Switching device and semiconductor processing system

Abstract

We provide technology for opening and closing openings. [Solution] An opening and closing device for opening and closing a plurality of first openings that connect a first chamber and a plurality of second chambers adjacent to the first chamber, or a second opening that connects the first chamber to the outside, the device having a movable body that moves on a planar motor having coils arranged in the first chamber, and is movable between a position that closes one of the plurality of first openings and the second openings and a position that closes the other openings, and which transports a valve body that closes either opening, the movable body moving on the planar motor by a magnetic field generated by the coils, and opening and closing the opening.

Description

Technical Field

[0001] The present disclosure relates to an opening / closing device and a semiconductor processing system.

Background Art

[0002] A transfer chamber provided with an opening / closing device that can be opened and closed between a processing chamber and a transfer chamber is known.

[0003] Patent Document 1 discloses semiconductor processing equipment that transports a substrate using a planar motor.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] On one aspect, the present disclosure provides a technique for opening and closing an opening.

Means for Solving the Problems

[0006] In order to solve the above problems, according to one aspect, there is provided an opening / closing device that opens and closes a plurality of first openings respectively connecting a first chamber and a plurality of second chambers adjacent to the first chamber, or a second opening connecting the first chamber and the outside, the opening / closing device having a moving body that moves on a planar motor having a coil arranged in the first chamber and transports a valve body that can move between a position closing one opening and a position closing another opening among the plurality of first openings and the second opening, the moving body moving the moving body on the planar motor by a magnetic field generated by the coil to open and close the opening.

Effects of the Invention

[0007] From one perspective, it is possible to provide a technology for opening and closing an opening. [Brief explanation of the drawing]

[0008] [Figure 1] A plan view showing the configuration of an example of a substrate processing system according to one embodiment. [Figure 2] A perspective view showing an example of an opening and an opening / closing device. [Figure 3] A perspective view showing an example of an opening and closing device. [Figure 4] A perspective view illustrating the operating principle of the opening and closing mechanism. [Figure 5] A horizontal cross-sectional view showing an example of an opening / closing device when the opening is closed. [Figure 6] A horizontal cross-sectional view showing an example of an opening and closing device used for maintaining sealing components. [Figure 7] A horizontal cross-sectional view showing another example of an opening and closing device used for maintaining sealing components. [Figure 8A] A horizontal cross-sectional view showing yet another example of an opening and closing device used for maintaining sealing components. [Figure 8B] A horizontal cross-sectional view showing yet another example of an opening and closing device used for maintaining sealing components. [Figure 8C] A horizontal cross-sectional view showing yet another example of an opening and closing device used for maintaining sealing components. [Figure 9] A horizontal cross-sectional view showing an example of an opening / closing device for maintaining a sealing member in an opening / closing device that includes other moving parts. [Figure 10] A perspective view showing an example of a moving body moving along the inner wall surface. [Figure 11] A horizontal cross-sectional view showing an example of an opening / closing device equipped with a movable body that moves along the inner wall surface, when the opening is closed. [Figure 12] A side view showing an example of a movable body having multiple valve bodies. [Modes for carrying out the invention]

[0009] Hereinafter, embodiments for implementing the present disclosure will be described with reference to the drawings. In each drawing, the same reference numerals are assigned to the same components, and duplicate descriptions may be omitted.

[0010] <Substrate Processing System 100> An example of the overall configuration of a substrate processing system 100 according to an embodiment will be described with reference to FIG. 1. FIG. 1 is a plan view showing an example configuration of a substrate processing system 100 according to an embodiment.

[0011] The substrate processing system 100 shown in FIG. 1 is a system having a cluster structure (multi-chamber type). The substrate processing system 100 includes a plurality of processing chambers 110, a vacuum transfer chamber 120, a load lock chamber 130, an atmospheric transfer chamber 140, and a control unit 150.

[0012] The processing chamber 110 is depressurized to a predetermined vacuum atmosphere, and a desired process (etching process, film formation process, cleaning process, ashing process, etc.) is performed on a semiconductor wafer W (hereinafter also referred to as "wafer W") inside. The processing chamber 110 is disposed adjacent to the vacuum transfer chamber 120. The processing chamber 110 has a mounting table 111 on which the wafer W is mounted. Note that the operations of each part for the process in the processing chamber 110 are controlled by the control unit 150.

