Processing equipment

Abstract

If the spindle is stopped, even without instructions from the operator, it reduces the resources wasted on the processing equipment where the spindle has stopped. [Solution] A processing apparatus for processing a workpiece, comprising: a chuck table having a holding surface for holding the workpiece; a processing unit having a spindle on which a processing tool for processing the workpiece is attached to the tip; a rotation detector for detecting whether or not the spindle is rotating; a controller having memory and a processor; and a control unit for performing predetermined processing to completely stop predetermined functions that are used while the spindle is rotating but not used when the spindle is stopped, or to perform predetermined functions to a limited extent, wherein the controller is equipped with a command unit that commands the control unit to perform predetermined processing when the rotation detector detects that the rotation of the spindle has stopped.

Description

Technical Field

[0001] The present invention relates to a processing apparatus for processing a workpiece.

Background Art

[0002] In the manufacturing process of semiconductor device chips, processing apparatuses such as grinding apparatuses (see, for example, Patent Document 1) and cutting apparatuses (see, for example, Patent Document 2) are used. The grinding apparatus has a spindle arranged substantially parallel in the vertical direction, and a grinding wheel is attached to the lower end of this spindle. The grinding apparatus grinds and thins a workpiece such as a semiconductor wafer with a grinding stone.

[0003] The cutting apparatus has a spindle arranged substantially perpendicular in the vertical direction. An annular cutting blade is attached to the tip of this spindle. The cutting apparatus cuts the workpiece with the cutting blade along a division planned line set on the workpiece to divide the workpiece into individual chips.

[0004] In processing apparatuses such as grinding apparatuses and cutting apparatuses, during the processing of a workpiece, various mechanisms necessary for performing the processing are operating. One of the mechanisms necessary for performing the processing is a suction mechanism for sucking mist containing processing chips. The suction mechanism has, for example, a duct connected to the processing apparatus and a suction source provided outside the processing apparatus.

[0005] During the processing of the workpiece, the grinding wheel and the cutting blade are arranged in a processing chamber partitioned by a processing chamber cover or the like. Mist containing processing chips generated by using processing water such as pure water during the processing of the workpiece is sucked by the suction source and discharged from the processing chamber to the outside.

[0006] After the processing is completed, for example, when the operator gives an instruction to the processing apparatus to stop the rotation of the spindle and the supply of the processing water, if the negative pressure generated by the suction source continues to be transmitted to the processing chamber, that much resources such as the power required for the operation of the suction source will be wasted.

[0007] As described above, various mechanisms that function during the machining of a workpiece do not automatically stop working; the operator must individually stop each mechanism. In the example of the suction mechanism mentioned above, the function of negative pressure transmission from the suction source to the machining chamber must be stopped by closing the on / off valve installed in the duct connecting the machining chamber and the suction source. Therefore, this is time-consuming for the operator.

[0008] If the operator forgets to issue a command to stop a function that is being performed while the workpiece is being processed, the function of the mechanism that was not stopped will continue to operate, resulting in the wasteful use of resources such as electricity. [Prior art documents] [Patent Documents]

[0009] [Patent Document 1] Japanese Patent Publication No. 2003-300155 [Patent Document 2] Japanese Patent Publication No. 2013-222834 [Overview of the Initiative] [Problems that the invention aims to solve]

[0010] This invention has been made in view of the aforementioned problems, and aims to reduce the wasteful consumption of resources for a processing device when the spindle is stopped, even without instructions from the operator. [Means for solving the problem]

[0011] According to one aspect of the present invention, a processing apparatus for processing a workpiece is provided, comprising: a chuck table having a holding surface for holding the workpiece; a processing unit having a spindle on which a processing tool for processing the workpiece is attached to the tip; a rotation detector for detecting whether or not the spindle is rotating; a controller having a memory and a processor; and a control unit for performing predetermined processing to completely stop a predetermined function that is used while the spindle is rotating but not used when the spindle is stopped, or to perform the predetermined function to a limited extent, wherein the controller is provided with a command unit that commands the control unit to perform the predetermined processing when the rotation detector detects that the rotation of the spindle has stopped.

[0012] Preferably, the processing apparatus further comprises a chuck table, a processing chamber cover covering at least the tip of the spindle, an exhaust duct with one end connected to the processing chamber cover and the other end connected to a suction source provided outside the processing apparatus, and an on-off valve provided in the exhaust duct for communicating and blocking a flow path connecting the internal space of the processing chamber cover and the suction source, wherein the predetermined function is a function to draw suction from the internal space, the control unit is an on-off valve control unit that controls the opening and closing of the on-off valve, and when the rotation detector detects that the rotation of the spindle has stopped, the command unit commands the on-off valve control unit to block the flow path with the on-off valve.

[0013] Preferably, the processing apparatus further comprises a chuck table, a processing chamber cover covering at least the tip of the spindle, an exhaust duct with one end connected to the processing chamber cover and the other end connected to a suction source provided outside the processing apparatus, an on-off valve provided in the exhaust duct for opening and closing a flow path connecting the internal space of the processing chamber cover and the suction source, and a hygrometer for measuring the humidity in the internal space of the processing chamber cover, wherein the predetermined function is a function for drawing in the internal space, the control unit is an on-off valve control unit for controlling the opening and closing of the on-off valve, and when the rotation detector detects the cessation of the rotation of the spindle and the humidity of the internal space of the processing chamber cover measured by the hygrometer falls below a predetermined value, the command unit commands the on-off valve control unit to close the flow path with the on-off valve.

[0014] Preferably, the processing apparatus further comprises a processing water supply unit that supplies processing water to a processing tool attached to the tip of the spindle, wherein the predetermined function is the function of supplying the processing water to the processing tool, the control unit is a processing water flow rate control unit that controls the flow rate of the processing water supplied from the processing water supply unit to the processing tool, and when the rotation detector detects that the rotation of the spindle has stopped, the command unit commands the processing water flow rate control unit to stop supplying the processing water or to reduce the flow rate of the processing water.

[0015] Preferably, the processing unit comprises a spindle, a spindle housing that rotatably accommodates a part of the spindle, and an air supply passage for supplying air between the part of the spindle and the spindle housing, wherein the predetermined function is the function of supplying air to the air supply passage, the control unit is an air flow control unit that controls the flow rate of the air supplied to the spindle housing, and when the rotation detector detects that the rotation of the spindle has stopped, the command unit commands the air flow control unit to stop supplying the air or to reduce the flow rate of the air.

[0016] Preferably, the processing unit includes a spindle, a spindle housing that rotatably accommodates a part of the spindle, and a cooling water flow path for supplying cooling water to the spindle housing. The predetermined function is a function of supplying the cooling water to the spindle housing. The control unit is a cooling water flow rate control unit that controls the flow rate of the cooling water supplied to the spindle housing. When the rotation detector detects the stop of the spindle rotation, the command unit commands the cooling water flow rate control unit to stop the supply of the cooling water or to reduce the flow rate of the cooling water.

Advantages of the Invention

[0017] When a rotation detector that detects the presence or absence of spindle rotation detects the stop of spindle rotation, the command unit of the controller in the processing apparatus according to one aspect of the present invention commands the control unit to perform a predetermined process.

[0018] In response to a command from the command unit, the control unit performs a predetermined process of completely stopping a predetermined function that is used during spindle rotation but not used during spindle stop, or of limitedly exerting the predetermined function.

[0019] Therefore, even without an instruction from an operator when the spindle rotation is stopped, resources that are wasted for the processing apparatus with the spindle stopped can be reduced.

Brief Description of the Drawings

[0020] [Figure 1] It is a perspective view of a cutting apparatus. [Figure 2] FIG. 2(A) is an enlarged view of a cutting unit and a chuck table, and FIG. 2(B) is a perspective view showing an enlarged blade cover unit. [Figure 3] It is a diagram showing a processing water flow rate control unit. [Figure 4] It is a partial cross-sectional side view of a cutting unit. [Figure 5]FIG. 5(A) is a block diagram showing an air flow control unit, and FIG. 5(B) is a block diagram showing a cooling water flow control unit. [Figure 6] It is a partial cross-sectional side view of a cutting device. [Figure 7] FIG. 7(A) is a perspective view showing a cross-section of an exhaust duct when the valve body is in a fully closed state, FIG. 7(B) is a front view of the cross-section of the exhaust duct when the valve body is in a fully closed state, FIG. 7(C) is a perspective view showing a cross-section of the exhaust duct when the valve body is in a fully open state, and FIG. 7(D) is a front view of the cross-section of the exhaust duct when the valve body is in a fully open state. [Figure 8] It is a perspective view of a grinding device. [Figure 9] It is a partial cross-sectional side view of a grinding device.

