Phase characteristic measuring device, signal generator and signal analyzer equipped therewith, and phase characteristic measuring method

Abstract

By using a detector and voltmeter that do not require high-speed trigger operation, the present invention provides a phase characteristic measurement device that avoids the need for large-scale equipment used for phase measurement and enables relatively inexpensive phase measurement. [Solution] The system includes a first detector 11 that receives and detects three patterns of three-tone signals: a first three-tone signal obtained by combining three waves with angular frequencies ω1, ω2, and ω3 (where ω2-ω1=ω3-ω2=Δω), a second three-tone signal in which each tone has a phase offset, and a third three-tone signal having a different phase offset from the second three-tone signal; a BPF 12 that passes only the beat component of the signal output from the first detector, where the angular frequency difference Δω is between adjacent waves of the three-tone signals; a second detector 13 that detects the power of the beat component that has passed through the BPF 12; a voltmeter 14 that measures the voltage of the signal output from the second detector; and a phase calculator 15 that calculates the phase based on the measured voltage values ​​of the three patterns.

Claims

1. The three waves e represented by the following equation (1) １ , e ２ , e ３ The first three-tone signal obtained by combining these, and the three waves e represented by the following equation (2) １ , e ２ , e ３ A first detector (11) receives and detects a second three-tone signal obtained by combining the two signals, each of which is used as a phase measurement signal. A bandpass filter (12) is provided that, among the signals output from the first detector, allows the frequency component of each of the phase measurement signals to pass through, where the frequency of the signal is the angular frequency difference Δω between adjacent waves, while blocking the frequency component of twice the angular frequency difference Δω and the DC component. A second detector (13) detects the signal that has passed through the bandpass filter, A voltmeter (14) for measuring the voltage of the signal output from the second detector, The phase φ is expressed by the following equation (3) ２ A phase calculator (15) that calculates ", A phase characteristic measuring device equipped with the following features. [Math 1] [Math 2] [Math 3] (In the above formulas (1), (2), and (3), ω ｉ is the angular frequency, φ ｉ is the phase, t represents time, and ω ２ −ω １ = ω ３ −ω ２ = Δω, where α ｉ is the phase offset of the aforementioned second three-tone signal, and α ｉ The second difference of φ α When φ α = α ３ -2α ２ +α １ And, E ｂｅａｔ (φ α ) is the aforementioned α ｉ The second-order difference is the aforementioned φ α When the second three-tone signal, which is set to the specified value, is detected by the first detector, this value represents a value obtained from the voltage value measured by the voltmeter that is proportional to the power of the signal that has passed through the bandpass filter. E ｂｅａｔ (0) represents a value obtained from the voltage value measured by the voltmeter when the first three-tone signal is detected by the first detector, and is proportional to the power of the signal that has passed through the bandpass filter.

2. The three waves e represented by the following equation (4) １ , e ２ , e ３ The first three-tone signal obtained by combining these, the three waves e represented by the following equation (5) １ , e ２ , e ３ A second three-tone signal obtained by combining the two, and three waves e represented by the following equation (6) １ , e ２ , e ３ A first detector (11) receives and detects a third three-tone signal obtained by combining the two signals, each of which is used as a phase measurement signal. A second detector (13) detects the signal output from the first detector, A voltmeter (14) for measuring the voltage of the signal output from the second detector, The phase φ is expressed by the following equation (7) ２ A phase calculator (15) that calculates ", A phase characteristic measuring device equipped with the following features. [Math 4] [Math 5] [Math 6] [Number 7] (In the above equations (4), (5), (6), and (7), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ ω represents the phase, t represents time, and ω represents the phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, α ２ｉ is the phase offset of the aforementioned third three-tone signal, and α ２ｉ The second difference of φ α２ When φ α２ = α ２３ -2α ２２ +α ２１ And, f α１ =π / 2+Δφ α１ +Df α２ ,f α２ =π+2Δφ α２ とく、 E ｂｅａｔ (0) represents a value obtained from the voltage value measured by the voltmeter when the first three-tone signal is detected by the first detector, and is proportional to the power of the signal output from the first detector. E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal, which is set to the specified value, is detected by the first detector, this value represents a value obtained from the voltage measured by the voltmeter that is proportional to the power of the signal output from the first detector. E ｂｅａｔ (φ α２ ) is the aforementioned α ２ｉ The second-order difference is the aforementioned φ α２ (This represents a value proportional to the power of the signal output from the first detector, obtained from the voltage value measured by the voltmeter when the third three-tone signal, which is set to the specified value, is detected by the first detector.)

