Load port door sealing mechanism

Abstract

This disclosure describes a device and system for sealing, and a method for using the seal. The seal includes a base portion configured to connect to a groove formed by a first surface of a first component. The base portion includes a notch on the bottom side of the base portion, which is configured to allow the base portion to flex laterally in response to an installation force. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to form an airtight seal between the sealing surfaces of the first component and the second component in response to the application of a threshold sealing force to the sealing portion.

Description

Technical Field

[0005] ,

[0001]

[0001] Embodiments of the present disclosure generally relate to a sealing mechanism for a load port door.

Background Art

[0002]

[0002] An electronic device manufacturing system may include one or more tools or components for transporting and manufacturing substrates. Such tools or components may include a factory interface (e.g., an equipment front-end module (EFEM)) connected to a load lock and / or a transfer chamber. In some cases, the front of the factory interface may include one or more load ports. A load port is a station for input and output of a substrate carrier. The load port may include a frame adapted to connect the load port to the factory interface. The frame may include a transfer opening through which one or more substrates can be transported between the substrate carrier and the factory interface.

[0003]

[0003] Current load ports generally do not include a seal between the frame of the load port and the load port door. However, in current systems, such a configuration can be inefficient because the environmentally controlled atmosphere between the frame and the door is not maintained.

Summary of the Invention

[0004]

[0004] Some embodiments described herein cover a seal including a base portion configured to connect to a groove formed by a first surface of a first component. The base portion includes a notch at the bottom of the base portion configured to bend the base portion laterally in response to an attachment force. The seal further includes a seal portion extending from the base portion. The seal portion is configured to form an airtight seal between the first component and a seal surface of a second component in response to the application of a threshold seal force to the seal portion.

[0005]

[0005] Some embodiments described herein cover a load port door. The load port door includes an outer surface and an inner surface. A groove is formed in the inner surface. The load port door further includes a seal. The seal includes a base portion configured to connect to the groove. The base portion includes a notch at the bottom of the base portion configured to bend the base portion laterally in response to an installation force. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to form an airtight seal between the load port door and the sealing surface of the load port frame in response to the application of a threshold sealing force to the sealing portion.

[0006]

[0006] Some of the embodiments described herein cover a load port for receiving a substrate carrier. Some of the embodiments described cover a load port for receiving a substrate carrier. The load port includes a frame adapted to connect the load port to a factory interface. The frame includes a transport opening through which one or more substrates can be transported between the substrate carrier and the factory interface. The load port further includes a load port door configured to substantially fill the transport opening. The load port door includes a first surface that forms a groove. The load port further includes a seal connected to the groove formed on the first surface of the load port door. The seal includes a base portion and a sealing portion extending from the base portion. The seal is connected to the groove of the load port door via the base portion. The base portion includes a notch at the bottom of the base portion configured to laterally bend the base portion in response to a mounting force. The sealing portion is configured to form an airtight seal between the load port door and the sealing surface of the frame in response to the application of a threshold sealing force to the sealing portion.

[0007]

[0007] The present disclosure is illustrated in the accompanying drawings as examples, not limitations, and similar reference numerals in the drawings indicate similar elements. It should be noted that various references to “an” or “one” embodiments in the present disclosure do not necessarily refer to the same embodiment, but such references mean at least one. [Brief explanation of the drawing]

[0008] [Figure 1A] This is a schematic top view of an exemplary electronic device manufacturing system according to an aspect of the present disclosure. [Figure 1B] This is a schematic side view of an exemplary electronic device manufacturing system according to an aspect of the present disclosure. [Figure 1C] This is a schematic front view of an exemplary electronic device manufacturing system according to an aspect of the present disclosure. [Figure 2A] This is a schematic front view of an exemplary load port frame and seal assembly according to an aspect of the present disclosure. [Figure 2B] This is a perspective view of an exemplary load port frame and seal assembly according to an aspect of the present disclosure. [Figure 2C] This is a cross-sectional view of an exemplary seal assembly relating to an aspect of the present disclosure. [Figure 3] This is a cross-sectional view of an exemplary load port frame and seal assembly according to an aspect of the present disclosure. [Figure 4] This is a cross-sectional view of an exemplary load port door according to an aspect of the present disclosure. [Figure 5] This is a flowchart of a method for transporting a substrate from a substrate carrier to a factory interface according to an embodiment of the present disclosure. [Modes for carrying out the invention]

[0009]

[0017] The embodiments described herein cover systems and methods related to load port sealing. Some embodiments relate to seals configured to connect to load port doors. Some embodiments relate to load port doors having seals. Some embodiments relate to load ports including doors having seals. Other embodiments relate to seals that may be used in other components of a processing system, such as seals for side storage pods (SSPs) and front-opening unified pods (FOUPs). It should be understood that the embodiments described herein relating to seals for load port doors also apply to seals used in any other components, chambers, or devices within a manufacturing system (e.g., a semiconductor manufacturing system). In some embodiments, the seals described herein can be used in place of conventional O-rings (e.g., O-ring grooves formed in components and / or modules of equipment for processing devices such as load port doors, load port frames, FOUPs, SSPs, and / or other chambers, semiconductor devices, and / or displays).

