Actuator manufacturing method

Abstract

The actuator comprises a laminate including an elastomer layer and stretchable electrodes provided on both sides of the elastomer layer, and the laminate is prestrained by 50% or more in at least one direction. [Selected Figure] Figure 1

Description

[Technical field]

[0001] This technology uses actuators Ta's It relates to a manufacturing method. [Background technology]

[0002] It is known that thin film lamination is necessary for low-voltage operation of actuators. Patent Document 1 proposes a technology to apply pre-strain to an elastomer to control the direction of elastomer movement while reducing the thickness. Patent Document 2 also proposes a technology to form a laminate by rolling up a dielectric elastomer sheet with a thickness of several tens of μm, which is formed by a coating process. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2003-506858

[0004] [Patent Document 2] JP 2005-312230 A Summary of the Invention [Problem to be solved by the invention]

[0005] The purpose of this technology is to develop an actuator that can reduce the driving voltage. Ta's The present invention aims to provide a manufacturing method thereof. [Means for solving the problem]

[0007] In order to solve the above problems, The technology is a first step of forming a laminate by alternately laminating an electrode containing an elastomer and a conductive filler having an average size of 35 nm to 37 nm, and having a Young's modulus of 0.05 MPa to 10 MPa and a breaking strain of 200% to 1200%, and an elastomer layer ...%; The laminate thus formed is stretched in at least one direction. , due to the elastic deformation caused by the stretching A second step of applying a pre-strain of 50% or more; Laminate The entire periphery of In the second process, the film is stretched. By the holding part a third step of holding the having The average thickness of the elastomer layer is reduced to 10 μm or less by the second process. A method for manufacturing an actuator. Effect of the Invention

[0008] According to the present technology, it is possible to reduce the drive voltage of the actuator. Note that the effects described herein are not necessarily limited to those described herein, and may be any of the effects described in the present disclosure or effects different from those effects. [Brief description of the drawings]

[0009] [Figure 1] Fig. 1A is a perspective view showing an example of a configuration of an actuator according to a first embodiment of the present technology, Fig. 1B is a perspective view showing a state in which the pre-strain of the actuator of Fig. 1A is released. [Diagram 2] FIG. 2 is a perspective view showing an example of a configuration of an actuator according to a modified example of the first embodiment of the present technology. As shown in FIG. [Diagram 3] FIG. 3 is a cross-sectional view showing an example of a configuration of an actuator according to a second embodiment of the present technology. [Figure 4] Fig. 4A is a side view showing an example of the configuration of a laminate, and Fig. 4B is a cross-sectional view taken along line IVB-IVB in Fig. 4A. [Diagram 5]FIG. 5 is a perspective view showing an example of a configuration of a speaker according to a third embodiment of the present technology. [Figure 6] FIG. 6 is a perspective view showing an example of a configuration of a speaker according to a fourth embodiment of the present technology. [Figure 7] FIG. 7 is a block diagram showing an example of a configuration of an endoscope module according to a fifth embodiment of the present technology. As shown in FIG. [Figure 8] FIG. 8 is a graph showing the relationship between the amount of stretching of the laminate and the volume resistivity and film thickness. [Figure 9] FIG. 9 is a cross-sectional view taken along the height direction of an actuator according to a sixth embodiment of the present technology. [Figure 10] FIG. 10 is a cross-sectional view taken along a direction perpendicular to the height direction of an actuator according to a sixth embodiment of the present technology. [Figure 11] Fig. 11A is a plan view showing an example of a configuration of an actuator according to a seventh embodiment of the present disclosure, Fig. 11B is a cross-sectional view taken along line XIB-XIB in Fig. 11A. [Figure 12] FIG. 12 is a plan view showing an example of the configuration of a tactile presentation device according to an eighth embodiment of the present technology. [Figure 13] 13A and 13B are side views for explaining an example of the operation of the tactile presentation device according to the eighth embodiment of the present technology. [Figure 14] FIG. 14 is a plan view showing an example of a configuration of a tactile presentation device according to a modified example of the eighth embodiment of the present technology. [Figure 15] FIG. 15 is a schematic diagram showing an example of a configuration of a robot according to a ninth embodiment of the present technology. [Figure 16] Fig. 16A is a plan view illustrating the process for fabricating the actuators of Samples 5-1 to 5-5, and Fig. 16B is a plan view illustrating the process for fabricating the actuators of Samples 6-1 to 6-5. [Figure 17] Fig. 17A is a plan view for explaining a process for producing the actuators of Samples 5-1 to 5-5 and 6-1 to 6-5, and Fig. 17B is a cross-sectional view taken along line XVIIB-XVIIB in Fig. 17A. [Figure 18] Fig. 18A is a plan view for explaining a process for producing the actuators of Samples 5-1 to 5-5 and 6-1 to 6-5, and Fig. 18B is a cross-sectional view taken along line XVIIIB-XVIIIB in Fig. 18A. [Figure 19] Fig. 19A is a plan view showing a state of the actuators of Samples 5-1 to 5-5 and 6-1 to 6-5 when a voltage is applied, and Fig. 19B is a cross-sectional view taken along line XIXB-XIXB in Fig. 19A. [Figure 20] Fig. 20A is a graph showing the relationship between the biaxial stretching ratio and the rigidity, and Fig. 20B is a graph showing the relationship between the biaxial stretching ratio and the dielectric breakdown strength. [Figure 21] Fig. 21A is a graph showing the relationship between the uniaxial stretching ratio and the rigidity, and Fig. 21B is a graph showing the relationship between the uniaxial stretching ratio and the dielectric breakdown strength. [Figure 22] Fig. 22A is a plan view for explaining a process for producing the actuators of Samples 7-1 to 7-3, and Fig. 22B is a cross-sectional view taken along line XXIIB-XXIIB in Fig. 22A. [Diagram 23] Fig. 23A is a plan view for explaining a process for producing the actuators of Samples 7-1 to 7-3, and Fig. 23B is a cross-sectional view taken along line XXIIIB-XXIIIB in Fig. 23A. [Figure 24] FIG. 24 is a graph showing the relationship between the type of nanocarbon used in Samples 7-1 to 7-3 and the resistivity. [Diagram 25] Fig. 25A is a plan view for explaining a method for evaluating the conductivity of the actuators of Samples 8-1 to 8-4, and Fig. 25B is a cross-sectional view taken along line XXVB-XXVB in Fig. 25A. [Figure 26] Fig. 26A is a plan view for explaining a method for evaluating the conductivity of the actuators of Samples 8-1 to 8-4, and Fig. 26B is a cross-sectional view taken along line XXVIB-XXVIB in Fig. 26A. [Figure 27] Fig. 27A is a plan view for explaining a method for evaluating the conductivity of the actuators of Samples 8-1 to 8-4, and Fig. 27B is a cross-sectional view taken along line XXVIIB-XXVIIB in Fig. 27A. [Figure 28] Fig. 28A is a plan view for explaining a method for evaluating the conductivity of the actuator of Samples 8-1 to 8-4, and Fig. 28B is a cross-sectional view taken along line XXVIIIB-XXVIIIB in Fig. 28A. [Figure 29] Fig. 29A is a graph showing the relationship between the stretching ratio and the resistivity, and Fig. 29B is a graph showing the relationship between the amount of area change due to stretching and the resistivity. [Diagram 30] Fig. 30A is a graph showing the relationship between the biaxial stretching ratio and the dielectric breakdown strength, and Fig. 30B is a graph showing the relationship between the biaxial stretching ratio and the amount of change in area. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] In the present technology, a prestrain of 50% or more is applied to the laminate in at least one direction. More specifically, a prestrain of 50% or more is applied to the laminate in one or two directions. When prestrain is applied in two directions, the prestrains in the two directions may be the same or different. When prestrain is applied in two directions, the two directions may be orthogonal or non-orthogonal.

[0011] Examples of the shape of the laminate include, but are not limited to, a flat shape, a cylindrical shape such as a cylindrical shape, a spiral shape, a spherical shape, a curved shape, etc. Examples of the curved shape include, but are not limited to, a partial spherical shape or a partial cylindrical shape.

[0012] The shape of the main surface of the laminate may be circular, elliptical, polygonal (eg, rectangular, hexagonal, octagonal, etc.), or irregular, but is not limited thereto.

[0013] The embodiments of the present technology will be described in the following order. 1 First embodiment (example of actuator) 2. Second embodiment (example of actuator) 3. Third embodiment (example of speaker) 4. Fourth embodiment (example of speaker) 5. Fifth embodiment (example of endoscope module) 6 Sixth embodiment (example of actuator) 7 Seventh embodiment (example of actuator) 8 Eighth embodiment (example of tactile presentation device) 9 Ninth embodiment (example of robot)

[0014] <1 First embodiment> [Actuator configuration] The actuator 10 according to the first embodiment of the present technology is a so-called dielectric elastomer actuator, and includes a laminate 11 having a rectangular sheet shape as shown in FIG. 1A. The laminate 11 includes a plurality of stretchable electrodes 11a and a plurality of stretchable elastomer layers (dielectric layers) 11b, and the electrodes 11a and the elastomer layers 11b are alternately stacked in the thickness direction of the laminate 11. In the first embodiment, a case will be described in which the main surface of the laminate 11 has a rectangular shape, but the shape of the main surface of the laminate 11 is not limited thereto. Hereinafter, of two pairs of opposing sides constituting the main surface of the laminate 11, a direction parallel to one pair of sides is referred to as an x-axis direction (first direction), and a direction parallel to the other pair of sides is referred to as a y-axis direction (second direction).

[0015] The actuator 10 according to the first embodiment is provided in, for example, medical instruments such as artificial muscles and endoscopes, industrial instruments, artificial chromatophores, antennas, electronic devices, acoustic transducers (such as speakers), rehabilitation equipment, robots, robot suits, microdevices, vibration devices (such as tactile presentation devices), image stabilization modules, vibrators, etc. Examples of electronic devices include, but are not limited to, personal computers, mobile devices, mobile phones, tablet computers, display devices, imaging devices, audio devices, and game devices.

[0016] The actuator 10 is preferably configured to be operable at a drive voltage of 100 V or more and 4 kV or less. As described later, in the method for manufacturing the actuator according to the first embodiment, the laminate 11 is formed, and then stretched in the x-axis direction and the y-axis direction, so that the elastomer layer 11b can be thinned. Therefore, the actuator 10 can be driven at the low voltage as described above.

[0017] A prestrain of 50% or more is applied to the laminate 11 in each of the x- and y-axis directions (see Figs. 1A and 1B). The prestrains applied in the x- and y-axis directions may be the same or different. The prestrains applied in the x- and y-axis directions are preferably 80% or more, more preferably 100% or more, and even more preferably 120% or more. The upper limit of the prestrain in the x- and y-axis directions is preferably 1000% or less, and more preferably 500% or less.

