Clamping device and vibrating device

Abstract

The objective is to provide a clamping device and a vibrating device that can release clamped minute parts without being affected by van der Waals forces, and that can move minute parts with less effort and time. [Solution] The device comprises a clamping section having two pairs of clamping fins for holding minute parts, and a vibrating section for applying vibration to the clamping section and / or the clamping fins, wherein the vibrating section applies either rectangular wave vibration or continuous impact vibration, and the vibration frequency is 10Hz to 200Hz.

Description

Technical Field

[0001] The present invention relates to a clamping device and a vibrating device for picking up while sandwiching a micro part.

Background Art

[0002] When a micro part such as a chip part to be soldered to an electronic substrate is picked up by means for clamping such as tweezers, even when trying to release the picked-up micro part, the micro part does not separate from the means for clamping due to the van der Waals force.

[0003] This action also occurs when trying to horizontally move a micro part. When picking up and moving micro parts one by one, it takes time and effort to handle the micro parts, so a transportation method for horizontally moving the micro parts has been proposed. A means and a transportation method for horizontally transporting such micro parts are proposed in Patent Document 1.

[0004] The micro object transportation device of Patent Document 1 continuously provides fine V-shaped grooves on a substrate so that the concavities and convexities repeat, and a piezoelectric film having an electrode is disposed on one of the pair of inclined surfaces located on the same side of the pair of opposed inclined surfaces of each V-shaped groove, and vibration in a direction orthogonal to the inclined surface is applied to the micro object on the groove by the piezoelectric film so that the micro object can be sequentially moved to an adjacent groove.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, in the micro object transportation device of Patent Document 1, even though a considerable number of micro parts can be moved in the horizontal direction, the micro parts cannot be moved to an arbitrary location.

[0007] The present invention has been made in view of these circumstances, and aims to provide a clamping device and a vibrating device that can release clamped minute parts without being affected by van der Waals forces, and that can move minute parts to any location with less effort and time. [Means for solving the problem]

[0008] The clamping device according to claim 1 is characterized by comprising a clamping section having two pairs of clamping fins for clamping minute parts, and a vibrating section for applying vibration to the clamping section and / or the clamping fins.

[0009] The clamping device according to claim 2 is characterized in that, in addition to the configuration of claim 1, the vibrating unit applies rectangular wave vibration as vibration to the clamping unit and / or clamping fins.

[0010] The clamping device according to claim 3 is characterized in that, in addition to the configuration of claim 1, the vibrating part applies continuous impact vibration as vibration to the clamping part and / or the clamping fins.

[0011] The clamping device according to claim 4 is characterized in that, in addition to the configuration of claim 2, the frequency at which the vibrating part vibrates the clamping part and / or clamping fins is 10Hz to 200Hz.

[0012] The clamping device according to claim 5 is characterized in that, in addition to the configuration of claim 3, the frequency at which the vibrating part vibrates the clamping part and / or the clamping fins is 10Hz to 200Hz.

[0013] The clamping device according to claim 6 is characterized in that, in addition to the configuration of claim 2, the vibrating part can vary the frequency of vibration.

[0014] The clamping device according to claim 7 is characterized in that, in addition to the configuration of claim 2, the vibrating part can vary the intensity of the vibration.

[0015] The clamping device according to claim 8 is characterized in that, in addition to the configuration of claim 2, the vibrating part can vary the acceleration of the vibration.

[0016] The clamping device according to claim 9, in addition to the configuration of claim 3, is characterized in that the vibrating part can vary the frequency of vibration.

[0017] The clamping device according to claim 10, in addition to the configuration of claim 3, is characterized in that the vibrating part can vary the intensity of vibration.

[0018] The clamping device according to claim 11, in addition to the configuration of claim 3, is characterized in that the vibrating part can vary the acceleration of vibration.

[0019] The clamping device according to claim 12, in addition to the configuration of claim 4, is characterized in that the vibrating part can vary the frequency of vibration.

[0020] The clamping device according to claim 13, in addition to the configuration of claim 4, is characterized in that the vibrating part can vary the intensity of vibration.

[0021] The clamping device according to claim 14, in addition to the configuration of claim 4, is characterized in that the vibrating part can vary the acceleration of vibration.

[0022] The clamping device according to claim 15, in addition to the configuration of claim 5, is characterized in that the vibrating part can vary the frequency of vibration.

[0023] The clamping device according to claim 16, in addition to the configuration of claim 5, is characterized in that the vibrating part can vary the intensity of vibration.

[0024] The clamping device according to claim 17, in addition to the configuration of claim 5, is characterized in that the vibrating part can vary the acceleration of vibration.

[0025] The clamping device according to claim 18, in addition to the configuration of any one of claims 1 to 17, is characterized in that the vibrating part has a hammer that appears and disappears, and generates vibration by the impact of the hammer.

[0026] The clamping device according to claim 19 is characterized in that, in addition to the configuration of claim 18, it further comprises vibration transmission means for transmitting the vibration generated by the impact of the hammer to the clamping part or and the clamping fins.

[0027] The clamping device according to claim 20 is characterized in that, in addition to the configuration of claim 19, the vibration transmission means is a leaf spring.

[0028] The clamping device according to claim 21 is characterized in that, in addition to the configuration of claim 19, the vibration transmission means has a transmission part that is slidable coaxially with the hammer, the vibration of the hammer is transmitted to one end of the transmission part, the other end of the transmission part transmits vibration to the clamping part or and the clamping fins, and the distance between one end of the transmission part and the hammer can be varied.

[0029] The vibration device according to claim 22 is a vibration device that vibrates a clamping part having two pairs of clamping fins for pinching and lifting a micro part, and is characterized in that it comprises a vibration part for applying vibration to the clamping part or and the clamping fins.

[0030] The vibration device according to claim 23 is characterized in that, in addition to the configuration of claim 22, the vibration part applies rectangular wave vibration as vibration to the clamping part or and the clamping fins.

[0031] The vibration device according to claim 24 is characterized in that, in addition to the configuration of claim 22, the vibration part applies continuous impact vibration as vibration to the clamping part or and the clamping fins.

