Gas container transport system

Abstract

To transport gas containers that store hazardous gases safely and at low cost. [Solution] The gas container transport system comprises an inert gas container for storing inert gas, a sealing member that covers and seals at least the top of the gas container for storing hazardous gas, a valve that discharges hazardous gas from inside the sealing member when the pressure inside the sealing member exceeds a predetermined pressure, and a vacuum generator that generates a suction force to draw in the hazardous gas discharged by the valve and mixes the drawn-in hazardous gas with the inert gas supplied from the inert gas container.

Description

Technical Field

[0001] The present invention relates to a gas container transportation system.

Background Art

[0002] Generally, toxic gases such as silane, arsine, or phosphine used in semiconductor manufacturing, flammable gases such as hydrogen that react with oxygen in the air and cause a combustion reaction, and explosive decomposition gases such as germane that cause an explosive decomposition reaction even without a supporting combustion gas such as oxygen are dangerous gases that can have a great impact on the human body and the environment if leaked. When using these gases, they are used in a state stored in a gas container such as a gas cylinder with ensured airtightness. Also, when gas leaks from the gas container, if the gas cannot be enclosed in the gas container by the container valve, in order to prevent a serious accident, a disaster prevention cap or the like is attached to the outside of the container to prevent leakage to the outside of the container.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] Incidentally, gas cylinders that have leaked gas need to be promptly transported to a disposal plant or similar facility for safe disposal. While attaching a safety cap to the gas cylinder during transport can stop leaks, some gas cylinders may not be sufficiently protected from leaks even with a safety cap due to leaks from the neck ring of the gas cylinder or leaks from the contact surface between the gas cylinder and the safety cap. In such cases, in addition to the safety cap, a method of covering the entire gas cylinder with another container (double container) is used.

[0005] However, transporting leaking gas containers requires large-scale mobile equipment, which poses a significant cost problem. Specifically, when transporting leaking gas containers, they are transported by trucks or other transport vehicles equipped with large-scale mobile decontamination equipment, such as powerful exhaust pumps to suck up the leaked gas. This increases power consumption during transport and thus the overall cost of transportation. Furthermore, double-walled containers are large in size, making them difficult to handle.

[0006] This disclosure has been made in view of the above, and aims to provide a gas container transport system that can transport gas containers storing hazardous gases safely and at low cost. [Means for solving the problem]

[0007] According to one aspect of the present disclosure, a gas container transport system includes an inert gas container for storing an inert gas, a sealing member that covers and seals at least the top of a gas container for storing a hazardous gas, and a vacuum generator that generates a suction force to draw in the hazardous gas from inside the sealing member and mixes the drawn-in hazardous gas with the inert gas supplied from the inert gas container. [Effects of the Invention]

[0008] According to this disclosure, gas containers for storing hazardous gases can be transported safely and at low cost. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 shows the configuration of a gas container transport system according to one embodiment. [Figure 2] Figure 2 shows an example of the configuration of an instrumentation system. [Figure 3] Figure 3 shows another example of the configuration of the instrumentation system. [Figure 4] Figure 4 shows a modified example of a gas container transport system. [Figure 5] Figure 5 shows another variation of the gas container transport system. [Modes for carrying out the invention]

[0010] An embodiment of the present invention will be described below with reference to the attached drawings. The embodiment described below is illustrative and should not be interpreted as limiting.

[0011] Figure 1 shows the configuration of a gas container transport system 100 according to one embodiment. The gas container transport system 100 shown in Figure 1 is constructed when transporting a gas container 110 that stores hazardous gases. In Figure 1, the direction of gas flow is indicated by arrows.

[0012] The gas container 110 is a container for storing hazardous gases and is a gas container to be transported by the gas container transport system 100. The hazardous gas stored in the gas container 110 may be a toxic gas such as silane, arsine, or phosphine, or a flammable gas such as hydrogen. Furthermore, hazardous gas may leak from the gas container 110.

[0013] The disaster prevention cap 115 is airtightly attached to the top of the gas container 110, including the container valve, and has the function of preventing the leakage of harmful gas from the gas container 110. However, the disaster prevention cap 115 does not need to function perfectly, and it does not necessarily need to be attached to the gas container 110. Also, even if the disaster prevention cap 115 is functioning perfectly, harmful gas may leak from between the disaster prevention cap 115 and the gas container 110.

