Processing unit

Abstract

To provide a processing apparatus capable of efficiently forming protective films on plate-shaped objects and performing cleaning. [Solution] The processing apparatus 1 comprises a cassette 10 for housing frame units, a gripping unit 40 for pulling out frame units from the cassette 10, a temporary placement unit 30 capable of temporarily placing the frame units pulled out by the gripping unit 40 in a first position and a second position, a first processing unit 51 for performing a first processing on plate-like objects, a second processing unit 52 for performing a second processing on plate-like objects, a first transport unit 61 for transporting frame units temporarily placed in the first position of the temporary placement unit 30 to the first processing unit 51, a second transport unit 62 for transporting frame units temporarily placed in the second position of the temporary placement unit 30 to the second processing unit 52, and a control unit 100.

Description

Technical Field

[0001] The present invention relates to a processing apparatus.

Background Art

[0002] As a method of dividing a semiconductor wafer having devices formed on its surface to obtain individual device chips, a method of irradiating a laser beam along a street set on a wafer which is a plate-like object is known.

[0003] When irradiating a wafer with a laser beam for processing, processing debris called debris is generated during processing. Since there is a risk of causing quality defects if this debris reattaches to the chip surface, a technique has been proposed in which a protective film is applied to the wafer surface and then laser processing is performed, and the protective film is washed after processing (see, for example, Patent Document 1 and Patent Document 2).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] Here, in a processing apparatus provided with a laser beam irradiation means and a protective film forming means as described in Patent Document 1, when the time required for forming the protective film and washing the protective film is longer than the time required for laser processing, there is a problem that a standby time occurs in the laser beam irradiation means and productivity decreases.

[0006] The present invention has been made in view of the above facts, and an object thereof is to provide a processing apparatus capable of efficiently forming and washing a protective film on a plate-like object. [Means for solving the problem]

[0007] To solve the above-mentioned problems and achieve the objective, the present invention provides a processing apparatus comprising: a storage unit for housing a frame unit in which a plate-like object is fixed to the opening of an annular frame via tape; a gripping unit for gripping the annular frame of the frame unit housed in the storage unit and pulling the frame unit out of the storage unit; a temporary storage unit disposed in the direction in which the gripping unit pulls out the frame unit, and capable of temporarily placing the frame unit pulled out by the gripping unit in a first position and a second position; a first processing unit for performing a predetermined first processing on the plate-like object; a second processing unit for performing a predetermined second processing on the plate-like object; a first transport unit for transporting the frame unit temporarily placed in the first position of the temporary storage unit to the first processing unit; a second transport unit for transporting the frame unit temporarily placed in the second position of the temporary storage unit to the second processing unit; and a control unit, characterized in that the first processing on the plate-like object in the first processing unit and the second processing on the plate-like object in the second processing unit can be performed in parallel.

[0008] In the above-mentioned processing apparatus, the first processing unit and the second processing unit are arranged adjacent to the temporary storage unit, and the first transport unit and the second transport unit may each have an upper arm configured to move in the vertical direction and a lower arm that transports the frame unit from the temporary storage unit to the first processing unit or the second processing unit.

[0009] In the processing apparatus described above, the control unit may, while processing in the first processing unit, have the frame unit wait at the first position of the temporary storage unit, while processing in the second processing unit, have the frame unit wait at the second position of the temporary storage unit, and after processing in the first processing unit is completed, hold the frame unit temporarily placed at the first position with the upper arm of the first transport unit and move it vertically upward, and transport the frame unit from the first processing unit to the first position of the temporary storage unit with the lower arm of the first transport unit, and after processing in the second processing unit is completed, hold the frame unit temporarily placed at the second position with the upper arm of the second transport unit and move it vertically upward, and transport the frame unit from the second processing unit to the second position of the temporary storage unit with the lower arm of the second transport unit.

[0010] In the above-mentioned processing apparatus, the first processing unit and the second processing unit may each include a spinner table for rotatably holding the plate-like object, and a nozzle for supplying at least one of a protective liquid for protecting the plate-like object and a cleaning liquid for cleaning the plate-like object held on the spinner table.

[0011] The apparatus may further include a tank for storing the protective liquid supplied from the nozzle to the plate-like object, and a remaining amount monitoring sensor for monitoring the remaining amount of protective liquid in the tank.

[0012] In the aforementioned processing apparatus, the remaining amount monitoring sensor may be a sonar sensor.

[0013] The apparatus may further include a detection unit for detecting the coating state of a protective film formed on a plate-like object by at least one of the first processing unit and the second processing unit. [Effects of the Invention]

[0014] This invention has the effect of enabling efficient formation of protective films and cleaning of plate-like objects.

