Focal Plane Array System for FMCW LiDAR

Abstract

A LiDAR system (e.g., a Frequency Modulated Continuous Wave (FMCW) LiDAR system) includes a focal plane array (FPA). The FPA system includes a coherent pixel array (CPA) and a diffraction grating stack (DGS). The CPA includes coherent pixels (CPs), each configured to emit coherent light. The DGS includes at least one diffraction grating positioned to diffract the coherent light emitted from the CPA into one or more light beams into the environment. Each of the one or more light beams is emitted at a specific angle, the specific angle being based in part on the position of the CP that generated the coherent light forming the one or more beams.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority under 35 U.S.C. §119(e) to U.S. Provisional Application No. 62 / 879,382, filed July 26, 2019, and U.S. Provisional Application No. 62 / 879,383, filed July 26, 2019, the entire disclosures of which are incorporated herein by reference.

[0002] The present disclosure relates generally to Frequency Modulated Continuous Wave (FMCW) Light Detection and Ranging (LiDAR), and more particularly to focal plane array systems for FMCW LiDAR systems. [Background technology]

[0003] Conventional LiDAR systems use mechanical moving parts and bulk optical lens elements (i.e., refractive lens systems) to steer the laser beam and are too bulky, expensive and unreliable for many applications (e.g., automotive). Summary of the Invention [Means for solving the problem]

[0004] A lens-free focal plane array (FPA) system for a LiDAR system. The LiDAR system may be, for example, an FMCW LiDAR system. The FPA system emits one or more light beams into an environment. The one or more beams reflect and / or scatter from objects in the environment and are detected by the FPA system. The LiDAR system uses the detected return light to generate depth information that describes the environment. The FPA system includes a coherent pixel array (CPA) and a diffraction grating stack (DGS). The CPA includes multiple coherent pixels (CPs). The CPs may be arranged in a 1D or 2D array. The CPs emit coherent light and also receive return light. The DGS includes one or more diffraction gratings arranged in series. The DGS may be composed of a thin non-periodic grating that collimates the light emitted by each CP in the CPA array. The DGS directs the coherent light emitted by the CPA into the environment as one or more light beams. In some embodiments, the DGS also collimates the light emitted from the CP of the CPA. The one or more light beams are each emitted at a specific output angle, the specific output angle being based in part on the location of the CP that generated the coherent light forming the one or more beams. In some embodiments, the specific output angle is unique for each CP, and the light from each CP is output by the DGS as a light beam at an angle unique to that CP.

[0005] The FPA system can scan one or more beams in 1D and / or 2D by selectively activating different CPs of the CPA. Depending on the location of the pixels in the CPA, the collimated beams exiting the DGS propagate at different output angles from each other. Thus, each CP has a unique position with respect to the DGS, and in some embodiments, the DGS is positioned to diffract the coherent light emitted from each individual CP to form a corresponding light beam that is output from the DGS at a unique angle. This effect allows the LiDAR beam to be steered across the environment being probed. In this way, the FPA system can be configured to scan one or more light beams across a portion (e.g., part) or the entire field of view of the FPA system. The FPA system can scan one or more light beams in one or two dimensions. Conversely, a light beam that propagates to the DGS at a particular return angle is focused by the DGS to a spot on the CPA. For example, the CP that emitted the beam can be the CP that receives the reflected / scattered beam.

[0006] In some embodiments, the FPA system includes optical elements (e.g., Microprism arrays, Blazed Gratings, etc.) to convert Off-Axis Light emitted from the CP of the CPA into On-Axis Light (e.g., with a main emission axis substantially perpendicular to the CPA array). In this way, the Off-Axis Light emitted from the CP can be diffracted to be emitted on-axis, and the on-axis light is provided to the DGS. And conversely, light reflected from the local environment can be detected from the CP after passing through the DGS and the optical elements.

[0007] In some embodiments, the FMCW LiDAR system includes an FPA system. The FPA system includes a CPA and a DGS. The CPA includes a CP, each CP configured to emit coherent light. The DGS includes at least one diffraction grating positioned to diffract the coherent light emitted from the CPA into one or more light beams into the environment. And, each of the one or more light beams is emitted at a particular angle, the particular angle being based in part on the position of the CP that generated the coherent light forming the one or more beams.

