Method and device for distributing gas into a container

Abstract

A method for controlling the flow of purge gas into a substrate container and a purge flow distribution module are provided. The purge flow distribution module includes a purge module having an inlet for receiving the flow of purge gas, a check valve for adjusting the direction of the flow of purge gas, and an outlet for supplying purge gas, and a chamber surrounding at least the outlet of the purge module. The chamber includes a first opening for leading a first flow path to at least one rear gas distribution device for distributing a first portion of the purge gas to the rear of the substrate container, and a second opening for leading a second flow path to at least one front gas distribution device for distributing a second portion of the purge gas to the front of the substrate container.

Description

Technical Field

[0001] The present disclosure relates to methods and systems for controlling or distributing gas into a container. More specifically, the present disclosure relates to a purge flow distribution system for controlling or distributing the flow of purge gas to a substrate container and its modules.

Background Art

[0002] A substrate in the form of a wafer can be processed to form semiconductor devices. The wafer substrate, or simply the substrate, undergoes a series of process steps. Exemplary process steps can include, but are not limited to, depositing a material layer, doping, etching, or chemically or physically reacting the substrate material(s). A substrate container is used to store and transport the wafer being processed between process steps within a manufacturing facility. During some process steps, the substrate is processed by processing equipment within a clean environment (e.g., a clean room). During processing, gas must be introduced into and removed from the substrate container, such as during a purge process, and thus the FOUP needs to have one or more locations through which purge gas can enter and exit the FOUP. The substrate can be transferred from the substrate container to a processing tool via an equipment front end module (EFEM). The EFEM generally includes a load port for receiving the substrate container, a transfer unit, a frame or “mini environment,” and a fan filter unit used to generate a gas flow within the EFEM.

[0003] When in use, the substrate container can be docked to the load port. The door is then disengaged from the substrate container, allowing the transport unit housed within the EFEM to access the substrates contained within the container for processing. The gas flow introduced by the fan filter unit flows through the EFEM from the top to the bottom. When the front opening of the substrate container interfaces with the load port opening of the EFEM, some of the gas flowing through the EFEM across the load port opening may be unintentionally directed into the interior of the container, potentially hindering the purging ability of the substrate container by temporarily increasing the relative humidity or oxygen levels in the microenvironment of the substrate container, which may be undesirable.

[0004] Purge gases can be used to protect substrates by removing or preventing the ingress of contaminants and to improve the processing yield of those substrates, such as wafers. The purge gas is typically supplied by diffusers, such as diffuser towers, which are located at each port configured to receive the purge gas and provide a standard flow rate based on the supply of purge gas to the ports. These are installed in the substrate container by placing the diffusers inside the container and attaching them to fittings located inside the wafer container. The purge assembly can direct the flow of received purge gas to the diffusers so that it is supplied to specific locations within the wafer container.

[0005] Containers used for substrate processing can be purged with an appropriate purge gas to expel moist air or other potential contaminants, protecting wafers and improving the yield of their processing. Purging can be provided inside the container using a purge assembly. Purge assemblies for substrate containers, such as front-opening unified pods (FOUPs), typically include several separate components, including grommets, valves such as check valves, and various sealing members. Diffusers can be installed in the purge assembly by positioning them inside the container and attaching them to fittings provided on the inside of the substrate container once the purge assembly is installed inside. The purge assembly can direct the flow of received purge gas to the diffuser so that it is supplied to a specific location within the substrate container. Filters are typically held in place by fixing them in place within the filter element, and the filter element is then included in the purge assembly. Filters are typically circular. [Overview of the project]

[0006] This disclosure relates to methods and systems for controlling or distributing purge for substrate containers, such as FOUPs or pods (e.g., reticle pods) used in semiconductor manufacturing, such as wafer or reticle transport containers. More specifically, this disclosure relates to a purge flow distribution system for controlling or distributing the flow of purge gas to substrate containers and their modules.

[0007] The purge module can be configured to filter the incoming flow, direct a first portion of the filtered incoming flow to a diffuser, and direct a second portion of the filtered incoming flow to another space, thereby directing this second portion to another structure for introduction into the substrate container, and improving the purging operation within the substrate container via an additional introduction point for the purge gas.

[0008] The purge module can be configured to be installed before the diffuser is installed in the substrate container, and the substrate container and purge module can be configured to allow the assembled diffuser and purge module to be inserted into the internal space of the substrate container shell from outside the shell, thereby installing the purge module and diffuser in the substrate container. This allows for the insertion of the purge module and diffuser without the need to work inside the substrate container shell. This reduces the possibility of installation errors and / or reduces the generation of particles or the addition of contaminants inside the substrate container shell. This reduces wafer loss and improves the yield from processes using substrate containers containing such purge modules and diffusers.

[0009] In one embodiment, a filter having an opening can be used, allowing some components of the purge module to extend through the filter with reduced impact on the overall length of the purge module. This allows, for example, the use of a larger check valve, enabling a larger purge flow without causing problems such as lifting and pressure spikes, and thus improving the effectiveness of the purge.

[0010] In one embodiment, a method is provided for distributing a flow of purge gas into a substrate container. The method includes receiving the flow of purge gas at the inlet of a purge module and supplying the purge gas from the outlet of the purge module into a chamber formed by a combination of the purge module and a gas distributor of a purge gas assembly, the gas distributor having at least one outlet. The method further includes, within the chamber, dividing the purge gas into at least a first flow path and supplying the purge gas to at least one outlet of the gas distributor.

[0011] In another embodiment, a purge gas assembly is provided for supplying purge gas to a substrate container. The purge gas assembly includes a gas distributor having at least one outlet, and a purge module including an inlet, a check valve, and an outlet for receiving the flow of purge gas. The combination of the gas distributor and the purge module forms a chamber, which is configured to supply purge gas to at least one outlet of the gas distributor.

[0012] In yet another embodiment, a method is provided for assembling a substrate container having a gas distribution device. The method comprises attaching a purge gas assembly to the bottom wall of a substrate container, wherein the purge gas assembly includes a gas distributor having at least one outlet; assembling a purge module including an inlet, a check valve, and an outlet for receiving a flow of purge gas; and inserting the purge module into the gas distributor to form a chamber, such that the chamber is configured to supply purge gas to at least one outlet, the method being performed outside the substrate container.

[0013] Therefore, as described herein, a substrate container or purge gas assembly having a purge gas assembly has at least the following advantages:

[0014] The structure is configured to supply purge gas from an existing rear purge gas inlet location to a front gas distribution device such as a manifold or diffuser, wherein the purge gas is supplied to the front gas distribution device through or along the substrate container shell.

[0015] A structure configured to control or distribute purge gas from the rear purge gas inlet to the front of the substrate container by splitting or diverting a portion of the purge gas, so that the amount of purge gas can be adjusted for optimal performance.

[0016] A method for transporting or controlling the flow of purge gas from an inlet location(s) to a gas distribution device within a substrate container, particularly from a rear purge module to a front gas distribution device.

[0017] In one embodiment, the purge gas assembly includes a network of separate gas distribution devices for distributing the flow of purge gas into the internal space. In at least this embodiment, two or more diffuser inlets are connected via a supply line, resulting in the purge gas being combined and distributed or separated into two or more channels to separate gas distribution devices.

[0018] In one embodiment, the purge module includes a grommet, a check valve at least partially received within the grommet, and a module body. The module body includes a cavity configured to house the grommet and the check valve. The module body defines one or more passages from the cavity. The purge module further includes a filter and a filter retainer. The filter retainer and module body are configured to house the filter. The purge module also includes a diffuser retainer configured to support a diffuser. The diffuser retainer includes a diffuser inlet. The filter retainer and diffuser retainer are configured such that a first portion of the gas flow through the filter enters the diffuser inlet, and a second portion of the gas flow through the filter passes through one or more openings defined by one or both of the filter retainer and the diffuser retainer.

[0019] In one embodiment, the purge module further comprises a diffuser. In one embodiment, the diffuser is entirely within the periphery of the module body in a plan view.

[0020] In one embodiment, the module body includes a projection extending from a surface, the surface including at least one end of one or more passages. In one embodiment, a portion of the cavity is defined by the projection, and a portion of the check valve extends into this portion of the cavity.

[0021] In one embodiment, the filter includes an opening defined by its inner circumference, the opening being configured to receive a projection. In one embodiment, the filter retainer and module body are configured to clamp the filter along the entire inner and outer circumference of the filter when the filter retainer and module body are snap-fitted together.

[0022] In one embodiment, the module body includes a groove provided on the outer surface of the module body, and the purge module further comprises a lip seal disposed within the groove.

[0023] In one embodiment, the purge module includes a module retainer, which is configured to engage with one or more features of the substrate container.

[0024] In one embodiment, the module body and the filter retainer are configured to be joined by a snap-fit.

[0025] In one embodiment, a method for introducing a purge gas into a substrate container includes: receiving the purge gas in a grommet of a purge module; introducing the purge gas through a check valve into a cavity defined in the module body of the purge module; introducing the purge gas from the cavity into a filter through one or more passages in the module body; introducing a first portion of the purge gas from the filter into a diffuser, the diffuser being held in a diffuser retainer included in the purge module; and introducing a second portion of the purge gas out of the purge module through one or more openings defined by one or both of the filter retainer and the diffuser retainer.

[0026] In one embodiment, a second portion of the purge gas is introduced into a chamber surrounding the purge module, and the method further includes introducing the second portion of the purge gas from the chamber to a second diffuser.

[0027] In one embodiment, the flow rate of the purge gas received by the grommet is in the range of 200 standard L / min to 400 standard L / min.

[0028] In one embodiment, the method includes assembling a purge module. Assembling the purge module includes attaching a check valve to the grommet, inserting the grommet into the module body, clamping a filter between the module body and the filter retainer, and attaching a diffuser retainer to the filter retainer. The diffuser retainer includes a diffuser inlet.

[0029] In one embodiment, the filter retainer and the diffuser retainer are configured such that a first portion of the gas flow through the filter enters the diffuser inlet and a second portion of the gas flow through the filter passes through one or more openings defined by one or both of the filter retainer and the diffuser retainer.

[0030] In one embodiment, the method further includes attaching a diffuser to the diffuser retainer. In one embodiment, the method further includes inserting the diffuser through an opening provided in the substrate container from outside the substrate container and inserting the purge module into the opening such that at least a portion of the purge module is received within the opening. In one embodiment, the opening is formed by a shell and a bottom plate of the substrate container.

[0031] In one embodiment, the method further includes attaching a locking ring to the module body such that the locking ring can rotate independently of the module body. In one embodiment, the method further includes inserting the purge module into an opening provided on the substrate container from outside the substrate container such that at least a portion of the purge module is received within the opening and rotating the locking ring such that the locking ring engages one or more engagement features provided in the opening.

[0032] In one embodiment, the purge module includes a grommet, a check valve at least partially received within the grommet, and a module body. The module body includes a cavity configured to house the grommet and the check valve. The module body defines one or more passages from the cavity. The purge module further includes a filter and a filter retainer. The filter retainer and the module body are configured to house the filter. The module body includes a projection extending from a surface, the surface including at least one end of one or more passages. The filter includes an opening defined by an inner circumference, the opening configured to receive the projection.

[0033] In one embodiment, a portion of the cavity is defined by a projection, and a portion of the check valve extends into this portion of the cavity.

[0034] In one embodiment, the filter retainer and module body are configured to clamp the filter along the entire inner and outer circumference of the filter when the filter retainer and module body are snap-fitted together.

[0035] In one embodiment, the purge module further includes a diffuser retainer configured to support a diffuser, the diffuser retainer including a diffuser inlet.

[0036] In one embodiment, the filter retainer and diffuser retainer are configured such that a first portion of the gas flow through the filter enters the diffuser inlet, and a second portion of the gas flow through the filter passes through one or more openings defined by one or both of the filter retainer and the diffuser retainer.

[0037] In one embodiment, the purge module further comprises a diffuser. In one embodiment, the diffuser is entirely within the periphery of the module body in a plan view.

[0038] In one embodiment, the module body includes a groove provided on the outer surface of the module body, and the purge module further comprises a lip seal disposed within the groove.

[0039] In one embodiment, the purge module includes a module retainer, which is configured to engage with one or more features of the substrate container.

[0040] In one embodiment, the module body and the filter retainer are configured to be joined by a snap-fit.

[0041] In one embodiment, the method includes assembling a purge module. Assembling the purge module includes attaching a check valve to a grommet and inserting the grommet into the module body. The module body includes a surface having a projection. The method further includes positioning a filter having an opening such that the projection extends through the opening, and attaching a filter retainer to the module body such that the filter retainer and the module body clamp the filter at its outer circumference and inner circumference. The inner circumference defines the opening.

[0042] In one embodiment, the method further includes attaching a diffuser retainer to a filter retainer, the diffuser retainer including a diffuser inlet. In one embodiment, the filter retainer and diffuser retainer are configured such that a first portion of the gas flow through the filter enters the diffuser inlet, and a second portion of the gas flow through the filter passes through one or more openings defined by one or both of the filter retainer and the diffuser retainer. In one embodiment, the method further includes attaching a diffuser to the diffuser retainer. In one embodiment, the method further includes inserting a diffuser from outside the substrate container through an opening provided in the substrate container, and inserting a purge module into the opening so that at least a portion of the purge module is received into the opening.

