Apparatus and method for handling optical devices
The holding device with suction and lateral forces addresses the challenge of handling delicate optical devices by providing secure and damage-free gripping and transport.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2026-01-14
- Publication Date
- 2026-05-19
AI Technical Summary
Optical devices, particularly those with thin and brittle structures, are vulnerable to damage during handling due to their delicate nature and difficulty in gripping without causing deformation or leaving traces.
A holding device with a base, suction pads, and movable arms equipped with actuators and holding pads that provide non-contact vertical suction and lateral forces to securely grip optical devices, allowing for precise handling and transport.
The device enables safe and precise handling of optical devices by applying adjustable forces to prevent damage, distortion, and ensure secure transport and alignment.
Smart Images
Figure 2026082849000001_ABST
Abstract
Description
Technical Field
[0001]
[0001] Embodiments of the present disclosure generally relate to optical devices. More specifically, the embodiments described herein relate to devices and methods for holding an optical device.
Background Art
[0002]
[0002] Virtual reality is generally considered to be a computer-generated simulated environment in which a user has an apparent physical presence. A virtual reality experience can be viewed using a head-mounted display (HMD), such as glasses or other wearable display devices having a near-eye display panel as a lens, to display a virtual reality environment generated in 3D that replaces the actual environment.
[0003]
[0003] Optical devices, including waveguide combiners such as extended reality waveguide combiners and planar optical devices such as metasurfaces, are used to assist in image overlay. The generated light is propagated through the optical device until the light exits the optical device and is overlaid on the surrounding environment.
[0004]
[0004] Optical devices generally include structures and components disposed on the optical device. The optical device and the structures are formed from thin and brittle materials that may be damaged when exposed to external stress or external contaminants. Further, some of the coatings applied on the structures are vulnerable to damage and may be damaged during manufacturing if not handled properly. Thus, optical devices are vulnerable to damage when it is difficult to transfer the optical device between different processing tools. Holding, for example gripping, an optical device is difficult due to not only the thin and delicate nature of the optical device but also its various shape dimensions. One of the above difficulties is to grip an optical device without damaging, deforming, distorting, leaving a trace on, and / or permanently residing on the optical device.
[0005]
[0005] Therefore, in the art there is a need for improved apparatus and methods for holding optical devices. [Overview of the project]
[0006]
[0006] In an embodiment, a device for holding an optical device is provided. The device includes a base connected to the proximal end of a stem extending from the bottom surface of the base. A suction pad is located at the distal end of the stem. The suction pad is operable to provide a non-contact vertical suction force to a substrate held by the device. The device also includes a plurality of arms movably connected to the bottom surface of the base. The plurality of arms are connected to actuators operable to move the plurality of arms laterally along an XY plane parallel to the bottom surface of the base. The plurality of arms also include a plurality of holding pads located on each of the plurality of arms.
[0007]
[0007] In another embodiment, a device for holding an optical device is provided. The device includes a gripper actuator connected to the proximal end of a stem, the stem extending from the bottom surface of the actuator, and a suction pad located at the distal end of the stem, which is operable to provide a non-contact vertical suction force to a substrate to be held. The device also includes first and second arms connected to the gripper actuator. The actuator is operable to move a plurality of arms laterally along an XY plane parallel to the bottom surface of the actuator. The plurality of arms also include a plurality of holding pads located on each of the plurality of arms.
[0008]
[0008] In yet another embodiment, a method for holding an optical device is provided. The method includes positioning a substrate to be held below a plurality of retaining pads arranged on first and second arms of a retaining device. The first and second arms of the retaining device are operably connected to actuators and are positioned on opposite sides of suction pads that are operable to provide a vertical retaining force to the substrate to be held. The method involves operating the first arm to move the retaining pads located on the first arm so that they are in contact with the edges of the substrate to be held, operating the second arm to move the retaining pads located on the second arm so that they are in contact with the substrate to be held and apply a lateral force, and operating the suction pads to provide a vertical retaining force to the substrate to be held.
