Probe device

Abstract

To provide a probe device that enables more stable measurements. [Solution] The probe device (100) comprises a cylindrical member (104), a cable member (300), a measuring pin (102), a conductive member (210), and a biasing member (105). The cable member (300) has a central conductor wire (301) and an outer conductor (303). The diameter of the central conductor wire (301) is smaller than the diameter of the through hole (40) of the cylindrical member (104), and the tip (301a) of the central conductor wire (301) protrudes from the cylindrical member (104). The outer conductor (303) is fixed to the cylindrical member (104). The measuring pin (102) is fixed to the tip (301a) of the central conductor wire (301). The cylindrical member (104) and the measuring pin (102) are inserted through the through hole (211) of the conductive member (210). The biasing member (105) is positioned radially outward of the cylindrical member (104).

Description

Technical Field

[0001] The present invention relates to a probe device.

Background Art

[0002] Conventionally, a probe device has been used to inspect the electrical characteristics of electronic components. For example, Patent Document 1 discloses an inspection probe device used for measuring high-frequency signals transmitted inside a connector. The inspection probe device of Patent Document 1 includes a signal pin, an external plunger, and a socket. When measuring a high-frequency signal transmitted inside a connector, the external plunger contacts the external conductor of the connector, and the signal pin contacts the center conductor of the connector.

[0003] The external plunger is electrically connected to the external conductor of a coaxial cable. The signal pin is electrically connected to the center conductor wire of the coaxial cable. Specifically, the external plunger has a through-hole. The socket is disposed inside the through-hole of the external plunger. The signal pin extends in the vertical direction from a position below the socket inside the through-hole of the external plunger, and the upper end of the signal pin contacts the lower end of the socket. The center conductor wire of the coaxial cable is fixed to the socket by solder.

[0004] In the inspection probe device of Patent Document 1, the signal pin includes a cylindrical portion, a center plunger, and a spring. The upper part of the center plunger is located inside the cylindrical portion. The lower part of the center plunger is located outside the cylindrical portion. The spring is disposed inside the cylindrical portion and presses the center plunger downward. The upper end of the cylindrical portion contacts the lower end of the socket. Therefore, the center plunger is electrically connected to the center conductor wire of the coaxial cable via the cylindrical portion, the spring, and the socket. When measuring a high-frequency signal transmitted inside the connector, the center plunger is pushed by the center conductor of the connector. As a result, the spring contracts, and a force is generated to press the center plunger downward. Therefore, the load for bringing the center plunger into contact with the center conductor of the connector increases, enabling stable measurement. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] International Publication No. 2022 / 014435 [Overview of the project] [Problems that the invention aims to solve]

[0006] However, in a configuration where a spring is placed inside the cylindrical part, such as the probe device disclosed in Patent Document 1, the contact state between the central plunger and the cylindrical part, and the contact state between the spring and the cylindrical part, may change with each measurement. Therefore, variations may occur in the resistance value of the signal path during measurement. Thus, there is room for further improvement regarding stable measurement.

[0007] In view of the above problems, the present invention aims to provide a probe device that enables more stable measurement. [Means for solving the problem]

[0008] The probe device according to this disclosure includes a cylindrical member having a first end, a second end opposite to the first end, and a first through-hole extending from the first end to the second end; a central conductor wire having a tip, an insulator covering the central conductor wire, and an outer conductor covering the insulator, wherein the diameter of the central conductor wire is smaller than the diameter of the first through-hole, the central conductor wire is inserted through the first through-hole so that the tip of the central conductor wire protrudes from the first end of the cylindrical member, and the outer conductor is fixed to the cylindrical member; a measuring pin fixed to the tip of the central conductor wire; a conductive member having a second through-hole through which the cylindrical member and the measuring pin are inserted, and the second through-hole slidably supports the cylindrical member; and a biasing member positioned radially outward of the cylindrical member and generating a biasing force that biases the measuring pin in a direction from inside the second through-hole toward the outside of the conductive member. [Effects of the Invention]

[0009] The probe device according to the present invention enables more stable measurements. [Brief explanation of the drawing]

[0010] [Figure 1] This figure shows a probe device according to an embodiment of the present invention. [Figure 2] This is an exploded perspective view of a probe device according to an embodiment of the present invention. [Figure 3] This is a perspective view showing the probe body and coaxial cable included in a probe device according to an embodiment of the present invention. [Figure 4] This is an exploded perspective view of the probe body and coaxial cable included in a probe device according to an embodiment of the present invention. [Figure 5] This is a cross-sectional view of a barrel included in a probe device according to an embodiment of the present invention. [Figure 6] This is a cross-sectional view of the probe body and coaxial cable included in a probe device according to an embodiment of the present invention. [Figure 7]This is a cross-sectional view of an external plunger included in a probe device according to an embodiment of the present invention. [Figure 8] This is a cross-sectional view showing a part of a probe device according to an embodiment of the present invention. [Figure 9] Another cross-sectional view showing a part of a probe device according to an embodiment of the present invention. [Modes for carrying out the invention]

[0011] Embodiments of the probe device of the present invention will be described below with reference to the drawings (Figures 1 to 9). However, the present invention is not limited to the following embodiments and can be implemented in various forms without departing from its essence. In addition, explanations may be omitted where necessary to avoid repetition. Furthermore, in the figures, the same or corresponding parts are denoted by the same reference numerals and their descriptions are not repeated.

[0012] For convenience, in this specification, the side on which the external plunger 210 (Figure 1) is positioned relative to the external spring 230 (Figure 1) is defined as the lower side, the side on which the flange 240 (Figure 1) is positioned relative to the external spring 230 (Figure 1) is defined as the upper side, the direction in which the flange 240 (Figure 1) extends is defined as the left-right direction, and the direction perpendicular to the up-down and left-right directions is defined as the front-back direction, and embodiments of the present invention will be described accordingly. However, the up-down, left-right, and front-back directions defined here are for convenience of explanation and do not specify the orientation of the probe device according to the present invention during manufacturing or use.

[0013] Figure 1 shows the probe device 100 of this embodiment. Figure 2 is an exploded perspective view of the probe device 100 of this embodiment. Note that in Figure 2, several coaxial connectors 400 are omitted for ease of understanding. Also, in Figure 2, only a portion of the multiple coaxial cables 300 are shown.

[0014] As shown in FIGS. 1 and 2, the probe device 100 of the present embodiment includes an external plunger 210, a housing 220, an external spring 230, a flange 240, a plurality of coaxial cables 300, and a plurality of coaxial connectors 400. The probe device 100 is used to inspect the electrical characteristics of electronic components. Specifically, the probe device 100 can measure high-frequency signals transmitted within an electronic component. The electronic component to be inspected is, for example, a substrate on which a multi-pole connector is mounted. The probe device 100 can measure the characteristics of a circuit formed on the substrate, for example, via a multi-pole connector.

