Reticle box with transparent window and method for manufacturing the same

Abstract

The present invention provides a reticle box with a transparent window and a method for manufacturing the same. The reticle box is characterized by comprising a first housing and a second housing that are combined with each other, a transparent window member, and a thermoplastic sealing material. [Solution] A storage space for housing a reticle is defined between the first housing and the second housing, and the first housing is provided with a transparent window to expose the reticle. A transparent window member is provided in the window to allow light rays to pass through and reach the reticle. A thermoplastic sealant is located between the first housing and the transparent window member and surrounds the transparent window member to hermetically join the transparent window member to the first housing.

Description

Technical Field

[0001] The present invention relates to a reticle pod, and more particularly to a reticle pod having a transparent window and a method for manufacturing the same.

[0002] The patent application of the present invention claims international priority based on US Patent Application No. US63 / 705,072, titled "RETICLE POD HAVING TRANSPARENT WINDOW", filed on October 9, 2024. The content of the US provisional application is incorporated herein by reference and forms part of this specification.

Background Art

[0003] With the development of science and technology, modern electronic products are evolving with characteristics such as weight reduction, volume miniaturization, higher operating frequencies, and improved energy efficiency. Semiconductor devices incorporated into electronic products require a more precise and complex manufacturing method. According to current semiconductor manufacturing technology, the circuit pattern of a semiconductor device is defined by a reticle with a specific pattern and transferred onto the wafer surface through a lithography process. Modern lithography processes use light with shorter wavelengths, such as deep ultraviolet light (DUV) and even extreme ultraviolet light (EUV), to achieve shorter pitches and line widths.

[0004] However, because any particulate matter, residue, or contaminants adhering to the reticle surface during the manufacturing process can seriously affect the quality of the lithography process, reticle boxes are now used to house and transport reticles. Reticle boxes provide a clean and airtight internal space for housing the reticles. While several mechanisms and methods are known for maintaining cleanliness and airtightness inside reticle boxes in semiconductor manufacturing processes, the reticle box still needs to be opened when removing the reticle for the lithography process. After the pattern on the reticle is transferred to the desired wafer, the reticle is stored back in the reticle box. This repeated opening and closing of the reticle box significantly increases the chances of particles or other contaminants adhering to the reticle surface, and even purging or other appropriate cleaning operations cannot avoid the problem of contaminant adhesion. As lithography technology becomes increasingly complex and expensive, the demands for reticle protection and cleanliness maintenance during the process also increase, making the problem of particle or contaminant adhesion even more pronounced.

[0005] Currently, the industry has proposed reticle boxes with at least one transparent window, which allow the reticle to remain housed within the reticle box even when performing optical inspection of the reticle surface or transferring circuit patterns to a wafer. This eliminates the need for repeated opening and closing of the reticle box, reducing the chance of particles or other contaminants adhering to the reticle surface.

[0006] However, this type of reticle box assembly method involves a process of assembling the window member with a frame and gasket. First, the gasket is placed between the window member and the reticle box, then the frame is placed around the window member, and then the frame is secured to the reticle box using screws, allowing the gasket to act as a seal. However, in this assembly method, since the gasket is pre-formed, gaps tend to form between the gasket and the outer shell of the reticle box during assembly. These gaps cannot be effectively cleaned, and moisture or fine particles can easily enter and accumulate in them. Furthermore, since the window member is made of glass, its surface is prone to static electricity due to friction or other actions. Due to the action of static electricity, fine particles adhere very easily to the surface of the window member, and these attached particles affect the progress of the lithography process. When fine particles adhere to the surface of the window member due to the action of static electricity, they are usually difficult to clean effectively, affecting the light rays that pass through the window member, resulting in distortion or deformation of the circuit pattern and affecting the quality of the lithography process. This type of situation can also lead to errors when inspection equipment inspects the reticle surface. Furthermore, in the assembly method using the aforementioned gasket, the gasket material releases volatile organic compounds (VOCs), contaminating the internal space of the reticle box and affecting its cleanliness. [Overview of the Initiative] [Problems that the invention aims to solve]

