Fluid measuring instruments and fluid control devices

Abstract

This improves the reproducibility when fixing multiple sensor boards to one surface of a flow channel block. [Solution] With the sensor element portion 32 of each of the multiple sensor substrates 3 positioned in the opening 21, there is a pressing member 61 that spans across the multiple sensor substrates 3 and presses the other side 31b opposite to one side 31a of the multiple sensor substrates 3.

Description

Technical Field

[0001] The present invention relates to fluid measurement devices and fluid control devices.

Background Art

[0002] Conventionally, some fluid control devices such as mass flow controllers are provided with a pressure-type flow measurement mechanism as shown in, for example, Patent Document 1. In this pressure-type flow measurement mechanism, a fluid resistance member is provided in an internal flow path of a body which is a flow path block, and the pressure on the upstream side of the fluid resistance member is measured by an upstream pressure sensor, and the pressure on the downstream side of the fluid resistance member is measured by a downstream pressure sensor.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, from the viewpoint of miniaturization of the flow measurement mechanism and the like, a sensor substrate having a sensor element portion provided on one surface of a substrate may be used as the pressure sensor. In this case, the sensor substrate is used for the upstream pressure sensor and the sensor substrate is also used for the downstream pressure sensor.

[0005] And when fixing these sensor substrates to the flow path block, it is conceivable to individually fix each sensor substrate so that the sensor element portion is positioned at a pressure measurement port formed in the flow path block. As a structure for fixing each sensor substrate to the flow path block, it is considered to sandwich and press-fix the sensor substrate between the flow path block using a pressing member.

[0006] However, if each sensor board is individually pressed and secured by separate retaining members, there is a possibility of uneven pressure (tightening force) being applied to each sensor board. As a result, problems may arise such as the sensor element not being properly secured to the pressure measurement port, or being excessively pressed, which affects the measurement accuracy of each sensor board.

[0007] Therefore, the present invention has been made in view of the above problems, and its main objective is to reduce the variation in pressing force applied to each sensor substrate when fixing multiple sensor substrates to a flow path block. [Means for solving the problem]

[0008] In other words, the fluid measuring device of the present invention is a fluid measuring device for measuring fluid flowing through a flow path, comprising: a flow path block having the flow path formed inside and an opening branching from the flow path formed on one surface; a plurality of sensor substrates having a sensor element section on one surface that outputs a signal corresponding to the fluid; and a sensor fixing mechanism for fixing the plurality of sensor substrates to the one surface of the flow path block, wherein the sensor fixing mechanism is provided across the plurality of sensor substrates with the sensor element section of each of the plurality of sensor substrates positioned in the opening, and has a pressing member that presses the other surface of the plurality of sensor substrates opposite to the one surface.

[0009] With this fluid measuring device, the pressing member is provided across multiple sensor substrates and presses on the opposite side of each sensor substrate. Compared to cases where each sensor substrate is pressed by a separate pressing member, this reduces variations in the pressing force applied to each sensor substrate when fixing multiple sensor substrates to a flow path block. As a result, the reproducibility of fixing multiple sensor substrates to one side of the flow path block can be improved.

[0010] The pressing member has a pressing surface that presses against the other surface of each of the plurality of sensor substrates, and it is preferable that the sensor fixing mechanism further has a distance defining part that defines a constant distance between the pressing surface and one surface of the flow path block. With this configuration, the distance-defining section ensures that the distance between the pressing surface of the retaining member and one surface of the flow path block remains constant. This prevents some of the sensor boards from being excessively pressed or causing an imbalance in the pressing of multiple sensor boards when the retaining member presses on multiple other surfaces.

[0011] Preferably, the sensor fixing mechanism is provided facing the side surface of the sensor substrate and further has a rotation restricting surface that restricts the rotation of the sensor substrate along one surface of the flow path block. With this configuration, the rotation-restricting surface contacts the side of the substrate, preventing the sensor substrate from rotating along one side of the flow path block.

