Substrate transport method and substrate transport system

Abstract

To provide a substrate transfer method and a substrate transfer system capable of transferring a substrate to a target position with high accuracy by a substrate transfer mechanism.SOLUTION: A substrate transfer method comprises: receiving ae substrate from a first stage; measuring a first true deviation amount between a holding part and a substrate at a first measurement position by making the substrate held by the holding part pass through a first measurement part; measuring a second true deviation amount between the holding part and the substrate at a second measurement position by making the substrate held by the holding part pass through a second measurement part in transferring the substrate held by the holding part to a second stage; reflecting a difference between the first true deviation amount and the second true deviation amount on a physical model for estimating a thermal displacement amount at the second measurement position to correct the physical model so as to reduce a model error; and calculating a position correction amount of the holding part at the second stage from a thermal displacement amount of the holding part at the second measurement position estimated by the corrected physical model, a deviation amount between the holding part and the substrate, and a thermal displacement amount of the holding part at the second stage.SELECTED DRAWING: Figure 8

Description

[Technical field]

[0001] The present disclosure relates to a substrate transport method and a substrate transport system. [Background technology]

[0002] A known processing system for performing continuous processing on a plurality of substrates includes a load lock chamber, a plurality of processing chambers for performing predetermined processing on the substrates, and a common transfer chamber to which the load lock chamber and the plurality of processing chambers are connected and which has a substrate transfer mechanism.

[0003] Such a processing system is disclosed in Patent Document 1. In the processing system of Patent Document 1, a common transfer chamber has a longitudinal direction in one direction, the common transfer chamber is provided with a slider mechanism having a base table that is movable along the longitudinal direction, and a substrate transfer mechanism is attached to the base table and is provided so as to be bendable, extendable, and rotatable. In addition, in the processing system of Cited Document 1, a plurality of positional deviation detection units are arranged at predetermined intervals corresponding to positions where the base table should be stopped in order to detect a positional deviation of a substrate held by the substrate transfer mechanism, and a control unit controls the operation of the substrate transfer mechanism so that a detection value of any one of the plurality of positional deviation detection units is used as a reference detection value and thermal expansion / contraction correction is performed on detection values ​​of the other positional deviation detection units. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2007-27378 A Summary of the Invention [Problem to be solved by the invention]

[0005] The present disclosure provides a substrate transport method and a substrate transport system that are capable of transporting a substrate to a target position with high accuracy by a substrate transport mechanism. [Means for solving the problem]

[0006] A substrate transport method according to one aspect of the present disclosure is a substrate transport method for transporting a substrate to a target position of a second stage by a substrate transport system having a substrate transport mechanism having a holder for holding a substrate and transporting the substrate from a first stage to a second stage, a first measurement unit for measuring a position of the substrate at a first measurement position near the first stage, and a second measurement unit for measuring the position of the substrate at a second measurement position near the second stage, the method comprising the steps of: receiving the substrate on the first stage by the holder; causing the substrate held by the holder to pass through the first measurement unit; and determining a position of the substrate at the first measurement position based on a detection value detected by the first measurement unit and an amount of thermal displacement of the holder. measuring a first true misalignment amount between the holding part and the substrate obtained by measuring a first true misalignment amount between the holding part and the substrate obtained by measuring a detection value detected by the second measurement part and a thermal displacement amount of the holding part at the second measurement position; reflecting a difference between the first true misalignment amount and the second true misalignment amount in a physical model that estimates the thermal displacement amount at the second measurement position, thereby correcting the physical model so as to reduce a model error; and Measurement section and calculating a position correction amount for the holding part on the second stage from the detected amount of misalignment between the holding part and the substrate and the amount of thermal displacement of the holding part on the second stage, and controlling the substrate transport mechanism to correct the position of the holding part based on the position correction amount, and transferring the substrate on the holding part to the second stage. Effect of the Invention

[0007] According to the present disclosure, a substrate transport method and a substrate transport system are provided that are capable of transporting a substrate to a target position with high accuracy by a substrate transport mechanism. [Brief description of the drawings]

[0008] [Figure 1] 1 is a schematic plan view showing an example of an overall configuration of a substrate processing system; [Diagram 2] FIG. 2 is a perspective view showing an example of a substrate transport mechanism. [Diagram 3] 2A and 2B are schematic diagrams illustrating a structure of an example of a substrate transport mechanism. [Figure 4] 11 is a functional block diagram when a control unit controls a substrate transport mechanism. FIG. [Diagram 5] 1A and 1B are diagrams illustrating the posture of a substrate transport mechanism. [Figure 6] FIG. 11 is a diagram showing the relationship between the acceleration / deceleration state and the error direction of the angular transmission error. [Figure 7] 11A and 11B are diagrams for explaining the true amount of misalignment between a holder and a substrate, and the true amount of misalignment of the holder on a stage. [Figure 8] 1 is a flowchart illustrating an example of a substrate transport method. [Figure 9] 9 is a flowchart showing a first example as a specific example of steps ST4 and ST5 of FIG. 8. [Figure 10] 9 is a flowchart showing a second example as a specific example of steps ST4 and ST5 in FIG. 8. [Figure 11] 13 is a flowchart showing another example of a substrate transport method. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment will be described with reference to the accompanying drawings.

[0010] <Substrate processing system> First, a substrate processing system including a substrate transfer system according to an embodiment will be described. Fig. 1 is a schematic plan view showing an example of the overall configuration of the substrate processing system.

[0011] 1 is configured as a system having a cluster structure (multi-chamber type) for processing a substrate W in a vacuum atmosphere. The substrate W may be, for example, a wafer such as a semiconductor wafer, but is not limited thereto.

[0012] The substrate processing system 1 includes a load lock chamber 2, a vacuum transfer chamber 3, a processing chamber 4, a substrate transfer mechanism 5, a sensor unit 6, and a controller 7. The substrate transfer system according to one embodiment includes the substrate transfer mechanism 5, the sensor unit 6, and the controller 7.

[0013] The vacuum transfer chamber 3 has a rectangular planar shape, the inside of which is depressurized to a vacuum atmosphere by a vacuum exhaust unit (not shown), and is provided with a substrate transfer mechanism 5. Three load lock chambers 2 are connected to a wall portion corresponding to one long side of the vacuum transfer chamber 3. In addition, a total of four processing chambers 4 are connected to opposing wall portions corresponding to the two short sides, two on each side.

[0014] The load lock chamber 2 is provided between the vacuum transfer chamber 3 and an atmospheric transfer chamber (not shown) in an atmospheric atmosphere, and a stage 21 for placing a substrate W thereon is provided therein. A gate valve 22 is provided between the load lock chamber 2 and the vacuum transfer chamber 3, and a gate valve (not shown) is also provided between the load lock chamber 2 and the atmospheric transfer chamber. The load lock chamber 2 and the vacuum transfer chamber 3 in a vacuum atmosphere are communicated by opening the gate valve 22, and are blocked by closing the gate valve 22. The load lock chamber 2 and the atmospheric transfer chamber are also communicated and blocked by opening and closing a gate valve (not shown). The pressure inside the load lock chamber 2 can be controlled between atmospheric pressure and vacuum with both gate valves closed. When the substrate W is transferred to and from the atmospheric transfer chamber, the inside of the load lock chamber 2 is set to an atmospheric atmosphere, and the gate valve on the atmospheric transfer chamber side is opened. When the substrate W is transferred to and from the vacuum transfer chamber 3, the inside of the load lock chamber 2 is set to a vacuum atmosphere, and the gate valve 22 is opened.