MODE FOR CARRYING OUT THE INVENTION

[0021] (First Embodiment) An embodiment according to an aspect of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a cutting device (i.e., a machining device) 2. In FIG. 1, a part of the components is shown as functional blocks. The X-axis, Y-axis, and Z-axis shown in FIG. 1 are perpendicular to each other.

[0022] The X-axis is parallel to the machining feed direction, the Y-axis is parallel to the indexing feed direction, and the Z-axis is parallel to the vertical direction and the height direction. In this specification, the direction parallel to the X-axis may be referred to as the X-axis direction, the direction parallel to the Y-axis may be referred to as the Y-axis direction, and the direction parallel to the Z-axis may be referred to as the Z-axis direction.

[0023] The cutting device 2 is used when cutting a workpiece 11. The workpiece 11 has, for example, a disk-shaped wafer formed of a semiconductor material such as silicon (Si), silicon carbide (SiC), or gallium nitride (GaN). However, there is no limitation on the material, shape, structure, size, etc. of the wafer.

[0024] The surface 11a of the workpiece 11 is divided into multiple rectangular regions by dividing lines arranged in a grid pattern. Devices such as ICs (Integrated Circuits) are formed in each rectangular region. There are no restrictions on the type, number, shape, structure, size, or arrangement of the devices.

[0025] The central part of a tape 13, which is made of a substantially transparent resin and has a larger diameter than the workpiece 11, is attached to the back surface 11b of the workpiece 11. One side of an annular frame 15 made of metal is attached to the outer circumference of the tape 13.

[0026] In other words, the workpiece 11 is supported by the annular frame 15 via the tape 13. The workpiece 11, tape 13, and annular frame 15 form a workpiece unit 17. In the cutting device 2, the workpiece 11 is transported, cut, etc., in the form of the workpiece unit 17.

[0027] The cutting device 2 is equipped with a base such as a frame (not shown) that supports each structure. The base is covered with a metal panel 4, and the base and panel 4 constitute the housing of the cutting device 2. Inside the housing, a processing chamber (i.e., internal space) 6a is formed, defined by a processing chamber cover 6 (see Figure 6), etc.

[0028] A cutting unit (i.e., a machining unit) 10 for cutting (i.e., machining) the workpiece 11 is located in the machining chamber 6a. The cutting unit 10 has a spindle housing 30. A portion of a cylindrical spindle 32 (see Figure 4) is rotatably housed in the spindle housing 30.

[0029] A cutting blade (i.e., a machining tool) 34 for machining the workpiece 11 is mounted on the tip 32a of the spindle 32 (see Figure 4). As shown in Figure 1, the cutting unit 10 is movable in the Y-axis and Z-axis directions by the Y-axis and Z-axis direction movement mechanism 12.

[0030] The Y-axis and Z-axis movement mechanism 12 has a pair of Y-axis guide rails (not shown) arranged along the Y-axis. A Y-axis movement plate (not shown) is slidably mounted on the pair of Y-axis guide rails along the Y-axis.

[0031] Between a pair of Y-axis guide rails is a first screw shaft (not shown) positioned along the Y axis. A nut (not shown) is provided on the back surface of the Y-axis moving plate, and the nut is rotatably connected to the first screw shaft via a plurality of balls (not shown).

[0032] A first drive source (not shown), such as a servo motor or a stepping motor, is provided at one end of the first screw shaft. A pair of Y-axis guide rails, a Y-axis moving plate, a nut, the first screw shaft, and the first drive source constitute a ball screw type Y-axis moving mechanism.

[0033] When the first drive source is activated, the Y-axis moving plate moves along the Y axis. The Y-axis moving mechanism functions as an indexing feed mechanism that moves the cutting unit 10 in the indexing feed direction. A pair of Z-axis guide rails (not shown) are provided on the surface of the Y-axis moving plate.

[0034] A pair of Z-axis guide rails are fitted with a Z-axis movable plate 14 that is slidable along the Z-axis. Between the pair of Z-axis guide rails, a second screw shaft (not shown) is provided, which is positioned along the Z-axis.

[0035] A nut portion (not shown) is provided on the back surface of the Z-axis moving plate 14, and the nut portion is rotatably connected to the second screw shaft via a plurality of balls (not shown). A second drive source (not shown), such as a servo motor or a stepping motor, is provided at one end of the second screw shaft.

[0036] A pair of Z-axis guide rails, a Z-axis moving plate 14, a nut, a second screw shaft, a second drive source, etc., constitute a ball screw type Z-axis moving mechanism. When the second drive source is operated, the Z-axis moving plate 14 moves along the Z axis.

[0037] The Z-axis movement mechanism functions as a cutting feed mechanism that moves the cutting unit 10 in the cutting feed direction. The spindle housing 30 and a microscope camera unit (not shown) are fixed to the lower end of the Z-axis movement plate 14.

[0038] The microscope camera unit is used for positioning the cutting blade 34, checking the kerf, etc. The microscope camera unit includes a light source such as an LED, a focusing lens, and an image sensor such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor.

[0039] Below the cutting unit 10, a chuck table 16 is provided for suction holding the workpiece 11. The chuck table 16 and other components will now be described with reference to Figure 6. As shown in Figure 6, the chuck table 16 has a disc-shaped frame 18a made of non-porous metal.

[0040] A disc-shaped recess, smaller in diameter than the outer diameter of the frame 18a, is provided in the center of the upper surface of the frame 18a. A disc-shaped porous plate 18b, made of porous ceramics, is fixed to this recess using an adhesive or the like. The upper surfaces of the frame 18a and the porous plate 18b are substantially flush, forming a holding surface 16a substantially parallel to the XY plane.

[0041] A suction source 20, such as a vacuum pump, is connected to the porous plate 18b via a predetermined flow path including a rotary joint (not shown). A solenoid valve (not shown) is provided in the predetermined flow path, and when the solenoid valve is opened, the negative pressure generated by the suction source 20 is transmitted to the upper surface of the porous plate 18b.

[0042] On the outer side of the frame 18a in the radial direction of the holding surface 16a, a plurality of clamp units 16b are provided at approximately equal intervals along the circumferential direction of the frame 18a. Each clamp unit 16b has a base portion that supports the annular frame 15 and a claw portion that holds the annular frame 15. The claw portion is connected to the base portion and is opened and closed by an air actuator.

[0043] When the workpiece unit 17 is placed on the holding surface 16a, the workpiece 11 is held in place by suction on the holding surface 16a via the tape 13, and the annular frame 15 is clamped by each clamping unit 16b (see Figure 2(A)).

[0044] The chuck table 16 is held by a table base 22. A rotating shaft 24 is fixed to the bottom of the table base 22. The longitudinal direction of the rotating shaft 24 is positioned approximately parallel to the Z-axis direction. Rotational power is transmitted to the rotating shaft 24 from a rotational drive source (not shown), such as a servo motor or a stepping motor.

[0045] The chuck table 16, table base 22, rotary shaft 24, and rotational drive source are supported by an X-axis movement mechanism (not shown). The X-axis movement mechanism is fixed to the base of the cutting device 2 and has a pair of X-axis guide rails arranged along the X-axis.

[0046] A pair of X-axis guide rails are fitted with X-axis movable plates that are slidable along the X-axis. A third screw shaft is provided between the pair of X-axis guide rails, positioned along the X-axis. A nut is provided on the back surface of the X-axis movable plate. The nut is rotatably connected to the third screw shaft via a plurality of balls (not shown).

[0047] A third drive source, such as a servo motor or a stepping motor, is provided at one end of the third screw shaft. When the third drive source is activated, the X-axis moving plate moves along the X-axis. The X-axis moving mechanism functions as a machining feed mechanism that moves the chuck table 16 in the machining feed direction.

[0048] A first cover member 26, which has a rectangular outer shape, is provided around the table base 22. In addition, bellows-shaped second cover members 28, which can be extended and retracted in the X-axis direction, are provided on both sides of the first cover member 26 in the X-axis direction (see Figure 1). Note that in Figure 1, only one of the second cover members 28 is shown.

[0049] The first cover member 26 and the pair of second cover members 28 reduce contamination of the X-axis movement mechanism by machining fluid (i.e., cutting fluid) 40 containing machining debris generated during cutting. The cutting unit 10 will now be described in more detail with reference to Figures 2(A) to 5(B).

