Transfer device

The transfer device reduces costs and weight by employing parallel linear sliders and a lever mechanism, addressing the complexity and cost issues of conventional cam-based systems with improved motion control and adjustability.

JP2026106517APending Publication Date: 2026-06-30FDK ENG CO LTD

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
FDK ENG CO LTD
Filing Date
2024-12-18
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

Conventional transfer devices are costly and heavy due to their complex mechanisms and large number of parts, particularly in cam-based systems.

Method used

A transfer device design utilizing parallel linear sliders and a lever mechanism to create horizontal and vertical movements without a cam mechanism, reducing the number of parts and weight by using a simpler, lighter construction.

Benefits of technology

The device achieves cost reduction and weight minimization while maintaining high-speed and stable transport capabilities through simplified motion control, allowing for quick adjustments and optimal path operation.

✦ Generated by Eureka AI based on patent content.

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Abstract

To provide a transfer device that enables cost reduction through a reduction in the number of parts and weight reduction. [Solution] The transfer device 100 is a device (pick and place unit, conveying device) that transfers a workpiece from a first position to a second position. The transfer device 100 is movable in the horizontal direction (first direction) and comprises a first horizontal movable plate 30 and a second horizontal movable plate 40 (multiple movable parts) arranged in parallel, a lever member 70 (connecting part) connected to the first horizontal movable plate 30 and the second horizontal movable plate 40, and a vertical movable plate 80 (movable part) connected to the lever member 70, which is movable in a vertical direction (second direction) different from the horizontal direction due to the positional difference between the first horizontal movable plate 30 and the second horizontal movable plate 40 and has a gripping part 81 for gripping a workpiece.
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Description

Technical Field

[0001] The present invention relates to a transfer device.

Background Art

[0002] As a conventional technique, a technique such as Patent Document 1 is disclosed.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] As conventional techniques, various techniques have been proposed, but a transfer device capable of reducing costs by reducing the number of parts and weight is desired.

[0005] Therefore, an object of the present invention is to provide a transfer device capable of reducing costs by reducing the number of parts and weight.

Means for Solving the Problems

[0006] The present invention employs the following means for solving the problems. Note that the following means for solving the problems are merely examples, and the present invention is not limited thereto. Further, the present invention can be an invention including at least one of the invention-specific matters shown in the following means for solving the problems. Furthermore, elements for limiting the invention-specific matters shown in the following means for solving the problems can be added to lower-conceptualize them, or elements for limiting the invention-specific matters can be deleted to upper-conceptualize them.

[0007] The transfer device of the solution is, for example, a transfer device for transferring a workpiece from a first position to a second position, and comprises: a plurality of movable parts that are movable in a first direction and arranged in parallel; a connecting part connected to the plurality of movable parts; and a movable part connected to the connecting part and movable in a second direction different from the first direction due to the positional difference of the plurality of movable parts, and having a gripping part for gripping the workpiece. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a transfer device that can reduce costs by reducing the number of parts and making it lighter. [Brief explanation of the drawing]

[0009] [Figure 1] This is a perspective view showing the transfer device 100 of the embodiment. [Figure 2] This figure shows an example of the control of the transfer device 100 according to the embodiment. [Figure 3] This figure shows an example of the operation of the transfer device 100 according to the embodiment. [Figure 4] This figure shows an example of the operation of the transfer device 100 according to the embodiment. [Figure 5] This figure shows an example of the operation of the transfer device 100 according to the embodiment. [Figure 6] This figure shows an example of the operation of the transfer device 100 according to the embodiment. [Figure 7] This is a perspective view showing the comparative example transfer device 100A. [Figure 8] This figure shows a modified transfer device. [Modes for carrying out the invention]

[0010] Embodiments of the present invention will be described below with reference to the drawings. The following embodiments are shown as preferred examples of a transfer device, and the embodiments are not limited to these examples.