[0043] In one embodiment, the method further includes attaching the locking ring to the module body so that the locking ring can rotate independently of the module body. In one embodiment, the method further includes inserting the purge module from outside the substrate container into an opening provided on the substrate container so that at least a portion of the purge module is received into the opening, and rotating the locking ring so that the locking ring engages with one or more engaging features provided in the opening.

[0044] In one embodiment, the filter retainer and module body clamp the filter over the entire outer circumference and the entire inner circumference of the filter.

[0045] In one embodiment, the filter retainer and the module body are joined by snap fitting.

[0046] In one embodiment, the module body defines a cavity, a portion of the cavity is defined by a projection, and a portion of the check valve extends into this portion of the cavity.

[0047] In one embodiment, a purge assembly for a substrate container includes a housing and a purge module defining a chamber. The purge module includes a grommet, a check valve at least partially received within the grommet, and a module body. The module body includes a cavity configured to house the grommet and the check valve. The module body defines one or more passages from the cavity. The purge module further includes a filter and a filter retainer. The filter retainer and the module body are configured to house the filter. The purge module is configured to receive a flow of purge gas, direct the flow of purge gas through the check valve to the filter, and allow at least a portion of the flow of purge gas to flow from the purge module into the chamber.

[0048] In one embodiment, the purge module further includes a diffuser configured to extend from the housing. In one embodiment, the diffuser is held within the housing. In one embodiment, the purge module contacts the diffuser so that the diffuser is held in an opening provided in the housing. In one embodiment, the purge module further includes a diffuser retainer further configured to support the diffuser. [Brief explanation of the drawing]

[0049] [Figure 1] This is an exploded view of a substrate container having a purge gas assembly according to one embodiment. [Figure 2A] An exploded view of a purge gas assembly according to one embodiment is shown. [Figure 2B] An exploded view of a purge gas assembly according to one embodiment is shown. [Figure 3] A cross-sectional view of a purge gas assembly and a purge module for receiving purge gas, according to one embodiment, is shown. [Figure 4A] This shows a purge gas assembly attached to a carrier plate according to one embodiment. [Figure 4B] This shows a purge gas assembly attached to a carrier plate according to one embodiment. [Figure 4C] This shows a purge gas assembly attached to a carrier plate according to one embodiment. [Figure 5] A flowchart for controlling the flow of purge gas through a purge gas assembly according to one embodiment is shown. [Figure 6] A flowchart for assembling a substrate container having a purge gas assembly according to one embodiment is shown. [Figure 7A] An exploded view of a purge module according to one embodiment is shown. [Figure 7B] An exploded view of a purge module according to one embodiment is shown. [Figure 8] A cross-sectional view of a purge module according to one embodiment is shown. [Figure 9A] This shows a cross-sectional view of the purge module on the inner circumference of a filter according to one embodiment. [Figure 9B] This is a cross-sectional view of the purge module shown in Figure 9A at the outer circumference of the filter, according to one embodiment. [Figure 10] A flowchart showing a method for assembling a purge module according to one embodiment is shown. [Figure 11] A flowchart of the purge gas flow through the purge module according to one embodiment is shown. [Modes for carrying out the invention]

[0050] The terms “front” and “rear,” as well as “right” and “left,” are used herein to describe various elements, but the elements are not limited by these terms. Rather, these terms are used solely to distinguish one element from another. Instead, these terms are to be interpreted broadly to include any positional relationship between elements, including front, back, side, top, bottom, or any combination thereof, without departing from the scope of this disclosure.

[0051] When used herein and in the appended claims, the singular forms "a," "an," and "the" refer to multiple subjects unless otherwise explicitly indicated. When used herein and in the appended claims, the term "or" generally means "and / or" unless otherwise explicitly indicated.

[0052] The following detailed description should be read with reference to the drawings, where similar elements in different drawings are numbered the same. The detailed description and drawings, which are not necessarily to scale, illustrate exemplary embodiments and are not intended to limit the scope of the invention. The illustrated exemplary embodiments are intended for illustrative purposes only. Selected features of any exemplary embodiment may be incorporated into additional embodiments unless otherwise expressly stated to the contrary.

[0053] This disclosure relates to methods and systems for controlling or distributing purge gas for wafer or reticle transport containers, such as substrate containers, for example, front-opening unified pods (FOUPs) or pods (e.g., reticle pods) used in semiconductor manufacturing. A substrate container is a container for transporting substrates during different processing steps, and the substrate may be in the form of a wafer, reticle, panel, or tray that can be processed to form a semiconductor device. The substrate container is accessed through a front opening of the substrate container. More specifically, this disclosure relates to a purge gas assembly for controlling or distributing the flow of purge gas into a substrate container, wherein the purge gas assembly is configured to supply the flow of purge gas into the internal space of the substrate container by dividing the flow of purge gas into a first channel for supplying to a first gas distribution device and a second channel for supplying to a second gas distribution device. In some embodiments, the purge gas assembly may be configured as an outlet to prevent gas from entering the front opening of the substrate container when it is open, or to facilitate the discharge of purge gas from the substrate container when the substrate container is closed.

[0054] Figure 1 shows an exploded view of a substrate container 100, a carrier (or conveyor) plate 115, and a purge gas assembly 120 for supplying purge gas to the substrate container 100, according to one embodiment. In one embodiment, the purge gas assembly 120 may be configured to filter the flow of received purge gas, as further described below, to direct a first portion of the purge gas to a first gas distribution device and a second portion of the purge gas to at least a second gas distribution device, thereby improving the purging operation within the substrate container through additional points of introduction of the purge gas. In some embodiments, the components of the purge gas assembly 120 may include one or more purge modules, gas distribution devices, control valves, piping, etc. In some embodiments, some of the components, such as purge modules, may be assembled or mounted separately from the purge gas assembly 120, for example, modular components. Thus, at least a portion of the purge gas assembly 120 may be pre-assembled on the carrier plate 115 and mounted on the substrate container 100. In some embodiments, the purge module can be assembled or attached to the purge gas assembly 120 after the purge gas assembly 120 has been attached to the substrate container 100, so that the purge module can be installed in the substrate container 100 without (or with minimal) any operation performed inside the container body 102 of the substrate container 100. By allowing some components of the purge gas assembly 120, specifically the purge module, to be installed from the outside of the substrate container 100, such installation can reduce the possibility of installation errors or reduce the generation of particles or addition of contaminants within the container body or the shell of the substrate container. This can reduce substrate loss, such as wafers, and improve yield from processes using substrate containers that include purge gas assemblies or gas distribution devices.In some embodiments, the purge gas assembly 120 may be configured to include any of its components, including any gas distribution device such as a diffuser or manifold, which are mounted together before being attached to the substrate container 100. In other embodiments, the different components of the purge gas assembly 120 may be modular in that different components may be removed or modified as needed.

[0055] As shown in Figure 1, the substrate container 100 comprises a container body 102 and a front door 103. The substrate container 100 is a container configured to house one or more substrates for transport, storage, or processing. The substrates housed in the substrate container 100 are, for example, semiconductor substrates such as wafers. The substrate container 100 can be any suitable container for substrates, such as a front-opening unified pod (FOUP). In one embodiment, the substrate container 100 can be a container for reticles, such as a reticle pod. In such an embodiment, the container body 102 may be included as at least part of an outer pod configured to house an inner pod.

[0056] The container body 102 defines an internal space 104 configured to accommodate one or more substrates, such as wafers, for processing. For example, a front opening, created by removing the front door 103, allows substrates to be inserted into or removed from the container body 102. The container body 102 includes a first side wall 105, a second side wall 106, a rear wall 107, a top wall 108, and a bottom wall 109. The substrate container 100 may include a plurality of inlet purge ports 110 or outlet purge ports 110 in the bottom wall 109 or the first and second side walls 105 and 106, corresponding to the inlet(s) or outlet(s) of the substrate container 100. The plurality of inlet purge ports 110 (and outlet purge ports) can be connected to a purge gas assembly 120, as will be further described below. At least one outlet port 110 may be provided to discharge gas in the internal space 104 from the substrate container 100 and may be located on the bottom wall 109. It is understood that inlet purge ports 110 or outlet purge ports 110 may also be provided at different locations along the container body 102, for example, on the rear wall 107.

[0057] The substrate container 100 may also include upper automation features such as an equipment hookup 112 on the upper wall of the container body 102. In one embodiment, the equipment hookup 112 may allow a standard automated attachment (not shown) for moving the substrate container 100, such as an automated arm, to be attached to the substrate container 100. For example, an automated arm may be used to move the substrate container 100 between different processing equipment. In one embodiment, the substrate container 100 may include one or more handles (not shown) that allow a user (e.g., a technician) to move the substrate container 100 manually.

[0058] The carrier plate 115 can provide a base to which the container body 102 can be attached, or a base to which the purge gas assembly 120 can be attached. The carrier plate 115 can be a bottom plate having an automated interface configured to be attached to a conveyor system for processing substrates or assembling substrate containers 100.

[0059] The purge gas assembly 120 can be mounted on the upper surface of the carrier plate 115 or formed integrally with it. In one embodiment, a portion of the purge gas assembly 120 can be located within the container body 102. In one embodiment, the purge gas assembly 120 can be located adjacent to the container body 102. In one embodiment, the purge gas assembly 120 can be at least partially positioned between the container body 102 and the carrier plate 115. Although the purge gas assembly 120 is discussed herein as being mounted on the carrier plate 115, such disclosure is not intended to be limiting. In one embodiment, the purge gas assembly 120 can be mounted on the bottom wall of the substrate container 102 or provided between the substrate container 100 and the carrier plate 115.

[0060] The purge gas assembly 120 is configured to distribute the purge gas to one or more gas distribution devices. The purge flow can be any suitable gas that does not contaminate the environment inside the container body 102. Non-limiting examples of purge flow gases may be nitrogen, clean dry air (CDA), etc. The purge gas assembly 120 includes a gas distributor 130 configured to receive a purge module, such as the purge module 230 described below and shown in Figure 2, as will be described in more detail below. The purge module 230 may have an inlet for receiving the flow of purge gas, a check valve for adjusting the direction of the flow of purge gas, and an outlet for supplying purge gas. The purge module 230 may be configured so that a first gas distribution device 140, such as a diffuser or manifold, can be attached to the purge module 130. In some embodiments, the purge gas assembly 120 may include at least two purge modules 230 for supplying purge gas to the first and second sides of the substrate container 100, each of which is configured to supply purge gas to one or more of the following: a rear gas distribution device for the rear of the substrate container 100, a front gas distribution device 180 for the front of the substrate container 100, or other purge ports on the substrate container 100. In some embodiments, the purge gas assembly 120 may be configured so that a first gas distribution device 140 can be directly attached to the purge gas assembly 120 or a portion thereof for supplying purge gas into the substrate container 100.

[0061] In some embodiments, the purge gas assembly 120 may also include a control valve connected to a purge module 130, configured to control the distribution of the purge gas flow, and tubing 170 for connecting the purge module 130 to at least one front gas distribution device for distributing the purge gas to the front of the substrate container 100. Although the purge gas assembly 120 is described herein as including a control valve, it is understood that such disclosure is not limiting, as other devices may be used to control or regulate the flow of purge gas through the purge gas assembly 120 to the front gas distribution device. For example, in some embodiments, an orifice, a spring-loaded diverter, or tubing or piping having a smaller or larger cross-sectional area may be used to regulate the flow of purge gas.

[0062] Figures 2A and 2B are exploded and partial cross-sectional views of exemplary embodiments of an assembly of a substrate container 200 having a purge gas assembly 220 which may have the same or similar features as the purge gas assembly 120 of Figure 1. The substrate container 200 has at least an internal space 204, a rear wall 207, and a bottom wall 209, the bottom wall 209 including at least an input purge port 210 for receiving a gas distribution device such as a diffuser or manifold 240. At least some of the components of the purge gas assembly 220 may be mounted on the top surface of a carrier plate 215 and include a purge module 230.

[0063] The purge gas assembly 220 includes a gas distributor 222 having one or more outlets, the gas distributor 222 configured to receive a purge module 230. In one embodiment, the gas distributor may be a plenum, manifold, or other gas distribution structure, and may have, for example, a first outlet defining a first opening 224 for directing a first flow path of a first portion of purge gas for distribution to the rear of the substrate container 200 via an input purge port 210, and a second outlet defining a second opening 226 for directing a second flow path of a second portion of purge gas for distribution to the front (not shown) of the substrate container 200. When the purge module 230 is inserted into the gas distributor 222, the combination of the purge module 230 and the gas distributor 222 forms a fluid-sealed chamber such that the purge gas from the outlet of the purge module 230 is divided into a first flow path to a first outlet of the gas distributor and a second flow path to a second outlet of the gas distributor, receiving the plenum, manifold, or other gas distribution device into the enclosed space or volume of the chamber.