[0008] In some embodiments, a DGS of an FMCW LiDAR system is described that includes at least one diffraction grating positioned to diffract coherent light emitted from a coherent pixel (CP) of a coherent pixel array (CPA) into one or more light beams into the environment, each of the one or more light beams being emitted at a particular angle, the particular angle being based in part on the respective positions of the CPs that generated the coherent light forming the one or more beams. [Brief description of the drawings]

[0009] Other advantages and features of the embodiments of the present disclosure will become more clearly apparent from the following detailed description and appended claims taken in conjunction with the accompanying drawing examples.

[0010] [Figure 1] 1 illustrates a diagram of an FPA system for LiDAR beam steering applications based on a combination of a CPA with a DGS in accordance with some embodiments.

[0011] [Diagram 2] 1 illustrates a LiDAR system including an FPA system in accordance with one or more embodiments.

[0012] [Diagram 3] 1 is an FPA that includes a DGS that includes a blazed diffraction grating with non-uniform grating periodicity in accordance with one or more embodiments.

[0013] [Figure 4] 1 is an FPA including a DGS that includes a numerically designed multi-stage grating in accordance with one or more embodiments.

[0014] [Diagram 5] 1 is a diagram of a microprism array positioned on top of a CPA in accordance with one or more embodiments.

[0015] [Figure 6] 1 is a diagram of a blazed grating positioned on top of a CPA in accordance with one or more embodiments.

[0016] [Figure 7] 1 illustrates an exemplary microprism array (or equivalently a blazed diffraction grating) arranged in two dimensions according to one or more embodiments.

[0017] [Figure 8] 1 illustrates a self-contained version of an optical element according to one or more embodiments.

[0018] [Figure 9] FIG. 1 illustrates a schematic diagram of a Switchable Coherent Pixel Array FMCW LiDAR chip in accordance with one or more embodiments.

[0019] [Figure 10a] 1 illustrates four versions of a coherent pixel in accordance with one or more embodiments. [Figure 10b] 1 illustrates four versions of a coherent pixel in accordance with one or more embodiments. [Figure 10c] 1 illustrates four versions of a coherent pixel in accordance with one or more embodiments. [Figure 10d] 1 illustrates four versions of a coherent pixel in accordance with one or more embodiments. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] The LiDAR system determines depth information about the field of view of the system (e.g., distance, velocity, acceleration for one or more objects). The LiDAR system may be an FMCW LiDAR system. The LiDAR system includes an FPA system.

[0021] The FPA system emits one or more light beams into the environment. The FPA system may be configured to scan the one or more light beams over a portion (e.g., a portion) or the entire field of view of the FPA system. The FPA system may scan the one or more light beams in one or two dimensions. The FPA system does not use lenses to steer and / or shape the one or more beams. The one or more beams reflect and / or scatter from objects in the environment and are detected by the FPA system. The FPA system includes a switchable CPA and a DGS. The CPA includes a CP, each of which is configured to emit coherent light. The DGS includes one or more diffraction gratings arranged in series (e.g., non-periodic). Additionally, in some embodiments, the DGS may also include additional diffraction gratings arranged in parallel. The one or more diffraction gratings are positioned to direct the coherent light emitted from the CPA into the environment as one or more light beams (e.g., through diffraction). In some embodiments, the DGS also collimates the light emitted by the CP. The one or more light beams are then each emitted at a specific angle, the specific angle being based in part on the location of the CP that generated the coherent light forming the one or more beams. Thus, each CP has a unique location with respect to the DGS, and in some embodiments, the DGS is positioned to diffract the coherent light emitted from each individual CP to form a corresponding light beam output from the DGS at a unique angle. In this manner, the FPA system can scan one or more beams in 1D and / or 2D across the field of view by selectively activating different CPs of the CPA. The return light is incident on the DGS at a specific return angle, and the DGS directs the return light to a specific CP as a function of the return angle of the return light. Thus, if the output angle of a beam composed of light from a CP matches the return angle of the return light, the DGS directs the return light to that same CP.

[0022] In some embodiments, the FPA system also includes an optical element (e.g., a Microprism array, a Blazed Grating, etc.) to convert the off-axis light emitted from the CP of the CPA to on-axis light (e.g., light whose main emission axis is substantially perpendicular to the CPA array). In some embodiments, light propagating perpendicular to the CPA is substantially parallel to the optical axis of the CPA. In this way, the off-axis light emitted from the CP can be diffracted to be emitted on-axis, and the on-axis light is provided to the DGS. And conversely, light reflected from the local environment can be detected from the CP after passing through the DGS and the optical element. The optical element can be positioned between the CPA and the DGS, and the optical element is positioned to redirect the off-axis light emitted by the CPA to be on-axis, and the on-axis light is substantially parallel to the optical axis of the CPA.

