Apparatus for detecting particle swarms and method for detecting particle swarms

Abstract

To efficiently distinguish and detect multiple groups of fine particles with different characteristics (color, density, etc.). [Solution] The particulate matter detection device 10 measures the wind direction and wind speed of the airflow in a predetermined area. If the wind speed of the airflow is below a predetermined threshold, it irradiates the area while switching the emission timing of green and red sheet laser beams over time. Images captured by each sheet laser beam are extracted from the captured video, and particulate matter is detected based on each image. If the wind speed of the airflow exceeds a predetermined threshold, green, red, and blue sheet laser beams are irradiated simultaneously and continuously. Images captured by each sheet laser beam are obtained from the captured video through image processing, and particulate matter is detected based on each image.

Description

[Technical Field] 【0001】 The present invention relates to a particle group detection device and a particle group detection method that can efficiently detect each particle group when multiple particle groups with different characteristics (color, density, etc.) are present. [Background technology] 【0002】 Traditionally, in arc welding processes for objects such as automobiles, a group of fine particles called welding fumes are often generated when the heat from the arc causes molten metal vapor to be released into the atmosphere. Depending on the metal being arc-welded, these fine particles may appear white or magenta. 【0003】 In this arc welding process, although the resulting material should be white, there is a risk that, as a result of unintended metal parts melting, a group of magenta-colored fine particles may be generated. This has led to quality and environmental problems related to these fine particles, and technologies for detecting fine particles scattered in a room are known (see, for example, Patent Document 1). The technology described in Patent Document 1 forms approximately parallel optical surfaces with multicolored light, captures a video of the detection space, and measures the velocity of the particles by analyzing the video. [Prior art documents] [Patent Documents] 【0004】 [Patent Document 1] Special Publication No. 2003-518630 [Overview of the Initiative] [Problems that the invention aims to solve] 【0005】 However, the method described in Patent Document 1 cannot distinguish and detect multiple groups of fine particles with different characteristics (color, density, etc.) when they are present simultaneously. Furthermore, detection of the fine particle groups may become impossible when the wind speed in the detection area is high. Therefore, the challenge lies in how to distinguish and detect each fine particle group when multiple groups are present. 【0006】 The present invention was made to solve the problems (issues) of the above-mentioned prior art, and aims to provide a particle group detection device and a particle group detection method that can efficiently distinguish and detect each particle group when there are multiple particle groups with different characteristics (color, density, etc.). [Means for solving the problem] 【0007】 To solve the above-mentioned problems and achieve the objective, the present invention provides a particle group detection device for detecting a plurality of particle groups located in a predetermined region, comprising: a plurality of light-emitting means for irradiating the predetermined region with light of the three primary colors; a measuring means for measuring the wind direction and wind speed of the airflow in the surrounding region including the predetermined region; a control means for controlling the light emission mode of the plurality of light-emitting means according to the wind speed measured by the measuring means; an imaging means for capturing a plurality of images of the predetermined region under the light emission control by the control means; and a detection means for detecting the plurality of particle groups based on the plurality of images captured by the imaging means. 【0008】 Furthermore, the present invention is characterized in that, in the above invention, the control means controls the light emitted from the plurality of light-emitting means to be emitted simultaneously and continuously when the wind speed measured by the measuring means exceeds a predetermined threshold. 【0009】 Furthermore, the present invention is characterized in that, in the above invention, the control means controls the emission timing of the light emitted by the plurality of light-emitting means to switch them sequentially when the wind speed measured by the measuring means is below a predetermined threshold. 【0010】 Furthermore, the present invention is characterized in that, in the above invention, the detection means detects the plurality of fine particle groups based on predetermined color component images of the plurality of images captured by the imaging means. 【0011】 Furthermore, the present invention is characterized in that, in the above invention, the plurality of light-emitting means comprises a red sheet laser irradiation means for irradiating red sheet laser light, a green sheet laser irradiation means for irradiating green sheet laser light, and a blue sheet laser irradiation means for irradiating blue sheet laser light. 【0012】 Furthermore, the present invention is characterized in that, in the above invention, the detection means detects the plurality of fine particle groups by a predetermined particle image velocity measurement method or a predetermined particle tracking method. 