[0064] In one embodiment, the combination of the gas distributor 222 and the purge module 230 is configured such that a second portion of the purge gas flow received through the inlet of the purge module 230 is received in the chamber and directed to a second opening 226 through the outlet of the purge module 230, while a first portion of the purge gas flow is divided or diverted from the outlet of the purge module 230, e.g., a diffuser retainer or diffuser inlet, through a first opening 224 to a rear diffuser 240, distributing the purge gas to the rear of the substrate container 200 via an input purge port 210. In one embodiment, two or more diffuser inlets are connected via a supply line, resulting in the purge gas being combined and distributed or separated into two or more flows to two or more diffusers. In one embodiment, the pressurization of the chamber can be controlled by a control valve connected to the second outlet of the gas distributor 222 at the second opening 226. For example, by adjusting or controlling a control valve to regulate or distribute the gas flow in the second flow path, some of the purge gas flows through the control valve and some flows through the first opening 224, for example, the rear diffuser 240. Thus, the purge gas is divided or distributed within the chamber to supply purge gas to the internal space 204, for example, to the front diffuser via the second opening 226 and to the rear diffuser via the first opening 224. Although not intended to be limiting, at least one gas distribution device is described as a rear gas distribution device or diffuser and a front gas distribution device or diffuser. For example, it is understood that three or more gas distribution devices may be used in various locations of the substrate container 200 or in plugged or capped portions of the purge gas assembly, without including a gas distribution device for distributing purge gas into the substrate container 200.

[0065] Referring again to Figures 2A and 2B, the assembly of the substrate container 200 having the purge gas assembly 220 is described below. As mentioned above, in some embodiments, the purge gas assembly 220 or its components can be pre-assembled. For example, in one embodiment, the purge gas assembly 220 is mounted on the top surface of the carrier plate 215, and some of its components, such as pipes, control valves, and gas distributors 222, are assembled on the top surface of the carrier plate 215. The carrier plate 215 (or the purge gas assembly 220 only) can be mounted on the bottom wall 209 of the substrate container 200. It is understood that the mounting of the carrier plate 215 to the substrate container 200 can be securely fastened, for example, using tabs, screws, or other fastening devices, and is intended to be mounted in a way that allows for disassembly or removal as needed. After the carrier plate 215 having the purge gas assembly 220 is attached to the substrate container 200, for example, after the carrier plate 215 is formed and integrated as the bottom plate of the substrate container 200, the purge module 230 is inserted into the purge gas assembly 220, specifically into the gas distributor 222. Thus, the combination of the purge module 230 and the gas distributor 222 forms a chamber for directing at least one first flow path to the outlet of the gas distributor 222. In one embodiment, the purge module 230 may include a gas distribution device, such as a diffuser 240, which can be inserted into the internal space 204 of the substrate container 200 via an input purge port 210. In one embodiment, the purge gas assembly includes a network of separate gas distribution devices for distributing the flow of purge gas into the internal space. In at least this embodiment, two or more diffuser inlets are connected via supply lines, resulting in the purge gas being combined and distributed or separated into two or more flow paths to separate gas distribution devices.Considering at least the structure of the purge gas assembly 220 and the purge module 230, it should be understood that the purge module 230 is modular in that it can be removed and replaced in such a way that it can be installed inside the purge gas assembly 220 or the substrate container 200 without requiring (or requiring minimal) any operation performed inside the substrate container 200. The gas distributor 222 and chamber have been described above with respect to at least two outlets or openings, but such disclosure is not intended to be limiting. For example, in one embodiment, the gas distributor 222 and chamber may have only one outlet for receiving purge gas from the outlet of the purge module 230 in a volume or space formed between the gas distributor 222 and the purge module 230. The purge module 230 for receiving inlet purge gas has been described as a rear purge module(s), but it should be understood that the purge module 230 may be positioned in other locations, e.g., front, middle, or side, depending on the substrate processing system and substrate container. Furthermore, although gas distribution devices have been described in this specification as diffusers or manifolds, it is understood that other gas distribution devices may be included. For example, a gas distribution device may be a diffuser, a manifold, a part having a membrane, a slit or nozzle, or made of a porous material, an elbow or a flow divider or a similar structure that can guide a purge gas into the interior of a substrate container, and combinations thereof.

[0066] Figure 3 is a cross-sectional view of an exemplary rear embodiment of a substrate container 300 having a purge gas assembly 320 which may have the same or similar features as the purge gas assembly 120 of Figure 1 or 220 of Figure 2. The substrate container 300 has an internal space 304, a rear wall 307, and a bottom wall 309, the bottom wall 309 including an inlet purge port 310 for receiving a gas distribution device such as a diffuser 340. The purge gas assembly 320 is mounted on the upper surface of a carrier plate 315 and includes a purge module 330 and a gas distributor 322, which together form a chamber for receiving purge gas from the purge module 330.

[0067] The combination of the gas distributor 322 and the purge module 330 includes, for example, a first outlet defining a first opening 324 for guiding a first flow path of a first portion of the purge gas to be distributed to the rear of the substrate container 300 via an inlet purge port 310 and / or a rear diffuser 340, and a second outlet defining a second opening 326 for guiding a second flow path of a second portion of the purge gas to be distributed to the front (not shown) of the substrate container 300. In one embodiment, the purge module 330 is inserted into the gas distributor 322, and the diffuser 340 is attached to the purge module 330 and inserted into the rear of the substrate container 300 via the inlet purge port 310 to form a seal configuration. In one embodiment, a sealing ring 350 may be provided around the outer surface of the purge module 330 so that at least the outlet of the purge module 330 is fluidly sealed by the gas distributor 322 and the sealing ring 350. Therefore, the purge gas exiting the outlet of the purge module 330 is divided within a chamber in which a first portion of the purge gas is directed to a first opening 324 and a second portion of the purge gas is directed to a second opening 326, and the pressurization is controlled, for example, by a control valve attached to the second outlet of the gas distributor 322. The sealing ring 340 may be a lip seal, an O-ring, a sealing gasket, or other compressible mechanical gasket material, such as a polymer or elastomer material. In some embodiments, the purge module 330 can be completely sealed within the gas distributor 322, and in some embodiments, only the outlet of the purge module 330 is sealed by the gas distributor 322. The chamber described herein has been described as the space or volume between the gas distributor 322 and the purge module 330, but it is understood that such disclosure is not intended to be limiting. For example, in some embodiments, the chamber may be formed in part of another structure, such as the chamber body, the bottom wall of a substrate container, or the bottom plate, to form a sealing arrangement with the purge module 330 or other purge gas distributor, so that the purge gas from the outlet of the purge module 330 or other purge gas distributor can be divided or distributed into one or more flow paths.

[0068] In one embodiment, the purge module 330 can be held in the purge gas assembly 320 using a module retainer 355. The module retainer 355 can be configured to hold the purge module 330 to the carrier plate 315 or to the purge gas assembly 320, for example, via a hook, tab, or screw fitting. The module retainer 355 can allow for the separate installation or replacement of the purge module 330 or diffuser 340 on the substrate container 300, separate from the purge gas assembly 320. Thus, the purge module 330 can be a standalone unit that can be later assembled on the substrate container 300.

[0069] In one embodiment, the purge module 330 may include an inlet 331, a check valve 332 for adjusting the direction of purge gas flow, a module body 333, and an outlet 334. At the inlet 331, the flow of purge gas can be received from a purge gas supply system. The purge gas supply system supplies a purge gas, which may generally be an inert gas. The purge gas may include, but is not limited to, one or more of nitrogen, clean dry air (CDA), and ultra-clean dry air (xCDA). The check valve 332 is received in the module body 333 and configured to allow only unidirectional flow of purge gas through the module body 333 from the inlet 331 to the outlet 334. The module body 333 defines one or more passages or paths from the inlet 331 for the purge gas to pass through the purge module 330 and the check valve 332. The purge module 330 may further include a filter positioned before or after the outlet 334, a filter retainer for holding the filter on the purge module 330, a diffuser retainer 335 configured to support a diffuser 340, and a diffuser 340 attached to the purge module 330 or the purge gas assembly 320. The filter retainer and diffuser retainer may be configured to split or distribute the purge gas exiting the outlet 334 such that a first portion of the flow of purge gas through the filter enters a first opening 324 by being at least partially connected to the diffuser 340, and a second portion of the flow of purge gas through the filter passes through one or more openings 337 defined by one or both of the filter retainer and diffuser retainer and enters at least the chamber 322.

[0070] Accordingly, in the embodiments described herein, a purge gas assembly having a chamber formed by a combination of a gas distributor and a purge module allows for multiple openings for the purge gas to exit in order to provide one or more pathways for supplying the purge gas into the internal space of the substrate container 300. That is, the purge gas can flow vertically into the rear diffuser through a first opening, and in some embodiments, it can flow horizontally into the front diffuser through a second opening, allowing for multiple diffusion / purge positions from a single load port inlet. Furthermore, the purge gas is filtered as it is discharged from the outlet of the purge module located after the filter.

[0071] Figures 4A, 4B, and 4C show a purge gas assembly 420 according to one embodiment. The purge gas assembly 420 is mounted on a carrier plate 415 and includes at least two purge modules 430 for distributing purge gas to the first and second sides of a substrate container, for example, 100 in Figure 1, 200 in Figure 2, or 300 in Figure 3.

[0072] Figure 4A is a top view of a purge gas assembly 420 which may have the same or similar features as the purge gas assembly 120 in Figure 1, or 220 in Figures 2A / 2B, or 320 in Figure 3. The purge gas assembly 420 includes at least two gas distributors 430, a rear gas distribution device, e.g., a rear diffuser(s) 440, a control valve(s) 460, tubing 470, and a front gas distribution device(s) 480. At least two gas distributors 430 may receive purge modules, e.g., 230 in Figure 2, 330 in Figure 3, as described above. Purge modules such as 230, 330 may be configured to receive purge gas at an inlet, filter the purge gas, and supply the filtered purge gas to a chamber formed within the purge gas assembly 420. Purge modules such as 230 and 330 can be fluid-sealed with a gas distributor to form a chamber, where a first portion of the purge gas is directed to a first outlet defining a first opening of the gas distributor for distributing the purge gas to the rear of the substrate container via a rear diffuser(s) 440, and at least a second portion of the purge gas is directed to a second outlet defining a second opening of the gas distributor for distributing the purge gas to a front gas distribution device(s) 480 via a second flow path to the front of the substrate container. The front gas distribution device(s) 480 may include connectors, such as elbows, for fluidly connecting the purge gas assembly 420 to the substrate container, or diffusers for distributing the second portion of the purge gas into the internal space of the substrate container.

[0073] The second flow path is formed by having control valves 460 connected to a second opening (e.g., 226 in Figure 2 or 326 in Figure 3) of a gas distributor (e.g., 222 in Figure 2 or 322 in Figure 3) and configured to control the distribution of a second portion of the purge gas from the purge module 430. The control valves 460 are configured to divert the amount of purge gas from the rear purge module 430, for example by controlling the pressurization in the chamber, to control the amount of the second portion of the purge gas distributed to the front gas distribution device 480. The control of the amount of purge gas can be set manually, for example by turning a valve to a set purge gas flow rate using a hand tool, or the amount of purge gas can be set intermittently, either manually or automatically, via automation by a processor-enabled controller that sets or provides automatic control to a set point of purge gas flow, for example, when the FOUP is on the load port. The control valve(s) 460 may include orifice, needle valve, ball valve, butterfly valve, check valve, or similarly constructed valve used to set the flow rate of purge gas supplied to the gas distribution device(s). It is understood that the amount of purge gas may also be set, as needed, using orifice, spring-driven diverter, or piping / pipe having a smaller or larger cross-sectional area to control the amount of purge gas supplied to the front gas distribution device(s) 480.

[0074] As shown in Figure 4B, in one embodiment, the control valve 460 may include a valve body 462, a valve needle 464, a valve retainer 466, a pipe retainer 468, and a sealing ring 461. The valve body 462 includes an inlet 463 that is in the same flow direction as the outlet 469. The inlet 463 may include a snap-fit ​​connection with a second opening of the chamber, and a sealing ring may be provided between the second opening of the chamber and the inlet 463 of the control valve 460 to fluidly seal them. The snap-fit ​​connection may include a flexible component that can deform when a force is applied, for example using a twisting or pushing force, so that mutual locking with the corresponding component occurs when in the final position, for example, the component returns to its original position. The receiving and supplying of the purge gas flow are shown as being in the same flow direction, for example, the inlet 463 and outlet 469 are parallel, but this disclosure is not intended to limit, and other flow patterns, such as an outlet positioned at an angle from the inlet, may be used. Furthermore, the valve body 462 is configured to receive a valve needle 464, which is secured to the valve body using a valve retainer 466 and a sealing ring 461. The valve retainer 466 may snap onto the valve body 462 or be attached via other fastening mechanisms such as cam locks, screw fittings, or locking tabs, and the sealing ring 461 is positioned between the valve needle 464, the valve body 462, and the valve retainer 466 to fluidly seal the valve needle 464 to the valve body 462. The valve body 462 and the valve needle 464 may include corresponding threaded portions 465 to allow precise setting of the control valve 460 to control the precise flow of purge gas to the front gas distribution device(s) 480.