[0018] The above pre-strain is calculated from the following formula: Pre-strain in the x-axis direction [%] = ((Lx-L0x) / L0x) × 100 Pre-strain in the y-axis direction [%] = ((Ly-L0y) / L0y) × 100 Here, Lx, L0x, Ly, and L0y refer to the following physical property values. Lx: Pre-strained , elastic deformation The length of the side of the laminate 11 in the x-axis direction in this state (see FIG. 1A) L0x: Pre-distortion released , elastic deformation The length of the side of the laminate 11 in the x-axis direction in this state (see FIG. 1B) Ly: Pre-strain is applied , elastic deformation The length of the side of the laminate 11 in the y-axis direction in this state (see FIG. 1A) L0y: Pre-distortion is released , elastic deformation The length of the side of the laminate 11 in the y-axis direction in this state (see FIG. 1B) Note that Lx, L0x, Ly, and L0y are all values ​​measured at room temperature (23° C.).

[0019] (Elastomer layer) The elastomer layer 11b is a sheet having elasticity. From the viewpoint of reducing the driving voltage, the average thickness of the elastomer layer 11b in the pre-strained state is preferably 10 μm or less, more preferably 5 μm or less, and even more preferably 3 μm or less. It is difficult to make the average thickness of the elastomer layer 11b 10 μm or less by the conventional method of forming the elastomer layer only by the coating and drying process. The lower limit of the average thickness of the elastomer layer 11b in the pre-strained state is not particularly limited, but is, for example, 300 nm or more.

[0020] From the viewpoint of reducing the driving voltage, the average thickness of the elastomer layer 11b in the prestrained state is preferably 40 μm or less, more preferably 20 μm or less, and even more preferably 12 μm or less. The lower limit of the average thickness of the elastomer layer 11b in the prestrained state is not particularly limited, but is, for example, 1 μm or more.

[0021] The average thickness of the elastomer layer 11b is obtained as follows. First, the laminate 11 is processed by a FIB (Focused Ion Beam) method or the like to prepare a cross section, and a cross-sectional image (hereinafter referred to as a "cross-sectional SEM image") is taken using a scanning electron microscope (SEM). Next, ten points are randomly selected from one elastomer layer 11b in the cross-sectional SEM image, and the thickness of the elastomer layer 11b is measured at each point. These measured values ​​are simply averaged (arithmetic average) to obtain the average thickness of the elastomer layer 11b.

[0022] The Young's modulus of the elastomer layer 11b is preferably 10 MPa or less, more preferably 0.05 MPa or more and 10 MPa or less, and even more preferably 0.1 MPa or more and 1 MPa or less. The Young's modulus is a value measured in accordance with JIS K 6251:2010. When the Young's modulus is 10 MPa or less, the elastomer layer 11b can be easily stretched. On the other hand, when the Young's modulus is 0.05 MPa or more, the elastomer layer 11b can be easily handled. The breaking strain of the elastomer layer 11b is preferably 200% or more, more preferably 200% or more and 1200% or less. When the breaking strain is 200% or more, the amount of stretching can be made larger. The breaking strain is measured, for example, according to JIS K 6251:2010.

[0023] The elastomer layer 11b contains, for example, an insulating elastomer as an insulating elastic material. The elastomer layer 11b may contain additives as necessary. The additives are, for example, at least one of a crosslinking agent, a plasticizer, an antiaging agent, a surfactant, a viscosity modifier, a reinforcing agent, and a coloring agent. The insulating elastomer contains, for example, at least one of acrylic rubber, silicone rubber, ethylene-propylene-diene terpolymer (EPDM), natural rubber (NR), butyl rubber (IIR), isoprene rubber (IR), acrylonitrile-butadiene copolymer rubber (NBR), hydrogenated acrylonitrile-butadiene copolymer rubber (H-NBR), hydrin rubber, chloroprene rubber (CR), fluororubber, and urethane rubber. In order to exhibit good electrical conductivity, it is preferable to use an insulating elastomer that does not contain additives such as titanium oxide or silicon oxide.

[0024] (electrode) The electrode 11a has elasticity. Since the electrode 11a has elasticity, the electrode 11a can deform in accordance with the deformation of the elastomer layer 11b when the actuator 10 is driven. In addition, as described later, when the laminate 11 is stretched, the electrode 11a can be deformed in accordance with the deformation of the elastomer layer 11b.

[0025] The electrode 11a may be, for example, solid, gel, or liquid. The electrode 11a may be a thin film or a binderless conductive material supported on the surface of the elastomer layer 11b. The electrode 11a may be provided on the entire or almost entire surface of the elastomer layer 11b, or may be provided partially on the surface of the elastomer layer 11b in a predetermined pattern. FIG. 1A shows an example of the latter. Examples of the predetermined pattern include, but are not limited to, a stripe pattern, a lattice pattern, a spiral pattern, a concentric pattern, a mesh pattern, or a geometric pattern.

[0026] The average thickness of electrode 11a in the prestrained state is preferably 50 μm or less, more preferably 5 μm or less, and even more preferably 3 μm or less. The lower limit of the average thickness of electrode 11a in the prestrained state is not particularly limited, but is, for example, 300 nm or more. The average thickness of electrode 11a is determined in the same manner as the average thickness of elastomer layer 11b.

[0027] The Young's modulus of the electrode 11a is preferably 10 MPa or less, more preferably 0.05 MPa or more and 10 MPa or less, and even more preferably 0.1 MPa or more and 1 MPa or less. The Young's modulus is a value measured in accordance with JIS K 6251:2010. When the Young's modulus is 10 MPa or less, the electrode can be easily stretched. On the other hand, when the Young's modulus is 0.05 MPa or more, the electrode can be easily handled. The breaking strain of the electrode 11a is preferably 200% or more, more preferably 200% or more and 1200% or less. When the breaking strain is 200% or more, the amount of stretching can be large. The breaking strain is measured, for example, according to JIS K 6251:2010.

[0028] The volume resistivity of the electrode 11a in a state where a strain of 100% or more is applied to the laminate 11 is preferably 10 MΩ·cm or less. This allows the electrode 11a to function as an electrode having good conductivity even when a strain of 100% or more is applied to the laminate 11. The upper limit of the strain is not particularly limited, but is preferably 1000% or less, more preferably 500% or less. The volume resistivity of the electrode 11a is a value obtained by a four-terminal method in accordance with JIS K 7194-1994. In a cross-cut test in accordance with JIS K 5600-5-6:1999, the adhesion between the electrode 11a and the elastomer layer 11b is preferably one of categories 0 to 2. If the adhesion is one of categories 0 to 2, peeling between the elastomer layer 11b and the electrode 11a due to the difference in rigidity between the elastomer layer 11b and the electrode 11a can be suppressed when the laminate 11 is largely stretched so as to apply a pre-strain of 50% or more.

[0029] The electrode 11a includes a conductive material. The electrode 11a may further include at least one of a binder, a gel, a suspension, and an oil having elasticity as required. The electrode 11a may further include an additive as required.

[0030] The conductive material is, for example, at least one of a conductive filler and a conductive polymer. The shape of the conductive filler may be, for example, a sphere, an ellipsoid, a needle, a plate, a scale, a tube, a wire, a rod, a fiber, or an irregular shape, but is not limited thereto. Only one type of conductive filler may be used, or two or more types of conductive fillers may be used in combination.

[0031] The conductive filler includes, for example, at least one of a carbon-based filler, a metal-based filler, a metal oxide-based filler, and a metal-coated filler, where metal is defined to include metalloids.

[0032] The carbon-based filler includes, for example, at least one of carbon black (e.g., Ketjen black, acetylene black, etc.), porous carbon, carbon fiber (e.g., PAN-based, pitch-based, etc.), carbon nanofiber, fullerene, graphene, vapor grown carbon fiber (VGCF), carbon nanotube (e.g., SWCNT, MWCNT, etc.), carbon microcoil, and carbon nanohorn.

[0033] The metal filler contains, for example, at least one of copper, silver, gold, platinum, palladium, nickel, tin, cobalt, rhodium, iridium, iron, ruthenium, osmium, manganese, molybdenum, tungsten, niobium, tantalum, titanium, bismuth, antimony, and lead.

[0034] Metal oxide based fillers include, for example, indium tin oxide (ITO), zinc oxide, indium oxide, antimony doped tin oxide, fluorine doped tin oxide, aluminum doped zinc oxide, gallium doped zinc oxide, silicon doped zinc oxide, zinc oxide-tin oxide, indium oxide-tin oxide, or zinc oxide-indium oxide-magnesium oxide.

[0035] The metal-coated filler is a base filler coated with a metal. The base filler is, for example, mica, glass beads, glass fiber, carbon fiber, calcium carbonate, zinc oxide, or titanium oxide. The metal that coats the base filler includes, for example, at least one of Ni and Al.

[0036] The average size of the conductive filler is preferably 35 nm or more and 37 nm or less. This is because an electrode 11a having particularly excellent conductivity can be obtained. Here, the average size is determined as follows. First, a scanning electron microscope (SEM) is used to take an SEM image of the conductive filler. Then, using image analysis software, 10 conductive fillers are randomly selected from the SEM image, and the size of each of these fillers is measured. Here, the size of the conductive filler means the so-called maximum Feret diameter, and specifically, it refers to the maximum distance between two parallel lines drawn from all angles so as to be tangent to the contour of the conductive filler.

[0037] The conductive polymer is, for example, at least one of polyethylenedioxythiophene / polystyrenesulfonic acid (PEDOT / PSS), polyaniline, polyacetylene, and polypyrrole.

[0038] The binder is preferably an elastomer. Examples of the elastomer include those similar to those in the elastomer layer 11b. Examples of the additive include those similar to those in the elastomer layer.

[0039] The electrode 11a may include a composite material, which may include at least one of the following: a composite material of an elastomer and at least one of a conductive polymer and a conductive filler, a composite material including a stretchable ion conductive material and an electrolyte, a composite material of a polymer suspension (such as an acrylic emulsion) and at least one of a conductive polymer and a conductive filler, a composite material of a block copolymer and at least one of a conductive polymer and a conductive filler, and a composite material of a polymer gel and an ion conductor.

[0040] (Improved adhesion) The interface between the elastomer layer 11b and the electrode 11a is preferably treated to improve adhesion. Improved adhesion can prevent peeling between the elastomer layer 11b and the electrode 11a due to the difference in rigidity between the elastomer layer 11b and the electrode 11a when the laminate 11 is stretched to a large extent so that a prestrain of 50% or more is applied.

[0041] In order to improve the adhesion at the interface, the laminate 11 preferably includes at least one of the following: (1) a silane coupling agent provided between the elastomer layer 11b and the electrode 11a, (2) a primer layer provided between the elastomer layer 11b and the electrode 11a, (3) at least one surface of the elastomer layer 11b and the electrode 11a that has been subjected to a physical pretreatment, and (4) fine irregularities provided on at least one surface of the elastomer layer 11b and the electrode 11a. The physical pretreatment is, for example, at least one of excimer light irradiation treatment, ultraviolet irradiation treatment, plasma treatment, and corona treatment.

