Turbomolecular vacuum pump

The vacuum pump's innovative rotor design with high thermal conductivity inner and composite outer skirts addresses mechanical and thermal challenges, enabling efficient hydrogen pumping with reduced vibration and improved stability.

JP2026520608APending Publication Date: 2026-06-23PFEIFFER VACUUM SAS
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
PFEIFFER VACUUM SAS
Filing Date
2024-04-08
Publication Date
2026-06-23

AI Technical Summary

Technical Problem

Existing turbo molecular vacuum pumps face challenges with mechanical stress, manufacturing difficulties, high energy consumption, and poor thermal management due to rotor materials, particularly in high-speed applications like EUV lithography and battery manufacturing, which require efficient hydrogen pumping.

Method used

A rotor design with an inner cylindrical skirt made of high thermal conductivity material, such as aluminum, and an outer skirt made of composite material, optimized for heat dissipation and reduced mechanical stress, combined with magnetic bearings for improved control and stability.

Benefits of technology

The design achieves efficient hydrogen pumping with reduced rotor temperature, lower vibration levels, and optimized inertia moments, enhancing the vacuum pump's stability and efficiency.

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Abstract

A turbomolecular vacuum pump (1) comprising a stator (2) and a rotor (3) configured to rotate within the stator (2), wherein the rotor (3) comprises at least one blade stage (9), one inner cylindrical skirt (14), and at least one outer cylindrical skirt (15), wherein the inner cylindrical skirt (14) and the outer cylindrical skirt (15) are coaxial and configured to rotate in opposite directions to the Holwex stator of the stator (2), the inner cylindrical skirt (14) is made of a material with a higher thermal conductivity than the material forming the at least one outer cylindrical skirt (15), and the thickness of the inner cylindrical skirt (14) is greater than the thickness of the outer cylindrical skirt (15).
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