3. The three waves e represented by the following equation (8) １ , e ２ , e ３ The first three-tone signal obtained by combining these, the three waves e represented by the following equation (9) １ , e ２ , e ３ A second three-tone signal obtained by combining the two, and three waves e represented by the following equation (10) １ , e ２ , e ３ A first detector (11) receives and detects a third three-tone signal obtained by combining the two signals, each of which is used as a phase measurement signal. A second detector (13) detects the signal output from the first detector, A voltmeter (14) for measuring the voltage of the signal output from the second detector, The phase φ is represented by the following equation (11) ２ A phase calculator (15) that calculates ", A phase characteristic measuring device equipped with the following features. [Number 8] [Number 9] [Number 10] [Math 11] (In the above equations (8), (9), (10), and (11), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ ω represents the phase, t represents time, and ω represents the phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the second three-tone signal, and the second-order difference of the said α １ｉ is φ when α１ is used, and φ α１ = α １３ - 2α １２ + α １１ and α ２ｉ is the phase offset of the third three-tone signal, and the second derivative of the α ２ｉ is φ when taking the second derivative of the α α２ When taking the second derivative of the α α２ φ ２３ = α ２２ - 2α ２１ + α and f α１ =π / 2+Δφ α１ +Df α２ ,f α２ =π+2Δφ α２ とく、 E ｂｅａｔ (0) represents a value obtained from the voltage value measured by the voltmeter when the first three-tone signal is detected by the first detector, and is proportional to the power of the signal output from the first detector. E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal, which is set to the specified value, is detected by the first detector, this value represents a value obtained from the voltage measured by the voltmeter that is proportional to the power of the signal output from the first detector. E ｂｅａｔ (φ α２ ) is the aforementioned α ２ｉ The second-order difference is the aforementioned φ α２ (This represents a value proportional to the power of the signal output from the first detector, obtained from the voltage value measured by the voltmeter when the third three-tone signal, which is set to the specified value, is detected by the first detector.)

4. The three waves e represented by the following equation (12) １ , e ２ , e ３ The first three-tone signal obtained by combining these, the three waves e represented by the following equation (13) １ , e ２ , e ３ The second three-tone signal obtained by combining these is represented by the following equation (14): three waves e １ , e ２ , e ３ A third three-tone signal obtained by combining the above, and three waves e represented by the following equation (15) １ , e ２ , e ３ A first detector (11) receives and detects a fourth three-tone signal obtained by combining the two signals, each of which is used as a phase measurement signal. A second detector (13) detects the signal output from the first detector, A voltmeter (14) for measuring the voltage of the signal output from the second detector, The phase φ is represented by the following equation (16) ２ A phase calculator (15) that calculates ", A phase characteristic measuring device equipped with the following features. [Math 12] [Number 13] [Number 14] [Number 15] [Number 16] (In the above formulas (12), (13), (14), (15), and (16), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ ω represents the phase, t represents time, and ω represents the phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, α ２ｉ is the phase offset of the aforementioned third three-tone signal, and α ２ｉ The second difference of φ α２ When φ α２ = α ２３ -2α ２２ +α ２１ And, α ３ｉ is the phase offset of the fourth three-tone signal, and α ３ｉ The second difference of φ α３ When φ α３ = α ３３ -2α ３２ +α ３１ And, f α１ =π / 2+Δφ α１ +Df α２ ,f α２ =π+2Δφ α２ ,f α３ =3π / 2+Δφ α３ +Df α２ とく、 E ｂｅａｔ (0) represents a value obtained from the voltage value measured by the voltmeter when the first three-tone signal is detected by the first detector, and is proportional to the power of the signal output from the first detector. E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal, which is set to the specified value, is detected by the first detector, this value represents a value obtained from the voltage measured by the voltmeter that is proportional to the power of the signal output from the first detector. E ｂｅａｔ (φ α２ ) is the aforementioned α ２ｉ The second-order difference is the aforementioned φ α２ When the third three-tone signal, which is set to the specified value, is detected by the first detector, this value represents a value obtained from the voltage measured by the voltmeter that is proportional to the power of the signal output from the first detector. E ｂｅａｔ (φ α３ ) is the aforementioned α ３ｉ The second-order difference is the aforementioned φ α３ (This represents a value proportional to the power of the signal output from the first detector, obtained from the voltage value measured by the voltmeter when the fourth three-tone signal, which is set to [value], is detected by the first detector.)

