Vacuum cleaning device

Abstract

To provide a vacuum cleaning device that can more smoothly adjust the temperature of the cleaning solution stored in the distiller. [Solution] The vacuum cleaning apparatus (1) comprises a cleaning chamber (110), a distiller (120) having an evaporation section (121) and a condensing section (122), a hot water tank (130), and a heat source (140). The cleaning chamber cleans the workpiece (2) inside under reduced pressure with cleaning liquid supplied from the cleaning liquid tank (111). The evaporation section is container-shaped and stores the contaminated cleaning liquid discharged from the cleaning chamber and evaporates the stored contaminated liquid. The condensing section is integrally formed with the evaporation section so as to be connected to the opening of the cylinder of the evaporation section, and condenses the vapor of the cleaning liquid components contained in the contaminated liquid generated by the evaporation section to regenerate the cleaning liquid. The hot water tank stores hot water with at least a portion of the outer surface of the evaporation section immersed in it. The heat source adjusts the temperature of the hot water stored in the hot water tank.

Description

Technical Field

[0001] The present invention relates to a vacuum cleaning apparatus including a cleaning chamber for cleaning a workpiece under reduced pressure.

Background Art

[0002] Conventionally, a vacuum cleaning apparatus including a cleaning chamber for cleaning a workpiece under reduced pressure has been known.

[0003] Regarding this, Patent Document 1 discloses a cleaning apparatus including a cleaning tank for degreasing and cleaning an object to be cleaned with a stored cleaning agent, a distillation apparatus for distilling the contaminated cleaning agent, an oil concentration measuring means, and a distillation apparatus control means for controlling the distillation apparatus. The distillation apparatus control means of the cleaning apparatus disclosed in Patent Document 1 controls the distillation apparatus based on the measurement result of the oil concentration contained in the contaminated cleaning agent measured by the oil concentration measuring means.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, in Patent Document 1, the specific configuration of a heater for heating the cleaning agent (cleaning liquid) stored in the distiller is not described. As an example of heating means, a device configuration that combines the heat transfer function and the heating function by allowing a pipe through which high - temperature oil and fat flows to crawl on the outer surface of the bottom of the distiller is assumed. However, in the above device configuration, heat transfer may become non - uniform due to the pipe structure, the temperature may become unstable during the flow process of the cleaning liquid, or the temperature of the oil and fat may change easily because the specific heat of the oil and fat is relatively low. That is, in the above device configuration, there is a problem that if the temperature of the cleaning liquid stored in the distiller cannot be appropriately adjusted, the efficiency of distillation of the cleaning liquid will decrease.

[0006] This invention has been made in view of these problems, and its objective is to provide a vacuum cleaning apparatus that can more smoothly adjust the temperature of the cleaning solution stored in the distiller. [Means for solving the problem]

[0007] To solve the above problems, the vacuum cleaning apparatus of the present invention comprises: a cleaning chamber for cleaning a workpiece under reduced pressure using a cleaning liquid supplied from a cleaning liquid tank; a container-shaped evaporation section for storing the contaminated cleaning liquid discharged from the cleaning chamber and for evaporating the stored contaminated liquid; a distiller integrally formed with the evaporation section so as to be connected to the opening of the cylinder of the evaporation section, and for condensing the vapor of the cleaning liquid components contained in the contaminated liquid generated by the evaporation section to regenerate the cleaning liquid; a hot water tank for storing hot water with at least a part of the outer surface of the evaporation section immersed; and a heat source unit for adjusting the temperature of the hot water stored in the hot water tank.

[0008] Furthermore, the vacuum cleaning apparatus of the present invention further comprises a first temperature measuring unit for measuring the temperature of the hot water stored in the hot water tank, and a control device for controlling the temperature adjustment operation of the heat source based on the measurement result of the first temperature measuring unit.

[0009] Furthermore, the vacuum cleaning apparatus of the present invention further comprises an auxiliary heater provided in the hot water tank for heating the hot water stored in the hot water tank, and the control device controls the execution and stopping of heating the hot water by the auxiliary heater based on the measurement results of the first temperature measuring unit.

[0010] Furthermore, the vacuum cleaning apparatus of the present invention further comprises a heating plate connected to a flow path provided in the evaporation section and for heating the evaporation section, and a second temperature measuring unit for measuring the temperature of hot water before and after it passes through the heating plate. The heat source adjusts the temperature of the hot water flowing through the flow path of the heating plate, and the control device controls the temperature adjustment operation of the heat source based on the measurement results of the first temperature measuring unit and the second temperature measuring unit.

[0011] Furthermore, the vacuum cleaning apparatus of the present invention further includes a third temperature measuring unit that measures the temperature of the cooling water after it has passed through the condensing unit, and the control device calculates a distillation rate indicating the rate at which the distillation of the contaminated liquid by the distiller is progressing from the measurement result of the third temperature measuring unit, and controls the operation of discharging the waste liquid remaining after distillation from the distiller to the outside, the operation of discharging the contaminated liquid from the cleaning chamber to the distiller, and the operation of adjusting the temperature of the heat source unit based on the calculated distillation rate.

[0012] Furthermore, the vacuum cleaning apparatus of the present invention further comprises a regeneration liquid tank for storing the cleaning liquid regenerated by the condensation unit, and a liquid volume measuring unit for measuring the amount of cleaning liquid stored in the regeneration liquid tank, wherein the control device uses the rate of increase of the amount of cleaning liquid measured by the liquid volume measuring unit to calculate the distillation rate.

[0013] Furthermore, in the vacuum cleaning apparatus of the present invention, the control device calculates the distillation rate using a distillation model, which is a simulation model that takes the measurement result of the third temperature measuring unit as input and outputs the distillation rate.

[0014] Furthermore, the vacuum cleaning apparatus of the present invention further comprises a vacuum pump connected to the distiller via a valve, and a pressure measuring unit for measuring the pressure inside the distiller, and the control device adjusts the pressure inside the distiller by controlling the opening and closing of the valve and the vacuum pump based on the measurement results of the pressure measuring unit. [Effects of the Invention]

[0015] According to the present invention, the vacuum cleaning apparatus can more smoothly adjust the temperature of the cleaning solution stored in the distiller. [Brief explanation of the drawing]

[0016] [Figure 1] This diagram schematically shows the overall configuration of the vacuum cleaning apparatus according to this embodiment. [Figure 2] Figure 1 shows an example of a specific configuration of the vacuum cleaning apparatus. [Figure 3] Figure 2 shows a partial cross-sectional view of an example of the specific configuration of the distillation apparatus and hot water bath. [Figure 4] This figure shows the functional configuration of the control device shown in Figure 2. [Figure 5] Figure 2 shows an example flowchart illustrating the sequence of processes in the vacuum cleaning apparatus. [Modes for carrying out the invention]

[0017] Hereinafter, embodiments of the present invention (hereinafter referred to as "this embodiment") will be described with reference to the attached drawings. To facilitate understanding of the description, the same reference numerals are used for the same components and steps in each drawing whenever possible, and redundant descriptions are omitted. In addition, the word "part" may be replaced with other words such as, for example, unit, module, device, or element.

