Fluid control device

Abstract

When the fluid control valve is located on the outside of the housing, this prevents dust and water from entering the inside of the housing. [Solution] The fluid control valve 4 is located on the outside of the housing 6. The housing 6 has a through-hole 61 through which a cable C connecting a connector 51 on the control board 5 and the fluid control valve 4 passes. A packing 7 is provided to seal the space between the surface 61x forming the through-hole 61 in the housing 6 and the cable C.

Description

Technical Field

[0001] The present invention relates to a fluid control device that controls a fluid flowing through a flow path.

Background Art

[0002] Conventionally, as shown in Patent Document 1 for example, a fluid control device includes a body having a flow path formed therein, a fluid control valve attached to the body for controlling a fluid flowing through the flow path, an electric circuit board for controlling the fluid control valve, and a casing attached to the body. In the above fluid control device, the casing houses the fluid control valve and the electric circuit board, and the fluid control valve and the electric circuit board are electrically connected by a cable.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Here, when performing flow rate control using the above fluid control device, depending on the flow rate, heat dissipation from the fluid control valve may affect the electric circuit board. Therefore, the fluid control valve needs to be provided outside the casing that houses the electric circuit board.

[0005] In this case, since the cable connecting the fluid control valve and the electric circuit board penetrates the casing, dust, water, etc. may enter the casing through the penetration portion of the casing. Especially when the fluid control device is installed outdoors, the possibility of dust, water, etc. entering the casing becomes high.

[0006] Therefore, the present invention has been made in view of the above problems, and its main objective is to prevent dust and / or water from entering the inside of the housing in a configuration in which the fluid control valve is provided on the outside of the housing. [Means for solving the problem]

[0007] In other words, the fluid control device of the present invention is a fluid control device for controlling fluid flowing through a flow path, comprising a fluid control valve for controlling the fluid, a control board for controlling the fluid control valve, and a housing for housing the control board, wherein the fluid control valve is provided on the outside of the housing, the housing has a through-hole through which a cable connecting a connector provided on the control board and the fluid control valve passes, and a packing is provided to seal the space between the surface of the housing forming the through-hole and the cable.

[0008] With this configuration, the packing is provided between the surface forming the penetration in the housing and the cable, sealing the gap between them. Therefore, even if the fluid control valve is located on the outside of the housing, dust and water can be prevented from entering the inside of the housing through the gap between the surface forming the penetration and the cable. As a result, the control board and other components can be prevented from malfunctioning due to dust and / or water. Furthermore, since the fluid control valve is located on the outside of the housing, it is possible to prevent the control board and other components from failing due to heat dissipation from the fluid control valve.

[0009] Preferably, the housing comprises a cylindrical housing body having at least an upper opening, a lid covering the upper opening of the housing body, and a sealing member interposed between the housing body and the lid.

[0010] With this configuration, the sealing member can create an airtight seal between the lid and the main body of the housing.

[0011] The through portion is formed by cutting out a portion downward from the upper end of the housing body and / or upward from the lower end of the lid, and it is preferable that the packing has a sealing member contact portion that contacts the sealing member when the lid is covering the upper opening of the housing body.

[0012] With this configuration, the penetration is formed by cutting out a section downward from the upper end of the housing body, allowing the cable to be passed directly through the penetration from the upper end of the housing body, thereby improving the ease of assembly of the fluid control device. In addition, a through-hole is formed at the upper end of the housing body, and when the lid covers the upper opening of the housing body, the seal member contact portion of the packing comes into contact with the seal member, so that the packing can be fixed to the housing body via the seal member.

[0013] Preferably, the housing has a side wall portion that surrounds the side of the control board, and the through portion is formed on the side of the side wall portion that faces the fluid control valve.

[0014] With this configuration, the penetration is formed on the side wall facing the fluid control valve, so the cable passes through the space between the fluid control valve and the housing and connects to the connector via the penetration. Therefore, the cable does not need to wrap around the outside of the housing, which reduces the possibility of damaging the cable, such as by getting caught on surrounding objects.

[0015] In the fluid control valve, the external extension portion, which is the part where the cable extends outward from the fluid control valve, is preferably provided on the side opposite to the penetration portion.

