Measuring device

Abstract

To provide a surveying device that can acquire point cloud data at high speed. [Solution] An emission unit 4 that emits a distance measuring light 18 onto the object to be measured, a light receiving unit 5 that receives reflected distance measuring light 19 from the object to be measured, a first optical axis deflection unit 6 that is rotatable about an axis 22 and deflects the distance measuring light in a predetermined direction, a second optical axis deflection unit 7 that is rotatable about the same axis as the first optical axis deflection unit and deflects the distance measuring light emitted from the first optical axis deflection unit in a predetermined direction, and a control unit for the emission unit, light receiving unit, first optical axis deflection unit and second optical axis deflection unit. The system comprises a calculation control unit 14 that calculates the distance to the object to be measured based on the reception result of reflected distance measuring light to the light receiving unit, and calculates the emission direction of the distance measuring light based on the rotational positions of the first optical axis deflection unit and the second optical axis deflection unit. The first optical axis deflection unit and the second optical axis deflection unit are configured to deflect the distance measuring light with an angular magnification of approximately 1x, and the calculation control unit is configured to scan the distance measuring light within a predetermined range by the cooperation of the rotation of the first optical axis deflection unit and the rotation of the second optical axis deflection unit.

Description

Technical Field

[0001] The present disclosure relates to a surveying instrument capable of acquiring three-dimensional coordinates of a measurement object.

Background Art

[0002] As a surveying instrument for acquiring the shape and three-dimensional point cloud data of a measurement object, there is, for example, a three-dimensional laser scanner.

[0003] Normally, a laser scanner can acquire point cloud data for a full 360° circumference through the cooperation of the horizontal rotation of the main body and the vertical rotation of deflection members such as mirrors and prisms. On the other hand, the main body is larger and heavier than the deflection members. Therefore, there is a limit to improving the rotation speed of the main body, and it takes time to acquire point cloud data for the full circumference.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] The present disclosure provides a surveying instrument capable of acquiring point cloud data at high speed.

Means for Solving the Problems

[0006] This disclosure provides a method for measuring distances to an object, including an emission unit that emits distance-measuring light to an object to be measured, a light-receiving unit that receives reflected distance-measuring light from the object to be measured, a first optical axis deflection unit that is rotatable about an axis and deflects the distance-measuring light in a predetermined direction, a second optical axis deflection unit that is rotatable about the same axis as the first optical axis deflection unit and deflects the distance-measuring light emitted from the first optical axis deflection unit in a predetermined direction, and a method for controlling the emission unit, the light-receiving unit, the first optical axis deflection unit and the second optical axis deflection unit, and the reflected distance-measuring light to the light-receiving unit. The surveying device comprises a calculation control unit that calculates the distance to the object to be measured based on the reception result of the distance light, and calculates the emission direction of the distance measuring light based on the rotational positions of the first optical axis deflection unit and the second optical axis deflection unit, wherein the first optical axis deflection unit and the second optical axis deflection unit are configured to deflect the distance measuring light with an angular magnification of approximately 1x, and the calculation control unit is configured to scan the distance measuring light within a predetermined range by the cooperation of the rotation of the first optical axis deflection unit and the rotation of the second optical axis deflection unit. [Effects of the Invention]

[0007] According to this disclosure, wide-angle point cloud data can be acquired at high speed. [Brief explanation of the drawing]

[0008] [Figure 1] This is a cross-sectional view showing a surveying device according to the first embodiment. [Figure 2] This is a configuration diagram showing the optical system of the surveying device according to the first embodiment. [Figure 3] (A) and (B) are unfolded diagrams of the first prism, and (C) and (D) are unfolded diagrams of the second prism. [Figure 4] (A) to (F) are explanatory diagrams illustrating the relationship between the rotational positions of the first and second prisms and the deflection direction of the rangefinder light. [Figure 5] (A) and (B) are diagrams showing the optical system of the surveying device according to the second embodiment. [Figure 6] This is a configuration diagram showing the optical system of a surveying device according to the third embodiment. [Figure 7] This is a configuration diagram showing the optical system of the surveying device according to the fourth embodiment. [Figure 8] This is a configuration diagram showing the optical system of the surveying device according to the fifth embodiment. [Figure 9] (A) is a diagram showing the optical system of the surveying device according to the sixth embodiment, and (B) is an explanatory diagram illustrating a two-plane orthogonal reflector array. [Figure 10] (A) to (D) are explanatory diagrams showing variations of the second prism. [Figure 11] Figures (A) to (D) are explanatory diagrams showing modified examples of the first optical axis deflection section and the second optical axis deflection section. [Figure 12] (A) to (D) are explanatory diagrams showing variations of the window section. [Figure 13] This is an explanatory diagram illustrating the case where only the first prism is used as the optical axis deflection element. [Modes for carrying out the invention]

[0009] The embodiments of this disclosure will be described below with reference to the drawings.

[0010] First, a surveying apparatus according to the first embodiment of this disclosure will be described in Figure 1.

[0011] The surveying device 1 is, for example, a Light Detection and Ranging (LiDAR) system. The surveying device 1 has a housing 2 with an open top and a roughly spherical window portion 3 provided on the housing 2. The top of the window portion 3 is a support portion 3a for supporting the second optical axis deflection portion 7, which will be described later.

[0012] Further, the measuring device 1 mainly includes an injection unit 4, a light receiving unit 5, a first optical axis deflecting unit 6, the second optical axis deflecting unit 7, a first motor 8 as a first rotation driving unit, a second motor 9 as a second rotation driving unit, a first rotation angle encoder 11 as a first rotation angle detector, a second rotation angle encoder 12 as a second rotation angle detector, an inclination detection unit 10, an operation panel 13 that also serves as an operation unit and a display unit, an arithmetic control unit 14, a storage unit 15, etc. These are housed inside the housing 2 and the window portion 3 and integrated. Incidentally, the injection unit 4, the light receiving unit 5, the first optical axis deflecting unit 6, the second optical axis deflecting unit 7, the arithmetic control unit 14, etc. constitute a distance measuring unit having a function as an optical wave distance meter.

[0013] The first optical axis deflecting unit 6 has a first prism 16 as a first deflecting optical member and a ring gear 17 that supports the lower surface of the first prism 16. The ring gear 17 has teeth engraved on its outer circumference and a hole 17a formed at its center that is larger than the beam diameter of the distance measuring light 18 (described later) incident on the first prism 16 and the reflected distance measuring light 19 (described later) emitted from the first prism 16.

[0014] The first motor 8 is controlled by the arithmetic control unit 14. A drive gear 21 is fixed to the output shaft of the first motor 8, and the drive gear 21 meshes with the ring gear 17. The arithmetic control unit 14 is configured to rotate the ring gear 17 via the drive gear 21 by the first motor 8 so that the first prism 16 rotates integrally with the ring gear 17 about the axis 22.

[0015] The relative rotation angle of the first prism 16 with respect to the housing 2 and the window portion 3 is detected by the first rotation angle encoder 11. The detection signal from the first rotation angle encoder 11 is input to the arithmetic control unit 14, and the arithmetic control unit 14 calculates first rotation angle data. The arithmetic control unit 14 performs feedback control by the first motor 8 based on the first rotation angle data. Incidentally, as the first motor 8, a motor capable of detecting a rotation angle or a motor that rotates corresponding to a drive input value, for example, a pulse motor, may be used.

[0016] The second optical axis deflecting unit 7 includes a second prism 23 as a second deflecting optical member, a support member 24 joined to the second prism 23 and supporting the second prism 23 from above, a bearing 25 fixed to the support portion 3a, and a rotating shaft 26 rotatably supported by the bearing 25 and rotating the support member 24. Further, the second prism 23 is configured to rotate integrally with the rotating shaft 26 and the support member 24.

