Resist composition and method for producing resist patterns, and carboxylate salts

Abstract

An object is to provide a resist composition or the like that can produce a resist pattern having good CD uniformity (CDU). 【Solution means】A resist composition containing a carboxylate represented by formula (I). TIFF2026110561000183.tif18112[In formula (I), L 10 represents a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom. L 2 represents a single bond or a hydrocarbon group having 1 to 40 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -SO2- or -NR 7 -. R 7 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. W 1 represents a cyclic hydrocarbon group having 3 to 36 carbon atoms having an iodine atom, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -SO2- or -NR 7 -, and the cyclic hydrocarbon group may have a substituent other than an iodine atom. Z + represents an organic cation.]

Description

[Technical Field]

[0001] This invention relates to a resist composition, a method for producing a resist pattern, and a carboxylate salt. [Background technology]

[0002] Patent Document 1 describes a resist composition containing a carboxylate salt represented by the following formula. Patent document 2 (TIFF2026110561000001.tif2657) describes a resist composition containing a carboxylate salt comprising a carboxylate anion represented by the following formula. Patent document 3 (TIFF2026110561000002.tif1834) describes a resist composition containing a carboxylate represented by the following formula. TIFF2026110561000003.tif2651 [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2021-026238 [Patent Document 2] Japanese Patent Publication No. 2022-141598 [Patent Document 3] Japanese Patent Publication No. 2021-091645 [Overview of the project] [Problems that the invention aims to solve]

[0004] The objective is to provide a resist composition that forms a resist pattern with better CD uniformity (CDU) than a resist pattern formed from a resist composition containing the above-mentioned carboxylate salt. [Means for solving the problem]

[0005] This invention includes the following inventions. A resist composition containing a carboxylate represented by formula (I). TIFF2026110561000004.tif1894[In formula (I), L 10 represents a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom. L 2 represents a single bond or a hydrocarbon group having 1 to 40 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -SO2- or -NR 7 -. R 7 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. W 1 represents a cyclic hydrocarbon group having 3 to 36 carbon atoms having an iodine atom, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -SO2- or -NR 7 -, and the cyclic hydrocarbon group may have a substituent other than an iodine atom. Z + represents an organic cation.] [2] The resist composition according to [1], wherein W 1 is an alicyclic hydrocarbon group having 3 to 12 carbon atoms having an iodine atom (the alicyclic hydrocarbon group may have a substituent other than an iodine atom) or an aromatic hydrocarbon group having 6 to 10 carbon atoms having an iodine atom (the aromatic hydrocarbon group may have a substituent other than an iodine atom). [3] The resist composition according to [1] or [2], wherein L 2 is a single bond, a chain hydrocarbon group having 1 to 8 carbon atoms (where -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group combining a chain hydrocarbon group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent (where -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be replaced by -O- or -CO-). [4] The resist composition according to any one of [1] to [3], further containing a resin containing a structural unit represented by formula (a2-A). TIFF2026110561000005.tif30128[In formula (a2-A), R a2 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a27 This represents a halogen atom, a hydroxyl group, a carboxyl group, a C1-C6 alkyl group which may have a halogen atom, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a28 - may be used instead. R a28 This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 This represents a single bond or a carbonyl group. nA2 represents an integer from 1 to 5, and when nA2 is 2 or greater, the bases within the parentheses may be the same or different from each other. na21 represents an integer from 0 to 4, and when na21 is 2 or greater, multiple R a27 They may be the same or different from one another. mc represents an integer between 0 and 2. [5] The resin further contains structural units having acid-unstable groups, The resist composition according to [4], wherein the structural unit having an acid-unstable group is selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). TIFF2026110561000006.tif44144[In formulas (a1-0), (a1-1), and (a1-2), La01 , L a1 and L a2 These are, independently, -O- or *-O-(CH2) k1 -CO-O- represents a bond, where k1 is an integer from 1 to 7, and * represents the bond site with -CO-. R a01 , R a4 and R a5 Each of these independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a02 , R a03 and R a04 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have halogen atoms. R a6 and R a7 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination thereof, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have halogen atoms. m1' represents an integer between 0 and 14. n1 represents an integer between 0 and 14. n1' represents an integer between 0 and 3. TIFF2026110561000007.tif32118[In formula (a1-4), R a1 This represents a hydrogen atom, a halogen atom, or a C1-C6 alkyl group which may have a halogen atom. R a17This represents a halogen atom, a hydroxyl group, a carboxyl group, a C1-C6 alkyl group which may have a halogen atom, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a18 - may be used instead. R a18 This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 This represents a single bond or a carbonyl group. R a34 and R a35 Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a36 This represents a hydrocarbon group with 1 to 20 carbon atoms, or R a34 R represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. a35 and R a36 These groups bond to each other, forming a divalent heterocyclic group having 3 to 20 carbon atoms with the -CO- groups to which they are bonded. The -CH2- groups contained in the hydrocarbon group and the divalent heterocyclic group may be replaced with -O- or -S- groups. na1 represents an integer between 1 and 5, and when na1 is 2 or greater, the bases within the parentheses may be the same or different from each other. na11 represents an integer from 0 to 4, and when na11 is 2 or greater, multiple R a17 They may be the same or different from one another. mc represents an integer between 0 and 2. TIFF2026110561000008.tif4558[In formula (a1-5), R a8 This represents an alkyl group having 1 to 6 carbon atoms, which may contain a halogen atom, a hydrogen atom, or a halogen atom. Z a1This is a single bond or *-(CH2) h3 -CO-L 54 - represents, h3 represents an integer from 1 to 4, and * represents L 51 This represents the connection point. L 51 , L 52 , L 53 and L 54 These represent either -O- or -S- independently. s1 represents an integer between 1 and 3. s1' represents an integer between 0 and 3. TIFF2026110561000009.tif3581[In formula (a1-6), R a61 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a62 , R a63 and R a64 Each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have substituents, or R a62 and R a63 They bond to each other, forming a ring with 3 to 20 carbon atoms, R a64 This represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms, which may have substituents. X a61 These are single bonds, -CO-O-*, or -CO-NR a65 -* represents the bonding site with Ar, and R a65 This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 This is a single bond, *-OL a61 -or*-CO-OL a62 - represents the bonding site with Ar, and * represents the bonding site with L. a61 and L a62 Each of these independently represents an alkanediyl group with 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms, which may have substituents. [6] The resist composition according to [4] or [5], further comprising a resin with structural units that decompose upon exposure to generate acid. [7] The resist composition according to [6], wherein the structural unit that decomposes upon exposure to generate acid is a structural unit represented by formula (a7-A). TIFF2026110561000010.tif26125[In formula (a7-A), R a7 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. X a71 These are single bonds, or -O-, -CO-, -S-, -SO-, -SO2-, -NR a71 - represents a phenylene group which may have substituents, or a group which is a combination thereof. R a71 This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a71 and L a72 Each of these independently represents a hydrocarbon group having 1 to 24 carbon atoms, which may have substituents, and the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-. X a72 ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, where *** is L a71 This represents the connection point. na7 represents an integer between 0 and 2. When na7 is 2, the bases within the parentheses may be the same or different. RA - This represents a sulfonate anion or a carboxylate anion. ZA + This represents an organic cation. [8] Further containing an acid generator, A resist composition according to any one of [1] to [7], wherein the acid generator comprises a salt represented by formula (B1), a salt represented by formula (B2), or a salt represented by formula (B4). TIFF2026110561000011.tif1395[In formula (B1), L b1represents a hydrocarbon group having a single bond or a substituent (nb1+1), and the -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO-, or -SO2-. L b2 represents a divalent hydrocarbon group having 1 to 24 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-. Y b1 represents a methyl group which may have substituents or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO-, -SO2- or -CO-. nb1 represents an integer between 1 and 6. When nb1 is 2 or greater, the bases within the parentheses may be the same or different. Z1 + This represents an organic cation. TIFF2026110561000012.tif1193[In formula (B2), A 1 represents a nitrogen atom or a carbon atom. L b2’ represents a divalent hydrocarbon group having 1 to 24 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-. Y b1’ represents a methyl group which may have substituents or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO- or -SO2-. nb5 represents an integer of 2 or 3. 1 If it is a nitrogen atom, then nb5 is 2, and A 1 If is a carbon atom, then nb5 is 3. The groups in parentheses may be the same or different from each other, and two groups in parentheses combine to form A 1 A ring containing the element may be formed. Z2 +represents an organic cation. TIFF2026110561000013.tif29117[In formula (B4), L b14 and L b15 each independently represents a divalent hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. Ar B4 and Ar B5 each independently represents an aromatic hydrocarbon group having 6 to 24 carbon atoms which may have a substituent, and the substituents of Ar B4 and Ar B5 may combine to form a ring. R B4 and R B5 each independently represents a halogen atom or a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO- or -SO2-. mB4 represents any integer from 0 to 4, and when mB4 is 2 or more, the plurality of R B4 may be the same as or different from each other. mB5 represents any integer from 0 to 4, and when mB5 is 2 or more, the plurality of R B5 may be the same as or different from each other. Z4 + and Z5 + each independently represents an organic cation. [9] (1) A step of applying the resist composition according to any one of [1] to [8] onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer, A method for producing a resist pattern including these steps.

[10] The carboxylate represented by the above formula (I).

[11] W1 The carboxylate salt according to

[10] , wherein the alicyclic hydrocarbon group having 3 to 12 carbon atoms and containing an iodine atom (the alicyclic hydrocarbon group may have substituents other than the iodine atom) or the aromatic hydrocarbon group having 6 to 10 carbon atoms and containing an iodine atom (the aromatic hydrocarbon group may have substituents other than the iodine atom).

[12] L 2 The carboxylate salt according to

[10] or

[11] , wherein the group is a single bond, a chain hydrocarbon group having 1 to 8 carbon atoms (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms with a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have substituents (the -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be replaced with -O- or -CO-). [Effects of the Invention]

[0006] By using the resist composition of the present invention, resist patterns can be manufactured with good CD uniformity (CDU). [Modes for carrying out the invention]

[0007] In this specification, "(meth)acrylic monomer" means "at least one of acrylic monomers and methacrylic monomers." The same applies to "(meth)acrylate" and "(meth)acrylic acid," etc. For groups described herein that can take both linear and branched structures, either is acceptable. Hydrocarbon groups, etc., containing -CH2- are -O-, -S-, -CO-, -SO-, -NR XWhen a group is replaced by -(X is any sign) or -SO2-, the same example shall apply to each group, and the number of carbon atoms before replacement shall be the same as the number of carbon atoms in the hydrocarbon group, etc. "Combined group" means a group formed by bonding two or more of the exemplified groups, and the valencies of these groups may be appropriately changed depending on the bonding configuration. "Derived from" or "induced" means that the polymerizable C=C bond contained in the molecule becomes a -CC- group (single bond) through polymerization. If stereoisomers exist, all stereoisomers are included. Depending on the number of substituents, etc., any position and number of hydrogen atoms contained in the group may be replaced at the bonding site. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the substituent. "Acid-unstable group" means a group in which, upon contact with an acid (e.g., trifluoromethanesulfonic acid, etc.), the leaving group is removed to form a hydrophilic group (e.g., a hydroxyl group or a carboxyl group, etc.). A "base-unstable group" refers to a group that, upon contact with a base (for example, trimethylamine, tetramethylammonium hydroxide, etc.), detaches a leaving group to form a hydrophilic group (for example, a carboxyl group or a hydroxyl group, etc.). In this specification, "solid content of the resist composition" means the total amount of the resist composition excluding the solvent (E) described later.

[0008] [Carboxylate salt represented by formula (I)] The present invention relates to a carboxylate salt represented by formula (I) (hereinafter sometimes referred to as "carboxylate salt (I)" or "salt (I)"). In salts (I), the negatively charged side is sometimes called the "anion (I)," and the positively charged side is sometimes called the "cation (I)."

[0009] (Anion (I)) In equation (I), L 10Examples of chain-like hydrocarbon groups in this context include alkanediyl groups, such as linear alkanediyl groups like methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl; and branched alkanediyl groups like propane-1,2-diyl, 1-methylpropane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and even more preferably 2 to 5. Examples of chain hydrocarbon groups containing a fluorine atom include alkanediyl groups containing a fluorine atom, which are groups in which one or more hydrogen atoms of the alkanediyl group exemplified above are replaced by fluorine atoms, such as difluoromethylene groups, perfluoroethylene groups, perfluoropropanediyl groups, perfluorobutanediyl groups, and perfluoroalkanediyl groups.

[0010] L 2 The hydrocarbon group in this context is a divalent hydrocarbon group, which may be saturated or unsaturated. Examples include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and other cyclic hydrocarbon groups. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) is also acceptable. Chain hydrocarbon groups and alicyclic hydrocarbon groups are also called aliphatic hydrocarbon groups, and alicyclic hydrocarbon groups and aromatic hydrocarbon groups are also called cyclic hydrocarbon groups. The number of carbon atoms in the hydrocarbon group may be 1 to 28, preferably 1 to 24, more preferably 1 to 20, even more preferably 1 to 18, and even more preferably 1 to 12. Examples of chain-like hydrocarbon groups include alkanediyl groups, such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl, as well as linear alkanediyl groups. Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The ends of the branched alkanediyl groups may be alkyl groups such as methyl groups. The number of carbon atoms in the chain-like hydrocarbon group may be 1 to 24, preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, even more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. Examples of monocyclic or polycyclic divalent alicyclic hydrocarbon groups include the following groups. The bonding site can be at any position. Specifically, monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group are monocyclic divalent alicyclic hydrocarbon groups. Examples of polycyclic divalent alicyclic hydrocarbon groups include cycloalkyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, spirocyclohexane-1,2'-cyclopentane group, and spiroadamantane-2,3'-cyclopentane group, as well as polycyclic cycloalkanediyl groups such as spiro rings having cycloalkyl groups spiro-bonded to norbornyl or adamantyl groups. The number of carbon atoms in the alicyclic hydrocarbon group may be 3 to 24, preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of aromatic hydrocarbon groups include phenylene groups, naphthylene groups, anthrylene groups, biphenylene groups, phenanthrylene groups, and other arylene groups. The number of carbon atoms in the aromatic hydrocarbon group may be 6 to 24, preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. Examples of groups combining two or more types include groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group, groups combining an aromatic hydrocarbon group and a chain hydrocarbon group, groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and groups combining an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a chain hydrocarbon group. In the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Also, any of the groups may contain an oxygen atom or W. 1 They may be bound together. Examples of groups that combine an alicyclic hydrocarbon group and a chain hydrocarbon group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups that combine an aromatic hydrocarbon group and a chain-type hydrocarbon group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent aromatic hydrocarbon group-. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-.

[0011] L 2 The -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -SO2-, or -NR 7 - may be replaced with this. L 2 The hydrocarbon group containing -CH2- is -O-, -CO-, -S-, -SO-, -SO2-, or -NR 7 If a carbon atom is replaced by a hyphen, the number of carbon atoms before the replacement shall be considered the number of carbon atoms in the hydrocarbon group. R 7 Examples of alkyl groups include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, and hexyl groups. R 7 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, a hydrogen atom or an alkyl group having 1 to 3 carbon atoms is more preferred, a hydrogen atom, an ethyl group or a methyl group is even more preferred, and a hydrogen atom or a methyl group is even more preferred. The -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -SO2-, or -NR 7 Groups that have been replaced by - include hydroxyl groups (groups in which the -CH2- contained in the methyl group is replaced by -O-), carboxyl groups (groups in which the -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), thiol groups (groups in which the -CH2- contained in the methyl group is replaced by -S-), and amino groups (groups in which the -CH2- contained in the methyl group is replaced by -NR 7- group replaced by -, oxy group (a group in which -CH2- in the methylene group is replaced by -O-), carbonyl group (a group in which -CH2- in the methylene group is replaced by -CO-), thio group (a group in which -CH2- in the methylene group is replaced by -S-), sulfonyl group (a group in which -CH2- in the methylene group is replaced by -SO2-), ester group (a group in which -CH2-CH2- in the ethylene group is replaced by -CO-O-), carbonate group (a group in which -CH2-CH2-CH2- in the propylene group is replaced by -O-CO-O-), peptide group (a group in which -CH2-CH2- in the ethylene group is replaced by -CO-NR 7 -A group replaced by -), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced by -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced by -NR 7 -A group replaced by -), alkyl peptide group (where -CH2-CH2- at any position within the alkyl group is -CO-NR 7عال (A group in which 2-CH2- is replaced by -O-CO-O-), alkoxyalkoxy group (A group in which two -CH2- at any position in an alkyl group are replaced by -O-), alkoxyalkyl group (A group in which one -CH2- at any position in an alkyl group is replaced by -O-), hydroxyalkyl group (A group in which one -CH2- in a methyl group at any position in an alkyl group is replaced by -O-), alkanediyloxy group (A group in which one -CH2- in an alkanediyl group is replaced by -O-) (A group in which the -CH2- at any position is replaced by -O-), Alkanediyloxycarbonyl group (A group in which the -CH2-CH2- at any position in the Alkanediyl group is replaced by -O-CO-), Alkanediylcarbonyl group (A group in which the -CH2- at any position in the Alkanediyl group is replaced by -CO-), Alkanediylcarbonyloxy group (A group in which the -CH2-CH2- at any position in the Alkanediyl group is replaced by -CO-O-), Alkanediyl Xycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-O-), alkanediylsulfonyl group (a group in which -CH2- at any position in an alkanediyl group is replaced with -SO2-), alkanediylthio group (a group in which -CH2- at any position in an alkanediyl group is replaced with -S-), alkanediylamino group (a group in which -CH2- at any position in an alkanediyl group is replaced with -NR 7 -A group replaced by -), an alkanediyl peptide group (where -CH2-CH2- at any position in the alkanediyl group is replaced by -CO-NR 7Examples include groups that have been replaced by (-), cycloalkoxy groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups that combine two or more of these groups. Examples of alkoxy groups include alkoxy groups having 1 to 27 carbon atoms, such as methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, octyloxy, 2-ethylhexyloxy, nonyloxy, decyloxy, and undecyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkylthio groups include alkylthio groups having 1 to 27 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, and undecylthio group. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkylsulfonyl groups include alkylsulfonyl groups having 1 to 27 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, and undecylsulfonyl group. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkylamino groups include alkylamino groups having 1 to 27 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, pentylamino group, and hexylamino group. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkyl peptide groups include alkyl peptide groups having 1 to 27 carbon atoms, such as methyl peptide groups, ethyl peptide groups, and propyl peptide groups. The number of carbon atoms in the alkyl peptide group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkoxycarbonyl groups include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of alkylcarbonyl groups include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of alkylcarbonyloxy groups include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy groups. Examples of alkoxyalkoxy groups include alkoxyalkoxy groups having 2 to 26 carbon atoms, such as methoxymethoxy, methoxyethoxy, ethoxymethoxy, and ethoxyethoxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 10, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of alkoxyalkyl groups include alkoxyalkyl groups having 2 to 27 carbon atoms, such as methoxymethyl group, methoxyethyl group, ethoxymethyl group, ethoxyethyl group, ethoxypropyl group, ethoxybutyl group, propoxymethyl group, propoxyethyl group, isopropoxymethyl group, propoxypropyl group, butoxymethyl group, sec-butoxymethyl group, and tert-butoxymethyl group. The number of carbon atoms in the alkoxyalkyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of hydroxyalkyl groups include hydroxyalkyl groups having 1 to 27 carbon atoms, such as hydroxymethyl group, dihydroxymethyl group, hydroxyethyl group, dihydroxyethyl group, hydroxypropyl group, hydroxyisopropyl group, hydroxybutyl group, and hydroxysec-butyl group. The number of carbon atoms in the hydroxyalkyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediyloxy groups include alkanediyloxy groups having 1 to 27 carbon atoms, such as methyleneoxy, ethyleneoxy, propanediyloxy, butanediyloxy, and pentanediyloxy groups. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediyloxycarbonyl groups include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as methyleneoxycarbonyl groups, ethyleneoxycarbonyl groups, propanediyloxycarbonyl groups, and butanediyloxycarbonyl groups. Examples of alkanediylcarbonyl groups include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as methylenecarbonyl groups, ethylenecarbonyl groups, propanediylcarbonyl groups, butanediylcarbonyl groups, and pentanediylcarbonyl groups. Examples of alkanediylcarbonyloxy groups include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as methylenecarbonyloxy groups, ethylenecarbonyloxy groups, propanediylcarbonyloxy groups, and butanediylcarbonyloxy groups. Examples of alkanediyloxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as the butoxycarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 10, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of alkanediylsulfonyl groups include alkanediylsulfonyl groups having 1 to 27 carbon atoms, such as methylenesulfonyl groups, ethylenesulfonyl groups, and propylenesulfonyl groups. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediylthio groups include alkanediylthio groups having 1 to 27 carbon atoms, such as methylenethio groups, ethylenethio groups, and propylenethio groups. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediylamino groups include alkanediylamino groups having 1 to 27 carbon atoms, such as methyleneamino groups, ethyleneamino groups, dimethylamino groups, propyleneamino groups, butyleneamino groups, pentyleneamino groups, and hexyleneamino groups. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediyl peptide groups include alkanediyl peptide groups having 1 to 27 carbon atoms, such as methylene peptide groups, ethylene peptide groups, and propylene peptide groups. The number of carbon atoms in the alkanediyl peptide group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 27 carbon atoms, such as the cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as the cyclohexylmethoxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 27 carbon atoms, such as the benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as the benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as the phenyloxy group.

[0012] Furthermore, the -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or combinations thereof may be -O-, -CO-, -S-, -SO-, -SO2-, or -NR7 The following are examples of groups that have been replaced by -. The -O- or -CO- in the groups shown below are replaced by -S-, -SO-, and -NR, respectively. 7 It may be replaced with - or -SO2-. The binding site can be at any position. TIFF2026110561000015.tif89166

[0013] L 2 Examples of substituents that may be present include halogen atoms, cyano groups, nitro groups, etc. 2 The -CH2- group contained in the alkyl group or other chain hydrocarbon group is -O-, -CO-, -S-, -SO-, -SO2-, or -NR 7 -By replacing it with L 2 It can have substituents such as a hydroxyl group, carboxyl group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkoxycarbonyloxy group, alkoxyalkoxy group, thiol group, alkylthio group, alkylsulfonyl group, amino group, alkylamino group, alkylpeptide group, etc. Also, L 2 However, in the case of a group that combines an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be substantially substituted for the alicyclic hydrocarbon group or aromatic hydrocarbon group. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms.

[0014] L 2 This refers to a chain-like hydrocarbon group having 1 to 18 carbon atoms, which may have single bonds or substituents (the -CH2- contained in the chain-like hydrocarbon group may be -O-, -CO-, -S-, -SO-, -SO2-, or -NR). 7 -May be replaced by -, a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be -O-, -CO-, -S-, -SO-, -SO2- or -NR 7-May be replaced by -CH2-) or a group formed by combining a chain hydrocarbon group having 1 to 12 carbon atoms which may have substituents and a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have substituents (the -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be -O-, -CO-, -S-, -SO-, -SO2- or -NR 7Examples include single bonds, C1-C10 chain hydrocarbon groups which may have substituents (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), C3-C18 cyclic hydrocarbon groups which may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-), or groups which are combinations of a C1-C8 chain hydrocarbon group which may have substituents and a C3-C18 cyclic hydrocarbon group which may have substituents (the chain hydrocarbon group may contain... The -CH2- may be replaced with -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-.) Preferably, it is a single bond, a chain hydrocarbon group having 1 to 8 carbon atoms (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have substituents (the chain hydrocarbon group and the - contained in the cyclic hydrocarbon group) It is more preferable that the CH2- may be replaced with -O- or -CO-, and that the group is a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a group combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have substituents (the -CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced with -O- or -CO-), or a chain hydrocarbon group having 1 to 4 carbon atoms and a substituent It is more preferable that the group is a combination of an aromatic hydrocarbon group having 6 to 10 carbon atoms (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), and it is even more preferable that the group is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), and it is more preferable that the group is a single bond or a linear alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-).It is even more preferable that it is a single bond, a methylene group or a carbonyl group, and even more preferable that it is a single bond or a methylene group.

