Optical scanning device and distance measuring device

Abstract

To provide an optical scanning device capable of simplifying control.SOLUTION: The optical scanning device according to an aspect of the present invention includes a light emitting unit (3) that emits light (L1), an optical scanning unit (120) that scans the light, a light receiving unit (8) that receives return light (R) in which scanning light (L2) by the optical scanning unit is reflected or scattered by an object (200), and an optical scanning control unit (150) that controls the optical scanning unit. The scanning unit includes a plurality of reflecting surfaces (51), a rotating polyhedron (5) that reflects the light from the reflection surface while rotating around a first axis (A1) and causes the light to scan around the first axis, a support unit (9) that supports the rotating polyhedron, and a rotation mechanism (10) that rotates the support portion around a second axis (A2) that intersects the first axis and thereby causes the light reflected from the reflection surface to scan around the second axis.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an optical scanning device and a distance measuring device. [Background technology]

[0002] 2. Description of the Related Art Conventionally, there is known an optical scanning device in which scanning light emitted from a light emitting portion is scanned and return light reflected or scattered by an object is received.

[0003] Also disclosed is a configuration having a first deflection mechanism including a movable part that can swing around a first axis and a drive part that drives the movable part to swing, a second deflection mechanism that drives the first deflection mechanism to rotate around a second axis different from the first axis, a light deflection part that is installed in the movable part and deflects and reflects the measurement light emitted from the light projecting and receiving part along the second axis, and a swing control part that controls the drive part (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6069628 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the configuration of Patent Document 1, the control of the oscillation of the movable part may become complicated.

[0006] An object of the present invention is to provide an optical scanning device capable of simplifying the control. [Means for solving the problem]

[0007] An optical scanning device according to one aspect of the present invention includes a light emitting unit (3) that emits light (L1), an optical scanning unit (120) that scans the light, a light receiving unit (8) that receives return light (R) that is generated when the scanned light (L2) by the optical scanning unit is reflected or scattered by an object (200), an optical scanning control unit (150) that controls the optical scanning unit, a base unit (1), and a holding unit (2) that holds the light emitting unit (3) and the light receiving unit (8), and the optical scanning unit includes a rotating polyhedron (5) that includes a plurality of reflective surfaces (51) and scans the light (L1) around the first axis (A1) by reflecting the light (L1) at the reflective surfaces (51) while rotating around the first axis (A1), and and a rotation mechanism (10) that rotates the support part (9) around a second axis (A2) intersecting the first axis (A1) to cause light (L1) reflected by the reflection surface (51) to scan around the second axis (A2). The light (L1) emitted by the light emitting part (8) is incident on the reflection surface (51) of the rotating polyhedron (5) so that the optical axis of the light (L1) emitted by the light emitting part (8) is coaxial with the second axis (A2), and the return light (R) is reflected by the reflection surface (51) of the rotating polyhedron (5) so that the optical axis of the return light (R) is coaxial with the second axis (A2). The holding part (2) and the rotation mechanism (10) are provided in different regions of the base part (1). 1st axis (A1) is the first axis (A1) and the second axis (A2) The second axis is in the direction that intersects both (A2) and the rotating polygonal surface is provided at a position spaced apart from the rotating polygonal surface. (5) is the first axis (A1) The axis of the polygonal prism is a regular polygonal prism having a central axis of A1, and the axis distance d from the second axis (A2) to the first axis (A1) is equal to or less than the radius of the inscribed circle of the regular polygon in the regular polygonal prism, and the position of the polyhedron (5) can be changed within the range of the axis distance d along a direction intersecting both the first axis (A1) and the second axis (A2) according to the condition expressed by the following formula. .

number

[0008] The reference symbols in parentheses are given for ease of understanding, are merely examples, and are not intended to be limiting of the embodiments shown in the drawings. Effect of the Invention

[0009] According to the present invention, it is possible to provide an optical scanning device capable of simplifying the control. [Brief description of the drawings]

[0010] [Figure 1] 1 is a perspective view showing an example of the overall configuration of a distance measuring device according to an embodiment; [Diagram 2] 2 is a partially enlarged perspective view showing an example of the configuration around the LD and APD in FIG. 1. [Diagram 3] 2 is a partially enlarged perspective view showing a configuration example of the polygon mirror and its periphery in FIG. 1. [Figure 4] 1 is a block diagram showing an example of the overall configuration of a distance measuring device according to an embodiment; [Diagram 5] 4 is a block diagram of an example of the functional configuration of a control unit included in the distance measuring device according to the embodiment. FIG. [Figure 6] 5 is a flowchart showing an example of the operation of the distance measuring device according to the embodiment. [Figure 7] 7A and 7B are diagrams showing an example of optical scanning by the distance measuring device according to the embodiment, where FIG. 7A is a diagram showing the distance measuring device as viewed from the side, and FIG. 7B is a diagram showing the distance measuring device as viewed from above. [Figure 8] FIG. 13 is a diagram showing an example of a trajectory of a scanning line. [Figure 9] 9A and 9B are diagrams showing other examples of the trajectories of the scanning lines, where FIG. 9A is a diagram showing a comparative example, and FIG. 9B is a diagram showing an embodiment. [Figure 10] FIG. 4 is a diagram showing a first example of an axis-to-axis distance between a first shaft and a second shaft. [Figure 11] FIG. 11 is a diagram showing a second example of the inter-axis distance between the first shaft and the second shaft. [Figure 12] 13 is a diagram showing a third example of the inter-axis distance between the first shaft and the second shaft. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and duplicated explanations may be omitted.

[0012] Furthermore, the embodiments shown below are examples of an optical scanning device and a distance measuring device for embodying the technical concept of the present invention, and the present invention is not limited to the embodiments shown below. The dimensions, materials, shapes, relative positions, etc. of the components described below are intended to be illustrative, and are not intended to limit the scope of the present invention, unless otherwise specified. Furthermore, the sizes and positional relationships of the components shown in the drawings may be exaggerated to clarify the explanation.

[0013] The optical scanning device of the embodiment has an optical light emitting unit that emits light, an optical scanning unit that scans the light, a optical receiving unit that receives return light that is reflected or scattered by an object after the scanning light from the optical scanning unit, and an optical scanning control unit that controls the optical scanning unit.

[0014] Such an optical scanning device is mounted on a distance measuring device that measures the distance to an object based on return light reflected or scattered by the object, and is used to project the scanning light toward the object. The distance to the object can also be said to be the distance between the object and the distance measuring device.

[0015] Here, for example, if the light scanning unit includes a configuration in which a movable part having a reflective surface is oscillated back and forth to scan light, the control may become complicated due to control to suppress fluctuations in the oscillation speed of the movable part, control of the resonant frequency of the movable part, etc.

[0016] In the embodiment, the optical scanning unit has a rotating polyhedron including a plurality of reflecting surfaces, which rotates around a first axis while reflecting the light emitted by the light emitting unit with the reflecting surfaces, thereby scanning the light around the first axis. The optical scanning unit also has a support unit that supports the rotating polyhedron, and a rotation mechanism that rotates the support unit around a second axis to scan the light reflected by the reflecting surfaces of the rotating polyhedron around the second axis.

[0017] For example, the rotating polyhedron is a polygon mirror. The rotating mechanism is a rotating stage on which the polygon mirror and its support are placed and can rotate. Since the rotating polyhedron and the rotating mechanism each rotate continuously in a fixed rotational direction, there is no need to perform control to suppress fluctuations in the oscillation speed of the movable part or control resonance. This makes it possible to provide an optical scanning device that allows for simplified control.

[0018] Hereinafter, an embodiment will be described taking as an example an optical scanning device that is mounted on a service robot and includes a distance measuring device capable of measuring the distance to an object present in the moving direction of the service robot or in the surrounding area.

[0019] Here, a service robot refers to an autonomous mobile body used mainly for service purposes such as transporting materials in a factory, transporting goods and providing guidance at a customer service facility, guarding a facility, or cleaning. A mobile body refers to an object that can move.

[0020] The distance measuring device mounted on the service robot is used to detect objects in the direction of travel of the service robot or around the service robot, and to create maps of the facility in which the service robot operates, etc. The distance measuring device is, for example, a LiDAR (Light Detection and Ranging, Laser Imaging Detection and Ranging) device.

[0021] In the figures below, directions may be indicated by the X-axis, Y-axis, and Z-axis, but the X-direction along the X-axis indicates the direction along the first axis, which is the rotation axis of the polygon mirror provided in the distance measuring device according to the embodiment. The Z-direction along the Z-axis indicates the direction along the second axis, which is the rotation axis of the rotation stage provided in the distance measuring device according to the embodiment. The X-axis and Z-axis intersect. The Y-direction along the Y-axis indicates the direction that intersects both the X-axis and the Z-axis.