[0010]

[0018] Many conventional loadports do not include a seal between the loadport door and the loadport frame. Therefore, leaks often occur around the loadport door in conventional systems. Positive pressure can be maintained inside the factory interface (e.g., EFEM) chamber connected to the loadport, preventing contaminants from being introduced through the interface between the loadport door and the loadport frame. However, if such positive pressure is maintained, leaked gases can increase the operating costs of the factory interface. In addition, gases leaking through the conventional unsealed interface to the loadport door can cause corrosion at the interface, leading to the generation of particles. These generated particles can be introduced into both the substrate carrier (e.g., FOUP) and the factory interface, potentially contaminating the conventional system. Furthermore, leaked gases can pose safety hazards. For example, N2 gas leaks can cause nitriding hazards in the environment outside the EFEM (e.g., within the facility).

[0011]

[0019] Some conventional loadports may include a conventional O-ring seal (e.g., having a substantially circular cross-section) between the loadport door and the loadport frame. However, these conventional O-ring seals often rely on significant force to form an airtight seal. In many cases, the loadport door actuator cannot apply the significant force that conventional O-ring seals rely on. For example, when conventional O-ring seals are used, the loadport door actuator presses the loadport door against the loadport frame so that the O-ring seal positioned between the loadport door and the loadport frame is compressed sufficiently to form an airtight seal. Including a loadport door actuator that can provide sufficient force for the seal using a conventional O-ring seal can contribute to the extra cost and weight of the system. To reduce the force required for the seal, some conventional loadports include a hollow O-ring for sealing between the loadport door and the loadport frame. However, hollow O-rings can come out of the O-ring groove (e.g., a dovetail groove, the groove in which the O-ring is positioned), often causing the seal to fail. Furthermore, conventional hollow O-rings can adhere to the sealing surface of the load port frame (the O-ring may dislodge from the groove when the load port door is opened). If conventional O-rings are attached to the load port frame, particles may be generated when the O-rings no longer adhere.

[0012]

[0020] Some conventional seals are difficult to install into conventional O-ring grooves (e.g., dovetail grooves). For example, the throat of a conventional O-ring groove is narrower than the base of the groove. To install a seal into the groove, a portion of the seal must be bent so that it fits through the throat of the groove. Often, the material of the seal makes it difficult to bend the seal, requiring excessive force and making installation difficult.

[0013]

[0021] In some embodiments of this disclosure, a load port includes a frame adapted to connect the load port to a factory interface. The frame includes a transport opening from which one or more substrates can be transported between a substrate carrier and the factory interface. The load port includes a load port door on the factory interface side of the frame to substantially fill the transport opening when the door is in the closed position. The load port door is coupled to a door mechanism (e.g., an actuator operated by a load port controller). The door mechanism can position the load port door from the closed position to the open position and vice versa.

[0014]

[0022] The load port door includes a seal having a base portion and a sealing portion. The seal is configured to connect to a groove in the load port door via the base portion. The groove may be formed by the plane of the load port door or may extend around the outer circumference of the load port door. The base portion may include a notch at its bottom. The notch may be configured to bend the base portion laterally when the base portion is inserted into the groove (e.g., when the seal is installed). The sealing portion of the seal may extend from the base portion. The sealing portion may form an airtight seal against the sealing surface of the load port frame when the door is closed (e.g., by a door mechanism). The sealing portion may generate a seal in response to the force applied to the sealing portion.

[0015]

[0023] By providing the seals of this disclosure, many advancements can be achieved. For example, the seals of this disclosure can reduce the sealing force required to form an airtight seal between the load port door and the load port frame compared to the sealing force used in conventional O-ring seals, thereby reducing the force requirements of the door actuator and allowing the load port frame to be constructed from inexpensive materials such as sheet metal. In addition, compared to conventional systems, the seals of this disclosure reduce leakage present in conventional systems by sealing the interface between the load port door and the load port frame, and thus reduce material consumption (e.g., gas) and the amount of contaminants leaking around the load port door. Contaminants may remain in the system and can be properly discharged. Furthermore, the described seals facilitate installation into conventional grooves by having a notch at the bottom of the base that allows the base to bend when the base is pushed through the throat of the groove, thus facilitating installation of the seal while still holding the seal within the groove of the load port door.