[0011] Figure 1 is a perspective view showing the transfer device 100 of the embodiment. In the figure, the horizontal direction (left-right direction, width direction, first direction) of the transfer device 100 is defined as the X direction, the front-back direction (depth direction) of the transfer device 100 is defined as the Y direction, and the vertical direction (up-down direction, height direction, second direction) of the transfer device 100 is defined as the Z direction. The transfer device 100 is a device that can create movement in a first direction (e.g., the X direction) and a second direction (e.g., the Z direction) by utilizing multiple objects that move in a first direction (e.g., the X direction).

[0012] The transfer device 100 is a device (pick-and-place unit, transport device) for transporting objects such as workpieces W (see Figure 3). The transfer device 100 is a device for transferring workpieces W from a first position X1 (see Figure 3) to a second position X2 (see Figure 3). Workpiece W is, for example, an electronic component or a metal processed part. The transfer device 100 performs operations such as taking out or loading workpiece W from a transport device such as a turntable or conveyor (not shown), or setting or removing workpiece W from an inspection machine (not shown).

[0013] As shown in Figure 1, the transfer device 100 includes a first linear slider 10, a second linear slider 20, a first horizontally movable plate 30 (movable part, first movable part, multiple movable parts), a second horizontally movable plate 40 (movable part, second movable part, multiple movable parts), a first motor 50, a second motor 60, a lever member 70 (connecting part), and a vertically movable plate 80 (movable part).

[0014] The first linear slider 10 is a device that drives the first horizontally movable plate 30. The second linear slider 20 is positioned below the first linear slider 10 and is a device that drives the second horizontally movable plate 40. The first linear slider 10 and the second linear slider 20 can use ball screw actuators. Furthermore, if it is desired to increase the movement speed of the sliders included in the linear sliders, the linear sliders can use linear actuators or the like, not just ball screw actuators. The linear sliders (the first linear slider 10 and the second linear slider 20) are arranged in a plurality (two) in the vertical direction (the second direction) corresponding to the number of horizontal movable plates (the first horizontal movable plate 30 and the second horizontal movable plate 40).

[0015] The first horizontal movable plate 30 is movable in the horizontal direction (the first direction). The first horizontal movable plate 30 is composed of a plurality of components connected together. When the plate-shaped first slider 31 at the lowermost layer (the back side in the figure) moves by the drive of the first motor 50, the entire first horizontal movable plate 30 moves.

[0016] The second horizontal movable plate 40 is movable in the horizontal direction (the first direction). The second horizontal movable plate 40 is composed of a plurality of components connected together. When the plate-shaped second slider 41 at the lowermost layer (the back side in the figure) moves by the drive of the second motor 60, the entire second horizontal movable plate 40 moves.

[0017] Thus, the first horizontal movable plate 30 and the second horizontal movable plate 40 are each movable in the horizontal direction (the first direction) and are arranged in two in parallel. Also, the first horizontal movable plate 30 and the second horizontal movable plate 40 are arranged in two in the vertical direction (the second direction). Parallel includes not only complete parallelism but also states where there is a slight deviation in parallel or it spreads in a V-shaped or other form.

[0018] The first motor 50 is a motor for driving the first horizontal movable plate 30 (the first slider 31). The second motor 60 is a motor for driving the second horizontal movable plate 40 (the second slider 41). The first motor 50 and the second motor 60 can use servo motors. The first motor 50 and the second motor 60 are connected to a control unit not shown. The control unit can perform synchronous control of the first motor 50 and the second motor 60.

[0019] The control unit can drive the two motors at the same speed or at different speeds. Therefore, the first horizontal movable plate 30 (first slider 31) and the second horizontal movable plate 40 (second slider 41) can move at the same speed or at different speeds.

[0020] The lever member 70 is an L-shaped member connected to the first horizontally movable plate 30 and the second horizontally movable plate 40. Furthermore, the lever member 70 is a member that can rotate due to the positional difference between the first horizontally movable plate 30 and the second horizontally movable plate 40. The lever member 70 has a pivot shaft 71 formed by a bolt and nut at the center of the L-shaped folded portion. The lever member 70 can rotate clockwise or counterclockwise around the pivot shaft 71 as its center of rotation.