[0022] Additionally, the direction in which the arrow points in the X direction is denoted as the +X direction and the opposite direction of the +X direction is denoted as the -X direction, the direction in which the arrow points in the Y direction is denoted as the +Y direction and the opposite direction of the +Y direction is denoted as the -Y direction, the direction in which the arrow points in the Z direction is denoted as the +Z direction and the opposite direction of the +Z direction is denoted as the -Z direction. However, these do not limit the orientation of the distance measuring device and the optical scanning device when they are used, and the distance measuring device and the optical scanning device can be disposed in any orientation.

[0023] <Configuration example of distance measuring device 100> First, an example of the overall configuration of a distance measuring device 100 according to an embodiment will be described with reference to Fig. 1 to Fig. 3. Fig. 1 is a perspective view illustrating an example of the overall configuration of the distance measuring device 100. Fig. 2 is a partially enlarged perspective view illustrating an example of the peripheral configuration of an LD and an APD. Fig. 3 is a partially enlarged perspective view illustrating an example of the peripheral configuration of a polygon mirror.

[0024] As shown in Figures 1 to 3, the distance measuring device 100 has a base plate 1, a holding portion 2, an LD (Laser Diode) 3 (see Figure 2), a collimating lens 4, a polygon mirror 5, a perforated mirror 6, a receiving lens 7, an APD (Avalanche Photodiode) 8, a tombstone 9, and a rotating stage 10.

[0025] The base plate 1 is an example of a base portion on which the holding unit 2 and the rotating stage 10 are provided. However, the base portion is not limited to a flat plate-shaped member such as the base plate 1, and may be any component on which the rotating stage 10 and the holding unit 2 are provided. For example, in the case where the holding unit 2 and the rotating stage 10 are provided on the housing of a service robot described later, the housing of the service robot corresponds to the base portion.

[0026] The base plate 1 is a flat member, and the holder 2 and the rotating stage 10 are fixed to different areas on the surface on the +Z direction side of the flat plate. More specifically, the rotating stage 10 is fixed to the area on the +Y direction side of the base plate 1 with screws or the like, and the holder 2 is fixed to the area on the -Y direction side of the rotating stage 10 with screws or the like via a connecting member 11.

[0027] There are no particular limitations on the material of the base plate 1, but since the rotation stage 10 may be heavy, it is preferable that the base plate 1 be made of a material with high rigidity, such as a metal material.

[0028] The holding portion 2 is an inverted L-shaped member formed by combining a ceiling panel 21 and a rear panel 22. The ceiling panel 21 and the rear panel 22 are each a flat plate-like member, and the ceiling panel 21 and the rear panel 22 are joined to form the holding portion 2. There are no particular limitations on the material of the ceiling panel 21 and the rear panel 22, but for example, a metal material or a resin material can be used.

[0029] The LD 3, collimator lens 4, and perforated mirror 6 are fixed to the surface on the -Z direction side of ceiling panel 21. The light-receiving lens 7 and APD 8 are fixed to the surface on the +Y direction side of rear panel 22. The holder 2 fixes and holds the LD 3 to the ceiling panel 21, and also fixes and holds the APD 8 to the rear panel 22.

[0030] The LD 3 is an example of a light-emitting unit that emits light. The LD 3 can emit laser light in the -Z axis direction. However, the light-emitting unit is not limited to an LD. A light-emitting unit other than an LD, such as an LED (light emitting diode), may be used as long as it can emit light.

[0031] The light emitted by the light emitting unit may be a CW (Continuous Wave) light or a pulsed light. The wavelength of the light emitted by the light emitting unit is not particularly limited, but it is more preferable to use a laser light in an invisible wavelength region such as a near-infrared wavelength region, since the laser light can be measured without being visible to humans.

[0032] The collimating lens 4 is made of a material containing a glass material or a resin material, and approximately collimates (approximately parallelizes) the laser light emitted by the LD 3. Although the collimating lens 4 is not necessarily provided, providing the collimating lens 4 can suppress the spread of the laser light emitted by the LD 3 and improve the light utilization efficiency.

[0033] The laser light L 1 collimated by the collimating lens 4 passes through a through hole 61 provided in the perforated mirror 6 and is incident on the reflecting surface 51 of the polygon mirror 5 .

[0034] The polygon mirror 5 is an example of a rotating polyhedron that includes a plurality of reflecting surfaces 51 and rotates around the first axis A1 to reflect the laser light L1 at the reflecting surfaces 51, thereby scanning the scanning laser light L2 corresponding to the reflected light of the laser light L1 around the first axis A1. Note that the reflecting surface 51 is a general term for the plurality of reflecting surfaces.

[0035] The polygon mirror 5 rotates to draw a part of a circle centered on the first axis A1, causing the light reflected by the reflecting surface 51 to scan. In other words, the light scanned around the first axis A1 is light scanned along the circumferential direction of a circle centered on the first axis A1.

[0036] The polygon mirror 5 is a regular hexagonal prism-shaped member. Six reflecting surfaces 51 are formed on the outer peripheral surface of the regular hexagonal prism, which correspond to each side of the regular hexagon. The polygon mirror 5 can be manufactured by cutting or mirror polishing the outer peripheral surface of a substantially regular hexagonal prism-shaped member made of a metal material such as aluminum. However, the present invention is not limited to this, and the polygon mirror 5 may be manufactured, for example, by mirror-finish vapor deposition of aluminum or the like on the outer peripheral surface of a substantially regular hexagonal prism-shaped member made of a metal material, a resin material, or the like.

[0037] 1 illustrates a polygon mirror 5 having a regular hexagonal prism shape with six reflecting surfaces 51, but the rotating polyhedron is not limited to this. For example, the rotating polyhedron may be a regular triangular prism shape with three reflecting surfaces, or a regular pentagonal prism shape with five reflecting surfaces.

[0038] The scanning angle range of the light by the rotating polygonal body varies depending on the number of faces of the rotating polygonal body. For example, the more faces there are, the narrower the scanning angle range, and the fewer faces there are, the wider the scanning angle range. The number of faces of the rotating polygonal body can be appropriately determined depending on the required scanning angle range.

[0039] A first axis motor is attached to the polygon mirror 5 so that the central axis of the polygon mirror 5 and the rotation axis thereof substantially coincide with each other. The polygon mirror 5 rotates around the first axis A1 using the first axis motor as a drive source.

[0040] The rotation direction of the polygon mirror 5 is constant, and for example, the polygon mirror 5 rotates continuously along the first axis rotation direction A11 in Fig. 1. However, the polygon mirror 5 may be rotated continuously in a constant rotation direction that is the opposite direction to the first axis rotation direction A11.

[0041] The laser light L1 incident on the reflecting surface 51 of the polygon mirror 5 is reflected by the reflecting surface 51 and irradiated in the +Y direction. As the polygon mirror 5 rotates, the angle of the reflecting surface 51 with respect to the incident direction of the laser light L1 changes continuously, so that the light reflected by the reflecting surface 51 is scanned around the first axis A1 and irradiated in the +Y direction as the scanned laser light L2.

[0042] FIG. 1 illustrates the scanning laser light L2, which is one laser beam irradiated in the +Y direction at an arbitrary timing, out of the scanning laser light L2 scanned around the first axis A1.

[0043] When an object is present on the +Y direction side of the distance measuring device 100, the scanning laser light L2 is reflected or scattered by the object, and the returned light is returned to the distance measuring device 100. The returned light is incident on the reflecting surface 51 of the polygon mirror 5 again, and is scanned around the first axis A1 by the rotation of the polygon mirror 5. Of this scanned returned light, the returned light that reaches the perforated mirror 6 is reflected and deflected by the perforated mirror 6 towards the -Y direction side.

[0044] In this embodiment, the reflecting surface 51 at which the laser light L1 is reflected by the polygon mirror 5 is the same as the reflecting surface 51 at which the return light is reflected by the polygon mirror 5. The return light reflected by the same reflecting surface is received by the APD 8.

[0045] In other words, APD8 receives the returning light that is reflected again by a specific surface among the multiple reflecting surfaces 51 included in the polygon mirror 5 after the scanning laser light L2 is reflected or scattered by an object.

[0046] The perforated mirror 6 is an example of an optical deflection section that deflects return light of the scanning laser light L2 reflected or scattered by an object. The perforated mirror 6 includes a through hole 61. The through hole 61 is an example of an opening that passes the light emitted by the LD 3, and is formed in a part of the region of the perforated mirror 6 where the reflective surface is provided. Of the light that enters the perforated mirror 6, the light that enters the reflective surface is reflected, and the light that enters the through hole 61 passes through.