【0013】 Furthermore, the present invention relates to a particle group detection device for detecting a plurality of particle groups located in a predetermined region, comprising: a plurality of light-emitting units that each emit light of the three primary colors toward a predetermined region; a measuring unit that measures the wind direction and wind speed of the airflow in the surrounding region including the predetermined region, the device comprising: a control step of controlling the light emission mode of the plurality of light-emitting means according to the wind speed measured by the measuring unit; an imaging step of capturing a plurality of images of the predetermined region under the light emission control by the control step; and a detection step of detecting the plurality of particle groups based on the plurality of images captured by the imaging step. [Effects of the Invention] 【0014】 According to the present invention, when multiple groups of fine particles with different characteristics (color, density, etc.) exist, each group of fine particles can be efficiently distinguished and detected. [Brief explanation of the drawing] 【0015】 [Figure 1] Figure 1 shows an overview of a particulate matter detection device according to an embodiment. [Figure 2] Figure 2 shows the configuration of the particulate matter detection system according to the embodiment. [Figure 3] FIG. 3 is a functional block diagram showing the configuration of the particulate group detection device shown in FIG. 2. [Figure 4] FIG. 4 is an explanatory diagram for explaining video imaging of the particulate group detection device when the wind speed in a predetermined area is below a predetermined threshold value. [Figure 5] FIG. 5 is an explanatory diagram for explaining the extraction of a green image. [Figure 6] FIG. 6 is an explanatory diagram for explaining the extraction of a red image. [Figure 7] FIG. 7 is an explanatory diagram for explaining image data when the wind speed in a predetermined area exceeds a predetermined threshold value. [Figure 8] FIG. 8 is a flowchart showing the processing procedure of the particulate group detection device. [Figure 9] FIG. 9 is a flowchart showing the processing procedure of the sheet laser switching process. [[ID=二十一]] [Figure 10] [[ID=二十二]]FIG. 10 is a flowchart showing the processing procedure of the first particulate group detection process. [[ID=二十三]] [[ID=二十四]] [Figure 11] [[ID=二十五]]FIG. 11 is a flowchart showing the processing procedure of the imaging process. [[ID=二十六]] [[ID=二十七]] [Figure 12] [[ID=二十八]]FIG. 12 is a flowchart showing the processing procedure of the second particulate group detection process. [[ID=二十九]] [[ID=三十]] [[ID=三十一]]【BEST MODE FOR CARRYING OUT THE INVENTION】[[ID=三十二]] [[ID=三十三]] [[ID=三十四]] 【0016】 [[ID=三十五]] [[ID=三十六]]Hereinafter, embodiments of the particulate group detection device and the particulate group detection method according to the present invention will be described in detail based on the drawings. [[ID=三十七]] [[ID=三十八]] 【0017】 [[ID=三十九]] [[ID=四十]]The outline of the particulate group detection device according to the present embodiment will be described. FIG. 1 is a diagram showing the outline of the particulate group detection device according to the embodiment. The particulate group detection device according to the embodiment can be used for detecting coating particle groups in the coating process or detecting welding fumes in the arc welding process. In this embodiment, the case of applying it to the arc welding process will be described. [[ID=四十一]] [[ID=四十二]] 【0018】 [[ID=四十三]] As shown in Figure 1, the particulate matter detection device according to this embodiment measures the wind direction and wind speed of the airflow in a predetermined area of ​​the arc welding process. When the wind speed of the airflow is below a predetermined threshold, the particulate matter detection device irradiates the area with two-color sheet laser light (corresponding to the "light-emitting means" in the claim) while switching between them in a time series, and captures a video. Here, the video is data consisting of multiple uncompressed RAW images. Furthermore, the case in which green and red sheet laser light are used as the sheet laser light will be described here. The particulate matter detection device then extracts images irradiated with each sheet laser light. Subsequently, it detects the particulate matter based on the extracted images. 【0019】 Meanwhile, if the airflow velocity exceeds a predetermined threshold, the particle swarm detection device adjusts the imaging area based on the wind direction and velocity so that the particle swarm enters the predetermined imaging area within a set time. The particle swarm detection device then simultaneously and continuously irradiates with three colored sheet laser beams and captures a video. Here, we will explain the case where green, red, and blue sheet laser beams are used. Subsequently, the particle swarm detection device uses image processing to acquire images irradiated by each sheet laser beam. Then, the particle swarm detection device detects the particle swarm based on the acquired images. 【0020】 As described above, the microparticle group detection device of the present invention measures the wind direction and wind speed of the airflow in a predetermined area. If the wind speed of the airflow is below a predetermined threshold, it irradiates the area while switching the emission timing of green and red sheet laser light in a time series. Images captured by each sheet laser light are extracted from the captured video, and microparticle groups are detected based on each image. Furthermore, if the wind speed of the airflow exceeds a predetermined threshold, green, red, and blue sheet laser light are irradiated simultaneously and continuously. Images captured by each sheet laser light are obtained from the captured video through image processing, and microparticle groups are detected based on each image. This allows for detection results that can determine each microparticle group even when different types of microparticle groups with different colors and densities are mixed together, even if the airflow speeds are different. 【0021】 <System Configuration of the Particulate Matter Detection System> Next, the system configuration of the particle ensemble detection system according to the embodiment will be described. Figure 2 is a diagram showing the configuration of the particle ensemble detection system according to the embodiment. The particle ensemble detection system includes a particle ensemble detection device 10, a plurality of robot arms 50a, and a workpiece 60. The particle ensemble detection device 10 is connected to a wind direction / speed meter 13 (not shown), an imaging area adjustment mechanism 14, a green sheet laser irradiation unit 15 (corresponding to the "green sheet laser irradiation means" of the claim), a red sheet laser irradiation unit 16 (corresponding to the "red sheet laser irradiation means" of the claim), a blue sheet laser irradiation unit 17 (corresponding to the "blue sheet laser irradiation means" of the claim), and an imaging unit 18. The green sheet laser irradiation unit 15, the red sheet laser irradiation unit 16, and the blue sheet laser irradiation unit 17 are arranged such that the green sheet laser light irradiated from the green sheet laser irradiation unit 15, the red sheet laser light irradiated from the red sheet laser irradiation unit 16, and the blue sheet laser light irradiated from the blue sheet laser irradiation unit 17 form at least approximately parallel optical surfaces. 