Feeding mechanism

Abstract

To provide a highly reliable feed mechanism by surely suppressing backlash for a long period of time. [Solution] The feed mechanism 1 comprises a base 2, a movable body 3, a feed screw 4 rotatably provided on the movable body 3 or the base 2, a support member 20 fixed to the base 2 or the movable body 3 and provided with a first female thread portion into which the feed screw 4 screws, and an axial force generating member 30 having a second female thread portion formed on one side into which the feed screw 4 screws, and a biasing means is provided between the first female thread portion of the support member 20 and the second female thread portion of the axial force generating member 30 for biasing the axial force generating member 30 in the axial direction.

Description

[Technical field]

[0001] The present invention relates to a feed mechanism that moves a movable body relative to a base by means of a feed screw. [Background technology]

[0002] Conventionally, a feed mechanism that moves a movable body by a feed screw includes the technology described in, for example, Patent Document 1. This feed mechanism includes a base, a movable body, a feed screw that moves the movable body relative to the base, and a torque generating member having a female thread that screws into the feed screw, and a housing hole that extends in a direction perpendicular to the feed screw is formed in the base, and the torque generating member is housed in the housing hole.

[0003] The torque generating member has a role of absorbing backlash between the female screw of the movable body and the feed screw, and is configured such that when an axial force is applied to the movable body, the torque generating member elastically deforms by an amount corresponding to the backlash. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 7407165 Summary of the Invention [Problem to be solved by the invention]

[0005] In the feed mechanism described in the above-mentioned Patent Document 1, the torque generating member is made of an elastic body, has a female thread that screws into the feed screw, and is configured to be replaceable when the torque generating function is reduced due to wear over time. Therefore, there is a problem that the torque generating member must be replaced every time the torque generating function is reduced and the backlash suppression effect is reduced.

[0006] SUMMARY OF THE PRESENT DISCLOSURE An object of the present invention is to provide a highly reliable feed mechanism which reliably suppresses backlash over a long period of time. [Means for solving the problem]

[0007] In order to solve the above problem, the present invention provides a feed screw that is rotatably provided on a base, a movable body, the movable body or the base, and a feed screw that is fixed to the base or the movable body and is screwed into the feed screw. and inserted a support member provided with a first female thread portion, and an axial force generating member having a second female thread portion formed on one side thereof with which the feed screw screws, wherein a biasing means is provided between the first female thread portion of the support member and the second female thread portion of the axial force generating member for biasing the axial force generating member in the axial direction, The biasing means is provided integrally with the axial force generating member at a tip end side in the insertion direction into which the feed screw is inserted, a plurality of pin insertion holes or convex portions are formed at regular intervals in the circumferential direction on an end face of the biasing means at the tip end side in the insertion direction, and the support member is provided with a fixing pin that can be inserted into the plurality of pin insertion holes of the biasing means, or a recess that can be fitted into the plurality of convex portions of the biasing means, and by inserting the fixing pin into any one of the plurality of pin insertion holes of the biasing means or fitting the recess into any one of the plurality of convex portions of the biasing means, the axial force generating member is prevented from rotating relative to the support member, and the axial force of the axial force generating member by the biasing means can be adjusted. It is characterized by the fact that

[0008] In addition, the invention described in claim 2 has the configuration described in claim 1, and further comprises: A spirally formed square spring, the leading end side in the insertion direction is configured to abut against the end of the first female thread portion.

[0010] Claim 3 The invention described in claim 1 In addition to the above-described configuration, the support member A through hole is formed extending in the same direction as the axial direction of the feed screw, and the axial force generating member is housed in the through hole. It is characterized by being Effect of the Invention

[0011] According to the invention recited in claim 1, a biasing means for biasing the axial force generating member in the axial direction is provided between the first female threaded portion of the support member and the second female threaded portion of the axial force generating member. Therefore, when the feed screw is screwed into the first female threaded portion of the support member, a compressive force is applied to the biasing means to bias the axial force generating member in the axial direction while causing elastic deformation, thereby making it possible to suppress backlash over the long term and to increase reliability. According to the invention recited in claim 1, since anti-rotation means is provided for preventing the axial force generating member from rotating relative to the support member, it is possible to reliably prevent the axial force generating member from rotating, thereby further improving the reliability of the feed mechanism.