[0014] Since leakage of harmful gases from the gas container 110 often occurs at the crimped neck ring portion around the container valve, a plate covering the area around the container valve may be bonded to the gas container 110, although this is not shown in the illustration.

[0015] The sealing cover 120 is airtightly fitted to the body of the gas container 110 so as to cover and seal the container valve and fire-fighting cap 115 of the gas container 110. An O-ring may be interposed in the fitting portion of the sealing cover 120 that is fitted to the body of the gas container 110 to ensure airtightness. The sealing cover 120 has one or more exhaust ports, to which a valve or pressure gauge is connected. In the example shown in Figure 1, the sealing cover 120 has two exhaust ports, with a pressure gauge 194 connected to one exhaust port and a valve 182 connected to the other exhaust port. The valve 182 may be an air-operated valve that is operated by an inert gas, or it may be another automatic valve or manual valve. In addition, a valve 183 that functions as a relief valve or pressure relief valve is connected to the piping that branches off from between the exhaust port and the valve 182.

[0016] The sealing cover 120 is formed using resins such as, for example, vinyl alcohol polymers, polyvinylidene fluoride (PVDF), polyvinyl fluoride (PVF), ethylene-vinyl alcohol copolymer resins (EVOH), fluororesins, polyethylene, and polyester, or metals such as aluminum. The sealing cover 120 may have a structure in which these resins or metals are laminated, or may have a structure in which a metal such as aluminum is vapor-deposited on the surface. Further, the sealing cover 120 may be formed using corrosion-resistant metals such as, for example, SUS (Steel Use Stainless) 304 and SUS316.

[0017] The gas container 130 is a container for storing an inert gas and supplies the inert gas used for diluting harmful gases and driving various valves. The inert gas stored in the gas container 130 may be, for example, a gas with low reactivity such as nitrogen, or a noble gas such as helium, neon, and argon. Further, the inert gas may be air.

[0018] When an inert gas is continuously supplied to the vacuum generator 140 from a pipe for valve driving (not shown), the pipe on the valve 182 side is evacuated to suck the harmful gas flowing from the sealing cover 120 to the valve 182. Then, the vacuum generator 140 mixes the sucked harmful gas with the inert gas sucked from the valve 181, dilutes the harmful gas, and exhausts it to the detoxification device 150.

[0019] Since the vacuum generator 140 sucks the harmful gas by evacuation, a pump or the like for sucking the harmful gas is unnecessary, and the gas container transport system 100 can be realized at low cost with reduced power consumption.

[0020] The decontamination device 150 decontaminates the diluted harmful gas flowing in from the vacuum generator 140. Specifically, the decontamination device 150 has a decontamination agent corresponding to the harmful gas, and detoxifies the diluted toxic gas flowing in from the vacuum generator 140 with the decontamination agent. Then, the decontamination device 150 discharges the detoxified gas to the outside from the valve 163.

[0021] Valves 161, 162, and 163 are valves that can be opened and closed electrically or manually. Valve 161 adjusts the presence or absence of the inflow of the inert gas from the gas container 130 to a valve driving pipe (not shown). Valve 162 adjusts the presence or absence of the inflow of the inert gas from the gas container 130 to the vacuum generator 140. Valve 163 adjusts the presence or absence of the discharge of the gas from the decontamination device 150 to the outside.

[0022] The pressure reducing valves 171 and 172 are valves that adjust the pressure of the gas on the primary side and keep the pressure of the gas on the secondary side constant. The pressure reducing valve 171 reduces the pressure of the inert gas flowing in from the gas container 130 and keeps the pressure of the inert gas flowing toward the branch point where it branches to the valve driving pipe constant. The pressure reducing valve 172 reduces the pressure of the inert gas that branches and flows in at the branch point to the valve driving pipe (not shown) and keeps the pressure of the inert gas flowing toward the vacuum generator 140 constant.

