regions between the individual second electromagnetic field interacting means 20.1-20.n may be made of voids or cavities, or may be filled with epoxy resin, for example, to form a flat surface.

[0035] The second electromagnetic field interaction means 20.1 to 20.n are arranged in a square grid shape, distributed across the second interaction surface 21, and are at a predetermined distance from each other. The columns and rows of the grid consisting of the second electromagnetic field interaction means 20.1 to 20.n are arranged along the first and second measurement directions x and y, which extend orthogonally. All of the second electromagnetic field interaction means 20.1 to 20.n are of the same dimensions and, in particular, are square in shape. However, other shapes, such as circles, rectangles, and spirals, are also possible.

[0036] As shown in Figure 2, the grid can be completely filled with the second electromagnetic field interacting means 20.1-20.n, so that the second electromagnetic field interacting means 20.1-20.n are uniformly distributed in a grid pattern. Alternatively, the second electromagnetic field interacting means 20.1-20.n can be non-uniformly distributed across the second interaction surface 21, so that the grid includes individual positions or regions without the second electromagnetic field interacting means 20.1-20.n.

[0037] Figure 3 shows a first exemplary embodiment of the first electromagnetic field interacting means 10.X1, 10.X2, 10.Y1, and 10.Y2. The illustrated first electromagnetic field interacting means 10.X1 is an elongated linear sensor including a flat excitation means 10.1 for generating an electromagnetic field and two flat receiving means 10.21 and 10.22 for receiving the electromagnetic field.

[0038] The first receiving means 10.21 is configured as a receiving conductor track and consists of a plurality of conductor track sections. The base trajectory of the first receiving means 10.21 is structurally similar to a sine curve, and the magnitude of the amplitude of the individual conductor track is not structurally constant. The amplitudes of two adjacent conductor tracks of the base trajectory (consisting of a positive conductor track amplitude and a negative conductor track amplitude) have a period length T1 and an oscillation width SB1.

[0039] The first receiving means 10.21 is divisible into an advance section and a return section. The advance section has a base trajectory that is

[0040]

number

[0041] It is similar to the function graph of the function f(x) = a·sin(x) in . The return interval is such that its base orbit is

[0042]

number

[0043] This is similar to the function graph of the function g(x) = -a·sin(x) in . That is, the return interval of the first receiving means 10.21 approximately coincides with the advance interval which is a reflection of the symmetry line. The second receiving means 10.22 is configured as a receiving conductor track, similar to the first receiving means 10.21, but is positioned offset from the first receiving means 10.21 by one-quarter of the period length T1 (offset V1). The offset V1 occurs, among other things, along the first measurement direction x or along the second measurement direction y. The offset arrangement of the two receiving means 10.21, 10.22 allows for the generation of correspondingly phase-shifted signals. The two receiving means 10.21, 10.22 are electrically connected to transmit 0° and 90° signals.

[0044] The two receiving means 10.21 and 10.22 have different lengths. For example, the first receiving means 10.21 includes a length of 3 periods, each with a period length T1, and the second receiving means 10.22 includes a length of 2.5 periods, each with a period length T1.

[0045] In receiving means 10.21 and 10.22, the amplitude SB1 refers to the height of the deflection between the minimum and maximum values ​​within the period length T1. This extends perpendicular to the direction of the period length T1, or perpendicular to the first or second measurement directions x, y.

[0046] According to the first exemplary embodiment of the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, and 10.Y2, the vibration amplitude SB1 of the first receiving means 10.21 and the vibration amplitude SB1 of the second receiving means 10.22 are configured to be identical on average and correspond to at least the period length T1.

[0047] The receiving means 10.21 and 10.22 shown in Figure 3 have an oscillation amplitude SB1 that corresponds to approximately 1.5 times the period length T1. The two receiving means 10.21, 10.22 consist of multiple conductor track sections located in different layers of the carrier substrate. Details of such a multilayer structure of conductor track sections are described in European Patent Application EP23200280, filed September 28, 2023, and therein I expressly refer to that patent application.

