Susceptor

Abstract

Providing ceramic susceptors. [Solution] The present invention relates to a ceramic susceptor, the ceramic susceptor of the present invention includes an insulating plate on which a first heating element of a first layer and a second heating element of a second layer are arranged, the first heating element being connected between first terminal pairs, the second heating element being connected between second terminal pairs, the first heating element including a plurality of concentric arc-shaped first resistive parts and a first connecting part connecting the resistive parts at different diameter positions, at least one of the first connecting parts crossing a virtual line connecting the centers between the two side ends of each of the first resistive parts.

Description

Technical Field

[0001] The present invention relates to a susceptor, and more particularly to a susceptor to which a heater pattern for improving temperature uniformity is applied.

Background Art

[0002] Generally, a semiconductor device or a display device is manufactured by a method of sequentially laminating a plurality of thin film layers including a dielectric layer and a metal layer on a glass substrate, a flexible substrate, or a semiconductor wafer substrate and then patterning them. These thin film layers are sequentially deposited on the substrate by a chemical vapor deposition (CVD) process or a physical vapor deposition (PVD) process. The CVD process includes a low pressure chemical vapor deposition (LPCVD) process, a plasma enhanced chemical vapor deposition (PECVD) process, a metal organic CVD (MOCVD) process, and the like. In such CVD apparatuses and PVD apparatuses, a ceramic susceptor for supporting a glass substrate, a flexible substrate, a semiconductor wafer substrate, etc. and generating predetermined heat or generating plasma by a radio frequency (RF) electrode is disposed. The ceramic susceptor is widely used in a plasma deposition process or the like in accordance with accurate temperature control and heat treatment requirements for precise processes such as wiring miniaturization of semiconductor elements, and is also used for forming plasma or heating the substrate in an etching process of a thin film layer formed on a semiconductor wafer substrate or a baking process of a photoresist.

[0003] A general ceramic susceptor includes a heating element for heater function disposed between ceramic materials. In a ceramic susceptor structure, when the heating element receives power supply and generates heat to heat a semiconductor wafer substrate or the like, the temperature uniformity of the substrate is important for improving the yield by a stable semiconductor process.

[0004] Figures 1A and 1B are plan views showing examples of heating element patterns for conventional ceramic susceptors.

[0005] First, referring to Figure 1A, conventional ceramic susceptors generally include a heating element pattern 20 connected between terminal pairs 10a and 10b on the same plane. This is configured such that the heating element pattern 20 forms a single heating zone.

[0006] Referring to Figure 1B, a conventional ceramic susceptor includes a heating element pattern 21 connected between terminal pairs 11a and 11b on the same plane, and a heating element pattern 22 connected between terminal pairs 12a and 12b. This is configured such that each heating element pattern 21 and 22 forms two different heating zones.

[0007] However, conventional ceramic susceptors have a problem in that the symmetrical bends in the heating element pattern 20 in Figure 1A create a non-heating region 41 in the space between them, which induces a cool zone on the upper surface of the susceptor where the substrate is placed, resulting in an uneven temperature across the entire upper surface.

[0008] Furthermore, as shown in Figure 1B, in conventional ceramic susceptors, the symmetrical bends in the heating element patterns 21 and 22 in Figure 1B create a non-heating region 42 in the space between them. Even if there is a linear connecting line in this space that connects the terminal pairs 12a and 12b to the resistors of the heating element pattern 22, the linear connecting line generates little to no heat. Consequently, this similarly induces a cool zone on the upper surface of the susceptor on which the substrate is placed, resulting in a problem where the entire upper surface does not have a uniform temperature. [Overview of the project] [Problems that the invention aims to solve]

[0009] Therefore, the present invention was devised to solve the above-mentioned problems, and the object of the present invention is to provide a susceptor that can improve temperature uniformity over the entire surface of the susceptor by reducing temperature variations between positions of the same diameter from the center of the susceptor upper surface, by configuring the pattern of the resistance portion of the main heating element in concentric circles and applying a structure having connecting portions that cross the space between each resistance portion in order to eliminate non-heating regions in the space between them by the symmetrical bends of the heating element pattern, and further improving the temperature uniformity over the entire surface of the susceptor by configuring a compensating heating element that is additionally stacked on other planes to compensate for the temperature distribution. [Means for solving the problem]

[0010] First, to summarize the features of the present invention, a susceptor according to one aspect of the present invention for achieving the above objective includes an insulating plate on which a first heating element of a first layer and a second heating element of a second layer are arranged, the first heating element being connected between first terminal pairs, the second heating element being connected between second terminal pairs, the first heating element including a plurality of concentric arc-shaped first resistive parts and a first connecting part connecting the resistive parts at different diameter positions, at least one of the first connecting parts may cross a virtual line connecting the centers between the two side ends of each of the first resistive parts.

[0011] The second heating element may be positioned above or below the first heating element.

[0012] The second heating element may include a first compensating heating element that is extended in the diametrical direction so that at least a portion of it overlaps with the first connecting portion of the first heating element and is stacked on top of it.

[0013] The first compensating heating element may include a second resistive portion that overlaps with the first connecting portion, and a second connecting portion connected between the second terminal pair and both ends of the second resistive portion.

[0014] The second connecting portion connected between both ends of the second resistive portion may be a straight or curved shape without any bends.

[0015] The second heating element includes a second compensating heating element that is extended in the diametrical direction so that at least a portion of it overlaps with the first connecting portion of the first heating element and is stacked, the second compensating heating element includes a third resistive portion that overlaps with the first connecting portion, and a third connecting portion connected between the second terminal pair and both ends of the third resistive portion, the third connecting portion connected between both ends of the third resistive portion and each of the second terminal pair may include a pattern having one or more bends.

[0016] The second heating element may include a third compensating heating element which includes a plurality of concentric arc-shaped fourth resistive parts and a fourth connecting part that connects two concentric arc-shaped fourth resistive parts located at different diameter positions from the plurality of concentric arc-shaped fourth resistive parts.

[0017] In a band region of a predetermined diameter range of the susceptor, a concentric arc-shaped first resistive portion of the first heating element and a concentric arc-shaped fourth resistive portion of the third compensating heating element may overlap and be stacked.

[0018] The first imaginary line connecting the centers of both ends of the first resistive portion of the first heating element and the second imaginary line connecting the centers of both ends of the fourth resistive portion of the third compensating heating element may each have at least a portion extending in different diametrical directions.

[0019] The insulating plate further includes a third compensating heating element laminated on the third layer, the third compensating heating element may include a plurality of concentric arc-shaped fourth resistive parts, and a fourth connecting part that connects two concentric arc-shaped fourth resistive parts located at different diameter positions from the plurality of concentric arc-shaped fourth resistive parts.

[0020] In a band region of a predetermined diameter range of the susceptor, a concentric arc-shaped first resistive portion of the first heating element and a concentric arc-shaped fourth resistive portion of the third compensating heating element may overlap and be stacked.