[0015] As described above, the processing chamber 4 is connected to a wall portion corresponding to the short side of the vacuum transfer chamber 3, and a stage 41 on which the substrate W is placed is provided therein. The processing chamber 4 is depressurized to a vacuum atmosphere, and a desired process (e.g., etching process, film formation process, cleaning process, ashing process, etc.) is performed on the substrate W placed on the stage 41 therein. A gate valve 42 is provided between the processing chamber 4 and the vacuum transfer chamber 3, and communication between them is established by opening the gate valve 42, and is blocked by closing the gate valve 42.

[0016] The substrate transport mechanism 5 transports the substrate between the stage 21 of the load lock chamber 2 and the stage 41 of the processing chamber 4. The substrate transport mechanism 5 is configured as a multi-joint arm including, for example, a base unit 50, a first arm 51, a second arm 52, a third arm 53, and a fourth arm 54. The base unit 50 and one side of the first arm 51 in the longitudinal direction are rotatably connected by a rotation shaft 55. The other side of the first arm 51 in the longitudinal direction and one side of the second arm 52 in the longitudinal direction are rotatably connected by a rotation shaft 56. The other side of the second arm 52 in the longitudinal direction and one side of the third arm 53 in the longitudinal direction are rotatably connected by a rotation shaft 57. The other side of the third arm 53 in the longitudinal direction has a holder 53a that holds (places) the substrate W. The other longitudinal side of the second arm 52 and one longitudinal side of the fourth arm 54 are rotatably connected by a rotation shaft 57. The other longitudinal side of the fourth arm 54 has a holder 54a that holds (places) the substrate W. Details of the substrate transport mechanism 5 will be described later.

[0017] Inside the vacuum transfer chamber 3, sensor units (measurement parts) 6 are provided corresponding to each of the four processing chambers 4 and the three load lock chambers 2, for detecting the substrate W transferred by the substrate transfer mechanism 5. The sensor units 6 are provided at positions through which the substrate W passes when the substrate transfer mechanism 5 transfers the substrate W from the processing chamber 4 or the load lock chamber 2 to the vacuum transfer chamber 3, or when the substrate transfer mechanism 5 transfers the substrate W from the vacuum transfer chamber 3 to the processing chamber 4 or the load lock chamber 2.

[0018] The sensor unit 6 has two sensors 6a and 6b. The sensors 6a and 6b are, for example, photoelectric sensors, and can detect four points on the outer edge of the substrate W as the substrate W transported by the substrate transport mechanism 5 passes through the sensors 6a and 6b.

[0019] The control unit 7 controls the operation of each component of the substrate processing system 1, such as the substrate transfer mechanism 5, the load lock chamber 2, the exhaust system of the vacuum transfer chamber 3 and the processing chamber 4, the gate valves 22, 42, etc. The control unit 7 is typically a computer, and includes a main control unit, an input device, an output device, a display device, and a storage device. The main control unit has a CPU (Central Processing Unit), RAM, and ROM. The storage device has a computer-readable storage medium such as a hard disk, and is configured to record and read information required for control. In the control unit 7, the CPU uses the RAM as a working area to execute programs such as a processing recipe stored in the ROM or the storage medium of the storage device, thereby controlling the processing of the substrate W and the transportation of the substrate W in the substrate processing system 1.

[0020] Furthermore, the control unit 7 receives information relating to thermal expansion of the substrate transport mechanism 5 and corrects the positions of the holders 53a and 54a of the substrate transport mechanism 5, as will be described later.

[0021] Furthermore, the control unit 7 detects the outer edge coordinates of the substrate W held by the holder 53a of the third arm 53 based on the detection of the outer edge of the substrate W by the sensor unit 6 (sensors 6a, 6b) and the operation of the substrate transport mechanism 5 at that time. Then, the control unit 7 calculates the center position of the substrate W from the outer edge coordinates of the four detected points. Therefore, the sensor unit 6 and the control unit 7 function as a measurement unit that measures the center position of the substrate W held by the third arm 53. The control unit 7 detects the deviation (amount of eccentricity) between a reference position (center position of the holder 53a) for placing the substrate W in the third arm 53, which is set in advance, and the center position of the substrate W held by the holder 53a of the third arm 53, which is detected by the sensor unit 6. The control unit 7 also controls the holder 54a of the fourth arm 54 in the same manner.

[0022] <Substrate transport mechanism> Next, the substrate transport mechanism 5 will be described in more detail with reference to Figures 2 and 3. Figure 2 is a perspective view showing an example of the substrate transport mechanism 5, and Figure 3 is a schematic view explaining the structure of the example of the substrate transport mechanism 5.

[0023] In the substrate transport mechanism 5, a first shaft motor 91, a gear 92 rotated by the first shaft motor 91, and a gear 93 meshing with the gear 92 are provided on the lower side within the first arm 51. The gear 93 is fixed to the base unit 50 and disposed coaxially with the rotation shaft 55. The gears 92 and 93 form a power transmission mechanism, and by rotating the gear 92 with the first shaft motor 91, the first arm 51 is rotated about the rotation shaft 55 relative to the base 50.

[0024] Further, a second shaft motor 94, a gear 95 rotated by the second shaft motor 94, and a gear 96 meshing with the gear 95 are provided on the upper side within the first arm 51. The gear 96 is fixed to the second arm 52, and disposed coaxially with the rotation shaft 56. The gears 95 and 96 form a power transmission mechanism, and by rotating the gear 95 by the second shaft motor 94, the second arm 52 is rotated around the rotation shaft 56 relative to the first arm 51.

[0025] Provided within the second arm 52 are a third-axis motor 97, a gear 98 rotated by the third-axis motor 97, and a gear 99 meshing with the gear 98. The gear 99 is fixed to the third arm 53 and disposed coaxially with the rotation shaft 57. The gears 98 and 99 constitute a power transmission mechanism, and the third arm 53 is rotated about the rotation shaft 57 relative to the second arm 52 by rotating the gear 98 with the third-axis motor 97. Similarly, provided within the second arm 52 is a motor (not shown) for rotating the fourth arm 54 and a power transmission mechanism (not shown) consisting of a pair of gears, and the fourth arm 54 is rotated about the rotation shaft 57 relative to the second arm 52 by the motor via the power transmission mechanism.

[0026] The first arm 51 is provided with temperature sensors (temperature detection units) 81, 82. For example, thermocouples can be used as the temperature sensors 81, 82. The temperature sensor 81 is provided on one side in the longitudinal direction of the first arm 51 (the side of the rotation shaft 55), and the temperature sensor 82 is provided on the other side in the longitudinal direction of the first arm 51 (the side of the rotation shaft 56). The temperatures of the first arm 51 detected by the temperature sensors 81, 82 are input to the control unit 7.

