Diaphragm-type pressure detection device and its manufacturing method

Abstract

To appropriately heat a getter in the vacuum chamber of a diaphragm-type pressure detection device.SOLUTION: A diaphragm-type pressure detection device 10 comprises: a non-light permeable housing body 20S; a housing 20 having a light permeable window 23W provided to the housing body 20S; a sensor element 50 for detecting the deformation of a diaphragm that is deformed in accordance with a difference in pressure between the pressure of a vacuum chamber R3 formed in the housing 20 and the pressure of a gas flowing in a communicating space R2 and thereby detecting the difference in pressure; and a getter 60 arranged facing the window so that light irradiated to the inside of the vacuum chamber R3 from the outside of the housing 20 via the window 23W would reach. A combination of the getter 60 with a getter support member 70 shields light having passed through the window 23W due to that the whole of the window 23W is covered.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a diaphragm-type pressure detection device having a vacuum chamber in which a getter is disposed, and a method for manufacturing the same. [Background technology]

[0002] As disclosed in Patent Document 1, the diaphragm-type pressure detection device includes a housing in which a vacuum chamber and a space into which a fluid to be detected flows are formed, and a sensor element provided with a diaphragm that deforms in response to a pressure difference between the air pressure in the vacuum chamber and the pressure of the fluid that has flowed into the space. The sensor element detects the pressure difference by detecting the deformation of the diaphragm. In order to improve the degree of vacuum, a getter that adsorbs residual gas in the vacuum chamber is disposed in the vacuum chamber. This getter is activated by heating after the vacuum chamber is formed, and adsorbs residual gas remaining in the vacuum chamber. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2006-3234 A Summary of the Invention [Problem to be solved by the invention]

[0004] When the getter in the vacuum chamber of the diaphragm-type pressure detection device described in Patent Document 1 is heated, the entire diaphragm-type pressure detection device is heated. However, in the case of such heating, the diaphragm of the sensor element is also heated, and there is a risk that the diaphragm may be deformed or damaged. In order to prevent deformation and damage to the diaphragm, it is possible to keep the heating temperature low, but in that case, there is a risk that the getter may not be heated sufficiently. As such, there is room for improvement in the conventional heating of the getter.

[0005] The present invention has been made in view of the above-mentioned points, and an object of the present invention is to appropriately heat a getter in a vacuum chamber of a diaphragm-type pressure detection device. [Means for solving the problem]

[0006] In order to solve the above problems, a diaphragm type pressure detection device according to a first aspect of the present invention is a diaphragm type pressure detection device for detecting fluid pressure, comprising: a casing having a non-light-transmitting casing body and a light-transmitting window provided in the casing body, with a vacuum chamber and a space into which the fluid flows, a sensor element contained in the casing, which has a diaphragm that deforms in response to a pressure difference between the air pressure in the vacuum chamber and the pressure of the fluid that has flowed into the space, and detects the pressure difference by detecting the deformation of the diaphragm, and a getter that is disposed in the vacuum chamber and activated by heating, the getter being disposed opposite the window so that light irradiated from outside the casing through the window can reach the vacuum chamber, and the getter alone, or a combination of the getter and another member provided in the diaphragm type pressure detection device, is configured to cover the entire window to block light that has passed through the window toward the sensor element.

[0007] The getter may be combined with another member provided in the diaphragm type pressure detection device to cover the entire window, and the other member may be a support member that supports the getter.

[0008] When viewed in the thickness direction of the window, the getter may be larger than the window, and the getter may cover the entire window with its edge in contact with the inner wall surface that constitutes the vacuum chamber of the housing body.

[0009] The getter may have a surface in contact with a surface of the light transmitting portion on the vacuum chamber side.

[0010] The housing may include a housing main body having a first through hole and a second through hole formed therein, a penetrating member penetrating the housing main body through the first through hole, a hermetic seal sealing between the penetrating member and an inner wall of the first through hole, and a window provided in the second through hole, wherein the window and the hermetic seal are formed of the same material.