[0016]

[0024] Figures 1A to 1C illustrate an electronic device manufacturing system 100 in which one or more load ports are connected to a factory interface 106. Figure 1A is a schematic top view of an exemplary electronic device manufacturing system 100 according to an aspect of this disclosure. Figure 1B is a schematic side view of an exemplary electronic device manufacturing system 100 according to an aspect of this disclosure. Figure 1C is a schematic front view of an exemplary electronic device manufacturing system 100 according to an aspect of this disclosure. Figures 1A to 1C are used for illustrative purposes only, and it should be noted that different components may be located in different positions relative to each figure.

[0017]

[0025] An electronic device manufacturing system 100 (also referred to as an electronic device processing system) is configured to perform one or more processes on a substrate 102. The substrate 102 is a planar article of a fixed size and of any suitable hardness (e.g., a disk or wafer containing silicon, a patterned wafer, or a glass plate, etc.), and can be an article suitable for fabricating an electronic device or circuit component thereon.

[0018]

[0026] The electronic device manufacturing system 100 includes a processing tool (e.g., a mainframe) 104 and a factory interface 106 (e.g., an EFEM) connected to the processing tool 104. The processing tool 104 includes a housing 108 having a transfer chamber 110 therein. The transfer chamber 110 includes one or more processing chambers (also referred to as process chambers) 114, 116, 118 disposed around and coupled to itself. The processing chambers 114, 116, 118 can be coupled to the transfer chamber 110 via respective ports such as slit valves.

[0019]

[0027] The processing chambers 114, 116, 118 can be adapted to perform any number of processes on the substrate 102. Within each of the processing chambers 114, 116, 118, the same or different substrate processes can be performed. Examples of substrate processes can include atomic layer deposition (ALD), physical vapor deposition (PVD), or chemical vapor deposition (CVD), etching, annealing, curing, pre-cleaning, removal of metals or metal oxides, etc. In one example, a PVD process is performed in one or both of the processing chambers 114, an etching process is performed in one or both of the processing chambers 116, and an annealing process is performed in one or both of the processing chambers 118. Other processes can be performed on the substrate among these. Each of the processing chambers 114, 116, 118 can include a substrate support assembly. The substrate support assembly can be configured to hold the substrate in a fixed position while the substrate process is being performed.

[0020]

[0028] The transfer chamber 110 also includes a transfer chamber robot 112. The transfer chamber robot 112 can include one or more arms, and each arm includes one or more end effectors at the end of each arm. The end effector can be configured to handle specific objects such as wafers. Alternatively or additionally, the end effector is configured to handle objects such as process kit rings. In some embodiments, the transfer chamber robot 112 is a selectively compliant assembly robot arm (SCARA) robot such as a 2-link SCARA robot, a 3-link SCARA robot, or a 4-link SCARA robot.

[0021]

[0029] The load lock 120 can also be connected to the housing 108 and the transfer chamber 110. One side of the load lock 120 can be connected and coupled to the transfer chamber 110, and the other side can be configured to be coupled to the factory interface 106. In some embodiments, the load lock 120 can have an environmentally controlled atmosphere that changes from a vacuum environment (where substrates are transferred between the transfer chamber 110) to an atmospheric pressure or near-atmospheric inert gas environment (where substrates are transferred between the factory interface 106). In some embodiments, the load lock 120 is a stacked load lock having a pair of upper internal chambers and a pair of lower internal chambers located at various vertical levels (e.g., one above the other). In some embodiments, the pair of upper internal chambers is configured to receive processed substrates from the transfer chamber 110 for removal from the processing tool 104, while the pair of lower internal chambers is configured to receive substrates from the factory interface 106 for processing within the processing tool 104. In some embodiments, the load lock 120 is configured to perform substrate processes (e.g., etching or pre-cleaning) on one or more substrates 102 received therein.

[0022]

[0030] The factory interface 106 can be any suitable enclosure, such as an equipment front-end module (EFEM). The factory interface 106 may be configured to receive substrates 102 from a substrate carrier 122 (e.g., a Front Opening Unified Pod (FOUP)) docked to various load ports 124 of the factory interface 106. A factory interface robot 126 (shown by a dotted line) may be configured to transfer the substrates 102 between the substrate carrier (also called a container) 122 and the load lock 120. In other embodiments and / or similar embodiments, the factory interface 106 may be configured to receive replacement parts from a replacement parts storage container. The factory interface robot 126 may include one or more robotic arms and may or may include a SCARA robot. In some embodiments, the factory interface robot 126 may have more axes and / or degrees of freedom than the transfer chamber robot 112. The factory interface robot 126 may include end effectors at the end of each robot arm. The end effectors may be configured to pick up and handle specific objects, such as wafers. Alternatively or additionally, the end effectors may be configured to handle objects, such as rings of processing kits. Any conventional robot type can be used for the factory interface robot 126. Transfers may be performed in any order or in any direction. In some embodiments, the factory interface 106 may be maintained in a slightly positive pressure non-reactive gas environment (e.g., using nitrogen, other inert gases, or air with controlled subcomponent parameters as the non-reactive gas).

