Linear motor and component mounting equipment

Abstract

A linear motor with excellent heat dissipation is achieved through a simple configuration. [Solution] The linear motor comprises a stator, a movable element, and a mounting member. The stator extends in a predetermined direction and has a plurality of permanent magnets arranged in the extending direction. The movable element has a core including a core back portion and a plurality of teeth protruding from the core back portion toward the permanent magnets, and a plurality of coils wound around the plurality of teeth. The mounting member is a member that supports the movable element from a direction perpendicular to the direction of travel of the movable element and the direction of protrusion of the teeth, and to which an object to be moved is attached on the opposite side, and is made of metal and has a projection that protrudes in a direction perpendicular to the direction of travel of the movable element so as to be substantially L-shaped when viewed from the direction of travel of the movable element, with the protruding end face in close contact with the core back portion.

Description

Technical Field

[0001] This specification discloses a linear motor and a component mounting device.

Background Art

[0002] Conventionally, a linear motor including a stator in which a plurality of permanent magnets are arranged in the longitudinal direction, and a mover opposed to the permanent magnets of the stator via a gap is known. For example, in Patent Document 1, as an armature constituting the mover, an armature base, a core having a plurality of teeth (tooth portions) attached to a surface facing the field magnet (permanent magnet) of the stator and protruding in the direction of the permanent magnet, and a plurality of coils accommodated in slots between adjacent teeth, and a bracket attached to the armature base so as to surround the core and having cooling fins on the outer peripheral surface are disclosed. According to this linear motor, it is said that heat generated from the coil can be radiated to the armature base and efficiently cooled.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the linear motor described in Patent Document 1, when the armature base is provided to support the mover (core) on a surface parallel to the traveling direction of the mover and orthogonal to the protruding direction of the tooth portion of the core, and an object to be moved is attached to the surface on the opposite side of the armature base for use, it is considered that heat dissipation can be ensured. However, when the mover is supported from an orthogonal direction orthogonal to the traveling direction of the mover and the protruding direction of the tooth portion of the core and an object to be moved is attached to the opposite side for use, in order to ensure heat dissipation, the structure may become complicated or the number of parts may increase.

[0005] The primary objective of this disclosure is to provide a linear motor with excellent heat dissipation through a simple configuration, in which the movable element is supported from orthogonal directions perpendicular to the direction of movement of the movable element and the direction of protrusion of the teeth of the core, and the object to be moved is attached to the opposite side. [Means for solving the problem]

[0006] This disclosure employs the following means to achieve the primary objectives described above.

[0007] The linear motor of this disclosure is a linear motor for moving an object to be moved in a predetermined direction, comprising: a stator extending in the predetermined direction and having a plurality of permanent magnets arranged in the extending direction; a movable element having a core including a core back portion and a plurality of teeth protruding from the core back portion toward the permanent magnets, and a plurality of coils wound around the plurality of teeth; and a mounting member that supports the movable element from an orthogonal direction perpendicular to the direction of travel of the movable element and the direction of protrusion of the teeth, and to which the object to be moved is attached on the opposite side, the mounting member being made of metal and having a projection that protrudes in the orthogonal direction so as to be substantially L-shaped when viewed from the direction of travel of the movable element, with the projection end face in close contact with the core back portion.

[0008] The linear motor of this disclosure includes a mounting member that supports the movable element from a direction perpendicular to the direction of movement of the movable element and the direction of protrusion of the teeth of the core, and to which the object to be moved is attached on the opposite side. The mounting member is made of metal and has a projection that protrudes perpendicularly so as to be substantially L-shaped when viewed from the direction of movement of the movable element, with the protruding end face in close contact with the core back portion. As a result, heat generated in the coil is transferred to the mounting member via the teeth and core back portion, and the heat can be dissipated by the mounting member. Since the mounting member used to attach the object to be moved also serves as a heat dissipation member, a linear motor with excellent heat dissipation can be made with a simple configuration without increasing the number of parts.