[0009]
[0009] In order to provide a detailed understanding of the features of the present disclosure described above, the present disclosure summarized above will be described more specifically with reference to embodiments illustrated in part in the accompanying drawings. However, it should be noted that the accompanying drawings are merely illustrative embodiments and should not be considered to limit the scope of the present disclosure, and other equally valid embodiments are also permissible. [Brief explanation of the drawing]
[0010] [Figure 1A] This is a schematic cross-sectional view of a holding device according to a specific embodiment described herein. [Figure 1B] This is a schematic cross-sectional view of a portion of the holding device shown in Figure 1A, according to a specific embodiment described herein. [Figure 1C] This is a schematic cross-sectional view of a portion of the holding device shown in Figure 1A, according to a specific embodiment described herein. [Figure 2] A and B are schematic bottom views of a gripping device according to a specific embodiment described herein. [Figure 3] This is a schematic perspective view of a retaining pad according to a specific embodiment described herein. [Figure 4]This is a flowchart illustrating a method for holding an optical device using an embodiment of the holding device shown in Figure 1A, according to a specific embodiment described herein. [Figure 5] This is a flowchart illustrating a method for holding an optical device using an embodiment of the holding device shown in Figure 1A, according to a specific embodiment described herein. [Modes for carrying out the invention]
[0011]
[0017] For ease of understanding, the same reference numerals are used to indicate common and identical elements in the drawings whenever possible. Elements and features of one embodiment are considered to be usefully incorporated into other embodiments without further detail.
[0012]
[0018] Embodiments of this disclosure generally relate to optical devices. More specifically, embodiments described herein relate to devices and methods for holding optical devices. In one embodiment, the device includes a base connected to a stem extending from the bottom surface of the base. Suction pads positioned on the stem are operable to provide a non-contact vertical holding force to a substrate held by the device. Multiple arms extend from the base, and each of the multiple arms may be connected to an actuator operable to move each of the multiple arms laterally parallel to and along the bottom surface of the base. Multiple holding pads are also positioned on each of the multiple arms and directly contact the holding pads to provide a lateral force for holding the optical device.
[0013]
[0019] Figure 1A is a schematic cross-sectional view of a holding device 100 according to an embodiment described herein. In this embodiment, the holding device 100 is operable to hold a substrate 102. The holding device 100 is operable to transport and handle the substrate 102 before processing, after processing, and / or during processing.
[0014]
[0020] In one embodiment that can be combined with other embodiments described herein, the substrate 102 may be any substrate used in the art and may be opaque or transparent depending on the application of the substrate. Furthermore, the selection of the substrate 102 may further include substrates having various shapes, thicknesses, and diameters. In one embodiment that can be combined with other embodiments described herein, the substrate 102 may include, but is not limited to, glass, silicon carbide, or a combination thereof. In another embodiment that can be combined with other embodiments described herein, the substrate 102 may be an optical device such as a waveguide combiner, a planar optical device such as a metasurface, an optical lens, an optical lens assembly, an optical frame, a semiconductor wafer, etc. In yet another embodiment that can be combined with other embodiments described herein, the substrate 102 may have an optical device structure patterned on one or more surfaces of the substrate 102.
[0015]
[0021] In one embodiment, the holding device 100 is a two-axis linear holding device. The holding device 100 includes a base 104, a stem 106, a plurality of arms 108, a suction pad 110, an air port 112, and a holding pad 114. In certain embodiments that can be combined with other embodiments of this specification, the base 104 may be connected to or extend from a base device (not shown) that is operable to transport and handle substrates 102, such as a modular cart, an internal portion of a processing chamber, or a robotic arm assembly of a transfer robot extending over an external portion of a processing chamber. The base 104 may be movably connected to the base device so that the base 104 and the holding device 100 as a whole can move relative to the processing chamber to provide overall movement and positioning of the holding device 100 and any substrates 102 held therein.
