Vibration damping device, vibration isolation system, and operating system

Abstract

The aim is to create a vibration damping device that can reliably absorb minute vibrations, exhibits minimal variation in damping function depending on the vibration direction, and provides stable damping performance even when the vibration pattern changes. [Solution] The vibration damping device according to the present invention is a vibration damping device in which a plurality of accommodation spaces are provided inside an integrally constructed support structure, and a granular body consisting of powder or granular material is provided in each of the plurality of accommodation spaces to constitute a granular damper structure, wherein the plurality of accommodation spaces have a cross-sectional range along the planar direction of the support structure, and the cross-sectional range is arranged vertically and horizontally along the planar direction and also forms a space that extends in a vertical direction perpendicular to the planar direction, thereby arranging the plurality of accommodation spaces inside the support structure.

Description

Technical Field

[0001] The present invention relates to a vibration damping device, a vibration isolation system, and an operating system, and particularly to the structure of a vibration damping device that utilizes a granular damper structure to absorb vibration energy.

Background Art

[0002] Conventionally, a vibration damping device having a granular damper structure in which a large number of granular materials such as powders and granules are filled in a sealed space has been known, and it is used for vibration isolation of buildings and vibration damping of mechanical devices. In such a vibration damping device, as described in Patent Documents 1-3 below, granular materials are filled in a plurality of storage spaces, and these storage spaces are arranged vertically and horizontally (see FIG. 6 of Patent Document 1), or arranged along a plane (see each figure of Patent Documents 2 and 3), and the granular materials contact or rub against the wall surface or other granular materials in each storage space to absorb the vibration transmitted from the outside.

[0003] In addition, each of the above documents describes manufacturing a granular damper structure by a powder sintering laminated molding method, additive manufacturing or 3D printing, a three-dimensional laminated molding apparatus, or the like.

[0004] Furthermore, as an example of forming a granular damper structure by the same manufacturing method as described above, a study evaluating the loss factor is reported in Non-Patent Document 1 below. As described in this document, it is possible to provide a vibration damping function by forming a granular damper structure inside a shaped object.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Patent Document 3

[0006] [Non-Patent Document 1] "Loss Factor of Metal Additive-Woven Products with Powder Encapsulation," Junpei Aizawa, Toru Koike, Takamasa Eguchi, Takefumi Shimura, Nagano Prefectural Industrial Technology Center Research Report, No. 17, pp. M46-M49 (2022) [Overview of the Initiative] [Problems that the invention aims to solve]

[0007] Incidentally, while conventional vibration damping devices using the granular damper structure described above aim to efficiently absorb various vibrations depending on the situation, when used in high-precision measuring instruments, imaging equipment, precision processing equipment, etc., it is difficult to reliably absorb minute vibrations in a stable state. Furthermore, when the vibration direction is distributed over a wide area or fluctuates, it was sometimes impossible to obtain stable vibration damping performance when the vibration direction or vibration pattern changed.

[0008] Therefore, in order to address the above problems, the object of the present invention is to realize a vibration damping device that can reliably absorb minute vibrations, has little variation in vibration damping function depending on the direction of vibration, and can obtain stable vibration damping performance even when the vibration pattern changes. [Means for solving the problem]

[0009] To solve the above problems, the vibration damping device according to the present invention is a vibration damping device comprising a support structure formed integrally, in which a plurality of accommodation spaces are provided inside, and a granular body consisting of powder or granular material is accommodated in each of the plurality of accommodation spaces to form a granular damper structure, wherein the plurality of accommodation spaces have a cross-sectional range along the planar direction of the support structure, and the cross-sectional ranges are arranged vertically and horizontally along the planar direction and form a space extending in a vertical direction perpendicular to the planar direction, thereby arranging the plurality of accommodation spaces inside the support structure. The shape of the cross-sectional structure of the accommodation spaces may change in the vertical direction. Here, it is preferable that the plurality of accommodation spaces have mutually identical shapes and dimensions.

[0010] According to the present invention, in a vibration damping device in which a granular damper structure is formed by providing a plurality of accommodation spaces inside an integrally constructed support structure and housing granular material inside these accommodation spaces, the plurality of accommodation spaces have a cross-sectional range along the planar direction of the support structure, and the cross-sectional range is arranged vertically and horizontally along the planar direction and also forms a space that extends vertically, thereby arranging the plurality of accommodation spaces inside the support structure. As a result, within the integral support structure, accommodation spaces having the same cross-sectional range along the planar direction are arranged vertically and horizontally in the planar direction, making it possible to distribute a uniform vibration damping function in the planar direction, and to stably suppress minute amplitudes in the planar direction while ensuring the vertical support rigidity of the support structure.

[0011] In the present invention, it is preferable that the containment space is provided with an upper structure in which the upper part in the vertical direction is tapered and the inner surface of the upper part is configured as a surface inclined with respect to a horizontal plane or a vertical plane. This makes it possible to further reduce the variation in vibration damping effect with respect to the direction of vibration transmitted from the outside to the support structure. In this case, the inside of the support structure is arranged so as to form a plurality of layers stacked in the vertical direction, consisting of a plurality of containment spaces arranged along the planar direction and a plurality of granular damper structures consisting of granular bodies disposed inside them, and it is preferable that the partition wall structure between the upper structure of the containment space and the bottom of the containment space belonging to the upper layer group which is adjacent to the upper structure of the containment space is configured to taper upward in accordance with the upper structure of the lower layer containment space. This makes it possible to secure a large volume of the granular damper structure while ensuring the rigidity of the support structure.

[0012] In the present invention, it is preferable that the support structure has an upper surface formed along the planar direction, a lower surface formed along the planar direction with a gap in the vertical direction relative to the upper surface, and side surfaces arranged between the upper surface and the lower surface facing outwards, and that the partition wall between the accommodation spaces constitutes a single, seamless structure in both the planar and vertical directions.

[0013] In the present invention, it is preferable that the cross-sectional ranges are arranged in a staggered pattern along the planar direction. Here, "staggered pattern" means that the vertical and horizontal arrangement directions in which the cross-sectional ranges are arranged in the planar direction are not perpendicular to each other. In this case, it is preferable that the cross-sectional ranges are configured in a hexagonal shape along the planar direction, and that the partition walls between the accommodation spaces constitute a honeycomb structure along the planar direction.

[0014] In the present invention, it is preferable that, within the support structure, a plurality of granular damper structures, each consisting of a plurality of accommodation spaces arranged along the planar direction and granular bodies disposed within them, are arranged to form at least one layer group.

[0015] In the present invention, it is desirable that the support structure be arranged such that a plurality of granular damper structures, each consisting of a plurality of accommodation spaces arranged along the planar direction and granular bodies disposed within them, are stacked in a vertical direction perpendicular to the planar direction to form a plurality of layers.

[0016] In the present invention, it is desirable that each of the plurality of layer groups has a hexagonal cross-sectional area along the planar direction, and that the partition walls between the accommodation spaces constitute a honeycomb structure along the planar direction.

[0017] In each of the above inventions, the support structure is preferably made of a metal material from the viewpoint of thermal conductivity, and the granular material is also preferably made of a metal material from the viewpoint of heat dissipation. Furthermore, the size of the granular material is preferably such that it has a spherical equivalent diameter of 1 μm to 10 mm, and preferably such that it has a spherical equivalent diameter of 5 μm to 2 mm. In addition, the space-filling rate of the granular material in the internal space is preferably 50% or more, and preferably 60% or more.

[0018] Furthermore, in each of the above inventions, the void ratio, which is the ratio of the accommodating space in the support structure, is preferably within the range of 0.2 (20%) to 0.3 (30%) in order to suppress a decrease in rigidity while increasing the vibration damping rate.

[0019] In the present invention, it is preferable that each of the plurality of containment spaces comprises a first inner surface aligned with the planar direction or the vertical direction, and a second inner surface configured as a surface inclined with respect to the horizontal or vertical plane. According to this, since the first inner surface and the second inner surface are formed in each of the plurality of containment spaces arranged inside the support structure, the movement trajectory of the granular material in the containment space when subjected to vibration becomes random, and the displacement direction of the granular material contained inside is dispersed. As a result, it is less likely that a bias will occur in which a part of the wall surface of the support structure vibrates greatly, a stable vibration damping effect can be obtained, and fluctuations in the vibration damping effect due to changes in vibration direction and amplitude can also be reduced. Furthermore, since the movement trajectory of the granular material in the containment space when subjected to vibration becomes random, the movement (agitation) of the granular material is facilitated, increasing the overall impact force, and the granular material rotates more easily, increasing the frictional force. As a result, both the damping effect due to the impact force on the inner surface of the containment space of the granular material and the damping effect due to the frictional force between the granular material and the inner surface or between the granular material itself can be increased, and thus the overall vibration damping effect can be increased. These effects are particularly effective in enhancing the damping effect when the granular damper structure has a high natural frequency and small amplitude (vibration displacement), such as the vibration damping device according to the present invention which has a support structure made of metal and granular material made of metal. Furthermore, in the above case, it is desirable to include a plurality of first inner surfaces having different surface orientations as the first inner surface, and a second inner surface having different surface directions as the second inner surface. The above effects can be further increased by such a configuration.