5. The three waves e represented by the following equation (17) １ , e ２ , e ３ The first three-tone signal obtained by combining these, the three waves e represented by the following equation (18) １ , e ２ , e ３ The second three-tone signal obtained by combining these is represented by the following equation (19): three waves e １ , e ２ , e ３ A third three-tone signal obtained by combining the above, and three waves e represented by the following equation (20) １ , e ２ , e ３ A first detector (11) receives and detects a fourth three-tone signal obtained by combining the two signals, each of which is used as a phase measurement signal. A second detector (13) detects the signal output from the first detector, A voltmeter (14) for measuring the voltage of the signal output from the second detector, The phase φ is represented by the following equation (21) ２ A phase calculator (15) that calculates ", A phase characteristic measuring device equipped with the following features. [Number 17] [Number 18] [Number 19] [Number 20] [Math 21] (In the above formulas (17), (18), (19), (20), and (21), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ ω represents the phase, t represents time, and ω represents the phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, α ２ｉ is the phase offset of the aforementioned third three-tone signal, and α ２ｉ The second difference of φ α２ When φ α２ = α ２３ -2α ２２ +α ２１ And, α ３ｉ is the phase offset of the fourth three-tone signal, and α ３ｉ The second difference of φ α３ When φ α３ = α ３３ -2α ３２ +α ３１ And, f α１ =π / 2+Δφ α１ +Df α２ ,f α２ =π+2Δφ α２ ,f α３ =3π / 2+Δφ α３ +Df α２ とく、 E ｂｅａｔ (0) represents a value obtained from the voltage value measured by the voltmeter when the first three-tone signal is detected by the first detector, and is proportional to the power of the signal output from the first detector. E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal, which is set to the specified value, is detected by the first detector, this value represents a value obtained from the voltage measured by the voltmeter that is proportional to the power of the signal output from the first detector. E ｂｅａｔ (φ α２ ) is the aforementioned α ２ｉ The second-order difference is the aforementioned φ α２ When the third three-tone signal, which is set to the specified value, is detected by the first detector, this value represents a value obtained from the voltage measured by the voltmeter that is proportional to the power of the signal output from the first detector. E ｂｅａｔ (φ α３ ) is the aforementioned α ３ｉ The second-order difference is the aforementioned φ α３ (This represents a value proportional to the power of the signal output from the first detector, obtained from the voltage value measured by the voltmeter when the fourth three-tone signal, which is set to [value], is detected by the first detector.)

6. The two waves e represented by the following equation (22) １ , e ２ The first two-tone signal obtained by combining the two waves e is represented by the following equation (23). ２ , e ３ The second two-tone signal obtained by combining these is represented by the following equation (24): 3 waves e １ , e ２ , e ３ The first three-tone signal obtained by combining these, and the three waves e represented by the following equation (25) １ , e ２ , e ３ A first detector (11) receives and detects a second three-tone signal obtained by combining the two signals, each of which is used as a phase measurement signal. A bandpass filter (12) is provided that, among the signals output from the first detector, allows the frequency component of each of the phase measurement signals to pass through, where the frequency of the signal is the angular frequency difference Δω between adjacent waves, while blocking the frequency component of twice the angular frequency difference Δω and the DC component. A second detector (13) detects the signal that has passed through the bandpass filter, A voltmeter (14) for measuring the voltage of the signal output from the second detector, The phase φ is represented by the following equation (26) ２ A phase calculator (15) that calculates ", A phase characteristic measuring device equipped with the following features. [Number 22] [Number 23] [Number 24] [Number 25] [Number 26] (In the above formulas (22), (23), (24), (25), and (26), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ γ is phase, γ ｉ ω represents an arbitrary phase, t represents time, and ω represents an arbitrary phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, f α１ =π / 2+Δφ α１ とく、 E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal, which is set to the specified value, is detected by the first detector, this value represents a value obtained from the voltage value measured by the voltmeter that is proportional to the power of the signal that has passed through the bandpass filter. E ｂｅａｔ (0) represents a value obtained from the voltage value measured by the voltmeter when the first three-tone signal is detected by the first detector, which is proportional to the power of the signal that has passed through the bandpass filter. E ｂｅａｔ (a １ = 0) represents a value obtained from the voltage value measured by the voltmeter when the second two-tone signal is detected by the first detector, which is proportional to the power of the signal that has passed through the bandpass filter. E ｂｅａｔ (a ３ (=0) represents a value obtained from the voltage value measured by the voltmeter when the first two-tone signal is detected by the first detector, and is proportional to the power of the signal that has passed through the bandpass filter.