[0012] According to the invention described in claim 2, the biasing means is A spirally formed square spring, the leading end side in the insertion directionBy configuring the first female thread portion to abut against the end of the first female thread portion, reliability can be improved over the long term.

[0014] In addition, claims 3 In the invention described in the above, a storage through hole extending in the same direction as the axial direction of the feed screw is formed in the support member, and an axial force generating member is stored in this storage through hole, thereby making it possible to reduce the size of the entire feed mechanism. [Brief description of the drawings]

[0015] [Figure 1] FIG. 1 is a perspective view showing an embodiment of a feed mechanism according to the present invention. [Diagram 2] 2 is a perspective view of the feed mechanism of FIG. 1, seen from a different direction. [Diagram 3] FIG. 2 is a plan view showing the feed mechanism of FIG. [Figure 4] 4 is an enlarged plan view showing a support member, a feed screw, and an axial force generating member shown in FIG. 3. [Diagram 5] FIG. 2 is a front view showing the feed mechanism of FIG. [Figure 6] FIG. 4 is a cross-sectional view taken along line AA in FIG. [Figure 7] FIG. 5 is an enlarged perspective view showing an axial force generating member shown in FIG. 4. [Figure 8] 7 is an enlarged cross-sectional view showing a state in which the axial force generating member in FIG. 6 is attached to a support member. [Figure 9] FIG. 11 is a perspective view showing a first modified example of an axial force generating member in one embodiment of a feed mechanism according to the present invention. [Figure 10] FIG. 11 is a perspective view showing a second modified example of an axial force generating member in the embodiment of the feed mechanism according to the present invention. [Figure 11] FIG. 1 is a perspective view showing an application example of an embodiment of a feed mechanism according to the present invention. [Figure 12] FIG. 12 is a vertical sectional view showing an application example of FIG. [Figure 13] FIG. 12 is an enlarged perspective view showing an axial force generating member in the application example of FIG. 11. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, an embodiment of a feed mechanism according to the present invention will be described.

[0017] (One embodiment of the feed mechanism) Fig. 1 is a perspective view showing one embodiment of a feed mechanism according to the present invention. Fig. 2 is a perspective view of the feed mechanism of Fig. 1 seen from a different direction. Fig. 3 is a plan view showing the feed mechanism of Fig. 1. Fig. 4 is an enlarged plan view showing a support member, a feed screw, and an axial force generating member of Fig. 3. Fig. 5 is a front view showing the feed mechanism of Fig. 1. Fig. 6 is a cross-sectional view taken along line AA of Fig. 3.

[0018] 1 to 6, the feed mechanism 1 of this embodiment includes a base 2, a movable body 3, a feed screw 4, a connecting member 10, a support member 20, and an axial force generating member 30. The feed mechanism 1 is also called a table device, a stage device, or the like.

[0019] The base 2 is formed in a rectangular flat plate shape in a plan view. The planar shape of the base 2 is not particularly limited to a rectangular shape, and may be another shape. The base 2 is attached to a fixed member such as a frame (not shown), and is formed with mounting holes (not shown) for fastening to the fixed member with fastening members such as bolts. The material of the base 2 is not particularly limited, and materials with high rigidity and durability, such as metals such as aluminum, copper, brass, iron, nickel, magnesium, and tungsten, and polymer resins, are used.

[0020] A guide mechanism (not shown) is attached to the upper surface of the base 2 to guide the linear movement of the movable body 3 relative to the base 2. For example, a cross roller guide, a linear guide, or the like is used for this guide mechanism, and in this embodiment, a cross roller guide is used as an example. However, this embodiment is not particularly limited to these guide mechanisms.

[0021] Here, the cross roller guide is composed of two guide rail sets, each consisting of a number of guide rollers, a plate-shaped retainer for holding these guide rollers rotatably, and a pair of rectangular column-shaped guide rails arranged in parallel on either side of the guide rollers and retainer.