[0015] W 1 The cyclic hydrocarbon group in this product may be either saturated or unsaturated, and may include monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups and aromatic hydrocarbon groups. A combination of two or more of these groups is also acceptable (for example, a cyclic hydrocarbon group formed from an alicyclic hydrocarbon group and an aromatic hydrocarbon group). The number of carbon atoms in the cyclic hydrocarbon group is preferably 3 to 30, more preferably 3 to 24, and even more preferably 3 to 20. Examples of alicyclic hydrocarbon groups include monocyclic alicyclic hydrocarbon groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl monocyclic alkyl groups; cycloalkyl groups such as norbornyl, adamantyl, decahydronaphthyl, spirocyclohexane-1,2'-cyclopentane, and spiroadamantane-2,3'-cyclopentane monocyclic alkyl groups; and polycyclic alicyclic hydrocarbon groups such as spiro rings having a cycloalkyl group spiro-bonded to a norbornyl or adamantyl group. Specifically, the following groups are examples. The bonding site can be at any position. TIFF2026110561000016.tif46157 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 18, even more preferably 3 to 16, even more preferably 3 to 12, and even more preferably 3 to 10. Examples of aromatic hydrocarbon groups include phenyl groups, naphthyl groups, biphenyl groups, anthryl groups, phenanthryl groups, binaphthyl groups, and other aryl groups. Specifically, the following groups are examples. TIFF2026110561000017.tif1172 The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 24, more preferably 6 to 18, even more preferably 6 to 14, even more preferably 6 to 12, and even more preferably 6 to 10. Examples of groups combining two or more types include groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and two or more types of alicyclic hydrocarbon groups and aromatic hydrocarbon groups may be combined. Also, any of the groups may be L 2 They may be bound together. Groups combining alicyclic hydrocarbon groups and aromatic hydrocarbon groups include -aromatic hydrocarbon group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-aromatic hydrocarbon group, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group. The following groups are also examples. TIFF2026110561000018.tif34152 The -CH2- contained in the cyclic hydrocarbon group is -O-, -CO-, -S-, -SO-, -SO2- or -NR 7 - may be replaced by -CH2-, -O-, -CO-, -S-, -SO-, -SO2-, or -NR in the cyclic hydrocarbon group. 7 If a carbon atom is replaced by a hyphen, the number of carbon atoms before the replacement shall be considered the number of carbon atoms in the cyclic hydrocarbon group. The -CH2- group contained in an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a combination thereof is -O-, -CO-, -S-, -SO-, -SO2-, or -NR 7 Examples of groups that can be replaced by - include those similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. The cyclic hydrocarbon group is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms, more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and even more preferably a group represented by any of the following: Here, each group has an iodine atom and may have substituents other than an iodine atom, and the -CH2- contained in each group is -O-, -CO-, -S-, -SO-, -SO2- or -NR 7 It may be replaced with -. The connection point is at any position. TIFF2026110561000019.tif34151 Substituents other than the iodine atom in a cyclic hydrocarbon group include halogen atoms other than the iodine atom, cyano groups, nitro groups, or C1-C12 alkyl groups (the alkyl group may have a halogen atom, a cyano group, or a nitro group, and the -CH2- contained in the alkyl group is -O-, -CO-, -S-, -SO-, -SO2-, or -NR 7 -This may be replaced by the following.) etc. Other halogen atoms besides iodine include fluorine, chlorine, and bromine. Examples of alkyl groups having 1 to 12 carbon atoms include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, hexyl, octyl, and nonyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The -CH2- contained in the alkyl group is -O-, -CO-, -S-, -SO-, -SO2-, or -NR 7 Examples of groups that can be replaced by - include hydroxyl groups, carboxyl groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, thiol groups, alkylthio groups, alkylsulfonyl groups, amino groups, alkylamino groups, alkylpeptide groups, and groups that combine two or more of these groups. Specifically, examples include alkoxy groups having 1 to 11 carbon atoms, alkoxycarbonyl groups having 2 to 11 carbon atoms, alkylcarbonyl groups having 2 to 12 carbon atoms, alkylcarbonyloxy groups having 2 to 11 carbon atoms, alkoxycarbonyloxy groups having 2 to 10 carbon atoms, alkoxyalkoxy groups having 2 to 10 carbon atoms, alkylthio groups having 1 to 11 carbon atoms, alkylsulfonyl groups having 1 to 11 carbon atoms, alkylamino groups having 1 to 11 carbon atoms, and alkylpeptide groups having 1 to 11 carbon atoms, and are similar to the groups exemplified herein, within the range of acceptable carbon numbers. When the alkyl group has a halogen atom, examples include C1-C12 haloalkyl groups such as C1-C12 alkyl fluorides, C1-C12 alkyl chlorides, C1-C12 alkyl bromides, and C1-C12 alkyl iodides. Examples of haloalkyl groups include C1-C12 perfluoroalkyl groups (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1-10, more preferably 1-8, even more preferably 1-6, even more preferably 1-4, and even more preferably 1-3. The -CH2- group in the haloalkyl group may be replaced with -O- or -CO-, etc. Examples of such groups include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, and haloalkylcarbonyloxy groups. Specifically, examples include haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, and haloalkylcarbonyloxy groups having 2 to 11 carbon atoms. For example, a group in which one or more hydrogen atoms of the above-executed groups are replaced with halogen atoms can be used. Substituents other than the iodine atom that the cyclic hydrocarbon group may have include halogen atoms other than iodine, C1-C10 haloalkyl groups, or C1-C12 alkyl groups (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), preferably halogen atoms other than iodine, C1-C8 haloalkyl groups, or C1-C10 alkyl groups (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), preferably halogen atoms other than iodine, C1-C6 haloalkyl groups, or C1-C8 alkyl groups (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-). It may be replaced with -CO-. More preferably it is a halogen atom other than an iodine atom, a C1-C6 alkyl fluoride, a C1-C8 alkyl group, a hydroxyl group, a carboxyl group, a C1-C7 alkoxy group or a C2-C6 alkoxyalkoxy group, even more preferably it is a fluorine atom, a C1-C3 perfluoroalkyl group, a C1-C6 alkyl group, a hydroxyl group, a C1-C5 alkoxy group or a C2-C4 alkoxyalkoxy group, and even more preferably it is a fluorine atom, a C1-C4 alkyl group, a hydroxyl group or a C2-C4 alkoxyalkoxy group. The number of iodine atoms in the cyclic hydrocarbon group is not particularly limited, but is preferably 1 to 4, and more preferably 1 or 2. The number of substituents other than the iodine atom that the cyclic hydrocarbon group may have is not particularly limited, but it is preferably one or two. W 1 Examples include cyclic hydrocarbon groups having 3 to 20 carbon atoms and containing an iodine atom (the -CH2- contained in the cyclic hydrocarbon group is -O-, -CO-, -S-, -SO-, -SO2-, or -NR). 7 - may be replaced by -, and the cyclic hydrocarbon group may have substituents other than the iodine atom.) Preferably, it is a carbon-3 to carbon-18 alicyclic hydrocarbon group having an iodine atom (the -CH2- contained in the alicyclic hydrocarbon group is -O-, -CO-, -S-, -SO-, -SO2- or -NR 7- May be replaced by, and the alicyclic hydrocarbon group may have substituents other than the iodine atom.) More preferably, it is an aromatic hydrocarbon group having 6 to 18 carbon atoms having an iodine atom (the aromatic hydrocarbon group may have substituents other than the iodine atom), and even more preferably, it is an alicyclic hydrocarbon group having 3 to 12 carbon atoms having an iodine atom (the alicyclic hydrocarbon group may have substituents other than the iodine atom), or an aromatic hydrocarbon group having 6 to 10 carbon atoms having an iodine atom (the aromatic hydrocarbon group may have substituents other than the iodine atom), and may be a cyclohexyl group having an iodine atom (the cyclohexyl group may have substituents other than the iodine atom), an adamantyl group having an iodine atom (the adamantyl group may have substituents other than the iodine atom), It is more preferable that the group is a phenyl group having an iodine atom (the phenyl group may have substituents other than an iodine atom) or a naphthyl group having an iodine atom (the naphthyl group may have substituents other than an iodine atom), it is even more preferable that the group is an adamantyl group having an iodine atom (the adamantyl group may have substituents other than an iodine atom) or a phenyl group having an iodine atom (the phenyl group may have substituents other than an iodine atom), it is even more preferable that the group is an adamantyl group having an iodine atom (the adamantyl group may have substituents other than an iodine atom), and it is even more preferable that the group is an adamantyl group having an iodine atom.

[0016] Examples of anions (I) include those represented by the following equations (Ia-1) to (Ia-30). TIFF2026110561000020.tif251157

[0017] [Cation (I)] Z in equation (I) +Examples of organic cations include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and aryl sulfonium cations are more preferred. Specifically, examples include cations represented by any of formulas (b2-1) to (b2-5) (hereinafter, depending on the formula number, they may be referred to as "cation (b2-1)," etc.). TIFF2026110561000021.tif82160[Formula (b2-1) to formula (b2-5), R b4 ~R b6 Each of these independently represents a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms. The hydrogen atoms in the chain hydrocarbon group may be substituted with a hydroxyl group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group. The hydrogen atoms in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxyl group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkyl fluoride group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 These atoms may bond with each other and form a ring together with the sulfur atom to which they are bonded, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b7 and R b8 Each of these independently represents a halogen atom, a hydroxyl group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer between 0 and 5. When m2 is 2 or more, multiple R b7They may be the same or different, and when n2 is 2 or greater, multiple R b8 They may be the same or different. R b9 and R b10 Each of these independently represents either a chain-like hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 These atoms may bond with each other and form a ring together with the sulfur atom to which they are bonded, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b11 This represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 This represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atoms contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 These may be bonded to each other and form a ring including the -CH-CO- groups to which they are bonded, and the -CH2- groups included in the ring may be replaced by -O-, -S-, or -CO-. R b13 ~R b18 and R b21 ~R b26 Each of these independently represents a halogen atom, a hydroxyl group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 These atoms may bond with each other and together with the benzene ring to which they are bonded, form a ring containing a sulfur atom, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. Rb27 ~R b29 Each of these independently represents a group containing a hydrogen atom or an acid-unstable group. L b31 and L b41 ~L b43 Each of these independently represents either a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer between 0 and 5. q2 and r2 each independently represent an integer between 0 and 4. u2 represents either 0 or 1. When o2 is 2 or more, multiple R b13 They are the same or different, and when p2 is 2 or more, multiple R b14 They are the same or different, and when q2 is 2 or more, multiple R b15 They are the same or different, and when r2 is 2 or more, multiple R b16 They are the same or different, and when s2 is 2 or more, multiple R b17 They are the same or different, and when t2 is 2 or more, multiple R b18 They are either the same or different. u3 represents an integer between 1 and 3, satisfying the condition 1 ≤ u3 + q23 ≤ 5. u4 and u5 each independently represent an integer between 0 and 3, satisfying 0 ≤ u4 + o21 ≤ 5 and 0 ≤ u5 + p22 ≤ 5. When u3, u4, and u5 are each 2 or more, the bases in the parentheses are either the same or different. o21, p22, q23, r24, t25, and s26 each independently represent an integer between 0 and 4. When o21, p22, q23, r24, t25, and s26 are each 2 or more, multiple R b21 ~R b26 These are either identical or distinct from one another.

[0018] When u2 is 0, then at least one of o2, p2, q2, and r2 is 1 or greater, and R b13 ~R b16Preferably, at least one of them is a halogen atom, and when u2 is 1, then one of o2, p2, s2, t2, q2 and r2 is 1 or more, and R b13 ~R b18 Preferably, at least one of them is a halogen atom. Furthermore, when u2 is 0, it is preferable that r2 is 1 or greater, and more preferably 1. Also, when u2 is 0 and r2 is 1 or greater, R b16 It is preferable that the atom is a halogen atom.

[0019] Aliphatic hydrocarbon groups refer to both chain-type hydrocarbon groups and alicyclic hydrocarbon groups. Examples of chain-like hydrocarbon groups include those similar to the alkyl groups exemplified herein. In particular, R b9 ~R b12 The chain-like hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be monocyclic or polycyclic, saturated or unsaturated, and is similar to the cycloalkyl groups exemplified herein. In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 4 to 12 carbon atoms. Examples of alicyclic hydrocarbon groups in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include methylcyclohexyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, 2-ethyladamantan-2-yl group, 2-isopropyladamantan-2-yl group, methylnorbornyl group, and isobornyl group. In alicyclic hydrocarbon groups in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. Examples of alkyl fluoride are those similar to those exemplified herein. The number of carbon atoms in the alkyl fluoride is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, biphenyl, naphthyl, and phenanthryl groups. Aromatic hydrocarbon groups may have a chain-like hydrocarbon group or an alicyclic hydrocarbon group, and examples include aromatic hydrocarbon groups having a chain-like hydrocarbon group (tolyl, xylyl, cumenyl, mesityl, p-ethylphenyl, p-tert-butylphenyl, 2,6-diethylphenyl, 2-methyl-6-ethylphenyl, etc.) and aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl, p-adamantylphenyl, etc.). Furthermore, if the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferred. Examples of aromatic hydrocarbon groups in which a hydrogen atom is substituted with an alkoxy group include the p-methoxyphenyl group. Examples of chain-like hydrocarbon groups in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl, phenethyl, phenylpropyl, trityl, naphthylmethyl, and naphthylethyl groups. Examples of alkoxy groups, alkylcarbonyl groups, halogen atoms, and alkylcarbonyloxy groups are those similar to those exemplified herein. R b4 and R b5 The ring formed by the bonding of these atoms to each other and the sulfur atoms to which they are bonded may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. Examples of such rings include those with 3 to 18 carbon atoms, preferably those with 4 to 18 carbon atoms. Furthermore, examples of sulfur atom-containing rings include those with 3 to 12 membered rings, preferably those with 3 to 7 membered rings, and the following rings are examples. * indicates a bonding site. TIFF2026110561000022.tif24142R b9 and R b10The ring formed by the combination of these elements may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. Examples include a thiolan-1-ium ring (tetrahydrothiophenium ring), a thian-1-ium ring, and a 1,4-oxatian-4-ium ring. R b11 and R b12 The ring formed by the combination of these elements may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. Examples include oxocycloheptane rings, oxocyclohexane rings, oxonorbornane rings, and oxoadamantane rings. R b27 ~R b29 Groups containing acid-unstable groups include -R c30 , -CO-OR c30 or -L c10 -CO-OR c30 The group indicated by (L c10 R represents an alkanediyl group with 1 to 6 carbon atoms. c30 This represents an acid-unstable group. Examples include: R c30 Examples of acid-unstable groups include those represented by formula (1) or formula (2) as illustrated herein.

[0020] Among cations (b2-1) to (b2-5), cation (b2-1), cation (b2-4), or cation (b2-5) are preferred. The following cations can be considered as cations (b2-1): TIFF2026110561000023.tif172166

[0021] TIFF2026110561000024.tif56163 The following cations can be considered as cations (b2-2). TIFF2026110561000025.tif18150 The following cations can be considered as cations (b2-3): TIFF2026110561000026.tif26140 The following cations can be considered as cations (b2-4): TIFF2026110561000027.tif121163 The following cations can be listed as cations (b2-5). TIFF2026110561000028.tif102166

[0022] Carboxylate salt (I) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be combined arbitrarily. Preferably, carboxylate salt (I) is a combination of anion represented by any of formulas (Ia-1) to (Ia-30) and cation (b2-1), cation (b2-2), cation (b2-3), cation (b2-4), or cation (b2-5).

[0023] Examples of carboxylate salts (I) include salts obtained by arbitrarily combining the cations and anions mentioned above. Specific examples of carboxylate salts (I) are shown in the table below. In the table below, each symbol represents the symbol attached to the structure representing the anion or cation described above, and "~" indicates that the carboxylate salt (I) and the anion (I) correspond to each other. For example, carboxylate salt (I-1) is a salt consisting of the anion represented by formula (Ia-1) and the cation represented by formula (b2-c-1), carboxylate salt (I-2) is a salt consisting of the anion represented by formula (Ia-2) and the cation represented by formula (b2-c-1), and carboxylate salt (I-31) is a salt consisting of the anion represented by formula (Ia-1) and the cation represented by formula (b2-c-10). For example, carboxylate salt (I-1) is the salt shown below. TIFF2026110561000029.tif2789 [Table 1]

[0024] In particular, the carboxylate salt (I) is preferably a salt formed by combining an anion represented by any of formulas (Ia-1) to (Ia-30) with a cation represented by any of formulas (b2-c-1), (b2-c-10), (b2-c-13), (b2-c-14), (b2-c-18) to (b2-c-20), (b2-c-27), (b2-c-30), (b2-c-31), or (b2-c-50) to (b2-c-79).

[0025] <Method for producing carboxylate salt (I)> Carboxylate salt (I) can be produced by reacting a salt represented by formula (Ia) with a salt represented by formula (Ib) in a solvent. TIFF2026110561000031.tif25158[In the formula, all signs have the same meaning as described above. R A , R B and R C Each of these independently represents a hydrocarbon group having 1 to 12 carbon atoms, or R A , R B and R C They may come together to form an aromatic ring. D [This represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms.] Examples of solvents used in this reaction include chloroform, acetonitrile, and deionized water. The reaction temperature is typically between 15°C and 80°C, and the reaction time is typically between 0.5 and 24 hours.

[0026] Salts represented by formula (Ia) include, for example, the salts shown below, which are readily available on the market and can also be easily manufactured by known methods. TIFF2026110561000032.tif33159

[0027] The salt represented by formula (Ib) can be produced by reacting the compound represented by formula (I-c1) or the compound represented by formula (I-c2) with the salt represented by formula (Id) in a solvent in the presence of the base represented by formula (Ie). TIFF2026110561000033.tif39164[In this formula, all signs have the same meaning as described above.] Examples of solvents used in this reaction include chloroform, acetonitrile, and deionized water. The reaction temperature is typically between 15°C and 80°C, and the reaction time is typically between 0.5 and 24 hours.

[0028] Compounds represented by formula (I-c1) include, for example, the salts shown below, which are readily available on the market. TIFF2026110561000034.tif2184

[0029] Compounds represented by formula (I-c2) include, for example, the salts shown below, and are readily available from the market. TIFF2026110561000035.tif24139

[0030] Salts represented by formula (Id) include, for example, the salts shown below, which are readily available on the market and can also be easily manufactured by known methods. TIFF2026110561000036.tif37167

[0031] Examples of bases represented by formula (Ie) include pyridine, triethylamine, and dimethylaminopyridine, which are readily available from the market.

[0032] [Carboxylic acid generator] The carboxylic acid generator of the present invention is an acid generator containing a carboxylate salt (I). The carboxylate salt (I) of the present invention can act as an acid generator or quencher in a resist composition. When the carboxylate salt (I) is used as an acid generator or quencher in a resist composition, the acid generator or quencher may contain only one type or two or more types of carboxylate salt (I). Furthermore, the acid generator of the present invention may further contain an acid generator known in the resist field other than carboxylate salt (I) (hereinafter sometimes referred to as "acid generator (B)") and / or a carboxylic acid generator known in the resist field other than carboxylate salt (I), as described later. Acid generator (B) may be used alone or in combination of two or more types. When the carboxylic acid generator of the present invention contains an acid generator (B), etc., the ratio (mass ratio; carboxylic acid salt (I): acid generator (B)) of the carboxylic acid salt (I) to the acid generator (B), etc. is usually 1:99 to 100:0, preferably 1:99 to 99:1, more preferably 2:98 to 98:2, and even more preferably 5:95 to 95:5.

[0033] [Resist composition] The resist composition of the present invention contains the carboxylate salt (I) of the present invention. The resist composition of the present invention may also contain an acid generator (B) other than the carboxylate salt (I). The resist composition of the present invention may further contain a resin. Examples of resins include resins containing structural units having acid-unstable groups (hereinafter sometimes referred to as "resin (A)") and / or resins other than resin (A). The resist composition of the present invention preferably further contains a quencher other than the carboxylate salt (I) (hereinafter sometimes referred to as "quencher (C)") and / or a solvent (hereinafter sometimes referred to as "solvent (E)"). In the resist composition of the present invention, the content of carboxylate salt (I) is 0.1% by mass or more and 99.9% by mass or less, preferably 0.1% by mass or more and 35% by mass or less, more preferably 0.5% by mass or more and 30% by mass or less, and even more preferably 1% by mass or more and 25% by mass or less, based on the solid content of the resist composition.

[0034] <Acid Generator (B)> The acid generator (B) may be either a nonionic or ionic compound. Examples of nonionic compounds include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxiimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate) and sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane). Typical ionic compounds include onium salts containing onium cations (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of onium salt anions include sulfonic acid anions, sulfonylimide anions, sulfonylmethide anions, and carboxylic acid anions. The acid generator (B) may be part of the structural units that make up the resin contained in the resist composition, such as structural unit (a7).

[0035] As the acid generator (B), compounds that generate acid by radiation as described in Japanese Patent Publication Nos. 63-26653, 55-164824, 62-69263, 63-146038, 63-163452, 62-153853, 63-146029, U.S. Patent Nos. 3,779,778 and 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc., can be used. Compounds manufactured by known methods may also be used. The acid generator (B) may be used alone or in combination of two or more types. The acid generator (B) may be an acid generator having an acid-unstable group. For example, the compound or resin that acts as the acid generator may contain a substructure that constitutes an acid-unstable group, and it is preferable that the acid-unstable group contains group (1) or group (2) described later. If the resist composition of the present invention contains a compound having an acid-unstable group, it does not need to contain a resin containing a structural unit having an acid-unstable group.

[0036] Preferred forms of the acid generator (B) include a salt represented by formula (B1) (hereinafter sometimes referred to as "salt (B1)" or "acid generator (B1)"), a salt represented by formula (B2) (hereinafter sometimes referred to as "salt (B2)" or "acid generator (B2)"), and a salt represented by formula (B4) (hereinafter sometimes referred to as "salt (B4)" or "acid generator (B4)"). JPEG2026110561000037.jpg1392 [In formula (B1), all symbols have the same meaning as described above.]

[0037] L b1 As for (nb1+1) valent hydrocarbon groups, one nb hydrogen atom is removed from a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group formed by combining two or more of these groups, resulting in 1 or more L b2 A group that bonds with the hydrocarbon group is an example. The number of carbon atoms in the hydrocarbon group is 1 to 48, preferably 1 to 42, more preferably 1 to 36, even more preferably 1 to 30, even more preferably 1 to 24, and even more preferably 1 to 18. Examples of chain-like hydrocarbon groups include alkyl groups or alkenyl groups from which one nb hydrogen atom has been removed. Alkyl groups may be linear or branched, and specifically include methyl, ethyl, n-propyl, iso-propyl, n-butyl, sec-butyl, iso-butyl, tert-butyl, pentyl, hexyl, heptyl, octyl, nonyl, decyl, undecyl, dodecyl, tridecyl, tetradecyl, pentadecyl, and heptadecyl groups. Examples of alkenyl groups include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, even more preferably 1 to 20, even more preferably 1 to 18, even more preferably 1 to 12, and even more preferably 1 to 10. Examples of alicyclic hydrocarbon groups include groups obtained by removing one nb hydrogen atom from a monocyclic or polycyclic cycloalkyl group. Examples of monocyclic cycloalkyl groups include cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups. Examples of polycyclic cycloalkyl groups include cycloalkyl groups having a cross-linking structure, cycloalkyl groups formed by the condensation of two or more rings, or cycloalkyl groups formed by the spirolinking of two rings. Examples of cycloalkyl groups having a cross-linking structure include norbornyl groups and adamantyl groups. Examples of cycloalkyl groups formed by the condensation of two or more rings include bicyclo[4.4.0]decanyl groups and steroid groups (steroid skeletons). Examples of cycloalkyl groups formed by the spirolinking of two rings include spirocyclic cycloalkyl groups in which one cycloalkyl group selected from the group consisting of cyclopentyl, cyclohexyl, norbornyl, and adamantyl groups is spirolinked to a cycloalkyl group having 5 to 8 carbon atoms. Furthermore, a double bond may be formed between two carbon atoms in the alicyclic hydrocarbon group. More specifically, examples include alicyclic hydrocarbon groups represented by the following formula. TIFF2026110561000038.tif37149 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, even more preferably 3 to 12, even more preferably 3 to 10, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, even more preferably 6 to 18, even more preferably 6 to 12, and even more preferably 7 to 12. Aromatic hydrocarbon groups include those obtained by removing one hydrogen atom from the nb side of an aryl group. Examples of aryl groups include phenyl, naphthyl, anthryl, biphenyl, and fluorenyl groups. More specifically, aromatic hydrocarbon groups represented by the following formulas are examples. TIFF2026110561000039.tif1185 The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, even more preferably 4 to 18, even more preferably 5 to 14, even more preferably 5 to 10, and even more preferably 6 to 10. L b1 If the -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S-, -SO-, or -SO2-, the number of carbon atoms before the replacement shall be considered the number of carbon atoms in the hydrocarbon group. L b1Among the hydrocarbon groups, groups in which the -CH2- contained in the chain hydrocarbon group is replaced with -O-, -CO-, -S-, -SO-, or -SO2- include hydroxyl groups, carboxyl groups, thiol groups, carbonyl groups, oxy groups, thio groups, sulfonyl groups, alkoxy groups, alkylthio groups, alkylsulfonyl groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyloxy groups, alkanediyloxycarbonyloxy groups, alkanediylsulfonyl groups, alkanediylthio groups, and groups combining two or more of these groups. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. L b1 Among the hydrocarbon groups, groups in which the -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or combinations thereof is replaced with -O-, -CO-, -S-, -SO-, or -SO2- include groups containing structures such as cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, and cyclic sulfonic acid esters (sultones), as well as groups derived from furan rings, thiophene rings, etc. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Groups combining two or more chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups include groups combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, groups combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, groups combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and groups combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. Groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be fused rings. L b2 Examples of divalent hydrocarbon groups include divalent chain hydrocarbon groups, divalent alicyclic hydrocarbon groups, divalent aromatic hydrocarbon groups, and groups formed by combining two or more of these groups. By removing one hydrogen atom from a monovalent hydrocarbon group, Yb1 Examples of groups that bond with it include: L b2 The divalent chain hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent groups formed by combining two or more of these groups are each L, within the limits permitted by the upper limit of the number of carbon atoms. b1 Examples include monovalent chain hydrocarbon groups, monovalent alicyclic hydrocarbon groups, monovalent aromatic hydrocarbon groups, and monovalent groups obtained by removing one hydrogen atom from a combination of two or more of these monovalent groups. L b1 and L b2 The hydrocarbon group may have substituents such as halogen atoms, cyano groups, and nitro groups. Examples of halogen atoms include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms. L b1 and L b2 However, if the group is a combination of an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, the chain hydrocarbon group may be substantially considered as a substituent of the alicyclic hydrocarbon group or aromatic hydrocarbon group. b1 and L b2 The -CH2- in the chain hydrocarbon group contained in the hydrocarbon group is replaced by -O-, -CO-, -S-, -SO-, or -SO2-, L b1 and L b2 The hydrocarbon group may substantially have substituents such as a hydroxyl group, carboxyl group, carbonyl group, oxycarbonyl group, carbonyloxy group, alkoxy group, alkylcarbonyl group, alkoxycarbonyl group, alkylcarbonyloxy group, thiol group, alkylthio group, and alkylsulfonyl group. Y b1 Examples of cyclic hydrocarbon groups include alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups that combine alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Y b1 The alicyclic hydrocarbon group and aromatic hydrocarbon group are, respectively, L b1 Examples include the same alicyclic hydrocarbon groups and aromatic hydrocarbon groups as exemplified above, and if they do not have substituents, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Yb1 Examples of substituents that the methyl group and cyclic hydrocarbon group may have include halogen atoms, cyano groups, nitro groups, or C1-C18 hydrocarbon groups that may have halogen atoms, cyano groups, or nitro groups (the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-). b1 The number of carbon atoms in the methyl group and the cyclic hydrocarbon group that may have is Y b1 The number of carbon atoms in the methyl group and cyclic hydrocarbon group is not included. Y b1 The methyl group and cyclic hydrocarbon group may have as substituents, and hydrocarbon groups having 1 to 18 carbon atoms include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups. Examples of chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining two or more of these groups include, within the limits permitted by the upper limit of carbon atoms, L b1 Examples include the chain-like hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining two or more of these groups, as exemplified above. Also, Y b1 Examples of groups in which the methyl group and cyclic hydrocarbon group may have as substituents, and in which the -CH2- in a hydrocarbon group having 1 to 18 carbon atoms is replaced with -O-, -S-, -CO-, -SO-, or -SO2-, are given within the limits permitted by the upper limit of carbon atoms. b1 Groups in which the -CH2- contained in the hydrocarbon group is replaced with -O-, -S-, -CO-, -SO-, or -SO2- are similar to the groups exemplified above. Also, Y b1 The methyl group and cyclic hydrocarbon group may have as substituents a hydrocarbon group having 1 to 18 carbon atoms, which may constitute a protecting group or a leaving group (acid-unstable group or base-unstable group) commonly used in the field. The anion of the salt represented by formula (B1) is preferably the anion represented by the following formula (B1-A1) (hereinafter sometimes referred to as "anion (B1-A1)") or the anion represented by formula (B1-A2) (hereinafter sometimes referred to as "anion (B1-A2)"). TIFF2026110561000040.tif30126[In formula (B1-A1), L b2 and Y b1 This has the same meaning as formula (B1). Q b1 Q b2 Q b3 and Q b4 Each of these independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer between 0 and 6. When z1 is 2 or greater, the bases within the parentheses may be the same or different. X 1 -O-CO-, -CO-O-, -O-CO-O-, or -O-. L b3 represents a (nb2+1) valent hydrocarbon group having 1 to 24 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-. nb2 represents an integer between 1 and 3. When nb2 is 2 or greater, the bases within the parentheses may be the same or different. Q b1 Q b2 Q b3 and Q b4 Examples of alkyl groups include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, and hexyl groups. Q b1 Q b2 Q b3 and Q b4 Examples of perfluoroalkyl groups include trifluoromethyl, perfluoroethyl, perfluoropropyl, perfluoroisopropyl, perfluorobutyl, perfluorosec-butyl, perfluorotert-butyl, perfluoropentyl, and perfluorohexyl groups. Q b1 and Q b2 Q b1 and Q b2Preferably, at least one of them contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4 Each of these is preferably independently a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, Q b3 Q is preferably a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms. b4 It is preferable that this is a hydrogen atom or a fluorine atom. z1 is preferably an integer between 0 and 3, and more preferably 0, 1, or 2. X 1 It is preferable that it be -O-CO- or -CO-O-.