[0012] The sensor substrate further has a connector provided on the other side, and it is desirable that the pressing member presses the portion of the other side of each of the plurality of sensor substrates other than the portion where the connector is provided. With this configuration, the retaining member presses against areas other than where the connector is located, making it easier to press the sensor board. Furthermore, the retaining member presses against the flat surfaces of multiple sensor boards, ensuring even pressure on all of them. Additionally, since the retaining member does not interfere with the connector, damage to the connector due to pressure from the retaining member can be prevented.

[0013] It is desirable that the pressing member presses the portion of each of the plurality of sensor substrates that faces the sensor element on the other side. With this configuration, the retaining member presses against the portion of the sensor element on the other side, preventing the sensor element from floating away from the opening of the flow path block and ensuring that the sensor element is securely fixed to the opening.

[0014] The flow path is provided with a fluid resistance element, and preferably the plurality of sensor substrates include an upstream sensor substrate for detecting the upstream pressure of the fluid resistance element in the flow path and a downstream sensor substrate for detecting the downstream pressure of the fluid resistance element in the flow path. With this configuration, the upstream and downstream pressure sensors are pressed evenly, which improves the accuracy of calculations such as fluid flow rate based on the two sensors.

[0015] Preferably, the sensor fixing mechanism further includes an insulating member interposed between the pressing member and the plurality of sensor substrates. With this configuration, if the retaining member is made of a conductive material, for example, it is possible to prevent noise from the retaining member from being superimposed on the sensor substrate. In addition, it is possible to prevent current from the sensor substrate from leaking into the retaining member, which would disrupt or weaken the output signal of the sensor substrate.

[0016] Preferably, the sensor fixing mechanism further includes a screw fastening portion for screwing the retaining member to one surface of the flow path block. With this configuration, the retaining member is screwed to one surface of the flow path block, ensuring that the retaining member is securely fixed to that surface. As a result, multiple sensors can be securely fixed to one surface of the flow path block.

[0017] The connector has a connection portion to which a cable is connected, and it is desirable that, when the plurality of sensor boards are fixed by the sensor fixing mechanism, the connection portions of the connectors on the plurality of sensor boards face the same side. In this configuration, with multiple sensors fixed to one side of the flow path block, the connector connections face the same side, making assembly work, such as connecting cables to the connectors, easier.

[0018] Moreover, the fluid control device according to the present invention is a fluid control device that controls a fluid flowing through a flow path, and includes the fluid measurement device described above, a fluid control valve that controls the fluid, and a valve control unit that controls the fluid control valve based on a measurement value of the fluid measurement device.

Advantages of the Invention

[0019] According to the present invention, when fixing a plurality of sensor substrates to a flow path block, it is possible to reduce variations in the pressing force applied to each sensor substrate.

Brief Description of the Drawings

[0020] [Figure 1] FIG. is a cross-sectional view schematically showing the configuration of a fluid control device in an embodiment of the present invention. [Figure 2] FIG. is a partially enlarged view of the broken line portion of FIG. 1 in the same embodiment. [Figure 3] FIG. is a plan view of FIG. 2 in the same embodiment. [Figure 4] FIG. is a cross-sectional view taken along line A-A of FIG. 3 in the same embodiment. [Figure 5] FIG. shows a distance defining portion in another embodiment. [Figure 6] FIG. shows a rotation restricting surface in another embodiment.

Modes for Carrying Out the Invention

[0021] <Embodiment of the Present Invention> Hereinafter, a fluid control device according to an embodiment of the present invention will be described with reference to the drawings. Note that, for the sake of clarity, any of the figures shown below may be schematically drawn with appropriate omissions or exaggerations. The same reference numerals are assigned to the same components, and the description thereof will be omitted as appropriate.

[0022] <Device Configuration> The fluid control device 100 of this embodiment is used in various processes, such as semiconductor manufacturing processes, and is installed in one or more gas supply lines connected to a semiconductor processing chamber to control the flow rate of process gas flowing through each gas supply line.

[0023] Specifically, as shown in Figure 1, the fluid control device 100 comprises a flow path block 2 with a flow path R formed inside through which a fluid such as gas flows, a plurality of sensor boards 3 for measuring the fluid flowing through the flow path R, a fluid control valve 4 for controlling the fluid, a control board 5 for controlling the fluid control valve 4, a sensor fixing mechanism 6 for fixing the plurality of sensor boards 3 to one surface of the flow path block 2, and a housing 7 that houses the plurality of sensor boards 3, the control board 5, and the sensor fixing mechanism 6. Note that the fluid control device 100 does not necessarily have a housing 7. The configuration of each part will be described below.