[0048] To compensate for the pitch tilt, the receiving means 10.21 and 10.22 may be equipped with additional loops S, S', which are partially formed from the same conductor track sections. For this purpose, the loops S, S' are positioned below the conductor track amplitude at predetermined positions on the basic trajectory. At positions with the additional loops S, S', the conductor track amplitudes of the receiving means 10.21 and 10.22 are deviated from the basic trajectory and displaced outward by a predetermined amount, i.e., in the direction of the excitation means 10.1. The loops S, S' are displaced slightly inward relative to the conductor track amplitude of the basic trajectory, i.e., in the direction of the virtual zero crossing of the basic trajectory of the receiving means 10.21 and 10.22. However, overall, combining the structurally shifted conductor track amplitude with the loops results in an amplitude signal of the same magnitude as a normal conductor track amplitude without the loops.

[0049] Loops S and S' are part of the receiving conductor track and are preferably arranged on the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, and 10.Y2 so as to be mirror-symmetric with respect to an axis A that divides the forward or return section into equal parts.

[0050] The loop S of the first receiving means 10.21 can be configured within the forward section of the receiving conductor track and, as a complement or alternative, within the return section of the receiving conductor track. The loop S' of the second receiving means 10.22 can similarly be configured within the forward section of the receiving conductor track and, as a complement or alternative, within the return section of the receiving conductor track.

[0051] The two receiving means 10.21 and 10.22 are surrounded, i.e., enclosed on all sides, by the excitation means 10.1. The excitation means 10.1, as an excitation conductor track, is structurally configured in a quadrilateral shape. In particular, the quadrilateral is at least rectangular.

[0052] According to a second exemplary embodiment of the first electromagnetic field interaction means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'', they can also be arranged as electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2.

[0053] The electromagnetic field interaction pair 10.PX1 shown in Figure 4 includes a first electromagnetic field interaction means 10.X1' and a further first electromagnetic field interaction means 10.X1''. The two first electromagnetic field interaction means 10.X1', 10.X1'' are configured as elongated linear sensors and jointly include one flat excitation means 10.2 (shown in Figure 4), or alternatively, each includes one flat excitation means (not shown) for generating an electromagnetic field.

[0054] The first electromagnetic field interaction means 10.X1' includes a flat first receiving means 10.23 and a flat second receiving means 10.24 for receiving an electromagnetic field. The further first electromagnetic field interaction means 10.X' also includes a flat first receiving means 10.25 and a flat second receiving means 10.26 for receiving an electromagnetic field.

[0055] The first electromagnetic field interacting means 10.X1', 10.X1'' are arranged spaced apart from each other, and thus an offset V3 is formed between the two first electromagnetic field interacting means 10.X1', 10.X1'' with respect to the receiving means 10.23, 10.24 and the receiving means 10.25, 10.26. The offset V3 occurs, among other things, along the first measurement direction x or along the second measurement direction y. Advantageously, the offset V3 corresponds to half of the period length T2.

[0056] The configuration of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' according to the second exemplary embodiment, and their arrangement as electromagnetic field interacting pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​ensures that the cross sensitivity of the inductive measuring device 1 is reduced. In particular, the cross sensitivity perpendicular to the measurement direction x or measurement direction y is reduced.

[0057] The first receiving means 10.23, 10.25 are configured as receiving conductor tracks and consist of multiple conductor track sections. The base trajectories of the first receiving means 10.23, 10.25 are similar to sine curves, and the magnitude of the amplitude of each conductor track is not necessarily constant structurally. The amplitudes of two adjacent conductor tracks on the base trajectory (consisting of a positive conductor track amplitude and a negative conductor track amplitude) have a period length T2 and an oscillation width SB2.

[0058] The first receiving means 10.23 and 10.25 are each divisible into an advance section and a return section. The advance section has a basic trajectory,

[0059]

number

[0060] It is similar to the function graph of the function f(x) = a·sin(x) in . The interval is such that its base orbit is

[0061]

number

[0062] This is similar to the function graph of the function g(x) = -a·sin(x) in . That is, the return interval of the first receiving means 10.23, 10.25 approximately coincides with the advance interval which is a reflection of the symmetry line.