[0023] The CP uses the return light to generate one or more output signals that are used to determine depth information about the field of view of the LiDAR system. The depth information indicates the range to various surfaces within the field of view of the LiDAR system and may also include information describing the velocity of objects within the field of view of the LiDAR system.

[0024] It should be noted that the FPA system can steer light in at least one dimension. And, in some embodiments, the CP is arranged in two dimensions to allow the FPA system to steer the light beam in two dimensions. Being able to steer the beam without moving parts can alleviate form factor, cost, and reliability issues found in many traditional mechanically driven LiDAR systems. Furthermore, the DGS of the FPA system is a cost-effective, lightweight, and small form factor alternative to lenses in FPA-based LiDAR systems. The DGS also adds an additional degree of freedom higher than that offered by traditional lenses, potentially enabling higher performance than could otherwise be achieved.

[0025] FIG. 1 shows a diagram of an FPA system 111 according to some embodiments. The FPA system 111 includes a CPA 100 and a DGS 110 for LiDAR. The CPA 100 includes multiple CPs 102. The CPA 100 can be, for example, a 1D or 2D array of individual CPs. Each CP emits a light beam perpendicularly toward the DGS 110, and the characteristics of this beam can vary depending on the position of the CP (e.g., as shown by beams 103, 104). The beams 103, 104 propagate through the DGS 110 and are emitted at individual angles depending on the position of the source CP within the CPA 100. For example, when the CP 101 is turned on, the DGS 110 converts the incoming beam 103 into a collimated outgoing beam 107 (shown in solid lines). In contrast, light from the CP 102 is shown as beam 104 (shown in dotted lines) that the DGS 110 outputs as a collimated outgoing beam 108. At any given time, one or more CPs may be active in the array.

[0026] The DGS 110 is composed of one or more aperiodic gratings 105. Generally, the DGS 110 includes multiple aperiodic gratings 105. In some embodiments where a small number of CPs are positioned near the central axis of the DGS 110, a single aperiodic grating can be used. The aperiodic gratings 105 in the DGS 110 can be arranged in series and / or in parallel. For example, FIG. 1 shows multiple aperiodic gratings 105 arranged in series. In other embodiments, the DGS 110 can include multiple aperiodic gratings arranged in parallel, with at least a portion of the multiple aperiodic gratings also arranged in series. For example, the DGS 110 can include a central region centered on the optical axis of the DGS 110, the central region surrounded by a peripheral region. In some embodiments, the central region can include a first set of one or more aperiodic gratings, and the peripheral region can include another set of aperiodic gratings arranged in series with each other. This arrangement can cause light passing through the peripheral region to be manipulated differently than light passing through the central region. For example, the central region may generate a smaller range of beam angles (e.g., output beam angles) than the range of beam angles generated by the peripheral region. In other embodiments, the number of non-periodic gratings in the central region is greater than the number of non-periodic gratings in the peripheral region. This can be useful, for example, to improve the aperture of the beam emitted from the CP near the central region in a cost-effective manner.

[0027] Such a grating may have a continuously modulated phase or a set of discrete phase levels. The grating 105 may be fabricated from a material with a low refractive index, such as glass, or a material with a high refractive index, such as silicon or other semiconductors. The grating may take a variety of forms, such as a Surface Relief Grating, a Sinusoidal Grating, a Blazed Grating, a Step Grating, or some combination of these. It may be fabricated using Nano-Imprint Lithography, Deep Ultra Violet Lithography, or other fabrication techniques available to one of ordinary skill. In embodiments where there are multiple gratings in the DGS 110, the gratings may be separated by a medium 106. This medium may be air or other high refractive index material such as a polymer or glass, as dictated by the system parameters. One or more non-periodic gratings 105 are arranged in series with each other in the CPA 100.