Brief Description of the Drawings

[0015] [Figure 1] FIG. 1 is a plan view schematically showing a configuration example of a processing apparatus according to Embodiment 1. [Figure 2] FIG. 2 is a perspective view showing the processing apparatus shown in FIG. 1. [Figure 3] FIG. 3 is a plan view schematically showing a frame unit to which a plate-like object to be processed by the processing apparatus shown in FIG. 1 is fixed. [Figure 4] FIG. 4 is a perspective view schematically showing a configuration of a processing unit of the processing apparatus shown in FIG. 1. [Figure 5] FIG. 5 is a perspective view schematically showing a supply unit of the processing unit shown in FIG. 4. [Figure 6] FIG. 6 is a view schematically showing a detection unit of the processing unit shown in FIG. 4. [Figure 7] FIG. 7 is a side view schematically showing, in partial cross section, a state in which the processing unit shown in FIG. 4 performs processing on a plate-like object. [Figure 8] FIG. 8 is a perspective view showing a state in which a gripping unit of the processing apparatus shown in FIG. 1 has pulled out a frame unit to a first position. [Figure 9] FIG. 9 is a perspective view showing a state in which a lower arm of a first transfer unit of the processing apparatus shown in FIG. 8 has lifted a frame unit. [Figure 10] FIG. 10 is a perspective view showing a state in which a lower arm of a first transfer unit of the processing apparatus shown in FIG. 9 has transported a frame unit into a first processing unit. [Figure 11] FIG. 11 is a perspective view showing a state in which a gripping unit of the processing apparatus shown in FIG. 10 has pulled out a next frame unit to a second position. [Figure 12] FIG. 12 is a perspective view showing a state in which a lower arm of a second transfer unit of the processing apparatus shown in FIG. 11 has sucked and held a frame unit. [Figure 13]Figure 13 is a perspective view showing a state in which the lower arm of the second transfer unit of the processing apparatus shown in Figure 12 transfers the frame unit into the second processing unit, and the gripping unit further pulls out the next frame unit. [Figure 14] Figure 14 is a perspective view showing a state in which the gripping unit of the processing apparatus shown in Figure 13 has pulled out the frame unit to the first position. [Figure 15] Figure 15 is a perspective view showing a state in which the lower arm of the first transfer unit of the processing apparatus shown in Figure 14 has lifted the frame unit. [Figure 16] Figure 16 is a perspective view showing a state in which the gripping unit of the processing apparatus shown in Figure 15 has further pulled out the next frame unit to the second position. [Figure 17] Figure 17 is a perspective view showing a state in which the lower arm of the first transfer unit of the processing apparatus shown in Figure 16 has placed the frame unit in the first position and entered the first processing unit. [Figure 18] Figure 18 is a perspective view showing a state in which the upper arm of the first transfer unit of the processing apparatus shown in Figure 17 has lifted the frame unit in the first position. [Figure 19] Figure 19 is a perspective view showing a state in which the lower arm of the first transfer unit of the processing apparatus shown in Figure 18 transfers the frame unit that has undergone the first processing out of the first processing unit. [Figure 20] Figure 20 is a perspective view showing a state in which the lower arm of the first transfer unit of the processing apparatus shown in Figure 19 has placed the frame unit that has undergone the first processing in the first position. [Figure 21] Figure 21 is a perspective view showing a state in which the lower arm of the first transfer unit of the processing apparatus shown in Figure 20 enters the first processing unit, and the gripping unit transfers the frame unit in the first position that has undergone the first processing into the cassette. [Figure 22] Figure 22 is a perspective view showing a state in which the upper arm of the first transfer unit of the processing apparatus shown in Figure 21 has placed the frame unit in the first position. [Figure 23]Figure 23 is a perspective view showing the state in which the upper arm of the first transport unit of the processing device shown in Figure 22 is raised and the lower arm is positioned on the temporary storage unit. [Figure 24] Figure 24 is a perspective view showing the state in which the lower arm of the first transport unit of the processing device shown in Figure 23 is suction-holding the frame unit in the first position. [Figure 25] Figure 25 is a perspective view showing the state in which the lower arm of the first transport unit of the processing device shown in Figure 24 transports the frame unit into the first processing unit. [Figure 26] Figure 26 is a perspective view showing the state in which the upper arm of the second transport unit of the processing device shown in Figure 25 has raised the frame unit in the second position. [Figure 27] Figure 27 is a perspective view showing the state in which the lower arm of the second transport unit of the processing apparatus shown in Figure 26 transports the frame unit that has undergone the second processing to the outside of the second processing unit. [Figure 28] Figure 28 is a perspective view showing the lower arm of the second transport unit of the processing device shown in Figure 27 with the frame unit that has undergone the second processing placed in the second position. [Figure 29] Figure 29 is a perspective view showing the state in which the lower arm of the second transport unit of the processing device shown in Figure 28 enters the second processing unit and the gripping unit transports the frame unit in the second position, which has undergone the second processing, into the cassette. [Figure 30] Figure 30 is a perspective view showing the upper arm of the second transport unit of the processing device shown in Figure 29 with the frame unit placed in the second position. [Figure 31] Figure 31 is a perspective view showing the state in which the upper arm of the second transport unit of the processing device shown in Figure 30 is raised and the lower arm is sucking and holding the frame unit in the second position. [Figure 32] Figure 32 is a perspective view showing the state in which the lower arm of the second transport unit of the processing apparatus shown in Figure 31 is transporting the frame unit into the second processing unit. [Figure 33]Figure 33 is a perspective view showing the first and second processing units of the processing apparatus shown in Figure 32 applying the first and second processing to a plate-shaped object. [Figure 34] Figure 34 is a perspective view showing the state in which the first transport unit of the processing device shown in Figure 33 transports the frame unit that has undergone the first processing into the cassette. [Figure 35] Figure 35 is a perspective view showing the state in which the second transport unit of the processing device shown in Figure 34 transports the frame unit that has undergone the second processing into the cassette. [Figure 36] Figure 36 is a perspective view showing a modified apparatus according to Embodiment 1. [Modes for carrying out the invention]

[0016] Embodiments for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by those skilled in the art, and those that are substantially the same. In addition, the components described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the components can be made without departing from the spirit of the present invention.

[0017] [Embodiment 1] The processing apparatus according to Embodiment 1 of the present invention will be described with reference to the drawings. Figure 1 is a schematic plan view showing an example of the configuration of the processing apparatus according to Embodiment 1. Figure 2 is a perspective view showing the processing apparatus shown in Figure 1. Figure 3 is a schematic plan view showing a frame unit to which the plate-shaped object to be processed by the processing apparatus shown in Figure 1 is fixed.

[0018] (Plate-like object) The processing apparatus 1 shown in Figures 1 and 2 according to Embodiment 1 is a device for processing the plate-shaped object 200 shown in Figure 3. The plate-shaped object 200 to be processed by the processing apparatus 1 according to Embodiment 1 is a wafer such as a disc-shaped semiconductor wafer or optical device wafer with a substrate made of silicon, sapphire, gallium, etc. As shown in Figure 3, the plate-shaped object 200 comprises division lines 202 set in a grid pattern on its surface 201 and devices 203 formed in each region partitioned by the division lines 202.

[0019] Device 203 is, for example, an integrated circuit such as an IC (Integrated Circuit) or LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), a MEMS (Micro Electro Mechanical Systems), or a semiconductor memory (semiconductor storage device). In Embodiment 1, the plate-like object 200 is a processed wafer that has been divided into individual devices 203 along the division line 202. In this invention, the plate-like object 200 may be a wafer before it is divided into individual devices 203.

[0020] Furthermore, in Embodiment 1, as shown in Figure 3, a disc-shaped tape 211 with a larger diameter than the outer diameter of the plate-like object 200 is attached to the back surface 204 on the back side of the surface 201 of the plate-like object 200, and an annular frame 212 with an inner diameter larger than the outer diameter of the plate-like object 200 is attached to the outer edge of the tape 211, thereby constituting the frame unit 210 shown in Figure 3. In this way, the frame unit 210 is constructed by fixing the plate-like object 200 to the opening 213 on the inner circumference of the annular frame 212 via the tape 211. In Embodiment 1, the tape 211 is an ultraviolet-curing type UV tape whose adhesive strength decreases when irradiated with ultraviolet light.

[0021] (processing device) As shown in Figure 1, the processing apparatus 1 according to Embodiment 1 comprises a rectangular apparatus body 2, a cassette 10 which is a storage section, a cassette elevator 20, a temporary storage unit 30, a gripping unit 40, a first processing unit 51, a second processing unit 52, a first transport unit 61, a second transport unit 62, and a control unit 100. Hereinafter, the direction parallel to the horizontal direction and parallel to the longitudinal direction of the apparatus body 2 will be referred to as the first direction 301, and the direction parallel to the horizontal direction and parallel to the width direction of the apparatus body 2 will be referred to as the second direction 302. The first direction 301 and the second direction 302 are orthogonal to each other.

[0022] Cassette 10 is a storage container that houses multiple frame units 210 stacked on top of each other with spacing in the thickness direction of the plate-like object 200. Cassette 10 is installed on a cassette elevator 20 with an opening 11 that allows the frame units 210 to be inserted and removed, facing the other end of the first direction 301. The cassette elevator 20 is provided at one end of the device body 2 in the first direction 301, with the cassette 10 installed on its upper surface, and moves the cassette 10 up and down in a vertical direction perpendicular to both the first direction 301 and the second direction 302.

[0023] The temporary storage unit 30 is arranged such that the gripping unit 40 of the cassette 10 is positioned in the direction that pulls out the frame unit 210, and the frame unit 210 pulled out by the gripping unit 40 can be temporarily placed at a first position 31 and a second position 32. The temporary storage unit 30 is equipped with a pair of guide rails 33. The first position 31 is located in the center of the first direction 301 of the device body 2, and the second position 32 is located at the other end of the first direction 301 of the device body 2.