[0032] The vibration device according to claim 25 is characterized in that, in addition to the configuration of claim 23, the frequency at which the vibration part vibrates the clamping part or and the clamping fins is 10 Hz to 200 Hz.

[0033] The vibration device according to claim 26 is characterized in that, in addition to the configuration of claim 24, the frequency at which the vibration part vibrates the clamping part or and the clamping fins is 10 Hz to 200 Hz.

[0034] The vibration device according to claim 27 is characterized in that, in addition to the configuration of claim 23, the vibration unit can vary the vibration frequency.

[0035] The vibration device according to claim 28 is characterized in that, in addition to the configuration of claim 23, the vibration unit can vary the intensity of the vibration.

[0036] The vibration device according to claim 29 is characterized in that, in addition to the configuration of claim 23, the vibration unit can vary the acceleration of the vibration.

[0037] The vibration device according to claim 30 is characterized in that, in addition to the configuration of claim 24, the vibration unit can vary the vibration frequency.

[0038] The vibration device according to claim 31 is characterized in that, in addition to the configuration of claim 24, the vibration unit can vary the intensity of the vibration.

[0039] The vibration device according to claim 32 is characterized in that, in addition to the configuration of claim 24, the vibration unit can vary the acceleration of the vibration.

[0040] The vibration device according to claim 33 is characterized in that, in addition to the configuration of claim 25, the vibration unit can vary the vibration frequency.

[0041] The vibration device according to claim 34 is characterized in that, in addition to the configuration of claim 25, the vibration unit can vary the intensity of the vibration.

[0042] The vibration device according to claim 35 is characterized in that, in addition to the configuration of claim 25, the vibration unit can vary the acceleration of the vibration.

[0043] The vibration device according to claim 36 is characterized in that, in addition to the configuration of claim 26, the vibration unit can vary the vibration frequency.

[0044] The vibration device according to claim 37 is characterized in that, in addition to the configuration of claim 26, the vibration unit can vary the intensity of the vibration.

[0045] The vibration device according to claim 38 is characterized in that, in addition to the configuration of claim 26, the vibration unit can vary the acceleration of the vibration.

[0046] The vibration device according to claim 39 is characterized in that, in addition to the configuration of any of claims 22 to 38, the vibrating part has a hammer that extends and retracts, and generates vibration by striking with the hammer.

[0047] The vibration device according to claim 40 is characterized in that, in addition to the configuration of claim 39, it comprises vibration transmission means for transmitting vibrations generated by hammer strikes to the clamping portion and / or clamping fins.

[0048] The vibration device according to claim 41 is characterized in that, in addition to the configuration of claim 40, the vibration transmission means is a leaf spring.

[0049] The vibration device according to claim 42 is characterized in that, in addition to the configuration of claim 40, the vibration transmission means has a transmission part that is slidable coaxially with the hammer, the vibration of the hammer is transmitted to one end of the transmission part, and the vibration is transmitted to the clamping part and / or clamping fins at the other end of the transmission part, and the distance between one end of the transmission part and the hammer can be varied. [Effects of the Invention]

[0050] According to the present invention, it is possible to release the clamped minute component without being affected by van der Waals forces, and to move the minute component to any desired location with less effort and time. [Brief explanation of the drawing]

[0051] [Figure 1] This is an explanatory diagram showing an example of a clamping device and a vibrating device according to the first embodiment of the present invention. [Figure 2] This is an explanatory diagram showing an example of a clamping device and a vibrating device according to a second embodiment of the present invention. [Figure 3] This is an explanatory diagram showing an example of a clamping device and a vibrating device according to a third embodiment of the present invention. [Figure 4]This is an explanatory diagram showing an example of a clamping device and a vibrating device according to a fourth embodiment of the present invention. [Figure 5] This is an explanatory diagram showing an example of a clamping device and a vibrating device according to a fifth embodiment of the present invention. [Figure 6] This is an explanatory diagram showing an example of a leaf spring used in the clamping device and vibrating device of the second and fourth and fifth embodiments described above. [Figure 7] This is an explanatory diagram showing an example of a clamping device and a vibrating device according to the sixth embodiment of the present invention. [Figure 8] This is an explanatory diagram showing the operation of the clamping device and the vibrating device according to the sixth embodiment described above. [Figure 9] This is an explanatory diagram showing the external appearance of the clamping device and vibrating device according to the sixth embodiment described above. [Figure 10] This is an explanatory diagram showing another arrangement of the clamping device and vibrating device of the sixth embodiment described above. [Figure 11] This is an explanatory diagram showing the operation of the clamping device and vibrating device of the sixth embodiment in other arrangements. [Figure 12] This is an explanatory diagram showing an example of a device using the clamping device and vibration device of the sixth embodiment described above. [Figure 13] This is an explanatory diagram showing an example of a clamping device and a vibrating device according to the seventh embodiment of the present invention. [Figure 14] This is an explanatory diagram showing an example of a clamping device and a vibrating device according to the eighth embodiment of the present invention. [Figure 15] This is an explanatory diagram showing an example of a vibration device according to the ninth embodiment of the present invention. [Figure 16] This is an explanatory diagram illustrating the operation of the vibration device according to the ninth embodiment described above. [Figure 17] This is an explanatory diagram showing an example of the clamping device and vibrating device according to the ninth embodiment described above. [Modes for carrying out the invention]

[0052] The embodiments of the present invention will be described in detail below with reference to the drawings. Figure 1 is an explanatory diagram showing an example of a clamping device and vibrating device according to the first embodiment of the present invention. Figure 2 is an explanatory diagram showing an example of a clamping device and vibrating device according to the second embodiment of the present invention. Figure 3 is an explanatory diagram showing an example of a clamping device and vibrating device according to the third embodiment of the present invention. Figure 4 is an explanatory diagram showing an example of a clamping device and vibrating device according to the fourth embodiment of the present invention. Figure 5 is an explanatory diagram showing an example of a clamping device and vibrating device according to the fifth embodiment of the present invention. Figure 6 is an explanatory diagram showing an example of a leaf spring used in the clamping device and vibrating device according to the second and fourth and fifth embodiments.