[0075] The valve needle 464 may further include a valve head 467 configured to provide security, such as security device features, to enable setting the flow rate of purge gas to the front gas distribution device(s) 480 and to prevent changes to the valve setting once it has been set. In one embodiment, the security device features may include a cap covering the valve head 467, the valve head 467 having a special design that is only suitable for use with a special tool, such as an Allen wrench or star pattern or a specially molded head, and the valve head 467 is sealed with a hard material such as resin or plastic, such as a hole that needs to be drilled to adjust the valve setting or locking mechanism such as a lock. Thus, the control valve 460 can be reliably set to supply a predetermined amount of purge gas to the front gas distribution device(s) 480.

[0076] Figure 4C shows a top perspective view of a purge gas assembly 420, for example, a set of tubes 470 connected to a control valve 460 and a front gas distribution device 480, having elbow connections for connecting to a front diffuser (not shown) to further form a second flow path. The tubes 470 can be flexible polymer tubes formed from a fluoropolymer such as perfluoroalkoxyalkane (PFA), polyethylene such as high-density polyethylene (HDPE), or similar materials suitable for substrate processing. In one embodiment, the tubes 470 can be configured to be assembled with a reliable connection system to the control valve 460 or the front gas distribution device 480, in order to allow the purge gas assembly 420 to be pre-assembled on a carrier plate 415 outside the substrate container. In one embodiment, the reliable connection system may include snap-fit ​​connectors 468, 472 and sealing rings 461, 471 such as O-rings, sealing gaskets, or other compressible mechanical gasket materials, such as polymer or elastomer material. Therefore, one end of the pipe 470 can be inserted into the outlet 469 of the control valve 460, and a sealing ring 461 can be positioned along the outer surface of the pipe 470, so that when the snap-fit ​​connector 468 is snap-fitted with the outlet 469 of the control valve 460, the sealing ring 461 is compressed and fluidly seals the pipe 470 with the control valve 460. Similarly, the other end of the pipe 470 can be inserted into the front gas distribution device 480, and a sealing ring 471 can be positioned along the outer surface of the pipe 470, so that when the snap-fit ​​connector 472 is snap-fitted with the front gas distribution device 480, the sealing ring 471 is compressed and fluidly seals the pipe 470 with the front gas distribution device 480. The snap-fit ​​connectors 468 and 472 may include flexible components that can be deformed when a force is applied, for example, using a torsional force or compressive force, so that interlocking with the corresponding component on the outlet 469 or the front gas distribution device 480 occurs when the component is in its final position, for example, restoring the component.Therefore, a reliable connection system can be provided for pre-assembling the purge gas assembly 420 onto the carrier plate 415, and as a result, the purge gas assembly 420 can be pre-assembled. Once the carrier plate 415 and the purge gas assembly 420 are mounted on the substrate container, the purge module, and optionally the purge module including the diffuser, can be inserted into the substrate container from the outside of the substrate container without entering the internal space of the substrate container for assembly of the substrate container, or with minimal entry.

[0077] The front gas distribution device 480 can be an elbow connected to an input purge port, for example, 110 in Figure 1, or a diffuser or manifold inserted through the bottom wall of the substrate container. If the front gas distribution device 480 is an elbow, it can be attached or locked to the side wall of the substrate container, for example, via an input purge port, and the diffuser or manifold can then be connected to the front gas distribution device 480 via minimal operation inside the container body. In some embodiments, the front gas distribution device 480 can be configured to allow the diffuser or manifold to be removed or replaced by simply rotating the diffuser or manifold to lock or unlock it from the front gas distribution device 480.

[0078] Therefore, a simple and effective purge gas assembly can be provided to transport purge gas from the inlet and rear purge modules to the front gas distribution device via flexible polymer tubes passing through the shell of the substrate container, without the need to modify the substrate container or drill holes in the carrier plate, and the components can be easily connected with twist locks or snap-fit ​​connections to provide reliable connections. The distribution of such purge gas flow can be routed within the existing FOUP shape with minimal modification, for example, because the pre-assembly of the purge gas assembly can be performed outside the substrate container.

[0079] Figure 5 shows a flowchart of a method for controlling the flow of purge gas through a purge gas assembly according to one embodiment. Method 500 includes, in 510, receiving the flow of purge gas at the inlet of a purge module; in 520, supplying purge gas from the outlet of the purge module into a chamber formed by a combination of the purge module and a gas distributor of the purge gas assembly, wherein the gas distributor has at least one outlet purge module; and in 530, dividing the purge gas within the chamber into at least a first flow path and supplying the purge gas to at least one outlet of the gas distributor.

[0080] In 510, the flow of purge gas is received at the inlet of the purge module. The purge module may include an inlet, a check valve to regulate the direction of the purge gas flow, a module body, and an outlet. At the inlet, the flow of purge gas is received from a purge gas supply system. The purge gas supply system supplies a purge gas, which may generally be an inert gas. The purge gas may include, but is not limited to, one or more of nitrogen, clean dry air (CDA), and ultra-clean dry air (xCDA). The check valve is received within the module body and configured to allow a unidirectional flow of purge gas through the module body from inlet to outlet. The module body defines one or more passages or paths from the inlet to allow the purge gas to pass through the purge module and the check valve. The purge module may further include a filter positioned before or after the outlet, a filter retainer for holding the filter on the purge module, a diffuser retainer configured to support a diffuser, and a diffuser attached to the purge module or purge gas assembly. The filter retainer and diffuser retainer may be configured such that the purge gas exiting the outlet is divided or distributed such that a first portion of the purge gas flow through the filter enters a first opening by being at least partially connected to a diffuser, and a second portion of the purge gas flow through the filter passes through one or more openings defined by one or both of the filter retainer and diffuser retainer and enters at least the chamber. The filter can remove any suitable contaminants such as volatile organic compounds and particulate matter, depending on the structure and composition of the medium used in the filter.Therefore, supplying a flow of purge gas may include one or more of the following: directing the purge gas through a check valve of the purge module into a passage defined in the module body of the purge module; directing the purge gas from the passage through one or more passages in the module body to a filter; directing a first portion of the purge gas from the filter and filter retainer into a first flow path to a first gas distribution device; and directing a second portion of the purge gas from the filter through one or more openings defined by one or both of the filter retainer and diffuser retainer into a second flow path from the purge module to a second gas distribution device.

[0081] In 520, the purge gas is supplied from the purge module into a chamber formed by the combination of the purge module and the gas distributor of the purge gas assembly. The purge gas assembly includes a gas distributor having at least one outlet and a purge module, and the gas distributor and purge module together form a chamber for receiving the purge flow. In one embodiment, the gas distributor has at least one first outlet defining a first opening for guiding a first flow path of a first portion of the purge gas to be distributed to the rear of the substrate container, and at least one second outlet defining a second opening for guiding a second flow path of a second portion of the purge gas to be distributed to the front of the substrate container. In one embodiment, the purge module is inserted into the chamber, and a diffuser is attached to the purge module and inserted into the rear of the substrate container via an inlet purge port to form a sealing configuration. Thus, the purge gas exiting the outlet of the purge module is supplied into a chamber surrounding at least the outlet of the purge module. While gas distributors and chambers have been described in terms of two outlets, such disclosure is not intended to be limiting. For example, a gas distributor or chamber may have a single outlet or single opening or three or more outlets or openings for supplying purge gas to a gas distribution device inside a substrate container.

[0082] In 530, the purge gas is divided into at least a first flow path within the chamber to supply the purge gas to at least one outlet of a gas distributor. After the purge gas exiting the outlet of the purge module is supplied into the chamber, the purge gas may be divided within the chamber, with a first portion of the purge gas directed to a first opening and a second portion of the purge gas directed to a second opening. The first portion of the purge gas can be directed to the first opening of the chamber, for example, via the purge module, e.g., a diffuser retainer or diffuser inlet, or by the chamber itself, e.g., by a passage within the chamber that receives the purge gas and directs it to the first opening. The second portion of the purge gas can be directed to the second opening of the chamber, for example, by supplying the purge gas into the chamber through one or more openings defined at the outlet of the purge module, without passing through the diffuser inlet. The second portion of the purge gas can be sent via a second flow path to a front gas distribution device for distributing the second portion of the purge gas to the front of the substrate container. The second flow path for the purge gas for the second portion may further include regulating the flow of purge gas in the second flow path to the second gas distribution device, for example, by controlling a valve to regulate the flow of purge gas through the second flow path to the second gas distribution device. Thus, the pressurization of the chamber can be controlled by the valve to regulate or distribute the flow of purge gas in the second flow path, with some of the purge gas flowing through the valve and some flowing through the first opening, for example, the rear diffuser 240. Thus, the purge gas is divided or distributed within the chamber to distribute the purge gas into the internal space of the substrate container, for example, to supply purge gas to the front diffuser through the second opening and to the rear diffuser through the first opening.

[0083] Figure 6 shows a flowchart of a method for assembling a substrate container having a gas distribution device according to one embodiment. Method 600 includes, 610, attaching a purge gas assembly to the bottom wall of the substrate container; 620, assembling the purge gas assembly; 630, attaching a gas distribution device to the outlet of the purge module; and 640, inserting the purge module into the gas distributor to form a chamber such that the gas distribution device is inserted into the internal space of the substrate container through at least one outlet of the gas distributor.

[0084] The purge gas assembly is mounted to the bottom wall of the substrate container 610. Mounting the purge gas assembly to the substrate container may include a pre-assembly step. In the pre-assembly step, the purge gas assembly, including tubing, valves, and a gas distributor, may be mounted to or molded together with the top surface of a carrier plate. In some embodiments, the pre-assembly may include mounting tubing to connect a second opening of a chamber to a second gas distribution device, snap-fitting tubing and snap-fitting connections to the second opening of the chamber, or snap-fitting tubing and snap-fitting connections to the second gas distribution device, mounting a control valve to the second opening of the chamber to regulate the flow of purge gas, and snap-fitting the inlet of the control valve to the second opening of the chamber. While the mounting of the purge gas assembly to a carrier plate is discussed herein, it should be understood that such disclosure is not intended to be limiting. For example, in one embodiment, the purge gas assembly may be a standalone unit for installation in the substrate container. When assembling a substrate container, a carrier plate containing a purge gas assembly can be attached to the bottom wall of the substrate container to define the bottom plate of the substrate container and form a complete substrate container system. The carrier plate can be securely fastened, for example, using tabs, screws, or other fastening devices, and is not intended to be integrally formed or to be disassembled to be removable, as needed.

[0085] In 620, the purge module is assembled. Assembling the purge module involves assembling the purge module to include an inlet to receive the flow of purge gas, a check valve to regulate the direction of the flow of purge gas, and an outlet to supply the purge gas.

[0086] Optionally, a gas distribution device can be attached to 630. Assembly may further include attaching the gas distribution device to the outlet of the purge module. The gas distribution device may be a part having a diffuser, manifold, membrane, slit or nozzle, or made of porous material, elbow or flow divider or similar structure capable of directing the purge gas into the substrate vessel, and combinations thereof. Attachment may include using a diffuser retainer, or the gas distribution device may be directly attached to the purge module. In some embodiments, different retainers are configured to direct the purge gas to the gas distribution device, for example, through a flared inlet. In some embodiments, it is understood that the gas distribution device may optionally be attached to the purge module. In other embodiments, plugs or stoppers may be provided to control the distribution of flow into the chamber.

[0087] In 640, the purge module can be inserted into the gas distributor to form a chamber. When further assembling the substrate container, the purge module, including the gas distributor device, is inserted into the gas distributor so that the gas distributor device is inserted into the internal space of the substrate container through at least one outlet of the gas distributor to divide the purge gas into at least a first flow path, thereby forming a chamber surrounding at least one outlet of the purge module. In one embodiment, the gas distributor includes a first outlet that defines a first opening for directing a first flow path to a gas distributor device in order to distribute a first portion of the purge gas. In some embodiments, the gas distributor may include a second outlet that defines a second opening for directing a second flow path to at least one second gas distributor device in order to distribute a second portion of the purge gas. Therefore, since the purge gas assembly can be pre-assembled, the pre-assembled purge gas assembly can be mounted on the outside of the substrate container, and then the purge module can be mounted so that a gas distribution device, such as a diffuser or manifold, can be inserted into the substrate container from the outside with little to no intrusion into the internal space of the substrate container. Thus, the assembly of the substrate container can be performed almost entirely on the outside of the substrate container.

[0088] In some embodiments, mounting a purge gas assembly may further include mounting a second purge gas assembly to a carrier plate before mounting the carrier plate to the bottom wall of the substrate, the second purge gas assembly including a second gas distributor having at least one outlet. Furthermore, inserting a purge module may further include inserting a second purge module having a second gas distributor into the second gas distributor so that the second gas distributor is inserted into the internal space of the substrate container through at least one outlet of the second gas distributor, thereby forming a second chamber surrounding at least one outlet of the purge module.

[0089] Figure 7A shows an exploded view of a purge module according to one embodiment, which may be the same as or similar to the purge modules 130, 230, 330, or 430 described above. The purge module 700 includes a grommet 702, a check valve 704, a module body 706, a filter 708, a filter retainer 710, and a diffuser retainer 712. Optionally, a module retainer 714 may be included in the purge module 700. Optionally, a lip seal 716 may be included in the purge module 700. Optionally, a diffuser 718 may be included in the purge module 700.

