Anode assembly, anode, and method for cooling the anode

Abstract

Providing an anode cooling mechanism for an X-ray system that includes an emitter array emitting multiple electron beams and an anode containing a target whose length is considerably longer than its width. [Solution] A system comprising a vacuum enclosure, an anode support structure penetrating the vacuum enclosure and including a plurality of first cooling passages, and an anode located within the vacuum enclosure, coupled to and supported by the anode support structure, and including a target and a plurality of second cooling passages, each of which is coupled to a corresponding first cooling passage, and the anode is coupled to the anode support structure on a side of the anode that is different from the side of the anode including the target and different from the axial end of the anode on the long axis of the anode.

Description

Technical Field

[0001] An X-ray source may be configured to generate multiple X-ray beams. An array of emitters may emit multiple electron beams towards a target (s) on an anode. Some linear anodes include a target that is considerably longer in length than in width. The electron beams may be sent towards the target so as to strike the target in a row along the length. The incident electron beams generate heat in the anode. The anode may be cooled by a coolant such as water or insulating oil supplied to one of the ends of the anode. A support for the anode may be disposed on the end of the anode.

Brief Description of the Drawings

[0002] [Figure 1A] A top view of an anode of an X-ray system according to some embodiments. [Figure 1B] A side view of the anode and anode support structure of FIG. 1A according to some embodiments. [Figure 1C] A cross-sectional view of the anode and anode support structure of FIG. 1B according to some embodiments. [Figure 1D] A cutaway view of the anode of FIG. 1A according to some embodiments. [Figure 2] A block diagram of an X-ray system according to some embodiments. [Figure 3A] A block diagram of an X-ray system with multiple anode support structures according to some embodiments. [Figure 3B] A cutaway view of the anode of FIG. 3A according to some embodiments. ! [Figure 4A] An exploded perspective view of an anode and an anode support structure according to some embodiments. [Figure 4B] A cutaway view of the anode and anode support structure of FIG. 4A according to some embodiments. [Figure 4C]This is a perspective view of an anode without an anode support structure according to several embodiments. [Figure 4D] Figure 4A is a perspective view of the anode with a shroud according to several embodiments. [Figure 5A] These are cutaway diagrams of anodes according to several embodiments. [Figure 5B] This is a top view of an anode according to several embodiments. [Figure 6A] This is a block diagram of the technology for forming an X-ray system according to several embodiments. [Figure 6B] This is a block diagram of the technology for forming an X-ray system according to several embodiments. [Figure 6C] This is a block diagram of the technology for forming an X-ray system according to several embodiments. [Figure 6D] This is a block diagram of the technology for forming an X-ray system according to several embodiments. [Figure 6E] This is a block diagram of the technology for forming an X-ray system according to several embodiments. [Figure 6F] This is a block diagram of the technology for forming an X-ray system according to several embodiments. [Figure 6G] This is a block diagram of the technology for forming an X-ray system according to several embodiments. [Figure 7] This is a flowchart of the technique for operating the anode of an X-ray system according to several embodiments. [Figure 8A] This is a perspective view of anodes and anode support structures according to several embodiments. [Figure 8B] Figure 8A is an exploded assembly view of the anode and anode support structure. [Figure 8C] Figure 8A shows various cutaway views of the anode and anode support structure illustrating the cooling channel according to several embodiments. [Figure 8D] Figure 8A shows various cutaway views of the anode and anode support structure illustrating the cooling channel according to several embodiments. [Figure 8E]Figure 8A shows various cutaway views of the anode and anode support structure illustrating the cooling channel according to several embodiments. [Modes for carrying out the invention]

[0003] Some embodiments relate to an anode, a cooling system for the anode, and an X-ray source including such an anode and cooling system.

[0004] Some X-ray sources supply a coolant to the anode at the end of the anode's length. A single hole may be formed within the body of the anode. A tube may be placed inside to create two fluid passages through which the coolant enters and exits. The coolant is supplied to the anode from outside the vacuum chamber. As a result, an insulator, standoff, or other structure intended to support the anode and / or supply the coolant is placed at the end of the anode.

[0005] Inevitably, the walls of the vacuum enclosure are offset from the anode. The support and cooling structures increase the length of the X-ray source. Length refers to a larger dimension than the emitter is located, such as the X-direction in the various diagrams described below. In some systems, multiple X-ray sources are arranged from end to end. The resulting X-ray beam from these sources has a gap that depends on the length of the structures intended to support the anode and / or supply coolant.

[0006] In addition, deformation can occur due to thermal expansion. For example, deformation can occur due to a temperature difference between the target side and the non-target side of the anode. If the temperature of the hot side of the anode where the target is placed differs from the temperature of the cold side opposite the target, the hot side will tend to grow more than the cold side, which may cause the anode to curve. In another example, if the anode is considerably hotter than the surrounding enclosure, the anode may expand relative to the enclosure. If the anode is fixed and / or supported at each end of the enclosure, this thermal growth can cause the enclosure to warp and / or the anode to buckle or deform. In yet another example, supplying a coolant from one end of the anode may cause deformation of the anode. Initially, a cooler coolant may enter one end of the anode. As a result, the end of the anode receiving the coolant may operate at a lower temperature than the far end. The anode may warp and / or deform due to the temperature difference. Changes in the position of the target or anode may result in a shift in focus, changes in size, and distortion.

[0007] As will be described in more detail later, in some embodiments, the support and cooling passage (or cooling channel) may be located in the center and / or behind the anode. The support and / or cooling passage may provide an electrical connection to the anode.

[0008] Figure 1A is a top view of the anode of an X-ray system according to several embodiments. Figure 1B is a side view of the anode and anode support structure of Figure 1A according to several embodiments. Figure 1C is a cross-sectional view of the anode and anode support structure of Figure 1B according to several embodiments. Figure 1C is a cross section along plane I parallel to the YZ plane. Figure 1D is a cutaway view of the anode of Figure 1A according to several embodiments. Figure 1D is a top cutaway view along plane II parallel to the XY plane.