7. The two waves e represented by the following equation (27) １ , e ２ The first two-tone signal obtained by combining the two waves is represented by the following equation (28): ２ , e ３ The second two-tone signal obtained by combining the two is represented by the following equation (29) as three waves e １ , e ２ , e ３ A first three-tone signal obtained by combining these, and three waves e represented by the following equation (30) １ , e ２ , e ３ A first detector (11) receives and detects a second three-tone signal obtained by combining the two signals, each of which is used as a phase measurement signal. A bandpass filter (12) is provided that, among the signals output from the first detector, allows the frequency component of each of the phase measurement signals to pass through, where the frequency of the signal is the angular frequency difference Δω between adjacent waves, while blocking the frequency component of twice the angular frequency difference Δω and the DC component. A second detector (13) detects the signal that has passed through the bandpass filter, A voltmeter (14) for measuring the voltage of the signal output from the second detector, The phase φ is expressed by the following equation (31) ２ A phase calculator (15) that calculates ", A phase characteristic measuring device equipped with the following features. [Number 27] [Number 28] [Number 29] [Number 30] [Number 31] (In the above formulas (27), (28), (29), (30), and (31), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ γ is phase, γ ｉ ω represents an arbitrary phase, t represents time, and ω represents an arbitrary phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, f α１ =π / 2+Δφ α１ とく、 E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal, which is set to the specified value, is detected by the first detector, this value represents a value obtained from the voltage value measured by the voltmeter that is proportional to the power of the signal that has passed through the bandpass filter. E ｂｅａｔ (0) represents a value obtained from the voltage value measured by the voltmeter when the first three-tone signal is detected by the first detector, which is proportional to the power of the signal that has passed through the bandpass filter. E ｂｅａｔ (a １ = 0) represents a value obtained from the voltage value measured by the voltmeter when the second two-tone signal is detected by the first detector, which is proportional to the power of the signal that has passed through the bandpass filter. E ｂｅａｔ (a ３ (=0) represents a value obtained from the voltage value measured by the voltmeter when the first two-tone signal is detected by the first detector, and is proportional to the power of the signal that has passed through the bandpass filter.

8. The two waves e represented by the following equation (32) １ , e ２ The first two-tone signal obtained by combining the two waves e is represented by the following equation (33). ２ , e ３ A second two-tone signal obtained by combining the two, and a three-wave e represented by the following equation (34) １ , e ２ , e ３ A first detector (11) receives and detects each of the three tone signals obtained by combining them as phase measurement signals, A bandpass filter (12) is provided that, among the signals output from the first detector, allows the frequency component of each of the phase measurement signals to pass through, where the frequency of the signal is the angular frequency difference Δω between adjacent waves, while blocking the frequency component of twice the angular frequency difference Δω and the DC component. A second detector (13) detects the signal that has passed through the bandpass filter, A voltmeter (14) for measuring the voltage of the signal output from the second detector, The phase φ is expressed by the following equation (35) ２ A phase calculator (15) that calculates ", A phase characteristic measuring device equipped with the following features. [Number 32] [Number 33] [Number 34] [Number 35] (In the above formulas (32), (33), (34), and (35), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ γ is phase, γ ｉ ω represents an arbitrary phase, t represents time, and ω represents an arbitrary phase. ２ -ω １ = ω ３ -ω ２ = Δω, E ｂｅａｔ (0) represents a value obtained from the voltage value measured by the voltmeter when the three-tone signal is detected by the first detector, which is proportional to the power of the signal that has passed through the bandpass filter. E ｂｅａｔ (a １ = 0) represents a value obtained from the voltage value measured by the voltmeter when the second two-tone signal is detected by the first detector, which is proportional to the power of the signal that has passed through the bandpass filter. E ｂｅａｔ (a ３ (=0) represents a value obtained from the voltage value measured by the voltmeter when the first two-tone signal is detected by the first detector, and is proportional to the power of the signal that has passed through the bandpass filter.

9. A high-frequency signal generation unit (2) that generates a high-frequency signal and the phase measurement signal, A coupler (3) that splits the signal output from the high-frequency signal generation unit and outputs one of the signals as an output signal, When the high-frequency signal generation unit generates the phase measurement signal, the other signal, which has been branched by the coupler, is input, and the phase φ is measured from the input phase measurement signal. ２ A phase characteristic measuring device (1) according to any one of claims 1 to 8, which measures the phase characteristics of the high-frequency signal generating unit by measuring ", A signal generating device comprising the above, wherein when the high-frequency signal generating unit generates the high-frequency signal, the phase characteristics of the high-frequency signal are corrected based on the phase characteristics of the high-frequency signal generating unit measured by the phase characteristics measuring device.

10. A reference signal generation unit (20) that generates a reference signal and the phase measurement signal, A coupler (3) that branches the signal output from the reference signal generation unit, When the reference signal generation unit generates the phase measurement signal, one of the signals branched by the coupler is input, and the phase φ is measured from the input phase measurement signal. ２ A phase characteristic measuring device (1) according to any one of claims 1 to 8, which measures the phase characteristics of the reference signal generating unit by measuring ", A switch (4) selects either the other signal branched by the coupler or the input signal, A high-frequency signal analysis unit (5) analyzes the signal selected by the switch, A signal analysis device comprising the following: when the reference signal generation unit generates the reference signal and the other signal branched by the coupler is selected by the switch, the phase characteristics of the high-frequency signal analysis unit are calculated from the phase characteristics of the reference signal measured by the high-frequency signal analysis unit and the phase characteristics of the reference signal generation unit measured by the phase characteristics measuring device; when the input signal is selected by the switch, the phase characteristics of the high-frequency signal analysis unit when analyzing the input signal are corrected based on the calculated phase characteristics of the high-frequency signal analysis unit, and the signal analysis of the input signal with corrected phase characteristics is performed.