[0017] The second motor 9 is controlled by the arithmetic control unit 14. The arithmetic control unit 14 rotates the second prism 23 about the axis 22 by the second motor 9. That is, the first prism 16 and the second prism 23 are configured to rotate individually about the same axis 22.

[0018] The relative rotation angle of the second prism 23 with respect to the housing 2 and the window portion 3 is detected by the second rotation angle encoder 12. A detection signal from the second rotation angle encoder 12 is input to the arithmetic control unit 14, and the arithmetic control unit 14 calculates second rotation angle data. The arithmetic control unit 14 performs feedback control on the second motor 9 based on the second rotation angle data.

[0019] The first rotation angle data, the second rotation angle data, and the measurement result calculated by the arithmetic control unit 14 are stored in the storage unit 15. Note that, as the arithmetic control unit 14, a CPU specialized for this embodiment, a general-purpose CPU, an embedded CPU, a microprocessor, or the like is used. Further, as the storage unit 15, various storage means such as an HDD as a magnetic storage device, a CD or DVD as an optical storage device, a memory card as a semiconductor storage device, a USB memory, etc. are used. The storage unit 15 may be detachable from the housing 2, or may be able to send data to an external storage device or an external data processing device via a communication means not shown.

[0020] The memory unit 15 stores various programs, including a sequence program for controlling the distance measurement operation, a calculation program for calculating (measuring distance) based on the distance measurement operation, a drive program for driving the first motor 8 and the second motor 9, a calculation program for calculating (measuring angle) the angle (direction of emission of the distance measuring light) based on the first rotation angle data and the second rotation angle data, and a program for calculating the three-dimensional coordinates of the measurement point (irradiation point) based on the distance and angle, as well as various data such as table data relating the rotational positions of the first and second prisms and the emission direction of the distance measuring light, which will be described later. Furthermore, various processes are executed when the calculation control unit 14 executes the various programs.

[0021] The tilt detection unit 10 is, for example, a tilt sensor capable of detecting tilt angles in two axes relative to the horizontal. The tilt angle detected by the tilt detection unit 10 is input to the calculation control unit 14 in real time. The calculation control unit 14 corrects the measurement result (3D coordinates) to a measurement result based on the horizontal based on the tilt angle.

[0022] The aforementioned operation panel 13 is, for example, a touch panel, and serves as both an operation unit for giving instructions for distance measurement and changing measurement conditions, such as the interval between measurement points, and a display unit for displaying measurement results, etc.

[0023] Next, with reference to Figures 2 and 3, the optical system of the surveying device 1, i.e., the distance measuring unit, will be described in detail.

[0024] The emission unit 4 has an emission optical axis 27. The emission unit 4 also includes, in order from the light-emitting side, a light-emitting element 28 provided on the emission optical axis 27, for example, a laser diode (LD) that emits near-infrared light (the distance measuring light 18) of a predetermined wavelength, a light-emitting lens 29, and a beam splitter 31. The first prism 16 and the second prism 23 are arranged on the emission optical axis 27 that has been deflected by the beam splitter 31, and the emission optical axis 27 that has been deflected by the beam splitter 31 is coaxial or substantially coaxial with the axis 22.

[0025] In this embodiment, the emission optical axis 27, the emission optical axis 27 reflected by the beam splitter 31, the emission optical axis 27 deflected by the first prism 16, and the emission optical axis 27 deflected by the second prism 23 are collectively referred to as the emission optical axis 27. Furthermore, the light-emitting element 28 may be, for example, a multi-array light source.

[0026] The projection lens 29 has optical properties that deflect the distance measuring light 18 emitted from the light-emitting element 28 into a parallel or substantially parallel beam. The beam splitter 31 has optical properties that deflect the distance measuring light 18 transmitted through the projection lens 29 at a right angle or substantially right angle so that it is coaxial or substantially coaxial with the axis 22, and also transmit the reflected distance measuring light 19 that is incident coaxially with the distance measuring light 18. That is, the beam splitter 31 is provided on the common optical path of the distance measuring light 18 and the reflected distance measuring light 19 (at the intersection of the emission optical axis 27 and the light-receiving optical axis 32 (described later)), and deflects the emission optical axis 27 so that it aligns with the light-receiving optical axis 32.

[0027] Here, a right-angle deflection means a 90° deflection, and a near-right-angle deflection means a deflection of approximately 85° to 95°, excluding 90°. Therefore, when a right-angle or near-right-angle deflection is described in this specification, it means a deflection of 85° to 95°.

[0028] The light-receiving unit 5 has a light-receiving optical axis 32. The light-receiving unit 5 also includes, in order from the light-receiving side, a light-receiving element 33 provided on the light-receiving optical axis 32, a light-receiving lens 34 having a predetermined Numerical Aperture (NA), and the beam splitter 31.

[0029] As the light-receiving element 33, for example, an avalanche photodiode (APD) or an equivalent multi-array light-receiving element may be used. In this embodiment, the light-receiving optical axis 32, the light-receiving optical axis 32 deflected by the first prism 16, and the light-receiving optical axis 32 deflected by the second prism 23 are collectively referred to as the light-receiving optical axis 32.

[0030] Next, the first prism 16 and the second prism 23 will be described with reference to Figures 2 and 3. The first prism 16 has a pentagonal cross-section and is a prism with an angular magnification of approximately 1x. In this specification, approximately 1x means, for example, 0.9x to 1.1x.

[0031] Furthermore, the first prism 16 has a first surface 16a as an incident surface to which the range measuring light 18 is incident, a second surface 16b as an exit surface to which the range measuring light 18 that has passed through the first surface 16a is incident, a third surface 16c to which the range measuring light 18 that has been reflected by the second surface 16b is incident, a fourth surface 16d formed between the first surface 16a and the second surface 16b, and a fifth surface 16e formed between the second surface 16b and the third surface 16c.

[0032] The first surface 16a is arranged, for example, so as to be inclined at a predetermined angle with respect to the axis 22, i.e., the emission optical axis 27, and the rangefinder light 18 is incident at a predetermined incident angle. On the other hand, if the first surface 16a is arranged so as to be perpendicular to the emission optical axis 27, the first prism 16 may be arranged so as to be inclined at approximately 0.5° to 10° with respect to the emission optical axis 27. In this case, it is possible to prevent the rangefinder light 18 reflected by the first surface 16a from becoming backlight.

[0033] The second surface 16b faces the first surface 16a and is inclined so as to move away from the first surface 16a toward the outer circumference. The inclination angle of the second surface 16b is such that, for example, the incidence angle of the rangefinder light 18 on the second surface 16b is greater than or equal to the critical angle. The critical angle in this case is acute and is appropriately set from 22.5° to 45°. Furthermore, regardless of the orientation of the first prism 16, the incidence position of the rangefinder light 18 on the second surface 16b is within a certain range, so a reflective film may be partially formed at the incidence position of the rangefinder light 18. Also, if the first prism 16 can be made larger, the range of incidence positions of the rangefinder light 18 on the second surface 16b can be made so as not to overlap with the range of emission positions. In this case, by partially forming a reflective film at the incidence position of the second surface 16b, the inclination angle of the second surface 16b can be made less than the total reflection critical angle (less than 22.5°).

[0034] The third surface 16c is continuous with the first surface 16a and faces the second surface 16b, and is inclined upward toward the outer periphery. The inclination angle of the third surface 16c is the angle at which the range measuring light 18 is reflected such that the emission angle of the range measuring light 18 emitted from the second surface 16b matches or substantially matches the incidence angle of the range measuring light 18 with respect to the first surface 16a, and the angle between it and the first surface 16a is obtuse. The third surface 16c may have a reflective film formed over its entire surface, or it may be a roof surface.