[0007] In view of this, an embodiment of the present invention provides a reticle box equipped with a transparent window and a method for manufacturing the same. By airtightly bonding the transparent window member to the housing with a thermoplastic sealing material, the problem of residual moisture and fine particles caused by poor cleaning of assembly gaps can be avoided, and the reticle box has the advantage of being highly airtight. Furthermore, the thermoplastic sealing material can avoid problems related to assembly gaps and the release of volatile organic compounds. [Means for solving the problem]

[0008] One aspect of the present invention provides a reticle box with a transparent window. This includes a first housing and a second housing that are combined with each other, defining a storage space between them for housing a reticle, the first housing having a transparent window portion for exposing the reticle; a transparent window member provided in the window portion for transmitting light rays to reach the reticle; and a thermoplastic sealing material located between the first housing and the transparent window member and surrounding the transparent window member for hermetically joining the transparent window member to the first housing.

[0009] In one embodiment, the first housing has an inner wall and flange that continuously encircle a position corresponding to the window portion, the flange protruding from the inner wall and for supporting a transparent window member on it.

[0010] In another embodiment, the thermoplastic sealing material is located between the inner wall and the transparent window member, and between the flange and the transparent window member.

[0011] In yet another embodiment, the transparent window member has opposing outer and inner surfaces, and the thermoplastic sealing material is applied to the periphery of the inner and outer surfaces.

[0012] In yet another embodiment, the transparent window member includes a quartz substrate, the quartz substrate having opposing outer and inner surfaces, and at least one of them having an anti-reflective layer and / or an antistatic layer.

[0013] In one embodiment, the anti-reflective layer contains titanium dioxide, and the antistatic layer contains indium tin oxide.

[0014] In yet another embodiment, the transparent window member includes a quartz substrate, the quartz substrate having opposing outer and inner surfaces, and at least one of these surfaces has an anti-reflective layer and an antistatic composite material layer formed on it.

[0015] In one embodiment, the composite material layer contains titanium dioxide and indium tin oxide.

[0016] In yet another embodiment, the surface resistance of one surface of the transparent window member is 10 4 ≤Ω ≤ 10 9 That is the case.

[0017] Another aspect of the present invention provides a method for manufacturing a reticle box having a transparent window. This includes providing a first housing having a transparent window, and combining the first housing and a second housing to define a storage space for housing a reticle between them; providing a thermoplastic sealant to be placed in the window, wherein the thermoplastic sealant is positioned along the inner wall of the window; and placing a transparent window member in the window, wherein the thermoplastic sealant is positioned between the first housing and the transparent window member and surrounds the transparent window member, thereby hermetically joining the transparent window member to the first housing. [Effects of the Invention]

[0018] The reticle box with a transparent window and its manufacturing method according to an embodiment of the present invention involve surrounding the transparent window member with a thermoplastic sealing material and positioning it between the housing of the reticle box and the transparent window member, thereby providing an airtight seal for the transparent window member to the housing. This avoids the problem of residual moisture and fine particles caused by inadequate cleaning of assembly gaps in assembled reticle boxes, and the reticle box according to the embodiment of the present invention has the advantage of high airtightness. Furthermore, by using a thermoplastic sealing material, problems related to assembly gaps and the release of volatile organic compounds caused by conventionally used pre-formed gaskets can be avoided. [Brief explanation of the drawing]

[0019] [Figure 1] This is an exploded perspective view of a reticle box according to one embodiment of the present invention. [Figure 2] Figure 1 is a three-dimensional view of the reticle box after assembly. [Figure 3] It is a cross-sectional view taken along the cross-section line A-A' of the reticle box in FIG. 2. [Figure 4A] It is a view showing an embodiment of a thermoplastic sealing material. [Figure 4B] It is a view showing another embodiment of a thermoplastic sealing material. [Figure 4C] It is a view showing yet another embodiment of a thermoplastic sealing material. [Figure 5] It is a schematic side view of a transparent window member according to an embodiment of the present invention. [Figure 6] It is a schematic side view of a transparent window member according to another embodiment of the present invention. [Figure 7] It is a schematic side view of a transparent window member according to yet another embodiment of the present invention. [Figure 8] It is a schematic side view of a transparent window member according to yet another embodiment of the present invention. [Figure 9] It is a transmittance curve diagram of a transparent window member according to an example. [Figure 10] It is a transmittance curve diagram of a transparent window member according to another example. [Figure 11] It is a flowchart of a method for manufacturing a reticle box provided with a transparent window according to an example of the present invention. [Figure 12] It is a flowchart of a method for manufacturing a reticle box provided with a transparent window according to another example of the present invention.