[0021] The two ends of the lever member 70 move along an arc-shaped trajectory with the rotation axis 71 as the center of rotation. However, since there are openings or notches (not shown) in the connection between the lever member 70 and the first horizontal movable plate 30 and the second horizontal movable plate 40, the first horizontal movable plate 30 and the second horizontal movable plate 40 move along a linear trajectory due to these openings or notches.

[0022] The vertically movable plate 80 is connected to the lever member 70 and can move in a vertical direction (second direction) different from the horizontal direction (first direction) due to the positional difference between the first horizontally movable plate 30 and the second horizontally movable plate 40. The vertically movable plate 80 has a gripping portion 81 for gripping the workpiece W. Two grip portions are arranged at the tip of the gripping portion 81, and by operating the grip portions with an electromagnetic solenoid (not shown), the plate can perform actions to grasp the workpiece W and release the grasped workpiece W.

[0023] The positional difference between the two horizontally movable plates (first horizontally movable plate 30 and second horizontally movable plate 40) and the two sliders (first slider 31 and second slider 41) is converted into an angle by the lever member 70, and as a result, horizontal and vertical movement can be created (two linear sliders can be used to generate two-axis motion from the positional difference).

[0024] Figure 2 shows an example of the control of the transfer device 100 according to the embodiment. Figure 2(A) shows the trajectory of the gripping part 81, Figure 2(B) shows a schematic of the first slider 31 and the second slider 41, Figure 2(C) shows an example of the operation of the first slider 31, and Figure 2(D) shows an example of the operation of the second slider 41. Furthermore, in Figure 2(A), "upper left" indicates the position above the first position X1 (see Figure 3), "lower left" indicates the position corresponding to the first position X1, "upper right" indicates the position above the second position X2 (see Figure 4), and "lower right" indicates the position corresponding to the second position X2.

[0025] As shown by the solid line in Figure 2(A), the gripping part 81 can move in a straight line from the upper left to the lower left (1), from the lower left to the upper left (2), from the upper left to the upper right (3), from the upper right to the lower right (4), from the lower right to the upper right (5), and from the upper right to the upper left (6).

[0026] Furthermore, as shown by the dashed line in Figure 2(A), the gripping part 81 can also move along a curved trajectory when moving from the "lower left" through the vicinity of the upper left to the "upper right," or when moving from the "lower right" through the vicinity of the upper right to the "upper left" (7)(8). The gripping part 81 can also be moved along a curved trajectory when moving from "(3)→(4)" and from "(6)→(1)."

[0027] As shown in Figure 2(B), the first slider 31 and the second slider 41 can be moved within a range of at least "-15" to "215" when the origin position is set to "0".

[0028] Figures 2(C) and 2(D) show examples of the operation of the first slider 31 and the second slider 41 when the gripping part 81 is moved along the solid line trajectory in Figure 2(A). As shown in Figures 2(C) and 2(D), the second slider 41 remains stationary while the first slider 31 moves from "-15" to "15" (1). Also, the second slider 41 remains stationary while the first slider 31 moves from "15" to "-15" (2). Subsequently, the first slider 31 moves from "-15" to "185", and the second slider 41 moves from "0" to "200" (3). In this case, the first slider 31 and the second slider 41 can be moved at the same speed.

[0029] While the first slider 31 moves from "185" to "215", the second slider 41 remains stationary (4). Also, while the first slider 31 moves from "215" to "185", the second slider 41 remains stationary (5). After that, the first slider 31 moves from "185" to "-15", and the second slider 41 moves from "200" to "0" (6). In this case, the first slider 31 and the second slider 41 can be moved at the same speed. Note that the speed does not have to be exactly the same (the same applies to other parts).

[0030] As described above, by operating the first slider 31 and the second slider 41 in the manner shown in Figures 2(C) and 2(D), the gripping portion 81 can be moved along the solid line trajectory in Figure 2(A). Note that the numbers in parentheses in Figure 2(D) correspond to the numbers in parentheses in Figure 2(A).