【0022】 The particulate matter swarm detection device 10 measures the wind direction and wind speed of the airflow W in a predetermined area using an anemometer 13 (not shown) when welding is being performed on a workpiece 60 using multiple robot arms 50a. If the wind speed of the airflow W is below a predetermined threshold, the particulate matter swarm detection device 10 controls the green sheet laser irradiation unit 15 and the red sheet laser irradiation unit 16 to irradiate welding fumes etc. generated from the welding tip of the robot arm 50a, switching the emission timing of the two sheet lasers in a time series. The imaging unit 18 captures a video of a predetermined area including the workpiece 60, and extracts a green image where the green sheet laser light is irradiated and a red image where the red sheet laser light is irradiated from the captured video, respectively, to generate a green image video based on the green image and a red image video based on the red image. The particulate matter swarm detection device then inputs the green image video to the particulate matter swarm detection control unit to detect welding fumes etc., and inputs the red image video to the particulate matter swarm detection control unit to detect welding fumes etc. 【0023】 Furthermore, if the airflow velocity exceeds a predetermined threshold, the particulate matter swarm detection device 10 adjusts the imaging area of ​​the imaging unit 18 using the imaging area adjustment mechanism 14 so that welding fumes and the like generated from the welding tip of the robot arm 50a enter the imaging area within a predetermined time.The particulate matter swarm detection device 10 controls the green sheet laser irradiation unit 15, the red sheet laser irradiation unit 16, and the blue sheet laser irradiation unit 17 to emit light from the three sheet lasers simultaneously and continuously, and the imaging unit 18 captures a video of a predetermined area including the workpiece 60.From the captured video, the device obtains a green image of the green signal component, a red image of the red signal component, and a blue image of the blue signal component through image processing, and generates a green image video based on the green image, a red image video based on the red image, and a blue image video based on the blue image.The particulate matter swarm detection device 10 then inputs the green image video, the red image video, and the blue image video to the particulate matter swarm detection control unit, respectively, to detect particulate matter swarms such as welding fumes. 【0024】 The particle swarm detection device 10 performs processes such as measuring the wind direction and wind speed in the imaging area, adjusting the imaging area, capturing video, controlling the emission pattern of the sheet laser, extracting images based on the video, acquiring RGB signals based on the video, detecting particle swarms based on the images from each sheet laser, and displaying the detection results. 【0025】 <Configuration of the particulate matter detection device 10> Next, the configuration of the particulate matter ensemble detection device 10 will be described. Figure 3 is a functional block diagram showing the configuration of the particulate matter ensemble detection device 10 shown in Figure 2. As shown in Figure 3, the particulate matter ensemble detection device 10 includes a display unit 11, an input unit 12, a wind direction / speed meter 13 (corresponding to the "measuring means" in the claim), an imaging area adjustment mechanism 14, a green sheet laser irradiation unit 15, a red sheet laser irradiation unit 16, a blue sheet laser irradiation unit 17, an imaging unit 18 (corresponding to the "imaging means" in the claim), a storage unit 19, and a control unit 20. The display unit 11 is a display device such as a liquid crystal display that displays various information. The input unit 12 is an input device such as a mouse or keyboard. 【0026】 The wind direction and speed meter 13 is a measuring unit that measures the wind direction and speed of airflow in a predetermined area. Examples of wind direction and speed meter 13 include a wind turbine-type wind direction and speed meter with a propeller at the front of a streamlined body and vertical fins for wind vane stabilization at the rear end, and an ultrasonic wind direction and speed meter that uses the principle that the speed of sound waves changes with wind speed as they propagate through the air. 【0027】 The imaging area adjustment mechanism 14 is a three-axis tilting table for adjusting the imaging area of ​​the imaging unit 18, which will be described later. The imaging area adjustment mechanism 14 is, for example, positioned between the tripod and the imaging unit 18, and is a tilting table that allows adjustment of the lateral angle and vertical elevation angle of the imaging unit 18. If vertical adjustment of the imaging area is not required, a rotating table may also be used. 【0028】 The green sheet laser irradiation unit 15 is a processing unit that irradiates a green sheet-shaped laser beam towards a predetermined area including the workpiece 60 on which the welding process is being carried out. To obtain a green sheet laser beam, for example, a laser using a solid with a crystal structure of YAG (yttrium aluminum garnet) or a solid with a crystal structure of YVO4 (yttrium vanadite) can be passed through an oxide single crystal to extract the second harmonic, and this laser beam can be passed through a cylindrical lens to irradiate a green sheet-shaped laser beam. 【0029】 The red sheet laser irradiation unit 16 is a processing unit that irradiates a red sheet-shaped laser beam towards a predetermined area including the workpiece 60 on which the welding process is being performed. To obtain red sheet laser beam, for example, a laser using a solid with a crystalline structure based on AlGaInP (aluminum gallium indium phosphide) can be passed through a cylindrical lens to irradiate a red sheet-shaped laser beam. 