[0016]
[0022] The proximal end of the stem 106 is connected to the bottom surface 118 of the base 104, and the suction pad 110 is positioned at the distal end of the stem 106 opposite the base 104. The suction pad 110 is configured to provide a non-contact suction force to "hold" the substrate 102 without physically contacting it. In one embodiment, the force of the suction pad 110 can be used instead of the retaining pad 114 to support the substrate 102 without contact. Alternatively, the suction pad 110 can be used in addition to the retaining pad 114 to allow a stronger holding force on the substrate 102 by the retaining device 100.
[0017]
[0023] In one embodiment, the suction pad 110 applies a non-contact vertical suction force to the substrate 102 such that the suction pad 110 is spaced about 0.3 mm to about 0.8 mm, for example, about 0.5 mm, from the upper surface of the substrate 102 held by the retaining pad 114. In one embodiment, which can be combined with other embodiments of this specification, the suction pad 110 may be a Bernoulli pad or a Coanda pad. For example, the suction pad 110 can generate a suction force on the substrate 102 by utilizing Bernoulli's principle or the Coanda effect. In an embodiment, the stem 106 may further include an air port 112 operably connected to the suction pad 110 and in fluid communication with an external air source or external vacuum source (not shown). The air port 112 can supply air to and / or remove air from the suction pad 110 using the external air source or external vacuum source to enable the generation of a vertical retaining suction force by the suction pad 110. In certain embodiments, the suction pad 110 may be any device capable of operating to apply a vertical holding force to the substrate 102 without contacting the substrate 102.
[0018]
[0024] In embodiments, as shown in Figures 1A and 2A, the plurality of arms 108 may include a first arm 108A and a second arm 108B. The first and second arms 108A and 108B may each be formed as rectangular members adjacent to the bottom surface 118 of the base 104 and positioned at opposing ends of the base 104. The first and second arms 108A and 108B may be positioned parallel to each other such that the stem 106 and the suction pad 110 are positioned in the intermediate portion between the first and second arms 108A and 108B. Each of the plurality of arms 108 includes a plurality of retaining pads 114. The retaining pads 114 are configured to contact the edges of the substrate 102 in order to hold the substrate 102. As shown in Figures 1B and 2A, the retaining device 100 has a retaining area defined by the plurality of retaining pads 114. In embodiments, the retaining area is sized to correspond to the surface area of the optical device held by the retaining device 100. In this embodiment, the force from the suction pad 110 is used to hold the substrate 102 vertically, i.e., in the Z direction, and the holding pad 114 prevents the substrate 102 from moving laterally and / or rotating, i.e., moving in the X direction and rotating along the XY plane.
[0019]
[0025] In one embodiment, which can include other embodiments described herein, the plurality of arms 108 may be connected to an actuator 119 for controlling the plurality of arms 108 to move relative to the base 104. In an embodiment, the arms 108A, 108B can operate to extend away from each other and / or retract toward each other to support and hold the substrate 102. In one embodiment, the plurality of arms 108 can be individually controlled in terms of force, position, or velocity. In another embodiment, the plurality of arms 108 can be controlled together. Each of the plurality of arms 108 can include an actuator 119 for laterally moving the plurality of arms 108 (and the plurality of holding pads 114 disposed on each of the plurality of arms 108) along an X-Y plane parallel to the bottom surface 118 of the base 104, or can be coupled to the actuator 119. In an embodiment that can be combined with other embodiments described herein, the actuator can be an electrically programmable gripper device such as a SMAC gripper coupled to or incorporated into the base 104. In another embodiment, the actuator can be a microactuator. Further, the actuator can be a voice coil actuator. A voice coil actuator is an unrectified DC linear actuator composed of a single-pole permanent magnet and a copper coil.
[0020]
[0026] As shown in FIGS. 1B and 1C, the first and second arms 108A, 108B can be moved relative to each other to change the distance "D", thereby changing the holding area of the holding device 100 defined by the space between the plurality of holding pads 114. The holding area can be increased and decreased as needed by increasing and decreasing the distance "D" between the first and second arms 108A, 108B, respectively. To hold the substrate 102, the positions of the holding pads can be adjusted based on the size, shape, and position of the substrate 102. In an embodiment that can be combined with other embodiments herein, the arms 108A, 108B can be independently controllable.
