Inductive position measuring device

Abstract

To provide an induction-type position measuring device. [Solution] An inductive position measuring device comprising a first assembly having a first interaction surface and a second assembly having a second interaction surface. The two assemblies are arranged facing each other in a third direction (z) and are movable relative to each other. The first assembly includes a plurality of first electromagnetic field interacting means arranged parallel to the first interaction surface and connected to an evaluation electronic device. The second assembly includes a plurality of second electromagnetic field interacting means arranged planarly and distributed across the second interaction surface. The inductive position measuring device comprises at least four first electromagnetic field interacting means in the form of linear sensors, characterized in that the first electromagnetic field interacting means are arranged as a quadrilateral along the first and second directions (x, y), and the first electromagnetic field interacting means at least partially overlap at the corners (A, B, C, D) of the quadrilateral arrangement.

Description

Technical Field

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[0001] The present invention relates to an inductive position measuring device as described in the preamble of claim 1.

Background Art

[0002] From WO2020088869A1, a moving device comprising a positioning system having a static assembly and a moving assembly is known. Both assemblies have their own power supplies and include a plurality of coils or capacitor plates configured in a circular shape, and they interact electromagnetically with each other.

[0003] The disadvantage of the prior art described above is that both the moving assembly and the stationary assembly utilize electrical components that need to be connected to active electronic devices. As a result, each assembly requires its own power supply and its own data connection function, which makes the structure considerably complex, especially in the case of the stationary assembly.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] The problem underlying the present invention is to provide an inductive position measuring device that enables positioning of a moving assembly with multiple degrees of freedom and at the same time is compact and cost-effective in manufacturing.

Means for Solving the Problems

[0006] This problem is solved by the features of claim 1 according to the present invention. Advantageous embodiments and variations are described in their respective dependent claims. The inductive position measuring device according to the present invention includes a first assembly having a first interaction surface and a second assembly having a second interaction surface. The two assemblies are arranged facing each other in a third direction and are movable relative to each other. The first assembly includes a plurality of first electromagnetic field interacting means arranged parallel to the first interaction surface and connected to an evaluation electronic device. The second assembly includes a plurality of second electromagnetic field interacting means arranged planarly and distributed across the second interaction surface. The first and second electromagnetic field interacting means can interact electromagnetically. The inductive position measuring device includes at least four first electromagnetic field interacting means in the form of linear sensors, wherein the first electromagnetic field interacting means are arranged as a quadrilateral along the first and second directions, and the first electromagnetic field interacting means at least partially overlap at the corners of the quadrilateral arrangement.

[0007] According to one advantageous evolution of the present invention, each of the first electromagnetic field interacting means includes at least one excitation means for generating an electromagnetic field and at least one receiving means for receiving an electromagnetic field.

[0008] In further embodiments, the first electromagnetic field interaction means is Each includes a first receiving means and a second receiving means, each having a periodic orbit with a fixed period length, wherein these receiving means are arranged offset from each other by one-quarter of their period lengths in the first or second direction. Each includes an excitation means, and the excitation means surrounds two receiving means, particularly those with a rectangular shape.

[0009] Advantageously, the first assembly includes four first electromagnetic field interacting means arranged perpendicular to each other within the first interaction surface. If an embodiment comprising four first electromagnetic field interacting means is intended, advantageously, the receiving means of the four first electromagnetic field interacting means are configured such that their oscillation amplitudes correspond to at least one period length.

[0010] Alternatively, the first assembly includes eight first electromagnetic field interacting means arranged on the first interaction surface as paired parallel electromagnetic field interacting pairs, with four pairs of electromagnetic field interacting means each arranged perpendicular to one another.

[0011] If an embodiment is intended that comprises eight electromagnetic field interaction means or four electromagnetic field interaction pairs, advantageously, at least one first receiving means of an electromagnetic field interaction pair is identically configured and connected in series. Additionally, at least one second receiving means of an electromagnetic field interaction pair is identically configured and connected in series. The amplitude of at least one of the receiving means is less than half the period length, and the distance between two first receiving means or two second receiving means in at least one electromagnetic field interaction pair is half the period length.

[0012] This refers to the distance within the electromagnetic field interaction pair configured between a receiving means of one first electromagnetic field interaction means and a receiving means of another first electromagnetic field interaction means, with respect to a virtual zero crossing.

[0013] Preferably, in each of the four electromagnetic field interaction pairs, the first receiving means is identically configured, and the first receiving means within the electromagnetic field interaction pair are connected in series. Similarly, preferably, in each of the four electromagnetic field interaction pairs, the second receiving means is identically configured, and the first receiving means within the electromagnetic field interaction pair are connected in series.

[0014] Advantageously, the second electromagnetic field interaction means is • Composed of quadrilaterals, especially square faces, • They are arranged on the second interaction surface in a lattice-like manner, with equal size and uniformly dispersed.

[0015] Advantageously, the quadrilaterals in a quadrilateral arrangement are rectangles, and especially squares. Advantageously, the second electromagnetic field interacting means is manufactured by planar technology, particularly thick film technology, and by thin film technology as a complement or alternative.