[0031] Furthermore, by operating the second slider 41 while the first slider 31 is operating, the gripping part 81 can be moved along the dashed curved trajectory shown in Figure 2(B). For example, the first slider 31 performs a lifting operation of moving "30" units forward and "30" units back twice (the inverse small V waveform operation in Figure 2(C)), but if the second slider 41 is moved before the lifting operation is completed, the gripping part 81 can be moved along the curved trajectory.

[0032] The timing and speed of movement of the first slider 31 and the second slider 41 can be set arbitrarily. This allows for the creation of not only straight trajectories (for example, going up in a straight line → moving horizontally → going down in a straight line), curved trajectories (for example, going up in a curve → moving horizontally → going down in a curve), and diagonal trajectories (for example, going up diagonally → moving horizontally → going down diagonally), but also trajectories that combine these.

[0033] Figures 3 to 6 show examples of the operation of the transfer device 100 according to the embodiment. Figure 3(A): The first horizontal movable plate 30 (first slider 31) and the second horizontal movable plate 40 (second slider 41) are each positioned in their initial positions. The initial position of the first horizontal movable plate 30 is at position "-15", and the initial position of the second horizontal movable plate 40 is at position "0" (see Figure 2(B)). Due to this difference in initial positions, the right end of the lever member 70 is positioned at an angle to the upper right.

[0034] Figure 3(B): The first horizontally movable plate 30 moves to the right. The second horizontally movable plate 40 is stationary. As a result, the lever member 70 rotates clockwise, and the vertically movable plate 80 moves downward. Figure 3(C): The gripping part 81 grasps the workpiece W.

[0035] Figure 4(D): The first horizontally movable plate 30 moves to the left. The second horizontally movable plate 40 is stationary. As a result, the lever member 70 rotates counterclockwise, and the vertically movable plate 80 moves upward. Since the gripping part 81 is gripping the workpiece W, the workpiece W also moves upward.

[0036] Figure 4(E): The first horizontal movable plate 30 and the second horizontal movable plate 40 move to the right at the same speed (in the same direction and at the same speed). Since both the first horizontal movable plate 30 and the second horizontal movable plate 40 move, the lever member 70 does not rotate. Therefore, the vertical movable plate 80 also moves to the right. Figure 4(F): The first horizontally movable plate 30 and the second horizontally movable plate 40 stop. The stopping position corresponds to the second position X2.

[0037] Figure 5(G): The first horizontally movable plate 30 moves to the right. The second horizontally movable plate 40 is stationary. As a result, the lever member 70 rotates clockwise, and the vertically movable plate 80 moves downward. Since the gripping part 81 is gripping the workpiece W, the workpiece W also moves downward. Figure 5(H): The gripping part 81 releases the workpiece W. Figure 5(I): The first horizontally movable plate 30 moves to the left. The second horizontally movable plate 40 is stationary. As a result, the lever member 70 rotates counterclockwise, and the vertically movable plate 80 moves upward.

[0038] Figure 6(J): The first horizontal movable plate 30 and the second horizontal movable plate 40 move to the left at the same speed (in the same direction and at the same speed). Since both the first horizontal movable plate 30 and the second horizontal movable plate 40 move, the lever member 70 does not rotate. Therefore, the vertical movable plate 80 also moves to the left. Figure 6(K): The first horizontal movable plate 30 and the second horizontal movable plate 40 stop. The stopping position corresponds to the first position X1. This completes the series of operations.

[0039] Figure 6(L) shows a modified operation. The first horizontally movable plate 30 moves to the left. On the other hand, the second horizontally movable plate 40 moves to the right. As an example of this operation, for example, by moving both the first horizontally movable plate 30 and the second horizontally movable plate 40 to the right, and making the movement speed of the first horizontally movable plate 30 slower than the movement speed of the second horizontally movable plate 40, the first horizontally movable plate 30 can be moved to the left relative to the second horizontally movable plate 40 (from the perspective of the second horizontally movable plate 40, it appears as if the first horizontally movable plate 30 is moving to the left). Through this operation, the vertically movable plate 80 (gripping part 81) can be moved along a curved trajectory.