[0038] L b3 As for the hydrocarbon group in this, within the limits permitted by the upper limit of the number of carbon atoms, L of formula (B1) b1 The same hydrocarbon groups as in the example above can be cited. L b3It is preferably a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have substituents (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO- or -SO2-), an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have substituents (the -CH2- contained in the aromatic hydrocarbon group may be replaced with -O- or -S-), or a group formed by combining two or more of these groups, and more preferably a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms, or a group represented by the following formula (Lb3-1). Furthermore, when -CH2- contained in a chain hydrocarbon group is replaced with -O- or -CO-, it is preferable that the number of -CH2- contained in the chain hydrocarbon group that is replaced with -O- or -CO- is 1 to 4, and it is preferable that one -CH2-CH2- contained in the chain hydrocarbon group is replaced with -O-CO- or -CO-O-, or that one -CH2-CH2-CH2- contained in the chain hydrocarbon group is replaced with -O-CO-O-. TIFF2026110561000041.tif1581[In formula (Lb3-1), nb2 has the same meaning as the expression (B1-A1). L b31 represents a single bond or a chain-like hydrocarbon group having 1 to 12 carbon atoms, and the -CH2- contained in the chain-like hydrocarbon group may be replaced with -O- or -CO-, and the chain-like hydrocarbon group may have substituents. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, wherein the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO- or -SO2-, and the -CH2- contained in the aromatic hydrocarbon group may be replaced with -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have substituents. * and ** represent bonding sites, where * is X 1 This represents the connection point with [the other element]. In formula (Lb3-1), L b31The chain-like hydrocarbon group is L as long as the upper limit of the number of carbon atoms allows. b1 Examples of similar groups to the chain-like hydrocarbon groups exemplified above include those mentioned earlier. In formula (Lb3-1), W b3 The alicyclic hydrocarbon group and aromatic hydrocarbon group are L as long as the upper limit of the number of carbon atoms allows. b1 Examples of similar groups to the alicyclic hydrocarbon groups and aromatic hydrocarbon groups exemplified above include the alicyclic hydrocarbon groups and aromatic hydrocarbon groups. In formula (Lb3-1), L b31 The chain-like hydrocarbon group may have substituents and W b3 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group may have are L b1 Examples of substituents that the hydrocarbon group may have include groups similar to those exemplified above. L b31 Preferably, the component is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-). W b3 Examples of alicyclic hydrocarbon groups and aromatic hydrocarbon groups include the following: In the alicyclic hydrocarbon groups and aromatic hydrocarbon groups shown below, * and ** represent bonding sites, and * is X 1 or L b31 This represents the bonding site with , where ** represents a hydrogen atom, substituent, or L b2 This represents the bonding site with L, and at least one ** is L b2 This represents the bonding site with . Furthermore, in the alicyclic hydrocarbon group shown below, the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-. When the -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO-, -SO-, or -SO2-, it is preferable that an ether ring, ester ring (lactone), carbonate ester ring, sulfonic acid ester ring (sultone), or acetal ring is formed. In formula TIFF2026110561000042.tif37164 (B1-A1), L b2The carbon atoms are preferably single bonds or chain hydrocarbon groups having 1 to 12 carbon atoms (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), and are single bonds, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -**(L b21 and L b22 Either one represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. 2 represents -O-, -CO-O-, -O-CO-, or -O-CO-O-. * and ** represent bonding sites, and ** is Y b1 This represents the bonding site with L. b21 , X 2 and L b22 It is more preferable that the total number of carbon atoms is 12 or less. In equation (B1-A1), Y b1 It is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms that may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms that may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms that may have substituents, and even more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms that may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), or an aromatic hydrocarbon group having 6 to 10 carbon atoms that may have substituents. Specifically, it is more preferably a group represented by the following formulas (Y1) to (Y36). In formulas (Y1) to (Y36), R Yb is a hydrogen atom or Y b1 Among the substituents that the cyclic hydrocarbon group may have, represent an alkyl group having 1 to 4 carbon atoms, R Yc is a hydrogen atom or Y b1 This represents substituents that the cyclic hydrocarbon group may have, and * represents L b2This represents the bonding site. The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formula may have other substituents, although they are not specifically shown in the following formula. TIFF2026110561000043.tif83160

[0039] The anion represented by formula (B1-A1) is preferably the anion represented by formulas (B1-A1-1) to (B1-A1-85) [hereinafter, depending on the formula number, it may be referred to as "anion (B1-A1-1)", etc.], and more preferably the anion represented by any of formulas (B1-A1-1) to (B1-A1-4), formula (B1-A1-9), formula (B1-A1-10), formula (B1-A1-24) to (B1-A1-33), formula (B1-A1-36) to (B1-A1-40), or formula (B1-A1-47) to (B1-A1-85). TIFF2026110561000044.tif216160

[0040] TIFF2026110561000045.tif248149

[0041] TIFF2026110561000046.tif255157

[0042] Here R i2 ~R i7 These are, independently of each other, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. i8 For example, this is an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by a combination thereof, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. A41 This is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 This expresses the same meaning as above. An example of anion represented by formula (B1-A1) is the anion described in Japanese Patent Publication No. 2010-204646.

[0043] Preferred anions represented by formula (B1-A1) include those represented by formulas (B1a-1) to (B1a-82), respectively. Among these, anions represented by any of the following are preferred: formulas (B1a-1) to (B1a-4), formulas (B1a-7) to (B1a-11), formulas (B1a-14) to (B1a-30), and formulas (B1a-35) to (B1a-70). TIFF2026110561000047.tif177153

[0044] TIFF2026110561000048.tif252162

[0045] TIFF2026110561000049.tif131166

[0046] The anion represented by equation (B1-A2) is expressed by the following equation: TIFF2026110561000050.tif23100[In formula (B1-A2), L b2 and Y b1 This has the same meaning as formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and the -CH2- contained in the alkyl group may be replaced with -O- or -CO-. nb4 represents an integer between 1 and 5. When nb4 is 2 or greater, the bases within the parentheses may be the same or different. nb3 represents an integer between 0 and 4. When nb3 is 2 or greater, multiple R b1 They may be the same or different from one another. However, the condition 1 ≤ nb4 + nb3 ≤ 5 must be satisfied.

[0047] In equation (B1-A2), L b2 Examples of hydrocarbon groups and Y b1 Examples of cyclic hydrocarbon groups include L in formula (B1), to the extent permitted by the upper limit of the number of carbon atoms. b2 Examples of hydrocarbon groups and Y b1Examples of cyclic hydrocarbon groups are the same as those shown. b2 The hydrocarbon group, Y b1 The substituents that the methyl group and cyclic hydrocarbon group may have are also the L of formula (B1) b2 The hydrocarbon group, Y b1 Examples of substituents that the methyl group and cyclic hydrocarbon group may have are the same as those mentioned above. These hydrocarbon groups, methyl groups, and cyclic hydrocarbon groups may have one or more substituents. L b2 Preferably, is a chain-like hydrocarbon group having 1 to 12 carbon atoms (the -CH2- contained in the chain-like hydrocarbon group may be replaced with -O- or -CO-), and more preferably, *-CO-OL b41 -(L b41 * is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. - This represents the bonding site with the benzene ring to which it is bonded. b41 The carbon group is preferably a single bond or a chain-like hydrocarbon group having 1 to 3 carbon atoms, and more preferably *-CO-O-. Y b1 It is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms that may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms that may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms that may have substituents, and Y of formula (B1-A1) b1 or L b1 It is even more preferable that the group is an alicyclic hydrocarbon group or an aromatic hydrocarbon group as exemplified above. Specifically, it is preferably a group represented by formulas (Y1) to (Y36) described above, and more preferably a group represented by formulas (Y1) to (Y19) described above. Y b1The substituents that the cyclic hydrocarbon group may have are preferably halogen atoms or C1-C6 alkyl groups (the -CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-), more preferably fluorine atoms, iodine atoms, or C1-C4 alkyl groups (the -CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-), even more preferably fluorine atoms, iodine atoms, hydroxyl groups, C1-C3 alkoxy groups, or C1-C4 alkyl groups, and even more preferably fluorine atoms, iodine atoms, hydroxyl groups, or C1-C4 alkyl groups. b1 The substituents may be protecting groups or leaving groups (acid-unstable or base-unstable groups) commonly used in the field.

[0048] In formula (B1-A2), nb4 is preferably an integer from 1 to 4, more preferably an integer from 1 to 3, even more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 The binding position is SO3 - The following structure is preferable, where the benzene ring is meta-substituted relative to the bonded position. TIFF2026110561000051.tif25105[In the above formula, L b2 , Y b1 , R b1 nb3 has the same meaning as formula (B1-A2). In formula (B1-A2), if nb4 is 2 or more, multiple L b2 and Y b1 It is preferable that these are the same group.

[0049] R b1 Examples of alkyl groups having 1 to 6 carbon atoms include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, and hexyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 4, and more preferably 1 to 3. Rb1 Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. Groups in which the -CH2- group in an alkyl group is replaced with -O- or -CO- include hydroxyl groups, carboxyl groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, oxy groups, and carbonyl groups. These replaced groups are similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. R b1 Each of these is preferably independently a halogen atom or a C1-C4 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), more preferably a fluorine atom, an iodine atom, or a C1-C3 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methoxy group, or a methyl group. nb3 is preferably an integer between 0 and 3, and more preferably an integer between 0 and 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 It is preferable that R is a halogen atom, b1 It is more preferable that nb3 is a fluorine atom or an iodine atom. When nb3 is 2, R b1 Preferably, one of them is a halogen atom, and the other is a halogen atom or an alkyl group having 1 to 4 carbon atoms, R b1 It is more preferable that one of the atoms is a fluorine atom or an iodine atom, and the other atom is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0050] Examples of anions represented by formula (B1-A2) include the following anions. Among these, anions represented by formulas (B2a-1) to (B2a-32) are preferred, and anions represented by formulas (B2a-1) to (B2a-11) and (B2a-16) to (B2a-20) are more preferred. The following anions are some Rb1 The figure is omitted and may include substituents that are not shown. TIFF2026110561000052.tif132158

[0051] TIFF2026110561000053.tif49138

[0052] Examples of acid generators (B2) include salts represented by the following formula. TIFF2026110561000054.tif1192[In formula (B2), A 1 represents a nitrogen atom or a carbon atom. L b2’ represents a divalent hydrocarbon group having 1 to 24 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-. Y b1’ represents a methyl group which may have substituents or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO- or -SO2-. nb5 represents an integer of 2 or 3. 1 If it is a nitrogen atom, then nb5 is 2, and A 1 If is a carbon atom, then nb5 is 3. The groups in parentheses may be the same or different from each other, and two groups in parentheses combine to form A 1 A ring containing the element may be formed. Z2 + This represents an organic cation.

[0053] In equation (B2), L b2’ and Y b1’ An example of this is L in formula (B1-A1). b2 and Y b1 Similar bases can be cited. L b2 ' is a single bond, *-L b23 -, *-L b23 -X 2 - or *-Lb23 -X 2 -W 2 -X 3 -(L b23 X represents a chain-like hydrocarbon group having 1 to 6 carbon atoms, which may contain a fluorine atom. 2 and X 3 These independently represent -O-, -CO-O-, -O-CO-, -O-CO-O-, or -O-. 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-. * represents the bonding site with SO2. ) is preferable. Y b1 ' is preferably a methyl group having a fluorine atom or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), and more preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have substituents. Specifically, it is preferably a trifluoromethyl group or a group represented by formulas (Y1) to (Y36) as exemplified in formula (B1-A1). In the salt anion represented by formula (B2), two -SO2-L b2 '-Y b1 ' together becomes A 1 When forming a ring containing this, for example, an anion represented by formula (B2') can be cited. TIFF2026110561000055.tif21112[In formula (B2'), A 1 , Y b1 ', L b2 ' and nb5 have the same meaning as formula (B2). W b4 This represents a disulfonylimide ring or disulfonylmethide ring having 2 to 12 carbon atoms, which may contain a fluorine atom. W b4The disulfonylimide ring or disulfonylmethide ring may have 3 to 12 carbon atoms, preferably 3 to 6 carbon atoms, and it is preferable that the hydrogen atoms of the methylene group contained in the ring are replaced with fluorine atoms.

[0054] The following are examples of anions in the salt represented by formula (B2). Among these, the anions represented by formulas (B3a-1), (B3a-2), (B3a-12) to (B3a-14) are preferred. TIFF2026110561000056.tif174164

[0055] TIFF2026110561000057.tif28117[In formula (B4), all symbols have the same meaning as described above.] In equation (B4), L b14 and L b15 An example of this is L in formula (B1). b1 Or L in formula (B1-A1) b3 The same type of group can be cited as an example. Ar B4 and Ar B5 Examples of aromatic hydrocarbon groups include phenylene groups, naphthylene groups, anthrylene groups, biphenylene groups, and phenanthrylene groups. The bonding site can be at any position. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. Ar B4 and Ar B5 The substituents that the aromatic hydrocarbon group may have include halogen atoms, hydroxyl groups, cyano groups, carboxyl groups, C1-C12 alkyl groups, C1-C6 fluorinated alkyl groups, C1-C12 alkoxy groups, and groups formed by combining two or more of these groups. These substituents are described in R B4 and R B5 Examples similar to those exemplified earlier can be given. Ar B4 and Ar B5 The ring formed by the substituents together is formed by the ammonium compounds bonded to each other. B4 and ArB5 Any ring composed of the above may contain heteroatoms, etc., as exemplified by the substituents. Specifically, examples include rings in which the -CH2- contained in a fluorene ring, benzofluorene ring, dibenzofluorene ring, dihydroanthracene ring, xatene ring, thioxatene ring, anthron ring, or dihydroanthracene ring is replaced with -SO- or -SO2-, etc. Among them, Ar B4 and Ar B5 The group is preferably an aromatic hydrocarbon group having 6 to 10 carbon atoms, which may have substituents; more preferably an aromatic hydrocarbon group having 6 to 10 carbon atoms, which may have a halogen atom, a hydroxyl group, an alkyl group having 1 to 12 carbon atoms, or an alkyl fluoride group having 1 to 6 carbon atoms; even more preferably an aromatic hydrocarbon group having 6 to 10 carbon atoms, which may have a fluorine atom, an iodine atom, an alkyl group having 1 to 6 carbon atoms, or an alkyl fluoride group having 1 to 3 carbon atoms; and even more preferably a phenylene group or a naphthylene group. Ar B4 and Ar B5 If is a phenylene group which may have substituents, the bond position of the fluorene ring is L b14 and L b15 The bonding position may be ortho, meta, or para, but it is preferably meta or para, and more preferably para.

[0056] R B4 and R B5 Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. R B4 and R B5 Examples of hydrocarbon groups having 1 to 18 carbon atoms include chain-type hydrocarbon groups such as alkyl groups and alkanediyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. These groups are similar to those exemplified herein, within the limits permitted by the upper limit of carbon atoms. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 12, more preferably 1 to 9, even more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. Furthermore, in the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain-like hydrocarbon groups may be combined. Also, any of these groups may be bonded to a benzene ring or the like.

[0057] R B4 and R B5 If the -CH2- contained in the hydrocarbon group represented by is replaced by -O-, -CO-, -S-, -SO-, or -SO2-, the number of carbon atoms before replacement shall be the total number of carbon atoms in the hydrocarbon group. This number may be one or two or more. As mentioned above, examples of groups in which the -CH2- contained in a hydrocarbon group is replaced with -O-, -S-, -SO-, -SO2-, or -CO- include hydroxyl groups, thiol groups, carboxyl groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkylthio groups, alkylsulfonyl groups, oxy groups, carbonyl groups, thio groups, sulfonyl groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, alkanediylthio groups, alkanediylsulfonyl groups, cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Furthermore, groups in which the -CH2- contained in alicyclic hydrocarbon groups and groups formed by combining alicyclic hydrocarbon groups and aromatic hydrocarbon groups is replaced with -O-, -S-, -SO-, -SO2-, or -CO- include the same groups as those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms.

[0058] R B4 and R B5 The substituents that the hydrocarbon group may have include halogen atoms, cyano groups, nitro groups, and the like. Examples of halogen atoms include the same groups as those described above. The hydrocarbon group may have one substituent or more substituents. R B4 and R B5 However, if it is a hydrocarbon group having a halogen atom, R B4 and R B5 Examples of hydrocarbon groups having halogen atoms include chain hydrocarbon groups having halogen atoms such as haloalkyl groups, alicyclic hydrocarbon groups having halogen atoms, and aromatic hydrocarbon groups having halogen atoms. A haloalkyl group refers to an alkyl group having a halogen atom, and examples include C1-C12 alkyl fluorides, C1-C12 alkyl chlorides, C1-C12 alkyl bromides, and C1-C12 alkyl iodides. Examples of haloalkyl groups include C1-C12 perfluoroalkyl groups (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1-9, more preferably 1-6, even more preferably 1-4, and even more preferably 1-3. The -CH2- group in the haloalkyl group may be replaced with -O- or -CO-, etc. Examples of such groups include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, and haloalkylcarbonyloxy groups. Specifically, examples include haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, and haloalkylcarbonyloxy groups having 2 to 11 carbon atoms. For example, a group in which one or more hydrogen atoms of the above-executed groups are replaced with halogen atoms can be used. mB4 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. mB5 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. R B4 and R B5 Each of these is preferably independently a halogen atom, a C1-C6 haloalkyl group, or a C1-C6 alkyl group (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), more preferably a fluorine atom, an iodine atom, a C1-C6 haloalkyl group, or a C1-C6 alkyl group (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), and more preferably a fluorine atom, an iodine atom, a C1-C4 haloalkyl group, or a C1-C4 alkyl group (the alkyl group may contain The -CH2- may be replaced with -O- or -CO-. It is more preferably a fluorine atom, an iodine atom, a hydroxyl group, a C1-C4 alkyl group, a C1-C4 haloalkyl group or a C1-C3 alkoxy group, it is even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a C1-C4 alkyl group, a C1-C4 perfluoroalkyl group or a C1-C3 alkoxy group, and it is even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a methoxy group, an ethoxy group or a hydroxyl group.

[0059] The following are examples of anions in the salt represented by formula (B4). Among these, the anions represented by formulas (B4a-1) to (B4a-4) and (B4a-11) to (B4a-14) are preferred. TIFF2026110561000058.tif126158

[0060] Furthermore, in another form of the acid generator (B), a salt obtained by replacing the anion in the salt represented by formula (B1) with a carboxylate anion is also suitably used as the acid generator (B). Examples of carboxylic acid anions include the following: TIFF2026110561000059.tif41155

[0061] Z1 + and Z2 + Also Z4 + and Z5 + As for the organic cation, ZI in formula (I) + Examples of cations similar to organic cations include: The acid generator (B) is a combination of the anion and the organic cation described above, and these can be combined arbitrarily. Preferably, the acid generator (B) is formula (B1a-1) to formula (B1a-4), formula (B1a-7) to formula (B1a-11), formula (B1a-14) to formula (B1a-30), formula (B1a-35) to formula (B1a-70), formula (B2a-1) to formula (B2a-11), formula (B2a-16) to formula (B2a-20), formula (B3a-1) to formula (B3 a-3) Examples include combinations of an anion represented by any of the following formulas: (B3a-11) to (B3a-14), (B4a-1) to (B4a-4), or (B4a-11) to (B4a-14), and a cation (b2-1), (b2-2), (b2-3), (b2-4), or (b2-5).

[0062] Preferably, the acid generator (B) is represented by formulas (B1-1) to (B1-106), (B2-1) to (B2-20), (B3-1) to (B3-28), and (B4-1) to (B4-16), respectively. Among these, those containing arylsulfonium cations are preferred, and those represented by formulas (B1-1) to (B1-3), (B1-5) to (B1-7), (B1-11) to (B1-14), (B1-20) to (B1-26), (B1-29), (B1-31) to (B1-105), (B2-1) to (B2-20), (B3-1) to (B3-28), and (B4-1) to (B4-16) are particularly preferred. TIFF2026110561000060.tif159153

[0063] TIFF2026110561000061.tif254159

[0064] TIFF2026110561000062.tif255157

[0065] TIFF2026110561000063.tif252160

[0066] TIFF2026110561000064.tif253162

[0067] TIFF2026110561000065.tif250150

[0068] TIFF2026110561000066.tif247152

[0069] TIFF2026110561000067.tif244143

[0070] TIFF2026110561000068.tif110127

[0071] In the resist composition of the present invention, the content of the acid generator (B) is preferably 0.1% by mass or more and 99.9% by mass or less, more preferably 1% by mass or more and 45% by mass or less, even more preferably 1% by mass or more and 40% by mass or less, and even more preferably 3% by mass or more and 40% by mass or less, based on the solid content of the resist composition. Furthermore, when the resin (A) described later is included, the content of the acid generator (B) is preferably 1 part by mass or more and 50 parts by mass or less, more preferably 1 part by mass or more and 45 parts by mass or less, even more preferably 3 parts by mass or more and 35 parts by mass or less, based on 100 parts by mass of resin (A). In the resist composition of the present invention, the total content of the acid generator is preferably 0.1% by mass or more and 99.9% by mass or less, more preferably 1% by mass or more and 45% by mass or less, even more preferably 1% by mass or more and 40% by mass or less, and even more preferably 3% by mass or more and 40% by mass or less, based on the solid content of the resist composition. Furthermore, when the resin (A) described later is included, the total content of the acid generator is preferably 1 part by mass or more and 50 parts by mass or less, more preferably 1 part by mass or more and 45 parts by mass or less, even more preferably 1 part by mass or more and 40 parts by mass or less, based on 100 parts by mass of resin (A).

[0072] <Resin (A)> Resin (A) contains structural units having acid-unstable groups (hereinafter sometimes referred to as "structural unit (a1)"). Preferably, resin (A) further contains structural units other than structural unit (a1). Examples of structural units other than structural unit (a1) include structural units that do not have acid-unstable groups (hereinafter sometimes referred to as "structural unit (s)") and structural units derived from other monomers known in the art.

[0073] <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid-unstable group (hereinafter sometimes referred to as "monomer (a1)"). The acid-unstable group contained in resin (A) is preferably the group represented by formula (1) (hereinafter also referred to as group (1)) and / or the group represented by formula (2) (hereinafter also referred to as group (2)). TIFF2026110561000069.tif2298[In formula (1), R a1 , R a2 and R a3 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group consisting of a combination thereof, or R a1 and R a2 They bond with each other to form alicyclic hydrocarbon groups with 3 to 20 carbon atoms, R a3 This represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent either 0 or 1, and at least one of ma and na represents 1. * indicates a connection site. TIFF2026110561000070.tif2278[In formula (2), R a1’ and R a2’ Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a3’ This represents a hydrocarbon group with 1 to 20 carbon atoms, or R a1’ R represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. a2’ and R a3’ These atoms bond to each other to form a heterocyclic group having 3 to 20 carbon atoms, and the -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-, and the hydrocarbon group and the heterocyclic group may have halogen atoms. X represents either an oxygen atom or a sulfur atom. 'na' represents either 0 or 1. * indicates a connection site.

[0074] R a1 , R a2 and R a3Examples of alkyl groups in this context include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, and octyl groups. R a1 , R a2 and R a3 Examples of alkenyl groups in this context include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. R a1 , R a2 and R a3 The alicyclic hydrocarbon group in this compound may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates a bonding site). a1 , R a2 and R a3 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16. TIFF2026110561000071.tif10159R a1 , R a2 and R a3 Examples of aromatic hydrocarbon groups in this context include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl groups. Examples of combined groups include groups that combine alkyl groups and alicyclic hydrocarbon groups as described above (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. Preferably, ma is 0 and na is 1. R a1 and R a2 -C(R a1 )(R a2 )(R a3 Examples of such groups include the following: Alicyclic hydrocarbon groups preferably have 3 to 12 carbon atoms. * indicates a bond site with -O-. TIFF2026110561000072.tif27138

[0075] R a1’ , R a2’ and R a3’ Examples of hydrocarbon groups in this context include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these are R a1 , R a2 and R a3 The same types of elements mentioned above can be cited. R a2’ and R a3’ When they bond to each other and form a heterocyclic group with the carbon atoms to which they are bonded and X, -C(R a1’ )(R a2’)-XR a3’ The following groups are examples. * indicates a binding site. TIFF2026110561000073.tif19124R a1’ and R a2’ Preferably, at least one of them is a hydrogen atom. na' is preferably 0. R a1 , R a2 , R a3 , R a1’ , R a2’ and R a3’ The halogen atoms that may be present include fluorine atoms, chlorine atoms, bromine atoms, or iodine atoms.