[0009] Referring to FIGS. 1A through 1D, in some embodiments, the X-ray system 100 includes a vacuum enclosure 201 configured to separate a vacuum 202 from a non-vacuum 204. The X-ray system 100 includes an anode 104 disposed within the vacuum enclosure 201. An anode support structure 106 passes through the vacuum enclosure 201 and supports the anode 104 within the vacuum 202 inside the vacuum enclosure 201.

[0010] The anode 104 includes a target 103. The target 103 is a structure configured to generate X-rays in response to one or more incident electron beams. Examples of the target 103 may include materials such as tungsten (W), molybdenum (Mo), rhodium (Rh), silver (Ag), rhenium (Re), palladium (Pd), alloys including such materials, and the like. In some embodiments, the target 103 is a linear target in which the target length in the X direction is 5 times, 10 times, 20 times or more the target width in the Y direction. In some embodiments, the linear target may be flat or may be a curve such as a continuous curve, a segmented linear curve, a combination of such curves, and the like. In some embodiments, different electron beams may collide with different regions 102 (represented by regions 102-1 through 102-n) of the target 103. In some embodiments, the electron beam may collide with at least 3, 5, 10, 100, or more different regions 102 of the target 103. As will be described in more detail later, the target 103 may be a planar target with different regions 102 extending in both the X and Y directions rather than a linear target. In some embodiments, the target 103 may be a single target even when multiple electron beams are directed at multiple regions on the target 103. In other embodiments, the target 103 may include a plurality of separate targets attached to the anode 104. Any number of targets 103 may be disposed on the anode 104.

[0011] In some embodiments, the target 103 extends along a line and / or within a plane that is substantially perpendicular to the anode support structure 106. For example, the target 103 extends along a line in the X direction or within a plane along the X-Y plane. However, the long axis of the anode support structure 106 extends in the Z direction.

[0012] In some embodiments, the anode 104 includes a plurality of cooling passages 112 and 114. For example, the anode 104 may include cooling passages 112-1 to 112-2 and 114-1 to 114-4. In some embodiments, the body 104a of the anode 104 may be formed of a material having a higher thermal conductivity than the target 103. For example, the body 104a of the anode 104 may be formed of copper, stainless steel, a vacuum-compatible conductive material, or the like. The cooling passages 112 and 114 may be formed in various ways, as will be described in more detail later.

[0013] In some embodiments, the cooling passages 112 and 114 include cylindrical passages within the body 104a of the anode 104. Holes 116, such as holes 116a and 116b, may be coupled to the cooling passages 112 and 114. Here, the hole 116a is coupled to the cooling passage 114, and the hole 116b is coupled to the cooling passage 112. The holes 116 may extend from the outer surface 107 of the anode 104 opposite the target 103 to the corresponding cooling passage 112 or 114. The number and arrangement of the holes 116a and 116b are illustrated as an example, but in other embodiments, the number and arrangement may be different. For example, instead of two holes 116a, four holes 116a may extend from the surface 107 to the cooling passage 114.

[0014] The anode support structure 106 may be formed from various materials. For example, the anode support structure 106 may be made from molybdenum (Mo), molybdenum alloy, copper (Cu), stainless steel, vacuum-compatible conductive material, etc. The anode support structure 106 may be attached to the anode 104 in various ways. For example, the outer wall 106a of the anode support structure 106 may be welded, brazed, or otherwise sealed to the anode 104 in order to maintain the vacuum 202 inside the vacuum enclosure 201.

[0015] The anode support structure 106 may be coupled to the vacuum enclosure 201 in various ways. For example, the anode 104 may be a hot anode configured to have a high potential difference of about 160 kilovolts (kV). Although 160kV is used as an example, the anode voltage may be different in other embodiments. The anode support structure 106 may form an electrical connection to the anode 104. Thus, the anode support structure 106 or a portion of the anode support structure 106 may be at a high voltage. An insulator, such as a ceramic insulator, may insulate the anode support structure from the housing of the vacuum enclosure.

[0016] The anode support structure 106 includes a plurality of cooling passages 110. In this example, the anode support structure 106 includes two cooling passages 110a and 110b. Cooling passage 110 is connected to cooling passages 112 and 114. Here, cooling passage 112 is connected to cooling passage 116b through hole 116b, and cooling passage 114 is connected to cooling passage 114 through hole 116a.

[0017] In some embodiments, the refrigerant is delivered into the anode support structure 106, as indicated by the arrows in the cooling channel 110. That is, the refrigerant enters the cooling passage 110b of the anode support structure 106. The refrigerant enters the cooling passage 112 through hole 116b. The refrigerant is divided between cooling passages 112-1 and 112-2. The refrigerant moves toward both ends 104c and 104d of the body 104 of the anode 104. At the ends 104c and 104d of the anode 104, the flow of the refrigerant reverses and returns through the cooling passage 114. The refrigerant that has passed through cooling passage 112-1 is divided between cooling passages 114-1 and 114-3. Similarly, the refrigerant that has passed through cooling passage 112-2 is divided between cooling passages 114-2 and 114-4. The refrigerant that has passed through cooling passage 114 returns to the anode support structure 106 through hole 116a, which is connected to cooling passage 110a.

[0018] In some embodiments, this path of the coolant results in more uniform cooling. For example, the amount of heat generated by the incident electron beam on target 103 may be concentrated along the centerline in the X direction along the center of target 103. In some embodiments, the cooling passage 112 is located on a plane parallel to the XZ plane and parallel to the centerline of target 103. In other embodiments, the cooling passage 112 may be the cooling passage closest to the centerline of target 103. That is, heat may be higher closer to the cooling passage 112. Since the coolant enters the cooling passage 112 before the cooling passage 114, a larger amount of heat may be transferred to the coolant from a region of target 103 that generates more heat. Warmer coolant may pass through the cooling passage 114, which is located on either side of the cooling passage 112. Since a smaller amount of heat may be generated above the cooling passage 114 than above the cooling passage 112, the cooling passage 114 may receive less heat. As a result, the amount of cooling provided to target 103 may better match the heat generated on target 103.