[0015] Each of the coaxial connectors 400 is connected to a corresponding coaxial cable 300. Each of the coaxial connectors 400 electrically connects the corresponding coaxial cable 300 to a measuring instrument (not shown) that measures electrical characteristics. Each of the coaxial cables 300 extends from the corresponding coaxial connector 400 to the housing 220. Each of the coaxial cables 300 is an example of a "cable member". The probe device 100 of the present embodiment includes two coaxial connectors 400 (a first coaxial connector 400a and a second coaxial connector 400b) and two coaxial cables 300 (a first coaxial cable 300a and a second coaxial cable 300b). The first coaxial cable 300a is connected to the first coaxial connector 400a. The second coaxial cable 300b is connected to the second coaxial connector 400b.

[0016] A plurality of coaxial cables 300 are inserted into the housing 220. Specifically, the housing 220 is a cylindrical member and has a through-hole 220a (see FIG. 2) that extends in the vertical direction. Each of the coaxial cables 300 is inserted from the upper surface (one end) of the housing 220 into the interior of the housing 220 (through-hole 220a).

[0017] The external plunger 210 is connected to the housing 220. Specifically, the external plunger 210 is connected to the lower end (the other end) of the housing 220. In this embodiment, the lower end of the housing 220 is fitted inside the upper end of the external plunger 210. For example, the lower end of the housing 220 may be press-fitted inside the upper end of the external plunger 210 so that the external plunger 210 is fixed to the housing 220.

[0018] The external plunger 210 has conductivity. The external plunger 210 may be made of, for example, SUS (stainless steel). The external plunger 210 is an example of a "conductive member". The external plunger 210 contacts an electronic component during inspection of the electronic component. For example, the external plunger 210 may contact the GND terminal (ground terminal) of a multi-pole connector during inspection of the electronic component.

[0019] The housing 220 is disposed inside the external spring 230. In other words, the external spring 230 surrounds the housing 220. The flange 240 is attached to the housing 220 at a position above the external spring 230. The flange 240 is used to attach the probe device 100 to a predetermined facility during inspection of an electronic component. Specifically, the flange 240 is a plate-like member and has a through-hole 240a (see FIG. 2) that penetrates the flange 240 in the vertical direction. The housing 220 is inserted through the through-hole 240a of the flange 240. A flange portion 220b is formed at the upper end of the housing 220. The flange portion 220b contacts (abuts) the upper surface of the flange 240 to prevent the flange 240 from coming off the housing 220 in the upward direction.

[0020] The upper end (one end) of the external spring 230 is connected to the lower surface of the flange 240. The upper end of the external spring 230 may be fixed to the lower surface of the flange 240 or may not be fixed. In other words, the upper end of the external spring 230 may contact (abut) the lower surface of the flange 240.

[0021] The lower end (other end) of the external spring 230 is connected to the upper surface of the external plunger 210. In this embodiment, the lower end of the external spring 230 is connected to the upper edge of the external plunger 210. The lower end of the external spring 230 may or may not be fixed to the upper surface of the external plunger 210. In other words, the lower end of the external spring 230 may be in contact with (abutting against) the upper surface of the external plunger 210.

[0022] The external spring 230 biases the external plunger 210 downward during inspection of electronic components. The external spring 230 is, for example, a compression coil spring. The external spring 230 is an example of a "second biasing member". Specifically, during inspection of electronic components, the external plunger 210 comes into contact with the electronic component and is pushed upward. As a result, the external spring 230 compresses, displacing the positions of the external plunger 210 and the housing 220 upward, while the external spring 230 pushes the external plunger 210 downward. Therefore, the external spring 230 can increase the load applied from the external plunger 210 to the electronic component. Thus, the external plunger 210 can be stably brought into contact with the target location during inspection of electronic components.

[0023] The materials of the housing 220, the external spring 230, and the flange 240 may be conductive materials (conductors) or insulating materials (insulators). For example, the housing 220, the external spring 230, and the flange 240 may each be made of SUS (stainless steel).

[0024] Next, the probe device 100 of this embodiment will be described with reference to Figure 2. As shown in Figure 2, the probe device 100 further comprises a plurality of probe bodies 101 and a holding member 250.

[0025] Each probe body 101 is connected to the corresponding coaxial cable 300 and electrically connected to the corresponding coaxial cable 300. Specifically, each probe body 101 is fixed to the corresponding coaxial cable 300. In this embodiment, the probe device 100 comprises two probe bodies 101 (a first probe body 101a and a second probe body 101b). The first probe body 101a is connected to the first coaxial cable 300a, and the second probe body 101b is connected to the second coaxial cable 300b.

[0026] The retaining member 250 is positioned inside the external plunger 210 (see Figure 9) and holds a plurality of probe bodies 101. Specifically, the retaining member 250 is a plate-shaped member. The outer shape of the retaining member 250 is, for example, circular. The retaining member 250 has at least one slit 250a. In this embodiment, the retaining member 250 has two slits 250a. Each of the plurality of probe bodies 101 is held by the retaining member 250 by being inserted through one of the slits 250a. In this embodiment, the first probe body 101a and the second probe body 101b are inserted through the same slit 250a (one of the two slits 250a).

[0027] The material of the retaining member 250 may be a conductive material (conductor) or an insulating material (insulator). For example, the retaining member 250 may be made of SUS (stainless steel).

[0028] Next, the probe device 100 of this embodiment will be described with reference to Figures 3 to 6. Figure 3 is a perspective view showing the probe body 101 and coaxial cable 300 included in the probe device 100 of this embodiment. Figure 4 is an exploded perspective view of the probe body 101 and coaxial cable 300 included in the probe device 100 of this embodiment. Figure 5 is a cross-sectional view of the barrel 104 included in the probe device 100 of this embodiment. Figure 6 is a cross-sectional view of the probe body 101 and coaxial cable 300 included in the probe device 100 of this embodiment.

[0029] First, the coaxial cable 300 will be described with reference to Figures 3 and 4. As shown in Figures 3 and 4, in this embodiment, the coaxial cable 300 has a central conductor wire 301 (see Figure 4), an insulator 302 (see Figure 4), an outer conductor 303, and a protective coating 304.

[0030] The central conductor wire 301 is the core wire of the coaxial cable 300. The central conductor wire 301 is located at the center of the coaxial cable 300. The central conductor wire 301 is made of a low-resistance conductor. For example, the central conductor wire 301 is made of copper. The central conductor wire 301 transmits, for example, high-frequency signals.

[0031] The insulator 302 covers the central conductor wire 301. In other words, the insulator 302 surrounds the central conductor wire 301. Therefore, the insulator 302 has an annular shape in a cross-section perpendicular to the direction in which the coaxial cable 300 extends. The insulator 302 is made of an insulating resin. For example, the insulator 302 is made of polyethylene.

[0032] The outer conductor 303 covers the insulator 302. In other words, the outer conductor 303 surrounds the insulator 302. The outer conductor 303 has an annular shape in a cross-section perpendicular to the direction in which the coaxial cable 300 extends. Therefore, the insulator 302 is located between the central conductor wire 301 and the outer conductor 303, insulating the central conductor wire 301 from the outer conductor 303.

[0033] The outer conductor 303 is made of a low-resistance conductor. For example, the outer conductor 303 is made of copper. Specifically, the outer conductor 303 may be made by braiding thin wires together. The potential of the outer conductor 303 may be GND potential (ground potential).