[0021]
[0027] FIG. 2A is a schematic bottom view of the holding device 100. The holding device 100 includes a base 104, a stem 106, a suction pad 110, first and second arms 108A, 108B, and a holding pad 114. In one embodiment that can be combined with other embodiments described herein, the first and second arms 108A, 108B are each connected to an actuator of the base 104 via a plurality of fasteners fixed through a plurality of through-holes 120. In another embodiment that can be combined with other embodiments described herein, each of the plurality of holding pads 114 is connected to the plurality of arms 108A, 108B via a plurality of openings 122. The plurality of openings 122 allow for various arrangements and numbers of the holding pads 114 disposed on each of the first and second arms 108A, 108B.
[0022]
[0028] In one embodiment that can be combined with other embodiments herein, the base 104 can be connected to or further include a theta actuator such that the plurality of arms 108 can rotate around the Z-axis, thereby enabling rotational translational movement of the plurality of arms 108 and the holding pads 114 disposed thereon along an X-Y plane parallel to the bottom surface 118 of the base 104. Such rotational movement can better align and accommodate the holding device 100 with substrates 102 of various sizes and orientations. In another embodiment, the holding pads 114 can be oriented and aligned in various ways when connected to each of the plurality of arms 108. For example, in one embodiment, the holding pad 114 of the first arm 108A can be laterally aligned with the holding pad 114 of the second arm 108B. In another embodiment, as shown in FIG. 1B, the holding pad 114 of the first arm 108A may be misaligned with the holding pad 114 of the second arm 108B.
[0023]
[0029] In one embodiment, which can be combined with other embodiments described herein, the holding device 100 includes a light source 124. In one embodiment, the light source 124 may be movable relative to the holding device 100 or fixed. In another embodiment, the light source may be located outside the holding device 100 or integrated with the holding device 100. The light source 124 can supply light for further processing of the substrate 102. For example, the light source 124 can supply light for a curing process, such as supplying ultraviolet light to the substrate 102. The light source 124 may be used to provide illumination to the surrounding environment of the holding device 100. In another embodiment, which can be combined with other embodiments described herein, the light source 124 is a ring light, i.e., the light source 124 is ring-shaped such that light is supplied evenly or substantially evenly to the substrate 102.
[0024]
[0030] In one embodiment, which can be combined with other embodiments described herein, the holding device 100 includes a visualization system 126. The visualization system 126 may be located outside the holding device 100 or may be integrated with the holding device 100. In an embodiment, as shown in Figure 2A, the holding device 100 includes a plurality of ports 128 located on a stem 106 to integrate the visualization system 126 with the holding device 100. The plurality of ports 128 are operable to house one or more devices, such as one or more cameras and / or sensors of the visualization system 126. In an embodiment, the visualization system 126 may also be communicatively connected to a controller 130. The controller 130 may be communicatively connected to the holding device 100 to facilitate the operation of the visualization system 126 and the handling and transfer of the substrate 102 by the holding device 100 in response to data collected about the substrate 102 from the visualization system 126. In another embodiment, which can be combined with other embodiments described herein, the controller 130 is communicatively connected to a central processing unit (CPU) 132. The controller 130 can perform the method 400 described below by downloading a program stored in a memory storage medium through an input / output (I / O) device (not shown) and controlling the visualization system 126 and the holding device 100 according to the program.
[0025]
[0031] One or more cameras housed in the multiple ports 128 may be operable to support not only the functions of the holding device 100 but also the measurement process. One or more sensors housed in the multiple ports 128 may be proximity sensors and may be operable to communicate with the controller 130. For example, a sensor can communicate with the controller 130 when the substrate 102 is held by the holding device 100. Figure 2A illustrates a visualization system 126 having four of the multiple ports 128, but one or more of the multiple ports 128 can be used. Any number of devices, such as one or more cameras and sensors, can be used with the holding device 100. Furthermore, the multiple ports 128 may be located along other parts of the holding device 100, such as the bottom surface 118 of the base 104, and are therefore not limited to being located on the multiple arms 108.