[0016] With this configuration, the external extension is located on the side opposite the penetration, allowing the cable length to be shortened. As a result, the possibility of damaging the cable can be further reduced, and in addition, the cost of the cable can be lowered. Furthermore, since the external extension is located on the side opposite the penetration, the section of the cable exposed to the outside can be reduced, preventing the cable from being subjected to external electrical noise.

[0017] Preferably, the packing has an outer sealing portion that seals the outer surface of the housing in which the through portion is formed, and an inner sealing portion that seals the inner surface of the housing in which the through portion is formed.

[0018] With this configuration, the outer seal and inner seal seal the outer and inner surfaces of the housing, respectively, which further improves the sealing performance inside the housing.

[0019] Preferably, the outer sealing portion and the inner sealing portion are connected to each other and sandwich both sides of the housing in which the through portion is formed.

[0020] With this configuration, the outer seal portion and the inner seal portion are connected to each other and sandwich the outer and inner surfaces of the housing where the through-hole is formed, thus preventing the gasket from coming loose and falling out of the housing on the inside and outside of the housing.

[0021] Preferably, the packing is annular in shape and has an annular portion through which a retaining hole for holding the cable is formed in the thickness direction, and a slit formed from the outer circumferential surface of the annular portion toward the retaining hole, allowing the cable to be fitted into the retaining hole.

[0022] With this configuration, the cable can be fitted into the retaining hole of the packing through the slit while the cable is connected to the connector and fluid control valve, and when the packing is fitted into the housing, a force acts from the outer circumferential surface of the annular part toward the retaining hole, so that the retaining hole can hold the cable airtight.

[0023] The seal member has a frame shape along the opening edge of the upper opening of the housing body, and it is preferable that the positioning portion for positioning the seal member is formed on the opening edge of the upper opening of the housing body and / or on the lid body.

[0024] With such a configuration, since the seal member is positioned by the positioning portion, the sealing performance by the seal member can be further improved.

[0025] A through hole penetrating from the upper surface to the lower surface is formed in the lid body, and it is preferable that the housing further has a surface seal material covering the through hole.

[0026] With such a configuration, for example, when a through hole such as a communication port or a maintenance hole is formed in the lid body, the through hole can be blocked by the surface seal material.

[0027] As a specific aspect of the fluid control device, it further includes a flow path block in which a flow path is formed inside, and the fluid control valve, the control board, and the housing are provided on one surface of the flow path block.

Advantages of the Invention

[0028] According to the present invention, in a configuration where the fluid control valve is provided outside the housing, it is possible to prevent dust and / or water from entering the inside of the housing.

Brief Description of the Drawings

[0029] [Figure 1] A cross-sectional view schematically showing the configuration of the fluid control device in the first embodiment of the present invention. [Figure 2] A plan view of the fluid control device in the same embodiment. [Figure 3] An exploded perspective view of the housing in the same embodiment. [Figure 4] A cross-sectional view taken along line A-A of the fluid control device in the same embodiment. [Figure 5]A perspective view of the packing in the same embodiment. [Figure 6] A partially enlarged cross-sectional view of the dashed line portion in Figure 1 of the same embodiment. [Figure 7] A perspective view of a fluid control device according to a second embodiment of the present invention. [Figure 8] An exploded perspective view of the housing in the second embodiment. [Figure 9] A perspective view of the lid in the second embodiment. [Figure 10] An enlarged perspective view of the dashed line portion in Figure 7 in the second embodiment. [Modes for carrying out the invention]

[0030] <First Embodiment of the Invention> Hereinafter, a fluid control device according to the first embodiment of the present invention will be described with reference to the drawings. Note that, for the sake of clarity, some details may be omitted or exaggerated in the following diagrams. The same reference numerals are used for identical components, and their descriptions are omitted as appropriate.

[0031] <Device configuration> The fluid control device 100 in this embodiment is installed in a gas flow path and controls the flow rate of the gas flowing through that gas flow path.

[0032] Specifically, as shown in Figures 1 and 2, the fluid control device 100 comprises a flow path block 2 with a flow path R formed inside through which a fluid such as gas flows, a fluid sensor 3 for measuring the flow rate of the fluid flowing through the flow path R, a fluid control valve 4 for controlling the fluid, a control board 5 for controlling the fluid control valve 4, and a housing 6 that houses at least the control board 5. The configuration of each part will be described below.

