Electrical connection device

Abstract

The present invention provides an electrical connection device that prevents damage to the object being inspected by screws used to fix the components of the electrical connection device. [Solution] The electrical connection device 1 comprises a first substrate 20 having a first surface 201 and a second surface 202 facing in the opposite direction to the first surface 201, a fixing nut 40 disposed inside the first substrate 20, a second substrate 30 laminated on the second surface 202, and a fixing bolt 50 disposed on the second substrate 30. The threaded portion of the fixing bolt 50 passes through at least a part of the second substrate 30 and is inserted into the first substrate 20 from the second surface 202, and the threaded portion engages with the fixing nut 40 to fix the first substrate 20 to the second substrate 30.

Description

Technical Field

[0001] The present invention relates to an electrical connection device used for inspecting the electrical characteristics of an object to be inspected.

Background Art

[0002] In order to measure the electrical characteristics of an object to be inspected such as an integrated circuit, an electrical connection device for electrically connecting the object to be inspected and an inspection device is used. The electrical connection device includes, as components, a probe that contacts the object to be inspected, a probe head that supports the probe, a wiring board on which internal wirings for electrically connecting the probe and the inspection device are arranged, and the like.

[0003] The wiring board includes internal wirings such as a signal wiring that propagates an electrical signal between the signal terminal of the object to be inspected and the inspection device, a ground wiring that supplies a ground voltage to the object to be inspected, and a power supply wiring that supplies a power supply voltage to the object to be inspected. Probe pads for connecting to the internal wirings are arranged on the surface of the wiring board. By laminating the probe head and the wiring board, the probe contacts the probe pad, and the probe is electrically connected to the internal wiring of the wiring board.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The probe head is fixed to the wiring board by, for example, a fixing screw inserted from the lower surface facing the object to be inspected. In this case, there is a risk that the fixing screw may loosen due to the influence of vibration or the like during the inspection of the object to be inspected. There is concern that the loosened fixing screw may protrude from the lower surface of the probe head and contact the object to be inspected, or the fixing screw may fall from the probe head onto the object to be inspected, causing damage to the object to be inspected.

[0006] In view of the above problems, the present invention aims to provide an electrical connection device that prevents damage to an object being inspected by screws used to fix the components of the electrical connection device. [Means for solving the problem]

[0007] An electrical connection device according to one aspect of the present invention comprises a first substrate having a first surface and a second surface facing in the opposite direction to the first surface, a fixing nut disposed inside the first substrate, a second substrate laminated on the second surface, and a fixing bolt disposed on the second substrate. The threaded portion of the fixing bolt passes through at least a part of the second substrate and is inserted into the first substrate from the second surface, and the threaded portion of the fixing bolt engages with the fixing nut to fix the first substrate to the second substrate. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide an electrical connection device that prevents damage to the object being inspected by screws that fix the components of the electrical connection device. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is a schematic diagram showing the configuration of an electrical connection device according to an embodiment. [Figure 2] Figure 2 is a schematic enlarged view showing the structure of the fixing nut and fixing bolt of the electrical connection device according to the embodiment. [Figure 3] Figure 3 is a schematic enlarged view showing other structures of the fixing nut and fixing bolt of the electrical connection device according to the embodiment. [Figure 4] Figure 4 is a schematic top view showing the structure of the fixing nut of the electrical connection device according to the embodiment. [Figure 5] Figure 5 is a schematic diagram showing the configuration of an electrical connection device of a comparative example. [Figure 6] Figure 6 is a schematic diagram showing the configuration of an electrical connection device according to a modified embodiment. [Modes for carrying out the invention]

[0010] Next, embodiments of the present invention will be described with reference to the drawings. In the following drawings, identical or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the ratios of the thicknesses of each part may differ from those of reality. Furthermore, it goes without saying that there are parts in the drawings where the dimensional relationships and ratios differ from those of other parts. The embodiments shown below are illustrative examples of devices and methods for realizing the technical idea of ​​this invention, and the embodiments of this invention do not limit the materials, shapes, structures, arrangements, etc. of the components to those described below.