[0047] In this embodiment, the light deflection unit has a through hole as an opening, but is not limited to this. A part of the area where the reflecting surface is provided in the light deflection unit may be made transparent, and the transparent area may be made to function as an opening by transmitting light. Also, a beam splitter, a half mirror, or the like may be used as the light deflection unit.

[0048] The laser light L1 collimated by the collimating lens 4 passes through the through-hole 61 of the perforated mirror 6 and is incident on the reflecting surface 51 of the polygon mirror 5. On the other hand, the returning light of the scanning laser light L2 reflected or scattered by an object is reflected by the reflecting surface of the perforated mirror 6 towards the APD 8.

[0049] The light reflected by the perforated mirror 6 is collected by the light-receiving lens 7 and then enters the APD 8. The light-receiving lens 7 is not necessarily required, but providing the light-receiving lens 7 is preferable in that it improves the incidence efficiency of the laser light entering the APD 8.

[0050] The APD8 is an example of a light receiving unit that receives return light of the scanning laser light L2 reflected or scattered by an object. The APD8 is a type of photodiode that improves light receiving sensitivity by utilizing a phenomenon called avalanche multiplication. However, the light receiving unit is not limited to the APD, and a PD (Photodiode) other than the APD, a photomultiplier tube, etc. may be used.

[0051] The tombstone 9 is an L-shaped member, and is an example of a support that supports the polygon mirror 5. The bottom surface (the surface on the -Z direction side) of the tombstone 9 contacts the mounting surface 101 of the rotation stage 10, and is fixed onto the mounting surface 101 with screws or the like. The tombstone 9 also fixes the polygon mirror 5 to its front surface (the surface on the +X direction side) that intersects with the bottom surface, via a substrate 91. There are no particular limitations on the material of the tombstone 9, but it is preferable for it to be made up of a highly rigid material such as metal in order to ensure high rigidity.

[0052] The rotating stage 10 is an example of a rotating mechanism that rotates the tombstone 9 around the second axis A2, thereby causing the scanning laser light L2 reflected by the reflective surface 51 of the polygon mirror 5 fixed to the tombstone 9 to scan around the second axis A2.

[0053] The rotating stage 10 is provided in an area on the base plate 1 that is different from an area in which the holder 2 is provided. Therefore, even if the rotating stage 10 rotates, the holder 2 and the LD 3 and APD 8 held by the holder 2 do not move and remain fixed to the base plate 1.

[0054] The rotating stage 10 rotates to draw a part of a circle centered on the second axis A2, causing the light reflected by the reflecting surface 51 of the polygon mirror 5 to scan. In other words, the light scanned around the second axis A2 is light scanned along the circumferential direction of a circle centered on the second axis A2.

[0055] As shown in FIG. 3, the rotation stage 10 has a mounting surface 101, a bearing 102, a magnet 103, and a motor core 104.

[0056] The mounting surface 101 is a surface that is rotatable around a second axis A2 (see FIG. 1). The tombstone 9 is placed on the mounting surface 101. The bearing 102 is a member that smooths the rotation of the mounting surface 101. Various types of bearings such as ball bearings or cross roller bearings can be used.

[0057] The magnet 103 is a permanent magnet. The motor core 104 is a member that corresponds to the iron core of a stator that constitutes the motor. The motor is constituted by the magnet 103 and the motor core 104. The magnet 103 rotates in response to a current, which allows the mounting surface 101 to rotate via the bearing 102.

[0058] The rotation direction of the rotation stage 10 is constant. For example, the rotation stage 10 rotates continuously along the second axis rotation direction A21 in Fig. 1. However, the rotation stage 10 may be rotated continuously in a constant rotation direction that is the opposite direction to the second axis rotation direction A21.

[0059] As shown in FIG. 1, the positions and angles of the LD 3, the collimating lens 4 and the rotating stage 10 are adjusted so that the laser light L1 emitted by the LD 3 and collimated by the collimating lens 4 is incident on the reflecting surface 51 of the polygon mirror 5 along the second axis A2.

[0060] For example, the distance measuring device 100 is configured so that the optical axis of the laser light L1 and the second axis A2 are coaxial. Here, the optical axis of the laser light L1 means the axis that passes through the center of the laser beam. Also, the coaxial axis means that multiple axes are substantially aligned.

[0061] The scanning laser light L2 is scanned around a first axis A1 by the rotation of the polygon mirror 5, and is also scanned around a second axis A2 by the rotation of the rotation stage 10. The distance measuring device 100 can scan the laser light around two intersecting axes.

[0062] In this embodiment, a configuration in which the first axis A1 and the second axis A2 are substantially perpendicular to each other is illustrated, but the present invention is not limited to this, and the second axis A2 may be disposed so as to be inclined with respect to the first axis A1.

[0063] In addition, although Figures 1 to 3 illustrate a configuration in which the distance measuring device 100 does not have an exterior cover, the distance measuring device 100 may also be provided with an exterior cover for covering some or all of the components such as the LD 3, the polygon mirror 5, the APD 8, or the rotating stage 10.

[0064] The exterior cover prevents dirt, dust, etc. from entering the interior of the distance measuring device 100 and prevents dirt, dust, etc. from adhering to the polygon mirror 5, etc. In addition, when the polygon mirror 5 and the rotating stage 10 rotate at high speed, the sound associated with the rotation may become loud, but the exterior cover can prevent the sound from being transmitted to the surroundings. The exterior cover can be made of metal, resin, or the like.

[0065] On the other hand, when an exterior cover is provided, the scanning angle range may be limited because the parts of the exterior cover other than the exit window through which the scanning laser light L2 is emitted block the scanning laser light L2, thereby limiting the detection range or distance measurement range of the object 200 by the distance measuring device 100. If the exterior cover is made of a transparent resin material that is optically transparent to the wavelength of the scanning laser light L2, such limitations on the scanning angle range can be alleviated, which is preferable.

[0066] Next, Fig. 4 is a block diagram showing an example of the overall configuration of the distance measuring device 100. Descriptions of the configurations already explained using Fig. 1 to Fig. 3 will be omitted as appropriate. Note that the arrows shown by thick solid lines in Fig. 4 indicate the flow of light, and the arrows shown by thick dashed lines indicate the flow of electrical signals.

[0067] As shown in FIG. 4, the distance measuring device 100 includes a light receiving and emitting unit 110, a light scanning unit 120, an exit window 130, and a control unit 140.

[0068] The control unit 140 is electrically connected to each of the external controller 300, the light receiving and emitting unit 110, and the light scanning unit 120, and can transmit and receive signals and data between them. The control unit 140 also includes a light scanning control unit 150 that controls the light scanning unit 120.

[0069] The control unit 140 includes a control circuit board having electric or electronic circuits, and is installed, for example, on the rear panel 22 (see FIG. 1), etc. Therefore, even if the polygon mirror 5 and the rotating stage 10 rotate, the control circuit board constituting the control unit 140 does not move.

[0070] The external controller 300 is a controller for controlling the service robot, and is configured with a board PC (Personal Computer) equipped with ROS (Robot Operating System) or the like.

[0071] The light receiving / emitting unit 110 has an LD substrate 111 , a light emitting block 112 , a perforated mirror 6 , a perforated mirror holder 62 , a light receiving block 113 , and an APD substrate 114 .

[0072] The LD substrate 111 includes an electric circuit that causes the LD 3 to emit light in response to a light emission control signal from the control unit 140 .

[0073] The light emission block 112 includes an LD 3, an LD holder 31, a collimating lens 4, and a collimating lens holder 41. The LD holder 31 is a member that holds the LD 3. The collimating lens holder 41 is a member that holds the collimating lens 4. The perforated mirror holder 62 is a member that holds the perforated mirror 6.

[0074] Light receiving block 113 includes light receiving lens 7, light receiving lens holder 71, APD 8, and APD holder 81. Light receiving lens holder 71 is a member that holds light receiving lens 7. APD holder 81 is a member that holds APD8.

[0075] The APD board 114 includes an electric circuit that outputs to the control unit 140 a light reception signal, which is an electric signal corresponding to the intensity of the light received by the APD 8 .

[0076] The optical scanning unit 120 includes a substrate 91 and a rotating stage 10. The substrate 91 is provided with a polygon mirror 5, a first axis motor 161, a first axis encoder 162, a first axis driver substrate 163, a synchronous detection LED 164, and a power generating coil 165. The rotating stage 10 is provided with a second axis motor 171, a second axis encoder 172, a second axis driver substrate 173, a synchronous detection PD 174, and a power supply coil 175.

[0077] The set of the power generating coil 165 and the power feeding coil 175 constitutes the power feeding unit 170. The power feeding unit 170 can feed power to the first axis motor 161 etc. in a non-contact manner by electromagnetic induction. Note that "feeding" refers to supplying electric power.