[0027] The second arm 52 is provided with temperature sensors (temperature detection units) 83, 84. For example, thermocouples can be used as the temperature sensors 83, 84. The temperature sensor 83 is provided on one side in the longitudinal direction of the second arm 52 (the side of the rotation shaft 56), and the temperature sensor 84 is provided on the other side in the longitudinal direction of the second arm 52 (the side of the rotation shaft 57). The temperatures of the second arm 52 detected by the temperature sensors 83, 84 are input to the control unit 7.

[0028] Next, thermal expansion in the substrate transport mechanism 5 will be described. The substrate transport mechanism 5 generates heat due to the first axis motor 91 and the like provided therein as a heat source. When the processing chamber 4 is at a high temperature, heat is input from the processing chamber 4 to the substrate transport mechanism 5. Furthermore, heat is input to the substrate transport mechanism 5 from the high-temperature substrate W processed in the processing chamber 4. This causes thermal expansion in the substrate transport mechanism 5.

[0029] In the following description, the axial distance between rotating shafts 55 and 56 (link length of first arm 51) is L1, and the axial distance between rotating shafts 56 and 57 (link length of second arm 52) is L2. The axial distance between gears 92 and 93 is Lg1, the axial distance between gears 95 and 96 is Lg2, and the axial distance between gears 98 and 99 is Lg3 (see FIG. 3). The gears 92, 95, and 98 are made of a material such as Fe, and the first arm 51, the second arm 52, the third arm 53, the fourth arm 54, and the gears 93, 96, and 99 are made of a material such as Al.

[0030] As indicated by the solid arrows in FIG. 2, when heat is input to the substrate transport mechanism 5, the first arm 51, the second arm 52, the third arm 53, and the fourth arm 54 thermally expand in the longitudinal direction.

[0031] Furthermore, backlash of gears 92, 93 increases due to thermal expansion of gears 92, 93. In Fig. 2, the position of the central axis of first arm 51 in the longitudinal direction is indicated by a dashed line, and the position of the central axis of first arm 51 in the longitudinal direction due to backlash is indicated by a dashed two-dot line. As indicated by the white arrows in Fig. 2, when first arm 51 is rotated about rotating shaft 55 by gears 92, 93, an angular transmission error occurs. Similarly, backlash also increases in gears 95, 96 and gears 98, 99, causing an angular transmission error.

[0032] 4 is a functional block diagram when the control unit 7 controls the substrate transport mechanism 5. The control unit 7 controls the substrate transport mechanism 5, including correcting thermal expansion.

[0033] The substrate transport mechanism 5 has a first shaft angle sensor 91a, a second shaft angle sensor 94a, and a third shaft angle sensor 97a that detect the rotation angle of the first shaft motor 91, the rotation angle of the second shaft motor 94, and the rotation angle of the third shaft motor 97, respectively. The detection values ​​of the first shaft angle sensor 91a, the second shaft angle sensor 94a, and the third shaft angle sensor 97a are input to the control unit 7. The control unit 7 controls the operation of the substrate transport mechanism 5 by controlling the first shaft motor 91, the second shaft motor 94, and the third shaft motor 97 based on the detection values ​​of the first shaft angle sensor 91a, the second shaft angle sensor 94a, and the third shaft angle sensor 97a.

[0034] In addition, the detection values ​​of the temperature sensors 81 to 84 and the detection value of the sensor unit 6 are also input to the control unit 7.

[0035] The control unit 7 includes a thermal expansion amount estimating unit 71 , an angular transmission error estimating unit 72 , an angular error direction estimating unit 73 , and a transfer position correcting unit 74 .

[0036] The thermal expansion amount estimating unit 71 estimates the amounts of thermal expansion of the first arm 51 and the second arm 52.

[0037] When the thermal expansion amount estimation unit 71 estimates the thermal expansion amount of the first arm 51, the estimation is made based on, for example, the temperature of the first arm 51, the thermal expansion coefficient of the first arm 51, and the reference link length L1 of the first arm 51. The temperature of the first arm 51 is detected by temperature sensors 81 and 82. For example, the average value of the temperature sensors 81 and 82 may be taken as the temperature of the first arm 51. Furthermore, when the first arm 51 is made of Al, the thermal expansion coefficient of the first arm 51 may be taken as the thermal expansion coefficient of Al. The reference link length L1 of the first arm 51 is the link length of the first arm 51 at the reference temperature.

[0038] When the thermal expansion amount estimating unit 71 estimates the amount of thermal expansion of the second arm 52, the estimation is made based on, for example, the temperature of the second arm 52, the thermal expansion coefficient of the second arm 52, and the reference link length L2 of the second arm 52. The temperature of the second arm 52 is detected by temperature sensors 83 and 84. For example, the average value of the temperature sensors 83 and 84 may be taken as the temperature of the second arm 52. Furthermore, when the second arm 52 is made of Al, the thermal expansion coefficient of the second arm 52 may be taken as the thermal expansion coefficient of Al. The reference link length L2 of the second arm 52 is the link length of the second arm 52 at the reference temperature.

[0039] The angular transmission error estimating unit 72 estimates the amount of angular transmission error caused by gear backlash.

[0040] When the angular transmission error estimating unit 72 estimates the amount of angular transmission error when the first arm 51 is rotated by the rotating shaft 55, the estimation is based on, for example, the temperatures of the gears 92, 93, the difference in the thermal expansion coefficients of the gears 92, 93, and the reference axial distance Lg1 of the gears 92, 93. The temperatures of the gears 92, 93 are detected by, for example, the temperature sensor 81. Furthermore, when the gear 92 is made of Fe and the gear 93 is made of Al, the difference in the thermal expansion coefficients of the gears 92, 93 may be the difference between the thermal expansion coefficients of Al and Fe. The reference axial distance Lg1 is the axial distance of the gears 92, 93 at the reference temperature.

[0041] When the angular transmission error estimating unit 72 estimates the amount of angular transmission error when the second arm 52 is rotated by the rotating shaft 56, the estimation is based on, for example, the temperatures of the gears 95, 96, the difference in the thermal expansion coefficients of the gears 95, 96, and a reference axial distance Lg2 of the gears 95, 96. The temperatures of the gears 95, 96 are detected by, for example, a temperature sensor 82. Furthermore, when the gear 95 is made of Fe and the gear 96 is made of Al, the difference in the thermal expansion coefficients of the gears 95, 96 may be the difference between the thermal expansion coefficient of Al and the thermal expansion coefficient of Fe. The reference axial distance Lg2 is the axial distance of the gears 95, 96 at a reference temperature.

[0042] When the angular transmission error estimating unit 72 estimates the amount of angular transmission error when the third arm 53 is rotated by the rotating shaft 57, the estimation is based on, for example, the temperature of the gears 98, 99, the difference in the thermal expansion coefficients of the gears 98, 99, and the reference center distance Lg3 of the gears 98, 99. The temperature of the gears 98, 99 is detected by, for example, the temperature sensor 84. When the gear 98 is made of Fe and the gear 99 is made of Al, the difference in the thermal expansion coefficients of the gears 98, 99 may be the difference between the thermal expansion coefficient of Al and the thermal expansion coefficient of Fe. The reference center distance Lg3 is the center distance of the gears 98, 99 at the reference temperature. The angular transmission error estimating unit 72 similarly estimates the amount of angular transmission error when the fourth arm 54 is rotated by the rotating shaft 57.