[0023]

[0031] The factory interface 106 can consist of one or more sides of the factory interface 106 and any number of load ports 124 which can be located at the same or different heights. One or more load ports 124 may include load port doors of a design that includes a seal having a base and a sealing portion as described herein. Such seals and load ports of such a design will be described in more detail with reference to Figures 2A-2C, 3, and 4.

[0024]

[0032] The factory interface 106 may include one or more auxiliary components (not shown). These auxiliary components may include a substrate housing, measuring instruments, a server, an air conditioning unit, etc. The substrate housing can, for example, house substrates and / or substrate carriers (e.g., FOUPs). Measuring instruments can be used to determine characteristic data of products manufactured by the electronic device manufacturing system 100. In some embodiments, the factory interface 106 may include an upper compartment 160, as shown in Figures 1B-1C. The upper compartment 160 may house electronic systems (e.g., a server, an air conditioning unit, etc.), utility cables, a system controller 128, or other components.

[0025]

[0033] In some embodiments, the transfer chamber 110, processing chambers 114, 116, and 118, and / or the load lock 120 are maintained at a vacuum level. The electronic equipment processing system 100 may include one or more vacuum ports connected to one or more stations of the electronic equipment manufacturing system 100. For example, a first vacuum port 130a may connect the factory interface 106 to the load lock 120. A second vacuum port 130b may be connected to the load lock 120 and located between the load lock 120 and the transfer chamber 110.

[0026]

[0034] The electronic device manufacturing system 100 may also include a system controller 128. The system controller 128 may be a computing device such as a personal computer, a server computer, a programmable logic controller (PLC), and a microcontroller, and / or may include such a computing device. The system controller 128 may include one or more general-purpose processing devices, such as a microprocessor or a central processing unit. More specifically, the processing devices may be a complex instruction set computing (CISC) microprocessor, a reduced instruction set computing (RISC) microprocessor, a very long instruction word (VLIW) microprocessor, or a processor that implements other instruction sets or a combination of instruction sets. The processing devices may also be one or more special-purpose processing devices such as an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), a digital signal processor (DSP), or a network processor. The system controller 128 may include data storage devices (e.g., one or more disk drives and / or solid-state drives), main memory, static memory, a network interface, and / or other components. The system controller 128 is capable of executing instructions to perform any one or more of the methods and / or embodiments described herein. The instructions may be stored in a computer-readable storage medium, which may include main memory, static memory, secondary storage, and / or a processing unit (executing the instructions).The system controller 128 may include an environment controller configured to control the environment within the factory interface 106 (e.g., pressure, humidity level, vacuum level, etc.). In embodiments, the execution of commands by the system controller 128 causes the system controller to perform one or more of the methods shown in Figure 5. The system controller 128 may also be configured to allow input and display of data and processing commands by a human operator.

[0027]

[0035] Figures 2A to 2C show exemplary load port and seal assembly 200 according to embodiments of the present disclosure. Figure 2A is a schematic front view of the load port and seal assembly 200 according to embodiments of the present disclosure. Figure 2B is a perspective view of the load port and seal assembly 200 according to embodiments of the present disclosure. Figure 2C is a cross-sectional view of the seal 220 indicated by section A-A230. In some embodiments, the exterior of the load port frame 224 (or other load port frame described herein) may comply with SEMI (Semiconductor Equipment and Materials International) standards and requirements.

[0028]

[0036] The load port door 210 can be positioned in a closed position to secure it to the transport opening in order to maintain an environmentally controlled atmosphere within the factory interface 106. The load port door 210 can also be positioned in an open position using a door mechanism. While in the open position, the transport opening in the assembly 200 allows the factory interface robot 126 to transfer substrates (e.g., wafers) between the substrate carrier 122 connected to the load port 124 and the factory interface 106.

[0029]

[0037] The seal 220 may be positioned around the load port door 210. In some embodiments, the shape dimensions of the seal are such that the base portion 222 of the seal connects to the load port door 210, and the surface of the seal portion 223 extending from the base portion 222 contacts the surface of the load port frame 224 (e.g., the sealing surface) (depending on whether the load port door is in the closed position). In some embodiments, the seal portion 223 extends from the base portion 222 on the side of the base portion 222 opposite to the notch 226. In some embodiments, the seal portion 223 may be cantilevered from the base portion 222. The seal 220 may form an airtight seal when the load port door 210 is in the closed position. In some examples, the surface of the seal portion 223 near the distal end of the seal 220 engages with the sealing surface of the load port frame 224 to form an airtight seal. The base portion 222 may form a seal against the load port door 210. The load port door 210 can apply a force (e.g., a threshold sealing force) to the seal 220, and when the load port door 210 is in the closed position, the load port frame 224 can apply a reaction force 227 to the distal end of the seal portion 223. In some embodiments, when a force is applied (e.g., by a door actuator), the load port door 210 moves to the closed position. In some embodiments, the force (e.g., load) applied to the seal 220 during sealing (e.g., when the door is closed) is perpendicular to the surface to which the seal connects to the load port door (e.g., as shown in Figure 2C).