[0011] The electrical connection device 1 according to the embodiment shown in Figure 1 is used to measure the electrical characteristics of an object to be inspected 2. The electrical connection device 1 comprises a first substrate 20 having a first surface 201 facing the object to be inspected 2 and a second surface 202 facing in the opposite direction to the first surface 201, and a second substrate 30 laminated on the second surface 202 of the first substrate 20. Furthermore, the electrical connection device 1 comprises a fixing nut 40 disposed inside the first substrate 20 and a fixing bolt 50 disposed on the second substrate 30. The fixing bolt 50 has a threaded portion inserted into the first substrate 20 from the second surface 202, passing through at least a part of the second substrate 30. The threaded portion of the fixing bolt 50 engages with the fixing nut 40, fixing the first substrate 20 to the second substrate 30. Details of the fixing nut 40 and fixing bolt 50 will be described later.

[0012] In describing the embodiments, the direction in which the second substrate 30 is located relative to the first substrate 20 is referred to as the upward direction, and the direction in which the first substrate 20 is located relative to the second substrate 30 is referred to as the downward direction. Furthermore, the surface facing upward is also referred to as the top surface, and the surface facing downward is also referred to as the bottom surface. For example, the first surface 201 is the bottom surface of the first substrate 20, and the second surface 202 is the top surface of the first substrate 20. Furthermore, the direction perpendicular to the vertical direction is referred to as the horizontal direction. The first surface 201 and the second surface 202 extend in the horizontal direction.

[0013] The probe 10 includes a signal probe that propagates an electrical signal between the object to be inspected 2 and the inspection device, and a power probe that supplies a power supply voltage or ground voltage to the object to be inspected 2. The probe 10 has a tip end, which is one end that contacts a terminal of the object to be inspected 2 (not shown in the illustration), and a base end, which is the other end. The material of the probe 10 may be, for example, nickel (Ni) or a nickel alloy.

[0014] The first substrate 20 may be a probe head that holds the probe 10 so as to extend from the first surface 201 toward the object to be inspected 2. The first substrate 20 has a guide hole formed therein that penetrates from the first surface 201 to the second surface 202 facing the opposite direction from the first surface 201. The first substrate 20 supports the probe 10 as it passes through the guide hole. The material of the first substrate 20 is, for example, ceramic.

[0015] The second substrate 30 may be a wiring board having internal wiring that electrically connects to the probe 10. A probe pad 35 is positioned on the lower surface of the second substrate 30 facing the first substrate 20. The base end of the probe 10, which penetrates the first substrate 20, is in contact with the probe pad 35 that electrically connects to the internal wiring. The second substrate 30 may be a multilayer wiring board such as an MLO (Multi-Layer Organic) substrate or an MLC (Multi-Layer Ceramic) substrate. The probe pad 35 may be made of a metallic material such as gold (Au) or copper (Cu).

[0016] The first substrate 20 of the electrical connection device 1 shown in Figure 1 includes a first layer 21 having a first surface 201 and a second layer 22 having a second surface 202. The first layer 21 and the second layer 22 are stacked and fixed to each other by bonding pins 250.

[0017] The electrical connection device 1 further comprises a printed circuit board 60 and a stiffener 70 that are sequentially stacked on the second substrate 30.

[0018] The printed circuit board 60 is disposed on the upper surface of the second substrate 30. A recess is formed in a part of the upper surface of the second substrate 30 facing the lower surface of the printed circuit board 60, and a space is provided in a part between the second substrate 30 and the printed circuit board 60. The electrical connection device 1 includes a wiring wire 80 that penetrates the second substrate 30 and the printed circuit board 60 and passes through the space between the second substrate 30 and the printed circuit board 60. One terminal of the wiring wire 80 is electrically connected to the probe pad 35. The other terminal of the wiring wire 80 is electrically connected to an electrode terminal 61 disposed on the upper surface of the printed circuit board 60. In other words, a part of the wiring wire 80 is the internal wiring of the second substrate 30, and another part of the wiring wire 80 is the printed wiring of the printed circuit board 60 that is electrically connected to the internal wiring of the second substrate 30. The electrode terminal 61 of the printed circuit board 60 is electrically connected to an inspection device such as a tester to be omitted. Thus, the probe 10 and the inspection device are electrically connected via the second substrate 30 and the printed circuit board 60.

[0019] As described above, the wiring wire 80 passes through the inside of the recess formed on the upper surface of the second substrate 30. The wiring wire 80 may be fixed to the second substrate 30 by curing the fixing resin 38 poured into the inside of the recess.