[0019] While a specific number of cooling passages 112 and 114 are used as an example, in other embodiments, the number of cooling passages 112 and / or 114 may differ. In some embodiments, any number from 1 may be used instead of four return cooling passages 114-1 to 114-4. For example, if the refrigerant is divided into four cooling passages 114 at each end, eight return cooling passages 114 may be used.

[0020] In some embodiments, the cooling passage 110 is coaxial. For example, the cooling passage 110b may be at the center of the cooling passage 110a. The cooling passages 110a and 110b may be formed by two coaxial pipes forming the outer wall 106a and the inner wall 106b.

[0021] In some embodiments, the anode support structure 106 is coupled to the anode 104 at the center of the base 104a of the anode 104, for example, within 10% of the length along the X direction from the center of the base 104a. In some embodiments, the anode support structure 106 may be coupled to the anode 104 at a position between 25% and 75% of the length of the anode 104 along the X direction or the longest dimension of the base 104a. The anode support structure 106 may be coupled to the anode 104 on the opposite side from the target 103. In some embodiments, distortion can be reduced by positioning the anode support structure 106 relative to the center. For example, the distance from the anode support structure 106 to the unsupported end of the anode 104 may be shorter than if the anode 104 were supported at the end of the anode. As a result, any resulting distortion may be smaller. While coupling the anode support structure 106 to the anode 104 at or relative to the center is used as an example, in other embodiments, the anode support structure 106 may be off-center. In some embodiments, the anode 104 may be a linear anode having an aspect ratio X:Y of 4:1, 10:1, 25:1, 50:1, and / or 100:1 or greater in the X direction (length) and Y direction (width). In some embodiments, the anode 104 may be a linear anode having an aspect ratio X:Z of 4:1, 10:1, 25:1, 50:1, and / or 100:1 or greater in the X direction (length) and Z direction (height). In some embodiments, the target 103 may be a rectangle having an aspect ratio X:Y of 4:1, 10:1, 25:1, 50:1, and / or 100:1 or greater in the X direction (length) and Y direction (width).

[0022] In some embodiments, the width of the system 100 can be reduced by positioning the anode support structure 106 on the opposite side of the anode 104 from the target 104. In particular, standoffs, feedthroughs, etc., that would have taken up space at the end of the anode 104 are replaced by the anode support structure 106. As a result, the walls of the vacuum enclosure 201 may be positioned closer to the anode 104, and the dimensions of the system in the X direction are reduced. In some embodiments, when multiple X-ray systems 100 are positioned adjacent to each other in the X direction, the amount of space between the anodes 104 of the X-ray systems 100 may be reduced, and the gap between X-rays generated by the X-ray systems 100 may be reduced.

[0023] In some embodiments, multiple high-voltage standoffs may be eliminated. For example, high-voltage standoffs may be used on both ends 104c and 104d to support the anode on ends 104c and 104d. However, the anode support structure 106 replaces both high-voltage standoffs, reducing the number of parts, complexity, etc.

[0024] In addition, the failure rate of the X-ray system 100 may be reduced by positioning the anode support structure 106 on the opposite side of the anode 104 from the target 103. High-voltage instability is a failure mechanism that can increase as the high-voltage standoff increases. High-voltage instability can limit the lifetime of the X-ray system 100. Arc discharges across the insulator due to scattered electrons from the anode 104 can increase the likelihood of such failures. When high-voltage standoffs are used on the ends 104c and 104d of the anode 104, electrons moving laterally along the anode 104 are more likely to accumulate on the high-voltage standoffs. In contrast, when the anode 104 is supported by the anode support structure 106 on the opposite side of the target 103, the number of scattered electrons that can reach the insulator coupled to the anode support structure 106 is reduced or eliminated, which can reduce or eliminate the probability of arc discharge.

[0025] In addition, the complexity of the support for the anode 104 can be reduced. If the anode 104 is supported at the end, the high-voltage standoff may require a structure that can adapt to axial expansion in the X direction due to temperature changes. The triple point formed by such a structure may need to be shielded. However, by positioning the anode support structure 106 on the opposite side of the target 103, the need for a structure that adapts to axial expansion and / or further shielding of the triple point may be eliminated.

[0026] In some embodiments, the structure of the anode support structure 106 and the anode 104 can simplify the manufacturing and / or assembly of the X-ray system 100. Mounting the anode 104 on the anode support structure 106, as described above, can simplify the connection to the cooling channels 112 and 114. For example, if the anode 104 had concentric cooling passages within the body 104a, connecting to the concentric cooling passages (especially the central cooling passage) can be difficult. That is, the freely moving central tube has the ability to rotate and its walls may be somewhat thin. Sealing the tube in such a structure can be difficult. However, since the cooling passages 112 and 114 are not concentric, the holes 116a and 116b do not pass through other cooling passages to reach the desired cooling passage.

[0027] Although the anode support structure 106 is illustrated as being coupled to the anode 104 such that the anode support structure 106 is perpendicular to the target 103, in other embodiments the orientation of the anode support structure 106 and the target 103 and / or anode 104 may be different. For example, the connection of the anode support structure 106 to the anode 104, the structure of the body of the anode 104, etc., may be different so that the target 103 rotates by a non-zero angle such as 5, 10, 15, or 20 degrees around the X direction.

[0028] Figure 2 is a block diagram of an X-ray system according to several embodiments. The X-ray system 200 may be similar to the X-ray system 100 described above and may include similar components. The X-ray system 200 includes a cathode 224, which includes one or more emitters 220 located within a vacuum enclosure 201. Here, several emitters 220-1 to 220-n are illustrated as an example. The emitters are configured to generate the corresponding electron beams 222-1 to 222-n.

[0029] The emitters 220 may be any variety of emitters. For example, each of the emitters 220 may include a filament (e.g., a coil filament emitter), a low work function (LWF) emitter, a field emitter (e.g., including a nanotube), a dispenser cathode, an optical emitter, and so on. The emitters 220 may be the same or different types of emitters. For example, one or more of the emitters 220 may be field emitters, while one or more of the other emitters 220 may be filaments.