Embodiments for Carrying Out the Invention

[0020] The reticle box provided with a transparent window according to an example of the present invention and its manufacturing method arrange a thermoplastic sealing material around the transparent window member and position it between the first housing of the reticle box and the transparent window member, thereby hermetically joining the transparent window member to the first housing. This can avoid the problem of moisture and fine particles remaining in the assembly gap, and can also avoid the release of volatile organic substances associated with the use of gaskets, and has the advantage of high airtightness.

Examples

[0021] Please refer to Figures 1, 2, and 3. Figure 1 is an exploded perspective view of a reticle box according to one embodiment of the present invention, Figure 2 is a three-dimensional view of the assembled reticle box of Figure 1, and Figure 3 is a cross-sectional view of the reticle box of Figure 2 along the cross-sectional line A-A'.

[0022] The reticle box 100 with a transparent window in this embodiment includes a first housing 110, a second housing 120, a transparent window member 150, and a thermoplastic sealant 160. The first housing 110 and the second housing 120 are combined with each other, defining a storage space 100a between them for housing a reticle R, and the first housing 110 has a transparent window portion 110a that exposes the reticle R. The transparent window member 150 is provided in the window portion 110a and is used to allow light rays L to pass through and reach the reticle R. The thermoplastic sealant 160 is arranged around the transparent window member 150 and is located between the first housing 110 and the transparent window member 150, and hermetically seals the transparent window member 150 to the first housing 110. In the reticle box 100, the thermoplastic sealant 160 is positioned around the transparent window member 150 and between the first housing 110 and the transparent window member 150. This configuration ensures that the transparent window member 150 is airtightly bonded to the first housing 110, preventing assembly gaps from forming between the transparent window member 150 and the first housing 110, and avoiding the retention of moisture and fine particles in the gaps. Furthermore, by airtightly bonding the transparent window member 150 with the thermoplastic sealant 160, the release of volatile organic compounds (VOCs) caused by conventional gaskets can be avoided.

[0023] Please refer to Figure 3. In this embodiment, the first housing 110 has an inner wall 113 and a flange 115 that continuously encircle the window portion 110a, the flange 115 protruding from the inner wall 113 and supporting the transparent window member 150 on it. The continuously encircling inner wall 113 is formed to surround the window portion 110a, and the cross-sectional area of ​​the window portion 110a in the horizontal plane (the plane formed in the X and Y directions shown in Figure 1) is set to be slightly larger than the cross-sectional area of ​​the transparent window member 150 in the horizontal plane, so that the transparent window member 150 can be inserted into the window portion 110a and airtightly fixed with the thermoplastic sealant 160.

[0024] Next, the arrangement method of the thermoplastic sealing material 160 in this embodiment will be described.

[0025] Please refer to Figures 4A to 4C. Figure 4A shows one embodiment of the thermoplastic sealant, Figure 4B shows another embodiment of the thermoplastic sealant, and Figure 4C shows yet another embodiment of the thermoplastic sealant. As shown in Figure 4A, the thermoplastic sealant 160 is located between the inner wall 113 and the transparent window member 150, sealing and fixing the transparent window member 150 in the window portion 110a, thereby installing the transparent window member 150 in the window portion 110a.

[0026] In another embodiment shown in Figure 4B, the thermoplastic sealant 160' is positioned between the inner wall 113 and the transparent window member 150, and between the flange 115 and the transparent window member 150. The flange 115 extends a predetermined distance from the inner wall 113 toward the center of the window portion 110a, forming an L-shaped mounting structure at the window portion 110a of the first housing 110. The thermoplastic sealant 160' is arranged in an L-shape corresponding to this, and the transparent window member 150 is placed on top of the thermoplastic sealant 160'. As a result, the thermoplastic sealant 160' stably and airtightly seals the transparent window member 150 to the first housing 110 and installs the transparent window member 150 in the window portion 110a.