[0035] Figures 3(A) and 3(B) show the unfolded view of the first prism 16. In Figures 3(A) and 3(B), the dashed-dot line shows the optical path of the rangefinder light 18 incident on the first prism 16, and the dashed-dot line shows the optical path of the rangefinder light 18 passing through the unfolded first prism 16. Furthermore, Figure 3(A) shows the case where the rangefinder light 18 is incident at an incident angle of 0°, and Figure 3(B) shows the case where the rangefinder light 18 is incident at a predetermined incident angle.

[0036] As shown in Figures 3(A) and 3(B), in the unfolded view of the first prism 16, the incident surface, the first surface 16a, and the exit surface, the second surface 16b, which is the surface upon a second incident, are parallel or approximately parallel. Therefore, the exit optical axis 27 of the rangefinder light 18 incident on the first surface 16a and the exit optical axis 27 of the rangefinder light 18 emitted from the second surface 16b lie on the same straight line. That is, the angle of incidence of the rangefinder light 18 with respect to the first surface 16a and the angle of exit with respect to the second surface 16b are the same or approximately the same. Accordingly, by forming the first prism 16 such that the incident surface and the exit surface are parallel or approximately parallel in the unfolded view, the first prism 16 becomes a prism with an angular magnification of approximately 1x.

[0037] The second prism 23 is, for example, a triangular prism with a right-angled isosceles triangle cross-section, and is a prism with an angular magnification of approximately 1x.

[0038] Furthermore, the second prism 23 has a first surface 23a as an incident surface to which the range measuring light 18 is incident, a second surface 23b to which the range measuring light 18 that has passed through the first surface 23a is reflected, and a third surface 23c as an exit surface to which the range measuring light 18 reflected by the second surface 23b is incident.

[0039] The first surface 23a is arranged, for example, perpendicular or approximately perpendicular to the axis 22, and is incident on the rangefinder light 18 emitted from the emission surface (second surface 16b) of the first prism 16.

[0040] The second surface 23b has a reflective film formed on it and is inclined at 45° with respect to the first surface 23a. Alternatively, the total internal reflection of the second surface 23b may be used to reflect the distance measuring light 18. In this case, the reflective film can be omitted. Furthermore, the distance measuring light 18 that has passed through the first surface 23a is always incident at a constant position on the second surface 23b. That is, the intersection point of the emission optical axis 27 and the second surface 23b is always constant, and this intersection point coincides with the intersection point of the second surface 23b and the axis 22. Therefore, the incident position (reflection position) of the distance measuring light 18 on the second surface 23b is the mechanical center 35 of the surveying device 1.

[0041] The third surface 23c is formed between the first surface 23a and the second surface 23b, and transmits the ranging light 18 reflected by the second surface 23b.

[0042] Figures 3(C) and 3(D) show the unfolded view of the second prism 23. In Figures 3(C) and 3(D), the dashed line indicates the optical path of the rangefinder light 18 incident on the second prism 23, and the dashed line indicates the optical path of the rangefinder light 18 passing through the unfolded second prism 23. Furthermore, Figure 3(C) shows the case where the rangefinder light 18 is incident on the first surface 23a at an incident angle of 0°, and Figure 3(D) shows the case where the rangefinder light 18 is incident on the first surface 23a at a predetermined incident angle.

[0043] Similar to the first prism 16, the second prism 23 has a first surface 23a, which is the incident surface, and a third surface 23c, which is the exit surface, that are parallel or approximately parallel in the unfolded diagram. Therefore, in the unfolded diagram, by forming the second prism 23 such that the angle of incidence of the rangefinder light 18 with respect to the first surface 23a and the angle of exit with respect to the third surface 23c are equal or approximately equal, the second prism 23 becomes a prism with an angular magnification of approximately 1x.

[0044] Next, the measurement of the object to be measured using the surveying device 1 will be described. Various drives and processes by the surveying device 1 are controlled by the calculation control unit 14. The light-emitting element 28 emits the distance measuring light 18 in pulsed or burst (intermittent) bursts on the emission optical axis 27.

[0045] The distance measuring light 18 becomes a parallel or substantially parallel beam by the projection lens 29, is deflected by the beam splitter 31 so as to be coaxial or substantially coaxial with the axis 22, and is incident on the first surface 16a of the first prism 16. The distance measuring light that has passed through the first surface 16a is sequentially internally reflected by the second surface 16b and the third surface 16c, and then incident on the second surface 16b.

[0046] The rangefinder light 18 emitted from the second surface 16b is incident on the first surface 23a of the second prism 23. The rangefinder light 18 that has passed through the first surface 23a is reflected by the second surface 23b and incident on the third surface 23c.

[0047] The distance measuring light 18 emitted from the third surface 23c is reflected by the object to be measured and incident on the third surface 23c as reflected distance measuring light 19. The reflected distance measuring light 19 incident on the third surface 23c is reflected by the second surface 23b, emitted from the first surface 23a, and incident on the second surface 16b. The reflected distance measuring light 19 is sequentially internally reflected by the third surface 16c and the second surface 16b before incident on the first surface 16a and emitted. The angle of incidence of the distance measuring light 18 to the first surface 16a and the angle of emission from the second surface 16b are equal or approximately equal, and the angle of incidence to the first surface 23a and the angle of emission from the third surface 23c are equal or approximately equal.

[0048] The reflected distance measuring light emitted from the first prism 16 passes through the beam splitter 31, is focused by the light-receiving lens 34, and is received by the light-receiving element 33.

[0049] The calculation control unit 14 performs distance measurement for each pulse of the distance measuring light 18 (Time of Flight) based on the time difference between the light emission timing of the light-emitting element 28 and the light-receiving timing of the light-receiving element 33 (i.e., the round-trip time of the pulsed light) and the speed of light, and calculates the distance to the object to be measured. Furthermore, the calculation control unit 14 can calculate the three-dimensional coordinates of the measurement point illuminated by the distance measuring light 18, i.e., the object to be measured, based on the distance measurement result and the first rotation angle data and second rotation angle data obtained by the first rotation angle encoder 11 and the second rotation angle encoder 12. In addition, the calculation control unit 14 can correct the calculated three-dimensional coordinates of the object to be measured to horizontal-referenced three-dimensional coordinates based on the detection result of the tilt detection unit 10.

[0050] Here, the direction of emission of the rangefinder light 18 can be changed by rotating the first prism 16 and the second prism 23 around the axis 22. Figures 4(A) to 4(F) show the relationship between the rotational positions of the first prism 16 and the second prism 23 and the direction of emission of the rangefinder light 18.

[0051] As shown in Figures 4(A) to 4(C), when the first prism 16 is rotated while the position of the second prism 23 is fixed, if the deflection angle of the first prism 16 is, for example, 30°, the distance measuring light 18 is scanned in the vertical direction within a range of ±30°. Also, as shown in Figures 4(D) to 4(F), when the second prism 23 is rotated while the position of the first prism 16 is fixed, the distance measuring light 18 is deflected in the vertical direction within a range of ±30° while being scanned in the horizontal direction (left and right direction) over the entire 360° circumference.

[0052] Furthermore, the timing of the light emission of the light-emitting element 28, i.e., the pulse interval, can be changed via the operation panel 13. Therefore, by rotating the first prism 16 and the second prism 23 while emitting the distance measuring light 18 at predetermined pulse intervals, the distance measuring light 18 is scanned in three dimensions. In addition, by detecting the rotation angle of the first prism 16 and the second prism 23 for each pulse of light using the first rotation angle encoder 11 and the second rotation angle encoder 12, the emission direction of the distance measuring light 18 can be calculated. The three-dimensional coordinates of the object to be measured and three-dimensional point cloud data corresponding to the object to be measured can be obtained from the first rotation angle data, the second rotation angle data, distance measurement data, and tilt data.

[0053] Furthermore, by rotating the first prism 16 and the second prism 23 in the same direction at different speeds, or by rotating the first prism 16 and the second prism 23 in opposite directions at different speeds, that is, by controlling the rotation of the first prism 16 and the second prism 23 so that the trajectory of the distance measuring light 18 traces a different trajectory each time it rotates horizontally, the number of point clouds can be increased along with the integration time, thereby increasing the point cloud density.