[0016] Preferably, the first electromagnetic field interaction means can be operated alternately at a predetermined switching frequency by the evaluation electronic equipment. Advantageously, a given switching frequency depends on the current relative speed and the historical (i.e., temporally earlier) relative speed of the first assembly and the second assembly as complementary or alternative.

[0017] In addition, the evaluation electronic equipment is intended to include at least one signal generator module, at least one evaluation module, and at least one switching unit. The first electromagnetic field interaction means is selectively connected individually or in pairs to either the evaluation module or the signal generator module via at least one switching unit.

[0018] In a further embodiment, the switching unit includes at least one multiplexer and at least one control module, the control module controlling at least one multiplexer in a switching frequency, and thus a connection is made between a pair of first electromagnetic field interaction means extending in the same direction and an evaluation module or signal generation module.

[0019] In a further form, the second assembly is intended not to be connected to an active energy supply device and a data processing device. Therefore, only the first assembly is connected to the active energy supply device and the data processing device.

[0020] Based on the description of the exemplary embodiments below, the present invention will be described in more detail with reference to the attached schematic diagrams, along with additional features and advantages.

Brief Description of the Drawings

[0021] [Figure 1] It is a perspective view of an inductive position measuring device including a first assembly and a second assembly. [Figure 2] It is a plan view of the second assembly. [Figure 3] It is a plan view of a first exemplary embodiment of the first electromagnetic field interaction means. [Figure 4] It is a plan view of a second exemplary embodiment of the first electromagnetic field interaction means. [Figure 5] It is a view of the first interaction surface of the first assembly. [Figure 6] FIG. 6a is a schematic plan view of an inductive position measuring device, showing the relative rotation of the first assembly about the coordinate axis in the third direction. FIG. 6b is a schematic plan view of an inductive position measuring device, showing the relative rotation of the first assembly about the coordinate axis in the third direction. [Figure 7] It is a schematic block diagram showing the evaluation electronics of the first assembly of the inductive position measuring device.

Modes for Carrying Out the Invention

[0022] The inductive position measuring device 1 of the exemplary embodiment presented below, according to FIG. 1, comprises a first assembly 10 and a second assembly 20, these assemblies facing each other in the third direction z and being movable relative to each other. The first assembly 10 and the second assembly 20 are arranged spaced apart from each other, thus forming a gap between the two assemblies 10, 20.

[0023] The first assembly 10 includes a first interaction surface 11 having a plurality of first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'', the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' arranged parallel to and flat within the first interaction surface 11. The first assembly 10 is supplied with electrical energy to generate at least one excitation signal S1 and to receive at least one reception signal S2. This can be done, for example, via a cable or wirelessly. The energy source may be, for example, a battery within the first assembly 10 or it may be outside the first assembly 10.

[0024] The second assembly 20 includes a second interaction surface 21 having a plurality of second electromagnetic field interacting means 20.1 to 20.n. The second electromagnetic field interacting means 20.1 to 20.n are arranged planarly on or within the second interaction surface 21 and are distributed planarly across the second interaction surface 21. Since the second assembly 20 interacts with the first assembly 10 entirely passively, the second assembly 20 does not independently generate its own magnetic field, nor is electrical energy actively supplied to it via cables or the like.

[0025] The second interaction surface 21 of the second assembly 20 is, in principle, larger than the first interaction surface 11 of the first assembly 10, and therefore, even when the first assembly 10 is positioned in the edge region of the second assembly 20, there is always sufficient overlap between the two assemblies 10, 20.

[0026] The two interaction surfaces 11 and 21 are positioned opposite each other and spaced apart so that their position can be determined by electromagnetic interaction between the first electromagnetic field interaction means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' and the second electromagnetic field interaction means 20.1 to 20.n. This is especially true when the first electromagnetic field interaction means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' and the second electromagnetic field interaction means 20.1 to 20.n overlap at least partially in a plan view in a third direction z.

[0027] During the operation of the inductive position measuring device 1, the position and orientation of assemblies 10 and 20 can change relative to each other in three directions x, y, and z. Advantageously, the three directions x, y, and z are orthogonal to each other. Through electromagnetic interaction between the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' and the second electromagnetic field interacting means 20.1 to 20.n, the current position and orientation are determined and evaluated by the inductive position measuring device 1 in six degrees of freedom. To evaluate the position and orientation of the first assembly 10, evaluation electronic equipment can be provided inside or outside the first assembly 10. Data transfer can be performed, for example, via cable, or alternatively, wirelessly.

[0028] Preferably, one of the assemblies is stationary and fixed, while the other assembly is freely movable. In particular, if the second interaction surface 21 of the second assembly 20 is several times larger than the first interaction surface 11 of the first assembly 10, a stationary and fixed arrangement of the second assembly 20 is beneficial. However, alternatively, the first assembly 10 may be stationary and fixed, and the second assembly 20 may be moved relative to the first assembly 10. This is beneficial, for example, when it is not possible to supply electrical energy to the movable assembly.

[0029] Figure 2 shows a preferred embodiment of the second interaction surface 21 of the second assembly 20. The second interaction surface 21 may have substantially any topology or may be arbitrarily curved, but is preferably configured to be flat.

