Determination method, liquid supply method, article manufacturing method, program, information processing device, and liquid supply device

Abstract

This technology offers advantages for precisely supplying liquid droplets onto a substrate. [Solution] In a process in which droplets are ejected from each ejection hole while scanning a substrate and a head having multiple ejection holes arranged in one direction relative to each other in the scanning direction, a determination method for determining the conditions for supplying droplets from each ejection hole to each of a plurality of target areas arranged on the substrate along the scanning direction is determined as the condition based on a plurality of types of information including: first information indicating the pitch of the plurality of ejection holes; second information indicating the pitch of the plurality of target areas; third information indicating the relative scanning speed between the head and the substrate; fourth information indicating the time until the amplitude of vibration generated in one ejection hole due to droplet ejection falls within an acceptable range in the adjacent ejection hole; and fifth information indicating the distance from the ejection hole at which the amplitude of vibration generated in one ejection hole due to droplet ejection falls within the acceptable range.

Claims

[Claim 1] A method for determining the conditions for supplying droplets from each discharge hole to each of a plurality of target regions arranged on the substrate along the scanning direction, in a process in which a head and a substrate, each having a plurality of discharge holes arranged in one direction for discharging droplets, are scanned relative to each other in the scanning direction. First information indicating the pitch of the plurality of discharge holes in the aforementioned one direction, Second information indicating the pitch of the plurality of target regions in the scanning direction, A third piece of information indicating the relative scanning speed between the head and the substrate in the aforementioned process, Within the head, a fourth piece of information indicates the time it takes for the amplitude of vibration generated in one discharge hole due to droplet discharge to reach an acceptable range in the adjacent discharge hole, Within the head, a fifth piece of information indicates the distance from a single discharge hole to which the amplitude of vibration generated at that discharge hole by the discharge of a liquid droplet falls within the allowable range. A determination method characterized by determining the amount of tilt of the head with respect to the scanning direction as the condition based on multiple types of information including the above. [Claim 2] The amount of inclination is determined as the angle between the direction perpendicular to the scanning direction and the aforementioned one direction, within the range of a maximum angle θ1 and a minimum angle θ2. The maximum angle θ1 and the minimum angle θ2 are determined when "Ph" is the pitch of the plurality of ejection holes in the first information, "Ps" is the pitch of the plurality of target areas in the second information, "V" is the scanning speed in the third information, "T" is the time in the fourth information, and "L" is the index indicating the distance in the fifth information. θ1=asin(Ps / L / Ph) θ2=asin(T×V / Ph) The determination method according to claim 1, characterized by being obtained by the above. [Claim 3] The determination method according to claim 1, characterized in that the plurality of types of information further include a sixth piece of information indicating the maximum angular error in the droplet discharge direction for discharging droplets in the plurality of discharge holes, and a seventh piece of information indicating the distance between the head and the substrate in the process. [Claim 4] The amount of inclination is determined as the angle between the direction perpendicular to the scanning direction and the aforementioned one direction, within the range of a maximum angle θ1 and a minimum angle θ3. The maximum angle θ1 and the minimum angle θ3 are determined when "Ph" is the pitch of the plurality of ejection holes in the first information, "Ps" is the pitch of the plurality of target areas in the second information, "V" is the scanning speed in the third information, "T" is the time in the fourth information, "L" is the index indicating the distance in the fifth information, "E" is the maximum angle error in the sixth information, and "G" is the interval in the seventh information. θ1=asin(Ps / L / Ph) θ3=asin((T×V+tan(E)×G) / Ph) The determination method according to claim 3, characterized by being obtained by the above. [Claim 5] The determination method according to claim 3, characterized in that the aforementioned multiple types of information further include an eighth piece of information indicating the minimum time interval for continuously discharging droplets from each discharge port, and a ninth piece of information indicating the number of consecutive discharges for which each discharge port continuously discharges droplets into one target area. [Claim 6] The amount of inclination is determined as the angle between the direction perpendicular to the scanning direction