[0090] The purge module 700 is a module configured to be received at the purge port of the substrate container. In one embodiment, the purge module 700 is configured to be received at the rear purge port of the substrate container. In one embodiment, the purge module 700 is configured to receive filtered purge gas from the purge module 700 and to receive a portion of the purge gas into a chamber configured to guide it to another purge distribution structure, such as the second or front gas distribution device 180 described above and shown in Figure 1.

[0091] The purge module 700 includes a grommet 702. The grommet 702 can be made of an elastic material. In one embodiment, the elastic material may be a fluoroelastomer, e.g., Viton®, FKM, a thermoplastic elastomer, a thermoplastic olefin, a thermoplastic polyurethane, etc. The grommet may include an opening configured to receive a flow of purge gas from a purge gas source, such as a port provided on a tool in which the substrate container containing the purge module 700 is used. The grommet 702 may further include a portion configured to receive a check valve 704, so that the check valve 704a can receive the purge gas introduced at the opening of the grommet 702. The grommet 702 may include a groove 720 configured to engage with a projection 722 formed on the check valve 704a, so that the check valve 704a is fixed to the grommet 702.

[0092] The check valve 704a is a valve configured to allow flow into the module body 706 through the check valve 704a and to prevent flow back from the module body 706a through the check valve 704. The check valve 704a may be any suitable check valve, such as an umbrella valve assembly or a spring valve assembly. At least a portion of the check valve 704a can be inserted into a recess formed in the grommet 702. The check valve 704a may include a projection 722 configured to engage with the grommet 702 in the groove 720. In one embodiment, the projection 722 may be an annular projection. In one embodiment, the check valve 704a may include a seal groove 724. The seal groove 724 may house a seal 726. The seal 726 may be any suitable member for forming a seal between the check valve 704a and the grommet 702, such as an O-ring or a gasket.

[0093] The module body 706a is configured to receive a grommet 702 and a check valve 704. The module body 706a can be made of a rigid material such as polycarbonate. In one embodiment, the material used to form the module body 706 may include carbon fiber filler. The module body 706a may include a filter-facing surface 728 that includes the ends of one or more passages 730. A projection 732 may be provided from the filter-facing surface 728 of the module body 706. The module body 706a may further include a first snap-fit ​​feature 734 configured to allow a filter retainer 710 to be snap-fitted into the module body 706. In one embodiment, the module body 706a may include a lip seal groove 736 configured to accommodate a lip seal 716. In one embodiment, the module body 706a may include a second snap-fit ​​feature 738 configured to form a snap-fit ​​with a module retainer 714. The module body 706a and the grommet 702 may be configured such that the module body 706a and the grommet 702 can be held together by press-fitting.

[0094] The filter 708 can be any suitable filter for filtering the purge gas. The filter 708 can include any suitable filter medium for removing contaminants such as particulate matter and volatile organic compounds from the purge gas as it passes through the filter 708. In one embodiment, the filter 708 can include an opening defined by the inner circumference 740. The opening defined by the inner circumference 740 can be configured to accommodate a projection 732 of the module body 706 such that the filter 708 surrounds a portion of the module body 706a when the purge module 700 is assembled. In one embodiment, the projection 732 can be omitted from the module body 706, and a filter 708 without an opening can be used.

[0095] The filter retainer 710 is attached to the module body 706a and configured to hold the filter 708 between the module body 706a and the filter retainer 710. The filter retainer 710 may include a snap-fit ​​ring 742 configured to form a snap-fit ​​with a first snap-fit ​​feature 734 of the module body 706. The filter retainer 710 can be made of a rigid material such as polycarbonate. The filter retainer 710 may be configured to clamp the outer circumference of the filter 708 to the module body 706, for example, as shown in Figure 9B and discussed below. In embodiments in which the filter 708 includes an opening defined by an inner circumference 740, the filter retainer 710 and the module body 706a may be configured to clamp the filter 708 at the inner circumference 740. The filter retainer 710 includes a grille 744 defining a plurality of openings. In one embodiment, the opening can allow at least a portion of the purge gas flow passing through the purge module 700 to exit the purge module 700.

[0096] The diffuser retainer 712 is configured to support a diffuser such as a diffuser 718. The diffuser retainer 712 is further configured to be attached to the filter retainer 710, for example, by a snap fit. The snap fit between the diffuser retainer 712 and the filter retainer 710 can be formed by a diffuser retainer snap fit feature 746 which can be configured to engage with features of the filter retainer 710, such as a portion of the grille 744. The diffuser retainer 712 can be made of a rigid material such as polycarbonate. The diffuser retainer 712 includes a diffuser inlet 748 configured to receive the diffuser 718 and can direct the flow of purge gas to the diffuser 718. The diffuser retainer 712 can define one or more openings, either alone or in combination with the filter retainer 710, through which some of the purge gas can exit the purge module 700 without entering the diffuser inlet 748. For example, as shown in Figures 7A and 7B, the diffuser retainer 712 may include a grille 750 that allows the purge gas to exit the purge module 700 without entering the diffuser inlet 748. The purge gas that does not enter the diffuser inlet 748 can enter a chamber, for example, a chamber formed by the combination of the gas distributor 222 and the purge module 230 described above and shown in Figure 2. In one embodiment, the filter retainer 710 may provide additional support to the diffuser 718 so that the diffuser 718 is held in the diffuser inlet 748 of the diffuser retainer 712. In one embodiment, the diffuser inlet 748 is positioned so that the diffuser 718 is within the periphery of the module body 706. In one embodiment, the diffuser 718 is not offset from the module body 706. In one embodiment, when the purge module 700 is viewed in plan, the diffuser 718 is positioned around the module body 706. The diffuser 718 and the purge module 700 can be installed in the substrate container from outside the substrate container as a complete assembly, for example, by inserting the diffuser through the opening of the substrate container and then continuing to insert the purge module into the opening.This avoids the need to install the diffuser 718 through work inside the substrate container, thereby reducing the risk of introducing contaminants such as particulate matter from such work. In one embodiment, the diffuser retainer 712 may include a cap (not shown) instead of the diffuser 718. The cap may be a separate element held within the diffuser inlet 748, or it may be integrally formed on top of the diffuser inlet 748.

[0097] A module retainer 714 may optionally be included to secure the purge module 700 to the substrate container. The module retainer 714 may be made of a rigid material such as polycarbonate. The module retainer 714 includes one or more snap-fit ​​features 752 configured to engage with a second snap-fit ​​feature 738 provided on the module body 706. In one embodiment, the snap-fit ​​formed between the one or more snap-fit ​​features 752 and the second snap-fit ​​feature 738 may allow the module retainer 714 to rotate a full 360° when it is snap-fitted to the module body 706. The module retainer 714 is configured to mechanically engage with the substrate container at the opening of the substrate container into which the purge module 700 is received. For example, the module retainer 714 may include a plurality of container engagement features 754 configured to be inserted into the substrate container when in a first position and to engage with the substrate container to hold the purge module 1700 when the module retainer 714 is rotated to a second position. The container engagement features 754 may have any suitable shape that can provide insertability in the first position and engagement when rotated to the second position.

[0098] A lip seal 716 may optionally be included to provide a seal between the module body 706a and the substrate container in which the purge module 700 is installed. The lip seal 716 may be made of an elastic material such as a fluoroelastomer (e.g., Viton® or FKM), a thermosetting elastomer, a thermoplastic elastomer, a thermoplastic olefin, or a thermoplastic polyurethane. The lip seal 716 may be a circular sealing member configured to be received in a lip seal groove 736. The lip seal 716 may include an anti-rotation feature 756 configured to engage with a notch 758 formed in the lip seal groove 736 of the module body 706a.

[0099] The diffuser 718 may be included in the purge module 700. The diffuser 718 may be a tube made of a porous material configured to release the purge gas received by the diffuser 718 within a substrate container in which the purge module 700 is installed. The diffuser 718 includes an open end configured to receive purge gas that can be supplied to the diffuser inlet 748. The diffuser 718 may further include a closed end, which may be, for example, a flat closed end, a hemispherical closed end, a flat closed end with a bevel or rounding in the transition from the body of the diffuser 718 to the closed end, or equivalent. The diffuser 718 may be held in place by a diffuser retainer 712 or a combination of a filter retainer 710 and the diffuser retainer 712.

[0100] Figure 7B shows an exploded view of a purge module according to one embodiment. In the embodiment shown in Figure 7B, the check valve 704b is dimensioned such that the module body 706b can accommodate the check valve 704b without including the projection 732 shown in Figure 7A. Other features of the check valve 704b may be the same as those described for the check valve 704a, except for differences in size and / or shape with respect to the corresponding module bodies 706a,b. The module body 706b may be the same as that described for the module body 706a, except that it lacks the projection 732 provided on the module body 706a. The filter 708b may be a continuous disk without an opening defined by an inner circumference 740, as shown in Figure 7A. Thus, the filter 708b can be held in place by clamping its outer circumference, for example, according to the clamp shown in Figure 9B and described below. In one embodiment, this clamping on the outer circumference of the filter 708b may be the only mounting that secures the filter 708b in place within the purge module 700. Other features of filter 708b may be as described for filter 708a. As seen in Figure 7B, the diffuser 718 includes a bevel or chamfered portion 760 at its end.

[0101] Figure 8 shows a cross-sectional view of a purge module according to one embodiment. The purge module 800 includes a grommet 802, a check valve 804, a module body 806, a filter 808, a filter retainer 810, and a diffuser retainer 812. Optionally, a module retainer 814 can be included in the purge module 800. Optionally, a lip seal 816 can be included in the purge module 800. Optionally, a diffuser 818 can be included in the purge module 800.

[0102] The purge module 800 is a module configured to be received at the purge port of the substrate container. In one embodiment, the purge module 800 is configured to be received at the rear purge port of the substrate container. In one embodiment, the purge module 800 is configured to receive filtered purge gas from the purge module 800 and to receive a portion of the purge gas into a chamber configured to guide it to another purge distribution structure, such as the second or front gas distribution device 180 described above and shown in Figure 1.

[0103] The grommet 802 can be made of an elastic material. In one embodiment, the elastic material may be a fluoroelastomer, e.g., Viton®, FKM, a thermoplastic elastomer, a thermoplastic olefin, a thermoplastic polyurethane, etc. The grommet may include an opening configured to receive a flow of purge gas from a purge gas source, such as a port provided on a tool in which a substrate container containing the purge module 800 is used. The grommet 802 may further include a portion configured to receive a check valve 804 so that the check valve 804 can receive the purge gas introduced at the opening of the grommet 802. The grommet 802 may include a groove 820 configured to engage with a projection 822 formed on the check valve 804 so that the check valve 804 is fixed to the grommet 802. The grommet 802 may further include a rib 824 configured to engage with the module body 806 to further secure the mating of the grommet 802 within the module body 806 when the purge module 800 is assembled.

[0104] The check valve 804 is a valve configured to allow flow into the module body 806 through the check valve 804 and to prevent flow back from the module body 806 through the check valve 804. The check valve 804 can be any suitable check valve, such as an umbrella valve assembly or a spring valve assembly. At least a portion of the check valve 804 can be inserted into an opening or recess formed in the grommet 802. The check valve 804 may include a projection 822 configured to engage with the grommet 802 in the groove 820. In one embodiment, the projection 822 may be an annular projection. In one embodiment, the check valve 804 may include a seal groove 826. The seal groove 826 can accommodate a seal 828. The seal 828 may be any suitable component for forming a seal between the check valve 804 and the grommet 802, such as an O-ring or a gasket. A portion of the check valve 804 extends into a portion of the cavity 830 within the module body 806.

[0105] The module body 806 is configured to receive a grommet 802 and a check valve 804. The module body 806 can be made of a rigid material such as polycarbonate. In one embodiment, the material used to form the module body 806 may include carbon fiber filler. The module body 806 may define a cavity 830. The cavity 830 may include a first portion configured to receive a grommet 802. The first portion of the cavity 830 may be configured so that the module body 806 and the grommet 802 are held together by press-fitting. The cavity may include a second portion configured to accommodate a portion of the check valve 804 that protrudes from the grommet 802 when the check valve 804 is installed in the grommet 802. The module body 806 may optionally include a projection 832 that protrudes beyond the filter-facing surface 834 of the module body 806. The cavity 830 may include portions of the cavity 830 that can receive portions defined by projections 832, such as a portion of the check valve 804. The module body 806 includes one or more passages from the cavity 830 to the filter-facing surface 834, such as the passage 730 described above and shown in Figures 7A and 7B (the cross section in Figure 8 is not shown because it is obtained across a solid rib defining the passage). The module body 806 may further include a first snap-fit ​​feature 836 configured to allow the filter retainer 810 to snap into the module body 806. In one embodiment, the module body 806 may include a lip seal groove 838 configured to accommodate a lip seal 816. In one embodiment, the module body 806 may include a second snap-fit ​​feature 840 configured to form a snap-fit ​​with the module retainer 814.

[0106] The filter 808 can be any suitable filter for filtering the purge gas. The filter 808 can include any suitable filter medium for removing contaminants such as particulate matter and volatile organic compounds from the purge gas as it passes through the filter 808. In one embodiment, the filter 808 can include an opening defined by an inner circumference 842. The opening defined by the inner circumference 842 can be configured to accommodate a projection 832 of the module body 806 such that the filter 808 surrounds a portion of the module body 806 when the purge module 800 is assembled. In one embodiment, the projection 832 can be omitted from the module body 806, and a filter 808 without an opening can be used.