[0033] The flow path block 2 is, for example, rectangular in shape, and has a fluid sensor 3, a fluid control valve 4, a control board 5, and a housing 6 mounted on one predetermined side. The flow path block 2 is provided with an introduction port (not shown) for introducing fluid into the flow path R and an exit port (not shown) for draining fluid from the flow path R.

[0034] The fluid sensor 3 in this case is a differential pressure type fluid sensor. Specifically, the fluid sensor 3 has an upstream pressure sensor 3a provided upstream of a resistive element Z such as a restrictor or orifice in the flow path R, and a downstream pressure sensor 3b provided downstream of the resistive element Z. The flow rate is calculated from the differential pressure of the two pressure sensors 3a and 3b by the flow rate calculation unit (not shown) of the control board 5, which will be described later.

[0035] The fluid control valve 4 is an electromagnetic valve that uses a solenoid as an actuator. It controls the flow rate by moving the valve body forward and backward relative to the valve seat using the solenoid. Specifically, the fluid control valve 4 comprises a solenoid 41 as the actuator and a casing 42 that houses the solenoid 41. A cable C that electrically connects the fluid control valve 4 and the control board 5 extends from the casing 42 to the control board 5. The fluid control valve 4 is controlled by a valve control unit (not shown) on the control board 5, which will be described later.

[0036] The control board 5 is fixed to the housing 6 in an upright position relative to one side of the flow path block 2. Specifically, the control board 5 has digital circuits such as a CPU, memory, and communication circuits, as well as analog circuits such as amplifiers and buffers, formed on a wiring board. The CPU and other peripheral devices work together according to a program stored in memory to perform two functions: a flow rate calculation unit that calculates the flow rate through the flow path R based on the pressure measured by the fluid sensor 3, and a valve control unit that controls the fluid control valve 4 so that the flow rate becomes a predetermined target flow rate.

[0037] The control board 5 may be divided into a board that functions as a flow rate calculation unit and a board that functions as a valve control unit. In this case, the fluid sensor 3 is connected to the board that functions as a flow rate calculation unit, and the fluid control valve 4 is connected to the board that functions as a valve control unit.

[0038] As shown in Figures 1 to 3, the housing 6 has an internal space for housing the fluid sensor 3 and the control board 5, and is roughly shaped like a rectangular parallelepiped. The fluid control valve 4 is located on the outside of the housing 6, and as shown in Figure 3, the housing 6 has a through-hole 61 through which a cable C connecting the fluid control valve 4 and the connector 5a on the control board 5 passes. Specifically, as shown in Figure 3 in particular, the housing 6 has a cylindrical housing body 62 having at least an upper opening, a lid 63 that covers the upper opening of the housing body 62, and a sealing member 64 interposed between the housing body 62 and the lid 63. Hereafter, the direction from the housing body 62 toward the lid 63 will be considered upward, and the direction from the housing body 62 toward the flow path block 2 will be considered downward.

[0039] The housing body 62 is a side wall surrounding the control board 5, and in this embodiment, it is roughly rectangular in shape with an open upper and lower end. As shown in Figures 1 and 2, one side of the housing body 62 faces the fluid control valve 4, and the through-hole 61 is formed on the side of the housing body 62 facing the fluid control valve 4. More specifically, an external extension 4a for the cable C extending outward from the fluid control valve 4 is formed on the fluid control valve 4, and the external extension 4a is provided on the side facing the through-hole 61. The external extension 4a may also be provided on the opposite side from the through-hole 61. In this case, the external extension 4a is an opening formed in the casing 42 of the fluid control valve 4, but the external extension 4a may also be a connector provided on the fluid control valve 4.

[0040] Here, as shown in Figures 1 and 2, the external extension 4a, the through-hole 61, and the connector 5a are arranged on the same straight line. More specifically, as shown in Figure 1, in a cross-sectional view passing through the through-hole 61 along the longitudinal direction in which the housing body 62 extends, the external extension 4a, the through-hole 61, and the connector 5a are arranged at the same height. However, in a cross-sectional view passing through the through-hole 61 along the longitudinal direction in which the housing body 62 extends, the external extension 4a, the through-hole 61, and the connector 5a may be arranged at different heights.