[0030] The X-ray system 200 includes a cooling system 250. The cooling system 250 may include any system configured to supply a coolant to the anode 104 through the anode support structure 106. For example, the cooling system 250 may include a pump, radiator, refrigerator, reservoir, etc. The cooling system 250 may be coupled to the anode support structure 106 through a supply coolant line 252 and a return coolant line 254. A coolant such as water, glycol, insulating oil, or a non-conductive liquid may be circulated through the coolant lines 252 and 254 through the anode 104.

[0031] In some embodiments, the X-ray system 200 includes a high-voltage (HV) source 260 located outside the vacuum enclosure 201. The HV source 260 may be configured to generate one or more high voltages for operating the X-ray system 200. For example, the HV source 260 may be configured to generate voltages ranging from several tens of kV to 100 kV or more.

[0032] Electrical connections to components within the vacuum enclosure 201 may be formed through the anode support structure 106 to the anode 104. For example, a high-voltage connection 262 is illustrated as being connected from a high-voltage source 260 to the support structure 106 to supply the anode voltage. If the cathode is not grounded, a feedthrough 270 may provide an electrical connection to the cathode 224.

[0033] In some embodiments, the sole electrical connection to the anode 104 may be formed through a single anode support structure 106. In some embodiments, the sole structural support for the anode 104 within the vacuum enclosure 201 may be from a single anode support structure 106. In some embodiments, the sole electrical connection to the anode 104 and the sole structural support for the anode 104 may be from a single anode support structure 106.

[0034] Figure 3A is a block diagram of an X-ray system with multiple anode support structures according to several embodiments. The X-ray system 300 may be similar to the X-ray systems 100 and / or 200 described above. However, the X-ray system 300 includes multiple anode support structures 106-1 to 106-m, each penetrating a vacuum enclosure. Each of the anode support structures 106-1 to 106-m may be coupled to an anode 104, similar to the single anode support structure 106 described above.

[0035] In some embodiments, one of the anode support structures 106 is configured to supply and return refrigerant, while the other anode support structure 106 is configured to provide an electrical connection. In other embodiments, one of the anode support structures 106 is configured to supply refrigerant, while the other anode support structure 106 is configured to return refrigerant. In some embodiments, the refrigerant may be supplied and returned through two or more or all of the support structures 106. In a particular example, one refrigerant path may enter the anode 104 through anode support structure 106-1 and exit through a different anode support structure 106-m. A second refrigerant path may enter the anode 104 through anode support structure 106-m and exit through anode support structure 106-1.

[0036] Figure 3B is a cutaway view of the anode of Figure 3A according to several embodiments. In some embodiments, each of the anode support structures 106-1 to 106-m includes cooling passages 110a and 110b coupled to openings 116a and 116b. Multiple cooling passages 112 and 114 may be present to guide the refrigerant around the anode 104e. In this example, arrows illustrate the direction of refrigerant flow. In some embodiments, the refrigerant may flow through the cooling passage 112 toward the center of the anode 104e before being guided to the cooling passage 114 in a similar manner to the ends of the anode 104e. Although each anode support structure 106-1 to 106-m is used as an example, in other embodiments, less than one to less than all of the anode support structures 106-1 to 106-m may include cooling passages 110 related to structures within the anode 104e.

[0037] Figure 4A is an exploded perspective view of an anode and anode support structure according to several embodiments. The X-ray system 400 may be the same as the X-ray systems 100, 200, and / or 300 described above. The anode 404 may be the same as the anode 104 described above and may be coupled to the anode support structure 406, similar to the anode support structure 106. These structures may be arranged in a similar configuration. The anode 404 includes a body 404a and an end cap 404b. The target 403 may be placed on the base 404a. The body 404a may include a plurality of cooling passages 412 and 414. The cooling passages 412 and 414 may be holes formed through the body 404a. The holes may extend through the body from one end 404c to the other end 404d.

[0038] The end caps 404b may be positioned on both ends 404c and 404d of the main body 404a. Each end cap 404b may connect the cooling passages 412 and 414 to each other. For example, each end cap 404b may include a recess 405 extending across the openings of the cooling passages 412 and 414 at its ends 404c and 404d. Thus, the refrigerant can flow, for example, from the cooling passage 412 into the recess 405 and into the cooling passage 414. While a specific structure on the end caps 404b is used as an example, other structures may be used so that the end caps 404b connect the cooling passages 412 and 414 to each other at least partially. For example, the main body 404a may include a recess (not shown) connecting the cooling passages 412 and 414. The end caps 404b may include a flat surface that seals the cooling passages 412 and 414. In other embodiments, the formation of the cooling passage may include a combination of the structures of the main body 404a and the end cap 404b.

[0039] The end cap 404b may be attached to the body 404a in various ways. For example, the end cap 404b may be brazed, welded, and / or sealed to the body 404a in a vacuum-compatible manner.

[0040] Figure 4B is a cutaway view of the anode 404 and anode support structure 406 of Figure 4A according to several embodiments. Figure 4C is a perspective view of the anode 404 without the anode support structure 406 according to several embodiments. Referring to Figures 4A to 4C, the anode support structure 406 is coupled to the base 404a at its center. In some embodiments, the outer wall 406a is attached to the opening 418 in the body 404a of the anode 404. As previously mentioned, the outer wall 406a may be brazed, welded, and / or sealed to the body 404a in a vacuum-compatible manner. In some embodiments, the outer wall 406 may be conductive and may form electrical connections to the anode 404 and the target 403.

[0041] In some embodiments, the cooling passages 412 and 414 extend from the anode support structure 406 to both ends 404c and 404d of the base 404a.

[0042] The inner wall 406b may include a pipe coaxial with the outer wall 406a. As a result, the cooling passages 410a and 410b are coaxial. However, in other embodiments, the cooling passages 410a and 410b do not have to be coaxial.

[0043] In some embodiments, the inner wall 406b may be inserted into the hole 416b. The inner wall 406b may be a conductive structure. The inner wall 406b may be sealed to the body 404a using an O-ring 420 or other sealing technique. The O-ring 420 may form a seal between the cooling passages 410a and 410b and the corresponding paths for the refrigerant. The O-ring 420 or similar structure may be non-conductive. In some embodiments, the inner wall 406b may be electrically connected to the body 404a using a further structure such as a conductive spring. Thus, electrical connections to the anode 404 and target 403 may be formed using the inner wall 406b in addition to or as a substitute for the outer wall 406a.