[0018] <Overall Structure> Figure 1 is a schematic diagram showing the overall configuration of the vacuum cleaning apparatus 1 according to this embodiment. The vacuum cleaning apparatus 1 mainly consists of, for example, an operating unit 10 and a control device 20. The operating unit 10 is a group of units that perform a series of operations in the vacuum cleaning apparatus 1, including degreasing and cleaning the workpiece 2 under reduced pressure using a cleaning solution, and distilling and regenerating the cleaning solution contaminated with dirt from the cleaning. The main components of the operating unit 10 mainly consist of a cleaning chamber 110, a cleaning solution tank 111, a distiller 120, a hot water tank 130, a heat source unit 140, a cooling unit 180, a contaminated liquid tank T1, and a regeneration liquid tank T2.

[0019] The cleaning chamber 110 cleans the workpiece 2 accommodated therein under a reduced pressure state with the cleaning liquid supplied from the cleaning liquid tank 111. The reduced pressure state is a state where the air pressure is lower than the atmospheric pressure and includes a state of being in a vacuum. The cleaning liquid is supplied to the cleaning chamber 110 from the cleaning liquid tank 111 via a valve or the like. The cleaning chamber 110 supplies the cleaning liquid supplied from the cleaning liquid tank 111 into the cleaning chamber 110 by supplying the liquid through a shower or the like provided in the cleaning chamber 110, thereby cleaning the workpiece 2. The cleaning chamber 110 discharges the cleaning liquid after cleaning the workpiece 2 to the waste liquid tank T1 via a valve or the like. Further, the cleaning liquid is also supplied to the cleaning chamber 110 from the regeneration liquid tank T2 via a valve or the like. Also, the cleaning chamber 110 discharges the cleaning liquid remaining in the cleaning chamber to the cleaning liquid tank 111 via a valve or the like.

[0020] The cleaning liquid tank 111 stores the cleaning liquid for cleaning the workpiece 2. The cleaning liquid is supplied to the cleaning liquid tank 111 from the cleaning chamber 110 via a valve or the like. Also, the cleaning liquid tank 111 supplies the cleaning liquid to the cleaning chamber 110 via a valve or the like.

[0021] The waste liquid tank T1 is a tank that stores the cleaning liquid used for cleaning the workpiece 2 and contaminated. The contaminated cleaning liquid is supplied to the waste liquid tank T1 from the cleaning chamber 110. The waste liquid tank T1 discharges the stored waste liquid to the evaporation section 121 of the distiller 120 via a valve or the like.

[0022] The distiller 120 regenerates the cleaning liquid by distilling the waste liquid, which is the contaminated cleaning liquid supplied from the waste liquid tank T1. Specifically, the distiller 120 performs distillation by evaporating the waste liquid with the heat supplied from the hot water tank 130 and then condensing the vapor of the cleaning liquid component contained in the waste liquid. Also, the distiller 120 discharges the regenerated cleaning liquid to the regeneration liquid tank T2 via a valve or the like. The distiller 120 includes an evaporation section 121 and a condensation section 122, and the main part is constituted.

[0023] The evaporation unit 121 stores the waste liquid discharged from the washing chamber 110 via the waste liquid tank T1, and evaporates the stored waste liquid using heat supplied from the hot water tank 130. The evaporation unit 121 is formed in a container shape and is located at the bottom of the distiller 120. The evaporation unit 121 is also connected to the hot water tank 130 such that at least a portion of its outer surface is immersed in the hot water tank 130.

[0024] The condensing unit 122 regenerates the cleaning solution by condensing the vapors of the cleaning solution components contained in the wastewater generated by the evaporation unit 121. The condensing unit 122 is integrally formed with the evaporation unit 121 so as to be connected to the opening of the cylinder of the evaporation unit 121, and is located at the top of the distiller 120. The condensing unit 122 also has a cooling member inside with a flow path for cooling water, and by exchanging heat with the cooling member, it cools and condenses the vapors of the cleaning solution components contained in the wastewater. The condensing unit 122 then discharges the cleaning solution regenerated by condensation to the regeneration liquid tank T2 via a valve or the like.

[0025] The hot water tank 130 is a tank for storing hot water to adjust the temperature inside the evaporation unit 121. The hot water tank 130 is connected to the evaporation unit 121 such that at least a portion of the outer surface of the evaporation unit 121 is immersed in the hot water tank 130. Specifically, the hot water tank 130 is connected to the evaporation unit 121 such that the bottom of the container-shaped evaporation unit 121 is located inside the hot water tank 130 and covers the outer surface of the bottom of the evaporation unit 121. The hot water tank 130 adjusts the temperature inside the evaporation unit 121 by conducting the heat of the stored hot water to the outer surface of the distiller 120. The hot water tank 130 also stores hot water supplied from the heat source unit 140 and then sends the stored hot water back to the heat source unit 140. In this way, the hot water tank 130 maintains its temperature by circulating hot water between itself and the heat source unit 140.

[0026] The heat source unit 140 is, for example, a heat pump type heat source unit that adjusts the temperature of the hot water stored in the hot water tank 130. The heat source unit 140 heats the hot water sent out from the hot water tank 130 so that the hot water circulates with the hot water tank 130, and then sends the heated hot water back to the hot water tank 130. The temperature of the hot water is adjusted to, for example, 75°C to 80°C, and is adjusted so that it does not exceed 90°C. The heat source unit 140 heats the hot water to a temperature that conforms to the control of the control device 20.

[0027] The cooling unit 180 circulates cooling water between itself and the condensing section 122 via a cooling member, for example, and cools the inside of the condensing section 122 with the cooling water. The cooling unit 180 cools the cooling water sent out from the condensing section 122 and sends the cooled cooling water back to the condensing section 122. The cooling unit 180 cools the cooling water to a temperature that conforms to the control of the control device 20. The cooling member is, for example, a metal tube formed to allow cooling water to flow through it, and is installed to pass from the cooling unit 180 through the condensing section 122 and return to the cooling unit 180.

[0028] The regeneration liquid tank T2 is a tank that stores the cleaning liquid regenerated by the condensation unit 122. The regeneration liquid tank T2 discharges the stored cleaning liquid to the cleaning chamber 110 or the cleaning liquid tank 111 via a valve or the like.

[0029] The control device 20 controls the degreasing and cleaning operation of the workpiece 2 by the operating unit 10. Specifically, the control device 20 controls the operation of the operating unit 10 by controlling the operation of valves located in various places on the operating unit 10, as well as the heat source 140, the cooling unit 180, and a vacuum pump (not shown in Figure 1). The control device 20 also calculates various parameters for the degreasing and cleaning operation of the workpiece 2 by the operating unit 10. The control device 20 also acquires various information transmitted from the operating unit 10. The control device 20 uses the various information acquired from the operating unit 10 when calculating the various parameters.

[0030] The control device 20 primarily comprises a CPU (Central Processing Unit) 21, a memory 22, a storage device 23, a communication device 24, and an input / output device 25. The CPU 21 functions as various functional means by executing predetermined programs stored in the memory 22 or storage device 23. The memory 22 temporarily stores predetermined programs and data necessary for the CPU 21 to execute predetermined programs. The storage device 23 stores various programs, various information, and processing result information necessary for the execution of processing by the CPU 21. The communication device 24 communicates with external devices. The input / output device 25 receives operations from the operator of the vacuum cleaning device 1 and outputs screen displays, audio, etc., to the operator. The control device 20 can be implemented using a dedicated or general-purpose computer or other information processing device, and may consist of a single information processing device or multiple information processing devices.