[0042] (Silane coupling agent) The type of silane coupling agent is not particularly limited, and known silane coupling agents can be used.Specific examples of silane coupling agents include vinyl trichlorosilane, vinyl trimethoxysilane, vinyl triethoxysilane, 2-(3,4-epoxycyclohexyl)ethyl trimethoxysilane, 3-glycidoxypropyl trimethoxysilane, 3-glycidoxypropyl methyl diethoxysilane, 3-glycidoxypropyl triethoxysilane, p-styryl trimethoxysilane, 3-methacryloxypropyl methyl dimethoxysilane, 3-methacryloxypropyl trimethoxysilane, 3-methacryloxypropyl methyl diethoxysilane, 3-methacryloxypropyl triethoxysilane, 3-acryloxypropyl trimethoxysilane, N-2-(aminoethyl)-3-aminopropyl methyl dimethoxysilane, N-2-(aminoethyl) -3-aminopropyltrimethoxysilane, N-2-(aminoethyl)-3-aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-triethoxysilyl-N-(1,3-dimethyl-butylidene)propylamine, N-phenyl-3-aminopropyltrimethoxysilane, N-(vinylbenzyl)-2-aminoethyl-3-aminopropyltrimethoxysilane hydrochloride, 3-ureidopropyltriethoxysilane, 3-chloropropyltrimethoxysilane, 3-mercaptopropylmethyldimethoxysilane, 3-mercaptopropyltrimethoxysilane, bis(triethoxysilylpropyl)tetrasulfide, 3-isocyanatepropyltriethoxysilane, and the like.

[0043] [Actuator operation] Next, an example of the operation of the actuator 10 according to the first embodiment of the present technology will be described.

[0044] When a driving voltage is applied between the electrodes 11a, 11a facing each other via the elastomer layer 11b, an attractive force due to Coulomb force acts on both electrodes 11a, 11a. As a result, the elastomer layer 11b disposed between the electrodes 11a, 11a is pressed in the thickness direction, thinning and stretching.

[0045] On the other hand, when the driving voltage applied between the electrodes 11a, 11a facing each other via the elastomer layer 11b is removed, the attractive force due to the Coulomb force no longer acts on both electrodes 11a, 11a, and the elastomer layer 11b returns to its original thickness due to the restoring force of the elastomer layer 11b, and also contracts to return to its original size.

[0046] [Actuator manufacturing method] Next, an example of a manufacturing method for the actuator 10 according to the first embodiment of the present technology will be described.

[0047] (Conductive paint preparation process) A conductive paint, which is a paint for forming an electrode, is prepared by adding a conductive material to a solvent and dispersing it. If necessary, at least one of a binder and an additive may be further added to the solvent. For example, additives such as a surfactant, a viscosity modifier, and a dispersant may be added as necessary for the purpose of improving the applicability and pot life of the conductive paint on the elastomer layer 11b. The conductive paint may be a conductive ink or a conductive paste. As a dispersion method, stirring, ultrasonic dispersion, bead dispersion, kneading, homogenizer treatment, etc. are preferably used.

[0048] The solvent may be either a polar solvent or a non-polar solvent, but a non-polar solvent is preferred. The solvent is not particularly limited as long as it can disperse the conductive material. For example, water, toluene, ethyl acetate, ethanol, methyl ethyl ketone, isopropanol alcohol, acetone, anone (cyclohexanone, cyclopentanone), hydrocarbon (hexane), amide (DMF), sulfide (DMSO), butyl cellosolve, butyl triglycol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monoisopropyl ether, diethylene glycol monobutyl ether, diethylene glycol monoethyl ether, diethylene glycol monomethyl ether, diethylene glycol diethyl ether, dipropylene glycol monomethyl ether, tripropylene glycol monomethyl ether, propylene glycol monobutyl ether, propylene glycol isopropyl ether, dipropylene glycol isopropyl ether, tripropylene glycol isopropyl ether, methyl glycol, terpineol, butyl carbitol acetate, etc. Specifically, the conductive paint preferably contains a carbon-based filler, silicone, and a non-polar solvent.

[0049] (Preparation process of paint for forming elastomer layer) The elastomer layer forming paint is prepared by adding and dispersing the elastomer in a solvent. If necessary, at least one of a resin material other than the elastomer and an additive may be further added to the solvent. For example, in order to improve the applicability and pot life of the elastomer layer forming paint on the electrode 11a, additives such as surfactants, viscosity adjusters, and dispersants may be added as necessary. Examples of dispersion methods include those similar to those in the above-mentioned conductive paint preparation process. In addition, the solvent is not particularly limited as long as it can disperse the elastomer. Examples of dispersion methods include those similar to those in the above-mentioned conductive paint preparation process.

[0050] (Laminate manufacturing process) The laminate 11 is produced as follows. First, a substrate is prepared, and a release treatment is applied to the surface of the substrate as necessary. The substrate may be either an inorganic substrate or a plastic substrate. The substrate is, for example, in the form of a plate or sheet.

[0051] Next, the conductive paint is applied to one side of the substrate to form a coating film. Here, the coating includes printing. Examples of coating methods include microgravure coating, wire bar coating, direct gravure coating, die coating, dip coating, spray coating, reverse roll coating, curtain coating, comma coating, knife coating, spin coating, inkjet printing, letterpress printing, offset printing, gravure printing, intaglio printing, rubber plate printing, screen printing, and flexographic printing, but are not limited thereto.

[0052] Next, the coating film formed on one surface of the substrate is dried. The drying conditions are not particularly limited, and either natural drying or heat drying may be used. As a result, an electrode 11a is formed on one surface of the substrate. Next, if necessary, the above-mentioned adhesion improving treatment may be applied to one surface of the electrode 11a.

[0053] Next, a coating material for forming an elastomer layer is applied to one surface of the electrode 11a to form a coating film. The coating method may be the same as that for the conductive coating material. Then, the coating film formed on one surface of the substrate is dried. The drying conditions are not particularly limited, and either natural drying or heat drying may be used. As a result, an elastomer layer 11b is formed on one surface of the electrode 11a. Next, if necessary, the above-mentioned adhesion improving treatment may be applied to one surface of the elastomer layer 11b.

[0054] Thereafter, the above-mentioned step of forming electrode 11a and step of placing elastomer layer 11b are alternately repeated to form a laminate on one surface of the substrate, and then the entire laminate is peeled off from the substrate, or a part of the laminate is peeled off from the substrate, thereby obtaining laminate 11.

[0055] (Stretching process) Next, the obtained laminate 11 is stretched in the x- and y-axis directions (biaxial stretching). This applies a pre-strain of 50% or more in the x- and y-axis directions. In this stretched state, the periphery of the laminate 11 may be held by a holder. In this manner, the desired actuator 10 is obtained.

[0056] [effect] The actuator 10 according to the first embodiment includes a laminate 11 in which a plurality of stretchable elastomer layers 11b and a plurality of stretchable electrodes 11a are alternately laminated, and a prestrain of 50% or more is applied in the x- and y-axis directions to the laminate 11. As a result, the elastomer layer 11b is thinned, and the driving voltage can be reduced.

[0057] Furthermore, in the actuator 10 according to the first embodiment, the electrode 11a has a configuration that allows it to function as an electrode even when it is greatly stretched, so that the laminate 11 can be greatly stretched after formation to impart a prestrain of 50% or more in the x- and y-axis directions to the laminate 11. In contrast, in a typical actuator, the electrode's conformability is at most several tens of percent of the initial length, so that if the electrode is greatly stretched, there is a risk that it will lose its function as an electrode. Therefore, it is difficult to greatly stretch the laminate to impart a prestrain of 50% or more in the x- and y-axis directions to the laminate.

[0058] Moreover, in the method for manufacturing the actuator according to the first embodiment, the electrodes 11a and the elastomer layers 11b are repeatedly laminated by a coating process to form the laminate 11, and then the laminate is stretched to obtain the laminate 11. Therefore, it is possible to form the laminate 11 of the elastomer layers 11b and the electrodes 11a with a thickness that is difficult to achieve by a normal coating process.

[0059] In addition, in a general actuator manufacturing method, the elastomer layer is handled as a single layer, which may deteriorate the handleability of the elastomer layer and reduce the manufacturing efficiency of the actuator. In contrast, in the actuator manufacturing method according to the first embodiment, the elastomer layer 11b is handled as a laminate 11, not as a single layer, which improves the handleability of the elastomer layer 11b and can improve the manufacturing efficiency of the actuator 10. In addition, by laminating the elastomer layer 11b, which is difficult to handle as a single layer, handling such as cutting out and stacking the elastomer layer 11b becomes easier. In addition, the effect of surface unevenness can be reduced.

[0060] [Variations] (Variation 1) As shown in Fig. 2, the actuator 10 may further include a holder 12 that holds the laminate 11 in a pre-strained state. The holder 12 holds the entire periphery of the laminate 11. The holder 12 may be configured to be expandable and contractible in the x- and y-axis directions as shown by the arrows in Fig. 2. In other words, the holder 12 may be configured to be able to change the size of the laminate 11. By changing the size of the laminate 11, the pre-strain applied to the laminate 11 can be adjusted.

[0061] The retaining portion 12 is not limited to the above configuration as long as it can retain the laminate 11 in a state in which pre-strain is applied in the x- and y-axis directions. For example, the retaining portion 12 may partially retain the periphery of the laminate 11 at discrete positions. The retaining portion 12 may be provided in advance on the housing or frame of the electronic device. The laminate 11 may be retained in a pre-strained state by attaching the periphery of the laminate 11 to the housing or frame of the electronic device.

[0062] (Variation 2) Instead of forming elastomer layer 11b by applying and drying the paint for forming the elastomer layer on one surface of electrode 11a, a sheet-like elastomer layer 11b may be placed on one surface of electrode 11a. Before placing elastomer layer 11b, the above-mentioned adhesion improving treatment may be applied to at least one of the surface of electrode 11a on which elastomer layer 11b is placed and the surface of elastomer layer 11b placed on electrode 11a.

[0063] (Variation 3) The elastomer layer 11b may have a multi-layer structure. In this case, the layer constituting the surface in contact with the electrode 11a may be made of a material that has high adhesion to the electrode 11a.

[0064] (Variation 4) The elastomer layer 11b may have a stretching and distortion characteristic such that the Young's modulus of the elastomer layer 11b after stretching is preferably 0.05 MPa or more and 10 MPa or less, more preferably 0.1 MPa or more and 1 MPa or less, and when the elastomer layer 11b is further stretched in the stretched state, the Young's modulus rapidly increases to approximately 0.3 MPa or more and 5 MPa.