[0020] Next, the vibration isolation system according to the present invention is a vibration damping device comprising a support structure formed as a single unit, in which a plurality of accommodation spaces are provided inside, and a granular material consisting of powder or granular material is accommodated in each of the plurality of accommodation spaces to form a granular damper structure, wherein the plurality of accommodation spaces have a cross-sectional range along the planar direction of the support structure, and the cross-sectional range is arranged vertically and horizontally along the planar direction and extends vertically so that the plurality of accommodation spaces are arranged inside the support structure; and a vibration isolation unit used in a state where it is directly or indirectly stacked with respect to the support structure in the vertical direction, and capable of absorbing vibrations with an amplitude in the vertical direction larger than the maximum amplitude value in the vertical direction that the vibration damping device can absorb. In this case, the vibration isolation unit is preferably a vibration isolation table equipped with an air spring. Furthermore, when the vibration source and the object to be affected are separate entities, it is desirable that the vibration damping device be stacked (connected) to the object to be affected via the vibration isolation unit with respect to the vibration source.

[0021] Next, the vibration damping device according to the present invention is an operating system comprising an operating structure, wherein a plurality of accommodation spaces are provided inside an integrally constructed support structure, and a granular damper structure is formed by accommodating granular material consisting of powder or granular material in each of the plurality of accommodation spaces, wherein the plurality of accommodation spaces have a cross-sectional range along the planar direction of the support structure, and the cross-sectional range is arranged vertically and horizontally along the planar direction and extends in a vertical direction perpendicular to the planar direction, thereby arranging the plurality of accommodation spaces inside the support structure, and the operating structure is supported in the vertical direction by the vibration damping device. Here, the operating system is preferably a measuring instrument comprising a measuring structure as the operating structure, and in particular, the measuring structure is preferably equipped with an optical system for image capture or measurement.

[0022] In the present invention, it is preferable that the support structure is formed by a laminated manufacturing method in which granular materials are integrated by melting or sintering. Here, it is desirable that the accommodation space and the granular materials disposed inside the accommodation space are configured by not partially melting or sintering the granular materials during the process of the laminated manufacturing method.

Effects of the Invention

[0023] According to the present invention, it is possible to realize a vibration damping device that can reliably absorb minute vibrations, has little variation in the vibration damping function depending on the vibration direction, and can obtain stable vibration damping performance even with changes in the vibration mode.

Brief Description of the Drawings

[0024] [Figure 1] It is a plan view (a) and a side view (b) of the vibration damping device according to the first embodiment of the present invention. [Figure 2] It is a cross-sectional view taken along line A-A (a) and a cross-sectional view taken along line B-B (b) of the vibration damping device of the first embodiment. [Figure 3] It is a plan view (a) and a side view (b) of the vibration damping device according to the second embodiment of the present invention. [Figure 4] It is a cross-sectional view taken along line A-A (a) and a cross-sectional view taken along line B-B (b) of the second embodiment. [Figure 5] It is a schematic perspective view showing a state where four vibration damping devices of each embodiment are interposed between the vibration isolation table and the main body of the laser interferometer, and showing a state where the vibration mode of the lower part of the laser interferometer supported by the vibration damping device is detected by a servo accelerometer. [Figure 6] It is a diagram (a) showing the state of the interference fringes of the lens obtained at the time of vibration detection shown in FIG. 5 and a diagram (b) showing the state where the interference fringes sway due to external vibration. [Figure 7]Figure 5 shows bar graphs illustrating the magnitude of vibration acceleration in the X, Y, and Z directions for each of the following cases during vibration detection: when the interferometer is used alone without a vibration damping device; when vibration-damping rubber is used instead of a vibration damping device; when the vibration damping device of the first embodiment and vibration-damping rubber are used in combination; and when only the vibration damping device of the first embodiment is used. [Figure 8] Figure 7 is a graph showing the frequency characteristics (0-100Hz) of vibration acceleration in the Z direction during vibration detection. [Figure 9] Figure 7 shows a graph illustrating the frequency characteristics (0-100Hz) of vibration acceleration in the Y direction during vibration detection. [Figure 10] Figure 7 shows a graph illustrating the frequency characteristics (0-100Hz) of vibration acceleration in the X direction during vibration detection. [Figure 11] Figure 5 shows bar graphs illustrating the magnitudes of vibration acceleration in the X, Y, and Z directions for each of the following cases during vibration detection: when the interferometer is used alone without a vibration damping device; when the vibration damping device of the first embodiment is used; when a solid dummy device having the same external shape as the vibration damping device of the second embodiment is used; and when only the vibration damping device of the second embodiment is used. [Figure 12] Figure 11 is a graph showing the frequency characteristics (0-100Hz) of vibration acceleration in the Z direction during vibration detection. [Figure 13] Figure 11 shows a graph illustrating the frequency characteristics (0-100Hz) of vibration acceleration in the Y direction during vibration detection. [Figure 14] Figure 11 shows a graph illustrating the frequency characteristics (0-100Hz) of vibration acceleration in the X direction during vibration detection. [Figure 15] This is a schematic perspective view showing how the vibration pattern of the lower part of the laser interferometer, supported by the vibration damping devices, is detected by a servo accelerometer when three vibration damping devices of each embodiment are interposed between the vibration isolation table and the main body of the laser interferometer via a support plate. [Figure 16]This is a schematic perspective view showing how, when three vibration damping devices of each embodiment are interposed between the vibration isolation table and the main body of the laser interferometer via a support plate, the vibration pattern on the lens stage of the laser interferometer supported by the vibration damping devices is detected by a servo accelerometer. [Figure 17] Figure 15 shows bar graphs illustrating the magnitude of vibration acceleration in the X, Y, and Z directions for each of the following cases during vibration detection: when vibration-damping rubber is interposed instead of the vibration-damping device, when the vibration-damping device of the first embodiment is interposed, when a solid dummy having the same external shape as the vibration-damping device of the second embodiment is interposed, and when the vibration-damping device of the second embodiment is interposed. [Figure 18] Figure 17 is a graph showing the frequency characteristics (0-100Hz) of vibration acceleration in the Z direction during vibration detection. [Figure 19] Figure 17 shows a graph illustrating the frequency characteristics (0-100Hz) of vibration acceleration in the Y direction during vibration detection. [Figure 20] Figure 17 shows a graph illustrating the frequency characteristics (0-100Hz) of vibration acceleration in the X direction during vibration detection. [Figure 21] Figure 16 shows bar graphs illustrating the magnitude of vibration acceleration in the X, Y, and Z directions for each of the following cases during vibration detection: when vibration-damping rubber is interposed instead of a vibration-damping device, when the vibration-damping device of the first embodiment is interposed, when a solid dummy having the same external shape as the vibration-damping device of the second embodiment is interposed, when the vibration-damping device of the second embodiment is interposed, and when no vibration-damping device is interposed. [Figure 22] Figure 21 is a graph showing the frequency characteristics (0-100Hz) of vibration acceleration in the Z direction during vibration detection. [Figure 23] Figure 21 shows a graph illustrating the frequency characteristics (0-100Hz) of vibration acceleration in the Y direction during vibration detection. [Figure 24] Figure 21 shows a graph illustrating the frequency characteristics (0-100Hz) of vibration acceleration in the X direction during vibration detection. [Figure 25]Figure 16 is a graph comparing the overall values ​​obtained from five measurements when vibration detection was performed without using a vibration isolation table. [Figure 26] Figure 15 is a graph comparing the overall values ​​obtained from five measurements when vibration detection was performed without using a vibration isolation table. [Figure 27] Figure 16 is a graph comparing the overall values ​​obtained from four measurements using a vibration isolation table with the vibration detector shown. [Figure 28] Figure 15 is a graph comparing the overall values ​​obtained from four measurements when a vibration isolation table was used during vibration detection. [Modes for carrying out the invention]

[0025] Next, embodiments of the present invention will be described in detail with reference to the attached drawings. First, a vibration damping device of the first embodiment according to the present invention will be described with reference to Figures 1 and 2. As shown in Figure 1, the vibration damping device 100 of the first embodiment is composed of a support structure 101 made of a single cubic metal. The support structure 101 is integrally composed of various metals such as stainless steel (such as martensitic stainless steel like SUS420J2), aluminum alloy (such as Al-Mg-Si alloy like AlSi10Mg), and other iron-based, titanium-based, and copper-based metals. In addition to metal, the support structure 101 of the vibration damping device 100 may be composed of synthetic resins such as thermoplastic resins such as acrylonitrile butadiene styrene, polylactic acid, and polycarbonate, ceramics such as tricalcium phosphate, alumina, and zirconia, and biochemical substances such as silicon, calcium phosphate, and zinc. The support structure 101 can be formed using additive manufacturing with any of these materials. As for additive manufacturing methods, it is preferable to use powder bed fusion methods such as selective laser sintering (SLS), selective thermal sintering (SHS), electron beam melting (EBM), and direct metal laser sintering (DMLS), as well as material jetting methods (material jet method or binder jet method) that solidify metal powder by spraying a binder. These methods involve melting or sintering granular materials such as powders or granules to bond them together.