[0063] The second receiving means 10.24, 10.26 are configured as receiving conductor tracks, similar to the first receiving means 10.23, 10.25, but are positioned offset from the associated first receiving means 10.23, 10.25 by a quarter of the period length T2 (offset V2). The offset V2 occurs, among other things, along the first measurement direction x or along the second measurement direction y. The offset arrangement of the two receiving means 10.23, 10.25 or the two receiving means 10.24, 10.26 can generate correspondingly phase-shifted signals. The two receiving means 10.24, 10.26 or the two receiving means 10.24, 10.26 are electrically connected to transmit 0° and 90° signals.

[0064] The two receiving means 10.23 and 10.25 have different lengths. For example, the first receiving means 10.23 includes a length of 3 periods, each with a period length T2, and the second receiving means 10.25 includes a length of 2.5 periods, each with a period length T2.

[0065] In one embodiment of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' according to the second exemplary embodiment, the first receiving means 10.23 of the first electromagnetic field interacting means 10.X1' is connected in series with the first receiving means 10.25 of the further first electromagnetic field interacting means 10.X1''. In addition, the second receiving means 10.24 of the first electromagnetic field interacting means 10.X1' is connected in series with the second receiving means 10.26 of the further first electromagnetic field interacting means 10.X''. This series connection results in 0° and 90° signals with increased signal amplitudes, respectively.

[0066] In receiving means 10.23, 10.25, 10.24, and 10.26, the amplitude SB2 refers to the height of the deflection between the minimum and maximum values ​​within the period length T2. This extends perpendicular to the direction of the period length T2, or perpendicular to the first or second measurement direction x, y.

[0067] According to a second exemplary embodiment of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'', the vibration amplitude SB2 of the first receiving means 10.23, 10.25 and the vibration amplitude SB2 of the associated second receiving means 10.24, 10.26 are configured to be identical on average and correspond to at most half of the period length T2.

[0068] The receiving means 10.23, 10.25, 10.24, and 10.26 shown in Figure 3 have an oscillation amplitude SB2 that corresponds to approximately one-third of the period length T2. The first and second receiving means 10.23, 10.25, 10.24, and 10.26 consist of multiple conductor track sections located in different layers of the substrate, similar to the first exemplary embodiment.

[0069] To compensate for the pitch tilt, receiving means 10.23, 10.25, 10.24, and 10.26 may also be provided with additional loops S, S' formed partially from the conductor track sections. For this purpose, loops S, S' are positioned below the conductor track amplitude at predetermined positions on the basic trajectory. At positions with additional loops S, S', the conductor track amplitudes of receiving means 10.21 and 10.22 deviate from the basic trajectory and are displaced outward by a predetermined amount, i.e., in the direction of excitation means 10.1. Loops S, S' are displaced slightly inward relative to the conductor track amplitude of the basic trajectory, i.e., in the direction of the virtual zero crossing of the basic trajectory of receiving means 10.23, 10.25, 10.24, and 10.26. However, overall, combining the structurally shifted conductor track amplitude with the loops results in an amplitude signal of the same magnitude as the normal conductor track amplitude without the loops.

[0070] Loops S, S' are part of the receiving conductor track and are preferably arranged on two first electromagnetic field interaction means 10.X1', 10.X1'' such that they are mirror-symmetric with respect to an axis A that divides the forward or return section into equal parts.

[0071] The loop S of the first receiving means 10.23, 10.25 can be configured within the forward section of the receiving conductor track and, as a complement or alternative, within the return section of the receiving conductor track.

[0072] The loop S' of the second receiving means 10.24, 10.26 can similarly be configured within the forward section of the receiving conductor track and, as a complement or alternative, within the return section of the receiving conductor track.

[0073] As already mentioned above, the receiving means 10.23, 10.25, 10.24, and 10.26 are surrounded, i.e., on all sides, by a common excitation means 10.2 or by a plurality of individual excitation means. The excitation means 10.2, as an excitation conductor track, is structurally configured to be at least quadrangular in shape. In particular, the quadrangular is at least rectangular.

