Semiconductor device and its manufacturing method

Abstract

To improve the reliability of a semiconductor device with an IGBT by providing a built-in resistor GR connected in series between a gate pad and a trench gate electrode.SOLUTION: A built-in resistor GR that electrically connects a trench gate electrode TG and a gate pad GP is formed by a conductive film formed on a semiconductor substrate SB through an insulating film IF4. Here, the insulating film IF4 is thicker than the insulating film IF2 in the trench TR and thinner than the insulating film IF1, which is a field oxide film.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a semiconductor device and a manufacturing method thereof, and in particular to a technique that is effective when applied to IGBTs. [Background technology]

[0002] In an IGBT (Insulated Gate Bipolar Transistor), which is a type of power semiconductor, a built-in resistor made of, for example, a polysilicon film is known as a built-in element between a gate pad and a gate electrode.

[0003] Patent Document 1 (JP 2017-41547 A) describes forming a polysilicon film integrated with a trench gate electrode of an IGBT on the upper surface of a semiconductor substrate. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2017-41547 A Summary of the Invention [Problem to be solved by the invention]

[0005] The built-in resistor is considered to be formed integrally with the polysilicon film that constitutes the trench gate electrode. In this case, the insulating film below the built-in resistor is made of the same oxide film as the trench gate insulating film (i.e., an oxide film formed in the same process as the gate oxide film), resulting in a relatively thin oxide film structure. This raises the risk of dielectric breakdown between the built-in resistor and the semiconductor substrate. On the other hand, if this oxide film is made thicker, the trench gate insulating film will also become thicker, making it impossible to apply an electric field to the P-type channel region near the trench gate electrode, causing problems with the operation of the IGBT.

[0006] Other objects and novel features will become apparent from the description of this specification and the accompanying drawings. [Means for solving the problem]

[0007] A brief outline of a representative embodiment of the present invention will be described below.

[0008] In one embodiment of the present invention, a semiconductor device has a built-in resistor that electrically connects a trench gate electrode and a gate pad, the built-in resistor being formed by a conductive film formed on a semiconductor substrate via an insulating film, the insulating film having a thickness that is thicker than the trench gate insulating film and thinner than the field oxide film. Effect of the Invention

[0009] According to one embodiment disclosed in the present application, the reliability of a semiconductor device can be improved. [Brief description of the drawings]

[0010] [Figure 1] 1 is a schematic diagram showing a layout configuration of a semiconductor chip on which a semiconductor device according to an embodiment of the present invention is mounted; [Diagram 2] 1 is a cross-sectional view showing a semiconductor device according to an embodiment of the present invention; [Diagram 3] 1A to 1C are cross-sectional views illustrating a manufacturing process of a semiconductor device according to an embodiment of the present invention. [Figure 4] 4 is a cross-sectional view illustrating the manufacturing process of the semiconductor device subsequent to FIG. 3. [Diagram 5] 5 is a cross-sectional view illustrating the manufacturing process of the semiconductor device continued from FIG. 4. [Figure 6] 6 is a cross-sectional view illustrating the manufacturing process of the semiconductor device subsequent to FIG. 5. [Figure 7] 7A to 7C are cross-sectional views illustrating the manufacturing process of the semiconductor device continued from FIG. 6. [Figure 8] 8 is a cross-sectional view illustrating the manufacturing process of the semiconductor device continued from FIG. 7. [Figure 9] 9 is a cross-sectional view illustrating the manufacturing process of the semiconductor device subsequent to FIG. 8. [Figure 10]10 is a cross-sectional view illustrating the manufacturing process of the semiconductor device continued from FIG. 9. [Figure 11] 11 is a cross-sectional view illustrating the manufacturing process of the semiconductor device continued from FIG. 10. [Figure 12] 12 is a cross-sectional view illustrating the manufacturing process of the semiconductor device subsequent to FIG. 11. [Figure 13] FIG. 11 is a cross-sectional view showing a semiconductor device according to a modified example of the embodiment of the present invention. [Figure 14] FIG. 11 is a cross-sectional view showing a semiconductor device as a comparative example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] In the following embodiments, when necessary for convenience, the description will be divided into multiple sections or embodiments, but unless otherwise specified, they are not unrelated to each other, and one is a partial or complete modification, detail, supplementary explanation, etc. of the other. Furthermore, in the following embodiments, when the number of elements, etc. (including the number, numerical value, amount, range, etc.) is mentioned, it is not limited to the mentioned number, and may be more or less than the mentioned number, unless otherwise specified or clearly limited in principle to a specific number.