[0021] The first imaginary line connecting the centers of both ends of the first resistive portion of the first heating element and the second imaginary line connecting the centers of both ends of the fourth resistive portion of the third compensating heating element may each have at least a portion extending in different diametrical directions.

[0022] The insulating plate further includes a third compensating heating element laminated on a third layer, the third compensating heating element may include a plurality of concentric arc-shaped fourth resistive parts, and a fourth connecting part that connects two concentric arc-shaped fourth resistive parts located at different diameter positions from the plurality of concentric arc-shaped fourth resistive parts. [Effects of the Invention]

[0023] The susceptor according to the present invention does not have the extremely long non-heating region (the non-heating region in the space between them due to the symmetrical folds of the heating element pattern) that is typically found in heating elements that form two heating zones (2 Zones). Therefore, it is possible to improve temperature uniformity across the entire upper surface of the susceptor and improve the reduction in durability of the susceptor due to long-term use.

[0024] Furthermore, according to the susceptor of the present invention, since the heating element is configured in an ideal concentric circle shape, the risk of temperature variations occurring between positions of the same diameter on the upper surface of the susceptor can be greatly reduced.

[0025] Furthermore, according to the susceptor of the present invention, a compensating heating element is configured to be additionally stacked on a plane different from the main heating element to compensate for the temperature distribution. In this case, an additional temperature compensating heating element is configured in areas where there are connecting parts that link heating elements at different diameter positions in the main heating element, or in areas of the main heating element where the amount of heat generated is relatively low (mainly the middle section that forms a band of a predetermined width in the diametrical direction), thereby further improving the temperature uniformity over the entire upper surface of the susceptor.

[0026] The accompanying drawings, which are included as a part of this detailed description to aid in understanding the present invention, provide examples of embodiments of the present invention and, together with the detailed description, explain the technical idea of the present invention.

Brief Description of the Drawings

[0027] [Figure 1A] FIG. 1A is a plan view showing an example of a heating element pattern of a conventional susceptor. [Figure 1B] FIG. 1B is a plan view showing an example of a heating element pattern of a conventional susceptor. [Figure 2] FIG. 2 is a schematic cross-sectional view showing a susceptor according to an embodiment of the present invention. [Figure 3A] FIG. 3A is a plan view of a laminated heating element of a first embodiment of the susceptor of the present invention. [Figure 3B] FIG. 3B is an enlarged view showing the heating elements for each layer in a region with a low heat generation amount. [Figure 3C] FIG. 3C is an enlarged view showing the heating elements for each layer in a region with a low heat generation amount. [Figure 4A] FIG. 4A is a plan view of a laminated heating element of a second embodiment of the susceptor of the present invention. [Figure 4B] FIG. 4B is an enlarged view showing the heating elements for each layer in a region with a low heat generation amount. [Figure 4C] FIG. 4C is an enlarged view showing the heating elements for each layer in a region with a low heat generation amount. [Figure 5A] FIG. 5A is a plan view of a laminated heating element of a third embodiment of the susceptor of the present invention. [Figure 5B] FIG. 5B is an enlarged view showing the heating elements for each layer in a region with a low heat generation amount. [Figure 5C] FIG. 5C is an enlarged view showing the heating elements for each layer in a region with a low heat generation amount. [Figure 6A] FIG. 6A is a plan view of a laminated heating element of a fourth embodiment of the susceptor of the present invention. [Figure 6B] FIG. 6B is an enlarged view showing the heating elements for each layer in a region with a low heat generation amount. [Figure 6C] Figure 6C is an enlarged view showing the heat-generating elements in each layer in the region with low heat generation. [Figure 6D] Figure 6D is an enlarged view showing the heat-generating elements in each layer in the region with low heat generation. [Figure 7A] Figure 7A is a plan view showing a laminated heating element of a fifth embodiment of the susceptor of the present invention. [Figure 7B] Figure 7B is an enlarged view showing the heat-generating elements in each layer in the region with low heat generation. [Figure 7C] Figure 7C is an enlarged view showing the heat-generating elements in each layer in the region with low heat generation. [Figure 7D] Figure 7D is an enlarged view showing the heat-generating elements in each layer in the region with low heat generation. [Modes for carrying out the invention]

[0028] The present invention will be described in detail below with reference to the attached drawings. In each drawing, identical components will be indicated by the same reference numerals whenever possible. Detailed descriptions of already known functions and / or configurations will be omitted. The following disclosure will focus on the parts necessary to understand the operation in various embodiments, and will omit descriptions of elements that may obscure the gist of the description. Some components in the drawings may be exaggerated, omitted, or shown schematically. The size of each component is not a perfect reflection of its actual size, and therefore the description herein is not limited by the relative size or spacing of components depicted in each drawing.

[0029] In describing embodiments of the present invention, if it is determined that a specific description of prior art related to the present invention may obscure the gist of the invention, such detailed description will be omitted. Furthermore, the terms described below are defined in consideration of the function in the present invention, and these may be changed according to the intent or convention of the user, operator, etc. Therefore, their definitions should be based on the content throughout this specification. The terms used in the detailed description are merely for the purpose of describing embodiments of the present invention and should not be limited in any way. Unless otherwise specified, singular expressions also include the meaning of plural. In this specification, expressions such as "includes" or "equip" refer to a certain characteristic, number, stage, operation, element, part thereof or combination thereof, and should not be construed to exclude the existence or possibility of one or more other characteristics, numbers, stages, operations, elements, part thereof or combination thereof other than those described.

[0030] Furthermore, terms such as "first," "second," etc., may be used to describe various components, but these components are not limited by these terms, and the terms are used solely for the purpose of distinguishing one component from another.

[0031] Figure 2 is a schematic cross-sectional view showing a susceptor 100 according to one embodiment of the present invention.

[0032] Referring to Figure 2, an embodiment of the present invention, a (ceramic) susceptor 100, includes an insulating plate 110 and a shaft 120.

[0033] A ceramic susceptor 100 according to one embodiment of the present invention is a semiconductor device that supports a substrate to be processed for various purposes, such as a semiconductor wafer, a glass substrate, or a flexible substrate, and heats the substrate to be processed to a predetermined temperature. The ceramic susceptor 100 may be used in semiconductor processes that use plasma, such as plasma-enhanced chemical vapor deposition or dry etching.

[0034] The insulating plate 110 may be configured such that a high-frequency electrode 112 for plasma generation and / or a heating element 114 for substrate heating are arranged (embedded) at a predetermined distance apart with a ceramic material in between. The insulating plate 110 is configured to stably support the substrate 50 to be processed, while enabling semiconductor processes using heating of the substrate with the heating element 114 and / or plasma using the high-frequency electrode 112.

[0035] In the ceramic susceptor 100 of the present invention, although not shown in the figures, it is also possible to further arrange chuck electrodes for electrostatic chuck function to support the substrate 50 placed on the insulating plate 110. For example, the chuck electrodes may be further configured to be placed (embedded) above or below the high-frequency electrode 112 or heating element 114, separated by a predetermined distance with a ceramic material in between.