11. The three waves e represented by the following equation (36) １ , e ２ , e ３ The first three-tone signal obtained by combining these, and the three waves e represented by the following equation (37) １ , e ２ , e ３ A phase measurement signal generation step in which a second three-tone signal obtained by combining these signals is generated as a phase measurement signal, A first detection step of detecting the phase measurement signal, A bandpass filter step is used to filter the signal obtained in the first detection step, such that the frequency component of each of the phase measurement signals passes through the angular frequency difference Δω between adjacent waves, and the frequency component of twice the angular frequency difference Δω and the DC component are blocked. A second detection step in which the signal that has passed through the bandpass filter step is detected, A voltage measurement step for measuring the voltage of the signal obtained by the second detection step, The phase φ is expressed by the following equation (38) ２ The phase calculation step for calculating ", A phase characteristic measurement method equipped with the following features. [Number 36] [Number 37] [Number 38] (In the above equations (36), (37), and (38), ω ｉ φ is the angular frequency. ｉ ω represents the phase, t represents time, and ω represents the phase. ２ -ω １ = ω ３ -ω ２ = Δω, α ｉ is the phase offset of the aforementioned second three-tone signal, and α ｉ The second difference of φ α When φ α = α ３ -2α ２ +α １ And, E ｂｅａｔ (φ α ) is the aforementioned α ｉ The second-order difference is the aforementioned φ α When the second three-tone signal set to is detected in the first detection step, this represents a value obtained from the voltage value measured in the voltage measurement step, which is proportional to the power of the signal that passed through the bandpass filter step. E ｂｅａｔ (0) represents a value obtained from the voltage value measured in the voltage measurement step when the first three-tone signal is detected in the first detection step, and is proportional to the power of the signal that passed through the bandpass filter step.

12. The three waves e represented by the following equation (39) １ , e ２ , e ３ The first three-tone signal obtained by combining these, the three waves e represented by the following equation (40) １ , e ２ , e ３ A second three-tone signal obtained by combining the two, and three waves e represented by the following equation (41) １ , e ２ , e ３ A phase measurement signal generation step in which a third three-tone signal obtained by combining the two signals is generated as a phase measurement signal, A first detection step of detecting the phase measurement signal, A second detection step in which the signal obtained by the first detection step is detected, A voltage measurement step for measuring the voltage of the signal obtained by the second detection step, The phase φ is expressed by the following equation (42) ２ The phase calculation step for calculating ", A phase characteristic measurement method equipped with the following features. [Number 39] [Number 40] [Number 41] [Number 42] (In the above formulas (39), (40), (41), and (42), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ ω represents the phase, t represents time, and ω represents the phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, α ２ｉ is the phase offset of the aforementioned third three-tone signal, and α ２ｉ The second difference of φ α２ When φ α２ = α ２３ -2α ２２ +α ２１ And, f α１ =π / 2+Δφ α１ +Df α２ ,f α２ =π+2Δφ α２ とく、 E ｂｅａｔ (0) represents a value obtained from the voltage measured in the voltage measurement step when the first three-tone signal is detected in the first detection step, and is proportional to the power of the signal obtained in the first detection step. E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal set to is detected in the first detection step, this represents a value obtained from the voltage value measured in the voltage measurement step, which is proportional to the power of the signal obtained in the first detection step. E ｂｅａｔ (φ α２ ) is the aforementioned α ２ｉ The second-order difference is the aforementioned φ α２ (This represents a value proportional to the power of the signal obtained in the first detection step, obtained from the voltage value measured in the voltage measurement step, when the third three-tone signal set to is detected in the first detection step.)