[0034] The protective coating 304 covers the outer conductor 303. In other words, the protective coating 304 surrounds the outer conductor 303. The protective coating 304 has an annular shape in a cross-section perpendicular to the direction in which the coaxial cable 300 extends. The protective coating 304 is made of an insulating resin. For example, the protective coating 304 is made of polyethylene.

[0035] As shown in Figure 4, at the lower end of the coaxial cable 300, the central conductor wire 301 is exposed by removing the insulator 302, outer conductor 303, and protective coating 304. Furthermore, the insulator 302 is exposed above the portion where the central conductor wire 301 is exposed by removing the protective coating 304 and outer conductor 303. In addition, the outer conductor 303 is exposed above the portion where the insulator 302 is exposed by removing the protective coating 304.

[0036] Next, the probe body 101 will be described with reference to Figures 3 and 4. As shown in Figures 3 and 4, the probe body 101 includes an internal plunger 102, a bushing 103, a barrel 104, an internal spring 105, and a stopper 106.

[0037] The internal plunger 102 is conductive. The internal plunger 102 may be made of, for example, phosphor bronze. The internal plunger 102 is rod-shaped and extends in the vertical direction. The internal plunger 102 is an example of a "measuring pin". The internal plunger 102 contacts the electronic component when the electronic component is being inspected. For example, the internal plunger 102 may contact the internal terminal (signal terminal) of a multi-pole connector when the electronic component is being inspected. When the electronic component is being inspected, the signal to be measured (e.g., a high-frequency signal) is applied to the internal plunger 102 from the electronic component being inspected.

[0038] The bushing 103 is insulating. The bushing 103 may be made of, for example, resin. The bushing 103 may be made of, for example, polytetrafluoroethylene (PTFE) or liquid crystal polymer (LCP).

[0039] As shown in Figure 3, the bushing 103 is attached to the internal plunger 102. The bushing 103 is an example of an "insulating member". Specifically, the internal plunger 102 passes through the bushing 103 in the vertical direction. Therefore, the bushing 103 surrounds the internal plunger 102. In this embodiment, the bushing 103 is a cylindrical member and has a through hole 103a (see Figure 4) that extends in the vertical direction. The internal plunger 102 is inserted through the through hole 103a of the bushing 103.

[0040] More specifically, the internal plunger 102 has a plunger body 21, a tip portion 22, and a bulging portion 23.

[0041] The plunger body 21 is a rod-shaped member that extends in the vertical direction. The plunger body 21 is inserted through the through hole 103a of the bushing 103. In other words, the bushing 103 is attached to the plunger body 21. The plunger body 21 is an example of the "main body".

[0042] In this embodiment, the bushing 103 is not fixed to the internal plunger 102 (plunger body 21). Specifically, the diameter of the plunger body 21 is smaller than the diameter of the through hole 103a of the bushing 103. Therefore, the internal plunger 102 (plunger body 21) is slidable relative to the bushing 103. In other words, the bushing 103 supports the internal plunger 102 (plunger body 21) in a slidable manner.

[0043] The bulge 23 is provided at the lower end of the plunger body 21. Therefore, the plunger body 21 protrudes upward from the bulge 23. The bulge 23 bulges radially outward from the plunger body 21 (internal plunger 102). Therefore, the diameter of the bulge 23 is larger than the diameter of the plunger body 21. When viewed from above or below, the shape of the bulge 23 is annular. In this embodiment, the shape of the bulge 23 is circular. The bulge 23 is an example of a "contact portion".

[0044] The diameter of the bulge 23 is larger than the diameter of the through hole 103a (see Figure 4) of the bushing 103. Therefore, the bulge 23 contacts the lower surface of the bushing 103. In other words, the bulge 23 abuts against the bushing 103. As a result, the bulge 23 prevents the bushing 103 from coming out of the internal plunger 102 downwards.

[0045] The tip portion 22 is pin-shaped and protrudes downward from the bulging portion 23. The tip portion 22 constitutes the lower end (tip portion) of the internal plunger 102. The diameter of the tip portion 22 is smaller than the diameter of the bulging portion 23. More specifically, the diameter of the tip portion 22 is smaller than the diameter of the plunger body 21.

[0046] In this embodiment, the internal plunger 102 (plunger body 21) is slidable relative to the bushing 103, but the bushing 103 may be fixed to the internal plunger 102 (plunger body 21). In this case, the bulging portion 23 may be omitted.

[0047] Next, the barrel 104 will be described with reference to Figures 4 and 5. As shown in Figures 4 and 5, the barrel 104 is a cylindrical member extending in the vertical direction and has a through hole 40 (see Figure 5) extending in the vertical direction. Specifically, the barrel 104 has a first end 42a and a second end 42b opposite to the first end 42a, and the through hole 40 extends from the first end 42a to the second end 42b. The barrel 104 is an example of a "cylindrical member," and the through hole 40 is an example of a "first through hole." Specifically, the first end 42a constitutes the lower end (tip) of the barrel 104, and the second end 42b constitutes the upper end of the barrel 104. The barrel 104 is electrically conductive. The barrel 104 may be made of, for example, phosphor bronze.

[0048] In this embodiment, the barrel 104 includes a barrel body 41 and an enlarged diameter portion 44. The enlarged diameter portion 44 is provided, for example, in the central part of the barrel 104. The barrel body 41 includes a lower portion 41a (first portion) that protrudes downward from the enlarged diameter portion 44 and an upper portion 41b (second portion) that protrudes upward from the enlarged diameter portion 44. The diameter of the enlarged diameter portion 44 is larger than the diameter of the barrel body 41 (lower portion 41a and upper portion 41b). Therefore, as shown in Figure 5, the lower end of the enlarged diameter portion 44 forms a first step portion 44a between it and the barrel body 41 (lower portion 41a), and the upper end of the enlarged diameter portion 44 forms a second step portion 44b between it and the barrel body 41 (upper portion 41b).

[0049] In this embodiment, the barrel 104 further has a plurality of slits 43 and a bulge 45 (see Figure 5).

[0050] Each slit 43 extends from the first end 42a (tip) of the barrel 104 in the direction (up and down) in which the through hole 40 extends. Specifically, each slit 43 is provided in the lower portion 41a of the barrel body 41. In this embodiment, four slits 43 are formed in the barrel 104. The four slits 43 are provided at equal intervals (90° intervals) along the circumferential direction of the barrel 104.

[0051] The bulge 45 bulges radially outward from the first end 42a (tip) of the barrel 104. More specifically, the bulge 45 bulges radially outward from the lower end (tip) of the lower portion 41a of the barrel body 41. In this embodiment, the lower end (first end 42a) of the lower portion 41a of the barrel body 41 is divided into four parts by four slits 43, and a bulge 45 is provided in each of the divided parts. In other words, the bulge 45 is divided into four parts.

[0052] Next, with reference to Figures 3 to 6, the internal spring 105 and stopper 106 included in the probe body 101 will be described.