[0053] Figure 7 is an explanatory diagram showing an example of a clamping device and vibrating device according to the sixth embodiment of the present invention. Figure 8 is an explanatory diagram showing the operation of the clamping device and vibrating device according to the sixth embodiment. Figure 9 is an explanatory diagram showing the external appearance of the clamping device and vibrating device according to the sixth embodiment. Figure 10 is an explanatory diagram showing another arrangement of the clamping device and vibrating device according to the sixth embodiment. Figure 11 is an explanatory diagram showing the operation of the clamping device and vibrating device according to the sixth embodiment in another arrangement. Figure 12 is an explanatory diagram showing an example of a device using the clamping device and vibrating device according to the sixth embodiment. Figure 13 is an explanatory diagram showing an example of a clamping device and vibrating device according to the seventh embodiment of the present invention. Figure 14 is an explanatory diagram showing an example of a clamping device and vibrating device according to the eighth embodiment of the present invention. Figure 15 is an explanatory diagram showing an example of a vibrating device according to the ninth embodiment of the present invention. Figure 16 is an explanatory diagram explaining the operation of the vibrating device according to the ninth embodiment. Figure 17 is an explanatory diagram showing an example of a clamping device and vibrating device according to the ninth embodiment.

[0054] The present invention relates to clamping devices 1 to 9 for gripping and picking up minute components P, and vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 for the clamping devices 1 to 9. For example, when a minute component P, such as a chip component used for soldering to an electronic circuit board, is picked up with a clamping means such as tweezers, even if an attempt is made to release the picked-up minute component P, the van der Waals force prevents the minute component P from separating from the clamping means. The present invention aims to solve this problem.

[0055] The clamping devices 1 to 9 according to this application include a clamping section 100 having two pairs of clamping fins 102, 104 for clamping a minute part P, a clamping section 110 having two pairs of clamping fins 112, 114 for clamping a minute part P, a clamping section 120 having two pairs of clamping fins 122, 124 for clamping a minute part P, and a clamping section 142, 144 having two pairs of clamping fins for clamping a minute part P The device comprises a clamping section 140 having two pairs of clamping fins 162 and 164 for clamping a minute component P, and vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 for vibrating the clamping sections 100, 110, 120, 140, and 160 and the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, and 164.

[0056] Furthermore, the gripping parts 100, 110, 120, 140, and 160 only need to be capable of picking up minute parts P. These could be tweezers as shown in Figures 1 to 5, 13, and 17, or they could be mechanical devices called grippers that form part of a robotic system, as shown in Figures 7 to 12 and 14.

[0057] The vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 consist of a vibration section that generates vibrations and applies them to the clamping parts 100, 110, 120, 140, 160 or the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, and 164. The vibration section is the source of vibration and consists of a motor 92 including solenoids 12, 42, and 62 with movable iron cores 14a, 44a, and 64a, and an eccentric circular cam 92b, as will be described later.

[0058] Furthermore, the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 can take any form as long as they can vibrate the clamping parts 100, 110, 120, 140, 160 or the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, and 164. However, the vibration must be capable of applying a square wave vibration, rather than a sinusoidal waveform, to the clamping parts 100, 110, 120, 140, 160 or the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, and 164. This vibration may also be a continuous impact vibration. This impact vibration preferably involves vibrating the clamping portions 100, 110, 120, 140, 160 or the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, 164 with an intermittent force that repeatedly strikes them.

[0059] As described above, the vibrations generated by the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 are vibrations that cause the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, and 164 to move away from the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, and 164 while the clamping fins are holding the micro-component P.

[0060] The timing at which the vibrating devices 10, 20, 40, 50, 60, 70, 80, 90 vibrate the clamping portions 100, 110, 120, 140, 160 or the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, 164 is at least the timing at which it is desired to separate the clamped minute component P from the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, 164.

[0061] Furthermore, the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 may vibrate the entire clamping section 100, 110, 120, 140, and 160, or the individual clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, and 164, or in some cases, the parts supporting the clamping section 100, 110, 120, 140, and 160. However, ultimately, it is necessary that the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, and 164 that are in contact with the minute component P are vibrated.

[0062] Furthermore, the frequency of vibration that vibrates the clamping portions 100, 110, 120, 140, 160 of the vibrating devices 10, 20, 40, 50, 60, 70, 80, 90, and the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, 164 is arbitrary, but is particularly preferably 10Hz to 200Hz. Also, the mechanism by which the vibrating devices 10, 20, 40, 50, 60, 70, 80, 90 generate vibration is arbitrary, but for example, solenoids 12, 42, 62 or motors 92 can be used.

[0063] It is preferable that the vibration frequencies of the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 can be varied. It is desirable that the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 do not generate vibrations at a fixed frequency only, but can change the frequency as needed. As a method for varying the vibration frequency of the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90, for example, in the case of electromagnetic solenoids or motors, this can be done by appropriately changing the frequency of the applied control signal (excitation signal, power supply signal, etc.). By being able to vary the vibration frequency, it is possible to appropriately release minute parts P of different sizes and shapes with a single clamping device 1 to 9.

[0064] Furthermore, it is preferable that the vibration intensity of the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 be variable. It is desirable that the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 do not generate vibrations of a constant intensity, but rather can change the intensity as needed. As a method for varying the vibration intensity of the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90, for example, in the case of electromagnetic solenoids or motors, this can be done by appropriately changing the level (e.g., voltage) of the applied control signal (excitation signal, power supply signal, etc.). By being able to vary the vibration intensity, it is possible to appropriately release minute parts P of different sizes and shapes with a single clamping device 1 to 9.