[0024] The flow path block 2 is, for example, roughly rectangular in shape, and multiple sensor boards 3, fluid control valves 4, a control board 5, a sensor fixing mechanism 6, and a housing 7 are mounted on a predetermined surface. The flow path block 2 is provided with an introduction port (not shown) for introducing fluid into the flow path R and an exit port (not shown) for draining fluid from the flow path R.

[0025] Furthermore, as shown in Figures 2 to 4, the flow path block 2 has an opening 21 that branches off from the flow path R and opens on one side where the sensor substrate 3 is fixed. This opening 21 is formed according to the number of sensor substrates 3. In this embodiment, in particular as shown in Figure 1, a fluid resistance element Z such as a restrictor or orifice is provided in the flow path R, and an upstream opening 21a communicating with the flow path R upstream of the fluid resistance element Z and a downstream opening 21b communicating with the flow path R downstream of the fluid resistance element Z are formed.

[0026] As shown in Figures 2 to 4, the sensor board 3 has a roughly rectangular flat base board 31, a sensor element section 32 provided on one side 31a of the base board 31 which outputs a signal corresponding to the fluid, and a connector 33 provided on the other side 31b opposite to the one side 31a. Note that the connector 33 is not necessary when the sensor board 3 and the control board 5 are configured to communicate wirelessly. In this embodiment, the sensor board 3 is a board in which a signal processing section (not shown) that converts the output signal from the sensor element section 32 is separated from the control board 5.

[0027] As shown in Figures 2 to 4, the base substrate 31 is a flat plate of equal thickness with one surface 31a and the other surface 31b being generally flat. In this embodiment, in particular as shown in Figure 2, one surface 31a is a predetermined surface of the flow path block 2 and is placed on the mounting surface 2a to which the fluid control valve 4 and housing 7 are attached.

[0028] The sensor element 32 is positioned in the opening 21 of the flow path block 2. Specifically, the sensor element 32 is inserted into the interior of the opening 21. The sensor element 32 in this embodiment is cylindrical and is fitted into the interior of the cylindrical opening 21. A sealing member (not shown), such as an O-ring, is provided between the sensor element 32 and the opening 21. The sensor element 32 is then fixed to the opening 21 of the flow path block 2 when the sensor fixing mechanism 6, which will be described later, is fixing the sensor substrate 3.

[0029] Connector 33 is connected to cable C1, which is electrically connected to the control board 5 described later. As shown in Figure 3 in particular, connector 33 has an insertion port 33h into which the connection terminals of cable C1 are inserted.

[0030] To explain the positional relationship between the sensor element 32 and the connector 33, as shown in Figure 3 in particular, in a plan view from the other side 31b of the base substrate 31, the sensor element 32 and the connector 33 are located in different positions from each other. The sensor element 32 is located on one side of the center of the base substrate 31, while the connector 33 is located on the other side of the center of the base substrate 31 (opposite to the sensor element 32). With this configuration, the other side 31b directly above the sensor element 32 is flat as the connector 33 is not provided there.

[0031] In this embodiment, the multiple sensor boards 3 constitute a differential pressure type fluid sensor. Specifically, as shown in Figure 1, the multiple sensor boards 3 include an upstream sensor board 3a provided upstream of the fluid resistance element Z to detect the upstream pressure of the fluid resistance element Z, and a downstream sensor board 3b provided downstream of the fluid resistance element Z to detect the downstream pressure of the fluid resistance element Z. The flow rate is calculated from the differential pressure between the upstream and downstream pressures detected by the two sensor boards 3a and 3b by the flow rate calculation unit (not shown) of the control board 5, which will be described later.