13. The three waves e represented by the following equation (43) １ , e ２ , e ３ The first three-tone signal obtained by combining these, the three waves e represented by the following equation (44) １ , e ２ , e ３ A second three-tone signal obtained by combining the two, and three waves e represented by the following equation (45) １ , e ２ , e ３ A phase measurement signal generation step in which a third three-tone signal obtained by combining the two signals is generated as a phase measurement signal, A first detection step of detecting the phase measurement signal, A second detection step in which the signal obtained by the first detection step is detected, A voltage measurement step for measuring the voltage of the signal obtained by the second detection step, The phase φ is expressed by the following equation (46) ２ The phase calculation step for calculating ", A phase characteristic measurement method equipped with the following features. [Number 43] [Number 44] [Number 45] [Number 46] (In the above formulas (43), (44), (45), and (46), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ ω represents the phase, t represents time, and ω represents the phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, α ２ｉ is the phase offset of the aforementioned third three-tone signal, and α ２ｉ The second difference of φ α２ When φ α２ = α ２３ -2α ２２ +α ２１ And, f α１ =π / 2+Δφ α１ +Df α２ ,f α２ =π+2Δφ α２ とく、 E ｂｅａｔ (0) represents a value obtained from the voltage measured in the voltage measurement step when the first three-tone signal is detected in the first detection step, and is proportional to the power of the signal obtained in the first detection step. E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal set to is detected in the first detection step, this represents a value obtained from the voltage value measured in the voltage measurement step, which is proportional to the power of the signal obtained in the first detection step. E ｂｅａｔ (φ α２ ) is the aforementioned α ２ｉ The second-order difference is the aforementioned φ α２ (This represents a value proportional to the power of the signal obtained in the first detection step, obtained from the voltage value measured in the voltage measurement step, when the third three-tone signal set to is detected in the first detection step.)

14. The three waves e represented by the following equation (47) １ , e ２ , e ３ The first three-tone signal obtained by combining these, the three waves e represented by the following equation (48) １ , e ２ , e ３ The second three-tone signal obtained by combining these is represented by the following equation (49): three waves e １ , e ２ , e ３ A third three-tone signal obtained by combining these, and three waves e represented by the following equation (50) １ , e ２ , e ３ A phase measurement signal generation step in which a fourth three-tone signal obtained by combining these signals is generated as a phase measurement signal, A first detection step of detecting the phase measurement signal, A second detection step in which the signal obtained by the first detection step is detected, A voltage measurement step for measuring the voltage of the signal obtained by the second detection step, The phase φ is expressed by the following equation (51) ２ The phase calculation step for calculating ", A phase characteristic measurement method equipped with the following features. [Number 47] [Number 48] [Number 49] [Number 50] [Number 51] (In the above formulas (47), (48), (49), (50), and (51), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ ω represents the phase, t represents time, and ω represents the phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, α ２ｉ is the phase offset of the aforementioned third three-tone signal, and α ２ｉ The second difference of φ α２ When φ α２ = α ２３ -2α ２２ +α ２１ And, α ３ｉ is the phase offset of the fourth three-tone signal, and α ３ｉ The second difference of φ α３ When φ α３ = α ３３ -2α ３２ +α ３１ And, f α１ =π / 2+Δφ α１ +Df α２ ,f α２ =π+2Δφ α２ ,f α３ =3π / 2+Δφ α３ +Df α２ とく、 E ｂｅａｔ (0) represents a value obtained from the voltage measured in the voltage measurement step when the first three-tone signal is detected in the first detection step, and is proportional to the power of the signal obtained in the first detection step. E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal set to is detected in the first detection step, this represents a value obtained from the voltage value measured in the voltage measurement step, which is proportional to the power of the signal obtained in the first detection step. E ｂｅａｔ (φ α２ ) is the aforementioned α ２ｉ The second-order difference is the aforementioned φ α２ When the third three-tone signal set to is detected in the first detection step, this represents a value obtained from the voltage value measured in the voltage measurement step, which is proportional to the power of the signal obtained in the first detection step. E ｂｅａｔ (φ α３ ) is the aforementioned α ３ｉ The second-order difference is the aforementioned φ α３ (This represents a value proportional to the power of the signal obtained in the first detection step, obtained from the voltage value measured in the voltage measurement step, when the fourth three-tone signal set to is detected in the first detection step.)