[0054] As described above, in the first embodiment, the cooperation of the first prism 16 and the second prism 23 allows the distance measuring light 18 to be scanned within a range of 360° horizontally and ±30° vertically, thereby acquiring point cloud data. At this time, the first motor 8 rotates the first prism 16 and the ring gear 17, while the second motor 9 rotates the second prism 23, the support member 24, and the rotation shaft 26.

[0055] Therefore, the components constituting the rotating parts, the first optical axis deflection unit 6 and the second optical axis deflection unit 7, are small and few in number, and the first prism 16 and the second prism 23 can be rotated at high speed, enabling the acquisition of wide-angle point cloud data in both the horizontal 360° and vertical directions at high speed, while also allowing for miniaturization and weight reduction of the surveying device 1.

[0056] Furthermore, the first prism 16 and the second prism 23 are both reflective prisms with an angular magnification of approximately 1x. Therefore, when the distance measuring light 18 and the reflected distance measuring light 19 are deflected by the respective prisms 16 and 23, it is possible to prevent the deflection angle from changing due to temperature changes in the respective prisms 16 and 23, or due to changes in the wavelength of the distance measuring light 18 and the reflected distance measuring light 19. In other words, since the first prism 16 and the second prism 23 have no wavelength or temperature dependence of deflection angle, stable and highly accurate measurements become possible.

[0057] Furthermore, since the first prism 16 and the second prism 23 each have an angular magnification of 1x, the beam diameters of the distance measuring light 18 and the reflectance distance measuring light 19 do not change, thus reducing the difference in light intensity between on-axis and off-axis. Consequently, there is almost no difference in the measurable distance range regardless of the angle of the object being measured, thus improving versatility.

[0058] Next, a surveying device 1 according to a second embodiment of the present disclosure will be described in Figures 5(A) and 5(B). In Figures 5(A) and 5(B), components equivalent to those in Figure 2 are denoted by the same reference numerals, and their descriptions are omitted.

[0059] In the second embodiment, the shape of the first prism 36, which serves as the first optical axis deflection section, differs from that of the first prism 16 in the first embodiment, with the first prism 36 being larger in the vertical direction than the first prism 16. The other configurations are the same as those of the surveying apparatus according to the first embodiment.

[0060] In the first prism 36, the first surface 36a is positioned perpendicular or nearly perpendicular to the emission optical axis 27, the third surface 36c is continuous with one end of the first surface 36a and inclined upward toward the outer periphery, the fourth surface 36d is continuous with the other end of the first surface 36a and inclined upward toward the outer periphery (towards the third surface 36c), the fifth surface 36e is continuous with the third surface 36c and inclined upward toward the center (towards the fourth surface 36d), the second surface 36b is formed between the fourth surface 36d and the fifth surface 36e.

[0061] In the second embodiment, the ranging light 18 incident on the first surface 36a is sequentially internally reflected by the fourth surface 36d and the fifth surface 36e before being incident on the fourth surface 36d.

[0062] In the second embodiment, the fourth surface 36d is a reflective surface that reflects the range measuring light 18 that has passed through the first surface 36a, and is an ejection surface that transmits and ejects the range measuring light 18 that has been reflected by the fifth surface 36e. Furthermore, the incident position of the range measuring light 18 that has passed through the first surface 36a is constant regardless of the rotation position of the first prism 36.

[0063] Accordingly, the fourth surface 36d is configured such that its inclination angle is set so that the incident angle of the range measuring light 18 transmitted through the first surface 36a is greater than or equal to the critical angle, or so that a reflective film is partially formed at the incident position of the range measuring light 18. The incident angle at this time is appropriately set from, for example, 45° to 85°.

[0064] In the second embodiment as well, in the unfolded view, the incident surface (first surface 36a) and the exit surface (fourth surface 36d) of the first prism 36 are parallel or substantially parallel, and the incident angle of the rangefinder light 18 with respect to the incident surface matches or substantially matches the exit angle of the rangefinder light 18 with respect to the exit surface. That is, the angular magnification of the first prism 36 is substantially 1x, and the same effect as in the first embodiment can be obtained.

[0065] Furthermore, by making the first prism 36 larger in the vertical direction than the first prism 16 in the first embodiment, the inclination of the fourth surface 36d, which is both the incident surface and the reflecting surface, can be made gentler. Consequently, the angle of incidence of the distance measuring light 18 with respect to the fourth surface 36d can be increased, and the angle of incidence of the second prism 23 with respect to the incident surface (first surface 23a) can also be increased.

[0066] As the angle of incidence to the second prism 23 increases, the second prism 23 can deflect the distance measuring light 18 in the vertical direction within a range of ±60°. Therefore, the surveying device 1 according to the second embodiment can scan the distance measuring light 18 over a full 360° in the horizontal direction and within a range of ±60° in the vertical direction through the cooperation of the first prism 36 and the second prism 23, thus expanding the measurement range compared to the first embodiment.

[0067] Next, a surveying device 1 according to a third embodiment of this disclosure will be described in Figure 6. In Figure 6, components equivalent to those in Figure 2 are denoted by the same reference numerals, and their descriptions are omitted.

[0068] In the third embodiment, the shape of the second prism 37, which serves as the second optical axis deflection section, differs from that of the second prism 23 in the first embodiment. The other configurations are the same as those of the surveying apparatus according to the first embodiment.

[0069] The second prism 37 has a quadrilateral cross-section and is a prism with an angular magnification of approximately 1x. The second prism 37 also has a first surface 37a as an incident surface to which the range measuring light 18 emitted from the first prism 16 is incident, a second surface 37b facing the first surface 37a and reflecting the range measuring light 18 that has passed through the first surface 37a toward the first surface 37a, a third surface 37c formed between the first surface 37a and the second surface 37b as an emission surface to which the range measuring light 18 reflected by the first surface 37a is incident, and a fourth surface 37d facing the third surface 37c.

[0070] The first surface 37a is configured such that the distance measuring light 18 is incident on it at a predetermined angle of incidence. The angle of incidence of the distance measuring light 18 on the first surface 37a is determined by the rotational positions of the first prism 16 and the second prism 37.

[0071] The second surface 37b is inclined toward the outer periphery so as to move away from the first surface 37a, and a reflective film is deposited over its entire surface. The inclination angle is set such that the range measuring light 18 reflected by the second surface 37b is incident on the first surface 37a at an angle greater than or equal to a critical angle. The second prism 37 can also be set such that the range of the incident position of the range measuring light 18 on the first surface 37a does not overlap with the range of the emission position. In this case, the reflective film only needs to be formed partially at the incident position of the range measuring light 18, and the first surface 37a can be inclined at an angle less than the critical angle.

[0072] The second prism 37 has an angular magnification of approximately 1x, and in the unfolded view, the first surface 37a and the third surface 37c are parallel or approximately parallel. Therefore, the incident angle of the rangefinder light 18 with respect to the first surface 37a (incident surface) and the exit angle of the rangefinder light 18 with respect to the third surface 37c (exit surface) coincide or approximately coincide.

[0073] The first prism 16 and the second prism 37 can rotate independently and individually around the axis 22, and through the cooperation of the first prism 16 and the second prism 37, the emission optical axis 27 of the distance measuring light 18 can be deflected in any direction within the range of -90° to 90°.

[0074] Furthermore, by rotating the first prism 16 and the second prism 37 together while fixing their relative positions, the distance measuring light 18 can be scanned so that it traces a circle with the axis as its center. Additionally, by individually controlling the rotation of the first prism 16 and the second prism 37, the distance measuring light 18 can be scanned along any desired trajectory.