[0040] In this way, by moving the first horizontal movable plate 30 (first moving part) and the second horizontal movable plate 40 (second moving part) without changing the positional difference between them (see Figures 4(E) and 6(J)), the vertical movable plate 80 (movable part) moves in the horizontal direction (first direction).

[0041] Furthermore, by changing the positional difference between the first horizontally movable plate 30 (first moving part) and the second horizontally movable plate 40 (second moving part) (see Figures 3(B), 4(D), 5(G), and 5(I)), the vertically movable plate 80 (movable part) moves in the vertical direction (second direction). Note that the vertically movable plate 80 can also move in the horizontal direction.

[0042] Furthermore, by moving the first horizontally movable plate 30 (first moving part) and changing the positional difference between the first horizontally movable plate 30 (first moving part) and the second horizontally movable plate 40 (second moving part) (see Figure 6(L)), the vertically movable plate 80 (movable part) moves in the horizontal direction (first direction) while moving in the vertical direction (second direction).

[0043] Figure 7 is a perspective view showing the comparative example transfer device 100A. In the comparative example transfer device 100A, a motor 101 is located at the top, and a lower shaft 103 is rotated via a belt (not shown) located inside the right-hand housing 102. Two cams 104 (a cam for vertical movement and a cam for horizontal movement) are located on the lower shaft 103, and the rotation of the cams 104 allows the arm 105 to be moved vertically and horizontally. A gripping part (not shown) is attached to the arm 105.

[0044] The comparative example transfer device 100A generates horizontal and vertical movement using a cam mechanism with two cams 104, resulting in a complex mechanism that increases manufacturing costs. The process of supplying parts such as workpieces is frequently used in production facilities and requires the high-speed and stable transport of parts. While a low cost is advantageous for a transfer device, achieving both high speed and stable transport requires operating along an optimal path with good motion characteristics. One way to achieve this is to use a cam mechanism, as shown in the comparative example transfer device 100A.

[0045] However, the cam mechanism has the disadvantage of being costly due to its complex mechanism and large number of parts. In addition, adjusting the stroke of the cam mechanism is troublesome. This is because while the stroke can be changed by changing the length of arm 105, changing the length of arm 105 also changes the positions of the workpiece removal side and the workpiece placement side, requiring separate readjustment of the positions.

[0046] On the other hand, the transfer device 100 of this embodiment has two parallel linear sliders, a first linear slider 10 and a second linear slider 20, and uses the positional difference between the first horizontally movable plate 30 (first slider 31) and the second horizontally movable plate 40 (second slider 41) to create vertical movement. This reduces the number of parts and makes the device lighter. As a result, a transfer device 100 that can be made at a lower cost can be constructed.

[0047] As described above, this embodiment has the following advantages. (1) According to this embodiment, the vertical movable plate 80 is moved in a vertical direction different from the horizontal direction by the positional difference between the first horizontal movable plate 30 (first slider 31) and the second horizontal movable plate 40 (second slider 41), so a cam mechanism is not required, and it is possible to reduce the number of parts and lower the cost by making it lighter.

[0048] (2) According to this embodiment, by moving the first horizontal movable plate 30 (first slider 31) and the second horizontal movable plate 40 (second slider 41) without changing the position difference between them, the vertical movable plate 80 moves horizontally. Therefore, the vertical movable plate 80 can be moved horizontally by simply controlling the movement of the first horizontal movable plate 30 (first slider 31) and the second horizontal movable plate 40 (second slider 41) without changing the position difference between them.

[0049] (3) According to this embodiment, by changing the position difference between the first horizontal movable plate 30 (first slider 31) and the second horizontal movable plate 40 (second slider 41), the vertical movable plate 80 moves in the vertical direction. Therefore, the vertical movable plate 80 can be moved in the vertical direction by simply controlling the position difference.