[0030] The second interaction surface 21 is preferably the surface of a printed circuit board manufactured by thin-film technology and, as a complement or alternative, by thick-film technology. The printed circuit board comprises an electrically insulating base material 19, such as a fiber-reinforced epoxy resin. A conductive layer, particularly made of copper, is coated onto the base material 19 of the printed circuit board, and this conductive layer is structured to constitute a plurality of second interaction means 20.1 to 20.n.

[0031] Alternatively, the individual second electromagnetic field interacting means 20.1-20.n and the second interaction surface 21 may be made of a substrate. In particular, this may be a metal substrate in which the individual second electromagnetic field interacting means 20.1-20.n are formed in the form of raised portions, and there is no metal substrate between the individual second electromagnetic field interacting means 20.1-20.n. The regions between the individual second electromagnetic field interacting means 20.1-20.n may be made of voids or cavities, or may be filled with epoxy resin, for example, to form a flat surface.

[0032] The second electromagnetic field interaction means 20.1 to 20.n are distributed across the second interaction surface 21 in the shape of a square grid, maintaining a predetermined distance from one another. The columns and rows of the grid consisting of the second electromagnetic field interaction means 20.1 to 20.n are arranged along the first and second directions x and y, which extend orthogonally. All of the second electromagnetic field interaction means 20.1 to 20.n are of the same dimensions and, in particular, are square in shape. However, other shapes, such as circles, rectangles, and spirals, are also possible.

[0033] As shown in Figure 2, the grid can be completely filled with second electromagnetic field interacting means 20.1-20.n, so that the second electromagnetic field interacting means 20.1-20.n are uniformly distributed in a grid pattern. Alternatively, the second electromagnetic field interacting means 20.1-20.n can be non-uniformly distributed across the second interaction surface 21, so that the grid includes, for example, individual positions or regions without the second electromagnetic field interacting means 20.1-20.n.

[0034] Preferably, each of the second electromagnetic field interaction means 20.1 to 20.n is structurally identical, and all of the second electromagnetic field interaction means 20.1 to 20.n are arranged equidistant from each other within the grid.

[0035] Figure 3 shows a first exemplary embodiment of the first electromagnetic field interacting means 10.X1, 10.X2, 10.Y1, and 10.Y2. The illustrated first electromagnetic field interacting means 10.X1 is an elongated linear sensor including a flat excitation means 10.1 for generating an electromagnetic field and two flat receiving means 10.21 and 10.22 for receiving the electromagnetic field.

[0036] The first receiving means 10.21 is configured as a receiving conductor track and consists of a plurality of conductor track sections. The base trajectory of the first receiving means 10.21 is similar to a sinusoidal trajectory, and the magnitude of the amplitude of the individual conductor track is not necessarily constant structurally. The amplitudes of two adjacent conductor tracks of the base trajectory (consisting of a positive conductor track amplitude and a negative conductor track amplitude) have a period length T1 and an oscillation width SB1.

[0037] The first receiving means 10.21 is divisible into an advance section and a return section. The advance section has a base trajectory that is

[0038]

number

[0039] It is similar to the function graph of the function f(x) = a·sin(x) in . The return interval is such that its base orbit is

[0040]

number

[0041] This is similar to the function graph of the function g(x) = -a·sin(x) in . That is, the return interval of the first receiving means 10.21 approximately coincides with the advance interval which is a reflection of the symmetry line. The second receiving means 10.22 is configured as a receiving conductor track, similar to the first receiving means 10.21, but is positioned offset from the first receiving means 10.21 by one-quarter of the period length T1 (offset V1). The offset V1 occurs, among other things, along the first direction x or along the second direction y. The offset arrangement of the two receiving means 10.21, 10.22 allows for the generation of correspondingly phase-shifted signals. The two receiving means 10.21, 10.22 are electrically connected to transmit 0° and 90° signals.

[0042] The two receiving means 10.21 and 10.22 have different lengths. For example, the first receiving means 10.21 structurally includes a length of 3 periods, each with a period length T1, and the second receiving means 10.22 structurally includes a length of 2.5 periods, each with a period length T1.

[0043] In addition to the sinusoidal curve trajectories of receiving means 10.21 and 10.22, alternative curve shapes such as triangular trajectories can also be considered. In receiving means 10.21 and 10.22, the amplitude SB1 refers to the height of the deflection between the minimum and maximum values ​​within the period length T1. This extends perpendicular to the direction of the period length T1, or perpendicular to the first or second directions x, y.

[0044] According to the first exemplary embodiment of the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, and 10.Y2, the vibration amplitude SB1 of the first receiving means 10.21 and the vibration amplitude SB1 of the second receiving means 10.22 are configured to be identical on average and correspond to at least the period length T1.

[0045] The receiving means 10.21 and 10.22 shown in Figure 3 have an oscillation amplitude SB1 that corresponds to approximately 1.5 times the period length T1. The two receiving means 10.21, 10.22 consist of multiple conductor track sections located in different layers of the carrier substrate. Details of such a multilayer structure of conductor track sections are described in European Patent Application EP23200280, filed September 28, 2023, and therein I expressly refer to that patent application.