[0011] In order to solve the above problem, a manufacturing method for a vacuum device according to a second aspect of the present invention includes a first step of manufacturing the diaphragm type pressure detection device, and a second step of irradiating the getter with heating light through the window of the diaphragm type pressure detection device to heat and activate the getter.

[0012] The housing may include a housing main body having a first through hole and a second through hole formed therein, a penetrating member penetrating the housing main body through the first through hole, a hermetic seal sealing between the penetrating member and an inner wall of the first through hole, and a window provided in the second through hole, and the first step may include a step of forming the hermetic seal and the light-transmitting portion at the same time using the same material when forming the housing. Effect of the Invention

[0013] According to the present invention, since light for heating the getter in the vacuum chamber can be irradiated to the getter through the window and the light can be prevented from reaching the sensor element, the getter in the vacuum chamber can be heated without heating the sensor element. Therefore, according to the present invention, the getter in the vacuum chamber of the diaphragm type pressure detection device can be appropriately heated. [Brief description of the drawings]

[0014] [Figure 1] FIG. 1 is a cross-sectional view showing the structure of a diaphragm type pressure detection device according to an embodiment of the present invention. [Diagram 2] FIG. 2 is an enlarged cross-sectional view of a sensor element of the diaphragm type pressure detection device. [Diagram 3]FIG. 3 is a flowchart of a method for manufacturing the pressure detection device. [Figure 4] FIG. 4 is a diagram showing the relationship between the window and the getter according to the modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] A diaphragm type pressure detection device 10 according to an embodiment of the present invention will be described below with reference to the drawings. In Fig. 1 and other figures, an up-down direction is set, but this up-down direction is a direction set to facilitate understanding of the embodiment, and may be a direction different from the actual up-down direction depending on the installation state of the diaphragm type pressure detection device 10. Hereinafter, the diaphragm type pressure detection device 10 may also be simply referred to as the pressure detection device 10.

[0016] 1, a pressure detection device 10 according to an embodiment of the present invention includes a housing 20, a baffle 30, a sensor element support portion 40, a sensor element 50, a getter 60, and a getter support member 70. This pressure detection device 10 is configured as a pressure sensor of a diaphragm vacuum gauge that measures, for example, the air pressure in a vacuum chamber of a semiconductor manufacturing device or the like, that is, the pressure of a process gas generated in the vacuum chamber.

[0017] The housing 20 includes a lower housing member 21, a middle housing member 22, and an upper housing member 23, and houses the above-mentioned members 30 to 70. Inside the housing 20, a communication passage R1 communicating with the outside of the housing 20, i.e., the inside of the vacuum chamber, and a communication space R2 communicating with the communication passage R1 and into which the process gas in the vacuum chamber flows through the communication passage R1 are formed. Inside the housing 20, a vacuum chamber R3 is further formed in which a vacuum pressure is sealed to be compared with the pressure of the process gas flowing into the communication space R2. The housing 20 includes a non-translucent housing body 20S made of a metal such as Kovar or Inconel. The housing body 20S is the majority of the housing 20 except for a window 23W, hermetic seals 23E to 23F, and electrodes 23M to 23N, which will be described later. Here, the lower housing member 21, the intermediate housing member 22, and a main body 23A (described later) of the upper housing member 23 constitute a housing main body 20S of the housing 20. The lower housing member 21, the intermediate housing member 22, and a main body 23A (described later) of the upper housing member 23 may be formed of different materials.

[0018] The lower housing member 21 has a funnel shape that defines the communication passage R1 and the communication space R2. A cylindrical intermediate housing member 22 is joined to the lower housing member 21 by welding or the like, sandwiching the peripheral portion of a disk-shaped metal sheet 41 (described later) of the sensor element support portion 40. A disk-shaped upper housing member 23 is joined to the intermediate housing member 22 by welding or the like. The upper housing member 23 defines a vacuum chamber R3 together with the intermediate housing member 22. The structure of the upper housing member 23 will be described in detail later.