[0027] In yet another embodiment shown in Figure 4C, the transparent window member 150 has opposing inner surfaces 151 and outer surfaces 153, and the thermoplastic sealant 160'' covers the periphery W of the inner surface 151 and outer surface 153. With this configuration, the thermoplastic sealant 160'' covers and fixes the transparent window member 150 from three directions: below (between the transparent window member 150 and the flange 115), to the side (between the transparent window member 150 and the inner wall 113), and above (on the outer surface 153 of the transparent window member 150), thereby obtaining better fixation and airtight sealing effects.

[0028] In the embodiments of the present invention, the thermoplastic sealing material 160 can be formed in the window portion 110a of the first housing 110 after melting a thermoplastic resin by, for example, insert molding, ultrasonic welding, or laser welding. This reduces the problem of moisture and fine particles remaining in gaps that are difficult to clean in the assembled reticle box structure, and also prevents the release of volatile organic compounds from conventional gasket materials, thereby preventing adverse effects on the cleanliness of the inside of the reticle box 100.

[0029] Next, the transparent window member 150 will be described.

[0030] Please refer to Figure 5. Figure 5 is a schematic side view of a transparent window member according to one embodiment of the present invention. The transparent window member 150(1) includes a quartz substrate 155 and has opposing outer surfaces 153 and inner surfaces 151. The outer surface 153 is the side away from the second housing 120 (the second housing is shown in Figures 1 to 3), and in this embodiment, the outer surface 153 is the upper surface (the upward surface in the vertical Z direction shown in Figures 2 and 3). An anti-reflective layer and / or an antistatic layer is formed on the outer surface 153. Similarly, an anti-reflective layer and / or an antistatic layer is also formed on the inner surface 151. As shown in Figure 5, in this embodiment, the outer surface 153 has one material coating layer 156, and the material coating layer 156 may be an anti-reflective layer or an antistatic layer. The inner surface 151 also has one material coating layer 157, and the material coating layer 157 may be an anti-reflective layer or an antistatic layer. In practical applications, the anti-reflective layer may include, for example, titanium dioxide (TiO2), and the antistatic layer may include, for example, indium tin oxide (ITO).

[0031] In another embodiment, the material coating layer 156 formed on the outer surface 153 is an anti-reflective and antistatic composite material layer, which simultaneously contains titanium dioxide and indium tin oxide. The material coating layer 157 formed on the inner surface 151 is also, for example, an anti-reflective and antistatic composite material layer, which simultaneously contains titanium dioxide and indium tin oxide.

[0032] Please refer to Figure 6. Figure 6 is a schematic side view of a transparent window member according to another embodiment of the present invention. The transparent window member 150(2) includes a quartz substrate 155 and has opposing outer surfaces 153 and inner surfaces 151, the outer surface 153 being the side away from the second housing 120, for example, the upward surface. Two material coating layers 156 are formed on the outer surface 153, these two material coating layers being an anti-reflective layer and an antistatic layer, respectively. One material coating layer 157 is formed on the inner surface 151, this material coating layer 157 being an anti-reflective layer or an antistatic layer. The anti-reflective layer includes, for example, titanium dioxide, and the antistatic layer includes, for example, indium tin oxide.

[0033] Please refer to Figure 7. Figure 7 is a schematic side view of a transparent window member according to yet another embodiment of the present invention. The transparent window member 150(3) comprises a quartz substrate 155 and has opposing outer surfaces 153 and inner surfaces 151, the outer surface 153 being the side away from the second housing 120, for example, the upward surface. One material coating layer 156 is formed on the outer surface 153, and this material coating layer 156 is, for example, an anti-reflective layer or an antistatic layer. Two material coating layers 157 are formed on the inner surface 151, and these two material coating layers are an anti-reflective layer and an antistatic layer, respectively. The anti-reflective layer contains, for example, titanium dioxide, and the antistatic layer contains, for example, indium tin oxide.