[0023] Valves 181, 182, and 183 are valves whose opening degrees are controlled to control the flow rate of the gas flowing through the pipe. Valve 181 adjusts the flow rate of the inert gas flowing into the vacuum generator 140. Valve 182 adjusts the flow rate of the harmful gas flowing from the sealing cover 120 to the vacuum generator 140. Specifically, valve 182 adjusts the opening degree so that the pressure inside the sealing cover 120 is maintained within a predetermined pressure range, and adjusts the flow rate of the harmful gas flowing from inside the sealing cover 120 to the vacuum generator 140. Valve 183 is provided in the bypass path from the sealing cover 120 to the exhaust side of the vacuum generator 140 and functions as a relief valve or a pressure relief valve. For this reason, valve 183 is usually in a fully closed state.

[0024] Valves 181, 182, and 183 are positioned around the sealed cover 120. If these valves 181, 182, and 183 are air-operated valves, it is possible to eliminate the need for electrically operated valves around the sealed cover 120 from which harmful gases are leaking, thus ensuring safety even if the harmful gases are flammable.

[0025] Pressure gauges 191, 192, 193, and 194 measure the pressure of the gas inside the piping or the sealed cover 120. Pressure gauge 191 measures the pressure of the inert gas discharged from the gas container 130 and flowing into the pressure reducing valve 171. In other words, pressure gauge 191 measures the pressure on the primary side of the pressure reducing valve 171. Pressure gauge 192 measures the pressure of the inert gas flowing from the pressure reducing valve 171 toward the branching point. In other words, pressure gauge 192 measures the pressure on the secondary side of the pressure reducing valve 171. Pressure gauge 193 measures the pressure of the inert gas flowing from the pressure reducing valve 172 toward the vacuum generator 140. In other words, pressure gauge 193 measures the pressure on the secondary side of the pressure reducing valve 172. Pressure gauge 194 measures the pressure inside the sealed cover 120. In other words, pressure gauge 194 measures the pressure of the harmful gas leaking from the gas container 110 into the sealed cover 120.

[0026] It should be noted that the valves 161, 162, 163 and valves 181, 182, 183 mentioned above do not necessarily need to be all provided, and some can be omitted. For example, valve 163, which controls whether or not gas is released to the outside from the abatement device 150, may be omitted. Also, valve 162, which opens and closes the flow path of the inert gas, may be omitted by replacing valve 181 with an automatic valve with a needle function. Furthermore, valve 181, which controls the flow rate of the inert gas, may be omitted by installing an orifice to adjust the flow rate. In addition, valve 182, which controls the flow rate of harmful gas from the sealed cover 120, may be omitted by adjusting the suction force of the vacuum generator 140.

[0027] The vacuum generator 140, various valves, and pressure gauges 191-194 are connected to an instrumentation device (not shown in Figure 1) and operate in response to control signals from the instrumentation device. The instrumentation device has a configuration in which the control unit and battery are housed in a casing, and for example, it can open and close valves 161-163 by transmitting control signals, or control the opening degree of valves 181-183 by adjusting the flow rate of inert gas in the valve drive piping.

[0028] Figure 2 shows an example of the configuration of an instrumentation device 210 installed in a gas container transport system 100. In Figure 2, the same reference numerals are used for the same parts as in Figure 1.

[0029] As shown in Figure 2, the housing of the instrumentation device 210 is connected to the secondary side of the valve 161 via a needle valve 201. A back pressure regulator 202 is connected to the exhaust port of the housing of the instrumentation device 210. The needle valve 201 constantly introduces an inert gas into the housing of the instrumentation device 210 at a low flow rate, and the back pressure regulator 202 discharges the introduced inert gas from the housing to maintain a constant pressure inside the housing of the instrumentation device 210. In this way, by introducing an inert gas into the housing of the instrumentation device 210 and maintaining a constant pressure, safety can be ensured by preventing, for example, flammable harmful gases from flowing into the housing of the instrumentation device 210.

[0030] The instrumentation device 210 is configured with a battery 211, a control unit 212, and an electromagnetic valve 213 housed within a casing. The battery 211 supplies power to the control unit 212 and the electromagnetic valve 213, as well as to other power-driven valves 161, 162, 163, etc. It is also possible to attach, for example, a solar panel to the casing of the instrumentation device 210 and charge the battery 211 with solar energy.