[0078] The first axis motor 161 is an example of a rotation drive unit that rotates the polygon mirror 5. A DC (Direct Current) motor, an AC (Alternating Current) motor, or the like can be used as the first axis motor 161.

[0079] The first axis encoder 162 is a rotary encoder, and is an example of a detection unit that detects the rotation angle of the polygon mirror 5 .

[0080] The first axis driver board 163 is a board including an electric circuit and the like that supplies a drive signal to the first axis motor 161. The first axis driver board 163 can control the polygon mirror 5 to rotate at a predetermined rotation speed based on a detection signal by the first axis encoder 162.

[0081] Here, the rotation speed of the polygon mirror 5 is controlled by the first axis driver board 163, and is not controlled by the optical scanning control unit 150. In other words, the rotation speed of the polygon mirror 5 is not subject to control by the optical scanning control unit 150. However, the start and stop of rotation of the polygon mirror 5 is performed based on a scanning control signal from the optical scanning control unit 150. Note that control of the rotation speed can also be said as control of the rotation speed.

[0082] The synchronization detection LED 164 is an example of a synchronization output section that outputs a synchronization signal synchronized with the rotation of the polygon mirror 5 based on the rotation angle of the polygon mirror 5 .

[0083] Specifically, the synchronization detection LED 164 emits a pulsed light based on a detection signal of the rotation angle of the polygon mirror 5 by the first axis encoder 162. The pulsed light emitted by the synchronization detection LED 164 corresponds to a synchronization signal synchronized with the rotation of the polygon mirror 5, and the synchronization detection LED 164 can output the synchronization signal by emitting the pulsed light.

[0084] The power generating coil 165 is a coil that generates a back electromotive force by electromagnetic induction and supplies power to each of the first axis motor 161, the first axis encoder 162, and the first axis driver board 163.

[0085] The second axis motor 171 is a motor that rotates the rotating stage 10. Various motors such as a DC motor, an AC motor, or a stepping motor can be used as the second axis motor 171. The second axis encoder 172 is a rotary encoder that detects the rotation angle of the rotating stage 10.

[0086] The second axis driver board 173 is a board including an electric circuit and the like that supplies a drive signal to the second axis motor 171. The second axis driver board 173 rotates the rotating stage 10 based on a scan control signal from the optical scan control unit 150.

[0087] Furthermore, the second axis driver board 173 feeds back the rotation angle of the rotating stage 10 detected by the second axis encoder 172 as a second axis rotation angle signal to the optical scanning control unit 150. The optical scanning control unit 150 can control the rotating stage 10 based on the second axis rotation angle signal.

[0088] Here, the rotation speed of the rotating stage 10 is controlled by the optical scanning control unit 150 and is subject to control by the optical scanning control unit 150 .

[0089] The synchronous detection PD 174 receives the pulsed light emitted by the synchronous detection LED 164 and outputs a light reception signal to the second axis driver board 173. For example, the synchronous detection LED 164 emits a pulsed light at the timing when the first axis encoder 162 detects the angle corresponding to the rotation origin of the polygon mirror 5.

[0090] The synchronization detection PD 174 receives the pulsed light emitted by the synchronization detection LED 164, thereby detecting the synchronization timing with the rotation of the polygon mirror 5. The second axis driver board 173 outputs a synchronization signal indicating the synchronization timing with the rotation of the polygon mirror 5 to the control unit 140, based on the input signal from the synchronization detection PD 174.

[0091] The power supply coil 175 is disposed opposite the power generation coil 165, and generates a back electromotive force in the power generation coil 165 by electromagnetic induction in response to a current flowing from the second axis driver board 173.

[0092] For example, when a current is passed through the power supply coil 175, a back electromotive force is generated in the power generation coil 165 by electromagnetic induction in a non-contact manner. The power generation coil 165 can supply the generated back electromotive force to each of the first axis motor 161, the first axis encoder 162, and the first axis driver board 163 as power.

[0093] In this embodiment, the power supply unit 170 supplies power contactlessly by electromagnetic induction, but the present invention is not limited to this. For example, the power supply unit 170 can also supply power by a rotating contact. The rotating contact here refers to a configuration in which the power supply unit 170 is electrically connected to a rotating body via a metal ring and brushes arranged on the rotating body. Such a rotating contact can also be used to supply power to the first axis motor 161 and the like from outside.

[0094] 4, the control unit 140 outputs a light emission control signal in response to a distance measurement control signal from the external controller 300, and causes the LD 3 to emit light via the LD substrate 111. The laser light L1 emitted by the LD 3 and collimated by the collimator lens 4 is reflected by the reflecting surface 51 of the polygon mirror 5, passes through the exit window 130, and is irradiated from the distance measurement device 100 to the outside as a scanning laser light L2.

[0095] The exit window 130 is configured to include a glass material or a resin material having optical transparency to the wavelength of the laser light emitted by the LD 3. The exit window 130 is a member that functions as a window that transmits and exits the scanning laser light L2 when the distance measuring device 100 is provided with an opaque exterior cover that covers the entire device.

[0096] The return light R, which is the scanning laser light L2 reflected or scattered by the object 200, passes through the exit window 130 and enters the reflecting surface 51 of the polygon mirror 5. It is then reflected by the reflecting surface 51 and reflected by the perforated mirror 6 towards the APD 8.

[0097] The light reflected by the perforated mirror 6 is incident on the APD 8 while being collected by the light receiving lens 7. The APD 8 receives this incident light and outputs a light receiving signal to the control unit 140 via the APD substrate 114. The control unit 140 can obtain distance information indicating the distance to the object 200 by calculation based on the light receiving signal, and output this distance information to the external controller 300.

[0098] 4, the optical scanning device 400 provided in the distance measuring device 100 includes an LD 3 (light emitting section), an optical scanning section 120, an APD 8 (light receiving section), and an optical scanning control section 150.

[0099] The distance measuring device 100 can be operated by power supplied from a battery mounted on the service robot. However, this is not limited to this, and the distance measuring device 100 may be powered by a battery mounted on the distance measuring device 100 itself, or when the operating range of the service robot is not wide, the distance measuring device 100 may be configured to be powered from a commercial power source using a cable.

[0100] <Example of functional configuration of control unit 140> Next, the functional configuration of the control unit 140 included in the distance measuring device 100 will be described with reference to Fig. 5. Fig. 5 is a block diagram illustrating an example of the functional configuration of the control unit 140.

[0101] 5, the control unit 140 has an optical scanning control unit 150, a light emission control unit 141, a distance information acquisition unit 142, and a distance information output unit 143. The optical scanning control unit 150 also has a power supply control unit 151, a polygon mirror control unit 152, and a rotation stage control unit 153.

[0102] These functions may be realized by electrical circuits, or some of the functions may be realized by software (CPU: Central Processing Unit). These functions may also be realized by multiple circuits or multiple pieces of software.

[0103] The power supply control unit 151 controls the start and stop of power supply by the power supply unit 170. The polygon mirror control unit 152 controls the start and stop of rotation of the polygon mirror 5 via the first axis driver board 163.

[0104] The rotation stage control unit 153 inputs the synchronization signal output by the synchronization detection PD 174 and the second axis rotation angle signal output by the second axis encoder 172, and controls the rotation of the rotation stage 10 via the second axis driver board 173 based on these.

[0105] The light emission control unit 141 controls the light emission by the LD 3 via the LD substrate 111. The light emission control unit 141 also provides the distance information acquisition unit 142 with information indicating the time when the LD 3 emits light.

[0106] The distance information acquisition unit 142 acquires information about the distance to the object 200 based on return light R that is generated when the scanning laser light L2 from the optical scanning device 400 is reflected or scattered by the object 200.

[0107] Specifically, the distance information acquisition unit 142 acquires distance information using a TOF (Time Of Flight) method based on the time difference between the emission time when the LD3 emits laser light to be irradiated toward the object 200 and the reception time when the APD8 receives the return light R input via the APD substrate 114.

[0108] However, the present invention is not limited to this. The distance measuring device 100 can also use a phase difference detection method in which an amplitude-modulated laser beam is emitted and distance information is obtained based on the phase difference between the emitted laser beam and return light reflected or scattered by an object.

[0109] The distance information acquisition unit 142 can output the distance information to the external controller 300 via the distance information output unit 143 .

[0110] <Example of operation of distance measuring device 100> Next, a description will be given of the operation of the distance measuring device 100. Fig. 6 is a flow chart showing an example of the operation of the distance measuring device 100. Note that Fig. 6 shows the operation triggered when the distance measuring device 100 is started up.

[0111] When the distance measuring device 100 is started, first, in step S61, the power supply control section 151 causes the power supply section 170 to start power supply.