[0034] Please refer to Figure 8. Figure 8 is a schematic side view of a transparent window member according to another embodiment of the present invention. The transparent window member 150(4) includes a quartz substrate 155 and has opposing outer surfaces 153 and inner surfaces 151, the outer surface 153 being the side away from the second housing 120, for example, the upward surface. Two material coating layers 156 are formed on the outer surface 153, and these two material coating layers 156 are an anti-reflective layer and an antistatic layer, respectively. Similarly, two material coating layers 157 are formed on the inner surface 151, and these two material coating layers 157 are an anti-reflective layer and an antistatic layer, respectively. The anti-reflective layer contains, for example, titanium dioxide, and the antistatic layer contains, for example, indium tin oxide.

[0035] According to the aforementioned embodiments, the transparent window member 150 of this embodiment is provided in the window portion 110a of the first housing 110 and is used to allow light rays L to pass through and reach the reticle R installed in the storage space 100a. Forming an anti-reflective layer on the transparent window member 150 reduces surface reflection and contributes to increasing the transmission of light rays L. Forming an antistatic layer on the transparent window member 150 suppresses the adhesion of fine particles to the transparent window member 150 and contributes to maintaining cleanliness.

[0036] The experimental results of transmittance against light source wavelength are described below. Please refer to Figure 9 first. Figure 9 is a transmittance curve diagram of a transparent window member according to one embodiment. In the transparent window member 150(1) in Figure 5, one layer of material coating layers 156 and 157 are formed on the inner surface 151 and the outer surface 153, respectively. For the experimental data measurement, an anti-reflective layer was formed on the outer surface 153 of the transparent window member 150(1), and an antistatic layer was formed on the inner surface 151. That is, the material coating layer 156 on the outer surface 153 is an anti-reflective layer, and the material coating layer 157 on the inner surface 151 is an antistatic layer. Light rays L with wavelengths from 200 nm to 1100 nm were irradiated onto the transparent window member 150(1), and the transmittance of light rays L at each wavelength was measured, and the data is summarized in Table 1.

[0037] [Table 1]

[0038] According to Table 1 and Figure 9, good transmittance is observed in the wavelength range of approximately 400 nm to 900 nm. In this range, the transmittance of light ray L exceeds 90% in all cases, reaching a maximum of 96.30% (when the wavelength of light ray L is 650.0 nm).

[0039] Next, please refer to Figure 10. Figure 10 is a transmittance curve diagram of a transparent window member according to another embodiment. In the transparent window member 150(1) of Figure 6, the material coating layers 156 and 157 formed on the inner surface 151 and outer surface 153, respectively, are both composite material layers. The transparent window member 150(1) was irradiated with light rays L with wavelengths from 400 nm to 900 nm, and the transmittance of the light rays L at each wavelength was measured. According to Figure 10, the transmittance is good when the wavelength of the light rays L is between 450 nm and 600 nm, reaching a maximum of approximately 95%. In a more preferred embodiment, the transmittance is 95.4% when the wavelength of the light rays L is 532 nm.

[0040] Regarding the antistatic effect of the antistatic layer, experiments have shown that using indium tin oxide as the antistatic layer reduces the surface resistance of the transparent window members 150(1), 150(2), 150(3), or 150(4) by 10 due to its conductivity. 4 ≤Ω ≤ 10 9 This can be controlled to effectively prevent the adhesion of fine particles onto the transparent window members 150(1), 150(2), 150(3), or 150(4).

[0041] According to the reticle box with a transparent window of the present invention, by arranging a thermoplastic sealing material around the transparent window member and positioning it between the first housing of the reticle box and the transparent window member, the transparent window member is airtightly joined to the first housing, thereby avoiding the problem of residual moisture and fine particles in the assembly gap, and also avoiding the release of volatile organic compounds that occur when using conventional gaskets, thus having the advantage of high airtightness. Furthermore, by forming an antistatic layer and / or an anti-reflective layer on the surface of the transparent window member, the transmittance of light of a specific wavelength can be effectively improved, surface static electricity can be effectively suppressed and fine particle adhesion can be prevented, thereby improving the reading accuracy of the reticle R.