[0046] To compensate for the pitch tilt, the receiving means 10.21, 10.22 may be equipped with additional loops S, S', which are partially formed from the same conductor track section. For this purpose, the loops S, S' are positioned below the conductor track amplitude at predetermined positions on the basic trajectory. At positions with the additional loops S, S', the conductor track amplitudes of the receiving means 10.21, 10.22 are deviated from the basic trajectory and displaced outward by a predetermined amount, i.e., in the direction of the excitation means 10.1. The loops S, S' are displaced slightly inward relative to the conductor track amplitude of the basic trajectory, i.e., in the direction of the virtual zero crossing of the basic trajectory of the receiving means 10.21, 10.22. However, overall, the structurally shifted conductor track amplitude with the loops produces an amplitude signal of the same magnitude as the normal conductor track amplitude without the loops.

[0047] Loops S and S' are part of the receiving conductor track and are preferably arranged on the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, and 10.Y2 so as to be mirror-symmetric with respect to an axis A that divides the forward or return section into equal parts.

[0048] The loop S of the first receiving means 10.21 can be configured within the forward section of the receiving conductor track and, as a complement or alternative, within the return section of the receiving conductor track. The loop S' of the second receiving means 10.22 can similarly be configured within the forward section of the receiving conductor track and, as a complement or alternative, within the return section of the receiving conductor track.

[0049] The two receiving means 10.21 and 10.22 are surrounded, i.e., enclosed on all sides, by the excitation means 10.1. The excitation means 10.1, as an excitation conductor track, is structurally configured in a quadrilateral shape. In particular, the quadrilateral is at least rectangular.

[0050] According to a second exemplary embodiment of the first electromagnetic field interaction means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'', they can also be arranged as electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2.

[0051] The electromagnetic field interaction pair 10.PX1 shown in Figure 4 includes a first electromagnetic field interaction means 10.X1' and a further first electromagnetic field interaction means 10.X1''. The two first electromagnetic field interaction means 10.X1', 10.X1'' are configured as elongated linear sensors and jointly include one flat excitation means 10.2 (shown in Figure 4), or alternatively, each includes one flat excitation means (not shown) for generating an electromagnetic field.

[0052] The first electromagnetic field interaction means 10.X1' includes a flat first receiving means 10.23 and a flat second receiving means 10.24 for receiving an electromagnetic field. The further first electromagnetic field interaction means 10.X' also includes a flat first receiving means 10.25 and a flat second receiving means 10.26 for receiving an electromagnetic field.

[0053] The first electromagnetic field interacting means 10.X1', 10.X1'' are arranged spaced apart from each other, and thus an offset V3 is formed between the two first electromagnetic field interacting means 10.X1', 10.X1'' with respect to the receiving means 10.23, 10.24 and the receiving means 10.25, 10.26. The offset V3 occurs, among other things, along the first direction x or along the second direction y. Advantageously, the offset V3 corresponds to half of the period length T2.

[0054] The configuration of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' according to the second exemplary embodiment, and their arrangement as electromagnetic field interacting pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​ensures that the cross sensitivity of the inductive measuring device 1 is reduced. In particular, the cross sensitivity perpendicular to direction x or direction y is reduced here.

[0055] The first receiving means 10.23, 10.25 are configured as receiving conductor tracks and consist of multiple conductor track sections. The base trajectories of the first receiving means 10.23, 10.25 are similar to sine curves, and the magnitude of the amplitude of each conductor track is not necessarily constant structurally. The amplitudes of two adjacent conductor tracks on the base trajectory (consisting of a positive conductor track amplitude and a negative conductor track amplitude) have a period length T2 and an oscillation width SB2.

[0056] The first receiving means 10.23 and 10.25 are each divisible into an advance section and a return section. The advance section has a basic trajectory,

[0057]

number

[0058] It is similar to the function graph of the function f(x) = a·sin(x) in . The interval is such that its base orbit is

[0059]

number

[0060] This is similar to the function graph of the function g(x) = -a·sin(x) in . That is, the return interval of the first receiving means 10.23, 10.25 approximately coincides with the advance interval which is a reflection of the symmetry line.

[0061] The second receiving means 10.24, 10.26 are configured as receiving conductor tracks, similar to the first receiving means 10.23, 10.25, but are offset from the associated first receiving means 10.23, 10.25 by a quarter of the period length T2 (offset V2). The offset V2 occurs, among other things, along the first direction x or along the second direction y. The offset arrangement of the two receiving means 10.23, 10.25 or the two receiving means 10.24, 10.26 can generate correspondingly phase-shifted signals. The two receiving means 10.24, 10.26 or the two receiving means 10.24, 10.26 are electrically connected to transmit 0° and 90° signals.

[0062] The two receiving means 10.23 and 10.25 have different lengths. For example, the first receiving means 10.23 includes a length of 3 periods, each with a period length T2, and the second receiving means 10.25 includes a length of 2.5 periods, each with a period length T2.

[0063] In one embodiment of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' according to the second exemplary embodiment, the first receiving means 10.23 of the first electromagnetic field interacting means 10.X1' is connected in series with the first receiving means 10.25 of the further first electromagnetic field interacting means 10.X1''. In addition, the second receiving means 10.24 of the first electromagnetic field interacting means 10.X1' is connected in series with the second receiving means 10.26 of the further first electromagnetic field interacting means 10.X''. This series connection results in 0° and 90° signals with increased signal amplitudes, respectively.