[0013] The vacuum transfer chamber 120 is depressurized to a predetermined vacuum atmosphere. The vacuum transfer chamber 120 has an opening 121 that communicates the processing chamber 110 and the vacuum transfer chamber 120. Further, the vacuum transfer chamber 120 has an opening 122 that communicates the load lock chamber 130 and the vacuum transfer chamber 120. The vacuum transfer chamber 120 also has an opening / closing device (planar motor 10, moving body 20) for opening and closing the openings 121 and 122. The opening / closing device will be described later with reference to FIG. 2 and the like.

[0014] The vacuum transfer chamber 120 has an opening 123 that communicates with the outside. The opening 123 is closable by a closing member 124.

[0015] Inside the vacuum transfer chamber 120, a substrate transfer device (not shown) for transferring the wafer W is provided. The substrate transfer device transfers the wafer W between the processing chamber 110 and the vacuum transfer chamber 120 through the opening 121, and also transfers the wafer W between the load lock chamber 130 and the vacuum transfer chamber 120 through the opening 122. The substrate transfer device is controlled by the control unit 150.

[0016] The load lock chamber 130 is provided between the vacuum transfer chamber 120 and the atmospheric transfer chamber 140. The load lock chamber 130 has a mounting table 131 for mounting the wafer W and is capable of switching between an atmospheric atmosphere and a vacuum atmosphere. The load lock chamber 130 and the vacuum transfer chamber 120 with a vacuum atmosphere communicate through an opening 122 that can be opened and closed by an opening / closing device. The load lock chamber 130 and the atmospheric transfer chamber 140 with an atmospheric atmosphere communicate through an opening (not shown) that can be opened and closed by an opening / closing device (not shown). The switching between the vacuum atmosphere and the atmospheric atmosphere inside the load lock chamber 130 is controlled by the control unit 150.

[0017] The atmospheric transfer chamber 140 is in an atmospheric atmosphere, and for example, a downflow of clean air is formed. Inside the atmospheric transfer chamber 140, a transfer device (not shown) for transferring the wafer W is provided. The transfer device (not shown) transfers the wafer W between the load lock chamber 130 and the atmospheric transfer chamber 140. The operation of the transfer device (not shown) is controlled by the control unit 150.

[0018] On the wall surface of the atmospheric transfer chamber 140, a load port (not shown) is provided. A carrier (not shown) containing the wafer W or an empty carrier is attached to the load port. As the carrier, for example, a FOUP (Front Opening Unified Pod) or the like can be used.

[0019] The transport device (not shown) in the atmospheric transport chamber 140 can take out the wafer W housed in a carrier attached to the load port and place it on the mounting table 131 in the load lock chamber 130. Furthermore, the transport device (not shown) in the atmospheric transport chamber 140 can take out the wafer W placed on the mounting table 131 in the load lock chamber 130 and place it in a carrier attached to the load port.

[0020] The control unit 150 includes a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), and HDD (Hard Disk Drive). The control unit 150 may have other storage areas such as an SSD (Solid State Drive) in addition to the HDD. The storage areas such as the HDD and RAM store recipes in which process procedures, process conditions, and transport conditions are set.

[0021] The CPU controls the processing of wafers W in each processing chamber 110 according to a recipe and controls the transport of wafers W. The HDD or RAM may store programs for executing the processing of wafers W and the transport of wafers W in each processing chamber 110. These programs may be provided on a storage medium or provided by an external device via a network.

[0022] Next, the opening and closing device for opening and closing the openings 121 and 122 will be described using Figures 2 to 5. Figure 2 is a perspective view showing an example of the opening 121 and the opening and closing device. Figure 3 is a perspective view showing an example of the movable body 20 of the opening and closing device.

[0023] The opening and closing device comprises a planar motor 10 and a movable body 20.

[0024] The planar motor 10 is positioned on the floor of the vacuum conveying chamber 120.