[0024] A pair of guide rails 33 are installed on the main body 2 of the device next to the first direction 301 of the cassette elevator 20, and are formed in a straight line parallel to the first direction 301, as shown in Figures 1 and 2. The pair of guide rails 33 are spaced apart in the second direction 302, and in Embodiment 1, they are positioned where both ends of the annular frame 212 of the frame unit 210, which is inserted into and removed from the cassette 10, are placed. The annular frame 212 of the frame unit 210 is slidably supported on the upper surface of the pair of guide rails 33.

[0025] The temporary storage unit 30 is positioned so that the gripping unit 40 pulls the frame unit 210 out of the cassette 10, with a pair of guide rails 33 positioned next to the first direction 301 of the cassette elevator 20. The temporary storage unit 30 temporarily places the frame unit 210 at a first position 31 on the guide rails 33 closer to the cassette elevator 20, and at a second position 32 on the guide rails 33 further away from the cassette elevator 20.

[0026] The gripping unit 40 grips the annular frame 212 of the frame unit 210 housed in the cassette 10 and pulls the frame unit 210 out of the cassette 10. The gripping unit 40 not only inserts and removes the frame unit 210 into and out of the cassette 10, but also moves the frame unit 210 along the guide rail 33.

[0027] As shown in Figures 1 and 2, the gripping unit 40 comprises a unit body 41, a first gripping portion 42, and a second gripping portion 43. The unit body 41 is positioned on the guide rail 33 and is formed in an arm shape with its longitudinal direction inclined with respect to both the first direction 301 and the second direction 302. The unit body 41 is moved along the longitudinal direction of the guide rail 33 by a driving means (not shown) from one end of the guide rail 33 closer to the cassette 10 to the center of the guide rail 33 in the longitudinal direction, and is also provided to be vertically movable on the guide rail 33.

[0028] The first gripping portion 42 and the second gripping portion 43 are provided at the upper end between the pair of guide rails 33 of the unit body 41 and are capable of gripping the annular frame 212 of the frame unit 210. The first gripping portion 42 is provided on the front end of the unit body 41 on the side closer to the cassette elevator 20. The second gripping portion 43 is provided on the front end of the unit body 41 on the side away from the cassette elevator 20.

[0029] The first processing unit 51 performs a first processing on the plate-shaped object 200, and the second processing unit 52 performs a second processing on the plate-shaped object 200. The first processing unit 51 is positioned next to the second direction 302 of the first position 31 on the guide rail 33 of the temporary storage unit 30, and the second processing unit 52 is positioned next to the second direction 302 of the second position 32 on the guide rail 33 of the temporary storage unit 30.

[0030] The processing units 51 and 52 are positioned adjacent to the temporary storage unit 30 by being located next to the first position 31 or the second position 32 in the second direction 302 on the guide rail 33 of the temporary storage unit 30. In Embodiment 1, the processing units 51 and 52 are identical in configuration except for their position, so the first processing unit 51 will be described as a representative example, and the same reference numerals will be used for the same parts of the second processing unit 52 as those of the first processing unit 51, and their description will be omitted.

[0031] As shown in Figure 2, the first processing unit 51 comprises an upper case 53 and a lower case 54 that can move up and down vertically. The lower case 54 is raised and lowered by a drive mechanism (not shown), and when raised, the upper opening 541 is closed by the upper case 53. When the lower case 54 is lowered, the upper opening 541 opens, allowing the frame unit 210 to be moved in and out through the opening 541.

[0032] Next, the configuration of the first processing unit 51 will be described. Figure 4 is a schematic perspective view showing the configuration of the processing unit of the processing apparatus shown in Figure 1. Figure 5 is a schematic perspective view showing the supply unit of the processing unit shown in Figure 4. Figure 6 is a schematic diagram showing the detection unit of the processing unit shown in Figure 4. Figure 7 is a schematic side view showing a partial cross-section of the processing unit shown in Figure 4 performing processing on a plate-shaped object.

[0033] In Embodiment 1, the first processing unit 51 and the second processing unit 52 apply a water-soluble resin 400 (shown in Figure 7, corresponding to a protective liquid) to the entire surface 201 of the plate-shaped object 200 of the frame unit 210 as the first and second processing steps. In Embodiment 1, the water-soluble resin 400 is a liquid water-soluble resin such as polyvinyl alcohol (PVA) or polyvinylpyrrolidone (PVP) (for example, HogoMax®, manufactured by Disco Corporation). The water-soluble resin 400 also contains an absorbent material that helps absorb laser light. Examples of this type of absorbent include 4,4'-dicarboxybenzophenone, benzophenone-4-carboxylic acid, 2-carboxyanthraquinone, 1,2-naphthalenedicarboxylic acid, 1,8-naphthalenedicarboxylic acid, 2,3-naphthalenedicarboxylic acid, 2,6-naphthalenedicarboxylic acid, 2,7-naphthalenedicarboxylic acid, and their sodium salts, potassium salts, ammonium salts, quaternary ammonium salts, etc., as well as sodium 2,6-anthraquinone disulfonate, sodium 2,7-anthraquinone disulfonate, ferulic acid, etc., which can be dissolved in a liquid resin and used. When the water-soluble resin 400 dries, it forms a protective film 401 (shown in Figure 6) that protects the surface 201 of the plate-like object 200.

[0034] The first processing unit 51 includes, in addition to cases 53 and 54, a spinner table 55, a nozzle 56, a supply unit 57, and a detection unit 58, as shown in Figure 4. The spinner table 55 is housed within the lower case 54, is disc-shaped, and has a holding surface 551 parallel to the horizontal direction for holding the plate-shaped object 200, which is made of porous ceramic or the like. The outer edge of the spinner table 55 is also provided with a clamp portion 552 capable of clamping the annular frame 212 of the frame unit 210.

[0035] Furthermore, the spinner table 55 is rotatable around an axis parallel to the vertical direction by a driving means (not shown). The spinner table 55 holds the plate-shaped object 200 placed on the holding surface 551 by suction via the tape 211, and clamps the annular frame 212 with the clamp portion 552. In this way, the spinner table 55 holds the plate-shaped object 200 in a rotatable manner.

[0036] The nozzle 56 is housed within the lower case 54 and is pivotably mounted around its base so as to span two positions: one where its tip faces the center of the holding surface 551 of the spinner table 55, and another where its tip is retracted from the holding surface 551 of the spinner table 55. When the nozzle 56 is positioned with its tip facing the center of the holding surface 551 of the spinner table 55, it supplies water-soluble resin 400 to a plate-shaped object 200 held by the spinner table 55.

[0037] The supply unit 57 supplies the water-soluble resin 400 to the nozzle 56. As shown in Figure 5, the supply unit 57 includes a tank 571 for storing the water-soluble resin 400 to be supplied from the nozzle 56 to the plate-shaped object 200, a pump (not shown) for sending the water-soluble resin 400 from the tank 571 toward the nozzle 56, and a remaining amount monitoring sensor 572 for monitoring the remaining amount of water-soluble resin 400 in the tank 571. The tank 571 is a container for storing the water-soluble resin 400.

[0038] The remaining amount monitoring sensor 572 is a well-known sonar sensor that monitors the remaining amount of water-soluble resin 400 in the tank 571 by detecting the height of the liquid level of the water-soluble resin 400 in the tank 571. In Embodiment 1, the remaining amount monitoring sensor 572 detects the height of the liquid level of the water-soluble resin 400 from above the tank 571, but in the present invention, the height of the liquid level of the water-soluble resin 400 in the tank 571 may be detected from both above and below the liquid level. The remaining amount monitoring sensor 572 outputs the detection result to the control unit 100. In the present invention, the remaining amount monitoring sensor 572 is not limited to a sonar sensor as long as it can detect the remaining amount of water-soluble resin 400 in the tank 571. For example, the remaining amount monitoring sensor 572 can use various known liquid level gauges such as electrode-type liquid level gauges or differential pressure-type liquid level gauges.