[0022] The feed screw 4 is supported rotatably on one side of the movable body 3 via a connecting member 10. A male screw portion 5 is formed on the feed screw 4 over substantially the entire length along the axial direction. The type of thread of the male screw portion 5 is not particularly limited, and may be a triangular screw or a trapezoidal screw. A head 6 is provided on one end of the feed screw 4 so that the feed screw 4 can be rotated using a tool such as a hexagonal wrench or manually. In this case, the feed screw 4 may be rotated using a driver other than a hexagonal wrench, or the feed screw 4 may be configured to be rotated automatically using a motor. The material of the feed screw 4 is not particularly limited, and a metal such as steel is used, for example.

[0023] The connecting member 10 is formed by a metal fitting that is L-shaped in a plan view, and includes a fixed piece 11 that is fixed to one side of the movable body 3 by a fastening member, and a protruding piece 12 that protrudes vertically outward from the fixed piece 11. A circular insertion hole 13 is formed in the protruding piece 12, and the male threaded portion 5 adjacent to the head 6 of the feed screw 4 is inserted into this insertion hole 13 so as to be freely rotatable.

[0024] A nut 7 is screwed onto the male thread portion 5 near the head 6 of the feed screw 4. In this embodiment, the feed screw 4 is rotated to adjust the position of the movable body 3 relative to the base 2, and then the screwing position of the nut 7 relative to the male thread portion 5 is moved to sandwich the protruding piece 12 between the head 6 of the feed screw 4, thereby reliably preventing the feed screw 4 from rotating.

[0025] The movable body 3 is formed in a rectangular flat plate shape with the same length and width dimensions as the base 2 when viewed from above. The material of the movable body 3 is not particularly limited and may be, for example, a metal such as aluminum, or a resin. The linear motion of the movable body 3 is guided by the cross roller guide attached to the upper surface of the base 2 as described above.

[0026] The movable body 3 is provided with, for example, a precision vice. Specifically, a tool used in the field of machine tools is provided and is used to fix a material in a processing step using milling, drilling, grinding, or the like. In addition to the precision vice, the movable body 3 may also be provided with an optical accessory. Specifically, a device or tool used in optical technology is provided and is used in equipment that precisely positions mirrors or lenses to control the optical axis of a laser beam or the like. The member provided on the movable body 3 can be any member that precisely positions the object.

[0027] Fig. 7 is an enlarged perspective view showing the axial force generating member of Fig. 4. Fig. 8 is an enlarged sectional view showing the axial force generating member of Fig. 6 attached to a support member.

[0028] A support member 20 is fixed to the base 2 on the same side as the side of the movable body 3 to which the connecting member 10 is fixed. This support member 20 is integrally formed with a fixed part 21 fixed to the side of the base 2 by a fastening member and a storage part 22 provided so as to protrude outward from this fixed part 21. Inside this storage part 22, a storage through hole 23 is formed extending in the same direction as the axial direction of the feed screw 4, as shown in Figures 6 and 8. This storage through hole 23 has a circular cross section and is formed so as to penetrate through the storage part 22 in the longitudinal direction.

[0029] 8, a female thread portion (first female thread portion) 24 into which the male thread portion 5 of the feed screw 4 screws is formed at the tip of the feed screw 4 on the insertion side in the housing through hole 23. The type of this female thread portion 24 is not particularly limited, and may be a triangular thread, a trapezoidal thread, or the like, similar to the feed screw 4.

[0030] In addition, as shown in Figures 1 and 4, the support member 20 has a single elongated pin insertion hole 25 that penetrates the side surface at the upper part of the side surface of the insertion side tip portion of the feed screw 4, and is configured so that an elongated fixing pin 26 can be inserted into this pin insertion hole 25.

[0031] Furthermore, the axial force generating member 30 is inserted into the housing through-hole 23 until the tip end side of the axial force generating member 30 abuts against the end of the female thread portion 24. The material of the axial force generating member 30 is the same as the material of the base 2 and is not particularly limited, and materials with high rigidity and durability, such as metals such as aluminum, copper, brass, iron, nickel, magnesium, and tungsten, and polymer resins, are used.

