Processing equipment, blades, methods for manufacturing articles

Abstract

A technology was needed that could supply a sufficient amount of liquid to the area where the blade was processing the workpiece. [Solution] The processing apparatus comprises a blade, a rotating mechanism rotatable around a rotation axis, and a holding member. The blade is mounted on the rotating mechanism by the holding member, which clamps a portion of the blade. The blade has a plurality of recesses, each smaller in depth than the blade's thickness, and each of the recesses extends from the rotation axis side to the outer circumference, spanning the portion clamped by the holding member. Liquid is supplied from the outside to a space that is at least partially surrounded by the holding member, on the rotation axis side of the position where the portion of the blade is clamped. The liquid supplied to the space is injected into each of the plurality of recesses on the rotation axis side of the portion of the blade.

Description

Technical Field

[0006] , , , , , , , , ,

[0005] , ,

[0001] The present invention relates to a processing apparatus for processing, for example, a resin substrate, a glass substrate, a Si wafer, and the like.

Background Art

[0002] For example, there is known a processing apparatus that performs processing such as cutting, dicing, and groove formation by bringing a blade, which is a cutting tool, into contact with a workpiece such as a resin substrate, a glass substrate, or a Si wafer while rotating the blade. By moving one or both of the blade and the workpiece while rotating the blade to move (scan) the processing position, the workpiece can be cut into a desired shape or a groove having a desired shape can be formed in the workpiece.

[0003] Patent Document 1 describes that, in order to prevent burrs from occurring on a metal material that is a workpiece, a recess that does not penetrate the abrasive grain layer is provided on the outer peripheral side of the abrasive grain layer of the blade so as to be inclined with respect to the radial direction.

[0004] Patent Document 2 describes supplying cutting water to the cutting portion for cooling to prevent chipping and the generation of burrs. In Patent Document 2, a slit that penetrates the front and back of a cutting grindstone is provided in a cutting blade, and cutting water is supplied to the cutting portion through the slit.

Prior Art Documents

Patent Documents

[0005] <000​​​​​​​​​​​​​​​​It is desirable to shorten processing time while suppressing chipping, burr formation, and blade wear and breakage. To achieve this, it is effective to supply a sufficient amount of fluid to the part of the workpiece that the blade is cutting.

[0007] However, while Patent Document 1 describes the shape of the abrasive layer for suppressing burr formation, it does not describe a device that can supply liquid to the part of the workpiece that the blade is cutting.

[0008] The apparatus described in Patent Document 2 supplies cutting fluid to the cutting area through a slit that penetrates both sides of the cutting wheel. However, in this configuration, when the blade is rotated at high speed, an airflow is generated around the blade that is carried along with it. Most of the cutting fluid that is intended to be injected into the slit from the liquid supply passage via the blade surface is blown away by the airflow on the blade surface before it can be injected into the slit. As a result, it is not possible to inject a sufficient amount of cutting fluid into the slit, and only a small amount of cutting fluid reaches the cutting area from the slit.

[0009] Therefore, there was a need for a technology that could supply a sufficient amount of liquid to the area where the blade was processing the workpiece. [Means for solving the problem]

[0010] One aspect of the present invention is a processing apparatus comprising a blade for cutting a workpiece, a rotating mechanism rotatable about a rotating axis, and a holding member, wherein the blade is mounted on the rotating mechanism by the holding member gripping a portion of the blade, the blade is provided with a plurality of recesses whose depth is less than the thickness of the blade, each of the plurality of recesses extending from the rotating axis side to the outer circumference side, straddling the portion gripped by the holding member, and a liquid is supplied from the outside to a space at least partially surrounded by the holding member, on the rotating axis side of the position where the portion of the blade is gripped, the liquid supplied to the space is injected into each of the plurality of recesses on the rotating axis side of the portion of the blade, and supplied to the outer circumference side of the blade via the plurality of recesses. [Effects of the Invention]

[0011] According to the present invention, it is possible to provide a technology that can supply a sufficient amount of liquid to the location where the blade is processing the workpiece. [Brief explanation of the drawing]