[0041] Furthermore, as shown in Figure 4, the through-hole 61 is formed by cutting out a section of the side wall of the housing body 62 from the upper end downwards. In this case, the through-hole 61 is formed by cutting out a section of the side wall of the housing body 62 such that, in a side view from the side wall where the through-hole 61 is formed, the bottom of the surface 61x forming the through-hole 61 is arc-shaped.

[0042] The cover 63 is generally rectangular and flat, with its lower surface covering the upper opening of the housing body 62. In this embodiment, as shown particularly in Figures 1 and 6, the cover 63 abuts against the upper end surface of the housing body 62 and the upper surface of the sealing member 64. The cover 63 has a communication wall 63w that connects the contact surface that abuts against the upper end surface of the housing body 62 and the contact surface that abuts against the upper surface of the sealing member 64. In this embodiment, the communication wall 63w abuts against the side surface of the housing body 62. This positions the cover 63 on the housing body 62. As shown in Figures 2 and 3, bolt holes bh are formed at the four corners of the cover 63, into which bolts B that fix the cover 63 and the sealing member 64 to the housing body 62 are inserted.

[0043] In this embodiment, a single bolt B that penetrates the housing body 62, the lid 63, and the sealing member 64 is inserted into each bolt hole bh, but the bolt B may be divided. For example, the bolt B may be divided into a bolt element that fastens the flow path block 2, the housing body 62, and the sealing member 64, and a bolt element that fastens the housing body 62, the lid 63, and the sealing member 64.

[0044] As shown in Figure 2, the lid 63 has a through-hole 63h that extends from the top surface to the bottom surface of the lid 63. The through-hole 63h is, for example, a communication port or a maintenance hole. The housing 6 is further provided with a surface sealing material 65 that covers the through-hole 63h.

[0045] The sealing member 64 is generally rectangular in shape and, as shown in Figures 1 and 4, is provided at the upper and lower ends of the housing body 62, respectively. Specifically, as shown in Figure 3, the sealing member 64 is frame-shaped along the opening edges of the upper and lower ends of the housing body 62.

[0046] In this embodiment, as shown in Figures 1 to 4 and Figure 6, positioning portions 62a for positioning the sealing member 64 are formed on the opening edge at the upper end and the opening edge at the lower end of the housing body 62, respectively. As shown in Figure 3, bolt holes bh into which bolts B are inserted are formed at the four corners of the sealing member 64.

[0047] The positioning portion 62a is formed along the opening edge of the upper end and the opening edge of the lower end of the housing body 62. Specifically, as shown in Figures 1 and 4, the positioning portion 62a is a recess that is recessed downward from the upper end of the housing body 62 and a recess that is recessed upward from the lower end of the housing body 62. With the lower surface of the sealing member 64 in contact with the bottom surface of the positioning portion 62a, the side surface of the sealing member 64 comes into contact with the side surface of the positioning portion 62a that rises from the bottom surface of the positioning portion 62a, thereby positioning the sealing member 64 relative to the housing body 62. As shown in Figure 3, bolt holes bh into which bolts B are inserted are formed at the four corners of the positioning portion 62a.

[0048] As shown in Figures 4 and 6, a packing 7 is provided between the surface 61x forming the through-port 61 in the housing 6 and the cable C to seal the gap between them. The packing 7 is provided on the side wall where the through-port 61 is formed. As shown in Figures 4 to 6, the packing 7 is annular in shape and has an annular portion 71 through which a retaining hole 7h for holding the cable C is formed in the thickness direction, and a slit 72 formed from the outer circumferential surface of the annular portion 71 toward the retaining hole 7h. The packing 7 is made of an elastic material such as resin.

[0049] The annular portion 71 airtightly seals the gap between the surface 61x forming the through portion 61 and the cable C. Specifically, as shown in Figure 6 in particular, the cable C is fitted into the retaining hole 7h through the slit 72, so that the retaining hole 7h airtightly holds the cable C. The annular portion 71 then seals the through portion 61, thereby airtightly sealing the gap between the surface 61x forming the through portion 61 and the cable C.