[0039] The detection unit 58 detects the coating state of the protective film 401 formed on the plate-shaped object 200, i.e., the coating state of the water-soluble resin 400 on the surface 201 of the plate-shaped object 200 held on the spinner table 55, after the water-soluble resin 400 has been applied to the surface 201 of the plate-shaped object 200 by the first processing unit 51 and the second processing unit 52. In Embodiment 1, the detection unit 58 is positioned above the spinner table 55 and is provided to be movable along the surface 201 of the plate-shaped object 200 held on the spinner table 55 by a driving means (not shown).

[0040] The detection unit 58 is a fluorescence detection device described in Japanese Patent Publication No. 2017-227532, etc. As shown in Figure 6, the detection unit 58 has an excitation light irradiation unit 581, a photomultiplier tube 582, a fluorescence transmission filter 583, and a reflector 584. The excitation light irradiation unit 581 irradiates the protective film 401 with excitation light α having a wavelength absorbed by the absorbent contained in the water-soluble resin 400. The photomultiplier tube 582 is equipped with a photodetector 585 that receives photoelectrons of fluorescence β emitted by the absorbent when irradiated with excitation light α. The fluorescence transmission filter 583 removes light of wavelengths other than fluorescence β emitted by the absorbent.

[0041] The mirror 584 has a reflective surface 586 that reflects the fluorescence β from the protective film 401 and directs it to the photomultiplier tube 582. The reflective surface 586 is part of the curved surface of a spheroid, the first focal point 587 of the spheroid is located in the part of the protective film 401 that is irradiated with excitation light α, and the second focal point 588 is located in the photodetector element 585 of the photomultiplier tube 582.

[0042] The detection unit 58 moves along the surface 201 of the plate-shaped object 200 held on the spinner table 55 by a driving means, irradiating the surface 201 of the plate-shaped object 200 held on the spinner table 55 with excitation light α, receiving fluorescence β with a photomultiplier tube 582, and linking the position of the plate-shaped object 200 with the amount of light received by the photomultiplier tube 582, and outputting this to the control unit 100, thereby detecting the coating state of the protective film 401 formed on the plate-shaped object 200.

[0043] In Embodiment 1, the detection unit 58 was positioned above the spinner tables 55 of the first processing unit 51 and the second processing unit 52. However, in the present invention, it may be positioned at any location other than the processing units 51 and 52.

[0044] The first processing unit 51, as described above, holds the back surface 204 of the plate-shaped object 200 by suction to the holding surface 551 of the spinner table 55 via the tape 211, and clamps the annular frame 212 with the clamping part 552. As shown in Figure 7, the first processing unit 51 supplies water-soluble resin 400 from the nozzle 56 to the center of the plate-shaped object 200 while rotating the spinner table 55 around its axis.

[0045] The supplied water-soluble resin 400 flows toward the outer circumference of the spinner table 55 due to centrifugal force from the rotation of the spinner table 55 around its axis, covering the entire surface 201 of the plate-like object 200. The water-soluble resin 400 dries and becomes a protective film 401 that protects the surface 201 of the plate-like object 200. After the coating with the water-soluble resin 400, the first processing unit 51 has the detection unit 58 irradiate the plate-like object 200 held on the spinner table 55 with excitation light α from the excitation light irradiation unit 581, while the photodetector element 585 of the photomultiplier tube 582 receives fluorescence β, and links the amount of light received by the photodetector element 585 of the photomultiplier tube 582 with the detection unit 58, and outputs it to the control unit 100.

[0046] The first transport unit 61 is for transporting the frame unit 210, which is temporarily placed at the first position 31 on the guide rail 33 of the temporary storage unit 30, to the first processing unit 51, and the second transport unit 62 is for transporting the frame unit 210, which is temporarily placed at the second position 32 on the guide rail 33 of the temporary storage unit 30, to the second processing unit 52. The first transport unit 61 is positioned above the first position 31 on the guide rail 33 of the temporary storage unit 30. The second transport unit 62 is positioned above the second position 32 on the guide rail 33 of the temporary storage unit 30.

[0047] In Embodiment 1, the transport units 61 and 62 are identical in configuration except for their placement and the position of the temporary placement unit 30 of the frame unit 210 to be transported on the guide rail 33. Therefore, the first processing unit 51 will be described as a representative example, and the same reference numerals will be used for the same parts of the second transport unit 62 as those of the first transport unit 61, and their description will be omitted.

[0048] As shown in Figure 2, the first transport unit 61 comprises an upper arm 63 and a lower arm 64. These arms 63 and 64 are configured to be movable in the vertical direction by a drive mechanism (not shown). The top dead center of the lower arm 64 is located above the top dead center of the gripping unit 40, and the top dead center of the upper arm 63 is located above the top dead center of the lower arm 64. Furthermore, the lower arm 64 is configured to be movable in a second direction 302 from a position on the guide rail 33 to a position on the spinner table 55 of the first processing unit 51 at its top dead center by a drive mechanism (not shown).

[0049] In Embodiment 1, arms 63 and 64 each comprise an arm body 65 that is H-shaped in plan view, and a suction holding part 66 provided at the tip (also called the outer edge) of the arm body 65 for suction holding the annular frame 212 of the frame unit 210. Arms 63 and 64 move up and down by a driving means between a bottom dead center and the aforementioned top dead center, where they can suction hold the annular frame 212 of the frame unit 210 at a first position 31 or a second position 32 on the guide rail 33 of the temporary placement unit 30.

[0050] The lower arm 64 of the first transport unit 61 suction-holds the annular frame 212 of the frame unit 210 in the suction-holding section 66 and moves up and down and in the second direction 302 to transport the frame unit 210 between the first position 31 on the guide rail 33 of the temporary storage unit 30 and the spinner table 55 of the first processing unit 51. That is, the lower arm 64 of the first transport unit 61 suction-holds the annular frame 212 of the frame unit 210 in the suction-holding section 66 and moves up and down and in the second direction 302 to transport the frame unit 210 from the temporary storage unit 30 to the first processing unit 51. The upper arm 63 of the first transport unit 61 suction-holds the annular frame 212 of the frame unit 210 in the suction-holding section 66 and moves up and down to transport the frame unit 210 between the first position 31 on the guide rail 33 of the temporary storage unit 30 and above the first position 31.

[0051] The lower arm 64 of the second transport unit 62 suction-holds the annular frame 212 of the frame unit 210 in the suction-holding section 66 and moves up and down and in the second direction 302, thereby transporting the frame unit 210 between the second position 32 on the guide rail 33 of the temporary storage unit 30 and the spinner table 55 of the second processing unit 52. That is, the lower arm 64 of the second transport unit 62 suction-holds the annular frame 212 of the frame unit 210 in the suction-holding section 66 and moves up and down and in the second direction 302, thereby transporting the frame unit 210 from the temporary storage unit 30 to the second processing unit 52. The upper arm 63 of the second transport unit 62 suction-holds the annular frame 212 of the frame unit 210 in the suction-holding section 66 and moves up and down, thereby transporting the frame unit 210 between the second position 32 on the guide rail 33 of the temporary storage unit 30 and above the second position 32.