and the aforementioned one direction, within the range of a maximum angle θ1 and a minimum angle θ4. The maximum angle θ1 and the minimum angle θ4 are determined when "Ph" is the pitch of the plurality of ejection holes in the first information, "Ps" is the pitch of the plurality of target areas in the second information, "V" is the scanning speed in the third information, "T" is the time in the fourth information, "L" is the distance in the fifth information, "E" is the maximum angle error in the sixth information, "G" is the interval in the seventh information, "C" is the minimum time interval in the eighth information, and "N" is the number of consecutive ejections in the ninth information. θ1=asin(Ps / L / Ph) θ4=asin((T×V+tan(E)×G+C×V×N) / Ph) The determination method according to claim 5, characterized in that it is obtained by the above. [Claim 7] The determination method according to claim 6, characterized in that the number of consecutive discharges of the ninth piece of information is set such that the maximum angle does not become smaller than the minimum angle. [Claim 8] The determination method according to claim 2, characterized in that the index indicating the distance of the fifth information is represented by a multiple of the pitch of the plurality of discharge holes. [Claim 9] The determination method according to claim 2, characterized in that the distance of the fifth information is set such that the maximum angle is not smaller than the minimum angle. [Claim 10] The plurality of discharge holes include a first discharge hole and a second discharge hole, The determination method according to claim 1, characterized in that the timing of droplet discharge at the first discharge hole and the second discharge hole is determined as the condition such that the amplitude of vibration generated at the first discharge hole by the discharge of droplets falls within the allowable range at the second discharge hole when droplet discharge occurs at the second discharge hole. [Claim 11] The determination method according to claim 10, characterized in that the timing of droplet discharge at the first discharge port and the second discharge port is determined by changing the timing of droplet discharge at the second discharge port based on the timing of droplet discharge at the first discharge port. [Claim 12] A liquid supply method for supplying liquid onto a substrate by performing a process of discharging droplets from each discharge hole while scanning a head and a substrate relatively in the scanning direction, the head having multiple discharge holes arranged in one direction for discharging droplets, A determination step of determining conditions for supplying droplets from each discharge hole to each of a plurality of target regions arranged on the substrate along the scanning direction, using the determination method described in any one of claims 1 to 11, A processing step which performs the processing according to the conditions determined in the determination step, A liquid supply method characterized by including the following: [Claim 13] A supply step of supplying liquid onto a substrate using the liquid supply method described in claim 12, A processing step for processing the substrate to which the liquid has been supplied in the supply step, A manufacturing process for producing an article from the substrate processed in the above-mentioned processing step, A method for manufacturing articles, characterized by including the following: [Claim 14] A program for causing an information processing device to execute the determination method described in any one of claims 1 to 11. [Claim 15] An information processing device that performs the determination method according to any one of claims 1 to 11. [Claim 16] A liquid supply device that supplies liquid onto a substrate, A head with multiple discharge holes arranged in one direction for ejecting droplets, The head and the substrate are scanned relative to each other in the scanning direction, and a control unit controls the process of ejecting droplets from each ejection hole. The control unit sets the following conditions for supplying droplets from each discharge hole to each of the plurality of target regions arranged on the substrate along the scanning direction: First information indicating the pitch of the plurality of discharge holes in the aforementioned one direction, Second information indicating the pitch of the plurality of target regions in the scanning direction, A third piece of information indicating the relative scanning speed between the head and the substrate in the aforementioned process, Within the head, a fourth piece of information indicates the time it takes for the amplitude of vibration generated in one discharge hole due to droplet discharge to reach an acceptable range in the adjacent discharge hole, Within the head, a fifth piece of information indicates the distance from a single discharge hole to which the amplitude of vibration generated at that discharge hole by the discharge of a liquid droplet falls within the allowable range. A liquid supply device characterized by determining the amount of inclination of the head with respect to the scanning direction based on multiple types of parameter values, including the above.

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