[0025] The movable body 20 comprises a valve body 21 and a base 22. The valve body 21 comprises a valve plate 211, a sealing member 212, an enlarged portion 213, a sealing member 214, and a support portion 215. The valve plate 211 is formed to protrude from the enlarged portion 213. The valve plate 211 is a member that closes the openings 121 and 122, and is formed to be larger than the openings 121 and 122 and smaller than the opening 123. The valve plate 211 is provided with a sealing member 212 that seals when the valve plate 211 closes the openings 121 and 122. The enlarged portion 213 is a member that closes the opening 123, and is formed to be larger than the opening 123. The enlarged portion 213 is provided with a sealing member 214 that seals when the enlarged portion 213 closes the opening 123. The support portion 215 connects the enlarged portion 213 and the base 22.

[0026] The base 22 of the planar motor 10 and the movable body 20 will be further explained with reference to Figure 4. Figure 4 is a perspective view illustrating the driving principle of the opening and closing device.

[0027] The planar motor 10 has multiple coils 10a arranged in a row. The coils 10a generate a magnetic field when current is supplied to them. The control unit 150 (see Figure 1) is configured to individually control the current value supplied to each coil 10a.

[0028] The base 22 has multiple permanent magnets 22a arranged on it. The magnetic field generated by the coil 10a causes the base 22 to magnetically levitate on the planar motor 10. The magnetic field generated by the coil 10a also causes the base 22 to move on the planar motor 10.

[0029] With this configuration, the control unit 150 (see Figure 1) is configured to control the position, orientation, and levitation amount of the base 22 by controlling the current value of each coil 10a of the planar motor 10.

[0030] The control unit 150 can move and / or rotate the mobile body 20 within the vacuum transport chamber 120 by controlling the energization of each coil 10a of the planar motor 10 so that the base 22 is in a desired position. In other words, the control unit 150 can open and close the openings 121 and 122 with the valve body 21 by moving the mobile body 20 on the planar motor 10.

[0031] Figure 5 is a horizontal cross-sectional view showing an example of an opening and closing device when the opening 121 is closed.

[0032] The control unit 150 moves the movable body 20 so that the valve plate 211 of the valve body 21 comes into contact with the inner wall surface of the vacuum transport chamber 120, thereby allowing the valve plate 211 to close the opening 121. In addition, the sealing member 212 seals the inner wall surface of the vacuum transport chamber 120 and the valve plate 211, thereby sealing the processing chamber 110.

[0033] Furthermore, by moving the movable body 20 from a position that closes the opening 121 (see Figure 5), the opening 121 can be opened (see Figure 1). This reduces the occupied area of ​​the substrate processing system 100 compared to a configuration in which an opening / closing device, such as a gate valve (not shown), is installed between the processing chamber 110 and the vacuum transport chamber 120, which is opened and closed by mechanical drive.

[0034] Thus, the opening and closing device of this embodiment can open and close the opening 121. Similarly, the opening and closing device can open and close the opening 122.

[0035] Furthermore, a mechanism (not shown) may be provided to assist the contact force between the valve plate 211 and the inner wall surface of the vacuum conveying chamber 120 when the valve plate 211 of the valve body 21 is brought into contact with the inner wall surface of the vacuum conveying chamber 120 and the openings 121 and 122 are closed. For example, when the valve body 21 is brought into contact with the inner wall surface of the vacuum conveying chamber 120, a locking mechanism may be provided to fix the valve body 21 to the inner wall surface of the vacuum conveying chamber 120. This ensures that the opening 121 is reliably closed.

[0036] Furthermore, the valve body 21 may have a magnet (not shown) that attracts to the wall surface of the vacuum conveying chamber 120. This allows the valve body 21 to be attracted to the wall surface of the vacuum conveying chamber 120 by the magnet (not shown) when closing the openings 121 and 122 with the valve body 21.

[0037] Figure 6 is a horizontal cross-sectional view showing an example of an opening and closing device for maintaining the sealing member 212. For example, the sealing performance of the sealing member 212 deteriorates due to exposure to the processing gas in the processing chamber 110. When the sealing performance of the sealing member 212 deteriorates, maintenance (replacement, cleaning, etc.) of the sealing member 212 is performed.