[0065] Furthermore, it is preferable that the vibration acceleration of the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 be variable. It is desirable that the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90 do not generate vibrations with a constant acceleration, but rather can change the acceleration as needed. As a method for varying the vibration acceleration of the vibration devices 10, 20, 40, 50, 60, 70, 80, and 90, for example, in the case of electromagnetic solenoids or motors, this can be done by appropriately changing the level (e.g., voltage) of the applied control signal (excitation signal, power supply signal, etc.) or the slope angle of the rectangular wave signal. By being able to vary the vibration acceleration, the quality of the vibration can be changed, and it becomes possible to appropriately release minute parts P of different sizes and shapes with a single clamping device 1 to 9.

[0066] The above describes the basic form of the clamping devices 1 to 9 etc. relating to this application, but a more specific configuration will be explained below. [Examples]

[0067] The clamping device 1 shown in this embodiment 1 is an example in which the clamping part 100 is tweezers, and the vibrating device 10 vibrates by directly pressing on the clamping part 100. The clamping part 100 has two pairs of clamping fins 102 and 104 for clamping a minute part P. The vibrating device 10 has a solenoid 12 as a vibration source as the vibrating part. The solenoid 12 is of the pull type and has a movable iron core 14a that acts as a hammer and is slidably mounted in the center of the coil 12a, and a hammer head 14 is provided at the end of the movable iron core 14a that protrudes on the opposite side of the coil 12a. A spring 14b is provided to bias the movable iron core 14a toward the hammer head 14 (that is, when the coil 12a is not energized, the hammer head 14 (movable iron core 14a) protrudes toward the direction away from the coil 12a).

[0068] When current is supplied to the solenoid 12, the excitation of the coil 12a pulls the movable iron core 14a towards the coil 12a, and the hammerhead 14 is also pulled towards the coil 12a. Conversely, when the current to the coil 12a is cut off, the hammerhead 14 (movable iron core 14a) returns to its original protruding state due to the biasing force of the spring 14b. By using a square wave signal applied to the coil 12a, the solenoid 12 causes the hammerhead 14 (movable iron core 14a) to extend and retract, generating a pushing vibration. Although the vibration device 10 has been described using a pull-type solenoid 12, a push-type solenoid, which operates in the reverse direction when energized, may also be used, or a motor as described later may be used. Furthermore, although Figure 1 does not show the mechanism for fixing the vibrating device 10 to the clamping portion 100, as shown in Example 3, the vibrating device 10 will be fixed to the clamping portion 100 using some kind of fixing means, but it is preferable to fix the vibrating device 10 to the clamping portion 100 in a way that allows it to be detachably attached.

[0069] In the clamping device 1, the vibrating device 10 is provided with the axial direction of the movable iron core 14a perpendicular to the clamping portion 100, and the hammerhead 14 of the vibrating device 10 directly strikes the clamping portion 100, causing the clamping portion 100 and the clamping fins 102 and 104 to vibrate. [Examples]

[0070] The above-described Embodiment 1 is an example where the clamping part 100 is a pair of tweezers, and the vibrating device 10 vibrates by directly pressing on the clamping part 100. However, in the case of a clamping part with a small mass like tweezers, if too much strong vibration is applied directly, it may interfere with picking up tiny parts P, etc. The clamping device 2 of Embodiment 2 is designed to address this issue. The clamping device 2 uses the same components as the above-described vibrating device 10, but is equipped with a leaf spring 16, which is a vibration transmission means, between the hammerhead 14 and the clamping part 100. The leaf spring 16 is for transmitting the vibrations generated by the vibrating device 10 to the clamping part 100 and the clamping fins 102 and 104, and adjusts how the vibrations are transmitted to the clamping part 100 and the clamping fins 102 and 104.

[0071] As shown in Figures 1 and 6(a), the leaf spring 16 is made, for example, from a phosphor bronze plate cut into a rectangle and bent into a roughly V-shape. The leaf spring 16 is not limited to phosphor bronze plate; it is not limited to any material that functions as a leaf spring. As shown in Figure 2, the leaf spring 16 is installed with one side fixed to the clamping part 100 and the other side floating above the clamping part 100. The hammer head 14 of the vibrating device 10 then strikes the floating portion of the leaf spring 16 above the clamping part 100, thereby transmitting the vibration of the vibrating device 10 to the clamping part 100 and the clamping fins 102 and 104.

[0072] Furthermore, although other examples will be described later, the vibration transmission means is not limited by its form as long as it is used to transmit vibrations generated by the vibration device 10 to the clamping portion 100 and the clamping fins 102 and 104. [Examples]

[0073] The clamping device 3 shown in Figure 3 is an example in which the above-described vibrating device 10 is attached to a commercially available clamping part 110, which is a pair of tweezers. In the example in Figure 3, the vibrating device 10 is attached to the end of the clamping part 110 opposite to the clamping fins 112 and 114 for ease of operation, but it is not limited to this position. The vibrating device 10 is fixed to the tweezers fixing part 24 provided on the clamping part 110 side via a vibrating device fixing part 22. It is preferable that the vibrating device 10 be easily attached to and detached from the clamping part 110. [Examples]

[0074] In the clamping devices 1 to 3 of Examples 1 to 3, the vibrating device 10 is positioned so that the axial direction of the movable iron core 14a is perpendicular to the clamping portion 100. The hammerhead 14 of the vibrating device 10 strikes the clamping portion 100 (or leaf spring 16), causing the clamping portion 100 and / or the clamping fins 102 and 104 to vibrate. However, if the solenoid 12 is long in the direction of the movable iron core 14a, and the clamping portion 100 is like tweezers, the vibrating device 10 may protrude too far from the clamping portion 100 and become an obstruction. In contrast, the clamping devices 4 and 5 of Example 4 and Example 5, described later, show examples of countermeasures to address this issue.

[0075] As shown in Figure 4, in the clamping device 4, the vibrating device 40 is positioned along the longitudinal direction of the tweezers, which constitute the clamping portion 100. That is, the axis of the movable iron core 44a of the solenoid 42 of the vibrating device 40 is oriented in the same direction as the longitudinal direction of the clamping portion 100. Furthermore, unlike the clamping device 1 described above, the clamping device 4 does not transmit vibrations by having the vibrating device 40 directly press against the clamping portion 100, but rather transmits the vibrations of the vibrating device 40 indirectly using a vibration transmission means.

