Temperature sensor mounting structure

Abstract

[Problem] To provide an attachment structure for a temperature sensor, which enables the temperature sensor to be securely fixed and also to be retrofit to a standard component. [Solution] An attachment structure 1 for a temperature sensor S that is attached to a plurality of flowpath blocks 2 or a fluid control device 3 of a fluid control system X which comprises: the flowpath blocks each of which is provided with a fluid flowpath therein and at least one of the surfaces of which has a flow path opening; and a fluid control device mounted above the flow path blocks. The attachment structure comprises: a rectangular temperature sensor attachment piece 10; and a pair of clamping pieces 11, 11 which extended from an opposing side facing the attachment piece 10.

Description

[Technical field]

[0001] The present invention relates to a fluid control device used in semiconductor manufacturing equipment and the like, and more particularly to a mounting structure for a temperature sensor to be attached to a fluid control device equipped with a heating device. [Background technology]

[0002] Fluid control devices used in semiconductor manufacturing equipment are configured by arranging various fluid control devices in multiple rows, with the flow paths of the fluid control devices in adjacent rows connected at predetermined locations by device connection means. In recent years, however, with this type of fluid control device, there has been progress in integration, with mass flow controllers, on-off valves, etc. being connected without the use of tubes.

[0003] This type of integrated fluid control device may require a heating device to prevent condensation, to prevent re-liquefaction when a fluid that is liquid at room temperature is gasified and flowed, etc. Such a fluid control device with a heating device has ribbon-shaped sheet heaters arranged on both sides of at least one line, and these sheet heaters are held to corresponding joint members by multiple metal clips (Patent Document 1).

[0004] In a fluid control device provided with a heating device, a temperature sensor (for example, a thermocouple) for adjusting temperature is attached to adjust for insufficient or excessive heating.

[0005] Conventionally, a temperature sensor for adjusting temperature has been attached with adhesive tape to a flow path block on which a fluid control device is mounted, particularly to the flow path block downstream of a mass flow controller that controls the flow rate. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2002-267100 A Summary of the Invention [Problem to be solved by the invention]

[0007] However, when the temperature sensor is attached with adhesive tape, it is not completely fixed, and there is a problem that the temperature sensor may come off due to external stress, making it impossible to control the temperature. In order to attach the temperature sensor firmly, it is possible to provide a screw hole for attaching the temperature sensor in the flow path block, but this requires a special response, which increases costs and reduces general-purpose use, resulting in problems in terms of standardization.

[0008] The present invention has been made in consideration of the above points, and its object is to provide a temperature sensor mounting structure that can reliably fix a temperature sensor and can also be retrofitted to standard components. [Means for solving the problem]

[0009] The temperature sensor mounting structure of the present invention, which has been made to solve the above-mentioned problems, is a temperature sensor mounting structure to be attached to the flow path blocks of an integrated fluid control device which includes a plurality of flow path blocks each having a fluid flow path therein and an opening of the flow path on at least one face, and a fluid control device mounted on the flow path blocks, and which includes a rectangular temperature sensor mounting piece and a pair of clamping pieces extending from opposing sides of the mounting piece.

[0010] In this temperature sensor mounting structure, a pair of opposing sides extending from the mounting piece on which the temperature sensor is attached sandwich the flow path block, and when an upward pulling force is applied, the pair of opposing sides come into contact with the fluid control device placed on the flow path block, effectively preventing the temperature sensor from slipping out upward.

[0011] In this case, a stopper piece can be extended inward from at least one lower edge of the temperature sensor attachment piece and the clamping piece, which makes it possible to attach a temperature sensor to an upper block (fluid control device (flow controller, automatic on-off valve, etc.)) placed on a flow path block (lower block).

[0012] In these cases, the end of the opposite temperature sensor mounting piece of the clamping piece can be provided with a bent portion that bends inward to prevent the bent portion from getting caught on the opposite temperature sensor mounting surface of the flow path block and from falling off even when horizontal stress is applied to the mounting structure.

[0013] In these cases, the surface of the temperature sensor attachment piece can be covered with a band-shaped heating means. By locating the temperature sensor attachment position at the same position as the heating means attachment position, horizontal removal can be more firmly prevented. Effect of the Invention

[0014] According to the present invention, it is possible to provide a temperature sensor mounting structure that can reliably fix a temperature sensor to a flow control device, particularly an integrated type flow control device, and can also be retrofitted to a standard component. [Brief description of the drawings]

[0015] [Figure 1] 1 is a perspective view showing an integrated flow control device before a temperature sensor mounting structure according to an embodiment of the present invention is attached; [Diagram 2] 11 is a perspective view showing the integrated flow control device after the mounting structure for the temperature sensor has been attached. FIG. [Diagram 3] 1A is a perspective view of a mounting structure for the temperature sensor, in which (a) shows a first embodiment, (b) shows an example in which the bent portion is simply bent at a right angle, and (c) shows a second embodiment. [Figure 4] 11 is a perspective view showing a state in which a second embodiment of the mounting structure for the temperature sensor is mounted on an upper block. FIG. [Diagram 5] 5A to 5D are plan views showing a third embodiment of the temperature sensor mounting structure, in which (a) is an oblique view, (b) is a plan view, (c) is a plan view explaining the process of mounting the temperature sensor to a block, and (d) is a plan view showing the temperature sensor mounted on the block. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that the following embodiments are essentially preferred examples and are not intended to limit the scope of the present invention, its applications, or its uses.