[0019] The baffle 30 is fixed to the lower housing member 21 by a fixing member or the like (not shown), and changes the flow of gas flowing from the vacuum chamber through the communication passage R1 into the upper communication space R2 toward the outer periphery of the housing 20. This prevents the gas in the vacuum chamber from flowing directly into a through hole 40A (described below) of the sensor element support part 40 located above the communication passage R1 and directly hitting the sensor element 50.

[0020] The sensor element support portion 40 supports the sensor element 50. The sensor element support portion 40 includes a disk-shaped thin metal plate 41 and a base 42 to which the sensor element 50 is fixed.

[0021] As described above, the metal sheet 41 has its peripheral portion joined to the lower housing member 21 and the middle housing member 22, and is supported by the housing 20. The base 42 includes a first disk 42A and a second disk 42B. The first disk 42A and the second disk 42B are welded together while sandwiching the metal sheet 41 from above and below. In this way, the base 42 is fixed to the metal sheet 41.

[0022] The sensor element support portion 40 defines the communication space R2 together with the lower housing member 21. A through hole 40A is formed in the center of the sensor element support portion 40, which passes through the base 42 and the thin metal plate 41 in the vertical direction and guides the process gas in the communication space R2 to the sensor element 50.

[0023] The sensor element 50 detects the pressure of the process gas in the communication space R2, i.e., the air pressure in the vacuum chamber. The sensor element 50 is fixed in close contact with the base 42 so as to cover the through-hole 40A. The sensor element 50, together with the sensor element support part 40, the middle housing member 22, and the upper housing member 23, defines a vacuum chamber R3.

[0024] As shown in FIG. 2, the sensor element 50 includes a spacer 51 made of a rectangular thin plate, a diaphragm 52 joined to the spacer 51 and deformed in response to the application of pressure, and a sensor base 53 joined to the diaphragm 52 to form a vacuum capacity chamber 50A. The sensor base 53 is provided with a through hole 53A that communicates the vacuum chamber R3 with the capacity chamber 50A. This allows the vacuum chamber R3 and the capacity chamber 50A to maintain the same degree of vacuum. In FIG. 1, the spacer 51 and the diaphragm 52 are depicted as one body. A fixed electrode 54 is formed in a recess of the sensor base 53 that constitutes the capacity chamber 50A, and a movable electrode 55 facing the fixed electrode 54 is formed on the diaphragm 52. The diaphragm 52 deforms due to the pressure difference between the air pressure in the capacity chamber 50A, i.e., the air pressure in the vacuum chamber R3, and the process gas introduced to the through hole 40A, i.e., the process gas flowing into the communication space R2. When the diaphragm 51 deforms, the distance between the fixed electrode 54 and the movable electrode 55 changes. The sensor element 50 detects the change in capacitance caused by this change in distance to detect the pressure difference. By detecting this pressure difference, the pressure of the process gas flowing into the ream space R2, i.e., the air pressure inside the vacuum chamber, is detected. The sensor element 50 may be, for example, a type of element that detects the deformation of the diaphragm using a piezoelectric element or the like.

[0025] The getter 60 is activated by being heated, and adsorbs residual gas remaining in the vacuum chamber R3. This adsorption improves the degree of vacuum in the vacuum chamber R3. An example of such a getter 60 is a non-evaporable getter. The getter 60 is supported by a metallic, non-translucent getter support member 70 that is attached to the lower surface of the upper housing member 23 of the housing 20 by welding or the like (not shown). Here, the getter 60 is cylindrical, but may be of another shape. The shape of the getter support member 70 is also arbitrary.

[0026] Here, a detailed description will be given of the upper housing member 23. The upper housing member 23 includes a main body 23A, hermetic seals 23E and 23F, electrodes 23M and 23N, and a window 23W.