【0030】 The blue sheet laser irradiation unit 17 is a processing unit that irradiates a blue sheet-shaped laser beam towards a predetermined area including the workpiece 60 on which the welding process is being performed. To obtain blue sheet laser beam, for example, a laser using a solid crystal structure based on GaN (gallium nitrogen) or InGaN (indium gallium nitride) can be passed through a cylindrical lens to irradiate a blue sheet-shaped laser beam. 【0031】 The imaging unit 18 is a camera that captures multiple images in a time series based on reflected light from a group of fine particles such as welding fumes, which is reflected by sheet laser light irradiated onto a predetermined area including the workpiece 60. 【0032】 The storage unit 19 is a storage device such as a hard disk drive or non-volatile memory, and stores captured image data 19a, green image data 19b, red image data 19c, blue image data 19d, green image particle group detection data 19e, red image particle group detection data 19f, and blue image particle group detection data 19g. 【0033】 The captured image data 19a is video data of a predetermined area including the workpiece 60, captured when the wind speed is below a predetermined threshold, with the green sheet laser irradiation unit 15 and the red sheet laser irradiation unit 16 switching their emission timings in a time series; and when the wind speed exceeds a predetermined threshold, the image data is video data of a predetermined area including the workpiece 60, captured when the green sheet laser irradiation unit 15, the red sheet laser irradiation unit 16, and the blue sheet laser irradiation unit 17 are emitting light simultaneously and continuously. 【0034】 Green image data 19b is video data generated by extracting images captured when the green sheet laser light is irradiated, based on the captured image data 19a, if the wind speed is below a predetermined threshold, and if the wind speed exceeds a predetermined threshold, it is video data generated by acquiring multiple images of the green signal component. 【0035】 The red image data 19c is video data generated by extracting an image captured when the red sheet laser is irradiated, based on the captured image data 19a, if the wind speed is below a predetermined threshold, and if the wind speed exceeds a predetermined threshold, it is video data generated by acquiring multiple images of the red signal component. 【0036】 The blue image data 19d is video data generated by acquiring multiple images of the blue signal component based on the captured image data 19a when the wind speed exceeds a predetermined threshold. 【0037】 The green image microparticle group detection data 19e is obtained by using the green image data 19b to determine the displacement vector Δx of the microparticle group at a minute time interval Δt between images. g The local velocity vector V ≈ Δx of the particle group is obtained by image processing. g This is the data used to calculate / Δt. 【0038】 The red image microparticle group detection data 19f is obtained by using the red image data 19c to detect the microparticle group captured in the video by calculating the displacement vector Δx of the microparticle group over a very short time interval Δt between images. r The local velocity vector V ≈ Δx of the particle group is obtained by image processing. r This is the data used to calculate / Δt. 【0039】 The blue image microparticle group detection data 19g uses the blue image data 19d to detect the microparticle group captured in the video by analyzing the displacement vector Δx of the microparticle group over a very short time interval Δt between images. r The local velocity vector V ≈ Δx of the particle group is obtained by image processing. rThis is the data used to calculate / Δt. 【0040】 The control unit 20 controls the entire particle ensemble detection device 10 and includes a wind direction / wind speed measurement processing unit 20a, an imaging area control unit 20b, an imaging control unit 20c, an irradiation control unit 20d, an image extraction processing unit 20e, an RGB signal acquisition unit 20f, a particle ensemble detection control unit 20g, and a display control unit 20h. In practice, these programs are loaded into the CPU and executed, causing the wind direction / wind speed measurement processing unit 20a, the imaging area control unit 20b, the imaging control unit 20c, the irradiation control unit 20d, the image extraction processing unit 20e, the RGB signal acquisition unit 20f, the particle ensemble detection control unit 20g, and the display control unit 20h to execute the processes corresponding to each of them. 【0041】 The wind direction and speed measurement processing unit 20a is a processing unit that measures the wind direction and speed of the airflow in the imaging area using the wind direction and speed meter 13. The imaging area control unit 20b is a processing unit that adjusts the imaging area of ​​the imaging unit 18 based on the wind direction and speed measurement processing unit 20a. Specifically, the imaging area control unit 20b adjusts the vertical elevation angle and horizontal angle of the imaging area adjustment mechanism 14 based on the wind direction and speed so that fumes and the like generated from the workpiece 60 during the arc welding process remain in the imaging area of ​​the imaging unit 18 within a predetermined time. 【0042】 The imaging control unit 20c is a processing unit that uses the imaging unit 18 to capture a video consisting of multiple images taken in a time series for a predetermined area including the workpiece 60, and stores the captured image data 19a in the storage unit 19. 【0043】 The irradiation control unit 20d (corresponding to the "control means" in the claim) is a processing unit that controls the emission mode of multiple sheet laser irradiation units according to the airflow velocity. Specifically, when the airflow velocity is below a predetermined threshold, the emission timing of the multiple sheet laser irradiation units is switched sequentially for irradiation, and when the airflow velocity exceeds the predetermined threshold, the multiple sheet laser irradiation units are irradiated simultaneously and continuously. 