[0032] The fluid control valve 4 is an electromagnetic valve using a solenoid as an actuator, and controls the flow rate by moving the valve body forward and backward relative to the valve seat using the solenoid. Specifically, the fluid control valve 4 comprises a solenoid 41 which is the actuator, and a casing 42 which houses the solenoid 41. Here, a cable C2 that electrically connects the fluid control valve 4 and the control board 5 passes through the housing 7 and extends from the casing 42 to the control board 5. The fluid control valve 4 is controlled by a valve control unit (not shown) of the control board 5, which will be described later. In addition, although the fluid control valve 4 is provided on the outside of the housing 7, it may also be provided on the inside of the housing 7.

[0033] The control board 5 is fixed to the housing 7 in an upright position relative to one side of the flow path block 2. Specifically, the control board 5 has digital circuits such as a CPU, memory, and communication circuits, as well as analog circuits such as amplifiers and buffers, formed on a wiring board. The CPU and other peripheral devices work together according to a program stored in memory to perform two functions: a flow rate calculation unit that calculates the flow rate through the flow path R based on the pressure measured by multiple sensor boards 3, and a valve control unit that controls the fluid control valve 4 so that the flow rate (measured value) becomes a predetermined target flow rate.

[0034] The control board 5 may be divided into a board that functions as a flow rate calculation unit and a board that functions as a valve control unit. In this case, the multiple sensor boards 3 are connected to the board that functions as a flow rate calculation unit, and the fluid control valve 4 is connected to the board that functions as a valve control unit.

[0035] The sensor fixing mechanism 6 presses the multiple sensor substrates 3 with a single component to fix the multiple sensor substrates 3 to the flow path block 2.

[0036] Specifically, as shown in Figures 2 to 4, the sensor fixing mechanism 6 is provided across multiple sensor substrates 3, with a pressing member 61 that presses against the other surfaces 31b of the multiple sensor substrates 3, while the multiple sensor element portions 32 are positioned in the multiple openings 21 of the flow path block 2. In this embodiment, the state in which the sensor element portion 32 is positioned in the opening 21 means that the sensor element portion 32 is inserted into the opening 21.

[0037] The pressing member 61 is composed of a single component and, for example, is roughly rectangular in shape. Furthermore, the pressing member 61 is provided across multiple sensor substrates 3 so that it can press against multiple sensor substrates 3 simultaneously. One side of the pressing member 61 is a pressing surface 61a that presses against the other side 31b of each of the multiple sensor substrates 3, as shown in Figures 2 to 4. While the pressing member 61 in this embodiment is made of a conductive material, it is not limited to this, and the pressing member 61 may be made of an insulating material.

[0038] As shown in Figures 3 and 4, the pressing surface 61a of the retaining member 61 presses the portion of each of the multiple sensor substrates 3 other than the portion where the connector 33 is provided toward the flow path block 2. Specifically, the pressing surface 61a presses the portion of each of the multiple sensor substrates 3 other than the portion where the connector 33 is provided toward the portion facing the sensor element 32 toward the flow path block 2.

[0039] Furthermore, as shown in Figures 2 to 4, the sensor fixing mechanism 6 includes a distance defining section 62 that defines a constant distance between the pressing surface 61a and the mounting surface 2a of the flow path block 2, a rotation restricting surface 63 that restricts the rotation of the sensor substrate 3 (base substrate 31) along the mounting surface 2a of the flow path block 2, an insulating member 64 interposed between the pressing member 61 and the multiple sensor substrates 3, and a screw fastening section 65 that screws the pressing member 61 to the mounting surface 2a of the flow path block 2.

[0040] The distance-regulating portion 62 maintains a constant distance between the pressing surface 61a and the mounting surface 2a of the flow path block 2 when the pressing member 61 is pressing the other surface 31b of each of the multiple sensor substrates 3. Specifically, the distance-regulating portion 62 is a protruding portion that extends from one side of the pressing surface 61a toward the mounting surface 2a, as shown in Figure 4. In this embodiment, the protruding portion is formed integrally with the pressing member 61, but it may be a separate component. Since the distance-regulating portion 62 has a facing surface that faces the side surface 31c of the base substrate 31 interposed between the one surface 31a and the other surface 31b, the facing surface of the distance-regulating portion 62 may function as a rotation-restricting surface, as described later.