[0065] (Variation 5) At least a part of the electrode 11a may be made of a hard material having a Young's modulus of more than 10 MPa. For example, the electrode 11a may have a flexible part having elasticity and a hard part having less elasticity than the flexible part. The hard part is preferably provided in a part of the driving part where destruction is likely to occur. The hard part is made of, for example, a metal.

[0066] (Variation 6) The electrode 11a may have anisotropic elasticity. Specifically, the electrode may have different elasticity in a first direction and a second direction. For example, the electrode may have elasticity in a first direction but little elasticity in a second direction.

[0067] In the first embodiment, a configuration in which pre-strain is applied to the entire laminate 11 has been described as an example, but pre-strain may be applied to a part of the laminate 11. In this case, the above pre-strain can be calculated by the following formula. Pre-strain in the x-axis direction [%] = ((Mx-M0x) / M0x) × 100 Pre-strain in the y-axis direction [%] = ((My-M0y) / M0y) × 100 Here, Mx, M0x, My, and M0y refer to the following physical property values. Mx: Length of the pre-strained part in the x-axis direction when pre-strained M0x: The length of the side in the x-axis direction of the pre-strained part when the pre-strain is released My: The length of the side in the y-axis direction of the pre-strained part when pre-strained M0y: The length of the side in the y-axis direction of the pre-strained part when the pre-strain is released It should be noted that Mx, M0x, My, and M0y are all values ​​measured at room temperature (23° C.).

[0068] <2. Second embodiment> [Actuator configuration] 3, an actuator 20 according to a second embodiment of the present technology includes a cylindrical sheet-like laminate 21, a cylindrical coil spring 22 supporting the inner circumferential surface of the laminate 21, and sealing members 23 and 24 closing openings at both ends of the laminate 21. The actuator 20 may further include a cylindrical protective layer (not shown) that covers the outer circumferential surface of the laminate 21. The laminate 21 may be formed in a cylindrical shape in advance, or may be wound around the coil spring 22 to form a cylindrical shape.

[0069] The actuator 20 is provided in, for example, medical instruments such as endoscopes, industrial instruments, electronic devices, artificial muscles, robots, robot suits, etc. The actuator 20 may be one that can be used continuously or one that is disposable. When the actuator 20 is applied to a medical instrument such as an endoscope, it is preferable that the actuator 20 is disposable from a hygienic viewpoint.

[0070] The actuator 20 has a sealed cylindrical internal space, in which a coil spring 22 is provided. The internal space is filled with a gas as a fluid. The gas is, for example, at least one of air, a rare gas, and carbon dioxide.

[0071] The laminate 21, coil spring 22, sealing members 23 and 24, and protective layer provided in the actuator 20 will be described below in order.

[0072] (Laminate) As shown by the arrows in Figs. 4A and 4B, a prestrain of 50% or more is applied to the laminate 21 in both the height direction and the circumferential direction of the laminate 21. Both ends of the laminate 21 are held by the sealing members 23, 24 or both ends of the coil spring 22, thereby maintaining the laminate 21 in a prestrained state. The prestrains applied in the height direction and the circumferential direction may be the same or different. The prestrains applied in the height direction and the circumferential direction are preferably 80% or more, more preferably 100% or more, and even more preferably 120% or more. The upper limit of the prestrain in the height direction and the circumferential direction is preferably 400% or less, more preferably 300% or less.

[0073] The above pre-strain is calculated from the following formula: Height direction pre-distortion [%] = ((H-H0) / H0) × 100 Circumferential pre-strain [%] = ((C-C0) / C0) × 100 H: Height of the cylindrical laminate 21 in a pre-strained state H0: Height of the cylindrical laminate 21 in a pre-strained state C: The outer circumferential length of the cylindrical laminate 21 in a pre-strained state C0: The outer circumferential length of the cylindrical laminate 21 in a pre-strained state Note that H, H0, C, and C0 are all values ​​measured at room temperature (23°C).

[0074] As shown in Figures 4A and 4B, the laminate 21 includes a plurality of elastic electrodes 21a and a plurality of elastic elastomer layers 21b, and the electrodes 21a and the elastomer layers 21b are alternately stacked in the radial direction of the laminate 21.

[0075] (Elastomer layer) The elastomer layer 21b is a sheet having a cylindrical shape. A plurality of elastomer layers 21b are laminated concentrically around the coil spring 22. The elastomer layer 21b having a strip shape may be wound helically around the circumferential surface of the coil spring 22. The elastomer layer 21b may be formed in a cylindrical shape in advance, or may be wound around the coil spring 22 to become cylindrical. The elastomer layer 21b is otherwise similar to the elastomer layer 11b in the first embodiment.

[0076] (electrode) The electrodes 21a extend in the height direction of the laminate 21 and are provided at equal intervals in the circumferential direction. The electrodes 21a are also provided so as to overlap in the radial direction of the laminate 21. That is, the electrodes 21a provided on both sides of the elastomer layer 11b are provided so as to face each other with the elastomer layer 11b interposed therebetween. In other respects, the electrodes 21a are similar to the electrodes 11a in the first embodiment.

[0077] (coil spring) The coil spring 22 is an example of a support that can be bent in any direction and can be elastically deformed. The coil spring 22 is a coil-shaped spring in which a linear member such as a metal wire is wound into a cylindrical spiral, and gaps are formed between the linear members. Therefore, the coil spring 22 supports the inner circumferential surface of the laminate 21 discretely in the height direction of the laminate 21. By supporting the inner circumferential surface of the laminate 21 in this manner, the laminate 21 becomes easier to deform, and the actuator 20 becomes easier to expand and contract and bend. Here, "the inner circumferential surface of the laminate 21 is discretely supported in the height direction of the laminate 21" means that the inner circumferential surface of the laminate 21 is supported at discrete positions in the height direction of the laminate 21. Here, the intervals between the discrete positions may be constant or may vary.

[0078] (Sealing member) The sealing members 23, 24 have a disk shape. The sealing members 23, 24 contain a metal or a polymer resin. The sealing members 23, 24 may contain an elastomer or the like and be elastically deformable. The sealing members 23, 24 may be a device (e.g., an electronic device such as a camera) provided at the end of the actuator 20, or an operation unit of the actuator 20.

[0079] (protective layer) The protective layer is a stretchable sheet for protecting the electrode 11a. The protective layer contains an insulating polymer resin. For example, vinyl chloride can be used as the polymer resin.

[0080] [Actuator operation] Next, an example of the operation of the actuator 20 according to the second embodiment of the present technology will be described.

[0081] When a drive voltage is applied to one of the pairs of electrodes 21a, 21a among the multiple pairs of electrodes 21a, 21a facing each other via the elastomer layer 21b, the elastomer layer 11b disposed between the electrodes 21a, 21a expands, bending the actuator 20. When the drive voltage applied to one of the pairs of electrodes 21a, 21a is released, the actuator 20 returns to its original cylindrical shape.

[0082] [Actuator manufacturing method] Next, an example of a method for manufacturing the actuator according to the second embodiment of the present technology will be described.

[0083] First, a conductive paint and a paint for forming an elastomer layer are alternately applied to the cylindrical surface of a cylindrical substrate and dried, and then the entire laminate is peeled off from the substrate or a portion of the laminate is peeled off from the substrate to obtain the laminate 21.

[0084] Next, the laminate 21 is stretched in the height direction and the circumferential direction (biaxial stretching). As a result, a pre-strain of 50% or more is applied in the height direction and the circumferential direction. The coil spring 22 is inserted inside the pre-strained laminate 21. Note that the coil spring 22 may be inserted inside the laminate 21 while the laminate 21 is stretched in its height direction and the circumferential direction. Next, the openings at both ends of the laminate 21 are closed by fitting the sealing members 23 and 24 into the openings at both ends of the laminate 21, respectively. Next, both ends of the laminate 21 are held by the sealing members 23 and 24 or both ends of the coil spring 22. As a result, the actuator 20 shown in FIG. 3 is obtained.

[0085] [effect] The actuator 20 according to the second embodiment and the manufacturing method thereof provide the same effects as the actuator 10 according to the first embodiment and the manufacturing method thereof.

[0086] [Variations] (Variation 1) In the first embodiment, the case where the electrodes 21a are partially provided on the circumferential surface of the elastomer layer 21b in a predetermined pattern has been described, but the electrodes 21a may be provided on the entire circumferential surface of the elastomer layer 21b.

[0087] (Variation 2) The actuator 20 may be manufactured as follows. First, a strip-shaped laminate 21 is obtained in the same manner as in the first embodiment, except that the conductive paint is applied in stripes. When a sheet is used as the substrate, the laminate 21 may be manufactured by a roll-to-roll method. Next, the laminate 21 is wound around the circumferential surface of the coil spring 22 while being stretched in the height direction and circumferential direction. The subsequent steps are the same as in the second embodiment.

[0088] (Variation 3) The pre-strain in the circumferential direction of the laminate 21 may be larger than the pre-strain in the height direction of the laminate 21. In this case, the dielectric breakdown resistance of the laminate 21 can be improved while maintaining good displacement of the laminate 21 in the height direction.

[0089] (Variation 4) Although pre-strain is applied in the circumferential direction, pre-strain may not be applied in the height direction to the laminate 21. Even in this case, the dielectric breakdown resistance of the laminate 21 can be improved while maintaining good displacement of the laminate 21 in the height direction.

[0090] <3. Third embodiment> [Speaker configuration] 5, a speaker 110 according to a third embodiment of the present technology includes a rectangular actuator 111 and a holder 112 that holds a peripheral portion of the actuator 111. The actuator 111 is the actuator 10 according to the first embodiment.

[0091] The holding portion 112 holds the actuator 111 so that the actuator 111 (i.e., the laminate) is curved into an arch shape and a pre-strain of 50% or more is applied to the actuator 111 in both the curvature direction and width direction (direction of the arrows in FIG. 5).

[0092] [effect] In the speaker 110 according to the third embodiment, a pre-strain of 50% or more is applied to the actuator 111 (that is, the laminate) in both the curvature direction and the width direction, so that the drive voltage of the speaker 110 can be reduced.

[0093] <4. Fourth embodiment> [Speaker configuration] 6, a speaker 210 according to a fourth embodiment of the present technology includes an actuator 211 having a cylindrical sheet shape, and a holder 212 that holds both ends of the actuator 211. The actuator 211 is similar to the actuator according to the first embodiment, except that the elastomer layer and the electrodes have a cylindrical shape.

[0094] The holding portion 212 includes a shaft portion 212a and disk-shaped holding members 212b and 212c provided on both ends of the shaft portion 212a. The holding members 212b and 212c are arranged to hold the actuator 211 in such a manner that a prestrain of 50% or more is applied in each of the two directions, the height direction and the circumferential direction. 211 is held in a cylindrical shape.