[0032] The outer diameter of the axial force generating member 30 is equal to the outer diameter of the male thread of the feed screw 4. 5 4 and 7, the axial force generating member 30 is provided with a square spring 32 formed in a spiral shape as a biasing means in the axial center portion. The axial force generating member 30 has four pin insertion holes 33 formed at regular intervals (90° intervals in this embodiment) in the circumferential direction on the tip surface in the insertion direction.

[0033] The axial force generating member 30 has a female thread portion (second female thread portion) 34 formed on the inner peripheral surface on the rear end side in the insertion direction. The female thread portion 34 is not formed in the part of the square spring 32. In this way, the axial force generating member 30 is formed by the square spring 32 so as to be elastically deformable in the axial direction.

[0034] Next, the operation of the feed mechanism 1 of this embodiment will be described.

[0035] First, the nut 7 is screwed onto the male threaded portion 5 of the feed screw 4, and then the axial force generating member 30 is screwed onto the male threaded portion 5 of the feed screw 4. In this state, the axial force generating member 30 is stored in the storage through-hole 23 until the tip side of the axial force generating member 30 abuts against the female threaded portion 24 of the support member 20.

[0036] At this time, by screwing the male threaded portion 5 of the feed screw 4 into the female threaded portion 24 of the support member 20 while applying an appropriate pressure to the storage through-hole 23 of the support member 20 so that the square spring 32 of the axial force generating member 30 contracts in the axial direction, the square spring 32 is elastically deformed, and it is possible to continuously generate axial force F between the female threaded portion 24 of the support member 20 and the female threaded portion 34 of the axial force generating member 30 as shown in FIG. 8.

[0037] Next, one of the pin insertion holes 25 of the support member 20 is aligned in the circumferential direction with any one of the four pin insertion holes 33 on the insertion side tip face of the axial force generating member 30. That is, by aligning the pin insertion hole 25 of the support member 20 with the pin insertion hole 33 of the axial force generating member 30 so that they communicate with each other, and by inserting the fixing pin 26 successively through these pin insertion holes 25, 33, it is possible to reliably prevent the axial force generating member 30 from moving in the rotational direction.

[0038] 8, the female threaded portion 24 of the support member 20 and the female threaded portion 34 of the axial force generating member 30 are pressed against the threads of the male threaded portion 5 of the feed screw 4 by the biasing force of the square spring 32, so that they come into close contact with each other without any gaps. Specifically, when the feed screw 4 is rotated relative to the female threaded portion 24 of the support member 20 and the female threaded portion 34 of the axial force generating member 30, an axial force F that resists the rotation of the feed screw 4 is continuously generated by the square spring 32 of the axial force generating member 30.

[0039] Therefore, in this embodiment, when the lead screw 4 is manually rotated, the axial force generating member 30 prevents the lead screw 4 from rattling and allows the lead screw 4 to be smoothly screwed in, thereby enabling the lead screw 4 to be fed with high precision. As a result, after the position of the movable body 3 is adjusted, the movable body 3 can be prevented from moving.

[0040] The axial force generating member 30 prevents backlash between the female threaded portions 24, 34 and the male threaded portion 5 of the feed screw 4. In other words, the axial force generating member 30 has the function of preventing rattling of the movable body 3 caused by backlash. The position of the movable body 3 is determined by the female threaded portion 34 which fits tightly against the feed screw 4 with no gap.

[0041] As described above, according to this embodiment, the square spring 32 that axially biases the axial force generating member 30 is provided between the female threaded portion 24 of the support member 20 and the female threaded portion 34 of the axial force generating member 30. Therefore, when the feed screw 4 is screwed into the female threaded portion 24 of the support member 20, the square spring 32 is screwed in while applying a compressive force to the square spring 32, thereby biasing the axial force generating member 30 in the axial direction, thereby suppressing backlash over the long term and improving reliability.

[0042] Furthermore, according to this embodiment, the square spring 32 is provided integrally with the axial force generating member 30, formed in a spiral shape, and configured so that its tip end abuts against the end of the female thread portion 24, thereby improving reliability over a long period of time.