[0012] [Figure 1] A schematic perspective view showing the overall configuration of the processing apparatus according to the embodiment. [Figure 2] A schematic perspective view showing a rotating blade cutting a workpiece along the X-direction. [Figure 3] A schematic exploded view showing the assembly mechanism for mounting a plate-shaped blade to a device, broken down into its components. [Figure 4] A schematic cross-sectional view showing the blade and its surrounding area cut along the rotation axis C of blade 1. [Figure 5] (a) A plan view of the blade as seen from the direction of the rotation axis C. (b) A partial cross-sectional view of the blade cut along A-A' in Figure 5(a). [Figure 6] A magnified section cross-sectional view of the area near where the blade is machining the workpiece. [Figure 7]Partial cross-sectional view showing an enlarged view of the vicinity of the location where the blade is machining the workpiece. [Figure 8] Partial cross-sectional view showing an enlarged view of the vicinity of the location where the workpiece is being machined using the blade according to Modification 1. [Figure 9] In Modification 2, a diagram showing an example in which the shape of the blade is configured to satisfy the relationship R1 < R2 and R5 = R6. [Figure 10] In Modification 2, a diagram showing an example in which the shape of the blade is configured to satisfy the relationship R1 = R2 and R5 < R6. [Figure 11] In Modification 2, a diagram showing an example in which the shape of the blade is configured to satisfy the relationship R1 = R2 and R5 = R6. [Figure 12] (a) Plan view of the blade according to Modification 3 as viewed from the direction of the rotation axis C. (b) Partial cross-sectional view of the blade cut along B - B' in Fig. 12(a). [Figure 13] Plan view of the blade according to Modification 4 as viewed from the direction of the rotation axis C.

Embodiments for Carrying Out the Invention

[0013] Referring to the drawings, a processing apparatus and the like according to an embodiment of the present invention will be described. Note that the embodiments shown below are examples, and for example, those skilled in the art can appropriately change and implement the details of the configuration without departing from the spirit of the present invention.

[0014] In the drawings referred to in the following description of the embodiments, unless otherwise specified, elements denoted by the same reference numerals have the same functions. In the drawings, when a plurality of the same elements are arranged, the assignment of reference numerals and their descriptions may be omitted.

[0015] In addition, for the sake of convenience in illustration and description, the drawings may be presented schematically. Therefore, the shapes, sizes, arrangements, etc. of the elements shown in the drawings may not necessarily exactly match the actual objects. Also, the descriptions such as "XX or more and YY or less" and "XX to YY" representing numerical ranges, unless otherwise specified, mean numerical ranges including the endpoints XX (lower limit) and YY (upper limit). When numerical ranges are described step by step, the upper and lower limits of each numerical range can be arbitrarily combined.

[0016] In the following description, for example, when referring to the X plus direction, it refers to the same direction as the direction pointed by the X-axis arrow in the illustrated orthogonal coordinate system, and when referring to the X minus direction, it refers to the direction opposite by 180 degrees to the direction pointed by the X-axis arrow in the illustrated orthogonal coordinate system. Also, when simply referring to the X direction, regardless of the difference from the direction pointed by the X-axis arrow in the illustration, it refers to a direction parallel to the X axis. The same applies to directions other than X. Also, unless otherwise specified, in the XYZ coordinate system which is an orthogonal coordinate system, the XY plane is a horizontal plane, and the minus direction of the Z axis is the vertical direction (gravity direction).

[0017] [Embodiment] (Overall Configuration) FIG. 1 is a schematic perspective view showing the overall configuration of a processing apparatus (cutting apparatus) according to an embodiment. The processing apparatus includes a blade 1 for cutting or machining a workpiece 17 set on a chuck table 10, and the blade 1 is rotationally driven about a spindle 15. The spindle 15 is a rotating mechanism that can rotate about a rotation axis, and is supported by, for example, an air bearing or a hydrostatic bearing, and is driven by a direct drive motor or the like. The chuck table 10 is a rotating axis with an indexing function, and includes a holding mechanism (for example, a suction mechanism) for holding the workpiece 17.