【0044】 The irradiation control unit 20d controls the green sheet laser irradiation unit 15 and the red sheet laser irradiation unit 16 when the airflow velocity in a predetermined area is below a predetermined threshold, and switches the emission timing of the green sheet laser light and the red sheet laser light in a time series to irradiate a predetermined area including the workpiece 60. It is desirable that the switching between the green sheet laser light and the red sheet laser light be synchronized with the video image from the imaging unit 18. 【0045】 For example, if the frame rate of the video from the imaging unit 18 is 60fps, the green sheet laser irradiation unit 15 and the red sheet laser irradiation unit 16 are switched 30 times each per second. Specifically, the green sheet laser irradiation unit 15 is turned on, the green sheet laser light is irradiated for 1 / 60 of a second, then the green sheet laser irradiation unit 15 is turned off, the red sheet laser irradiation unit 16 is turned on, the red sheet laser light is irradiated for 1 / 60 of a second, the red sheet laser irradiation unit 16 is turned off, and the green sheet laser irradiation unit 15 is turned on again, and this control is repeated. 【0046】 The irradiation control unit 20d may receive a signal from the imaging unit 18 to start imaging and begin switching the sheet laser irradiation in order to synchronize with the timing of the images of the video being captured. Alternatively, it may receive a sheet laser irradiation switching signal from the irradiation control unit 20d and begin imaging with the imaging unit 18. Note that the irradiation interval between the green sheet laser light and the red sheet laser light does not need to be synchronized with the frame rate of the video. 【0047】 Furthermore, when the airflow velocity in the imaging area exceeds a predetermined threshold, the irradiation control unit 20d turns on the green sheet laser irradiation unit 15, the red sheet laser irradiation unit 16, and the blue sheet laser irradiation unit 17, and simultaneously and continuously irradiates with green sheet laser light, red sheet laser light, and blue sheet laser light. 【0048】 The image extraction processing unit 20e is a processing unit that, when the wind speed in the imaging area is below a predetermined threshold, reads the image data 19a captured by the imaging unit 18 and stored in the storage unit 19, and extracts images illuminated by green sheet laser light and images illuminated by red sheet laser light. Specifically, it extracts images illuminated by green sheet laser light from multiple images of the image data 19a, generates a green extraction video and stores it in the storage unit 19 as green image data 19b, and extracts images illuminated by red sheet laser light, generates a red extraction video and stores it in the storage unit 19 as red image data 19c. 【0049】 Furthermore, if the irradiation of the green sheet laser light and the red sheet laser light is not synchronized with the multiple images captured by the imaging unit 18, the image extraction processing unit 20e may determine the color of each image in the captured image data 19a and perform image extraction. For example, if the green component of all pixels constituting a certain image is above a predetermined threshold, it is determined to be an image irradiated with green sheet laser light, and if the red component of all pixels constituting a certain image is above a predetermined threshold, it is determined to be an image irradiated with red sheet laser light, and image extraction is performed. 【0050】 The RGB signal acquisition unit 20f is a processing unit that, when the wind speed in the imaging area exceeds a predetermined threshold, reads the image data 19a captured by the imaging unit 18 and stored in the storage unit 19, acquires only the green signal component, red signal component, and blue signal component from the RAW data through image processing, generates a video of the green image, a video of the red image, and a video of the blue image, and stores them in the storage unit 19 as green image data 19b, red image data 19c, and blue image data 19d, respectively. 【0051】 The particle group detection control unit 20g (corresponding to the "detection means" in the claim) is a processing unit that detects a group of particles from the input image data. The particle group detection control unit 20g uses, for example, image velocity measurement or particle tracking. Image velocity measurement is a method for measuring the velocity of particles by analyzing the movement of a group of particles within an inspection area. Particle tracking is a method for measuring the velocity of particles by directly tracking the movement of the particles. Since image velocity measurement and particle tracking are existing technologies, a detailed explanation of them will be omitted. 【0052】 The particle swarm detection control unit 20g reads green image data 19b from the storage unit 19, analyzes the green image data 19b using particle image velocity measurement or particle tracking, and detects the movement of the particle swarm. The particle swarm detection control unit 20g also reads red image data 19c from the storage unit 19, analyzes the red image data 19c using particle image velocity measurement or particle tracking, and detects the movement of the particle swarm. The particle swarm detection control unit 20g also reads blue image data 19d from the storage unit 19, analyzes the blue image data 19d using particle image velocity measurement or particle tracking, and detects the movement of the particle swarm. 【0053】 The display control unit 20h is a control unit that displays the detection results of the fine particle group based on the green image data 19b, red image data 19c, and blue image data 19d detected by the fine particle group detection control unit 20g on a predetermined display unit 11. 【0054】 <Acquisition of captured images when wind speed is below a predetermined threshold> Next, an explanation will be given regarding the acquisition of the captured image in the imaging unit 18 of the particulate group detection device 10 when the wind speed is below a predetermined threshold value. FIG. 4 is an explanatory diagram for explaining video imaging when the wind speed of the particulate group detection device 10 is below a predetermined threshold value. As shown in FIG. 4, the imaging unit 18 captures a video composed of a plurality of images captured at each time series. Specifically, at time t1, the imaging unit 18 captures the first image f1 by turning on the green sheet laser light and turning off the red sheet laser light. Then, at time t2, the imaging unit 18 captures the second image f2 by turning off the green sheet laser light and turning on the red sheet laser light. 