[0031] In this embodiment, the control device 20 consistently performs the calculation of various parameters for determining the content of operation control for the operating unit 10 and the operation control of the operating unit 10, but is not limited to this. For example, the control device 20 may implement the calculation of various parameters for operation control of the operating unit 10 and the operation control of the operating unit 10 by different information processing devices. Specifically, the control device 20 may calculate various parameters using a personal computer or the like, and the determined conditions may be transmitted from the personal computer to a dedicated control panel for actually operating the operating unit 10.

[0032] The above describes the general configuration of the vacuum cleaning apparatus 1. Next, with reference to Figure 2, a specific example of the configuration of the vacuum cleaning apparatus 1 will be described. Figure 2 is a diagram showing a specific example of the configuration of the vacuum cleaning apparatus 1 shown in Figure 1. In Figure 2, in addition to the components described above, the vacuum cleaning apparatus 1 further includes an auxiliary heater 131, a heating plate 132, a heat exchanger 150, condensers 151 and 152, an aftercooler 153, vacuum pumps 161 and 162, and mist traps 171 and 172. Furthermore, the vacuum cleaning apparatus 1 also includes pumps P1 to P3, a drum D, tanks T3 to T5, valves A0 to A8, B0 to 13 and C1 to C3, temperature measuring units TH1 to TH5, pressure measuring unit VG, flow rate measuring units S1 to S4, and liquid volume measuring unit LS.

[0033] First, let's explain the valves and each measuring unit. Valves A0 to A8 are installed at various points in the flow path through which gas flows in the operating unit 10, and their opening and closing adjusts the flow of gas in the flow path. Valves B0 to B13 are installed at various points in the flow path through which cleaning fluid flows in the operating unit 10, and their opening and closing adjusts the flow of cleaning fluid in the flow path. Valves C1 to C3 are installed at various points in the flow path through which hot water supplied by the heat source unit 140 flows, and their opening and closing adjusts the flow of hot water in the flow path.

[0034] The flow rate measuring units S1 to S4 are, for example, flow sensors that measure the flow rate of hot water or cooling water flowing through the flow path. The flow rate measuring units S1 to S4 are installed at various points in the flow path through which the cleaning fluid flows. The flow rate measuring units S1 to S4 transmit the measurement results to the control device 20. The flow rate measuring unit S1 is installed in the flow path on the outlet side of the pump P3 and measures the flow rate of hot water flowing through the flow path. The flow rate measuring unit S2 is installed in the flow path on the inlet side of the heating plate 132 and measures the flow rate of hot water before it passes through the heating plate 132. The flow rate measuring unit S3 is installed in the flow path on the outlet side of the pump P2 and measures the flow rate of hot water returning to the heat source unit 140. The flow rate measuring unit S4 is installed in the flow path on the inlet side of the cooling member 123 and measures the flow velocity of the cooling water before it passes through the condenser 122 of the distiller 120.

[0035] The pressure measuring unit VG is, for example, a vacuum meter and is installed inside the distillation apparatus 120. The pressure measuring unit VG measures the pressure of the gas inside the distillation apparatus 120. The pressure measuring unit VG transmits the measured pressure value to the control device 20.

[0036] Temperature measuring units TH1 to TH5 are, for example, thermocouples that measure the temperature of hot water or cooling water. Temperature measuring units TH1 to TH5 transmit the temperature measurement results to the control device 20. Temperature measuring unit TH1 is installed inside the evaporation unit 121 and measures the temperature of the contaminated liquid stored in the evaporation unit 121. Temperature measuring unit TH2 is a pair of thermocouples, one each installed on the inlet and outlet sides of the hot water flow path that passes through the heating plate 132. Temperature measuring unit TH2 measures the temperature of the hot water before it passes through the heating plate 132 and the temperature of the hot water after it passes through the heating plate 132. Temperature measuring unit TH3 is a pair of thermocouples, one each installed on the inlet and outlet sides of the cooling water flow path that passes through the condensing unit 122. Temperature measuring unit TH3 measures the temperature of the cooling water before it passes through the cooling member 123 of the condensing unit 122 and the temperature of the cooling water after it passes through the cooling member 123 of the condensing unit 122. The temperature measuring unit TH4 measures the temperature of the hot water immediately after it is discharged from the heat source unit 140. The temperature measuring unit TH5 is a pair of thermocouples, one at the inlet and one at the outlet of the hot water flow path through the heat exchanger 150. The temperature measuring unit TH5 measures the temperature of the hot water before it passes through the heat exchanger 150 and the temperature of the hot water after it passes through the heat exchanger 150.

[0037] The liquid volume measuring unit LS is a radar-type liquid level sensor that measures the liquid volume of the cleaning solution stored in the regeneration liquid tank T2. The liquid volume measuring unit LS is installed, for example, on the upper inner surface of the regeneration liquid tank T2 and emits a radar toward the bottom surface of the regeneration liquid tank T2. The liquid volume measuring unit LS receives reflected light reflected from the liquid surface of the cleaning solution stored in the regeneration liquid tank T2. Based on the received light, the liquid volume measuring unit LS calculates the distance from the radar emitter to the liquid surface of the cleaning solution and measures the liquid volume of the cleaning solution from the calculation result.

[0038] Next, the flow of the cleaning fluid and the components related to the flow of the cleaning fluid will be explained. The cleaning fluid tank 111 discharges the stored cleaning fluid to the cleaning chamber 110 via valve B2. The cleaning fluid tank 111 also discharges the stored cleaning fluid to the cleaning chamber 110 via a path that sequentially passes through valve B5, pump P1, heat exchanger 150, and valve B1. Furthermore, the cleaning fluid discharged from the cleaning chamber 110 is sent to the cleaning fluid tank 111 via tank T4 and valve B3 in sequence. In addition, the cleaning fluid tank 111 raises the temperature of the stored cleaning fluid by circulating it back to the cleaning fluid tank 111 via valve B5, pump P1, heat exchanger 150, and valve B0 in sequence.

[0039] As described above, cleaning fluid is supplied to the cleaning chamber 110 from the cleaning fluid tank 111 via valve B2. Cleaning fluid is also supplied to the cleaning chamber 110 from the heat exchanger 150 via valve B1. The cleaning chamber 110 discharges the contaminated cleaning fluid used to clean the workpiece 2 into the contaminated fluid tank T1, passing through tank T4 and valve B4 in that order.

[0040] The heat exchanger 150 is a component that performs heat exchange between the cleaning liquid and hot water, and has pipes through which the cleaning liquid flows and pipes through which the hot water flows located close together. The pipes through which the cleaning liquid flows and the pipes through which the hot water flows are made of a material with high thermal conductivity. The heat exchanger 150 raises the temperature of the cleaning liquid by conducting the heat of the hot water to the cleaning liquid through the pipes. After the cleaning liquid sent from the pump P1 is heated, the heat exchanger 150 discharges it to the cleaning liquid tank 111 via valve B0. The heat exchanger 150 also discharges the cleaning liquid sent from the pump P1 after it has been heated to the cleaning chamber 110 via valve B1.

[0041] Pump P1 is a liquid pump and is installed in the flow path through which the cleaning fluid flows. Pump P1 delivers the incoming cleaning fluid to the heat exchanger 150 at a predetermined flow rate, pressure, and flow velocity. The cleaning fluid is supplied to pump P1 from the cleaning fluid tank 111 via valve B5.

[0042] The wastewater tank T1 is a tank that stores the wastewater from the cleaning solution used to clean the workpiece 2 discharged from the cleaning chamber 110. The wastewater tank T1 discharges the stored wastewater to the evaporation section 121 of the distiller 120 via valve B6.