[0053] As shown in Figure 4, the internal spring 105 has a first end 105a and a second end 105b opposite to the first end 105a. Here, the first end 105a is the lower end of the internal spring 105, and the second end 105b is the upper end of the internal spring 105. The material of the internal spring 105 may be a conductive material (conductor) or an insulating material (insulator). For example, the internal spring 105 may be made of piano wire. The internal spring 105 is an example of a "first biasing member".

[0054] As shown in Figures 3 and 6, the internal spring 105 is attached to the barrel 104 and surrounds the barrel 104. Specifically, the internal spring 105 is positioned radially outward of the barrel 104. More specifically, the internal spring 105 is attached to the upper portion 41b of the barrel body 41. Specifically, the upper portion 41b of the barrel body 41 is positioned inside the internal spring 105, and the internal spring 105 surrounds the upper portion 41b of the barrel body 41. In other words, the internal spring 105 is positioned radially outward of the upper portion 41b of the barrel body 41.

[0055] The first end 105a (lower end) of the internal spring 105 is connected to the second stepped portion 44b of the barrel 104. The first end 105a of the internal spring 105 may or may not be fixed to the second stepped portion 44b of the barrel 104. In other words, the first end 105a of the internal spring 105 may be in contact with (abutting against) the upper surface of the enlarged diameter portion 44 of the barrel 104.

[0056] The stopper 106 is attached to the barrel 104. More specifically, the stopper 106 is attached to the upper portion 41b of the barrel body 41 at a position above the internal spring 105. Specifically, the stopper 106 is a cylindrical member and has a through hole 106a (see Figure 4) that extends in the vertical direction. The upper portion 41b of the barrel body 41 is inserted through the through hole 106a of the stopper 106.

[0057] The stopper 106 is connected to the second end 105b (upper end) of the internal spring 105. Therefore, the internal spring 105 is positioned between the second stepped portion 44b of the barrel 104 and the stopper 106. The second end 105b of the internal spring 105 may or may not be fixed to the lower surface of the stopper 106. In other words, the second end 105b of the internal spring 105 may be in contact with (abutting against) the lower surface of the stopper 106.

[0058] The material of the stopper 106 may be a conductive material (conductor) or an insulating material (insulator). For example, the stopper 106 may be made of SUS (stainless steel).

[0059] Next, with reference to Figure 6, the connection relationship between the probe body 101 and the coaxial cable 300 will be explained.

[0060] As shown in Figure 6, the outer conductor 303 of the coaxial cable 300 is fixed to the barrel 104. As a result, the barrel 104 and the outer conductor 303 of the coaxial cable 300 are electrically connected. Therefore, the outer conductor 303 and the barrel 104 are at the same potential (GND potential). Specifically, the outer conductor 303 is directly fixed to the barrel 104.

[0061] For example, the outer conductor 303 of the coaxial cable 300 may be fixed to the second end 42b (upper end) of the barrel 104. Specifically, the outer conductor 303 of the coaxial cable 300 may be soldered to the second end 42b of the barrel 104 in a manner that covers the second end 42b of the barrel 104.

[0062] The central conductor wire 301 of the coaxial cable 300 has a diameter smaller than the diameter of the through-hole 40 of the barrel 104 and is inserted through the through-hole 40 of the barrel 104. Therefore, the internal spring 105 is positioned radially outward from the central conductor wire 301. In other words, the internal spring 105 is positioned in a non-contact position with the central conductor wire 301.

[0063] Furthermore, the central conductor wire 301 has a tip portion 301a, which protrudes from the first end portion 42a of the barrel 104. The internal plunger 102 is fixed to the tip portion 301a of the central conductor wire 301 and electrically connected to the central conductor wire 301. Therefore, the internal plunger 102 is located outside (below) the barrel 104. Specifically, the central conductor wire 301 is directly fixed to the internal plunger 102. For example, the internal plunger 102 may have a bottomed hole extending downward from its upper surface, into which the tip portion 301a of the central conductor wire 301 is inserted and crimped to the internal plunger 102. As already explained, during inspection of electronic components, the internal plunger 102 receives a signal to be measured (e.g., a high-frequency signal) from the electronic component under inspection. The signal to be measured is transmitted from the internal plunger 102 to the central conductor wire 301. As a result, the signal to be measured is input to the measuring instrument via the coaxial connector 400 (see Figure 1) from the central conductor wire 301.

[0064] In this embodiment, the central conductor wire 301 and the internal plunger 102 are connected at one point, and the connection is stable. Therefore, the increase and variation in the resistance value of the signal path can be suppressed, and the insertion loss can be stabilized. Furthermore, in this embodiment, since the central conductor wire 301 has a diameter smaller than the diameter of the through hole 40 of the barrel 104, the central conductor wire 301 and the barrel 104 are less likely to come into contact. Also, the internal spring 105 and the internal plunger 102 are positioned outside the barrel 104. Therefore, the central conductor wire 301 does not come into contact with the internal spring 105. Also, the internal plunger 102 does not come into contact with the barrel 104 and the internal spring 105. As a result, the generation of parasitic components (parasitic resistance, parasitic capacitance, etc.) in the signal path can be suppressed. Furthermore, the superposition of resonant components on the signal transmitted from the internal plunger 102 to the measuring instrument can be suppressed. Therefore, more stable measurements become possible.

[0065] Furthermore, in this embodiment, the insulator 302 of the coaxial cable 300 is further inserted through the through hole 40 of the barrel 104. As a result, the barrel 104 and the central conductor wire 301 are insulated by the insulator 302. Therefore, according to this embodiment, even more stable measurements are possible.

[0066] Next, the external plunger 210 will be described with reference to Figure 7. Figure 7 is a cross-sectional view of the external plunger 210 included in the probe device 100 of this embodiment. As shown in Figure 7, the external plunger 210 has a plurality of through holes 211. The upper surface of the external plunger 210 is open, and a space (internal space 214) is formed above the external plunger 210. Specifically, the external plunger 210 has an inner wall surface 215 that partitions the internal space 214.

[0067] Each through-hole 211 extends vertically. Each through-hole 211 communicates with the internal space 214. Each through-hole 211 is an example of a "second through-hole". Specifically, each through-hole 211 has an inner opening 212 and an outer opening 213. Each inner opening 212 connects the corresponding through-hole 211 to the internal space 214. Each outer opening 213 connects the corresponding through-hole 211 to the external space of the external plunger 210. More specifically, the inner wall surface 215 includes a bottom wall surface 216, and each inner opening 212 is formed in the bottom wall surface 216. The external plunger 210 has a bottom surface 217, and each outer opening 213 is formed in the bottom surface 217 of the external plunger 210.

[0068] In this embodiment, the multiple through holes 211 include a first through hole 211a, a second through hole 211b, and a third through hole 211c. However, the number of through holes 211 is not limited to three.

[0069] Next, the probe device 100 of this embodiment will be described with reference to Figures 7 to 9. Figure 8 is a cross-sectional view showing a part of the probe device 100 of this embodiment. Figure 9 is another cross-sectional view showing a part of the probe device 100 of this embodiment. Specifically, Figure 8 mainly shows the lower part of the external plunger 210. Figure 9 mainly shows the upper part of the external plunger 210.