【0055】 Thereafter, at time t3, the imaging unit 18 captures the third image f3 by turning on the green sheet laser light and turning off the red sheet laser light. Then, at time t4, the imaging unit 18 captures the fourth image f4 by turning off the green sheet laser light and turning on the red sheet laser light. Also, at time t n the imaging unit 18 captures the nth image f n by turning on the green sheet laser light and turning off the red sheet laser light. Then, at time t n+1 the imaging unit 18 captures the (n + 1)th image f n+1 by turning off the green sheet laser light and turning on the red sheet laser light. 【0056】 <Regarding the green image data 19b when the wind speed is below a predetermined threshold value> Next, an explanation will be given regarding the green image data 19b when the wind speed is below a predetermined threshold value. FIG. 5 is an explanatory diagram for explaining the extraction of the green image when the wind speed is below a predetermined threshold value. As shown in FIG. 5, in the captured image data 19a captured by the imaging unit 18, the images f1, f3, f n captured by irradiating the green sheet laser light are extracted by the image extraction processing unit 20e, and only the images irradiated with the green sheet laser light are arranged in time series to generate the green image data 19b. 【0057】 <Regarding the red image data 19c when the wind speed is below a predetermined threshold value> Next, we will explain the red image data 19c when the wind speed is below a predetermined threshold. Figure 6 is an explanatory diagram for explaining the extraction of the red image when the wind speed is below a predetermined threshold. As shown in Figure 6, in the image data 19a captured by the imaging unit 18, images f2, f4, and f are captured by irradiating with red sheet laser light. n+1 The image is extracted by the image extraction processing unit 20e, and only the images irradiated with red sheet laser light are arranged in chronological order to generate red image data 19c. 【0058】 <Regarding image data when wind speed exceeds a predetermined threshold> Next, we will describe the image data when the wind speed exceeds a predetermined threshold. Figure 7 is an explanatory diagram illustrating the image data when the wind speed exceeds a predetermined threshold. As shown in Figure 7, the particulate matter swarm detection device 10 turns on the green sheet laser irradiation unit 15, the red sheet laser irradiation unit 16, and the blue sheet laser irradiation unit 17 to capture an image of the target area of ​​the workpiece 60, and stores the captured image data 19a in the storage unit 19. 【0059】 The particle ensemble detection device 10 then reads the captured image data 19a from the storage unit 19, extracts the green signal component from the data through image processing, generates a video consisting only of the green signal component, and stores it in the storage unit 19 as green image data 19b. Subsequently, the particle ensemble detection device 10 reads the captured image data 19a from the storage unit 19, extracts the red signal component from the data through image processing, generates a video consisting only of the red signal component, and stores it in the storage unit 19 as red image data 19c. Then, the particle ensemble detection device 10 reads the captured image data 19a from the storage unit 19, extracts the blue signal component from the data through image processing, generates a video consisting only of the blue signal component, and stores it in the storage unit 19 as blue image data 19d. 【0060】 <Processing procedure for the particulate matter detection device 10> Next, the processing procedure of the particulate matter detection device 10 will be described. Figure 8 is a flowchart of the processing procedure of the particulate matter detection device 10. As shown in Figure 8, the particulate matter detection device 10 measures the wind direction and wind speed in a predetermined area (step S101). Then, the particulate matter detection device 10 determines whether or not the wind speed is below a predetermined threshold (step S102). 【0061】 If the wind speed is below a predetermined threshold (step S102: Yes), the particle ensemble detection device 10 starts imaging a predetermined area (step S103). Then, the particle ensemble detection device 10 performs sheet laser switching processing to switch the emission timing of the green sheet laser irradiation unit 15 and the red sheet laser irradiation unit 16 over time (step S104). After that, the particle ensemble detection device 10 stops imaging (step S105) and performs first particle ensemble detection processing to detect the particle ensemble (step S106). 【0062】 The particulate matter group detection device 10 then determines whether or not to terminate the detection process (step S107). If the particulate matter group detection device 10 does not terminate the detection process (step S107: No), it proceeds to step S103. If the particulate matter group detection device 10 does terminate the detection process (step S107: Yes), it terminates the process. 【0063】 On the other hand, if the wind speed is not less than a predetermined threshold (step S102: No), the particle ensemble detection device 10 continuously irradiates the green sheet laser irradiation unit 15, the red sheet laser irradiation unit 16, and the blue sheet laser irradiation unit 17 in a time-series manner and performs imaging processing (step S108). Then, the particle ensemble detection device 10 stops imaging (step S109) and performs a second particle ensemble detection process to detect the particle ensemble (step S110). 【0064】 The particulate matter group detection device 10 then determines whether or not to terminate the detection process (step S111). If the particulate matter group detection device 10 does not terminate the detection process (step S111: No), it proceeds to step S108. If the particulate matter group detection device 10 does terminate the detection process (step S111: Yes), it terminates the process. 