[0044] In some embodiments, the cross-sectional area of ​​the combination of cooling passages 414 is larger than the cross-sectional area of ​​the combination of cooling passages 412. As a result, the head loss through cooling passages 412 and 414 can be reduced.

[0045] As mentioned above, the manufacture of the cooling passages may be less complex and less expensive than using coaxial pipes within the main body 404a. For example, when attempting to connect to coaxial pipes within the main body 404a, it can be difficult to align the inlet pipe with the coaxial pipe within the main body 404a. However, since the cooling passages 412 and 414 are not coaxial within the main body 404a, connecting the cooling passages 412 and 414 from the anode support structure 406 may be simpler. For example, in some embodiments, holes 416a and 416b may be drilled in the main body 404a to connect the cooling passages 412 and 414. In some embodiments, non-coaxial cooling passages may provide a larger surface area of ​​the main body 404a in contact with the refrigerant.

[0046] Figure 4D is a perspective view of the anode of Figure 4A with a shroud according to several embodiments. Referring to Figures 4A and 4D, in some embodiments the anode 404 may include a shroud 450. The shroud 450 may include an electrically conductive structure with an opening 452. The opening 452 may allow electrons to enter from one or more electron beams. However, the shroud 450 may also collect backscattered electrons scattered from the target 403 to prevent these backscattered electrons from colliding with or damaging other features of the X-ray tube, such as the emitter, insulator, or window.

[0047] In some embodiments, the shroud 450 may be at least partially supported by an end cap 404b. For example, the end cap 404b may include a groove, slot, or other structure that connects the end of the shroud 450 to the base 404a. Thus, the end cap 404b may both redirect the refrigerant at ends 404c and 404d and support the shroud 450.

[0048] Figure 5A is a cutaway view of an anode according to several embodiments. Anode 504 may be the same as anodes 104 and 404 described above. Figure 5B is a top view of an anode according to several embodiments. Referring to Figures 5A and 5B, in some embodiments, anode 504 may include a two-dimensional array of regions 502 for multiple electron beams. For example, target 503 may include an nxm array of regions 502 on target 503 for electron beams, where n and m are both integers greater than 1.

[0049] Since region 502 may extend in the X and Y directions, cooling passages 512 and 514 within the main body 504a may extend in directions other than along the X direction. In this example, cooling passage 112 extends in both the X and Y directions, and cooling passage 114 may extend diagonally in the XY plane. The refrigerant may be supplied, for example, through hole 516b and divided into cooling passages 512-1 to 512-4. The refrigerant may be returned through cooling passages 514-1 to 514-4 and hole 516a.

[0050] Figures 6A to 6G are block diagrams of techniques for forming an X-ray system according to several embodiments. Referring to Figure 6A, a base 604a is provided. In Figure 6B, a plurality of cooling passages are formed within the base 604a. For example, cooling passages 612 and 614 may be formed by perforating the base 604a such that each of the cooling passages 612 and 614 extends at least partially through the base 604.

[0051] Referring to Figure 6C, holes 616a and 616b may be drilled in the body 604a to form an opening 618. For example, the opening 618 may be machined into the surface of the body 604a. The opening 618 may be configured to receive and / or fit with a specific anode support structure (not shown). Holes 616a and 616b may be drilled to extend into the cooling passages 612 and 614. In this way, the cooling passages 612 and 614 may be exposed.

[0052] Referring to Figures 6D and 6E, the anode support structure 606 may be attached to the base 604a. For example, the anode support structure 606 may be provided with multiple cooling passages 610, such as an outer cooling passage 610b and an inner cooling passage 610a. The anode support structure 606 may be attached by first attaching the outer wall 606a to the base 604a at the opening 618. As previously mentioned, the outer wall 606a may be attached by welding, brazing, and / or any vacuum-compatible sealing technique. Next, the inner wall 606b may be inserted into the hole 616b. In some embodiments, inserting the inner wall 606b into the hole 616b may include placing springs, O-rings, etc., on and / or inside the inner wall 606b, as previously mentioned. As a result, cooling passages 610 of the anode support structure 606 may be formed, and these cooling passages 610 may be coupled to cooling passages 612 and 614.

[0053] Referring to Figure 6F, in some embodiments, end caps 604c and 604d may be attached to the base 604a. As previously mentioned, the end caps 604c and 604d may be attached by welding, brazing, or any vacuum-compatible sealing technique. As a result, the cooling passages 612 and 614 may be joined together. In some embodiments, the attachment may complete the formation of the cooling passages within the base 604a.

[0054] Referring to Figure 6G, in some embodiments, the target 603 may be formed on the base 604a, as illustrated in Figure 6A, before the cooling passages 112 and 114 are formed within the base 604a. However, in other embodiments, the target 603 may be formed on the base 604a at a different point in time when forming the anode 604.

[0055] While a specific sequence of operations for forming an X-ray system has been described above, the sequence may differ in other embodiments.

[0056] Figure 7 is a flowchart of the technique for operating the anode of an X-ray system according to several embodiments. Referring to Figures 1A to 1D and Figure 7, X-ray system 100 is used as an example. However, in other embodiments, the operation may be used with other X-ray systems described herein. In some embodiments, in 700, a coolant is supplied to the anode 104 within the vacuum enclosure 201 through an anode support structure 106 that penetrates the vacuum enclosure 201. For example, the coolant may be supplied through a cooling passage 110a or 110b. In some embodiments, the coolant may be supplied from a cooling system 250, as illustrated in Figure 2.

[0057] In 710, the refrigerant is divided at the anode and flows in opposite directions within the first cooling passage in the anode. For example, the refrigerant is divided and flows toward both ends 104c and 104d.

[0058] In 720, the refrigerant is redirected at the end of the first cooling passage to a second cooling passage extending toward the anode support structure. For example, the refrigerant may be redirected by structures at ends 104c and 104d, such as the end cap 404b illustrated in Figure 4A. However, in other embodiments, the refrigerant may be redirected by other means, such as the structure of the connection between cooling passages 112 and 114 at ends 104c and 104d themselves.