[0026] The support structure 101 comprises an upper surface 101a, a lower surface 101b, and four side surfaces 101c positioned circumferentially between the upper surface 101a and the lower surface 101b. In the illustrated example, each of these surfaces is a flat surface. Although not particularly limited, in this embodiment, the upper surface 101a and the lower surface 101b are used in the position shown in Figure 1(b), for example, with the upper surface 101a supporting the object to be supported and the lower surface 101b being held by a support such as the floor. In the illustrated example, the upper surface 101a and the lower surface 101b extend along the planar direction Fh, and the measuring surface 101c extends along the vertical direction Fv.

[0027] As shown in Figure 2, multiple storage spaces 110, 120, 130, 140, and 150 are formed inside the support structure 101. Preferably, these storage spaces 110, 120, 130, 140, and 150 are formed in a sealed state inside the integrated support structure 101, as shown in the figure. However, a portion of the storage space may open on either the top surface 101a, the bottom surface 101b, or the side surface 101c, and this opening may be closed by fixing some kind of member to each surface of the support structure 101. Unlike the other storage spaces 120 and 140 provided in the periphery, the storage spaces 110, 130, and 150 have the same planar shape in the cross-sectional area along the plane of Figure 2 (the horizontal direction shown along the plane of paper in Figures 1(a) and 2(a)), and each has a storage space of the same structure that extends in the vertical direction. In particular, multiple accommodation spaces 110, each having a cross-sectional area and structure identical to one another, are arranged vertically and horizontally along the planar direction within the support structure 101. Furthermore, the partition walls between each accommodation space 110, 120, 130, 140, and 150 form a seamless, integrated structure within the entire support structure 101, without any joints in either the planar direction Fh or the vertical direction Fv. This allows for the formation of numerous granular damper structures (105) within the support structure 101, thereby enhancing vibration damping while increasing the rigidity of the support structure 101.

[0028] The above-mentioned containment spaces 110, 120, 130, 140, and 150 contain granular material 160, such as powder or granules. The granular material 160 can be made of the aforementioned materials that constitute the support structure 101, for example, various metals, synthetic resins, ceramics, biochemical substances, etc. In these cases, it is preferable that the granular material 160 and the support structure 101 are made of the same material, and it is even more desirable that the material of the support structure 101 (the partition wall) is generated by, for example, melting or sintering the granular material 160. In this way, it becomes possible to simultaneously form the structural part of the support structure 101 and the containment spaces 110, 120, 130, 140, and 150 and the granular material 160 contained within these containment spaces by the additive manufacturing method described above. Here, the containment spaces 110, 120, 130, 140, and 150 and the granular material 160 contained within these containment spaces constitute the granular damper structure 105.

[0029] In the containment spaces 110, 120, 130, 140, and 150, a bottom surface 110a, an top surface 110b, and a side surface 110c are provided inside the support structure 101. The bottom surface 110a is preferably a flat surface as shown in the figure. Furthermore, the top surface 110b is preferably inclined so that the cross-sectional area along the planar direction narrows and tapers towards the top, as shown in the figure. This is to prevent collapse of the overhang portion above the containment spaces 110, 120, 130, 140, and 150 when the support structure 101 is formed by melting or sintering granular material using additive manufacturing, by providing an inclined structure with a limited inclination angle. Furthermore, the side surface 110c is not particularly limited, but it is preferably a vertical surface extending along the vertical direction as shown in the figure. For each of the above points, the reference numerals are omitted for the other containment spaces 120, 130, 140, and 150, but they can be configured in the same way as containment space 110.

[0030] In the granular damper structure 105 schematically shown in Figure 2, which is configured according to this embodiment, the numerous granular bodies (groups) 160 filled in the containment spaces 110, 120, 130, 140, and 150 are in a vibrating state. As a result, vibrational energy transmitted from the outside is absorbed by being converted into thermal energy as the numerous granular bodies 160 filled in the containment spaces collide with or come into contact with the inner surface of the containment spaces or other granular bodies 160.

[0031] In this embodiment, the granular bodies (groups) 160 described above, that is, the individual granular bodies 160 constituting the group of granular bodies, are not particularly limited, but are usually preferably 1 μm-10 mm in size (representative values ​​such as average particle size and median) in terms of spherical diameter for the same volume, and preferably within the range of 5 μm-2 mm. In particular, it is even more desirable that they be within the range of 10 μm-1 mm. If they exceed these ranges, handling becomes difficult, and adverse effects due to the operation of the granular bodies 160 may occur. If they fall below these ranges, the vibration damping effect may decrease. The shape of the granular bodies 160 is preferably close to a sphere, and in particular, it is desirable that they be spherical. From the viewpoint of thermal conductivity, etc., the material of the granular bodies 160 is preferably metal. Also, from the viewpoint of heat dissipation, etc., it is desirable that the partitions (the granular body damper structure itself) constituting the containment spaces 110, 120, 130, 140, 150 are also made of metal. Regarding the formation of the granular damper structure 105, when a group of granular bodies 160 (a large number of granular bodies) is arranged in the accommodation spaces 110, 120, 130, 140, and 150, the group of granular bodies 160 can be arranged in various states. In the present invention, the multiple granular bodies 160 housed in the accommodation spaces 110, 120, 130, 140, and 150 are arranged in a vibrating state. More specifically, the granular bodies 160 can collide with the inner surfaces of the accommodation spaces 110, 120, 130, 140, and 150, or with other granular bodies 160, due to vibrations and accelerations received from the outside. The number of granular materials 160 to be contained in the containment spaces 110, 120, 130, 140, and 150 is not particularly limited, but generally, the space filling rate should be such that the granular materials 160 can easily fill the containment spaces 110, 120, 130, 140, and 150. Typically, the space filling rate of the granular materials 160 in the containment spaces 110, 120, 130, 140, and 150 is preferably in the range of 45-98%, particularly preferably in the range of 50-92%, and even more preferably in the range of 55-80%. In particular, in order to ensure vibration damping over a relatively wide frequency range, it is preferable that the space filling rate is in the range from sparsely packed to randomly packed, i.e., around 50-60%. This space filling rate is even more preferable if it is in the range from randomly packed to packedly packed, i.e., around 60-74%.However, if there is a distribution in the particle size of the granular material, the value of the space-filling rate will also change to some extent within the above range. Furthermore, when manufacturing using additive manufacturing methods such as powder sintering 3D printing, the granular damper can be formed directly by not discharging the unsintered material powder. In this case, it has been confirmed that when the particles are dense metal spheres, the space-filling rate of the powder is approximately 60%.

[0032] Furthermore, while it is preferable that the containment spaces 110, 120, 130, 140, and 150 are closed as shown in the figure, openings may be present as long as they do not impair the support function of the support structure 101. In particular, even if there are pores large enough for the granular material 160 to pass through, in most cases the support function of the support structure 101 itself can be avoided. Moreover, even if such an impairment occurs, the problem can be eliminated by closing the openings or pores with lids or plugs.

[0033] The cross-sectional ranges of the multiple storage spaces 110, 120, 130, 140, and 150 along the planar direction Fh are preferably adjacent to each other via partition walls within the support structure 101 and arranged vertically and horizontally along the planar direction Fh. In particular, as shown in the figure, it is preferable that they be arranged in a staggered arrangement so as to achieve a high filling rate along the planar direction Fh. While it is most desirable that the cross-sectional ranges in this staggered arrangement have the same shape, they may also have cross-sectional ranges with different shapes. In this embodiment, as shown in Figure 2(a), in multiple rows of multiple storage spaces 110, 120, 130, 140, and 150 arranged diagonally (30 degrees), each storage space is set to be in a staggered arrangement (alternating, alternating, zigzag), that is, each cross-sectional range is set to be alternating. Here, a staggered arrangement means that the vertical and horizontal arrangement directions in which each cross-sectional range is arranged are not orthogonal and have a specific angle other than 90 degrees (for example, 60 degrees in the illustrated example). Furthermore, it is desirable that the cross-sectional ranges of the multiple storage spaces arranged vertically and horizontally (preferably in a staggered pattern) be the same shape as the storage space 110. In such an arrangement, as shown in the figure, it is desirable that the storage spaces 110, each having a hexagonal (regular hexagonal) cross-sectional range, be arranged in a staggered pattern so that a honeycomb-shaped partition wall structure is formed inside the support structure 101. As described above, this partition wall structure is constructed as a seamless, integrated structure.