[0028] One of ordinary skill in the art can design the diffraction grating of the DGS 110 to maximize the power coupled into the collimated beams from the different CPs in the CPA 100. It should be noted that the FPA system 111 in FIG. 1 shows light emitted from the FPA system 111 into the environment, and the light may be reflected / scattered back to the FPA system 111 from within the environment as return light (not shown). In some embodiments, the DGS 110 allows the return light to be returned to the emitting CP (e.g., return light from beam 107 is detected by CP 101, and return light corresponding to beam 108 is detected by CP 102). For example, in the transmit direction, light emitted by the CP passes through the DGS 110. As the beam propagates and diffracts through the stack, it is made into a collimated beam at a particular angle (e.g., output beam angle). When this beam reflects off the (diffuse) surface, the light returns to the DGS at the same angle (e.g., return beam angle) as the return light, and thus there is an approximately "collimated" wave striking the DGS 110 along the return path. In the return direction, the DGS 110 refocuses the return light in the opposite manner onto the CP. And if the reflecting surface is an ideal retroreflector, the return light is nearly perfectly refocused onto the emitting CP. Thus, each emitting CP also detects the return light it emitted - this is referred to herein as a "Reciprocal System." In this way, one or more CPs emit light that the DGS 110 diffracts into one or more light beams, and the DGS 110 diffracts the corresponding return light into one or more CPs. One of ordinary skill can design the gratings in the DGS to work optimally for all CPs in the CPA.

[0029] FIG. 2 illustrates a LiDAR system including an FPA system according to one or more embodiments. The FPA system may be the FPA system 111 described above with reference to FIG. 1. For example, the FPA system may be a reciprocal system. The FPA system includes a DGS 200, an optional optical element 202, and a CPA 201. The DGS 200 may be substantially the same as the DGS 110, and the CPA 201 may be substantially the same as the CPA 100. In FIG. 2, the DGS 200 receives input from the CPA 201, which may selectively employ an optical element 202 (e.g., a prism, a microprism array, a diffraction grating, etc.) to correct the output beam angle. It should be noted that in some cases, the optical element 202 may be built into the CPA 201 (e.g., as described below in connection with FIG. 8). The DGS 200 outputs beams at various angles 207. The CP in the CPA 201 is controlled by an FPA driver 205. One or more individual CPs within the CPA 201 can be activated to emit and receive light. The light emitted by the CPA 201 is generated by a Q-channel laser array 204. The Q-channel laser array 204 is a laser array having Q parallel channels, where Q is an integer. The Q-channel laser array 204 can be directly integrated with the CPA 201 or can be a separate module packaged together with the CPA 201. The Q-channel laser array 204 is controlled by a laser controller 206. The laser controller 206 receives control signals from the LiDAR processing engine 203 via a digital-to-analog converter 208. The processing also controls the FPA driver 205, which transmits and receives data from the CPA 201.

[0030] The LiDAR processing engine 203 includes a microcomputer 209 that processes data from the FPA system and sends control signals to the FPA system via an FPA driver 205 and a laser controller 206. The LiDAR processing engine 203 also includes an N-channel receiver 210. Signals are received by the N-channel receiver 210 and the signals are digitized using a set of M-channel analog-to-digital converters (ADCs) 211.

[0031] FIG. 3 is an FPA system 311 including a DGS 310 including a blazed grating with non-uniform grating periodicity according to one or more embodiments. The FPA system 311 is one embodiment of the FPA system 111. The FPA 311 includes a CPA 300 and a DGS 310. Although not shown, it should be noted that the FPA 311 may also include an optical element (e.g., a prism, a prism array, or another grating) between the CPA 300 and the DGS 310 that converts off-axis light emitted from the CP of the CPA to on-axis light (e.g., light whose main emission axis is perpendicular to the CPA). In some embodiments, light propagating perpendicular to the CPA is substantially parallel to the optical axis of the CPA. The optical element may also refract on-axis return light (a portion of the beam reflected from the environment) to become off-axis light. As shown, the CP 301 emits an expanding light beam 303 that propagates through the DGS 310. The DGS 310 includes a plurality of blazed gratings 305 arranged in series. The plurality of blazed gratings 305 generate a collimated light beam 306 that propagates perpendicularly from the DGS 310. In this embodiment, the blazed gratings each have a periodicity that evolves monotonically (i.e., increases generally, but does not decrease at certain portions) with distance from the grating center to mimic the behavior of a conventional bulk optic lens element. It should be noted that conventional bulk optic lens elements have many disadvantages compared to the DGS embodiments described herein (e.g., are relatively heavier, have a larger form factor, and are more expensive). Similarly, the off-center second CP 302 in the CPA 300 emits a light beam 304 that propagates through the DGS 310, which converts the light into an oblique collimated light beam 307. It should be noted that the light from different CPs has different beam angles (e.g., output beam angles) at the output of the DGS 310. Thus, the FPA system can steer the beam in all environments by selectively activating different CPs.