[0075] In the surveying device 1 according to the third embodiment, the emission surface (third surface 37c) of the second prism 37 is arranged to be perpendicular to the axis 22, and the distance measuring light 18 can scan within a predetermined range centered on the axis, i.e., in one direction. On the other hand, scanning of the distance measuring light 18 only requires rotating the small and lightweight first prism 16 and second prism 37, so point cloud data can be acquired at high speed.

[0076] Furthermore, since the second prism 37 is a prism with an angular magnification of approximately 1x, there is no wavelength or temperature dependence of the angular declination. In addition, since the difference in light intensity between the on-axis and off-axis of the reflected ranging light 19 can be reduced, there is almost no difference in the measurable distance range regardless of the angle of the object being measured, thus improving versatility.

[0077] Next, a surveying device 1 according to the fourth embodiment of this disclosure will be described in Figure 7. In Figure 7, components equivalent to those in Figure 2 are denoted by the same reference numerals, and their descriptions are omitted.

[0078] In the surveying device 1 according to the fourth embodiment, the second prism 38, which serves as the second optical axis deflection unit, is composed of a deflection prism 39 and a zenith prism 41. Furthermore, the deflection prism 39 and the zenith prism 41 are joined and integrated. In addition, a ranging light 18 having at least two different wavelengths, i.e., two or more wavelengths of ranging light 18, is used. The other configurations are the same as those of the surveying device according to the first embodiment.

[0079] The deflection prism 39 has the same structure as the second prism 23 in the first embodiment. That is, the deflection prism 39 is a triangular prism with a right-angled isosceles triangle cross-section, and is a prism with an angular magnification of approximately 1x.

[0080] The zenith prism 41 is a triangular prism with a triangular cross-section and an angular magnification of ≠ 1x. The zenith prism 41 also has a first surface 41a joined to the second surface 39b of the deflection prism 39, a second surface 41b as an emission surface into which the rangefinder light 18 transmitted through the first surface 41a is incident, and a third surface 41c facing the third surface 39c of the deflection prism 39 and formed between the first surface 41a and the second surface 41b.

[0081] The second prism 38 has a dichroic film deposited on the junction surface of the second surface 39b and the first surface 41a. In this case, the ranging light 18 incident on the junction surface is configured such that the ranging light 18a of the first wavelength is reflected by the dichroic film, and the ranging light 18b of the second wavelength is transmitted through the dichroic film. At this time, the first surface 39a of the deflection prism 39 functions as the incident surface of the zenith prism 41, and the dichroic film functions as a dividing surface that wavelength-divides the ranging light 18.

[0082] Furthermore, the second surface 41b is configured to deflect the emission optical axis 27 of the rangefinder light 18b that has passed through the dichroic film by a predetermined angle. That is, corresponding to the incident angle of the rangefinder light 18 with respect to the first surface 39a, the rangefinder light 18b can be changed to any direction within a range of -90° to 90° around the axis 22. In other words, the zenith prism 41 can obtain the same effect as the second prism 37 according to the third embodiment.

[0083] As described above, the second prism 38 is a prism that combines the deflection prism 39, which can obtain the same effect as the second prism 23 according to the first embodiment, and the zenith prism 41, which can obtain the same effect as the second prism 37 according to the third embodiment. That is, the second prism 38 has the measurement range of both the second prism 23 and the second prism 37.

[0084] Therefore, the surveying device 1 according to the fourth embodiment can obtain the same effects as the surveying devices according to the first to third embodiments. Furthermore, the surveying device 1 is capable of measuring a full 360° in the horizontal direction, ±30° in the vertical direction, and a range of -90° to 90° in the zenith direction, i.e., a full sphere scan, thereby greatly expanding the measurement range of the surveying device 1.

[0085] In the fourth embodiment, the angular magnification of the zenith prism 41 is not equal to 1, and angular deviation errors may occur due to temperature changes of, for example, 2 to 10 seconds. However, in actual measurement work, the distance to the object to be measured is often shorter in the zenith direction than in the horizontal direction, so the error in the measurement result in the zenith direction can be kept within an acceptable range.

[0086] Next, a surveying device 1 according to the fifth embodiment of this disclosure will be described in Figure 8. In Figure 8, components equivalent to those in Figure 2 are denoted by the same reference numerals, and their descriptions are omitted.

[0087] In the surveying device 1 according to the fifth embodiment, the second prism 42, which serves as the second optical axis deflection unit, is composed of a deflection prism 43 and a zenith prism 44. Furthermore, the deflection prism 43 and the zenith prism 44 are joined and integrated. In addition, a ranging light 18 having at least two different wavelengths, i.e., two or more wavelengths of ranging light 18, is used. The other configurations are the same as those of the surveying device according to the first embodiment.

[0088] The zenith prism 44 has a quadrangular cross-section and is a prism with an angular magnification of approximately 1x. The zenith prism 44 also has a first surface 44a into which the range measuring light 18 emitted from the first prism 16 is incident, a second surface 44b which is an emission surface into which the range measuring light 18 that has passed through the first surface 44a is incident, a third surface 44c into which the range measuring light 18 that has been sequentially reflected by the second surface 44b and the first surface 44a is incident, and a fourth surface 44d which is opposite the third surface 44c and formed between the first surface 44a and the second surface 44b. The fourth surface 44d is a chamfered portion formed by chamfering the triangular prism formed by the first surface 44a, the second surface 44b and the third surface 44c.

[0089] The second surface 44b faces the first surface 44a and is inclined so as to move away from the first surface 44a toward the outer periphery. The inclination angle of the second surface 44b is such that the distance measuring light 18 reflected by the second surface 44b is incident on the first surface 44a at an angle greater than or equal to the critical angle. Furthermore, in the unfolded view, the second surface 44b is parallel or approximately parallel to the first surface 44a.

[0090] The third surface 44c is formed between the first surface 44a and the second surface 44b and is inclined upward toward the outer periphery. The inclination angle of the third surface 44c is the angle at which the range measuring light 18 is reflected such that the emission angle of the range measuring light 18 emitted from the second surface 44b matches or substantially matches the incidence angle of the range measuring light 18 with respect to the first surface 44a, and the angle between it and the first surface 44a is obtuse. The third surface 44c may have a reflective film formed over its entire surface, or it may be a roof surface.

[0091] The deflection prism 43 has a quadrangular cross-section and is a prism with an angular magnification of approximately 1x. The deflection prism 43 also has a first surface 43a that is joined to a part of the second surface 44b, a second surface 43b to which the range measuring light 18 transmitted through the first surface 43a is incident, a third surface 43c as an emission surface to which the range measuring light 18 reflected by the second surface 43b is incident, and a fourth surface 43d that faces the first surface 43a and is formed between the second surface 43b and the third surface 43c. The fourth surface 43d is a chamfered portion formed by chamfering the triangular prism formed by the first surface 43a, the second surface 43b and the third surface 43c.

[0092] The first surface 43a is joined to the second surface 44b such that it is flush with the third surface 43c and the fourth surface 44d. The size of the first surface 43a is such that all of the rangefinder light 18 emitted from the first prism 16 and incident on the second prism 42 can be incident on it. Furthermore, a dichroic film is deposited on the joint surface between the first surface 43a and the second surface 44b, so that the first wavelength rangefinder light 18a incident on the joint surface is reflected by the dichroic film, and the second wavelength rangefinder light 18b is transmitted through the dichroic film. Therefore, the first surface 43a functions as the incident surface of the zenith prism 44, and the dichroic film functions as a wavelength-dividing surface for the rangefinder light 18.

[0093] The second surface 43b is inclined upward toward the center. The inclination angle of the second surface 43b is such that the emission angle of the range measuring light 18a emitted from the third surface 43c matches or substantially matches the incidence angle of the range measuring light 18 with respect to the first surface 44a.

[0094] The third surface 43c is perpendicular to the first surface 44a and parallel to the axis 22. In the unfolded view, the third surface 43c is parallel or approximately parallel to the first surface 44a.