[0064] In addition to the sinusoidal curve trajectories of receiving means 10.23, 10.24, 10.25, and 10.26, alternative curve shapes such as triangular trajectories can also be considered. In receiving means 10.23, 10.25, 10.24, and 10.26, the amplitude SB2 refers to the height of the deflection between the minimum and maximum values ​​within the period length T2. This extends perpendicular to the direction of the period length T2, or perpendicular to the first or second direction x, y.

[0065] According to a second exemplary embodiment of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'', the vibration amplitude SB2 of the first receiving means 10.23, 10.25 and the vibration amplitude SB2 of the associated second receiving means 10.24, 10.26 are configured to be identical on average and correspond to at most half of the period length T2.

[0066] The receiving means 10.23, 10.25, 10.24, and 10.26 shown in Figure 3 have an oscillation amplitude SB2 that corresponds to approximately one-third of the period length T2. The first and second receiving means 10.23, 10.25, 10.24, and 10.26 consist of multiple conductor track sections located in different layers of the substrate, similar to the first exemplary embodiment.

[0067] To compensate for the pitch tilt, receiving means 10.23, 10.25, 10.24, and 10.26 may also be provided with additional loops S, S' formed partially from the conductor track sections. For this purpose, loops S, S' are positioned below the conductor track amplitude at predetermined positions on the basic trajectory. At positions with additional loops S, S', the conductor track amplitudes of receiving means 10.21 and 10.22 deviate from the basic trajectory and are displaced outward by a predetermined amount, i.e., in the direction of excitation means 10.1. Loops S, S' are displaced slightly inward relative to the conductor track amplitude of the basic trajectory, i.e., in the direction of the virtual zero crossing of the basic trajectory of receiving means 10.23, 10.25, 10.24, and 10.26. However, overall, combining the structurally shifted conductor track amplitude with the loops results in an amplitude signal of the same magnitude as the normal conductor track amplitude without the loops.

[0068] Loops S, S' are part of the receiving conductor track and are preferably arranged on two first electromagnetic field interaction means 10.X1', 10.X1'' such that they are mirror-symmetric with respect to an axis A that divides the forward or return section into equal parts.

[0069] The loop S of the first receiving means 10.23, 10.25 can be configured within the forward section of the receiving conductor track and, as a complement or alternative, within the return section of the receiving conductor track.

[0070] The loop S' of the second receiving means 10.24, 10.26 can similarly be configured within the forward section of the receiving conductor track and, as a complement or alternative, within the return section of the receiving conductor track.

[0071] As already mentioned above, the receiving means 10.23, 10.25, 10.24, and 10.26 are surrounded, i.e., on all sides, by a common excitation means 10.2 or by a plurality of individual excitation means. The excitation means 10.2, as an excitation conductor track, is structurally configured to be at least quadrangular in shape. In particular, the quadrangular is at least rectangular.

[0072] For example, one excitation means 10.2 can form two rectangles, as shown in Figure 4: one rectangle around the receiving means 10.23 and 10.24, and another rectangle around the receiving means 10.25 and 10.26. Alternatively, two excitation means can be provided, each with one excitation means forming a rectangle around the receiving means 10.23 and 10.24, and the additional excitation means forming a rectangle around the receiving means 10.25 and 10.26.

[0073] The first electromagnetic field interacting means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'' are configured within the first interacting surface 11 of the first assembly 10. The first interacting surface 11 is the surface of a printed circuit board manufactured by thin-film technology and, as a complement or alternative, by thick-film technology. To constitute the structured first electromagnetic field interacting means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'', a plurality of separate superimposed conductive layers separated from each other by an insulating layer can be provided. Electrical connections exist between conductor tracks of various conductive layers at predetermined locations, known as vias.

[0074] As shown in Figure 5, two first electromagnetic field interaction means 10.X1, 10.X2 or two electromagnetic field interaction pairs 10.PX1, 10.PX2 extend parallel to a first direction x and are spaced apart from each other by a distance Dx. Two first electromagnetic field interaction means 10.Y1, 10.Y2 or two electromagnetic field interaction pairs 10.PY1, 10.PY2 extend parallel to a second direction y and are similarly spaced apart from each other by a distance Dy. Advantageously, the arrangement of the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2, or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 corresponds, among other things, to a quadrilateral arrangement in the shape of a square (Dx=Dy).

[0075] Advantageously, the individual first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 of the quadrilateral arrangement partially or completely overlap or superimpose at corners A, B, C, D of the quadrilateral arrangement.

[0076] Superposition refers to the overlap of at least two adjacent and mutually orthogonal first electromagnetic field interaction means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'' or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​obtained in a plan view in a third direction z.

[0077] Partial superposition means that the superposition region of at least two adjacent and mutually orthogonal first electromagnetic field interaction means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'' or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 does not correspond to the maximum possible superposition region.

[0078] Perfect superposition means that the superposition region of at least two adjacent and mutually orthogonal first electromagnetic field interaction means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'' or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 corresponds to the largest possible superposition region.