[0031] The control unit 212 acquires pressure information measured by, for example, pressure gauges 191 and 194, and determines the opening degree of, for example, valves 181 and 182 based on each pressure. The control unit 212 then adjusts the opening degree of the solenoid valve 213 and controls the pressure of the inert gas for valve driving that is supplied to valves 181 and 182 to adjust the opening degree of valves 181 and 182. For example, when the pressure measured by pressure gauge 194 is above a predetermined threshold, the control unit 212 opens valve 182 so that harmful gas inside the sealed cover 120 is drawn into the vacuum generator 140. Also, when the pressure measured by pressure gauge 194 is above a predetermined threshold, the control unit 212 opens valve 181 so that inert gas for diluting the harmful gas flows into the vacuum generator 140.

[0032] Note that the control performed by the control unit 212 is just one example, and the control unit 212 also performs various controls on other valves and pressure gauges 191-194.

[0033] The solenoid valve 213 delivers inert gas supplied from the gas container 130 to the valve drive piping, thereby driving the air-operated valve. In other words, the solenoid valve 213 delivers the inert gas, which is constantly supplied from the gas container 130, to air-operated valves such as valves 181 and 182, according to the control of the control unit 212.

[0034] In the instrumentation device 210 shown in Figure 2, a back pressure regulator 202 connected to the exhaust port of the housing discharges inert gas to maintain a constant pressure inside the housing of the instrumentation device 210. However, it is also possible to maintain a constant pressure by controlling the flow rate of inert gas introduced into the housing of the instrumentation device 210. Figure 3 shows another example of the configuration of the instrumentation device 210 provided in the gas container transport system 100. In Figure 3, the same reference numerals are used for the same parts as in Figures 1 and 2.

[0035] In the gas container transport system 100 shown in Figure 3, an automatic valve 203 is provided in place of the valve 161. Specifically, the automatic valve 203 and the needle valve 201 are provided in the flow path of the inert gas supplied into the housing of the instrumentation device 210. Furthermore, a pressure gauge 214 for measuring the pressure inside the housing of the instrumentation device 210 is attached to the housing of the instrumentation device 210 shown in Figure 3. The automatic valve 203 automatically opens when the pressure inside the housing of the instrumentation device 210, as measured by the pressure gauge 214, falls below a predetermined threshold, and introduces inert gas into the housing of the instrumentation device 210. As a result, even if the amount of inert gas inside the housing of the instrumentation device 210 decreases, the inert gas is automatically replenished, and the pressure inside the housing of the instrumentation device 210 is kept constant.

[0036] As described above, the gas container transport system 100 is constructed by attaching a sealing cover 120 to a gas container 110 for hazardous gases, and connecting the sealing cover 120, an inert gas container 130, a vacuum generator 140, a decontamination device 150, an instrumentation device 210, and various valves and pressure gauges by piping. These components and piping connections can be disassembled and assembled, and when there is no gas container 110 to be transported, the components and piping of the gas container transport system 100 can be stored in a small space.

[0037] Next, the operation of the gas container transport system 100 when a gas container 110 containing hazardous gas is being transported will be described. In the following, the operation of the gas container transport system 100 when hazardous gas is leaking from the gas container 110 will be described. Furthermore, in the following, it will be assumed that valves 181 to 183 are air-operated valves and are driven by inert gas supplied from the solenoid valve 213 of the instrumentation device 210.

[0038] When transporting the gas container 110, for example, the various parts and piping are connected to construct the gas container transport system 100. Then, a sealing cover 120 is fitted to the gas container 110, and the supply of inert gas from the inert gas container 130 to the housing of the instrumentation device 210 and the solenoid valve 213 begins.

[0039] If harmful gas is leaking from the gas container 110, a safety cap 115 is attached to the gas container 110 to prevent leakage. However, there are certain limitations to leakage prevention by the safety cap 115, and harmful gas may leak to the outside of the gas container 110 and safety cap 115. For this reason, a sealing cover 120 is attached to cover the gas container 110, including the safety cap 115. As a result, any harmful gas that leaks to the outside of the gas container 110 and safety cap 115 will remain inside the sealing cover 120. Since the sealing cover 120 is airtightly attached to the body of the gas container 110, the possibility of harmful gas leaking to the outside of the sealing cover 120 is very small.