[0095] In the fifth embodiment, the rangefinder light 18, which is incident on the first surface 44a at a right angle to or nearly coincide with the axis 22, is separated at the joint surface between the second surface 44b and the first surface 43a. The rangefinder light 18a reflected at this joint surface is sequentially reflected by the first surface 44a and the third surface 44c, and emitted from the second surface 44b. At this time, the zenith prism 44 can deflect the rangefinder light 18a in any direction within a range of -90° to 90° around the axis 22, corresponding to the angle of incidence of the rangefinder light 18 to the first surface 44a and the rotation of the second prism 42. That is, the zenith prism 44 can obtain the same effect as the second prism 37 according to the third embodiment.

[0096] Furthermore, the distance measuring light 18b that has passed through the joint surface is reflected by the second surface 43b and emitted from the third surface 43c. At this time, the deflection prism 43 can change the direction of the distance measuring light 18b in any direction within a range of ±30° in the vertical direction, corresponding to the angle of incidence of the distance measuring light 18 with respect to the first surface 44a. In addition, by rotating the second prism 42, the distance measuring light 18b can be deflected horizontally around the entire circumference of 360°.

[0097] In other words, the second prism 42 is a prism that combines the deflection prism 43, which provides the same effect as the second prism 23 according to the first embodiment, and the zenith prism 44, which provides the same effect as the second prism 37 according to the third embodiment. Therefore, measurements can be performed within the combined range of the second prism 23 and the second prism 37.

[0098] Therefore, the surveying device 1 according to the fifth embodiment can achieve the same effect as the surveying device according to the fourth embodiment. Furthermore, since the zenith prism 44 of the surveying device 1 is a prism with an angular magnification of approximately 1, angular deviation errors due to temperature and wavelength can be eliminated even in the zenith direction.

[0099] Next, the surveying apparatus 1 according to the sixth embodiment of this disclosure will be described in Figures 9(A) and 9(B). In Figure 9(A), components equivalent to those in Figure 2 are denoted by the same reference numerals, and their descriptions are omitted.

[0100] In the surveying device 1 according to the sixth embodiment, the second optical axis deflection unit 45 is composed of a wavelength-splitting prism 46 (hereinafter referred to as the splitting prism 46) and a two-plane orthogonal reflector array 47 (hereinafter referred to as the reflector array 47). Furthermore, it uses distance measuring light 18 having at least two different first and second wavelengths, i.e., distance measuring light 18 of two or more wavelengths. The other configurations are the same as those of the surveying device according to the first embodiment.

[0101] The divided prism 46 is a square prism formed by joining two triangular prisms, and has a first surface 46a into which the range measuring light 18 emitted from the first prism 16 is incident, a second surface 46b into which the range measuring light 18 transmitted through the first surface 46a is incident, a third surface 46c as an emission surface into which the range measuring light 18 reflected from the second surface 46b is incident, and a fourth surface 46d as an emission surface into which the range measuring light 18 transmitted through the second surface 46b is incident. Furthermore, a dichroic film is deposited on the second surface 46b, i.e., the joining surface of the two prisms, and the dichroic film reflects the range measuring light 18a of the first wavelength and transmits the range measuring light 18b of the second wavelength. In other words, the dichroic film functions as a dividing surface that wavelength-divides the range measuring light 18.

[0102] Furthermore, the triangular prism formed by the first surface 46a, the second surface 46b, and the third surface 46c of the divided prism 46 has the same structure as the second prism 23 in the first embodiment, and the same effects can be obtained.

[0103] As shown in Figure 9(B), the reflector array 47 is an optical element that transmits the ranging light 18b such that the angle of incidence θ of the ranging light 18b to the reflector array 47 is equal to the angle of emission θ of the ranging light 18b emitted from the reflector array 47. Furthermore, the reflector array 47 has an angular magnification of approximately 1x, and the difference in light intensity between on-axis and off-axis is small. That is, if the direction perpendicular to the reflector array 47 is taken as 0°, the reflector array 47 can deflect the incident ranging light 18b in any direction within the range of -90° to 90°.

[0104] Therefore, by rotating the second optical axis deflection unit 45, the distance measuring light 18b can be deflected in any direction within a range of -90° to 90° around the axis 22. In other words, the second optical axis deflection unit 45 can achieve the same effect as the second prism 37 according to the third embodiment.

[0105] In the sixth embodiment, the second optical axis deflection unit 45 is composed of the divided prism 46 and the reflector array 47, enabling measurement in the range of 360° horizontally, ±30° vertically, and -90° to 90° zenith, i.e., full-sphere scanning. Therefore, the same effects as in the fifth embodiment can be obtained, and workability can be improved.

[0106] In the first to sixth embodiments, one set of light-emitting element in the emission unit and light-receiving element in the light-receiving unit is provided. On the other hand, multiple sets of the light-emitting element and light-receiving element may be provided to increase the point cloud density during measurement.

[0107] Furthermore, while various shapes of prisms are exemplified as the first or second optical axis deflection section in the first to sixth embodiments, the prism shape of each optical axis deflection section and the combination of each optical axis deflection section are not limited to the shapes of the embodiments described above, and each optical axis deflection section may be composed of something other than a prism. Even when different shapes of prisms or materials other than prisms are used to constitute each optical axis deflection section, the same effects as in the embodiments described above can be obtained.

[0108] For example, as shown in Figure 10(A), a triangular prism 48 with an angular magnification of approximately 1x may be used as the first optical axis deflection section. In the case of the triangular prism 48, the rangefinder light 18 incident from the incident surface 48a is configured to be internally reflected once within the triangular prism 48 before being emitted from the emission surface 48b. The reflective surface 48c may be a roof surface.

[0109] Furthermore, as shown in Figure 10(B), a hexagonal prism 49 with a hexagonal cross-section and an angular magnification of approximately 1x may be used as the first optical axis deflection section. In the case of the hexagonal prism 49, the range measuring light 18 incident from the incident surface 49a is sequentially reflected by the reflective surfaces 49b and 49c, that is, internally reflected twice, before being emitted from the emission surface 49d. Note that the reflective surfaces 49b and 49c that reflect the range measuring light 18 toward the emission surface 49d may be roof surfaces.

[0110] Furthermore, as shown in Figure 10(C), a pentagonal prism 51 with a pentagonal cross-section and an angular magnification of approximately 1x may be used as the first optical axis deflection section. In the case of the pentagonal prism 51, the rangefinder light 18 incident from the incident surface 51a is sequentially reflected by the reflective surface 51b, the incident surface 51a, and the reflective surface 51c, that is, internally reflected three times, before being emitted from the emission surface 51d. Note that the reflective surfaces 51b and 51c that reflect the rangefinder light 18 toward the emission surface 51d may be roof surfaces.

[0111] Furthermore, as shown in Figure 10(D), a square prism 52 with a quadrilateral cross-section and an angular magnification of approximately 1x may be used as the first optical axis deflection section. In the case of the square prism 52, the range measuring light 18 incident from the incident surface 52a is sequentially reflected by the emission surface 52b, the reflective surface 52c, and the incident surface 52a, that is, internally reflected three times, before being emitted from the emission surface 52b. Note that the reflective surface 52c that reflects the range measuring light 18 toward the incident surface 52a may be a roof surface.

[0112] Alternatively, as shown in Figures 11(A) to 11(D), the first optical axis deflection section and the second optical axis deflection section may each be composed of mirrors. Figure 11(A) shows a case where the first optical axis deflection section is one mirror 53 and the second optical axis deflection section is one mirror 50. Figure 11(B) shows a case where the first optical axis deflection section is two mirrors 54a and 54b and the second optical axis deflection section is the aforementioned mirror 50, and the first optical axis deflection section is reflected sequentially twice by the mirrors 54a and 54b. Figure 11(C) shows a case where the first optical axis deflection section is three mirrors 55a, 55b, and 55c and the second optical axis deflection section is the aforementioned mirror 50, and the first optical axis deflection section is reflected sequentially three times by the mirrors 55a, 55b, and 55c. Furthermore, Figure 11(D) shows a case where the first optical axis deflection section consists of three mirrors 56a, 56b, and 56c, the second optical axis deflection section consists of the mirror 50, and the first optical axis deflection section is reflected three times sequentially by the mirrors 56a, 56b, and 56c.