[0036] The insulating plate 110 may be formed as a plate-like structure having a predetermined shape. For example, the insulating plate 110 may be formed as a circular plate-like structure, and is not necessarily limited to this. Here, the ceramic material may be at least one of the following substances: Al2O3, Y2O3, Al2O3 / Y2O3, ZrO2, AlC (Autoclaved lightweight concrete), TiN, AlN, TiC, MgO, CaO, CeO2, TiO2, BxCy, BN, SiO2, SiC, YAG, Mullite, and AlF3, and preferably aluminum nitride (AlN). Each ceramic powder may selectively contain about 0.1 to 10%, preferably about 1 to 5%, of yttrium oxide powder.

[0037] The shaft 120 is pipe-shaped with a through hole and is joined or bonded to the lower surface of the insulating plate 110. The shaft 120 may be formed from the same ceramic material as the insulating plate 110 and joined or bonded to it.

[0038] The high-frequency electrode 112 or chuck electrode may be composed of tungsten (W), molybdenum (Mo), silver (Ag), gold (Au), niobium (Nb), titanium (Ti), aluminum nitride (AlN), or alloys thereof, preferably molybdenum (Mo). The high-frequency electrode 112 may be connected to an RF (Radio Frequency) power supply or to ground via a connecting rod 121 housed within a hollow shaft 120, and the chuck electrode may be connected to a power supply (DC or AC power supply) for driving the chuck electrode via another connecting rod housed within the hollow shaft 120. The high-frequency electrode 112 has a wire-type or sheet-type mesh structure. Here, the mesh structure is a network-like structure formed by the intersection of multiple metals arranged in a first direction and multiple metals arranged in a second direction, offset from each other.

[0039] The heating element 114 is made of tungsten (W), molybdenum (Mo), or an alloy or carbide thereof, and has a high melting point and high resistance. The heating element 114 may be formed in the form of a coil, wire, or sheet using heating wires (or resistance wires or heating electrodes). The heating element 114 may also be formed in a multilayer structure for precise temperature control. Such a heating element 114 is connected to a power supply via a connecting rod 123 installed inside the shaft 120 in the semiconductor manufacturing process, and can perform the function of heating the substrate to be processed on the insulating plate 110 to a predetermined constant temperature in order to carry out smooth deposition and etching processes.

[0040] As shown in Figures 3A to 7D, the susceptor 100 according to one embodiment of the present invention does not have a linear connecting line portion (connecting portion connecting terminal and resistor portion) of the very long non-heating area (non-heating area in the space between the symmetrically folded portions of the heating element pattern) that is typical of heating elements that form two heating zones (2 Zones) in the heating element 114. Therefore, it is possible to improve temperature uniformity over the entire upper surface of the susceptor 100 and improve the reduction in durability of the susceptor 100 due to long-term use. Furthermore, in the susceptor 100 of the present invention, the main heating element (310 below) of the heating element 114 is configured in an ideal concentric circle shape, which greatly reduces the risk of temperature variations occurring between positions of the same diameter on the upper surface of the susceptor 100. Furthermore, the susceptor 100 of the present invention compensates for the temperature distribution by configuring compensating heating elements (320, 330, 340 below) that are additionally laminated on a different plane (layer) from the main heating element 310. At this time, additional temperature compensating heating elements are configured in the space (500 below) where there are linear connecting lines connecting heating elements at different diameter positions in the main heating element 310, or in the region of the main heating element 310 where the amount of heat generated is relatively low (mainly the middle section that forms a band of a predetermined width in the diametrical direction, the region from 610 to 620 below), thereby improving the temperature uniformity over the entire upper surface of the susceptor 100. The main heating element 310 corresponds to the first heating element in the claim, and the compensating heating elements 320, 330, 340 correspond to the second heating element in the claim. Furthermore, as described below, the compensating heating elements 320, 330, and 340 include the first compensating heating element 320, the second compensating heating element 330, and the third compensating heating element 340.

[0041] The configuration of the present invention will be described in detail below with reference to Figures 3A to 6D.

[0042] Figure 3A is a plan view showing the laminated heating elements 310 and 320 of a first embodiment of the susceptor 100 of the present invention, and Figures 3B and 3C are enlarged views showing the heating elements 310 and 320 in separate layers in a region 500 with low heat generation. In the drawings, it is preferable that the main heating element 310 is placed in an upper layer compared to the first compensating heating element 320, but in some cases, the main heating element 310 may be placed in a lower layer compared to the first compensating heating element 320.

[0043] Referring to Figures 3A to 3C, the heating element 114 of the susceptor 100 may include a main heating element 310 of the first layer and a first compensating heating element 320 of the second layer, which are arranged (embedded) in a laminated structure with a ceramic material sandwiched between them within the insulating plate 110.

[0044] The main heating element 310 is a heating element electrically connected between the first terminal pair 301a and 301b. The first compensating heating element 320 is a heating element electrically connected between the second terminal pair 302a and 302b.

[0045] The main heating element 310 includes a plurality of concentric arc-shaped first resistive parts 311 (a concentric arc-shaped resistive part is a resistive part in which the extensions of the arc portion form concentric circles, and a part of the circle is cut off; the same applies hereinafter), and may include a first connecting part 312 that connects two concentric arc-shaped first resistive parts 311 that are at positions with different diameters (positions with different diameters from the center of the susceptor 100 or insulating plate 110). For example, the two concentric arc-shaped first resistive parts may include the nth (n is a natural number) concentric arc-shaped first resistive part from the inside and the (n+2)th concentric arc-shaped first resistive part (n=1,2,3,...). The two concentric arc-shaped first resistive parts may include the nth and (n+1)th concentric arc-shaped first resistive parts in the outermost part. As a result, by connecting the outermost arc-shaped resistive section to the adjacent arc-shaped resistive section, each arc-shaped resistive section is electrically connected, and a single heating zone can be formed by the main heating element 310.

[0046] The first virtual line 90 that the first connecting portion 312 crosses is preferably extended diametrically from the center of the insulating plate 110. The first virtual line 90 may correspond to a virtual line connecting the centers between the two ends of concentric arc-shaped resistance portions 311 of the same diameter. The first virtual line 90 is not limited to a straight shape and may be a bent line or a curved shape depending on the circumstances (the same applies hereinafter). The first connecting portion 312 is formed as a diagonal line with respect to the diametrical direction and crosses the virtual line 90 that connects the centers between the two ends of concentric arc-shaped resistance portions 311 of the same diameter. As a result, the space including the space between the two ends of the concentric arc-shaped resistance portions 311 connected to the first connecting portion 312 and a part of its surroundings forms a region 500 with relatively low heat generation.

[0047] In this invention, a "connecting part" connects the "nth concentric arc-shaped resistance part" and the "n+2th concentric arc-shaped resistance part" of two concentric arc-shaped parts at different diameter positions, so that the connecting part crosses the imaginary line 90. This prevents a temperature drop in the space between the two ends of the arc-shaped resistance part 311, thereby reducing temperature variation. In other words, this structure eliminates the non-heating region in the space between the symmetrical bends of the conventional heating element pattern, thus improving temperature uniformity across the entire upper surface of the susceptor.