[0076] The following are examples of base (1): In equation (1), R a1 , R a2 and R a3 A group in which the parentheses is an alkyl group, ma=0, and na=1. A tert-butoxycarbonyl group is preferred as the group. In equation (1), R a1 , R a2 However, these combine with the carbon atoms to which they bond to form an adamantyl group, R a3 A group that is an alkyl group, with ma=0 and na=1. In equation (1), R a1 and R a2 Each of them is an alkyl group independently, and R a3 This is an adamantyl group with ma=0 and na=1. The following are specific examples of group (1). * indicates a bonding site. TIFF2026110561000074.tif149164

[0077] The following are specific examples of group (2). * indicates a bonding site. TIFF2026110561000075.tif55153

[0078] The monomer (a1) is preferably a monomer having an acid-unstable group and an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer having an acid-unstable group. Among (meth)acrylic monomers having acid-unstable groups, those having alicyclic hydrocarbon groups with 5 to 20 carbon atoms are preferred. If a resin (A) having structural units derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in the resist composition, the resolution of the resist pattern can be improved.

[0079] Structural units derived from (meth)acrylic monomers having group (1) include structural units represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)), structural units represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1)), or structural units represented by formula (a1-2) (hereinafter sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2), and more preferably, it is at least one or two structural units selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). These may be used individually or in combination of two or more. TIFF2026110561000076.tif44144[In formulas (a1-0), (a1-1), and (a1-2), all symbols have the same meaning as described above.]

[0080] R a01 , R a4 , R a5 Examples of halogen atoms in this context include fluorine, chlorine, bromine, or iodine atoms. R a01 , R a4 , R a5Examples of alkyl groups that may have halogen atoms include trifluoromethyl, difluoromethyl, methyl, perfluoroethyl, 2,2,2-trifluoroethyl, 1,1,2,2-tetrafluoroethyl, ethyl, perfluoropropyl, 2,2,3,3,3-pentafluoropropyl, propyl, perfluorobutyl, 1,1,2,2,3,3,4,4-octafluorobutyl, butyl, perfluoropentyl, 2,2,3,3,4,4,5,5,5-nonafluoropentyl, pentyl, hexyl, perfluorohexyl, chloromethyl, bromomethyl, and iodomethyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl or ethyl group, and more preferably a methyl group. R a01 , R a4 and R a5 This is preferably a hydrogen atom or a methyl group, and more preferably a methyl group. L a01 , L a1 and L a2 Preferably, an oxygen atom or *-O-(CH2) k01 It is -CO-O- (where k01 is preferably an integer from 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 , R a03 , R a04 , R a6 and R a7 The alkyl groups, alkenyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and combinations thereof in formula (1) are R a1 , R a2 and R a3 Similar groups to those listed above can be cited. R a02 , R a03 , and R a04 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a6 and Ra7 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 5 to 12, and more preferably 5 to 10. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 12, and more preferably 6 to 10. In groups formed by combining an alkyl group and an alicyclic hydrocarbon group, it is preferable that the total number of carbon atoms in the combined alkyl group and alicyclic hydrocarbon group is 18 or less. In groups formed by combining an alkyl group and an aromatic hydrocarbon group, it is preferable that the total number of carbon atoms in the combined alkyl group and aromatic hydrocarbon group is 18 or less. R a02 and R a03 Preferably, this is a C1-C6 alkyl group that may have a halogen atom or a C6-C12 aromatic hydrocarbon group that may have a halogen atom, and more preferably, a methyl group, ethyl group, phenyl group or naphthyl group that may have a halogen atom. R a04 Preferably, this is a C1-C6 alkyl group which may have a halogen atom, or a C5-C12 alicyclic hydrocarbon group which may have a halogen atom, and more preferably a methyl group, ethyl group, cyclohexyl group, or adamantyl group which may have a halogen atom. R a6 and R a7Preferably, the group is an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom; more preferably, it is a methyl group, ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group, or naphthyl group which may have a halogen atom; and even more preferably, it is an ethyl group, isopropyl group, t-butyl group, ethenyl group, or phenyl group which may have a halogen atom. m1' is preferably an integer between 0 and 3, and more preferably 0 or 1. n1 is preferably an integer between 0 and 10, more preferably an integer between 0 and 8, even more preferably an integer between 0 and 3, and even more preferably 0 or 1. n1' is preferably 0 or 1.

[0081] Examples of structural units (a1-0) include structural units represented by any of the formulas (a1-0-1) to (a1-0-24) and R in structural units (a1-0). a01 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom), or another alkyl group are given, and structural units represented by any of the formulas (a1-0-1) to (a1-0-10), (a1-0-13), (a1-0-14), (a1-0-19) to (a1-0-24) are preferred. TIFF2026110561000077.tif119160

[0082] Examples of structural units (a1-1) include structural units derived from monomers described in Japanese Patent Publication No. 2010-204646. In particular, structural units represented by any of formulas (a1-1-1) to (a1-1-7) and R in structural unit (a1-1) a4 A structural unit in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group is preferred, and a structural unit represented by any of formulas (a1-1-1) to (a1-1-4) is more preferred. TIFF2026110561000078.tif35170

[0083] The structural unit (a1-2) is a structural unit represented by any of the formulas (a1-2-1) to (a1-2-20), and R in the structural unit (a1-2). a5 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group include structural units represented by any of the formulas (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20). TIFF2026110561000079.tif92164

[0084] When resin (A) contains structural units (a1-0) and / or structural units (a1-1) and / or structural units (a1-2), the total content of these is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, relative to the total structural units of resin (A). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%. When resin (A) contains structural units (a1-0), the content is 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, even more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, and even more preferably 35 mol% or more, relative to the total structural units of resin (A). Also, 80 mol% or less is mentioned, preferably 75 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, and even more preferably 60 mol% or less. Specifically, 5 to 80 mol% is mentioned, preferably 5 to 75 mol%, more preferably 10 to 70 mol%, even more preferably 10 to 65 mol%, and even more preferably 10 to 60 mol%. When resin (A) contains structural unit (a1-1) and / or structural unit (a1-2), the total content of these is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, relative to the total structural units of resin (A). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is 10 to 90 mol%, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, even more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and even more preferably 20 to 70 mol%.

[0085] Examples of structural units having a base (2) in structural unit (a1) include the structural unit represented by formula (a1-4) (hereinafter sometimes referred to as "structural unit (a1-4)"). TIFF2026110561000080.tif31119[In formulas (a1-4), all signs have the same meaning as described above.]

[0086] R a1 and R a17 The halogen atoms and alkyl groups that may have halogen atoms in the formula are R of formulas (a1-0) to (a1-2). a01 , R a4 and R a5 Examples similar to those exemplified earlier can be given. R a1 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, a hydrogen atom, a methyl group, or an ethyl group is more preferred, and a hydrogen atom or a methyl group is even more preferred. R a17The alkoxy groups, alkoxyalkyl groups, alkoxyalkoxy groups, alkylcarbonyl groups, and alkylcarbonyloxy groups in this specification are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. The number of carbon atoms in the alkoxy group is preferably 1 to 4, more preferably 1 to 3. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, even more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. The number of carbon atoms in the alkoxyalkyl group is preferably 2 to 8, more preferably 2 to 4. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably an alkoxyalkyl group having 2 to 4 carbon atoms, even more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 8, more preferably 2 to 4. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, and even more preferably a methoxyethoxy group or an ethoxyethoxy group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 4 carbon atoms, more preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and even more preferably an acetyl group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 4 carbon atoms, more preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and even more preferably an acetyloxy group. R a17 The group is preferably a halogen atom, a hydroxyl group, a carboxyl group, a C1-C4 alkyl group which may have a halogen atom, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0087] A a11Examples of alkanediyl groups include linear groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. Examples of branched alkanediyl groups include symmetric alkanediyl groups, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, and undecane-1,10-diyl group. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 4, even more preferably 1 to 3, and even more preferably 1 or 2. R a18 Examples of alkyl groups include methyl, ethyl, n-propyl, isopropyl, n-butyl, and tert-butyl groups. A a11 The -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a18 Examples of groups that can be replaced by - include hydroxyl groups, carboxyl groups, carbonyl groups, oxy groups, amino groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylamino groups, peptide groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, alkanediylsulfonyl groups, alkanediylthio groups, and alkanediylamino groups. These replaced groups are similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. For example, A a11 The -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a18 The bases that have been replaced by - include *-O-, *-CO-O-, *-O-CO-, and *-CO-OA.a12 -CO-O-, *-O-CO-A a12 -O-, *-OA a12 -CO-O-, *-CO-OA a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 - are some examples. In particular, *-CO-O- and *-CO-OA a12 -CO-O-, *-OA a12 -CO-O-, *-CO-NR a18 - is preferable. Here, A a12 * represents an alkanediyl group with 1 to 8 carbon atoms, and * represents R a1 This represents the bonding site with the carbon atom to which it is bonded. a12 The alkanediyl group is, within the limits allowed by the upper limit of the number of carbon atoms, A a11 Similar alkanediyl groups can be cited. A a11 These are single bonds, *-CO-O- or *-CO-OA a12 It is preferably -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-. na1 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. mc is preferably 0 or 1.

[0088] R a34 , R a35 and R a36 R in equation (2) a1’ , R a2’ and R a3’ Examples similar to those exemplified earlier can be given. R a35 and R a36 Examples of divalent heterocyclic groups with 3 to 20 carbon atoms that are formed when these atoms bond with each other and together with the -CO- groups they bond to include the following groups: * represents the bonding site, and one of them is R a34 This is the junction site. TIFF2026110561000081.tif16105

[0089] R a34 Preferably, it is a hydrogen atom. R a35 Preferably, this is a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination thereof, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36 The alkyl group and alicyclic hydrocarbon group in R are preferably unsubstituted. a36 In this context, the aromatic hydrocarbon group is preferably an aromatic ring having an aryloxy group with 6 to 10 carbon atoms.

[0090] -OC(R) in structural units (a1-4) a34 )(R a35 )-OR a36 It is removed upon contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxyl group or a carboxyl group. -X a1 -OC(R a34 )(R a35 )-OR a36 In the case of a benzene ring, A a11 The bond may be at the orthogonal, metagonal, or paragonal position relative to the bond site. In particular, it is preferable that at least one bond is at the orthogonal or paragonal position, and more preferably at the paragonal position. In the case of a naphthalene ring, A a11 If the bond position is at position 1, it can bond to any of positions 2 through 8, A a11 If the bond position is at position 2, it may bond to position 1 or any of positions 3 through 8. In particular, A a11If the bonding position is at position 1, it is preferable that at least one bond is at positions 3 to 6, and more preferably at position 3 or 4. a11 If the bonding position is at position 2, it is preferable that the bond is at positions 4 through 7, and more preferably at position 5 or 6.

[0091] Examples of structural units (a1-4) include monomer-derived structural units described in Japanese Patent Publication No. 2010-204646. Preferably, structural units represented by formulas (a1-4-1) to (a1-4-42) and R in structural unit (a1-4). a1 Examples of structural units in which the hydrogen atom corresponding to is replaced by a halogen atom, a haloalkyl group, or an alkyl group are given, and more preferably, structural units represented by formulas (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20), respectively. TIFF2026110561000082.tif117160

[0092] TIFF2026110561000083.tif77168

[0093] If resin (A) contains structural units (a1-4), the content of these units is preferably 10 mol% or more, more preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, relative to the total amount of all structural units of resin (A). Also, it is preferably 95 mol% or less, more preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0094] Structural units derived from (meth)acrylic monomers having group (2) include the structural unit represented by formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). TIFF2026110561000084.tif4558[In formulas (a1-5), all symbols have the same meaning as described above.] R in equation (a1-5) a8 The halogen atoms and alkyl groups that may have halogen atoms in the formula are R of formulas (a1-0) to (a1-2). a01 , R a4 and R a5 Examples similar to those exemplified earlier can be given. In equation (a1-5), R a8 The preferred element is a hydrogen atom, a methyl group, or a trifluoromethyl group. L 51 An oxygen atom is preferred. L 52 and L 53 Preferably, one of them is -O- and the other is -S-. s1 is preferably 1. s1' is preferably an integer between 0 and 2. Z a1 A single bond or *-CH2-CO-O- is preferred.

[0095] Examples of structural units (a1-5) include monomer-derived structural units described in Japanese Patent Publication No. 2010-61117. Among these, structural units represented by formulas (a1-5-1) to (a1-5-4) are preferred, and structural units represented by formula (a1-5-1) or (a1-5-2) are more preferred. TIFF2026110561000085.tif31130 When resin (A) contains structural units (a1-5), the content of these units is preferably 1 mol% or more, more preferably 2 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, and even more preferably 25 mol% or more, relative to the total structural units of resin (A). Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, 1 to 50 mol% is preferred, 3 to 45 mol% is more preferred, 5 to 40 mol% is even more preferred, and 5 to 30 mol% is even more preferred.

[0096] Examples of structural units (a1) having a base (1) include the structural unit represented by formula (a1-6) (hereinafter sometimes referred to as "structural unit (a1-6)"). TIFF2026110561000086.tif3479[In formulas (a1-6), all symbols have the same meaning as described above.] R in equation (a1-6) a61 The halogen atoms and alkyl groups that may have halogen atoms in the formula are R of formulas (a1-0) to (a1-2). a01 , R a4 and R a5Examples similar to those exemplified earlier can be given. R a61 The preferred element is a hydrogen atom, a methyl group, or a trifluoromethyl group. R a62 , R a63 , R a64 and R a65 Examples of alkyl groups in this context include methyl, ethyl, propyl, butyl, pentyl, and hexyl groups. C1-C4 alkyl groups are preferred, C1-C3 alkyl groups are more preferred, and methyl or ethyl groups are even more preferred. R a62 , R a63 and R a64 Examples of cyclic hydrocarbon groups in this context include alicyclic hydrocarbon groups and aromatic hydrocarbon groups. The alicyclic hydrocarbon group may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12. Examples of aromatic hydrocarbon groups include phenylene groups and naphthylene groups. Substituents that the cyclic hydrocarbon group may have include halogen atoms, hydroxyl groups, C1-C6 alkyl groups, C1-C6 alkoxy groups, C2-C12 alkoxyalkyl groups, C2-C12 alkoxyalkoxy groups, C2-C4 alkylcarbonyl groups, C2-C4 alkylcarbonyloxy groups, acryloyloxy groups, or methacryloyloxy groups. R a62 and R a63 Examples of rings formed by the bonding of these elements include adamantane rings, cyclopentane rings, or cyclohexane rings. Specifically, R a62 and R a63 -C(R) when they bond to each other to form a ring a62 )(R a63 )(R a64Examples of such groups include the following: * indicates a bonding site with an oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, and more preferably 3 to 12. TIFF2026110561000087.tif34110

[0097] L a61 and L a62 Examples of C1-C4 alkanediyl groups in this compound include methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, and 2-methylpropane-1,2-diyl group. L a61 and L a62 Preferably, each of these is independently a methylene group or an ethylene group. X a61 Preferably, it is a single bond or -CO-O-*, and more preferably a single bond. X a62 Preferably, a single bond or *-OL a61 - and more preferably, a single bond.

[0098] Examples of aromatic hydrocarbon groups with 6 to 20 carbon atoms in Ar include phenylene group, o-methylphenylene group, m-methylphenylene group, p-methylphenylene group, p-ethylphenylene group, p-tert-butylphenylene group, 1-naphthylene group, 2-naphthylene group, 1-antrylene group, 9-antrylene group, biphenylene group, 1-phenanthrylene group, and 2-phenanthrylene group. Substituents that the aromatic hydrocarbon group may have include halogen atoms, hydroxyl groups, C1-C6 alkyl groups, C1-C6 alkoxy groups, C2-C12 alkoxyalkyl groups, C2-C12 alkoxyalkoxy groups, C2-C4 alkylcarbonyl groups, C2-C4 alkylcarbonyloxy groups, acryloyloxy groups, or methacryloyloxy groups. These groups are the same as those exemplified above. For alkyl groups, C1-C4 alkyl groups are preferred, methyl or ethyl groups are more preferred, and methyl groups are even more preferred. For alkoxy groups, C1-C4 alkoxy groups are preferred, methoxy or ethoxy groups are more preferred, and methoxy groups are even more preferred. For alkoxyalkyl groups, C2-C8 alkoxyalkyl groups are preferred, methoxymethyl or ethoxyethyl groups are more preferred, and methoxymethyl groups are even more preferred. For alkoxyalkoxy groups, C2-C8 alkoxyalkoxy groups are preferred, methoxyethoxy or ethoxyethoxy groups are more preferred. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. Preferred substituents are halogen atoms, hydroxyl groups, C1-C4 alkyl groups, C1-C4 alkoxy groups, or C2-C8 alkoxyalkoxy groups; more preferably fluorine atoms, iodine atoms, hydroxyl groups, methyl groups, methoxy groups, ethoxy groups, ethoxyethoxy groups, or ethoxymethoxy groups; and even more preferably fluorine atoms, iodine atoms, hydroxyl groups, methyl groups, methoxy groups, or ethoxyethoxy groups. Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxyl group.

[0099] Examples of structural units (a1-6) include those represented by formulas (a1-6-1) to (a1-6-44), with those represented by formulas (a1-6-1) to (a1-6-9) and (a1-6-37) to (a1-6-44) being preferred, those represented by formulas (a1-6-1), (a1-6-2), (a1-6-4), (a1-6-5), (a1-6-7), (a1-6-8), and (a1-6-37) to (a1-6-44) being more preferred, and those represented by formulas (a1-6-7), (a1-6-8), and (a1-6-37) to (a1-6-44) being even more preferred. In the following structural units, R a61 A structural unit in which the hydrogen atom corresponding to is replaced by a methyl group, etc., and in the following structural units, R a61 Structural units in which the corresponding methyl group is replaced by a hydrogen atom or the like can also be listed as structural units (a1-6). TIFF2026110561000088.tif151166

[0100] TIFF2026110561000089.tif80165 When resin (A) contains structural units (a1-6), the content of these units is preferably 3 mol% or more, more preferably 5 mol% or more, more preferably 7 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more, relative to the total structural units of resin (A). Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 60 mol%.

[0101] In addition, the following structural units (a1) can also be listed. TIFF2026110561000090.tif33167 When resin (A) contains structural units represented by formulas (a1-7-1) to (a1-7-7), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, relative to the total structural units of resin (A). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 95 mol% is preferred, 15 to 90 mol% is more preferred, 20 to 85 mol% is even more preferred, 20 to 70 mol% is even more preferred, and 20 to 60 mol% is particularly preferred.

[0102] In addition, the following structural units (a1) can also be listed. TIFF2026110561000091.tif51121 When resin (A) contains structural units represented by formulas (a1-8-1) to (a1-8-3), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, relative to the total structural units of resin (A). Also, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 60 mol% is preferred, 15 to 55 mol% is more preferred, 20 to 50 mol% is even more preferred, 20 to 45 mol% is even more preferred, and 20 to 40 mol% is particularly preferred.

[0103] <Structural unit (s)> Structural units (s) are derived from monomers that do not have acid-unstable groups (hereinafter sometimes referred to as "monomer(s)"). Monomers known in the resist field that do not have acid-unstable groups can be used to derive structural units (s). The structural units (s) preferably have a hydroxyl group, a carboxyl group, or a lactone ring. If a resin containing a structural unit having a hydroxyl group or a carboxyl group and not having an acid-unstable group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and not having an acid-unstable group (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved. In addition to the structural units described above, structural units (s) may also include structural units having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), structural units having a non-leaved hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), structural units having a slutone structure (hereinafter sometimes referred to as "structural unit (a6)"), structural units that decompose upon exposure to generate acid (hereinafter sometimes referred to as "structural unit (a7)"), or other structural units well known in the art.

[0104] <Structural Unit (a2)> Structural unit (a2) is a structural unit represented by formula (a2) and has an alcoholic hydroxyl group, a phenolic hydroxyl group, or a carboxyl group. TIFF2026110561000092.tif3792[In formula (a2), R a2 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a28 - may be used instead. R a28 This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21-CH2- represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR a28 -It may be replaced with -SO2-. L a22 - represents a chain hydrocarbon group having 1 to 12 carbon atoms, which may have single bonds or fluorine atoms, and the -CH2- contained in the chain hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR a28 -It may be replaced with -SO2-. na2 represents an integer between 1 and 5. When na2 is 2 or greater, multiple L a22 They may be the same or different from each other. R in equation (a2) a2 The halogen atoms and alkyl groups that may have halogen atoms in the formula are R of formulas (a1-0) to (a1-2). a01 , R a4 and R a5 Examples similar to those exemplified earlier can be given. R a2 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, a hydrogen atom, a methyl group, or an ethyl group is more preferred, and a hydrogen atom or a methyl group is even more preferred.

[0105] A a21 As for the alkanediyl group, A in formula (a1-4) a11 Similar alkanediyl groups can be cited. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 4, even more preferably 1 to 3, and even more preferably 1 or 2. R a28 Examples of alkyl groups include methyl, ethyl, n-propyl, isopropyl, n-butyl, and tert-butyl groups. A a21 These are single bonds, *-CO-O- or *-CO-OA a22It is preferably -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-. a22 The alkanediyl group is, within the limits allowed by the upper limit of the number of carbon atoms, A a21 The same alkanediyl group can be cited as an example.

[0106] L a21 The hydrocarbon group in this context is a saturated or unsaturated hydrocarbon group with a (Na2+1) valency, and includes linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and other cyclic hydrocarbon groups. It may also be a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group). L a21 Examples of chain-like hydrocarbon groups include 2- to 6-valent chain-like hydrocarbon groups such as alkanediyl groups, alkanetriyl groups, alkanetetrayl groups, alkampentile groups, and alkanehexyl groups. Examples of alkanediyl groups include A a21 Similar alkanediyl groups can be cited. Examples of alkanetriyl groups include methanetriyl, ethanetriyl, propanetriyl, butanetriyl, pentanetriyl, hexanetriyl, heptanetriyl, octantriyl, nonanetriyl, decantriyl, undecanetriyl, dodecanetriyl, tridecanetriyl, tetradecanetriyl, pentadecanetriyl, hexadecantriyl, and heptadecantriyl. Examples of alkanetetrayl groups include methanetetrayl, ethanetetrayl, propanetetrayl, butanetetrayl, pentanetetrayl, hexanetetrayl, heptanetetrayl, octanetetrayl, nonanetetrayl, decanetetrayl, undecanetetrayl, dodecanetetrayl, tridecanetetrayl, tetradecanetetrayl, pentadecanetetrayl, hexadecanetetrayl, and heptadecanetetrayl. Examples of alkanpentile groups include ethanepentile, propanepentile, butanepentile, pentanepentile, and hexanepentile groups. Examples of alkane hexyl groups include ethane hexyl group, propane hexyl group, butane hexyl group, pentane hexyl group, and hexane hexyl group. Other examples include groups in which one or more hydrogen atoms of the aforementioned group are replaced by bonding sites. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, even more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of monocyclic and polycyclic alicyclic hydrocarbon groups in this specification include those similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Examples include cycloalkanediyl groups, cycloalkanetriyl groups, cycloalkanetetrayl groups, cycloalkampentile groups, and cycloalkanehexyl groups, which are alicyclic hydrocarbon groups with a valency of 2 to 6. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, cyclodecanetetrayl group, and monocyclic alicyclic hydrocarbon groups. Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanedriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, and bicyclo[3.3.0]octanetetrayl group. Other examples include groups in which one or more hydrogen atoms of the aforementioned group are replaced by bonding sites. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, even more preferably 3 to 16, even more preferably 3 to 12, even more preferably 6 to 12, and particularly preferably 6 to 10. L a21 Examples of aromatic hydrocarbon groups in this context include divalent to hexavalent aromatic hydrocarbon groups such as arylene groups, arenetriyl groups, arenetetrayl groups, arenepentile groups, and arenehexile groups. Specifically, examples include phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, benzenetriyl group, naphthalentriyl group, anthracenatelyyl group, biphenylentriyl group, phenanthrentriyl group, benzenetetrayl group, naphthalenetetrayl group, anthracenetetrayl group, biphenylenetetrayl group, phenanthrenetetrayl group, and the like. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, even more preferably 6 to 14, even more preferably 6 to 12, and even more preferably 6 to 10. Other examples include groups in which one or more hydrogen atoms of the aforementioned group are replaced by bonding sites. Examples of groups formed by combining two or more types include groups formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, groups formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, groups formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and groups formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group and an aromatic hydrocarbon group. In the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Also, any of the groups may be A a21 and L a22 They may be bound together. The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO-, -SO2-, -NR a28Groups replaced by - or -CO- include hydroxyl groups, carboxyl groups, thiol groups, amino groups, alkoxy groups, alkylthio groups, alkoxycarbonyl groups, alkylsulfonyl groups, alkylamino groups, alkylpeptide groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, oxy groups, carbonyl groups, thio groups, sulfonyl groups, peptide groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, alkanediyloxycarbonyloxy groups, alkanediylsulfonyl groups, alkanediylthio groups, alkanediylamino groups, alkanediylpeptide groups, cycloalkoxy groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups. Groups in which one or more hydrogen atoms of these groups are replaced at the bonding site are also included. These substituted groups may be similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Furthermore, the -CH2- groups contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining them are -O-, -S-, -CO-, -SO-, -NR a28 Groups replaced with - or -SO2- include those similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. L a21 The hydrocarbon group in may have one or more substituents. Examples of substituents include halogen atoms, C1-C12 haloalkyl groups, C1-C16 alkyl groups (where the -CH2- group is replaced by -O- or -CO-), acryloyloxy groups, or methacryloyloxy groups. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. L a21The hydrocarbon group in the compound can substantially have substituents such as haloalkyl groups by having a halogen atom as a substituent. Examples of haloalkyl groups include alkyl fluorides, alkyl chlorides, alkyl bromides, alkyl iodides, etc., and include chloromethyl, bromomethyl, iodomethyl, fluoromethyl, difluoromethyl, trifluoromethyl, perfluoroethyl, perfluoropropyl, and perfluorobutyl groups. Among these, haloalkyl groups having 1 to 4 carbon atoms are preferred, and haloalkyl groups having 1 to 3 carbon atoms are more preferred. The number of carbon atoms in the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. L a21 The hydrocarbon group contains a branched structure, L a21 The alkyl group may substantially have substituents such as alkyl groups. Examples of alkyl groups include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group, octyl group, nonyl group, decyl group, undecyl group, and dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 10, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. L a21 The -CH2- contained in the hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR a28 - or -SO2- etc., the group L a21 It can substantially have substituents such as hydroxyl groups, carboxyl groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, thiol groups, alkylthio groups, alkylsulfonyl groups, alkoxyalkyl groups, alkoxyalkoxy groups, alkoxycarbonyloxy groups, amino groups, alkylamino groups, alkylpeptide groups, acryloyloxy groups, and methacryloyloxy groups. L a21Preferably, the substituents that the hydrocarbon group in the hydrocarbon group may have are a halogen atom, a C1-C8 haloalkyl group or a C1-C12 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-); more preferably, a halogen atom, a C1-C6 haloalkyl group or a C1-C10 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-); even more preferably, a halogen atom, a C1-C4 haloalkyl group or a C1-C6 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-); even more preferably, a fluorine atom, an iodine atom, a C1-C3 haloalkyl group or a C1-C4 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-); and even more preferably, a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxyl group, or a methoxy group. Also, L a21 When the alkanediyl group is replaced by -O- or -CO-, for example, *-L a23 -X a21 -(L a23 This represents an alkanediyl group with 1 to 8 carbon atoms, X a21 represents -O-, -O-CO-, -CO-O-, or -O-CO-O-, and * represents A a21 It is also preferable that it represents the bonding site with ( ). L a21 This includes single bonds, C1-C12 chain hydrocarbon groups which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), and C3-C20 cyclic hydrocarbon groups which may have substituents (however, the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, -NR a28A group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms that may have substituents and a cyclic hydrocarbon group having 3 to 20 carbon atoms that may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -SO-, -SO2-, -NR a28 Preferably, the -CH2- may be replaced by -O- or -CO-. A chain hydrocarbon group having 1 to 10 carbon atoms that may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or a cyclic hydrocarbon group having 3 to 18 carbon atoms that may have substituents (however, the -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO-, -NR a28 A group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms that may have substituents and a cyclic hydrocarbon group having 3 to 18 carbon atoms that may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -SO-, -SO2-, -NR a28 It is more preferable that it be replaced with - or -CO-.