[0038] When performing maintenance on the sealing member 212, the control unit 150 moves the movable body 20 and brings the enlarged portion 213 of the valve body 21 into contact with the inner wall surface of the vacuum conveying chamber 120, thereby allowing the enlarged portion 213 to close the opening 123 from the inside of the vacuum conveying chamber 120. Furthermore, the sealing member 214 seals the inner wall surface of the vacuum conveying chamber 120 and the enlarged portion 213, thereby sealing the vacuum conveying chamber 120. At this time, the valve plate 211 is inserted into the opening 123.

[0039] Furthermore, by removing the sealing member 124 (see Figure 1) from the outer wall surface of the vacuum transport chamber 120, the sealing member 212 can be maintained (replaced, cleaned, etc.) from outside the vacuum transport chamber 120 while the vacuum transport chamber 120 remains in a vacuum atmosphere.

[0040] Thus, with the opening and closing device of this embodiment, the sealing member 214 can be maintained while maintaining the vacuum atmosphere of the vacuum transport chamber 120. This reduces the time required for maintenance work.

[0041] Furthermore, in addition to the movable bodies 20 that open and close each opening 121 and 122, a replacement movable body 20 may also be arranged inside the vacuum transfer chamber 120. This allows for sealing to be ensured by replacing the movable bodies 20 that open and close each opening 121 and 122 with the replacement movable body 20. Also, when maintaining the sealing member 212 of one movable body 20, the openings 121 and 122 can be opened and closed using the replacement movable body 20, so the sealing member 212 can be maintained without stopping the substrate processing system 100.

[0042] The substrate processing system 100 may also be equipped with a device for opening and closing the closing member 124 and for maintaining the sealing member 214. This allows for the automation of maintenance of the sealing member 214.

[0043] Figure 7 is a horizontal cross-sectional view showing another example of an opening and closing device used for maintaining the sealing member 212.

[0044] Fixing devices 125 and 126 may be provided on the wall surface of the vacuum conveying chamber 120. Fixing device 125 detachably fixes the closing member 124 to the outer wall surface of the vacuum conveying chamber 120. Fixing device 126 detachably fixes the valve body 21 to the inner wall surface of the vacuum conveying chamber 120. In the example in Figure 7, fixing devices 125 and 126 are shown as detachable bolts.

[0045] When maintaining the sealing member 212, the control unit 150 moves the movable body 20 and brings the enlarged portion 213 of the valve body 21 into contact with the inner wall surface of the vacuum conveying chamber 120, thereby closing the opening 123 from the inside of the vacuum conveying chamber 120. Next, the valve body 21 is fixed to the inner wall surface of the vacuum conveying chamber 120 using the fixing device 126. Then, the fixing device 125 is released, the closing member 124 is moved, and the opening 123 is opened from the outside of the vacuum conveying chamber 120, allowing the sealing member 212 to be maintained. This prevents the valve body 21 from shifting due to the pressure difference between the inside of the vacuum conveying chamber 120, which is a vacuum atmosphere, and the outside of the vacuum conveying chamber 120, which is an atmospheric atmosphere, thus maintaining airtightness in the vacuum conveying chamber 120.

[0046] In Figure 7, the fixing devices 125 and 126 are shown as bolts, but they are not limited to bolts and may be fixed devices such as locking pins.

[0047] Figures 8A to 8C are horizontal cross-sectional views showing yet another example of an opening and closing device used for maintaining the sealing member 212.

[0048] As shown in Figure 8A, the closure member 124 may be provided with a venting device 127. The venting device 127 comprises a vent line 127a, a valve 127b, and a connecting portion 127c. The vent line 127a is formed to allow gas to flow through it. One end of the vent line 127a is connected to the space of the opening 123 (the space between the closure member 124 and the valve plate 211). The vent line 127a is also provided with an openable and closable valve 127b. The valve 127b is normally closed. The other end of the vent line 127a is provided with a connecting portion 127c that can be connected to a connecting portion 128c, which will be described later.