[0050] Figure 2(A) is an enlarged view of the cutting unit 10 and the chuck table 16, and in particular shows the cutting of the workpiece 11 held by the chuck table 16 with the cutting blade 34. A blade cover unit 36 ​​that covers the cutting blade 34 is attached to the tip of the spindle housing 30.

[0051] Figure 2(B) is an enlarged perspective view of the blade cover unit 36. The blade cover unit 36 ​​has a pair of nozzle units 38 arranged to sandwich the cutting blade 34 in the Y-axis direction.

[0052] Each nozzle unit 38 has a cylindrical tube section extending along the X-axis, and multiple openings 38a (see Figure 2(A)) are discretely provided in the X-axis direction on the side surface of the tube section facing the cutting blade 34. Processing water 40 is sprayed from each of these openings 38a.

[0053] A pair of nozzle units 38 supply processing water 40, such as pure water, to the cutting edge of the cutting blade 34. More specifically, they supply processing water 40 to the contact area (i.e., processing area) between the cutting edge of the cutting blade 34 and the workpiece 11. The nozzle units 38 are also called cooler nozzles.

[0054] In the blade cover unit 36, a spray nozzle 42 is provided at a different position from the nozzle unit 38. The spray nozzle 42 supplies processing water 40 to the outer peripheral edge of the cutting edge of the cutting blade 34 from the radially outer side of the cutting blade 34. The pair of nozzle units 38 and spray nozzle 42 constitute a processing water supply unit 44.

[0055] Near the spray nozzle 42, two shower nozzles 46 are provided to supply processing water 40, positioned approximately perpendicular to the holding surface 16a. The two shower nozzles 46 are arranged side by side in the Y-axis direction when viewed in the XY plane. Each shower nozzle 46 supplies processing water 40 to the workpiece 11 during cutting.

[0056] The flow rate of the processing water 40 supplied to the pair of nozzle units 38, the spray nozzle 42, and the two shower nozzles 46 is controlled by the processing water flow rate control unit (i.e., the control unit) 50 (see Figure 3). In other words, the flow rate of the processing water 40 supplied from the processing water supply unit 44 to the cutting blade 34 is controlled by the processing water flow rate control unit 50.

[0057] Figure 3 shows the processing water flow rate control unit 50. In Figure 3, some of the components are shown as functional blocks. Note that the processing water supply source 52 is not part of the cutting device 2, but is provided separately from the cutting device 2, which is indicated by a dashed line in Figure 3.

[0058] For example, the processing water supply source 52 is a pure water recycling device installed near the cutting device 2. It supplies pure water to the cutting device 2, recovers the used pure water from the cutting device 2, purifies it using a filter or the like, and then supplies the purified pure water back to the cutting device 2.

[0059] Furthermore, for example, the processing water supply source 52 is a pure water device or pure water system installed in a building 2a (see Figure 6) of a factory, research institute, etc., and includes a filtration device for filtering tap water or other water, a tank for storing the filtered water, a pump for sending water from the tank to the cutting device 2, etc.

[0060] The processing water flow rate control unit 50 has an on-off valve 54. The on-off valve 54 is, for example, a solenoid valve, and its opening and closing is controlled by a controller 100, which will be described later. Downstream of the on-off valve 54, three flow paths 56a, 56b, and 56c are provided.

[0061] The flow path 56a is equipped with a flow meter 58a and a proportional control valve 60a. The flow meter 58a is, for example, a volumetric flow meter, but may also be a mass flow meter, Coriolis flow meter, vortex flow meter, ultrasonic flow meter, or turbine flow meter. The proportional control valve 60a is a solenoid valve that can adjust the flow rate by continuously adjusting the valve opening between 0% and 100%.

[0062] A predetermined flow rate is set in the proportional control valve 60a by command from the controller 100. The proportional control valve 60a has a predetermined control circuit (not shown), such as an IC, and adjusts the valve opening degree to achieve the predetermined flow rate set by command from the controller 100, based on the flow rate of the processed water 40 measured by the flow meter 58a.

[0063] The flow path 56a is connected to a pair of nozzle units 38. The pair of nozzle units 38 are supplied with processed water 40 at a predetermined flow rate set by the proportional control valve 60a from the processed water supply source 52.

[0064] Similarly, a flow meter 58b and a proportional control valve 60b are provided in the flow path 56b. The flow path 56b is connected to the spray nozzle 42. Processed water 40 at a predetermined flow rate set in the proportional control valve 60b is supplied to the flow path 56b from the processed water supply source 52.

[0065] Similarly, a flow meter 58c and a proportional control valve 60c are provided in the flow path 56c. The flow path 56c is connected to two shower nozzles 46 (see Figure 2(B)). Processed water 40 at a predetermined flow rate set in the proportional control valve 60c is supplied to the flow path 56c from the processed water supply source 52.

[0066] Figure 4 is a partial cross-sectional side view of the cutting unit 10. For the sake of explanation, a cutting blade 34 is attached to the tip 32a of the spindle 32 shown in Figure 4. However, the cutting blade 34 is a consumable item, and when the cutting device 2 is manufactured or sold, the cutting blade 34 may not be attached to the tip 32a of the spindle 32.

[0067] The cutting blade 34 shown in Figure 4 is a so-called washer-type cutting blade (i.e., a hubless blade), and is fixed to the tip 32a of the spindle 32 while being held between the receiving flange portion 62 and the retaining flange portion 64.

[0068] However, the cutting blade 34 may be a so-called hub blade. The hub blade has an annular base made of metal and an annular cutting edge fixed to one surface of the base and having an outer diameter larger than the outer diameter of the base.

[0069] A rotor 66a is fixed to the base end of the spindle 32. A stator 66b is provided around the rotor 66a. The rotor 66a and stator 66b constitute a motor 66 that rotates the spindle 32. Power supplied to the stator 66b from the drive power supply unit 70 (see Figure 6) causes the rotor 66a and spindle 32 to rotate together.

[0070] In this embodiment, a rotary encoder 68 for measuring the rotational speed of the rotor 66a is provided near the motor 66. In Figure 4, the rotary encoder 68 is shown as a simplified functional block. Also, for the sake of explanation, the rotary encoder 68 is shown outside the spindle housing 30, but in reality, it is located inside the spindle housing 30 (see Figure 6).

[0071] The rotary encoder 68 is, for example, an incremental type and includes a disk with slits that rotates together with the rotor 66a, a light-emitting element that illuminates the disk, and a light-receiving element that receives the light illuminated by the light-emitting element and passing through the slits in the disk. The rotary encoder 68 may be optical or magnetic.

[0072] Incidentally, the rotational speed of the rotor 66a and spindle 32 may be measured by a rotational speed measuring device (not shown) such as an electromagnetic pickup sensor or an eddy current sensor instead of the rotary encoder 68.

[0073] The spindle housing 30 is provided with an air supply passage 72 and an air discharge passage 74. The air supply passage 72 has a plurality of branch passages 72a provided within the spindle housing 30. One branch passage 72a is connected to one opening 72b provided in the inner wall 30a.

[0074] Multiple openings 72b are provided at approximately equal intervals along the longitudinal and circumferential directions of the spindle 32. Air 78, having passed through multiple branching paths 72a, is injected from each opening 72b onto the outer circumferential surface of the spindle 32.

[0075] Air 78 is supplied from multiple openings 72b located in the inner wall 30a between a portion of the rotating spindle 32 and the inner wall 30a of the spindle housing 30, thereby forming a thin layer of air (i.e., a radial air bearing) between the spindle 32 and the inner wall 30a.

[0076] Near the tip of the spindle 32, a flange portion 32b with a larger diameter than the spindle 32 is provided concentrically with the spindle 32. The inner wall 30a of the spindle housing 30 is provided with an annular recess 30b that accommodates the flange portion 32b.

[0077] Multiple openings 72b of multiple branch passages 72a are provided in the annular recess 30b at approximately equal intervals along the circumferential direction of the annular recess 30b, facing both annular surfaces of the flange portion 32b that are located on opposite sides of the flange portion 32b in the thickness direction of the flange portion 32b.

[0078] Air 78 is supplied between the rotating flange portion 32b (i.e., part of the spindle 32) and the annular recess 30b (i.e., the spindle housing 30) from a plurality of openings 72b located in the annular recess 30b. As a result, a thin layer of air (i.e., a thrust air bearing) is formed between the flange portion 32b and the annular recess 30b.

[0079] The air 78 used to form the air bearings (i.e., radial air bearings and thrust air bearings) is mainly discharged outside the spindle housing 30 through the air discharge passage 74.

