Drying medium recovery system and semiconductor drying equipment

Abstract

This application relates to a supercritical drying medium recovery system and semiconductor wafer drying equipment. The supercritical drying medium recovery system includes a separation device comprising a condensation pipeline and a first cavity. A liquid outlet communicating with the first cavity is provided on the lower wall of the condensation pipeline. The inlet of the condensation pipeline receives the drying medium containing an organic solvent, and the outlet of the condensation pipeline discharges the drying medium separated for recovery. The condensation pipeline condenses the organic solvent in the drying medium containing the organic solvent, causing the organic solvent to condense into a liquid state and flow into the first cavity from the liquid outlet. According to this application, the problem of how to recover carbon dioxide in the wafer drying process in related technologies can be solved, and carbon dioxide recovery in the wafer drying process has been achieved.

Claims

1. A drying medium recovery system applicable to semiconductor drying equipment, wherein the semiconductor drying equipment comprises a drying apparatus for dissolving organic solvents on a wafer using a supercritical drying medium, and the drying medium recovery system recovers the drying medium in the drying medium containing the organic solvent discharged from the drying apparatus. The dry medium recovery system comprises a separation device including a condensing pipeline and a first cavity, the lower wall of the condensing pipeline having a liquid outlet communicating with the first cavity, the inlet of the condensing pipeline receiving the dry medium containing the organic solvent, and the outlet of the condensing pipeline discharging the dry medium separated for recovery. The condensation pipeline condenses the organic solvent in the drying medium containing the organic solvent, causing the organic solvent to condense into a liquid state and flow into the first cavity from the liquid outlet. A dry media recovery system characterized by the following features.

2. A dry media recovery system according to claim 1, A dry media recovery system characterized in that the condensation pipeline is spiral-shaped.

3. A dry media recovery system according to claim 1, A dry media recovery system characterized in that the inlet and outlet of the condensing pipeline are located at different heights in the vertical direction.

4. A dry media recovery system according to claim 1, A dry media recovery system characterized in that the condensation pipeline is provided inside the first cavity or outside the first cavity.

5. A dry media recovery system according to claim 1, A drying medium recovery system characterized in that a first liquid discharge port for discharging organic solvents from the first cavity is provided at the bottom of the first cavity.

6. A dry media recovery system according to claim 1, A drying medium recovery system characterized in that a first exhaust port is provided on the side wall of the first cavity for discharging the drying medium in the first cavity for recovery.

7. A dry media recovery system according to claim 1, A dry media recovery system characterized in that the separation device further comprises a first cooling device connected to the condensing pipeline and maintaining the temperature of the condensing pipeline within a predetermined temperature range.

8. A dry media recovery system according to claim 7, A drying medium recovery system characterized in that the first cooling device is wound spirally around the condensing pipe.

9. A dry media recovery system according to claim 1, The dry medium recovery system further comprises a purification apparatus including a second cavity provided with a second exhaust port, an intake line, and a dry medium filtration membrane, wherein the dry medium filtration membrane is provided in the second cavity, the second cavity is divided into an upper space and a lower space, the lower space of the second cavity contains a purified solvent, the intake end of the intake line communicates with the outlet of the condensing line, the exhaust end of the intake line is inserted into the second cavity, and the second exhaust port is provided in the upper space to discharge the dry medium purified for recovery.

10. A dry media recovery system according to claim 9, The drying medium recovery system further comprises a first pipeline, a second pipeline, a detection device, a switch device, and a controller, wherein the pipeline through which the drying apparatus discharges the drying medium containing the organic solvent is connected to the first pipeline and the second pipeline, respectively, via the switch device, the first pipeline is connected to the separation device, and the second pipeline is connected to the purification device. The detection device detects the concentration of the organic solvent in the drying medium containing the organic solvent discharged from the drying apparatus, and the controller controls the switch device to switch between the first and second pipelines according to the concentration of the organic solvent detected by the detection device. A dry media recovery system characterized in that, when the concentration of the organic solvent detected by the detection device is greater than a predetermined concentration, the control unit controls the switch device to turn on the first pipeline, and when the concentration of the organic solvent detected by the detection device is less than the predetermined concentration, the control unit controls the switch device to turn on the second pipeline.

11. A dry media recovery system according to claim 1 or 9, The drying medium recovery system is characterized by further comprising a dehumidifier connected to the outlet of the condensing pipeline or a second exhaust port.

12. A dry media recovery system according to claim 11, The drying medium recovery system is characterized by further comprising a filter device connected to the dehumidifier.

13. A semiconductor drying apparatus, A drying medium recovery system according to any one of claims 1 to 12, a storage device, a supercritical drying medium preparation device, and a drying device, wherein the drying medium recovery system, the storage device, the supercritical drying medium preparation device, and the drying device are sequentially connected to form a circulation circuit. The storage device stores the dry medium recovered in the dry medium recovery system. The supercritical drying medium preparation apparatus prepares the drying medium discharged from the storage apparatus into a supercritical drying medium. The semiconductor drying apparatus is characterized in that it is configured to dissolve the organic solvent on the wafer surface with the supercritical drying medium to dry the wafer, and to discharge the drying medium containing the organic solvent into the drying medium recovery system to recover the drying medium.

14. A semiconductor drying apparatus according to claim 13, The supercritical drying medium preparation apparatus is A second cooling device for cooling the drying medium discharged from the storage device back to a liquid state, A pressurizing device that pressurizes the liquid drying medium until it exceeds the critical pressure of the drying medium, A semiconductor drying apparatus characterized by comprising a heating device that heats a drying medium exceeding a critical pressure to a temperature exceeding the critical temperature of the drying medium to obtain a supercritical drying medium.

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