[0034] The relationship between the internal volume of the containment spaces 110, 120, 130, 140, and 150 and the volume of the granular material 160 should be such that, based on the vibrational energy received from the outside, the granular material 160 can move within the containment spaces 110, 120, 130, 140, and 150, and as a result, at least one of the following occurs: vibration damping effect A, which utilizes the reaction force generated when the granular material 160 collides with the inner wall surfaces of the containment spaces 110, 120, 130, 140, and 150, and vibration damping effect B, which converts the frictional energy generated by the vibration between the particles of the granular material 160 into heat. However, it is desirable that the environment be such that both vibration damping effects A and B occur.

[0035] In the vibration damping device 100 of this embodiment, as described above, the support structure 101 has a support structure 101 in which granular damper structures 105, each consisting of a housing space 110, 120, 130, 140, 150 and a granular body 160 housed inside it, are arranged vertically and horizontally (preferably in a staggered pattern) along the planar direction. In this case, since each granular damper structure 105 extends in the vertical direction Fv, the support structure 101 as a whole has a single layer of internal structure in which multiple granular damper structures 105 are arranged planarly with partitions in between. With such an internal structure, the vibration damping effect of each granular damper structure 105 is realized in a planarly distributed state, so that the overall rigidity of the support structure 101 can be ensured, and the vibration damping force obtained by the vibration damping device 100 can act on vibrations in all directions, thereby suppressing anisotropy of the vibration damping effect.

[0036] Furthermore, in the granular damper structure 105, the upper parts of the containment spaces 110, 120, 130, 140, and 150 are tapered, and the upper inner surfaces are configured as surfaces inclined with respect to the horizontal and vertical planes. As a result, the orientation of the inner surfaces of the containment spaces is dispersed, which further reduces the variation in the damping effect with respect to the direction of vibrations transmitted from the outside into the support structure 101. Here, "a surface inclined with respect to ~" refers to a surface that is neither parallel nor perpendicular to ~.

[0037] Furthermore, in this embodiment, the cross-sectional ranges of the multiple accommodation spaces 110, 120, 130, 140, and 150 constituting the multiple granular damper structures 105 are arranged in a staggered pattern along the planar direction Fh. This suppresses a decrease in the rigidity of the support structure 101 while increasing the volume of the accommodation spaces, thereby enhancing the vibration damping effect. In particular, in the illustrated example, the cross-sectional ranges of the accommodation spaces 110, 120, 130, 140, and 150 along the planar direction Fh are configured in a hexagonal shape and arranged in a staggered pattern, thereby forming a honeycomb-like internal structure (partition wall structure). This further improves the rigidity of the support structure 101 and further increases the volume of the granular damper structure 105, thereby enhancing the vibration damping effect.

[0038] Next, a vibration damping device according to a second embodiment of the present invention will be described with reference to Figures 3 and 4. The vibration damping device 200 of this second embodiment is basically the same as the vibration damping device 100 of the first embodiment in that a plurality of granular damper structures 205 are configured inside the support structure 201. The support structure 201 is also provided with an upper surface 201a, a lower surface 201b, and a side surface 201c, similar to the first embodiment. In this embodiment, mounting holes 201d for attaching to objects to be supported, objects to be held, and other various objects, and fixing screw holes 201e for fixing fixing members 203 for engaging with objects are provided. That is, the support structure 201 is provided with mounting holes 201d that penetrate from the upper surface 201a to the lower surface 201b at each of the four corners, so that the support structure 201 can be attached and fixed to other members by mounting screws 202, etc. Furthermore, fixing screw holes 201e are provided along the periphery of each side of the upper surface 201a, allowing the frame-shaped (rod-shaped) fixing member 203 shown in the figure to be fixed to the upper part (upper surface 201a) of the support structure 201 by screwing fixing means such as fixing screws 204 into the fixing screw holes 201e. The fixing member 203 is a member that abuts against the edge of a support (not shown) to prevent the support from shifting horizontally when the support is placed on the upper surface 201a. Moreover, in this embodiment, the upper opening of the mounting hole 201d opens into a stepped portion 201f which is set one step lower than the upper surface 201a. This allows the heads of the aforementioned mounting screws 202 to not protrude above the upper surface 201a, so that even when the support structure 201 is fixed using the mounting screws 202, interference between the support supported on the support structure 201 and the heads of the mounting screws 202 can be avoided.

[0039] In the second embodiment, as shown in Figure 4, the granular damper structure 205 is constructed by arranging the accommodation spaces 210, 220, 230, 240, and 250 along the planar direction and housing the granular material 260 within them, similar to the first embodiment. However, in this embodiment, the granular damper structure 205 is not arranged in a single layer along the planar direction Fh as in the first embodiment, but is configured to be arranged in multiple layers. That is, the granular damper structure 205 has accommodation spaces 210, 220, 230, 240, and 250, each comprising a first layer group 205A in which multiple granular damper structures 205 are arranged along the planar direction, a second layer group 205B similarly arranged along the planar direction, and a third layer group 205C arranged along the planar direction in the uppermost layer. In this embodiment, since multiple granular damper structures 205 are formed in the vertical direction Fv, which is the support direction of the support structure 201, the damping effect can be increased by increasing the overall volume of the granular damper structure 205, and the damping effect can be made uniform with respect to vibration directions introduced from the outside, and furthermore, damping effect can be achieved over a wider frequency band.

[0040] Here, the granular damper structures 205 belonging to the first layer group 205A and the granular damper structures 205 belonging to the second layer group 205B are arranged adjacent to each other vertically, and the granular damper structures 205 belonging to the second layer group 205B and the granular damper structures 205 belonging to the third layer group 205C are arranged adjacent to each other vertically. As shown in the figure, the cross-sectional ranges of each accommodation space 210, 220, 230, 240, and 250 along the planar direction Fh of each accommodation space are arranged in a staggered pattern along the planar direction in all three layers: the first layer group 205A, the second layer group 205B, and the third layer group 205C, similar to the first embodiment. Furthermore, in the first layer group 205A, the second layer group 205B, and the third layer group 205C, the cross-sectional ranges arranged along the planar direction Fh are aligned in the vertical direction Fv. In other words, the respective cross-sectional areas are arranged so that they overlap planarly between the lower and upper storage spaces.

[0041] The superstructures of the accommodation spaces 210, 220, 230, 240, and 250 in each of the aforementioned layer groups 205A, 205B, and 205C are configured to taper towards the top, similar to the superstructure of the accommodation space in the first embodiment. The partition wall structure between the superstructure of each accommodation space and the bottom of the accommodation spaces 210, 220, 230, 240, and 250 belonging to the upper layer group, which are located adjacent to each other above, is configured to taper towards the top, corresponding to the superstructure of the lower accommodation space. As a result, the bottom of the accommodation spaces 210, 220, 230, 240, and 250 belonging to the upper layer group has a cross-sectional area that is limited towards the periphery, in a manner in which the space is closed off from the center as it goes downwards, corresponding to the tapered partition wall structure. With this configuration, the bottom structure of the accommodation space above is configured in accordance with the upper structure of each accommodation space, which makes it easier to ensure the rigidity of the support structure 205 and to secure a larger volume for the granular damper structure 205, thereby increasing the vibration damping effect.

[0042] In this embodiment, groups 205A, 205B, and 205C of multiple granular damper structures 205 are provided. Similar to the first embodiment, in each layer group, the cross-sectional range along the planar direction Fh is arranged in a staggered pattern, and more specifically, a honeycomb-shaped partition wall structure is realized overall. This makes it possible to improve vibration damping while suppressing a decrease in the rigidity of the support structure 201.