[0080] The flow rate of air 78 supplied to the air supply passage 72 is controlled by the air flow control unit (i.e., control unit) 80 (see Figure 5(A)). In other words, the flow rate of air 78 supplied from the air supply source 82 (see Figure 5(A)) to the spindle housing 30 is controlled by the air flow control unit 80.

[0081] Furthermore, if the spindle 32 is rotated without an air bearing, the spindle 32 will come into contact with the inner wall 30a, causing problems such as the spindle 32 scraping the inner wall 30a. Therefore, when the spindle 32 is rotated, it is necessary to form an air bearing.

[0082] Figure 5(A) is a block diagram showing the air flow control unit 80. Note that the air supply source 82 is not part of the cutting device 2, but is provided separately from the cutting device 2, as indicated by the dashed line near the air supply source 82.

[0083] For example, the air supply source 82 is installed in a building 2a such as a factory or research institute, and includes a compressor (not shown) that takes in air from the atmosphere and compresses it, a tank (not shown) that stores the compressed air, and a filter that removes dust and other debris.

[0084] The air flow control unit 80 has an on-off valve 84. The on-off valve 84 is, for example, a solenoid valve, and its opening and closing is controlled by the controller 100. Downstream of the on-off valve 84, a flow path 86 is provided. The flow path 86 is equipped with a flow meter 88 and a proportional control valve 90.

[0085] The flow meter 88 is, for example, a mass flow meter. The proportional control valve 90 is a solenoid valve that can adjust the flow rate by continuously adjusting the valve opening between 0% and 100%. A predetermined flow rate is set in the proportional control valve 90 by command from the controller 100.

[0086] The proportional control valve 90 has a predetermined control circuit (not shown) including an IC, and adjusts its opening degree to achieve a predetermined flow rate set by a command from the controller 100 based on the flow rate of air 78 measured by the flow meter 88. A mass flow controller may be used instead of the flow meter 88 and the proportional control valve 90.

[0087] The flow path 86 is connected to the air supply passage 72 (see Figure 4) of the spindle housing 30. Air 78 at a predetermined flow rate set by the proportional control valve 90 is supplied to the air supply passage 72 from the air supply source 82. In this way, the air supply source 82 is connected to the air supply passage 72 via the flow path 86.

[0088] Now, let's return to Figure 4. The spindle housing 30 is provided with a cooling water passage 74a for supplying cooling water 78a to the spindle housing 30. The cooling water passage 74a is located radially to the spindle 32, outside of the air supply passage 72 and the air discharge passage 74.

[0089] The cooling water channel 74a is formed spirally within the spindle housing 30 so as to revolve around the spindle 32. The cooling water 78a flows around almost the entire outer circumference of the spindle housing 30, thereby cooling the heat generated within the spindle housing 30.

[0090] The flow rate of the cooling water 78a supplied to the cooling water passage 74a is controlled by the cooling water flow rate control unit (i.e., control unit) 80a (see Figure 5(B)). In other words, the flow rate of the cooling water 78a supplied from the cooling water supply source 82a (see Figure 5(B)) to the spindle housing 30 is controlled by the cooling water flow rate control unit 80a.

[0091] Figure 5(B) is a block diagram showing the cooling water flow rate control unit 80a. Note that the cooling water supply source 82a is not part of the cutting device 2, but is provided separately from the cutting device 2, as indicated by the dashed line near the cooling water supply source 82a.

[0092] For example, the cooling water supply source 82a is a water-cooled chiller, also known as a cooling water circulation device. The cooling water supply source 82a includes a heat exchanger for cooling or heating the circulating cooling water 78a, a storage tank for storing the cooling water 78a adjusted to a predetermined temperature by the heat exchanger, and a pump for supplying the cooling water 78a adjusted to a predetermined temperature from the storage tank.

[0093] A cooling water supply source 82a is connected to the cooling water flow path 74a via a flow path 86a. The cooling water flow control unit 80a includes an on / off valve 84a, a flow path 86a, a flow meter 88a, and a proportional control valve 90a.

[0094] The on-off valve 84a, flow path 86a, flow meter 88a, and proportional control valve 90a in the cooling water flow control unit 80a correspond to the on-off valve 84, flow path 86, flow meter 88, and proportional control valve 90 in the air flow control unit 80, respectively, so redundant explanations are omitted.

[0095] Figure 6 is a partial cross-sectional side view of the cutting device 2. The cutting device 2 has a drive power supply unit 70 that supplies power to the stator 66b described above. The drive power supply unit 70 converts the voltage supplied from the commercial power supply to a frequency and voltage value suitable for driving the cutting device 2, and then applies the converted AC voltage to the stator 66b. This causes the spindle 32 to rotate at high speed.

[0096] A touch panel display is provided on one side of panel 4 of the cutting device 2 (see Figure 1). The touch panel display is, for example, a touch-panel liquid crystal display, and serves as both an input device for the operator to input instructions to the controller 100 and a display device for displaying images acquired by the microscope camera unit.

[0097] Alternatively, a display with only display functionality may be provided instead of a touch panel display. However, in this case, a user interface such as a keyboard, mouse, trackball, or joystick will be provided separately as an input device.

[0098] The cutting device 2 has a controller 100. For the sake of explanation, although the controller 100 is shown outside the cutting device 2 in Figure 1 above, the controller 100 is housed inside the casing of the cutting device 2.

[0099] The controller 100 controls the operation of the Y-axis and Z-axis movement mechanism 12, the microscope camera unit, the rotation drive source for the chuck table 16, the clamp unit 16b, the solenoid valve provided in the flow path between the suction source 20 and the chuck table 16, the X-axis movement mechanism, the motor 66, the processing water flow rate control unit 50, the drive power supply unit 70, the air flow rate control unit 80, the cooling water flow rate control unit 80a, the touch panel display, and the like.

[0100] The controller 100 is composed of a computer having, for example, a processor 100a, represented by a CPU (Central Processing Unit), and memory 100b (see Figure 1). The memory 100b includes a main memory such as DRAM (Dynamic Random Access Memory) and an auxiliary memory such as flash memory, a hard disk drive, or a solid-state drive.

[0101] The auxiliary storage device stores software containing a predetermined program. The functions of the controller 100 are realized by operating the processor 100a and other components according to this software. The printed circuit board (not shown) on which the processor 100a is installed is provided with a predetermined circuit that functions as a rotation detector 102 for detecting whether or not the spindle 32 is rotating.

[0102] In this embodiment, the predetermined circuit that functions as the rotation detector 102 is configured as an FPGA (Field-Programmable Gate Array), but it is not limited to an FPGA and may be configured as an ASIC (Application Specific Integrated Circuit).

[0103] The rotation detector 102 receives a signal from the rotary encoder 68 that includes information indicating the pulse speed (i.e., the frequency [Hz] of the pulse signal) representing the rotation speed of the spindle 32. It then transmits the signal containing this information to the controller 100.

[0104] However, when the spindle 32 stops, the rotation detector 102 receives a signal from the rotary encoder 68 that includes information indicating that the pulse speed is 0 [Hz]. When the rotation detector 102 receives a signal from the rotary encoder 68 indicating that the pulse speed is 0 [Hz], it outputs a signal to the controller 100 indicating that it has detected the cessation of the rotation of the spindle 32.

[0105] Incidentally, an opening 6b is provided on the side of the processing chamber cover 6, and one end of a cylindrical exhaust duct 104 is connected to this opening 6b. The other end of the exhaust duct 104 is connected to a suction source 106 located outside the cutting device 2.

[0106] The suction source 106 is installed in the building 2a of a factory, research institute, etc., and is a suction device that performs suction using a rotating fan, for example. In Figure 6, the boundary between the cutting device 2 and the building 2a is shown by a dashed line near the suction source 106. An on-off valve 108 is provided in the exhaust duct 104. Note that the on-off valve 108 is simplified in Figure 6.

[0107] The on-off valve 108 is, for example, an electrically operated butterfly valve, which opens and closes the flow path 104a connecting the processing chamber 6a and the suction source 106. Note that the on-off valve 108 is not limited to a butterfly valve, but may be a globe valve, needle valve, ball valve, gate valve, etc.

[0108] Figure 7(A) is a perspective view showing a cross-section of the exhaust duct 104 when the valve body 108a of the on-off valve 108 is in the fully closed position, and Figure 7(B) is a front view of the cross-section of the exhaust duct 104 when the valve body 108a of the on-off valve 108 is in the fully closed position.