[0048] The first compensating heating element 320 may be arranged to be stacked on top of or below the main heating element 310 in a region 500 where the amount of heat generated by the main heating element 310 is relatively low. Such a first compensating heating element 320 has a portion that extends diametrically so that at least a part of it overlaps with the first connecting portion 312 of the main heating element 310 and is stacked on top of it.

[0049] The first compensating heating element 320 includes a second resistive element 321 stacked so as to overlap with the first connecting element 312 of the main heating element 310, and includes a second connecting element 322 electrically connected between the second terminal pair 302a, 302b and both ends of the second resistive element 321. Both ends of the second resistive element 321 are positioned as close as possible to the second terminal pair 302a, 302b, which are located within a predetermined distance such as 1 cm, 2 cm, etc., and each second connecting element 322 at both ends of the second resistive element 321 is connected in a straight or curved shape (for example, a curve without bending of 90° or more is possible) without bending.

[0050] In this specification, the resistive portion is a part of the heating element 114 whose resistance is increased by processing the material of the heating element 114 as described above into a coil shape (for example, a three-dimensional shape) to increase the distance electrons can travel. In this specification, the connecting portion is a connecting wire (for example, a two-dimensional shape such as a line or stripe) portion made of the material of the heating element 114 as described above, for electrically connecting. The resistive portion is preferably in the shape of a coil (for example, a three-dimensional shape) as described above, but it may also be in the shape of a wire, sheet, etc. (for example, a two-dimensional shape) depending on the circumstances. The connecting portion is preferably in the shape of a line or stripe (for example, a two-dimensional shape), but it may also be in the shape of a coil, wire, or sheet, etc.

[0051] In the following, unless otherwise specified, the same concepts as above apply to the resistive portion and the connecting portion.

[0052] Figure 4A is a plan view showing the laminated heating elements 310 and 330 of a second embodiment of the susceptor of the present invention, and Figures 4B and 4C are enlarged views showing the heating elements 310 and 330 in layers in the low heat generation regions 500 and 510. In the drawings, it is preferable that the main heating element 310 is placed in an upper layer compared to the second compensating heating element 330, but in some cases, the main heating element 310 may be placed in a lower layer compared to the second compensating heating element 330. The third resistive portion 331 of the second compensating heating element 330 is similar to the second resistive portion 321 of the first compensating heating element 320 in Figure 3A, but the third connecting portion 332 connected between both ends of the third resistive portion 331 and the second terminal pairs 302a and 302b in the low heat generation region 510 in the center may have a symmetrical pattern as shown, but in some cases it may be formed with an asymmetrical pattern. The third connecting portion 332 may be configured to compensate for heat generation by increasing the connecting length by including various shapes such as straight / curved shapes with one or more bends, arc shapes, sine wave shapes, triangular wave shapes, and rectangular wave shapes.

[0053] Referring to Figures 4A to 4C, the heating element 114 of the susceptor 100 may include a main heating element 310 of the first layer and a second compensating heating element 330 of the second layer, which are arranged (embedded) in a laminated structure with a ceramic material sandwiched between them within the insulating plate 110.

[0054] The main heating element 310 is a heating element electrically connected between the first terminal pair 301a and 301b. The second compensating heating element 330 is a heating element electrically connected between the second terminal pair 302a and 302b.

[0055] The main heating element 310 includes a plurality of concentric arc-shaped first resistive sections 311, and may include a first connecting section 312 that connects two concentric arc-shaped first resistive sections 311 located at different diameter positions. For example, the two concentric arc-shaped first resistive sections may include the nth (where n is a natural number) concentric arc-shaped resistive section and the (n+2)th concentric arc-shaped resistive section from the inside (n=1,2,3,...). Also, the two concentric arc-shaped resistive sections may include the nth and (n+1)th concentric arc-shaped resistive sections in a part of the outermost section. As a result, by connecting the outermost arc-shaped resistive section to an adjacent arc-shaped resistive section, each arc-shaped resistive section is electrically connected, and a single heating zone can be formed by the main heating element 310.

[0056] The first imaginary line 90 that the first connecting portion 312 crosses is preferably extended diametrically from the center of the insulating plate 110. The first imaginary line 90 may correspond to an imaginary line connecting the centers between the two ends of concentric arc-shaped resistance portions 311 of the same diameter. The first connecting portion 312 is formed as a diagonal line with respect to the diametrical direction and crosses the imaginary line 90 that connects the centers between the two ends of concentric arc-shaped first resistance portions 311 of the same diameter. As a result, the space including the space between the two ends of the concentric arc-shaped first resistance portion 311 connected to the first connecting portion 312 and a part of its surroundings forms a region 500 with relatively low heat generation. Furthermore, the region 500 with low heat generation may include a region 510 with low heat generation in the center. The central region 510, which has a low heat output, may be a region that includes one or more of the innermost resistive parts at the center of the first resistive part 311 of the main heating element 310 (for example, in the drawing, a region that includes two of the innermost resistive parts at the center).

[0057] In this invention, a "connecting part" connects the "nth concentric arc-shaped resistance part" and the "n+2th concentric arc-shaped resistance part" of two concentric arc-shaped parts at different diameter positions, so that the connecting part crosses the imaginary line 90. This prevents a temperature drop in the space between the two ends of the arc-shaped resistance part 311, thereby reducing temperature variations. In other words, this structure does not have a non-heating region in the space between the symmetrical bends of the conventional heating element pattern, thus improving temperature uniformity across the entire upper surface of the susceptor.

[0058] The second compensating heating element 330 may be arranged to be stacked on top of or below the main heating element 310 in a region 500 where the amount of heat generated by the main heating element 310 is relatively low. The second compensating heating element 330 includes a third resistive portion 331 stacked so as to overlap with the first connecting portion 312 of the main heating element 310, and includes a connecting portion 332 electrically connected between the second terminal pair 302a, 302b and both ends of the third resistive portion 331. Such a second compensating heating element 330 has a portion that extends diametrically so that at least a part of it overlaps with the first connecting portion 312 of the main heating element 310 and is stacked thereon.

[0059] The ends of the third resistor 331 may be positioned as close as possible to the second terminal pairs 302a and 302b, which are located within a predetermined distance such as 1 cm, 2 cm, etc. The third connecting parts 332 (two connecting parts) connected between the ends of the third resistor 331, which is located in the central low-heat region 510, and each of the second terminal pairs 302a and 302b may have a symmetrical pattern as shown in the figure, but may also be formed with an asymmetrical pattern in some cases. The third connecting parts 332 may be configured to compensate for heat generation by increasing the connecting length by including various shapes such as straight / curved shapes with one or more bends, arc shapes, sine wave shapes, triangular wave shapes, and rectangular wave shapes.