[0009] Since the component mounting apparatus of this disclosure is equipped with the linear motor of this disclosure as the drive source for the head moving device, it can achieve the same effects as the linear motor of this disclosure. [Brief explanation of the drawing]

[0010] [Figure 1] This is a schematic diagram of a component mounting device including a linear motor according to this embodiment. [Figure 2] This is a schematic diagram of the X-axis moving device, including a linear motor. [Figure 3] This is a perspective view of the linear motor. [Figure 4] This is a side view of a linear motor as seen from the direction of travel. [Figure 5] This is a schematic diagram of the movable component. [Modes for carrying out the invention]

[0011] Next, the forms for implementing this disclosure will be described with reference to the drawings.

[0012] Figure 1 is a schematic diagram of the component mounting device 10 including the linear motor 40 of this embodiment. Figure 2 is a schematic diagram of the X-axis moving device 30 including the linear motor 40. Figure 3 is an external perspective view of the linear motor 40. Figure 4 is a side view of the linear motor 40 as seen from the direction of travel. Figure 5 is a schematic diagram of the movable element 42. In Figure 1, the left-right direction is the X direction, the front-back direction is the Y direction, and the up-down direction is the Z direction.

[0013] The component mounting device 10 picks up components supplied from a feeder (not shown) using a head 12 and mounts them onto a substrate S. As shown in Figure 1, the component mounting device 10 comprises a substrate transport device 11, a head 12, a beam member 20, an X-axis moving device 30, and a Y-axis moving device 50. These are housed within a housing 10a.

[0014] The substrate transport device 11 includes a pair of front and rear conveyor belts and a motor that drives the conveyor belts in a circular motion. The substrate transport device transports the substrate S on the conveyor belts from left to right by driving the conveyor belts with the motor.

[0015] The beam member 20 is a long member that extends in the left-right direction (X direction) and moves in the front-back direction (Y direction) by the Y-axis moving device 50. As shown in Figure 2, a pair of upper and lower guide rails 21 that extend in the left-right direction (X direction) are attached to the front surface of the beam member 20.

[0016] The X-axis moving device 30 moves the head 12 in the X direction. As shown in Figure 2, the X-axis moving device 30 comprises an X-axis slider 31 and a linear motor 40 as an X-axis actuator that drives the X-axis slider 31. The X-axis slider 31 is a flat plate-shaped member and has a head mounting surface 311 to which the head 12 is attached, and a movable element mounting surface 312 on the opposite side of the head mounting surface 311. Multiple linear guides 32 are attached to the movable element mounting surface 312 of the X-axis slider 31, both above and below, and engage with a pair of upper and lower guide rails 21 of the beam member 20. The X-axis slider 31 is supported so as to be movable in the X direction relative to the beam member 20 via the linear guides 32.

[0017] As shown in Figure 2, the linear motor 40 comprises a plate-shaped stator 41 fixed horizontally to the front surface of the beam member 20, a pair of upper and lower movable elements 42 attached to the X-axis slider 31 so as to sandwich the stator 41 from above and below, and a pair of upper and lower mounting members 43. As shown in Figures 3 and 4, the stator 41 is formed in a rectangular and plate shape with its longitudinal direction being the X direction and is cantilevered to the beam member 20 at one end in the short direction, and has a plurality of permanent magnets 412 arranged on the upper and lower surfaces of the yoke plate 411 with alternating polarities. As shown in Figures 3 and 4, the pair of upper and lower movable elements 42 each have a core 421 and a coil 422 arranged to face the permanent magnets 412. Furthermore, the core 421 has a rectangular and plate-shaped core back portion 421a and a plurality of teeth 421b protruding toward the permanent magnets 412 from the surface of the core back portion 421a facing the permanent magnets 412. As shown in Figure 5, the multiple teeth 421b are formed to be aligned along the direction of travel (X direction) of the movable element 42. The coil 422 is wound around each of the multiple teeth 421b. The upper and lower pair of movable elements 42 are molded with resin (for example, epoxy resin) to ensure good insulation. In Figure 5, the resin-molded portion of the upper movable element 42 is shown with a dashed line.