[0041] The rotation restricting surface 63 is provided opposite the side surface 31c of the substrate 31 and restricts the rotation of the base substrate 31 along the mounting surface 2a of the flow path block 2. Specifically, as shown in Figure 4, the rotation restricting surface 63 is the side surface of the protruding portion 61b that protrudes from the pressing surface 61a toward the mounting surface 2a. The protruding portion 61b is formed integrally with the retaining member 61, but it may be formed separately.

[0042] As shown in Figure 3, the protrusion 61b is located between the two sensor substrates 3 in a plan view. Specifically, one side of the protrusion 61b faces the side 31c of the upstream sensor substrate 3a, and the other side of the protrusion 61b faces the side 31c of the downstream sensor substrate 3b. The width dimension of the protrusion 61b is approximately the same as or slightly smaller than the distance between the side 31c of the upstream sensor substrate 3a and the side 31c of the downstream sensor substrate 3b. Here, the width dimension of the protrusion 61b is the dimension in the direction along the axial direction of the flow path R.

[0043] Furthermore, the end face 61b1 of the protruding portion 61b is in contact with the mounting surface 2a of the flow path block 2. As a result, the distance between the pressing surface 61a and the mounting surface 2a of the flow path block 2 is determined to be constant by the height dimension of the protruding portion 61b.

[0044] The insulating member 64 is interposed between the pressing surface 61a of the pressing member 61 and the other surface 31b of each of the multiple sensor substrates 3 when the pressing member 61 is pressing against the other surface 31b of each of the multiple sensor substrates 3. Specifically, as shown in Figures 1 to 4, the insulating member 64 is, for example, a rectangular flat plate and is provided spanning the other surfaces 31b of the multiple base substrates 31. This insulating member 64 is positioned directly above the sensor element portion 32 on the other surface 31b of the base substrate 31. One side of the insulating member 64 is in contact with the other surface 31b of the base substrate 31, and the other side of the insulating member 64 is in contact with the pressing surface 61a. In addition, the insulating member 64 has a shape that extends outward from the pressing member 61 in a plan view, and in this embodiment, it has dimensions larger than the width dimension of the pressing member 61 (left-right direction in the plane of the paper in Figures 2 and 3, and the arrangement direction of the sensor substrates 3). This makes it easier to visually confirm that the insulating member 64 is inserted between the multiple sensor boards 3 and the retaining member 61 after assembly. The insulating member 64 may be fixed to the pressing surface 61a of the retaining member 61, for example, with an adhesive, or it may be provided as a separate component.

[0045] The screw fastening portion 65 is provided to correspond to multiple sensor boards 3, and in this case, as shown in Figure 3, two are provided corresponding to the upstream sensor board 3a and the downstream sensor board 3b. Specifically, as shown in Figure 4, the screw fastening portion 65 has a male threaded portion 651 which is a screw member, a female threaded portion 652 formed on the mounting surface 2a of the flow path block 2 which screws into the male threaded portion 651, and a through hole 653 formed in the retaining member 61 into which the male threaded portion 651 is inserted. The through hole 653 is formed in the portion of the retaining member 61 into which the distance regulating portion 62 is provided, and the distance regulating portion 62 also has a through hole 653.

[0046] <Method for fixing multiple sensor boards 3> Next, the method for fixing the multiple sensor boards 3 in this embodiment will be described.

[0047] First, multiple sensor boards 3 are placed on the mounting surface 2a, which is one side of the flow channel block 2. At this time, the sensor element portion 32 of each of the multiple sensor boards is inserted into the respective openings 21 of the flow channel block 2 and positioned.

[0048] With the sensor element portion 32 of each of the multiple sensor substrates 3 positioned in the opening 21, the insulating member 64 and the retaining member 61 are arranged across the multiple sensor substrates 3 (specifically, the base substrate 31). Specifically, the retaining member 61 is placed on the mounting surface 2a of the flow path block 2 such that the distance defining portion 62 faces the side surface 31c of the sensor substrate 3 and the protruding portion 61b of the retaining member is positioned between the two sensor substrates 3.