[0060] Figure 5A is a plan view showing the laminated heating elements 310 and 340 of a third embodiment of the susceptor of the present invention, and Figures 5B and 5C are enlarged views showing the heating elements 310 and 340 in layers in a region with low heat generation (610-620). In the drawings, it is preferable that the main heating element 310 is placed in an upper layer compared to the third compensating heating element 340, but in some cases, the main heating element 310 may be placed in a lower layer compared to the third compensating heating element 340. The third compensating heating element 340 may be applied in place of the first compensating heating element 320 in Figure 3A or the second compensating heating element 330 in Figure 4A to compensate for heat generation in the main heating element 310 in a region with relatively low heat generation (610-620) (mainly the middle section that forms a band of a predetermined width in the diametrical direction).

[0061] Referring to Figures 5A to 5C, the heating element 114 of the susceptor 100 may include a main heating element 310 of the first layer and a third compensating heating element 340 of the second layer, which are arranged (embedded) in a laminated structure with a ceramic material sandwiched between them within the insulating plate 110.

[0062] The main heating element 310 is a heating element electrically connected between the first terminal pair 301a and 301b. The third compensating heating element 340 is a heating element electrically connected between the second terminal pair 302a and 302b.

[0063] The main heating element 310 includes a plurality of concentric arc-shaped first resistive sections 311, and may include a first connecting section 312 that connects two concentric arc-shaped resistive sections located at different diameter positions from the plurality of concentric arc-shaped first resistive sections 311. For example, the two concentric arc-shaped resistive sections located at different diameter positions may include the nth (where n is a natural number) concentric arc-shaped resistive section and the (n+2)th concentric arc-shaped resistive section from the inside (n=1,2,3,...). The two concentric arc-shaped resistive sections located at different diameter positions may include the nth and (n+1)th concentric arc-shaped resistive sections in a part of the outermost region. This allows each arc-shaped resistive section to be electrically connected by connecting the outermost arc-shaped resistive section to an adjacent arc-shaped resistive section, thereby forming a single heating zone by the main heating element 310. Preferably, the first imaginary line 90 that the first connecting portion 312 crosses extends diametrically from the center of the insulating plate 110. In this invention, the connecting portion crosses the imaginary line 90 by connecting the "nth concentric arc-shaped resistance portion" and the "n+2th concentric arc-shaped resistance portion" of two concentric arc shapes at different diametrical positions. This prevents a temperature drop in the space between the two ends of the arc-shaped resistance portion 311, thereby reducing temperature variations. In other words, this structure does not have a non-heating region in the space between the symmetrical bends of the conventional heating element pattern, thus improving temperature uniformity across the entire upper surface of the susceptor.

[0064] In Figures 3A and 4A, the space between the two ends of the concentric arc-shaped first resistance portion 311 connected to the first connecting portion 312, and a portion of its surrounding area, forms a region 500 with relatively low heat generation. In the structures of Figures 5A to 5C, a third compensating heating element 340 is applied to compensate for the heat generation in the cool zone region (610 to 620). That is, the third compensating heating element 340 may be applied to compensate for the heat generation in the region (610 to 620) of the main heating element 310 (mainly the middle portion which forms a band of a predetermined width in the diametrical direction). However, the region (610 to 620) whose heat generation is compensated by the third compensating heating element 340 overlaps with at least a portion of the low heat generation region 500, making it possible to compensate for the heat generation in the overlapping portion as well.

[0065] The third compensating heating element 340 may be arranged to be stacked on top of or below the main heating element 310 in a region (610-620) where the amount of heat generated by the main heating element 310 is relatively low. The third compensating heating element 340 includes a plurality of concentric arc-shaped fourth resistive parts 341, and includes a fourth connecting part 342 that connects two concentric arc-shaped resistive parts 341 that are at different diameter positions from each other. Here, for example, the two concentric arc-shaped resistive parts may include the nth (n is a natural number) concentric arc-shaped resistive part from the inside and the (n+2)th concentric arc-shaped resistive part (n=1,2,3,...). The two concentric arc-shaped resistive parts may include the nth and (n+1)th concentric arc-shaped resistive parts in a part of the outermost region. This allows the outermost arc-shaped resistive section to be connected to an adjacent arc-shaped resistive section, thereby electrically connecting each arc-shaped resistive section and forming a single heat-generating zone. Preferably, the second imaginary line 91 that such a fourth connecting section 342 crosses extends diametrically from the center of the insulating plate 110. The second imaginary line 91 may correspond to an imaginary line connecting the centers between the two ends of concentric arc-shaped fourth resistive sections 341 of the same diameter. Such a second imaginary line 91 is not limited to a straight shape, and may take the form of a bent line or a curved shape depending on the circumstances (the same applies hereinafter). The fourth connecting section 342 is formed as a diagonal line with respect to the diametrical direction and crosses the imaginary line 91 that connects the centers between the two ends of concentric arc-shaped fourth resistive sections 341 of the same diameter. In this invention, a "connecting part" connects the "nth concentric arc-shaped resistance part" and the "n+2th concentric arc-shaped resistance part" of two concentric arc-shaped parts at different diameter positions, so that the connecting part crosses the imaginary line 91. This prevents a temperature drop in the space between the two ends of the arc-shaped resistance part 341, thereby reducing temperature variation. In other words, this structure does not have a non-heating region in the space between the symmetrical bends of the conventional heating element pattern, so the temperature uniformity can be improved over the entire upper surface of the susceptor.

[0066] Furthermore, a third compensating heating element 340 may be applied to compensate for the heat generation in the main heating element 310 in a region with relatively low heat generation (610-620) (mainly the middle section which forms a band of a predetermined width in the diametrical direction).

[0067] Preferably, the third compensating heating element 340 is stacked such that a concentric arc-shaped first resistive portion 311 (the 4th to 7th from the center in the example of Figure 5A) of the main heating element 310 and the concentric arc-shaped fourth resistive portion 341 of the third compensating heating element 340 overlap in a band region (610 to 620) of a predetermined diameter range (a middle section forming a band of a predetermined width in the diametrical direction). However, it is not limited to this, and in some cases, the concentric arc-shaped first resistive portion 311 (the 4th to 7th from the center in the example of Figure 5A) of the main heating element 310 and the concentric arc-shaped fourth resistive portion of the third compensating heating element 340 do not overlap each other.

[0068] As shown in Figures 5B and 5C, it is preferable that at least a portion of the first imaginary line 90, which is crossed by the first connecting portion 312 of the main heating element 310, and the second imaginary line 91, which is crossed by the fourth connecting portion 342 of the third compensating heating element 340, are extended in different diametrical directions. In the drawings, the different diametrical directions are exemplified as being positioned at a rotational angle of 180° relative to the center, but depending on the case, the imaginary lines 90 and 91 may be positioned at the required angles, such as 90° and 270°.