[0027] The main body 23A is formed in a disk shape, and a getter support member 70 supporting a getter 60 is fixed to the lower surface thereof. Through holes 23B to 23D are formed in the main body 23A. Electrodes 23M and 23N pass through the through holes 23B and 23C, respectively. In other words, the electrodes 23M and 23N penetrate the main body 23A. A hermetic seal 23E seals between the electrode 23M and the inner wall of the through hole 23B. The electrode 23M is fixed to the main body 23A by the hermetic seal 23E. A hermetic seal 23F seals between the electrode 23N and the inner wall of the through hole 23C. The electrode 23N is fixed to the main body 23A by the hermetic seal 23F.

[0028] One end of the electrodes 23M and 23N is electrically connected to the sensor element 50. The electrodes 23M and 23N transmit an electric signal indicating the pressure difference detected by the sensor element 50 from the sensor element 50 to the outside of the housing 20. The electrode 23M includes a lead pin 23MA that transmits the electric signal, and a cylindrical metallic shield 23MB through which the lead pin 23MA passes. The electrode 23M further includes a hermetic seal 23MC that seals between the lead pin 23MA and the shield 23MB and fixes the lead pin 23MA to the shield 23MB. Similarly, the electrode 23N includes a lead pin 23NA, a shield 23NB, and a hermetic seal 23NC (not shown).

[0029] The window 23W is plate-shaped and light-transmitting, and is disposed in the through-hole 23C to close the through-hole 23C. While the window 23W is light-transmitting, the housing body 20S of the housing 20, such as the main body 23A, is non-light-transmitting as described above. Therefore, the window 23W functions as a window that allows the getter 60 to be seen from outside the housing 20. In other words, the getter 60 is disposed at a position where light (such as light L described below) irradiated from the outside of the housing 20 through the window 23W into the inside of the vacuum chamber R3 can reach it. The lower surface of the window 23W, that is, the surface on the vacuum chamber R3 side, is in contact with the upper surface of the getter 60, and thus the getter 60 faces the window 23W.

[0030] The window 23W faces the sensor element 50 with a gap therebetween, and the getter 60 is disposed between the window 23W and the sensor element 50. Therefore, light transmitted through the window 23W usually travels toward the sensor element 50. When viewed from the thickness direction (vertical direction) of the window 23W, the getter 60 has an outer shape smaller than that of the window 23W, but covers the entire window 23W from the vacuum chamber R3 side in combination with the non-transparent getter support member 70. As a result, light (particularly light L described below) transmitted through the window toward the sensor element 50 is blocked by the combination of the getter 60 and the getter support member 70.

[0031] The window 23W and the hermetic seals 23E, 23F, 23MC, and 23NC are made of the same material, which may be hard glass such as Kovar glass or borosilicate glass.

[0032] The getter 60 is heated and activated by the light L irradiated through the window 23W from the light source LS disposed outside the housing 20. The light source LS is depicted in FIG. 1 as a schematic block. The light L from the light source LS may be light that can pass through the window 23W and heat the getter 60. When the window 23W is made of Kovar glass, Kovar glass transmits wavelengths in the range of 500 to 2000 nm well. In this case, the light L may be any of a laser light having a wavelength in the range of 1030 to 1070 nm when the light source LS is a fiber laser, a laser light having a wavelength in the range of 800 to 1000 nm when the light source LS is a semiconductor laser, and an infrared light having a wavelength of 780 nm when the light source LS is an infrared lamp.

[0033] As described above, in the pressure detection device 10 according to the present embodiment, the housing 20 forming the vacuum chamber R3 is formed with the window 23W having light transmission. Furthermore, the getter 60 arranged in the vacuum chamber R3 is arranged facing the window 23W so that the light irradiated from the outside of the housing 20 through the window 23W reaches the getter 60. This allows the light L from the light source LS, which is the light for heating, to be irradiated to the getter 60 through the window 23W to heat the getter 60. Furthermore, the combination of the getter 60 and the getter support member 70 covers the window 23W, and the light transmitted through the window 23W toward the sensor element 50 is blocked by the combination, so that even if the irradiation position of the light L from the light source LS is shifted, the light L is prevented from reaching the sensor element 50 and heating the sensor element 50. Thus, according to the structure of the pressure detection device 10 of this embodiment, the getter 60 in the vacuum chamber R3 can be heated in a manner that prevents the sensor element 50 from being heated, thereby preventing thermal effects (deformation or damage) on the diaphragm 52 and allowing the getter 60 to be appropriately heated and activated.