[0113] Furthermore, the arrangement of each mirror is not limited to the arrangements shown in Figures 11(A) to 11(D), and the number and arrangement can be appropriately selected depending on the application. Also, since mirrors are used as optical axis deflection parts in all cases of Figures 11(A) to 11(D), it can be manufactured at a lower cost than when using prisms, and stray light can also be reduced.

[0114] In addition, in the surveying devices relating to the first to sixth embodiments and their modifications, a spherical window portion 3 is arranged on the housing 2, but the shape of the window portion 3 is not limited to a spherical shape. For example, Figures 12(A) to 12(D) show modified examples of the window portion 3. Figures 12(A) and 12(D) show front views of the window portion, and Figures 12(B) and 12(C) show top views of the window portion.

[0115] For example, as shown in Figure 12(A), a cylindrical window portion 57 with a spherical top surface may be formed and placed on the housing 2. Alternatively, as shown in Figure 12(B), a window portion 58 may be formed by joining four plate-shaped transparent materials and placed on the housing 2. Alternatively, a window portion with a triangular cross-section may be formed using two transparent materials, or the window portion may be removed.

[0116] Furthermore, as shown in Figure 12(C), the window portion 59 may be formed by a cone or by a cylindrical body. In either case, the window portion 59 is positioned on the housing 2 such that its axis is parallel to the axis 22.

[0117] Alternatively, as shown in Figure 12(D), a plate-shaped window portion 61 may be positioned opposite the emission surface of the second optical axis deflection portion, and the window portion 61 may be configured to rotate integrally with the second optical axis deflection portion. Furthermore, window portions with shapes other than those shown in Figures 12(A) to 12(D) are also applicable.

[0118] In the above-described embodiment and modification, two optical axis deflection units with an angular magnification of approximately 1 are rotated individually, and the combination of rotations between each optical axis deflection unit deflects the emission optical axis 27 of the distance measuring light 18 in any direction within a predetermined range. On the other hand, an optical axis deflection unit with an angular magnification of approximately 1 can also be applied to a surveying device that has only one optical axis deflection unit.

[0119] For example, as shown in Figure 13, if the first prism 16 of the first embodiment is applied as an optical axis deflection unit to a surveying device that performs a circular scan around the axis 22 at a predetermined deflection angle, no deflection error occurs regardless of the wavelength of the distance measuring light 18 or the temperature of the first prism 16, thus enabling highly accurate measurement results.

[0120] As described above, the optical axis deflection unit with an angular magnification of approximately 1x of the present disclosure is applicable to other surveying devices having an optical axis deflection unit and can improve measurement accuracy.

[0121] The embodiments of this disclosure have been described above with reference to the drawings, but these are merely examples, and various other configurations can be adopted.

[0122] Some or all of the above examples may also be described as follows, but are not limited to the following: 1. An emission unit that emits distance measuring light onto an object to be measured; a light receiving unit that receives reflected distance measuring light from the object to be measured; a first optical axis deflection unit that is rotatable about an axis and deflects the distance measuring light in a predetermined direction; a second optical axis deflection unit that is rotatable about the same axis as the first optical axis deflection unit and deflects the distance measuring light emitted from the first optical axis deflection unit in a predetermined direction; and a control unit that controls the emission unit, the light receiving unit, the first optical axis deflection unit and the second optical axis deflection unit, and the light receiving unit A surveying device comprising a calculation control unit that calculates the distance to the object to be measured based on the reception result of reflected distance measuring light, and calculates the emission direction of the distance measuring light based on the rotational positions of the first optical axis deflection unit and the second optical axis deflection unit, wherein the first optical axis deflection unit and the second optical axis deflection unit are configured to deflect the distance measuring light with an angular magnification of approximately 1x, and the calculation control unit is configured to scan the distance measuring light within a predetermined range by the cooperation of the rotation of the first optical axis deflection unit and the rotation of the second optical axis deflection unit. 2. The surveying device described in 1 above, wherein the first optical axis deflection unit has a prism having an incident surface into which the distance measuring light is incident at a predetermined incident angle, and an exit surface that emits the distance measuring light at an exit angle that coincides with or substantially coincides with the incident angle, and the distance measuring light is internally reflected at least once within the prism. 3. A surveying device as described in item 2 above, wherein the distance measuring light is internally reflected at least twice within the prism. 4. The surveying device described in item 1 above, wherein the first optical axis deflection unit has at least one mirror, and the distance measuring light is configured to be reflected at least once by the mirror. 5. A surveying device according to any one of items 1 to 4 above, wherein the second optical axis deflection unit has a triangular prism configured such that the incident surface and the emission surface are perpendicular, and the surveying device is configured to deflect the distance measuring light in the vertical direction in accordance with the incident angle of the distance measuring light emitted from the first optical axis deflection unit. 6. A surveying device according to any one of items 1 to 4 above, wherein the second optical axis deflection unit has a prism having an incident surface into which the distance measuring light emitted from the first optical axis deflection unit is incident at a predetermined incident angle, and an exit surface that emits the distance measuring light at an exit angle that coincides with or substantially coincides with the incident angle, and the prism is configured to deflect the distance measuring light within a predetermined range centered on the axis, corresponding to the incident angle of the distance measuring light with respect to the incident surface. 7. A surveying device according to any one of items 1 to 4 above, wherein the distance measuring light has two or more wavelengths, the second optical axis deflection unit comprises a deflection prism having an incident surface and an exit surface, and a zenith prism having an exit surface and joined to the incident surface of the deflection prism such that the incident surface of the deflection prism becomes the incident surface, a dividing surface for wavelength-dividing the distance measuring light is formed at the joining surface of the deflection prism and the zenith prism, the dividing surface is configured to reflect the first wavelength of the distance measuring light and transmit the second wavelength of the distance measuring light, the deflection prism deflects the first wavelength of the distance measuring light in the vertical direction corresponding to the incident angle of the distance measuring light with respect to the incident surface, and the zenith prism is configured to deflect the second wavelength of the distance measuring light within a predetermined range centered on the axis corresponding to the incident angle of the distance measuring light with respect to the incident surface. 8. A surveying device according to any one of items 1 to 4 above, wherein the distance measuring light has two or more wavelengths, and the second optical axis deflection unit has a zenith prism having an incident surface and an exit surface, and a deflection prism having an exit surface and joined to the incident surface of the zenith prism such that the incident surface becomes the incident surface, the deflection prism is joined to a part of the exit surface of the zenith prism, a dividing surface is formed at the joining surface of the deflection prism and the zenith prism for wavelength division of the distance measuring light, the dividing surface is configured to reflect the first wavelength of the distance measuring light and transmit the second wavelength of the distance measuring light, the deflection prism deflects the first wavelength of the distance measuring light in the vertical direction corresponding to the incident angle of the distance measuring light with respect to the incident surface, and the zenith prism is configured to deflect the second wavelength of the distance measuring light within a predetermined range centered on the axis corresponding to the incident angle of the distance measuring light with respect to the incident surface. 9. A surveying device according to any one of items 1 to 4 above, wherein the distance measuring light has two or more wavelengths, the second optical axis deflection unit has a dividing surface that wavelength-divides the distance measuring light, a wavelength-dividing prism having an incident surface and an exit surface, and a two-plane orthogonal reflector array, the dividing surface is configured to reflect the first wavelength of the distance measuring light and transmit the second wavelength of the distance measuring light, the wavelength-dividing prism deflects the first wavelength of the distance measuring light in the vertical direction corresponding to the incident angle of the distance measuring light with respect to the incident surface, and the two-plane orthogonal reflector array is configured to deflect the second wavelength of the distance measuring light such that the incident angle and exit angle of the second wavelength of the distance measuring light that transmits through the dividing surface coincide with the two-plane orthogonal reflector array. 10. A surveying device according to any one of items 1 to 4 above, wherein the second optical axis deflection unit has one mirror. 11. A measuring device comprising: an emission unit that emits distance measuring light onto an object to be measured; a light receiving unit that receives reflected distance measuring light from the object to be measured; an optical axis deflection unit that is rotatable about an axis and deflects the distance measuring light in a predetermined direction; and a calculation control unit that controls the emission unit, the light receiving unit and the optical axis deflection unit, calculates the distance to the object to be measured based on the result of receiving the reflected distance measuring light to the light receiving unit, and calculates the emission direction of the distance measuring light based on the rotation position of the optical axis deflection unit, wherein the optical axis deflection unit is configured to deflect the distance measuring light with an angular magnification of approximately 1x, and the calculation control unit is configured to scan the distance measuring light within a predetermined range by the rotation of the optical axis deflection unit. 12. A surveying device according to any one of items 1 to 10 above, wherein the first optical axis deflection unit is arranged such that the distance measuring light is incident at a slight inclination with respect to the incident surface. 13. A surveying device according to any one of items 1 to 10 above, wherein the emission unit and the light receiving unit are configured to have multiple sets of light-emitting elements and light-receiving elements. 14. A surveying device according to any one of items 1 to 10 above, wherein the surveying device has a window portion arranged to cover the second optical axis deflection portion, and the window portion is spherical. 15. A surveying device according to any one of items 1 to 10 above, wherein the surveying device has a window portion arranged to cover the second optical axis deflection portion, and the window portion is a cylindrical shape with a spherical upper surface. 16. A surveying device according to any one of items 1 to 10 above, wherein the surveying device has a window portion arranged to cover the second optical axis deflection portion, and the window portion is a cone or a cylinder. 17. A surveying device according to any one of items 1 to 10 above, wherein the surveying device has a window portion arranged to cover the second optical axis deflection portion, the window portion being plate-shaped and rotating integrally with the second optical axis deflection portion. [Explanation of Symbols]