【0065】 <Processing procedure for sheet laser switching unit> Next, the processing procedure for sheet laser switching will be described. Figure 9 is a flowchart showing the processing procedure for sheet laser switching. As shown in Figure 9, the particle ensemble detection device 10 turns on the green sheet laser light (step S201). Then, the particle ensemble detection device 10 determines whether a predetermined time has elapsed (step S202). Here, the predetermined time is, for example, 1 / 60 of a second. If the predetermined time has not elapsed (step S202: No), the particle ensemble detection device 10 waits until the predetermined time has elapsed. 【0066】 If a predetermined time has elapsed (Step S202: Yes), the particle ensemble detection device 10 turns off the green sheet laser light (Step S203) and turns on the red sheet laser light (Step S204). Then, the particle ensemble detection device 10 determines whether or not the predetermined time has elapsed (Step S205). Here, the predetermined time is, for example, 1 / 60 of a second. If the predetermined time has not elapsed (Step S205: No), the particle ensemble detection device 10 waits until the predetermined time has elapsed. 【0067】 If a predetermined time has elapsed (step S205: Yes), the particle group detection device 10 turns off the red sheet laser light (step S206). Then, the particle group detection device 10 determines whether or not the predetermined time has elapsed (step S207). Here, the predetermined time is, for example, 60 seconds. If the predetermined time has not elapsed (step S207: No), the particle group detection device 10 proceeds to step S201. If the predetermined time has elapsed (step S207: Yes), the particle group detection device 10 returns to step S105 in Figure 8. 【0068】 <Processing procedure for detecting the first group of fine particles> Next, the processing procedure for the first particle group detection process will be described. Figure 10 is a flowchart showing the processing procedure for the first particle group detection process. As shown in Figure 10, the particle group detection device 10 extracts a green image from the captured image irradiated with green sheet laser light (step S301). The particle group detection device 10 then inputs the green image to the particle group detection control unit 20g and detects the particle group based on the green image (step S302). Subsequently, the particle group detection device 10 extracts a red image from the captured image irradiated with red sheet laser light (step S303). The particle group detection device 10 then inputs the red image to the particle group detection control unit 20g and detects the particle group based on the red image (step S304). After that, the particle group detection device 10 controls the display of the particle group on a predetermined display unit 11 (step S305) and returns to step S107 in Figure 8. 【0069】 <Processing procedure for imaging> Next, the imaging process procedure will be described. Figure 11 is a flowchart showing the imaging process procedure. As shown in Figure 11, the particle ensemble detection device 10 adjusts the imaging area based on the wind direction and wind speed (step S401). Then, the particle ensemble detection device 10 turns on the green sheet laser irradiation unit 15, the red sheet laser irradiation unit 16, and the blue sheet laser irradiation unit 17 and starts irradiating with sheet laser light (step S402). 【0070】 Subsequently, the particle group detection device 10 captures an image of a predetermined area (step S403). Then, the particle group detection device 10 determines whether a predetermined time has elapsed (step S404). Here, the predetermined time is, for example, 60 seconds. If the predetermined time has not elapsed (step S404: No), the particle group detection device 10 proceeds to step S403. If the predetermined time has elapsed (step S404: Yes), the particle group detection device 10 returns to step S109 in Figure 8. 【0071】 <Processing procedure for detecting the second group of fine particles> Next, the processing procedure for the second particle group detection process will be described. Figure 12 is a flowchart showing the processing procedure for the second particle group detection process. As shown in Figure 12, the particle group detection device 10 acquires green image data from the captured image by performing image processing to acquire the green signal component from the captured image (step S501). 【0072】 Then, the particle group detection device 10 acquires red image data from the captured image by performing image processing to acquire the red signal component from the captured image (step S502). Subsequently, the particle group detection device 10 acquires blue image data from the captured image by performing image processing to acquire the blue signal component from the captured image (step S503). Then, the particle group detection device 10 detects a group of particles based on the green image data by inputting the green image data to the particle group detection control unit 20g (step S504). 【0073】 Subsequently, the particulate matter group detection device 10 detects a group of particulate matter based on the red image data by inputting the red image data into the particulate matter group detection control unit 20g (step S505). Then, the particulate matter group detection device 10 detects a group of particulate matter based on the blue image data by inputting the blue image data into the particulate matter group detection control unit 20g (step S506). After that, the particulate matter group detection device 10 controls the display of the detected group of particulate matter on a predetermined display unit 11 (step S507), and returns to step S111 in Figure 8. 【0074】 As described above, in this embodiment, the particulate matter group detection device 10 measures the wind direction and wind speed of the airflow in a predetermined area. If the wind speed of the airflow is below a predetermined threshold, it irradiates the area while switching the emission timing of green and red sheet laser light in a time series, extracts images captured by each sheet laser light from the captured video, and detects particulate matter groups based on each image. Furthermore, if the wind speed of the airflow exceeds a predetermined threshold, it irradiates the area with green, red, and blue sheet laser light simultaneously and continuously, obtains images captured by each sheet laser light from the captured video through image processing, and detects particulate matter groups based on each image. This allows for detection results that can determine each particulate matter group even when different types of particulate matter groups with different colors and densities are mixed together, even if the wind speed of the airflow is different. 