[0018] The pair of upper and lower mounting members 43 are metal members for attaching the pair of upper and lower movable elements 42 to the X-axis slider 31. As shown in Figures 3 and 4, each mounting member 43 has a base portion 431 that extends in the vertical direction (Z direction) and a projection portion 432 that bends at a right angle from the extended end of the base portion 431 and protrudes so as to form a substantially L shape when viewed from the direction of travel of the movable element 42 (in the X direction). Each mounting member 43 is fixed to the movable element 42 by fastening the two together with bolts or the like while the projection end face of the projection portion 432 is in close contact with the side surface of the core back portion 421a. Then, each mounting member 43 is fixed to the X-axis slider 31 by fastening the two together with bolts or the like while the base portion 431 is in close contact with the movable element mounting surface 312 of the X-axis slider 31. In this way, the pair of upper and lower movable elements 42 are fixed to the X-axis slider 31 via the pair of upper and lower mounting members 43 (see dashed line in Figure 3). Furthermore, a spacer 44 is placed between the bases 431 of the upper and lower mounting members 43 to maintain a constant gap between the upper and lower movable elements 42 and the stator 41 (permanent magnet 412) between them.

[0019] The surface of the core back portion 421a opposite to the surface on which the teeth portion 421b is formed is a flat surface. A cooling member 45 is installed on the flat surface of the core back portion 421a. The cooling member 45 is installed above and below a pair of upper and lower movable elements 42, respectively, to cool the corresponding movable elements 42. The cooling member 45 has a heat sink 451 and a fan 452 that blows air onto the heat dissipation fins of the heat sink 451. The bent outer surface of the protruding portion 432 of the mounting member 43 is flush with the flat surface of the core back portion 421a on which the heat sink 451 is installed. The heat sink 451 is installed so as to be in close contact with both the core back portion 421a and the mounting member 43.

[0020] As a result, the heat generated in the coil 422, which is the heat generating part of the mover 42, is transmitted through the tooth part 421b and the core back part 421a and radiated by the heat sink 451. Also, part of the heat generated in the coil 422 is transmitted to the metal mounting member 43 via the tooth part 421b and the core back part 421a, and is also radiated from the mounting member 43. By making the mounting member 43 also serve as a heat radiating member, a linear motor 40 with an excellent heat radiating property can be achieved with a simple structure. Furthermore, since the heat sink 451 is installed so as to be in close contact with both the core back part 421a and the mounting member 43, the heat radiating property can be made even better.

[0021] In addition, in the present embodiment, on the side surface of the core back part 421a opposite to the side surface where the mounting member 43 (the protruding end surface of the protruding part 432) is in close contact, a block 423 formed in a rectangular parallelepiped shape so as to have a surface flush with the flat surface where the heat sink 451 of the core back part 421a is installed is fixed by bolts or the like, and the heat sink 451 is installed so as to be in close contact with the core back part 421a, the mounting member 43, and the block 423.

[0022] Here, the correspondence between the main elements of the present embodiment and the main elements of the present disclosure will be described. That is, the stator 41 of the present embodiment is an example of the stator of the present disclosure, the mover 42 is an example of the mover, the core back part 421a is an example of the core back part, the tooth part 421b is an example of the tooth part, the mounting member 43 is an example of the mounting member, and the protruding part 432 is an example of the protruding part. Also, the heat sink 451 is an example of the heat sink. Also, the X-axis moving device 30 is an example of the head moving device.

[0023] Note that the present disclosure is not limited to the above-described embodiment at all, and it goes without saying that various aspects can be implemented as long as they belong to the technical scope of the present disclosure.