15. The three waves e represented by the following equation (52) １ , e ２ , e ３ The first three-tone signal obtained by combining these, the three waves e represented by the following equation (53) １ , e ２ , e ３ The second three-tone signal obtained by combining these is represented by the following equation (54): three waves e １ , e ２ , e ３ A third three-tone signal obtained by combining these, and three waves e represented by the following equation (55) １ , e ２ , e ３ A phase measurement signal generation step in which a fourth three-tone signal obtained by combining these signals is generated as a phase measurement signal, A first detection step of detecting the phase measurement signal, A second detection step in which the signal obtained by the first detection step is detected, A voltage measurement step for measuring the voltage of the signal obtained by the second detection step, The phase φ is represented by the following equation (56) ２ The phase calculation step for calculating ", A phase characteristic measurement method equipped with the following features. [Number 52] [Number 53] [Number 54] [Number 55] [Number 56] (In the above formulas (52), (53), (54), (55), and (56), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ ω represents the phase, t represents time, and ω represents the phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, α ２ｉ is the phase offset of the aforementioned third three-tone signal, and α ２ｉ The second difference of φ α２ When φ α２ = α ２３ -2α ２２ +α ２１ And, α ３ｉ is the phase offset of the fourth three-tone signal, and α ３ｉ The second difference of φ α３ When φ α３ = α ３３ -2α ３２ +α ３１ And, f α１ =π / 2+Δφ α１ +Df α２ ,f α２ =π+2Δφ α２ ,f α３ =3π / 2+Δφ α３ +Df α２ とく、 E ｂｅａｔ (0) represents a value obtained from the voltage measured in the voltage measurement step when the first three-tone signal is detected in the first detection step, and is proportional to the power of the signal obtained in the first detection step. E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal set to is detected in the first detection step, this represents a value obtained from the voltage value measured in the voltage measurement step, which is proportional to the power of the signal obtained in the first detection step. E ｂｅａｔ (φ α２ ) is the aforementioned α ２ｉ The second-order difference is the aforementioned φ α２ When the third three-tone signal set to is detected in the first detection step, this represents a value obtained from the voltage value measured in the voltage measurement step, which is proportional to the power of the signal obtained in the first detection step. E ｂｅａｔ (φ α３ ) is the aforementioned α ３ｉ The second-order difference is the aforementioned φ α３ (This represents a value proportional to the power of the signal obtained in the first detection step, obtained from the voltage value measured in the voltage measurement step, when the fourth three-tone signal set to is detected in the first detection step.)

16. The two waves e represented by the following equation (57) １ , e ２ The first two-tone signal obtained by combining the two waves e is represented by the following equation (58). ２ , e ３ The second two-tone signal obtained by combining these is represented by the following equation (59): 3 waves e １ , e ２ , e ３ A first three-tone signal obtained by combining these, and three waves e represented by the following equation (60) １ , e ２ , e ３ A phase measurement signal generation step in which a second three-tone signal obtained by combining these signals is generated as a phase measurement signal, A first detection step of detecting the phase measurement signal, A bandpass filter step is used to filter the signal obtained in the first detection step, such that the frequency component of each of the phase measurement signals passes through the angular frequency difference Δω between adjacent waves, and the frequency component of twice the angular frequency difference Δω and the DC component are blocked. A second detection step in which the signal that has passed through the bandpass filter step is detected, A voltage measurement step for measuring the voltage of the signal obtained by the second detection step, The phase φ is represented by the following equation (61) ２ The phase calculation step for calculating ", A phase characteristic measurement method equipped with the following features. [Number 57] [Number 58] [Number 59] [Number 60] [Number 61] (In the above formulas (57), (58), (59), (60), and (61), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ γ is phase, γ ｉ ω represents an arbitrary phase, t represents time, and ω represents an arbitrary phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, f α１ =π / 2+Δφ α１ とく、 E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal set to is detected in the first detection step, this represents a value obtained from the voltage value measured in the voltage measurement step, which is proportional to the power of the signal that passed through the bandpass filter step. E ｂｅａｔ (0) represents a value obtained from the voltage value measured in the voltage measurement step when the first three-tone signal is detected in the first detection step, and is proportional to the power of the signal that passed through the bandpass filter step. E ｂｅａｔ (a １ = 0) represents a value obtained from the voltage value measured in the voltage measurement step when the second two-tone signal is detected in the first detection step, and is proportional to the power of the signal that passed through the bandpass filter step. E ｂｅａｔ (a ３ (=0) represents a value obtained from the voltage measured in the voltage measurement step when the first two-tone signal is detected in the first detection step, and is proportional to the power of the signal that passed through the bandpass filter step.

17. The two waves e represented by the following equation (62) １ , e ２ The first two-tone signal obtained by combining the two waves e is represented by the following equation (63). ２ , e ３ The second two-tone signal obtained by combining these is represented by the following equation (64): three waves e １ , e ２ , e ３ The first three-tone signal obtained by combining these, and the three waves e represented by the following equation (65) １ , e ２ , e ３ A phase measurement signal generation step in which a second three-tone signal obtained by combining these signals is generated as a phase measurement signal, A first detection step of detecting the phase measurement signal, A bandpass filter step is used to filter the signal obtained in the first detection step, such that the frequency component of each of the phase measurement signals passes through the angular frequency difference Δω between adjacent waves, and the frequency component of twice the angular frequency difference Δω and the DC component are blocked. A second detection step in which the signal that has passed through the bandpass filter step is detected, A voltage measurement step for measuring the voltage of the signal obtained by the second detection step, The phase φ is represented by the following equation (66) ２ The phase calculation step for calculating ", A phase characteristic measurement method equipped with the following features. [Number 62] [Number 63] [Number 64] [Number 65] [Number 66] (In the above formulas (62), (63), (64), (65), and (66), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ γ is phase, γ ｉ ω represents an arbitrary phase, t represents time, and ω represents an arbitrary phase. ２ -ω １ = ω ３ -ω ２ = Δω, α １ｉ is the phase offset of the aforementioned second three-tone signal, and α １ｉ The second difference of φ α１ When φ α１ = α １３ -2α １２ +α １１ And, f α１ =π / 2+Δφ α１ とく、 E ｂｅａｔ (φ α１ ) is the aforementioned α １ｉ The second-order difference is the aforementioned φ α１ When the second three-tone signal set to is detected in the first detection step, this represents a value obtained from the voltage value measured in the voltage measurement step, which is proportional to the power of the signal that passed through the bandpass filter step. E ｂｅａｔ (0) represents a value obtained from the voltage value measured in the voltage measurement step when the first three-tone signal is detected in the first detection step, and is proportional to the power of the signal that passed through the bandpass filter step. E ｂｅａｔ (a １ = 0) represents a value obtained from the voltage value measured in the voltage measurement step when the second two-tone signal is detected in the first detection step, and is proportional to the power of the signal that passed through the bandpass filter step. E ｂｅａｔ (a ３ (=0) represents a value obtained from the voltage measured in the voltage measurement step when the first two-tone signal is detected in the first detection step, and is proportional to the power of the signal that passed through the bandpass filter step.