【0075】 In the above embodiment, the case of detecting a group of microparticles using green, red, and blue sheet laser light, which are visible light, was described. However, the sheet laser light used to irradiate the group of microparticles may also be infrared light, ultraviolet light, or other light with different wavelengths that are not visible light. 【0076】 Furthermore, although the above embodiment described a case in which fine particles are detected using sheet laser light of different colors, the fine particle group detection device 10 may also be equipped with an abnormality determination unit, and by inputting the detected green image fine particle group detection data 19e and red image fine particle group detection data 19f, or green image fine particle group detection data 19e, red image fine particle group detection data 19f and blue image fine particle group detection data 19g, an alarm may be displayed when fine particles meeting pre-set conditions are detected. 【0077】 The configurations illustrated in each of the above embodiments are functional schematics and do not necessarily have to be physically represented as shown. In other words, the distributed and integrated forms of each device are not limited to those shown, and all or part of them can be functionally or physically distributed and integrated in any unit according to various loads and usage conditions. [Industrial applicability] 【0078】 The particulate matter detection device and particulate matter detection method according to the present invention are suitable for efficiently distinguishing and detecting each particulate matter group based on the wind speed in the detection area of ​​the particulate matter group when there are multiple particulate matter groups with different characteristics (color, density, etc.). [Explanation of symbols] 【0079】 10. Particle ensemble detection device 11 Display section 12 Input section 13 Wind direction / speed measurement section 14. Imaging area adjustment mechanism 15. Green sheet laser irradiation area 16 Red sheet laser irradiation area 17. Blue sheet laser irradiation area 18 Imaging Unit 19 Memory section 19a Image data 19b Green image data 19th century red image data 19d blue image data 19e Green image microparticle group detection data 19f Red Image Particle Group Detection Data 19g blue image microparticle detection data 20 Control Unit 20a Wind direction and wind speed measurement processing unit 20b Imaging area control unit 20c Imaging Control Unit 20d Irradiation control unit 20e Image extraction processing unit 20f RGB signal acquisition section 20g Particle Group Detection and Control Unit 20h Display Control Unit 50a Robot Arm 60. Object to be processed

Claims

[Claim 1] A particle ensemble detection device for detecting multiple groups of particles located in a predetermined area, Multiple light-emitting means for irradiating the three primary colors of light toward the predetermined region, A measuring means for measuring the wind direction and wind speed of the airflow in the surrounding area including the predetermined area, A control means for controlling the emission mode of the plurality of light-emitting means according to the wind speed measured by the measuring means, An imaging means for capturing multiple images of the predetermined region under light emission control by the control means, A detection means for detecting the plurality of microparticle groups based on the plurality of images captured by the imaging means. A device for detecting a group of particulate matter, characterized by being equipped with the following features. [Claim 2] The control means is The particulate matter group detection device according to claim 1, characterized in that when the wind speed measured by the measuring means exceeds a predetermined threshold, the light emitted from the plurality of light-emitting means is controlled to be emitted simultaneously and continuously. [Claim 3] The control means is The particulate matter group detection device according to claim 1, characterized in that when the wind speed measured by the measuring means is below a predetermined threshold, the device controls the emission timing of the multiple light-emitting means to be switched in a time series while emitting light. [Claim 4] The detection means is The particle group detection device according to claim 2 or 3, characterized in that it detects the plurality of particle groups based on predetermined color component images of the plurality of images captured by the imaging means. [Claim 5] The plurality of light-emitting means are The particle cluster detection device according to claim 1, characterized by comprising a red sheet laser irradiation means for irradiating with red sheet laser light, a green sheet laser irradiation means for irradiating with green sheet laser light, and a blue sheet laser irradiation means for irradiating with blue sheet laser light. [Claim 6] The detection means is The particle group detection device according to claim 1, characterized in that it detects the plurality of particle groups by a predetermined particle image velocity measurement method or a predetermined particle tracking method. [Claim 7] A particle group detection device comprising a plurality of light-emitting units that each emit light of the three primary colors toward a predetermined area, and a measuring unit that measures the wind direction and wind speed of the airflow in the surrounding area including the predetermined area, wherein a plurality of particle group detection devices for detecting a plurality of particle group detection devices located in the predetermined area, A control step that controls the emission mode of the plurality of light-emitting means according to the wind speed measured by the measuring unit, An imaging step of capturing multiple images of the predetermined region under light emission control by the control step, A detection step for detecting the plurality of microparticle groups based on the plurality of images captured by the imaging step, A method for detecting a group of fine particles, characterized by including the following:

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