[0043] Furthermore, according to this embodiment, the fixed pin 26 which is inserted into the pin insertion hole 25 of the support member 20 and the pin insertion hole 33 of the axial force generating member 30 is provided as anti-rotation means for preventing the axial force generating member 30 from rotating relative to the support member 20. Therefore, movement of the axial force generating member 30 in the rotational direction can be reliably prevented and the backlash can be prevented more effectively.

[0044] Furthermore, according to the present embodiment, the support member 20 is formed with a storage through hole 23 extending in the same direction as the axial direction of the feed screw 4, and the axial force generating member 30 is stored in this storage through hole 23, thereby making it possible to reduce the size of the entire feed mechanism 1.

[0045] (First Modification of Axial Force Generating Member) 9 is a perspective view showing a first modified example of an axial force generating member in one embodiment of the feed mechanism according to the present invention. In this modified example, the same or corresponding parts as those in the above embodiment are denoted by the same reference numerals. The same applies to other modified examples and application examples.

[0046] As shown in Fig. 9, an axial force generating member 30A of this modification uses a wave spring 35 as a biasing means, which is short in the expansion / contraction direction, i.e., has a low height as a spring, and is formed by winding a plate-shaped steel wire in a spiral or annular shape to give it a wave shape, instead of the square spring 32 of the above embodiment. Although this wave spring 35 has the same spring force as a conventional round wire coil spring, it is space-saving and lightweight, and can also be used for vibration absorption purposes.

[0047] Pin insertion holes 33, into which fixing pins (not shown) are inserted as anti-rotation means, are formed on both axial sides of the wave spring 35. These pin insertion holes 33 are arranged at 90 degree intervals in the circumferential direction, as in the above embodiment.

[0048] The axial force generating member 30A has a female thread portion (second female thread portion) 34 formed on the inner peripheral surface of a cylindrical portion 36 which is the rear end side in the insertion direction, as in the above embodiment. The cylindrical portion 36 is provided continuous with the wave spring 35. The cylindrical portion 36 is made of a material having high rigidity and durability, such as a metal, such as aluminum, copper, brass, iron, nickel, magnesium, or tungsten, or a polymeric resin. The cylindrical portion 36 and the wave spring 35 may be fixed by a fixing pin (not shown) or by an adhesive. In this way, the axial force generating member 30A is formed by the wave spring 35 so as to be elastically deformable in the axial direction.

[0049] In this way, according to this modification, the wave spring 35 is used as the biasing means, and the biasing force of the same load as that of a coil spring can be obtained over a small span, so that the biasing member can be stored in a small space. This prevents the axial force generating member 30A from becoming large, and reduces costs.

[0050] In this modified example, the pin insertion hole 33 through which the fixing pin is inserted is formed as the anti-rotation means, but the present invention is not limited to this, and the function of the anti-rotation means may be achieved by fixing the pin with an adhesive, for example. The other configurations and functions are the same as those of the above embodiment, and therefore the description thereof will be omitted.

[0051] (Second Modification of Axial Force Generating Member) FIG. 10 is a perspective view showing a second modified example of an axial force generating member in an embodiment of the feed mechanism according to the present invention.

[0052] As shown in Fig. 10, an axial force generating member 30B of this modification is provided with a cylindrical rubber 37 as a biasing means instead of the square spring 32 of the above embodiment. This cylindrical rubber 37 is fixed between the left and right cylindrical portions 36a, 36b. The cylindrical rubber 37 and the left and right cylindrical portions 36a, 36b may be prevented from rotating by a fixing pin and a pin insertion hole as in the first modification, or may be fixed by an adhesive.

[0053] The left and right cylindrical portions 36a, 36b may be made of the same material as the cylindrical portion 36 of the first modified example. In the axial force generating member 30B of this modified example, a female thread portion 34 is formed as a second female thread portion on the inner circumferential surface of the cylindrical portion 36b. The left and right cylindrical portions 36a, 36b and the cylindrical rubber 37 are in communication with each other in the axial direction so that the male thread portion 5 is inserted therethrough. In this way, the axial force generating member 30B is formed by the cylindrical rubber 37 so as to be elastically deformable in the axial direction.