[0034] As a method of heating the getter, it is possible to store the getter in a getter canister that communicates with the vacuum chamber, and heat the getter canister to heat the getter while suppressing the thermal effect on the vacuum chamber. However, this method requires a distance between the getter and the vacuum chamber, which increases the size of the entire pressure detection device 10. In this embodiment, a window 23W is provided in the housing 20, and the getter 60 in the vacuum chamber R3 is heated through the window 23W, so that the pressure detection device 10 is prevented from becoming large. From this perspective, in this embodiment, the getter 60 can be appropriately heated.

[0035] Furthermore, in the above embodiment, even if the degree of vacuum in the vacuum chamber R3 decreases, the getter 60 can be reactivated by irradiating the getter 60 with light L through the window 23W from outside the housing 20. This makes it possible to improve the degree of vacuum in the vacuum chamber R3 without disassembling the pressure detection device 10.

[0036] Furthermore, in the above embodiment, the upper surface of the getter 60 is in contact with the surface of the window 23W facing the vacuum chamber R3, so that the light L transmitted through the window 23W is directly incident on the getter 60, and the getter 60 is effectively heated.

[0037] Furthermore, in this embodiment, window 23W of upper housing member 23 and hermetic seals 23E and 23F are formed from the same material, so window 23W can be formed without increasing the number of types of material compared to when window 23W is not formed.

[0038] Next, a manufacturing method of the pressure detection device 10 will be described. As shown in FIG. 3, in this manufacturing method, first, the upper housing member 23 is formed (step S11). Specifically, instead of the hermetic seals 23E to 23NC and the window 23W, the upper housing member 23 is prepared in which a compression molded body of powder such as glass that is the material for these seals is arranged. The compression molded body may be provisionally sintered. Then, by heating this upper housing member 23, each compression molded body is sintered to form each of the hermetic seals 23E, 23F, 23MC, and 23NC and the window 23W. The hermetic seal 23E, etc. and the window 23W are fused to the main body 23A, etc. of the upper housing member 23, and thus the upper housing member 23 is completed. Note that step S11 and each of the following steps may include other processes such as heat treatment and plating as appropriate.

[0039] Thereafter, the getter support member 70 supporting the getter 60 is attached to the main body 23A of the upper housing member 23 (step S12).

[0040] Thereafter, in the pressure detection device 10, the peripheral portion of the sensor element support portion 40, more specifically, the peripheral portion of the thin metal plate 41, is sandwiched between the intermediate housing member 22 and the lower housing member 21 to which the baffle 30 is attached, and these are welded and joined to form a unit A (step S13). Step S13 may be performed before or after step S11 or S12, or in parallel with steps S11 and S12.

[0041] Thereafter, the upper housing member 23 is joined by welding or the like to the unit A formed in step S13 while arranging the sensor element 50 on the unit A (step S14). The sensor element 50 is electrically connected to the electrodes 23M and 23N of the upper housing member 23 via contact springs (not shown). By step S14, the pressure detection device 10 is formed, which has a chamber prior to becoming the vacuum chamber R3 (hereinafter, this chamber is also referred to as chamber R3).

[0042] After step S14, gas is discharged from the room R3 defined by the intermediate housing member 22, the upper housing member 23, the sensor element support portion 40, and the sensor element 50 to form a vacuum chamber R3 (step S15). For example, an exhaust port (not shown) is provided in the intermediate housing member, and gas in the room R3 is discharged from the exhaust port, and then the exhaust port is sealed by projection welding or the like. This allows the room R3 to become a vacuum chamber R3. Note that the vacuum chamber R3 may be formed by performing step S14 in a vacuum atmosphere. In this case, the exhaust port is not necessary.