[0030]

[0038] In some embodiments, the seal 220 is a single piece of material, such as vulcanized rubber or any other type of elastomer. The seal 220 may be made of a flexible elastomer material. In some embodiments, the seal 220 is made of fluorinated carbon-based synthetic rubber (e.g., fluoroelastomer, FKM, FFKM, etc.). Those skilled in the art will understand that other suitable materials can be used, such as natural rubber, silicone, plastics, other synthetic rubbers, polymers, foams, etc. In some embodiments, the seal 220 may be made of a plurality of interconnected components. In some embodiments, the base portion 222 may be made of a first material, and the seal portion 223 may be made of a second material, and may be bonded and / or connected to the base portion 222. In some embodiments, at least a portion of the seal 220 is made of a plastic material. In some embodiments, the seal 220 is extruded or molded.

[0031]

[0039] In some embodiments, the base portion 222 of the seal 220 includes a notch 226 formed in the cross section of the base portion 222. The notch 226 allows the base portion 222 to flex when a bending moment is introduced to the base portion 222 (for example, when the base portion 222 is placed in a groove, such as the groove shown in Figures 3 and 4, or when a sealing force is applied to the seal portion 223). In some embodiments, the base portion 222 flexes due to the notch 226 due to a mounting force (for example, from a tool used to attach the seal 220 to a load port door). In some embodiments, the notch 226 causes the base portion 222 to flex laterally inward and outward around the axis when a mounting force is applied (as shown in Figure 2C). In some embodiments, the base portion 222 is placed in a groove by first placing the tow 222B of the base portion 222 into the groove. Next, the heel 222A of the base portion 222 is inserted into the groove by bending the base portion 222. By pulling the seal portion 223, the base portion 222 can be fully fitted into the groove.

[0032]

[0040] In some embodiments, the notch 226 may have an irregular shape, a semicircular shape, a substantially trapezoidal shape (as shown in Figures 2C and 3), and so on. The notch 226 can be biased toward the toe 222B of the base portion 222 (for example, downward as shown in Figure 2C) or toward the heel 222A of the base portion 222 (for example, upward as shown in Figure 2C). In some embodiments, the notch 226 is positioned substantially centered between the toe 222B and heel 222A of the base portion 222. In some embodiments, the width of the notch 226 is proportional to the depth of the notch 226. In some embodiments, the width and / or depth of the notch 226 is proportional to the length and / or width of the base portion 222. In some embodiments, the depth of the notch 226 is between approximately 20% and 40% of the width of the base portion 222. In some embodiments, the depth of the notch 226 is between approximately 30% and 35% of the width of the base portion 222. In some embodiments, the width of the notch 226 is between approximately 20% and 60% of the length of the base portion 222. In some embodiments, the width of the notch 226 is between approximately 30% and 50% of the length of the base portion 222.

[0033]

[0041] In some embodiments, the seal portion 223 extends from the base portion 222 in close proximity to the heel 222A of the base portion 222. In some embodiments, the seal portion 223 is cantilevered from the base portion 222 (e.g., cantilevered at the heel of the base portion 222). The seal portion 223 may include a curved cross section. In some embodiments, the seal portion 223 includes a meandering cross section (e.g., a semi-meandering cross section). In some embodiments, the cross section of the seal portion 223 extends from the heel of the base portion 222 and curves substantially parallel to the base portion 222. The tip of the seal portion 223 may curve away from the base portion 222. In some embodiments, the seal portion 223 includes an inclined tip. The inclined tip may interact with a sealing surface (e.g., a sealing surface of a load port frame) to form an airtight seal. In some embodiments, when a sealing force (e.g., reaction force 227) is applied to the tip, the inclined tip lies flat on the sealing surface (see, for example, Figure 3). In some embodiments, the sealing portion 223 flexes when a sealing force is applied. In some embodiments, due to the notch 226, when a sealing force is applied to the sealing portion 223, the base portion 222 flexes, potentially forming an airtight seal. In some embodiments, the bending of the sealing portion 223 and / or the base portion 222 reduces the sealing force and forms an airtight seal.