[0043] The angular error direction estimator 73 estimates the direction of the angular transmission error. Specifically, the angular error direction estimator 73 estimates the direction of the angular transmission error when the first arm 51 is rotated by the rotating shaft 55 based on the acceleration / deceleration state of the first axis motor 91. Similarly, the angular error direction estimator 73 estimates the direction of the angular transmission error when the second arm 52 is rotated by the rotating shaft 56 based on the acceleration / deceleration state of the second axis motor 94, and estimates the direction of the angular transmission error when the third arm 53 is rotated by the rotating shaft 57 based on the acceleration / deceleration state of the third axis motor 97. The angular error direction estimator 73 also estimates the direction of the angular transmission error when the fourth arm 54 is rotated by the rotating shaft 57 in a similar manner.

[0044] The estimation of the angle error direction will be described with reference to FIGS. Fig. 5 is a diagram showing a schematic attitude of the substrate transport mechanism 5. Fig. 5(a) is a diagram showing an example of the attitude of the substrate transport mechanism 5 when the substrate W is located at a measurement position where it is measured by the sensor unit 6. Fig. 5(b) is a diagram showing an example of the attitude of the substrate transport mechanism 5 when the substrate W being transported is located at a target position.

[0045] As indicated by the dashed arrows, the link lengths of the first arm 51 and the second arm 52 are thermally expanded. Note that, since the reference positions for placing the substrate W on the third arm 53 and the fourth arm 54 are set as a predetermined distance from the rotation shaft 57, the thermal expansion of the third arm 53 and the fourth arm 54 does not need to be taken into consideration.

[0046] At the measurement position shown in Fig. 5(a), the substrate transport mechanism 5 accelerates the substrate W so that it passes over the sensor unit 6. Therefore, the substrate W being transported is subjected to an inertial force in the direction indicated by the white arrow. Meanwhile, the substrate transport mechanism 5 decelerates the substrate W so that the substrate W moves toward the target position of the stage 41, and then stops the substrate W at the target position, as shown in Fig. 5(b). Therefore, the substrate W being transported is subjected to an inertial force in the direction indicated by the white arrow.

[0047] Here, the relationship between the acceleration / deceleration state and the error direction of the angular transmission error will be described with reference to Fig. 6. Fig. 6 is an example of a diagram for explaining the error direction of the angular transmission error. Fig. 6(a) shows the first shaft motor 91 when accelerating. Fig. 6(b) shows the first shaft motor 91 when decelerating. Note that the solid arrows indicate the rotation direction of each gear.

[0048] 6(a), when the first shaft motor 91 accelerates, the primary gear 92 rotates clockwise and the secondary gear 93 rotates counterclockwise. At this time, the teeth of the primary gear 92 are in contact with the teeth of the secondary gear 93 in a pushing direction due to inertia. As a result, an angular transmission error due to backlash occurs in the direction shown by the white arrow.

[0049] On the other hand, when the first shaft motor 91 shown in Fig. 6(b) is decelerating, the primary gear 92 rotates clockwise and the secondary gear 93 rotates counterclockwise. At this time, the teeth of the secondary gear 93 are in contact with the teeth of the primary gear 92 in a pushing direction due to inertia. As a result, an angle transmission error due to backlash occurs in the direction shown by the white arrow.

[0050] In this way, the direction of the angular transmission error due to backlash of gears 92 and 93, which are the power transmission mechanism, differs depending on whether the first axis motor 91 is accelerating or decelerating. The same is true for the direction of the angular transmission error due to backlash of gears 95 and 96, which are the power transmission mechanism of the second axis motor 94, and gears 98 and 99, which are the power transmission mechanism of the third axis motor 97. An example of the direction of such an angular transmission error is shown by a solid arrow in Figure 5, and the direction of the angular transmission error changes between the measurement position in Figure 5(a) and the target position in Figure 5(b).

[0051] Furthermore, it is assumed that the temperature change of the substrate transport mechanism 5 during transport of the substrate W is sufficiently small, so that the amount of thermal expansion of the first arm 51 and the second arm 52 and the amount of angular transmission error in the rotating shafts 55, 56, 57 between the measurement position and the transport position do not change.

[0052] The transfer position correction unit 74 corrects the positional deviation of the substrate transfer mechanism 5 so that the transfer position of the substrate W becomes a target position when the substrate transfer mechanism 5 receives a substrate from one of the stage 21 of the load lock chamber 2 and the stage 41 of the processing chamber 4 and transfers the substrate from the other. The amount of correction at this time includes the displacement due to thermal expansion of the substrate transfer mechanism 5 (thermal displacement), and the amount of thermal displacement stored in the transfer position correction unit 74 is estimated using a physical model.

[0053] That is, as described above, the substrate transport mechanism 5 has rotatably connected arms 51-54 and motors 91, 94, 97 that rotate the arms 51-54 via gears which are power transmission mechanisms, and the physical model for estimating the amount of thermal displacement of the holding parts 53a and 54a is expressed by an equation including the amount of thermal expansion of the arms 51-54 estimated based on the temperature of the arms 51-54, the joint angles which are the connection parts of the arms, and the amount of angle delay (amount of angle transmission error) estimated based on the temperature.

[0054] In this embodiment, the transport position correction unit 74 reflects the difference between the true amount of misalignment between the holding unit 53a or 54a and the substrate W, taking into account the amount of thermal displacement at the measurement position when the substrate is handed over to the destination stage (at put time), and the true amount of misalignment between the holding unit 53a or 54a and the substrate W, taking into account the amount of thermal displacement at the measurement position when the substrate is received on the source stage (at get time), in a physical model that estimates the amount of thermal displacement at the measurement position at put time.

[0055] This point will be described in detail below by taking as an example a case in which the substrate W is placed on the holder 53a and transported from the stage 21 as the transport source to the stage 41 as the transport destination.

[0056] The control unit 7 controls the substrate transport mechanism 5 so that the substrate W is transported to a target position on the stage 41, but a deviation occurs in the transport position due to a deviation when the holder 53a receives the substrate W and a thermal displacement of the holder 53a due to thermal expansion of the substrate transport mechanism 5. The positional deviation on the stage 41 is calculated from the deviation amount (X3, Y3) between the substrate W and the holder 53a, which is a detection value of the sensor unit 6 adjacent to the processing chamber 4, the thermal displacement amount (X1, Y1) at the measurement position by the sensor unit 6, and the thermal displacement amount (X2, Y2) of the holder 53a on the stage 41.