[0042] The following describes a method for manufacturing a reticle box with a transparent window. Please refer to Figure 11. Figure 11 is a flowchart of a method for manufacturing a reticle box with a transparent window according to one embodiment of the present invention. The manufacturing method S10 of this embodiment will be explained using the manufacturing of the reticle box 100 with a transparent window described in the above embodiment as an example. Please also refer to Figures 1 to 4C. In the description of this embodiment, the same elements will be denoted by the same reference numerals in order to make the features of the present invention clearer. The manufacturing method S10 of this embodiment includes the following steps.

[0043] First, in step S11, a first housing 110 is provided. The first housing 110 has a transparent window portion 110a, and the first housing 110 is combined with the second housing 120, defining a storage space 100a for housing the reticle R between them.

[0044] Next, in step S12, the thermoplastic sealing material 160 is provided to the window portion 110a. The method of provision is to place the thermoplastic sealing material 160 along the inner wall 113 of the window portion 110a.

[0045] Next, in step S13, the transparent window member 150 is installed in the window portion 110a. The installation method involves positioning the thermoplastic sealing material 160 between the first housing 110 and the transparent window member 150, and arranging it around the transparent window member 150 to airtightly seal the transparent window member 150 to the first housing 110.

[0046] In the manufacturing method of this embodiment, the thermoplastic sealing material 160 is arranged around the transparent window member 150 and positioned between the first housing 110 and the transparent window member 150, thereby airtightly joining the transparent window member 150 to the first housing 110. This avoids the problem of residual moisture and fine particles in the assembly gap, and also avoids the release of volatile organic compounds that occur when using conventional gaskets, thus providing the advantage of high airtightness.

[0047] Please refer to Figure 12. Figure 12 is a flowchart of a method for manufacturing a reticle box with a transparent window according to another embodiment of the present invention. The manufacturing method S20 of this embodiment will also be explained using the manufacturing of the reticle box 100 with a transparent window described in the above embodiment as an example. Please also refer to Figures 1 to 4C. In the description of this embodiment, the same elements will be denoted by the same reference numerals in order to make the features of the present invention clearer. The manufacturing method S20 of this embodiment includes the following steps.

[0048] In step S21, the first housing 110 is provided. The first housing 110 has a transparent window portion 110a, and the first housing 110 is combined with the second housing 120 to define a storage space 100a for housing the reticle R between them. Next, in step S22, a thermoplastic sealant 160 is provided to the window portion 110a, and the method of provision is to place the thermoplastic sealant 160 along the inner wall 113 of the window portion 110a. Subsequently, in step S23, a transparent window member 150 is installed in the window portion 110a. The method of installation is to position the thermoplastic sealant 160 between the first housing 110 and the transparent window member 150, and to arrange it around the transparent window member 150, thereby airtightly joining the transparent window member 150 to the first housing 110.

[0049] The manufacturing method S20 of this embodiment further includes step S24. Step S24 provides a transparent window member 150. The transparent window member 150 has opposing outer surfaces 153 and inner surfaces 151, and an anti-reflective layer and / or an antistatic layer is formed on at least one of these surfaces. The technical details of forming one or more material coating layers 156 and 157 on the outer surface 153 and inner surface 151 are the same as those of the embodiments shown in Figures 5 to 10 described above, and therefore will not be described in detail here.

[0050] In another embodiment, in the transparent window member provided in step S24, an anti-reflective and antistatic composite material layer is formed on at least one of the inner surface 151 and the outer surface 153.