[0043] Incidentally, the vibration damping devices 100 and 200 that were actually prototyped are equipped with support structures 101 and 201 that were manufactured integrally by additive manufacturing. These support structures 101 and 201 were manufactured using SUPERSTAR21, made of SUS420J2 (stainless steel), manufactured by Sodick, as the raw material metal powder (which also forms the granular material of the granular damper structure), and additive manufacturing was carried out using a 3D printer manufactured by Sodick. The above stainless steel powder was distributed in a manner close to a normal or Gaussian distribution within a particle size range of 16.889 [μm] to 79.317 [μm], with a median diameter of 36.399 [μm], a mode diameter of 38.843 [μm], an average diameter (weight-average diameter, i.e., the average diameter of the important (volume) reference distribution) of 36.089 [μm], and a standard deviation of 0.131. The spherical equivalent diameter was determined by the light scattering method (laser diffraction / scattering method). The manufacturing equipment used was a Sodick OPM250L precision 3D printer and a Sodick LPM325 high-speed metal 3D printer. In the first embodiment, the external dimensions were 50.5 mm in height and 90 mm in length and width, with a powder volume of 130.2 cc and a laser sintering volume of 245.2 cc. The distance between opposite sides of the regular hexagon in the cross-sectional area was 13 mm, and the thickness of the partition wall was 1.5 mm. In the second embodiment, the external dimensions were 48 mm in height and 90 mm in length and width, with a powder volume of 150.0 cc and a laser sintering volume of 190.2 cc. The distance between opposite sides of the regular hexagon was 13 mm, and the thickness of the partition wall was approximately 1.0 mm.

[0044] Furthermore, a dummy vibration damping device (also referred to as the Ver.2 dummy) was manufactured, having the same external dimensions as the vibration damping device 200 of the second embodiment, and consisting entirely of a solid metal support structure without any internal containment space or granular material. This dummy was then compared with each embodiment. However, because this vibration damping device dummy is solid, it is heavier (2818g) than the vibration damping device 100 (2644g) and vibration damping device 200 (2296g), so a decrease in the overall value due to this weight difference is also possible.

[0045] Figure 5 shows a measuring instrument 300 consisting of an optical interferometer (Olympus Optical Co., Ltd., laser interferometer, product number: KIF-201) that uses the vibration damping device 100 of this embodiment to suppress vibrations of the measurement structure. This measuring instrument 300 includes a measuring stage 301 on which an object to be measured 400 such as an optical lens is placed, a measuring structure 302 which incorporates a light source for irradiating the measurement surface of the object to be measured 400 placed on the measuring stage 301, an optical system and a reference surface, a moving mechanism 303 for moving the measuring stage 301 relative to the measuring structure 302, left and right support legs 304, 304 that support each of the above components, and a vibration isolation table 305 (passive vibration isolation table equipped with air springs) that supports the support legs 304 and performs vibration isolation by air dampers or the like. The vibration isolation table 305 is a vibration isolation unit capable of absorbing vibrations with amplitudes larger than the maximum amplitude value that can be absorbed by the vibration damping devices 100 and 200 of each embodiment. This allows large amplitude vibrations to be absorbed by the vibration isolation unit while minute vibrations are efficiently removed by the vibration damping devices 100 and 200.

[0046] In the measuring machine 300, as an example, by placing the object to be measured 400 on the measuring stage 301, the measuring structure 302 separates the light (laser beam) from the light source (laser oscillator) via a beam splitter into a component directed toward the image sensor (CCD, etc.) and a component directed toward a reference plate equipped with a reference surface. By irradiating the object to be measured 400 with the latter component, interference fringes are generated based on the optical path difference between the reflected light from the reference surface of the reference plate and the reflected light from the surface of the object to be measured. These interference fringes allow the shape of the surface to be measured and the optical effect caused by that shape to be determined. Figure 6(a) shows an optical lens placed on the measuring stage 301 as the object to be measured 400, and a display unit 306 that displays an image for confirming the surface characteristics of the optical lens using the interference fringes 401. Since the interference fringes 401 show the details of the surface characteristics, if the measuring machine 300 is subjected to vibration, the interference fringes 401 move as shown in Figure 6(b), as shown in 402, making measurement difficult. Therefore, vibration isolation measures for the measuring instrument 300 are extremely important, especially for optical measuring instruments that show fine structures.

[0047] In the first measurement experiment, the vibration damping devices 100 of each embodiment were interposed at four locations between the support legs 304 of the measuring machine 300 and the vibration isolation table 305. Specifically, including the comparison target, measurements 1-4 were performed using a detector 500 with three sensors (Rion Co., Ltd., servo accelerometer, product number: LS-10C) on one of the support legs 304 (Z direction, i.e., the vertical direction Fv, and the Y and X directions of the planar direction Fh). The results are shown in Figures 7-10. Figure 7 shows the overall values ​​(vibration acceleration) of each vibration measured in Measurement 1-4 in the frequency band of 0-500 [Hz], Figure 8 shows the vibration spectrum in the Z direction of Measurement 1-4, Figure 9 shows the vibration spectrum in the Y direction of Measurement 1-4, and Figure 10 shows the vibration spectrum in the X direction of Measurement 1-4. In each vibration spectrum, only the 0-100 [Hz] range, where the main vibration acceleration is observed within the above frequency band, is shown.

[0048] Next, in the second measurement experiment, under the same conditions as above, measurements 5-8 were performed using three sensors (Rion Co., Ltd. servo accelerometer, product number: LS-10C) on one of the support legs 304 (in the Z direction, i.e., the vertical direction Fv, and the Y and X directions of the planar direction Fh). These were: without the vibration damping devices 100 and 200 (interferometer alone: ​​"Measurement 5"), with the vibration damping device 100 (powder damper Ver.1: "Measurement 6"), with a solid dummy device of the same dimensions as the vibration damping device 200 (powder damper Ver.2 dummy: "Measurement 7"), and with only the vibration damping device 200 (powder damper Ver.2: "Measurement 8"). The results are shown in Figures 11-14. Figure 11 shows the overall values ​​(vibration acceleration) of each vibration measured in measurement 5-8 in the frequency band of 0-500 [Hz], Figure 12 shows the vibration spectrum in the Z direction of measurement 5-8, Figure 13 shows the vibration spectrum in the Y direction of measurement 5-8, and Figure 14 shows the vibration spectrum in the X direction of measurement 5-8. In each vibration spectrum, only the 0-100 [Hz] range within the above frequency band where the main vibration acceleration is observed is shown.

[0049] Furthermore, in the third measurement experiment, in order to improve upon the difficulty in obtaining uniform support with the previous four support points, the front portions of the left and right support legs 304 were integrally supported via a single support plate made of metal plate material (stainless steel, SUS304c), as shown in the measuring machine 300' in Figure 15. Separate support plates of the same thickness were interposed at the rear portions of the left and right support legs 304. The front was supported from below at the center of the integral support plate, and the rear was supported from below on the left and right support plates, resulting in a total of three support points. The detector 500 was placed on the center of the integral support plate at the front, and measurements 9-13 were performed. The results are shown in Figures 17-20. Figure 17 shows the overall values ​​(vibration acceleration) of each vibration measured in measurements 9-13 in the frequency band of 0-500 [Hz], Figure 18 shows the vibration spectrum in the Z direction of measurements 9-13, Figure 19 shows the vibration spectrum in the Y direction of measurements 9-13, and Figure 120 shows the vibration spectrum in the X direction of measurements 9-13. In each vibration spectrum, only the 0-100 [Hz] range, where the main vibration acceleration is observed within the above frequency band, is shown. Each measurement consists of five configurations: without the vibration damping devices 100 and 200 (interferometer alone: ​​"Measurement 9"), with a solid dummy device of the same dimensions as the vibration damping device 200 (powder damper Ver.2 dummy: "Measurement 10"), with only the vibration damping device 200 (powder damper Ver.2: "Measurement 11"), with the vibration damping device 100 (powder damper Ver.1: "Measurement 12"), and with vibration-damping rubber (vibration-damping rubber: "Measurement 13").

[0050] Furthermore, in the fourth measurement experiment, in order to detect vibration patterns corresponding to the actual measurement accuracy of measuring instruments 300 and 300', the detector 500 was placed on the measurement stage 301, and measurements 14-18 were performed as shown in measuring instrument 300″ in Figure 16. The results are shown in Figures 21-24. Figure 21 shows the overall values ​​(vibration acceleration) of each vibration measured in measurements 14-18 in the frequency band of 0-500 [Hz], Figure 22 shows the vibration spectrum in the Z direction of measurements 14-18, Figure 23 shows the vibration spectrum in the Y direction of measurements 14-18, and Figure 24 shows the vibration spectrum in the X direction of measurements 14-18. In each vibration spectrum, only the 0-100 [Hz] range of the above frequency band where the main vibration acceleration is observed is shown. Each measurement consists of five configurations: without the vibration damping devices 100 and 200 (interferometer alone: ​​"Measurement 14"), with a solid dummy device of the same dimensions as the vibration damping device 200 (powder damper Ver.2 dummy: "Measurement 15"), with only the vibration damping device 200 (powder damper Ver.2: "Measurement 16"), with the vibration damping device 100 (powder damper Ver.1: "Measurement 17"), and with vibration-damping rubber (vibration-damping rubber: "Measurement 18").