[0069] Figure 6A is a plan view showing the laminated heating elements 310, 330, and 340 of the fourth embodiment of the susceptor of the present invention, and Figures 6B to 6D are enlarged views showing the heating elements in each layer in the low heat generation region (500, 610 to 620). Here, in addition to the main heating element 310, a structure is described in which the second compensating heating element 330 of Figure 4C and the third compensating heating element 340 of Figure 5C are laminated on different layers. Furthermore, a structure is possible in which the first compensating heating element 320 of Figure 3C and the third compensating heating element 340 of Figure 5C are laminated on different layers in addition to the main heating element 310, which can be understood from the explanation in Figures 7A to 7D.

[0070] The drawing illustrates an example in which the third compensating heating element 340, the second compensating heating element 330, and the main heating element 310 are sequentially stacked from the lower layer on the shaft 120 side upwards. However, any combination of stacking order is possible for the third compensating heating element 340, the second compensating heating element 330, and the main heating element 310. The second compensating heating element 330 may be used to compensate for the heating in the main heating element 310 in the region 500 where the amount of heating is relatively low due to the first connecting portion 312, and the third compensating heating element 340 may be used to compensate for the heating in the main heating element 310 in other regions (610-620) (mainly the middle section which forms a band of a predetermined width in the diametrical direction).

[0071] Referring to Figures 6A to 6D, the heating element 114 of the susceptor 100 may include a main heating element 310 of the first layer, a second compensating heating element 330 of the second layer, and a third compensating heating element 340 of the third layer, which are arranged (embedded) in a laminated structure with a ceramic material sandwiched between them within the insulating plate 110.

[0072] The main heating element 310 is a heating element electrically connected between the first terminal pair 301a and 301b. The second compensating heating element 330 is a heating element electrically connected between the second terminal pair 302a and 302b. The third compensating heating element 340 is a heating element electrically connected between the third terminal pair 303a and 303b.

[0073] The main heating element 310 includes a plurality of concentric arc-shaped first resistive sections 311, and may include a first connecting section 312 that connects two concentric arc-shaped first resistive sections 311 located at different diametrical positions. For example, the two concentric arc-shaped resistive sections may include the nth (where n is a natural number) concentric arc-shaped resistive section and the (n+2)th concentric arc-shaped resistive section from the inside (n=1,2,3,...). The two concentric arc-shaped resistive sections may include the nth and (n+1)th concentric arc-shaped resistive sections in a part of the outermost edge. This allows each arc-shaped resistive section to be electrically connected by connecting the outermost arc-shaped resistive section to an adjacent arc-shaped resistive section, thereby forming a single heating zone by the main heating element 310. Preferably, the first imaginary line 90 that the first connecting section 312 crosses extends diametrically from the center of the insulating plate 110. The first imaginary line 90 may correspond to an imaginary line connecting the centers of the two ends of the concentric arc-shaped first resistance section 311 of the same diameter. The first connecting section 312 is formed as a diagonal line with respect to the diameter and crosses the imaginary line 90 connecting the centers of the two ends of the concentric arc-shaped resistance section 311 of the same diameter.

[0074] Furthermore, the space between the two ends of the concentric arc-shaped resistive portion 311 connected to the first connecting portion 312, and a portion of its surrounding area, forms a region 500 with relatively low heat generation. Moreover, the region 500 with low heat generation may include a region 510 with low heat generation in the center. The region 510 with low heat generation in the center may be a region that includes one or more of the innermost resistive portions in the center of the first resistive portion 311 of the main heating element 310 (for example, a region that includes two of the innermost resistive portions in the center in the drawing).

[0075] In this invention, a "connecting part" connects the "nth concentric arc-shaped resistance part" and the "n+2th concentric arc-shaped resistance part" of two concentric arc-shaped parts at different diameter positions, so that the connecting part crosses the imaginary line 90. This prevents a temperature drop in the space between the two ends of the arc-shaped resistance part 311, thereby reducing temperature variations. In other words, this structure does not have a non-heating region in the space between the symmetrical bends of the conventional heating element pattern, thus improving temperature uniformity across the entire upper surface of the susceptor.

[0076] The second compensating heating element 330 may be arranged to be stacked on top of or below the main heating element 310 in a region 500 where the amount of heat generated by the main heating element 310 is relatively low. The second compensating heating element 330 includes a third resistive portion 331 stacked so as to overlap with the first connecting portion 312 of the main heating element 310, and includes a connecting portion 332 electrically connected between the second terminal pair 302a, 302b and both ends of the third resistive portion 331. Such a second compensating heating element 330 has a portion that extends diametrically so that at least a part of it overlaps with the first connecting portion 312 of the main heating element 310 and is stacked thereon.

[0077] The ends of the third resistor 331 may be positioned as close as possible to the second terminal pairs 302a and 302b, which are located within a predetermined distance such as 1 cm, 2 cm, etc. The third connecting parts 332 (two connecting parts) connected between the ends of the third resistor 331, which is located in the central low-heat region 510, and each of the second terminal pairs 302a and 302b may have a symmetrical pattern as shown in the figure, but may also be formed with an asymmetrical pattern in some cases. The third connecting parts 332 may be configured to compensate for heat generation by increasing the connecting length by including various shapes such as straight / curved shapes with one or more bends, arc shapes, sine wave shapes, triangular wave shapes, and rectangular wave shapes.

[0078] The third compensating heating element 340 may be arranged to be stacked on top of or below the main heating element 310 in a region (610-620) where the amount of heat generated by the main heating element 310 is relatively low, and the third compensating heating element 340 may be arranged to be stacked on top of or below the first and second compensating heating elements 320, 330. The third compensating heating element 340 includes a plurality of concentric arc-shaped fourth resistive parts 341, and includes a fourth connecting part 342 that connects two concentric arc-shaped fourth resistive parts 341 that are at different diameter positions from each other. Here, for example, the two concentric arc-shaped fourth resistive parts may include the nth (n is a natural number) concentric arc-shaped fourth resistive part from the inside and the (n+2)th concentric arc-shaped fourth resistive part (n=1,2,3,…). The two concentric arc-shaped resistive sections may include the nth and (n+1)th concentric arc-shaped resistive sections in their outermost portion. This allows the outermost arc-shaped resistive section to be connected to an adjacent arc-shaped resistive section, thereby electrically connecting each arc-shaped resistive section and forming a single heat-generating zone. The second virtual line 91 that such a fourth connecting section 342 crosses is preferably extended diametrically from the center of the insulating plate 110.

[0079] A third compensating heating element 340 may be applied to compensate for the heat generation in the main heating element 310 in a region with relatively low heat generation (610-620) (mainly the middle section which forms a band of a predetermined width in the diametrical direction).

[0080] Preferably, the third compensating heating element 340 is stacked such that a concentric arc-shaped first resistive portion 311 (the 4th to 7th from the center in the example of Figure 6A) of a part of the main heating element 310 and the concentric arc-shaped fourth resistive portion 341 of the third compensating heating element 340 overlap in a band region (610 to 620) of a predetermined diameter range (a middle section forming a band of a predetermined width in the diametrical direction). However, it is not limited to this, and in some cases, the concentric arc-shaped first resistive portion 311 (the 4th to 7th from the center in the example of Figure 6A) of a part of the main heating element 310 and the concentric arc-shaped fourth resistive portion of the third compensating heating element 340 do not overlap each other. Preferably, the connecting portion 332 of the second compensating heating element 330 is positioned in a region inward from the band region (610 to 620) in the diametrical direction.