[0112] Subsequently, in step S62, the polygon mirror control unit 152 causes the first axis driver board 163 to start rotating the polygon mirror 5.

[0113] Next, in step S63, the rotating stage control unit 153 starts inputting a synchronization signal from the synchronization detection PD 174 and also starts inputting a second-axis rotation angle signal from the second-axis encoder. Then, the rotating stage control unit 153 starts controlling the rotating stage 10 via the second-axis driver board 173 based on the synchronization signal and the second-axis rotation angle signal.

[0114] Next, in step S64, the light emission control unit 141 causes the LD 3 to emit laser light via the LD substrate 111.

[0115] Subsequently, in step S 65 , the distance information acquisition unit 142 inputs the light reception signal by the APD 8 via the APD substrate 114 .

[0116] Next, in step S66, the distance information acquisition unit 142 acquires distance information to the object 200 based on the emission time when the LD 3 emits the laser light to be irradiated to the object 200 side and the time when the APD 8 receives the return light R.

[0117] Next, in step S 67 , the distance information acquisition unit 142 outputs the distance information to the external controller 300 via the distance information output unit 143 .

[0118] Next, in step S68, the control unit 140 determines whether or not to end the distance measurement.

[0119] If it is determined in step S68 that the process should be ended, the operation proceeds to step S69. On the other hand, if it is determined that the process should not be ended, the operations from step S64 onwards are carried out again.

[0120] Subsequently, in step S69, the rotation stage control unit 153 stops the rotation of the rotation stage 10 via the second axis driver board 173.

[0121] Subsequently, in step S70, the polygon mirror control unit 152 stops the rotation of the polygon mirror 5 via the first axis driver board 163.

[0122] Next, in step S71, power supply control section 151 causes power supply section 170 to stop power supply.

[0123] In this manner, the distance measuring device 100 can perform distance measurement by scanning the scanning laser light L2 and using the return light from the object 200.

[0124] Next, Fig. 7 is a diagram showing an example of optical scanning by the distance measuring device 100. Fig. 7(a) is a diagram showing the distance measuring device 100 as viewed from the side, and Fig. 7(b) is a diagram showing the distance measuring device 100 as viewed from above. Fig. 7 shows how the distance measuring device 100 mounted on the service robot 500 scans with laser light.

[0125] 7, the service robot 500 is a mobile object having tires 501 and configured to be movable on a path such as a road, a floor, etc. The distance measuring device 100 is fixed on the surface of the +Z direction side of the housing of the service robot 500 and moves together with the service robot 500.

[0126] 7(a), the distance measuring device 100 scans the scanning laser light L2 in a scanning angle range φz around the X-axis corresponding to the first axis A1. Return light R1, which is the scanning laser light L2 reflected or scattered by an object 201 present within the scanning angle range φz, returns to the distance measuring device 100 and is received by the APD 8. Similarly, return light R2, which is the scanning laser light L2 reflected or scattered by an object 202 present within the scanning angle range φz, returns to the distance measuring device 100 and is received by the APD 8.

[0127] 7(b), the distance measuring device 100 scans the scanning laser light L2 in a scanning angle range φxy around the Z axis corresponding to the second axis A2. Return light R3, which is the scanning laser light L2 reflected or scattered by an object 203 present within the scanning angle range φxy, returns to the distance measuring device 100 and is received by the APD 8. Similarly, return light R2, which is the scanning laser light L2 reflected or scattered by an object 204 present within the scanning angle range φxy, returns to the distance measuring device 100 and is received by the APD 8.

[0128] <Example of scanning line trajectory> Next, a description will be given of the trajectory of the scanning line by the scanning laser light L2 by the distance measuring device 100. Note that the term "scanning line" in this embodiment refers to a linear pattern drawn by the tip of the scanning laser light L2 in the propagation direction as the scanning laser light L2 scans.

[0129] FIG. 8 is a diagram for explaining an example of scanning lines by the distance measuring device 100. As shown in FIG.

[0130] Here, in this embodiment, the rotation stage control unit 153 controls the rotation stage 10 so that the rotation speed of the rotation stage 10 is faster than the rotation speed of the polygon mirror 5. In addition, the rotation stage control unit 153 controls the rotation stage 10 so that the quotient obtained by dividing the product of the rotation speed of the polygon mirror 5 and the number of reflecting surfaces 51 included in the polygon mirror 5 by the rotation speed of the rotation stage 10 becomes a non-integer.

[0131] In this embodiment, the rotation speed of the rotating stage 10 is set to 1200 rpm, and the rotation speed of the polygon mirror 5 is set to 180 rpm.

[0132] In this embodiment, the rotation speed of the rotary stage 10 is faster than that of the polygon mirror 5 , but the rotation speed of the polygon mirror 5 may be faster than that of the rotary stage 10 .

[0133] In other words, the rotation stage control unit 153 determines the rotation speed of the rotation stage 10 so that the product of the rotation speed of the polygon mirror 5 and the number of reflecting surfaces 51 included in the polygon mirror 5 is not divisible (a remainder is generated) when divided by the rotation speed of the rotation stage 10.

[0134] In this way, the position of the scanning line around the second axis A2 in a direction along the second axis A2 (for example, the Z-axis direction in FIG. 8) can be shifted every time the rotating stage 10 rotates once around the second axis A2. By drawing the scanning line multiple times around the second axis A2 while shifting the position in the Z-axis direction, it is possible to draw the scanning line over the entire plane of a predetermined area including, for example, the Z-axis direction and a direction perpendicular to the Z-axis (for example, the X-axis direction in FIG. 8).

[0135] 8, scanning lines 801 to 806 indicate scanning lines for each rotation when the rotating stage 10 is rotated around the second axis A2. Scanning line 801 indicates the scanning line for the first rotation, scanning line 802 indicates the scanning line for the second rotation, scanning line 803 indicates the scanning line for the third rotation, scanning line 804 indicates the scanning line for the fourth rotation, scanning line 805 indicates the scanning line for the fifth rotation, and scanning line 806 indicates the scanning line for the sixth rotation.

[0136] The position of the scanning line around the second axis A2 shifts in the Z-axis direction for each rotation of the rotating stage 10. In the example of Fig. 8, the scanning line resulting from the seventh rotation returns to its original position and overlaps with the scanning line 801, and similarly, the scanning lines resulting from the eighth and subsequent rotations overlap with the scanning lines 802 and subsequent.

[0137] Since the polygon mirror 5 rotates in parallel with the rotation of the rotating stage 10, each scanning line is tilted as shown in Fig. 8. Also, since the rotation speed of the rotating stage 10 is faster than the rotation speed of the polygon mirror 5, the tilt of the scanning line with respect to the X-axis is smaller than the tilt with respect to the Z-axis.

[0138] When the rotation speed of the polygon mirror 5 is faster than the rotation speed of the rotating stage 10, the inclination of the scanning line with respect to the Z axis becomes smaller than the inclination with respect to the X axis.

[0139] The period at which the scanning line returns to its original position and the inclination of the scanning line can be determined by the ratio of the number of rotations of the rotating stage 10 to the number of rotations of the polygon mirror 5. In other words, the optical scanning control unit 150 can determine and control the number of rotations of the rotating stage 10 so that it has a predetermined ratio to the number of rotations of the polygon mirror 5.

[0140] If the rotation speed of polygon mirror 5 is sufficiently fast compared to the rotation speed of rotating stage 10 and a sufficient number of scanning lines can be drawn by the rotation of polygon mirror 5 during one rotation of rotating stage 10, control may be performed so that the positions of the scanning lines do not shift in the Z-axis direction for each rotation. This control also makes it possible to draw scanning lines over the entire plane of a specified area including the Z-axis and X-axis directions.

[0141] In this case, the rotation stage control unit 153 controls the rotation stage 10 so that the quotient obtained by dividing the product of the number of rotations of the polygon mirror 5 and the number of reflecting surfaces 51 included in the polygon mirror 5 by the number of rotations of the rotation stage 10 is an integer, that is, is divisible (no remainder is generated). As a result, the position of the scanning line about the second axis A2 does not shift in the Z-axis direction for each rotation of the rotation stage 10 about the second axis A2.

[0142] Next, Fig. 9 is a diagram showing another example of the trajectory of the scanning line. Fig. 9(a) is a diagram showing a comparative example, and Fig. 9(b) is a diagram showing this embodiment. The circle plots in the graphs in Fig. 9(a) and (b) represent the beam spot 92 of the scanning laser light L2. The beam spot 92 is scanned in response to the scanning of the scanning laser light L2, and a scanning line is drawn.