[0109] Furthermore, Figure 7(C) is a perspective view showing a cross-section of the exhaust duct 104 when the valve body 108a of the on-off valve 108 is in the fully open position, and Figure 7(D) is a front view of the cross-section of the exhaust duct 104 when the valve body 108a of the on-off valve 108 is in the fully open position.

[0110] The on / off valve 108 has a valve body (i.e., a disc) 108a having an outer diameter approximately the same as the inner diameter of the exhaust duct 104. The above-mentioned communication and shut-off are achieved by the rotation of the valve body 108a around a predetermined rotation axis 108b.

[0111] The on-off valve 108 has a motor (not shown) that rotates the rotating shaft 108b. The operation of this motor (i.e., the opening and closing of the on-off valve 108) is controlled by the on-off valve control unit (i.e., control unit) 110 (see Figure 6).

[0112] The valve control unit 110 is, for example, a first program stored in the auxiliary storage device of memory 100b, but it may also be a circuit such as an FPGA or AISC provided on a printed circuit board on which the processor 100a is installed.

[0113] Furthermore, the first program executed by processor 100a may be stored in a non-temporary tangible recording medium such as a USB (Universal Serial Bus) memory, optical disk, SD memory card, or HDD (Hard Disk Drive) instead of an auxiliary storage device.

[0114] The machining chamber cover 6 is made of hard resin, metal, or the like. As shown in Figure 6, the machining chamber cover 6 covers the chuck table 16, the spindle housing 30 (i.e., at least the tip portion 32a of the spindle 32), etc., and together with the first cover member 26, the second cover member 28, etc., defines the machining chamber (i.e., the internal space) 6a.

[0115] A hygrometer 112 for measuring humidity in the processing chamber 6a is fixed to the inner wall of the processing chamber cover 6, on the side opposite to the side where the opening 6b is provided in the Y-axis direction, at approximately the same height as the opening 6b.

[0116] The hygrometer 112 is, for example, a capacitive humidity sensor, an electrical resistance humidity sensor, or a porous ceramic humidity sensor, but is not particularly limited. It is preferable that the hygrometer 112 be located as far away from the opening 6b as possible.

[0117] During cutting of the workpiece 11, a mist-like processing water 40 containing fine processing debris floats in the processing chamber 6a. The processing chamber 6a is exhausted through the exhaust duct 104, but it is preferable to reduce the amount of mist-like processing water 40 floating in the processing chamber 6a as much as possible when cutting is completed.

[0118] By installing the hygrometer 112 at a position away from the opening 6b in the Y-axis direction of the processing chamber 6a, it is possible to more accurately detect when the humidity in the processing chamber 6a has decreased to a predetermined value compared to when the hygrometer 112 is installed near the opening 6b.

[0119] The controller 100 has a command unit 100c. The command unit 100c is, for example, a second program stored in the auxiliary storage device of memory 100b, but it may also be a circuit such as an FPGA or AISC provided on the printed circuit board on which the processor 100a is installed.

[0120] Furthermore, the second program, which functions as the command unit 100c when executed by the processor 100a, may be stored in a non-temporary tangible recording medium such as a USB memory stick, optical disk, SD memory card, or HDD, instead of an auxiliary storage device.

[0121] When the rotation detector 102 detects that the rotation of the spindle 32 has stopped, the command unit 100c commands each control unit, such as the processing water flow rate control unit 50, the air flow rate control unit 80, the cooling water flow rate control unit 80a, and the on / off valve control unit 110, to perform predetermined processing.

[0122] Specifically, when the rotation detector 102 detects that the rotation of the spindle 32 has stopped, the command unit 100c commands the on-off valve control unit 110 to shut off the flow path 104a with the on-off valve 108.

[0123] Upon receiving a shutoff command, the on-off valve control unit 110 closes the valve body 108a of the on-off valve 108 completely (i.e., performs a predetermined process). This completely stops a predetermined function (i.e., the function of using the suction source 106 to suck the machining chamber 6a) that is used during cutting (i.e., while the spindle 32 is rotating) but not during non-cutting (i.e., while the spindle 32 is stopped).

[0124] Therefore, if the rotation of the spindle 32 is stopped, the suction of the machining chamber 6a can be stopped even without instructions from the operator. Since one suction source 106 is usually connected to multiple cutting devices 2, reducing the number of cutting devices 2 to be suctioned reduces the load on the suction source 106.

[0125] In other words, reducing the number of cutting devices 2 to be suctioned from N to (N-1) (where N is a natural number greater than or equal to 2) reduces the power and other resources used by the suction source 106 compared to operating the suction source 106 to reach a predetermined pressure within a predetermined time for N cutting devices 2. Consequently, the resources wasted for cutting devices 2 whose spindles 32 have been stopped can be reduced.

[0126] Of course, the command unit 100c may also command the on-off valve control unit 110 to perform a predetermined process to fully close the valve body 108a of the on-off valve 108 when the rotation detector 102 detects that the rotation of the spindle 32 has stopped and the humidity of the processing chamber 6a measured by the hygrometer 112 falls below a predetermined value.

[0127] In addition to stopping the rotation of the spindle 32, by continuing to suction the processing chamber 6a until the humidity of the processing chamber 6a falls below a predetermined value, the amount of processing water 40 adhering to the holding surface 16a, etc., can be reduced. Therefore, while the spindle 32 is stopped, the amount of processing debris (i.e., processing debris contained in the processing water 40) adhering to the holding surface 16a, the inner surface of the processing chamber 6a, etc. can be reduced.

[0128] Furthermore, when the rotation detector 102 detects that the rotation of the spindle 32 has stopped, the command unit 100c commands the processing water flow rate control unit 50 to stop supplying the processing water 40, or commands the processing water flow rate control unit 50 to reduce the flow rate of the processing water 40.

[0129] Furthermore, the command unit 100c commanding the processing water flow rate control unit 50 to reduce the flow rate of the processing water 40 corresponds to limiting the performance of a predetermined function of supplying processing water 40 to the cutting blade 34.

[0130] In this manner, the processing water flow rate control unit 50, upon receiving a command, closes the on-off valve 54, closes the proportional control valves 60a, 60b, and 60c, or reduces the opening of the proportional control valves 60a, 60b, and 60c. Therefore, even without instructions from the operator, the amount of processing water 40 (i.e., resources) wasted for the cutting device 2 when the spindle 32 is stopped can be reduced.

[0131] Furthermore, when the rotation detector 102 detects that the rotation of the spindle 32 has stopped, the command unit 100c commands the air flow control unit 80 to stop supplying air 78 or to reduce the flow rate of air 78. Note that when the command unit 100c commands the air flow control unit 80 to reduce the flow rate of air 78, it corresponds to supplying air 78 to the air supply passage 72 and limiting its ability to perform a predetermined function.

[0132] In this way, the predetermined function of supplying air 78 to the air supply passage 72 is completely stopped, or the predetermined function is performed to a limited extent. Therefore, even without instructions from the operator, the amount of air 78 (i.e., resources) wasted for the cutting device 2 with the spindle 32 stopped can be reduced.

[0133] Furthermore, the command unit 100c may, after the rotation detector 102 detects that the rotation of the spindle 32 has stopped and a predetermined time has elapsed, command the air flow control unit 80 to stop supplying air 78, or command it to reduce the flow rate of air 78.

[0134] This reduces the possibility that mist-like processing water 40 containing fine processing debris will be drawn into the spindle housing 30 through the gap between the spindle 32 and the spindle housing 30 at the tip of the spindle housing 30.

[0135] Furthermore, when the rotation detector 102 detects that the rotation of the spindle 32 has stopped, the command unit 100c commands the cooling water flow control unit 80a to stop supplying the cooling water 78a or to reduce the flow rate of the cooling water 78a.

[0136] In this way, the predetermined function of supplying cooling water 78a to the cooling water passage 74a is completely stopped, or the predetermined function is performed to a limited extent. Therefore, even without instructions from the operator, it is possible to reduce the amount of resources such as electricity wasted in the cooling water supply source 82a for the cutting device 2 when the spindle 32 is stopped.

[0137] (Second Embodiment) Next, an example of a grinding apparatus (processing apparatus) 120 will be described with reference to Figures 8 and 9. Figure 8 is a perspective view of the grinding apparatus 120, and Figure 9 is a partial cross-sectional side view of the grinding apparatus 120. In Figure 8, some of the components are shown as functional blocks.

[0138] As shown in Figure 8, the X, Y, and Z axes are orthogonal to each other. The X axis is parallel to the front-to-back direction of the grinding device 120, the Y axis is parallel to the left-to-right direction of the grinding device 120, and the Z axis is parallel to the vertical and height directions.