[0050] (4) According to this embodiment, by moving the first horizontal movable plate 30 (first slider 31) and changing the position difference between the first horizontal movable plate 30 (first slider 31) and the second horizontal movable plate 40 (second slider 41), the vertical movable plate 80 moves vertically while moving horizontally. Therefore, the vertical movable plate 80 can be moved horizontally and vertically by simply controlling the first horizontal movable plate 30 and changing its position difference.

[0051] (5) According to this embodiment, since a lever member 70 is used for the connection part, the connection part can be constructed with a small number of parts. (6) According to this embodiment, the first horizontally movable plate 30 (first slider 31) and the second horizontally movable plate 40 (second slider 41) are arranged vertically, and the number of linear sliders and the number of movable parts are the same, so the device does not become complicated.

[0052] (7) According to this embodiment, since two linear sliders are installed in parallel and horizontal and vertical movement is created by the positional difference of the two axes of the linear sliders, a transfer device 100 that can be adjusted quickly and inexpensively can be provided. Furthermore, by using linear sliders and motors, the path can be freely set within a predetermined range, and fine adjustment of the stroke can be easily made (adjustment time is reduced). In addition, by synchronously controlling the motors, it is possible to create movement with good motion characteristics equivalent to that of a cam mechanism (it is also possible to move along a cam curve trajectory). Moreover, since the motor itself does not move, a lightweight and high-speed mechanism can be realized.

[0053] [Transformed form] The present invention can be implemented in various ways without being limited to the embodiments described above. (1) The movable parts may be arranged in parallel vertically, horizontally, or diagonally. (2) The number of movable parts may be three or more. (3) The connection part was described using the example of a lever member (a mechanism using one member), but it may also be a mechanism using links (a mechanism using multiple members). Furthermore, the shape of the lever member is not limited to an L shape, and can be changed as any rotatable member.

[0054] (4) The operation of the multiple moving parts is not limited to those described above, and they can be operated independently or in sync. (5) When moving the movable part in the second direction while moving it in the first direction, the position difference between the first movable part and the second movable part may be changed while only the first movable part is moved, the position difference between the first movable part and the second movable part may be changed while only the second movable part is moved, or the position difference between the first movable part and the second movable part may be changed while both the first movable part and the second movable part are moved.

[0055] Figure 8 shows a transfer device for a modified example. In the modified example, the vertically movable plate and the slider are shown as the same component, but in reality, the vertically movable plate is positioned in front of the slider (towards the viewer in the diagram). Note that parts similar to those in the above-described embodiment are denoted by the same reference numerals, and their descriptions are omitted as appropriate.

[0056] As shown in Figure 8(A), the first modified transfer device 100-1 has a sharper angle for the lever member 70-1. Specifically, the lever member 70 in the embodiment was bent at an angle of about 90 degrees, but the lever member 70-1 in the first modified example is bent at an angle of about 45 degrees. As a result, the first modified transfer device 100-1 can move the vertically movable plate 80 in an oblique direction (a second direction different from the first direction).

[0057] As shown in Figure 8(B), the second modified transfer device 100-2 has three linear sliders 10-1, 10-2, and 10-3, and three motors 50-1, 50-2, and 50-3. There are four horizontally movable plates 90, 92, 94, and 96, and four sliders 91, 93, 95, and 97.

[0058] The lever member 70-1 on the left connects the horizontally movable plate 90 (slider 91), the horizontally movable plate 92 (slider 93), and the vertically movable plate 80-1. On the other hand, the lever member 70-2 on the right connects the horizontally movable plate 94 (slider 95), the horizontally movable plate 96 (slider 97), and the vertically movable plate 80-2. As a result, the transfer device 100-2 of the second modified example can move the two vertically movable plates 80-1 and 80-2 in both the horizontal and vertical directions.