[0032] 3 shows light emitted from FPA system 311 into the environment, it should be noted that light may be reflected / scattered back from the environment to FPA system 311 as return light (not shown). In some embodiments, the stack of blazed gratings 305 is designed to be a reciprocal system where the return light is returned to the emission CP (e.g., return light from beam 306 is detected by CP 301, and return light corresponding to beam 307 is detected by CP 302).

[0033] FIG. 4 is an FPA system 411 including a DGS 410 including a numerically designed multi-stage grating according to one or more embodiments. The FPA system 411 is one embodiment of the FPA system 111. The FPA 411 includes a CPA 400 and a DGS 410. Although not shown, it should be noted that the FPA 411 may also include an optical element (e.g., a prism, a prism array, or another diffraction grating) between the CPA 400 and the DGS 410 that converts off-axis light emitted from the CP of the CPA to on-axis light (e.g., light whose main emission axis is perpendicular to the CPA). In some embodiments, the light propagating perpendicular to the CPA is substantially parallel to the optical axis of the CPA. The optical element may also refract the on-axis return light (a portion of the beam reflected from the environment) to become off-axis light. As shown, the CP 401 emits an expanding light beam 403 that propagates through the DGS 410. The DGS 410 includes multiple multi-stage gratings 405 arranged in series. The multi-level grating has a non-critical thickness distribution that is designed using methods of numerical optimization. Similarly, a second pixel located off-center of the CPA 402 emits a light beam 404 that propagates through the DGS 410. The DGS 410 converts the light into an oblique collimated light beam 407.

[0034] 4 shows light emitted from FPA system 411 into the environment, it should be noted that the light may be reflected / scattered back from the environment to FPA system 411 as return light (not shown). In some embodiments, DGS 410 is a reciprocal system that returns the return light to the emitting CP (e.g., return light from beam 406 is detected by CP 401, and return light corresponding to beam 407 is detected by CP 402).

[0035] 5 is a diagram of a microprism array 502 positioned on top of a CPA 100 in accordance with one or more embodiments. The microprism array 502 is one embodiment of the optical element 202. The microprism array 502 includes an array of transparent (at least over the band of light emitted by the CPA 100) triangular elements made of a material having a refractive index higher than that of the surrounding medium (e.g., air). The CPA 100 includes an array of individual CPs. As previously described, the CPs of the CPA 100 can be turned on and off one at a time and / or in groups.

[0036] Each CP includes a light-emitting region that emits light according to an emission distribution. For example, CP 101 has an emission distribution with a primary emission axis 520 and off-axis boundaries 525, 530. The primary emission axis 520 is the direction along which the emission region emits the strongest light. The emission distribution can be rotationally symmetric about the primary emission axis 520 or rotationally asymmetric.

[0037] As shown, each CP emits an oblique light beam with its main emission axis at an angle 505 - so that the light emitted by each of the CPs is off-axis light. Off-axis light is light whose main emission axis is not parallel to an axis perpendicular to the CPA 100. In some embodiments, the axis may be the optical axis of the FPA system. In contrast, on-axis light is light whose main emission axis is substantially parallel to an axis. As shown, the angle 505 is the same for each CP, but it should be noted that in other embodiments, some or all of the angles may differ from one another. Each microprism of the microprism array 502 includes one or more facets 504. Each CP overlaps with at least one facet of the microprism. It should be noted that in some embodiments, a single microprism can overlap multiple CPs. The microprisms can be configured (e.g., through the material of the microprism and the shape of one or more facets 504) such that off-axis light is redirected to on-axis light, and similarly, on-axis light (i.e., return light) is redirected to off-axis light (i.e., enters the CP).

[0038] 6 is a diagram of a blazed grating 602 positioned on top of CPA 100 in accordance with one or more embodiments. Blazed grating 602 is one embodiment of optical element 202. Blazed grating 602 performs the same function as microprism array 502, except that it operates under the principles of diffraction instead of refraction.

[0039] FIG. 7 illustrates an exemplary microprism array (or equivalently, a blazed diffraction grating) arranged in two dimensions according to one or more embodiments. The microprism array can be an embodiment of the optical element 202 and / or the microprism array 502. In 700, the microprism array is arranged in a 1D linear array that is compatible with a regular grid of identically diagonal CPs. In 701, the microprism array is radially symmetric, which is compatible with a radially symmetric grid of CPs. In 702, the position and orientation of the microprisms is arbitrary, which is compatible with any arrangement of CPs. For example, each microprism shown in 702 can cover one or more corresponding CPs, and in some cases, each microprism in 702 covers a single corresponding CP. In all three examples, the output beams propagate at the same on-axis angle.