[0024] For example, in the above-described embodiment, the linear motor 40 is used for the X-axis actuator of the X-axis moving device 30, but it may also be used for the Y-axis actuator of the Y-axis moving device 50.

[0025] As described above, the linear motor of this disclosure includes a mounting member that supports the movable element from a direction perpendicular to the direction of travel of the movable element and the direction of protrusion of the teeth of the core, and to which the object to be moved is attached on the opposite side. The mounting member is made of metal and has a projection that protrudes perpendicularly so as to be approximately L-shaped when viewed from the direction of travel of the movable element, with the protruding end face in close contact with the core back portion. This allows heat generated in the coil to be transferred to the mounting member via the teeth and core back portion, and the heat to be dissipated by the mounting member. Since the mounting member used to attach the object to be moved also serves as a heat dissipation member, a linear motor with excellent heat dissipation can be made with a simple configuration.

[0026] In the linear motor of this disclosure, a heat sink is provided on the surface of the core back portion opposite to the surface on which the teeth protrude, the protruding portion has a surface that is flush with the mounting surface of the heat sink on the core back portion, and the heat sink may be installed so as to contact both the core back portion and the protruding portion on the surface that is flush with the surface. This can further improve heat dissipation.

[0027] Although this disclosure describes a linear motor, it may also describe a component mounting device equipped with a linear motor. [Industrial applicability]

[0028] This disclosure can be used in industries such as the manufacturing of linear motors and component mounting equipment. [Explanation of symbols]

[0029] 10 Component mounting device, 10a Housing, 11 Board transport device, 12 Head, 20 Beam member, 21 Guide rail, 30 X-axis moving device, 31 X-axis slider, 32 Linear guide, 40 Linear motor, 41 Stator, 42 Movable element, 43 Mounting member, 44 Spacer, 45 Cooling member, 50 Y-axis moving device, 311 Head mounting surface, 312 Movable element mounting surface, 411 Yoke plate, 412 Permanent magnet, 421 Core, 421a Core back section, 421b Teeth section, 422 Coil, 423 Block, 431 Base section, 432 Protrusion section, 451 Heat sink, 452 Fan, S Board.

Claims

1. A linear motor that moves an object in a predetermined direction, A stator extending in the predetermined direction and having a plurality of permanent magnets arranged in the extending direction, A movable element having a core including a core back portion and a plurality of teeth protruding from the core back portion toward the permanent magnet, and a plurality of coils wound around the plurality of teeth, A mounting member that supports the movable element from a direction perpendicular to the direction of movement of the movable element and the direction of protrusion of the teeth, and to which the object to be moved is attached on the opposite side, the mounting member being made of metal and having a projection that protrudes in the direction perpendicular to the direction of movement of the movable element so as to be substantially L-shaped when viewed from the direction of movement of the movable element, with the protruding end face in close contact with the core back portion, A linear motor equipped with [a specific feature].

2. A linear motor according to claim 1, The core back portion includes a heat sink installed on the side opposite to the surface from which the teeth protrude, The protruding portion has a surface that is flush with the mounting surface of the heat sink in the core back portion. The heat sink is installed so as to contact both the core back portion and the protruding portion on the surface that is flush with the surface. Linear motor.

3. A head capable of extracting parts, A head moving device for moving the head in the horizontal direction, As a drive source for the head moving device, the linear motor comprises a stator extending horizontally and having a plurality of permanent magnets arranged in the extending direction; a movable element having a core including a core back portion and a plurality of teeth protruding from the core back portion toward the permanent magnets, and a plurality of coils wound around the plurality of teeth; and a mounting member made of metal that supports the movable element from an orthogonal direction perpendicular to the direction of travel of the movable element and the direction of protrusion of the teeth, and to which the object to be moved is attached on the opposite side, and having a projection that protrudes in the orthogonal direction so as to be substantially L-shaped when viewed from the direction of travel of the movable element, with a protruding end face that is in close contact with the core back portion; A component mounting device having the following features.

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