[0059] As shown in Figure 8(C), the transfer device 100-3 of the third modified example has one linear slider 10-4. The linear slider 10-4 is a device (two-head slider, multi-slider) having two horizontally movable plates 110, 112 (two sliders 111, 113). The two horizontally movable plates 110, 112 (two sliders 111, 113) can be moved independently by an independent moving mechanism (rails, motors, etc.).

[0060] The third modified transfer device 100-3 includes a linear slider 10-4 that drives two horizontally movable plates 110 and 112 (movable parts). The two horizontally movable plates 110 and 112 are arranged in pairs in the horizontal direction (first direction). The linear slider 10-4 is arranged as one unit regardless of the number of horizontally movable plates 110 and 112. A connecting member 114 is connected to the lower end of the lever member 70-3. The connecting member 114 connects the lever member 70-3 to the slide member 115, which moves together with the horizontally movable plate 112.

[0061] When the horizontally movable plate 110 (slider 111) and the horizontally movable plate 112 (slider 113) move in the same direction and at the same speed, the vertically movable plate 80-3 moves horizontally. Furthermore, when only the horizontally movable plate 112 (slider 113) moves to the right, the lever member 70-3 is pulled by the connecting member 114, causing the lever member 70-3 to rotate counterclockwise, and the vertically movable plate 80-3 moves downward.

[0062] Furthermore, when only the horizontally movable plate 112 (slider 113) moves to the left, the connecting member 114 pushes in the lever member 70-3, causing the lever member 70-3 to rotate clockwise, and the vertically movable plate 80-3 moves upward. Thus, the transfer device 100-3 of the third modified example can move the vertically movable plate 80 in both the horizontal and vertical directions using only one linear slider 10-4.

[0063] According to the third modified transfer device 100-3, the horizontally movable plate 110 (slider 111) and the horizontally movable plate 112 (slider 113) are arranged horizontally, and there is only one linear slider 10-4, so the transfer device can be made even smaller. [Explanation of symbols]

[0064] 10. First linear slider 20 Second linear slider 30. First horizontally movable plate 31. First slider 40. Second horizontally movable plate 41. Second slider 50 First motor 60 Second motor 70 Lever member 71 Rotation axis 80 Vertically movable plate 81 Gripping part 100, 100-1, 100-2, 100-3, 100-4 Transfer equipment Double job X1 1st position X2 2nd position

Claims

1. A transfer device for transferring a workpiece from a first position to a second position, It is movable in a first direction and comprises multiple movable parts arranged in parallel, A connecting part connected to the plurality of movable parts, A movable part connected to the connecting part, which is movable in a second direction different from the first direction due to the positional difference of the plurality of movable parts, and which has a gripping part for gripping the workpiece, A transfer device equipped with the following features.

2. In the transfer device according to claim 1, The plurality of movable parts comprises a first movable part and a second movable part, A transfer device characterized in that the movable part moves in the first direction by moving the first movable part and the second movable part without changing the positional difference between the first movable part and the second movable part.

3. In the transfer device according to claim 1, The plurality of movable parts comprises a first movable part and a second movable part, A transfer device characterized in that the movable part moves in the second direction by changing the positional difference between the first movable part and the second movable part.

4. In the transfer device according to claim 1, The plurality of movable parts comprises a first movable part and a second movable part, A transfer device characterized in that, by moving at least one of the first moving part and the second moving part, the positional difference between the first moving part and the second moving part is changed, thereby the movable part moves in the first direction while moving in the second direction.

5. In the transfer device according to claim 1, The transfer device is characterized in that the connecting portion is a lever member that can rotate due to the positional difference of the plurality of movable portions.

6. In the transfer device according to claim 1, The moving part is equipped with a linear slider that drives the moving part, Multiple movable parts are arranged in the second direction, The transfer device is characterized in that the linear sliders are arranged in multiple quantities in the second direction, equal to the number of movable parts.

7. In the transfer device according to claim 1, The moving part is equipped with a linear slider that drives the moving part, Multiple movable parts are arranged in the first direction, The transfer device is characterized in that one linear slider is provided regardless of the number of moving parts.