[0076] The vibration device 40 includes a solenoid 42 as a vibration source. The solenoid 42 has a movable iron core 44a that acts as a hammer, slidably mounted at the center of a coil 42a, and a hammerhead 44 is provided at the end of the movable iron core 44a that protrudes on the opposite side of the coil 42a. A spring 44b is provided to bias the movable iron core 44a toward the hammerhead 44 (that is, when the coil 42a is not energized, the hammerhead 44 (movable iron core 44a) protrudes toward the side away from the coil 42a).

[0077] When current is supplied to the solenoid 42, the excitation of the coil 42a pulls the movable core 44a towards the coil 42a, and the hammerhead 44 is also pulled towards the coil 42a. Conversely, when the current to the coil 42a is cut off, the hammerhead 44 (movable core 44a) returns to its original protruding state due to the biasing force of the spring 44b. By using a square wave signal applied to the coil 42a, the solenoid 42 causes the hammerhead 44 (movable core 44a) to extend and retract, generating a pushing vibration. Although the vibration device 40 has been described using a pull-type solenoid 42, a push-type solenoid that reverses the operation when energized may also be used, or a motor as described later may be used.

[0078] As shown in Figure 4, in the clamping device 4, the vibration device 40 is positioned along the longitudinal direction of the clamping portion 100, which is a pair of tweezers, with a leaf spring 46, which is a roughly L-shaped vibration transmission means, in between. As shown in Figure 6(b), the leaf spring 46 is made, for example, from a phosphor bronze plate cut into a rectangle and bent into a roughly L-shape. The leaf spring 46 is not limited to phosphor bronze plate; it is not limited to any material that functions as a leaf spring. The leaf spring 46 has a notch 46a on the surface rising from the clamping portion 100, into which the movable iron core 44a and hammerhead 44 are locked.

[0079] Although Figure 4 shows the vibration device 40 and the leaf spring 46, which is the vibration transmission means, being directly fixed to the clamping part 100, some kind of fixing means will be used to fix the vibration device 40 and the leaf spring 46 to the clamping part 100. It is preferable to fix the vibration device 40 and the leaf spring 46 to the clamping part 100 in a way that allows them to be detachably attached.

[0080] Then, in the clamping device 4, the vibrating device 40 is operated, and the hammerhead 44 repeatedly strikes the leaf spring 46, causing the vibration to vibrate the clamping portion 100 and the clamping fins 102 and 104 via the leaf spring 46. [Examples]

[0081] Unlike the clamping device 4 described above, the clamping device 5 of this embodiment 5 is an example in which the vibrating device 50 is fixed to the clamping part 100 using a housing 52. The solenoid 42 and leaf spring 46 used in the vibrating device 50 are the same as those in the clamping device 4, as described above. In the clamping device 5, similar to the clamping device 4, the vibrating device 50 is installed so as to be aligned with the longitudinal direction of the tweezers, which are the clamping part 100. That is, the axis of the movable iron core 44a of the solenoid 42 of the vibrating device 50 is oriented in the same direction as the longitudinal direction of the clamping part 100. Furthermore, unlike the clamping device 1 described above, the clamping device 5 does not transmit vibrations by having the vibrating device 50 directly press against the clamping part 100, but rather has a structure in which the vibrations of the vibrating device 50 are transmitted indirectly using vibration transmission means.

[0082] However, as shown in Figure 5, the vibration device 50 of the clamping device 5 is fixed to the clamping portion 100 with the solenoid 42 and leaf spring 46 fixed inside the housing 52. However, the solenoid 42 and leaf spring 46 are provided inside the housing 52 on the side opposite to the clamping portion 100. Furthermore, as described above, it is preferable that the vibration device 50 be detachably mounted from the clamping portion 100.

[0083] Although the vibration device 50 has this structure and arrangement, it generates vibrations in a similar manner to the vibration device 40 described above, and the housing 52, together with the leaf spring 46, acts as a vibration transmission means, causing the vibrations of the vibration device 50 to vibrate the clamping portion 100 and the clamping fins 102 and 104. [Examples]

[0084] The gripping device 6 shown in Figures 7 to 9 is a so-called gripper, which forms part of a robotic device and picks up tiny components P, such as chip components to be soldered to an electronic circuit board, and places them in a desired location. The gripping device 6 has a gripping section 120, which is provided with gripping fins 122 and 124 that can grip and lift the tiny components P downwards from the base 126. The gripping section 120 has a mechanism that allows it to grip and release the tiny components P by bringing the respective tips of the gripping fins 122 and 124 closer together.

[0085] A vibrating device 60 is provided next to the base 126 of the clamping device 6. The vibrating device 60 has a solenoid 62 that acts as a vibration source, repeatedly pressing against the base 126 in the direction of the base 126. The vibrating device 60 then vibrates the entire clamping part 120 and the clamping fins 122 and 124 by pressing against the base 126 of the clamping part 120. The vibrating device 60 only needs to vibrate the clamping part 120 (clamping fins 122 and 124) at the timing when the pinched minute part P is released.

[0086] Next, the structure and operation of the vibration device 60 of this embodiment will be described. The vibration device 60 has a solenoid 62 as a vibration source as a vibration part. The vibration device 60 has a substantially L-shaped housing 66 to which the solenoid 62, which is the vibration source, is fixed, and a vibration transmission means 68 loosely fitted to a wall portion 66a that rises from the end of the housing 66. The solenoid 62, as in the above, is a pull type in this embodiment as well, and has a movable iron core 64a that acts as a hammer and is slidably provided at the center of the coil 62a, and a hammer head 64 is provided at the end of the movable iron core 64a that protrudes on the opposite side of the coil 62a. A spring 64b is provided to bias the movable iron core 64a toward the hammer head 64 (that is, when the coil 62a is not energized, the hammer head 64 (movable iron core 64a) protrudes toward the direction away from the coil 62a).