[0081] As shown in Figures 6A and 6D, it is preferable that at least a portion of the first imaginary line 90, which is crossed by the first connecting portion 312 of the main heating element 310, and the second imaginary line 91, which is crossed by the fourth connecting portion 342 of the third compensating heating element 340, are extended in different diametrical directions. In the drawings, it is illustrated that these different diametrical directions are positioned at a rotational angle of 180° relative to the center, but depending on the case, the imaginary lines 90 and 91 may be positioned at any necessary angle, such as 90° or 270°.

[0082] Figure 7A is a plan view showing the laminated heating elements 310, 320, and 340 of the fifth embodiment of the susceptor of the present invention, and Figures 7B to 7D are enlarged views showing the heating elements in each layer in the low heat generation region (500, 610 to 620). Here, in addition to the main heating element 310, a structure is described in which the first compensating heating element 320 of Figure 3C and the third compensating heating element 340 of Figure 5C are laminated on different layers.

[0083] The drawing illustrates an example in which the third compensating heating element 340, the first compensating heating element 320, and the main heating element 310 are sequentially stacked from the lower layer on the shaft 120 side upwards. However, any combination of stacking order is possible for the third compensating heating element 340, the first compensating heating element 320, and the main heating element 310. The first compensating heating element 320 may be used to compensate for the heating of the region 500 in the main heating element 310, which has a relatively low heat output due to the first connecting portion 312, and the third compensating heating element 340 may be used to compensate for the heating of other regions (610-620) in the main heating element 310 that have a relatively low heat output (mainly the middle section which forms a band of a predetermined width in the diametrical direction).

[0084] Referring to Figures 7A to 7D, the heating element 114 of the susceptor 100 may include a main heating element 310 of the first layer, a first compensating heating element 320 of the second layer, and a third compensating heating element 340 of the third layer, which are arranged (embedded) in a laminated structure with a ceramic material sandwiched within the insulating plate 110.

[0085] The main heating element 310 is a heating element electrically connected between the first terminal pair 301a and 301b. The first compensating heating element 320 is a heating element electrically connected between the second terminal pair 302a and 302b. The third compensating heating element 340 is a heating element electrically connected between the third terminal pair 303a and 303b.

[0086] The main heating element 310 includes a plurality of concentric arc-shaped first resistive sections 311, and may include a first connecting section 312 that connects two concentric arc-shaped resistive sections 311 located at different diametrical positions. For example, the two concentric arc-shaped resistive sections may include the nth (where n is a natural number) concentric arc-shaped resistive section and the (n+2)th concentric arc-shaped resistive section from the inside (n=1,2,3,…). The two concentric arc-shaped resistive sections may include the nth and (n+1)th concentric arc-shaped resistive sections in a part of the outermost edge. This allows each arc-shaped resistive section to be electrically connected by connecting the outermost arc-shaped resistive section to an adjacent arc-shaped resistive section, thereby forming a single heating zone by the main heating element 310. Preferably, the first imaginary line 90 that the first connecting section 312 crosses extends diametrically from the center of the insulating plate 110. The first imaginary line 90 may correspond to an imaginary line connecting the centers of the two ends of the concentric arc-shaped first resistance section 311 of the same diameter. The first connecting section 312 is formed as a diagonal line with respect to the diameter and crosses the imaginary line 90 connecting the centers of the two ends of the concentric arc-shaped first resistance section 311 of the same diameter. As a result, the space including the space between the two ends of the concentric arc-shaped first resistance section 311 connected to the first connecting section 312 and a part of its surroundings forms a region 500 with relatively low heat generation.

[0087] In this invention, a "connecting part" connects the "nth concentric arc-shaped resistance part" and the "n+2th concentric arc-shaped resistance part" of two concentric arc-shaped parts at different diameter positions, so that the connecting part crosses the imaginary line 90. This prevents a temperature drop in the space between the two ends of the arc-shaped resistance part 311, thereby reducing temperature variations. In other words, this structure does not have a non-heating region in the space between the symmetrical bends of the conventional heating element pattern, thus improving temperature uniformity across the entire upper surface of the susceptor.

[0088] The first compensating heating element 320 may be arranged to be stacked on top of or below the main heating element 310 in a region 500 where the amount of heat generated by the main heating element 310 is relatively low. The first compensating heating element 320 includes a second resistive portion 321 stacked so as to overlap with the first connecting portion 312 of the main heating element 310, and includes a second connecting portion 322 electrically connected between the second terminal pair 302a, 302b and both ends of the second resistive portion 321. Such a first compensating heating element 320 has a portion that extends diametrically so that at least a part of it overlaps with the first connecting portion 312 of the main heating element 310 and is stacked thereon.

[0089] Both ends of the second resistor 321 are positioned as close as possible to the second terminal pairs 302a and 302b, which are located within a predetermined distance of 1 cm, 2 cm, etc., and each second connecting portion 322 at both ends of the second resistor 321 is connected in a straight or curved shape (for example, a curve without bending of 90° or more is possible) without bending.

[0090] The third compensating heating element 340 may be arranged to be stacked on top of or below the main heating element 310 in a region (610-620) where the amount of heat generated by the main heating element 310 is relatively low, and the third compensating heating element 340 may be arranged to be stacked on top of or below the first compensating heating element 320. The third compensating heating element 340 includes a plurality of concentric arc-shaped fourth resistive parts 341, and includes a fourth connecting part 342 that connects two concentric arc-shaped resistive parts 341 that are at different diameter positions from each other. Here, for example, the two concentric arc-shaped resistive parts may include the nth (n is a natural number) concentric arc-shaped resistive part from the inside and the (n+2)th concentric arc-shaped resistive part (n=1,2,3,...). The two concentric arc-shaped resistive parts may include the nth and (n+1)th concentric arc-shaped resistive parts in the outermost part. This allows the outermost arc-shaped resistive section to be connected to an adjacent arc-shaped resistive section, thereby electrically connecting each arc-shaped resistive section and forming a single heating zone. Preferably, the second virtual line 91 that such a fourth connecting section 342 crosses extends diametrically from the center of the insulating plate 110. In this invention, the connecting section crosses the virtual line 91 by connecting the "nth concentric arc-shaped resistive section" and the "n+2th concentric arc-shaped resistive section" of two concentric arcs at different diametrical positions. This prevents a temperature drop in the space between the ends of the arc-shaped resistive section 341 and reduces temperature variation. In other words, this structure does not have a non-heating region in the space between the symmetrical bends of the conventional heating element pattern, thus improving temperature uniformity across the entire upper surface of the susceptor.