[0043] The still 120 ejects the waste liquid discharged from the waste liquid tank T1 using a shower installed inside and stores it in the evaporation section 121. The still 120 evaporates the waste liquid using the evaporation section 121. The still 120 condenses the vapors of the cleaning liquid components contained in the waste liquid using a cooling member 123 that passes through the inside of the condensation section 122. The still 120 flows the condensed and regenerated cleaning liquid into a side channel and discharges it from the channel to the regeneration liquid tank T2 via valve B9. The still 120 also has a discharge hole at the bottom of the evaporation section 121. The still 120 discharges the waste liquid remaining at the bottom of the evaporation section 121 through the discharge hole to tank T3 via valve B7.

[0044] Tank T3 is a waste liquid tank that temporarily stores the waste liquid from the cleaning solution. Waste liquid is fed into Tank T3 from the distiller 120 via valve B7. Tank T3 also discharges the stored waste liquid into drum D via valve B9.

[0045] Drum D is a drum for storing waste liquid, specifically the waste liquid from the cleaning solution. Waste liquid is fed into drum D from tank T3 via valve B9.

[0046] The regeneration liquid tank T2 stores the washing liquid that is regenerated and discharged by the distiller 120. The regeneration liquid tank T2 also stores the washing liquid that is discharged from the condenser 151 via valve B10, which will be described later. As described above, the regeneration liquid tank T2 discharges the stored washing liquid to the washing chamber 110 via valve B8, pump P1, heat exchanger 150, and valve B1 in that order. The regeneration liquid tank T2 also discharges the stored washing liquid to the washing liquid tank 111 via valve B8, pump P1, heat exchanger 150, and valve B0 in that order.

[0047] Next, the flow of hot water supplied from the heat source unit 140 and the components related to the flow of hot water will be explained. The heat source unit 140 heats the hot water according to the control of the control device 20 and discharges the heated hot water into the hot water tank 130. In addition, the heat source unit 140 receives hot water from the hot water tank 130 via the pump P2.

[0048] The auxiliary heater 131 is a heater installed in the hot water tank 130 and heats the hot water in the hot water tank 130. The auxiliary heater 131 performs heating and stopping operations according to the control of the control device 20.

[0049] The hot water tank 130 maintains the temperature of the stored hot water with hot water supplied from the heat source unit 140. The hot water tank 130 also releases any hot water that overflows due to volume increase caused by temperature changes into tank T5. The hot water tank 130 is also heated by the auxiliary heater 131. The hot water tank 130 circulates the stored hot water back into the tank via pump P3 and valve C2. The hot water tank 130 also circulates the stored hot water back into the tank via pump P3, valve C1 and heat exchanger 150 in that order. The hot water tank 130 also circulates the stored hot water back into the tank via pump P3, valve C3 and heating plate 132 in that order. Furthermore, the hot water tank 130 discharges the stored hot water to the heat source unit 140 via pump P2.

[0050] Pump P2 is a liquid pump and is installed in the flow path between the hot water tank 130 and the heat source unit 140. Hot water is supplied to Pump P2 from the hot water tank 130. Pump P2 delivers the hot water supplied from the hot water tank 130 to the heat source unit 140 at a flow rate, pressure, and flow velocity controlled by the control device 20.

[0051] Pump P3 is a liquid pump and is located in the flow path between the hot water tank 130 and valves C1 to C3. Hot water is supplied to pump P3 from the hot water tank 130. Pump P3 delivers the hot water to valves C1 to C3 at a flow rate, pressure, and velocity controlled by the control device 20.

[0052] Regarding the flow path of the cooling water discharged from the cooling unit 180, it is as described using Figure 1, except for the flow rate measuring unit S4 and the temperature measuring unit TH3, so the explanation will be omitted. Next, the elements related to the flow of gas will be explained. The cleaning liquid tank 111 exhausts the gas inside the cleaning liquid tank 111 to the mist trap 171 via valve A2.

[0053] Nitrogen gas is supplied to the cleaning chamber 110 from a gas tank (not shown) via valve A1. The cleaning chamber 110 also exhausts the gas inside the cleaning chamber 110 to the outside of the vacuum cleaning device 1 via valve A0. The cleaning chamber 110 also exhausts the gas inside the cleaning chamber 110 to the mist trap 171 via valve A3. The cleaning chamber 110 also exhausts the gas inside the cleaning chamber 110 to the condenser 151 via valve A4.

[0054] The distillation apparatus 120 exhausts the gas remaining after the vapor generated by evaporation in the evaporation section 121 is condensed in the condensation section 122 to the condenser 151 via valve A5.

[0055] The condenser 151 is, for example, a condenser that condenses and liquefies the incoming gas by cooling. Gas containing the vapor of the cleaning solution is supplied to the condenser 151 from the cleaning chamber 110 via valve A4. Gas containing the vapor of the components of the cleaning solution is also supplied to the condenser 151 from the distiller 120 via valve A5. The condenser 151 condenses the vapor of the components of the incoming cleaning solution to regenerate the cleaning solution. The condenser 151 discharges the cleaning solution regenerated by condensation to the regeneration liquid tank T2 via valve B10. The condenser 151 also exhausts the remaining gas after condensation to the vacuum pump 161 via valve A6.

[0056] The vacuum pump 161 is a gas pump that exhausts gas to a pressure that conforms to the control of the control device 20. The vacuum pump 161 draws gas from the condenser 151 through valve A6. The vacuum pump 161 exhausts the drawn-in gas to the condenser 152.

[0057] The condenser 152 is, for example, a condenser that condenses and liquefies the incoming gas by cooling. The condenser 152 receives gas containing the vapor components of the cleaning solution from the vacuum pump 161. The condenser 152 also receives gas from tank T3 via valve A8. The condenser 152 condenses the vapor components of the incoming cleaning solution to regenerate the cleaning solution. The condenser 152 discharges the cleaning solution regenerated by condensation into the cleaning solution tank 111 via valve B11 and heat exchanger 150. The condenser 152 also exhausts any remaining gas after condensation to the vacuum pump 162.

[0058] The vacuum pump 162 is a gas pump that exhausts gas to a pressure that conforms to the control of the control device 20. The vacuum pump 162 draws gas from the condenser 152. The vacuum pump 162 exhausts the drawn-in gas to the aftercooler 153.

[0059] The aftercooler 153 is a component for recovering the components of the cleaning solution contained in the exhaust gas of the vacuum cleaning device 1. The aftercooler 153 regenerates the components of the cleaning solution from the incoming gas by cooling and condensation. The aftercooler 153 discharges the regenerated cleaning solution to the cleaning solution tank 111 via valve B12 and heat exchanger 150. The aftercooler 153 also recovers any oil contained in the gas remaining after the regeneration of the cleaning solution using a mist trap 172.

[0060] Mist traps 171 and 172 collect excess oil and mist from the cleaning liquid while condensing it from the gas exhausted to the outside of the vacuum cleaning device 1. Gas is supplied to mist trap 171 from the cleaning chamber 110 via valve A3. Gas is also supplied to mist trap 171 from the cleaning liquid tank 111 via valve A2. Mist trap 171 discharges the condensed cleaning liquid to the aftercooler 153 via valve A7.