[0018] By changing the relative position of the chuck table 10 holding the workpiece 17 and the blade 1 in the three directions of X, Y, and Z, it is possible to perform cutting or machining of any shape on the workpiece. To change the relative position, for example, the position of the blade 1 may be fixed and the chuck table 10 may be movable in the three directions of X, Y, and Z, or conversely, the position of the chuck table 10 may be fixed and the blade 1 may be movable in the three directions of X, Y, and Z. Alternatively, the chuck table 10 may be movable in at least one direction of X, Y, and Z, and the blade 1 may be movable in the remaining directions.

[0019] In the illustrated machining apparatus, the chuck table 10 is movable in the X direction, and the blade 1 is movable in the Y and Z directions. Specifically, the X-axis stage 8 and the Y-axis stage 11 are arranged orthogonally on the base 28. The X-axis stage 8 supports the X-axis table 9, which is movable in the X direction, and the chuck table 10 is mounted on the X-axis table 9. The Y-axis stage 11 supports the Y-axis table 12, which is movable in the Y direction, and the Z-axis stage 13 is positioned on the Y-axis table 12. The Z-axis table 14, which is movable in the Z direction, is positioned on the Z-axis stage 13. The spindle 15 that rotates the blade 1 is positioned on the Z-axis table 14. The X-axis table 9, Y-axis table 12, and Z-axis table 14 are guided on the stage by air bearings or linear guides and driven by linear motors or ball screws.

[0020] In this embodiment, in order to obtain effects such as reducing friction between the blade and the workpiece and cooling the blade and the workpiece, a liquid is supplied from the blade side to the cutting location of the workpiece. For convenience, this liquid will be referred to as the cutting fluid in the following description. For example, water is used as the cutting fluid, but other liquids such as flame-retardant oil may also be used.

[0021] The processing fluid supply mechanism will be described later, but as shown in Figure 1, a fluid supply nozzle 7 for supplying processing fluid to the blade 1 is located at the tip of the spindle 15. In addition, a blade cover 16 is located around the blade 1 to prevent processing fluid from splashing out. The blade cover 16 not only prevents the scattering of processing fluid, but can also function as a safety cover to prevent contact with the operator and in case the blade is damaged.

[0022] (Mechanism for supplying processing fluid) Figure 2 is a schematic perspective view illustrating a situation in which a rotating blade 1 is cutting a workpiece 17 along the X direction. Figure 3 is a schematic exploded view showing the assembly mechanism for assembling the plate-shaped blade 1 into the processing device, with the assembly mechanism broken down into its components. Figure 4 is a schematic cross-sectional view showing a cross-section of the blade 1 and its surrounding area as assembled into the processing device, cut parallel to the ZY plane along the rotation axis C of the blade 1.

[0023] A first holder fixing jig 4, a component of the assembly mechanism, is installed at the tip of the rotor portion of the spindle 15 (Figure 1). As shown in Figure 3, the first holder fixing jig 4 has a protruding portion 30, and the inner surface of the first holder 2 is guided by this protruding portion 30, so that the spindle-side end face of the first holder 2 abuts against the first holder fixing jig 4. By tightening the first holder fixing screw 5, the first holder 2 is fixed to the first holder fixing jig 4.

[0024] The first holder 2 is equipped with a blade guide projection 31, and the inner surface of the donut-shaped (ring-shaped) blade 1 is guided by this blade guide projection 31, thereby attaching the blade 1 to the first holder 2.

[0025] The first holder 2 is further equipped with a protruding part 32 for guiding the second holder, and the inner surface of the second holder 3 is guided by this protruding part 32, so that the second holder 3 is assembled to the first holder 2.

[0026] The outer surface of the tip end of the second holder guide projection 32 is provided with a male thread, and the inner surface of the second holder fixing member 6 is provided with a female thread that can be screwed into this male thread. By screwing the male thread of the second holder guide projection 32 and the female thread of the second holder fixing member 6 together and tightening them, the second holder 3 and the first holder 2 are securely fastened together, holding the blade 1. In Figure 4, the part of the first holder 2 that comes into contact with the blade 1 is shown as the contact part 33, and the part of the second holder 3 that comes into contact with the blade 1 is shown as the contact part 34.

[0027] In the second holder fixing member 6, an opening is provided that penetrates both the front and back surfaces of the second holder fixing member 6 at the position through which the rotation axis C (Figure 4) of the blade 1 passes. An external liquid supply unit, the liquid supply nozzle 7, is connected to this opening. Liquid is supplied to the liquid supply nozzle 7 from a liquid tank (not shown).