[0049] If the insulating member 64 is fixed to the retaining member 61 with, for example, an adhesive, then the insulating member 64 will be provided together with the retaining member 61 across multiple sensor substrates 3. On the other hand, if the insulating member 64 is not fixed to the retaining member 61 with, for example, an adhesive, then the insulating member 64 will be provided across multiple sensor substrates 3, and then the retaining member 61 will be placed on the mounting surface 2a of the flow path block 2.

[0050] With the retaining member 61 placed on the mounting surface 2a of the flow path block 2, the retaining member 61 is screwed to the mounting surface 2a of the flow path block 2 using the screw fastening portion 65. Specifically, the male thread portion 651 is inserted into the through hole 653 formed in the retaining member 61 and the distance-defining portion 62, and the male thread portion 651 and the female thread portion 652 are screwed together. As a result, the pressing surface 61a of the retaining member 61 presses against the other surface 31b of each of the multiple sensor substrates 3 via the insulating member 64, thereby fixing the multiple sensor substrates 3 to the mounting surface 2a of the flow path block 2.

[0051] With multiple sensor boards 3 fixed to the mounting surface 2a of the flow path block 2, as shown in Figure 3, the insertion ports 33h of multiple connectors 33 open on the same side. In this embodiment, the insertion ports 33h of the connectors 33 open on the opposite side from the retaining member 61, but the direction in which the insertion ports 33h open is not particularly limited.

[0052] <Effects of this embodiment> In the fluid control device 100 of this embodiment, the pressing member 61 is provided across multiple sensor substrates 3 and presses the other surface 31b opposite to one surface 31a of the multiple sensor substrates 3. Compared to the case where each of the multiple sensor substrates 3 is pressed by a separate pressing member, variations in the pressing force applied to each sensor substrate 3 can be reduced when fixing the multiple sensor substrates 3 to the flow path block 2. As a result, the reproducibility when fixing the multiple sensor substrates 3 to the mounting surface 2a, which is one surface of the flow path block 2, can be improved.

[0053] <Other Embodiments> However, the present invention is not limited to the embodiments described above.

[0054] In the above embodiment, the distance-defining portion 62 was formed on the retaining member 61, but as shown in Figure 5, the distance-defining portion 62 may be formed on one surface of the flow path block 2. Specifically, a recess 2M that accommodates all or part of the sensor substrate 3 (base substrate 31) may be formed on one surface of the flow path block 2, and the side wall portion of the recess 2M may be used as the distance-defining portion 62. In this case, the mounting surface 2a of the flow path block 2 is the bottom surface of the recess 2M that accommodates the base substrate 31, and the distance-defining portion 62 defines a constant distance between the pressing surface 61a and the bottom surface of the recess 2M that accommodates the substrate 31. Alternatively, by facing the side surface of the recess 2M against the side surface 31c of the base member 31, the side surface of the recess 2M may function as a rotation-restricting surface 63.

[0055] In Figure 5, the pressing member 61 is flat, but for example, a protrusion may be formed on the pressing surface 61a side of the pressing member 61. In this case, the protrusion formed on the pressing surface 61a side may function as a distance regulating part 62 together with the side wall portion of the recess of the flow path block 2. The distance regulating part 62 may be composed of a different member from the flow path block 2 and the pressing member 61.

[0056] In the above embodiment, the rotation restricting surface 63 was the side surface of the protrusion 61b. However, as shown in Figure 6, the side surface of the distance restricting portion 62 may function as the rotation restricting surface 63 by facing the side surface 31c of the base substrate 31 with the protrusion 61b on the pressing surface 61a. The rotation restricting surface 63 may be made from a different component than the flow path block 2 and the retaining member 61.

[0057] In the above embodiment, the pressing surface 61a pressed on the portion of the other side 31b of each of the multiple sensor substrates 3 other than the portion where the connector 33 is provided. However, it is also possible to press on the portion of the other side 31b of at least one sensor substrate 3 where the connector 33 is provided.

[0058] In the above embodiment, all of the sensor substrates 3 were pressure sensors, but the embodiment is not limited to this. At least one of the sensor substrates 3 may be another sensor, such as a temperature sensor, gas sensor, thermal sensor, or ultrasonic sensor.