[0057] Specifically, (X3, Y3) is the deviation between the reference position (center position of the holder 53a) and the center position of the substrate W held by the holder 53a. Specifically, (X1, Y1) is the position deviation of the holder 53a due to thermal expansion of the substrate transport mechanism 5 at the measurement position at the time of put. (X2, Y2) is expressed as the position deviation of the reference position of the third arm 53 (holder 53a) with respect to the target position of the substrate W. The true deviation between the holder 53a and the substrate W is obtained by considering the thermal expansion of the substrate transport mechanism 5 at the measurement position. Specifically, as shown in FIG. 7(a), the true deviation is (X3-X1, Y3-Y1) derived from the detection value (X3, Y3) expressed as the deviation in the setting and the thermal displacement amount (position deviation amount of the holder 53a due to thermal expansion at the measurement position) (X1, Y1). In FIG. 7(a), the center of the substrate W is indicated by O', and the reference position is indicated by O1. 7(b), the displacement amount due to thermal expansion between the reference position O1 and the target position O in the stage 41 is (X2, Y2). The displacement amount of the substrate W from the target position in the transport destination stage 41 is the true displacement amount (X3-X1, Y3-Y1) plus the thermal displacement amount (X2, Y2) in the stage 41. Therefore, the position correction amount of the holder 53a at this time=-(the true displacement amount between the holder 53a and the substrate W+the thermal displacement amount in the stage 41), and the value is (-X3-X2+X1, Y3-Y2+Y1). Therefore, by controlling the first axis motor 91, the second axis motor 94, the third axis motor 97, etc. of the substrate transport mechanism 5 to correct the position of the holder 53a by the above-mentioned correction amount, the transport position of the substrate W on the holder 53a can be controlled to the target position.

[0058] As described above, the thermal displacement amount among the correction amounts of the substrate transport mechanism 5 is calculated using a physical model. For example, the following formula (1) can be used as a physical model for finding X1, which is the X coordinate of the thermal displacement amount at the measurement position at the time of put. The same is true for Y1, which is the Y coordinate. X1=L1cosΩ1´α1ΔT+L2cosΩ2´α2ΔT+L3cosΩ3´α3ΔT+L1(cosΩ1´-cosΩ1)+L2(cosΩ2´-cosΩ2)+L3(cosΩ3´-cosΩ3) ···(1) Here, L1, L2, and L3 are the link length of the first arm 51, the link length of the second arm, and the link length of the third arm, respectively, as described above. α1, α2, and α3 are the linear expansion coefficients of the first link, the second link, and the third link, respectively (the initial values ​​are all the same numerical value, which is the thermal expansion coefficient of the arm material). Also, Ω1, Ω2, and Ω3 are the first joint angle, the second joint angle, and the third joint angle at the time of put, respectively (all are design values). Ω1', Ω2', and Ω3' are Ω1'=Ω1+ΔΩ1, Ω2'=Ω2+ΔΩ2, and Ω3'=Ω3+ΔΩ3, respectively, and ΔΩ1, ΔΩ2, and ΔΩ3 are the angle delay amount (proportional to ΔT) due to the expansion of the center distance of the gears.

[0059] However, when using a physical model for the amount of thermal displacement, the consistency of the physical model becomes an issue. That is, by using a physical model, it is possible to perform position correction that takes into account the thermal displacement of the substrate transport mechanism 5, but the physical model always has model errors. For example, the physical model of the above formula (1) that indicates the thermal displacement at the time of put also contains model errors. For this reason, there is a limit to the accuracy of the position correction.

[0060] In order to reduce this model error, the transport position correction unit 74 of this embodiment utilizes the difference between the true amount of misalignment between the holding part 53a and the substrate W, taking into account the amount of thermal displacement at the measurement position at the time of put, and the true amount of misalignment between the holding part 53a and the substrate W, taking into account the amount of thermal displacement at the measurement position at the time of get, which ideally show the same value, as described below.

[0061] At the time of get, the detection value of the sensor unit 6 adjacent to the load lock chamber 2 is (X3', Y3'), and the thermal displacement amount at the measurement position by the sensor unit 6 is (X1', Y1'). (X3', Y3') is specifically the amount of deviation between the set reference position of the third arm 53 (the center position of the holder 53a) and the center position of the substrate W held by the holder 53a. Also, (X1', Y1') is specifically the amount of positional deviation of the holder 53a due to thermal expansion of the substrate transport mechanism 5 at the measurement position at the time of get. The true amount of deviation between the holder 53a and the substrate W is (X3'-X1', Y3'-Y1') derived from the detection value (X3', Y3') expressed as the set amount of deviation, and the amount of thermal displacement at the measurement position (the amount of positional deviation of the holder 53a due to thermal expansion) (X1', Y1').

[0062] The amount of thermal displacement (X1', Y1') at the measurement position at the time of get can also be calculated using a physical model. For example, the following formula (2) can be used as a physical model for calculating X1', which is the X coordinate of the amount of thermal displacement at the measurement position at the time of get. X1´=L1cosΘ1´α1ΔT+L2cosΘ2´α2ΔT+L3cosΘ3´α3ΔT+L1(cosΘ1´-cosΘ1)+L2(cosΘ2´-cosΘ2)+L3(cosΘ3´-cosΘ3) ···(2) Here, L1, L2, L3, α1, α2, and α3 are the same as in formula (1), and Θ1, Θ2, and Θ3 are the first joint angle, second joint angle, and third joint angle (all design values) at get, respectively. Θ1', Θ2', and Θ3' are Θ1'=Θ1+ΔΘ1, Θ2'=Θ2+ΔΘ2, and Θ3'=Θ3+ΔΘ3, respectively, and ΔΘ1, ΔΘ2, and ΔΘ3 are the angle delay amounts (proportional to ΔT) due to the expansion of the center distance of the gears.

[0063] As described above, the true amount of deviation (X3-X1, Y3-Y1) taking into account the thermal displacement between the holding portion 53a and the substrate W at the time of put and the true amount of deviation (X3'-X1', Y3'-Y1') between the holding portion 53a and the substrate W at the time of get should ideally be the same value. However, in reality, they are not the same value, and a difference occurs between them. For example, in terms of the X coordinate, a difference A occurs between (X3-X1) and (X3'-X1'). This is because, excluding the detection error in the sensor unit 6, an error occurs in the estimated amount of the thermal displacement due to the model error of the physical model.

[0064] Therefore, the transfer position correction unit 74 reflects the difference between the true misalignment between the holder 53a and the substrate W at the measurement position at put (the true misalignment at the measurement position at put) and the true misalignment between the holder 53a and the substrate W at the measurement position at get (the true misalignment at the measurement position at get) in a physical model that calculates the thermal displacement at the measurement position at put, and corrects the physical model so as to reduce model errors. For example, a correction term that reflects the difference between the true misalignment at the measurement position at put and the true misalignment at the measurement position at get is added to the initial physical model.

[0065] As a specific example, the difference A is calculated by (true deviation at the measurement position at put) - (true deviation at the measurement position at get), and A / 2, which is the simple average of A, is added to X1, which is the initial physical model of the thermal displacement at the measurement position at put, to correct the physical model to X1(Ave) shown in the following formula (3). This makes it possible to reduce errors in the physical model. X1(Ave)=X1+A / 2 (3)

[0066] As described above, the position correction amount of the substrate transport mechanism 5=-(the true deviation amount between the holder 53a and the substrate W+the thermal displacement amount at the stage 41), and the initial value of the X coordinate is -X3-X2+X1. Therefore, the initial position correction amount X1 is replaced with X1(Ave) and the position correction amount is calculated as -X3-X2+X1(Ave). The same applies to the Y coordinate. This allows correction to a physical model with small error using a simple method. This also increases the position correction accuracy and improves the transport accuracy of the substrate W. In this example, an initial physical model is used for the thermal displacement amount X2 used for transport position correction.