[0054] Therefore, according to this modification, the cylindrical rubber 37 is used as the biasing means, so that the cylindrical rubber 37 can be easily attached and the cost can be reduced. The other configurations and operations are the same as those of the above embodiment, so the description thereof will be omitted.

[0055] (Example of application of feed mechanism) Fig. 11 is a perspective view showing an application example of one embodiment of a feed mechanism according to the present invention. Fig. 12 is a vertical sectional view showing the application example of Fig. 11. Fig. 13 is an enlarged perspective view showing an axial force generating member in the application example of Fig. 11. This application example is an example of application to an optical accessory, more specifically, an example of application to an angle adjustment mechanism of a lens holder.

[0056] 11, feed mechanisms 1A in this application example are provided at the upper and lower corners of the base 2. These feed mechanisms 1A are provided in storage through-holes 23 of support members 20 of the base 2. A rotatable body 3A is attached to the tip of a feed screw 4 of the feed mechanism 1A via a connecting part 8 so that the angle of the rotatable body 3A can be adjusted relative to the base 2. The angle of the rotatable body 3A is adjusted around a rotation fulcrum 41.

[0057] In the receiving through hole 23 of the support member 20, a female screw portion is provided at the rear end side in the insertion direction of the feed screw 4. 24 The male thread portion 38 of the axial force generating member 30C is screwed into the female thread portion 24, whereby the axial force generating member 30C is fixed to the housing through-hole 23 of the support member 20.

[0058] As shown in Figs. 12 and 13, the axial force generating member 30C is formed as a single unit, with a flange portion 39 formed continuous with the male thread portion 38, and a square spring 32 serving as a biasing means formed continuous with this flange portion 39.

[0059] The axial force generating member 30C has an insertion hole 40 for inserting the feed screw 4 formed in its axis so as to communicate in the axial direction. In the insertion hole 40, a female thread portion (first female thread portion) is formed at the position where the male thread portion 38 is formed. 42 A female thread portion (second female thread portion) is formed at the position where the square spring 32 is formed. 43 These female threads are formed. 42 , 43 In other words, no female thread is formed in the insertion hole 40 where the flange portion 39 is formed.

[0060] Next, the operation of the feed mechanism 1A of this application example will be described.

[0061] First, the axial force generating member 30C is screwed into the male threaded portion 5 of the feed screw 4 up to the vicinity of the head 6, and then the male threaded portion 38 of the axial force generating member 30C is screwed into the female threaded portion 24 of the support member 20. Then, the rotatable body 3A is connected to the tip end of the male threaded portion 5 of the feed screw 4 via the connecting portion 8.

[0062] Further, the head 6 of the feed screw 4 is rotated to rotate the male threaded portion 5 and the female threaded portion 6 until the front side of the flange portion 39 abuts against the opening end surface of the storage through hole 23 of the support member 20. 42 At this time, the female thread of the axial force generating member 30C is screwed into the female thread while applying an appropriate pressure so that the square spring 32 of the axial force generating member 30C is compressed in the axial direction. 43 By screwing the male thread portion 5 of the feed screw 4 into the square spring 32, the square spring 32 is elastically deformed, Axial force Female thread portion of generating member 30C 42 and female thread 43 Axial force F can be generated continuously between the two.

[0063] Axial force Generated material 30C Female thread part 42 and female thread portion 43 are pressed against the threads of the male thread portion 5 of the feed screw 4 by the biasing force of the square spring 32, so that they are in close contact with each other without any gaps. Axial force Female thread portion of generating member 30C 42 and female thread portion 43 When the feed screw 4 is rotated relative to the axial force generating member 30C, an axial force F that resists the rotation of the feed screw 4 is continuously generated by the square spring 32 of the axial force generating member 30C. Let do.

[0064] Therefore, in this embodiment, when the feed screw 4 is manually rotated, the axial force generating member 30 prevents the feed screw 4 from rattling and allows the feed screw 4 to be smoothly screwed in, allowing the feed screw 4 to be fed with high precision. As a result, after the position of the rotatable body 3A is adjusted, the rotatable body 3A can be prevented from moving. The other configurations and functions are the same as those of the above embodiment, and therefore their description will be omitted.