[0040] In this way, the gas container transport system 100 is constructed, and the gas container 110 is transported with the sealing cover 120 attached to it. Since the gas container transport system 100 is not equipped with a pump or the like to suck up any harmful gas leaking from the gas container 110, the gas container transport system 100 is relatively small and consumes little power. Therefore, the gas container 110 storing harmful gas can be transported at a low cost.

[0041] The pressure inside the sealed cover 120 is measured by a pressure gauge 194. The pressure measured by the pressure gauge 194 is monitored to see if it is within a predetermined pressure range. If the pressure exceeds the predetermined pressure range, the control unit 212 controls the electromagnetic valve 213, causing an inert gas to drive the valve 182 and increasing the opening of the valve 182. Specifically, the opening of the valve 182 is controlled within a range where the flow rate is between 1 mL / min and 50 L / min, preferably within a range where the flow rate is between 100 mL / min and 5 L / min.

[0042] Furthermore, the vacuum generator 140 evacuates the piping on the valve 182 side, drawing harmful gases out of the sealed cover 120 to reduce the pressure inside the sealed cover 120. This adjusts the pressure inside the sealed cover 120 to fall within a predetermined pressure range. Specifically, the pressure inside the sealed cover 120 is adjusted to fall within a range of, for example, 1 Pa to 0.99 MPa.

[0043] The vacuum generator 140 is supplied with an inert gas, the flow rate of which is regulated by a valve 181. Therefore, the harmful gas drawn in by the vacuum generator 140 from inside the sealed cover 120 is mixed with the inert gas and diluted. In other words, the harmful gas is diluted with the inert gas so that its concentration is below a predetermined concentration. The predetermined concentration is, for example, in the range of 10 ppm to 50%, and more preferably in the range of 100 ppm to 10%.

[0044] The diluted hazardous gas flows into the abatement device 150. The abatement device 150 then neutralizes the hazardous gas. Specifically, a toxicizing agent corresponding to the type of hazardous gas in the gas container 110 is contained inside the abatement device 150. When the diluted hazardous gas is introduced into the abatement device 150, the hazardous gas is neutralized, for example, through a neutralization reaction with the toxicizing agent. The neutralized gas is then released to the outside when the valve 163 opens.

[0045] As described above, according to this embodiment, a sealing cover is attached to the leak point of the gas container. When the pressure inside the sealing cover rises above a predetermined pressure range, the suction force of the vacuum generator draws out the harmful gas inside the sealing cover and mixes it with an inert gas to dilute it. The diluted harmful gas is then introduced into a detoxification device, rendered harmless, and released to the outside. Therefore, when transporting a gas container leaking harmful gas, a pump or other device for sucking out the harmful gas is not required, and the gas container can be safely transported using a relatively small-scale and low-power gas container transport system. In other words, gas containers storing harmful gases can be transported safely and at low cost.

[0046] In the above embodiment, when the pressure inside the sealed cover 120, as measured by the pressure gauge 194, exceeds a predetermined pressure range, the opening of the valve 182 increases, so that the pressure inside the sealed cover 120 is maintained within the predetermined pressure range. However, the structure for maintaining the pressure inside the sealed cover 120 within the predetermined pressure range is not limited to the above. For example, instead of the pressure gauge 194 and the valve 182, a relief valve may be connected to the exhaust port of the sealed cover 120. With such a structure, when the pressure inside the sealed cover 120 exceeds a predetermined pressure, the relief valve opens, and the pressure inside the sealed cover 120 is released. In this case, instead of a relief valve, a back pressure regulator may be used, for example.

[0047] Furthermore, if a relief valve or back pressure regulator is connected to the exhaust port of the sealed cover 120, the vacuum generator 140 can be omitted. The relief valve or back pressure regulator opens when the pressure inside the sealed cover 120 exceeds a predetermined pressure, so even without suction from the vacuum generator 140, the harmful gas is ejected by the pressure inside the sealed cover 120 and reaches the confluence point with the piping through which the inert gas flows. At this confluence point, the harmful gas is mixed with the inert gas and diluted.

[0048] Furthermore, if the vacuum generator 140 is omitted, an inert gas may be continuously supplied to the inside of the sealed cover 120 to dilute the harmful gas inside the sealed cover 120. In this case, the harmful gas diluted inside the sealed cover 120 is discharged from the exhaust port of the sealed cover 120.