[0026]
[0032] Each of the multiple arms 108 can be operated in force mode and / or position mode. In position mode, each arm 108 is moved to a predetermined position relative to the substrate 102 such that the retaining pads on each arm 108 contact the edges of the substrate 102, providing an alignment surface for "gripping" the substrate 102 between the retaining pads 114 of the multiple arms 108. In force mode, another arm 108 is operated to contact the substrate 102, and a settable force is applied to the substrate 102 against the retaining pads 114 that provide the alignment surface to the substrate 102, thereby "gripping" the substrate 102 between the retaining pads 114. For example, in the embodiment shown in Figure 1B, the first arm 108A is operated in position mode to contact the substrate 102 and provide an alignment surface for holding the substrate 102, while the second arm 108B may be operated in force mode to apply a settable force to the substrate 102 and hold the substrate 102 between the multiple retaining pads 114 extending from the multiple arms 108A, 108B. When combined with the use of suction pads 110 to apply a non-contact vertical vacuum force toward the center of the substrate 102, the lateral force applied along the edges of the substrate 102 by the holding device 100 is highly controllable and can be used to grip the substrate 102 regardless of its shape and dimensions.
[0027]
[0033] The retaining force applied to the substrate 102 by the retaining device 100 between the retaining pads 114 may range from about 0.1 to about 3.8 N, or from about 10 grams to about 350 grams. The actual retaining force applied to the substrate 102 by the retaining device 100 may depend on the substrate 102 and whether the suction pads 110 are in use. This retaining force allows for delicate handling of optical devices such as lens assemblies and lens frames. In one embodiment, the suction pads 110 are not actuated to generate a vertical suction force to assist in "retaining" the substrate 102, such as when the retaining device 100 is used to hold a lens frame that does not have a surface to which vacuum suction is applied. In this embodiment, the substrate 102 is fully supported by the lateral force applied by the retaining pads 114.
[0028]
[0034] Figure 2B is a schematic bottom view of a holding device 200 according to a particular embodiment described herein. The holding device 200 includes a base plate 204, a stem 206, a suction pad 210, a plurality of arms 208, and a holding pad 214. In one embodiment, which can be combined with other embodiments herein, the base 204 may be connected to or extend from a base device (not shown) that is operable to transport and handle substrates 102, such as a modular cart, an internal portion of a processing chamber, or a robotic arm assembly of a transfer robot extending over an external portion of a processing chamber. The base 204 may be movably connected to the base device so that the base 204 and the holding device 200 as a whole can move relative to the processing chamber to provide overall movement and positioning of the holding device 200 and any substrates 102 held therein.
[0029]
[0035] In one embodiment, which can be combined with other embodiments of this specification, the suction pad 210 includes a plurality of openings 216. The plurality of openings 216 are connected to the inlet 212. Therefore, air can be supplied or removed through the plurality of openings 216 to generate a holding force on the substrate 102. For example, the holding force on the substrate can be generated by a vacuum force applied through the plurality of openings 216, such as by utilizing the Coanda effect.
[0030]
[0036] In certain embodiments, the retaining pad 114 can utilize corner contact or direct contact with the edge of the substrate 102. Therefore, delicate parts of the substrate 102, such as the optical device structure and the coating thereon, are not damaged during transport or handling.
[0031]
[0037] Figure 3 is a schematic perspective view of an exemplary retaining pad 114 according to a particular embodiment disclosed herein. The retaining pad 114 is used in a retaining device 100 and is operable to contact the edge of the substrate 102. Although only two retaining pads 114 are shown for each of the multiple arms 108 in Figures 2A and 2B, the substrate 102 can be held using any number of retaining pads 114. In one embodiment, which can be combined with other embodiments herein, each retaining pad 114 may further include a silicone sleeve.