[0050] As shown in Figures 5 and 6, the outer circumference of the annular portion 71 has an outer sealing portion 73 that seals the outer surface of the side wall in which the through portion 61 is formed, and an inner sealing portion 74 that seals the inner surface of the side wall in which the through portion 61 is formed. The outer sealing portion 73 and the inner sealing portion 74 are connected to each other and sandwich both sides of the side wall in which the through portion 61 is formed. Specifically, a groove portion 75 is formed between the outer sealing portion 73 and the inner sealing portion 74, and the outer sealing portion 73 and the inner sealing portion 74 are connected to each other via the groove portion 75. By fitting the groove portion 75 into the side wall in which the through portion 61 is formed, the outer sealing portion 73 and the inner sealing portion 74 sandwich both sides of the side wall in which the through portion 61 is formed. In this state, the bottom surface of the groove portion 75 is in contact with the surface 61x that forms the through portion 61.

[0051] Here, as shown in Figures 5 and 6, a stepped portion 7w is formed on the side opposite the slit 72 with respect to the holding hole 7h, due to the difference in height between the upper end of the outer seal portion 73 and the upper end of the inner seal portion 74. Specifically, the upper end surface of the inner seal portion 74 is positioned lower than the upper end surface of the outer seal portion 73. In this embodiment, the upper end of the outer seal portion 73 and the upper end of the groove portion 75 are at the same height. The upper end surface of the groove portion 75 functions as a lid contact portion 7a, which abuts against the lid 63 when the lid 63 is covering the upper opening of the housing body 62. The upper end surface of the inner seal portion 74 functions as a seal member contact portion 7b, which abuts against the seal member 64 when the lid 63 is covering the upper opening of the housing body 62.

[0052] The lid contact portion 7a is a flat surface and contacts the contact surface on the lower surface of the lid 63 that contacts the upper end surface of the housing body 62. When the packing 7 is attached to the housing 6, the lid contact portion 7a is flush with the upper end surface of the housing body 62.

[0053] The sealing member contact portion 7b is a flat surface and contacts the lower surface of the sealing member 64. When the packing 7 is attached to the housing 6, the sealing member contact portion 7b is flush with the bottom surface of the positioning portion 62a, and a part of the sealing member contact portion 7b is located inside the sealing member 64.

[0054] <Method for assembling a fluid control device> Next, the assembly method of the fluid control device according to this embodiment will be described.

[0055] First, the fluid sensor 3, fluid control valve 4, and control board 5 are mounted on one side of the flow path block 2.

[0056] Next, the sealing member 64 is placed on one side of the flow path block 2 such that the fluid sensor 3 and the control board 5 are surrounded within the frame of the sealing member 64. Alternatively, the sealing member 64 may be placed on one side of the flow path block 2 first, and then the fluid sensor 3 and the control board 5 may be mounted within the frame of the sealing member 64 on the other side of the flow path block 2.

[0057] Next, the housing body 62 is placed on one side of the flow path block 2 where the sealing member 64 is located. Specifically, the positioning portion 62a formed at the lower end of the housing body 62 is brought into contact with the sealing member 64. As a result, the fluid sensor 3 and the control board 5 are surrounded by the housing body 62, and the fluid control valve 4 is located outside the housing body 62.

[0058] Next, the cable C is passed through the penetration 61 to electrically connect the external extension 4a of the fluid control valve 4 and the connector 5a of the control board 5 using the cable C.

[0059] Next, the packing 7 seals the gap between the surface 61x forming the through-hole 61 in the housing body 62 and the cable C. Specifically, the cable C is inserted into the slit 72 of the packing 7, and the cable C is fitted into the retaining hole 7h from the slit 72 of the packing 7. Then, the side wall where the through-hole 61 is formed is sandwiched between the inward-facing surface of the outer sealing portion 73 and the outward-facing surface of the inner sealing portion 74. In this state, the lid contact portion 7a is at the same height as the upper end surface of the housing body 62, and the sealing member contact portion 7b is flush with the bottom surface of the positioning portion 62a formed at the upper end of the housing body 62.