[0139] The grinding device 120 in this embodiment grinds (i.e., processes) the workpiece 11, but loading and unloading the workpiece 11 into and out of the grinding device 120 is done manually by an operator. However, the grinding device 120 may also be a fully automatic type that automatically loads, grinds, cleans, and unloads the workpiece 11.

[0140] The grinding device 120 is equipped with a base such as a frame. The sides of the base are covered with metal panels 122, and the base and panels 122 constitute the housing of the grinding device 120. In Figure 8, a portion of the panels 122 is shown with a dashed line. A rectangular opening 122a is provided on the top surface of the base.

[0141] The longer side of the opening 122a is approximately parallel to the X-axis. Below the opening 122a, an X-axis movement mechanism (not shown) is provided. The X-axis movement mechanism moves the chuck table 126 along the X-axis. The X-axis movement mechanism is the same as the X-axis movement mechanism in the cutting apparatus 2 described above, so its explanation is omitted.

[0142] As shown in Figure 9, the chuck table 126 has a disc-shaped frame 128a made of non-porous ceramics or the like. A disc-shaped recess smaller in diameter than the frame 128a is provided in the center of the upper surface of the frame 128a. A disc-shaped porous plate 128b made of porous ceramics is fixed to the recess of the frame 128a using an adhesive or the like.

[0143] A suction source (not shown), such as a vacuum pump, is connected to the porous plate 128b via a predetermined flow path having a rotary joint (not shown), etc. A solenoid valve (not shown) is provided in the predetermined flow path, and when the solenoid valve is opened, the negative pressure generated by the suction source is transmitted to the upper surface of the porous plate 128b.

[0144] The upper surfaces of the frame 128a and the porous plate 128b are substantially flush and constitute a holding surface 126a that holds the workpiece 11 by suction. The holding surface 126a is a conical surface in which the central part protrudes slightly compared to the outer periphery.

[0145] The chuck table 126 is positioned on a disc-shaped table base 130 and is rotatably supported by the table base 130. A through hole (not shown) is formed in the table base 130. A rotating shaft 132 is inserted into this through hole. The upper end of the rotating shaft 132 is fixed to the bottom of the chuck table 126.

[0146] A rotational drive source (not shown), such as a motor, is provided below the table base 130. A drive pulley is fixed to the output shaft of the rotational drive source, and a driven pulley is fixed to the bottom of the rotating shaft 132. An endless belt is stretched over the drive pulley and the driven pulley, and the power from the rotational drive source is transmitted to the rotating shaft 132 and the chuck table 126.

[0147] The table base 130 is supported by a tilt adjustment mechanism (not shown). The tilt adjustment mechanism adjusts the tilt of the rotation axis 132 with respect to the Z-axis direction by adjusting the tilt of the table base 130. The tilt adjustment mechanism has, for example, one fixed axis and two movable axes.

[0148] The tilt of the rotation axis 132 with respect to the Z-axis is determined by adjusting the height position that supports the table base 130 using the movable axis. The rotation axis 132 is tilted with respect to the Z-axis so that a portion of the holding surface 126a is approximately parallel to the XY plane.

[0149] The tilt adjustment mechanism is supported by a rectangular X-axis moving plate (not shown). The X-axis moving plate moves along the X-axis together with the chuck table 126, table base 130, rotational drive source, tilt adjustment mechanism, etc., by the aforementioned X-axis moving mechanism.

[0150] The chuck table 126 moves between the loading / unloading area A1 (see Figure 8), located in front of the opening 122a, and the grinding area A2 (see Figure 8), located behind the opening 122a, via the X-axis movement mechanism. The workpiece 11 is loaded into or unloaded from the chuck table 126 positioned in the loading / unloading area A1.

[0151] A third cover member 134 is fixed to the table base 130. As shown in Figure 8, a bellows-shaped fourth cover member 136, which can expand and contract in the X-axis direction, is provided on both sides of the third cover member 134 in the X-axis direction.

[0152] A rectangular column 138 is provided behind the opening 122a. A grinding feed mechanism 140 is provided on the front side of the column 138. The grinding feed mechanism 140 has a pair of guide rails 142 fixed to the front surface of the column 138.

[0153] A Z-axis movable plate 144 is attached to each guide rail 142 via a slider (not shown) so as to be slidable along the Z-axis. A nut portion (not shown) is provided on the back surface of the Z-axis movable plate 144.

[0154] A screw shaft 146 is rotatably connected to the nut portion via multiple balls (not shown). A drive source 148, such as a servo motor or stepping motor, is connected to the upper end of the screw shaft 146.

[0155] When the screw shaft 146 is rotated by the drive source 148, the Z-axis moving plate 144 moves along the Z-axis. A grinding unit (i.e., a machining unit) 150 is fixed to the front surface of the Z-axis moving plate 144.

[0156] The grinding unit 150 has a cylindrical retaining member 152 fixed to the front surface of the Z-axis moving plate 144. Inside the retaining member 152 is a cylindrical spindle housing 154. The longitudinal direction of the spindle housing 154 is arranged substantially parallel to the Z axis.

[0157] A portion of a cylindrical spindle 156, arranged substantially parallel to the Z-axis direction, is rotatably housed in the spindle housing 154. A rotor is fixed to the upper end of the spindle 156. A stator is also provided around the rotor.

[0158] The rotor and stator constitute the motor 158. Figures 8 and 9 show the approximate position of the motor 158. The lower end of the spindle 156 protrudes below the bottom surface of the retaining member 152, and a disc-shaped wheel mount 160 is fixed to the lower end of the spindle 156.

[0159] An annular grinding wheel (i.e., a machining tool) 162 is attached to the underside of the wheel mount 160 by fastening members such as screws (not shown). In this way, the grinding wheel 162 is attached to the lower end (i.e., the tip) of the spindle 156 via the wheel mount 160.

[0160] The grinding wheel 162 comprises an annular wheel base 162a made of a metal material such as an aluminum alloy, and a plurality of grinding wheels 162b fixed to the lower surface of the wheel base 162a. The plurality of grinding wheels 162b are arranged in an annular shape along the circumferential direction of the lower surface of the wheel base 162a such that there are gaps between adjacent grinding wheels 162b.

[0161] Inside the wheel base 162a, beyond the grinding wheel 162b, a plurality of discrete openings 162c (see Figure 9) are provided along the circumferential direction of the lower surface of the wheel base 162a. Processing water 40 is supplied from the plurality of openings 162c.

[0162] The processing water 40 supplied from the multiple openings 162c flows along the inner circumferential side surface of the wheel base 162a and is supplied to the multiple grinding wheels 162b. In this way, each opening 162c functions as a nozzle (i.e., a processing water supply unit) that supplies processing water 40 to the grinding wheel 162.

[0163] Alternatively, instead of, or in conjunction with, the opening 162c provided in the grinding wheel 162, a processing water supply nozzle (not shown) for spraying processing water 40 onto multiple grinding wheels 162b may be provided near the chuck table 126. In this case, the processing water supply nozzle also functions as a processing water supply unit.

[0164] As shown in Figure 9, the wheel base 162a, wheel mount 160, spindle 156, etc., are provided with flow channels 164 at each opening 162c for supplying processing water (i.e., grinding water) such as pure water. The processing water flow rate control unit 50 described above is connected to one end of the flow channel 164.

[0165] The spindle housing 154, like the spindle housing 30 described above, is provided with an air supply passage connected to the air supply source 82 and an air discharge passage (neither of which are shown). The spindle housing 154 is roughly equivalent to the structure of the spindle housing 30 shown in Figure 4, rotated 90 degrees clockwise in the XY plane.

[0166] In the spindle housing 154, air 78 is supplied between a portion of the rotating spindle 156 and the inner wall of the spindle housing 154 from multiple openings (not shown) located in the inner wall. As a result, a thin layer of air (i.e., a radial air bearing) is formed between the spindle 156 and the inner wall of the spindle housing 154.

[0167] A flange portion (not shown) having a larger outer diameter than the spindle 156 is fixed concentrically to the spindle 156. An annular recess (not shown) for accommodating this flange portion is provided in the inner wall of the spindle housing 154.

[0168] Multiple openings (not shown) are provided at approximately equal intervals along the circumferential direction of the flange portion in the annular recess of the spindle housing 154, so as to face both annular surfaces of the flange portion that are located on opposite sides in the thickness direction of the flange portion. The multiple openings are located at one end of a plurality of branch passages connected to the air supply passage.