[0143] The comparative example shows a scanning line 90X in a configuration in which a laser beam is scanned back and forth around the second axis A2 by an oscillating mirror. The oscillating mirror oscillates back and forth with a sinusoidal driving waveform. When a sinusoidal driving waveform is used, the oscillation speed of the oscillating mirror is not constant, so that the interval between adjacent beam spots in the scanning laser beam L2 varies.

[0144] In the scanning line 90X, an area 901a indicates an area where the beam spots are closely spaced in the Z-axis direction, and an area 901b indicates an area where the beam spots are sparsely spaced in the Z-axis direction. An area 902a indicates an area where the beam spots are closely spaced in the X-axis direction, and an area 902b indicates an area where the beam spots are sparsely spaced in the X-axis direction. As shown in FIG. 9(a), the beam spots vary in density when optically scanning with an oscillating mirror.

[0145] In a distance measuring device, if the spacing between beam spots varies, this is not preferable because it results in different spatial resolution for each distance measurement region. To eliminate the variation in spacing between beam spots, it is necessary to change at least one of the light emission timing of the light emitting unit or the oscillation speed of the oscillating mirror for each measurement region, which makes the control complicated.

[0146] Furthermore, when optical scanning is performed on both the forward and backward passes of the reciprocating oscillation, the position in the X-axis direction where the beam spot is irradiated will differ between the forward and backward passes depending on the position in the Z-axis direction. This causes the spacing between the beam spots to vary, requiring more complex control to eliminate this variation.

[0147] In contrast, in this embodiment, the polygon mirror 5 is rotated at a substantially constant speed while being rotated at a substantially constant speed around the second axis A2, thereby enabling raster scanning with the scanning laser light L2. As shown in FIG. 9(b), the intervals between the beam spots 92 forming the scanning line 90 are substantially constant, and the intervals between the scanning lines 90 along the X-axis direction are also substantially constant. Thus, in this embodiment, the intervals between the beam spots 92 do not vary. Therefore, complicated control for eliminating the variations in the intervals between the beam spots 92 is not required.

[0148] <Functions and Effects of Distance Measuring Device 100> Next, a description will be given of the functions and effects of the distance measuring device 100. Note that, although the following description will be given of the functions and effects of the distance measuring device 100, the term distance measuring device 100 may be replaced with the term optical scanning device 400, and the functions and effects of the optical scanning device 400 may be described.

[0149] In recent years, autonomous mobile service robots have been developed and introduced mainly for service purposes such as transporting materials in factories, transporting goods and providing guidance in customer service facilities, security within facilities, cleaning, etc. In addition, distance measuring devices such as LiDAR devices are often used to detect objects in the direction of travel or around such service robots and to create maps of the facilities in which the service robots operate.

[0150] Known distance measuring devices include, for example, two-dimensional distance measuring devices that scan light in a plane intersecting the direction of gravity to measure the distance to an object present in the plane, and three-dimensional distance measuring devices that scan light in a direction along gravity in addition to the plane intersecting the direction of gravity to measure the distance to an object present in three-dimensional space.

[0151] A 3D distance measuring device is advantageous in that it can detect objects existing in a wide three-dimensional range and measure the distance, but on the other hand, the structure and control of the device may be complicated and the device may be expensive. For example, a 3D distance measuring device is expected to cost 20 to 30 times as much as a 2D distance measuring device. The complexity of the structure and control of the device, as well as the price of the device, may be one of the constraints for installing a distance measuring device in a service robot, which is a relatively inexpensive robot.

[0152] In addition, a three-dimensional distance measuring device is disclosed that has a first deflection mechanism having a movable part that can swing around a first axis and a drive part that drives the movable part to swing, a second deflection mechanism that drives the first deflection mechanism to rotate around a second axis different from the first axis, a light deflection part that is installed on the movable part and deflects and reflects measurement light emitted from the light projecting and receiving part along the second axis, and a swing control part that controls the drive part (see, for example, Patent Document 1).

[0153] However, in the configuration of Patent Document 1, the movable part is oscillated back and forth to scan the light, so complex control such as control to suppress fluctuations in the oscillation speed of the movable part is required. When the movable part is driven resonantly, control of the resonance frequency is also required, which makes the control even more complicated. In addition, when the scanning angle range of the optical scanning is widened, more advanced control such as control to respond to deformation of the movable part is required.

[0154] Furthermore, when driving the movable part with a sawtooth drive waveform in order to raster scan light with the oscillating movable part, a memory device for storing the drive waveform and a control device for suppressing unnecessary resonance are required, further increasing the complexity of control and the cost of the device.

[0155] In contrast, in this embodiment, the optical scanning unit 120 included in the distance measuring device 100 has a polygon mirror 5 (rotating polyhedron) that includes multiple reflective surfaces 51 and rotates around the first axis A1 to reflect the laser light emitted by the LD 3 (light emitting unit) at the reflective surfaces 51, thereby scanning the laser light around the first axis A1. The optical scanning unit 120 also has an tombstone 9 (support unit) that supports the polygon mirror 5, and a rotation stage 10 (rotation mechanism) that rotates the tombstone 9 around the second axis A2 to scan the laser light reflected by the reflective surfaces 51 of the polygon mirror 5 around the second axis A2.

[0156] Since the polygon mirror 5 and the rotating stage 10 each rotate continuously in a fixed direction, there is no need to perform complex controls such as controls to suppress fluctuations in the oscillation speed of the movable parts or controls for resonance frequencies. This makes it possible to provide an optical scanning device that allows for simplified control. In addition, by simplifying the control, the control circuit board can be made smaller, thereby reducing the cost of the distance measuring device 100.

[0157] Furthermore, since the optical scanning is performed by rotation, the scanning angle range of the optical scanning can be easily expanded. When the scanning angle range of the optical scanning is narrow, it is possible to provide a configuration in which multiple pairs of light-emitting units and light-receiving units are provided in order to ensure the desired scanning angle range. However, providing multiple pairs of light-emitting units and light-receiving units increases the cost accordingly and also complicates the configuration of the distance measuring device 100. In this embodiment, by performing optical scanning by rotation, it is possible to prevent such an increase in cost and a complicated configuration.

[0158] In addition, by rotating the polygon mirror 5 at a substantially constant speed while rotating the rotary stage 10 at a substantially constant speed, the laser light can be easily raster scanned at a constant speed. This makes it possible to make the intervals between the beam spots of the scanned laser light substantially constant through simple control, and to uniformize the spatial resolution in each measurement region.

[0159] In this embodiment, the optical scanning control unit 150 does not control the rotation speed of the polygon mirror 5.

[0160] Here, polygon mirror 5 also rotates about second axis A2 in conjunction with the rotation of tombstone 9 by rotation stage 10. If control wiring is connected from the control circuit board that constitutes optical scanning control unit 150 to polygon mirror 5, the wiring will rotate or move in response to the rotation of polygon mirror 5 about second axis A2, so consideration must be given to the rotation or movement of the wiring.

[0161] Even if the control circuit board is provided on the rotating stage 10, wiring will be required to connect the external controller 300 etc. to the control circuit board, and consideration will need to be given to the rotation or movement of the wiring etc. in response to the rotation of the polygon mirror 5 about the second axis A2.

[0162] By not controlling the rotation speed of the polygon mirror 5, there is no need for wiring to connect the optical scanning control unit 150 and the polygon mirror 5 in order to control the polygon mirror 5. As a result, there is no need to consider the rotation or movement of wiring etc. in response to the rotation of the polygon mirror 5 about the second axis A2, and the configuration of the distance measuring device 100 can be further simplified.

[0163] Moreover, since the polygon mirror 5 rotates at a substantially constant rotation speed in a fixed rotation direction, complicated control is not required. This makes it possible to apply a simplified control circuit provided on the first axis driver board 163 provided on the rotation stage 10 to control the rotation speed of the polygon mirror 5, and the optical scanning control unit 150 can exclude the rotation speed of the polygon mirror 5 from being a control target.

[0164] In this embodiment, the distance measuring device 100 has a base plate 1 (base unit) and a holder 2, and the holder 2 and the rotating stage 10 are provided in different areas on the base plate 1. As a result, the holder 2 and the LD 3 and APD 8 (light receiving unit) held by the holder 2 are immobile even when the rotating stage 10 rotates, and can be maintained in a fixed state to the base plate 1.

[0165] For example, if the LD 3 and APD 8 are configured to rotate by the rotating stage 10, it is necessary to take into consideration that wiring for controlling the LD 3 and APD 8 rotates or moves in response to the rotation of the LD 3 and APD 8.