[0028] In Figure 4, the flow F of the processing fluid supplied from the liquid supply nozzle 7 is schematically shown by arrows. The processing fluid is injected from the liquid supply nozzle 7 into the assembly mechanism through the opening of the second holder fixing member 6. That is, the processing fluid is injected into the flow path defined by the second holder fixing member 6, the first holder fixing screw 5, the first holder 2, and the second holder 3. In other words, liquid is supplied from the liquid supply nozzle 7 into a space that is at least partially surrounded by the first holder 2 (first holding member) and the second holder 3 (second holding member). In this embodiment, an example is described using a holding member that is divided into two members to hold the blade 1, but it may be configured as a single member or as two or more members as long as the blade 1 can be held between them.

[0029] During machining, the assembly mechanism rotates, causing centrifugal force to act on the machining fluid, which flows away from the rotation axis C in space, i.e., towards the blade 1. As will be described later, the blade 1 has recesses that serve as flow channels for the machining fluid, and the machining fluid is supplied via these recesses to the location (position) where the blade 1 is machining the workpiece 17.

[0030] Now, let's describe blade 1. Figure 5(a) is a plan view of blade 1 from the direction of the rotation axis C. Figure 5(b) is a partial cross-sectional view of blade 1 cut along line A-A' in Figure 5(a).

[0031] In the following, when describing each component, the side closer to the axis of rotation C (axis of rotation side) may be referred to as the inner or central side, and the side further from the axis of rotation C may be referred to as the outer or outer circumference side. Also, the direction of the axis of rotation C may be referred to as the axial direction, and the radial direction of the circle centered on the axis of rotation C may be referred to as the radial direction. Furthermore, the radial distance from the axis of rotation C to each part may be referred to as the radial distance.

[0032] First, the planar shape of the plate-shaped blade 1 is a donut shape (ring shape), as shown in Figure 5(a), with the inner side following a circle with a radial distance of R1 and the outer side following a circle with a radial distance of R6. The blade 1 is made of a material such as resin or Ni formed by electroforming, and for example, the plate thickness can be 0.1 mm and the outer radius R6 = 30 mm.

[0033] Multiple recesses 29 are provided on both the front and back surfaces of the blade 1. In Figure 5(a), the recesses 29 on the front surface are shown by solid lines, and the recesses 29 on the back surface are shown by dotted lines.

[0034] Each recess 29 is a groove with a depth less than the thickness of the blade 1, extending linearly along the radial direction. Multiple recesses 29 are arranged radially at equal angular intervals around the axis of rotation C. In the illustrated example, eight groove-like recesses 29 are arranged on both the front and back sides, and when viewed through along the axial direction, the recesses 29 on the front side and the recesses 29 on the back side are arranged alternately at an angular interval of 22.5 degrees.

[0035] As shown in Figure 5(b), the width of the recess 29 (width in the direction perpendicular to the radial direction) is GW, and the depth of the recess 29 is GD. For example, it is preferable to set GW to within the range of 0.5 mm to 1.0 mm and GD to within the range of 5 μm to 50 μm.

[0036] The number and position of the recesses 29, and the GD and GW of each recess 29 can be appropriately set in view of ensuring the amount of the machining fluid supplied to the machining part, ensuring the conductance when the machining fluid flows in the recess 29, the machining accuracy when forming the recess 29, ensuring the mechanical strength of the blade 1, and the like.

[0037] FIGS. 6 and 7 are enlarged partial cross-sectional views of a portion surrounded by a dotted circle in FIG. 4, that is, a vicinity of a location where the blade 1 is machining the workpiece 17. FIG. 6 shows a timing when the recess 29 disposed on the front surface side of the blade 1 is located at the location where the workpiece 17 is being machined. Further, FIG. 7 shows a timing when the recess 29 disposed on the back surface side of the blade 1 is located at the location where the workpiece 17 is being machined.

[0038] As shown in FIG. 4, the machining fluid flows toward the blade 1 through a flow path defined by the second holder fixing member 6, the first holder fixing screw 5, the first holder 2, and the second holder 3.