[0034]

[0042] In some embodiments, the seal 220 may have an overall height between approximately 3 mm and 6 mm. The base portion 222 may have a height between approximately 1.5 mm and 2.5 mm. In some embodiments, the seal portion 223 may have a width between approximately 1 mm and 2 mm. The seal portion 223 may gradually thin out with distance from the base portion 222. In many embodiments, the base portion 222 is configured to fit into conventional grooves (e.g., dovetail grooves, slotted grooves, square grooves, etc.). The surface of the base portion 222 may have a radius to fit into dovetail grooves. In some embodiments, the base portion 222 may be configured to substantially fill the groove but not to completely fill it (see, for example, Figure 3). The base portion 222 may include radial corners. The base portion 222 may have a width of approximately 2.5 to 4 mm. Those skilled in the art should understand that the seal 220 may have different dimensions than those described herein to suit specific applications.

[0035]

[0043] Figure 3 shows a cross-sectional view of an exemplary load port frame and seal assembly 300 according to an aspect of the present disclosure. The assembly 300 includes a first component (e.g., a load port door 210), a seal 220, and a second component (e.g., a load port frame 224). As shown, the load port door 210 is in the closed position, and the seal 220 forms an airtight seal between the sealing surface 224A of the load port frame 224 and the surface 210A of the load port door 210.

[0036]

[0044] In some embodiments, surface 210A is the inner surface of the load port door 210. In some embodiments, surface 210A may be substantially parallel to the sealing surface 224A. The load port door 210 may be movable relative to the load port frame 224. A door actuator (not shown) may move the load port door 210 between a closed position and an open position. The load port door 210 may be shown in the closed position. In some embodiments, while in the closed position, the sealing surface 210A may be at a distance of about 0.1 to 1.0 mm from the load port frame 224. In some embodiments, the sealing surface 210A is at a distance of about 0.2 mm to 0.5 mm from the load port frame 224. To move to the open position, the load port door 210 can move away from the load port frame 224 to the left (as shown) and then downward (as shown) to remove the transport opening. The load port door 210 can move to the closed position in response to a force applied to the load port door 210 by an actuator. The sealing portion 223 of the seal 220 can be pressed against the load port frame 224 in response to the load port door 210 moving to the closed position. An airtight seal can be formed by the seal portion 220 in response to a threshold sealing force being applied to the sealing portion 223 (e.g., by the door actuator, the load port frame 224, etc.).

[0037]

[0045] The sealing surface 224A of the load port frame 224 may apply a reaction force 227 to the surface of the sealing component 223. The reaction force 227 may be perpendicular to the plane of the sealing surface 224A and may be substantially equal to the threshold sealing force. The threshold sealing force may be applied substantially perpendicular to the plane of the surface 210A. In some embodiments, the applied sealing force to produce an airtight seal is a force of about 50 to 210 Newtons. In some embodiments, the applied sealing force is between about 70 and 130 Newtons. In some embodiments, the applied sealing force is less than the maximum force that can be applied to the load port door 210 by a door actuator (not shown). A sealing force greater than the threshold sealing force may be applied to form an airtight seal.

[0038]

[0046] In some embodiments, when a sealing force is applied, at least a portion of the seal 220 may flex. In some embodiments, the seal portion 223 and / or the base portion 222 flex at least partially when a sealing force is applied. In some embodiments, the seal portion 223 flexes at least partially when a sealing force is applied so that the inclined tip of the seal portion 223 can engage with the seal surface 224A. In some embodiments, when the load port door 210 is in the closed position, the inclined tip of the seal portion 223 forms a flat sealing interface with the seal surface 224A, forming an airtight seal. In some embodiments, the inclined tip displaces between about 0.5 mm and 1.5 mm when a threshold sealing force is applied. In some embodiments, the inclined tip displaces by about 1.0 mm when a threshold sealing force is applied. The airtight seal can restrict the flow of fluids (e.g., gas, air, nitrogen, etc.) and contaminants (e.g., particles, etc.) between the interface of the load port door 210 and the load port 224.

[0039]

[0047] Figure 4 is a cross-sectional view of an exemplary load port door 210 according to an aspect of the present disclosure. In some embodiments, the groove 214 is a dovetail groove formed in the surface 210A. The groove 214 may be configured to receive the base portion 222 of a seal 220. In some embodiments, the groove 214 may be an interface for connecting the seal 220 to the load port door 210. The groove 214 may include two side walls 217 and a bottom wall. In some embodiments, the groove 214 may be cut into the surface 210A around the outer circumference of the load port door 210. The groove 214 may be cut by a dovetail cutting cutter. In some embodiments, the groove 214 is configured to receive an O-ring of a standard size commonly used in the industry.