[0040] FIG. 8 illustrates a self-contained version of an optical element according to one or more embodiments. In this case, a coherent pixel array 800 (e.g., one embodiment of CPA 100) includes a CP 801 embedded in a high index medium 802. The optical element is a monolithic material that overmolds the coherent pixel array 800, and the surface 804 of the monolithic material is angled with respect to the CP 801 such that the light emitted by the CP 801 is refracted into an on-axis light. The CP emits a light beam 803 that propagates at a small angle. The beam strikes a polished and angled surface 504 at a small angle, causing the transmitted beam 805 to propagate vertically (i.e., be substantially on-axis). In other embodiments, the angle of the surface may be such that the transmitted beam 805 is emitted at some other target angle.

[0041] FIG. 9 shows a schematic diagram of a Switchable Coherent Pixel Array (SCPA) FMCW LiDAR chip 911 according to one or more embodiments. The LiDAR chip is an optical integrated circuit. The chip may include multiple basic functional subarrays 900. Each subarray 900 includes an optical input / output (I / O) port 902, a selective 1-K optical splitter 903, and one or more SCPAs 901, where K is an integer. The 1-K optical splitters 903 may be passive or active. Each optical I / O is supplied by a frequency modulated light source provided by an off-chip or on-chip laser. Optical power can be distributed on-chip via selective 1-K optical splitters to reduce the number of optical I / Os. In the illustrated embodiment, each output of the 1-K optical splitters 903 is supplied to a corresponding SPCA 901. In the illustrated embodiment, each SCPA 901 includes M coherent pixels 905 and an optical switch network 904, where M is an integer. It should be noted that in some cases, one or more of the optical switch networks 904, optional 1-K optical splitters 903, or some combination thereof may simply be referred to as an optical switch. The optical switch is configured to switchably couple the input port 902 to an optical antenna in the coherent pixel, thereby forming an optical path between the input port and the optical antenna. The optical switch may include multiple active optical splitters. In some embodiments, the optical switch optically couples the frequency modulated laser signal to each of the optical antennas one at a time during a scanning period of the FMCW transceiver.

[0042] The optical switch network 904 selects one or more of the M coherent pixels to transmit and receive frequency modulated light (FM Light) for distance measurement and detection. The coherent pixels may be physically arranged on the chip in a one-dimensional array (e.g., a linear array) or a two-dimensional array (e.g., a rectangular or regular array, e.g., a non-random arrangement such as a grid). In some embodiments, the selected coherent pixels may transmit light into free space, receive the returned optical signal, perform coherent detection, and directly convert the optical signal to an electrical signal for digital signal processing. It should be noted that the received optical signal does not propagate again through the switch network so that it can be detected, but instead the output is individually routed (although not shown in the illustrated embodiment), which reduces losses and therefore improves signal quality.