[0074] For example, one excitation means 10.2 can form two rectangles, as shown in Figure 4: one rectangle around the receiving means 10.23 and 10.24, and another rectangle around the receiving means 10.25 and 10.26. Alternatively, two excitation means can be provided, each with one excitation means forming a rectangle around the receiving means 10.23 and 10.24, and the additional excitation means forming a rectangle around the receiving means 10.25 and 10.26.

[0075] The first electromagnetic field interacting means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'' are configured within the first interacting surface 11 of the first assembly 10. The first interacting surface 11 is the surface of a printed circuit board manufactured by thin-film technology and, as a complement or alternative, by thick-film technology. To constitute the structured first electromagnetic field interacting means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'', a plurality of separate superimposed conductive layers separated from each other by an insulating layer can be provided. Electrical connections exist between conductor tracks of various conductive layers at predetermined locations, known as vias.

[0076] As shown in Figure 5, two first electromagnetic field interaction means 10.X1, 10.X2 or two electromagnetic field interaction pairs 10.PX1, 10.PX2 extend parallel to a first measurement direction x and are spaced apart from each other by a distance Dx. Two first electromagnetic field interaction means 10.Y1, 10.Y2 or two electromagnetic field interaction pairs 10.PY1, 10.PY2 extend parallel to a second measurement direction y and are similarly spaced apart from each other by a distance Dy. Advantageously, the arrangement of the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2, or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 corresponds, among other things, to a quadrilateral arrangement in the shape of a square (Dx=Dy).

[0077] Each first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or each electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 is offset in a first measurement direction x or a second measurement direction y by two receiving means 10.21, 10.22, 10.23, 10.24, 10.25, 10.26, each electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or each electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 transmits two measurement variables in the form of a 0° signal and a 90° signal, so that a total of eight measurement variables are available for position determination.

[0078] For each first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​linear position values ​​X1, X2, Y1, Y2 and signal amplitudes in the corresponding measurement directions x, y are first calculated from the 0° signal and the 90° signal. Distance values ​​Z_X1, Z_X2, Z_Y1, Z_Y2 can be generated using the signal amplitudes. The distance values ​​Z_X1, Z_X2, Z_Y1, Z_Y2 of the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 quantify the distance from the corresponding electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 to the second interaction surface 21 of the second assembly 20 in the third measurement direction z.

[0079] As shown in Figure 5, the first electromagnetic field interaction means 10.X1 or electromagnetic field interaction pair 10.PX1 transmits a position value X1 with respect to a first measurement direction x and a distance value Z_X1 with respect to a third measurement direction z. Similarly, the first electromagnetic field interaction means 10.X2 or electromagnetic field interaction pair 10.PX2 transmits a position value X2 with respect to a first measurement direction x and a distance value Z_X2 with respect to a third measurement direction z, the first electromagnetic field interaction means 10.Y1 or electromagnetic field interaction pair 10.PY1 transmits a position value Y1 with respect to a second measurement direction y and a distance value Z_Y1 with respect to a third measurement direction z, and the first electromagnetic field interaction means 10.Y2 or electromagnetic field interaction pair 10.PY2 transmits a position value Y2 with respect to a second measurement direction y and a distance value Z_Y2 with respect to a third measurement direction z.

[0080] As a result, during one measurement cycle, the induction-type position measuring device 1 sends two position values ​​X1 and X2 for the first measurement direction x, two position values ​​Y1 and Y2 for the second measurement direction y, and four distance values ​​Z_X1, Z_X2, Z_Y1, and Z_Y2 for the third measurement direction z.

[0081] In this way, the relative position of the first assembly 10 to the second assembly 20 may be determined with up to six degrees of freedom. Additionally, by determining quality parameters, a statement can be made about the reliability of the calculated values, and in some cases, further measures can be initiated based on this.

[0082] The position of the midpoint M of the first assembly 10 can be determined, for example, by averaging the position values ​​X1, X2; Y1, Y2 of two first electromagnetic field interaction means 10.X1, 10.X2; 10.Y1, 10.Y2 or electromagnetic field interaction pair 10.PX1, 10.PX2; 10.PY1, 10.PY2 that extend in the same measurement directions x, y.