[0061] The above describes an example of the specific configuration of the vacuum cleaning apparatus 1. Next, the structure of the distiller 120 will be described with reference to Figure 3. Figure 3 is a diagram showing a cross-section of an example of the specific configuration of the distiller 120 and hot water bath 130 shown in Figure 2. Figure 3 shows a cross-section of the distiller 120 and hot water bath 130 as viewed from the front. The cutting line in the cross-section of Figure 3 is a virtual line (not shown) extending horizontally when the distiller 120 is viewed from above. Note that in Figure 3, the exhaust port, inlet, and various measurement parts are not shown and are omitted.

[0062] As described above, the distillation apparatus 120 has an evaporation section 121 and a condensation section 122. As shown in Figure 3, the evaporation section 121 is a container shaped like a vessel with an open top, which evaporates the dirty liquid of the stored washing solution and sends the vapor of the washing solution components to the condensation section 122. The evaporation section 121 is connected to the hot water tank 130 such that at least a portion of the outer surface of the bottom of the evaporation section 121 is immersed in the hot water tank 130. Specifically, the evaporation section 121 has a portion of its outer surface at the bottom that is covered by the hot water tank 130, so that the bottom of the evaporation section 121 is located inside the hot water tank 130. The evaporation section 121 is also provided with a discharge hole 1212 at the bottom. The discharge hole 1212 is connected to a flow path that penetrates the hot water tank 130 from the bottom side and leads to valve B7. The evaporation section 121 is also provided with a spray section 1213 inside. The spray unit 1213 is connected to the flow path 1211 through which the cleaning liquid flows, and sprays the cleaning liquid sent from the flow path 1211 towards the bottom surface inside the evaporation unit 121 to store the cleaning liquid inside the evaporation unit 121. The flow path 1211 is provided so as to penetrate the outer wall of the evaporation unit 121 from the outside of the evaporation unit 121, enter the evaporation unit 121, and connect to the spray unit 1213. The cleaning liquid is supplied to the flow path 1211 from the waste liquid tank T1 via valve B6. In addition, the upper opening of the evaporation unit 121 is located inside the condensation unit 122, and the area around the upper opening is covered by the outer wall of the condensation unit 122.

[0063] Furthermore, multiple heating plates 132 are provided inside the evaporation section 121. The multiple heating plates 132 are heat dissipation plates made of a metal or the like with high thermal conductivity, and are arranged in parallel horizontally with respect to the bottom surface. The heating plates 132 heat the inside of the evaporation section 121 by radiating heat conducted from the hot water flow path 1321. In addition, the evaporation section 121 has a hot water flow path 1321 inside that penetrates through the multiple heating plates 132. Specifically, in Figure 3, the hot water flow path 1321 penetrates the evaporation section 121 from the back side, passes through the multiple heating plates 132, and then penetrates the back side again to reach the outside of the evaporation section 121. The hot water flow path 1321 is formed as a tube of a metal or the like with high thermal conductivity, and conducts the heat of the hot water to the heating plates 132. The arrangement of the heating plates 132 and the flow path 1321 within the evaporation section 121 is merely an example; any arrangement is acceptable as long as the flow path 1321 enters the evaporation section 121 from outside, passes through the heating plates 132, and exits the evaporation section 121 again. Furthermore, although four heating plates 132 are provided within the evaporation section 121 in Figure 3, this is not the only arrangement; any number of heating plates is acceptable as long as they fit within the evaporation section 121 and ensure that the evaporation section 121 has sufficient volume to store the cleaning liquid.

[0064] The condensing section 122 is a container with an opening in the center of its bottom, provided to cover the upper opening of the evaporation section 121, and as described above, it condenses the vapors of the cleaning liquid components rising from the evaporation section 121. The condensing section 122 has a cooling member 123 inside that circulates around the upper opening of the evaporation section 121. Specifically, the cooling member 123 penetrates into the condensing section 122 from its side, spirals around the upper opening of the evaporation section 121, and then penetrates the side to reach the outside of the condensing section 122. The cooling member 123 is a tube made of a metal with high thermal conductivity, and cooling water flows inside it. The cooling member 123 cools and condenses the vapors of the cleaning liquid components inside the condensing section 122 by exchanging heat with the inside of the condensing section 122, thereby regenerating the cleaning liquid. Furthermore, the condensing section 122 has a spiral flow path formed on the outside and bottom side of the upper opening of the evaporation section 121. The spiral flow path functions as a receptacle and flow path for the cleaning liquid regenerated by the cooling member 123. Specifically, the spiral flow path, after circling the upper opening of the evaporation section 121, is connected to a flow path where a valve B9 is located outside the condensing section 122. The spiral flow path discharges the regenerated cleaning liquid to the regeneration liquid tank T2 via valve B9.

[0065] As described above, the hot water tank 130 is a tank that stores hot water sent from the heat source unit 140 and adjusts the temperature inside the evaporation unit 121 with the stored hot water. The hot water tank 130 is connected to the evaporation unit 121 in such a way that the bottom of the evaporation unit 121 is embedded in the upper surface. The hot water tank 130 covers the bottom of the evaporation unit 121 of the distiller 120 and heats the evaporation unit 121 with the stored hot water. In addition, an auxiliary heater 131 is provided inside the hot water tank 130, and the stored hot water is also heated by the auxiliary heater 131. The hot water tank 130 is also connected to flow paths 1301 to 1306. Flow path 1301 is a flow path for sending hot water from the heat source unit 140 to the hot water tank 130. Flow path 1302 is a flow path for sending hot water from the hot water tank 130 to the heat source unit 140 via pump P2. Flow path 1303 is a flow path for circulating hot water between the tank T5 and the system. Flow path 1304 is a flow path for supplying hot water to pump P3. Flow path 1305 is a flow path for supplying hot water that has passed through heating plate 132 back to the hot water tank 130. Flow path 1306 is a flow path for supplying hot water that has passed through heat exchanger 150 back to the hot water tank 130.

[0066] <Functional configuration> The specific configuration of the distillation apparatus 120 has been described above. Next, the functional configuration of the control device 20 in the vacuum cleaning apparatus 1 will be described. Figure 4 is a diagram showing the functional configuration of the control device 20 shown in Figure 2. As shown in Figure 2, the control device 20's main components include, for example, a storage unit 290, an acquisition unit 210, a calculation unit 220, and an operation control unit 230. Functional means other than the storage unit 290 are realized by the CPU 21 executing a program stored in the storage device 23, etc.

[0067] The memory unit 290 stores measurement data 291, distillation model 292, and control program 293. The memory unit 290 also stores various values ​​and information that the control device 20 needs to store in advance.

[0068] The measurement data 291 is data relating to the measurement results transmitted from each measurement unit of the operating unit 10. Specifically, the measurement data 291 includes the temperature measurement results from the temperature measurement units TH1 to TH5, the flow velocity measurement results from the flow rate measurement units S1 to S4, the gas pressure measurement results from the pressure measurement unit VG, and the liquid volume measurement results of the cleaning liquid in the regeneration liquid tank T2 from the liquid volume measurement unit LS.