[0017] <Embodiment 1> 1 to 3 show a first embodiment of a mounting structure for a temperature sensor according to the present invention.

[0018] [Fluid control device] The fluid control device 100 shown in FIG. 1 comprises a plurality of fluid control devices 3A-3G on an upper level, a plurality of flow path blocks 2 with fluid flow paths therein on which the plurality of fluid control devices 3A-3G are placed on a lower level, a support member 4 supporting the plurality of flow path blocks 2, a heating means H for heating the surfaces of the flow path blocks 2 and the fluid control devices 3A-3G, a temperature sensor S for measuring the temperature of the surface of the flow path blocks 2 or the fluid control devices 3A-3G, and a temperature sensor mounting structure 1 for mounting the temperature sensor S to the flow path blocks 2 or the fluid control devices 3A-3G.

[0019] The flow path block 2 and fluid control devices 3A to 3G are considered to be one line, and two lines are shown in the example shown, but the number of lines is not limited to this, and the number of lines can be freely determined depending on the equipment, from one line to multiple lines.

[0020] [Heating means] The heating means H abuts against the side of the flow path block 2 and heats the temperature inside the flow path to a predetermined temperature. It heats the gas (e.g., hydrogen fluoride) flowing in through the inlet piping and prevents liquefaction of the gas that liquefies at room temperature.

[0021] The heating means H that contacts the side surface of the flow path block 2 is clamped and fixed by clips 5. In the illustrated example, the height dimension of the heating means H made of a planar heater is shown to match the height dimension of the flow path block 2 (lower block), but it may have a height that covers the lower sides of the fluid control devices 3A to 3G (upper block).

[0022] The clip 5 is formed by bending a thin plate material so that the narrow pressure portions 5A extend in the vertical direction and are parallel to the side surfaces of the flow path block 2 and the fluid control devices 3A to 3G. The connecting portion 5B extends along the short direction of the gas line and connects a pair of narrow pressure portions 5A.

[0023] 1 and 2, the temperature sensor mounting structure 1 and the heating means H are attached to the flow path block 2 and the fluid control devices 3A to 3G, and the clip 5 is configured to sandwich and fix them. Also, a silicone sponge heat insulating material, for example, may be provided to cover the surface of the heating means H and the upper surfaces of the block parts of the fluid controllers 3A to 3G, and these may also be fixed by the clip 5.

[0024] [Temperature sensor] The temperature sensor S attached to the temperature sensor mounting structure 1 transmits the measured temperature of the flow path block 2 or the fluid control devices 3A-3G to a control device (not shown) that controls the fluid control devices 3A-3G, and the control device controls the fluid control devices 3A-3G according to the measured temperature, and can also issue an instruction to stop the device urgently if the measured temperature is outside a predetermined temperature threshold. The temperature sensor S is not particularly limited, but in this embodiment, a thermocouple is used. Alternatively, a thermostat can be used as the temperature sensor S.

[0025] The temperature sensor mounting structure 1 is attached to the above-mentioned flow path block 2 or fluid control device 3, and comprises a rectangular temperature sensor mounting piece 10 and a pair of clamping pieces 11 extending from opposing sides 10a, 10a of the mounting piece 10.

[0026] In this embodiment, the temperature sensor mounting piece 10 and the clamping pieces 11, 11 are manufactured by bending a single metal plate. By bending the metal plate, the clamping pieces 11, 11 have a spring property that causes them to return to their original positions even when they are spread apart. The distance L between the clamping pieces 11, 11 (the width dimension of the temperature sensor mounting piece 10) is approximately the same as the width dimension of the flow path block 2 or fluid control device 3 to which it is attached. Usually, this width dimension, particularly the width dimension of the flow path block 2, is standardized in integrated type fluid control devices, and there is no need to prepare many different types.