[0083]

number

[0084] And here,

[0085]

number

[0086] This represents the position value of the midpoint M of the first assembly 10 with respect to the first measurement direction x,

[0087]

number

[0088] And here,

[0089]

number

[0090] This represents the position value of the midpoint M of the first assembly 10 with respect to the second measurement direction y. Since each of the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 provides at least one distance value Z_X1, Z_X2, Z_Y1, Z_Y2, the distance of the first assembly 10 to the second assembly 20 can be determined in several ways.

[0091]

number

[0092] And here,

[0093]

number

[0094] This represents the average distance value in the third measurement direction z obtained from the first electromagnetic field interaction means 10.X1, 10.X2 or electromagnetic field interaction pair 10.PX1, 10.PX2 extending in the first measurement direction x, or

[0095]

number

[0096] And here,

[0097]

number

[0098] This represents the average distance value in the third measurement direction z, obtained from the first electromagnetic field interaction means 10.Y1, 10.Y2 or electromagnetic field interaction pair 10.PY1, 10.PY2 extending in the second measurement direction y.

[0099] The output values ​​for the average distance of the first assembly 10 to the second assembly 20, i.e., the distance at the center M, are two average distance values.

[0100]

number

[0101] ,

[0102]

number

[0103] The average value can be determined from this.

[0104]

number

[0105] And here,

[0106]

number

[0107] This represents the average distance from the second assembly 20 to the midpoint M of the first assembly 10. Two average distance values

[0108]

number

[0109] ,

[0110]

number

[0111] The deviation between them can be used to make a statement regarding the quality of the measurement results in the third measurement direction z.

[0112]

number

[0113] Here, D_Z represents the first quality parameter, which allows us to make a statement regarding the quality of the measurement results in the third measurement direction z. Figures 6a and 6b show schematic plan views of the inductive position measuring device 1, where, for the first assembly 10, only the first interaction surface 11 is shown, which has a plurality of first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' arranged in pairs. The first assembly 10 and the second assembly 20 face each other and are arranged in two parallel planes, so that a gap is formed between the first assembly 10 and the second assembly 20. The first assembly 10 is in the first position in Figure 6a. Figure 6b shows the first assembly 10 from Figure 6a, where the first assembly 10 is now deflected and in the second position. During the transition from the first position to the second position, the first assembly 10 underwent a relative rotation around the coordinate axis of the third measurement direction z. Here, the second assembly 20 remained stationary and motionless. The inductive position measuring device 1 can determine and evaluate one or more relative rotations of the first assembly 10 in three measuring directions x, y, and z.

[0114] When determining the relative position of the first assembly 10 with respect to the second assembly 20, for example, the relative rotation around the coordinate axis in the first measurement direction x can be determined as follows:

[0115]

number

[0116] Here, rot(X) quantifies the value of rotation around the coordinate axis in the first measurement direction x, and Dx quantifies the distance between two first electromagnetic field interaction means 10.X1, 10.X2 or electromagnetic field interaction pair 10.PX1, 10.PX2 that measure the linear position in the first measurement direction x.

[0117] Similarly, the relative rotation around the coordinate axis of the second measurement direction y can also be determined.

[0118]

number

[0119] Here, rot(Y) quantifies the value of rotation around the coordinate axis of the second measurement direction y, and Dy quantifies the distance between two first electromagnetic field interaction means 10.Y1, 10.Y2 or electromagnetic field interaction pair 10.PY1, 10.PY2 that measure the linear position in the second measurement direction y.