[0049] [Variations of gas container transport systems] In the above embodiment, the gas container transport system 100 is equipped with a detoxification device 150 in case the harmful gas stored in the gas container 110 is a toxic gas. However, if the harmful gas stored in the gas container 110 is a non-toxic harmful gas such as hydrogen, the gas container transport system 100 does not necessarily need to be equipped with a detoxification device 150.

[0050] Figure 4 shows a modified example of the gas container transport system 100 according to one embodiment. In Figure 4, the same reference numerals are used for the same parts as in Figure 1.

[0051] The gas container transport system 100 shown in Figure 4 has a valve 164 in place of the abatement device 150 and valve 163 of the gas container transport system 100 shown in Figure 1.

[0052] Valve 164 is a valve that can be opened and closed electrically or manually, and when the hazardous gas drawn in by the vacuum generator 140 is diluted with an inert gas, it releases the diluted hazardous gas to the outside. That is, a non-toxic hazardous gas, such as hydrogen, is drawn in from inside the sealed cover 120, and once sufficiently diluted with an inert gas, it is released to the outside through valve 164. In this way, when transporting a gas container 110 that stores a non-toxic hazardous gas, a gas container transport system 100 is constructed that does not include a detoxification device 150. Therefore, the gas container transport system 100 can be made even smaller and consume less power.

[0053] Furthermore, in the above embodiment, a sealing cover 120 is attached to the body of the gas container 110, but instead of the sealing cover 120, a sealing case that houses the entire gas container 110 may be used.

[0054] Figure 5 shows another modified example of the gas container transport system 100 according to one embodiment. In Figure 5, the same reference numerals are used for the same parts as in Figure 1.

[0055] The gas container transport system 100 shown in Figure 5 has a sealed case 310 instead of the sealed cover 120 of the gas container transport system 100 shown in Figure 1.

[0056] The sealed case 310 houses the entire gas container 110 inside, ensuring airtightness. If a safety cap 115 is attached to the gas container 110, the sealed case 310 houses both the gas container 110 and the safety cap 115 inside. The sealed case 310 has one or more exhaust ports, to which a valve or pressure gauge is connected. In the example shown in Figure 5, the sealed case 310 has two exhaust ports, with a pressure gauge 194 connected to one exhaust port and a valve 182 connected to the other exhaust port.

[0057] In this way, instead of attaching a sealing cover 120 to the gas container 110, the gas container 110 is placed in a sealing case 310 and the entire thing is sealed, which makes it possible to more reliably prevent harmful gases from leaking to the outside.

[0058] Furthermore, even when the entire gas container 110 is housed in the sealed case 310, a relief valve or back pressure regulator may be connected to the exhaust port of the sealed case 310 instead of the pressure gauge 194 and valve 182. With this structure, when the pressure inside the sealed case 310 exceeds a predetermined pressure, the relief valve or back pressure regulator opens, and the pressure inside the sealed case 310 is released.

[0059] Furthermore, if a relief valve or back pressure regulator is connected to the exhaust port of the sealed case 310, it is possible to omit the vacuum generator 140. The relief valve or back pressure regulator opens when the pressure inside the sealed case 310 exceeds a predetermined pressure, so even without suction from the vacuum generator 140, the pressure inside the sealed case 310 causes the harmful gas to be ejected and reach the confluence point with the piping through which the inert gas flows. At this confluence point, the harmful gas is mixed with the inert gas and diluted.

[0060] The following is further disclosed regarding the embodiments described above. [1] An inert gas container for storing inert gas, A sealing member that covers and seals at least the top of a gas container for storing harmful gases, A vacuum generator that generates a suction force to draw harmful gas from inside the sealing member and mixes the drawn harmful gas with the inert gas supplied from the inert gas container, A gas container transport system having

[0061] [2] A valve that discharges harmful gas from inside the sealing member when the pressure inside the sealing member exceeds a predetermined pressure. The gas container transport system described above [1] further having the following:

[0062] [3] A toxicization device for toxicizing harmful gases mixed with inert gas by the vacuum generator. The gas container transport system according to [1] or [2] above, further comprising:

[0063] [4] The sealing member is Includes a sealed cover that covers the top of the gas container and is attached to the body of the gas container, and has at least one exhaust port. A gas container transport system as described in any one of the above [1] to [3].