[0095] [effect] In the speaker 210 according to the fourth embodiment, a pre-strain of 50% or more is applied to the actuator 211 in both the height direction and the circumferential direction, so that the drive voltage of the speaker 210 can be reduced.

[0096] [Variations] The actuator 211 may have an angular cylindrical shape such as a square cylindrical shape, and the holding members 212b and 212c may have a polygonal shape such as a square shape.

[0097] <5. Fifth embodiment> 7, an endoscope module according to a fifth embodiment of the present technology includes an endoscope 310 and a control unit 321. The control unit 321 is connected to a power source 323. Note that in the fifth embodiment, the same components as those in the second embodiment are denoted by the same reference numerals and will not be described.

[0098] The endoscope 310 includes an operation unit 311, an actuator 312 which is a bending portion, and a tip portion 313. The operation unit 311 is provided with buttons, knobs, and the like for operating the endoscope.

[0099] The actuator 312 includes a laminate 21 and a coil spring 22, and the internal space of the actuator 312 is sealed. One opening of the actuator 312 is closed by the tip 313, and the other opening is closed by the operation unit 311. An illumination lens and an objective lens (not shown) are provided on the tip surface of the tip 313. Parts of the surface of the tip 313 other than the illumination lens and the objective lens are made of, for example, stainless steel. The illumination lens and the objective lens are, for example, glass lenses. An illumination device is provided inside the illumination lens, and an imaging element such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor) is provided inside the objective lens. The imaging element is connected to a display device (not shown) via an image processing unit (not shown).

[0100] The tip unit 313 and the operation unit 311 are connected by a cable arranged in the internal space of the actuator 312, and an operation signal is supplied from the operation unit 311 to the tip unit 313 via this cable. The tip unit 313 and the image processing unit are connected by a cable arranged in the internal space of the actuator 312, and a video signal is supplied from the tip unit 313 to the image processing unit via this cable. However, the operation unit 311 may supply the operation signal to the tip unit 313 wirelessly, or the tip unit 313 may supply the video signal to the image processing unit wirelessly.

[0101] The control unit 321 controls the bending drive circuit 322 based on a control signal supplied from the operation unit 311. The bending drive circuit 322 drives the actuator 312 to bend based on the control signal supplied from the control unit 321. The bending drive circuit 322 may be provided in the operation unit 311.

[0102] [effect] In the endoscope module according to the fifth embodiment, the actuator 312 includes a cylindrical laminate 21 to which a pre-strain of 50% or more has been applied in the height and circumferential directions, thereby enabling the driving voltage of the endoscope module to be reduced.

[0103] <6 Sixth embodiment> [Actuator configuration] As shown in FIG. 9 , an actuator 30 according to a sixth embodiment of the present technology includes a cylindrical laminate 31, a cylindrical coil spring 22 supporting the inner circumferential surface of the laminate 31, and a coil spring 22 for supporting the laminate 31. 31 and sealing members 23 and 24 for closing the openings at both ends of the opening. In the sixth embodiment, the same components as those in the second embodiment are designated by the same reference numerals and the description thereof will be omitted.

[0104] (Laminate) The laminate 31 is pre-strained in the circumferential direction, but not in the height direction. Here, the height direction of the laminate 31 is the driving direction of the actuator 30, and the circumferential direction of the laminate 31 is the direction perpendicular to the driving direction of the actuator 30.

[0105] The pre-strain applied in the circumferential direction of the laminate 31 is 50% or more, preferably 80% or more, more preferably 100% or more, and even more preferably 120% or more. The upper limit of the pre-strain in the circumferential direction of the laminate 31 is preferably 400% or less, and more preferably 300% or less.

[0106] The laminate 31 is the main body of the actuator 30, and includes an elongated electrode sheet 32 ​​and an elongated electrode sheet 33, as shown in Fig. 10. The electrode sheets 32 and 33 are spirally wound around the circumferential surface of the coil spring 22 serving as a support, with one end in the longitudinal direction facing the inner periphery and the other end in the longitudinal direction facing the outer periphery.

[0107] The electrode sheet 32 ​​is uniaxially stretched in the circumferential direction, and includes an elastic elastomer layer (dielectric layer) 32a, and an elastic electrode 32b provided on one surface of the elastomer layer 32a. The elastomer layer 32a and the electrode 32b both have a long rectangular shape, and the electrode 32b is provided on one surface of the elastomer layer 32a so that the longitudinal directions of the elastomer layer 32a and the electrode 32b coincide with each other.

[0108] The electrode sheet 33 is uniaxially stretched in the circumferential direction, and includes an elastic elastomer layer (dielectric layer) 33a, and an elastic electrode 33b provided on one surface of the elastomer layer 33a. Both the elastomer layer 33a and the electrode 33b have a long rectangular shape, and the electrode 33b is provided on one surface of the elastomer layer 33a so that the longitudinal directions of the elastomer layer 33a and the electrode 33b coincide with each other.

[0109] The electrode sheets 32, 33 are spirally wound in the longitudinal direction of the electrode sheets 32, 33 with each side overlapping, and the elastomer layer 32a or the elastomer layer 33a is sandwiched between the wound electrodes 32b, 33b. Specifically, the electrode sheets 32, 33 are wound in the longitudinal direction of the electrode sheets 32, 33 such that the electrode 32b, the elastomer layer 32a, the electrode 33b, and the elastomer layer 33a are repeated in this order from the center of the laminate 31 toward the outer periphery.

[0110] Except for the above, elastomer layer 32a and elastomer layer 33a are similar to elastomer layer 11b in the first embodiment. Also, electrodes 32b and 33b are similar to electrode 11a in the first embodiment.

[0111] [Actuator operation] Next, an example of the operation of the actuator 30 according to the sixth embodiment of the present technology will be described.

[0112] When a driving voltage is applied between the electrodes 32b, 33b facing each other via the elastomer layer 32a or the elastomer layer 33a, an attractive force due to Coulomb force acts on both electrodes 32b, 33b. As a result, the elastomer layers 32a, 33a arranged between the electrodes 32b, 33b are pressed in their thickness direction and become thinner, and the laminate 31 expands in its height direction (driving direction).

[0113] On the other hand, when the driving voltage applied between the electrodes 32b, 33b facing each other via the elastomer layer 32a or the elastomer layer 33a is released, the attractive force due to the Coulomb force no longer acts on both electrodes 32b, 33b, and the elastomer layers 32a, 33a return to their original thickness due to the restoring force of the elastomer layers 32a, 33a, and also contract to return to their original size.

[0114] [Actuator manufacturing method] Next, an example of a method for manufacturing the actuator according to the sixth embodiment of the present technology will be described.

[0115] (Electrode sheet manufacturing process) The electrode sheet 32 ​​is produced as follows. First, a substrate is prepared, and one surface of the substrate is subjected to a release treatment as necessary. The substrate may be an inorganic substrate or a plastic substrate. The substrate may be in the form of a plate or a sheet.

[0116] Next, the coating material for forming the elastomer layer is applied to one side of the substrate to form a coating film having a long rectangular shape. Here, the coating includes printing. Next, the coating film formed on one side of the substrate is dried. The drying conditions are not particularly limited, and either natural drying or heat drying may be used. As a result, the elastomer layer 32a is formed on one side of the substrate. Thereafter, if necessary, a treatment for improving adhesion may be applied to one side of the elastomer layer 32a.

[0117] Next, a conductive paint is applied to one side of the elastomer layer 32a to form a coating film having a long rectangular shape. The coating film formed on one side of the elastomer layer 32a is then dried to form the electrode 32b. There are no particular limitations on the drying conditions, and either natural drying or heat drying may be used. In this manner, the electrode sheet 32 ​​is produced.

[0118] The electrode sheet 33 is produced in the same manner as the electrode sheet 32 ​​.

[0119] (Electrode sheet lamination process) The electrode sheets 32, 33 are overlapped on each other on their respective sides, and the electrode sheet 32 ​​is placed on the electrode sheet 33 so that the electrode 33b faces the elastomer layer 32a, thereby obtaining a laminate 31 having a long rectangular shape.

[0120] (Winding process of laminate) While the obtained laminate 31 is uniaxially stretched in the longitudinal direction (circumferential direction), the laminate 31 is spirally wound around the circumferential surface of the coil spring 22 so that one end of the laminate 31 in the longitudinal direction becomes the inner circumferential side and the other end of the laminate 31 becomes the outer circumferential side.

[0121] (Sealing process) First, the sealing members 23 and 24 are fitted into the openings at both ends of the laminate 31, respectively, to close the openings at both ends of the laminate 31. Next, both ends of the laminate 31 are held by the sealing members 23 and 24 or both ends of the coil spring 22. In this way, the actuator 30 shown in Figures 9 and 10 is obtained.

[0122] [effect] In the actuator 30 according to the sixth embodiment, the laminate 31 is prestrained in the circumferential direction (direction perpendicular to the driving direction) but not in the height direction (driving direction), so that the displacement in the driving direction can be kept good and the dielectric breakdown resistance can be improved. In addition, the application of prestrain in the circumferential direction of the laminate 31 reduces the thickness of the elastomer layers 32a and 33a, so that the driving voltage can be reduced.

[0123] [Variations] (Variation 1) The laminate 31 may be prestrained in both the circumferential direction and the height direction. In this case, the prestrain in the circumferential direction of the laminate 31 is preferably larger than the prestrain in the height direction of the laminate 31. More specifically, the prestrain in the circumferential direction of the laminate 31 is 50% or more, preferably 80% or more, more preferably 100% or more, and even more preferably 120% or more. The upper limit of the prestrain in the circumferential direction of the laminate 31 is preferably 400% or less, more preferably 300% or less. On the other hand, the prestrain in the height direction of the laminate 31 is less than 50%, preferably 30% or less, more preferably 20% or less, even more preferably 10% or less, and particularly preferably 5% or less.

[0124] (Variation 2) The electrode sheets 32, 33 may have a cylindrical shape, and a plurality of electrode sheets 32, 33 may be stacked concentrically around the coil spring 22 to form the laminate 31.

[0125] <7 Seventh embodiment> [Actuator configuration] 11A, an actuator 40 according to a seventh embodiment of the present technology includes a fiber-like wound body 41, a terminal 42A taken out from one end of the wound body 41, and a terminal 42B taken out from the other end of the wound body 41. Note that in the seventh embodiment, the same parts as those in the sixth embodiment are denoted by the same reference numerals, and description thereof will be omitted.

[0126] A pre-strain is applied to the wound body 41 in the circumferential direction, but no pre-strain is applied to the wound body 41 in the longitudinal direction. Here, the longitudinal direction of the wound body 41 is the driving direction of the actuator 40, and the circumferential direction of the wound body 41 is a direction perpendicular to the driving direction of the actuator 40.

[0127] The wound body 41 is an example of a laminate. The wound body 41 is similar to the laminate 31 in the sixth embodiment, except that it does not include the coil spring 22 in the center and has a fiber shape. The wound body 41 may or may not have a hole in the center.