[0043] 10a-10d show four versions of a coherent pixel according to one or more embodiments. The four versions of the coherent pixel may be, for example, the embodiments of the coherent pixel described above in FIG. 9. In FIG. 10a and FIG. 10b, light from an optical switch network (e.g., optical switch network 904) is provided to an optical input port 1003 of the coherent pixel. A bidirectional optical 2×2 splitter 1002 splits the light into two output ports: TX signal 1005 and local oscillator (LO, Local Oscillator) 1006. The TX signal 1005 is transmitted off-chip using an optical antenna 1000. An optical antenna is a device that launches light from an on-chip waveguide into free space or couples light from free space into an on-chip waveguide, such as a grating coupler, edge coupler, integrated reflector, or any spot size converter. An optical antenna may be polarization sensitive, typically with a much higher launch / coupling efficiency for light with one particular polarization (e.g., TE). The antenna is reciprocal, and therefore collects the reflected beam from the object under measurement and sends it back to the bidirectional 2x2 splitter 1002, which splits it again between ports 1004, 1006. The bidirectional optical 2x2 splitter 1002 acts as a "Pseudo Circulator" in such a monostatic configuration where the transmitter and receiver are collocated. The received signals from ports 1004 and LO 1006 are mixed for coherent detection by an optical mixer, which can be a balanced 2x2 optical combiner 1001 as in FIG. 10a or an Optical Hybrid 1009 as in FIG. 10b. Finally, a pair of Photo-Diodes (PDs) 1007 in FIG. 10a and four PDs in FIG. 10b convert the optical signals to electrical signals for beat tone detection. The version in FIG. 10a is called the Balanced Photo-Diode (BPD) version, and the version in FIG. 10b is called the Hybrid version.The hybrid version provides in-phase and quadrature outputs (I / Q) that can be used to resolve velocity-range ambiguity in FMCW LiDAR systems or to enable advanced DSP algorithms. Using a bidirectional optical 2×2 splitter as a “pseudo circulator” can eliminate having an individual circulator for every single pixel, which is impractical for Large-Scale Arrays with hundreds of pixels. Thus, the coherent pixel may significantly reduce the cost and form factor with a signal-to-noise ratio (SNR) penalty of up to 6 dB (since some of the induced optical power is not available for coherent detection). For example, the received optical signal can be split between port 1003 and port 1004, the latter of which is used for coherent detection. The coherent pixel design shown in Figures 10c and 10d solves such limitations by introducing a polarization splitting antenna 1010 into the new structure. Light from the optical switch network is provided to the optical input port 1003 of the coherent pixel. An optical splitter 1012 splits the light into two output ports: TX signal 1015 and local oscillator 1014 (LO). The TX signal 1015 is directly transmitted from the chip using a polarization-splitting optical antenna 1010 with one polarization (e.g., TM). The antenna collects the beam reflected from the object under measurement and couples the orthogonal polarization (e.g., TE) into a waveguide 1013, which sends it directly to the optical mixer. In this case, the optical signal received by the antenna is not further split by an additional splitter or "pseudo circulator". The signals received from ports 1013 and LO 1014 are mixed for coherent detection by an optical mixer, which can be a balanced 2x2 optical coupler 1001 as in Fig. 10c, or a hybrid optical element 1009 as in Fig. 10d. Finally, a pair of photodiodes (PDs) 1007 in Fig. 10c and four PDs in Fig. 10d convert the optical signal into an electrical signal for beat tone detection.This design implements a highly efficient integrated circulator for every single coherent pixel, enabling an ultra-sensitive on-chip monostatic FMCW LiDAR, the details of which are further discussed in Figures 8-10. In some embodiments, in conjunction with Figure 2, the coherent pixels of Figures 10a-10d provide that each of the multiple optical antennas has a separate splitter, with each splitter coupled along a separate optical path between an optical switch and a corresponding antenna. Additional configuration information

[0044] It should be noted that the drawings and the foregoing description relate to preferred embodiments by way of example only, and as previously mentioned, alternative embodiments of the structures and methods disclosed herein are readily recognized as viable alternatives that may be employed without departing from the principles of the claims.

[0045] Although the detailed description contains many details, these should not be interpreted as limiting the scope of the present invention, but merely as illustrating different examples. It should be understood that the scope of the present disclosure includes other embodiments not described in detail above. Various other modifications, changes and changes that are obvious to those of ordinary skill in the art may be made in the arrangement, operation and details of the methods and apparatus disclosed herein without departing from the spirit and scope defined in the appended claims. Therefore, the scope of the present invention should be determined by the appended claims and their legal equivalents.

[0046] Alternative embodiments are implemented in computer hardware, firmware, software and / or combinations thereof. The embodiments may be implemented as a computer program product substantially embodied in a machine-readable storage device for execution by a programmable processor, and the method steps may be performed by the programmable processor executing an instruction program to perform functions by operating on input data and generating output. The embodiments may advantageously be implemented in one or more computer programs executable on a programmable system including at least one programmable processor coupled to receive data and instructions from, and transmit data and instructions from, a data storage system, at least one input device and at least one output device. Each computer program may be implemented in a high level procedural or object-oriented programming language, or assembly or machine language as appropriate, and in any case the language may be a compiled or interpreted language. Suitable processors include, by way of example, general purpose and special purpose microprocessors. Typically, the processor receives instructions and data from a read-only memory (ROM) and / or a random access memory (RAM). Typically, a computer will include one or more mass storage devices for storing data files; such devices include magnetic disks, such as internal hard disks and removable disks, magneto-optical disks, and optical disks. Suitable storage devices for substantially implementing computer program instructions and data include, by way of example, all forms of non-volatile memory, including semiconductor memory devices, such as EPROM, EEPROM, and flash memory devices, magnetic disks, such as internal hard disks and removable disks, magneto-optical disks, and CD-ROM disks. All of the foregoing may be supplemented by, or integrated with, Application-Specific Integrated Circuits (ASICs) and other forms of hardware.