[0049] Here, when maintaining the sealing member 212, the control unit 150 moves the movable body 20 and brings the enlarged portion 213 of the valve body 21 into contact with the inner wall surface of the vacuum conveying chamber 120, so that the enlarged portion 213 closes the opening 123 from the inside of the vacuum conveying chamber 120. Next, the valve body 21 is fixed to the inner wall surface of the vacuum conveying chamber 120 using the fixing device 126. At this point, the space of the opening 123 is in a vacuum atmosphere. Next, the valve 127b is opened, and the space of the opening 123 is connected to the outside of the vacuum conveying chamber 120, which is in an atmospheric atmosphere, via the vent line 127a. Next, the fixing device 125 is released, the closing member 124 is moved, and the opening 123 is opened from the outside of the vacuum conveying chamber 120, allowing the sealing member 212 to be maintained. This reduces the pressure difference between the space of the opening 123 and the outside of the vacuum conveying chamber 120, and the closing member 124 can be easily removed from the outer wall surface of the vacuum conveying chamber 120.

[0050] Furthermore, as shown in Figure 8B, a vacuum device 128 may be provided on the outer wall surface of the vacuum transport chamber 120. The vacuum device 128 comprises a vacuum line 128a, a valve 128b, and a connecting part 128c. The vacuum line 128a is formed to allow gas to flow through it. One end of the vacuum line 128a is connected to the inside of the vacuum transport chamber 120. The vacuum line 128a is also provided with an openable and closable valve 128b. The valve 128b is normally closed. The other end of the vacuum line 128a is provided with a connecting part 128c that can be connected to a connecting part 127c. At least a portion of the vacuum line 128a is formed of flexible piping or the like, and the connecting part 127c and the connecting part 128c are configured to be detachable.

[0051] Here, after maintaining the sealing member 212, the closure member 124 is attached to the outer wall surface of the vacuum conveying chamber 120, thereby closing the opening 123 from the outside of the vacuum conveying chamber 120. Next, the closure member 124 is fixed to the outer wall surface of the vacuum conveying chamber 120 using the fixing device 125. At this point, the space of the opening 123 is in an atmospheric environment. Next, the connection part 127c and the connection part 128c are connected, and valves 127b and 128b are opened, connecting the space of the opening 123 to the inside of the vacuum conveying chamber 120, which is in a vacuum atmosphere, via the vent line 127a and the vacuum line 128a. As a result, the vacuum pump (not shown) of the vacuum conveying chamber 120 gradually reduces the pressure in the space of the opening 123, bringing the space of the opening 123 closer to a vacuum atmosphere. Alternatively, after depressurizing the space at the opening 123, valves 127b and 128b may be closed, and the connection between connection part 127c and connection part 128c may be released. Next, the fixing device 126 is released. Then, the control unit 150 moves the movable body 20 so that the valve body 21 moves away from the opening 123. This prevents a significant decrease in the vacuum level inside the vacuum conveying chamber 120 when the valve body 21 moves away from the opening 123.

[0052] Furthermore, as shown in Figure 8C, the vacuum line 128a may be connected to a vacuum pump 129. This allows the vacuum pump 129 to reduce the pressure in the space of the opening 123 to a vacuum atmosphere.

[0053] Figure 9 is a horizontal cross-sectional view showing an example of an opening / closing device equipped with another movable body 20A, specifically for maintenance of the sealing member 212. In the movable body 20A shown in Figure 9, the valve plate 211 on which the sealing member 212 is provided is detachably mounted to the enlarged portion 213 on which the sealing member 214 is provided, and the valve plate 211 is fixed to the enlarged portion 213 by a fixing device 216. In the example in Figure 9, the fixing device 216 is shown as a detachable bolt, but it is not limited to this, and may be a fixing device such as a locking pin. As a result, the opening 123 is closed from the inside of the vacuum transport chamber 120 by the enlarged portion 213 on which the sealing member 214 is provided. Furthermore, when maintaining the sealing member 212, the fixing device 216 is removed and the sealing member 212 is replaced together with the valve plate 211. This improves the workability of maintenance work.