[0128] 11B, one end of terminal 42A is connected to electrode 32b, and the other end is taken out from one end of wound body 41. Moreover, one end of terminal 42B is connected to electrode 33b, and the other end is taken out from the other end of wound body 41.

[0129] [effect] In the actuator 40 according to the seventh embodiment, the wound body 41, which is an example of a laminate, is prestrained in the circumferential direction (direction perpendicular to the driving direction) but not in the longitudinal direction (driving direction), so that the displacement in the driving direction can be kept good and the dielectric breakdown resistance can be improved. In addition, the application of prestrain in the circumferential direction of the wound body 41 reduces the thickness of the elastomer layer 32a and the elastomer layer 33a, so that the driving voltage can be reduced.

[0130] [Variations] (Variation 1) Pre-strain may be applied to the wound body 41 in both the circumferential direction and the length direction. In this case, the pre-strain in the circumferential direction of the wound body 41 is preferably larger than the pre-strain in the length direction of the wound body 41. More specifically, the values ​​of the pre-strain in the circumferential direction and the length direction of the wound body 41 are preferably set to the same values ​​as the pre-strain in the circumferential direction and the height direction of the laminate 31 in the first modification of the sixth embodiment.

[0131] (Variation 2) The electrode sheets 32, 33 may have a cylindrical shape, and a plurality of the electrode sheets 32, 33 may be laminated to form a fiber-shaped laminate.

[0132] <8 Eighth embodiment> [Configuration of the tactile presentation device] An example in which the present technology is applied to a tactile presentation device will be described with reference to Fig. 12. The tactile presentation device is an example of a drive device, and includes an actuator array 411, a voltage source 412, and a control unit (not shown). Note that in the eighth embodiment, the same parts as in the seventh embodiment are denoted by the same reference numerals, and description thereof will be omitted.

[0133] The actuator array 411 is an example of a driving member, and includes a plurality of actuators 40 having a fiber shape. The plurality of actuators 40 are arranged in a row such that the length direction of each actuator 40 is the same and the peripheral surfaces of adjacent actuators 40 face each other. The terminals 42A and 42B are connected to a voltage source 412 via wiring 413A and 413B, respectively. The voltage source 412 supplies a driving voltage of a predetermined frequency to each actuator based on a control signal from a control unit (not shown). 40 The actuator 40 may be the one in the modified example of the seventh embodiment.

[0134] [Operation of the tactile presentation device] 13A and 13B, an example of the operation of the tactile presentation device having the above-mentioned configuration will be described. Here, as shown in FIG. 13A, Actuator 40 The case where both ends are supported by supports 414 will be described.

[0135] When a drive voltage is applied to actuator 40, actuator 40 expands and bends, as shown in Fig. 13B. When the drive voltage applied to actuator 40 is removed, actuator 40 contracts, returns to its original length, and becomes linear, as shown in Fig. 13A.

[0136] [effect] In the tactile presentation device according to the eighth embodiment, the actuator array 411 includes a plurality of actuators 40 according to the seventh embodiment, thereby improving the dielectric breakdown resistance of the tactile presentation device and reducing power consumption.

[0137] [Variations] Another example in which the present technology is applied to a tactile presentation device will be described with reference to Fig. 14. The tactile presentation device includes an actuator array 421, a voltage source 412, and a control unit (not shown). In this modification, the same parts as those in the eighth embodiment are denoted by the same reference numerals and will not be described.

[0138] The actuator array 421 includes a plurality of actuators 40 arranged two-dimensionally in a mesh pattern. More specifically, the actuator array 421 includes a first actuator group 40G1 and a second actuator group 40G2 provided on the first actuator group 40G1. The first actuator group 40G1 includes a plurality of actuators 40 arranged to face a first direction. The second actuator group 40G2 includes a plurality of actuators 40 arranged to face a second direction perpendicular to the first direction. The first and second directions do not have to be perpendicular to each other.

[0139] <9 Ninth embodiment> [Robot configuration] An example in which the present technology is applied to a robot will be described with reference to Fig. 15. The robot includes a joint drive device 510 in an arm portion.

[0140] [Operation of the tactile presentation device] The joint driving device 510 is an example of a driving device, and includes a columnar body 511 and fiberThe actuator 512 comprises a pair of actuators 512A, 512B having a cylindrical shape, a support 513 supporting a columnar body 511 and one end of the actuators 512A, 512B, a rotating body 514 rotatably supported on the other end of the columnar body 511, and a drive shaft 515 supported by the rotating body 514.

[0141] The pillar 511, the actuators 512A and 512B, and the support 513 are provided on the upper arm of the robot, and the support 513 is supported on the upper part of the upper arm. The drive shaft 515 is provided on the forearm of the robot, and the drive shaft 515 The forearm moves in response to the driving of the rotor 514. The rotor 514 is provided at a joint between the upper arm and the forearm of the robot's arm, and functions as a joint.

[0142] A linear member 516 such as a wire is hung on the circumferential surface of the rotating body 514. One end of the linear member 516 is connected to the other end of the actuator 512A, and the other end of the linear member 516 is connected to the other end of the actuator 512B. The rotating body 514 is rotatable via the linear member by the expansion and contraction of the actuators 512A and 512B.

[0143] The actuators 512A and 512B are the actuator 40 according to the seventh embodiment or a modification thereof.

[0144] The robot further includes a voltage source and a control unit (not shown), and the voltage source is electrically connected to the actuators 512A and 512B via wiring. The voltage source supplies a drive voltage to the actuators 512A and 512B based on a control signal from the control unit.

[0145] [Robot movement] A robot having the above-mentioned configuration operates as follows. That is, when the drive voltage is controlled to extend actuator 512A and retract actuator 512B by the amount that actuator 512A has extended, rotating body 514 rotates counterclockwise with respect to FIG. 15 via linear member 516. As a result, driving shaft 515 is driven in the direction indicated by arrow 517A. On the other hand, when the drive voltage is controlled to retract actuator 512A and retract actuator 512B by the amount that actuator 512A has retracted, rotating body 514 rotates clockwise with respect to FIG. 15 via linear member 516. As a result, driving shaft 515 is driven in the direction indicated by arrow 517B.

[0146] [effect] The robot according to the ninth embodiment includes the actuator 40 according to the seventh embodiment or its modified example as the actuators 512A, 512B of the joint drive device 510. Therefore, it is possible to improve the durability of the robot and reduce power consumption.

[0147] [Variations] In the seventh embodiment, the robot is configured to include the joint drive devices 510 in the arms, but the joint drive devices 510 may be provided in the legs. EXAMPLES

[0148] Hereinafter, the present technology will be specifically described with reference to examples, but the present technology is not limited to these examples.

[0149] The materials used in the following Samples 1 to 3 are as follows. Polyaniline: Kaken Sangyo Co., Ltd., toluene type (6.0% by mass toluene solution) SEBS (poly(styrene-co-ethylenebutylene-co-styrene)): Kraton Polymers, A1535HU SEBS-g-MA (poly(styrene-co-ethylenebutylene-co-styrene) grafted with maleic anhydride): FG1924GT, manufactured by Kraton Polymers, Inc. Acrylic elastomer sheet: 3M VHB4905J (initial thickness: 500 μm) Silicone: Smooth On, Dragon Skin 30 Silane coupling agent (3-aminopropyltriethoxysilane): Sigma-Aldrich

[0150] <Samples with different stretch amounts> [Sample 1] First, a first solution was prepared by dissolving SEBS in toluene to a concentration of 50 g / L, and a second solution was prepared by dissolving SEBS-g-MA in toluene to a concentration of 50 g / L. Since it takes time to dissolve SEBS-g-MA, after adding SEBS-g-MA to toluene, the solution was sealed and subjected to ultrasonic stirring for 1 hour.

[0151] Next, the first solution and the second solution were mixed so that the mass ratio of the first solution:second solution was 1:9 to prepare a polymer solution. Next, a solution in which 6 mass% of polyaniline was dissolved in toluene was prepared, and this solution was mixed with the above polymer solution. At this time, the amount of polyaniline was adjusted to 4.2 mass% with respect to the entire solution. After mixing, ultrasonic stirring was performed for about 15 minutes to obtain a coating material for forming an electrode. In order to use it as an electrode for a dielectric elastomer actuator (DEA), it is preferable to add 1 mass% or more by weight.

[0152] Thereafter, a rectangular acrylic elastomer sheet to which no initial strain was applied was prepared, and the above-mentioned electrode-forming paint was applied to the sheet using a nylon brush and allowed to dry naturally, thereby obtaining the desired rectangular sheet-shaped laminate.

[0153] [Sample 2] A laminate was obtained in the same manner as in Sample 1, except that the laminate was stretched and a prestrain of 50% per side (stretch amount λ=1.5) was applied.

[0154] [Sample 3] The laminate was stretched to obtain a laminate in the same manner as in Sample 1, except that a prestrain of 100% (stretching amount λ=2) was applied per side.

[0155] [evaluation] The laminates of Samples 1 to 3 obtained as described above were subjected to the following evaluations.

[0156] (Thickness of laminate) The thickness of the elastomer layer was determined from cross-sectional SEM images.

[0157] (Volume resistivity) The volume resistivity of the electrodes on the surface of the laminate was determined by a four-terminal method in accordance with JIS K 7194-1994.

[0158] Figure 8 shows the evaluation results for the film thickness and volume resistivity of the elastomer layer of the laminates of Samples 1 to 3. As elastomer is an incompressible material, it becomes thinner inversely proportional to the square of the biaxial stretch amount λ. The resistance value of the compliant electrode increases according to the amount of stretching. This is thought to be due to the electrode becoming thinner as it is stretched. When a drive voltage was applied to the laminates of Samples 1 to 3, which were actually produced by stretching, it was possible to confirm that they functioned as actuators.

[0159] <Sample with improved adhesion between elastomer layer and electrode> [Sample 4] First, silicone was applied by bar coating to form a silicone elastomer sheet with a thickness of 50 μm. Next, the surface of this sheet was subjected to an excimer cleaning treatment for 3 minutes, and then a silane coupling agent was applied to form a coating film. Next, the same electrode formation paint (aniline / SEBS / SEBS-g-MA mixture) as in Sample 1 was applied to the coating film and dried to form an electrode. This resulted in the desired laminate.

[0160] (Tape peeling test) First, a cross-cut test was performed on the electrode in accordance with JIS K 5600-5-6:1999. Next, the state of the cross-cut pattern after the test was evaluated based on the classifications 1 to 5 described in JIS K 5600-5-6:1999, and the adhesion was judged based on the evaluation results according to the following criteria. As a result, a "good" judgment result was obtained. Good: corresponds to the condition classification 0 to 2 described in the above JIS K 5600-5-6:1999. Poor: corresponds to the above-mentioned conditions of classifications 3 to 5 described in JIS K 5600-5-6:1999. In addition, in the case of categories 3 to 5, there is a risk that the electrodes may peel off when the laminate is stretched.