[0079] For example, in this case, a complete superposition of all adjacent first electromagnetic field interaction means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'' or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 occurs at all four corners A, B, C, D of the quadrilateral arrangement, and thus the first interaction surface 11 becomes as small as possible, thereby enabling a particularly compact first assembly 10. Ideally, here, each individual first electromagnetic field interacting means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'' or electromagnetic field interacting pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 protrudes at angles A, B, C, and D, or protrudes only slightly.

[0080] In particular, in the arrangement of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' as electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​as shown in Figures 1, 6a, and 6b, it is conceivable that, with respect to the inwardly located first electromagnetic field interacting means 10.X1'', 10.X2'', 10.Y1'', 10.Y2'', at angles A, B, C, and D, a (complete) superposition of the excitation means 10.2 and receiving means 10.23, 10.24, 10.25, 10.26 of the adjacent inwardly located first electromagnetic field interacting means 10.X1'', 10.X2'', 10.Y1'', 10.Y2'' can occur. In this case, the first electromagnetic field interaction means 10.X1', 10.X2', 10.Y1', and 10.Y2' located on the outside are superimposed (completely) by the excitation means 10.2, but not by the receiving means 10.23, 10.24, 10.25, and 10.26.

[0081] However, with respect to both the internally located first electromagnetic field interaction means 10.X1'', 10.X2'', 10.Y1'', 10.Y2'' and the externally located first electromagnetic field interaction means 10.X1', 10.X2', 10.Y1', 10.Y2', superposition of excitation means 10.2 and receiving means 10.23, 10.24, 10.25, 10.26 is also possible.

[0082] Each first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or each electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 is offset in a first direction x or a second direction y by two receiving means 10.21, 10.22, 10.23, 10.24, 10.25, 10.26, each electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or each electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 transmits two measurement variables in the form of a 0° signal and a 90° signal, so that a total of eight measurement variables are available for position determination.

[0083] For each first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​linear position values ​​and signal amplitudes in the corresponding directions x, y are first calculated from the 0° signal and the 90° signal. Distance values ​​can then be generated using the signal amplitudes. The distance values ​​of the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 quantify the distance in the third direction z from the corresponding electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2 or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 to the second interaction surface 21 of the second assembly 20.

[0084] As shown in Figure 5, the first electromagnetic field interaction means 10.X1 or electromagnetic field interaction pair 10.PX1 transmits first measurement information X1, which includes a first position value with respect to a first direction x and a first signal amplitude for determining the position value with respect to a third direction z. Similarly, the first electromagnetic field interaction means 10.X2 or electromagnetic field interaction pair 10.PX2 transmits second measurement information X2, which includes a second position value with respect to a first direction x and a second signal amplitude for determining the position value with respect to a third direction z. The first electromagnetic field interaction means 10.Y1 or electromagnetic field interaction pair 10.PY1 transmits third measurement information Y1, which includes a third position value with respect to a second direction y and a third signal amplitude for determining the position value with respect to a third direction z. The first electromagnetic field interaction means 10.Y2 or electromagnetic field interaction pair 10.PY2 transmits fourth measurement information Y2, which includes a fourth position value with respect to a second direction y and a fourth signal amplitude for determining the position value with respect to a third direction z.

[0085] As a result, during the measurement cycle, the inductive position measuring device 1 sends two pieces of measurement information X1 and X2 relating to a first direction x, and two pieces of measurement information Y1 and Y2 relating to a second direction y, and each of the pieces of measurement information X1, X2, Y1, and Y2 consists of at least one position value and at least one signal amplitude.

[0086] In this way, the relative position and orientation of the first assembly 10 with respect to the second assembly 20 can be determined with up to six degrees of freedom. Figures 6a and 6b show schematic plan views of the inductive position measuring device 1, where, for the first assembly 10, only the first interaction surface 11 is shown, which has a plurality of first electromagnetic field interaction means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' arranged in pairs. The first assembly 10 and the second assembly 20 face each other and are arranged in two parallel planes, so that a gap is formed between the first assembly 10 and the second assembly 20. The first assembly 10 is in the first position in Figure 6a. Figure 6b shows the first assembly 10 from Figure 6a at a later point in time, where the first assembly 10 is now deflected and has taken the second position. During the transition from the first position to the second position, the first assembly 10 underwent a relative rotation around the coordinate axis of the third direction z. Here, the second assembly 20 remained stationary and motionless. The inductive position measuring device 1 can determine and evaluate one or more relative rotations of the first assembly 10 in three directions x, y, and z.

[0087] As schematically shown in Figures 6a and 6b, the positioning is preferably based on electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, and 10.PY2 that form a sufficiently strong coupling, i.e., with respect to the electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, and 10.PY2 that at least partially superimpose in a plan view in a third direction z, and the second electromagnetic field interaction means 20.1 to 20.n. Advantageously, each of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' is larger than each of the second electromagnetic field interacting means 20.1 to 20.n, and therefore, a plurality of second electromagnetic field interacting means 20.1 to 20.n are always superimposed by at least one of the first electromagnetic field interacting means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2''. Here, in particular, the receiving means 10.23, 10.24, 10.25, and 10.26 of the first electromagnetic field interaction means 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', and 10.Y2'' are superimposed on a plurality of second electromagnetic field interaction means 20.1 to 20.n.