[0032]
[0038] Figure 4 is a flowchart of an exemplary method 400 for holding a substrate 102 using the holding device 100 shown in Figure 1 according to a specific embodiment described herein. In the embodiment, method 400 provides picking up the substrate 102 using the holding device 100 and moving it to a target stage.
[0033]
[0039] Method 400 begins in step 402 by positioning the substrate 102 below the holding device 100 and within the field of view of the visualization system 126 for scanning and aligning the substrate 102 with the holding device 100. The visualization system 126, which is communicatively connected to the holding device 100, may be located outside the holding device 100 or integrated with the holding device 100. In embodiments where the visualization system 126 is located outside the holding device 100, the visualization system 126 may include one or more movable cameras and / or sensors that can be controlled and moved as needed to scan the substrate 102. In another embodiment, one or more cameras and / or sensors of the visualization system 126 are integrated with the holding device 100, so that positioning the substrate 102 below the holding device 100 in preparation for transport also means positioning the substrate 102 within the field of view of the visualization system 126 for scanning.
[0034]
[0040] Next, in step 404, the substrate 102 is scanned using one or more cameras and / or sensors of the visualization system 126 for the detection of one or more fiducials on the substrate 102 and / or for the detection of characteristics and related specifications of the substrate 102 such as the position, orientation, size, and edges of the substrate 102. In embodiments, the substrate 102 may be formed to have one or more fiducials to assist the holding device 100 in determining the orientation, position, and / or any other physical characteristics of the substrate 102 for alignment and holding by the holding device 100. In another embodiment that can be combined with other embodiments described herein, step 402 includes scanning the substrate 102 with one or more sensors of the visualization system 126 to determine the characteristics of the substrate 102 and whether the holding device 100 will engage the suction pad 110. For example, if the visualization system 126 determines that the substrate 102 is a frame assembly that does not have a surface for the suction pad 110 to apply suction force, the suction pad 110 may not be activated to hold the scanned substrate 102.
[0035]
[0041] In step 406, when the visualization system 126 scans the substrate 102, the controller 130 aligns the multiple arms 108A and 108B of the holding device 100 relative to the substrate 102 based on the scanning of the substrate, in preparation for contact with the multiple holding pads 114. In the embodiment, when aligning the holding device 100, the controller 130 may also use stored data related to the scanned substrate 102, if available. In the embodiment, stored data related to the scanned substrate 102, such as specifications related to the characteristics of the substrate 102, may be acquired by the CPU 132 and used based on one or more fiducials on the substrate 102 scanned by the visualization system 126.
[0036]
[0042] In order to begin holding or "gripping" the substrate 102, in step 408, the holding device 100 first operates the first arm 108A in position mode to move the first arm 108A to a predetermined position relative to the substrate 102, thereby providing the substrate 102 with an alignment surface for "gripping" the substrate 102. In the embodiment, the first arm 108 is therefore moved to a position such that a plurality of holding pads 114 on the first arm 108A are in contact with the substrate 102.
[0037]
[0043] Once the retaining pad 114 of the first arm 108A is positioned adjacent to the substrate 102, in step 410, the second arm 108B is operated in force mode to bring it into contact with the substrate 102, positioning the substrate 102 between the retaining pads 114 of the first and second arms 108A and 108B, and applying a settable force between the retaining pads 114.
[0038]
[0044] In step 412, the holding device 100 may optionally activate a suction pad 110, depending on the substrate 102, to apply a non-contact vacuum force toward the center of the substrate 102. If the suction pad 110 is activated to assist in the application of a vertical holding force, only a low lateral force may need to be applied by the holding pad 114 to prevent lateral movement and / or rotation of the substrate 102 during handling. In embodiments, the holding force used on the substrate 102 to avoid defects, damage, and distortion of the substrate 102 can also be varied by changing the force of the holding pad 114 and the pressure of the air supplied to the suction pad 110.