[0051] Furthermore, in the fifth measurement experiment, instead of the detector 500 in the measuring machine 300″ shown in Figure 16, a detector capable of measuring up to a higher frequency band (3000 [Hz]) (Bruel & KJaer (now HBK), product number: 4524, 3-axis piezoelectric OrthoShear acceleration pickup) was used, and measurements 19-23 were performed without using the vibration isolation table 305 (without an air stage). The results are shown in Figure 25. Figure 25 shows the frequencies from 0 to 3000 [Hz] of each vibration measured in measurements 19-23. This is the overall value (vibration acceleration) in the bandwidth. Each measurement is performed in five configurations: without the vibration damping devices 100 and 200 (interferometer alone: ​​"Measurement 19"), with a solid dummy device of the same dimensions as the vibration damping device 200 (powder damper Ver.2 dummy: "Measurement 20"), with only the vibration damping device 200 (powder damper Ver.2: "Measurement 21"), with the vibration damping device 100 (powder damper Ver.1: "Measurement 22"), and with vibration-damping rubber (vibration-damping rubber: "Measurement 23").

[0052] Furthermore, in the sixth measurement experiment, instead of the detector 500 in the measuring machine 300' shown in Figure 15, a detector capable of measuring up to a higher frequency band (Bruel & Kjaer (now HBK), product number: 4524, 3-axis piezoelectric OrthoShear acceleration pickup) was used, and measurements 24-28 were performed without using the vibration isolation table 305 (without an air stage). The results are shown in Figure 26. Figure 26 shows the overall values ​​(vibration acceleration) of each vibration measured in measurements 24-28 in the frequency band of 0-3000 [Hz]. Each measurement consists of five configurations: without the vibration damping devices 100 and 200 (interferometer alone: ​​"Measurement 24"), with a solid dummy device of the same dimensions as the vibration damping device 200 (powder damper Ver.2 dummy: "Measurement 25"), with only the vibration damping device 200 (powder damper Ver.2: "Measurement 26"), with the vibration damping device 100 (powder damper Ver.1: "Measurement 27"), and with vibration-damping rubber (vibration-damping rubber: "Measurement 28").

[0053] Furthermore, in the 7th measurement experiment, instead of the detector 500 in the measuring instrument 300″ shown in Figure 16, a detector capable of measuring up to a higher frequency band (3000 [Hz]) (manufactured by B&K (now HBK), product number: 4524, 3-axis piezoelectric OrthoShear acceleration pickup) was used, and measurements 29-32 were performed using the vibration isolation table 305 (with air stage), and the results are shown in Figure 27. Figure 27 shows the 0-300 range of each vibration measured in measurements 29-32. This is the overall value (vibration acceleration) in the frequency band of 0 Hz. Each measurement is performed in one of four configurations: without the vibration damping devices 100 and 200 (interferometer alone: ​​"Measurement 29"), with a solid dummy device of the same dimensions as the vibration damping device 200 (powder damper Ver.2 dummy: "Measurement 30"), with only the vibration damping device 200 (powder damper Ver.2: "Measurement 31"), and with the vibration damping device 100 (powder damper Ver.1: "Measurement 32").

[0054] Furthermore, in the eighth measurement experiment, instead of the detector 500 in the measuring machine 300' shown in Figure 15, a detector capable of measuring up to a higher frequency band (manufactured by B&K (now HBK), product number: 4524, 3-axis piezoelectric OrthoShear acceleration pickup) was used, and measurements 33-36 were performed using the vibration isolation table 305 (with air stage). The results of these measurements are shown in Figure 28. Figure 28 shows the overall values ​​(vibration acceleration) of each vibration measured in measurements 32-35 in the frequency band of 0-3000 [Hz]. Each measurement is performed in one of four configurations: without the vibration damping devices 100 and 200 (interferometer alone: ​​"Measurement 33"), with a solid dummy device of the same dimensions as the vibration damping device 200 (powder damper Ver.2 dummy: "Measurement 34"), with only the vibration damping device 200 (powder damper Ver.2: "Measurement 35"), and with the vibration damping device 100 (powder damper Ver.1: "Measurement 36").

[0055] The above-mentioned measurements 1-36 can be summarized as follows. The vibration spectrum obtained by analyzing the detected values ​​from detector 500 showed a spectral distribution in the 0-500 [Hz] frequency band, but significant peaks were mainly found in the 0-300 [Hz] frequency band, with the 0-100 [Hz] frequency band being the main range of vibration spectral values. Therefore, the spectral distribution in this frequency band (0-100 [Hz]) is shown in Figures 8-10, 12-14, 18-20, and 22-24. External vibration factors affecting the measuring instrument included the air compressor, which was around 50-60 [Hz], and other vibrations transmitted from nearby roads. Furthermore, with a separate detector, a spectral distribution was obtained in the 0-3000 [Hz] frequency band, but significant peaks were found in the 0-600 [Hz] frequency band, with the 0-300 [Hz] frequency band being the main range of vibration spectral values.

[0056] • First measurement experiment (Figure 5: Supported at 4 points, vibration isolation table 305 present, detector 500, detection location = on support leg 304) Measurement 1 (Measuring instrument 300 alone = without support structure, Figures 7-10) Measurement 2 (vibration-damping rubber only, Figures 7-10) Measurement 3 (Vibration damping device 100 and vibration-damping rubber, Figures 7-10) Measurement 4 (Vibration damping device 100 only, Figures 7-10)

[0057] • Second measurement experiment (Figure 5: Supported at 4 points, vibration isolation table 305 present, detector 500, detection location = on support leg 304) Measurement 5 (Measuring instrument 300 alone = without support structure, Figures 11-14) Measurement 6 (Vibration damping device 100 only, Figures 11-14) Measurement 7 (Dummy vibration damping device only, Figures 11-14) Measurement 8 (Vibration damping device 200 only, Figures 11-14)

[0058] • Third measurement experiment (Figure 15: 3-point support, vibration isolation table 305, detector 500, detection location = upper center of the front support plate) Measurement 9 (Measuring instrument 300' alone = without support structure, Figures 17-20) Measurement 10 (Vibration damping device dummy only, Figures 17-20) Measurement 11 (Vibration damping device 200 only, Figures 17-20) Measurement 12 (Vibration damping device 100 only, Figures 17-20) Measurement 13 (vibration-damping rubber only, Figures 17-20)

[0059] • 4th measurement experiment (Figure 16: 3-point support, vibration isolation table 305, detector 500, detection location = on the measurement stage) Measurement 14 (300″ measuring instrument alone = without support structure, Figures 21-24) Measurement 15 (Dummy vibration damping device only, Figures 21-24) Measurement 16 (Vibration damping device 200 only, Figures 21-24) Measurement 17 (Vibration damping device 100 only, Figures 21-24) Measurement 18 (vibration-damping rubber only, Figures 21-24)

[0060] • Fifth measurement experiment (Figure 16: three-point support, vibration isolation table 305 absent, separate detector, detection location = on the measurement stage) Measurement 19 (300″ measuring instrument alone = without support structure, Figure 25) Measurement 20 (Dummy vibration damping device only, Figure 25) Measurement 21 (Vibration damping device 200 only, Figure 25) Measurement 22 (Vibration damping device 100 only, Figure 25) Measurement 23 (vibration-damping rubber only, Figure 25)

[0061] • 6th measurement experiment (Figure 15: 3-point support, no vibration isolation table 305, separate detector, detection location = upper center of support plate) Measurement 24 (Measuring instrument 300' alone = without support structure, Figure 26) Measurement 25 (Vibration damping device dummy only, Figure 26) Measurement 26 (Vibration damping device 200 only, Figure 26) Measurement 27 (Vibration damping device 100 only, Figure 26) Measurement 28 (vibration-damping rubber only, Figure 26)

[0062] • 7th measurement experiment (Figure 16: 3-point support, vibration isolation table 305, separate detector, detection location = on the measurement stage) Measurement 29 (Measuring instrument 300″ alone = without support structure, Figure 27) Measurement 30 (Dummy vibration damping device only, Figure 27) Measurement 31 (Vibration damping device 200 only, Figure 27) Measurement 32 (Vibration damping device 100 only, Figure 27)

[0063] • 8th measurement experiment (Figure 15: 3-point support, vibration isolation table 305, separate detector, detection location = upper center of support plate) Measurement 33 (Measuring instrument 300' alone = without support structure, Figure 28) Measurement 34 (Vibration damping device dummy only, Figure 28) Measurement 35 (Vibration damping device 200 only, Figure 28) Measurement 36 (Vibration damping device 100 only, Figure 28)

[0064] In the vibration damping device 100 of the first embodiment, as shown in Measurement 4 (Figure 7), Measurement 6 (Figure 11), Measurement 12 (Figure 17), Measurement 17 (Figure 21), Measurement 22 (Figure 25), Measurement 27 (Figure 26), Measurement 32 (Figure 27), and Measurement 36 (Figure 28), it can be seen that, except when the vibration damping device 200 is used, it exhibits a better vibration damping effect than other support conditions. In particular, when the vibration isolation table 305 is not used, the vibration damping effect is even better than with the vibration damping device 200. In particular, the overall value in the Z direction is better than under other conditions and with the vibration damping device 200. This is thought to be because the vertical Fv dimension of the accommodation spaces 110, 120, 130, 140, and 150 is large, resulting in good absorption efficiency even for vibrations with large amplitude.