[0091] A third compensating heating element 340 may be applied to compensate for the heat generation in the main heating element 310 in a region with relatively low heat generation (610-620) (mainly the middle section which forms a band of a predetermined width in the diametrical direction).

[0092] Preferably, the third compensating heating element 340 is stacked such that a concentric arc-shaped first resistive portion 311 (the 4th to 7th from the center in the example of Figure 7A) of a part of the main heating element 310 and the concentric arc-shaped fourth resistive portion 341 of the third compensating heating element 340 overlap in a band region (610 to 620) of a predetermined diameter range (a middle section forming a band of a predetermined width in the diametrical direction). However, it is not limited to this, and in some cases, the concentric arc-shaped first resistive portion 311 (the 4th to 7th from the center in the example of Figure 7A) of a part of the main heating element 310 and the concentric arc-shaped fourth resistive portion of the third compensating heating element 340 do not overlap each other. Preferably, the second connecting portion 322 of the first compensating heating element 320 is positioned in a region inward from the band region (610 to 620) in the diametrical direction.

[0093] As shown in Figures 7A and 7D, it is preferable that at least a portion of the first imaginary line 90, which is crossed by the first connecting portion 312 of the main heating element 310, and the second imaginary line 91, which is crossed by the fourth connecting portion 342 of the third compensating heating element 340, are extended in different diametrical directions. In the drawings, it is illustrated that these different diametrical directions are positioned at a rotational angle of 180° relative to the center, but depending on the case, the imaginary lines 90 and 91 may be positioned at any necessary angle, such as 90° or 270°.

[0094] As described above, the susceptor 100 according to one embodiment of the present invention does not have a linear connecting line portion (connecting portion connecting terminal and resistor portion) of the very long non-heating area (non-heating area in the space between the symmetrically folded portions of the heating element pattern) that is typical of heating elements that form two heating zones (2 Zones) in the heating element 114. Therefore, it is possible to improve temperature uniformity over the entire upper surface of the susceptor and improve the reduction in durability of the susceptor due to long-term use. Furthermore, in the susceptor 100 of the present invention, the main heating element 310 of the heating element 114 is configured in an ideal concentric circle shape, which greatly reduces the risk of temperature variations occurring between positions of the same diameter on the upper surface of the susceptor 100.

[0095] Furthermore, the susceptor 100 of the present invention compensates for the temperature distribution by configuring compensating heating elements 320, 330, and 340 that are additionally laminated on a different plane (layer) from the main heating element 310. In this case, by configuring additional temperature compensating heating elements in the spaces where there are linear connecting lines connecting heating elements at different diameter positions in the main heating element 310, and in regions of the main heating element 310 with relatively low heat generation (500, 610~620), the temperature uniformity can be further improved across the entire upper surface of the susceptor 100.

[0096] Although the present invention has been described above using specific details such as concrete components, and limited embodiments and drawings, these are provided only to aid in a more general understanding of the invention. The present invention is not limited to the embodiments described above, and various modifications and variations are possible for those with ordinary skill in the art to which the invention pertains, as long as they do not deviate from the essential characteristics of the invention. Therefore, the idea of ​​the present invention should not be limited to the embodiments described above, and any technical idea that is equivalent to or comparable to the claims described below should be interpreted as being included within the scope of the rights of the present invention. [Explanation of Symbols]

[0097] 110 Insulating Plate 114 Heating element 310 Main heating element 320 First Compensating Heating Element 330 Second Compensating Heating Element 340 Third Compensating Heating Element 311,321,331,341 Resistance section 312,322,332,342 Connection part

Claims

1. It includes an insulating plate on which a first heating element of the first layer and a second heating element of the second layer are arranged, The first heating element is connected between the first terminal pair, and the second heating element is connected between the second terminal pair. The first heating element includes a plurality of concentric arc-shaped first resistive parts, and a first connecting part that connects the resistive parts at different diameter positions. At least one of the first connecting portions is a susceptor that crosses a virtual line connecting the centers between the two side ends of each of the first resistive portions.

2. The susceptor according to claim 1, wherein the second heating element is located above or below the first heating element.

3. The susceptor according to claim 1, wherein the second heating element includes a first compensating heating element that is extended in the diametrical direction so as to overlap and stack with at least a portion of the first connecting portion of the first heating element.

4. The susceptor according to claim 3, wherein the first compensating heating element includes a second resistive portion overlapping the first connecting portion, and a second connecting portion connected between the second terminal pair and both ends of the second resistive portion.

5. The susceptor according to claim 4, wherein the second connecting portion connected between both ends of the second resistive portion is a straight or curved shape without bending.

6. The second heating element includes a second compensating heating element that is extended in the diametrical direction so that at least a portion of it overlaps with the first connecting portion of the first heating element and is stacked with it. The susceptor according to claim 1, wherein the second compensating heating element includes a third resistive portion overlapping the first connecting portion, and a third connecting portion connected between the second terminal pair and both ends of the third resistive portion, and the third connecting portion connected between each end of the third resistive portion and the second terminal pair includes a pattern having one or more bends.

7. The susceptor according to claim 1, wherein the second heating element includes a third compensating heating element which includes a plurality of concentric arc-shaped fourth resistive parts and a fourth connecting part which connects two concentric arc-shaped fourth resistive parts located at different diameter positions from the plurality of concentric arc-shaped fourth resistive parts.

8. The susceptor according to claim 7, wherein a concentric arc-shaped first resistive portion of the first heating element and a concentric arc-shaped fourth resistive portion of the third compensating heating element overlap and are stacked in a band region of a predetermined diameter range.

9. The susceptor according to claim 7, wherein at least a portion of the first imaginary line connecting the centers of both ends of the first resistive portion of the first heating element and the second imaginary line connecting the centers of both ends of the fourth resistive portion of the third compensating heating element are extended in different diametrical directions.

10. The insulating plate further includes a third compensating heating element laminated on the third layer, The susceptor according to claim 3, wherein the third compensating heating element includes a plurality of concentric arc-shaped fourth resistive parts, and a fourth connecting part that connects two concentric arc-shaped fourth resistive parts located at different diameter positions from the plurality of concentric arc-shaped fourth resistive parts.

11. The susceptor according to claim 10, wherein a concentric arc-shaped first resistive portion of the first heating element and a concentric arc-shaped fourth resistive portion of the third compensating heating element overlap and are stacked in a band region of a predetermined diameter range.

12. The susceptor according to claim 10, wherein at least a portion of the first imaginary line connecting the centers of both ends of the first resistive portion of the first heating element and the second imaginary line connecting the centers of both ends of the fourth resistive portion of the third compensating heating element are extended in different diametrical directions.

13. The insulating plate further includes a third compensating heating element laminated on the third layer, The susceptor according to claim 6, wherein the third compensating heating element includes a plurality of concentric arc-shaped fourth resistive parts, and a fourth connecting part that connects two concentric arc-shaped fourth resistive parts located at different diameter positions from the plurality of concentric arc-shaped fourth resistive parts.

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