[0107] L a22 Examples of chain-like hydrocarbon groups having 1 to 12 carbon atoms include linear alkanediyl groups and branched alkanediyl groups. a21 Similar alkanediyl groups can be cited. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. L a22 The fluorine atoms present may be one or two or more. L a22 The -CH2- groups in the chain hydrocarbon group are -O-, -S-, -CO-, -SO-, -NR a28 -Or -SO2- may be replaced, and these replaced groups may be L as long as the upper limit of the number of carbon atoms allows.a21 Examples similar to those exemplified earlier can be given. na2 is preferably an integer between 1 and 4, and more preferably an integer between 1 and 3. L a21 However, as structural units (a2) in the case of single bonds or chain hydrocarbon groups, for example, the following structural units can be cited. Of the following structural units, R a2 Structural units in which the corresponding methyl group is replaced by a hydrogen atom or the like are also suitable structural units for structural unit (a2), similar to the structural units described below. TIFF2026110561000093.tif67168

[0108] When manufacturing a resist pattern from the resist composition of the present invention, if a high-energy beam such as a KrF excimer laser (248 nm), electron beam, or EUV (ultra-ultraviolet light) is used as the exposure light source, a structural unit (a2) having a phenolic hydroxyl group is preferred, and it is more preferable to use the structural unit (a2-A) described later. Furthermore, if an ArF excimer laser (193 nm) or the like is used, a structural unit (a2) having an alcoholic hydroxyl group is preferred, and it is more preferable to use the structural unit (a2-C) described later. The structural unit (a2) may consist of one type alone, or it may consist of two or more types.

[0109] In the structural unit (a2), L a21 In cases where is a cyclic hydrocarbon group, an example of a structural unit having a phenolic hydroxyl group or a carboxyl group is the structural unit represented by formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)"). TIFF2026110561000094.tif31127[In formula (a2-A), all signs have the same meaning as above.]

[0110] R a2 and A a21 These are the same types of bases as those exemplified in equation (a2). R a27R is in equation (a1-4) a17 Similar to the examples given earlier, the same types of bases can be cited. R a27 The group is preferably a halogen atom, a hydroxyl group, a carboxyl group, a C1-C4 alkyl group which may have a halogen atom, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH is A in the case of a benzene ring. a21 The bond may be at the ortho, meta, or para position relative to the bond site. In particular, it is preferable that at least one bond is at the meta or para position, and more preferably at the meta position. In the case of a naphthalene ring, A a21 If the bond position is at position 1, it can bond to any of positions 2 through 8, A a21 If the bond position is at position 2, it may bond to position 1 or any of positions 3 through 8. In particular, A a21 If the bonding position is at position 1, it is preferable that at least one bond is at positions 3 to 6, and more preferably at position 3 or 4. a21 If the bonding position is at position 2, it is preferable that the bond is at positions 4 through 7, and more preferably at position 5 or 6.

[0111] Examples of structural units (a2-A) include monomer-derived structural units described in Japanese Patent Publication No. 2010-204634 and Japanese Patent Publication No. 2012-12577. As for the structural unit (a2-A), the structural unit is represented by formulas (a2-2-1) to (a2-2-32), formula (a2-3-1) to (a2-3-24), and in the structural unit represented by formulas (a2-2-1) to (a2-2-32), formula (a2-3-1) to (a2-3-24), the R in the structural unit (a2-A) a2 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group include these units. TIFF2026110561000095.tif107170

[0112] TIFF2026110561000096.tif83166 When structural units (a2-A) are included in resin (A), the content of structural units (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and even more preferably 20 mol% or more, relative to the total structural units. Furthermore, it is preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, even more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) is derived from the compound represented by formula (a2-A') (hereinafter sometimes referred to as "compound (a2-A)"). TIFF2026110561000097.tif31121[In formula (a2-A'), all signs have the same meaning as above.] Compound (a2-A') may be a commercially available product or may be manufactured by a known method. The structural unit (a2-A) can be incorporated into resin (A) by polymerizing compound (a2-A'). Alternatively, it can be incorporated into resin (A) by polymerizing using structural unit (a1-4) and then treating with an acid such as p-toluenesulfonic acid. Furthermore, the structural unit (a2-A) can be incorporated into resin (A) by polymerizing using acetoxystyrene or the like and then treating with an alkali such as tetramethylammonium hydroxide.

[0113] In the structural unit (a2), L a21 When is a cyclic hydrocarbon group, structural units having an alcoholic hydroxyl group or a carboxyl group include the structural unit represented by formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)"), the structural unit represented by formula (a2-C) (hereinafter sometimes referred to as "structural unit (a2-C)"), and the structural unit represented by formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). TIFF2026110561000098.tif46100[In formula (a2-B) and formula (a2-C), R a2 This has the same meaning as equation (a2). R a27 This has the same meaning as equation (a²-A). L a25 is -O- or *-O-(CH2) k2 -CO-O- represents a bond, and k2 represents an integer from 1 to 7. * represents the bonding site with -CO-. X a2 This represents a single bond or -CO-. R a25 and R a26 Each of these independently represents a hydrogen atom, a methyl group, or a hydroxyl group. nB2 represents an integer between 1 and 5. When nB2 is 2 or greater, multiple X a2 They may be the same or different from one another. nB22 represents an integer between 0 and 8. When nB22 is 2 or greater, multiple R a27 They may be the same or different from one another. nC22 represents an integer between 0 and 10. When nC22 is 2 or greater, multiple R a27 They may be the same or different from each other. L a25 Preferably, -O- or -O-(CH2) f1 The result is -CO-O- (where f1 represents any integer from 1 to 4), and more preferably -O-. R a2 The group is preferably a methyl group. X a2 The bond is preferably a single bond. R a25 Preferably, it is a hydrogen atom. R a26 This is preferably a hydrogen atom or a hydroxyl group. R a27 The group is preferably a halogen atom, a hydroxyl group, a carboxyl group, a C1-C4 alkyl group which may have a halogen atom, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably an integer from 0 to 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. nC22 is preferably an integer from 0 to 6, more preferably an integer from 0 to 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0114] Examples of structural units (a2-B) and structural units (a2-C) include structural units derived from monomers described in Japanese Patent Publication No. 2010-204646, the following structural units, and R in the following structural units. a2Examples of structural units include those in which the corresponding methyl group or hydrogen atom is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Among these, structural units represented by any of the formulas (a2-B-1) to (a2-B-5) and (a2-C-1) to (a2-C-9) are preferred. TIFF2026110561000099.tif81164 When resin (A) contains structural unit (a2-B) or structural unit (a2-C), the content thereof is preferably 1 mol% or more, and more preferably 2 mol% or more, relative to the total structural units of resin (A). Also, it is preferably 45 mol% or less, more preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, it is preferably 1 to 45 mol%, more preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and even more preferably 1 to 10 mol%.

[0115] TIFF2026110561000100.tif51105[In formula (a2-D), R a2 and A a21 These expressions have the same meaning as equation (a2). R a27 This has the same meaning as equation (a²-A). R a21 and R a22 Each of these independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 This represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer between 1 and 5. When nD2 is 2 or greater, the bases within the parentheses may be the same or different. nD22 represents an integer between 0 and 4. When nD22 is 2 or greater, multiple R a27 They may be the same or different from one another. However, 1 ≤ nD² + nD²² ≤ 5. R a21 and Ra22 Examples of alkyl fluoride groups include, independently, trifluoromethyl group, 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, and 4,4,4-trifluorobutyl group. R a21 and R a22 A trifluoromethyl group is preferred as the component. L a24 Examples of alkanediyl groups include methylene group, ethane-1,1-diyl group, propane-1,1-diyl group, and propane-2,2-diyl group. L a24 A single bond or a methylene group is preferred. R a27 The group is preferably a halogen atom, a hydroxyl group, a carboxyl group, a C1-C4 alkyl group which may have a halogen atom, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group. nD2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, even more preferably 1 or 2, and even more preferably 1. Furthermore, it is preferable that nD2 is 1 and the group in parentheses is bonded to the para position. nD22 is preferably an integer between 0 and 3, more preferably an integer between 0 and 2, even more preferably 0 or 1, and even more preferably 0.

[0116] It is more preferable that the structural unit (a2-D) is a structural unit represented by the following formula (a2-D1) (hereinafter sometimes referred to as "structural unit (a2-D1)"). TIFF2026110561000101.tif51109[In formula (a2-D1), R a2 , A a21 , R a27nD2 and nD22 have the same meaning as equation (a2-D). In equation (a2-D1), R a2 This is preferably a hydrogen atom or a methyl group. A a21 The bond is preferably a single bond. R a27 The group is preferably a halogen atom, a hydroxyl group, a carboxyl group, a C1-C4 alkyl group, a C1-C4 haloalkyl group, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group. nD22 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. nD2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, and even more preferably 1 or 2. The following are examples of structural units (a2-D). In the structural units represented by formulas (a2-D-1) to (a2-D-8) in TIFF2026110561000102.tif62168, R a2 In structural units in which the hydrogen atom corresponding to is replaced by a methyl group, etc., and in structural units represented by formulas (a2-D-9) to (a2-D-16), R a2 Structural units in which the corresponding methyl group is replaced by a hydrogen atom or the like can also be given as specific examples of structural unit (a2-D). Among these, structural units represented by formulas (a2-D-1) to (a2-D-8) are preferred, structural units represented by formulas (a2-D-1) to (a2-D-4) are more preferred, and structural unit represented by formula (a2-D-1) is even more preferred. If resin (A) contains structural units (a2-D), the content is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, relative to the total structural units of resin (A). Furthermore, it is preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0117] <Structural unit (a3)> The lactone ring of the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or it may be a fused ring of a monocyclic lactone ring and another ring. Preferably, it may be a γ-butyrolactone ring, an adamantane lactone ring, or a bridging ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0118] The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3), or formula (a3-4). One of these may be included alone, or two or more may be included. TIFF2026110561000103.tif51164[In formulas (a3-1), (a3-2), (a3-3), and (a3-4), L a4 , L a5 and L a6 These are, independently, -O- or *-O-(CH2) k3 This represents a base represented by -CO-O-(where k3 is an integer from 1 to 7). L a7 is -O-, *-OL a8 -O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O- L a8 and L a9 Each of these independently represents an alkanediyl group with 1 to 6 carbon atoms. * indicates a bonding site with a carbonyl group. R a18 , R a19 , R a20 and R a24 Each of these independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 This represents an aliphatic hydrocarbon group with 1 to 4 carbon atoms. R a22 , R a23 and R a25 Each of these independently represents a carboxyl group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer between 0 and 5. q1 represents an integer between 0 and 3. r1 represents an integer between 0 and 3. w1 represents an integer between 0 and 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 They may be the same as each other, or they may be different.

[0119] R a21 , R a22 , R a23 and R a25 Examples of aliphatic hydrocarbon groups in this context include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, and tert-butyl groups. R a18 , R a19 , R a20 and R a24 The halogen atoms and alkyl groups that may have halogen atoms in the formula are R of formulas (a1-0) to (a1-2). a01 , R a4 and Ra5 Examples similar to those exemplified earlier can be given. L a8 and L a9 Examples of alkanediyl groups in this compound include methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. L a4 ~L a6 Each is independently, preferably -O- or *-O-(CH2) k3 In -CO-O-, k3 is an integer from 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and even more preferably an oxygen atom. L a7 Preferably -O- or *-OL a8 It is -CO-O-, and more preferably -O-, -O-CH2-CO-O-, or -O-C2H4-CO-O-. R a18 , R a19 , R a20 and R a24 Preferably, it is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a21 The group is preferably a methyl group. R a22 , R a23 and R a25 Each of these is independently preferably a carboxyl group, a cyano group, or a methyl group. p1, q1, and r1 are each independently, preferably integers from 0 to 2, and more preferably 0 or 1. w1 is preferably an integer between 0 and 2, and more preferably 0 or 1. In particular, formula (a3-4') is preferred over formula (a3-4). TIFF2026110561000104.tif2856(in the formula, R a24 , L a7 (This expresses the same meaning as above.)

[0120] Examples of structural units (a3) ​​include those derived from monomers described in Japanese Patent Publication No. 2010-204646, Japanese Patent Publication No. 2000-122294, and Japanese Patent Publication No. 2012-41274. Examples of structural units (a3) ​​include those represented by any of the formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the said structural units, R in formulas (a3-1) to (a3-4). a18 , R a19 , R a20 and R a24 A structural unit in which the corresponding methyl group is replaced by a hydrogen atom is preferred. TIFF2026110561000105.tif107164 When resin (A) contains structural units (a3), the total content is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, relative to the total structural units of resin (A). Also, it is 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it is 1 to 70 mol%, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, even more preferably 5 to 65 mol%, even more preferably 5 to 60 mol%, and even more preferably 10 to 60 mol%. Furthermore, the content of structural unit (a3-1), structural unit (a3-2), structural unit (a3-3), or structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, and even more preferably 10 mol% or more, relative to the total structural units of resin (A). Also, it is preferably 60 mol% or less, more preferably 55 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, 1 to 60 mol% is preferred, 3 to 60 mol% is more preferred, 3 to 55 mol% is even more preferred, 5 to 55 mol% is even more preferred, 5 to 50 mol% is even more preferred, and 10 to 50 mol% is even more preferred.

[0121] <Structural Unit (a4)> The structural unit represented by formula (a4) is shown below. TIFF2026110561000106.tif2769[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 This represents an aliphatic hydrocarbon group having a halogen atom with 1 to 48 carbon atoms, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-.

[0122] R 42 Aliphatic hydrocarbon groups represented by include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these. Examples of chain-type hydrocarbon groups include linear alkyl groups such as methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl, and octadecyl groups, and branched alkyl groups such as isopropyl and isobutyl groups. Examples of monocyclic or polycyclic alicyclic hydrocarbon groups include monocyclic alicyclic hydrocarbon groups that are monocyclic cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups; and polycyclic alicyclic hydrocarbon groups that are polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates the bonding site). TIFF2026110561000107.tif10146 Examples of groups formed by combinations include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic hydrocarbon group-alkyl group. Examples of alkanediyl groups include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, and hexane-1,6-diyl group; and branched alkanediyl groups such as propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The end of the branched alkanediyl group may be a methyl group. R 42 Examples of halogen atoms contained in the aliphatic hydrocarbon group include fluorine, chlorine, bromine, or iodine atoms. R 42 Groups in which the -CH2- of the aliphatic hydrocarbon group contained in is replaced with -O- or -CO- include hydroxyl groups, carboxyl groups, carbonyl groups, oxy groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, cycloalkoxy groups, cycloalkylalkoxy groups, and groups formed by combining two or more of these groups. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms.

[0123] As a structural unit (a4), R 42 However, it is preferable that it be an aliphatic hydrocarbon group having a fluorine atom, R 42 However, examples of structural units (a4) that are aliphatic hydrocarbon groups containing a fluorine atom include the structural unit represented by formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), the structural unit represented by formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), the structural unit represented by formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and the structural unit represented by formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by formula (a4-1) is the structural unit shown below. TIFF2026110561000108.tif3092[In formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 This represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f This represents an alkanediyl group with 1 to 8 carbon atoms containing a fluorine atom, or a cycloalkanediyl group with 3 to 12 carbon atoms containing a fluorine atom. R 42f This represents a hydrogen atom or a fluorine atom.

[0124] L 41 Examples of alkanediyl groups in R include linear alkanediyl groups and branched alkanediyl groups. 42 Examples similar to those exemplified earlier can be given. L 42f Examples of fluorine-containing alkanediyl groups include fluorine-containing methylene groups, fluorine-containing ethylene groups, fluorine-containing propane-1,3-diyl groups, fluorine-containing butane-1,4-diyl groups, fluorine-containing pentane-1,5-diyl groups, fluorine-containing hexane-1,6-diyl groups, fluorine-containing heptane-1,7-diyl groups, fluorine-containing octane-1,8-diyl groups, and other linear alkanediyl groups containing fluorine atoms; Examples of branched alkanediyl groups having a fluorine atom include ethane-1,1-diyl group having a fluorine atom, propane-1,1-diyl group having a fluorine atom, propane-1,2-diyl group having a fluorine atom, propane-2,2-diyl group having a fluorine atom, pentane-2,4-diyl group having a fluorine atom, 2-methylpropane-1,3-diyl group having a fluorine atom, 2-methylpropane-1,2-diyl group having a fluorine atom, pentane-1,4-diyl group having a fluorine atom, and 2-methylbutane-1,4-diyl group having a fluorine atom. The ends of the branched alkanediyl groups may be methyl groups that may also have a fluorine atom. L 42f Examples of cycloalkanediyl groups containing a fluorine atom include monocyclic cycloalkanediyl groups containing a fluorine atom, such as cyclobutane-1,3-diyl group containing a fluorine atom, cyclopentane-1,3-diyl group containing a fluorine atom, cyclohexane-1,4-diyl group containing a fluorine atom, cyclohexene-3,6-diyl group containing a fluorine atom, cycloheptane-1,4-diyl group containing a fluorine atom, and cyclooctane-1,5-diyl group containing a fluorine atom. Examples of polycyclic cycloalkanediyl groups containing a fluorine atom include norbornane-1,4-diyl group containing a fluorine atom, norbornane-2,5-diyl group containing a fluorine atom, 5-norbornene-2,3-diyl group containing a fluorine atom, adamantane-1,5-diyl group containing a fluorine atom, and adamantane-2,6-diyl group containing a fluorine atom. L 42f The number of fluorine atoms in the alkanediyl group and cycloalkanediyl group having fluorine atoms in the above is 1 or more, and preferably 2 or more. L 42f In the above, the alkanediyl group and cycloalkanediyl group having a fluorine atom are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0125] L 42fThe perfluoroalkanediyl groups in this product include difluoromethylene, perfluoroethylene, perfluoroethylfluoromethylene, perfluoropropane-1,3-diyl, perfluoropropane-1,2-diyl, perfluoropropane-2,2-diyl, perfluorobutane-1,4-diyl, perfluorobutane-2,2-diyl, perfluorobutane-1,2-diyl, perfluoropentane-1,5-diyl, perfluoropentane-2,2-diyl, and perfluoropentane-3 Examples include 3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group. L 42f Examples of perfluorocycloalkanediyl groups in this context include perfluorocyclohexanediyl group, perfluorocyclopentanediyl group, perfluorocycloheptanediyl group, and perfluoroadamantanediyl group.

[0126] L 41 Preferably, it is a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. L 42f The group is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0127] The structural units (a4-1) are the structural units shown below and the R in the structural units (a4-1) within the structural units below. 41One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. The structural unit represented by formula (a4-2) in TIFF2026110561000109.tif55167 is the structural unit shown below. TIFF2026110561000110.tif33101[In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f This represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms, which may contain a fluorine atom, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. R 43f This represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms, which may contain a fluorine atom, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. However, L 43f and R 43f At least one of them has a fluorine atom, L 43f and R 43f The upper limit for the total number of carbon atoms is 21.

[0128] L 43f and R 43f Examples of aliphatic hydrocarbon groups in this context include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these. 43f and R 43f Examples of aliphatic hydrocarbon groups in L 43f and R 43f As long as the upper limit of the total number of carbon atoms allows, R in equation (a4) 42 Examples of aliphatic hydrocarbon groups include those similar to the aliphatic hydrocarbon groups exemplified.

[0129] L 43f The aliphatic hydrocarbon group is preferably an alkanediyl group having 1 to 6 carbon atoms or a group represented by formula (L43f-1). TIFF2026110561000111.tif14120[In formula (L43f-1), s represents either 0 or 1. L 45f and L 46f Each of these independently represents a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, which may contain a fluorine atom. L 47f This represents a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, which may have a single bond or a fluorine atom. X 46f and X 47f These represent -O-, -CO-, -CO-O-, or -O-CO-, respectively, independently. However, L 45f , L 46f , L 47f , X 46f and X 47f The total number of carbon atoms is 7 or less. * and ** are binding sites, where ** is -O-CO-R 43f This is the junction site.

[0130] L in the group represented by formula (L43f-1) 45f , L 46f and L 47f Examples of divalent aliphatic hydrocarbon groups represented by include linear or branched alkanediyl groups and monocyclic or polycyclic divalent alicyclic hydrocarbon groups, as well as divalent aliphatic hydrocarbon groups formed by combining alkanediyl groups and divalent alicyclic hydrocarbon groups. These groups are similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. s is preferably 0.

[0131] The following are examples of groups represented by formula (L43f-1). In the following examples, * and ** represent the bonding site, and ** is -O-CO-R 43f This is the junction site. TIFF2026110561000112.tif47140

[0132] R 43f Preferably, it is an aliphatic hydrocarbon group having a fluorine atom. In this case, the structural unit represented by formula (a4-2) is, for example, the structural unit represented by formula (a4-2A) or (formula a4-2B). TIFF2026110561000113.tif42157[In formulas (a4-2A) and (a4-2B), R 41 and L 43f This represents the same thing as in equation (a4-2). R 43fA This represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom. A 43f represents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may contain a fluorine atom, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. X 43 **-O-CO- or **-CO-O-, where ** is A 43f This represents the connection point. R 43fB This represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may contain a fluorine atom. However, in equation (a4-2A), L 43f and R 43fA The total number of carbon atoms is 21 or less, and in formula (a4-2B), L 43f , A 43f , X 43 and R 43fB The total number of carbon atoms is 21 or less, A 43f and R 43fB At least one of them has at least one fluorine atom. R 43fA The aliphatic hydrocarbon group is R, as long as the upper limit of the number of carbon atoms allows. 42 Examples include aliphatic hydrocarbon groups similar to those exemplified above. R 43fA It is preferably an alkyl group having 1 to 13 fluorine atoms, a cycloalkyl group having 3 to 12 fluorine atoms, or a combination thereof, *-(CF2) n43f -R 42’ (* represents the bonding site with the carbonyl group. n43f represents an integer from 1 to 6. R42’ represents a hydrogen atom or a fluorine atom. ) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. A 43f and R 43fB The aliphatic hydrocarbon group is R in formula (a4), as long as the upper limit of the number of carbon atoms allows. 42 Examples include aliphatic hydrocarbon groups similar to those exemplified above. A 43f It is preferably a divalent chain hydrocarbon group which may have a fluorine atom, a divalent alicyclic hydrocarbon group, or a group which is a combination thereof, more preferably a divalent chain hydrocarbon group which has a fluorine atom, and even more preferably an alkanediyl fluoride group which has 1 to 6 carbon atoms. R 43fB The aliphatic hydrocarbon group which may have a fluorine atom is preferably a chain hydrocarbon group which may have a fluorine atom, an alicyclic hydrocarbon group which may have a fluorine atom, or a group which is a combination thereof, more preferably an alkyl group having 1 to 12 carbon atoms which may have a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms which may have a fluorine atom, or a group which is a combination thereof, such as a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, or a 1,1,2,2,3,3,4,4-o Alkyl fluorides such as fluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, heptyl group, perfluoroheptyl group, octyl group and perfluorooctyl group, cyclopropylmethyl group, cyclopropyl group, cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbornyl group, norbornylmethyl group, perfluoroadamantyl group, and perfluoroadamantylmethyl group are even more preferred.

[0133] In formula (a4-2B), *-A 43f -X43 -R 43fB An example of a structure that the group represented by can take is shown below (* indicates the bonding site with the carbonyl group). TIFF2026110561000114.tif14170

[0134] The structural units represented by formula (a4-2A) are the structural units shown below and the R in the structural units represented by formula (a4-2A) in the structural units below. 41 One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. TIFF2026110561000115.tif99167

[0135] The structural units represented by formula (a4-2B) are the structural units shown below and the R in the structural units represented by formula (a4-2B) in the structural units below. 41 One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. TIFF2026110561000116.tif111164

[0136] Another example of a structural unit (a4) is the structural unit represented by formula (a4-3). TIFF2026110561000117.tif3589[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f This represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms, which may contain a fluorine atom, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. R 44f This represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms, which may contain a fluorine atom, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. However, L 44f and R 44f At least one of them has a fluorine atom, L 44f and R 44f The upper limit for the total number of carbon atoms is 21.