[0088] Figure 7 shows a schematic block diagram of the evaluation electronic equipment 3 of the induction-type position measuring device 1. The evaluation electronic device 3 includes an excitation resonant circuit as a signal generator module 3.1, an application-specific integrated circuit (ASIC) as an evaluation module 3.2, and a switching unit 3.3. In addition, the evaluation module 3.2 may also access a non-volatile memory module to store the current speed and historical speed.

[0089] The switching unit 3.3 includes a control module 3.4, such as a microcontroller, which controls three multiplexers MUX1, MUX2, and MUX3, and also communicates with the processing unit 3.2.

[0090] Individual first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 are connected to the evaluation electronic device 3, and the evaluation electronic device 3 individually The first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 are operated periodically and alternately at a predetermined switching frequency.

[0091] A predetermined switching frequency, which specifies the frequency of change between the connection between a predetermined first electromagnetic field interaction means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'' or electromagnetic field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 and a signal generator module 3.1 or evaluation module 3.2, is selected by the switching unit 3.3 so that reliable position and orientation determination is made.

[0092] This can be done, for example, by an adaptive switching frequency that is continuously adapted according to the current relative velocity, complementing or substituting for the relative velocity of the deflection history of the first assembly 10. A predetermined switching frequency is always selected to enable reliable position and orientation determination in real time. That is, if the first assembly 10 is deflected rapidly, an increased switching frequency is selected accordingly. If there is no deflection of the first assembly 10, or only slight deflection occurs, a constant or correspondingly reduced switching frequency is used.

[0093] Advantageously, electromagnetic field interaction pairs 10.X1, 10.X2, 10.Y1, and 10.Y2, which are arranged parallel to each other and along the same directions x and y, are operated simultaneously. That is, within a measurement cycle, first, only the electromagnetic field interaction pairs 10.PX1 and 10.PX2 extending in the first direction x are operated. Here, the excitation means 10.2 of the two electromagnetic field interaction pairs 10.PX1 and 10.PX2 are temporarily connected to the signal generator module 3.1, and then the receiving means 10.23, 10.24, 10.25, and 10.26 of the two electromagnetic field interaction pairs 10.PX1 and 10.PX2 are individually connected to the evaluation module 3.2. Subsequently, only the electromagnetic field interaction pairs 10.PY1 and 10.PY2 extending in the second direction y are operated. Here, the excitation means 10.2 of the two electromagnetic field interaction pairs 10.PY1 and 10.PY2 are temporarily connected to the signal generator module 3.1, and then the receiving means 10.23, 10.24, 10.25, and 10.26 of the two electromagnetic field interaction pairs 10.PY1 and 10.PY2 are individually connected to the evaluation module 3.2.

[0094] By operating the first electromagnetic field interaction means 10.X1, 10.X1', 10.X1'', 10.X2, 10.X2', 10.X2'', 10.Y1, 10.Y1', 10.Y1'', 10.Y2, 10.Y2', 10.Y2'' or electromagnetic field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 alternately in the first and second directions x and y, the advantage of saving electronic components in the evaluation electronic device is obtained because only one signal generator module 3.1 and only one processing module 3.2 are required, and these are used similarly in both directions x and y.

[0095] The position is determined within a predetermined measurement range by an absolute measurement method. The measurement range depends on the length of the first electromagnetic field interaction means 10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'' in the corresponding first or second directions x, y, or the resulting 0° and 90° signals.

[0096] At the start of measurement, the first assembly 10 and the second assembly 20 are aligned with each other within the measurement range in a prescribed manner, for example, by centering the first assembly 10 relative to the second assembly 20 (see Figure 6a). If a relative deflection of the first assembly 10 with respect to the second assembly 20 occurs, the absolute position of the first assembly within the measurement range can be determined.

[0097] Preferably, the area of ​​the second interaction surface 21 is less than or equal to the area of ​​the measurement region. [Explanation of symbols]

[0098] 1 Inductive position measuring device 10 First Assembly 10.1 Excitation means 10.21 First receiving means 10.22 Second receiving means 10.PX1 Electromagnetic Field Interaction Pair 10.X1 First electromagnetic field interaction means 11. First Interaction Surface 20 Second Assembly 20.1~20.n Second electromagnetic field interaction means 21 Second Interacting Surface 3. Electronic equipment for evaluation 3.1 Signal Generator Module 3.2 Evaluation Module 3.3 Switching Unit 3.4 Control Module A, B, C, D angle rot(X) Rotation information S1 Excitation signal S2 Received signal SB1 Vibration width T1 period length V3 distance X1 Linear position information Z_X1 Distance Information x First measurement direction y Second measurement direction z Third measurement direction

Claims

1. An inductive position measuring device (1) comprising a first assembly (10) having a first interaction surface (11) and a second assembly (20) having a second interaction surface (21), wherein the assemblies (10, 20) are arranged facing each other in a third direction (z) and are movable relative to each other. The first assembly (10) includes a plurality of first electromagnetic field interacting means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') arranged parallel to the first interaction surface (21) and connected to the evaluation electronic device (3), The second assembly (20) includes a plurality of second electromagnetic field interacting means (20.1 to 20.n) that are distributed in a planar manner across the second interaction surface (21), The first and second electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2''; 20.1 to 20.n) are capable of electromagnetic interaction. In the induction-type position measuring device (1), The inductive position measuring device (1) includes at least four first electromagnetic field interacting means in the form of linear sensors (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2''), and the first electromagnetic field interacting means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10. X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') are arranged as a quadrilateral along the first and second directions (x, y), and the first electromagnetic field interacting means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') overlap at least partially at the corners (A, B, C, D) of the quadrilateral arrangement. An induction-type position measuring device (1) characterized by the following.