[0120] The calculation of the rotation around the coordinate axis of the third measurement direction z is given by:

[0121]

number

[0122] This can be done by the following equation, where rot(Z_X) represents the rotation value around the coordinate axis of the third measurement direction z, based on position values ​​X1, X2, and Dx represents the distance between two first electromagnetic field interaction means 10.X1, 10.X2 or electromagnetic field interaction pair 10.PX1, 10.PX2 that measure the linear position in the first measurement direction x, or alternatively, the calculation of the rotation around the coordinate axis of the third measurement direction z is given by the following equation

[0123]

number

[0124] This can be done by, where rot(Z_Y) represents the rotation value around the coordinate axis of the third measurement direction z based on position values ​​Y1, Y2, and Dy represents the distance between two first electromagnetic field interaction means 10.Y1, 10.Y2 or electromagnetic field interaction pair 10.PY1, 10.PY2 that measure the linear position in the second measurement direction y.

[0125] Since the independent rotation values ​​rot(Z_X) and rot(Z_Y) are redundant, they can be used to determine the average value of the rotation around the coordinate axis of the third measurement direction z.

[0126]

number

[0127] And here,

[0128]

number

[0129] This is the average value of the rotation around the coordinate axis of the third measurement direction z. The quality parameter D_rot(Z) can be quantified by generating the difference between two independent rotation values ​​rot(Z_X) and rot(Z_Y), which can be used as information regarding the reliability of the measurements in the first and second measurement directions x and y. D_rot(Z)=rot(Z_X)-rot(Z_Y) Here, D_rot(Z) represents a second quality parameter, which allows us to make a statement regarding the reliability of the rotation value in the third measurement direction z.

[0130] Therefore, the induction-type position measuring device 1 measures position values ​​X1, X2, Y1, Y2, and average value within one measurement cycle.

[0131]

number

[0132] In addition to the distance values ​​Z_X1, Z_X2, Z_Y1, Z_Y2, and rotation values ​​rot(X), rot(Y), rot(Z_X), and rot(Z_Y), two additional quality parameters, D_Z and D_rot(Z), are also available. The smaller the values ​​of these quality parameters, the more accurate the measurement results of the induction-type position measuring device 1 become, i.e., the reliability of the position and distance values ​​can be increased.

[0133] The quality parameters D_Z and D_rot(Z) can be used, for example, to output an error signal if either of the quality parameters D_Z or D_rot(Z) exceeds a predetermined threshold. As an alternative or complementary measure, if the threshold is exceeded, an optimization procedure may be initiated to correct the cross-sensitivity of the individual first electromagnetic field interacting means 10.X1, 10.X2, 10.Y1, 10.Y2 or electromagnetic field interacting pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2.

[0134] As schematically shown in Figures 6a and 6b, the positioning is preferably performed with respect to electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, and 10.PY2 that form a sufficiently strong coupling, i.e., with respect to electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, and 10.PY2 that at least partially superimpose in a plan view in a third measurement direction z, and to the second electromagnetic field interaction means 20.1 to 20.n. Advantageously, each of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' is larger than the second electromagnetic field interacting means 20.1 to 20.n, and therefore, a plurality of second electromagnetic field interacting means 20.1 to 20.n are always superimposed by at least one of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2''. Here, in particular, the receiving means 10.23, 10.24, 10.25, and 10.26 of the first electromagnetic field interaction means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', and 10.Y2'' are superimposed on a plurality of second electromagnetic field interaction means 20.1 to 20.n.

[0135] Figure 7 shows a schematic cross-sectional view of the first and second assemblies 10 and 20 of the induction-type position measuring device 1. The first assembly 10 includes an evaluation electronic device 10.3 which individually applies a predetermined excitation signal S1 to each individual electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or each individual electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2. In particular, when applied to the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or the electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​at least one excitation means 10.1 generates the excitation signal S1 in the form of an electromagnetic field or one or more electromagnetic waves. An excitation signal S1 is emitted from the first assembly 10 toward the second assembly 20 and strikes at least one, preferably more, second electromagnetic field interacting means 20.1 to 20.n. The excitation signal S1 is modulated by the second electromagnetic field interacting means 20.1 to 20.n and emitted from the second assembly 20 toward the first assembly 10 in the form of an electromagnetic field or one or more electromagnetic waves in the form of at least one received signal S2.

[0136] Next, the received signal S2 is detected by at least one first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​and the signal is evaluated by the evaluation electronic equipment 10.3.