[0043] Thereafter, the getter 60 is heated by irradiating it with heating light L through the window 23W of the upper housing member 23 (step S16). This heating activates the getter 60, which then adsorbs the residual gas remaining in the vacuum chamber R3. This adsorption improves the degree of vacuum in the vacuum chamber R3. In step S16, it is preferable to irradiate the heating light L from the thickness direction of the window 23W. This makes it possible to reduce the angle of incidence of the light L with respect to the window 23W, thereby reducing (including eliminating) the reflectance of the light L at the window 23W, and thus allowing the getter 60 to be appropriately heated.

[0044] As described above, in the method of manufacturing the pressure detection device 10 according to this embodiment, after manufacturing the vacuum device 10 in a state before activating the getter 60 (see steps S11 to S15), the getter 60 is irradiated with heating light L through the window 23W of the housing 20 of the vacuum device 10 to heat and activate the getter 60 (step S16). Therefore, the getter 60 can be heated with pinpoint accuracy, and heating of the sensor element 50 can be avoided. Therefore, the getter 60 can be appropriately heated and activated.

[0045] Furthermore, according to the above manufacturing method, the window 23W of the upper housing member 23 and the hermetic seals 23E and 23F are formed from the same material and at the same time by the same firing process. Therefore, compared to the case where the window 23W is not formed, the number of manufacturing steps does not increase and the window 23W can be easily formed.

[0046] As described above, the pressure detection device 10 and the manufacturing method for the pressure detection device 10 according to the present embodiment have been described, but these may be modified as appropriate.

[0047] As shown in FIG. 4, the getter 60 may be formed larger than the window 23W when viewed from the thickness direction, and may be shaped to cover the entire window 23W from the vacuum chamber R3 side. In this case, the getter 60 may cover the entire window 23W with its edge in contact with the lower surface of the main body 23A of the upper housing member 23, that is, the inner wall surface constituting the vacuum chamber R3 of the housing main body 20S. As a result, since there is no gap between the getter 60 and the housing main body 20S, all of the light passing through the window 23W is blocked. In FIG. 4, the getter 60 faces the window 23W with a gap therebetween, but the getter 60 and the window 23W may face each other in a state of contact. As another modified example, the getter 60 may have the same shape as the window 23W when viewed from the thickness direction of the window 23W. In other words, the outline of the getter 60 when viewed from the thickness direction may coincide with the outline of the window 23W.

[0048] The getter 60 may be directly fixed to the main body 23A with an adhesive or the like. For example, in the case of Fig. 4, the getter support member 70 may be omitted, and the getter 60 and the window 23W may be brought into contact with each other, and the two may be directly fixed to each other with a light-transmitting adhesive or the like. In the case of Fig. 4, the edge of the getter 60 and the main body 23A may be brought into contact with each other, and the two may be directly fixed to each other with an adhesive or the like.

[0049] In the pressure detection device 10, the getter 60 alone or the combination of the getter 60 with another member may be configured to cover the entire window 23W to block light transmitted through the window 23W toward the sensor element 50, and the specific embodiment is not limited to the above. The other member is the getter support member 70 in the above, but may be another light blocking member that does not support the getter 60 and is provided in the pressure detection device 10. In addition, there may be a gap between the getter 60 and the inner wall surface of the vacuum chamber R3, or the getter support member 70 may have a gap such as a through hole, and light transmitted through the window 23W toward a direction other than the sensor element 50 may leak into the vacuum chamber R3 from the gap.

[0050] The shape and material of each member of the pressure detection device 10 can be changed as appropriate. For example, the cross section of the housing 20 may be polygonal instead of annular. The window 23W may not be circular. The window 23W may be provided in the intermediate housing member 22 or the like. In this case, the position of the getter 60 is also set to a position that matches the position of the window 23W. The window 23W may be configured, for example, in a manner that blocks a through hole provided in the non-translucent housing main body 20S of the housing 20. The number of electrodes provided in the upper housing member 23, such as the electrode 23M, may be three or more. The electrode 23M, etc. that penetrates the main body 23A of the upper housing member 23 may be changed to another penetrating member. The penetrating member may be, for example, a member that passes through a through hole provided in the main body 23A, penetrates the main body 23A, and is hermetically sealed between the inner wall of the through hole. The detection target of the pressure detection device 10 may be the pressure of a fluid.