[0020] The second substrate 30 may be, for example, a space transformer that widens the interval of the wiring wire 80 more than the interval of the probes 10. The second substrate 30 may be, for example, a ceramic substrate or an MLO substrate.

[0021] The printed circuit board 60 is fixed to a stiffer 70 that is more rigid than the printed circuit board 60. The stiffer 70 ensures the mechanical strength of the electrical connection device 1 so that the printed circuit board 60 does not bend, and is also used as a support for fixing each of the components of the electrical connection device 1.

[0022] The printed circuit board 60 is fixed to the rigid stiffener 70 by a first connecting screw 601 and a second connecting screw 602 that penetrate the printed circuit board 60 from its bottom to its top surface. The second circuit board 30 is fixed to the printed circuit board 60 by a third connecting screw 603 that penetrates the second circuit board 30 from its bottom to its top surface. As shown in Figure 1, the tip of the third connecting screw 603 may be joined to the head of the first connecting screw 601.

[0023] The details of the fixing nut 40 and fixing bolt 50 are described below.

[0024] As shown in Figure 1, the fixing bolt 50 continuously penetrates the second substrate 30 and the printed circuit board 60. The outer diameter of the second portion 52 of the fixing bolt 50 that penetrates the printed circuit board 60 is larger than the outer diameter of the first portion 51 that penetrates the second substrate 30. At the boundary between the first portion 51 and the second portion 52, the end face of the second portion 52 that protrudes outward from the outer edge of the first portion 51 abuts against the upper surface of the second substrate 30. In addition, the portion of the second portion 52 of the fixing bolt 50 that is exposed from the printed circuit board 60 is housed in a hole formed in the lower surface of the stiffener 70.

[0025] Figure 2 shows an enlarged view of the portion where the fixing nut 40 and the fixing bolt 50 interlock. The fixing nut 40 includes a groove-forming portion 41 having a groove corresponding to the helical groove formed on the side surface of the threaded portion of the fixing bolt 50, and a flange portion 42 connected to the groove-forming portion 41 and extending in a direction intersecting the extension direction (vertical direction) of the fixing bolt 50. The flange portion 42 shown in Figure 2 extends horizontally perpendicular to the vertical direction.

[0026] The flange portion 42 is fitted onto the first substrate 20, and the fixing nut 40 is fixed to the first substrate 20. For example, as shown in Figure 2, the flange portion 42 may be inserted into the space formed between the first layer 21 and the second layer 22. In this way, the flange portion 42 is fitted onto the first substrate 20, which prevents the fixing nut 40 from falling off the first substrate 20. Furthermore, it is possible to suppress slippage when tightening the screw to engage the fixing bolt 50 with the fixing nut 40.

[0027] The flange portion 42 may include an insertion portion 421 that extends parallel to the first surface 201 and is inserted into the first substrate 20, and a protrusion 422 that is positioned on the surface of the insertion portion 421 and protrudes in a direction intersecting the extension direction of the insertion portion 421. The protrusion 422 protrudes, for example, vertically from the surface of the insertion portion 421. The first substrate 20 has a recess 200 into which the protrusion 422 is fitted.

[0028] Figure 2 illustrates the case where the protrusion 422 is formed on the lower surface of the insertion portion 421. In this case, the recess 200 is formed in the first layer 21. On the other hand, if the protrusion 422 is formed on the upper surface of the insertion portion 421, the recess 200 is formed in the second layer 22. Also, as shown in Figure 3, the protrusion 422 may be formed on both the upper and lower surfaces of the insertion portion 421. In that case, the recess 200 is formed in both the first layer 21 and the second layer 22. Thus, the recess 200 is formed in at least one of the first layer 21 and the second layer 22.

[0029] As described above, the protrusion 422 of the flange portion 42 is fitted into the recess 200 of the first substrate 20, thereby stably positioning the fixing nut 40 on the first substrate 20. This prevents contact damage between the fixing nut 40 and the first substrate 20 caused by the impact during screw tightening when the fixing bolt 50 is fitted into the fixing nut 40.

[0030] The fixing nuts 40 and fixing bolts 50 do not protrude beyond the first surface 201 toward the object under inspection 2. In other words, the entire fixing nut 40 and the threaded portion of the fixing bolt 50 are housed inside the first substrate 20. This prevents the fixing nuts 40 or fixing bolts 50 from coming into contact with the object under inspection 2.