[0060] Next, the sealing member 64 is positioned by bringing it into contact with the positioning portion 62a formed on the upper end of the housing body 62. In this state, the upper end surface of the housing body 62 and the lid contact portion 7a are flush.

[0061] Next, the upper opening of the housing body 62 is covered with the cover 63. Of the lower surface of the cover 63, the part that is above the communication wall 63w abuts against the upper end surface of the housing body 62 and the cover contact portion 7a. Also, of the lower surface of the cover 63, the part that is below the communication wall 63w abuts against the upper surface of the sealing member 64. The lower surface of the sealing member 64 abuts against the positioning portion 62a and the sealing member contact portion 7b. Therefore, by covering the upper opening of the housing body 62 with the cover 63, the packing 7 is fixed to the housing body 62 via the sealing member 64.

[0062] Next, bolts B are inserted into the bolt holes bh formed in the positioning section 62a, the cover 63, and the sealing member 64. Then, bolts B are tightened to fix the housing 6 to the flow path block 2.

[0063] <Effects of the First Embodiment> According to the fluid control device 100 in the first embodiment, the packing 7 is provided between the cable C and the through-hole 61, sealing the gap between them. Therefore, even if the fluid control valve 4 is located outside the housing 6, dust and water can be prevented from entering the inside of the housing 6 through the gap between the cable C and the through-hole 61. As a result, the control board 5 and other components can be prevented from malfunctioning due to dust and / or water. In addition, since the fluid control valve 4 is located outside the housing 6 and the housing 6 is sealed, it is possible to prevent the fluid control valve 4 from affecting the electronic components inside the housing 6 with heat, thereby preventing any impact on the accuracy of flow rate measurement. Furthermore, since the fluid control valve 4 is located on the outside of the housing 6, it is possible to prevent the control board 5 and other components from malfunctioning due to heat dissipation from the fluid control valve 4.

[0064] <Second Embodiment of the Present Invention> Hereinafter, a fluid control device according to a second embodiment of the present invention will be described with reference to the drawings. In the following description, parts that differ from the first embodiment will be described, and the same reference numerals will be used for the same components.

[0065] In the first embodiment, the through-hole 61 is formed by cutting out the housing body 62, whereas in the second embodiment, unlike the first embodiment, the through-hole 61 is formed by cutting out the lid 63.

[0066] Specifically, as shown in Figures 7 and 8, the through-hole 61 is formed by cutting out an upward portion from the lower end of the lid 63. More specifically, the through-hole 61 is formed by cutting out an upward portion from the lower end of the side wall of the lid 63. Here, as shown particularly in Figures 8 and 9, the through-hole 61 is formed by cutting out the side wall of the lid 63 such that the bottom of the surface 61x forming the through-hole 61 is arc-shaped.

[0067] In the second embodiment, as shown particularly in Figure 9, the lid 63 has a seal positioning portion 63a for positioning the seal member 64. Specifically, the seal member 64 is frame-shaped, and the seal positioning portion 63a is formed on the surface of the lid 63 that closes the upper opening of the housing body 62, and is a groove into which the seal member 64 is fitted. By fitting the seal member 64 into the seal positioning portion 63a, the seal member 64 is positioned relative to the lid 63.

[0068] Here, as shown in Figure 8, a seal member mounting portion 62c is formed at the upper end of the housing body 62 on which the seal member 64 is placed. Specifically, the seal member mounting portion 62c is a surface formed along the opening edge of the upper end and the opening edge of the lower end of the housing body 62. More specifically, the seal member mounting portion 62c is a frame-shaped surface that conforms to the shape of the seal member 64. With one side of the seal member 64 in contact with the seal member mounting portion 62c, the other side of the seal member 64 is fitted into the seal positioning portion 63a, thereby positioning the seal member 64 relative to the housing 6.

[0069] In the second embodiment, the packing 7 is provided on the side wall of the cover 63 in which the through portion 61 is formed. As shown in Figures 8 and 10, the packing 7 is generally annular in shape, and a retaining hole 7h for holding the cable C is formed through it in the thickness direction. The retaining hole 7h can hold the cable C airtight, and the cable C is passed through the retaining hole 7h. In the second embodiment, the packing 7 does not have a slit formed from the outer circumferential surface toward the retaining hole 7h, but it may have a slit.