[0067] Alternatively, the following method can be used. The following equations (4) and (5) are used, which are obtained by adding an error factor β(ΔT) expressed as a function of ΔT that is not included in the physical models of equations (1) and (2) above as a correction term.

[0068] X1=L1cosΩ1´α1ΔT+L2cosΩ2´α2ΔT+L3cosΩ3´α3ΔT+L1(cosΩ1´-cosΩ1)+L2(cosΩ2´-cosΩ2)+L3(cosΩ3´-cosΩ3)+β(ΔT) ···(4) X1´=L1cosΘ1´α1ΔT+L2cosΘ2´α2ΔT+L3cosΘ3´α3ΔT+L1(cosΘ1´-cosΘ1)+L2(cosΘ2´-cosΘ2)+L3(cosΘ3´-cosΘ3)+β(ΔT) ···(5)

[0069] In the above formulas (4) and (5), ΔΘ1 and ΔΩ1, ΔΘ2 and ΔΩ2, and ΔΘ3 and ΔΩ3 are proportional to the first gear center distance, the second gear center distance, and the third gear center distance, respectively, and are calculated from the same physical quantities. The same is true for L1, L2, and L3, ΔT, and α. Therefore, fitting is performed so that the difference A is minimized for these parameters. For example, a linear programming method is used to solve the problem, or parameters that reduce the error are derived by machine learning or the like. As a function of ΔT, a function that is proportional to ΔT, proportional to the square of ΔT, proportional to an exponent, or the like can be used.

[0070] For example, the arguments (the numerical values ​​of the physical quantities in the physical model) in the above equations (4) and (5) are changed so that the difference A=0, i.e., (X3-X1)-(X3'-X1')=0, and X1(True) can be calculated as the true value of X1. In this case, fitting is performed using linear programming or the like so that (X3'-X1')-(X3-X1)=0 holds true, and the physical quantities L1, L2, L3, Θ1', Θ2', Θ3', α, β, and ΔT in the above equations (4) and (5) are determined. Then, the L1, L2, L3, ΔΩ1, ΔΩ2, ΔΩ3, α, β, and ΔT obtained in this way are set as true values, and X1(True) is calculated using an equation with the same form as equations (4) and (5). X1(True) is an equation derived by fitting so that the difference A=0 holds true, and has an extremely small error.

[0071] When X1(True) is used, the physical model of the thermal displacement amount X2 used for the transfer position correction can be corrected. At this time, the physical amount used to estimate X1(True) is set as the true value, and X2(True) can be estimated by calculation using a physical model in which the error factor β(ΔT) expressed as a function of ΔT that is not included in the initial physical model of X2 is added.

[0072] X2(True) can be calculated using the following equation (6) with L1, L2, L3, ΔΘ1, ΔΘ2, ΔΘ3, α, β, and ΔT obtained in the calculation of X1(True) as the true values. X2(True)=L1cosξ1´αΔT+L2cosξ2´αΔT+L3cosξ3´αΔT+L1(cosξ1´-cosξ1)+L2(cosξ2´-cosξ2)+L3(cosξ3´-cosξ3)+β(ΔT) ···(6) Here, ξ1, ξ2, and ξ3 are the first joint angle, second joint angle, and third joint angle at the time of put (all are design values). ξ1', ξ2', and ξ3' are respectively ξ1'=ξ1+Δξ1, ξ2'=ξ2+Δξ2, and ξ3'=ξ3+Δξ3, and Δξ1, Δξ2, and Δξ3 are the angle delay amounts (proportional to ΔT) due to the increase in the center distance of the gears, where Δξ1=ΔΩ1, Δξ2=ΔΩ2, and Δξ3=ΔΩ3.

[0073] X2(True) is calculated using the same formula as X1(True), and like X1(True), has an extremely small error.

[0074] As described above, the position correction amount of the substrate transport mechanism 5 is expressed as -(true deviation amount between the holder 53a and the substrate W+thermal displacement amount at the stage 41), and the initial value of the X coordinate is -X3-X2+X1. Therefore, X1 in this initial position correction amount is replaced with X1(True) and X2 is replaced with X2(True) to calculate the position correction amount as -X3-X2(True)+X1(True). The same is true for the Y coordinate. In this example, by correcting X1 to X1(True), the error in the thermal displacement amount at the measurement position can be reduced, and the error in the thermal displacement amount at the stage can also be reduced, so that the accuracy of the position correction of the substrate transport mechanism 5 can be further improved.

[0075] <Substrate transport method> Next, an example of a substrate transport method using the substrate transport mechanism 5 will be described in detail. Here, a case will be described in which the substrate W is transported by the holder 53a of the third arm 53 from the stage 21 in the load lock chamber 2 to the stage 41 in the processing chamber 4.

[0076] FIG. 8 is a flowchart showing an example of a substrate transport method. First, the substrate W on the stage 21 of the load lock chamber 2 is received by the holder 53a of the substrate transport mechanism 5 (step ST1).

[0077] Next, while the holder 53a holding the substrate W is being retracted, the substrate W passes through the sensor unit 6 (first measurement unit) adjacent to the load lock chamber 2, and the true misalignment between the holder 53a and the substrate W taking into account the thermal displacement at the measurement position at the time of get is measured (step ST2). As described above, the true misalignment at this time is (X3'-X1', Y3'-Y1') derived from the detection value (X3', Y3') expressed as the set misalignment amount, and the thermal displacement (positional misalignment amount of the holder 53a due to thermal expansion) (X1', Y1') at the measurement position.

[0078] Next, the substrate W is transported toward the processing chamber 4, and while the holder 53a holding the substrate W is being extended toward the stage 41, the substrate W passes through the sensor unit 6 (second measurement unit) adjacent to the processing chamber 4, and the true misalignment between the holder 53a and the substrate W taking into account the amount of thermal displacement at the measurement position at the time of putting is measured (step ST3). As described above, the true misalignment at this time is (X3-X1, Y3-Y1) derived from the detection value (X3, Y3) expressed as the set misalignment amount and the amount of thermal displacement (position misalignment amount of the holder 53a due to thermal expansion) (X1, Y1) at the measurement position.

[0079] Next, the difference between the true amount of deviation at the measurement position at the time of put and the true amount of deviation at the measurement position at the time of get is reflected in a physical model that calculates the amount of thermal displacement at the measurement position at the time of put, and the physical model is corrected so as to reduce model error (step ST4).

[0080] Next, the position correction amount of the holding part 53a on the stage 41 is calculated from the thermal displacement amount of the holding part 53a at the measurement position at the time of put estimated by the corrected physical model, the misalignment amount between the holding part 53a and the substrate W which is the detection value of the sensor unit 6 at the time of put, and the thermal displacement amount of the holding part 53a on the stage 41 (step ST5).

[0081] Next, based on the correction amount calculated in step ST5, the control unit 7 controls the substrate transport mechanism 5 to correct the position of the holder 53a, and transfers the substrate W on the holder 53a to the stage 41 (step ST6).

[0082] In this manner, in this embodiment, the difference between the true amount of deviation at the measurement position at the time of put and the true amount of deviation at the measurement position at the time of get is reflected in a physical model that calculates the amount of thermal displacement at the measurement position at the time of put, and the physical model is corrected to reduce errors in the physical model. This makes it possible to improve the accuracy of position correction for positional deviation of the substrate transport mechanism 5 due to thermal expansion, and to transport the substrate W to the target position with high accuracy.