[0069] The distillation model 292 is a database showing the correspondence between the measurement results of each measurement unit of the operating unit 10 and the progress of distillation. The distillation model 292 is, for example, a relational expression that associates the measurement result of the cooling water temperature by the temperature measurement unit TH3 with the progress of distillation. The measurement result of the cooling water temperature by the temperature measurement unit TH3 is, for example, a temperature difference showing the difference between the measured temperature of the cooling water after passing through the cooling member 123 and the measured temperature of the cooling water before passing through the cooling member 123. The progress of distillation is expressed, for example, as a percentage with the value when distillation is completely finished set to 100. Here, the relationship between the measurement result of the cooling water temperature and the progress of distillation will be explained. When the distiller 120 performs distillation of the cleaning liquid, it regenerates the cleaning liquid by condensing the vapor of the cleaning liquid components with cooling water in the condensation unit 122. As a result, the temperature of the cooling water that has passed through the condensation unit 122 rises by the amount of energy used to cool the cleaning liquid. In other words, the progress of distillation is related to the temperature of the cooling water.

[0070] Let's look at a specific example of the distillation model 292. The distillation model 292 is, for example, a relational expression that associates the delay time from the start of distillation until the measured temperature difference begins to rise with the progress of distillation. Alternatively, the distillation model 292 may be a relational expression that associates the amount of increase in the temperature difference per unit time during distillation with the distillation rate, which indicates the rate at which distillation is progressing. Here, the distillation rate is an index that indicates the degree of the progress of distillation when the dirty liquid of the washing solution is distilled by the distiller 120. The distillation rate is indicated, for example, by the amount of increase per unit time of the amount of recycled washing solution stored in the regeneration tank T2. When the distillation model 292 shows the relationship between the measurement result and the distillation rate, the progress of distillation is calculated by multiplying the distillation rate by a predetermined unit time, for example.

[0071] Furthermore, the distillation model 292 may be a simulation model capable of reinforcement learning, for example, formed by a neural network. Reinforcement learning is implemented, for example, by AI (Artificial Intelligence). The distillation model 292 takes measurement results from temperature measurement units TH1~TH5, flow rate measurement units S1~S4, liquid volume measurement unit LS, pressure measurement unit VG, etc., as input and outputs the progress of distillation and the distillation rate. The distillation model 292 outputs the progress of distillation and the distillation rate as predicted values ​​according to the input measurement results from each measurement unit.

[0072] Control program 293 is a program for operating each component of the vacuum cleaning apparatus 1. Specifically, control program 293 is a program for controlling the operation of vacuum pumps 161 and 162, heat source unit 140, auxiliary heater 131, pumps P1 to P3, and valves A0 to A8, B0 to 13, and C1 to C3.

[0073] The acquisition unit 210 acquires measurement results from each measurement unit within the operating unit 10. Specifically, the acquisition unit 210 acquires the measurement results of the temperature of the hot water and the temperature of the cooling water from the temperature measurement units TH1 to TH5. The acquisition unit 210 also acquires the measurement results of the flow rate of the hot water and the flow rate of the cooling water from the flow rate measurement units S1 to S4. The acquisition unit 210 also acquires the measurement results of the gas pressure in the distiller 120 from the pressure measurement unit VG. The acquisition unit 210 also acquires the measurement results of the liquid volume of the cleaning liquid in the regeneration liquid tank T2 from the liquid volume measurement unit LS.

[0074] The calculation unit 220 calculates the progress of distillation of the dirty liquid in the cleaning solution. In calculating the progress of distillation of the dirty liquid, the calculation unit 220 also calculates the distillation rate, which indicates the rate at which the distillation of the dirty liquid is progressing. Specifically, the calculation unit 220 refers to the measurement results of the temperature measurement unit TH3 acquired by the acquisition unit 210 and the distillation model 292 stored in the storage unit 290. The calculation unit 220 uses the distillation rate associated with the measurement results of the temperature measurement unit TH3 in the distillation model 292 as the calculation result. Subsequently, the calculation unit 220 calculates the progress of distillation of the dirty liquid by multiplying the calculated distillation rate by a fixed time determined by the cycle during which the acquisition unit 210 acquires the measurement results.

[0075] Furthermore, if the distillation model 292 directly specifies a correspondence between the measurement results and the progress of distillation, the calculation unit 220 may calculate the progress of distillation associated with the measurement results of the temperature measurement unit TH3. Also, if the distillation model 292 is a simulation model formed by a neural network, the calculation unit 220 may input the measurement results of each measurement unit specified as input to the distillation model 292. The calculation unit 220 may also calculate predicted values ​​of the distillation rate and predicted values ​​of the progress of distillation output by the simulation of the distillation model 292.

[0076] The operation control unit 230 operates each component of the vacuum cleaning apparatus 1 according to the control program 293. Specifically, the operation control unit 230 acquires the temperature measurement results of the hot water in the hot water bath 130, the flow path immediately after discharge from the heat source 140, the flow paths before and after the heating plate 132, and the flow paths before and after the heat exchanger 150 from the temperature measurement units TH1, TH2, TH4, and TH5. The operation control unit 230 controls the operation of the heat source 140 and auxiliary heater 131 to start and stop heating the hot water during distillation, based on the acquired temperature measurement results and the control program 293. In addition, the operation control unit 230 controls the operation of the vacuum pumps 161 and 162 and related valves, based on the measurement results of the pressure measurement unit VG acquired by the acquisition unit 210 and the control program 293, to adjust the pressure in the distiller 120. Furthermore, the operation control unit 230 acquires the calculation results of the progress of distillation of the contaminated liquid by the calculation unit 220. The operation control unit 230 controls the operation of the components controlled by the control program 293 based on the progress of the distillation of the acquired waste liquid and the control program 293. Through operation control, the operation control unit 230 controls the operation of discharging the waste liquid remaining after distillation from the distiller 120 to the outside (drum D), the operation of discharging the waste liquid from the washing chamber 110 to the distiller 120, and the operation of adjusting the temperature of the hot water by the heat source unit 140 and the auxiliary heater 131. For example, if the progress of distillation is slow, the operation control unit 230 may temporarily suspend the discharge of waste liquid from the washing chamber 110 or continue the evaporation operation of the waste liquid by the evaporation unit 121 for a longer period than usual. Also, for example, if the progress of distillation is advanced, the operation control unit 230 may speed up the discharge operation of waste liquid from the washing chamber 110 or shorten the evaporation operation of the waste liquid by the evaporation unit 121 for a shorter period than usual.

[0077] The functional configuration of the control device 20 has been described above. Next, the sequence of processes in the vacuum cleaning apparatus 1 will be described in detail. Figure 5 is an example of a flowchart showing the sequence of processes in the vacuum cleaning apparatus 1 shown in Figure 1.

[0078] (Step SP10) The vacuum cleaning apparatus 1 uses the acquisition unit 210 to acquire the temperature of the hot water at various points in the flow path through the heat source unit 140, the hot water tank 130, and the heating plate 132 from the temperature measurement units TH1, TH2, TH4, and TH5. The process then proceeds to step SP12.

[0079] (Step SP12) The vacuum cleaning apparatus 1 uses the acquisition unit 210 to acquire the temperature of the cooling water before and after it passes through the condensing unit 122 from the temperature measuring unit TH3. Then, the process proceeds to step SP14.

[0080] (Step SP14) The vacuum cleaning apparatus 1 acquires measurement results regarding the volume of cleaning liquid in the regeneration liquid tank T2 from the liquid volume measuring unit LS using the acquisition unit 210. Then, the process proceeds to step SP16.

[0081] (Step SP16) The vacuum cleaning apparatus 1 acquires measurement results regarding the gas pressure in the distiller 120 from the pressure measuring unit VG using the acquisition unit 210. Then, the process proceeds to the process in step SP18. Then, the process proceeds to the process in step SP18.