[0054] Although an opening and closing device according to one embodiment has been described above, this disclosure is not limited to the above-described embodiment, and various modifications and improvements are possible within the scope of the gist of this disclosure as described in the claims.

[0055] The planar motor 10 has been described as being installed on the floor of the vacuum transport chamber 120, but it is not limited to this configuration. For example, the planar motor 10 may be installed on the top surface of the vacuum transport chamber 120, and the mobile body 20 may move across the top surface of the vacuum transport chamber 120 by the magnetic force of the planar motor 10. The mobile body 20 is magnetically attracted by the planar motor 10 installed on the top surface of the vacuum transport chamber 120 and floats with a gap between it and the top surface of the vacuum transport chamber 120. This allows, for example, the substrate transport device to be placed on the floor of the vacuum transport chamber 120.

[0056] Alternatively, a planar motor 10 may be provided on the inner wall surface of the vacuum transport chamber 120, and the movable body 20B may move along the inner wall surface of the vacuum transport chamber 120 by the magnetic force of the planar motor 10. Figure 10 is a perspective view showing an example of a movable body 20B moving along the inner wall surface. Figure 11 is a horizontal cross-sectional view showing an example of an opening / closing device equipped with a movable body 20B that moves along the inner wall surface, when the opening 121 is closed.

[0057] The opening and closing device comprises a planar motor 10 and a movable body 20B.

[0058] As shown in Figure 11, the planar motor 10 is positioned on the wall of the vacuum transport chamber 120 in which the opening 121 is formed. The planar motor 10 has a plurality of coils 10a arranged in a row. The coils 10a generate a magnetic field when current is supplied to them. The control unit 150 (see Figure 1) is configured to individually control the current value supplied to each coil 10a.

[0059] As shown in Figure 10, the movable body 20B comprises a valve body portion 21B and a base portion 22B. That is, the movable body 20B is integrally formed with the valve body portion 21B that closes the openings 121 and 122 and the base portion 22B that moves on the planar motor 10.

[0060] The valve body 21B comprises a valve plate 211B, a sealing member 212B, an enlarged portion 213B, and a sealing member 214B. The valve plate 211B is formed to protrude from the enlarged portion 213B. The valve plate 211B is a member that closes the openings 121 and 122, and is formed to be larger than the openings 121 and 122 and smaller than the opening 123. The valve plate 211B is provided with a sealing member 212B that seals when the valve plate 211B closes the openings 121 and 122. The enlarged portion 213B is a member that closes the opening 123, and is formed to be larger than the opening 123. The enlarged portion 213B is provided with a sealing member 214B that seals when the enlarged portion 213B closes the opening 123.

[0061] The base portion 22B has multiple permanent magnets 22Ba arranged on it. In the movable body 20B shown in Figure 10, the base portions 22B are shown on both sides of the movable body 20B in the longitudinal direction, flanking the enlarged portion 213B of the valve body 21B when viewed from a direction perpendicular to the contact surface of the valve plate 211B, but it is not limited to this. For example, multiple permanent magnets 22Ba may be arranged on the entire surface of the enlarged portion 213B to constitute the base portion 22B.

[0062] The magnetic field generated by coil 10a causes the base portion 22B to magnetically levitate on the planar motor 10. Furthermore, the magnetic field generated by coil 10a causes the base portion 22B to move on the planar motor 10.

[0063] With this configuration, the control unit 150 (see Figure 1) is configured to control the position, orientation, and levitation amount of the mobile body 20B (base portion 22B) by controlling the current value of each coil 10a of the planar motor 10. That is, by controlling the position and orientation of the mobile body 20B (base portion 22B), the mobile body 20B can be moved and / or rotated on the inner wall surface of the vacuum transport chamber 120. In addition, by controlling the levitation amount of the mobile body 20B (base portion 22B), the opening and closing of the openings 121 and 122 by the mobile body 20B (valve portion 21B) can be controlled.