[0107] The filter retainer 810 is attached to the module body 806 and configured to hold the filter 808 between the module body 806 and the filter retainer 810. The filter retainer 810 may include a snap-fit ​​ring 844 configured to form a snap-fit ​​with a first snap-fit ​​feature 836 of the module body 806. The filter retainer 810 can be made of a rigid material such as polycarbonate. The filter retainer 810 may be configured to clamp the outer circumference of the filter 808 to the module body 806, for example, as shown in Figure 9B and discussed below. In embodiments in which the filter 808 includes an opening defined by an inner circumference 842, the filter retainer 810 and the module body 806 may be configured to clamp the filter 808 at the inner circumference 842. The filter retainer 810 includes a grille 846 defining a plurality of openings. In one embodiment, the opening can allow at least a portion of the flow of purge gas through the purge module 800 to exit the purge module 800. The diffuser retaining projection 848 can be included on the filter retainer 810. The diffuser retaining projection 848 can be configured to secure the diffuser between the diffuser retaining projection 848 and one or more suitable features of the diffuser retainer 812, such as a diffuser inlet 850, when the diffuser 818 is installed in the diffuser retainer 812 and the diffuser retainer 812 is attached to the filter retainer 810.

[0108] The diffuser retainer 812 is configured to support a diffuser such as diffuser 818. The diffuser retainer 812 is further configured to be attached to the filter retainer 810, for example, by snap-fitting. The diffuser retainer 812 can be made of a rigid material such as polycarbonate. The diffuser retainer 812 includes a diffuser inlet 850 configured to receive the diffuser 818, and can direct the flow of purge gas to the diffuser 818. The diffuser retainer 812 can define one or more openings, either alone or in combination with the filter retainer 810, through which some of the purge gas can exit the purge module 800 without entering the diffuser inlet 850. The purge gas that does not enter the diffuser inlet 850 can enter a chamber, for example, a chamber formed by the combination of the gas distributor 222 and the purge module 230 as described above and shown in Figure 2. In one embodiment, the filter retainer 810 includes a diffuser retaining projection that pushes the diffuser 818 into the diffuser inlet 850 so that the diffuser 818 is held in the diffuser inlet 850 by the combination of the filter retainer 810 and the diffuser retainer 812. In one embodiment, the diffuser inlet 850 is positioned so that the diffuser 818 is located within the periphery of the module body 806. In one embodiment, the diffuser 818 is not offset from the module body 806. In one embodiment, when the purge module 800 is viewed in plan view, the diffuser 818 is positioned around the module body 806. The diffuser 818 and the purge module 800 can be installed in the substrate container from outside the substrate container as a complete assembly, for example, by inserting the diffuser through an opening in the substrate container and then continuing to insert the purge module into the opening. This avoids the need to install the diffuser 818 through work inside the substrate container and reduces the risk of introducing contaminants such as particulate matter from such work. In one embodiment, the diffuser retainer 812 may include a cap (not shown) instead of the diffuser 818. The cap may be a separate element held within the diffuser inlet 850, or it may be integrally formed on the diffuser inlet 850.

[0109] A module retainer 814 may optionally be included to secure the purge module 800 to the substrate container. The module retainer 814 may be made of a rigid material such as polycarbonate. The module retainer 814 includes one or more snap-fit ​​features (not shown), such as the snap-fit ​​feature 752 shown above and in Figures 7A and 7B, configured to engage with a second snap-fit ​​feature 840 provided on the module body 806. In one embodiment, the snap-fit ​​formed by the second snap-fit ​​feature 840 may allow the module retainer 814 to rotate a full 360° when it is snap-fitted to the module body 806. The module retainer 814 is configured to mechanically engage with the substrate container at the opening of the substrate container into which the purge module 800 is received. For example, the module retainer 814 may include a plurality of container engagement features 852 configured to be inserted into the substrate container when in a first position and to engage with the substrate container to hold the purge module 800 when the module retainer 814 is rotated to a second position. The container engagement features 852 may have any suitable shape that can provide insertability in the first position and engagement when rotated to the second position, such as the hook-shaped cross section shown in Figure 8. In the embodiment shown in Figure 8, the container engagement features 852 include a container contact surface 854 configured to contact a flange or other suitable feature provided on the substrate container into which the purge module 800 is inserted.

[0110] A lip seal 816 may be optionally included to provide a seal between the module body 806 and the substrate container in which the purge module 800 is installed. The lip seal 816 may be an elastic material such as a fluoroelastomer, for example, Viton® or FKM. The lip seal 816 may be a circular sealing member configured to be received in a lip seal groove 838.

[0111] The diffuser 818 may be included in the purge module 800. The diffuser 818 may be a tube made of a porous material configured to release the purge gas received by the diffuser 818 within a substrate container in which the purge module 800 is installed. The diffuser 818 includes an open end configured to receive purge gas that can be supplied to the diffuser inlet 850. The diffuser 818 may be held in place by a diffuser retainer 812 or by a combination of a filter retainer 810 and the diffuser retainer 812. For example, the diffuser 818 may be held between the diffuser inlet 850 and one or more diffuser holding protrusions 848 provided on the filter retainer 810. The diffuser 818 may further include a closed end, which may be, for example, a flat closed end, a hemispherical closed end, a flat closed end with a bevel or rounding in the transition from the body of the diffuser 818 to the closed end, or equivalent.

[0112] Figure 9A shows a cross-sectional view of a purge module on the inner circumference of a filter according to one embodiment. The purge module 900 includes a module body 902 and a filter retainer 904. The filter 906 is held between the module body 902 and the filter retainer 904. The module body 902 includes a filter-facing surface 908, an inner shoulder portion 910, and an inner module body clamp surface 912. The filter retainer 904 includes an inner filter retainer clamp surface 914, an inner contact surface 916, and a filter grille 918.

[0113] The module body 902 is the main body of the purge module 900. The module body 902 is configured such that the filter retainer 904 can be attached to the module body 902, for example, by providing one or more snap-fit ​​features. The module body 902 may be, for example, module body 706a, b, or module body 806, as described above and shown in Figures 7A, 7B, and 8, respectively.

[0114] The filter retainer 904 is configured to be attached to the module body 902 such that the filter 906 is held between the module body 902 and the filter retainer 904. The filter retainer can be configured to be attached to the module body 902 by, for example, snap-fitting, by providing one or more snap-fitting features configured to interface with one or more corresponding snap-fitting features provided on the module body 902. The filter retainer 904 can be, for example, a filter retainer 710 or a filter retainer 810 as described above and shown in Figures 7A, 7B and 8, respectively.

[0115] The filter 906 is a filter configured to be positioned between the module body 902 and the filter retainer 904. The filter 906 may include any suitable filter medium, such as a filter medium for removing one or more contaminants selected from particulate matter, volatile organic compounds, etc. The filter 906 may be shaped to cover a passage through the module body 902 so that fluid passing through the module body 902 is directed towards the filter 906. The filter 906 may include an opening defined by an inner circumference. The inner circumference may surround a projection extending from the module body 902.

[0116] The filter-facing surface 908 is provided on the module body 902. The passage through the module body 902 can terminate at the filter-facing surface 908. The filter-facing surface 908 extends to the inner shoulder 910. The inner shoulder 910 is a transition from the filter-facing surface 908 to a vertical plane and extends toward the inner module body clamp surface 912. The filter 906 can be bent over the inner shoulder 910 according to the space defined between the module body 902 and the filter retainer 904. The inner module body clamp surface 912 is a separate, offset surface from the filter-facing surface 908.

[0117] The filter retainer 904 includes an inner filter retainer clamping surface 914. The inner filter retainer clamping surface 914 is configured to face the inner module body clamping surface 912 when the filter retainer 904 is attached to the module body 902. The filter 906 can be compressed between the inner module body clamping surface 912 and the inner filter retainer clamping surface 914, thereby reducing or eliminating the flow through the side edges of the filter 906 on its inner circumference.

[0118] The inner contact surface 916 is the surface of the filter retainer 904 configured to directly contact the module body 902. The inner contact surface 916 can be located on the inner side of the inner circumference of the filter 908 with respect to the central axis of the purge module 900 so that direct contact can be made between the filter retainer 904 and the module body 902.

[0119] The filter grille 918 is a grille of the filter retainer 904 configured to hold the filter 906 in place while allowing the flow through the filter 906 to pass through the filter retainer 904. The filter grille 918 may include any suitable structure for holding the filter 906 as the flow passes through it.

[0120] Figure 9B is a cross-sectional view of the purge module of Figure 9A on the outer circumference of the filter according to one embodiment. On the outer circumference of the filter 906 shown in Figure 9B, the module body 902 includes a filter-facing surface 908, an outer shoulder portion 920, and an outer module body clamp surface 922. The filter retainer 904 includes a filter grille 918, an outer filter retainer clamp surface 924, and an outer contact surface 926. The filter-facing surface 908 extends to the outer shoulder portion 920. At the outer shoulder portion 920, the module body transitions from the filter-facing surface to the portion extending to the outer module body clamp surface 922. The outer module body clamp surface 922 can surround the filter-facing surface 908 of the module body 902. The outer filter retainer clamp surface 924 is provided on the filter retainer 902. The outer filter retainer clamp surface 924 is configured to face the outer module body clamp surface 922 so that the filter 906 can be compressed between the outer module body clamp surface 922 and the outer filter retainer clamp surface 924, thereby reducing or blocking the flow through the side edges of the filter 906 at its outer circumference. The filter retainer 904 further includes an outer contact surface 926, which is the surface of the filter retainer 904 configured to directly contact the module body 902. The outer contact surface 926 may be outside the outer circumference of the filter 908 so that direct contact can occur between the filter retainer 904 and the module body 902. As shown in Figures 9A and 9B, the module body 902 and the filter retainer 904 can clamp the filter 906 on their inner circumference at the inner module body clamp surface 912 and the inner filter retainer clamp surface 914, and on their outer circumference at the outer module body clamp surface 922 and the outer filter retainer clamp surface 924. Therefore, if the filter 906 includes an opening, the filter 906 can be sealed on both its inner and outer circumferences.

[0121] Figure 10 shows a flowchart of a method for assembling a purge module according to one embodiment. Method 1000 includes joining a check valve to a grommet in 1002, joining the grommet to the purge module body in 1004, positioning a filter in 1006, attaching a filter retainer to the purge module body in 1008, and attaching a diffuser retainer to the filter retainer in 1010. Optionally, assembling the purge module may further include installing a diffuser in 1012. Optionally, method 1000 may further include inserting a diffuser through an opening on a substrate container 1014, inserting at least a portion of the purge module into the opening in 1016, and / or attaching the purge module to the substrate container using a module retainer in 1018.

[0122] The check valve is joined to the grommet at 1002. The check valve can be joined to the grommet by inserting the check valve into the opening of the grommet and forming a press fit between the grommet and the check valve. In one embodiment, the grommet and / or check valve include engaging features for securing the attachment of the grommet to the check valve, such as an annular projection and / or annular groove provided on one of the grommet and the check valve and configured to interface with the other surface of the grommet and the check valve. The connection of the check valve to the grommet can be sealed, for example, by including an O-ring between the surface of the grommet and the surface of the check valve.

[0123] The grommet is joined to the purge module body at 1004. The grommet can be joined to the purge module body after or between joining the check valve to the grommet at 1002. At 1004, the grommet can be joined to the purge module body by inserting the grommet into a cavity formed within the purge module body and forming a press fit between the inner wall of the purge module body and the outer wall of the grommet. In one embodiment, the purge module body and / or the grommet may include one or more engagement features for securing the attachment of the purge module body to the check valve, such as corresponding annular ribs and grooves formed on the purge module body and the grommet, respectively.

[0124] The filter is located at 1006. At 1006, the filter can be positioned to cover a passage through the purge module body, and the purge gas flowing through this passage is directed to the filter. In one embodiment, the filter is circular. In one embodiment, the filter includes, for example, an opening in the center of the filter. In one embodiment, the purge module body includes a projection, and the filter is positioned at 1006 such that the projection of the purge module body protrudes through the opening of the filter. At 1008, a filter retainer is attached to the purge module body. The filter retainer can be attached to the purge module by forming a snap fit between the filter retainer and the purge module body. In one embodiment, the features forming the snap fit are provided around the entire circumference of the purge module and include, for example, an annular projection on the purge module body and a corresponding annular groove on the filter retainer. Attachment of the filter retainer to the purge module body at 1008 may include clamping the filter around its circumference. In one embodiment, where the filter includes an opening, both the outer circumference of the filter and the inner circumference of the filter defining the opening can be clamped by corresponding features of the purge module body and filter module retainer, such as those described above and shown in Figures 9A and 9B. In one embodiment, the filter clamping can be such that the edges of the filter are sealed, minimizing or eliminating leakage of purge gas through the sides of the filter.