[0082] (Step SP18) The vacuum cleaning device 1 calculates the progress of distillation of the contaminated cleaning liquid using the calculation unit 220. Specifically, as explained with reference to Figure 4, the vacuum cleaning device 1 uses the calculation unit 220 to refer to the measurement results used to calculate the distillation rate from the measurement results of each measurement unit obtained in the processes of steps SP10 to SP16. The vacuum cleaning device 1 calculates the progress of distillation by substituting the measurement results into the distillation model 292 stored in the storage unit 290 using the calculation unit 220. Alternatively, the vacuum cleaning device 1 may calculate the distillation rate by substituting the measurement results into the distillation model 292 stored in the storage unit 290 using the calculation unit 220, and then calculate the progress of distillation from the distillation rate. Then, the process moves on to the process of step SP20.

[0083] (Step SP20) The vacuum cleaning apparatus 1 uses the operation control unit 230 to control the operation of various parts of the operation unit 10 according to the progress of distillation calculated by the calculation unit 220 and the control program 293, thereby performing distillation of the contaminated cleaning liquid. Specifically, as explained with reference to Figure 4, the operation control unit 230 speeds up or slows down the distillation operations according to the progress of the distillation of the contaminated cleaning liquid. Then, the process moves on to the process in step SP22.

[0084] (Step SP22) The vacuum cleaning apparatus 1, using the operation control unit 230, determines from the measurement result of the liquid volume measuring unit LS whether or not the distillation of the contaminated cleaning liquid has been completely completed. If the determination is negative, the process returns to the process of step SP10. On the other hand, if the determination is positive, the series of processes shown in Figure 5 is terminated.

[0085] <Effects> In this embodiment, the vacuum cleaning apparatus 1 comprises a cleaning chamber 110, a distiller 120, a hot water tank 130, and a heat source 140. The evaporation section 121 of the distiller 120 is formed in the shape of a container that stores the contaminated cleaning liquid discharged from the cleaning chamber 110 and evaporates the stored contaminated liquid. The condensing section 122 of the distiller 120 is integrally formed with the evaporation section 121 so as to be connected to the opening of the cylinder of the evaporation section 121, and condenses the vapors of the cleaning liquid components contained in the contaminated liquid to regenerate the cleaning liquid. The hot water tank 130 stores hot water supplied from the heat source 140 with at least a portion of the outer surface of the evaporation section 121 immersed in it. Therefore, the vacuum cleaning apparatus 1 adjusts the temperature of the evaporation section 121 by using a hot water tank 130 that stores hot water having a higher specific heat (e.g., 4.2 kJ / kg·K) than conventional heat transfer oil (e.g., 2.3 kJ / kg·K), making it easier to maintain the temperature inside the distiller 120. Furthermore, since the vacuum cleaning apparatus 1 is designed so that the evaporation section 121 of the distiller 120 is immersed in the hot water tank 130, it also makes it easier to maintain the temperature inside the distiller 120. Because the temperature inside the distiller 120 is easily maintained, rapid temperature changes are suppressed, allowing for smoother temperature adjustment of the cleaning solution stored in the distiller 120. Additionally, since the vacuum cleaning apparatus 1 uses hot water instead of heat transfer oil, which requires periodic replacement, running costs can be reduced. Furthermore, because the vacuum cleaning apparatus 1 uses hot water, which is more environmentally friendly than heat transfer oil, the burden on the global environment can be reduced.

[0086] Furthermore, in this embodiment, the vacuum cleaning apparatus 1 includes a temperature measuring unit TH1 (first temperature measuring unit) that measures the temperature of the hot water stored in the hot water tank 130, and a control device 20 that controls the operation of the heat source unit 140 based on the measurement results of the temperature measuring unit TH1. Therefore, since the vacuum cleaning apparatus 1 controls the heat source unit 140 based on the measurement results of the temperature of the hot water, which has a higher specific heat than the heat transfer oil and is easier to maintain at a constant temperature, the temperature inside the distiller 120 is easily stabilized, and the evaporation unit 121 can evaporate the cleaning liquid with high efficiency. Specifically, the vacuum cleaning apparatus 1 can shorten the distillation time, reduce power consumption associated with distillation, and suppress the adhesion of residual contaminants inside the distiller 120 due to overheating.

[0087] Furthermore, in this embodiment, the vacuum cleaning apparatus 1 is further equipped with an auxiliary heater 131 inside the hot water tank 130 to heat the hot water in the hot water tank 130. Therefore, the vacuum cleaning apparatus 1 adjusts the temperature of the hot water in the hot water tank 130 not only with the heat source 140 but also with the auxiliary heater 131, allowing for more precise temperature control within the hot water tank 130 and smoother temperature adjustment of the cleaning solution stored in the distiller 120.

[0088] Furthermore, in this embodiment, the vacuum cleaning apparatus 1 further includes a heating plate 132 for heating the evaporation section 121 within the distiller 120, and a temperature measuring unit TH2 (second temperature measuring unit) for measuring the temperature of the hot water before and after passing through the heating plate 132. Therefore, the vacuum cleaning apparatus 1 heats the contaminated cleaning liquid in the distiller 120 not only with the hot water tank 130 but also with the heating plate 132, allowing for even smoother temperature adjustment of the cleaning liquid stored in the distiller 120.

[0089] Furthermore, this embodiment includes a temperature measuring unit TH3 (third temperature measuring unit) that measures the temperature of the cooling water after it has passed through the condensing unit 122 of the distiller 120. The control device 20 calculates the distillation rate from the measurement results of the temperature measuring unit TH3 and controls a series of operations related to distillation based on the calculated distillation rate. Therefore, the vacuum cleaning device 1 determines the state related to distillation from the measurement results of the cooling water temperature and controls the operations related to distillation, thereby enabling the distillation of the dirty liquid in the cleaning solution by the distiller 120 to be performed with even higher efficiency. Specifically, the vacuum cleaning device 1 can reduce the power consumption due to distillation and shorten the distillation time.

[0090] Furthermore, in this embodiment, the vacuum cleaning apparatus 1 further comprises a regeneration liquid tank T2 and a liquid volume measuring unit LS for measuring the amount of cleaning liquid stored in the regeneration liquid tank T2. The control device 20 uses the rate of increase of the amount of cleaning liquid in the regeneration liquid tank T2 to calculate the distillation rate. Therefore, since the vacuum cleaning apparatus 1 calculates the rate of distillation from the rate of increase of the liquid volume, it can determine the state of distillation with high accuracy and perform the distillation of the contaminated cleaning liquid by the distiller 120 with even higher efficiency.

[0091] Furthermore, in this embodiment, the vacuum cleaning apparatus 1 and the control device 20 calculate the distillation rate using a distillation model 292 that takes the measurement result of the temperature measuring unit TH3 as input and outputs the distillation rate. Therefore, since the vacuum cleaning apparatus 1 calculates the distillation rate using a simulation model, it can determine the progress of distillation with even greater accuracy and perform the distillation of the dirty cleaning liquid by the distiller 120 with even greater efficiency.

[0092] Furthermore, in this embodiment, the vacuum cleaning device 1 further includes a vacuum pump 161 connected to the distiller 120 and a pressure measuring unit VG for measuring the pressure inside the distiller 120. The control device 20 adjusts the pressure inside the distiller 120 based on the measurement results of the pressure measuring unit VG. Therefore, the vacuum cleaning device 1 can adjust the pressure inside the distiller 120 to a suitable state, enabling even more efficient distillation of the dirty cleaning liquid by the distiller 120.