[0070] As shown in Figures 8 and 9, the probe body 101 is positioned inside the external plunger 210. As shown in Figure 8, the barrel 104 and the internal plunger 102 are inserted through the through hole 211 of the external plunger 210. The through hole 211 of the external plunger 210 supports the barrel 104 so that it can slide freely. In this embodiment, the lower portion 41a of the barrel body 41 is inserted through the through hole 211 of the external plunger 210.

[0071] In Figures 8 and 9, the first probe body 101a shows the state during inspection of electronic components. The second probe body 101b shows the state when electronic components are not being inspected. As shown in Figures 8 and 9, during inspection of electronic components, the positions of the internal plunger 102 and barrel 104 are displaced upward, and at least a portion of the coaxial cable 300 is also displaced upward. Specifically, at least the portion of the coaxial cable 300 fixed to the internal plunger 102 and barrel 104 is displaced upward.

[0072] Furthermore, the internal spring 105 compresses during inspection of electronic components. As a result, the internal spring 105 generates a biasing force that biases the internal plunger 102 in a direction downward (outward) from inside the through hole 211 towards the external plunger 210. Specifically, the internal spring 105 pushes the enlarged diameter portion 44 (second stepped portion 44b) of the barrel 104 downward. The outer conductor 303 of the coaxial cable 300 is fixed to the barrel 104. The internal plunger 102 is fixed to the tip portion 301a of the central conductor wire 301 of the coaxial cable 300. As a result, a force is generated from the barrel 104 through the coaxial cable 300 that biases the internal plunger 102 downward. Therefore, the internal spring 105 can increase the force that presses the internal plunger 102 against the electronic component during inspection. In other words, it can increase the load applied from the internal plunger 102 to the electronic component. Therefore, the internal plunger 102 can be stably brought into contact with the target location during inspection of electronic components. In addition, the load applied from the internal plunger 102 to the electronic component can be increased, thereby reducing the contact resistance. Consequently, the insertion loss is stabilized.

[0073] Furthermore, according to this embodiment, the internal spring 105 is positioned radially outward from the barrel 104. Therefore, compared to a configuration in which the internal spring 105 is positioned inside the barrel 104 or inside the internal plunger 102, at least one of the diameter and wire diameter of the internal spring 105 can be increased. Consequently, it becomes easier to increase the load applied from the internal plunger 102 to the electronic components.

[0074] The probe device 100 of this embodiment will be described in more detail below with reference to Figures 7 to 9.

[0075] As shown in Figure 8, the bushing 103 is housed inside the through-hole 211 of the external plunger 210. The through-hole 211 of the external plunger 210, in addition to the barrel 104, slidably supports the bushing 103. According to this embodiment, since the bushing 103 is slidably supported within the through-hole 211, the internal plunger 102 can be stably slid in the vertical direction. Specifically, it is possible to suppress tilting of the internal plunger 102 and displacement of the tip 22 of the internal plunger 102 in the front, back, left, and right directions. Therefore, the tip 22 of the internal plunger 102 can be stably brought into contact with the target location during inspection of electronic components. Furthermore, because the bushing 103 makes it difficult for the internal plunger 102 to come into contact with the external plunger 210 (the inner wall surface of the through-hole 211), more stable insulation between the internal plunger 102 and the external plunger 210 can be ensured.

[0076] Furthermore, as explained with reference to Figure 5, a bulge 45 is provided at the first end 42a (tip) of the barrel 104. The diameter of the bulge 45 is larger than the diameter of the through hole 211 of the external plunger 210. In addition, a plurality of slits 43 are formed in the lower portion 41a of the barrel body 41, and each piece divided by the slits 43 is swingable in the radial direction of the barrel 104 and functions as a leaf spring (elastic body). Therefore, when the lower portion 41a of the barrel body 41 is inserted into the through hole 211, the bulge 45 is pushed radially inward from the inner wall surface of the through hole 211, and each piece divided by the slits 43 bends radially inward of the barrel 104. As a result, each piece divided by the slits 43 functions as a leaf spring and pushes the bulge 45 radially outward of the barrel 104. Therefore, according to this embodiment, the bulging portion 45 of the barrel 104 can be brought into more stable contact with the inner wall surface of the through hole 211, thereby making the barrel 104 and the external plunger 210 more stable to the same potential (for example, GND potential).

[0077] As shown in Figure 9, a portion of the barrel 104 protrudes from the through hole 211 into the internal space 214. Specifically, at least the enlarged diameter portion 44 and the upper portion 41b of the barrel body 41 (see Figure 6) protrude from the through hole 211 into the internal space 214. In addition, during inspection of electronic components, a portion of the lower portion 41a of the barrel body 41 (see Figure 6) also protrudes from the through hole 211 into the internal space 214. Hereinafter, the portion of the barrel 104 that protrudes from the through hole 211 into the internal space 214 may be referred to as the "protruding portion of the barrel 104".

[0078] According to this embodiment, the internal spring 105 is positioned radially outward from the protrusion of the barrel 104, surrounding the protrusion of the barrel 104. Therefore, the internal spring 105 is located in the internal space 214 and not in the through hole 211. As a result, the gap between adjacent probe bodies 101 can be narrowed compared to a configuration in which the internal spring 105 is positioned in the through hole 211. Thus, it is possible to accommodate the narrowing of the internal terminals of a multi-pole connector.

[0079] Furthermore, as shown in Figure 9, the diameter of the enlarged portion 44 of the barrel 104 is larger than the diameter of the inner opening 212 (see Figure 7), and the first stepped portion 44a of the barrel 104 abuts against the bottom wall surface 216 of the external plunger 210. In other words, the protruding portion of the barrel 104 has a contact portion (first stepped portion 44a) that abuts against the bottom wall surface 216 of the external plunger 210. Therefore, according to this embodiment, the first stepped portion 44a of the barrel 104 can restrict the amount by which the internal plunger 102 protrudes from the lower surface 217 of the external plunger 210 (protrusion amount). In addition, the first stepped portion 44a of the barrel 104 can restrict the lower limit position of the first end 105a (lower end) of the internal spring 105, thereby restricting the amount of displacement of the first end 105a of the internal spring 105. As a result, the amount of expansion and contraction of the internal spring 105 can be restricted. More specifically, since the retaining member 250, as explained with reference to Figure 2, is fixed within the internal space 214 of the external plunger 210, and the position of the second end 105b (upper end) of the internal spring 105 is fixed, the amount of expansion and contraction of the internal spring 105 can be restricted by restricting the amount of displacement of the first end 105a of the internal spring 105.

[0080] As explained with reference to Figures 3 and 6, the second stepped portion 44b of the barrel 104 is connected to the first end 105a (lower end) of the internal spring 105. The second stepped portion 44b is located further from the bottom wall surface 216 than the first stepped portion 44a. Therefore, the second stepped portion 44b is provided on the protruding portion of the barrel 104. In other words, the protruding portion of the barrel 104 has the second stepped portion 44b. Also, as explained with reference to Figures 3 and 6, the stopper 106 is connected to the second end 105b (upper end) of the internal spring 105. As shown in Figure 9, the stopper 106 is located in the internal space 214 of the external plunger 210 and restricts the position of the second end 105b of the internal spring 105.