[0137] L 44f and R 44f Examples of aliphatic hydrocarbon groups in this context include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these. 44f and R 44f Examples of aliphatic hydrocarbon groups in L 44f and R 44f As long as the upper limit of the total number of carbon atoms allows, R in equation (a4) 42 Examples of aliphatic hydrocarbon groups include those similar to the aliphatic hydrocarbon groups exemplified. L 44f It is preferably an alkanediyl group having 1 to 14 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), and -(CH2) j1 -,-(CH2) j2 -O-(CH2) j3 - or - (CH2) j4 -CO-O-(CH2) j5 It is more preferable that the group is represented by - (j1 to j5 each independently represent an integer from 1 to 6). It is also even more preferable that it is an alkanediyl group having 1 to 4 carbon atoms (one -CH2- in the alkanediyl group may be replaced by -O-, and one -CH2-CH2- in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f Preferably, the group is an aliphatic hydrocarbon group having 1 to 10 carbon atoms and containing a fluorine atom; more preferably, an alkyl group having 1 to 10 carbon atoms and containing a fluorine atom; more preferably, an alkyl group having 3 to 10 carbon atoms and containing a fluorine atom; even more preferably, an alkyl group having 1 to 10 carbon atoms and containing a fluorine atom; and even more preferably, an alkyl group having 1 to 6 carbon atoms and containing a fluorine atom.

[0138] As a structural unit represented by formula (a4-3), for example, the following structural unit and the structural unit represented by the following formula, R in structural unit (a4-3) 41One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. TIFF2026110561000118.tif83165

[0139] Another example of a structural unit (a4) is the structural unit represented by formula (a4-A). TIFF2026110561000119.tif3673[In formula (a4-A), R 44 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. X 44 * represents a single bond or *-CO-O-. * represents R 44 This represents the bonding site with the carbon atom to which it is bonded. L 44 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms, which may have substituents, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O-, -S-, -SO2-, -SO-, or -CO-. R 45 This represents an alkyl fluoride with 1 to 8 carbon atoms. R 46 L represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 44 It may combine with to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-. mi represents an integer between 1 and 4. When mi is 2 or greater, the bases within the parentheses may be the same or different.

[0140] R 44 The halogen atoms and alkyl groups that may have halogen atoms in the formula are R of formulas (a1-0) to (a1-2). a01 , R a4 and R a5 Examples similar to those exemplified earlier can be given. R 44is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0141] L 44 Examples of the aliphatic hydrocarbon group in include a chain hydrocarbon group, a monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.) alicyclic hydrocarbon group, and a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanpentayl group. These groups include the same groups as those exemplified in this specification as long as the upper limit of the number of carbon atoms permits. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4.

[0142] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include divalent to pentavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, and a cycloalkanpentayl group. These groups include the same groups as those exemplified in this specification as long as the upper limit of the number of carbon atoms permits. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12.

[0143] Examples of the group formed by combining two or more include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, the alicyclic hydrocarbon group and the chain hydrocarbon group may each be combined with two or more. Also, any group may be bonded to X 44 and may be bonded. Examples of groups combining alicyclic hydrocarbon groups and chain hydrocarbon groups include groups in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), groups in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), groups in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), and groups in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group. Examples include groups to which a hydrogenated group is bonded (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), groups to which a chain hydrocarbon group is bonded with a chain hydrocarbon group and a chain hydrocarbon group and a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), and groups to which a chain hydrocarbon group is bonded with a chain hydrocarbon group and a chain hydrocarbon group and a chain hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.). * is X 44 This represents the connection point. Other examples include groups in which one or more hydrogen atoms of the aforementioned group are replaced by bonding sites.

[0144] L 44 The -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms may be replaced with -O-, -S-, -SO-, -SO2-, or -CO-. L 44 If the -CH2- group in an aliphatic hydrocarbon group having 1 to 28 carbon atoms is replaced by -O-, -S-, -SO-, -SO2-, or -CO-, the number of carbon atoms before the replacement shall be considered the number of carbon atoms in the aliphatic hydrocarbon group. Groups in which the -CH2- contained in an aliphatic hydrocarbon group is replaced with -O-, -S-, -SO2-, -SO-, or -CO- include hydroxyl groups, carboxyl groups, thiol groups, alkoxy groups, alkylthio groups, alkoxycarbonyl groups, alkylsulfonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, oxy groups, carbonyl groups, thio groups, sulfonyl groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, alkanediylsulfonyl groups, alkanediylthio groups, cycloalkoxy groups, cycloalkylalkoxy groups, and groups combining two or more of these groups. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Other examples include groups in which one or more hydrogen atoms of the aforementioned group are replaced by bonding sites. Groups in which the -CH2- contained in an alicyclic hydrocarbon group is replaced with -O-, -S-, -SO-, -CO-, or -SO2- include those similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms.

[0145] L 44 The aliphatic hydrocarbon group in may have one or more substituents. Examples of substituents include halogen atoms, C1-C4 haloalkyl groups, C1-C12 alkyl groups, C3-C18 alicyclic hydrocarbon groups, or C6-C18 aromatic hydrocarbon groups (the -CH2- contained in the alkyl group or alicyclic hydrocarbon group may be replaced with -O- or -CO-). Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. C1-C4 haloalkyl groups include C1-C4 alkyl fluorides, C1-C4 alkyl chlorides, C1-C4 alkyl bromides, and C1-C4 alkyl iodides. Examples of haloalkyl groups include C1-C4 perfluoroalkyl groups (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1-3, more preferably 1 or 2. Examples of alkyl groups having 1 to 12 carbon atoms, alicyclic hydrocarbon groups having 3 to 18 carbon atoms, and aromatic hydrocarbon groups having 6 to 18 carbon atoms include those similar to those exemplified herein. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, and even more preferably 3 to 10. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 12, and even more preferably 6 to 10. If the -CH2- contained in the alkyl group is replaced with -O- or -CO-, the number of carbon atoms before replacement shall be the total number of carbon atoms in the alkyl group. Examples of replaced groups include hydroxyl groups, carboxyl groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, and alkoxycarbonyloxy groups. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. The number of carbon atoms in these replaced groups is 10 or less, preferably 9 or less, more preferably 6 or less, even more preferably 4 or less, and even more preferably 3 or less. Furthermore, examples of groups in which the -CH2- contained in an alicyclic hydrocarbon group is replaced with -O- or -CO- include those similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. L44 Examples of substituents that the aliphatic hydrocarbon group in 44 may have include a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (where -CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Fluorine atom, iodine atom, perfluoroalkyl group having 1 to 3 carbon atoms or alkyl group having 1 to 4 carbon atoms (where -CH2- contained in the alkyl group may be replaced by -O- or -CO-) are more preferred, and fluorine atom, iodine atom, trifluoromethyl group, methyl group, hydroxy group or methoxy group are even more preferred. L 44 is R 46If the alkyl fluoride does not form an alicyclic hydrocarbon group, it may be a C1-C12 chain hydrocarbon group which may have substituents (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a C3-C18 alicyclic hydrocarbon group which may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-), or a C1-C6 chain hydrocarbon group which may have substituents and an alicyclic hydrocarbon group which may have substituents It is preferably a group formed in combination with a hydrogenated group (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-), and may have substituents. It may be a chain hydrocarbon group having 1 to 8 carbon atoms (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 12 carbon atoms may have substituents, or may have substituents. More preferably, the group is a combination of a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have substituents (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a chain hydrocarbon group having 1 to 8 carbon atoms which may have substituents (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have substituents, a chain hydrocarbon group having 1 to 6 carbon atoms and It is more preferable that the group is formed by combining a C5- to C12 alicyclic hydrocarbon group which may have substituents (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), or by combining a C5- to C12 alicyclic hydrocarbon group which may have substituents, a C1- to C6 chain hydrocarbon group, and a C5- to C12 alicyclic hydrocarbon group which may have substituents (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-).

[0146] R 45 As for the C1-C8 alkyl fluoride in this, R of formula (a4-2B) 43fBExamples of groups similar to those exemplified above include the alkyl fluoride group. The number of carbon atoms in the alkyl fluoride group is preferably 1 to 6, more preferably 1 to 5, even more preferably 1 to 4, and even more preferably 1 to 3. R 46 In this context, alkyl fluorides with 1 to 6 carbon atoms are R, as long as the upper limit of the carbon number allows. 45 Examples of alkyl fluorides include alkyl fluorides with 1 to 6 carbon atoms. R 45 R 46 In the case of a fluorinated alkyl group having 1 to 6 carbon atoms, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 3 carbon atoms, even more preferably a trifluoromethyl group, a perfluoroethyl group, or a perfluoropropyl group, and even more preferably a trifluoromethyl group. R 45 R 46 When is a hydrogen atom, it is preferably a C1-C6 alkyl fluoride, more preferably a C1-C5 alkyl fluoride, and even more preferably a C3-C5 alkyl fluoride. R 46 is L 44 When it combines with and forms an alicyclic hydrocarbon group having 3 to 12 carbon atoms, R 46 is L 44 Examples of groups formed by bonding with include the group represented by the following formula. In the following formula, * and ** represent bonding sites, and of the two ** symbols, one represents the bonding site with the hydroxyl group and the other represents R 45 This represents the bonding site with L 44A L 44 It is part of the hydrocarbon group and represents a single bond or an alkanediyl group with 1 to 4 carbon atoms. 46 is L 44 The number of carbon atoms in the alicyclic hydrocarbon group formed by bonding with is preferably 3 to 10, more preferably 3 to 8, and even more preferably 3 to 6. TIFF2026110561000120.tif22138R 46 It is preferable that this is a hydrogen atom or a fluorinated alkyl group having 1 to 3 carbon atoms. mi is preferably an integer between 1 and 3, more preferably 1 or 2, and even more preferably 1.

[0147] Examples of structural units (a4-A) include the following structural units. In the following structural units, R 44 Structural units in which the corresponding methyl group is replaced by a hydrogen atom, halogen atom, haloalkyl group, or alkyl group other than a methyl group, and R 44 Structural units in which the corresponding hydrogen atom is replaced by a halogen atom, a haloalkyl group, or an alkyl group can also be given as specific examples of structural unit (a4-A). TIFF2026110561000121.tif120167

[0148] TIFF2026110561000122.tif74170 If resin (A) contains structural units (a4), the content of these units is preferably 1 to 20 mol%, more preferably 2 to 15 mol%, and even more preferably 3 to 10 mol%, relative to the total structural units of resin (A).

[0149] <Structural Unit (a5)> Examples of non-eliminating hydrocarbon groups in structural unit (a5) include groups having linear, branched, or cyclic hydrocarbon groups. Among these, structural unit (a5) is preferably a group having an alicyclic hydrocarbon group. An example of a structural unit (a5) is the structural unit represented by formula (a5-1). TIFF2026110561000123.tif3971[In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 This represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atoms contained in this alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.

[0150] R 52 The alicyclic hydrocarbon group in this compound may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cyclopropyl, cyclobutyl, cyclopentyl, and cyclohexyl groups. Examples of polycyclic alicyclic hydrocarbon groups include adamantyl and norbornyl groups. Examples of aliphatic hydrocarbon groups having 1 to 8 carbon atoms include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl. Examples of substituted alicyclic hydrocarbon groups include the 3-methyladamantyl group. R 52 Preferably, it is an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and more preferably, an adamantyl group, a norbornyl group, or a cyclohexyl group. L 55 Examples of divalent saturated hydrocarbon groups in this context include divalent chain-type saturated hydrocarbon groups and divalent alicyclic saturated hydrocarbon groups, with divalent chain-type saturated hydrocarbon groups being preferred. Examples of divalent chain-type saturated hydrocarbon groups include methylene groups, ethylene groups, propanediyl groups, butanediyl groups, and pentanediyl groups, which are all types of alkanediyl groups. The divalent alicyclic saturated hydrocarbon group may be monocyclic or polycyclic. Examples of monocyclic alicyclic saturated hydrocarbon groups include cycloalkanediyl groups such as cyclopentanediyl and cyclohexanediyl. Examples of polycyclic divalent alicyclic saturated hydrocarbon groups include adamantanediyl and norbornanediyl. L 55 Groups in which the -CH2- contained in the divalent saturated hydrocarbon group represented by is replaced with -O- or -CO- include, for example, the groups represented by formulas (L1-1) to (L1-4). In the following formulas, * and ** represent bonding sites, respectively, and * represents the bonding site with the oxygen atom. TIFF2026110561000124.tif18165[In formula (L1-1), X x1 This represents *-O-CO- or *-CO-O- (* is L x1 This represents the connection site. L x1 This represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 The total number of carbon atoms is 16 or less. In formula (L1-2), L x3 This represents a divalent aliphatic saturated hydrocarbon group with 1 to 17 carbon atoms. L x4 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, L x3 and L x4 The total number of carbon atoms is 17 or less. In formula (L1-3), L x5 This represents a divalent aliphatic saturated hydrocarbon group with 1 to 15 carbon atoms. L x6 and L x7 Each of these independently represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, L x5 , L x6 and L x7 The total number of carbon atoms is 15 or less. In formula (L1-4), L x8 and L x9 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 This represents a divalent alicyclic saturated hydrocarbon group with 3 to 15 carbon atoms. However, L x8 , L x9 and W x1 The total number of carbon atoms is 15 or less. L x1 Preferably, this is a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3 Preferably, it is a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 Preferably, this is a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. W x1 Preferably, this is a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

[0151] Examples of groups represented by formula (L1-1) include the divalent groups shown below. Examples of groups represented by formula (L1-2) in TIFF2026110561000125.tif36148 include the divalent groups shown below. Examples of groups represented by formula (L1-3) in TIFF2026110561000126.tif23130 include the divalent groups shown below. Examples of groups represented by formula (L1-4) in TIFF2026110561000127.tif16147 include the divalent groups shown below. TIFF2026110561000128.tif13167L 55 is preferably a single bond or a group represented by the formula (L1-1).

[0152] As the structural unit (a5-1), there are the following structural units and the methyl group corresponding to R in the structural unit (a5-1) in the following structural units 51 in which the methyl group is replaced by a hydrogen atom. TIFF2026110561000129.tif100150 When the resin (A) contains the structural unit (a5), its content is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, and still more preferably 3 to 15 mol% with respect to all the structural units of the resin (A).

[0153] 〈Structural unit (a6)〉 The structural unit (a6) is a structural unit having a -SO2- group, and preferably has a -SO2- group in the side chain. The structural unit having a -SO2- group may have a linear structure having a -SO2- group, a branched structure having a -SO2- group, or a cyclic structure (monocyclic and polycyclic structures) having a -SO2- group. Preferably, it is a structural unit having a cyclic structure having a -SO2- group, and more preferably, it is a structural unit having a cyclic structure (sultone ring) containing -SO2-O-. As the sultone ring, the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula (T 1 -4). The bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. The polycyclic sultone ring means a bridged ring containing -SO2-O- as an atomic group constituting the ring, and examples include the rings represented by the formula (T 1 -1) and formula (T 1 -2). The sultone ring is represented by the formula (T 1As shown in (2), the ring may contain heteroatoms in addition to -SO2-O- as a group of atoms constituting the ring. Examples of heteroatoms include oxygen atoms, sulfur atoms, or nitrogen atoms, with oxygen atoms being preferred. The sultone ring may have substituents, and examples of substituents include C1-C12 alkyl groups which may have a halogen atom or a hydroxyl group, halogen atoms, hydroxyl groups, cyano groups, C1-C12 alkoxy groups, C6-C12 aryl groups, C7-C12 aralkyl groups, glycidyloxy groups, C2-C12 alkoxycarbonyl groups, and C2-C4 alkylcarbonyl groups. These groups are the same as those exemplified herein. Examples of aryl groups include phenyl, naphthyl, anthryl, p-methylphenyl, p-tert-butylphenyl, p-adamantylphenyl, tolyl, xylyl, cumyl, mesityl, biphenyl, phenanthryl, 2,6-diethylphenyl, and 2-methyl-6-ethylphenyl. Examples of aralkyl groups include benzyl, phenethyl, phenylpropyl, naphthylmethyl, and naphthylethyl groups. From the viewpoint of ease of production of monomers that lead to structural unit (a6), a sultone ring without substituents is preferred. As the sultone ring, the ring represented by the following formula (T1') is preferred. TIFF2026110561000131.tif2665[In formula (T1'), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 This represents a C1-C12 alkyl group which may have a halogen atom or a hydroxyl group, a halogen atom, a hydroxyl group, a cyano group, a C1-C12 alkoxy group, a C6-C12 aryl group, a C7-C12 aralkyl group, a glycidyloxy group, a C2-C12 alkoxycarbonyl group, or a C2-C4 alkylcarbonyl group. ma represents an integer from 0 to 9. When ma is 2 or greater, multiple R 41 They may be the same or different. The connection point can be any position. X 11 This is preferably an oxygen atom or a methylene group, and more preferably a methylene group. R 41 Examples include substituents similar to those of a sultone ring, and C1-C12 alkyl groups which may have a halogen atom or a hydroxyl group are preferred. ma is preferably 0 or 1, and more preferably 0.

[0154] The following rings can be represented by formula (T1'). The bonding site can be at any position. In particular, rings with a bonding site at position 1 or 3 are preferred. TIFF2026110561000132.tif44147

[0155] The structural unit having the -SO2- group preferably further has a group derived from a polymerizable group. Examples of polymerizable groups include vinyl group, acryloyl group, methacryloyl group, acryloyloxy group, methacryloyloxy group, acryloylamino group, methacryloylamino group, acryloylthio group, and methacryloylthio group. In particular, the monomer that leads to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer.

[0156] The structural unit (a6) is preferably a structural unit represented by formula (a6-0). TIFF2026110561000133.tif4077[In formula (a6-0), R x This represents an alkyl group having 1 to 6 carbon atoms, which may contain a halogen atom, a hydrogen atom, or a halogen atom. A xx is an oxygen atom, -N(R c )- or represents a sulfur atom. A xrepresents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the -CH2- contained in the saturated hydrocarbon group is -O-, -CO-, or -N(R d )- may be replaced with this. X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 This expresses the same meaning as above. ma represents an integer from 0 to 9. When ma is 2 or greater, multiple R 41 They may be the same or different. R c and R d Each of these independently represents either a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

[0157] R x R is the R of equation (a1-0). a01 Examples similar to those exemplified above can be given. R x Preferably, it is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. A x Examples of divalent saturated hydrocarbon groups include linear alkanediyl groups, branched alkanediyl groups, and monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and combinations of two or more of these groups are also acceptable. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group Linear alkanediyl groups such as dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, heptadecane-1,17-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group, and propane-2,2-diyl group; Branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group; Monocyclic, divalent, alicyclic saturated hydrocarbon groups such as cycloalkanediyl groups, cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; Examples include polycyclic divalent alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group. A x The bond position to the sultone ring can be any position, but it is preferably at position 1.

[0158] The following structural units (a6-0) can be listed: Among these, structural units represented by formulas (a6-1), (a6-2), (a6-6), (a6-7), (a6-8), and (a6-12) are preferred, and structural units represented by formulas (a6-1), (a6-2), (a6-7), and (a6-8) are more preferred. If resin (A) contains structural units (a6), the content of these units is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, and even more preferably 3 to 30 mol%, relative to the total structural units of resin (A).

[0159] <Structural unit (a7)> The resin (A) may further contain structural units (hereinafter sometimes referred to as "structural unit (a7)") that decompose upon exposure to generate acid. Structural unit (a7) functions in the resist composition in the same way as an acid generator. Specifically, structural unit (a7) is the structural unit described in Japanese Patent Application Publication No. 2016-79235, and is preferably a structural unit having a sulfonic acid anion or carboxylic acid anion and an organic cation in its side chain, or a structural unit having a sulfonium cation and an organic anion in its side chain. The structural unit having a sulfonic acid anion or carboxylic acid anion and an organic cation in its side chain is preferably the structural unit represented by formula (a7-A). TIFF2026110561000135.tif26125[In formula (a7-A), all signs have the same meaning as described above.]

[0160] R a7 R is the R of equation (a1-0). a01 Examples of groups similar to those exemplified in the above include R. a7 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, a hydrogen atom or an alkyl group having 1 to 3 carbon atoms is more preferred, a hydrogen atom, a methyl group or an ethyl group is even more preferred, and a hydrogen atom or a methyl group is even more preferred. R a71 Examples of C1-C6 alkyl groups in this compound include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, and hexyl groups. X a71 These are single bonds, -O-, -CO-, -NR a71 - Preferably, the group is a phenylene group which may have substituents or a combination thereof, and may be a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR a71 -**, *-NR a71 -CO-O-**, *-O-CO-NR a71 -** or *-Ax-Ph-Ay-** is more preferable. In the above base, * and ** represent binding sites, and * is R a7 This represents the bonding site with the bonded carbon atom. Ax and Ay each independently represent one or more bond species selected from the group consisting of single bonds, ether bonds, thioether bonds, amide bonds, ester bonds, and carbonate ester bonds. Ph represents a phenylene group which may have substituents. X a71 However, in the case of a group represented by *-Ax-Ph-Ay-**, it is preferable that it be a linking group represented by the following formula (X10). TIFF2026110561000136.tif3351[In formula (X10), Ax and Ay are independent of each other, R a7 A carbon atom or L bonded to it a71 This represents the type of bond that binds to a given element, and is one or more types of bond selected from the group consisting of single bonds, ether bonds, thioether bonds, ester bonds, carbonate ester bonds, and amide bonds. Rx represents a halogen atom, a hydroxyl group, a C1-C6 alkyl fluoride group, a C1-C18 alkyl group, or a C1-C6 alkoxy group. mx represents an integer between 0 and 4, and if mx is an integer greater than or equal to 2, multiple Rx values ​​may be the same or different from each other. If either Ax or Ay is a single bond, it is preferable that the other is one or more selected from the group consisting of ether bonds, thioether bonds, ester bonds, carbonate ester bonds, and amide bonds. If either Ax or Ay is an amide bond, then -CO-NR a71 A bond represented by - is preferable. The bonding position of Ay on the phenylene group is preferably at the m-position or p-position relative to the bonding position of Ax, and more preferably at the p-position. Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1, or 2. X a71 For example, a single bond, as shown in the following equation (X 10 -1)~Formula(X 10 A group represented by -10) is X 20 -O- or -NR a71 - represents TIFF2026110561000137.tif43162 expression (X 10 -1)~Formula(X 10 The following are specific examples of the group represented by -10): TIFF2026110561000138.tif78161 Among them, X a71 This is a single bond and formula (X10 -1'), expression (X 10 -3')~expression(X 10 It is preferably a group represented by one of the following formulas (X -10'), and is a single bond or a group represented by formula (X 10 -1'), expression (X 10 -4'), expression (X 10 -5'), expression (X 10 -6') and equation (X 10 It is more preferable that the group be represented by any of the following formulas (X) and has a single bond, formula (X 10 The base represented by -1') and formula (X 10 The base or formula (X 10 It is even more preferable that the group be represented by -6').

[0161] L a71 As for the hydrocarbon group, one hydrogen atom is removed from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining two or more of these groups, X a71 and X a72 Groups that bond with L are also mentioned. a72 As for the hydrocarbon group, one hydrogen atom is removed from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining two or more of these groups, X a72 and RA - Examples of groups that bond with it include: L a71 and L a72 Examples of chain-like hydrocarbon groups include groups obtained by removing one hydrogen atom from an alkyl or alkenyl group. Alkyl groups may be linear or branched, and specifically include methyl, ethyl, n-propyl, iso-propyl, n-butyl, sec-butyl, iso-butyl, tert-butyl, pentyl, hexyl, heptyl, octyl, nonyl, decyl, undecyl, dodecyl, tridecyl, tetradecyl, pentadecyl, and heptadecyl groups. Examples of alkenyl groups include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 20, more preferably 1 to 18, and even more preferably 1 to 10. L a71 and L a72 Examples of alicyclic hydrocarbon groups include groups obtained by removing one hydrogen atom from a monocyclic or polycyclic cycloalkyl group. Examples of monocyclic cycloalkyl groups include cyclobutyl, cycloheptyl, cyclohexyl, cyclopentyl, and cyclooctyl groups. L a71 and L a72 Examples of polycyclic cycloalkyl groups include cycloalkyl groups having a cross-linking structure, cycloalkyl groups formed by the condensation of two or more rings, or cycloalkyl groups formed by the spirolinking of two rings. Examples of cycloalkyl groups having a cross-linking structure include norbornyl groups and adamantyl groups. Examples of cycloalkyl groups formed by the condensation of two or more rings include bicyclo[4.4.0]decanyl groups and steroid groups (steroid skeletons). Examples of cycloalkyl groups formed by the spirolinking of two rings include spirocyclic cycloalkyl groups in which one cycloalkyl group selected from the group consisting of cyclopentyl groups, cyclohexyl groups, norbornyl groups, and adamantyl groups is spirolinked to a cycloalkyl group having 5 to 8 carbon atoms. Furthermore, a double bond may be formed between two carbon atoms in the alicyclic hydrocarbon group. More specifically, examples of alicyclic hydrocarbon groups represented by the following formulas include: TIFF2026110561000139.tif28158 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 12, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 18, and more preferably 7 to 12. L a71 and L a72Examples of aromatic hydrocarbon groups include those obtained by removing one hydrogen atom from an aryl group. Examples of aryl groups include phenyl, naphthyl, anthryl, biphenyl, and fluorenyl groups. The number of carbon atoms in the aromatic hydrocarbon group is preferably 5 to 14, more preferably 6 to 14, and even more preferably 6 to 10. L a71 and L a72 If the -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S-, -SO-, or -SO2-, the number of carbon atoms before the replacement shall be considered the number of carbon atoms in the hydrocarbon group. L a71 and L a72 Among the hydrocarbon groups, groups in which the -CH2- contained in the chain hydrocarbon group is replaced with -O-, -CO-, -S-, -SO-, or -SO2- include hydroxyl groups, carboxyl groups, thiol groups, carbonyl groups, oxy groups, thio groups, sulfonyl groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, and alkanediylcarbonyloxy groups. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. L a71 and L a72 Among the hydrocarbon groups, groups in which the -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining them is replaced with -O-, -CO-, -S-, -SO-, or -SO2- include the same groups as those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. L a71 and L a72Examples of groups combining two or more chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups include groups combining the above-mentioned chain hydrocarbon group and alicyclic hydrocarbon group, groups combining the above-mentioned chain hydrocarbon group and aromatic hydrocarbon group, groups combining the above-mentioned alicyclic hydrocarbon group and aromatic hydrocarbon group, and groups combining the above-mentioned chain hydrocarbon group, alicyclic hydrocarbon group and aromatic hydrocarbon group. Groups combining alicyclic hydrocarbon groups and aromatic hydrocarbon groups may also be fused rings. L a71 and L a72 The hydrocarbon group may have substituents such as halogen atoms, cyano groups, and nitro groups. Examples of halogen atoms include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms. L a71 and L a72 However, if the group is a combination of an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, the chain hydrocarbon group may be substantially considered as a substituent of the alicyclic hydrocarbon group or aromatic hydrocarbon group. a71 and L a72 The -CH2- in the chain hydrocarbon group contained in the hydrocarbon group is replaced by -O-, -CO-, -S-, -SO-, or -SO2-, L a71 and L a72 The hydrocarbon group may substantially have substituents such as a hydroxyl group, carboxyl group, alkoxy group, alkylcarbonyl group, alkoxycarbonyl group, alkylcarbonyloxy group, thiol group, alkylthio group, and alkylsulfonyl group. na7 is preferably 0 or 1. ZA in equation (a7-A) + Examples include cations similar to those found in salts represented by formula (B1), etc.