[0051] In this embodiment, steps S21 and S24 are independent steps, and there are no restrictions on their order; they may be performed simultaneously. Specifically, as shown in Figure 12, in this embodiment, steps S21, S22, S24, and S23 are performed in that order, but the manufacturing method S20 in this embodiment of the present invention may be performed in that order, S21, S24, S22, and S23. Furthermore, the manufacturing method S20 may be performed in that order, S24, S21, S22, and S23. [Industrial applicability]

[0052] As described above, the method for manufacturing a reticle box with a transparent window according to the embodiment of the present invention avoids the problem of residual moisture and fine particles caused by insufficiently cleaned assembly gaps in assembled reticle boxes by arranging a thermoplastic sealing material around the transparent window member and positioning it between the housing of the reticle box and the transparent window member, thereby airtightly joining the transparent window member to the housing. Furthermore, the reticle box manufactured by the manufacturing method according to the embodiment of the present invention has the advantage of high airtightness. Moreover, by using a thermoplastic sealing material in the manufacturing method, it is possible to avoid the problems of assembly gaps and the release of volatile organic compounds caused by pre-formed gaskets that have been used in the past.

[0053] Although the present invention has been disclosed with respect to several embodiments, it is not limited thereto. Any person with ordinary skill in the relevant domain may make various modifications and alterations without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention shall be defined by the claims. [Explanation of Symbols]

[0054] 100 Reticle Boxes 100a Storage space 110 Housing No. 1 110a Window section 120 Second Housing 113 Inner wall 115 Flange 150 Transparent window component 150(1) Transparent window component 150(2) Transparent window component 150(3) Transparent window component 150(4) Transparent window component 151 Inner self 153 Exterior 155 Quartz base material 156 Material coating layer 157 Material coating layer 160 Thermoplastic sealant 160' Thermoplastic sealant 160'' Thermoplastic sealant S10 manufacturing method S11 process S12 process S13 process S20 manufacturing method S21 process S22 process S23 process S24 process AA' Section line L-ray R Reticle W Periphery X direction Y direction Z direction

Claims

1. A reticle box having a transparent window, comprising a first housing and a second housing that are combined with each other, a transparent window member, and a thermoplastic sealing material, The first housing and the second housing have a storage space defined between them for housing the reticle, and the first housing has a transparent window, thereby exposing the reticle. The transparent window member is provided in the window section, thereby allowing light rays to pass through and reach the reticle, and the thermoplastic sealing material is positioned between the first housing and the transparent window member and surrounds the transparent window member, thereby hermetically sealing the transparent window member to the first housing. A reticle box characterized by [feature].

2. The first housing comprises an inner wall and flange that are continuously provided corresponding to the window section, the flange protruding from the inner wall, thereby supporting the transparent window member on it. The reticle box according to claim 1, characterized by the following:

3. The thermoplastic sealing material is located between the inner wall and the transparent window member, and between the flange and the transparent window member. The reticle box according to claim 2, characterized by the following:

4. The transparent window member has opposing inner and outer surfaces, and the thermoplastic sealing material covers the periphery of the inner and outer surfaces. The reticle box according to claim 1, characterized by the following:

5. The transparent window member includes a quartz substrate, the quartz substrate has opposing outer and inner surfaces, and at least one of them has an anti-reflective layer and / or an antistatic layer formed on it. The reticle box according to claim 1, characterized by the following:

6. The anti-reflective layer is titanium dioxide (TiO 2 ) contains, and the antistatic layer contains indium tin oxide (ITO), The reticle box according to claim 5, characterized by the following:

7. The transparent window member includes a quartz substrate, the quartz substrate has opposing outer and inner surfaces, and at least one of them has a composite material layer formed on it that is antireflective and antistatic. The reticle box according to claim 1, characterized by the following:

8. The composite material layer contains titanium dioxide and indium tin oxide. The reticle box according to claim 7, characterized by the following:

9. The surface resistance of the transparent window member is 10 4 ≤Ω ≤ 10 9 Within the range A reticle box according to claim 5 or 7, characterized by the following:

10. A method for manufacturing a reticle box equipped with a transparent window, A first housing is provided, the first housing having a transparent window, and by combining the first housing and the second housing, a storage space for housing a reticle is defined between them. A thermoplastic sealing material is provided for placement in the window portion, and the method of provision is such that the thermoplastic sealing material is placed along the inner wall of the window portion, and A manufacturing method characterized by arranging a transparent window member in the window section, wherein a thermoplastic sealing material is positioned between the first housing and the transparent window member and surrounds the transparent window member, thereby hermetically joining the transparent window member to the first housing.

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