[0065] In the vibration damping device 200 of the second embodiment, as shown in measurements 8 (Figure 11), 11 (Figure 17), 16 (Figure 21), 21 (Figure 25), 26 (Figure 26), 31 (Figure 27), and 35 (Figure 28), support at four points is better than support at three points, and using the vibration isolation table 305 is better than not using it. When supported at four points and the vibration isolation table 305 is used, the vibration damping effect is better than that of the vibration damping device 100 of the first embodiment. This is thought to be because sufficient stability can be ensured by the multi-point support of the vibration damping device 200, and when used in combination with the vibration isolation table 305, which absorbs large vibrations in the Z-axis direction where a large load is applied, good absorption of vibration energy is achieved by ensuring the rigidity of the vibration damping device 200, which provides stability to the support state, and by the vibration damping effect of the granular damper structure 205, which can absorb minute vibrations.

[0066] Furthermore, for measurements 14-18 in Figure 21, 19-23 in Figure 25, and 29-32 in Figure 27, measurements were taken on the measurement stage 301 using the detector 500 or a separate detector. Therefore, the vibration damping effect of the vibration damping devices 100 and 200 is difficult to discern due to the influence of the frame structure of the measuring instruments 300, 300', and 300'' themselves, as well as the movement mechanism 303. Moreover, for measurements 19-23 in Figure 25 and 24-28 in Figure 26, the vibration isolation table 305 was not used, resulting in large vibration acceleration in the Z-axis direction (vertical direction Fh) in all measurements, making it difficult to discern the effect of the vibration damping device 100 and 200.

[0067] On the other hand, in measurements using the vibration isolation table 305, by setting the detection position on the support (on the table), a greater vibration damping effect is obtained by the vibration damping devices 100 and 200 compared to when no support structure is used (measuring instrument alone or interferometer alone), as shown in measurements 1-13 (Figures 7, 11, and 17) and measurements 33-36 (Figure 28). These data clearly show that the vibration damping devices 100 and 200 exhibit a high vibration damping effect in all vibration directions (Z direction = vertical direction Fv and Y direction and X direction = planar direction Fh) by using the vibration isolation table 305 in combination and detecting vibrations near the support structure, and that there is little variation in the vibration damping effect with respect to vibration direction.

[0068] Here, since the vibration source during each measurement is considered to be substantially outside the measuring machine, which is the object being acted upon, a vibration isolation unit, the vibration isolation table 305, is positioned externally. The vibration damping devices 100 and 200 of each embodiment are stacked on the side of the measuring structure, which is the operating structure of the measuring machine 300, 300', 300″, which is the operating system and the object being vibrated, relative to the vibration isolation table 305. In this manner, large amplitude vibrations from the vibration source are absorbed by the vibration isolation unit, and then minute vibrations are stably absorbed without variation in vibration direction by the vibration energy absorption action of the granular damper structure of the vibration damping device, thereby suppressing the transmission of vibrations to the object being acted upon. This makes it possible to efficiently reduce the vibration of the object being acted upon in accordance with the characteristics of the vibration damping device.

[0069] In this embodiment, the vibration damping device 100,200 equipped with the support structures 101,201 described above provides a stable vibration damping effect with minimal degradation and requires little maintenance. Therefore, it is easy to adapt to situations where power or pneumatic supply is difficult, areas affected by ultraviolet rays and other radiation, such as outer space, and special environments such as liquids, low temperatures, high pressures, low pressures, and underground. In particular, it can be used in environments exposed to chemicals and gases, under conditions where conductivity is required, such as for static electricity countermeasures, and for installation in locations or structures that are difficult to touch after installation.

[0070] It should be noted that the vibration damping device according to the present invention is not limited to the illustrated examples described above, and various modifications can be made without departing from the spirit of the present invention. For example, in each of the above embodiments, the vibration isolation table 305 is particularly effective when used in combination, but not limited to the vibration isolation table 305, various vibration isolation units using air springs or other springs (such as vibration-damping rubber) can be used as long as they can absorb vibrations with a larger amplitude in the vertical direction Fv than the vibration damping devices 100 and 200. In other words, since the vibration damping devices 100 and 200 produce their effect through vibration damping, if vibration-damping means such as air, rubber, or springs are used to create a state in which vibrations with a larger amplitude can be absorbed, the vibration damping effect of each embodiment can be exerted more efficiently.

[0071] Furthermore, in the above embodiment, measuring machines 300, 300', and 300'' equipped with a measuring structure are given as examples of operating systems using vibration damping devices 100 and 200. However, the present invention can be used for various operating systems equipped with an operating structure corresponding to the measuring structure. Examples of operating systems other than measuring machines include various sensors such as position detectors, image capture devices (cameras), polishing machines, and precision machining machines.

[0072] Furthermore, the vibration damping devices 100 and 200 of this embodiment can exert a vibration damping effect when attached to each object, regardless of whether or not the vibration isolation unit described above is used in combination. In this case, as in this embodiment, the mounting surface is not limited to the top or bottom surface, but may also be a side surface. That is, it does not have to be mounted in the vertical direction Fv. However, in each embodiment, a higher vibration damping effect can be achieved by setting the mounting posture and support direction to the vertical direction Fv.

[0073] In the above-described embodiment, each of the multiple accommodation spaces 110, 120, 130, 140, 150, 210, 220, 230, 240, and 250 arranged inside the support structures 101 and 102 is provided with a first inner surface along the planar direction Fh or along the vertical direction Fv, and a second inner surface inclined with respect to the horizontal plane along the planar direction Fh or the vertical plane along the vertical direction Fv. In this case, the above-described multiple accommodation spaces do not need to be all of the accommodation spaces arranged inside the support structures, but it is desirable to include more than half of all accommodation spaces (i.e., a majority, preferably 70% or more, and more preferably 90% or more). Here, in the multiple accommodation spaces, it is preferable that the first inner surface includes multiple inner surfaces having mutually different orientations. In the illustrated example, the first inner surface has a bottom surface 110a (horizontal surface) and sides 110c (vertical surface, forming a honeycomb structure) from 4 to 6, and these surfaces have different orientations.

[0074] Furthermore, in multiple containment spaces, it is preferable that the second inner surface includes multiple inner surfaces having mutually different orientations. In the illustrated example, the second inner surface has 3, 5, or 6 upper inner surfaces (constituting a honeycomb structure as shown in Figures 2(a) and 4(a)), such as the upper surface 110c provided on the tapered upper structure, and these multiple upper inner surfaces have mutually different orientations. With this, since the first inner surface and the second inner surface are formed in multiple containment spaces arranged inside the support structure, the movement trajectory of the granular material in the containment space becomes random when subjected to vibration, and the displacement direction of the granular material contained inside is dispersed. As a result, it is less likely that a bias will occur where a part of the wall surface of the support structure vibrates greatly, a stable vibration damping effect can be obtained, and fluctuations in the vibration damping effect due to changes in vibration direction and amplitude can also be reduced. Furthermore, the random movement trajectory of the granular material within the containment space when subjected to vibration facilitates the movement (agitation) of the granular material, increasing the overall impact force. Simultaneously, the granular material becomes easier to rotate, increasing the frictional force. This increases both the damping effect due to the impact force on the inner surface of the containment space and the damping effect due to the frictional force between the granular material and the inner surface, or between the granular material itself. Therefore, it is believed that the overall vibration damping effect can be increased. These effects are particularly effective in enhancing the damping effect when the granular damper structure has a high natural frequency and a small amplitude (vibration displacement), as in each embodiment. Moreover, the above effects can be further enhanced by including multiple inner surfaces in the first and second inner surfaces, each facing different directions.