[0070] Specifically, the packing 7 has an outer sealing portion 73 that seals the outer surface of the side wall of the lid 63 in which the through portion 61 is formed, and an inner sealing portion 74 that seals the inner surface of the side wall of the lid 63 in which the through portion 61 is formed. The outer circumferential surface of the outer sealing portion 73 and the outer circumferential surface of the inner sealing portion 74 are composed of an arc-shaped region that follows the shape of the through portion 61 and a flat region that is formed flat on the opposite side of the arc-shaped region.

[0071] A groove 75 is formed between the outer sealing portion 73 and the inner sealing portion 74, and the outer sealing portion 73 and the inner sealing portion 74 are connected to each other via the groove 75. When the side wall of the lid 63, in which the through portion 61 is formed, is fitted into the groove 75, the outer sealing portion 73 and the inner sealing portion 74 sandwich both sides of the side wall of the lid 63 in which the through portion 61 is formed. In this state, the bottom surface of the groove 75 comes into contact with the surface 61x that forms the through portion 61.

[0072] Here, as shown in particular in Figure 9, a packing positioning portion 63b is formed on the surface of the lid 63 that closes the upper opening of the housing body 62, for positioning the inner sealing portion 74 of the packing 7. Specifically, the packing positioning portion 63b is a groove into which the arc-shaped region of the inner sealing portion 74 is fitted. Because the seal positioning portion 63a and the packing positioning portion 63b are formed on the lid 63, the lid 63 can position the sealing member 64 and the packing 7.

[0073] When the arc-shaped region of the inner seal portion 74 is fitted into the packing positioning portion 63b, the flat region of the inner seal portion 74 is in contact with the upper surface of the sealing member 64. With this configuration, when the lid 63 is covering the upper opening of the housing body 62, the flat region of the inner seal portion 74 and the upper surface of the sealing member 64 are in close contact, so no gap is created between the packing 7 and the sealing member 64.

[0074] <Other Embodiments> However, the present invention is not limited to the embodiments described above.

[0075] In the first and second embodiments described above, the through-hole 61 was formed on either the side wall of the housing body 62 or the side wall of the lid 63, but it may be formed on both.

[0076] In the first and second embodiments described above, the positioning portion for positioning the sealing member 64 provided on the upper part was formed on either the housing body 62 or the lid, but it may be formed on both.

[0077] In the first and second embodiments described above, the positioning portion for positioning the sealing member 64 provided at the bottom was formed on the housing body 62, but it may also be formed on one surface of the flow path block 2 on which the housing 6 is mounted, or on both surfaces.

[0078] In the first embodiment, the lid 63 had a communication wall 63w that connected a contact surface that abuts the upper end surface of the housing body 62 and a contact surface that abuts the upper surface of the sealing member 64. However, the lower surface of the lid 63 may not have a communication wall 63w, meaning that the contact surface that abuts the upper end surface of the housing body 62 and the contact surface that abuts the upper surface of the sealing member 64 may be flush. In this case, the upper surface of the sealing member 64, the upper end of the housing 6, and the lid contact portion 7a of the packing 7 will be flush.

[0079] In the first and second embodiments described above, the housing body 62 and the lid 63 were separate components, but the housing body 62 and the lid 63 may be an integrated unit.

[0080] In the first and second embodiments described above, the packing 7 was a single member in which an outer sealing portion 73 and an inner sealing portion 74 were connected to each other. However, the packing 7 may be divided into two members: an outer packing element constituting the outer sealing portion 73 and an inner packing element constituting the inner sealing portion 74.

[0081] In the first embodiment described above, the packing 7 had a slit 72, but it does not have to have a slit 72. In this case, after passing the cable C through the holding hole 7h, the cable C is connected to the external extension 4a of the fluid control valve 4 or the connector 5a of the control board 5.

[0082] In the first embodiment described above, the through-hole 61 was formed by cutting out a section downward from the upper end of the housing body 62, but it is not limited to this. The through-hole 61 may be a through-hole located at a predetermined distance from the upper end of the housing body 62.