[0169] Air 78 is supplied between the flange portion (i.e., a part of the spindle 156) that rotates with the spindle 156 and the annular recess of the spindle housing 154 (i.e., the spindle housing 154) through multiple openings located in the annular recess. This forms a thin layer of air (i.e., a thrust air bearing) between the flange portion and the annular recess.

[0170] The air 78 used to form the air bearing is discharged to the outside of the spindle housing 154 through an exhaust passage (not shown). The flow rate of the air 78 supplied to the air supply passage of the spindle housing 154 is controlled by an air flow control unit (i.e., a control unit) 80.

[0171] The spindle housing 154 is provided with a cooling water passage 154a. Similar to the spindle housing 30 described above, the cooling water passage 154a is connected to a cooling water supply source 82a (see Figure 5(B)) via a cooling water flow control unit 80a, and cooling water 78a is supplied from the cooling water supply source 82a to the cooling water passage 154a.

[0172] The flow rate of the cooling water 78a supplied to the cooling water passage 154a of the spindle housing 154 is controlled by the cooling water flow rate control unit (i.e., control unit) 80a, similar to the spindle housing 30 described above.

[0173] When grinding the workpiece 11, a workpiece unit 19, on which a tape 13 of approximately the same diameter as the workpiece 11 is attached to the surface 11a, is placed on a chuck table 126 located in the loading / unloading area A1, with the back surface 11b exposed. Next, the workpiece unit 19 is held in place by suction on the holding surface 126a, and the chuck table 126 is moved to the grinding area A2.

[0174] Then, the chuck table 126 and the grinding wheel 162 are rotated at predetermined rotational speeds, and the grinding unit 150 is fed downward at a predetermined speed while processing water 40 is supplied to the grinding wheel 162 at a predetermined flow rate.

[0175] When the grinding wheel 162b comes into contact with the back surface 11b of the workpiece 11, the workpiece 11 is ground by the grinding wheel 162. In this embodiment, the workpiece 11 is thinned as the back surface 11b is uniformly ground by the grinding wheel 162.

[0176] During grinding, processing water 40 is supplied to the grinding wheel 162b, causing the processing water 40 containing processing debris to scatter into the surrounding area. To limit the range of this scattering of processing water 40 containing processing debris, a processing chamber cover 166 is provided in the grinding area A2.

[0177] The machining chamber cover 166 covers the chuck table 126 located in the grinding area A2 and the lower end of the spindle 156 (i.e., at least the tip of the spindle 156). Together with the chuck table 126, the third cover member 134, the fourth cover member 136, etc., the machining chamber cover 166 defines the machining chamber (i.e., the internal space) 166a.

[0178] The top plate of the machining chamber cover 166 has an opening that is larger in diameter than the spindle 156 but smaller in diameter than the wheel mount 160. The spindle 156 is inserted into this opening. An opening 166b is provided on the side of the machining chamber cover 166.

[0179] One end of the exhaust duct 104 is connected to the opening 166b. The other end of the exhaust duct 104 is connected to the suction source 106 located outside the grinding device 120. The exhaust duct 104 is provided with the on-off valve 108. As described above, the opening and closing of the on-off valve 108 is controlled by the on-off valve control unit (i.e., control unit) 110.

[0180] The valve control unit 110 is, for example, a first program stored in the auxiliary storage device of the controller 170's memory 170b (see Figure 8), but it may also be a circuit such as an FPGA or AISC provided on a printed circuit board on which the processor 170a (see Figure 8) is located.

[0181] Furthermore, the first program executed by processor 100a may be stored on a non-temporary tangible recording medium such as a USB memory stick, optical disk, SD memory card, or HDD, instead of an auxiliary storage device.

[0182] The hygrometer 112 is fixed to the inner wall of the processing chamber cover 166 on the side opposite to the side where the opening 166b is provided in the Y-axis direction, at approximately the same height as the opening 166b.

[0183] Note that the positions of the opening 166b and the hygrometer 112 are not limited to the example shown in Figure 9. If the opening 166b is located on the rear side of the processing chamber cover 166 (i.e., the side closest to the column 138), the hygrometer 112 may be located on the front side.

[0184] The grinding device 120 has a controller 170. Although Figure 8 shows the controller 170 outside the grinding device 120 for illustrative purposes, the controller 170 is housed inside the casing of the grinding device 120. A touch panel display (not shown) is also provided on the side of the casing.

[0185] The controller 170 controls the operation of the X-axis movement mechanism, the rotation drive source for the chuck table 126, the suction source, the solenoid valve provided in the flow path between the chuck table 126, the motor 158, the processing water flow rate control unit 50, the drive power supply unit 70, the air flow rate control unit 80, the cooling water flow rate control unit 80a, the touch panel display, and the like.

[0186] The controller 170 is composed of a computer having, for example, a processor 170a, represented by a CPU, and memory 170b (see Figure 8). The memory 170b includes main memory and auxiliary memory.

[0187] The auxiliary storage device stores software containing a predetermined program. By operating the processor 170a and other components according to this software, the functions of the controller 170 are realized.

[0188] A printed circuit board (not shown) on which the processor 100a is installed is provided with a predetermined circuit that functions as a rotation detector 102 for detecting whether or not the spindle 32 is rotating (see Figure 9). As described above, the predetermined circuit that functions as the rotation detector 102 is configured as an FPGA, for example, but may also be configured as an ASIC.

[0189] In this embodiment as well, the rotational speed of the spindle 156 is measured by a rotational speed measuring device such as a rotary encoder 68. Note that in Figure 9, for the sake of explanation, the rotary encoder 68 is shown outside the spindle housing 154; however, the rotary encoder 68 is typically installed inside the spindle housing 154.

[0190] As shown in Figure 9, the controller 170 has a command unit 170c. The command unit 170c is, for example, a second program stored in the auxiliary storage device of memory 170b, but it may also be a circuit such as an FPGA or AISC provided on the printed circuit board on which the processor 170a is installed.

[0191] Furthermore, the second program executed by processor 100a may be stored on a non-temporary tangible recording medium such as a USB memory stick, optical disk, SD memory card, or HDD, instead of an auxiliary storage device.

[0192] When the rotation detector 102 detects that the rotation of the spindle 156 has stopped, the command unit 170c commands each control unit, such as the processing water flow rate control unit 50, the air flow rate control unit 80, the cooling water flow rate control unit 80a, and the on / off valve control unit 110, to perform predetermined processing.

[0193] Specifically, when the rotation detector 102 detects that the rotation of the spindle 156 has stopped, the command unit 170c commands the on-off valve control unit 110 to shut off the flow path 104a with the on-off valve 108.

[0194] Upon receiving a shutoff command, the on-off valve control unit 110 closes the valve body 108a of the on-off valve 108 completely (i.e., performs a predetermined process). This completely stops a predetermined function (i.e., the function of using the suction source 106 to suck the processing chamber 166a) that is used during grinding (i.e., while the spindle 156 is rotating) but not during non-grinding (i.e., while the spindle 156 is stopped).

[0195] Therefore, when the rotation of the spindle 156 is stopped, the suction of the processing chamber 166a can be stopped even without instructions from the operator. Thus, the resources wasted for the grinding machine 120 when the spindle 156 is stopped can be reduced.

[0196] Of course, the command unit 170c may also command the on-off valve control unit 110 to perform a predetermined process to fully close the valve body 108a of the on-off valve 108 when the rotation detector 102 detects that the rotation of the spindle 32 has stopped and the humidity of the processing chamber 166a measured by the hygrometer 112 falls below a predetermined value.

[0197] In addition to stopping the rotation of the spindle 156, by continuing to suction the processing chamber 166a until the humidity of the processing chamber 166a falls below a predetermined value, the amount of processing debris adhering to the holding surface 126a, the inner surface of the processing chamber 166a, etc., while the spindle 32 is stopped can be reduced.

[0198] Furthermore, when the rotation detector 102 detects that the rotation of the spindle 156 has stopped, the command unit 170c commands the processing water flow rate control unit 50 to stop supplying the processing water 40, or commands the processing water flow rate control unit 50 to reduce the flow rate of the processing water 40.

[0199] Furthermore, when the command unit 170c commands the processing water flow rate control unit 50 to reduce the flow rate of the processing water 40, it corresponds to limiting the performance of a predetermined function of supplying processing water 40 to the grinding wheel 162 (and / or processing water supply nozzle).

[0200] The processing water flow rate control unit 50, having received a command from the command unit 170c, can reduce the amount of processing water 40 (i.e., resources) wasted for the grinding machine 120 when the spindle 156 is stopped, even without instructions from the operator.