[0039] Here, as shown in FIGS. 4, 6, and 7, the recess 29 of the blade 1 is a groove formed along the radial direction in a range where the radial distance reaches from R2 to R5. The blade 1 is sandwiched in a range where the radial distance reaches from R3 to R4 by the contact portion 33 of the first holder 2 and the contact portion 34 of the second holder 3, and is configured such that R2 < R3 and R4 < R5. That is, each of the plurality of recesses 29 extends from the rotation axis C side to the outer peripheral side across a part sandwiched by the first holder 2 (the first holding member) and the second holder 3 (the second holding member). For this reason, as shown in FIGS. 6 and 7, a flow F of the machining fluid is formed from a space surrounded by the first holder 2, the second holder 3, etc. to the location where the workpiece 17 is being machined via the recess 29. For example, R3 - R2 = 1.0 mm can be set.

[0040] <0OO0173>During machining, airflow can be generated in the AFS space near the blade 1, accompanying the rotating blade 1. However, in this embodiment, the injection of machining fluid into the recess 29 is performed at a position with a radial distance from R2 to R3, i.e., within the space enclosed by the first holder 2 and the second holder 3, and is therefore not affected by airflow. As a result, the machining fluid can be injected into the recess 29 very efficiently. Furthermore, since the injected machining fluid flows within the recess 29 rather than along the main surface of the blade 1, it is less affected by airflow even at positions facing the AFS space, and less is blown away. As a result, a sufficient amount of machining fluid can be supplied to the location (position) where the blade 1 is machining the workpiece 17.

[0041] In the illustrated example, the recess 29 formed with a radial distance from R2 to R5 extends over a wider area than the thickness of the workpiece 17, so that the cutting fluid can be supplied to the entire thickness of the workpiece during cutting. Furthermore, since the radial tip edge of the recess 29 is located below the lower surface of the workpiece 17, the edge does not collide with the workpiece 17, thus preventing chipping of the workpiece 17 due to impact and preventing wear of the tip of the recess 29. For example, it is preferable to set R5 to be 100 μm larger than the radial distance of the lower surface of the workpiece 17, and R6 to be 150 μm or more larger than the radial distance of the lower surface of the workpiece 17.

[0042] As described above, according to this embodiment, it is possible to supply a sufficient amount of liquid to the location (position) where the blade is processing the workpiece, thereby reducing processing time while suppressing blade wear and damage.

[0043] Furthermore, the embodiments of the present invention are not limited to the examples described above. Modifications of the embodiments are described below. Note that matters common to the embodiments described above will be simplified or omitted.

[0044] [Example 1] In the above-described embodiment, as illustrated in FIG. 5(a), the concave portions 29 are arranged on the front and back surfaces of the blade 1 so as not to overlap in a plan view. However, the implementation of the present invention is not limited to this, and the concave portions 29 may be arranged on both sides of the front and back surfaces of the blade 1 so as to overlap in a plan view.

[0045] FIG. 8 is an enlarged partial cross-sectional view of the vicinity of a location where the workpiece 17 is being machined using the blade 1 configured as described above. If a blade having such a configuration is used within the range where mechanical strength is acceptable, liquid can be supplied to the machining location from both sides of the front and back surfaces, so there is a possibility of further increasing the rotational speed and scanning speed to shorten the machining time.

[0046] [Modification Example 2] In the above-described embodiment, as shown in FIG. 5(a), when the radial distance of the inner side surface of the donut shape of the blade 1 is R1, the radial distance of the outer side surface is R6, and the concave portion 29 extends along the radial direction from the radial distance of R2 to R5, R1 < R2 and R5 < R6. However, the implementation of the present invention is not limited to this, and the concave portion 29 may be configured to satisfy R1 = R2 and / or R5 = R6.

[0047] By setting R1 = R2, there is a possibility that the machining liquid can be efficiently injected into the concave portion 29 within the space surrounded by the first holder 2, the second holder 3, etc. By setting R5 = R6, there is a possibility that the machining liquid injected into the concave portion 29 can be efficiently distributed near the location where the blade is machining the workpiece. Also, since there is no edge at the end of the concave portion 29, the edge does not collide with the workpiece 17, so it is possible to prevent chipping from occurring on the workpiece 17 due to the impact of the collision or the tip of the concave portion 29 from being easily worn out.