[0052] The control unit 100 controls each component of the processing unit 1 to cause the processing unit 1 to perform processing operations on the plate-shaped object 200. The control unit 100 is a computer having an arithmetic processing unit with a microprocessor such as a CPU (central processing unit), a storage device with memory such as ROM (read-only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit 100 performs arithmetic processing according to the computer program stored in the storage device and outputs control signals for controlling the processing unit 1 to each component of the processing unit 1 via the input / output interface device.

[0053] The control unit 100 is connected to a display unit (not shown) which consists of a liquid crystal display device that displays the status of the machining operation and captured images, an input unit (not shown) used by the operator to register machining conditions, and a notification unit (not shown). The input unit includes a touch panel provided on the display unit. The notification unit notifies the operator by emitting at least one of sound and / or light.

[0054] (Processing operation) Next, the processing operation of the plate-shaped object 200 by the processing apparatus 1 according to Embodiment 1 will be described. Figure 8 is a perspective view showing the state in which the gripping unit of the processing apparatus shown in Figure 1 has pulled out the frame unit to the first position. Figure 9 is a perspective view showing the state in which the lower arm of the first transport unit of the processing apparatus shown in Figure 8 has raised the frame unit. Figure 10 is a perspective view showing the state in which the lower arm of the first transport unit of the processing apparatus shown in Figure 9 has transported the frame unit into the first processing unit. Figure 11 is a perspective view showing the state in which the gripping unit of the processing apparatus shown in Figure 10 has pulled out the next frame unit to the second position. Figure 12 is a perspective view showing the state in which the lower arm of the second transport unit of the processing apparatus shown in Figure 11 is suction-holding the frame unit. Figure 13 is a perspective view showing the state in which the lower arm of the second transport unit of the processing apparatus shown in Figure 12 has transported the frame unit into the second processing unit and the gripping unit has pulled out yet the next frame unit. Figure 14 is a perspective view showing the state in which the gripping unit of the processing apparatus shown in Figure 13 has pulled out the frame unit to the first position. Figure 15 is a perspective view showing the lower arm of the first transport unit of the processing device shown in Figure 14 raising the frame unit. Figure 16 is a perspective view showing the gripping unit of the processing device shown in Figure 15 further pulling out the next frame unit to the second position. Figure 17 is a perspective view showing the lower arm of the first transport unit of the processing device shown in Figure 16 placing the frame unit in the first position and entering the first processing unit. Figure 18 is a perspective view showing the upper arm of the first transport unit of the processing device shown in Figure 17 raising the frame unit in the first position. Figure 19 is a perspective view showing the lower arm of the first transport unit of the processing device shown in Figure 18 transporting the frame unit that has undergone the first processing to the outside of the first processing unit. Figure 20 is a perspective view showing the lower arm of the first transport unit of the processing device shown in Figure 19 placing the frame unit that has undergone the first processing to the first position. Figure 21 is a perspective view showing the state in which the lower arm of the first transport unit of the processing device shown in Figure 20 enters the first processing unit and the gripping unit transports the frame unit in the first position, which has undergone the first processing, into the cassette.Figure 22 is a perspective view showing the upper arm of the first transport unit of the processing device shown in Figure 21 with the frame unit placed in the first position. Figure 23 is a perspective view showing the upper arm of the first transport unit of the processing device shown in Figure 22 raised and the lower arm positioned on the temporary storage unit. Figure 24 is a perspective view showing the lower arm of the first transport unit of the processing device shown in Figure 23 holding the frame unit in the first position by suction. Figure 25 is a perspective view showing the lower arm of the first transport unit of the processing device shown in Figure 24 transporting the frame unit into the first processing unit. Figure 26 is a perspective view showing the upper arm of the second transport unit of the processing device shown in Figure 25 with the frame unit in the second position raised. Figure 27 is a perspective view showing the lower arm of the second transport unit of the processing device shown in Figure 26 transporting the frame unit that has undergone the second processing to the outside of the second processing unit. Figure 28 is a perspective view showing the lower arm of the second transport unit of the processing device shown in Figure 27 with the frame unit that has undergone the second processing placed in the second position. Figure 29 is a perspective view showing the state in which the lower arm of the second transport unit of the processing device shown in Figure 28 has entered the second processing unit and the gripping unit is transporting the frame unit in the second position, which has undergone the second processing, into the cassette. Figure 30 is a perspective view showing the state in which the upper arm of the second transport unit of the processing device shown in Figure 29 has placed the frame unit in the second position. Figure 31 is a perspective view showing the state in which the upper arm of the second transport unit of the processing device shown in Figure 30 has risen and the lower arm is sucking and holding the frame unit in the second position. Figure 32 is a perspective view showing the state in which the lower arm of the second transport unit of the processing device shown in Figure 31 is transporting the frame unit into the second processing unit. Figure 33 is a perspective view showing the state in which the first processing unit and the second processing unit of the processing device shown in Figure 32 are performing the first processing and second processing on a plate-like object. Figure 34 is a perspective view showing the state in which the first transport unit of the processing device shown in Figure 33 is transporting the frame unit, which has undergone the first processing, into the cassette. Figure 35 is a perspective view showing the state in which the second transport unit of the processing device shown in Figure 34 transports the frame unit that has undergone the second processing into the cassette.

[0055] The processing unit 1 has a cassette 6 containing multiple frame units 210 placed on a cassette elevator 50, and the control unit 100 receives processing conditions input by the operator from an input unit, etc., and stores the processing conditions in a storage device. When the control unit 100 receives a processing start instruction input by the operator from an input unit, etc., the processing unit 1 starts the processing operation.

[0056] During the processing operation, the processing unit 1 controls the lower case 54 of the processing units 51 and 52 by the control unit 100, opening the opening 541 of the lower case 54, and controls the cassette elevator 20 to position the lower surface of the annular frame 212 of the frame unit 210 (hereinafter referred to as reference numeral 210-1), which is to be first transported out of the cassette 10, on the same plane as the upper surface of the guide rail 33 of the temporary storage unit 30. During the processing operation, the processing unit 1 controls the gripping unit 40 by the control unit 100, and the first gripping part 42 of the gripping unit grips the annular frame 212 of the frame unit 210-1. During the processing operation, the processing unit 1 controls the gripping unit 40 by the control unit 100, moving the gripping unit 40 in the first direction 301, and positions the frame unit 210-1 at the first position 31 on the guide rail 33 of the temporary storage unit 30, as shown in Figure 8.

[0057] During processing, the processing unit 1 controls the first transport unit 61 with the control unit 100, which uses the suction holding part 66 of the lower arm 64 of the first transport unit 61 to suction and hold the annular frame 212 of the frame unit 210-1 at the first position 31, thereby raising the lower arm 64 of the first transport unit 61 to the top dead center, as shown in Figure 9. During processing, the processing unit 1 controls the first transport unit 61 with the control unit 100, which uses the lower arm 64 of the first transport unit 61 to transport the frame unit 210-1 into the first processing unit 51, as shown in Figure 10.

[0058] During the processing operation, the processing unit 1 controls the cassette elevator 20 via the control unit 100 to position the lower surface of the annular frame 212 of the frame unit 210 (hereinafter referred to as reference numeral 210-2), which will be next unloaded from the cassette 10, on the same plane as the upper surface of the guide rail 33 of the temporary storage unit 30. During the processing operation, the processing unit 1 controls the gripping unit 40 via the control unit 100 to grip the annular frame 212 of the frame unit 210-2 inside the cassette 10 with the first gripping part 42 of the gripping unit 40.