[0137] The evaluation electronic equipment 10.3 may include, for example, a microcontroller, a resonant circuit, an ASIC, and multiple multiplexers. The position values ​​X1, X2, Y1, Y2 and distance values ​​Z_X1, Z_X2, Z_Y1, Z_Y2 calculated by signal evaluation are used to determine the average value, rotation value, and quality parameters mentioned above.

[0138] Advantageously, the modulation of the excitation signal S1 within the second magnetic field interaction means 20.1-20.n is performed by the generation of eddy currents. Preferably, each of the second electromagnetic field interaction means 20.1 to 20.n is structurally identical, and all of the second electromagnetic field interaction means 20.1 to 20.n are arranged equidistant from each other within the grid.

[0139] The position is determined within a predetermined measurement range by an absolute measurement method. The measurement range depends on the length of the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' in the corresponding measurement directions x, y, or the resulting 0° and 90° signals.

[0140] At the start of measurement, the first assembly 10 and the second assembly 20 are aligned with each other within the measurement range in a prescribed manner, for example, by centering the first assembly 10 relative to the second assembly 20 (see Figure 6a). If a relative deflection of the first assembly 10 with respect to the second assembly 20 occurs, the absolute position of the first assembly within the measurement range can be determined.

[0141] Preferably, the area of ​​the second interaction surface 21 is less than or equal to the area of ​​the measurement region. [Explanation of Symbols]

[0142] 1 Inductive position measuring device 10 First Assembly 10.1 Excitation means 10.21 First receiving means 10.22 Second receiving means 10.PX1 Electromagnetic Field Interaction Pair 10.X1 First electromagnetic field interaction means 11. First Interaction Surface 20 Second Assembly 20.1~20.n Second electromagnetic field interaction means 21 Second Interacting Surface rot(X) Rotation information S1 Excitation signal S2 Received signal SB1 Vibration width T1 period length V3 distance X1 Linear position information Z_X1 Distance Information x First measurement direction y Second measurement direction z Third measurement direction

Claims

1. An inductive position measuring device (1) includes a first assembly (10) having a first interaction surface (11) and a second assembly (20) having a second interaction surface (21), wherein the assemblies (10, 20) are arranged facing each other in a third measuring direction (z) and are movable relative to each other. The second interaction surface (21) is larger than the first interaction surface (11), The first assembly (10) includes a plurality of first electromagnetic field interacting means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') arranged parallel to the first interaction surface (21), The second assembly (20) includes a plurality of second electromagnetic field interacting means (20.1 to 20.n) that are distributed in a planar manner across the second interaction surface (21), The first and second electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2''; 20.1 to 20.n) are capable of electromagnetic interaction. In the induction-type position measuring device (1), At least one first electromagnetic field interaction means (10.X1, 10.X2; 10.X1', 10.X1'', 10.X2', 10.X2'') is arranged along a first measurement direction (x), and at least one further first electromagnetic field interaction means (10.Y1, 10.Y2; 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') is arranged along a second measurement direction (y), and Each of the first electromagnetic field interacting means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') includes at least one excitation means (10.1; 10.2) for generating an electromagnetic field and at least one receiving means (10.21, 10.22; 10.23, 10.24, 10.25, 10.26) for receiving an electromagnetic field. An induction-type position measuring device (1) characterized by the following.

2. The induction-type position measuring device according to claim 1, characterized in that the first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') is configured as an elongated linear sensor, and the first and second measurement directions (x, y) extend perpendicular to each other.

3. The first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') - Each includes a first receiving means (10.21; 10.23, 10.25) and a second receiving means (10.22; 10.24, 10.26) having a periodic trajectory with a constant period length (T1; T2), wherein the receiving means (10.21, 10.22; 10.23, 10.24, 10.25, 10.26) are offset from each other by one-quarter of their period lengths (T1; T2) in the first or second measurement direction (x, y), Each includes an excitation means (10.1; 10.2), and the excitation means (10.1; 10.2) surrounds the two receiving means (10.21, 10.22; 10.23, 10.24, 10.25, 10.26), An induction-type position measuring device according to claim 1 or 2, characterized in that

4. The induction position measuring device according to any one of claims 1 to 3, characterized in that the first assembly (10) includes four first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2) arranged perpendicular to each other within the first interaction surface (21).