[0048] Figures 9 to 11 are plan views of the blade 1 according to such a modification, as viewed from the direction of the rotation axis C. Figure 9 is an example in which the shape of the blade 1 is configured to satisfy the relationship of R1 < R2 and R5 = R6. Figure 10 is an example in which the shape of the blade 1 is configured to satisfy the relationship of R1 = R2 and R5 < R6. Figure 11 is an example in which the relationship of R1 = R2 and R5 = R6 is satisfied, and the concave portion 29 extends from the inner circumference to the outer circumference of the annular blade 1.

[0049] [Modification 3] In the above-described embodiment, as illustrated in FIGS. 5(a) and 5(b), the width GW of the concave portion 29 in the direction orthogonal to the radial direction was constant along the radial direction. Further, as shown in FIGS. 5(b) and 6, the depth GD of the concave portion 29 was constant along the radial direction. However, the implementation of the present invention is not limited thereto.

[0050] FIG. 12(a) is a plan view of the blade 1 according to Modification 3, as viewed from the direction of the rotation axis C. Further, FIG. 12(b) is a partial cross-sectional view of the blade 1 cut along B-B' in FIG. 12(a).

[0051] As shown in FIG. 12(a), in the blade 1 according to Modification 3, the concave portion 29 expands in width in the direction orthogonal to the radial direction as it goes outward along the radial direction. Further, as shown in FIG. 12(b), the depth of the concave portion 29 increases toward the inner side in the radial direction.

[0052] By increasing the depth of the concave portion 29 toward the inner side in the radial direction, there is a possibility that the machining fluid can be efficiently injected into the concave portion 29 within the space surrounded by the first holder 2, the second holder 3, etc. Further, by expanding the width of the concave portion 29 as it goes outward in the radial direction, there is a possibility that the machining fluid can be supplied more uniformly along the outer circumference of the blade 1.

[0053] [Modification 4] In the embodiment described above, as illustrated in Figure 5(b), each of the plurality of recesses 29 was configured to be a groove extending linearly along the radial direction, with the extension of the recess 29 intersecting the axis of rotation C. However, the embodiment of the present invention is not limited to this.

[0054] Figure 13 is a plan view of the blade 1 according to Modification 4, viewed from the direction of the rotation axis C. In Modification 4, each of the multiple recesses 29 is formed as a groove extending along a straight line with an inclination angle θ (0° < θ < 90°) with respect to the radial direction. In the example shown in Figure 13, each of the recesses 29 is a straight groove, but they may also be curved grooves in which θ changes depending on the location within the range of 0° < θ < 90°.

[0055] As explained with reference to Figure 6, in the range where the radial distance is greater than R4, there is a space AFS where airflow can be generated that follows the rotating blade 1. In order to prevent this airflow from disturbing the flow of the machining fluid towards the outer circumference of the blade 1 within the recess 29, the recess 29 is configured so that the outer radial portion (the portion further from the rotation axis C) is located on the opposite side of the rotation direction RD. In this way, at least some of the recesses among the multiple recesses 29 can be configured so that the extension of the recess does not intersect the rotation axis C.

[0056] [Other embodiments] It should be noted that the present invention is not limited to the embodiments and modifications described above, and many modifications are possible within the technical concept of the present invention. For example, all or part of the embodiments and modifications described above may be combined and implemented.

[0057] As an example of a blade, a plate-shaped member whose shape when viewed in plan along the axis of rotation is donut-shaped (ring-shaped) was given. However, any blade that has recesses (grooves) that are lower than the main surface to serve as flow channels for the processing fluid to flow to the outer circumference may be, for example, a disc.

[0058] The blade is a plate-shaped member having two main surfaces, but the multiple recesses only need to be provided on at least one of the two main surfaces.

[0059] Different shaped recesses as described in the embodiments or modifications may be arbitrarily combined and provided on a single blade.

[0060] A blade itself, which has multiple recesses and can be attached to the processing apparatus described as an embodiment, is also included in the embodiments of the present invention.

[0061] A method for manufacturing an article by processing a workpiece using the processing apparatus described as an embodiment is also included in the embodiments of the present invention.