[0162] In equation (a7-A), L a71 and L a72 If the hydrocarbon group is a saturated hydrocarbon group, then in formula (a7-B) described below, A b7 It may also contain groups similar to those exemplified as divalent linking groups. Examples of structural units represented by formula (a7-A) include those represented by formula (a7-A1). TIFF2026110561000140.tif31137[In formula (a7-A1), R a7 , X a71 , L a71 , X a72 na7, RA - and ZA + This expresses the same meaning as above. z7 represents an integer between 0 and 6. Q a7 Q b7 , R z71 and R z72 Each of these independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms, and when z7 is 2 or more, multiple R z71 and R z72 They may be the same or different from each other. Q a7 Q b7 , R z71 and R z72 In this, the perfluoroalkyl group having 1 to 6 carbon atoms or the alkyl group having 1 to 6 carbon atoms is R a7 Examples of groups similar to those exemplified above include the following.

[0163] Examples of structural units represented by formula (a7-A) include the following structural unit, R a7 Examples include structural units in which the group corresponding to the methyl group is replaced by a hydrogen atom, a halogen atom (e.g., a fluorine atom), or a C1-C6 alkyl group which may have a halogen atom (e.g., a trifluoromethyl group), and structural units described in International Publication No. 2012 / 050015. ZA + This represents an organic cation. TIFF2026110561000141.tif205162

[0164] TIFF2026110561000142.tif172161

[0165] The structural unit having a sulfonio group and an organic anion in its side chain is preferably the structural unit represented by formula (a7-B). TIFF2026110561000143.tif28104[In formula (a7-B), R a7 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. A b7 This represents a single bond or a divalent linking group. R b71 This represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms, which may have substituents. R b72 and R b73 Each of these independently represents a hydrocarbon group having 1 to 18 carbon atoms, which may have substituents, and R b72 and R b73 These atoms may bond to each other, forming a ring with the sulfur atom to which they are bonded. A - This represents an organic anion. R a7 Examples of halogen atoms and alkyl groups that may have halogen atoms include halogen atoms and alkyl groups that may have halogen atoms similar to those of formula (a7-A). R b71 Examples of divalent aromatic hydrocarbon groups having 6 to 18 carbon atoms, represented by this formula, include phenylene groups and naphthylene groups. R b72 and R b73 Examples of hydrocarbon groups represented by this symbol include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Examples of alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these are the same as those described above. A b7 Examples of divalent linking groups represented by include divalent saturated hydrocarbon groups having 1 to 18 carbon atoms, and the -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O-, -S-, -SO-, -SO2-, or -CO-. Examples of divalent saturated hydrocarbon groups include divalent chain-type saturated hydrocarbon groups such as linear or branched alkanediyl groups, and monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and combinations thereof are also acceptable. Specifically, linear alkane diyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc.; butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4 Examples include branched alkanediyl groups such as -diyl groups and 2-methylbutane-1,4-diyl groups; divalent monocyclic alicyclic saturated hydrocarbon groups such as monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl groups, cyclopentane-1,3-diyl groups, cyclohexane-1,4-diyl groups, and cyclooctane-1,5-diyl groups; and divalent polycyclic alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl groups, norbornane-2,5-diyl groups, adamantane-1,5-diyl groups, and adamantane-2,6-diyl groups. Examples of groups in which the -CH2- group in a saturated hydrocarbon group is replaced by -O-, -S-, -SO-, -SO2-, or -CO- include the divalent groups shown below. However, the number of carbon atoms before the -CH2- group in the saturated hydrocarbon group is replaced by -O-, -S-, -SO-, -SO2-, or -CO- is 17 or less. In the following formulas, * and ** represent bonding sites, and * is R b71 This represents the connection point. TIFF2026110561000144.tif123162[where, X 3 This represents a divalent saturated hydrocarbon group with 1 to 16 carbon atoms. X 4 This represents a divalent saturated hydrocarbon group with 1 to 15 carbon atoms. X 5 This represents a divalent saturated hydrocarbon group with 1 to 13 carbon atoms. X 6 This represents a divalent saturated hydrocarbon group with 1 to 14 carbon atoms. X 7 This represents a trivalent saturated hydrocarbon group with 1 to 14 carbon atoms. X 8 This represents a divalent saturated hydrocarbon group with 1 to 13 carbon atoms.

[0166] The cation-containing structural units in formula (a7-B) are the structural units and R represented below. a7 Examples include structural units in which the group corresponding to the methyl group is replaced by a hydrogen atom, a halogen atom (e.g., a fluorine atom), or a C1-C6 alkyl group that may have a halogen atom (e.g., a trifluoromethyl group). TIFF2026110561000145.tif80144

[0167] A - Examples of organic anions represented by include sulfonic acid anions, sulfonylimide anions, sulfonylmethide anions, and carboxylic acid anions. - The organic anion represented by is preferably a sulfonic acid anion, and more preferably the sulfonic acid anion is the same as the anion exemplified in acid generator (B). Examples of sulfonylimide anions, sulfonylmethide anions, and carboxylic acid anions are the same as the anions exemplified in acid generator (B).

[0168] Examples of structural units represented by formula (a7-B) include the following structural units: JPEG2026110561000146.jpg95157 When resin (A) contains structural units (a7), the content of structural units (a7) is preferably 1 to 30 mol%, more preferably 2 to 25 mol%, and even more preferably 3 to 20 mol%, relative to the total structural units of resin (A).

[0169] Resin (A) is preferably a resin consisting of structural units (a1) and structural units (s), i.e., a copolymer of monomer (a1) and monomer (s), and more preferably a resin consisting of structural units (a7), structural units (a1), structural units (a2) and / or structural units (a3), structural units (a7), structural units (a1), structural units (a2) and / or structural units (a3), structural units (a4) and / or structural units (a5). The structural unit (a1) is preferably at least one selected from the group consisting of structural unit (a1-0), structural unit (a1-1), structural unit (a1-2) (preferably a structural unit having a cyclohexyl group or a cyclopentyl group), structural unit represented by formula (a1-4), structural unit represented by formula (a1-5), and structural unit represented by formula (a1-6), and more preferably at least one selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). The structural unit (s) is preferably at least one selected from the group consisting of structural units (a2), structural unit (a3), and structural unit (a7). The structural unit (a2) is preferably a structural unit represented by formula (a2-A) or a structural unit represented by formula (a2-C). The structural unit (a3) ​​is preferably at least one selected from the group consisting of a structural unit represented by formula (a3-1), a structural unit represented by formula (a3-2), and a structural unit represented by formula (a3-4). The structural unit (a7) is preferably a structural unit represented by formula (a7-A).

[0170] Each structural unit constituting resin (A) may be used individually or in combination of two or more types, and these structural units can be produced by known polymerization methods (e.g., radical polymerization) using monomers that derive these structural units. The content of each structural unit in resin (A) can be adjusted by the amount of monomer used in polymerization. The weight-average molecular weight of resin (A) is preferably 2,000 or more (more preferably 2,500 or more, even more preferably 3,000 or more) and 50,000 or less (more preferably 30,000 or less, even more preferably 15,000 or less), but it may also contain oligomers with a smaller weight-average molecular weight. In this specification, the weight-average molecular weight is the value obtained by gel permeation chromatography under the conditions described in the examples.

[0171] <Resins other than resin (A)> The resist composition of the present invention may also contain resins other than resin (A). Examples of resins other than resin (A) include resins containing structural units similar to resin (A), except that resin (A) does not contain structural unit (a1) (hereinafter sometimes referred to as "resin (AX)"), resins containing structural unit (a4) and / or structural unit (a5) (hereinafter sometimes referred to as "resin (X)"), etc. Examples of resin (AX) include resins containing structural unit (a2), and resins containing structural unit (a2-A) are preferred. In resin (AX), the content of structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, and even more preferably 15 mol% or more, relative to the total amount of all structural units in resin (AX). Furthermore, it is preferably 80 mol% or less, and more preferably 70 mol% or less. Structural units that resin (X) may further contain include structural unit (a2), structural unit (a3), and structural units derived from other known monomers. In particular, resin (X) is preferably composed only of structural unit (a4) and / or structural unit (a5), and more preferably composed only of structural unit (a4). When resin (X) contains structural unit (a4), the content of structural unit (a4) in resin (X) is preferably 20 mol% or more, more preferably 30 mol% or more, more preferably 40 mol% or more, and even more preferably 45 mol% or more, relative to the total amount of all structural units in resin (X). Also, it is preferably 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is preferably 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, even more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. When resin (X) contains structural unit (a5), the content of structural unit (a5) is preferably 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and even more preferably 45 mol% or more, relative to the total amount of all structural units in resin (X). Furthermore, a value of 100 mol% or less is cited, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, a value of 20 to 100 mol% is cited, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, even more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. Also, if the resin (X) contains structural units (a4) and structural units (a5), the total content of structural units (a4) and structural units (a5) is cited as 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and even more preferably 80 mol% or more, relative to the total of all structural units of the resin (X). Furthermore, a value of 100 mol% or less is cited. Specifically, a value of 40 to 100 mol% is cited, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and even more preferably 80 to 100 mol%. In particular, the resin (X) is preferably a resin consisting only of structural unit (a4) and / or structural unit (a5). In this case, the ratio of structural unit (a4):structural unit (a5) can be 0:100 to 100:0, preferably 10:90 to 90:10, and more preferably 30:70 to 70:30 or 40:60 to 60:40. Each structural unit constituting resin (AX) and resin (X) may be used individually or in combination of two or more types, and these structural units can be produced by known polymerization methods (e.g., radical polymerization) using monomers that induce these structural units. The content of each structural unit in resin (AX) and resin (X) can be adjusted by the amount of monomer used in polymerization. The weight-average molecular weights of resin (AX) and resin (X) are preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less), but oligomers with a smaller weight-average molecular weight may also be included. The means for measuring the weight-average molecular weights of resin (AX) and resin (X) are the same as in the case of resin (A).

[0172] If the resist composition of the present invention contains resin (X), the content of resin (X) is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, even more preferably 1 to 40 parts by mass, even more preferably 1 to 30 parts by mass, and particularly preferably 1 to 8 parts by mass, per 100 parts by mass of resin (A).

[0173] If the resist composition of the present invention contains resin (A), the content of resin (A) is preferably 60% to 99% by mass, more preferably 70% to 99% by mass, even more preferably 80% to 99% by mass, and even more preferably 90% to 99% by mass, relative to the solid content of the resist composition. Furthermore, if resins other than resin (A) are included, the total content of resin (A) and resins other than resin (A) is preferably 60% to 99% by mass, more preferably 70% to 99% by mass, even more preferably 80% to 99% by mass, and even more preferably 90% to 99% by mass, relative to the solid content of the resist composition. The solid content of the resist composition and the resin content thereto can be measured by known analytical means such as liquid chromatography or gas chromatography.

[0174] <Solvent (E)> The solvent (E) content in the resist composition is usually 90% to 99.9% by mass, preferably 92% to 99% by mass, and more preferably 94% to 99% by mass. The solvent (E) content can be measured by known analytical means such as liquid chromatography or gas chromatography. Examples of solvent (E) include glycol ether esters such as ethyl cellosolve acetate, methyl cellosolve acetate, and propylene glycol monomethyl ether acetate; glycol ethers such as propylene glycol monomethyl ether; esters such as ethyl lactate, butyl acetate, amyl acetate, and ethyl pyruvate; ketones such as acetone, methyl isobutyl ketone, 2-heptanone, and cyclohexanone; and cyclic esters such as γ-butyrolactone. One of solvents (E) may be used alone, or two or more may be used.

[0175] <Quencher (C)> Quencher (C) is a basic nitrogen-containing organic compound or a salt that generates an acid weaker than the acid generated from an acid generator (acid generator (B)) (excluding carboxylate salts represented by formula (I)). When the resist composition contains quencher (C), the content of quencher (C) is preferably about 0.01 to 15% by mass, more preferably about 0.01 to 10% by mass, even more preferably about 0.1 to 8% by mass, and even more preferably about 0.1 to 7% by mass, based on the solid content of the resist composition. Basic nitrogen-containing organic compounds include amines and ammonium salts. Amines include aliphatic amines and aromatic amines. Aliphatic amines include primary amines, secondary amines, and tertiary amines. Examples of amines include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylaniline, 2-,3- or 4-methylaniline, 4-nitroaniline, N-methylaniline, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, triethylamine, trimethylamine, tripropylamine, and tributylamine. Amine, tripentylamine, trihexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methylddecylamine, ethyldibutylamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine, ethyldioctylamine, ethyldinonylamine, ethylddecylamine Min, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, triisopropanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3'-dimethyldiphenylmethane, 4,4'-diamino-3,3'-diethyldiphenylmethane, 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridine, 4-methylpyridine, 1,2-di(2-pyridyl)ethanol Examples include 1,2-di(4-pyridyl)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy)ethane, di(2-pyridyl)ketone, 4,4'-dipyridyl sulfide, 4,4'-dipyridyl disulfide, 2,2'-dipyridylamine, 2,2'-dipicolylamine, bipyridine, and the like. Preferably, aromatic amines such as diisopropylaniline are included, and more preferably, 2,6-diisopropylaniline is included. Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, choline, and the like.

[0176] The acidity of a salt that generates an acid with a lower acidity than the acid generated from the acid generator is represented by the acid dissociation constant (pKa). A salt that generates an acid with a lower acidity than the acid generated from the acid generator is a salt having an acid dissociation constant of the acid generated from the salt usually of -3 < pKa, preferably -1 < pKa < 7, and more preferably 0 < pKa < 5. Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator include a salt represented by the following formula, a salt represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. Preferably, it is a salt that generates a carboxylic acid with a lower acidity than the acid generated from the acid generator (a salt having a carboxylic acid anion), more preferably a weak acid inner salt (D), and still more preferably a diphenyliodonium salt containing a phenyl group substituted with a carboxylic acid anion among the weak acid inner salts (D). TIFF2026110561000147.tif73161

[0177] The weak acid inner salt (D) is preferably a diphenyliodonium salt having an iodonium cation to which two phenyl groups are bonded and a carboxylic acid anion substituted for at least one of the two phenyl groups bonded to the iodonium cation, and specifically, salts represented by the following formulas are included. TIFF2026110561000148.tif1874[In formula (D), R D1 and R D2 Each of these independently represents a hydrocarbon group having 1 to 12 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 7 carbon atoms, an acyloxy group having 2 to 7 carbon atoms, an alkoxycarbonyl group having 2 to 7 carbon atoms, a nitro group, or a halogen atom. m' and n' each independently represent an integer from 0 to 4, and if m' is 2 or greater, multiple R D1 They may be the same or different, and if n' is 2 or more, there may be multiple R D2 They may be the same or different. R D1 and R D2 Examples of hydrocarbon groups include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Examples of chain-type hydrocarbon groups include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, hexyl, and nonyl groups. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and may be saturated or unsaturated. Examples include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclononyl, and cyclododecyl groups, as well as norbonyl and adamantyl groups. Examples of aromatic hydrocarbon groups include phenyl group, 1-naphthyl group, 2-naphthyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, 4-ethylphenyl group, 4-propylphenyl group, 4-isopropylphenyl group, 4-butylphenyl group, 4-t-butylphenyl group, 4-hexylphenyl group, 4-cyclohexylphenyl group, anthryl group, p-adamantylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, and other aryl groups. Groups formed by combining these include alkyl-cycloalkyl groups, cycloalkyl-alkyl groups, and aralkyl groups (for example, phenylmethyl group, 1-phenylethyl group, 2-phenylethyl group, 1-phenyl-1-propyl group, 1-phenyl-2-propyl group, 2-phenyl-2-propyl group, 3-phenyl-1-propyl group, 4-phenyl-1-butyl group, 5-phenyl-1-pentyl group, 6-phenyl-1-hexyl group, etc.). Examples of alkoxy groups include methoxy groups and ethoxy groups. Examples of acyl groups include acetyl groups, propanoyl groups, benzoyl groups, and cyclohexanecarbonyl groups. Examples of acyloxy groups include groups in which an oxy group (-O-) is bonded to the above-mentioned acyl group. Examples of alkoxycarbonyl groups include groups in which a carbonyl group (-CO-) is bonded to the above-mentioned alkoxy group. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. R D1 and R D2 Each of these is preferably an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 4 carbon atoms, an acyloxy group having 2 to 4 carbon atoms, an alkoxycarbonyl group having 2 to 4 carbon atoms, a nitro group, or a halogen atom. m' and n' are each independently preferably integers between 0 and 2, and more preferably 0. If m' is 2 or greater, multiple R D1 They may be the same or different, and if n' is 2 or more, there may be multiple R D2 They may be the same or different.

[0178] More specifically, the following salts are examples: TIFF2026110561000149.tif57150

[0179] <Other ingredients> The resist composition of the present invention may optionally contain components other than those described above (hereinafter sometimes referred to as "other components (F)"). There are no particular limitations on other components (F), and additives known in the resist field, such as sensitizers, dissolution inhibitors, surfactants, stabilizers, dyes, etc., can be used.

[0180] <Preparation of resist composition> The resist composition of the present invention can be prepared by mixing a carboxylate salt (I) and, optionally, an acid generator (B), a resin (A), a resin other than resin (A), a solvent (E), a quencher (C), and other components (F). The mixing order is arbitrary and not particularly limited. The mixing temperature can be selected from 10 to 40°C, depending on the type of resin, the solubility of the resin in the solvent (E), etc. The mixing time can be selected from 0.5 to 24 hours, depending on the mixing temperature. There are no particular restrictions on the mixing method, and stirring or other methods can be used. After mixing the components, it is preferable to filter the mixture using a filter with a pore size of approximately 0.003 to 0.2 μm.

[0181] <Method for manufacturing resist patterns> The method for manufacturing a resist pattern of the present invention is: (1) A step of applying the resist composition of the present invention onto a substrate, (2) A step of drying the coated resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the composition layer after exposure, (5) Includes a step of developing the composition layer after heating. The resist composition can be applied to a substrate using commonly used equipment such as a spin coater. Examples of substrates include inorganic substrates such as silicon wafers, and organic substrates with a resist film or the like formed on their surface. Before applying the resist composition, the substrate may be cleaned, or an anti-reflective film or the like may be formed on the substrate. The solvent is removed and a composition layer is formed by drying the coated composition. Drying is performed, for example, by evaporating the solvent using a heating device such as a hot plate (so-called pre-baking), or by using a vacuum device. The heating temperature is preferably 50 to 200°C, and the heating time is preferably 10 to 180 seconds. The pressure when drying under reduced pressure is 1 to 1.0 × 10⁻⁶. 5 It is preferable that the pressure be around Pa. The resulting composition layer is typically exposed using an exposure machine. The exposure machine may be an immersion exposure machine. Various types of exposure light sources can be used, including those that emit ultraviolet laser light such as KrF excimer lasers (wavelength 248 nm), ArF excimer lasers (wavelength 193 nm), and F2 excimer lasers (wavelength 157 nm), those that emit far-ultraviolet or vacuum-ultraviolet harmonic laser light by wavelength conversion of laser light from a solid-state laser light source (such as a YAG or semiconductor laser), electron beams, and those that irradiate with ultra-ultraviolet (EUV) light. In this specification, the irradiation of these radiations is sometimes collectively referred to as "exposure." During exposure, exposure is usually performed through a mask corresponding to the desired pattern. If the exposure light source is an electron beam, exposure may be performed by direct drawing without using a mask. The composition layer after exposure is subjected to heat treatment (so-called post-exposure bake) to promote the deprotection reaction at acid-unstable groups. The heating temperature is usually around 50 to 200°C, preferably around 70 to 150°C. After heating, a chemical treatment (silylation) may be performed to adjust the hydrophilicity or hydrophobicity of the resin on the surface side of the composition. Alternatively, before development, the process of coating the resist composition, drying, exposure, and heating may be repeated on the composition layer after exposure. The heated composition layer is typically developed using a developing apparatus and a developing solution. Development methods include the dip method, paddle method, spray method, and dynamic dispensing method. The development temperature is preferably, for example, 5 to 60°C, and the development time is preferably, for example, 5 to 300 seconds. By selecting the type of developing solution as described below, a positive-type resist pattern or a negative-type resist pattern can be manufactured. When producing a positive resist pattern from the resist composition of the present invention, an alkaline developer is used as the developer. The alkaline developer can be any alkaline aqueous solution used in this field. For example, aqueous solutions of tetramethylammonium hydroxide or (2-hydroxyethyl)trimethylammonium hydroxide (commonly known as choline) can be used. The alkaline developer may also contain a surfactant. It is preferable to wash the resist pattern with ultrapure water after development, and then remove any remaining water on the substrate and pattern. When manufacturing a negative-type resist pattern from the resist composition of the present invention, a developer containing an organic solvent (hereinafter sometimes referred to as "organic developer") is used as the developer. Examples of organic solvents contained in organic developers include ketone solvents such as 2-hexanone and 2-heptanone; glycol ether ester solvents such as propylene glycol monomethyl ether acetate; ester solvents such as butyl acetate; glycol ether solvents such as propylene glycol monomethyl ether; amide solvents such as N,N-dimethylacetamide; and aromatic hydrocarbon solvents such as anisole. In the organic developer, the content of the organic solvent is preferably 90% by mass or more and 100% by mass or less, more preferably 95% by mass or more and 100% by mass or less, and even more preferably substantially composed of only organic solvents. Among these, organic developers containing butyl acetate and / or 2-heptanone are preferred. The total content of butyl acetate and 2-heptanone in the organic developer is preferably 50% by mass or more and 100% by mass or less, more preferably 90% by mass or more and 100% by mass or less, and even more preferably substantially butyl acetate and / or 2-heptanone alone. Organic developers may contain surfactants. Furthermore, organic developers may contain trace amounts of water. During development, the development process may be stopped by substituting a different type of solvent for the organic developer. It is preferable to wash the developed resist pattern with a rinsing solution. The rinsing solution is not particularly limited as long as it does not dissolve the resist pattern, and a solution containing a general organic solvent can be used, preferably an alcohol solvent or an ester solvent. After cleaning, it is preferable to remove any remaining rinse solution from the substrate and patterns.

[0182] <Application> The resist composition of the present invention is suitable as a resist composition for KrF excimer laser exposure, an ArF excimer laser exposure, an electron beam (EB) exposure, or an EUV exposure, and is particularly suitable as a resist composition for electron beam (EB) exposure or an EUV exposure, and is useful for semiconductor microfabrication. [Examples]

[0183] The present invention will be described in more detail with reference to examples. In the examples, "%" and "parts" representing the content or amount used are based on mass unless otherwise specified. The weight-average molecular weight was determined by gel permulation chromatography. The analytical conditions for gel permulation chromatography are as follows: Column: TSKgel Multipore HXL-M x 3 + guard column (manufactured by Tosoh Corporation) Eluent: Tetrahydrofuran Flow rate: 1.0mL / min Detector: RI detector Column temperature: 40℃ Injection volume: 100μl Molecular weight standard: Standard polystyrene (manufactured by Tosoh Corporation) The structure of the compound was confirmed by measuring the molecular ion peak using mass spectrometry (LC: Agilent 1100, MASS: Agilent LC / MSD). In the following examples, the value of this molecular ion peak is indicated as "MASS".