[0087] When current is supplied to the solenoid 62, the excitation of the coil 62a pulls the movable core 64a towards the coil 62a, and the hammerhead 64 is also pulled towards the coil 62a. Conversely, when the current to the coil 62a is cut off, the hammerhead 64 (movable core 64a) returns to its original protruding state due to the biasing force of the spring 64b. By making the signal applied to the coil 62a a square wave signal, the solenoid 62 causes the hammerhead 64 (movable core 64a) to extend and retract, generating a vibration that acts like a pressing motion.

[0088] As shown in Figures 7 and 8, a through hole 66b is drilled in the wall portion 66a of the housing 66, coaxial with the movable iron core 64a, and a vibration transmission means 68 is loosely fitted into the through hole 66b. The vibration transmission means 68 consists of a rod-shaped transmission portion 68b, with one end 68ba on the side facing the movable iron core 64a and the other end 68a on the opposite side. A distance adjustment member 68c is provided on the outer circumference of the transmission portion 68b to arbitrarily determine the distance between the one end 68ba of the vibration transmission means 68 and the hammerhead 64. Specifically, the transmission part 68b is bolt-shaped, and the distance adjustment member 68c is nut-shaped. The distance adjustment member 68c is screwed onto the transmission part 68b, and the amount by which the transmission part 68b protrudes from the wall part 66a toward the hammerhead 64 (i.e., the distance between one end 68ba of the vibration transmission means 68 and the hammerhead 64) can be changed depending on the position in which the distance adjustment member 68c contacts the wall part 66a.

[0089] In other words, the vibration device 60 has a movable iron core 64a, which acts as a hammer, that extends and retracts, and vibrations are generated by the impact of the movable iron core 64a, and these vibrations are transmitted to the clamping part 120 via the vibration transmission means 68. The vibration transmission means 68 is for transmitting the vibrations generated by the impact of the movable iron core 64a, which acts as a hammer, to the clamping part 120 and the clamping fins 122 and 124. The vibration transmission means 68 has a transmission part 68b that is coaxially slidable with the movable iron core 64a, which acts as a hammer. The vibrations of the movable iron core 64a are transmitted to one end 68ba of the transmission part 68b, and the vibrations are transmitted to the other end 68a of the transmission part 68b to the clamping part 120 and the clamping fins 122 and 124. The distance between the one end 68ba of the transmission part 68b and the movable iron core 64a, which acts as a hammer, can be varied.

[0090] Furthermore, in Figure 7, the distance A between one end 68ba of the vibration transmission means 68 and the hammerhead 64 is set to be shorter than the distance B shown in Figure 8. This difference in distance makes it possible to adjust the intensity of the vibration that causes the clamping portion 120 and the clamping fins 122 and 124 to vibrate.

[0091] Furthermore, the arrangement of the vibrating device 60 and the clamping part 120 is not limited to the example described above. As shown in Figures 10 and 11, the vibrating device 60 may be placed on the upper surface of the base 126, and the housing 66 and the base 126 may be arranged to be in close contact. In the example shown in Figures 10 and 11, the vibration of the vibrating device 6 is transmitted from the housing 66 to the base 126, causing the clamping part 120 to vibrate, and then the clamping fins 122 and 124 to vibrate. Thus, the arrangement of the vibrating device 60 and the clamping part 120 is not limited to one form.

[0092] Figure 12 shows the gripping device 6 as an actual gripper (Figure 12 is a view from diagonally below). The vibration device 60 and vibration transmission means 68 of the device in Figure 12 are located inside the housing 130 and are not depicted. The housing 130 is equipped with a three-dimensional camera 132 and a macro camera 136 capable of photographing minute parts. The three-dimensional camera 132 is a 3D sensor capable of detecting minute parts P and also has a laser emission lens 134 for the three-dimensional camera (laser light source for the three-dimensional camera). The macro camera 136 is located at the back between the gripping fins 122 and 124 of the gripping section 120 and also has a macro photography light source 138 that illuminates the macro camera 136.

[0093] The device shown in Figure 12 can quickly release the micro-component P by vibration, allowing it to be accurately and quickly placed in the desired location. In addition, by incorporating a 3D sensor consisting of a three-dimensional camera 132 and a macro camera 136, it can grasp the three-dimensional position of the micro-component P and reliably and quickly grasp the micro-component P. [Examples]

[0094] The clamping device 7 in Figure 13 is a clamping device that mechanically opens and closes the clamping fins 142 and 144 of the clamping part 140 (tweezers) to pick up a minute part P without human intervention. As shown in Figure 13, a tweezers holder 154 is provided on the base 152 to hold the non-clamping fin side of the clamping part 140 (tweezers), and the clamping part 140 is held on the base 152 with the clamping fins 142 and 144 facing downwards. At the bottom of the base 152 is a sliding part 158 ​​that is slidably mounted vertically by a stepping motor 156 provided on the top of the base 152.

[0095] Below the sliding portion 158 is a pressing portion 158a that surrounds the clamping portion 140. As the sliding portion 158 slides up and down, rollers (not shown) protruding inward from the pressing portion 158a press and release the left and right sides of the clamping portion 140, causing the clamping fins 142 and 144 to open and close. The pressing portion 158a is equipped with a vibration device 70 containing a cylinder, which vibrates the clamping portion 140 and the clamping fins 142 and 144 via the pressing portion 158a. The vibration device 70 has a cylinder or the like as a vibration source. In the example in Figure 13, a reverse-action type is used for the clamping portion 140, but it is not limited to a reverse-action type; a linear type as shown in the other figures may also be used.

[0096] Furthermore, the clamping device 6 described above can also be equipped with a mechanism similar to that of the clamping device 8 described later for detecting the surface on which the minute component P is placed. In addition, the clamping device 8 can also be equipped with a mechanism similar to that of the clamping device 6 for grasping the minute component P in three dimensions. [Examples]

[0097] The gripping device 8 shown in Figure 14 has a sensor that detects the surface on which the minute component P is placed. The gripping device 8 has a sensor that detects the surface on which the minute component P is placed, and by accurately knowing this surface, it becomes possible to accurately grasp the minute component P. In general, the gripping devices 6 and 8 are mounted on a mechanical device that transports the minute component P using power, and the movement of the gripping devices 6 and 8 themselves and the action of picking up the minute component P are performed under control using power.