[0012] Furthermore, in the following embodiments, the components (including element steps, etc.) are not necessarily essential unless otherwise specified or considered to be obviously essential in principle. Similarly, in the following embodiments, when referring to the shape, positional relationship, etc. of the components, etc., it is intended to include those that are substantially similar or similar to the shape, etc., unless otherwise specified or considered to be obviously not essential in principle. The same applies to the above numerical values ​​and ranges.

[0013] Hereinafter, the embodiments will be described in detail with reference to the drawings. In all the drawings for explaining the embodiments, the same reference numerals are used for the members having the same functions, and the repeated explanations are omitted. In the following embodiments, the explanations of the same or similar parts will not be repeated as a rule unless it is particularly necessary.

[0014] <Room for improvement> Hereinafter, room for improvement of the semiconductor device of the comparative example will be described with reference to Fig. 14. Fig. 14 is a cross-sectional view showing the semiconductor device of the comparative example.

[0015] The semiconductor device of the comparative example includes an IGBT (Insulated Gate Bipolar Transistor). As shown in Fig. 14, the semiconductor chip constituting the semiconductor device of the comparative example has a first region 1A, a second region 1B, and a third region 1C, and Fig. 14 shows the first region 1A, the second region 1B, and the third region 1C in order from the left. The first region 1A is a region including a peripheral region that surrounds the second region 1B and the third region 1C in a plan view. Fig. 14 does not show an element region that functions as an IGBT.

[0016] The semiconductor device of the comparative example includes an N-type semiconductor substrate SB, a P-type well PW formed on the upper surface of the semiconductor substrate SB, an N-type semiconductor layer NL formed in the semiconductor substrate SB near the lower surface of the semiconductor substrate SB, and a P-type semiconductor layer PL formed from the lower surface of the N-type semiconductor layer NL to the lower surface of the semiconductor substrate SB. In the third region 1C, a trench (groove) TR is formed on the upper surface of the semiconductor substrate SB, and a trench gate electrode TG is embedded in the trench TR via an insulating film IF5. The trench gate electrode TG is composed of a semiconductor layer SL formed on the semiconductor substrate SB. In the second region 1B, the semiconductor layer SL is formed on the upper surface of the semiconductor substrate SB outside the trench TR via an insulating film IF5, and the semiconductor layer SL in the second region 1B constitutes a built-in resistor GR1. That is, each of the built-in resistor GR1 and the trench gate electrode TG is a part of one semiconductor layer SL, and the film thickness of the insulating film IF5 below each of the built-in resistor GR1 and the trench gate electrode TG is approximately uniform.

[0017] An emitter pad EP is formed on the semiconductor substrate SB in the first region 1A, supplying an emitter potential to the emitter region of the IGBT. A gate pad GP is connected to the upper surface of the built-in resistor GR1 in the second region 1B, supplying a gate potential to the trench gate electrode TG via the built-in resistor GR1. Here, the back surface of the semiconductor substrate SB is not uniformly formed with a P-type semiconductor layer PL, but has an N-type semiconductor layer BNL formed as a defect in a part of it.

[0018] The insulating film IF5 is mainly made of, for example, a TEOS (Tetraethyl orthosilicate) film and has a thickness of, for example, about 110 nm. Specifically, a TEOS film is formed to a thickness of 110 nm on a thermal oxide film having a thickness of, for example, 10 nm, to form the insulating film IF5 having a total thickness of 110 nm.

[0019] In the structure of the comparative example, when the IGBT changes from an off state to an on state, a high collector voltage may be applied at a relatively high speed (for example, dV / dt>10 kV / μs). At this time, a high electric field is applied to the insulating film IF5 between the P-type well PW connected to the emitter potential and the built-in resistor GR1, and the insulating film IF5 may be destroyed. In particular, when defects are introduced in the process of forming the structure on the back side among the processes of forming the IGBT, and an N-type semiconductor layer BNL, which is a defect, is formed in a part of the P-type semiconductor layer PL on the back side, the dielectric breakdown of the insulating film IF5 occurs more significantly.