[0059] In 730, the refrigerant is delivered into the anode support structure from the second cooling passage. For example, the refrigerant may proceed into the cooling passage 110a. In some embodiments, the refrigerant may be returned to the cooling system 250, as illustrated in Figure 2.

[0060] In some embodiments, operating the X-ray system 100 may include electrically connecting to the anode through an anode support structure. For example, as illustrated in Figure 2, the electrical connection from the HV source 260 to the anode 104 may be formed through the conductive structure of the anode support structure 106.

[0061] In some embodiments, splitting the refrigerant at the anode at 710 includes splitting the refrigerant so that it extends perpendicularly to the anode support structure 106. For example, the long axis of the anode support structure 106 may extend in the Z direction. The refrigerant may flow through the anode support structure 106 roughly in the Z direction. However, once the refrigerant reaches the anode 104, it may be directed towards a vertical path in the X direction.

[0062] In some embodiments, supplying the refrigerant through the anode support structure in 700 includes supplying the refrigerant coaxially with the refrigerant passing from the anode through the anode support structure to the anode. For example, the refrigerant passing through the cooling passages 110a and 110b within the anode support structure 106 may be coaxial.

[0063] In some embodiments, the anode 104 is supported solely by an anode support structure. For example, the anode 104 may be located inside a vacuum enclosure 201. The anode support structure 106 may be the only physical support structure supporting the anode 104 inside the vacuum enclosure 201.

[0064] Figure 8A is a perspective view of an anode and anode support structure according to several embodiments. Figure 8B is an exploded view of the anode and anode support structure of Figure 8A. Figures 8C to 8E are various cutaway views of the anode and anode support structure of Figure 8A showing a cooling channel according to several embodiments. Referring to Figures 8A to 8E, in some embodiments the anode 804 and the anode support structure 806 may be the same as those described above. However, the anode support structure 806 is coupled to the anode 804 on a side surface of the anode 804. In some embodiments, the anode 804 is coupled to the anode support structure 806 on a side surface of the anode 804 that is different from the side surface of the anode 804 that includes the target 803, and different from the axial end of the anode 804 on the long axis of the anode 804. In this example, the long axis of the anode 804 is along the X direction. The anode support structure 806 is coupled to the anode 804 on a side surface of the anode 804 at approximately the midpoint along the anode 804 along the X direction. However, as mentioned above, the anode support structure 806 may be connected to the anode 804 at different positions along the X direction.

[0065] Opening 816a connects cooling passage 814-1 to cooling passage 810a of anode support structure 806. Opening 816b connects cooling passage 812 to cooling passage 810b. Cooling passage 814-1 may be blocked by opening 816b. Opening 816b may be separated from cooling passage 814-1 by various structures, walls, etc.

[0066] The opening 816d may connect the cooling passage 810a to the cooling passage 814-2. The opening 814d may extend below the cooling passages 812 and 814-1 to the opening 816c. The opening 816 may connect the opening 816d to the cooling passage 814-2.

[0067] While specific configurations such as cooling passages, openings, inner walls, and outer walls are used as examples, their number, arrangement, size, and shape may differ in other embodiments. For example, the number of anode support structures 806 may be two or more, as in the embodiments described with respect to Figures 3A and 3B. Other features mentioned above, such as end caps and shrouds, may also be included. In any case, since the anode support structures 806 are not coupled to the axial ends along the long axis in the X direction of the anode 804, the anode 804 may experience less strain during operation, as described above.

[0068] A system comprising a vacuum enclosure (201), an anode support structure (106, 406, 606, 806) penetrating the vacuum enclosure (201) and including a plurality of first cooling passages (110, 410, 610, 810), an anode (104, 404, 504, 604, 804) located within the vacuum enclosure (201), coupled to the anode support structure (106, 406, 606, 806) and supported by the anode support structure (106, 406, 606, 806), a target (103, 403, 503, 603, 803), and a plurality of second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814), A system comprising an anode and a second cooling passage (112, 114, 412, 414, 512, 514, 612, 614, 812, 814), each of which is coupled to the corresponding first cooling passage (110, 410, 610, 810), and the anode (104, 404, 504, 604, 804) is coupled to an anode support structure (106, 406, 606, 806) on a side of the anode (104, 404, 504, 604, 804) that is different from the axial end of the anode (104, 404, 504, 604, 804) on the long axis of the anode, with each of the second cooling passages (112, 114, 412, 414, 512, 514, 512, 514, 612, 612, 814) being coupled.

[0069] In some embodiments, the anodes (104, 404, 504, 604, 804) are coupled to the anode support structure (106, 406, 606, 806) on the side opposite to the target (103, 403, 503, 603, 803) of the anodes (104, 404, 504, 604, 804).

[0070] In some embodiments, the anode support structures (106, 406, 606, 806) are the sole structural supports for the anodes (104, 404, 504, 604, 804) within the vacuum enclosure (201).

[0071] In some embodiments, the anode support structures (106, 406, 606, 806) are the only electrical connections to the anodes (104, 404, 504, 604, 804) within the vacuum enclosure (201).

[0072] In some embodiments, the anodes (104, 404, 504, 604, 804) are linear anodes.

[0073] In some embodiments, the linear anodes (104, 404, 504, 604, 804) have a length-to-width aspect ratio of at least one of 4:1, 10:1, 25:1, 50:1, and 100:1.

[0074] In some embodiments, the target (103, 403, 503, 603, 803) is one of several targets (103, 403, 503, 603, 803) that extend in a line or plane perpendicular to the anode support structure (106, 406, 606, 806).

[0075] In some embodiments, a plurality of second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) are substantially perpendicular to a plurality of first cooling passages (110, 410, 610, 810).