[0059] In the above embodiment, the sensor fixing mechanism 6 had an insulating member 64, but it does not have to have an insulating member 64. In this case, the pressing surface 61a may directly contact the other surface 31b of the base substrate 31 and press the other surface 31b of the base substrate 31. In this configuration, the pressing member 61 may be made of an insulating material.

[0060] In the above embodiment, the retaining member 61 is fixed by a screw fastening portion 65, but the method of fixing the retaining member 61 is not limited to screw fastening. For example, the retaining member 61 may be fixed by a clamping method, or by other mechanical fixing methods.

[0061] In the above embodiment, the flow path block 2 had a plurality of openings 21 formed in it according to the number of sensor substrates 3, but a common opening 21 may be formed for multiple sensor substrates 3.

[0062] Although the above embodiment describes an example in which the sensor fixing mechanism 6 is applied to a fluid control device 100, it may also be applied to a flow rate measuring device, or to a fluid measuring instrument that measures other physical quantities such as pressure in addition to flow rate.

[0063] Furthermore, the present invention can be modified in various ways, as long as it does not contradict its spirit. [Explanation of Symbols]

[0064] 100... Fluid control device R ···flow channel 2 ···Flow channel block 21 ···Opening 3. Sensor board 4. Fluid control valve 5 ···Control board 6. Sensor fixing mechanism 61... Retaining member 61a...Pressing surface 62... Distance Regulation Section 63 ···Rotation restricting surface 64...Insulating material 65 ···Screw fastening part

Claims

1. A fluid measuring instrument for measuring the fluid flowing through a channel, A channel block having the aforementioned channel formed inside and openings branching off from the channel formed on one surface, Multiple sensor substrates, each having a sensor element on one side that outputs a signal corresponding to the fluid, The system includes a sensor fixing mechanism for fixing the plurality of sensor substrates to one surface of the flow channel block, The sensor fixing mechanism is provided across the plurality of sensor substrates, with the sensor element portion of each of the plurality of sensor substrates positioned in the opening, and includes a pressing member that presses against the other side of the plurality of sensor substrates opposite to the one side. This is a fluid measuring device.

2. The pressing member has a pressing surface that presses against the other side of each of the plurality of sensor substrates, The fluid measuring device according to claim 1, wherein the sensor fixing mechanism further comprises a distance defining portion that defines a constant distance between the pressing surface and one surface of the flow path block.

3. The fluid measuring device according to claim 1 or 2, wherein the sensor fixing mechanism is provided opposite to the side surface of the sensor substrate and further has a rotation restricting surface that restricts the rotation of the sensor substrate along one surface of the flow path block.

4. The sensor substrate further has a connector provided on the other side, The fluid measuring device according to any one of claims 1 to 3, wherein the pressing member presses on the other surface of each of the plurality of sensor substrates, the portion other than the portion on which the connector is provided.

5. The fluid measuring device according to any one of claims 1 to 4, wherein the pressing member presses the portion of each of the plurality of sensor substrates on the other side that faces the sensor element.

6. A fluid resistance element is provided in the aforementioned flow path. The aforementioned multiple sensor boards are An upstream sensor substrate for detecting the upstream pressure of the fluid resistance element in the flow path, A fluid measuring device according to any one of claims 1 to 5, comprising a downstream sensor substrate for detecting the downstream pressure of the fluid resistance element in the flow path.

7. The fluid measuring device according to any one of claims 1 to 6, wherein the sensor fixing mechanism further comprises an insulating member interposed between the pressing member and the plurality of sensor substrates.

8. The fluid measuring device according to any one of claims 1 to 7, wherein the sensor fixing mechanism further has a screw fastening portion for screw fastening the retaining member to one surface of the flow path block.

9. The aforementioned connector has a connection portion to which a cable is connected, The fluid measuring device according to claim 4, wherein, in a state in which the plurality of sensor boards are fixed by the sensor fixing mechanism, the connection portions of the connectors on the plurality of sensor boards face the same side.

10. A fluid control device for controlling fluid flowing through a channel, A fluid measuring device according to any one of claims 1 to 9, A fluid control valve that controls the aforementioned fluid, A fluid control device comprising a valve control unit that controls the fluid control valve based on the measured values ​​of the fluid measuring instrument.

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