5. The induction-type position measuring device according to claim 3 or 4, characterized in that the receiving means (10.21, 10.22) of the four first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2) are configured to have an oscillation width (SB1) corresponding to at least one period length (T1).

6. The induction position measuring device according to any one of claims 1 to 3, characterized in that the first assembly (10) includes eight first electromagnetic field interaction means (10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') arranged on the first interaction surface (21) as four pairs of parallel electromagnetic field interaction means (10.PX1, 10.PX2, 10.PY1, 10.PY2), wherein the four pairs of electromagnetic field interaction means (10.PX1, 10.PX2, 10.PY1, 10.PY2) are each arranged perpendicular to one another.

7. - The first receiving means (10.23, 10.25) of at least one electromagnetic field interaction pair (10.PX1, 10.PX2, 10.PY1, 10.PY2) are identically configured and connected in series. - The second receiving means (10.24, 10.26) of at least one electromagnetic field interaction pair (10.PX1, 10.PX2, 10.PY1, 10.PY2) are identically configured and connected in series. - The receiving means (10.23, 10.24, 10.25, 10.26) of the electromagnetic field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are configured to have an oscillation width (SB2) of less than half of the period length (T2). - The distance (V3) between two receiving means (10.23, 10.24; 10.25, 10.26) within at least one electromagnetic field interaction pair (10.PX1, 10.PX2, 10.PY1, 10.PY2) is half the period length (T2). An induction-type position measuring device according to claim 3 or 6, characterized by the above.

8. The induction-type position measuring device according to any one of claims 1 to 7, characterized in that the second assembly (20) is not connected to an active energy supply device and a data processing device.

9. The second electromagnetic field interaction means (20.1 to 20.n) is - Composed of quadrilaterals, especially squares, - Distributed on the second interaction surface (21) in a grid-like manner, with elements of the same size. An induction type position measuring device according to any one of claims 1 to 8, characterized in that

10. The induction position measuring device according to any one of claims 1 to 9, characterized in that the second electromagnetic field interaction means (20.1 to 20.n) is manufactured by planar technology, in particular by thick film technology and / or thin film technology.

11. A method for operating an induction-type position measuring device according to any one of claims 1 to 10, A predetermined excitation signal (S1) is transmitted to the second assembly (20) using at least one first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'', and thereafter, at least one first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'' The received signals (S2) applied to ', 10.Y2', 10.Y2'' are measured individually, and the linear position information (X1, X2, Y1, Y2) and / or distance information (Z_X1, Z_X2, Z_Y1, Z_Y2) of the at least one first electromagnetic field interacting means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') are determined by the corresponding signal evaluation of at least one received signal (S2). A method characterized by the following features.

12. The method according to claim 11, characterized in that the relative positions of the first and second assemblies (10, 20) are determined by the induction-type position measuring device (1) with at least four degrees of freedom.

13. The method according to claim 11 or 12, characterized in that at least one first quality parameter is derived from the position information (X1, X2, Y1, Y2) and / or distance information (Z_X1, Z_X2, Z_Y1, Z_Y2) of the first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') that determines position information (X1, X2, Y1, Y2) and / or distance information (Z_X1, Z_X2, Z_Y1, Z_Y2) with respect to the same measurement direction (x, y, z).

14. The method according to any one of claims 11 to 13, characterized in that at least one rotation information (rot(X), rot(Y), rot(Z)) around an axis directed in one of the measurement directions (x, y, z) is determined from the position information (X1, X2, Y1, Y2) and / or distance information (Z_X1, Z_X2, Z_Y1, Z_Y2) of the first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.X2, 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2'').

15. The method according to claim 14, characterized in that at least one second quality parameter is derived from the at least one rotation information (rot(X), rot(Y), rot(Z)).

16. The method according to claim 13 or 15, characterized in that an error signal is output and / or an optimization procedure is performed according to the first quality parameter and / or the second quality parameter.

Images