[0093] <Variation> It should be noted that the present invention is not limited to the embodiments described above. That is, any design modifications made to the above embodiments by those skilled in the art are also included within the scope of the present invention, as long as they retain the features of the present invention. Furthermore, the elements of the above embodiments and the modifications described later can be combined to the extent that it is technically possible, and any combination thereof is also included within the scope of the present invention, as long as it retains the features of the present invention. Alternatively, the execution status or execution order of each step constituting the flowchart may be changed to the extent that no technical inconsistencies arise.

[0094] For example, in this embodiment, the vacuum cleaning apparatus 1 calculates the progress of distillation and the distillation rate based on the measurement result of the cooling water temperature by the temperature measurement unit TH3 using a calculation unit 220, but is not limited to this. The vacuum cleaning apparatus 1 may, for example, be provided with a water volume sensor on the outlet side of the condensation unit 122 in the cooling water flow path to measure the amount of cooling water. Furthermore, the vacuum cleaning apparatus 1 may acquire the measurement result of the water volume sensor using an acquisition unit 210 and calculate the progress of distillation and the distillation rate based on the acquired measurement result of the water volume sensor. Specifically, the control device 20 may determine during distillation whether the measurement result of the water volume sensor is within a predetermined range including predetermined upper and lower limits. The control device 20 may consider distillation to be progressing if the determination is positive, and to have stopped distillation if the determination is negative. Furthermore, the control device 20 may reflect the progress and stop status of distillation in the operation of the distillation. With this configuration, the vacuum cleaning device 1 can determine the distillation state from the measurement results of the cooling water volume and reflect this in the distillation operation, thus enabling more efficient acquisition of the distillation progress status and allowing for even more efficient distillation of the contaminated cleaning liquid by the distiller 120.

[0095] Furthermore, in this embodiment, the temperature measuring units TH2, TH3, and TH5 are provided in pairs on both the inlet and outlet sides of the object through which the fluid passes, but this is not limited to this configuration. The temperature measuring units TH2, TH3, and TH5 may be provided on only one of the inlet or outlet sides of the object through which the fluid passes. In this case, the control device 20 uses the temperature before or after passage of the object, rather than the temperature difference before and after passage, in the calculations of the calculation unit 220 and the operation control by the operation control unit 230. With this configuration, the vacuum cleaning device 1 can reduce the number of measuring units installed, thereby reducing the cost associated with the measuring units and simplifying the control.

[0096] Furthermore, in this embodiment, the evaporation section 121 is formed in a container-like and cup-like shape as shown in Figure 3, but it is not limited to this. The evaporation section 121 can have any shape as long as at least a part of its bottom outer surface is immersed in the hot water bath 130 and the shape is such that the vapor of the cleaning solution components contained in the dirty cleaning solution is directed toward the condensation section 122. For example, the evaporation section 121 may be formed in a flask-like shape with the bottom wider than the top, or conversely, in a conical shape with the bottom narrower than the top. The evaporation section 121 may also be formed as a container to which a pipe for supplying vapor to the condensation section 122 is connected at the top. The evaporation section 121 may also be a container with an open top and a bottom with many irregularities. With this configuration, since the evaporation section 121 can have various shapes, the vacuum cleaning apparatus 1 can improve the efficiency of heating the hot water in the hot water bath 130 and the overall space efficiency of the vacuum cleaning apparatus 1 by adopting a distiller 120 having an evaporation section 121 of a suitable shape. [Explanation of symbols]

[0097] 1... Vacuum cleaning device, 2... Workpiece, 20... Control device, 110... Cleaning chamber, 111... Cleaning liquid tank, 120... Distillation apparatus, 121... Evaporation unit, 122... Condensing unit, 123... Cooling component, 130... Hot water tank, 131... Auxiliary heater, 132... Heating plate, 140... Heat source unit, 161... Vacuum pump, A5~A6... Valves, LS... Liquid volume measurement unit, T2... Regeneration liquid tank, TH1... First temperature measurement unit, TH2... Second temperature measurement unit, TH3... Third temperature measurement unit, VG... Pressure measurement unit

Claims

1. A cleaning chamber in which workpieces are cleaned under reduced pressure using cleaning fluid supplied from a cleaning fluid tank, A distiller having a container-shaped evaporation section for storing the dirty cleaning liquid discharged from the cleaning chamber and for evaporating the stored dirty liquid, and a condensing section integrally formed with the evaporation section so as to be connected to the opening of the evaporation section, which condenses the vapor of the cleaning liquid components contained in the dirty liquid generated by the evaporation section to regenerate the cleaning liquid, A hot water tank for storing hot water with at least a portion of the outer surface of the evaporation section immersed in it, A heat source unit that adjusts the temperature of the hot water stored in the hot water tank, A vacuum cleaning apparatus characterized by being equipped with the following features.

2. A first temperature measuring unit for measuring the temperature of the hot water stored in the hot water tank, A control device that controls the temperature adjustment operation of the heat source based on the measurement results of the first temperature measuring unit, The vacuum cleaning apparatus according to claim 1, further comprising the features described above.

3. The hot water tank is further provided with an auxiliary heater for heating the hot water stored in the hot water tank, The control device controls the execution and stopping of heating the hot water by the auxiliary heater based on the measurement results of the first temperature measuring unit. The vacuum cleaning apparatus according to feature 2.

4. A heating plate connected to a flow path provided within the evaporation section and for heating the evaporation section, The system further includes a second temperature measuring unit that measures the temperature of the hot water before and after it passes through the heating plate, The heat source adjusts the temperature of the hot water flowing through the passage of the heating plate. The control device controls the temperature adjustment operation of the heat source based on the measurement results of the first temperature measuring unit and the second temperature measuring unit. The vacuum cleaning apparatus according to feature 2.

5. The condensing section is a heat exchanger that condenses the steam using a cooling member having a flow path through which cooling water flows. The system further includes a third temperature measuring unit for measuring the temperature of the cooling water after it has passed through the condensation section. The control device calculates a distillation rate, which indicates the rate at which the distillation of the contaminated liquid by the distiller progresses, from the measurement results of the third temperature measuring unit, and controls the operation of discharging the waste liquid remaining after distillation from the distiller to the outside, the operation of discharging the contaminated liquid from the washing chamber to the distiller, and the operation of adjusting the temperature of the heat source unit, based on the calculated distillation rate. The vacuum cleaning apparatus according to feature 2.

6. A regeneration liquid tank for storing the cleaning liquid regenerated by the condensation unit, The regeneration liquid tank further comprises a liquid volume measuring unit for measuring the amount of cleaning liquid stored in the tank, The control device uses the rate of increase in the volume of the washing liquid, as measured by the liquid volume measuring unit, to calculate the distillation rate. The vacuum cleaning apparatus according to feature 5.

7. The control device calculates the distillation rate using a distillation model, which is a simulation model that takes the measurement result of the third temperature measuring unit as input and outputs the distillation rate. The vacuum cleaning apparatus according to feature 5.

8. A vacuum pump connected to the distiller via a valve, The apparatus further comprises a pressure measuring unit for measuring the pressure inside the distillation apparatus, The control device adjusts the pressure inside the distiller by controlling the opening and closing of the valve and the vacuum pump based on the measurement results of the pressure measuring unit. A vacuum cleaning apparatus according to any one of claims 2 to 7, characterized by the features described herein.

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