[0125] In 1010, a diffuser retainer is attached to a filter retainer. The diffuser retainer includes a diffuser inlet. In 1010, the diffuser retainer can be attached to the filter retainer, for example, by snap-fitting between corresponding engaging features provided on the diffuser retainer and / or the filter retainer. The diffuser retainer may be configured to support a diffuser. The diffuser retainer may include a diffuser inlet. In one embodiment, method 1000 may further include, in 1012, attaching a diffuser to the diffuser retainer. In one embodiment, attaching a diffuser includes, for example, positioning the diffuser so that the diffuser is captured by the diffuser retainer by positioning the diffuser so that the flared portion of the diffuser is surrounded by the diffuser inlet. In one embodiment, attaching a diffuser to the diffuser retainer in 1012 may include inserting the diffuser into the diffuser inlet until the diffuser is fully seated in the diffuser inlet.

[0126] In one embodiment, the purge module and diffuser can be installed inside the substrate container. Optionally, the installation of the diffuser may include inserting the diffuser through an opening in the substrate container 1014. Insertion of the diffuser into the opening at 1014 can be done from outside the substrate container. In one embodiment, the installation of the diffuser may include inserting at least a portion of the purge module into the opening at 1016 and / or attaching the purge module to the substrate container using a module retainer at 1018.

[0127] Figure 11 shows a flowchart of a method for flowing purge gas through a purge module according to one embodiment. Method 1100 includes introducing the purge gas into a grommet in 1102, passing the purge gas through a check valve in 1104, guiding the purge gas to a filter via a passage in the purge module body in 1106, filtering the purge gas in 1108, guiding a first portion of the filtered purge gas to a diffuser inlet 1110, and guiding a second portion of the filtered purge gas out of the purge module in 1112.

[0128] The purge gas is introduced into the grommet at 1102. The grommet 1102 can interface with a purge source, such as a purge gas port provided on a tool used with a substrate container including a purge module. The purge gas can be supplied at any appropriate flow rate for the purging operation. In one embodiment, the flow rate of the purge gas can be controlled to reduce or avoid vibration or lifting of the substrate container. In one embodiment, the flow rate of the purge gas can be in the range of 1 to 400 standard liters per minute. In one embodiment, the flow rate of the purge gas can be in the range of 200 to 400 standard liters / minute. The purge gas from the grommet passes through the check valve at 1104. The check valve allows for a unidirectional flow of the purge gas from the grommet into the chamber, as defined by the purge module body. At 1106, the purge gas passes through one or more passages formed within the purge module body to a filter provided within the chamber. The purge gas at the filter is filtered by passing through the filter at 1108. Filtration in 1108 can remove any suitable contaminants, such as volatile organic compounds and particulate matter, depending on the structure and composition of the medium used in the filter.

[0129] The first portion of the purge gas filtered in 1108 is led to the diffuser inlet in 1110. The first portion of the purge gas may include, but not all of, the purge gas filtered in 1108. The direction of the purge gas to the diffuser inlet can be directed by structural features of the purge module, such as the shape of the filter retainer, the shape of the diffuser retainer, and / or the position of the diffuser inlet. The purge gas entering the diffuser inlet then enters the diffuser, passes through the diffuser, and enters the substrate container, purging the substrate container.

[0130] The second portion of the purge gas filtered at 1108 is directed out of the purge module at 1112. The second portion of the purge gas can be part, but not all, of the purge gas that passes through the filter at 1108, and is different from the first portion that enters the diffuser inlet at 1110. The second portion of the purge gas can exit the purge module at 1112 through openings provided in one or both of the filter retainer and the diffuser retainer without entering the diffuser inlet. In one embodiment, the second portion of the purge gas enters a chamber defined by a substrate container, for example, one or both of the shell and bottom plate. In one embodiment, the second portion of the purge gas can be further directed to a second diffuser. In one embodiment, at least a portion of the purge gas from the chamber can circulate within the chamber and then enter the diffuser inlet. In one embodiment, the relative amounts of the first portion of the purge gas and the second portion of the purge gas may be influenced by the pressure in the diffuser and / or chamber.

[0131] Pattern: It is understood that any of embodiments 1 to 9 can be combined with any of embodiments 10 to 31, 32 to 41, 42 to 44, 45 to 51, 52 to 61, 62 to 71, or 72 to 76. It is understood that any of embodiments 10 to 31 can be combined with any of embodiments 32 to 41, 42 to 44, 45 to 51, 52 to 61, 62 to 71, or 72 to 76. It is understood that any of embodiments 32 to 41 can be combined with any of embodiments 42 to 44, 45 to 51, 52 to 61, 62 to 71, or 72 to 76. It is understood that any of embodiments 42 to 44 can be combined with any of embodiments 45 to 51, 52 to 61, 62 to 71, or 72 to 76. It is understood that any of embodiments 45 to 51 can be combined with any of embodiments 52 to 61, 62 to 71, or 72 to 76. It is understood that any of embodiments 52 to 61 can be combined with any of embodiments 62 to 71 or 72 to 76.

[0132] Embodiment 1. A method for distributing a flow of purge gas into a substrate container, comprising: receiving a flow of purge gas at the inlet of a purge module; supplying purge gas from the outlet of the purge module into a chamber formed by a combination of the purge module and a gas distributor of a purge gas assembly, wherein the gas distributor has at least one outlet; and within the chamber, dividing the purge gas into at least a first flow path and supplying the purge gas to at least one outlet of the gas distributor.

[0133] Embodiment 2. The method according to Embodiment 1, further comprising: dividing the purge gas by supplying it to at least a first flow path and supplying it to a first gas distribution device; and dividing the purge gas into a second flow path and supplying it to a second gas distribution device through a second outlet of a gas distributor.

[0134] Embodiment 3. The method according to Embodiment 2, wherein supplying the flow of purge gas includes one or more of the following: directing the purge gas through a check valve of the purge module to a passage defined in the module body of the purge module; directing the purge gas from the passage through one or more passages in the module body to a filter; directing a first portion of the purge gas from the filter and filter retainer into a first flow path to a first gas distribution device; and directing a second portion of the purge gas from the filter and filter retainer into a second flow path from the purge module through one or more openings defined by one or both of the filter retainer and diffuser retainer to a second gas distribution device.

[0135] Embodiment 4. The method according to any one of Embodiments 2 to 3, further comprising dividing the purge gas in the chamber to regulate the flow of the purge gas in a second flow path to a second gas distribution device.

[0136] Embodiment 5. The method according to Embodiment 4, wherein regulating the flow of purge gas includes controlling a valve to distribute the flow of purge gas to a second gas distribution device through a second flow path.

[0137] Embodiment 6. The method according to any one of Embodiments 2 to 5, wherein the second flow path is formed by connecting a control valve to the second opening of the chamber.

[0138] Embodiment 7. The method according to Embodiment 6, wherein connecting the control valve includes snap-fitting the valve body of the control valve into the second opening of the chamber.

[0139] Embodiment 8. The method according to any one of Embodiments 2 to 7, wherein the second flow path is formed by connecting pipes or fittings to a second opening in the chamber.

[0140] Embodiment 9. The method of Embodiment 8, wherein connecting pipes or fittings includes snap-fitting the pipes or fittings into a second opening of the chamber.

[0141] Embodiment 10. A purge gas assembly for supplying purge gas to a substrate container, comprising: a gas distributor having at least one outlet; and a purge module having an inlet, a check valve, and an outlet for receiving a flow of purge gas, wherein the combination of the gas distributor and the purge module forms a chamber, and the chamber is configured to supply purge gas to at least one outlet of the gas distributor.

[0142] Embodiment 11. The purge gas assembly according to Embodiment 10, wherein the gas distributor comprises at least two outlets.

[0143] Embodiment 12. The purge gas assembly according to Embodiment 11, wherein at least one of two outlets defines a first opening for leading a first flow path to a first gas distribution device for distributing a first portion of purge gas to a first portion of a substrate container, and at least one of two outlets defines a second opening for leading a second flow path to at least one second gas distribution device for distributing a second portion of purge gas to a second portion of a substrate container.

[0144] Embodiment 13. A purge gas assembly according to any one of Embodiments 10 to 12, wherein the chamber surrounds at least the outlet of the purge module.

[0145] Embodiment 14. The purge gas assembly according to any one of Embodiments 10 to 13, further comprising a filter for supplying filtered purge gas to the outlet of the purge module.

[0146] Embodiment 15. The purge gas assembly according to any one of embodiments 12 to 14, wherein the outlet of the purge module comprises at least one of the following: one or more openings for supplying purge gas from the purge module into the chamber, or an outlet at least partially connected to a first gas distribution device.

[0147] Embodiment 16. The purge gas assembly according to any one of embodiments 12 to 15, further comprising a control valve connected to a second opening of a chamber for regulating the flow of purge gas through a second passage to a second gas distribution device.

[0148] Embodiment 17. The purge gas assembly according to Embodiment 16, wherein the control valve is an orifice, needle valve, ball valve, or butterfly valve.

[0149] Embodiment 18. The purge gas assembly according to Embodiment 16 or 17, wherein the control valve includes a valve retainer and a sealing ring for snap-fitting the control valve to the chamber.

[0150] Embodiment 19. A purge gas assembly according to any one of Embodiments 16 to 18, wherein the control valve includes a safety device for preventing changes in the valve setting of the control valve.

[0151] Embodiment 20. The purge gas assembly according to any one of embodiments 12 to 19, further comprising tubing for forming a second flow path for connecting the flow of purge gas from a chamber to a second gas distribution device.

[0152] Embodiment 21. The purge gas assembly according to Embodiment 20, wherein the tubing comprises a sealing ring and a tubing retainer for snap-fitting the tubing to a second gas distribution device.

[0153] Embodiment 22. A purge gas assembly according to any one of Embodiments 10 to 15, further comprising a control valve, tubing, and a carrier plate, wherein the purge module, control valve, and tubing are connected along the upper surface of the carrier plate.

[0154] Embodiment 23. The purge gas assembly according to any one of Embodiments 10 to 22, wherein the upper surface of the chamber is formed by the chamber body, by a portion of the bottom plate, or along the bottom wall of the substrate container.

[0155] Embodiment 24. A method for assembling a substrate container having a gas distribution device, comprising: attaching a purge gas assembly to the bottom wall of the substrate container, the purge gas assembly comprising a gas distributor having at least one outlet; assembling a purge module comprising an inlet, a check valve, and an outlet for receiving a flow of purge gas; and inserting the purge module into the gas distributor to form a chamber, such that the chamber is configured to supply purge gas to at least one outlet, the method being performed outside the substrate container.

[0156] Embodiment 25. The method according to Embodiment 24, further comprising attaching a first gas distribution device to a purge module, attaching a purge gas assembly comprising attaching a second purge gas assembly to the bottom wall of a substrate, the second purge gas assembly comprising a second gas distributor having at least one outlet, and inserting the purge module comprising inserting the second purge module having the second gas distribution device into the second gas distributor such that the second gas distribution device is inserted into the internal space of the substrate container through at least one outlet of the second gas distributor, thereby forming a second chamber surrounding at least one outlet of the purge module.

[0157] Embodiment 26. The method according to Embodiment 24 or 25, wherein the gas distributor comprises at least two outlets.

[0158] Embodiment 27. The method according to Embodiment 28, wherein installing the purge gas assembly includes installing tubing for connecting the second outlet of at least two outlets of the gas distributor to a second gas distribution device.

[0159] Embodiment 28. The method according to Embodiment 27, wherein attaching the piping includes snapping a snap-fit ​​connection to the piping and the second outlet of at least two outlets of the gas distributor, or snapping a snap-fit ​​connection to the piping and the second gas distribution device.

[0160] Embodiment 29. The method according to any one of embodiments 26 to 29, wherein the installation of the purge gas assembly includes installing a control valve at the second outlet of at least two outlets of a gas distributor in order to distribute the flow of purge gas.

[0161] Embodiment 30. The method according to Embodiment 29, wherein installing the control valve includes snapping the snap-fit ​​connector above the inlet of the control valve into the second opening of the chamber.

[0162] Embodiment 31. The method according to any one of Embodiments 20 to 24, wherein mounting the purge gas assembly includes mounting the purge gas assembly to a carrier plate for connection to a substrate container.

[0163] Embodiment 32. A purge module, Grommets and, A check valve that is at least partially received in the grommet, A module body comprising a cavity configured to house a grommet and a check valve, the module body defining one or more passages from the cavity, Filters and, A filter retainer, wherein the filter retainer and module body are configured to house a filter, A diffuser retainer configured to support a diffuser, the diffuser retainer comprising a diffuser inlet, A purge module comprising a filter retainer and a diffuser retainer, configured such that a first portion of the gas flow through the filter enters the diffuser inlet, and a second portion of the gas flow through the filter passes through one or more openings defined by one or both of the filter retainer and the diffuser retainer.

[0164] Embodiment 33. The purge module according to Embodiment 32, further comprising a diffuser.

[0165] Embodiment 34. The purge module according to Embodiment 33, wherein the diffuser is completely within the periphery of the module body in the plan view.

[0166] Embodiment 35. A purge module according to any one of Embodiments 32 to 34, wherein the module body includes projections extending from a surface, and the surface includes at least one end of one or more passages.

[0167] Embodiment 36. The purge module according to Embodiment 35, wherein a portion of the cavity is defined by a projection, and a portion of the check valve extends into the portion of the cavity.