[0076] In some embodiments, the anode (104, 404, 504, 604, 804) further includes a base (104a, 404a, 504a, 604a, 804a) and first end caps (404c, 404d, 604c, 604d) and second end caps (404c, 404d, 604c, 604d) positioned at both ends of the base (104a, 404a, 504a, 604a, 804a), and the target (103, 403, 503, 603, 803) is positioned on the base (104a, 404a, 504a, 604a, 804a), and a second cooling The passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) extend through the base (104a, 404a, 504a, 604a, 804a) from the first end caps (404c, 404d, 604c, 604d) to the second end caps (404c, 404d, 604c, 604d), and for each of the end caps (404c, 404d, 604c, 604d), the end caps (404c, 404d, 604c, 604d) connect to each other at least a portion of the second cooling passage.

[0077] In some embodiments, the anode support structures (106, 406, 606, 806) are joined to the base (104a, 404a, 504a, 604a, 804a) at a position on the base (104a, 404a, 504a, 604a, 804a) between 25% and 75% of the longest dimension of the base (104a, 404a, 504a, 604a, 804a), and the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) extend from the anode support structures (106, 406, 606, 806) to both ends of the base (104a, 404a, 504a, 604a, 804a).

[0078] In some embodiments, the first cooling passages (110, 410, 610, 810) are coaxial within the anode support structure (106, 406, 606, 806).

[0079] In some embodiments, the first of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) is positioned along the central axis of the anode (104, 404, 504, 604, 804), and the second of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) and the third of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) are positioned on either side of the first of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814).

[0080] In some embodiments, the end caps (404c, 404d, 604c, 604d) are separated from the vacuum enclosure (201).

[0081] In some embodiments, one of the first cooling passages (110, 410, 610, 810) of the anode support structure (106, 406, 606, 806) is connected to a plurality of second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) of the anode.

[0082] In some embodiments, the anode support structures (106, 406, 606, 806) form electrical connections from the outside of the vacuum enclosure (201) to the anodes (104, 404, 504, 604, 804).

[0083] In some embodiments, the system further includes a cathode (224) located within a vacuum enclosure (201) and configured to emit at least one electron beam toward a target (103, 403, 503, 603, 803).

[0084] In some embodiments, the system further includes a shroud (450) positioned on a target (103, 403, 503, 603, 803) and electrically coupled to a base (104a, 404a, 504a, 604a, 804a), the shroud comprising a plurality of apertures (452) configured to allow at least one electron beam to reach the target (103, 403, 503, 603, 803).

[0085] In some embodiments, the system further includes a cooling system (250) configured to supply a refrigerant to one of the first cooling passages (110, 410, 610, 810), the first cooling passage being coupled to at least one of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814), the at least one of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) being positioned along the long axis of the target (103, 403, 503, 603, 803) in close proximity to the target (103, 403, 503, 603, 803).

[0086] A method comprising: sending a coolant through an anode support structure (106, 406, 606, 806) penetrating the vacuum enclosure (201) toward an anode (104, 404, 504, 604, 804) within the vacuum enclosure (201); dividing the coolant at or within the anode and flowing it in the opposite direction through a first cooling passage (110, 410, 610, 810) within the anode; and distributing the coolant through the first cooling passage A method comprising: redirecting the ends of the paths (110, 410, 610, 810) toward second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) extending toward anode support structures (106, 406, 606, 806); and delivering the refrigerant from the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) into the anode support structures (106, 406, 606, 806).

[0087] In some embodiments, the method further includes electrically connecting to the anodes (104, 404, 504, 604, 804) through anode support structures (106, 406, 606, 806).

[0088] In some embodiments, dividing the refrigerant at the anode (104, 404, 504, 604, 804) includes dividing the refrigerant so as to extend perpendicularly to the anode support structure (106, 406, 606, 806).

[0089] In some embodiments, supplying the refrigerant through the anode support structure (106, 406, 606, 806) includes supplying the refrigerant coaxially with the refrigerant passing from the anode (104, 404, 504, 604, 804) through the anode support structure (106, 406, 606, 806) to the anode (104, 404, 504, 604, 804).

[0090] In some embodiments, the method further includes supporting the anodes (104, 404, 504, 604, 804) solely by anode support structures (106, 406, 606, 806).

[0091] A system comprising means for converting an electron beam into X-rays, including means for delivering a refrigerant through the means for converting an electron beam into X-rays; and means for supporting the means for converting an electron beam into X-rays, including means for supplying a refrigerant to the means for converting an electron beam into X-rays, wherein the means for converting an electron beam into X-rays further comprises means for splitting the refrigerant supplied to the means for converting an electron beam into X-rays.

[0092] Examples of means for converting an electron beam into X-rays include anodes 104, 404, 504, 604, and 804, and targets 102, 403, 503, 603, and 803.

[0093] Examples of means for delivering a coolant through means for converting an electron beam into X-rays include cooling passages 112, 114, 412, 414, 512, 514, 612, 614, 812, and 814, and openings 116, 416, 516, 616, and 816.

[0094] Examples of means for supporting means for converting an electron beam into X-rays include anode support structures 106, 406, 606, and 806.

[0095] Examples of means for supplying a coolant to means for converting an electron beam into X-rays include cooling passages 110, 410, 610, and 810.

[0096] Examples of means for splitting the coolant supplied to means for converting an electron beam into X-rays include various structures at the interface between cooling passages 110, 410, 610, and 810 and cooling passages 112, 114, 412, 414, 512, 514, 612, 614, 812, and 814.

[0097] Examples of means for electrically connecting to means for converting an electron beam into X-rays include the electrically conductive portions of anode support structures 106, 406, 606, and 806.

[0098] In some embodiments, the method includes providing an anode support structure including a plurality of first cooling passages; providing a base (104a, 404a, 504a, 604a, 804a); forming a target on the base (104a, 404a, 504a, 604a, 804a); forming a plurality of second cooling passages within the base (104a, 404a, 504a, 604a, 804a) extending along the base (104a, 404a, 504a, 604a, 804a) below the target; and attaching the anode support structure to the base (104a, 404a, 504a, 604a, 804a) on the side opposite to the target such that the first cooling passages and the second cooling passages are coupled to each other.

[0099] In some embodiments, forming a second cooling passage within the base (104a, 404a, 504a, 604a, 804a) includes forming a second cooling passage extending through the base (104a, 404a, 504a, 604a, 804a).