[0062] This specification discloses at least the following: [Matter 1] A blade for cutting the workpiece, A rotating mechanism that can rotate around a rotation axis, A retaining member and Equipped with, The blade is mounted to the rotating mechanism by the holding member, which holds a portion of the blade. The blade is provided with a plurality of recesses, each recessed to be less deep than the blade's thickness. Each of the plurality of recesses extends from the rotation axis side to the outer circumference side, spanning the portion held by the holding member. From the outside, liquid is supplied to a space where at least a portion of the blade is surrounded by the holding member, on the side of the rotation axis closer to the position where the portion of the blade is clamped. The liquid supplied to the space is injected into each of the plurality of recesses on the rotation axis side of the blade, and supplied to the outer circumference of the blade through the plurality of recesses. A processing apparatus characterized by the following features. [Matter 2] The blade is a plate-shaped member having two main surfaces that intersect with the axis of rotation. The plurality of recesses are provided on at least one of the two main surfaces. The processing apparatus described in item 1, characterized by the following: [Matter 3] The plurality of recesses are provided on both of the two main surfaces. The processing apparatus described in item 2, characterized by the features described above. [Matter 4] When the blade is viewed through along the axis of rotation, at least some of the plurality of recesses provided on each of the two main surfaces overlap each other. The processing apparatus described in item 3, characterized by the features described herein. [Matter 5] When the blade is viewed through along the axis of rotation, the plurality of recesses provided on each of the two main surfaces do not overlap each other. The processing apparatus described in item 3, characterized by the features described herein. [Matter 6] When the blade is viewed in plan along the axis of rotation, each of the plurality of recesses is arranged radially with respect to the axis of rotation. A processing apparatus according to any one of items 1 to 5, characterized by the features described herein. [Matter 7] The blade, when viewed in plan along the axis of rotation, has an annular shape. A processing apparatus according to any one of items 1 to 6, characterized by the features described herein. [Matter 8] The plurality of recesses include recesses that extend from the inner circumference to the outer circumference of the annular shape. The processing apparatus described in item 7, characterized by the features described herein. [Matter 9] The end of the recess on the axis of rotation is located further from the axis of rotation than the inner circumference of the annular shape. The processing apparatus described in item 7, characterized by the features described herein. [Matter 10] The end of the recess opposite to the axis of rotation is located closer to the axis of rotation than the outer circumference of the annular shape. A processing apparatus as described in item 7 or 9, characterized by the features described herein. [Matter 11] When the blade is viewed in plan along the axis of rotation, the width of the recess is constant. A processing apparatus according to any one of items 1 to 10, characterized by the features described herein. [Matter 12] When the blade is viewed in plan along the axis of rotation, the width of the recess changes with distance from the axis of rotation. A processing apparatus according to any one of items 1 to 10, characterized by the features described herein. [Matter 13] The depth of the recess is constant regardless of the distance from the axis of rotation. A processing apparatus according to any one of items 1 to 12, characterized by the features described herein. [Matter 14] The depth of the recess varies depending on the distance from the axis of rotation. A processing apparatus according to any one of items 1 to 12, characterized by the features described herein. [Matter 15] When the blade is viewed in plan along the axis of rotation, at least some of the recesses have sides that are aligned with a straight line. A processing apparatus according to any one of items 1 to 14, characterized by the features described herein. [Matter 16] When the blade is viewed in plan along the axis of rotation, at least some of the recesses have sides that follow a curve. A processing apparatus according to any one of items 1 to 15, characterized by the features described herein. [Matter 17] When the blade is viewed in plan along the axis of rotation, the extensions of at least some of the recesses intersect the axis of rotation. A processing apparatus according to any one of items 1 to 15, characterized by the features described herein. [Matter 18] When the blade is viewed in plan along the axis of rotation, the extensions of at least some of the recesses do not intersect the axis of rotation. A processing apparatus according to any one of items 1 to 16, characterized by the features described herein. [Matter 19] A blade having the plurality of recesses described above, used in a processing apparatus as described in any one of items 1 to 18. [Matter 20] The workpiece is processed using the processing apparatus described in any one of items 1 to 18. A method for manufacturing an article, characterized by the following: [Explanation of symbols]