[0161] From the above test results, it can be seen that it is possible to improve the adhesion between the elastomer sheet and the electrodes by applying a silane coupling agent after performing pretreatment such as excimer cleaning on the surface of the silicon sheet. Note that adhesion can also be improved by simply performing excimer cleaning or UV cleaning on the surface of the elastomer sheet.

[0162] In the above sample 4, a trialkoxysilane-based silane coupling agent was used, but the same effect of improving adhesion can be obtained even if a dialkoxysilane or monoalkoxysilane-based agent other than trialkoxysilane is used. In addition, the terminal functional group can be an acrylic group, a methacrylic group, an epoxy group, a vinyl group, a styryl group, an isocyanate group, a mercapto group, etc., depending on the type of polymer.

[0163] <Samples evaluated for stiffness and dielectric breakdown strength by varying the amount of uniaxial or biaxial stretching> [Sample 5-1~5-5] First, as shown in FIG. 16A, a circular silicone elastomer sheet (elastomer layer) 611a having a thickness of 93 μm was prepared, and the elastomer sheet 611a was biaxially stretched in the X- and Y-axis directions. At this time, as shown in Table 1, the stretching ratio in the X- and Y-axis directions was changed for each sample, and the stretching amount (stretching ratio) was adjusted to 1.14, 1.43, 1.90, 2.38, and 2.86. Next, as shown in FIGS. 17A and 17B, the peripheral portion of the biaxially stretched elastomer sheet 611a was fixed to a ring-shaped fixing jig 612 having an inner diameter of 8 cm. Next, as shown in FIGS. 18A and 18B, paint containing carbon black powder was applied to the center of both sides of the elastomer sheet 611a, and a circular electrode 611b having a diameter of 3 cm was formed. As a result, the desired actuator was obtained.

[0164] [Sample 6-1~6-5] First, as shown in Fig. 16B, an elliptical silicone elastomer sheet (elastomer layer) 611a with a thickness of 93 µm was prepared, and the elastomer sheet 611a was uniaxially stretched in the Y-axis direction (short axis direction). At this time, as shown in Table 2, the stretching ratio in the Y-axis direction was changed for each sample, and the stretching amount (stretching ratio) was adjusted to 1.43, 1.90, 2.38, 2.86, and 3.81. The subsequent steps were carried out in the same manner as for Samples 5-1 to 5-5, to obtain the desired actuator.

[0165] [Evaluation of stiffness and dielectric breakdown strength] The stiffness and dielectric breakdown strength of the actuators of samples 5-1 to 5-5 and 6-1 to 6-5 obtained as described above were evaluated. First, as shown in Figs. 19A and 19B, the voltage applied to electrodes 611b, 611b was gradually increased, and the voltage just before dielectric breakdown (hereinafter referred to as "dielectric strength") V and the electrode widths x and y were measured. Next, from the results, the dielectric breakdown strength E and the stiffness in the X- and Y-axis directions E X , E Y was calculated based on the following formula: Dielectric breakdown strength E=(V / t0)×((x×y) / (x0×y0)) In the formula, V is the dielectric strength voltage, t0 is the initial thickness, x is the electrode width in the X-axis direction, y is the electrode width in the Y-axis direction, x0 is the electrode width in the X-axis direction in the initial state, and y0 is the electrode width in the Y-axis direction in the initial state. Here, the initial state refers to the state before the voltage is applied. Stiffness in the x-axis direction E X =σ / ε X Stiffness in the y-axis direction E Y =σ / ε Y In the formula, σ is Maxwell stress, ε X : Strain in the X-axis direction, ε Y : Strain in the Y-axis direction, which can be calculated using the following formula: σ = ε × E 2 (where ε is the dielectric constant.) ε X =x / x0 ε Y =y / y0

[0166] Table 1 shows the evaluation results of the actuators of Samples 5-1 to 5-5. [Table 1]

[0167] Table 2 shows the evaluation results of the actuators of Samples 6-1 to 6-5. [Table 2]

[0168] In the "Dielectric constant" column in Tables 1 and 2, the notation "AE-B" stands for A x 10 -B means...

[0169] Fig. 20A shows the relationship between the biaxial stretching ratio and the rigidity. Fig. 20B shows the relationship between the biaxial stretching ratio and the dielectric breakdown strength. Fig. 21A shows the relationship between the uniaxial stretching ratio and the rigidity. Fig. 21B shows the relationship between the uniaxial stretching ratio and the dielectric breakdown strength.

[0170] 20A and 20B show the following: When elastomer sheet 611a is biaxially stretched in the X and Y directions, the rigidity increases with an increase in the biaxial stretch ratio, and the dielectric breakdown strength improves with an increase in the biaxial stretch ratio. 21A and 21B show the following. That is, when elastomer sheet 611a is uniaxially stretched in the y-axis direction, the rigidity in the x-axis direction remains almost constant as the uniaxial stretching ratio increases, while the rigidity in the y-axis direction increases as the uniaxial stretching ratio increases. Also, the dielectric breakdown strength improves as the uniaxial stretching ratio increases. Therefore, by stretching the actuator uniaxially in a direction perpendicular to the driving direction, it is possible to improve the dielectric breakdown resistance while maintaining good displacement in the driving direction.

[0171] <Samples using different carbon fillers as electrode materials> [Sample 7-1] First, a square silicone elastomer sheet 621a having a size of 15 cm x 15 cm was prepared as shown in Figures 22A and 22B. Next, a rectangular electrode 621b having a size of 10 cm x 10 cm was formed in the center of the elastomer sheet 621a by spray coating as shown in Figures 23A and 23B.

[0172] The process of forming the electrode 621b will be described in detail below. (Preparation of carbon filler solution) Nanocarbon and isopropanol were mixed in a mass ratio of 1:20 (nanocarbon:isopropanol), and placed in a 50 ml polypropylene case (Azwan Corporation, Eyeboy Wide Mouth, PP) together with six φ10 mm zirconia beads, and stirred by vibration for 10 minutes. The nanocarbon used was DENKA BLACK Li (Li-100, average particle size 35 nm) manufactured by Denka Kogyo Co., Ltd. A vortex was used for vibration.

[0173] (Preparation of Elastomer Solution) A toluene solution containing 20% ​​by mass of elastomer (binder) was prepared. Silicone resin (MS1003, manufactured by Dow Corning Toray Co., Ltd.) was used as the elastomer.

[0174] (Preparation of solutions) First, the carbon filler solution and the elastomer solution were mixed so that the mass ratio of the carbon filler to the elastomer (carbon filler:elastomer) was 10:90, and zirconia beads were added and stirred for 10 minutes. The zirconia beads were then removed. This resulted in a carbon-silicone solution.

[0175] (Preparation of coated electrodes) The carbon-silicone solution obtained as described above was sprayed onto the elastomer sheet 621a from a distance of about 30 cm using a Meiji Seiki air spray gun (FS110 round spray type), and the coating was performed so that it was visually uniform. The air flow rate was set to a condition where a house line of about 0.15 MPa was connected and the FS110 gas flow control nozzle was opened halfway around. As a result, an electrode 621b with a thickness of about 10 μm and a surface roughness of about 20 μm peak-to-peak was formed. The desired actuator was obtained as described above.

[0176] [Sample 7-2] An actuator was obtained in the same manner as in Sample 7-1, except that DENKA BLACK Li (Li-250, average particle size 37 nm) manufactured by Denka Kogyo Co., Ltd. was used as the nanocarbon.

[0177] [Sample 7-3] An actuator was obtained in the same manner as in Sample 7-1, except that DENKA BLACK Li (Li-400, average particle size 48 nm) manufactured by Denka Kogyo Co., Ltd. was used as the nanocarbon.

[0178] [Evaluation of electrode conductivity] First, the end of the actuator was fixed so as not to buckle, and then a four-terminal probe was brought into contact with the upper surface (surface of electrode 621b) of the actuator in an unstretched state (stretch ratio in the X-axis direction: 1, stretch ratio in the Y-axis direction: 1) to measure the resistance value. Next, the film thickness of electrode 621b was measured with a step gauge, and the cross-sectional area of ​​electrode 621b was obtained. Then, the resistivity of electrode 621b was calculated using the resistance value and cross-sectional area of ​​electrode 621b obtained as described above.

[0179] Fig. 24 shows the relationship between the type of nanocarbon used in Samples 7-1 to 7-3 and the resistivity. It can be seen from Fig. 24 that when the average particle size of the nanocarbon is 35 nm or more and 37 nm or less, particularly excellent conductivity is exhibited.

[0180] <Samples whose resistivity was evaluated by changing the amount of uniaxial or biaxial stretching> [Sample 8-1~8-4] Actuators were obtained in the same manner as Sample 7-1, except that in the solution preparation process, the carbon filler solution and the elastomer solution were mixed so that the mass ratios (carbon filler:elastomer) of the carbon filler (DENKA BLACK Li (Li-100) manufactured by Denka Kogyo Co., Ltd.) and the elastomer (MS1003 manufactured by Dow Corning Toray Co., Ltd.) were 19:81, 24:76, 30:70, and 35:65.

[0181] [Evaluation of electrical conductivity during biaxial stretching] First, a pair of elastomer sheets 622 was prepared by cutting a double-sided adhesive acrylic elastomer sheet (3M, VHB4905J) into a square shape. Then, as shown in Figs. 25A and 25B, a portion of elastomer sheet 621a where electrode 621b was not formed was sandwiched between the pair of elastomer sheets 622 to form a portion to be fixed to a jig. Next, as shown in Figs. 26A and 26B, four sides of elastomer sheet 622 were fixed to biaxial stretching jig 623, and then, as shown in Figs. 27A and 27B, biaxial stretching (stretching ratio in X-axis direction: 1 to 3.25, stretching ratio in Y-axis direction: 1 to 3.25) was performed.

[0182] Next, a digital multimeter (Keithley, 2800 Digital Multimeter) equipped with a four-terminal probe 624 conforming to the JIS K7194 standard was prepared, and the four-terminal probe 624 was brought into contact with the upper surface (surface of electrode 621b) of the actuator in a stretched state to measure the resistance value, as shown in Figs. 28A and 28B. Next, the film thickness of electrode 621b was measured with a step gauge, and the cross-sectional area of ​​electrode 621b was obtained. Then, the resistivity of electrode 621b was calculated using the resistance value and cross-sectional area of ​​electrode 621b obtained as described above. The resistivity was calculated every time the stretching ratio was increased by 0.25 times.

[0183] [Evaluation of electrical conductivity during uniaxial stretching] The resistivity was measured in the same manner as in the evaluation of the electrical conductivity during biaxial stretching described above, except that the stretching was uniaxial and the stretching ratio was in the range of 1 to 3.25.