[0027] Also, the opposing opposite sides 10a of the mounting piece 10 may be bent at a right angle to form the clamping pieces 11, 11 as shown in FIG. 3(b). In this embodiment, however, as shown in FIG. 3(a), the width dimension of the mounting piece 10 is made slightly longer than the interval L between the clamping pieces 11, 11, and the inside of the opposite sides 10a are bent at an acute angle and further bent perpendicularly to the mounting piece 10 to form the clamping pieces 11, 11. This enhances the springiness due to the bending process, and the clamping pieces 11, 11 can reliably clamp the flow path block 2. Even if an upward stress (pulling force) is applied to the temperature sensor S, the upper sides of the clamping pieces 11, 11 abut against the bottom surface of the fluid control device 3 placed on the adjacent flow path block 2, and the temperature sensor S can be prevented from slipping out of the flow path block.

[0028] In addition, the height dimensions of the mounting piece 10 and the clamping pieces 11, 11 may be the same as shown in Figure 3(b), or the height dimension of the mounting piece 10 may be shorter than the height dimension of the clamping pieces 11, 11 as shown in Figure 3(a).

[0029] <Embodiment 2> Furthermore, as shown in Fig. 3(c), the temperature sensor mounting structure 1 can be configured so that stopper pieces 12, 13 extend inward from at least one lower side of the temperature sensor mounting piece 10 and the clamping pieces 11, 11. The stopper pieces 12, 13 are also preferably cut out from a single sheet metal and formed by bending.

[0030] In the illustrated example, the stopper piece 12 extends from the temperature sensor mounting piece 10, and the clamping piece 11 extends from the stopper piece 13, but the stopper piece may be formed from any one of the locations. In particular, the stopper piece 13 extending from the clamping piece 11 cannot be used when there is no gap or step between the upper surface of the fluid control device 3, which is the upper block, and the upper surface of the flow path block 2, which is the lower block. Therefore, it is preferable to form only the stopper piece 12 extending from the temperature sensor mounting piece 10. By forming this stopper piece 12, as shown in FIG. 4, when the temperature sensor S is attached to the fluid control device 3 (upper block), even if an upward stress (pulling force) is applied to the temperature sensor S, the stopper piece 12 abuts against the lower surface of the upper block, and the temperature sensor S can be prevented from coming out of the flow path block.

[0031] <Embodiment 3> 5(a), the temperature sensor mounting structure 1 can have the end edges of the clamping pieces 11, 11 on the opposite side to the temperature sensor mounting piece protruding inward. The shape of the protruding part is not particularly limited, but in this embodiment, the end edges are wound inward in an arc shape to form the protruding part 11a.

[0032] As long as the distance M between the protruding portions 11a, 11a is shorter than the distance L between the clamping pieces 11, 11, the shape of the protruding portions 11a may be simply obtained by bending the end sides.

[0033] When attaching to the flow path block 2 (lower block) or the fluid control device 3 (upper block), the clamping pieces 11, 11 are expanded until the spacing M between the protrusions 11a, 11a becomes equal to the width size of the block (usually the spacing L between the clamping pieces 11, 11), and the protrusions 11a, 11a are slid while being in rubbing contact with the side of the block (see Figure 5 (c)). Once they pass the side of the block, the springiness of the clamping pieces 11, 11 causes the protrusions 11a, 11a to catch on the opposing surface of the block, and the temperature sensor S is firmly fixed without fluctuating in position even if not only upward stress (pulling force) but also horizontal stress occurs.

[0034] In this embodiment, it goes without saying that the inside of the opposite side 10a may be bent at an acute angle as described in the first embodiment, or the stopper pieces 12, 13 as described in the second embodiment may be formed. [Industrial Applicability]

[0035] As described above, the temperature sensor mounting structure of the present invention can effectively prevent a temperature sensor attached to an integrated fluid control device from falling out upward, and therefore can be suitably used for a wide range of integrated fluid control devices, as well as for mounting a temperature sensor to an existing integrated fluid control device. [Explanation of symbols]

[0036] 1 Temperature sensor mounting structure 10 Temperature sensor mounting piece 11 Clamping piece 12 Stopper piece 13 Stopper piece 2 Flow passage block (lower block) 3 Fluid control equipment (upper block) 4 Support member 5 Clips 100 Fluid control device S Temperature Sensor H Heating means

Claims

1. A mounting structure for a temperature sensor to be attached to a flow path block or a fluid control device of a fluid control device, the mounting structure comprising: a plurality of flow path blocks each having a fluid flow path therein and an opening of the flow path on at least one surface; and a fluid control device mounted on the flow path blocks, A rectangular temperature sensor mounting piece; a pair of clamping pieces extending from opposing sides of the mounting piece; A temperature sensor mounting structure, comprising: a stopper piece extending inward from at least one lower side of the temperature sensor mounting piece and the clamping piece.

2. 2. The temperature sensor mounting structure according to claim 1, wherein an end side of the clamping piece opposite the temperature sensor mounting piece is provided with a bent portion that is bent inward.

3. 3. The temperature sensor mounting structure according to claim 1, wherein a surface of the temperature sensor mounting piece is covered with a band-shaped heating means.

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