[0081] More specifically, the upper surface (one end face) of the stopper 106 is connected to the lower surface of the retaining member 250, and the lower surface (the other end face) of the stopper 106 is connected to the second end 105b of the internal spring 105. Therefore, the stopper 106 is pushed by the internal spring 105. Since the retaining member 250 is fixed within the internal space 214, the stopper 106 is also fixed within the internal space 214. As a result, the position of the second end 105b of the internal spring 105 is restricted by the stopper 106. The upper surface of the stopper 106 may or may not be fixed to the retaining member 250. In other words, the upper surface of the stopper 106 may be in contact with (abutting against) the lower surface of the retaining member 250.

[0082] According to this embodiment, by restricting the position of the second end 105b of the internal spring 105 with the stopper 106, the amount of expansion and contraction of the internal spring 105 can be adjusted, thereby adjusting the magnitude of the load applied from the internal plunger 102 to the electronic component. Specifically, by replacing the stopper 106 attached to the barrel 104 with multiple types of stoppers 106 having different vertical lengths (thicknesses), it is possible to adjust the magnitude of the load applied from the internal plunger 102 to the electronic component.

[0083] The stopper 106 may be omitted. If the stopper 106 is not used, the second end 105b of the internal spring 105 is connected to the lower surface of the retaining member 250.

[0084] Embodiments of the present invention have been described above with reference to the drawings (Figures 1 to 9). According to this embodiment, the probe device 100 has a barrel 104 having a first end 42a, a second end 42b opposite to the first end 42a, and a through hole 40 extending from the first end 42a to the second end 42b, a central conductor wire 301 having a tip portion 301a, an insulator 302 covering the central conductor wire 301, and an outer conductor 303 covering the insulator 302, wherein the diameter of the central conductor wire 301 is smaller than the diameter of the through hole 40, and the central conductor wire 301 is inserted through the through hole 40, with the tip portion 301a of the central conductor wire 301 protruding from the first end 42a of the barrel 104. The embodiment includes a coaxial cable 300 in which the outer conductor 303 is fixed to the barrel 104, an internal plunger 102 fixed to the tip 301a of the central conductor wire 301, an external plunger 210 having a through hole 211 through which the barrel 104 and the internal plunger 102 are inserted, and the through hole 211 supports the barrel 104 in a slidable manner, and an internal spring 105 positioned radially outward of the barrel 104, which generates a biasing force that biases the internal plunger 102 in the direction from inside the through hole 211 toward the outside of the external plunger 210. Therefore, according to this embodiment, the central conductor wire 301 and the internal plunger 102 are connected at one point, and the connection state is stable, so that the increase and variation in the resistance value of the signal path can be suppressed and insertion loss can be stabilized. Furthermore, according to this embodiment, since the central conductor wire 301 has a diameter smaller than the diameter of the through-hole 40 in the barrel 104 (cylindrical member), the central conductor wire 301 and the barrel 104 are less likely to come into contact. Also, the internal spring 105 (biasing member) and the internal plunger 102 (measuring pin) are positioned outside the barrel 104 (cylindrical member). Therefore, the central conductor wire 301 does not come into contact with the internal spring 105. Also, the internal plunger 102 does not come into contact with the barrel 104 and the internal spring 105. As a result, it is possible to suppress the generation of parasitic components (parasitic resistance, parasitic capacitance, etc.) in the signal path. Furthermore, it is possible to suppress the superposition of resonant components in the signal transmitted from the internal plunger 102 to the measuring instrument. Therefore, more stable measurements become possible.

[0085] Furthermore, according to this embodiment, the probe device 100 further includes a bushing 103 attached to the internal plunger 102 and housed in the through hole 211, and the through hole 211 slidably supports the barrel 104 and the bushing 103. Therefore, according to this embodiment, since the bushing 103 is attached to the internal plunger 102 and the bushing 103 is slidably supported in the through hole 211, the internal plunger 102 can be stably slid in the vertical direction. Thus, the tip 22 of the internal plunger 102 can be stably brought into contact with the target location when inspecting electronic components. Moreover, because the bushing 103 makes it difficult for the internal plunger 102 to come into contact with the inner wall surface of the through hole 211, more stable insulation between the internal plunger 102 and the external plunger 210 can be ensured.

[0086] Furthermore, according to this embodiment, the internal plunger 102 has a plunger body 21 to which the bushing 103 is attached, and a bulge 23 that contacts the bushing 103. The bushing 103 slidably supports the plunger body 21. Therefore, according to this embodiment, the bulge 23 prevents the bushing 103 from coming out of the internal plunger 102 downwards.

[0087] In another embodiment, the bushing 103 may be fixed to the internal plunger 102. Fixing the bushing 103 to the internal plunger 102 prevents the bushing 103 from coming out of the internal plunger 102 downwards. Also, the bulge portion 23 can be omitted, allowing the shape of the internal plunger 102 to be made simpler. Making the shape of the internal plunger 102 simpler makes it easier to manufacture the internal plunger 102. As a result, the manufacturing of the probe device 100 becomes easier.

[0088] Furthermore, according to this embodiment, the barrel 104 is conductive. Therefore, according to this embodiment, the potential of the external plunger 210 can be more stably brought to the GND potential.

[0089] Furthermore, according to this embodiment, the external plunger 210 has an inner wall surface 215 that partitions the internal space 214, the internal space 214 communicates with the through hole 211, the barrel 104 has a projection that protrudes from the through hole 211 into the internal space 214, and the internal spring 105 is located radially outside the projection of the barrel 104. Therefore, according to this embodiment, the internal spring 105 is located in the internal space 214 and not in the through hole 211. As a result, the gap between adjacent barrels 104 can be narrowed compared to a configuration in which the internal spring 105 is placed in the through hole 211. Thus, it is possible to accommodate the narrowing of the internal terminals of the multi-pole connector.

[0090] Furthermore, according to this embodiment, the through hole 211 has an inner opening 212 that communicates with the internal space 214, the inner wall surface 215 includes a bottom wall surface 216 on which the inner opening 212 is formed, and the protruding portion of the barrel 104 has a first stepped portion 44a that abuts against the bottom wall surface 216. Therefore, according to this embodiment, the first stepped portion 44a can restrict the amount by which the internal plunger 102 protrudes from the external plunger 210 (protrusion amount). In addition, the first stepped portion 44a can restrict the displacement of the first end 105a of the internal spring 105. As a result, the amount of expansion and contraction of the internal spring 105 can be restricted.

[0091] Furthermore, according to this embodiment, the internal spring 105 has a first end 105a and a second end 105b opposite to the first end 105a, the protruding portion of the barrel 104 further has a second stepped portion 44b, the second stepped portion 44b is located further from the bottom wall surface 216 than the first stepped portion 44a and is connected to the first end 105a of the internal spring 105, and the probe device 100 further includes a stopper 106 connected to the second end 105b of the internal spring 105 to restrict the position of the second end 105b of the internal spring 105. Therefore, according to this embodiment, by restricting the position of the second end 105b of the internal spring 105 with the stopper 106, the amount of expansion and contraction of the internal spring 105 can be adjusted, thereby adjusting the magnitude of the load applied from the internal plunger 102 to the electronic component. More specifically, by replacing the stopper 106 attached to the barrel 104 with several types of stoppers 106 of different thicknesses, it becomes possible to adjust the magnitude of the load applied from the internal plunger 102 to the electronic components.