[0098] Specifically, the gripping device 8 is provided with a slide stage 176 that slides up and down on a base 172, and a gripper section 170 having a gripping section 160 is provided on the slide stage 176. The gripping section 160 is composed of gripping fins 162 and 164 that grasp two small parts P extending downward. A spring 178 is stretched between the gripper section 170 and the base 172, and when the gripping fins 162 and 164 come into contact with a surface, a touch sensor 174 provided on the gripper section 170 detects the contact and detects the surface that has come into contact (the surface on which the small parts P are placed). The contact pressure when the gripping fins 162 and 164 come into contact with a surface is reduced by the slide stage 176 and the spring 178. The clamping device 8 has a vibrating device 80 that vibrates the clamping fins 162 and 164, and the vibrating device 80 has a solenoid or the like as a vibration source as a vibrating part. [Examples]

[0099] Next, an example of using a motor 92 in the vibration device 90 will be explained using Figures 15-17. The vibration device 90 has a plate-shaped base 94 with a plate-shaped vibration device fixing part 94a perpendicular to the end of the base 94. Conversely to the vibration device fixing part 94a of the base 94, the motor 92 is installed with its rotation shaft 92a passing through the base 94. An eccentric circular cam 92b is attached to the end of the rotation shaft 92a of the motor 92, and the eccentric circular cam 92b rotates in accordance with the rotation of the rotation shaft 92a.

[0100] A U-shaped hammer base 96 is fixed to the lower side of the vibrator fixing portion 94a of the base 94. A hammer 98 is loosely mounted through the upper and lower plates of the hammer base 96. The hammer 98 has disc-shaped hammer ends 98b and a hammer head 98c fixed to the portions at both ends of the rod-shaped hammer rod 98a that protrude from the upper and lower parts of the hammer base 96, respectively. A spring 98d is provided between the hammer end 98b on the eccentric cam 92b side and the hammer base 96, weakly and gently biasing the hammer end 98b in the circumferential direction of the eccentric cam 92b.

[0101] In this state, as shown in Figure 16(a), when the rotation axis 92a of the motor 92 rotates, the long axis portion of the eccentric cam 92b pushes the hammer end 98b, pushing out the hammer head 98c. Then, as shown in Figure 16(b), when the eccentric cam 92b opposite the hammer end 98b becomes the short axis portion, the hammer end 98b lifts away from the eccentric cam 92b, while the spring 98d then returns the entire hammer 98 in the direction of the eccentric cam 92b, causing the hammer head 98c to strike the hammer base 96. As the rotation of the rotation axis 92a of the motor 92 causes the hammer 98 to repeat this action, the hammer 98 becomes intermittent up-and-down motion, and the entire vibrating device 90 generates intermittent vibrations as if it were striking something it is in contact with. In other words, the vibrating device 90 has a motor 92 and the like as vibration sources as its vibrating part.

[0102] The clamping device 9 in Figure 17 is an example that uses a vibrating device 90 powered by a motor 92 as shown in Figures 15 and 16, and is an example in which the vibrating device 90 is attached to a commercially available clamping part 110, which is a pair of tweezers. In the example in Figure 17, the vibrating device 90 is attached to the end of the clamping part 110 opposite to the clamping fins 112 and 114 for ease of operation, but it is not limited to this position. The vibrating device 90 is fixed to the tweezers fixing part 94b provided on the clamping part 110 side via a vibrating device fixing part 94a. The vibrating device 90 has a motor 92 that vibrates the clamping part 110 (clamping fins 112 and 114), and its structure is as described above. It is preferable that the vibrating device 90 be detachable from the clamping part 110.

[0103] According to the clamping devices 1 to 9 of the present invention with such configuration, by applying vibration to the clamping parts 100, 110, 120, 140, 160 or and the clamping fins 102, 104, 112, 114, 122, 124, 142, 144, 162, 164, the clamped minute component P can be released without being affected by van der Waals forces, and the minute component P can be moved to any location with less effort and time.

[0104] This invention allows for various embodiments and modifications without departing from the broad spirit and scope of the invention. Furthermore, the embodiments described above are for illustrative purposes only and do not limit the scope of the invention. In other words, the scope of the invention is indicated by the claims, not by the embodiments. Various modifications made within the scope of the claims and the equivalent scope of the meaning of the invention are considered to be within the scope of this invention. [Industrial applicability]

[0105] As described above, the present invention provides a clamping device and a vibrating device that enable the release of clamped minute parts without being affected by van der Waals forces, and that allow minute parts to be moved to any desired location with reduced effort and time. [Explanation of symbols]

[0106] 1... Clamping device 2... Clamping device 3... Clamping device 4... Clamping device 5... Clamping device 6... Clamping device 7... Clamping device 8... Clamping device 9... Clamping device 10... Vibration device 12...Solenoid 12a...coil 14...Hammerhead 14a····Movable core 14b...Spring 16...Leaf spring 20... Vibration device 22... Vibration device fixing part 24..Tweezers fixing part 40... Vibration device 42...Solenoid 42a...coil 44....Hammerhead 44a····Movable core 44b...Spring 46...Leaf spring 46a... Notch 50... Vibration device 52... cabinet 60... Vibration device 62...Solenoid 62a...coil 64...Hammerhead 64a····Movable core 64b...Spring 66... ​​cabinet 66a...Wall section 66b...Through hole 68. Vibration transmission means 68a...Other end 68b...Transmission section 68ba...One end 68c... Distance adjustment component 70... Vibration device 80... Vibration device 90... Vibration device 92....motor 92a... Rotation axis 92b····Eccentric cam 94·····Base 94a... Vibration device fixing part 94b...Tweezers fixing part 96...Hammer base 98...hammer 98a...Hammer rod 98b... Hammer end 98c... Hammerhead 98d...spring 100... Clipping part 102. Clamping fins 104. Clamping fins 110... Clipping part 112... Clamping fins 114. Clamping fins 120... Clipping part 122... Clamping fins 124... Clamping fins 126...Base 130... cabinet 132····3D camera 134. Laser emission lens for 3D camera 136... Macro camera 138...Light source for macro photography 140... Clipping part 142. Clamping fins 144.. Clamping fins 152...Base 154...Tweezers holder 156...Stepping motor 158...Sliding part 158a...Pressing part 160... Clipping part 162... Clamping fins 164. Clamping fins 170... Gripper section 172...Base 174...Touch sensor 176...Slide Stage 178... Spring

Claims

1. In a gripping device for grasping and lifting minute parts, A clamping portion having two pairs of clamping fins for holding the minute component, A vibrating part for applying vibration to the clamping part or the clamping fin, A clamping device characterized by comprising the following features.