[0184] Table 3 shows the evaluation results of the actuators of Samples 8-1 to 8-4. [Table 3]

[0185] Figure 29A shows the relationship between the stretching ratio and resistivity. Figure 29B shows the relationship between the area change due to stretching and resistivity. Figures 29A and 29B show that the change in resistance due to stretching is determined not by the magnitude of stretching in one axial direction but by the area change of the entire sheet.

[0186] <Actuator with laminated elastomer layers and electrodes> In Samples 9-1 to 9-3 and 10-1 to 10-3 described below, parts corresponding to those in Sample 5-1 are given the same reference numerals.

[0187] [Sample 9-1~9-3] The electrode 611b and the silicone elastomer sheet 611a having a thickness of 100 μm were repeatedly laminated to form a laminate. As shown in Table 4, the biaxial stretching ratios in the X-axis direction and the Y-axis direction were set to 1, 1.5, and 1.7. In laminating, the elastomer sheet 611a was sandwiched between the electrodes 611b, and the number of layers of the elastomer sheet 611a was set to 10. The electrode 611b was made to contain nanocarbon (DENKA BLACK Li (Li-100) manufactured by Denka Kogyo Co., Ltd.) and silicone elastomer (MS1003 manufactured by Toray Dow Corning Co., Ltd.) in a mass ratio (nanocarbon:silicon elastomer) of 19:81. An actuator was obtained in the same manner as in Sample 5-1 except for the above.

[0188] [Sample 10-1~10-3] An actuator was obtained in the same manner as in Samples 9-1 to 9-3, except that the number of layers of elastomer sheet 611a was one.

[0189] [Evaluation of dielectric breakdown strength] The dielectric breakdown strengths of the actuators of Samples 9-1 to 9-3 and 10-1 to 10-3 obtained as described above were calculated in the same manner as in the evaluation of the dielectric breakdown strength of Sample 5-1.

[0190] Table 4 shows the evaluation results of the actuators of Samples 9-1 to 9-3. [Table 4]

[0191] Table 5 shows the evaluation results of the actuator samples 10-1 to 10-3. [Table 5]

[0192] Fig. 30A shows the relationship between the biaxial stretch ratio and the dielectric breakdown strength. It can be seen from Fig. 30A that the dielectric breakdown strength of the actuator in which ten elastomer sheets 611a are laminated increases with the amount of stretching, similar to the dielectric breakdown strength of the actuator having a single-phase elastomer sheet 611a.

[0193] [Evaluation of area change] The amount of change in area of ​​samples 9-2 and 9-3 (stretched samples having 10 layers of elastomer sheets 611a laminated together) when an electric field of 100 MV / m was applied was determined.

[0194] Table 6 shows the evaluation results of the actuators of Samples 9-2 and 9-3. [Table 6]

[0195] Fig. 30B shows the relationship between the biaxial stretching ratio and the area change. It can be seen from Fig. 30B that even an actuator in which ten elastomer sheets 611a are laminated and stretched can achieve a large area change of 10% or more.

[0196] Although the embodiments and examples of the present technology have been specifically described above, the present technology is not limited to the above-described embodiments and examples, and various modifications based on the technical ideas of the present technology are possible.

[0197] For example, the configurations, methods, steps, shapes, materials, and values ​​given in the above-described embodiments and examples are merely examples, and different configurations, methods, steps, shapes, materials, and values ​​may be used as necessary.

[0198] Furthermore, the configurations, methods, processes, shapes, materials, numerical values, and the like of the above-described embodiments and examples can be combined with each other without departing from the spirit and scope of the present technology.

[0199] The present technology can also adopt the following configuration. (1) An elastomer layer; stretchable electrodes provided on both sides of the elastomer layer; A laminate comprising: The laminate has a prestrain of 50% or more applied in at least one direction. (2) The Young's modulus of the elastomer layer is 10 MPa or less, The actuator according to (1), wherein the elastomer layer has a breaking strain of 200% or more. (3) The average thickness of the electrode in a pre-strained released state is 500 μm or less; The actuator according to (1) or (2), wherein the volume resistivity of the electrodes is 10 MΩ·cm or less when a strain of 100% or more is applied to the laminate. (4) The actuator according to any one of (1) to (3), wherein the electrode contains at least one of a conductive filler and a conductive polymer. (5) The actuator according to claim 4, wherein the electrode further comprises an elastomer. (6) The actuator according to (4) or (5), wherein the conductive filler includes at least one of a carbon-based filler, a metal-based filler, a metal oxide-based filler, and a metal-coated filler. (7) The electrode includes a conductive filler, The actuator according to any one of (1) to (3), wherein the conductive filler is supported on a surface of the elastomer layer. (8) The actuator according to any one of (1) to (7), wherein the electrodes are in a solid, gel or liquid state. (9) The actuator according to any one of (1) to (3), wherein the electrode comprises a stretchable ion-conductive material and an electrolyte. (10) The actuator according to any one of (1) to (3), wherein the electrode includes a suspension and at least one of a conductive filler and a conductive polymer. (11) The actuator according to any one of (1) to (10), wherein the electrodes and the elastomer layers are laminated alternately and repeatedly. (12) The actuator according to any one of (1) to (11), wherein some of the electrodes have a Young's modulus exceeding 10 MPa. (13) The actuator according to any one of (1) to (12), wherein the interface between the elastomer layer and the electrode has been subjected to a treatment for improving adhesion. (14) Further comprising a holding portion for holding the laminate, The actuator according to any one of (1) to (13), wherein the holding portion has a configuration capable of varying a size of the laminate. (15) The actuator according to any one of (1) to (13), further comprising a retaining portion that retains the laminate in a pre-strained state. (16) The laminate is prestrained by 50% or more in a direction perpendicular to the driving direction; The actuator according to any one of (1) to (15), wherein pre-strain in a direction perpendicular to the driving direction is larger than pre-strain in the driving direction. (17) The actuator according to any one of (1) to (15), wherein a prestrain of 50% or more is applied to the laminate in a direction perpendicular to a driving direction, while no prestrain is applied to the laminate in the driving direction. (18) The actuator according to any one of (1) to (17), wherein the electrode contains a carbon-based filler and silicone. (19) The actuator according to any one of (1) to (18), wherein the laminate has a cylindrical shape or a fibrous shape. (20) Elastomer layer stretchable electrodes provided on both sides of the elastomer layer; A laminate comprising: the laminate is prestrained in at least one direction; The average thickness of the elastomer layer is 3 μm or less. (twenty one) forming a laminate by alternating layers of electrodes and elastomer; The laminate thus formed is stretched in at least one direction. A method for manufacturing an actuator, comprising: (twenty two) The formation of the laminate includes: forming a laminate by stacking the electrodes and the elastomer layers alternately on a substrate; The laminate is formed by peeling a part or the whole of the formed laminate from the substrate. A method for manufacturing the actuator according to (21), comprising: (twenty three) The electrodes are formed by applying and drying a paint containing a conductive material, The method for manufacturing an actuator according to (21) or (22), wherein the elastomer layer is formed by applying and drying a paint containing an elastomer. (twenty four) The method for manufacturing an actuator according to (21) or (22), wherein the electrodes are formed by applying and drying a paint containing a carbon-based filler, silicone, and a non-polar solvent. [Explanation of symbols]

[0200] 10, 20, 30, 40, 111, 210, 312 Actuators 11, 21, 31 Laminate 11a, 21a electrode 11b, 21b Elastomer layer 12, 112, 212 Holding part 22 Coil spring 23, 24 Sealing member 32, 33 Electrode sheet 32a, 33a Elastomer layer 32b, 33b electrode 40G1 First Actuator Group 40G2 Second Actuator Group 41 Rolled body 42A, 42B terminals 110 Speaker 212a Shaft 212b, 212c holding member 310 Endoscope 311 Operation section 313 Tip 321 Control Unit 322 Flexure Drive Circuit 323 Power supply 411, 421 Actuator Array 412 Voltage Source 413A, 413B Wiring 414 Support 510 Joint Drive Device 511 Column 512A, 512B Actuators 513 Support 514 Rotating Body 515 Drive shaft 516 Linear members 611a, 621a, 622 Elastomer sheet 611b, 621b electrode 612 Fixture 623 Biaxial stretching fixture 624 4-Terminal Probe

Claims

1. a first step of forming a laminate by alternately laminating an electrode containing a conductive filler having an average size of 35 nm to 37 nm and an elastomer, the electrode having a Young's modulus of 0.05 MPa to 10 MPa and a breaking strain of 200% to 1200%, and an elastomer layer having a Young's modulus of 0.05 MPa to 10 MPa and a breaking strain of 200% to 1200%; A second step of stretching the formed laminate in at least one direction to apply a pre-strain of 50% or more due to elastic deformation caused by the stretching in at least the one direction; a third step of holding the entire peripheral edge of the laminate in a state stretched in the second step by a holding part; having The average thickness of the elastomer layer is set to 10 μm or less by the second step. A method for manufacturing an actuator.

2. The formation of the laminate includes: forming a laminate by stacking the electrodes and the elastomer layers alternately on a substrate; The method for manufacturing an actuator according to claim 1 , further comprising the step of peeling off a part or all of the formed laminate from the substrate to form the laminate.

3. The electrodes are formed by applying and drying a paint containing a conductive material, The method for manufacturing an actuator according to claim 1 , wherein the elastomer layer is formed by applying and drying a paint containing an elastomer.

4. The method for manufacturing an actuator according to claim 1 , wherein the electrodes are formed by applying and drying a paint containing a carbon-based filler, silicone, and a non-polar solvent.

5. The method for manufacturing an actuator according to claim 1 , wherein the conductive filler includes at least one of a carbon-based filler, a metal-based filler, a metal oxide-based filler, and a metal-coated filler.

6. The electrode includes a conductive filler, The method for manufacturing an actuator according to claim 1 , wherein the conductive filler is carried on a surface of the elastomer layer.

7. The method for manufacturing an actuator according to claim 1 , wherein the electrodes are in a solid, gel or liquid state.

8. The method for manufacturing an actuator according to claim 1 , wherein the electrodes include a stretchable ion-conductive material and an electrolyte.

9. The method for manufacturing an actuator according to claim 1 , wherein the electrode includes a suspension and at least one of a conductive filler and a conductive polymer.

10. 2. The method for manufacturing an actuator according to claim 1, wherein in the first step, the electrodes and the elastomer layers are alternately and repeatedly laminated.

11. 2. The method for manufacturing an actuator according to claim 1, wherein in the first step, a treatment for improving adhesion is applied to the interface between the elastomer layer and the electrode.

12. The method for manufacturing an actuator according to claim 1 , wherein the electrode contains a carbon-based filler and silicone.

13. The method for manufacturing an actuator according to claim 1 , wherein the laminate has a cylindrical shape or a fibrous shape.

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