[0040]

[0048] In some embodiments, the groove 214 has a depth between approximately 1.5 mm and 2.5 mm. In some embodiments, the throat 213 of the groove 214 may have a width between approximately 2.2 mm and 3.5 mm. In some embodiments, during the installation of the seal 220 into the groove 214, the notch 226 flexes the base portion 222 so that the base portion 222 can fit through the throat 213. In some embodiments, the maximum width of the groove 214 is greater than the depth of the groove 214. In some embodiments, the side wall 217 of the dovetail groove 214 is at an angle with the surface 210A. In some embodiments, the side wall 217 and the surface 210A form an angle between approximately 45 and 80 degrees. In some embodiments, at least one side wall forms an angle with respect to the surface 210A. Those skilled in the art will understand that the groove 214 may have different dimensions than those described herein to suit a particular application.

[0041]

[0049] Figure 5 is a flowchart of a method 500 for transporting a substrate from a substrate carrier to a factory interface according to an embodiment of the present disclosure. In some embodiments, the method 500 is performed and / or executed by processing logic including hardware (e.g., circuits, dedicated logic, programmable logic, microcode, processing devices, etc.), software (e.g., instructions executed on processing devices, general-purpose computer systems, or dedicated machines), firmware, microcode, or a combination thereof. In some embodiments, the method 500 is performed at least in part by an electronic device manufacturing system (e.g., the electronic device manufacturing system 100 in Figures 1A-1C).

[0042]

[0050] For the sake of simplicity, Method 500 is illustrated and described as a series of steps. However, the steps according to this disclosure may be performed in various orders and / or simultaneously with other steps not presented and described herein. Furthermore, in some embodiments, not all illustrated steps are performed in order to carry out Method 500 according to the disclosed subject matter. In addition, those skilled in the art will understand and recognize that Method 500 may be alternatively represented as a series of interrelated states via a state diagram or state events.

[0043]

[0051] In block 510, the load port receives a substrate carrier. In some embodiments, the substrate carrier is a FOUP. In some embodiments, the load port includes a frame adapted to connect the load port to a factory interface. The frame includes a transport opening from which one or more substrates can be transported between the substrate carrier and the factory interface. The load port also includes an actuator connected to the frame and a load port door connected to the actuator. The load port door may be configured to seal the transport opening. The actuator can position the load port door from a closed position to an open position and from an open position to a closed position.

[0044]

[0052] A load port door may include one or more seals connected to the surface of the load port door. A seal may include a base portion and a sealing portion extending from the base portion. The sealing portion may be configured to engage with the sealing surface of the load port frame when the load port door is in the closed position in response to a threshold sealing force being applied to the sealing portion, in order to form an airtight seal between the load port door and the load port frame. The base portion may be configured to connect to the load port door via a groove formed on the end face of the load port door. The base portion may include a notch configured to bend the base portion during installation of the seal.

[0045]

[0053] In block 520, the substrate carrier can be positioned so that its front surface aligns with the opening of the load port frame (e.g., the transport opening).

[0046]

[0054] In block 530, a load port door positioned in the opening can be opened (for example, via a door actuator). The load port door can be moved away from the opening (for example, by a door actuator) so that the seal connected to the load port door disengages from the sealing surface of the load port frame. The door may then be lowered away from the opening.

[0047]

[0055] In block 540, a factory interface robot positioned within the factory interface can remove a circuit board from a circuit board carrier.

[0048]

[0056] In block 550, once the substrate is removed, an actuator can be used to position the load port door from the open position to the closed position, thereby engaging the seal connected to the load port door with the sealing surface of the load port frame to form an airtight seal. The actuator can apply a sealing force greater than the threshold sealing force to the load port door, thereby creating an airtight seal between the load port door and the load port frame.

[0049]

[0057] The foregoing description provides many specific details, such as examples of specific systems, components, and methods, in order to provide a good understanding of some embodiments of the Disclosure. However, it will be apparent to those skilled in the art that at least some embodiments of the Disclosure can be implemented without these specific details. In other examples, well-known components or methods are not described in detail or are presented in simple block diagram form, in order to avoid unnecessarily obscuring the Disclosure. Thus, the specific details described are merely illustrative. Certain embodiments may be modified from the exemplary details described above and still be considered to fall within the scope of the Disclosure.

[0050]

[0058] Wherever “one embodiment” or “one embodiment” is referred to throughout this specification, it means that the specific features, structure, or characteristics described in relation to that embodiment are included in at least one embodiment. Therefore, the appearance of the phrase “in one embodiment” or “in one embodiment” in various places throughout this specification does not necessarily all refer to the same embodiment. Furthermore, the term “or” is intended to mean inclusive “or” rather than exclusive “or.” Where the terms “about” or “approximately” are used herein, it is intended that the nominal values ​​presented are accurate within ±10%.

[0051]

[0059] Although the operations of the methods described herein are shown and described in a specific order, the order of the operations of each method can be changed so that certain operations can be performed in reverse order, thereby allowing certain operations to be performed at least partially concurrently with other operations. In another embodiment, the instructions or sub-operations of separate steps may be performed intermittently and / or alternately.