[0059] During the processing operation, the processing unit 1 controls the first transport unit 61 via the control unit 100 to place the plate-shaped object 200 of the frame unit 210-1 onto the spinner table 55 of the first processing unit 51. Then, as shown in Figure 11, the lower arm 64 is positioned on the guide rail 33, and the lower case 54 of the first processing unit 51 is raised. During the processing operation, the processing unit 1 controls the first processing unit 51 via the control unit 100 to begin the first processing of the plate-shaped object 200, that is, coating it with water-soluble resin 400.

[0060] During the processing operation, the processing unit 1 controls the gripping unit 40 via the control unit 100, and as shown in Figure 11, the gripping unit 40 transports the frame unit 210-2 to the second position 32 on the guide rail 33 of the temporary placement unit 30. When transporting the frame unit 210-2 from inside the cassette 10 to the second position 32, the processing unit 1 grips the annular frame 212 of the frame unit 210-2 with the first gripping part 42 of the gripping unit, moves in the first direction 301, and temporarily positions the frame unit 210-2 at the first position 31.

[0061] After releasing the grip of the first gripping portion 42 of the gripping unit 40, the processing unit 1 raises the gripping unit 40 once, then moves it toward the cassette 10, and lowers the gripping unit 40 on the cassette 10 side of the frame unit 210-2 at the first position 31. The processing unit 1 grips the annular frame 212 of the frame unit 210-2 with the second gripping portion 43 of the gripping unit, moves in the first direction 301, and positions the frame unit 210-2 at the second position 32.

[0062] During the processing operation, the processing unit 1 controls the gripping unit 40 via the control unit 100 to move the gripping unit 40 in the first direction 301, retracting it from the frame unit 210-2 at the second position 32. During the processing operation, the processing unit 1 controls the second transport unit 62 via the control unit 100 to lower the lower arm 64 of the second transport unit 62, as shown in Figure 12, and the suction holding part 66 of the lower arm 64 of the second transport unit 62 suction-holds the annular frame 212 of the frame unit 210-1 at the second position 32.

[0063] During processing, the processing unit 1 controls the second transport unit 62 via the control unit 100, and as shown in Figure 13, the lower arm 64 transports the frame unit 210-2 into the second processing unit 52. Also during processing, the processing unit 1 controls the cassette elevator 20 via the control unit 100, and positions the lower surface of the annular frame 212 of the frame unit 210 (hereinafter referred to as reference numeral 210-3) to be unloaded from the cassette 10 on the same plane as the upper surface of the guide rail 33 of the temporary storage unit 30.

[0064] During processing, the processing unit 1 controls the gripping unit 40 with the control unit 100, and the first gripping portion 42 of the gripping unit grips the annular frame 212 of the frame unit 210-3. During processing, the processing unit 1 controls the gripping unit 40 with the control unit 100, and moves the gripping unit 40 in the first direction 301, thereby transporting the frame unit 210-3 outside the cassette 10, as shown in Figure 13.

[0065] During the transport operation, as shown in Figure 14, the control unit 100 controls the second transport unit 62 to place the frame unit 210-2 on the spinner table 55 of the second processing unit 52. During the processing operation, the control unit 100 controls the gripping unit 40 to position the frame unit 210-3 at the first position 31 on the guide rail 33 of the temporary placement unit 30.

[0066] Thus, the processing unit 1 has the control unit 100 wait at the first position 31 on the guide rail 33 of the temporary storage unit 30 while the first processing unit 51 is performing its first processing. During the processing operation, the processing unit 1 has the control unit 100 control the first transport unit 61, and as shown in Figure 14, the suction holding part 66 of the lower arm 64 of the first transport unit 61 holds the annular frame 212 of the frame unit 210-3 at the first position 31 by suction.

[0067] During processing, the processing unit 1 controls the first transport unit 61 via the control unit 100 to raise the lower arm 64 of the first transport unit 61 to its top dead center, as shown in Figure 15. During processing, the processing unit 1 controls the second transport unit 62 via the control unit 100 to position the lower arm 64 of the second transport unit 62 on the guide rail 33.

[0068] During the processing operation, the processing unit 1 controls the cassette elevator 20 via the control unit 100 to position the lower surface of the annular frame 212 of the frame unit 210 (hereinafter referred to as reference numeral 210-4), which will be unloaded from the cassette 10, on the same plane as the upper surface of the guide rail 33 of the temporary storage unit 30. During the processing operation, the processing unit 1 controls the gripping unit 40 via the control unit 100 to grip the annular frame 212 of the frame unit 210-4 with the first gripping part 42 of the gripping unit 40.

[0069] In the processing operation, the processing device 1 has a control unit 100 that controls the second processing unit 52 to raise the lower case 54, and the second processing unit 52 starts the second processing of the plate-shaped object 200, that is, coating with water-soluble resin 400. In this way, in the processing operation, the processing device 1 can carry out the first processing of the plate-shaped object 200 in the first processing unit 51 and the second processing of the plate-shaped object 200 in the second processing unit 52 in parallel, as shown in Figure 16.

[0070] During the processing operation, the processing unit 1 controls the gripping unit 40 with the control unit 100 to position the frame unit 210-4 at the second position 32 on the guide rail 33 of the temporary storage unit 30, as shown in Figure 16. In this way, the processing unit 1 has the frame unit 210-4 waiting at the second position 32 on the guide rail 33 of the temporary storage unit 30 while the control unit 100 is performing the second processing of the second processing unit 52.

[0071] During the processing operation, once the first processing of the plate-shaped object 200 in the first processing unit 51 is completed, the control unit 100 controls the first processing unit 51 to lower the lower case 54. During the processing operation, the control unit 100 controls the first transport unit 61 to lower the lower arm 64 of the first transport unit 61 to place the frame unit 210-3 in the first position 31, and then raises the lower arm 64 of the first transport unit 61 to move it into the first processing unit 51 as shown in Figure 17.

[0072] During the processing operation, the processing unit 1 controls the first transport unit 61 with the control unit 100, and after the suction holding part 66 of the upper arm 63 of the first transport unit 61 holds the annular frame 212 of the frame unit 210-3 at the first position 31, the upper arm 63 is raised as shown in Figure 18. During the processing operation, the processing unit 1 controls the first transport unit 61 with the control unit 100, and as shown in Figure 19, the upper arm 63 of the first transport unit 61 is positioned at the top dead center, and the annular frame 212 of the frame unit 210-1 inside the first processing unit 51 is held by suction holding part 66 of the lower arm 64 of the first transport unit 61, and the frame unit 210-1 is transported outside the first processing unit 51.

[0073] In the processing operation, the processing unit 1 controls the first transport unit 61 with the control unit 100 to position the frame unit 210-1, which has undergone the first processing in the first processing unit 51, at the first position 31, as shown in Figure 20. After the first processing in the first processing unit 51 is completed by the control unit 100, the processing unit 1 holds the frame unit 210-3, which has been temporarily placed at the first position 31, with the upper arm 63 of the first transport unit 61 and moves it vertically upward, and then transports the frame unit 210-1 from the first processing unit 51 to the first position 31 of the temporary placement unit 30 with the lower arm 64 of the first transport unit 61.