[0065] [Another embodiment of the invention] Although an embodiment of the present invention has been described, this embodiment is presented as an example and is not intended to limit the scope of the invention. This embodiment can be implemented in various other forms, and various omissions, substitutions, modifications, and combinations can be made without departing from the gist of the invention. This embodiment and its modifications are included in the scope of the invention and its equivalents described in the claims, as well as in the scope and gist of the invention.

[0066] For example, in the above embodiment, an example was described in which square spring 32 was used as the biasing means, but of course a round spring may also be used, and multiple biasing means such as coil springs, leaf springs, etc. may be arranged in the circumferential direction between the cylindrical portion having the pin insertion hole 33 and the cylindrical portion having the female thread portion 34.

[0067] In the above embodiment, the fixing pin 26 is inserted into the pin insertion hole 25 of the support member 20 and the pin insertion hole 33 of the axial force generating member 30 as the anti-rotation means for preventing the axial force generating member 30 from rotating relative to the support member 20. However, the present invention is not limited to this and may be modified such that, for example, a recess is formed on the contact surface of the axial force generating member 30 of the support member 20 and a protrusion that fits into the recess is formed on the axial force generating member 30.

[0068] Furthermore, in the above embodiment, an example was described in which the length and width dimensions of the movable body 3 were formed to be the same as those of the base 2, but this is not limited to this and the movable body 3 and the base 2 may be formed to have different length and width dimensions from each other.

[0069] In the above embodiment, an example has been described in which the feed screw 4 is provided on the movable body 3 via the connecting member 10, while the support member 20 is fixed to the base 2, but the feed screw 4 may be provided on the base 2 via the connecting member 10, while the support member 20 is fixed to the movable body 3. Even with such a configuration, the same effects as those of the above embodiment can be obtained. [Explanation of symbols]

[0070] 1. Feed mechanism 1A Feed mechanism 2. Bass 3 Movable body 3A Rotating movable body 4 Lead Screw 5 Male thread 6 head 7 Nut 10 Connecting members 11 Fixed piece 12 Overhang piece 13 Insertion hole 20 Support member 21 Fixed part 22 Storage area 23 Storage through hole 24 Female thread portion (first female thread portion) 25 Pin insertion hole (anti-rotation means) 26 Fixed pin (anti-rotation means) 30 Axial force generating member 30A Axial force generating member 30B Axial force generating member 30C Axial force generating member 32 Square spring (biasing means) 33 Pin insertion hole (anti-rotation means) 34 Female thread portion (second female thread portion) 35 Wave spring (biasing means) 36 Cylindrical section 36a, 36b Cylindrical part 37 Cylindrical rubber (biasing means) 38 Male thread 39 Flange 40 Insertion hole

Claims

1. With the base, A movable body, a feed screw rotatably provided on the movable body or the base; A support member fixed to the base or the movable body and provided with a first female thread portion into which the feed screw is screwed and inserted; an axial force generating member having a second female thread portion formed on one side thereof with which the feed screw is screwed; a biasing means for biasing the axial force generating member in the axial direction is provided between the first female thread portion of the support member and the second female thread portion of the axial force generating member, the biasing means is provided integrally with the axial force generating member on a tip side in a direction in which the feed screw is inserted, A plurality of pin insertion holes or protrusions are formed at regular intervals in the circumferential direction on the end surface of the biasing means at the tip side in the insertion direction, The support member is provided with a fixing pin that can be inserted into the pin insertion holes of the biasing means, or a recess that can be fitted into the protrusions of the biasing means is formed on the support member, a feed mechanism configured to prevent the axial force generating member from rotating relative to the support member and to adjust the axial force of the axial force generating member generated by the biasing means by inserting the fixed pin into any one of the plurality of pin insertion holes of the biasing means or by fitting the concave portion into any one of the plurality of convex portions of the biasing means.

2. 2. The feed mechanism according to claim 1, wherein the biasing means is a spirally formed square spring, the tip side of which in the insertion direction is configured to abut against the end of the first female threaded portion.

3. 2. The feed mechanism according to claim 1, wherein the support member is formed with a storage through hole extending in the same direction as the axial direction of the feed screw, and the axial force generating member is stored in the storage through hole.

Images