[0031] Although not shown in the diagram, the space in the first substrate 20 formed to fit the flange portion 42 may have curved corners on its inner wall surface. This is because the space provided in the first substrate 20 is formed by machining using a drill or the like. For this reason, as shown in Figure 4, the corners of the insertion portion 421 may be rounded. Figure 4 shows a top view of the fixing nut 40. By rounding the outer edge of the insertion portion 421 in this way, the side surface of the flange portion 42 and the inner wall surface of the space formed in the first substrate 20 come into surface contact. This prevents damage to the first substrate 20 caused by contact between the first substrate 20 and the flange portion 42. Although a certain amount of space may be provided around the fixing nut 40 considering the manufacturing margin of the electrical connection device 1, the narrower the clearance around the flange portion 42, the less rattle there will be, and the less the fixing nut 40 will tilt when tightened.

[0032] The above describes a fixing nut 40 in which one flange portion 42 extends from the groove-forming portion 41, but the fixing nut 40 may have multiple flange portions 42 extending in different directions. For example, the fixing nut 40 may have two flange portions 42 extending in opposite directions. Also, although the case in which the flange portion 42 extends in one direction from the groove-forming portion 41 has been described, the flange portion 42 may extend in multiple directions. The more flange portions 42 there are or the more directions in which they extend, the more stably the fixing nut 40 can be fixed to the first substrate 20. On the other hand, by arranging the flange portion 42 on only one side of the groove-forming portion 41, the increase in the area of ​​the first substrate 20 and the second substrate 30 can be suppressed.

[0033] Furthermore, although the case where the protrusion 422 is cylindrical has been described above, the shape of the protrusion 422 is not limited to a cylindrical shape. The protrusion 422 and the insertion part 421 may be integrally molded, or the protrusion 422 may be formed on the insertion part 421 from a different material.

[0034] As described above, in the electrical connection device 1 according to the embodiment, the first substrate 20 is fixed to the second substrate 30 by the engagement of a fixing nut 40 located inside the first substrate 20 and a fixing bolt 50 that passes through at least a part of the second substrate 30. In contrast, in the comparative example electrical connection device 1M shown in Figure 5, for example, the first substrate 20 is fixed to the second substrate 30 by a fixing screw 300 inserted from the lower surface of the first substrate 20. As a result, there is a risk that the fixing screw 300 will protrude from the lower surface of the first substrate 20 and come into contact with the object being inspected or fall off the first substrate 20.

[0035] On the other hand, with the electrical connection device 1, even if the engagement between the fixing nut 40 and the fixing bolt 50 loosens, the fixing nut 40 or the fixing bolt 50 will not protrude from the lower surface of the first substrate 20 or fall off the first substrate 20. Furthermore, since the convex portion 422 of the flange portion 42 is fitted into the recess 200 of the first substrate 20, slippage during screw tightening when engaging the fixing bolt 50 with the fixing nut 40, and contact damage between the fixing nut 40 and the first substrate 20 can be suppressed.

[0036] Furthermore, with the electrical connection device 1, the first substrate 20 is fixed to the second substrate 30 by sandwiching the first substrate 20 and the second substrate 30 with a fixing nut 40 and a fixing bolt 50. Therefore, even if the material of the first substrate 20 is not suitable for forming screw threads, the first substrate 20 and the second substrate 30 can be connected. Moreover, by connecting the first substrate 20 and the second substrate 30 with the fixing nut 40 and the fixing bolt 50, it is easy to separate the first substrate 20 and the second substrate 30. Therefore, maintenance such as replacing parts of the electrical connection device 1 is easy.

[0037] <Variation> As shown in Figure 6, the portion of the second substrate 30 where the fixing bolts 50 are placed may be made of a conductive material with higher rigidity than an insulating material such as ceramic. For example, the portion of the second substrate 30 where the internal wiring is placed may be ceramic, and the outer edge where the fixing bolts 50 are placed may be made of metal.

[0038] (Other embodiments) Although the present invention has been described above by embodiments, the descriptions and drawings that constitute part of this disclosure should not be understood as limiting the invention. Various alternative embodiments, examples, and operational techniques will become apparent to those skilled in the art from this disclosure.