[0201] Furthermore, when the rotation detector 102 detects that the rotation of the spindle 156 has stopped, the command unit 170c commands the air flow control unit 80 to stop supplying air 78 or to reduce the flow rate of air 78. Therefore, even without instructions from the operator, the amount of air 78 (i.e., resources) wasted for the grinding machine 120 when the spindle 156 is stopped can be reduced.

[0202] Furthermore, the command unit 170c may, after the rotation detector 102 detects that the rotation of the spindle 156 has stopped and a predetermined time has elapsed, command the air flow control unit 80 to stop supplying air 78, or command it to reduce the flow rate of air 78.

[0203] This reduces the possibility that mist-like processing water 40 containing fine processing debris will be drawn into the spindle housing 154 through the gap between the spindle 156 and the spindle housing 154 at the lower end of the spindle housing 154.

[0204] Furthermore, when the rotation detector 102 detects that the rotation of the spindle 156 has stopped, the command unit 170c commands the cooling water flow control unit 80a to stop supplying the cooling water 78a or to reduce the flow rate of the cooling water 78a. Therefore, even without instructions from the operator, it is possible to reduce the amount of resources such as electricity wasted in the cooling water supply source 82a for the grinding machine 120 when the spindle 156 has stopped.

[0205] Furthermore, the structures, methods, etc., according to the above embodiments can be modified as appropriate without departing from the scope of the present invention. For example, a polishing wheel (not shown) may be mounted on the spindle 156 instead of the grinding wheel 162. In other words, some of the contents described for the grinding device 120 can also be applied to a polishing device (not shown).

[0206] In the polishing apparatus, when the rotation detector 102c detects that the rotation of the spindle 156 has stopped, the command unit 170c of the controller 100 commands the air flow control unit 80 to stop supplying or reduce the flow rate of air 78, and also commands the cooling water flow control unit 80a to stop supplying or reduce the flow rate of cooling water 78a. [Explanation of Symbols]

[0207] 2: Cutting equipment (processing equipment), 2a: Building, 4: Panel 6: Processing chamber cover, 6a: Processing chamber (internal space), 6b: Opening 10: Cutting unit (machining unit) 11: Workpiece, 11a: Front side, 11b: Back side, 13: Tape 12: Y-axis and Z-axis direction movement mechanism, 14: Z-axis direction movement plate 15: Annular frame, 17: Workpiece unit, 19: Workpiece unit 16: Chuck table, 16a: Holding surface, 16b: Clamping unit 18a: Frame, 18b: Porous board 20: Suction source, 22: Table base, 24: Rotating shaft 26: First cover member, 28: Second cover member 30: Spindle housing, 30a: Inner wall, 30b: Annular recess 32: Spindle, 32a: Tip, 32b: Flange 34: Cutting blade (machining tool) 36: Blade cover unit, 38: Nozzle unit, 38a: Opening 40: Processed water 42: Spray nozzle, 44: Processed water supply unit, 46: Shower nozzle 50: Processing water flow rate control unit (control unit) 52: Processing water supply source 54: On / off valve, 56a, 56b, 56c: Flow path 58a, 58b, 58c: Flow meter; 60a, 60b, 60c: Proportional control valve 62: Receiving flange section, 64: Retaining flange section 66a: Rotor, 66b: Stator, 66: Motor, 68: Rotary encoder 70: Power supply unit 72: Air supply passage, 72a: Branch passage, 72b: Opening, 74a: Cooling water passage 74: Air exhaust passage, 78: Air, 78a: Cooling water 80: Air flow control unit (control unit) 82: Air supply source, 82a: Cooling water supply source 84, 84a: On / off valve, 86, 86a: Flow path 88,88a: Flow meter, 90,90a: Proportional control valve 100: Controller, 100a: Processor, 100b: Memory, 100c: Command Unit 102: Rotation Detector 104: Exhaust duct, 104a: Flow path, 106: Suction source 108: On / off valve, 108a: Valve body, 108b: Rotating shaft 110: On / off valve control unit (control unit), 112: Hygrometer 120: Grinding equipment (processing equipment) 122: Panel, 122a: Opening 126: Chuck table, 126a: Holding surface 128a: Frame, 128b: Porous board 130: Table base, 132: Rotation axis 134: Third cover member, 136: Fourth cover member 138: Column, 140: Grinding feed mechanism 142: Guide rail, 144: Z-axis movement plate, 146: Screw shaft, 148: Drive source 150: Grinding unit (processing unit), 152: Holding member 154: Spindle housing, 154a: Cooling water channel 156: Spindle, 158: Motor 160: Wheel mount, 162: Grinding wheel (machining tool) 162a: Wheel base, 162b: Grinding wheel, 162c: Opening (processing water supply unit) 164: Flow channel 166: Processing chamber cover, 166a: Processing chamber (internal space), 166b: Opening 170: Controller, 170a: Processor, 170b: Memory, 170c: Command Unit A1: Loading / unloading area, A2: Grinding area

Claims

1. A processing device for processing a workpiece, A chuck table having a holding surface for holding the workpiece, A machining unit having a spindle on which a machining tool for machining the workpiece is attached to the tip, A rotation detector that detects whether or not the spindle is rotating, A controller having memory and a processor, A control unit that performs predetermined processing to completely stop a predetermined function that is used while the spindle is rotating but not used when the spindle is stopped, or to perform said predetermined function to a limited extent, Equipped with, The processing apparatus is characterized in that the controller includes a command unit that commands the control unit to perform the predetermined processing when the rotation detector detects that the rotation of the spindle has stopped.

2. A chuck table and a machining chamber cover that covers at least the tip of the spindle, An exhaust duct, one end of which is connected to the processing chamber cover and the other end of which is connected to a suction source located outside the processing apparatus, A valve is provided in the exhaust duct to open and close the flow path connecting the internal space of the processing chamber cover and the suction source, Furthermore, The predetermined function is the function of drawing in the internal space, The control unit is an on / off valve control unit that controls the opening and closing of the on / off valve, The processing apparatus according to claim 1, characterized in that when the rotation detector detects that the rotation of the spindle has stopped, the command unit commands the on-off valve control unit to shut off the flow path with the on-off valve.

3. A chuck table and a machining chamber cover that covers at least the tip of the spindle, An exhaust duct, one end of which is connected to the processing chamber cover and the other end of which is connected to a suction source located outside the processing apparatus, A valve is provided in the exhaust duct to open and close the flow path connecting the internal space of the processing chamber cover and the suction source, A hygrometer for measuring the humidity in the internal space of the processing chamber cover, Furthermore, The predetermined function is the function of drawing in the internal space, The control unit is an on / off valve control unit that controls the opening and closing of the on / off valve, The processing apparatus according to claim 1, characterized in that when the rotation detector detects the cessation of the rotation of the spindle and the humidity of the internal space of the processing chamber cover measured by the hygrometer falls below a predetermined value, the command unit commands the on-off valve control unit to shut off the flow path with the on-off valve.

4. The spindle further comprises a processing water supply unit that supplies processing water to the processing tool attached to the tip of the spindle, The predetermined function is the function of supplying the processing water to the processing tool. The control unit is a processing water flow rate control unit that controls the flow rate of the processing water supplied from the processing water supply unit to the processing tool. The processing apparatus according to claim 1, characterized in that when the rotation detector detects that the rotation of the spindle has stopped, the command unit commands the processing water flow rate control unit to stop supplying the processing water or to reduce the flow rate of the processing water.

5. The processing unit comprises a spindle, a spindle housing that rotatably accommodates a portion of the spindle, and an air supply passage for supplying air between the portion of the spindle and the spindle housing. The predetermined function is the function of supplying the air to the air supply path. The control unit is an air flow control unit that controls the flow rate of the air supplied to the spindle housing, The processing apparatus according to claim 1, characterized in that when the rotation detector detects that the rotation of the spindle has stopped, the command unit commands the air flow control unit to stop supplying the air or to reduce the air flow rate.

6. The processing unit comprises a spindle, a spindle housing that rotatably accommodates a portion of the spindle, and a cooling water passage for supplying cooling water to the spindle housing. The predetermined function is the function of supplying the cooling water to the spindle housing, The control unit is a cooling water flow rate control unit that controls the flow rate of the cooling water supplied to the spindle housing, The processing apparatus according to claim 1, characterized in that when the rotation detector detects that the rotation of the spindle has stopped, the command unit commands the cooling water flow rate control unit to stop supplying the cooling water or to reduce the flow rate of the cooling water.

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