[0100] In some embodiments, forming a second cooling passage within a base (104a, 404a, 504a, 604a, 804a) further includes attaching end caps (404c, 404d, 604c, 604d) to the ends of the base (104a, 404a, 504a, 604a, 804a) such that each end cap (404c, 404d, 604c, 604d) connects at least a portion of the second cooling passage to each other.

[0101] In some embodiments, the method further includes forming a plurality of openings in the base (104a, 404a, 504a, 604a, 804a) that expose a second cooling passage, and attaching the anode support structure includes attaching the anode support structure to the base (104a, 404a, 504a, 604a, 804a) at the openings in the base (104a, 404a, 504a, 604a, 804a).

[0102] In some embodiments, the method further includes attaching the shroud (450) to the anodes (104, 404, 504, 604, 804).

[0103] In some embodiments, the method further includes providing a vacuum enclosure (201) and attaching the anode support structures (106, 406, 606, 806) to the vacuum enclosure (201) such that the anode support structures (106, 406, 606, 806) penetrate the vacuum enclosure (201).

[0104] While structures, devices, methods, and systems have been described according to specific embodiments, as will be readily apparent to those skilled in the art, many modifications are possible to specific embodiments, and therefore any modification should be considered to fall within the spirit and scope disclosed herein. Accordingly, many modifications can be made by those skilled in the art without departing from the spirit and scope of the appended claims.

[0105] The claims following the disclosure in this document are expressly incorporated herein into the disclosure herein, and each claim stands on its own as a separate embodiment. This disclosure includes all substitutions of independent claims and their dependent claims. Further embodiments that can be derived from the independent and dependent claims that follow are also expressly incorporated herein. These further embodiments are determined by replacing the dependency relationship of a given dependent claim with the phrase "any of the claims beginning with claim [x] and ending with the claim immediately preceding this claim." The term "[x]" in parentheses is replaced with the number of the most recently listed independent claim. For example, with respect to a first set of claims beginning with independent claim 1, claim 4 may depend on either claim 1 or 3, and these distinct dependencies result in two distinct embodiments; claim 5 may depend on any one of claims 1, 3, or 4, and these distinct dependencies result in three different embodiments; claim 6 may depend on any one of claims 1, 3, 4, or 5, and these distinct dependencies result in four different embodiments, and so on.

[0106] The term “first” in a claim relating to a feature or element does not necessarily imply the presence of a second or further such feature or element. Embodiments of the invention for which exclusive ownership or privilege is claimed are defined as follows:

Claims

1. Node and; The target coupled to the anode; an anode support structure coupled to the anode; The anode support structure includes: A first cooling passage configured to allow the refrigerant to flow in a first direction through the anode support structure; A second cooling passage configured to allow the coolant to flow through the anode support structure in a second direction opposite to the first direction; Equipped with, The second cooling passage is offset and eccentric from the first cooling passage. Anode assembly.

2. The anode support structure further comprises a third cooling passage configured to allow a refrigerant to flow through the anode support structure in the second direction, The anode assembly according to claim 1, wherein the second cooling passage and the third cooling passage are located on the opposite side of the first cooling passage.

3. The anode assembly according to claim 1, wherein the first cooling passage is fluidly coupled with the second cooling passage at the anode.

4. The anode assembly according to claim 1, wherein the first direction and the second direction are parallel to the longitudinal axis of the anode support structure.

5. The anode assembly according to claim 1, wherein the longitudinal axis of the anode support structure is perpendicular to the longitudinal axis of the target.

6. The aforementioned anode is: A third cooling passage connected to the first cooling passage and configured to allow the refrigerant to flow in a third direction through the anode; A fourth cooling passage is connected to the second cooling passage and configured to allow the refrigerant to flow through the anode in a fourth direction opposite to the third direction, The anode assembly according to claim 1, comprising:

7. The anode assembly according to claim 6, wherein the fourth cooling passage is offset and eccentric from the third cooling passage.

8. The anode assembly according to claim 6, wherein the third and fourth directions are perpendicular to the first and second directions.

9. It is an anode: Bass and; A target coupled to the base; Equipped with, The aforementioned base is: A first cooling passage configured to allow the refrigerant to flow in a first direction through the anode; A second cooling passage configured to allow the coolant to flow through the anode in a second direction opposite to the first direction; Determine, The second cooling passage is offset and eccentric from the first cooling passage. anode.

10. The anode according to claim 9, wherein the target is configured to receive a plurality of electron beams along the length of the target.

11. The anode according to claim 9, wherein the base further defines a third cooling passage coupled between the first cooling passage and the second cooling passage, the third cooling passage extending in a third direction perpendicular to the first and second directions.

12. The base further defines a third cooling passage configured to allow the coolant to flow through the anode in a third direction parallel to the second direction; The third cooling passage is located on the first side of the first cooling passage; The anode according to claim 9, wherein the second cooling passage is located on the second side of the first cooling passage, opposite to the third cooling passage.

13. The anode according to claim 9, wherein the first cooling passage and the second cooling passage are located in a plane parallel to the main surface of the target.

14. The anode according to claim 9, wherein the base comprises a refrigerant inlet and a refrigerant outlet, which are defined on a first surface of the base adjacent to or opposite to a second surface of the base to which the target is coupled, and the first surface extends in a direction parallel to the longitudinal axis of the target.

15. A method for cooling the anode, The process involves supplying refrigerant to the anode body; The refrigerant is divided into multiple channels within the main body; Deriving the refrigerant from the aforementioned multiple channels; A method for cooling the anode, comprising the following:

16. The method according to claim 15, wherein the refrigerant is supplied to the main body through a support structure coupled to the main body.

17. The method according to claim 16, wherein the refrigerant is led from the plurality of channels to the support structure.

18. The method according to claim 15, further comprising dividing the refrigerant into the plurality of channels and then dividing the refrigerant into a second plurality of channels of the main body.

19. The method according to claim 15, wherein the refrigerant is supplied from the plurality of channels by combining it with an outlet located within the body of the anode.

20. The method according to claim 15, wherein the refrigerant is divided into the plurality of channels in a direction parallel to the main surface of the target coupled to the body of the anode.

Images