[0083] In the first embodiment described above, the positioning portion 62a was a recess formed in the housing body 62, but is not limited to this. For example, a recess may be formed in the sealing member 64, and the positioning portion 62a may be a protrusion that fits into the recess of the sealing member 64. In this case, in a side view, the sealing member contact portion 7b may be at the same height as the upper end surface of the outer sealing portion 73, or it may be at a different height.

[0084] In the first and second embodiments described above, the housing 6 was equipped with a surface sealing material 65, but it is not necessary to provide the surface sealing material 65.

[0085] In the first and second embodiments, the packing 7 may be used to seal the gap between the cable C and the through-hole 61, and then the cable C may be passed through the through-hole 61 to electrically connect the external extension 4a of the fluid control valve 4 and the connector 5a of the control board 5 using the cable C.

[0086] Furthermore, the present invention can be modified in various ways, as long as it does not contradict its spirit. [Explanation of symbols]

[0087] 100... Fluid control device 2 ···Flow channel block 3. Fluid Sensor 4. Fluid control valve 4a ···External extension 5. Control board 5a ··· Connector 6 ··· cabinet 61... Penetration 61x... Surface forming the through-hole 62 ···Main unit 63 ···Lid 64 ···Sealing material 65 ···Surface sealing material 7 ··· Gasket 71 ··· Ring section 72 ···Slit 73 ···Outer seal section 74 ···Inner seal section 7a ···Sealing member contact portion 7h...Retaining hole

Claims

1. A fluid control device for controlling fluid flowing through a channel, A fluid control valve that controls the aforementioned fluid, A control board for controlling the fluid control valve, The system comprises a housing that accommodates the control board, The fluid control valve is located on the outside of the housing. The housing has a through-hole through which a cable connecting the connector on the control board and the fluid control valve passes. A fluid control device is provided with a packing that seals the space between the surface forming the through-hole in the housing and the cable.

2. The aforementioned enclosure is A cylindrical housing body having at least an upper opening, A cover that covers the upper opening of the housing body, The fluid control device according to claim 1, further comprising a sealing member interposed between the housing body and the lid.

3. The aforementioned through-portion is formed by cutting out a portion downward from the upper end of the housing body and / or upward from the lower end of the lid. The fluid control device according to claim 2, wherein the packing has a sealing member contact portion that contacts the sealing member when the lid covers the upper opening of the housing body.

4. The housing has side walls that surround the side of the control board, The fluid control device according to claim 2 or 3, wherein the through portion is formed on the side of the side wall facing the fluid control valve and / or on the side of the cover facing the fluid control valve.

5. The fluid control device according to claim 4, wherein the external extension portion of the fluid control valve, which is the portion where the cable extends outward from the fluid control valve, is provided on the side opposite to the penetration portion.

6. The aforementioned packing is An outer sealing portion that seals the outer surface of the housing in which the through portion is formed, A fluid control device according to any one of claims 1 to 5, further comprising an inner sealing portion that seals the inner surface of the housing in which the through portion is formed.

7. The fluid control device according to claim 6, wherein the outer sealing portion and the inner sealing portion are connected to each other and sandwich both sides of the housing in which the through portion is formed.

8. The aforementioned packing is It is ring-shaped, and the annular portion has a holding hole for holding the cable that penetrates through it in the thickness direction, A fluid control device according to any one of claims 1 to 7, comprising a slit formed from the outer circumferential surface of the annular portion toward the retaining hole, which allows the cable to be fitted into the retaining hole.

9. The sealing member is frame-shaped and follows the opening edge of the upper opening of the housing body. The fluid control device according to claim 2 or 3, wherein the positioning portion for positioning the sealing member is formed on the opening edge of the upper opening of the housing body and / or on the lid.

10. The aforementioned lid has a through hole that extends from the top surface to the bottom surface. The fluid control device according to any one of claims 7 to 9, wherein the housing further comprises a surface sealing material that covers the through hole.

11. The aforementioned flow path is further comprising a flow path block in which the flow path is formed inside, The fluid control device according to any one of claims 1 to 10, wherein the fluid control valve, the control board, and the housing are provided on one surface of the flow path block.

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