[0039]
[0045] In embodiments that can be combined with other embodiments of this specification, if the suction pad 110 is not used to hold the substrate 102, the substrate 102 is fully supported by a configurable lateral force applied to the edges of the substrate 102 between the holding pads 114. Since each of the multiple arms 108 can be operated independently in either position mode or force mode, the force applied to the edges of the substrate 102 can be finely adjusted and adjusted to "grip" the substrate 102 without distorting or damaging it.
[0040]
[0046] Once the substrate 102 is securely held between the retaining pads 114, in step 414, the actuator of the base device connected to the retaining device 100 can be operated to move the retaining device 100 and the substrate 102 held therein, thereby transferring the substrate 102 to the target stage. In embodiments that can be combined with other embodiments of this specification, step 414 may optionally include scanning the substrate 102 before transferring it to ensure that the substrate 102 is properly and securely held by the retaining device 100. Once the substrate 102 has been transferred to the target location, in step 416, the arm 108 of the retaining device is retracted to release the substrate 102 on the target stage.
[0041]
[0047] Figure 5 is a flowchart of an exemplary method 500 for holding a substrate 102 according to a particular embodiment described herein. In the embodiment, method 500 provides picking up the substrate 102 using a holding device 100 and moving it to a target stage.
[0042]
[0048] Method 500 begins in step 502 by positioning the substrate 102 in a position to be held by the lower retaining device 100. In step 504, the retaining device 100 begins by first operating the first arm 108A in position mode to move the first arm 108A to a predetermined position relative to the substrate 102, providing the substrate 102 with an alignment surface for "gripping" the substrate 102. In the embodiment, the first arm 108 is thus moved to a position such that a plurality of retaining pads 114 on the first arm 108A are in contact with the substrate 102.
[0043]
[0049] Once the retaining pad 114 of the first arm 108A is positioned adjacent to the substrate 102, in step 506, the second arm 108B is operated in force mode to bring it into contact with the substrate 102, positioning the substrate 102 between the retaining pads 114 of the first and second arms 108A and 108B, and applying a settable force between the retaining pads 114.
[0044]
[0050] In step 508, the holding device 100 may optionally activate a suction pad 110, depending on the substrate 102, to apply a non-contact vacuum force toward the center of the substrate 102. If the suction pad 110 is activated to assist in the application of a vertical holding force, only a low lateral force may need to be applied by the holding pad 114 to prevent lateral movement and / or rotation of the substrate 102 during handling. In embodiments, the holding force used on the substrate 102 to avoid defects, damage, and distortion of the substrate 102 can also be varied by changing the force of the holding pad 114 and the pressure of the air supplied to the suction pad 110.
[0045]
[0051] In embodiments that can be combined with other embodiments of this specification, if the suction pad 110 is not used to hold the substrate 102, the substrate 102 can be fully supported by a configurable lateral force applied to the edges of the substrate 102 between the holding pads 114. Since each of the multiple arms 108 can be operated independently in either position mode or force mode, the force applied to the edges of the substrate 102 can be finely adjusted and adjusted to "grip" the substrate 102 without distorting or damaging it.
[0046]
[0052] Once the substrate 102 is securely held between the holding pads 114, in step 510, the actuator of the base device connected to the holding device 100 is operated to move the holding device 100 and the substrate 102 held within it, thereby transferring the substrate 102 to the target stage. After the substrate 102 has been transferred to the target area, in step 512, the arm 108 of the holding device is retracted, releasing the substrate 102 on the target stage.
[0047]
[0053] In summary, devices and methods for gripping substrates are illustrated and described herein. While the foregoing applies to embodiments of this disclosure, other further embodiments of this disclosure can be devised without departing from the basic scope determined by the following claims.
Claims
1. A device for holding an optical device, A base connected to the proximal end of the stem, the stem extending from the bottom surface of the base, A suction pad positioned at the distal end of the stem, the suction pad being operable to apply a vertical suction force to the substrate being held, A plurality of arms movably connected to the bottom surface of the base, the plurality of arms connected to an actuator capable of moving the plurality of arms laterally along an X-Y plane parallel to the bottom surface of the base, Multiple retaining pads arranged on each of the multiple arms and A device equipped with the following features.