[0074] During the processing operation, the processing unit 1 controls the gripping unit 40 and the first transport unit 61, and as shown in Figure 21, the gripping unit 40 transports the frame unit 210-1, which has undergone the first processing in the first processing unit 51 at the first position 31, into the cassette 10, and moves the lower arm 64 of the first transport unit 61 into the first processing unit 51. During the processing operation, the processing unit 1 controls the first transport unit 61, and as shown in Figure 22, lowers the upper arm 63 of the first transport unit 61 to place the frame unit 210-3 at the first position 31 on the guide rail 33.

[0075] During the processing operation, once the second processing of the plate-shaped object 200 in the second processing unit 52 is completed, the control unit 100 controls the second processing unit 52 to lower the lower case 54. During the processing operation, the control unit 100 controls the first transport unit 61 to raise the upper arm 63 of the first transport unit 61 to its top dead center, as shown in Figure 23, and also positions the lower arm 64 of the first transport unit 61 at the top dead center on the guide rail 33 outside the first processing unit 51.

[0076] During the processing operation, the processing unit 1 controls the first transport unit 61 via the control unit 100, lowering the lower arm 64 of the first transport unit 61 as shown in Figure 24, and using the suction holding part 66 of the lower arm 64 of the first transport unit 61 to suction and hold the annular frame 212 of the frame unit 210-3 at the first position 31. During the processing operation, the processing unit 1 controls the second transport unit 62 via the control unit 100, moving the lower arm 64 of the second transport unit 61 into the second processing unit 52 as shown in Figure 24.

[0077] During processing, the processing unit 1 controls the first transport unit 61 with the control unit 100, and as shown in Figure 25, the lower arm 64 transports the frame unit 210-3 into the first processing unit 51. During processing, the processing unit 1 controls the second transport unit 62 with the control unit 100, and as shown in Figure 25, the upper arm 63 of the second transport unit 62 is lowered, and the suction holding part 66 of the upper arm 63 of the second transport unit 62 suction holds the annular frame 212 of the frame unit 210-4 at the second position 32.

[0078] Furthermore, during processing, the processing unit 1 controls the second transport unit 62 via the control unit 100, and as shown in Figure 25, the suction holding portion 66 of the lower arm 64 of the second transport unit 62 holds the annular frame 212 of the frame unit 210-2 inside the second processing unit 52 by suction. Also during processing, the processing unit 1 controls the gripping unit 40 via the control unit 100, and moves the gripping unit 40 away from the cassette 10.

[0079] During processing, the processing unit 1 controls the first transport unit 61 via the control unit 100, and as shown in Figure 26, the lower arm 64 of the first transport unit 61 transports the frame unit 210-3 into the first processing unit 51. During processing, the processing unit 1 controls the second transport unit 62 via the control unit 100, and as shown in Figure 26, the upper arm 63 of the second transport unit 62 is raised to its top dead center. Also during processing, the processing unit 1 controls the gripping unit 40 via the control unit 100, and as shown in Figure 26, the gripping unit 40 is positioned at the center of the longitudinal direction of the guide rail 33.

[0080] During the processing operation, as shown in Figure 27, the processing unit 1 controls the first transport unit 61 and the second transport unit 62 via the control unit 100 to place the plate-shaped object 200 of the frame unit 210-3 onto the spinner table 55 of the first processing unit 51, and the lower arm 64 of the second transport unit 62 transports the frame unit 210-2 outside the second processing unit 52. During the processing operation, the processing unit 1 controls the second transport unit 62 via the control unit 100 to position the frame unit 210-2, which has undergone the second processing in the second processing unit 52, at the second position 32, as shown in Figure 28.

[0081] Thus, after the control unit 100 completes the second processing in the second processing unit 52, the processing unit 1 holds the frame unit 210-4, which is temporarily placed at the second position 32, with the upper arm 63 of the second transport unit 62 and moves it vertically upward, and then transports the frame unit 210-2 from the second processing unit 52 to the second position 32 of the temporary placement unit 30 with the lower arm 64 of the second transport unit 62. During the processing operation, the processing unit 1 controls the gripping unit 40 with the control unit 100, and after the annular frame 212 of the frame unit 210-2 at the second position 32 is gripped by the second gripping part 43, the processing unit 1 moves the frame unit 210-2 toward the cassette 10 as shown in Figure 29. Also during the processing operation, the processing unit 1 controls the second transport unit 62 with the control unit 100, and moves the lower arm 64 of the second transport unit 62 into the second processing unit 52 as shown in Figure 29.

[0082] During the processing operation, the processing unit 1 controls the gripping unit 40 via the control unit 100 to position the frame unit 210-2 at the first position 31, as shown in Figure 30, and releases the grip of the second gripping part 43. Also during the processing operation, the processing unit 1 controls the second transport unit 62 via the control unit 100 to lower the upper arm 63 of the second transport unit 62, placing the frame unit 210-4 at the second position 32, as shown in Figure 30.

[0083] Furthermore, during the processing operation, the control unit 100 raises the lower case 54 of the first processing unit 51. During the processing operation, the control unit 100 controls the first processing unit 51, and the first processing unit 51 starts the first processing of the plate-shaped object 200, that is, coating with water-soluble resin 400.

[0084] During the processing operation, the processing unit 1 controls the gripping unit 40 via the control unit 100, which first raises the gripping unit 40, then moves it away from the cassette 10, and lowers the gripping unit 40 on the side further from the cassette 10 than the frame unit 210-2 at the first position 31, as shown in Figure 31. Also during the processing operation, the processing unit 1 controls the second transport unit 62 via the control unit 100, which uses the suction holding part 66 of the lower arm 64 of the second transport unit 62 to suction and hold the annular frame 212 of the frame unit 210-4 at the second position 32, as shown in Figure 31.

[0085] During processing, the processing unit 1 controls the gripping unit 40 with the control unit 100, which grips the annular frame 212 of the frame unit 210-2 with the first gripping part 42 of the gripping unit, moves in the first direction 301, and transports the frame unit 210-2 into the cassette 10 as shown in Figure 32. Also during processing, the processing unit 1 controls the second transport unit 62 with the control unit 100, which transports the frame unit 210-4 into the second processing unit 52 with the lower arm 64 of the second transport unit 62 as shown in Figure 32.

[0086] During processing, the processing unit 1 controls the second transport unit 62 via the control unit 100 to place the plate-shaped object 200 of the frame unit 210-4 onto the spinner table 55 of the second processing unit 52. After that, the lower arm 64 of the second transport unit 62 is positioned on the guide rail 33, and the lower case 54 of the second processing unit 52 is raised as shown in Figure 33.

[0087] In the processing operation, the processing device 1 has a control unit 100 that controls the second processing unit 52, which then starts the second processing of the plate-shaped object 200, namely, coating with water-soluble resin 400. Thus, in the processing operation, as shown in Figure 33, the processing device 1 can perform the first processing on the plate-shaped object 200 in the first processing unit 51 and the second processing on the plate-shaped object 200 in the second processing unit 52 in parallel.

[0088] In the processing operation, once the first processing in the first processing unit 51 is completed, the control unit 100 controls the first transport unit 61 and the gripping unit 40 to position the frame unit 210-3 at the first position 31, as shown in Figure 34, and then transport it into the cassette 10. In the processing operation, once the second processing in the second processing unit 52 is completed, the control unit 100 controls the second transport unit 62 and the gripping unit 40 to position the frame unit 210-4 at the second position 32, as shown in Figure 35, and then transport it into the cassette 10.