[0092] Furthermore, according to this embodiment, the insulator 302 of the coaxial cable 300 is further inserted through the through hole 40. As a result, the barrel 104 and the central conductor wire 301 are insulated by the insulator 302. Therefore, even more stable measurements become possible.

[0093] Furthermore, according to this embodiment, the barrel 104 has a slit 250a extending from the first end 42a of the barrel 104 in the direction in which the through hole 40 extends, and a bulge 45 that bulges radially outward from the first end 42a of the barrel 104. Therefore, according to this embodiment, the bulge 45 can be brought into more stable contact with the inner wall surface of the through hole 211, making it possible to more stably bring the barrel 104 and the external plunger 210 to the same potential.

[0094] Furthermore, according to this embodiment, the probe device 100 comprises multiple sets of components including a barrel 104, a coaxial cable 300, an internal plunger 102, and an internal spring 105, and the external plunger 210 has a number of through holes 211 equal to or greater than the number of sets of components including the barrel 104, coaxial cable 300, internal plunger 102, and internal spring 105. Therefore, the probe device 100 can be applied, for example, to the inspection of electronic components such as a circuit board on which a multi-pole connector is mounted.

[0095] Furthermore, according to this embodiment, the probe device 100 further comprises a housing 220 through which a coaxial cable 300 is inserted and connected to an external plunger 210, and an external spring 230 surrounding the housing 220. Therefore, according to this embodiment, the external spring 230 can increase the load applied from the external plunger 210 to the electronic component. Thus, the external plunger 210 can be stably brought into contact with the target location during inspection of the electronic component.

[0096] It should be noted that the present invention is not limited to the embodiments described above, and can be implemented in various forms without departing from its spirit. Furthermore, the multiple components disclosed in the above embodiments can be modified as appropriate. For example, some components from all the components shown in one embodiment may be added to the components of another embodiment, or some components from all the components shown in one embodiment may be removed from the embodiment.

[0097] The drawings schematically show each component in order to facilitate understanding of the invention, and the thickness, length, number, spacing, etc. of each component shown may differ from the actual dimensions due to the convenience of drawing creation. Furthermore, the configuration of each component shown in the above embodiments is merely an example and is not particularly limiting, and it goes without saying that various modifications are possible without substantially departing from the effects of the present invention.

[0098] For example, in the embodiment described with reference to Figures 1 to 9, the probe device 100 is equipped with two coaxial cables 300 (a first coaxial cable 300a and a second coaxial cable 300b), but the probe device 100 may be equipped with one or three or more coaxial cables 300. Similarly, the probe device 100 may be equipped with one or three or more coaxial connectors 400. More specifically, the probe device 100 may be provided with the same number or fewer coaxial cables 300 and coaxial connectors 400 as the number of through holes 211 in the external plunger 210.

[0099] Furthermore, in the embodiments described with reference to Figures 1 to 9, the internal plunger 102 had an annular bulge 23, but the configuration for preventing the bushing 103 from falling out of the internal plunger 102 is not limited to this configuration. The internal plunger 102 only needs to have a structure that contacts the bushing 103 to prevent the bushing 103 from falling out of the internal plunger 102. For example, the internal plunger 102 may have a structure in which a plurality of contact portions (or bulges) that protrude (or bulge) radially outward from the lower end of the plunger body 21 are provided along the circumferential direction of the plunger body 21 (internal plunger 102).

[0100] Furthermore, in the embodiment described with reference to Figures 1 to 9, four slits 43 were provided in the barrel 104, but the number of slits 43 is not particularly limited.

[0101] [Note] This disclosure further discloses the following embodiments, which do not limit the present invention.

[0102] [Aspect 1] A cylindrical member having a first end, a second end opposite to the first end, and a first through hole extending from the first end to the second end, A cable member comprising a central conductor wire having a tip, an insulator covering the central conductor wire, and an outer conductor covering the insulator, wherein the diameter of the central conductor wire is smaller than the diameter of the first through-hole, the central conductor wire is inserted through the first through-hole, the tip of the central conductor wire protrudes from the first end of the cylindrical member, and the outer conductor is fixed to the cylindrical member, A measuring pin fixed to the tip of the central conductor wire, A conductive member having a second through-hole, through which the cylindrical member and the measuring pin are inserted, and through which the second through-hole slidably supports the cylindrical member, A biasing member is positioned radially outward of the cylindrical member and generates a biasing force that biases the measuring pin in a direction from inside the second through hole toward the outside of the conductive member. A probe device equipped with the following features.

[0103] According to Embodiment 1, the increase and variation in the resistance value of the signal path can be suppressed, thereby stabilizing the insertion loss. Furthermore, the generation of parasitic components (such as parasitic resistance and parasitic capacitance) in the signal path can be suppressed. In addition, the superposition of resonant components on the signal transmitted from the measurement pin to the measuring instrument can be suppressed. Therefore, more stable measurements become possible.

[0104] [Aspect 2] The system further comprises an insulating member attached to the measuring pin and housed in the second through hole, The probe device according to embodiment 1, wherein the second through hole slidably supports the cylindrical member and the insulating member.

[0105] According to Embodiment 2, the insulating member is attached to the measuring pin and is slidably supported within the second through-hole, allowing the measuring pin to slide stably in the vertical direction. Therefore, the tip of the measuring pin can be stably brought into contact with the target location during inspection of electronic components. Furthermore, the insulating member makes it difficult for the measuring pin to come into contact with the inner wall surface of the second through-hole, thus ensuring more stable insulation between the measuring pin and the conductive member.

[0106] [Aspect 3] The aforementioned measuring pin is The main body portion to which the insulating member is attached, The contact portion that contacts the insulating member It has, The probe device according to embodiment 2, wherein the insulating member slidably supports the main body.

[0107] According to embodiment 3, the contact portion prevents the insulating member from coming off the measuring pin in a downward direction.

[0108] [Aspect 4] The probe device according to embodiment 2, wherein the insulating member is fixed to the measuring pin.

[0109] According to embodiment 4, the insulating member is prevented from coming out of the measuring pin downwards. Furthermore, the contact portion can be omitted, allowing for a simpler shape for the measuring pin. By simplifying the shape of the measuring pin, the manufacturing of the measuring pin becomes easier. Consequently, the manufacturing of the probe device becomes easier.

[0110] [Aspect 5] The probe device according to any one of embodiments 1 to 4, wherein the cylindrical member is electrically conductive.

[0111] According to embodiment 5, the cylindrical member is conductive. Therefore, the potential of the conductive member can be more stably brought to the GND potential.

[0112] [Aspect 6] The conductive member has an inner wall surface that partitions the internal space, The aforementioned internal space is in communication with the second through hole, The cylindrical member has a projection that protrudes from the second through hole into the internal space, The biasing member is located radially outward of the protruding portion, as described in any one of embodiments 1 to 5 of the probe device.