[0123] 1 Surveying equipment 4 Injection part 5 Light receiving part 6 First optical axis deflection section 7 Second optical axis deflection section 14. Arithmetic Control Unit 16 No. 1 プリズム 18. Rangefinding Beam 19 Reflected rangefinder light 22 axis 23 2nd プリズム

Claims

1. An emission unit that emits distance measuring light onto an object to be measured; a light receiving unit that receives reflected distance measuring light from the object to be measured; a first optical axis deflection unit that is rotatable about an axis and deflects the distance measuring light in a predetermined direction; a second optical axis deflection unit that is rotatable about the same axis as the first optical axis deflection unit and deflects the distance measuring light emitted from the first optical axis deflection unit in a predetermined direction; and a control unit that controls the emission unit, the light receiving unit, the first optical axis deflection unit and the second optical axis deflection unit, and the reflected light from the light receiving unit. A surveying device comprising a calculation control unit that calculates the distance to the object to be measured based on the reception result of the emitted range measuring light, and calculates the emission direction of the range measuring light based on the rotational positions of the first optical axis deflection unit and the second optical axis deflection unit, wherein the first optical axis deflection unit and the second optical axis deflection unit are configured to deflect the range measuring light with an angular magnification of approximately 1x, and the calculation control unit is configured to scan the range measuring light within a predetermined range by the cooperation of the rotation of the first optical axis deflection unit and the rotation of the second optical axis deflection unit.

2. The surveying apparatus according to claim 1, wherein the first optical axis deflection unit has a prism having an incident surface into which the distance measuring light is incident at a predetermined incident angle and an exit surface that emits the distance measuring light at an exit angle that coincides with or substantially coincides with the incident angle, and the distance measuring light is internally reflected at least once within the prism.

3. The surveying apparatus according to claim 2, wherein the distance measuring light is configured to be internally reflected at least twice within the prism.

4. The surveying apparatus according to claim 1, wherein the first optical axis deflection unit has at least one mirror, and the distance measuring light is configured to be reflected at least once by the mirror.

5. The surveying apparatus according to any one of claims 1 to 4, wherein the second optical axis deflection unit has a triangular prism configured such that the incident surface and the exit surface are perpendicular, and is configured to deflect the distance measuring light in the vertical direction in accordance with the incident angle of the distance measuring light emitted from the first optical axis deflection unit.

6. The surveying apparatus according to any one of claims 1 to 4, wherein the second optical axis deflection unit has a prism having an incident surface into which the distance measuring light emitted from the first optical axis deflection unit is incident at a predetermined incident angle, and an exit surface that emits the distance measuring light at an exit angle that coincides with or substantially coincides with the incident angle, and the prism is configured to deflect the distance measuring light within a predetermined range centered on the axis in accordance with the incident angle of the distance measuring light with respect to the incident surface.

7. The measuring device according to any one of claims 1 to 4, wherein the distance measuring light has two or more wavelengths, the second optical axis deflection unit comprises a deflection prism having an incident surface and an exit surface, and a zenith prism having an exit surface and joined to the incident surface of the deflection prism such that the incident surface of the deflection prism becomes the incident surface, a dividing surface for wavelength-dividing the distance measuring light is formed at the joining surface of the deflection prism and the zenith prism, the dividing surface is configured to reflect the first wavelength of the distance measuring light and transmit the second wavelength of the distance measuring light, the deflection prism deflects the first wavelength of the distance measuring light in the vertical direction corresponding to the incident angle of the distance measuring light with respect to the incident surface, and the zenith prism is configured to deflect the second wavelength of the distance measuring light within a predetermined range centered on the axis corresponding to the incident angle of the distance measuring light with respect to the incident surface.

8. The measuring device according to any one of claims 1 to 4, wherein the distance measuring light has two or more wavelengths, the second optical axis deflection unit comprises a zenith prism having an incident surface and an exit surface, and a deflection prism having an exit surface and joined to the incident surface of the zenith prism such that the incident surface becomes the incident surface, the deflection prism is joined to a part of the exit surface of the zenith prism, a dividing surface for wavelength-dividing the distance measuring light is formed at the joining surface of the deflection prism and the zenith prism, the dividing surface is configured to reflect the first wavelength of the distance measuring light and transmit the second wavelength of the distance measuring light, the deflection prism deflects the first wavelength of the distance measuring light in the vertical direction corresponding to the incident angle of the distance measuring light with respect to the incident surface, and the zenith prism is configured to deflect the second wavelength of the distance measuring light within a predetermined range centered on the axis corresponding to the incident angle of the distance measuring light with respect to the incident surface.

9. The measuring device according to any one of claims 1 to 4, wherein the distance measuring light has two or more wavelengths, the second optical axis deflection unit has a dividing surface that wavelength-divides the distance measuring light, a wavelength-dividing prism having an incident surface and an exit surface, and a two-plane orthogonal reflector array, the dividing surface is configured to reflect the first wavelength of the distance measuring light and transmit the second wavelength of the distance measuring light, the wavelength-dividing prism deflects the first wavelength of the distance measuring light in the vertical direction corresponding to the incident angle of the distance measuring light with respect to the incident surface, and the two-plane orthogonal reflector array is configured to deflect the second wavelength of the distance measuring light such that the incident angle and exit angle of the second wavelength of the distance measuring light that transmits through the dividing surface coincide with the two-plane orthogonal reflector array.

10. The surveying apparatus according to any one of claims 1 to 4, wherein the second optical axis deflection unit has one mirror.

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