[0089] In Embodiment 1, during processing, the control unit 100 calculates the remaining amount of water-soluble resin 400 in the tank 571 based on the detection result of the remaining amount monitoring sensor 572, and when the calculated remaining amount of water-soluble resin 400 falls below a predetermined amount, the device notifies the operator by activating an alarm unit. Also in Embodiment 1, during processing, the control unit 100 calculates the coating state of the protective film 401 (for example, the ratio of the area of ​​the protective film 401 on the surface 201 to the area of ​​the surface 201 of the plate-shaped object 200, the thickness of the protective film 401, the presence or absence of bubbles, etc.) from information linked from the position of the plate-shaped object 200 from the detection unit 58 and the amount of light received by the photomultiplier tube 582, and the calculation result may be stored linked to the frame unit 210, and when the calculated coating state falls below a predetermined value, the device notifies the operator by activating an alarm unit.

[0090] As described above, the processing apparatus 1 according to Embodiment 1 comprises a plurality of processing units 51 and 52, each of which performs the formation of the protective film 401. As a result, the processing apparatus 1 according to Embodiment 1 has the effect of efficiently forming the protective film 401 on the plate-shaped object 200.

[0091] [Variation] A modified apparatus 1 according to Embodiment 1 will be described based on the drawings. Figure 36 is a perspective view showing a modified apparatus according to Embodiment 1. In Figure 36, the same reference numerals are used for parts that are the same as in Embodiment 1, and their descriptions are omitted.

[0092] The processing apparatus 1 according to a modified embodiment of Embodiment 1 is the same as Embodiment 1, except that the cassette elevator 20 is equipped with an inspection cassette 12 that accommodates only one frame unit 210, as shown in Figure 36. The inspection cassette 12 is installed on top of the cassette elevator 20, and the upper cassette 10 is placed on it. The frame unit 210 is transported between the cassette 10 and the inspection cassette 12 by the lifting and lowering operation of the cassette elevator 20 and the loading and unloading operation of the frame unit 210 by the gripping unit 40.

[0093] The inspection cassette 12 also incorporates a heating table for heating and drying the protective film 401 formed on the plate-like object 200 of the frame unit 210, and an ultraviolet irradiation unit for irradiating the frame unit 210 with ultraviolet light to reduce the adhesive strength of the tape 211. In a modified example, the ultraviolet irradiation unit may irradiate the plate-like object 200 of the frame unit 210 with ultraviolet light before the first and second treatments by the processing units 51 and 52, or it may heat the plate-like object 200 of the frame unit 210 after the first and second treatments by the processing units 51 and 52 with the heating unit to dry the protective film 401, and then irradiate with ultraviolet light to reduce the adhesive strength of the tape 211.

[0094] The modified apparatus 1 comprises a plurality of processing units 51, 52, and each processing unit 51, 52 performs the formation of the protective film 401. Therefore, similar to Embodiment 1, it has the effect of efficiently forming the protective film 401 on the plate-shaped object 200.

[0095] It should be noted that the present invention is not limited to the embodiments described above. That is, it can be implemented with various modifications without departing from the core of the present invention. For example, in the present invention, processing units 51 and 52 may perform cleaning as the first and second processing on the plate-like object 200, that is, they may supply a cleaning solution for cleaning the plate-like object 200 to the surface 201 of the plate-like object 200 and clean the surface 201 of the plate-like object 200.

[0096] Furthermore, in the present invention, the processing units 51 and 52 may be equipped with multiple nozzles 56, enabling them to supply both the water-soluble resin 400 and the cleaning solution to the plate-shaped object 200. That is, the nozzles 56 supply at least one of the water-soluble resin 400 that protects the plate-shaped object 200 and the cleaning solution that cleans the plate-shaped object 200 to the plate-shaped object 200 held on the spinner table 55.

[0097] Furthermore, in addition to the temporary storage unit 30 being equipped with guide rails 33, the present invention may also be configured to include two temporary storage tables on which frame units 210, on which plate-shaped objects 200 are fixed, are placed. [Explanation of Symbols]

[0098] 1 Processing Unit 10 Cassettes (Storage Compartments) 30 Temporary placement units 31 First position 32 Second position 40 Gripping Units 51 First Processing Unit 52 Second Processing Unit 55 Spinner Table 56 nozzles 58 detection units 61 First transport unit 62 Second transport unit 63 Upper Arm 64 Lower Arm 100 control units 200 Plate-like material 210, 210-1, 210-2, 210-3, 210-4 Frame Unit 211 Tape 212 Ring Frame 213 Opening 400 Water-soluble resin (protective liquid) 401 Protective film 571 Tank 572 Battery Level Monitoring Sensor

Claims

1. Processing apparatus, A housing section that accommodates a frame unit in which a plate-like object is fixed to the opening of an annular frame via tape, A gripping unit that grips the annular frame of the frame unit housed in the housing and pulls the frame unit out of the housing, The gripping unit is arranged in a direction that pulls out the frame unit, and the temporary placement unit is capable of temporarily placing the frame unit pulled out by the gripping unit into a first position and a second position, A first processing unit that applies a predetermined first processing to a plate-shaped object, A second processing unit that applies a predetermined second processing to a plate-shaped object, A first transport unit for transporting the frame unit temporarily placed at the first position of the temporary placement unit to the first processing unit, A second transport unit for transporting the frame unit temporarily placed in the second position on the temporary storage unit to the second processing unit, It includes a control unit, An apparatus characterized in that it is possible to perform a first treatment on a plate-like material in the first processing unit and a second treatment on a plate-like material in the second processing unit in parallel.

2. The first processing unit and the second processing unit are It is installed adjacent to the temporary storage unit, The first transport unit and the second transport unit are, respectively, An upper arm configured to be movable in the vertical direction, The processing apparatus according to claim 1, further comprising a lower arm for transporting a frame unit from the temporary storage unit to the first processing unit or the second processing unit.

3. The control unit is, During processing in the first processing unit, The frame unit is placed in the first position of the temporary placement unit, During processing in the second processing unit, The frame unit is placed in standby position at the second position of the temporary placement unit. After processing in the first processing unit is completed, The frame unit temporarily placed in the first position is held by the upper arm of the first transport unit and moved vertically upward. The lower arm of the first transport unit transports the frame unit from the first processing unit to the first position of the temporary storage unit. After processing in the second processing unit is completed, The frame unit temporarily placed in the second position is held by the upper arm of the second transport unit and moved vertically upward. The lower arm of the second transport unit transports the frame unit from the second processing unit to the second position of the temporary storage unit, characterized in that The apparatus according to claim 1 or claim 2.

4. The first processing unit and the second processing unit are, respectively, A spinner table that rotatably holds the plate-shaped object, The apparatus according to claim 1 or claim 2, characterized by comprising a nozzle for supplying at least one of a protective liquid and a cleaning liquid to a plate-shaped object held on the spinner table.

5. A tank for storing the protective liquid supplied from the nozzle to the plate-shaped object, The apparatus according to claim 4, further comprising a remaining amount monitoring sensor for monitoring the remaining amount of protective liquid in the tank.

6. The processing apparatus according to claim 5, wherein the remaining amount monitoring sensor is a sonar sensor.

7. The apparatus according to claim 4, further comprising a detection unit for detecting the coating state of a protective film formed on a plate-like object by at least one of the first processing unit and the second processing unit.

Images