[0075] For the three types of vibration damping devices mentioned above—vibration damper 100 (powder damper Ver.1), a solid dummy device with the same dimensions as vibration damping device 200 (powder damper Ver.2 dummy), and vibration damping device 200 (powder damper Ver.2)—the vibration characteristics were measured when longitudinal vibration (sine wave) was applied from below using a vibration testing machine F-16000BDH / LA16AW (manufactured by EMIC CORPORATION). This test was conducted at the Nagano Prefectural Industrial Technology Center where the above testing machine is installed. The vibration was applied with a gravitational acceleration of 2G, and the frequency band was set to 2-2500Hz. According to the frequency spectra of the vibration transmittance and pseudo-insertion loss obtained as a result, the vibration damping effect of each vibration damping device 100 and 200 is mainly good in the frequency band of 1000Hz or higher. In particular, it was found that vibration damping was achieved in the 1000-2500Hz frequency band, and that vibration damping device 200 exhibited a high vibration damping effect in the 1300-2000Hz frequency range. It is thought that vibration damping devices 100 and 200 have relatively high natural frequencies because the support structure has high rigidity, and both the support structure and the granular material are made of metal.

[0076] Thus, for vibration damping devices with relatively high natural frequencies that can achieve damping effects in the high-frequency range of vibration, vibration displacement does not necessarily increase even if the vibration velocity and acceleration are large, so sufficient damping cannot be obtained by impact force alone. However, as described above, by arranging multiple containment spaces within the support structure, each having a first inner surface aligned in the planar or vertical direction and a second inner surface inclined with respect to the horizontal or vertical plane, the damping effect can be increased by frictional force. In other words, with the above configuration, the relative motion mass, which is the sum of the masses of granular bodies that perform translational motion different from that of the support structure due to the input of vibrational energy among the granular bodies arranged inside the containment space, is increased, while the equivalent added mass, which is the sum of the masses of granular bodies that perform translational motion together with the support structure, is decreased. The rotational motion mass, which is the sum of the masses of granular bodies with a rotation angle above a certain level, is increased, while the non-rotational motion mass, which is the sum of the masses of granular bodies with a rotation angle below that level, is decreased. As a result, in addition to increasing the damping effect by impact force, the damping effect by frictional force can also be increased, thus achieving high damping characteristics even in the high-frequency range. Furthermore, the effectiveness of such vibration damping devices generally increases as the total mass of granular material increases. However, the damping effect due to impact force is the primary factor in the region where the total mass of granular material is small, while the damping effect due to frictional force influences the region where the total mass of granular material is large, in addition to the aforementioned damping effect due to impact force. For this reason, as mentioned above, the space-filling ratio of granular material within the containment space is considered to be better if it is within the range of 45%-95%, preferably within the range of 50%-92%, more preferably within the range of 55-80%, and especially within the range of 60%-74%.

[0077] As described above, the vibration damping device of the embodiment of the present invention, which has a high natural frequency and small vibration displacement, is preferably used in combination with a vibration isolation device such as a vibration isolation table that can absorb vibrations with a low frequency and large vibration displacement. In particular, by placing the vibration isolation device on the vibration source side and the vibration damping device on the opposite side from the vibration source, or on the side where vibration transmission to the aforementioned measuring instrument or other part is to be avoided, the damping effect of the vibration damping device of this embodiment can be effectively realized. [Explanation of symbols]

[0078] 100, 200… Vibration damping device, 101, 201… Support structure, 101a, 201a… Top surface, 101b, 201b… Bottom surface, 101c, 201c… Side surface, 105, 205… Granular damper structure, 110, 120, 130, 140, 150, 210, 220, 230, 240, 250… Housing space, 160, 260… Granular material (powder, granules), 201d… Mounting hole, 201e… Fixing screw hole, 2 02…Mounting screw, 203…Fixing member, 204…Fixing screw, 201f…Stepped section, 205A…First layer group, 205B…Second layer group, 205C…Third layer group, Fh…Planar direction, Fv…Vertical direction, 300, 300′, 300″…Optical measuring instrument (optical interferometer), 301…Measurement stage, 302…Measurement structure section, 303…Movement mechanism, 304…Support leg section, 305…Vibration isolation table, 400…Object to be measured, 500…Detector

Claims

1. A vibration damping device comprising a support structure formed as a single unit, wherein a plurality of accommodation spaces are provided inside the support structure, and a granular material consisting of powder or granular material is accommodated in each of the plurality of accommodation spaces to form a granular damper structure, wherein the plurality of accommodation spaces have a cross-sectional range along the planar direction of the support structure, and the cross-sectional range is arranged vertically and horizontally along the planar direction, and the plurality of accommodation spaces are arranged inside the support structure by forming a space that extends in a vertical direction perpendicular to the planar direction.

2. The aforementioned storage space has an upper structure in which the upper part in the vertical direction is tapered, and the inner surface of the upper part is configured as a surface inclined with respect to a horizontal plane or a vertical plane. The vibration damping device according to claim 1.

3. Inside the support structure, a plurality of granular damper structures, each consisting of a plurality of accommodating spaces arranged along the planar direction and granular bodies placed inside them, are arranged to form a plurality of layers stacked in the vertical direction. The partition wall structure between the upper structure of the aforementioned storage space and the bottom of the storage space belonging to the upper layer group, which is located adjacent to the upper structure of the aforementioned storage space, is configured to taper upwards, corresponding to the upper structure of the lower storage space. The vibration damping device according to claim 2.

4. The vibration damping device according to claim 1, wherein the support structure has an upper surface formed along the planar direction, a lower surface formed along the planar direction with a gap in the vertical direction relative to the upper surface, and side surfaces arranged between the upper surface and the lower surface facing outwards, and the partition wall between the accommodation spaces constitutes a single, seamless structure in both the planar and vertical directions.

5. The aforementioned cross-sectional range includes a plurality of the aforementioned accommodation spaces having the same shape and dimensions as each other. A vibration damping device according to any one of claims 1 to 4.

6. The aforementioned cross-sectional area is arranged in a staggered pattern along the plane direction. A vibration damping device according to any one of claims 1 to 4.

7. The cross-sectional area is configured in a hexagonal shape along the planar direction, and the partition walls between the accommodation spaces form a honeycomb structure along the planar direction. The vibration damping device according to claim 6.

8. Inside the support structure, a plurality of granular damper structures, each consisting of a plurality of accommodating spaces arranged along the planar direction and granular bodies placed inside them, are arranged to form at least one layer group. The vibration damping device according to claim 1, 2, or 4.

9. Inside the support structure, a plurality of granular damper structures, each consisting of a plurality of accommodating spaces arranged along the planar direction and granular bodies placed inside them, are arranged to form a plurality of layers stacked in the vertical direction. The vibration damping device according to claim 8.

10. Each of the aforementioned group of layers has a hexagonal cross-sectional area along the planar direction, and the partition walls between the accommodation spaces form a honeycomb structure along the planar direction. The vibration damping device according to claim 9.

11. The support structure is made of a metal material, and the granular material is also made of a metal material. A vibration damping device according to any one of claims 1 to 4.

12. Each of the aforementioned multiple storage spaces comprises a first inner surface aligned with the planar direction or the vertical direction, and a second inner surface configured as a surface inclined with respect to the horizontal plane or the vertical plane. The vibration damping device according to claim 1 or 4.

13. The first inner surface includes a plurality of first inner surfaces having different surface orientations, and the second inner surface includes a second inner surface having different surface directions. The vibration damping device according to claim 12.

14. A vibration damping device comprising: a support structure formed as a single unit, having a plurality of storage spaces inside it, and a granular material consisting of powder or granular material being stored in each of the plurality of storage spaces to form a granular damper structure, wherein the plurality of storage spaces have a cross-sectional range along the planar direction of the support structure, and the cross-sectional range is arranged vertically and horizontally along the planar direction and forms a space extending in a vertical direction perpendicular to the planar direction, thereby the plurality of storage spaces being arranged inside the support structure; and a vibration isolation unit used in a state where it is directly or indirectly stacked with respect to the support structure in the vertical direction, and capable of absorbing vibrations with an amplitude in the vertical direction larger than the maximum amplitude value in the vertical direction that the vibration damping device can absorb.

15. An operating system comprising an operating structure, A vibration damping device comprising a support structure formed as a single unit, wherein a plurality of containment spaces are provided inside the support structure, and a granular material consisting of powder or granular material is contained in each of the plurality of containment spaces to form a granular damper structure, wherein the plurality of containment spaces have a cross-sectional range along the planar direction of the support structure, and the cross-sectional range is arranged vertically and horizontally along the planar direction, and the plurality of containment spaces are arranged inside the support structure by forming a space that extends in a vertical direction perpendicular to the planar direction, The operating structure is characterized in that it is supported in the vertical direction by the vibration damping device.

16. The aforementioned operating system is a measuring instrument in which the operating structure is a measuring structure. The operating system according to claim 15.

17. The measurement structure includes an optical system for image capture or measurement. The operating system according to claim 16.

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