[0113] According to embodiment 6, the biasing member is located in the internal space and not in the second through-hole. As a result, the gap between adjacent cylindrical members can be narrowed compared to a configuration in which the biasing member is located in the second through-hole. Therefore, it is possible to accommodate the narrowing of the internal terminals of the multi-pole connector.

[0114] [Aspect 7] The second through hole has an inner opening that communicates with the internal space, The inner wall surface includes the bottom wall surface in which the inner opening is formed. The probe device according to embodiment 6, wherein the protruding portion has a stepped portion that abuts against the bottom wall surface.

[0115] According to embodiment 7, the stepped portion of the cylindrical member can regulate the amount (protrusion amount) by which the measuring pin protrudes from the conductive member. Furthermore, the stepped portion of the cylindrical member can regulate the amount of displacement of the end of the biasing member on the bottom wall side. As a result, the amount of expansion and contraction of the biasing member can be regulated.

[0116] [Aspect 8] The biasing member has a first end and a second end opposite to the first end, The aforementioned stepped portion is the first stepped portion, The aforementioned protruding portion further comprises a second stepped portion, The second stepped portion is located further from the bottom wall surface than the first stepped portion and is connected to the first end of the biasing member. The probe device according to embodiment 7, further comprising a stopper connected to the second end of the biasing member to restrict the position of the second end of the biasing member.

[0117] According to embodiment 8, by regulating the position of the second end of the biasing member with a stopper, the amount of expansion and contraction of the biasing member can be adjusted, thereby adjusting the magnitude of the load applied from the measuring pin to the electronic component. Specifically, by changing the stopper attached to the cylindrical member among several types of stoppers with different thicknesses, it is possible to adjust the magnitude of the load applied from the measuring pin to the electronic component.

[0118] [Aspect 9] The probe device according to any one of embodiments 1 to 8, wherein the insulator of the cable member is further inserted through the first through hole.

[0119] According to embodiment 9, the cylindrical member and the central conductor wire are insulated by an insulator. Therefore, more stable measurements become possible.

[0120] [Aspect 10] The aforementioned cylindrical member is A slit extending from the first end of the cylindrical member in the direction in which the first through hole extends, A bulge extending radially outward from the first end of the cylindrical member and A probe device according to any one of embodiments 1 to 9, having the following characteristics.

[0121] According to embodiment 10, the bulging portion can be brought into more stable contact with the inner wall surface of the second through hole, thereby making the cylindrical member and the conductive member more stable at the same potential.

[0122] [Aspect 11] The system comprises multiple sets of the cylindrical member, the cable member, the measuring pin, and the biasing member, The probe device according to any one of embodiments 1 to 10, wherein the conductive member has a number of second through holes equal to or greater than the number of sets including the cylindrical member, the cable member, the measuring pin, and the biasing member.

[0123] According to embodiment 11, the probe device according to the present invention can be applied to the inspection of electronic components such as a circuit board on which a multi-pole connector is mounted.

[0124] [Aspect 12] The biasing member is the first biasing member, The probe device is A housing connected to the conductive member and through which the cable member is inserted, A second biasing member surrounding the housing and A probe device according to any one of embodiments 1 to 11, further comprising the above.

[0125] According to embodiment 12, the second biasing member can increase the load applied from the conductive member to the electronic component. Therefore, the conductive member can be stably brought into contact with the target location during inspection of the electronic component. [Industrial applicability]

[0126] The present invention provides a probe device, which has industrial applicability. [Explanation of Symbols]

[0127] 40 Through-hole (First through-hole) 42a First end 42b Second end 100 Probe Device 102 Internal plunger (measuring pin) 104 Barrel (cylindrical member) 105 Internal spring (biasing member) 210 External plunger (conductive component) 211 Through hole (second through hole) 300 Coaxial Cable (Cable Components) 301 Center conductor wire 301a Tip 302 Insulator 303 Outer conductor

Claims

1. A cylindrical member having a first end, a second end opposite to the first end, and a first through hole extending from the first end to the second end, A cable member comprising a central conductor wire having a tip, an insulator covering the central conductor wire, and an outer conductor covering the insulator, wherein the diameter of the central conductor wire is smaller than the diameter of the first through-hole, the central conductor wire is inserted through the first through-hole, the tip of the central conductor wire protrudes from the first end of the cylindrical member, and the outer conductor is fixed to the cylindrical member, A measuring pin fixed to the tip of the central conductor wire, A conductive member having a second through-hole, through which the cylindrical member and the measuring pin are inserted, and through which the second through-hole slidably supports the cylindrical member, A biasing member is positioned radially outward of the cylindrical member and generates a biasing force that biases the measuring pin in a direction from inside the second through hole toward the outside of the conductive member. A probe device equipped with the following features.

2. The system further comprises an insulating member attached to the measuring pin and housed in the second through hole, The probe device according to claim 1, wherein the second through-hole slidably supports the cylindrical member and the insulating member.

3. The aforementioned measuring pin is The main body portion to which the insulating member is attached, The contact portion that contacts the insulating member It has, The probe device according to claim 2, wherein the insulating member slidably supports the main body.

4. The probe device according to claim 2, wherein the insulating member is fixed to the measuring pin.

5. The probe device according to any one of claims 1 to 4, wherein the cylindrical member is electrically conductive.

6. The conductive member has an inner wall surface that partitions the internal space, The aforementioned internal space is in communication with the second through-hole, The cylindrical member has a projection that protrudes from the second through hole into the internal space, The biasing member is located radially outward of the protruding portion, as described in any one of claims 1 to 4.

7. The second through hole has an inner opening that communicates with the internal space, The inner wall surface includes the bottom wall surface in which the inner opening is formed. The probe device according to claim 6, wherein the protruding portion has a stepped portion that abuts against the bottom wall surface.

8. The biasing member has a first end and a second end opposite to the first end, The aforementioned stepped portion is the first stepped portion, The aforementioned protruding portion further has a second stepped portion, The second stepped portion is located further from the bottom wall surface than the first stepped portion and is connected to the first end of the biasing member. The probe device according to claim 7, further comprising a stopper connected to the second end of the biasing member to restrict the position of the second end of the biasing member.

9. The probe device according to any one of claims 1 to 4, wherein the insulator of the cable member is further inserted through the first through hole.

10. The aforementioned cylindrical member is A slit extending from the first end of the cylindrical member in the direction in which the first through hole extends, A bulge extending radially outward from the first end of the cylindrical member and A probe device according to any one of claims 1 to 4, having the following features.

11. The system comprises multiple sets of the cylindrical member, the cable member, the measuring pin, and the biasing member, The probe device according to any one of claims 1 to 4, wherein the conductive member has a number of second through holes equal to or greater than the number of sets including the cylindrical member, the cable member, the measuring pin, and the biasing member.

12. The biasing member is the first biasing member, The probe device is A housing connected to the conductive member and through which the cable member is inserted, A second biasing member surrounding the housing and A probe device according to any one of claims 1 to 4, further comprising the above.

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