[0020] When the IGBT is in the off state, the bias voltage of the free wheel diode connected in parallel to the IGBT is applied to the collector voltage of the IGBT. When this voltage is applied, a parasitic body diode in the IGBT operates, and holes are supplied from the emitter electrode on the semiconductor substrate SB, and electrons are supplied from the collector electrode on the back surface of the semiconductor substrate SB, resulting in a situation in which carriers exist in the IGBT (see FIG. 14). The parasitic body diode is, for example, a diode formed by a PN junction between an N-type layer made of an N-type semiconductor substrate SB and an N-type semiconductor layer NL shown in the second region 1B of FIG. 14, and a P-type well.

[0021] When the IGBT transitions to the on state in the situation where carriers exist in the semiconductor substrate SB as described above, if a collector voltage is applied with a high dV / dt, the remaining carriers are discharged. Specifically, the holes in the P-type well PW are discharged through the emitter pad (emitter electrode) EP, and the electrons in the semiconductor substrate SB are discharged through the N-type semiconductor layer NL. The discharge of the remaining carriers causes impact ionization in the semiconductor substrate SB below the built-in resistor GR1, and the carriers thus generated are swept away, causing a voltage drop. As a result, a high electric field is generated in the semiconductor substrate SB. At this time, if the insulating film IF5 below the built-in resistor GR1 is as thin as the trench gate insulating film as in the comparative example, the electric field of the insulating film IF5 in the second region 1B reaches a breakdown electric field, leading to the breakdown of the insulating film IF5 below the built-in resistor GR1.

[0022] The insulating film IF5 between the built-in resistor GR1 and the P-type well PW connected to the emitter potential is a portion where no potential difference occurs normally, that is, in the static characteristics except when the collector voltage transitions. Therefore, the occurrence of such breakdown was not anticipated. Thus, the inventors have found the first room for improvement, that is, even in a place where no potential difference occurs in the static characteristics, a potential difference occurs under a transient operating condition, and a high electric field causes insulation breakdown.

[0023] In addition, the thermal oxide film constituting the gate trench insulating film is preferably formed thicker because it has a denser structure and is more reliable than the TEOS film. In addition, the thermal oxide film is preferably formed thicker because it reduces film formation variations. However, if the thermal oxide film is thick, the thermal oxide film covering the upper surface of the semiconductor substrate SB beside the trench TR also becomes thick. In this way, if the thermal oxide film that continuously covers the corner of the semiconductor substrate SB, which is the upper end of the trench TR, is formed thick, a problem occurs in that the corner is easily sharpened. Therefore, if the thermal oxide film is made thick, there is room for a second improvement in that insulation breakdown is easily caused between the conductive layer SL covering the corner due to electric field concentration at the corner.

[0024] <Example of semiconductor chip layout configuration> A semiconductor device including an IGBT according to the present embodiment will be described with reference to Figures 1 and 2. Figure 1 is a schematic diagram showing an example of the layout configuration of a semiconductor chip on which the semiconductor device according to the present embodiment is mounted. Figure 2 is a cross-sectional view showing the semiconductor device according to the present embodiment.

[0025] As shown in FIG. 1, the semiconductor chip CHP of this embodiment has a rectangular planar shape. In plan view, the semiconductor chip CHP has a gate pad GP, a gate wiring W1, and an emitter pad EP. In addition, a collector electrode (not shown in FIGS. 1 and 2) covering the lower surface of the semiconductor substrate is formed on the lower surface (rear surface) opposite to the upper surface of the semiconductor chip CHP. On the upper surface side of the semiconductor chip CHP, there is a ring-shaped peripheral region that surrounds the gate pad GP, the gate wiring W1, and the emitter pad EP in plan view and is formed along the contour of the semiconductor chip CHP. On the upper surface of the semiconductor substrate in the peripheral region, for example, a field limiting ring (FLR) that is a termination structure is formed. In addition, a ring-shaped wiring WR is formed on the semiconductor substrate in the peripheral region.

[0026] Fig. 2 shows, from left to right, a first region 1A, a second region 1B, and a third region 1C. The cross section of the first region 1A shown in Fig. 2 is taken along line AA in Fig. 1, the cross section of the second region 1B is taken along line BB in Fig. 1, and the cross section of the third region 1C is taken along line CC in Fig. 1. The first region 1A is a region that includes a peripheral region that surrounds the second region 1B and the third region 1C in a plan view. The element region (cell region) that functions as an IGBT is not shown in Fig. 2.