[0083] Next, a specific example of the process of correcting the physical model in step ST4 above and the process of calculating the position correction amount of the substrate transport mechanism 5 in step ST5 above will be described.

[0084] The first example is shown in FIG. 9 and is a case where the above-mentioned X1(Ave) is used. First, the difference A is calculated by subtracting the true amount of deviation at the measurement position at the time of get from the true amount of deviation at the measurement position at the time of put. Then, according to the above formula (3), X1(Ave) is calculated by adding A / 2 to X1 as a correction term (step ST4-1).

[0085] Next, the correction amount of the substrate transport mechanism 5 is calculated as correction amount (X coordinate)=-X3-X2+X1(Ave) (step ST5-1).

[0086] In this way, it is only necessary to calculate the difference between the true deviation amount at the measurement position at the time of put and the true deviation amount at the measurement position at the time of get and average them, so that it is possible to easily correct the physical model with small errors. This also improves the accuracy of position correction and thereby improves the transportation accuracy of the substrate W.

[0087] The second example is shown in FIG. 10, where the error factors β(ΔT) shown in (4) and (5) above are used to change the numerical values ​​of the physical quantities in the physical model. First, for example, the arguments in the formulas (the numerical values ​​of the physical quantities in the physical model) are changed using the above formulas (4) and (5) so that the difference A = 0, that is, (X3-X1)-(X3'-X1') = 0, the physical quantities are estimated using linear programming or the like, and the estimated physical quantities are used as true values ​​to calculate X1(True) as the true value of X1 using the same formula (step ST4-11). )。

[0088] Next, L1, L2, L3, ΔΘ1, ΔΘ2, ΔΘ3, α, β, and ΔT obtained in the calculation of X1(True) are set as true values, and X2(True) is calculated using the above equation (6) (step ST4-12).

[0089] Next, the correction amount of the substrate transport mechanism 5 is calculated as follows: correction amount (X coordinate)=-X3-X2(True)+X1(True) (step ST5-11).

[0090] In this example, by changing the numerical values ​​of the physical quantities in the physical model and solving (X3-X1)-(X3'-X1')=0, it is possible to derive X1 (True), which is a physical model with a small error, and improve accuracy. In addition, since it is possible to correct not only the thermal displacement amount of the measurement position but also the physical model of the thermal displacement amount of the stage 41, it is possible to further improve the accuracy of position correction for the positional deviation of the substrate transport mechanism 5.

[0091] Next, another example of the substrate transport method will be described in detail. Similarly, here, a case in which the substrate W is transported from the stage 21 in the load lock chamber 2 to the stage 41 in the processing chamber 4 will be described.

[0092] FIG. 11 is a flowchart showing another example of the substrate transport method. First, similarly to step ST1 above, the substrate W on the stage 21 of the load lock chamber 2 is received by the holder 53a of the substrate transport mechanism 5 (step ST11).

[0093] Next, as in step ST2 above, while the holding part 53a holding the substrate W is being retracted, the substrate W passes through the sensor unit 6 (first measurement part) adjacent to the load lock chamber 2, and the true deviation amount between the holding part 53a and the substrate W, taking into account the amount of thermal displacement at the measurement position at the time of get, is measured (step ST12).

[0094] Next, similar to step ST3 above, the substrate W is transported toward the processing chamber 4, and while the holding part 53a holding the substrate W is being extended toward the stage 41, the substrate W passes through a sensor unit 6 (second measurement part) adjacent to the processing chamber 4, and the true deviation amount between the holding part 53a and the substrate W, taking into account the amount of thermal displacement at the measurement position at the time of put, is measured (step ST13).

[0095] Next, the difference between the true amount of deviation at the measurement position at the time of put and the true amount of deviation at the measurement position at the time of get is reflected in a physical model that calculates the amount of thermal displacement at the measurement position at the time of put, and the physical model is corrected so as to reduce model error. At that time, fitting is performed by changing the numerical values ​​of the physical quantities in the physical model, and the physical quantities are estimated (step ST14).

[0096] Here, for example, a physical model is used in which an error factor expressed as a function of temperature, which is not included in the initial physical model shown in the above formulas (4) and (5) shown in the second example of the specific example, is added to these models. Then, the numerical values ​​of physical quantities (e.g., arm length, arm angle, thermal expansion coefficient, temperature change, etc.) in the physical model are changed so that the difference A expressed by (true deviation amount at the measurement position at the time of put)-(true deviation amount at the measurement position at the time of get) becomes the smallest, preferably so that (X3-X1)-(X3'-X1')=0. The physical quantities are estimated using linear programming or the like, and X1(True) is calculated using the estimated physical quantities as true values ​​using the same formula. Then, for the thermal displacement quantity X2, a physical model is used in which an error factor expressed as a function of temperature, which is not included in these models, is added to the initial physical model shown in the above formula (6). The physical quantities used in calculating X1(True) are used as true values ​​to calculate X2(True) as the true value of X2. These procedures can be carried out, for example, in the same manner as in the second specific example above.

[0097] Next, the position correction amount of the holding part 53a on the stage 41 is calculated from the thermal displacement amount of the holding part 53a at the measurement position at the time of put estimated by the corrected physical model, the misalignment amount between the holding part 53a and the substrate W which is the detection value of the sensor unit 6 at the time of put, and the thermal displacement amount of the holding part 53a on the stage 41 (step ST15).

[0098] Next, based on the correction amount calculated in step ST15, the control unit 7 controls the substrate transport mechanism 5 to correct the position of the holder 53a, and transfers the substrate W on the holder 53a to the stage 41 (step ST16).

[0099] Next, the estimated physical quantity (parameter) and temperature are stored as a pair in the storage device of the control unit 7 (step ST17). Such data may be stored each time a substrate W is transported, or after a plurality of substrates have been transported. The physical quantity (parameter) and temperature may be stored in a table of temperature versus physical quantity, and the table may be updated each time data is input. Then, the physical quantity can be estimated from this table. However, if the estimation result is significantly different from the table of physical quantities, the physical quantity to be estimated can be determined by balancing the residue and the deviation from the table. Note that instead of using a table, the physical quantity may be estimated using a neural network or the like.

[0100] In this way, by storing the physical quantity (parameter) and the temperature as a pair, feedback can be provided to the physical model held in the control unit 7 to correct the physical model. Therefore, even if the initial physical model is not accurate, the accuracy of the physical model can be improved, and position correction can be performed with high accuracy for positional deviation caused by thermal expansion of the substrate transport mechanism 5. In addition, the physical model can be changed depending on the system or substrate transport mechanism, making it possible to deal with aging and machine differences.

[0101] <Other applications> Although the embodiments have been described above, the embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims.