[0064] Furthermore, although the explanation described an opening / closing device for opening and closing the opening 121 between the processing chamber 110 and the vacuum conveying chamber 120, and the opening 122 between the vacuum conveying chamber 120 and the load lock chamber 130, the invention is not limited to this. For example, it may be applied to an opening / closing device (planar motor 10, movable body 20) for opening and closing an opening (not shown) that connects the load lock chamber 130 and the atmospheric conveying chamber 140. The planar motor 10 may be provided on at least one of the top, side, or floor surfaces of the atmospheric conveying chamber 140. Also, since the movable body 20 is positioned on the side of the atmospheric conveying chamber 140, the sealing member 212 of the movable body 20 can be easily replaced.

[0065] Furthermore, although a single movable body 20 has been described as having one valve body 21 (valve plate 211, sealing member 212) as shown in Figure 3, it is not limited to this. Figure 12 is a side view showing an example of a movable body 20C having multiple valve bodies 21. The movable body 20C has multiple (two) valve bodies 21 and one base 22. This makes it possible to reduce the maintenance frequency of the sealing member 212 by switching the valve bodies 21 that open and close the openings 121 and 122. [Explanation of Symbols]

[0066] 10 Planar motors 10a coil 20,20A~20C Mobile object 21 Valve body 21B Valve body 22 base 22B Base section 22a,22Ba permanent magnet 211, 211B Valve Plate 212,212B Sealing member (first sealing member) 213,213B Enlarged section 214,214B Sealing member (second sealing member) 215 Support part 216 Fixation device 100 substrate processing systems 110 Processing Room (Room 2, Room) 111 Mounting platform 120 Vacuum Transfer Chamber (Room 1) 121 Opening (First opening) 122 Opening (First opening) 123 Opening (Second opening) 124 Closure member 125 Fixation device 126 Fixation device 127 Venting device 128 Vacuum pump 130 Load Lock Room (Room 2, Room) 131 Mounting platform 140 Atmospheric Convection Chamber (Room 1) 150 Control Unit

Claims

1. An opening and closing device for opening and closing a plurality of first openings that connect a first room to a plurality of second rooms adjacent to the first room, or a second opening that connects the first room to the outside, A moving body moves on a planar motor having coils arranged in the first chamber, and is capable of moving between a position that closes one of the plurality of first openings and second openings and a position that closes the other openings, and has a moving body that transports a valve body that closes either opening. The moving body moves on the planar motor by the magnetic field generated by the coil, and opens and closes the opening. Switching device.

2. The valve body is, The first sealing member is provided to close the first opening by contacting the inner wall surface of the first chamber. The opening and closing device according to claim 1.

3. The valve body is, The second sealing member is provided to close the second opening by contacting the inner wall surface of the first chamber. The opening and closing device according to claim 2.

4. The first sealing member is The valve body is provided on a removable plate member, The opening and closing device according to claim 2.

5. A semiconductor processing system comprising a transport chamber having a first opening that communicates with an adjacent chamber or a second opening that communicates with the outside, A planar motor having a plurality of coils arranged on one side of the transport chamber, A movable body having a valve that moves on the planar motor and closes the first opening or the second opening, Includes a control unit that controls the energization of the coil and moves the moving body on the planar motor to open and close the first opening or the second opening, Semiconductor processing system.

6. The valve body is, The device includes a first sealing member that closes the first opening by contacting the inner wall surface of the transport chamber. The semiconductor processing system according to claim 5.

7. The control unit, The first sealing member is maintained by moving the movable body so as to close the second opening. The semiconductor processing system according to claim 6.

8. The valve body is, When the control unit moves the movable body to the second opening, a second sealing member is provided that closes the second opening by contacting the inner wall surface of the transport chamber. The semiconductor processing system according to claim 7.

9. The aforementioned transport chamber is When the second opening is closed with the second sealing member, a fixing device for fixing the valve body is included. The semiconductor processing system according to claim 8.

10. The aforementioned transport chamber is The invention includes a closing member that closes the second opening on the external side, The aforementioned occluding member is provided with a venting device or a vacuuming device. The semiconductor processing system according to claim 5.

11. The adjacent room is, A processing chamber for performing predetermined processing on a semiconductor substrate, or a load lock chamber configured to allow switching between an atmospheric and vacuum environment within its internal space. The semiconductor processing system according to claim 5.

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