2. The clamping device according to claim 1, characterized in that the vibrating part applies a rectangular wave vibration as the vibration to the clamping part and / or the clamping fin.

3. The clamping device according to claim 1, characterized in that the vibrating part applies continuous impact vibration as the vibration to the clamping part and the clamping fin.

4. The clamping device according to claim 2, characterized in that the frequency at which the vibrating part vibrates the clamping part and the clamping fins is 10 Hz to 200 Hz.

5. The clamping device according to claim 3, characterized in that the frequency at which the vibrating part vibrates the clamping part and the clamping fins is 10 Hz to 200 Hz.

6. The clamping device according to claim 2, characterized in that the vibrating part can vary the frequency of the vibration.

7. The clamping device according to claim 2, characterized in that the vibrating part can vary the intensity of the vibration.

8. The clamping device according to claim 2, characterized in that the vibrating part can vary the acceleration of the vibration.

9. The clamping device according to claim 3, characterized in that the vibrating part can vary the frequency of the vibration.

10. The clamping device according to claim 3, characterized in that the vibrating part can vary the intensity of the vibration.

11. The clamping device according to claim 3, characterized in that the vibrating part can vary the acceleration of the vibration.

12. The clamping device according to claim 4, characterized in that the vibrating part can vary the frequency of the vibration.

13. The clamping device according to claim 4, characterized in that the vibrating part can vary the intensity of the vibration.

14. The clamping device according to claim 4, characterized in that the vibrating part can vary the acceleration of the vibration.

15. The clamping device according to claim 5, characterized in that the vibrating part can vary the frequency of the vibration.

16. The clamping device according to claim 5, characterized in that the vibrating part can vary the intensity of the vibration.

17. The clamping device according to claim 5, characterized in that the vibrating part can vary the acceleration of the vibration.

18. The clamping device according to any one of claims 1 to 17, characterized in that the vibrating part has a hammer that extends and retracts, and the vibration is generated by the hammer striking it.

19. The clamping device according to claim 18, further comprising vibration transmission means for transmitting the vibrations generated by the hammer's strike to the clamping portion and / or the clamping fins.

20. The clamping device according to claim 19, characterized in that the vibration transmission means is a leaf spring.

21. The vibration transmission means has a transmission part that is slidable coaxially with the hammer, The vibration of the hammer is transmitted to one end of the transmission part, and the other end of the transmission part transmits the vibration to the clamping part and the clamping fins, The clamping device according to claim 19, characterized in that the distance between one end of the transmission unit and the hammer can be varied.

22. A vibration device for vibrating a clamping portion having two pairs of clamping fins for gripping and picking up minute parts, characterized in that it comprises a vibrating portion for applying vibration to the clamping portion and / or the clamping fins.

23. The vibration device according to claim 22, characterized in that the vibrating part applies a rectangular wave vibration as the vibration to the clamping part and the clamping fin.

24. The vibration device according to claim 22, characterized in that the vibrating part applies continuous striking vibration as the vibration to the clamping part and the clamping fin.

25. The vibration device according to claim 23, characterized in that the frequency at which the vibrating part vibrates the clamping part and the clamping fins is 10 Hz to 200 Hz.

26. The vibration device according to claim 24, characterized in that the frequency at which the vibrating part vibrates the clamping part and / or the clamping fins is 10 Hz to 200 Hz.

27. The vibration device according to claim 23, characterized in that the vibrating part can vary the frequency of the vibration.

28. The vibration device according to claim 23, characterized in that the vibration section can vary the intensity of the vibration.

29. The vibration device according to claim 23, characterized in that the vibrating part can vary the acceleration of the vibration.

30. The vibration device according to claim 24, characterized in that the vibrating part can vary the frequency of the vibration.

31. The vibration device according to claim 24, characterized in that the vibration section can vary the intensity of the vibration.

32. The vibration device according to claim 24, characterized in that the vibrating part can vary the acceleration of the vibration.

33. The vibration device according to claim 25, characterized in that the vibrating part can vary the frequency of the vibration.

34. The vibration device according to claim 25, characterized in that the vibration section can vary the intensity of the vibration.

35. The vibration device according to claim 25, characterized in that the vibrating part can vary the acceleration of the vibration.

36. The vibration device according to claim 26, characterized in that the vibrating part can vary the frequency of the vibration.

37. The vibration device according to claim 26, characterized in that the vibration section can vary the intensity of the vibration.

38. The vibration device according to claim 26, characterized in that the vibrating part can vary the acceleration of the vibration.

39. The vibration device according to any one of claims 22 to 38, characterized in that the vibrating part has a hammer that extends and retracts, and the vibration is generated by striking with the hammer.

40. The vibration device according to claim 39, further comprising vibration transmission means for transmitting the vibration generated by the hammer's strike to the clamping portion and / or the clamping fins.

41. The vibration device according to claim 40, characterized in that the vibration transmission means is a leaf spring.

42. The vibration transmission means has a transmission part that is slidable coaxially with the hammer, The vibration of the hammer is transmitted to one end of the transmission part, and the other end of the transmission part transmits the vibration to the clamping part and the clamping fins, The vibration device according to claim 40, characterized in that the distance between one end of the transmission unit and the hammer can be varied.

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