[0102] For example, in the above embodiment, a case has been described in which the substrate W is transported from the stage 21 of the load lock chamber 2 to the stage 41 of the processing chamber 4 by the substrate transport mechanism 5, but this is not limiting and the substrate may be transported from the stage 41 to the stage 21. Also, in the above embodiment, a substrate transport between the load lock chamber and the processing chamber in a substrate transport system that performs vacuum transport has been described, but this is not limiting. [Explanation of symbols]

[0103] 1. Substrate processing system 2. Load lock chamber 3. Vacuum transfer chamber 4. Processing room 5. Substrate transport mechanism 6: Sensor unit (measuring part) 6a, 6b; Sensor 7; Control section 21,41;Stage 50; Base 51; First Arm 52; 2nd arm 53; 3rd arm 54; 4th arm 55, 56, 57; Rotation axis 71: Thermal expansion estimation section 72: Angular transmission error estimator 73;Angle error direction estimation unit 74: Transport position correction unit 81~84: Temperature sensor 91, 94, 97;Motor 92, 93, 95, 96, 98, 99; Gear (power transmission mechanism) 91a, 94a, 97a; Angle sensor W; Substrate

Claims

1. A substrate transport method for transporting a substrate to a target position of a second stage by a substrate transport system having a substrate transport mechanism having a holding part for holding a substrate and transporting the substrate from a first stage to a second stage, a first measurement part for measuring a position of the substrate at a first measurement position near the first stage, and a second measurement part for measuring a position of the substrate at a second measurement position near the second stage, comprising: receiving the substrate on the first stage by the holder; causing the substrate held by the holder to pass through a first measurement unit, and measuring a first true misalignment amount between the holder and the substrate at the first measurement position, the first true misalignment amount being obtained from a detection value detected by the first measurement unit and an amount of thermal displacement of the holder; conveying the substrate held by the holder toward a second stage so as to pass through the second measurement unit, and measuring a second true misalignment amount between the holder and the substrate at the second measurement position, the second true misalignment amount being obtained from a detection value detected by the second measurement unit and an amount of thermal displacement of the holder; reflecting a difference between the first true deviation amount and the second true deviation amount in a physical model that estimates a thermal displacement amount at the second measurement position, and correcting the physical model so as to reduce a model error; calculating a position correction amount of the holder on the second stage from a thermal displacement amount of the holder at the second measurement position estimated by the corrected physical model, a deviation amount of the holder and the substrate which is a detection value of the second measurement unit, and a thermal displacement amount of the holder on the second stage; controlling the substrate transport mechanism to correct the position of the holder based on the amount of position correction, and transferring the substrate on the holder to a second stage; The substrate transport method includes:

2. 2. The substrate transport method according to claim 1, wherein correcting the physical model comprises adding a correction term reflecting a difference between the second true deviation amount and the first true deviation amount to an initial physical model.

3. 3. The substrate transport method according to claim 2, further comprising the steps of: calculating a difference between the second true deviation amount and the first true deviation amount; and adding half the value of the difference to the initial physical model of the thermal displacement amount at the second measurement position to obtain the corrected physical model.

4. 2. The substrate transport method of claim 1, further comprising the steps of: creating a physical model by adding an error factor expressed as a function of temperature that is not included in an initial physical model for estimating the amount of thermal displacement at the second measurement position and an initial physical model for estimating the amount of thermal displacement at the first measurement position, changing numerical values ​​of physical quantities in the physical model to which the error factor has been added and performing fitting so that (the second true deviation amount) - (the first true deviation amount) = 0, thereby estimating the physical quantities, and determining the corrected physical model of the amount of thermal displacement of the holding part at the second measurement position.

5. 5. The substrate transport method according to claim 4, further comprising the steps of: creating a physical model by adding error factors expressed as a function of temperature that are not included in an initial physical model for estimating the thermal displacement amount of the holding part at the second stage to the initial physical model for estimating the thermal displacement amount of the holding part at the second stage; and determining a corrected physical model of the thermal displacement amount of the holding part at the second stage by using physical quantities used in determining the corrected physical model of the thermal displacement amount of the holding part at the second measurement position as true values.

6. 6. The substrate transport method according to claim 4, further comprising storing the estimated physical quantity and temperature as a pair in a storage unit.

7. The substrate transport method according to claim 1 , wherein the substrate transport mechanism has a multi-joint structure including a plurality of arms and a motor for rotating the plurality of arms.

8. a substrate transport mechanism having a holder for holding a substrate and transporting the substrate from the first stage to the second stage; a first measurement unit that measures a position of a substrate at a first measurement position near the first stage; a second measurement unit that measures a position of the substrate at a second measurement position near the second stage; A control unit for controlling the substrate transport mechanism, The control unit is receiving the substrate on the first stage by the holder; causing the substrate held by the holder to pass through a first measurement unit, and measuring a first true misalignment amount between the holder and the substrate at the first measurement position, the first true misalignment amount being obtained from a detection value detected by the first measurement unit and an amount of thermal displacement of the holder; conveying the substrate held by the holder toward a second stage so as to pass through the second measurement unit, and measuring a second true misalignment amount between the holder and the substrate at the second measurement position, the second true misalignment amount being obtained from a detection value detected by the second measurement unit and an amount of thermal displacement of the holder; reflecting a difference between the first true deviation amount and the second true deviation amount in a physical model that estimates a thermal displacement amount at the second measurement position and that is stored in the control unit, thereby correcting the physical model so as to reduce a model error; calculating a position correction amount of the holder on the second stage from a thermal displacement amount of the holder at the second measurement position estimated by the corrected physical model, a deviation amount of the holder and the substrate which is a detection value of the second measurement unit, and a thermal displacement amount of the holder on the second stage; controlling the substrate transport mechanism to correct the position of the holder based on the amount of position correction, and transferring the substrate on the holder to a second stage; A substrate transport system that executes the above.

9. 9. The substrate transport system according to claim 8, wherein the corrected physical model is obtained by adding a correction term reflecting a difference between the second true deviation amount and the first true deviation amount to an initial physical model.

10. 10. The substrate transport system of claim 9, wherein the corrected physical model is obtained by calculating a difference between the second true deviation amount and the first true deviation amount, and adding 1 / 2 of the difference to the initial physical model of the thermal displacement amount at the second measurement position.

11. 9. The substrate transport system of claim 8, wherein the control unit creates a physical model by adding an error factor expressed as a function of temperature that is not included in an initial physical model for estimating the amount of thermal displacement at the second measurement position and an initial physical model for estimating the amount of thermal displacement at the first measurement position, changes numerical values ​​of physical quantities in the physical model to which the error factor has been added and performs fitting so that (the second true displacement amount) - (the first true displacement amount) = 0, and estimates the physical quantities, thereby obtaining the corrected physical model of the amount of thermal displacement of the holding part at the second measurement position.

12. 12. The substrate transport system of claim 11, wherein the control unit creates a physical model by adding error factors expressed as a function of temperature that are not included in an initial physical model for estimating the thermal displacement amount of the holding part at the second stage to the initial physical model for estimating the thermal displacement amount of the holding part at the second stage, and determines a corrected physical model of the thermal displacement amount of the holding part at the second stage by using physical quantities used in determining the corrected physical model of the thermal displacement amount of the holding part at the second measurement position as true values.

13. 13. The substrate transfer system according to claim 11, wherein the control unit causes the estimated physical quantity and temperature to be stored as a pair in a storage unit of the control unit.

14. The substrate transport system according to claim 8 , wherein the substrate transport mechanism has a multi-joint structure including a plurality of arms and a motor for rotating the plurality of arms.

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