[0027] The semiconductor device is N -The semiconductor substrate SB includes an N-type semiconductor substrate SB and a P-type well PW formed from the upper surface of the semiconductor substrate SB to a predetermined depth of the semiconductor substrate SB. The P-type well PW is a semiconductor region formed across the first region 1A, the second region 1B, and the third region 1C. The semiconductor substrate SB includes an N-type semiconductor layer NL formed in the vicinity of the lower surface of the semiconductor substrate SB away from the lower end of the P-type well PW and having a higher impurity concentration than the semiconductor substrate SB, and a P-type semiconductor layer PL formed from the lower surface of the N-type semiconductor layer NL to the lower surface of the semiconductor substrate SB. That is, the semiconductor substrate SB includes a P-type semiconductor layer PL, an N-type semiconductor layer NL, a semiconductor substrate SB, and a P-type well PW formed in this order from the lower surface side. In the first region 1A, an insulating film IF1 that is a ring-shaped field oxide film is formed on the semiconductor substrate SB, and the P-type well PW is not formed directly below the insulating film IF1.

[0028] The semiconductor substrate SB is made of single crystal Si (silicon) doped with an N-type impurity such as P (phosphorus). The N-type semiconductor layer NL is a semiconductor region formed by doping an N-type impurity (e.g., P (phosphorus)) into the semiconductor substrate SB. The N-type semiconductor layer NL functions as a buffer layer for the IGBT. The P-type semiconductor layer PL and the P-type well PW are semiconductor regions formed by doping a P-type impurity (e.g., B (boron)) into the semiconductor substrate SB. The P-type semiconductor layer PL is a layer that injects holes into the semiconductor substrate SB.

[0029] In the third region 1C, a trench (groove) TR is formed in the upper surface of the semiconductor substrate SB, and a trench gate electrode TG is embedded in the trench TR via an insulating film IF2. The depth of the trench TR is shallower than the P-type well PW, and the lower end of the trench TR does not reach the lower end of the P-type well PW. The trench gate electrode TG is composed of a polysilicon film embedded in the trench TR via the insulating film IF2, which is a trench gate insulating film. For example, P (phosphorus) is introduced into the polysilicon film constituting the trench gate electrode TG. Here, the polysilicon film and insulating film IF2 constituting the trench gate electrode TG are not formed on the semiconductor substrate SB in a region outside the trench TR, that is, in a region not overlapping with the trench TR in a planar view.

[0030] In the second region 1B, the built-in resistor GR is formed on the upper surface of the semiconductor substrate SB via the insulating film IF4. The built-in resistor GR is formed directly above the P-type well PW. In other words, the built-in resistor GR overlaps with the P-type well PW in a plan view. The insulating film IF4 is composed of insulating films IF2 and IF3 laminated in this order on the semiconductor substrate SB. This insulating film IF2 is made of a thermal oxide film formed in the same process as the insulating film IF2 formed in the trench TR in the third region 1C. The insulating film IF3 is, for example, a TEOS film. Therefore, the film thickness of the insulating film IF4 is larger than the film thickness of the insulating film IF2 in the trench TR. In other words, the thickness of the insulating film between the built-in resistor GR and the upper surface of the semiconductor substrate SB is larger than the thickness of the insulating film between the surface of the trench TR and the trench gate electrode TG. The film thickness of the insulating film IF4 is about 2 to 7 times the film thickness of the insulating film IF5 of the comparative example, specifically, about 5 times.

[0031] Since the trench gate insulating film is formed only of the insulating film IF2, the insulating film IF2 contacts both the surface of the semiconductor substrate SB (surface of the trench TR) and the surface of the trench gate electrode TG. Here, the insulating film IF2, which is the trench gate insulating film, is made of a single layer of thermal oxide film, so that the occurrence of variations in the film thickness of the trench gate insulating film can be prevented compared to the case where the trench gate insulating film has a laminated structure of a thermal oxide film and a TEOS film. This makes it possible to reduce variations in the threshold voltage Vth of the IGBT.

[0032] The thickness of the insulating film IF4 is smaller than that of the insulating film IF1, which is a field oxide film (field insulating film). This is because if the insulating film IF4 is formed thicker than the field oxide film, its thickness is too large and accurate exposure cannot be performed in the photolithography process, which may result in failure to perform normal patterning. The insulating film IF2 has a higher dielectric constant and a denser structure than the insulating film IF3.