2. The apparatus according to claim 1, further comprising an air port, the air port being in fluid communication with an air source and the suction pad.
3. The apparatus according to claim 1, further comprising a visualization system, wherein the visualization system includes one or more cameras and / or one or more sensors that are communicably connected to a controller.
4. The apparatus according to claim 1, further comprising a light source configured to supply light to the substrate being held.
5. The apparatus according to claim 1, wherein the movement of the plurality of arms along the bottom surface of the base allows the plurality of retaining pads to apply a settable lateral force to the edge of the substrate being held.
6. The apparatus according to claim 1, wherein the suction pad is operable to apply a non-contact vertical suction force to the substrate to be held, and the suction pad is spaced apart from the substrate to be held by a gap ranging from about 0.3 mm to about 0.8 mm.
7. The apparatus according to claim 1, wherein the actuator is configured to allow the plurality of retaining pads to apply a lateral force to the edge of the substrate being held, the lateral force being in the range of about 0.1 to about 3.8 N, or about 10 grams to about 350 grams.
8. The apparatus according to claim 1, wherein the actuator includes an electrically programmable gripper device.
9. A device for holding an optical device, A gripper actuator connected to the proximal end of a stem, wherein the stem extends from the bottom surface of the gripper actuator, and A suction pad positioned at the distal end of the stem, the suction pad being operable to apply a vertical suction force to the substrate being held, First and second arms connected to the gripper actuator, wherein the gripper actuator is operable to move the first and second arms laterally along an X-Y plane parallel to the bottom surface of the gripper actuator, A plurality of retaining pads arranged on each of the first and second arms and A device equipped with the following features.
10. The apparatus according to claim 9, further comprising an air port, the air port being in fluid communication with an air source and the suction pad.
11. The apparatus according to claim 9, further comprising a visualization system, the visualization system including one or more cameras and / or one or more sensors communicably connected to a controller.
12. The apparatus according to claim 9, further comprising a light source configured to supply light to the substrate being held.
13. The apparatus according to claim 9, wherein the movement of the first and second arms along the bottom surface of the gripper actuator allows the plurality of holding pads to apply a settable lateral force to the edge of the substrate being held.
14. The apparatus according to claim 9, wherein the suction pad is spaced apart from the upper surface of the substrate to be held by a gap ranging from approximately 0.3 mm to approximately 0.8 mm.
15. The apparatus according to claim 9, wherein the gripper actuator is configured such that the plurality of retaining pads can apply a lateral force to the edge of the substrate being held, the lateral force being in the range of about 0.1 to about 3.8 N, or about 10 grams to about 350 grams.
16. A method for holding an optical device, Positioning a substrate held below a plurality of retaining pads arranged on the first and second arms of a holding device, wherein the first and second arms are operably connected to actuators and are positioned on the opposite side of suction pads, and the suction pads are operable to apply a vertical holding force to the substrate being held, and The first arm is operated to move the holding pad positioned on the first arm so that it makes contact with the edge of the substrate to be held, The second arm is operated in such a way that the holding pad positioned on the second arm is moved and brought into contact with the substrate being held, thereby applying a lateral force. The suction pad is operated to apply a vertical holding force to the substrate being held. A method that includes this.
17. The method according to claim 16, further comprising scanning the substrate to be held with a visualization system connected to the holding device, wherein the visualization system includes one or more cameras and / or one or more sensors communicably connected to a controller.
18. The method according to claim 17, wherein scanning the held substrate enables the detection of one or more fiducials on the held substrate and / or determination of the size, orientation, position and / or any other physical properties of the held substrate.
19. The method according to claim 16, wherein the suction pads are operated to apply a vertical holding force to the substrate to be held, thereby making it possible to change the lateral force that is inevitably applied by the plurality of holding pads to hold the substrate to be held.
20. The method according to claim 16, wherein the second arm is operated to apply a lateral force to the held substrate, thereby preventing lateral movement and / or rotation of the held substrate.