[0039] For example, although the above description illustrates the case where the material of the first substrate 20 is ceramic, the material of the first substrate 20 may be other than ceramic, such as resin or glass. Alternatively, the first substrate 20 may be a thin metal plate that does not form screw grooves.

[0040] Furthermore, the electrical connection device 1 may hold the probe 10 in a curved state. By holding the probe 10 in a curved state, when the tip of the probe 10 comes into contact with the object to be inspected 2, the probe 10 will bend further due to flexural deformation, allowing the probe 10 to come into contact with the object to be inspected 2 at a predetermined pressure. For example, by offsetting the positions of the guide holes in the first layer 21 and the second layer 22 of the first substrate 20 through which the same probe 10 passes, the probe 10 can be curved in the space provided between the guide holes in the first layer 21 and the second layer 22.

[0041] Thus, the present invention naturally includes various embodiments not described above. Therefore, the technical scope of the present invention is defined solely by the inventive features of the claims that are appropriate from the above description. [Explanation of Symbols]

[0042] 1. Electrical connection device 2. Items to be inspected 10 probes 20 First board 21 1st layer 22 2nd layer 30 Second board 35 Probe Pads 38 Fixing resin 40 Fixing nuts 41 Groove forming part 42 Guard section 50 Fixing bolts 51 Part 1 52 Part 2 60 Printed circuit boards 70 Stifna 80 Wiring wires 200 recess 201 Page 1 202 2nd page 250 connecting pins 421 Insertion section 422 Convex part 601 First connecting screw 602 Second connecting screw 603 Third connecting screw

Claims

1. An electrical connection device used for inspecting objects, A first substrate having a first surface facing the object to be inspected and a second surface facing in the opposite direction to the first surface, A fixing nut positioned inside the first substrate, A second substrate laminated on the second surface, A fixing bolt is provided, in which a threaded portion is inserted into the first substrate from the second surface, passing through at least a portion of the second substrate, and the threaded portion engages with the fixing nut to fix the first substrate to the second substrate. An electrical connection device equipped with the following features.

2. The aforementioned fixing nut, A groove forming portion having a groove corresponding to the groove formed in the threaded portion of the fixing bolt, A flange portion connected to the groove forming portion and extending in a direction intersecting the extension direction of the fixing bolt, Includes, The electrical connection device according to claim 1, wherein the flange portion is fitted onto the first substrate and the fixing nut is fixed to the first substrate.

3. The aforementioned flange portion, An insertion portion extending parallel to the first surface and inserted into the first substrate, A convex portion is arranged on the surface of the insertion portion and protrudes in a direction intersecting the extension direction of the insertion portion, Equipped with, The electrical connection device according to claim 2, wherein a recess into which the convex portion is fitted is formed in the first substrate.

4. The first substrate is A first layer having the first surface, A second layer having the aforementioned second surface, Includes, The flange portion is inserted into the space formed between the first layer and the second layer. The recess is formed in at least one of the first layer and the second layer. The electrical connection device according to claim 3.

5. The electrical connection device according to claim 1, wherein the fixing nut and the fixing bolt do not protrude beyond the first surface toward the object to be inspected.

6. The electrical connection device according to claim 1, wherein the material of the first substrate is ceramic.

7. The probe further comprises contacting the object to be inspected, The first substrate is a probe head that holds the probe so as to extend from the first surface toward the object to be inspected. An electrical connection device according to any one of claims 1 to 6.

8. The second substrate is a wiring board having internal wiring that is electrically connected to the probe. The electrical connection device according to claim 7.

9. The above second substrate further comprises a printed circuit board stacked on top of it, The fixing bolt penetrates the second substrate and the printed circuit board continuously. The outer diameter of the second portion of the fixing bolt that penetrates the printed circuit board is larger than the outer diameter of the first portion of the fixing bolt that penetrates the second substrate. At the boundary between the first and second portions, the end face of the second portion that extends outward beyond the outer edge of the first portion is in contact with the second substrate. The electrical connection device according to claim 8.

10. The printed circuit board further comprises a rigid stiffener stacked on top of the printed circuit board, The portion of the second part of the fixing bolt that is exposed from the printed circuit board is housed in a hole formed in the stiffener. The electrical connection device according to claim 9.

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