[0051] Each of the through holes described above, such as through holes 23B to 23D, may penetrate the member in which the through hole is provided, such as main body 23A, and may be a hole surrounded 360 degrees by the member or a notch-shaped hole.

[0052] Although the present invention has been described above with reference to the embodiment and the modified examples, the present invention is not limited to the above embodiment and the modified examples. For example, the present invention includes various modifications to the above embodiment and the modified examples that can be understood by a person skilled in the art within the scope of the technical idea of ​​the present invention. The configurations listed in the above embodiment and the modified examples can be appropriately combined within a range without contradiction. [Explanation of symbols]

[0053] 10...pressure detection device, 20...housing, 21...lower housing member, 22...middle housing member, 23...upper housing member, 23A...main body, 23B-23D...through hole, 23E, 23F...hermetic seal, 23M, 23N...electrode, 23W...window, 30...baffle, 40...sensor element support portion, 40A...through hole, 50...sensor element, 52...diaphragm, 60...getter, 70...getter support member, LS...light source, L...light, R1...communicating passage, R2...communicating space, R3...vacuum chamber.

Claims

1. A diaphragm-type pressure detection device for detecting a pressure of a fluid, comprising: a housing having a non-light-transmitting housing body and a light-transmitting window provided in the housing body, the housing having a vacuum chamber and a space into which the fluid flows formed therein; a sensor element accommodated in the housing, the sensor element including a diaphragm that deforms in response to a pressure difference between the air pressure in the vacuum chamber and the pressure of the fluid that has flowed into the space, the sensor element detecting the pressure difference by detecting the deformation of the diaphragm; a getter that is disposed within the vacuum chamber and is activated by being heated by heating light, the getter being disposed opposite the window so that the heating light that is irradiated from the outside of the housing through the window can reach the inside of the vacuum chamber, The getter alone or a combination of the getter and another member included in the diaphragm-type pressure detection device is configured to cover the entire window, thereby blocking the heating light that passes through the window from the outside of the housing toward the sensor element. Diaphragm type pressure detection device.

2. A combination of the getter and other members of the diaphragm-type pressure detection device is configured to cover the entire window, The other member is a support member that supports the getter.

2. The diaphragm type pressure sensing device according to claim 1.

3. When viewed in a thickness direction of the window, the getter is larger than the window, the getter covers the entire window with its edge in contact with an inner wall surface of the housing body that constitutes the vacuum chamber; 2. The diaphragm type pressure sensing device according to claim 1.

4. the getter has a surface in contact with the vacuum chamber side surface of the window; 4. A diaphragm type pressure measuring device according to claim 1.

5. the housing includes a housing main body in which a first through hole and a second through hole are formed, a penetrating member penetrating the housing main body through the first through hole, a hermetic seal that seals between the penetrating member and an inner wall of the first through hole, and the window provided in the second through hole; the window and the hermetic seal are formed of the same material; 5. The diaphragm type pressure detection device according to claim 1.

6. A first step of manufacturing a diaphragm-type pressure detection device according to any one of claims 1 to 5; a second step of irradiating the getter with the heating light through the window of the diaphragm-type pressure detection device to heat and activate the getter; A method for manufacturing a diaphragm type pressure detection device having the above structure.

7. the housing includes a housing main body in which a first through hole and a second through hole are formed, a penetrating member penetrating the housing main body through the first through hole, a hermetic seal that seals between the penetrating member and an inner wall of the first through hole, and a window provided in the second through hole; the first step includes forming the hermetic seal and the window at the same time from the same material when forming the housing; A method for manufacturing the diaphragm type pressure detection device according to claim 6.

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