[0052]

[0060] The above description is to be understood as illustrative and not limiting. By reading and understanding the above description, many other embodiments will be obvious to those skilled in the art. Accordingly, the scope of this disclosure should be determined with reference to the appended claims and together with the entire scope of equivalents to which those claims are entitled.

Claims

1. It is a sticker, A base portion configured to connect to a groove formed by a first surface of a first component, wherein the base portion has a notch at its bottom, and the notch is configured to bend the base portion laterally in response to a mounting force, A sealing portion extending from the base portion, configured to form an airtight seal between the sealing surfaces of the first component and the second component in response to the application of a threshold sealing force to the sealing portion. A seal equipped with a seal.

2. The seal according to claim 1, wherein the first surface of the first component is substantially parallel to the sealing surface of the second component, and the first component is movable relative to the second component.

3. The seal according to claim 1, wherein at least the sealing portion of the seal comprises a flexible elastomer material.

4. The seal according to claim 1, wherein the first component is a load port door of a factory interface, and the second component is a frame of a load port having an opening for receiving the load port door, the load port door moves to a closed position in response to the application of a threshold sealing force to the sealing portion, and the threshold sealing force is applied substantially perpendicular to the plane of the first surface of the first component.

5. The seal according to claim 1, wherein the threshold sealing force is approximately 50 to 210 Newtons.

6. The seal according to claim 1, wherein the sealing portion includes a serpentine cross section cantilevered from the first side of the base portion opposite the notch.

7. The seal according to claim 1, wherein the sealing portion includes an inclined tip portion configured to form a flat sealing interface between the sealing portion and the sealing surface of the second component in response to the application of the threshold sealing force.

8. The seal according to claim 1, wherein the sealing portion is configured to bend at least partially in response to the threshold sealing force applied to the distal end of the sealing portion.

9. The seal according to claim 1, wherein at least a portion of the groove formed by the first surface of the first component is a dovetail groove having two side walls and a bottom wall, and the maximum width between the two side walls is greater than the depth of the dovetail groove.

10. A load port door, and said load port door is Outer appearance and, The inner surface includes grooves formed on the inner surface, The seal connected to the groove and The seal is equipped with, A base portion configured to connect to the groove, the base portion having a notch at its bottom, which is configured to bend laterally according to the mounting force, A sealing portion extending from the base portion, configured to form an airtight seal between the load port door and the sealing surface of the load port frame in response to the application of a threshold sealing force to the sealing portion. A load port door according to claim 1, comprising:

11. The load port door according to claim 10, wherein the inner surface of the load port door is configured to be substantially parallel to the sealing surface of the frame of the load port, and the load port door is configured to be movable relative to the frame of the load port.

12. The load port door according to claim 10, wherein at least the sealing portion of the seal comprises a flexible elastomer material.

13. The load port door according to claim 10, wherein the threshold sealing force is approximately 50 to 210 Newtons, and the threshold sealing force is applied substantially perpendicular to the plane of the inner surface.

14. The load port door according to claim 10, wherein the sealing portion has a serpentine cross section cantilevered from the first side of the base portion opposite the notch.

15. The load port door according to claim 10, wherein the sealing portion includes an inclined tip portion configured to form a flat sealing interface between the sealing portion and the sealing surface of the frame of the load port in response to the application of a threshold sealing force.

16. The load port door according to claim 10, wherein the sealing portion is configured to bend at least partially in response to the threshold sealing force applied to the distal end of the sealing portion.

17. A load port for receiving a substrate carrier, the load port is A frame adapted to connect the load port to a factory interface, the frame having a transport opening through which one or more substrates can be transported between the substrate carrier and the factory interface, A load port door configured to substantially fill the transport opening, comprising a first surface that forms a groove, A seal connected to the groove formed on the first surface of the load port door and The seal is equipped with, A base portion is connected to the groove of the load port door via a base portion, and the base portion has a notch at the bottom of the base portion configured to bend the base portion laterally according to the mounting force, A sealing portion extending from the base portion, configured to form an airtight seal between the load port door and the sealing surface of the frame in response to the application of a threshold sealing force to the sealing portion. A load port equipped with this feature.

18. The load port according to claim 17, wherein the sealing portion has a serpentine cross section cantilevered from the first side of the base portion opposite the notch, and the sealing portion is configured to flex at least partially in response to the threshold sealing force applied to the distal end of the sealing portion.

19. The load port according to claim 17, wherein the sealing portion includes an inclined tip portion configured to form a flat sealing interface between the sealing portion and the sealing surface of the frame in response to the application of a threshold sealing force.

20. The load port according to claim 17, wherein the threshold sealing force is approximately 50 to 210 Newtons, and the threshold sealing force is applied substantially perpendicular to the plane of the first surface of the load port door.

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