[0166] In contrast, by keeping the LD 3 and the APD 8 stationary even when the rotating stage 10 rotates, it is not necessary to consider the rotation or movement of wiring, etc., and it is possible to simplify the configuration of the distance measuring device 100. Also, compared to a configuration in which the LD 3 and the APD 8 rotate with the rotating stage 10, it is possible to reduce the amount of data communication between the LD 3 and the APD 8 and the control unit 140, and the cost of the distance measuring device 100 can be reduced accordingly.

[0167] In this embodiment, the base plate 1 and the holding portion 2 are separate, and the holding portion 2 is fixed to the base plate 1, but the present invention is not limited to this. For example, the base plate 1 and the holding portion 2 may be integrally formed.

[0168] Further, although the configuration in which the holding unit 2 includes the ceiling panel 21 and the rear panel 22 has been exemplified, the present invention is not limited to this. For example, the holding unit 2 may be configured as a single member in which the ceiling panel 21, the rear panel 22, etc. are integrated.

[0169] Although the above embodiment illustrates a configuration in which the ceiling panel 21 holds the LD 3 and the rear panel 22 holds the APD 8, the present invention is not limited to this. For example, the present invention may be configured such that either the ceiling panel 21 or the rear panel 22 holds both the LD 3 and the APD 8.

[0170] Here, if the distance measuring device 100 does not have an exterior cover, the rotating stage 10 can scan the laser light more widely around the second axis A2. However, in the scanning angle range around the second axis A2 corresponding to the size of the rear panel 22, the scanning laser light L2 is blocked by the rear panel 22 and cannot be irradiated. In other words, the scanning angle range around the second axis A2 corresponding to the size of the rear panel 22 becomes a blind spot range in which object detection and distance measurement are not possible.

[0171] Therefore, it is advantageous to make the size of the rear panel 22, or the size of a structure provided on the -Y direction side of the rotating stage 10 in place of the rear panel 22, as small as possible in the circumferential direction around the second axis A2, in order to reduce the blind spot range.

[0172] For example, the light receiving lens 7, APD 8, control unit 140, etc. may be fixed to the ceiling panel 21, and the holder 2 may include a support pillar supporting the ceiling panel 21 instead of the rear panel 22. In this configuration, the blind spot range is limited to the scanning angle range corresponding to the thickness of the support pillar, so the blind spot range is smaller. This allows object detection and distance measurement to be performed over a wider scanning angle range around the second axis A2.

[0173] In this embodiment, the APD 8 receives the return light R reflected again from the predetermined surface of the multiple reflecting surfaces 51 included in the polygon mirror 5 after the scanning laser light L2 (scanning light) is reflected or scattered by the object 200. With this configuration, the number of optical paths common to the optical paths of the laser light L1 and the scanning laser light L2 and the optical path of the return light R increases. As a result, the configuration of the distance measuring device 100 can be simplified compared to the case where these are provided separately.

[0174] In addition, in this embodiment, the distance measuring device 100 has a perforated mirror 6 (light deflection unit) that deflects the return light R that is generated when the scanning laser light L2 is reflected or scattered by the object 200, and the perforated mirror 6 includes a through hole 61 (opening) that allows the laser light L1 emitted by the LD3 to pass through.

[0175] This configuration increases the number of optical paths common to the optical path of the laser light L1 and the optical path of the return light R, simplifying the configuration of the distance measuring device 100. In addition, since the through-hole 61 passes the laser light L1 emitted by the LD 3, it is possible to suppress a decrease in light utilization efficiency and stray light caused by multiple reflections on the light transmitting surface and to further improve distance measuring accuracy, compared to a case where the laser light is transmitted using a beam splitter or the like.

[0176] In this embodiment, the laser light L1 emitted by the LD 3 is incident along the second axis A2 on the reflecting surface 51 of the polygon mirror 5. For example, the optical axis of the laser light L1 and the second axis A2 are configured to be coaxial.

[0177] With this configuration, the incident position of the laser light L1 on the reflecting surface 51 does not change even if the rotating stage 10 rotates. Therefore, optical scanning around the first axis A1 and optical scanning around the second axis A2 can be performed with a simple configuration.

[0178] In this embodiment, the first axis motor 161 (rotation drive unit) that rotates the polygon mirror 5 is provided on the rotation stage 10.

[0179] Here, for example, if the polygon mirror 5 and the first axis motor 161 are connected via a connecting member such as a pulley, and the first axis motor 161 is provided in an area other than on the rotating stage 10, such as on the base plate 1, consideration must be given to the rotation or movement of the connecting member associated with the rotation of the rotating stage 10.

[0180] In contrast, by providing the first axis motor 161 on the rotation stage 10, it becomes unnecessary to take into consideration the rotation or movement of such a connecting member, and the configuration of the distance measuring device 100 can be simplified.

[0181] Furthermore, in this embodiment, the distance measuring device 100 has a power supply unit 170 that supplies power to the first axis motor 161 in a non-contact manner by electromagnetic induction. This eliminates the need to connect wiring for supplying power to the first axis motor 161, etc., and therefore eliminates the need to consider the rotation or movement of wiring etc. in response to the rotation around the second axis A2 by the rotating stage 10. As a result, the configuration of the distance measuring device 100 can be simplified.

[0182] In this embodiment, the distance measuring device 100 also has a first axis encoder 162 (detection unit) that detects the rotation angle of the polygon mirror 5, and an LED 164 (synchronization output unit) that emits light corresponding to a synchronization signal synchronized with the rotation of the polygon mirror 5, based on the rotation angle of the polygon mirror 5. The optical scanning control unit 150 controls the rotation by the rotating stage 10, based on the light (synchronization signal) emitted by the LED 164.

[0183] A synchronization signal synchronized with the rotation of the polygon mirror 5 is supplied to the rotation stage 10 in a non-contact manner using pulsed light, thereby eliminating the need to connect wiring for supplying the synchronization signal. This makes it unnecessary to consider the rotation or movement of wiring etc. in response to the rotation of the rotation stage 10 about the second axis A2. As a result, the configuration of the distance measuring device 100 can be simplified.

[0184] However, the synchronization output unit is not limited to a configuration using the synchronization detection LED 164. A synchronization signal can also be supplied from the polygon mirror 5 to the rotation stage 10 using a rotary contact. In this case, too, it is possible to obtain the same effect as when pulsed light is used.

[0185] Furthermore, in this embodiment, the optical scanning control unit 150 controls the rotation speed of the rotating stage 10 so that it is a predetermined ratio to the rotation speed of the polygon mirror 5. For example, the optical scanning control unit 150 controls the rotation speed of the rotating stage 10 so that the quotient obtained by dividing the product of the rotation speed of the polygon mirror 5 and the number of reflecting surfaces 51 included in the polygon mirror 5 by the rotation speed of the rotating stage 10 becomes a non-integer.

[0186] This allows the position of the scanning line around the second axis A2 to be shifted in the direction along the second axis A2 (Z-axis direction) every time the rotating stage 10 rotates once around the second axis A2. By drawing the scanning line around the second axis A2 multiple times while shifting the position in the Z-axis direction, it is possible to draw the scanning line over an entire plane of a predetermined area including, for example, the Z-axis direction and a direction perpendicular to the Z axis (X-axis direction) without performing complex control. This allows the control of the distance measuring device 100 to be simplified.

[0187] In addition, the optical scanning control unit 150 can control the rotation speed of the rotating stage 10 to be faster than the rotation speed of the polygon mirror 5, or conversely, can control the rotation speed of the polygon mirror 5 to be faster than the rotation speed of the rotating stage 10.

[0188] [Second embodiment] Next, a distance measuring device 100a according to the second embodiment will be described. Note that the same components as those already described in the first embodiment are given the same part numbers, and duplicated descriptions will be omitted as appropriate.

[0189] In this embodiment, the first axis A1 is provided at a position spaced apart from the second axis A2 along a direction intersecting both the first axis A1 and the second axis A2. The position of the polygon mirror 5 is variable along a variable direction B intersecting both the first axis A1 and the second axis A2. When the position of the polygon mirror 5 in the variable direction B changes, the inter-axis distance d from the second axis A2 to the first axis A1 along the variable direction B changes, and the angular direction C that is the median of the scanning angle range around the first axis A1 by the polygon mirror 5 changes.

[0190] Therefore, by changing the inter-axis distance d and changing the angular direction C according to the direction in which the object 200 is likely to exist in three-dimensional space, the object 200 can be more easily detected.

[0191] Here, Fig. 10 to Fig. 12 are diagrams for explaining examples of the axis-to-axis distance d, Fig. 10 is a diagram showing a first example, Fig. 11 is a diagram showing a second example, and Fig. 12 is a diagram showing a third example.