[0063] 1··Blade / 2··First Holder / 3··Second Holder / 4··First Holder Fixing Jig / 5··First Holder Fixing Screw / 6··Second Holder Fixing Member / 7··Liquid Supply Nozzle / 8··X-axis Stage / 9··X-axis Table / 10··Chuck Table / 11··Y-axis Stage / 12··Y-axis Table / 13··Z-axis Stage / 14··Z-axis Table / 15··Spindle / 16··Blade Cover / 17··Workpiece / 28··Base / 29··Recess / 30··Protrusion / 31··Blade Guide Protrusion / 32··Second Holder Guide Protrusion / 33··Contact Part / 34··Contact Part / C··Rotation Axis

Claims

1. A blade for cutting the workpiece, A rotating mechanism that can rotate around a rotation axis, A retaining member and Equipped with, The blade is mounted to the rotating mechanism by the holding member, which holds a portion of the blade. The blade is provided with a plurality of recesses, each recessed to be less deep than the blade's thickness. Each of the plurality of recesses extends from the rotation axis side to the outer circumference side, spanning the portion held by the holding member. From the outside, liquid is supplied to a space where at least a portion of the blade is surrounded by the holding member, on the side of the rotation axis closer to the position where the portion of the blade is clamped. The liquid supplied to the space is injected into each of the plurality of recesses on the rotation axis side of the blade, and supplied to the outer circumference of the blade through the plurality of recesses. A processing apparatus characterized by the following features.

2. The blade is a plate-shaped member having two main surfaces that intersect with the axis of rotation. The plurality of recesses are provided on at least one of the two main surfaces. The processing apparatus according to feature 1.

3. The plurality of recesses are provided on both of the two main surfaces. The processing apparatus according to feature 2.

4. When the blade is viewed through along the axis of rotation, at least some of the plurality of recesses provided on each of the two main surfaces overlap each other. The processing apparatus according to feature 3.

5. When the blade is viewed through along the axis of rotation, the plurality of recesses provided on each of the two main surfaces do not overlap each other. The processing apparatus according to feature 3.

6. When the blade is viewed in plan along the axis of rotation, each of the plurality of recesses is arranged radially with respect to the axis of rotation. The processing apparatus according to any one of claims 1 to 5.

7. The blade, when viewed in plan along the axis of rotation, has an annular shape. The processing apparatus according to any one of claims 1 to 5.

8. The plurality of recesses include recesses that extend from the inner circumference to the outer circumference of the annular shape. The processing apparatus according to feature 7.

9. The end of the recess on the axis of rotation is located further from the axis of rotation than the inner circumference of the annular shape. The processing apparatus according to feature 7.

10. The end of the recess opposite to the axis of rotation is located closer to the axis of rotation than the outer circumference of the annular shape. The processing apparatus according to feature 7.

11. When the blade is viewed in plan along the axis of rotation, the width of the recess is constant. The processing apparatus according to any one of claims 1 to 5.

12. When the blade is viewed in plan along the axis of rotation, the width of the recess changes with distance from the axis of rotation. The processing apparatus according to any one of claims 1 to 5.

13. The depth of the recess is constant regardless of the distance from the axis of rotation. The processing apparatus according to any one of claims 1 to 5.

14. The depth of the recess varies depending on the distance from the axis of rotation. The processing apparatus according to any one of claims 1 to 5.

15. When the blade is viewed in plan along the axis of rotation, at least some of the recesses have sides that are aligned with a straight line. The processing apparatus according to any one of claims 1 to 5.

16. When the blade is viewed in plan along the axis of rotation, at least some of the recesses have sides that follow a curve. The processing apparatus according to any one of claims 1 to 5.

17. When the blade is viewed in plan along the axis of rotation, the extensions of at least some of the recesses intersect the axis of rotation. The processing apparatus according to any one of claims 1 to 5.

18. When the blade is viewed in plan along the axis of rotation, the extensions of at least some of the recesses do not intersect the axis of rotation. The processing apparatus according to any one of claims 1 to 5.

19. A blade having the plurality of recesses, used in the processing apparatus according to any one of claims 1 to 5.

20. The workpiece is processed using the processing apparatus described in any one of claims 1 to 5. A method for manufacturing an article, characterized by the following:

Images