[0064] [5] The sealing member is Includes a sealed case that houses the entire gas container and has at least one exhaust port. A gas container transport system as described in any one of the above [1] to [3].

[0065] [6] The instrumentation further comprises the valve and the vacuum generator, The aforementioned instrumentation device is The system obtains information on the internal pressure of the sealing member, measured by a pressure gauge connected to the sealing member, and if the internal pressure of the sealing member exceeds a predetermined threshold, it opens the valve to discharge harmful gases from inside the sealing member. A gas container transport system as described in any one of the above [1] to [5].

[0066] [7] The valve is This is an air-operated valve driven by inert gas supplied from the aforementioned inert gas container. A gas container transport system as described in any one of the above [1] to [6].

[0067] [8] The valve is This is a relief valve that opens when the pressure inside the sealing member exceeds a predetermined pressure. A gas container transport system as described in any one of the above [1] to [5].

[0068] [9] An instrumentation device having a control unit for controlling the opening and closing of the valve, a battery for supplying power to the control unit, and a housing for housing the control unit and the battery, An introduction valve for introducing inert gas supplied from the inert gas container into the housing, A gas container transport system according to any one of the above [1] to [5], further comprising:

[0069]

[10] The instrumentation device is The system further includes an electromagnetic valve that drives the valve by supplying an inert gas introduced into the housing, The control unit, The opening and closing of the electromagnetic valve is controlled based on the pressure inside the sealing member, which is measured by a pressure gauge connected to the sealing member. The gas container transport system described above [9]. [Explanation of Symbols]

[0070] 110, 130 gas containers 115 Disaster Prevention Cap 120 Sealing Cover 140 Vacuum Generator 150 Abatement equipment 161, 162, 163, 164, 181, 182, 183 valves 171, 172 Pressure Reducing Valve 191, 192, 193, 194 Pressure gauges 210 Instrumentation Equipment 211 Battery 212 Control Unit 213 Solenoid valve 310 sealed cases

Claims

1. An inert gas container for storing inert gas, A sealing member that covers and seals at least the top of a gas container for storing harmful gases, A vacuum generator that generates a suction force to draw harmful gas from inside the sealing member and mixes the drawn harmful gas with the inert gas supplied from the inert gas container, A gas container transport system having

2. A valve that discharges harmful gas from inside the sealing member when the pressure inside the sealing member exceeds a predetermined pressure, The gas container transport system according to claim 1, further comprising:

3. A purifying device that removes harmful gases mixed with inert gas by the aforementioned vacuum generator. The gas container transport system according to claim 1, further comprising:

4. The sealing member is Includes a sealed cover that covers the top of the gas container and is attached to the body of the gas container, and has at least one exhaust port. The gas container transport system according to claim 1.

5. The sealing member is Includes a sealed case that houses the entire gas container and has at least one exhaust port. The gas container transport system according to claim 1.

6. The system further includes an instrumentation device that controls the valve and the vacuum generator, The aforementioned instrumentation device is The system obtains information on the internal pressure of the sealing member, measured by a pressure gauge connected to the sealing member, and if the internal pressure of the sealing member exceeds a predetermined threshold, it opens the valve to discharge harmful gases from inside the sealing member. The gas container transport system according to claim 2.

7. The aforementioned valve is This is an air-operated valve driven by inert gas supplied from the aforementioned inert gas container. The gas container transport system according to claim 2.

8. The aforementioned valve is This is a relief valve that opens when the pressure inside the sealing member exceeds a predetermined pressure. The gas container transport system according to claim 2.

9. An instrumentation device comprising: a control unit for controlling the opening and closing of the valve; a battery for supplying power to the control unit; and a housing for housing the control unit and the battery. An introduction valve for introducing inert gas supplied from the inert gas container into the housing, The gas container transport system according to claim 2, further comprising:

10. The aforementioned instrumentation device is The system further includes an electromagnetic valve that drives the valve by discharging inert gas supplied from the inert gas container, The control unit, The opening and closing of the electromagnetic valve is controlled based on the pressure inside the sealing member, which is measured by a pressure gauge connected to the sealing member. The gas container transport system according to claim 9.

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