[0192] When a regular polygonal prism-shaped polygon mirror 5 is used, the axis distance d is equal to or smaller than the inscribed circle radius P of the regular polygon in the regular polygonal prism, and satisfies the condition expressed by the following formula (1).

number

[0193] 10, the axis distance d1 indicates the axis distance from the first axis A1 to a position separated from the second axis A2 along the variable direction B. P indicates the inscribed circle radius of the inscribed circle 52, and Q indicates the circumscribed circle radius of the circumscribed circle 53. The angular direction C1 is a direction along an angle that is the median value of the scanning angle range φz around the first axis A1. The angle θ1 between the angular direction C1 and the variable direction B is 0 degrees according to equation (1) in accordance with the axis distance d1, and the angular direction C1 and the variable direction B approximately coincide with each other.

[0194] 11, compared to the first example shown in Fig. 10, the polygon mirror 5 has moved toward the +Y direction, and the axis-to-axis distance d2 is smaller than the axis-to-axis distance d1. The angle θ2 between the angular direction C2 and the variable direction B is tilted toward the +Z direction from equation (1) in accordance with the axis-to-axis distance d2, and the angular direction C2 is tilted toward the +Z direction with respect to the variable direction B.

[0195] In this configuration, the distance measuring device 100a can perform optical scanning around the first axis A1 within a scanning angle range that is slightly shifted toward the +Z direction compared to the first example, making it easier to detect an object 200 located on the +Z direction side compared to the first example.

[0196] 12, compared to the first example shown in Fig. 10, the polygon mirror 5 has moved toward the -Y direction, and the axis-to-axis distance d3 is greater than the axis-to-axis distance d1. The angle θ3 between the angular direction C3 and the variable direction B is tilted toward the -Z direction according to equation (1) in accordance with the axis-to-axis distance d3, and the angular direction C3 is tilted toward the -Z direction with respect to the variable direction B.

[0197] In this configuration, the distance measuring device 100a can perform optical scanning around the first axis A1 within a scanning angle range that is slightly shifted toward the -Z direction compared to the first example, making it easier to detect an object 200 located on the -Z direction side compared to the first example.

[0198] In the distance measuring device 100a, the position of the polygon mirror 5 in the variable direction B is determined in advance, so that the axis distance d can be set.

[0199] As described above, in this embodiment, the first axis A1 is provided at a position spaced apart from the second axis A2 along a direction intersecting both the first axis A1 and the second axis A2. By selecting the inter-axis distance from the first axis A1 to a position spaced apart from the second axis A2 along the variable direction B, the angular direction C can be varied according to the direction in which the object 200 is likely to exist in the three-dimensional space, making it easier to detect the object 200.

[0200] Furthermore, in this embodiment, the inter-axis distance d can also be changed according to the position of the polygon mirror 5 in the variable direction B. The angular direction C changes according to the inter-axis distance d. Therefore, by changing the inter-axis distance d and changing the angular direction C according to the direction in which the object 200 is likely to exist in three-dimensional space, the object 200 can be more easily detected.

[0201] Other effects are similar to those described in the first embodiment.

[0202] Although the embodiments have been described above, the present invention is not limited to the above specifically disclosed embodiments, and various modifications and changes are possible without departing from the scope of the claims.

[0203] For example, the moving body on which the distance measuring device 100 or 100a is mounted is not limited to a service robot. For example, the moving body may be an automobile, a vehicle, a train, a steam train, a forklift, or the like that can move on land, an airplane, a balloon, a drone, or the like that can move in the air, or a ship, a ship, a steamship, a boat, or the like that can move on water.

[0204] Furthermore, the light scanned by the optical scanning device 400 is not limited to laser light, and may be light that has no directionality. Furthermore, electromagnetic waves with long wavelengths, such as those of radar, may also be used as a type of light.

[0205] The ordinal numbers, quantities, and other numbers used in the description of the embodiments are all provided as examples to specifically explain the technology of the present invention, and the present invention is not limited to the exemplified numbers. Furthermore, the connection relationships between the components are provided as examples to specifically explain the technology of the present invention, and do not limit the connection relationships that realize the functions of the present invention.

[0206] In addition, the division of blocks in the functional block diagram is an example, and multiple blocks may be realized as one block, one block may be divided into multiple blocks, and / or some functions may be transferred to another block. Furthermore, the functions of multiple blocks having similar functions may be processed in parallel or in a time-division manner by a single piece of hardware or software. [Explanation of symbols]

[0207] 1...base plate (an example of a base part), 2...holding part, 21...ceiling panel, 22...rear panel, 3...LED (an example of a light emitting part), 4...collimating lens, 5...polygon mirror (an example of a rotating polyhedron), 51...reflecting surface, 52...inscribed circle, 53...circumscribed circle, 6...perforated mirror (an example of a light deflection part), 61...through hole (an example of an opening), 7...light receiving lens, 8...APD (an example of a light receiving part), 9...tombstone (an example of a support part) , 91...substrate, 10...rotating stage (an example of a rotating mechanism), 101...mounting surface, 102...bearing, 103...magnet, 104...motor core, 110...light receiving and emitting unit, 120...light scanning unit, 130...exit window, 140...control unit, 141...light emission control unit, 142...distance information acquisition unit, 143...distance information output unit (an example of an output unit), 150...light scanning control unit, 151...power supply control unit, 152...polygon mirror control unit , 153...rotation stage control section, 161...first axis motor (an example of a rotation drive section), 162...first axis encoder (an example of a detection section), 163...first axis driver board, 164...synchronization detection LED (an example of a synchronization output section), 165...power generation coil, 170...power supply section, 175...power supply coil, 200...object, 300...external controller, 400...optical scanning device, 500...service robot, 801 to 806...scanning Line, 92...beam spot, A1...first axis, A11...first axis rotation direction, A2...second axis, A21...second axis rotation direction, B...variable direction, C, C1, C2, C3...angular direction, d, d1, d2, d3...axis distance, L1...laser light (example of light), L2...scanning laser light (example of scanning light), P...inscribed circle radius, Q...circumscribed circle radius, R, R1, R2...return light, φxy, φz...scanning angle range, θ1, θ2, θ3...angle

Claims

1. A light emitting unit that emits light; A light scanning unit that scans the light; a light receiving unit that receives return light resulting from reflection or scattering of the scanning light by the optical scanning unit at an object; an optical scanning control unit for controlling the optical scanning unit; A base portion; a holder that holds the light emitting unit and the light receiving unit, The optical scanning unit includes: a rotating polyhedron including a plurality of reflecting surfaces, the rotating polyhedron rotating around a first axis and reflecting the light at the reflecting surfaces to scan the light around the first axis; A support portion that supports the rotary polyhedron; a rotation mechanism that rotates the support portion about a second axis intersecting the first axis to cause the light reflected by the reflecting surface to scan about the second axis, the light emitted by the light-emitting unit is incident on the reflecting surface of the rotating polyhedron such that an optical axis of the light emitted by the light-emitting unit and the second axis are coaxial; the return light is reflected by the reflecting surface of the rotating polyhedron such that an optical axis of the return light and the second axis are coaxial; the holding portion and the rotation mechanism are provided in different regions of the base portion, the first axis is provided at a position spaced apart from the second axis in a direction intersecting both the first axis and the second axis, the rotating polyhedron is a regular polygonal prism having the first axis as a central axis, An axial distance d between the first axis and a position separated from the second axis is equal to or smaller than a radius of an inscribed circle of a regular polygon in the regular polygonal prism, and satisfies the condition expressed by the following formula: The position of the rotating polyhedron is variable within a range of the inter-axis distance d along a direction intersecting both the first axis and the second axis. [0010] (θ represents the angle between the angular direction that is the median of the scanning angle range around the first axis by the rotating polyhedron and the direction that intersects both the first axis and the second axis, and Q represents the circumscribing circle radius of the regular polygon.)

2. the rotating polygonal body has a rotation speed controlled by a first axis driver board and is not subject to control by the optical scanning control unit; the rotation mechanism is rotationally driven by a second axis driver board controlled by the optical scanning control unit, The optical scanning device according to claim 1 , wherein the number of revolutions of the rotation mechanism is controlled by the optical scanning control unit.

3. The optical scanning device according to claim 1 or 2, wherein the light receiving unit receives the returning light reflected again by a predetermined surface among the plurality of reflecting surfaces included in the rotating polyhedron after the scanning light is reflected or scattered by the object.

4. a light deflection unit that deflects the return light, The optical scanning device according to claim 1 , wherein the optical deflection section includes an opening section that passes the light emitted by the light emitting section.

5. 5. The optical scanning device according to claim 1, wherein a rotation drive unit that rotates the rotary polyhedron is provided in the rotation mechanism.

6. An optical scanning device according to any one of claims 1 to 5; an output unit that outputs distance information to the object obtained based on the return light that is reflected or scattered by the object and is the scanning light from the optical scanning device.

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