[0184] Example 1: Synthesis of a carboxylate salt represented by formula (I-1) TIFF2026110561000150.tif32140 Mix 1.98 parts of pyridine, 5.84 parts of the compound represented by formula (I-1-b), and 25 parts of tetrahydrofuran, and stir at 23°C for 30 minutes. Then, add dropwise at 0°C to a mixed solution of 4.44 parts of the compound represented by formula (I-1-a) and 10 parts of tetrahydrofuran. Stir the resulting mixture at 23°C for 1 hour, then add 60 parts of ethyl acetate and 30 parts of deionized water, stir at 23°C for 30 minutes, and separate to remove the organic layer. Add 30 parts of deionized water to the recovered organic layer, stir at 23°C for 30 minutes, and separate to remove the organic layer. Repeat this washing procedure five times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged into the concentrate, and the mixture was stirred at 23°C for 30 minutes. The supernatant was then removed and the mixture was concentrated to obtain 8.96 parts of the salt represented by formula (I-1-c). TIFF2026110561000151.tif32156 5.79 parts of the salt represented by formula (I-1-c), 2.99 parts of the salt represented by formula (I-1-d), and 50 parts of chloroform were charged and stirred at 23°C for 3 hours. 25 parts of 5% aqueous oxalic acid were charged to the resulting reaction mixture and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. 25 parts of deionized water were added to the recovered organic layer and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged to the concentrate and stirred at 23°C for 30 minutes, after which the supernatant was removed and the mixture was concentrated to obtain 6.54 parts of the carboxylate salt represented by formula (I-1). MASS(ESI(+)Spectrum):M + 263.1 MASS(ESI(-)Spectrum): M - 499.0

[0185] Example 2: Synthesis of a carboxylate salt represented by formula (I-2) TIFF2026110561000152.tif33140 Mix 1.98 parts pyridine, 8.48 parts of the compound represented by formula (I-2-b), and 40 parts tetrahydrofuran, and stir at 23°C for 30 minutes. Then, add dropwise at 0°C to a mixed solution of 4.44 parts of the compound represented by formula (I-1-a) and 10 parts tetrahydrofuran. Stir the resulting mixture at 23°C for 1 hour, then add 60 parts ethyl acetate and 30 parts deionized water, stir at 23°C for 30 minutes, and separate to remove the organic layer. Add 30 parts deionized water to the recovered organic layer, stir at 23°C for 30 minutes, and separate to remove the organic layer. Repeat this washing procedure five times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged into the concentrate, and the mixture was stirred at 23°C for 30 minutes. The supernatant was then removed and the mixture was concentrated to obtain 10.12 parts of the salt represented by formula (I-2-c). TIFF2026110561000153.tif31158 7.05 parts of the salt represented by formula (I-2-c), 2.99 parts of the salt represented by formula (I-1-d), and 50 parts of chloroform were charged and stirred at 23°C for 3 hours. 25 parts of 5% aqueous oxalic acid were charged into the resulting reaction mixture and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. 25 parts of deionized water were added to the recovered organic layer and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged into the concentrate and stirred at 23°C for 30 minutes, after which the supernatant was removed and the mixture was concentrated to obtain 7.63 parts of the carboxylate salt represented by formula (I-2). MASS(ESI(+)Spectrum):M + 263.1 MASS(ESI(-)Spectrum): M - 624.9

[0186] Example 3: Synthesis of a carboxylate salt represented by formula (I-17) TIFF2026110561000154.tif30138 Mix 1.98 parts of pyridine, 8.48 parts of the compound represented by formula (I-2-b), and 40 parts of tetrahydrofuran, and stir at 23°C for 30 minutes. Then, add dropwise at 0°C to a mixed solution of 3.44 parts of the compound represented by formula (I-17-a) and 10 parts of tetrahydrofuran. Stir the resulting mixture at 23°C for 1 hour, then add 60 parts of ethyl acetate and 30 parts of deionized water, stir at 23°C for 30 minutes, and separate to remove the organic layer. Add 30 parts of deionized water to the recovered organic layer, stir at 23°C for 30 minutes, and separate to remove the organic layer. Repeat this washing procedure five times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged into the concentrate, and the mixture was stirred at 23°C for 30 minutes. The supernatant was then removed and the mixture was concentrated to obtain 8.37 parts of the salt represented by formula (I-17-c). TIFF2026110561000155.tif37164 6.55 parts of the salt represented by formula (I-17-c), 2.99 parts of the salt represented by formula (I-1-d), and 50 parts of chloroform were charged and stirred at 23°C for 3 hours. 25 parts of 5% aqueous oxalic acid were charged to the resulting reaction mixture and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. 25 parts of deionized water were added to the recovered organic layer and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged to the concentrate and stirred at 23°C for 30 minutes, after which the supernatant was removed and the mixture was concentrated to obtain 7.11 parts of the carboxylate salt represented by formula (I-17). MASS(ESI(+)Spectrum):M + 263.1 MASS(ESI(-)Spectrum): M - 574.9

[0187] Example 4: Synthesis of a carboxylate salt represented by formula (I-345) TIFF2026110561000156.tif35131 Mix 1.98 parts pyridine, 9.11 parts of the compound represented by formula (I-15-b), and 40 parts tetrahydrofuran, and stir at 23°C for 30 minutes. Then, add dropwise at 0°C to a mixed solution of 4.44 parts of the compound represented by formula (I-1-a) and 10 parts tetrahydrofuran. Stir the resulting mixture at 23°C for 1 hour, then add 60 parts ethyl acetate and 30 parts deionized water, stir at 23°C for 30 minutes, and separate to remove the organic layer. Add 30 parts deionized water to the recovered organic layer, stir at 23°C for 30 minutes, and separate to remove the organic layer. Repeat this washing procedure five times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged into the concentrate, and the mixture was stirred at 23°C for 30 minutes. The supernatant was then removed and the mixture was concentrated to obtain 11.73 parts of the salt represented by formula (I-15-c). TIFF2026110561000157.tif45164 7.35 parts of the salt represented by formula (I-15-c), 5.61 parts of the salt represented by formula (I-51-d), and 50 parts of chloroform were charged and stirred at 23°C for 3 hours. 25 parts of 5% oxalic acid solution were charged to the resulting reaction mixture and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. 25 parts of deionized water were added to the recovered organic layer and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged to the concentrate and stirred at 23°C for 30 minutes, after which the supernatant was removed and the mixture was concentrated to obtain 10.02 parts of the carboxylate salt represented by formula (I-345). MASS(ESI(+)Spectrum):M + 525.0 MASS(ESI(-)Spectrum): M - 654.9

[0188] Example 5: Synthesis of a carboxylate salt represented by formula (I-347) TIFF2026110561000158.tif45157 6.55 parts of the salt represented by formula (I-17-c), 5.61 parts of the salt represented by formula (I-51-d), and 50 parts of chloroform were charged and stirred at 23°C for 3 hours. 25 parts of 5% aqueous oxalic acid were charged to the resulting reaction mixture and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. 25 parts of deionized water were added to the recovered organic layer and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged to the concentrate and stirred at 23°C for 30 minutes, after which the supernatant was removed and the mixture was concentrated to obtain 10.08 parts of the carboxylate salt represented by formula (I-347). MASS(ESI(+)Spectrum):M + 525.0 MASS(ESI(-)Spectrum): M - 574.9

[0189] Example 6: Synthesis of a carboxylate salt represented by formula (I-342) TIFF2026110561000159.tif44159 Two-hundred-half parts of the salt represented by formula (I-345) and fifty parts of acetonitrile were added, and the mixture was stirred at 23°C for 30 minutes. The mixture was then separated to obtain an organic layer. Twenty-five parts of 10% aqueous sodium carbonate solution were added to the mixture, and the mixture was stirred at 23°C for 30 minutes, after which the organic layer was separated. Fifty-five parts of deionized water were added to the obtained organic layer, and the mixture was stirred at 23°C for 30 minutes, after which the organic layer was separated. This washing procedure was repeated three times. The obtained organic layer was concentrated, and to the concentrated residue, thirty-five parts of tert-butyl methyl ether were added, and the mixture was stirred at 23°C for 30 minutes. The supernatant was removed, and the mixture was concentrated to obtain 1.11 parts of the carboxylate salt represented by formula (I-342). MASS(ESI(+)Spectrum):M + 525.0 MASS(ESI(-)Spectrum): M - 596.8

[0190] Example 7: Synthesis of a carboxylate salt represented by formula (I-344) A solution prepared by mixing 9.89 parts of pyridine, 43.40 parts of the compound represented by formula (I-14-b), and 100 parts of tetrahydrofuran was added dropwise at 0°C to a solution prepared by mixing 22.20 parts of the compound represented by formula (I-1-a) and 100 parts of tetrahydrofuran. The mixture was then heated to 23°C and stirred at 23°C for 1 hour. To the resulting reaction mixture, 400 parts of chloroform and 200 parts of deionized water were added and stirred at 23°C for 30 minutes, after which an organic layer was obtained by liquid-liquid extraction. To the obtained organic layer, 20 parts of deionized water were added and stirred at 23°C for 30 minutes, after which an organic layer was obtained by liquid-liquid extraction. This washing procedure was repeated three times. The obtained organic layer was concentrated, and 30 parts of tert-butyl methyl ether were added to the concentration residue. The mixture was stirred at 23°C for 30 minutes, and the supernatant was removed and concentrated to obtain 64.39 parts of the salt represented by formula (I-14-c). TIFF2026110561000161.tif60155 7.35 parts of the salt represented by formula (I-14-c) and 50 parts of acetonitrile were added and the mixture was stirred at 23°C for 30 minutes. 5.61 parts of the salt represented by formula (I-51-d) and 16.80 parts of 5% sodium bicarbonate aqueous solution were added to the resulting reaction product and the mixture was stirred at 23°C for 5 hours. 100 parts of chloroform and 20 parts of deionized water were added to the resulting mixture and the mixture was stirred at 23°C for 30 minutes, after which the organic layer was obtained by liquid-liquid extraction. 20 parts of deionized water were added to the obtained organic layer and the mixture was stirred at 23°C for 30 minutes, after which the organic layer was obtained by liquid-liquid extraction. This washing operation was repeated three times. The obtained organic layer was concentrated, and 30 parts of tert-butyl methyl ether were added to the concentration residue and the mixture was stirred at 23°C for 30 minutes. The supernatant was removed and the mixture was concentrated to obtain 10.54 parts of the carboxylate salt represented by formula (I-344). MS(ESI(+)Spectrum):M + 525.0 MS(ESI(-)Spectrum):M - 654.9

[0191] Example 8: Synthesis of a carboxylate salt represented by formula (I-341) TIFF2026110561000162.tif39161 Two-hundred-half parts of the salt represented by formula (I-344) and fifty parts of acetonitrile were added, and the mixture was stirred at 23°C for 30 minutes. The mixture was then stirred at 23°C for 30 minutes, and the organic layer was obtained by liquid-liquid extraction. Twenty-five parts of 10% aqueous sodium carbonate solution were added to the mixture, and the mixture was stirred at 23°C for 30 minutes, and the organic layer was obtained by liquid-liquid extraction. Fifty-five parts of deionized water were added to the obtained organic layer, and the mixture was stirred at 23°C for 30 minutes, and the organic layer was obtained by liquid-liquid extraction. This washing procedure was repeated three times. The obtained organic layer was concentrated, and to the concentration residue, thirty-five parts of tert-butyl methyl ether were added, and the mixture was stirred at 23°C for 30 minutes. The supernatant was removed, and the mixture was concentrated to obtain 1.01 parts of the carboxylate salt represented by formula (I-341). MASS(ESI(+)Spectrum):M + 525.0 MASS(ESI(-)Spectrum): M - 596.8

[0192] Synthesis Example 1: Synthesis of a carboxylate salt represented by formula (IX-2) TIFF2026110561000163.tif35125 Mix 1.98 parts of pyridine, 8.48 parts of the compound represented by formula (I-2-b), and 40 parts of tetrahydrofuran, and stir at 23°C for 30 minutes. Then, add dropwise at 0°C to a mixed solution of 2.96 parts of the compound represented by formula (IX-2-a) and 10 parts of tetrahydrofuran. Stir the resulting mixture at 23°C for 1 hour, then add 60 parts of ethyl acetate and 30 parts of deionized water, stir at 23°C for 30 minutes, and separate to remove the organic layer. Add 30 parts of deionized water to the recovered organic layer, stir at 23°C for 30 minutes, and separate to remove the organic layer. Repeat this washing procedure five times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged into the concentrate, and the mixture was stirred at 23°C for 30 minutes. The supernatant was then removed and the mixture was concentrated to obtain 8.08 parts of the salt represented by formula (IX-2-c). TIFF2026110561000164.tif34130 6.31 parts of the salt represented by formula (IX-2-c), 2.99 parts of the salt represented by formula (I-1-d), and 50 parts of chloroform were charged and stirred at 23°C for 3 hours. 25 parts of 5% aqueous oxalic acid were charged to the resulting reaction mixture and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. 25 parts of deionized water were added to the recovered organic layer and stirred at 23°C for 30 minutes, after which the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether were charged to the concentrate and stirred at 23°C for 30 minutes, after which the supernatant was removed and the mixture was concentrated to obtain 7.43 parts of the carboxylate salt represented by formula (IX-2). MASS(ESI(+)Spectrum):M + 263.1 MASS(ESI(-)Spectrum): M - 550.9

[0193] Resin synthesis The compounds (monomers) used in the synthesis of resin (A) are shown below. Hereafter, these compounds will be referred to as "monomers (a1-6-8)," etc., according to their formula numbers. TIFF2026110561000165.tif39112

[0194] Synthesis Example 2 [Synthesis of Resin A1] Monomers (a2-2-4), (a1-6-8), and (a7-A-2) were used as monomers, and they were mixed in a molar ratio [monomer (a2-2-4):monomer (a1-6-8):monomer (a7-A-2)] of 38:49:13. Further, propylene glycol monomethyl ether was added to this monomer mixture in an amount of 1.5 times the total mass of all monomers. Azobisisobutyronitrile was added to the resulting mixture as an initiator in an amount of 8 mol% relative to the total number of moles of all monomers, and polymerization was carried out by heating at 73°C for about 5 hours. Subsequently, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and recovered, resulting in a weight-average molecular weight of approximately 5.5 × 10⁻⁶. 3Resin A1 (polymer) was obtained in a yield of 83%. This resin A1 has the following structural units. TIFF2026110561000166.tif42144

[0195] Synthesis Example 3 [Synthesis of Resin A2] Monomers (a2-2-4) and (a1-6-8) were used as monomers, and they were mixed in a molar ratio [monomer (a2-2-4):monomer (a1-6-8)] of 38:62. Further, propylene glycol monomethyl ether was added to this monomer mixture in an amount of 1.5 times the total mass of all monomers. Azobisisobutyronitrile was added to the resulting mixture as an initiator in an amount of 8 mol% relative to the total number of moles of all monomers, and polymerization was carried out by heating at 73°C for about 5 hours. Subsequently, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered, resulting in a weight-average molecular weight of approximately 5.7 × 10⁻⁶. 3 Resin A2 (polymer) was obtained in a yield of 94%. This resin A2 has the following structural units. TIFF2026110561000167.tif3098

[0196] <Preparation of the resist composition> As shown in Table 2, the following components were mixed, and the resulting mixture was filtered through a fluororesin filter with a pore size of 0.2 μm to prepare a resist composition. [Table 2]

[0197] <Resin> A1, A2: Resin A1, Resin A2 <Acid Generator (B)> B1-25: Salt represented by formula (B1-25); synthesized by the method described in Japanese Patent Publication No. 2011-126869. TIFF2026110561000169.tif2382<Carboxylate (I)> I-1: Salt represented by formula (I-1) I-2: Salt represented by formula (I-2) I-17: Salt represented by formula (I-17) I-341: Salt represented by formula (I-341) I-342: Salt represented by formula (I-342) I-344: Salt represented by formula (I-344) I-345: Salt represented by formula (I-345) I-347: Salt represented by formula (I-347) <Quencher (C)> IX-1: Synthesized based on the description in Japanese Patent Publication No. 2021-026238. IX-2: Salt represented by formula (IX-2) IX-3: Synthesized based on the description in Japanese Patent Publication No. 2021-091645. TIFF2026110561000170.tif29133<solvent> Propylene glycol monomethyl ether acetate, 400 units Propylene glycol monomethyl ether, 100 parts γ-Butyrolactone 5 parts

[0198] (Electron beam exposure evaluation of resist compositions) A 6-inch silicon wafer was treated on a direct hot plate with hexamethyldisilazane at 90°C for 60 seconds. A resist composition was spin-coated onto this silicon wafer to a thickness of 0.04 μm. Subsequently, the composition layer was formed by pre-baking on a direct hot plate at the temperature shown in the "PB" column of Table 2 for 60 seconds. Contact hole patterns (hole pitch 40 nm / hole diameter 17 nm) were directly drawn onto the composition layer formed on the wafer using an electron beam lithography machine [ELS-F125 125 keV manufactured by Elionix Co., Ltd.] by gradually changing the exposure amount. After exposure, post-exposure baking was performed on a hot plate at the temperature shown in the "PEB" column of Table 2 for 60 seconds, and then paddle development was performed with a 2.38% by mass tetramethylammonium hydroxide aqueous solution for 60 seconds to obtain the resist pattern. In the resist pattern obtained after development, the exposure dose at which the formed hole diameter becomes 17 nm was defined as the effective sensitivity.

[0199] <CD Uniformity (CDU) Evaluation> At the effective sensitivity, the hole diameter of the pattern formed with a hole diameter of 17 nm was measured 24 times for each hole, and the average value was defined as the average hole diameter of one hole. Using the average hole diameters of 400 patterns formed with a hole diameter of 17 nm within the same wafer as the population, the standard deviation was calculated. The results are shown in Table 3. The numerical values in the table indicate the standard deviation (nm). 【Tab...

Claims

1. A resist composition containing a carboxylate salt represented by formula (I). [In formula (I), L １０ This represents a chain-like hydrocarbon group having 1 to 12 carbon atoms, which may contain a fluorine atom. L ２ This represents a hydrocarbon group having 1 to 40 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH ２ - is -O-, -CO-, -S-, -SO-, -SO ２ - or - NR ７ It may be replaced with -. R ７ This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. W １ represents a cyclic hydrocarbon group having 3 to 36 carbon atoms and having an iodine atom, and -CH ２ - in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -SO ２ - or -NR ７ -, and the cyclic hydrocarbon group may have a substituent other than an iodine atom. Z ＋ This represents an organic cation.

2. W １ The resist composition according to claim 1, wherein the resist is a carbon-3 to carbon-12 alicyclic hydrocarbon group having an iodine atom (the alicyclic hydrocarbon group may have substituents other than the iodine atom) or a carbon-6 to carbon-10 aromatic hydrocarbon group having an iodine atom (the aromatic hydrocarbon group may have substituents other than the iodine atom).

3. L ２ However, single bonds, chain hydrocarbon groups having 1 to 8 carbon atoms (the chain hydrocarbon group contains -CH 2 - may be replaced by -O- or -CO-.) or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have substituents (the chain hydrocarbon group and the cyclic hydrocarbon group contain -CH 2 The resist composition according to claim 1 or 2, wherein - may be replaced with -O- or -CO-.

4. The resist composition according to claim 1 or 2, further comprising a resin containing a structural unit represented by formula (a2-A). [In formula (a2-A), R ａ２ This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R ａ２７ This represents a halogen atom, a hydroxyl group, a carboxyl group, a C1-C6 alkyl group which may have a halogen atom, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ This represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the alkanediyl group contains -CH ２ - stands for -O-, -CO-, or -NR ａ２８ It can be replaced with -. R ａ２８ This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ This represents a single bond or a carbonyl group. nA2 represents an integer from 1 to 5, and when nA2 is 2 or greater, the bases within the parentheses may be the same or different from each other. na21 represents an integer from 0 to 4, and when na21 is 2 or greater, multiple R ａ２７ They may be the same or different from one another. mc represents an integer between 0 and 2.

5. The resin further contains structural units having acid-unstable groups, The resist composition according to claim 4, wherein the structural unit having an acid-unstable group is selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). [In formulas (a1-0), (a1-1), and (a1-2), L ａ０１ , L ａ１ and L ａ２ These are, independently, -O- or *-O- (CH ２ ) ｋ１ This represents -CO-O-, where k1 is an integer from 1 to 7, and * represents the bonding site with -CO-. R ａ０１ , R ａ４ and R ａ５ Each of these independently represents a hydrogen atom, a halogen atom, or a C1-C6 alkyl group which may have a halogen atom. R ａ０２ , R ａ０３ and R ａ０４ Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group consisting of a combination thereof, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. R ａ６ and R ａ７ Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination thereof, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1' represents an integer between 0 and 14. n1 represents an integer between 0 and 14. n1' represents an integer between 0 and 3. [In formula (a1-4), R ａ１ This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R ａ１７ This represents a halogen atom, a hydroxyl group, a carboxyl group, a C1-C6 alkyl group which may have a halogen atom, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A ａ１１ This represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the alkanediyl group contains -CH ２ - stands for -O-, -CO-, or -NR ａ１８ It can be replaced with -. R ａ１８ This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ This represents a single bond or a carbonyl group. R a34 and R a35 Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a36 R represents a hydrocarbon group with 1 to 20 carbon atoms, or a34 R represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. a35 and R a36 These atoms bond to each other, forming a divalent heterocyclic group with 3 to 20 carbon atoms, and the hydrocarbon group and the divalent heterocyclic group contain -CH 2 The dash (-) may be replaced with -O- or -S-. na1 represents an integer from 1 to 5, and when na1 is 2 or greater, the bases within the parentheses may be the same or different from each other. na11 represents an integer from 0 to 4, and when na11 is 2 or greater, multiple R ａ１７ They may be the same or different from one another. mc represents an integer between 0 and 2. [In formula (a1-5), R a8 This represents an alkyl group having 1 to 6 carbon atoms, which may contain a halogen atom, a hydrogen atom, or a halogen atom. Z a1 is a single bond or *-(CH 2 ) h3 -CO-L 54 - represents, h3 represents an integer from 1 to 4, and * represents L 51 This represents the connection point. L 51 , L 52 , L 53 and L 54 These represent either -O- or -S- independently. s1 represents an integer between 1 and 3. s1' represents an integer between 0 and 3. [In formula (a1-6), R a61 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a6２ , R a63 and R a6４ Each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have substituents, or R a6２ and R a63 They bond to each other, forming a ring with 3 to 20 carbon atoms, R a6４ This represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms, which may have substituents. X a61 These are single bonds, -CO-O-* or -CO-NR a65 - represents *, where * represents the bonding site with Ar, R a65 This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 This is a single bond, *-O-L a61 - or * - CO-O-L a62 - represents the bonding site with Ar, and L a61 and L a62 Each of these independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms, which may have substituents.

6. The resist composition according to claim 4, further comprising a resin with structural units that decompose upon exposure to generate acid.

7. The resist composition according to claim 6, wherein the structural unit that decomposes upon exposure to generate acid is a structural unit represented by formula (a7-A). [In formula (a7-A), R ａ７ This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. X ａ７１ These are single bonds, or -O-, -CO-, -S-, -SO-, -SO ２ -, -NR ａ７１ - represents a phenylene group which may have substituents, or a group which is a combination thereof. R ａ７１ This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L ａ７１ and L ａ７２ Each of these independently represents a hydrocarbon group having 1 to 24 carbon atoms, which may have substituents, and the hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, -SO-, or -SO 2 It may be replaced with -. X ａ７２ ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, and *** is L ａ７１ This represents the connection point. na7 represents an integer between 0 and 2. When na7 is 2, the bases within the parentheses may be the same or different. RA － This represents a sulfonate anion or a carboxylate anion. ZA ＋ This represents an organic cation.

8. It further contains an acid generator, The resist composition according to claim 1 or 2, wherein the acid generator comprises a salt represented by formula (B1), a salt represented by formula (B2), or a salt represented by formula (B4). [In formula (B1), L b1 represents a (nb1 + 1)-valent hydrocarbon group which may have a single bond or substituents, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO 2 -. L b2 This represents a divalent hydrocarbon group having 1 to 24 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, -SO-, or -SO 2 It may be replaced with -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO 2 - or -CO-. nb1 represents an integer between 1 and 6. When nb1 is 2 or greater, the bases within the parentheses may be the same or different. Z1 ＋ This represents an organic cation. [In formula (B2), A １ represents a nitrogen atom or a carbon atom. L ｂ２’ This represents a divalent hydrocarbon group having 1 to 24 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, -SO-, or -SO 2 It may be replaced with -. Y ｂ１’ This represents a methyl group which may have substituents or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the cyclic hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, -SO-, or -SO 2 It may be replaced with -. nb5 represents an integer of 2 or 3. A １ If it is a nitrogen atom, then nb5 is 2, and A １ If is a carbon atom, then nb5 is 3. The groups in parentheses may be the same or different from each other, and two groups in parentheses combine to form A １ A ring containing the element may be formed. Z2 ＋ This represents an organic cation. [In formula (B4), L ｂ１４ and L ｂ１５ Each of these independently represents a divalent hydrocarbon group having 1 to 72 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, -SO-, or -SO 2 It may be replaced with -. Ar Ｂ４ and Ar Ｂ５ Each of these independently represents an aromatic hydrocarbon group having 6 to 24 carbon atoms, which may have substituents, and Ar Ｂ４ and Ar Ｂ５ The substituents may bond to form a ring. R Ｂ４ and R Ｂ５ Each of these independently represents a hydrocarbon group having 1 to 18 carbon atoms, which may have a halogen atom or substituents, and the hydrocarbon group contains -CH 2 - stands for -O-, -CO-, -S-, -SO-, or -SO ２ It may be replaced with -. mB4 represents an integer between 0 and 4, and when mB4 is 2 or greater, multiple R B4 They may be identical or different from one another. mB5 represents an integer between 0 and 4, and when mB5 is 2 or greater, multiple R Ｂ５ They may be identical or different from one another. Z4 ＋ and Z5 ＋ Each of these independently represents an organic cation.

9. (1) A step of applying the resist composition according to claim 1 or 2 onto a substrate, (2) A step of drying the coated resist composition to form a composition layer, (3) Exposure step of the composition layer, (4) A step of heating the composition layer after exposure, (5) A step of developing the composition layer after heating, A method for manufacturing a resist pattern that includes [the specified element].

10. A carboxylate salt represented by formula (I). [In formula (I), L １０ This represents a chain-like hydrocarbon group having 1 to 12 carbon atoms, which may contain a fluorine atom. L ２ This represents a hydrocarbon group having 1 to 40 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH ２ - is -O-, -CO-, -S-, -SO-, -SO ２ - or - NR ７ It may be replaced with -. R ７ This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. W １ This represents a cyclic hydrocarbon group having 3 to 36 carbon atoms and containing an iodine atom, and the -CH contained in the cyclic hydrocarbon group ２ - is -O-, -CO-, -S-, -SO-, -SO ２ - or - NR ７ It may be replaced by -, and the cyclic hydrocarbon group may have substituents other than the iodine atom. Z ＋ This represents an organic cation.

11. W １ The carboxylate salt according to claim 10, wherein the alicyclic hydrocarbon group having 3 to 12 carbon atoms and containing an iodine atom (the alicyclic hydrocarbon group may have substituents other than the iodine atom) or the aromatic hydrocarbon group having 6 to 10 carbon atoms and containing an iodine atom (the aromatic hydrocarbon group may have substituents other than the iodine atom).

12. L ２ However, single bonds, chain hydrocarbon groups having 1 to 8 carbon atoms (the chain hydrocarbon group contains -CH 2 - may be replaced by -O- or -CO-.) or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have substituents (the chain hydrocarbon group and the cyclic hydrocarbon group contain -CH 2 The carboxylate salt according to claim 10 or 11, wherein - may be replaced by -O- or -CO-.

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