[0168] Embodiment 37. A purge module according to Embodiment 35 or 36, wherein the filter includes an opening defined by an inner circumference, the opening being configured to receive a projection.

[0169] Embodiment 38. The purge module according to Embodiment 37, wherein the filter retainer and module body are configured to clamp the filter along the entire inner and outer circumference of the filter when the filter retainer and module body are snap-fitted together.

[0170] Embodiment 39. A purge module according to any one of Embodiments 32 to 38, wherein the module body includes a groove provided on the outer surface of the module body, and the purge module further comprises a lip seal disposed in the groove.

[0171] Embodiment 40. A purge module according to any one of embodiments 32 to 39, further comprising a module retainer, the module retainer being configured to engage with one or more features of a substrate container.

[0172] Embodiment 41. A purge module according to any one of Embodiments 32 to 40, wherein the module body and the filter retainer are configured to be joined by snap fastening.

[0173] Embodiment 42. A method for introducing purge gas into a substrate container, The purge module receives the purge gas through its grommet, The purge gas is guided through a check valve into a cavity defined in the module body of the purge module, The purge gas is guided from the cavity through one or more passages in the module body to the filter, The first portion of the purge gas is guided from the filter to the diffuser, which is held in a diffuser retainer included in the purge module. A method comprising guiding a second portion of the purge gas out of the purge module through one or more openings defined by one or both of the filter retainer and the diffuser retainer.

[0174] Embodiment 43. The method according to Embodiment 43, wherein a second portion of the purge gas is introduced into a chamber surrounding a purge module, and the method further includes introducing the second portion of the purge gas from the chamber into a second diffuser.

[0175] Embodiment 44. The method according to Embodiment 42 or 43, wherein the flow rate of the purge gas received by the grommet is in the range of 1 standard L / min to 400 standard L / min.

[0176] Embodiment 45. A method comprising assembling a purge module, wherein assembling the purge module is Attaching the check valve to the grommet, Insert the grommet into the module body, The filter is clamped between the module body and the filter retainer, A method comprising attaching a diffuser retainer to a filter retainer, wherein the diffuser retainer includes a diffuser inlet.

[0177] Embodiment 46. The method according to Embodiment 45, wherein the filter retainer and diffuser retainer are configured such that a first portion of the gas flow through the filter enters the diffuser inlet, and a second portion of the gas flow through the filter passes through one or more openings defined by one or both of the filter retainer and the diffuser retainer.

[0178] Embodiment 47. The method according to Embodiment 45 or 46, further comprising attaching a diffuser to a diffuser retainer.

[0179] Embodiment 48. The method according to Embodiment 47, further comprising inserting a diffuser from outside the substrate container through an opening provided on the substrate container, and inserting a purge module into the opening such that at least a portion of the purge module is received into the opening.

[0180] Embodiment 49. The method according to Embodiment 48, wherein the opening is formed by the shell and bottom plate of the substrate container.

[0181] Embodiment 50. The method according to any one of embodiments 39 to 43, further comprising attaching the locking ring to the module body so that the locking ring can rotate independently of the module body.

[0182] Embodiment 51. The method of Embodiment 44, further comprising inserting a purge module from outside the substrate container into an opening provided on the substrate container such that at least a portion of the purge module is received into the opening, and rotating a locking ring so that the locking ring engages with one or more engaging features provided on the opening.

[0183] Appearance 52. A purge module, Grommets and, A check valve that is at least partially received in the grommet, A module body comprising a cavity configured to house a grommet and a check valve, the module body defining one or more passages from the cavity, Filters and, A filter retainer comprising a filter retainer and a module body configured to house a filter, A purge module comprising a module body including a projection extending from a surface including the end of at least one of one or more passages, and a filter including an opening defined by an inner circumference, the opening configured to receive the projection.

[0184] Embodiment 53. The purge module according to Embodiment 52, wherein a portion of the cavity is defined by a projection, and a portion of the check valve extends into the portion of the cavity.

[0185] Embodiment 54. The purge module according to Embodiment 52 or 53, wherein the filter retainer and module body are configured to clamp the filter along the entire inner and outer circumference of the filter when the filter retainer and module body are snap-fitted together.

[0186] Embodiment 55. A purge module according to any one of embodiments 52 to 54, further comprising a diffuser retainer configured to support a diffuser, wherein the diffuser retainer includes a diffuser inlet.

[0187] Embodiment 56. The purge module according to Embodiment 55, wherein the filter retainer and diffuser retainer are configured such that a first portion of the gas flow through the filter enters the diffuser inlet, and a second portion of the gas flow through the filter passes through one or more openings defined by one or both of the filter retainer and diffuser retainer.

[0188] Embodiment 57. A purge module according to Embodiment 55 or 56, further comprising a diffuser.

[0189] Embodiment 58. The purge module according to Embodiment 57, wherein the diffuser is completely within the periphery of the module body in the plan view.

[0190] Embodiment 59. A purge module according to any one of Embodiments 52 to 58, wherein the module body includes a groove provided on the outer surface of the module body, and the purge module further comprises a lip seal disposed in the groove.

[0191] Embodiment 60. A purge module according to any one of embodiments 52 to 59, further comprising a module retainer, the module retainer being configured to engage with one or more features of a substrate container.

[0192] Embodiment 61. A purge module according to any one of Embodiments 52 to 60, wherein the module body and the filter retainer are configured to be joined by snap fastening.

[0193] Embodiment 62. A method comprising assembling a purge module, wherein assembling the purge module is Attaching the check valve to the grommet, The grommet is inserted into the module body, and the module body includes a surface having a protrusion. Positioning a filter having an opening such that the protrusion extends through the opening, A method comprising: attaching a filter retainer to a module body such that the filter retainer and the module body clamp the filter at the outer circumference and inner circumference of the filter, wherein the inner circumference defines an opening.

[0194] Embodiment 63. The method according to Embodiment 62, further comprising attaching a diffuser retainer to a filter retainer, wherein the diffuser retainer includes a diffuser inlet.

[0195] Embodiment 64. The method according to Embodiment 63, wherein the filter retainer and diffuser retainer are configured such that a first portion of the gas flow through the filter enters the diffuser inlet and a second portion of the gas flow through the filter passes through one or more openings defined by one or both of the filter retainer and diffuser retainer.

[0196] Embodiment 65. The method according to Embodiment 63 or 64, further comprising attaching a diffuser to a diffuser retainer.

[0197] Embodiment 66. The method of Embodiment 65, further comprising inserting a diffuser from outside the substrate container through an opening provided on the substrate container, and inserting a purge module into the opening such that at least a portion of the purge module is received into the opening.

[0198] Embodiment 67. The method according to any one of embodiments 62 to 67, further comprising attaching the locking ring to the module body so that the locking ring can rotate independently of the module body.

[0199] Embodiment 68. The method of Embodiment 67, further comprising inserting a purge module from outside the substrate container into an opening provided on the substrate container so that at least a portion of the purge module is received into the opening, and rotating a locking ring so that the locking ring engages with one or more engaging features provided in the opening.

[0200] Embodiment 69. The method according to any one of Embodiments 62 to 68, wherein the filter retainer and module body clamp the filter over the entire outer circumference and the entire inner circumference of the filter.

[0201] Embodiment 70. The method according to any one of Embodiments 62 to 69, wherein the filter retainer and the module body are joined by snap fitting.

[0202] Embodiment 71. The method according to any one of Embodiments 62 to 70, wherein the module body defines a cavity, a portion of the cavity is defined by a projection, and a portion of the check valve extends into the portion of the cavity.

[0203] Embodiment 72. A purge assembly for a substrate container, Housing and The housing and purge module define a chamber, and the purge module is Grommets and, A check valve that is at least partially received in the grommet, A module body comprising a cavity configured to house a grommet and a check valve, the module body defining one or more passages from the cavity, Filters and, A filter retainer comprising a filter retainer and a module body configured to house a filter, A purge assembly for a substrate container, configured to receive a flow of purge gas, guide the flow of purge gas through a check valve to a filter, and allow at least a portion of the flow of purge gas to enter the chamber from the purge module.

[0204] Embodiment 73. The purge assembly according to Embodiment 72, further comprising a diffuser configured to extend from the housing.

[0205] Embodiment 74. The purge assembly according to Embodiment 73, wherein the diffuser is held within the housing.

[0206] Embodiment 75. The purge assembly according to Embodiment 74, wherein the purge module contacts the diffuser such that the diffuser is held within an opening provided in the housing.

[0207] Embodiment 76. The purge assembly according to Embodiment 73, further comprising a diffuser retainer further configured to support a diffuser, wherein the purge module further comprises a diffuser retainer.

[0208] The examples disclosed in this application should be considered in all respects to be illustrative and not limiting. The scope of the invention is indicated not by the foregoing description but by the appended claims, and all modifications that fall within the meaning and scope of the equivalents of the claims are intended to be encompassed therein.

Claims

1. A method for distributing the flow of purge gas into a substrate container, The purge gas flow is received at the inlet of the purge module, The purge gas is supplied from the outlet of the purge module into a chamber formed by the combination of the purge module and the gas distributor of the purge gas assembly, wherein the gas distributor has at least one outlet. A method comprising dividing the purge gas within the chamber into at least a first flow path and supplying the purge gas to at least one outlet of the gas distributor.

2. The method according to claim 1, further comprising supplying the purge gas to at least a first flow path and supplying it to a first gas distribution device, and dividing the purge gas to a second flow path and supplying it to a second gas distribution device through a second outlet of the gas distributor.

3. The supply of the purge gas flow is The purge gas is guided through the check valve of the purge module into a passage defined in the module body of the purge module, The purge gas is guided from the passage through one or more passages in the module body to the filter, The first portion of the purge gas is introduced from the filter and filter retainer into the first flow path and guided to the first gas distribution device. The method according to claim 2, comprising one or more of the following: introducing a second portion of the purge gas from the filter and the filter retainer into the second flow path from the purge module through one or more openings defined by the filter retainer and the diffuser retainer or both, and leading it to the second gas distribution device.

4. The method according to claim 2, wherein the division of the purge gas within the chamber further comprises regulating the flow of the purge gas in the second flow path to the second gas distribution device.

5. The method according to claim 4, wherein the adjustment of the flow of the purge gas includes controlling a valve to distribute the flow of the purge gas to the second gas distribution device through the second flow path.

6. The method according to claim 2, wherein the second flow path is formed by connecting a control valve to the second opening of the chamber.

7. The method according to claim 6, wherein connecting the control valve includes snap-fitting the valve body of the control valve into the second opening of the chamber.

8. The method according to claim 2, wherein the second flow path is formed by connecting pipes or fittings to the second opening in the chamber.

9. The method according to claim 8, wherein the connection of the pipes or fittings includes snap-fitting the pipes or fittings into the second opening of the chamber.

10. A purge gas assembly for supplying purge gas to a substrate container, A gas distributor having at least one outlet, A purge module comprising an inlet, a check valve, and an outlet for receiving the flow of the purge gas, The combination of the gas distributor and the purge module forms a chamber. A purge gas assembly, wherein the chamber is configured to supply the purge gas to the at least one outlet of the gas distributor.

11. The purge gas assembly according to claim 10, wherein the gas distributor comprises at least two outlets.

12. The purge gas assembly according to claim 11, wherein one of the at least two outlets defines a first opening for leading a first flow path to a first gas distribution device for distributing a first portion of the purge gas to a first portion of the substrate container, and one of the at least two outlets defines a second opening for leading a second flow path to at least one second gas distribution device for distributing a second portion of the purge gas to a second portion of the substrate container.

13. The purge gas assembly according to claim 10, wherein the chamber surrounds at least the outlet of the purge module.

14. The purge gas assembly according to claim 10, further comprising a filter for supplying filtered purge gas to the outlet of the purge module.

15. The purge gas assembly according to claim 12, wherein the outlet of the purge module comprises at least one of the following: one or more openings for supplying the purge gas from the purge module into the chamber, or the outlet being at least partially connected to the first gas distribution device.

16. The purge gas assembly according to claim 12, further comprising a control valve connected to the second opening of the chamber for regulating the flow of the purge gas to the second gas distribution device through the second flow path.

17. The purge gas assembly according to claim 16, wherein the control valve is an orifice, a needle valve, a ball valve, or a butterfly valve.

18. The purge gas assembly according to claim 16, wherein the control valve includes a valve retainer and a seal ring for snap-fitting the control valve to the chamber.

19. The purge gas assembly according to claim 16, wherein the control valve includes a safety device for preventing changes to the valve settings of the control valve.

20. The purge gas assembly according to claim 12, further comprising tubing for forming a second flow path for connecting the flow of the purge gas from the chamber to the second gas distribution device.

21. The purge gas assembly according to claim 20, wherein the tubing comprises a sealing ring and a tubing retainer for snap-fitting the tubing to the second gas distribution device.

22. The purge gas assembly according to claim 10, further comprising a control valve, tubing, and a carrier plate, wherein the purge module, the control valve, and the tubing are connected along the upper surface of the carrier plate.

23. The purge gas assembly according to claim 10, wherein the upper surface of the chamber is formed along the chamber body, a part of the bottom plate, or the bottom wall of the substrate container.

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