18. The two waves e represented by the following equation (67) １ , e ２ The first two-tone signal obtained by combining the two waves e is represented by the following equation (68). ２ , e ３ A second two-tone signal obtained by combining the two, and a three-wave e represented by the following equation (69) １ , e ２ , e ３ A phase measurement signal generation step in which a three-tone signal obtained by combining these signals is generated as a phase measurement signal, A first detection step of detecting the phase measurement signal, A bandpass filter step is used to filter the signal obtained in the first detection step, such that the frequency component of each of the phase measurement signals passes through the angular frequency difference Δω between adjacent waves, and the frequency component of twice the angular frequency difference Δω and the DC component are blocked. A second detection step in which the signal that has passed through the bandpass filter step is detected, A voltage measurement step for measuring the voltage of the signal obtained by the second detection step, The phase φ is represented by the following equation (70) ２ The phase calculation step for calculating ", A phase characteristic measurement method equipped with the following features. [Number 67] [Number 68] [Number 69] [Number 70] (In the above equations (67), (68), (69), and (70), a ｉ ω is amplitude, ｉ φ is the angular frequency. ｉ γ is phase, γ ｉ ω represents an arbitrary phase, t represents time, and ω represents an arbitrary phase. ２ -ω １ = ω ３ -ω ２ = Δω, E ｂｅａｔ (0) represents a value obtained from the voltage value measured in the voltage measurement step when the three-tone signal is detected in the first detection step, and is proportional to the power of the signal that passed through the bandpass filter step. E ｂｅａｔ (a １ = 0) represents a value obtained from the voltage value measured in the voltage measurement step when the second two-tone signal is detected in the first detection step, and is proportional to the power of the signal that passed through the bandpass filter step. E ｂｅａｔ (a ３ (=0) represents a value obtained from the voltage measured in the voltage measurement step when the first two-tone signal is detected in the first detection step, and is proportional to the power of the signal that passed through the bandpass filter step.

19. The phase measurement signal generation step generates the phase measurement signal using a high-frequency signal generation unit, and the phase φ is obtained from the phase measurement signal generated by the phase measurement signal generation step. ２ A phase characteristic measurement method according to any one of claims 11 to 18, wherein the phase characteristic of the high-frequency signal generation unit is measured by measuring ", A high-frequency signal generation step in which a high-frequency signal is generated using the high-frequency signal generation unit and output as an output signal, A signal generation method comprising correcting the phase characteristics of the high-frequency signal based on the phase characteristics of the high-frequency signal generation unit measured by the phase characteristics measurement method.

20. The phase measurement signal generation step generates the phase measurement signal using a reference signal generation unit, and the phase φ is obtained from the phase measurement signal generated by the phase measurement signal generation step. ２ A phase characteristic measurement method according to any one of claims 11 to 18, wherein the phase characteristic of the reference signal generation unit is measured by measuring ", A reference signal generation step in which a reference signal is generated using the reference signal generation unit, A reference signal analysis step in which the phase characteristics of the reference signal are measured using a high-frequency signal analysis unit, A high-frequency signal analysis step in which the input signal is analyzed using the high-frequency signal analysis unit, A signal analysis method comprising: calculating the phase characteristics of the high-frequency signal analysis unit from the phase characteristics of the reference signal generation unit measured by the phase characteristics measurement method and the phase characteristics of the reference signal measured by the reference signal analysis step; correcting the phase characteristics when analyzing the input signal by the high-frequency signal analysis step based on the calculated phase characteristics of the high-frequency signal analysis unit; and performing signal analysis of the input signal with corrected phase characteristics.

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