2. The position determination system according to claim 1, characterized in that each of the first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') includes at least one excitation means (10.1; 10.2) for generating an electromagnetic field and at least one receiving means (10.21, 10.22; 10.23, 10.24, 10.25, 10.26) for receiving an electromagnetic field.

3. The first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') - Each includes a first receiving means (10.21; 10.23, 10.25) and a second receiving means (10.22; 10.24, 10.26), each having a periodic trajectory with a fixed period length (T1; T2), wherein the receiving means (10.21, 10.22; 10.23, 10.24, 10.25, 10.26) are offset from each other by one-quarter of their period lengths (T1; T2) in one of the first or second directions (x, y). Each includes an excitation means (10.1; 10.2), and the excitation means (10.1; 10.2) surrounds the two receiving means (10.21, 10.22; 10.23, 10.24, 10.25, 10.26). The induction type position measuring device according to claim 2, characterized in that

4. The induction position measuring device according to any one of claims 1 to 3, characterized in that the first assembly (10) includes four first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2) arranged perpendicular to each other within the first interaction surface (21).

5. The inductive position measuring device according to claim 3 or 4, characterized in that the receiving means (10.21, 10.22) of the four first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2) are configured such that their vibration amplitude (SB1) corresponds to at least one period length (T1).

6. The induction position measuring device according to any one of claims 1 to 3, wherein the first assembly (10) includes eight first electromagnetic field interaction means (10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') arranged on the first interaction surface (21) as four pairs of parallel electromagnetic field interaction means (10.PX1, 10.PX2, 10.PY1, 10.PY2), and the four pairs of electromagnetic field interaction means (10.PX1, 10.PX2, 10.PY1, 10.PY2) are each arranged perpendicular to one another.

7. - The first receiving means (10.23, 10.25) of at least one electromagnetic field interaction pair (10.PX1, 10.PX2, 10.PY1, 10.PY2) are identically configured and connected in series. - The second receiving means (10.24, 10.26) of at least one electromagnetic field interaction pair (10.PX1, 10.PX2, 10.PY1, 10.PY2) are identically configured and connected in series. - The receiving means (10.23, 10.24, 10.25, 10.26) of the electromagnetic field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are configured to have an oscillation width (SB2) of less than half of the period length (T2). - The distance (V3) between two receiving means (10.23, 10.24; 10.25, 10.26) within at least one electromagnetic field interaction pair (10.PX1, 10.PX2, 10.PY1, 10.PY2) is half the period length (T2). An induction-type position measuring device according to claim 3 or 6, characterized by the above.

8. The second electromagnetic field interaction means (20.1 to 20.n) is - Composed of quadrilaterals, especially squares, - Distributed on the second interaction surface (21) in a grid-like manner, with elements of the same size. An induction type position measuring device according to any one of claims 1 to 7, characterized in that

9. The induction type position measuring device according to any one of claims 1 to 8, characterized in that the quadrilateral is a rectangle, and more particularly a square.

10. The induction position measuring device according to any one of claims 1 to 9, characterized in that the second electromagnetic field interaction means (20.1 to 20.n) is manufactured by planar technology, in particular by thick film technology and / or thin film technology.

11. The induction-type position measuring device according to any one of claims 1 to 10, wherein the first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') can be operated alternately at a predetermined switching frequency by the evaluation electronic device (3).

12. The induction position measuring device according to claim 11, characterized in that the predetermined switching frequency depends on the current relative speed and / or hierarchical relative speed of the first and / or second assemblies (10, 20).

13. The inductive position measuring device according to any one of claims 1 to 12, wherein the evaluation electronic device (3) includes at least one signal generator module (3.1), at least one evaluation module (3.2), and at least one switching unit (3.3), and the first electromagnetic field interaction means (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1'', 10.X2', 10.X2'', 10.Y1', 10.Y1'', 10.Y2', 10.Y2'') are selectively connected individually or in pairs to either the evaluation module (3.2) or the signal generator module (3.1) via the at least one switching unit (3.3).

14. The inductive position measuring device according to claim 13, characterized in that the switching unit (3.3) includes at least one multiplexer (MUX1, MUX2, MUX3) and at least one control module (3.4), the control module (3.4) controls the at least one multiplexer (MUX1, MUX2, MUX3) depending on the switching frequency, and thus a pair of connections is made between the first electromagnetic field interaction means (10.X1, 10.X1', 10.X2, 10.X2', 10.Y1, 10.Y1', 10.Y2, 10.Y2') extending in the same direction (x, y) and the evaluation module (3.2) or the signal generation module (3.1).

15. The induction position measuring device according to any one of claims 1 to 14, characterized in that the second assembly (20) is not connected to active energy supply and data processing.

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