Claims

1. 1. A focal plane array system for a frequency modulated continuous wave LiDAR system, comprising: a coherent pixel array including coherent pixels, each of said coherent pixels configured to emit coherent light; a grating stack including at least one grating positioned to diffract coherent light emitted from the coherent pixel array into one or more light beams into an environment, the one or more light beams each being emitted at a particular angle based in part on a position of the coherent pixel that generated the coherent light forming the one or more beams; the one or more light beams reflect off objects in the environment to form return light; A focal plane array system, wherein the grating stack is positioned to diffract the return light to one or more coherent pixels that generated the one or more beams.

2. 10. The focal plane array system of claim 1, wherein said at least one grating is a non-periodic grating.

3. 3. The focal plane array system of claim 2, wherein the at least one diffraction grating is a blazed grating, the at least one diffraction grating having a periodicity that evolves monotonically with distance from a center of the at least one diffraction grating.

4. 3. The focal plane array system of claim 2, wherein the at least one diffraction grating is a multi-step grating, the at least one diffraction grating having a periodicity that evolves monotonically with distance from a center of the at least one diffraction grating.

5. 2. The focal plane array system of claim 1, wherein the at least one diffraction grating is selected from the group consisting of a surface relief grating, a sinusoidal grating, a blazed grating, and a step grating.

6. 2. The focal plane array system of claim 1, wherein the one or more beams are collimated, each coherent pixel having a unique position with respect to the grating stack, the grating stack positioned to diffract coherent light emitted from each individual coherent pixel to form a corresponding light beam output from the grating stack at a unique angle.

7. 10. The focal plane array system of claim 1, wherein the focal plane array system is configured to scan the one or more light beams over a portion of a field of view of the focal plane array system.

8. 8. The focal plane array system of claim 7, wherein the coherent pixel array is a 2D array, and the focal plane array system is configured to scan the one or more light beams in two dimensions.

9. the light emitted by the coherent pixels of the coherent pixel array is off-axis light; 2. The focal plane array system of claim 1, further comprising an optical element positioned between the coherent pixel array and the diffraction grating stack, the optical element positioned to redirect the off-axis light emitted by the coherent pixel array into on-axis light that is substantially parallel to an optical axis of the coherent pixel array.

10. 10. The focal plane array system of claim 9, wherein a first light beam of the one or more light beams is formed from light from the coherent pixels, the first light beam reflects off an object in the environment to form return light, the optical element receives the return light from the grating stack and redirects the received return light into off-axis light, the off-axis return light being detected from the coherent pixels.

11. 10. The focal plane array system of claim 9, wherein the optical element is a blazed diffraction grating, and light emitted from the coherent pixels is diffracted so as to be on-axis.

12. 10. The focal plane array system of claim 9, wherein the optical element is a monolithic material that overmolds the coherent pixel array, the surface of the monolithic material being oblique with respect to the coherent pixels such that light emitted by the coherent pixels is refracted so that it is on-axis.

13. 10. The focal plane array system of claim 9, wherein the optical element is a microprism array.

14. 14. The focal plane array system of claim 13, wherein the microprism array is an array of linear microprisms.

15. 14. The focal plane array system of claim 13, wherein the microprism array is an array of circular microprisms, the microprisms forming a series of rings, the coherent pixels in the coherent pixel array having a radial distribution pattern, and each microprism overlaps at least one coherent pixel in the coherent pixel array.

16. 14. The focal plane array system of claim 13, wherein each microprism in the microprism array overlaps a single coherent pixel in the coherent pixel array.

17. the light emitted by the coherent pixel array is off-axis light; 2. The focal plane array system of claim 1, further comprising an optical element positioned between the coherent pixel array and the diffraction grating stack, the optical element positioned to redirect the off-axis light emitted by the coherent pixel array into on-axis light that is substantially parallel to an optical axis of the coherent pixel array.

18. 20. The focal plane array system of claim 17, wherein the one or more light beams are formed from light from the coherent pixel array, the one or more beams reflect off objects in the environment to form return light, and the optical elements are positioned to redirect the return light received from the diffraction grating stack into off-axis light that is detected from the coherent pixels that generated the one or more beams.

Images