[0033] The thickness of the insulating film IF3 is larger than that of the insulating film IF4. The thickness of the insulating film IF4 is, for example, 100 to 700 nm, and the thickness is more preferably, for example, 200 to 400 nm. The thickness of the insulating film IF2 is, for example, 70 nm or more, specifically, for example, 100 nm. That is, the shortest distance between the surface of the trench TR and the trench gate electrode TG is 70 nm or more. The thickness of the insulating film IF3 is, for example, about 450 nm. The thickness of the insulating film IF1 is, for example, about 700 nm. The insulating film IF3 is not limited to a silicon oxide film, and may be composed of, for example, a silicon nitride film. The insulating film IF1 is, for example, a ring-shaped pattern composed of a silicon oxide film, and surrounds the element region, the second region 1B, the third region 1C, the emitter pad EP described later, the gate pad GP, and the gate wiring W1 in a plan view.

[0034] The built-in resistor GR is a resistor made of, for example, a polysilicon film and made conductive by, for example, introducing As (arsenic). Here, the built-in resistor GR and the trench gate electrode TG are spaced apart from each other. The built-in resistor GR is a resistive element made of a resistor connected in series between the gate pad GP and the trench gate electrode TG.

[0035] An interlayer insulating film IL made of, for example, a silicon oxide film is formed on the semiconductor substrate SB so as to cover the trench gate electrodes TG, the insulating films IF1 to IF4, and the built-in resistor GR. The interlayer insulating film IL has connection holes penetrating from the upper surface to the lower surface thereof at a plurality of locations, and plugs PG are embedded in the connection holes. The plugs PG are made of, for example, a TiN (titanium nitride) / Ti (titanium) film which is a barrier metal film continuously covering the bottom and side surfaces of the connection holes, and a W (tungsten) film embedded in the connection holes via the barrier metal film. The plugs PG are connected to the upper surface of the P-type well PW in the first region 1A, both ends of the upper surface of the built-in resistor GR in the second region 1B, and the upper surface of the trench gate electrode TG. Here, the width of the plugs PG is smaller than the width of the trench gate electrode TG in the direction along the upper surface of the semiconductor substrate SB. Therefore, the bottom surface of the plugs PG connected to the trench gate electrode TG is spaced apart from the upper surface of the semiconductor substrate SB.

[0036] A laminated metal film made of a metal film BM and a metal film M1 formed on the metal film BM is formed on the interlayer insulating film IL and the plug PG. The metal film BM, which is a barrier metal film, is made of, for example, a TiW (titanium tungsten) film, and the metal film M1, which is a main conductor film, is made of, for example, an AlCu (aluminum copper) film. The metal film M1 may be an AlSi film in which Si is added to an Al film. Among the plurality of laminated metal films, one electrically connected to the P-type well PW via the plug PG in the first region 1A constitutes an emitter pad (emitter electrode) EP. Among the plurality of laminated metal films, one connected to the upper surface of one end of the built-in resistor GR via the plug PG in the second region 1B constitutes a gate pad GP. Among the plurality of laminated metal films, one connected to the upper surface of the other end of the built-in resistor GR via the plug PG in the second region 1B constitutes a gate wiring W1. The gate wiring W1 is formed from the second region 1B to the third region 1C. The gate wiring W1 in the third region 1C is electrically connected to the trench gate electrode TG via the plug PG. The gate pad GP and the gate wiring W1 are spaced apart from each other.

[0037] In this manner, the gate pad GP and the trench gate electrode TG are electrically connected by a plurality of plugs PG connected in series therebetween, the built-in resistor GR, and the gate wiring W1. Specifically, the gate pad GP and the built-in resistor GR are electrically connected via the plug PG, the built-in resistor GR and the gate wiring W1 are electrically connected via the plug PG, and the gate wiring W1 and the trench gate electrode TG are electrically connected via the plug PG.

[0038] The emitter pad EP in the first region 1A supplies an emitter potential to the emitter region of the IGBT. The gate pad GP in the second region 1B supplies a gate potential to the trench gate electrode TG via the built-in resistor GR. The gate potential thus supplied to the trench gate electrode TG in the third region 1C is supplied to the trench gate electrode of the IGBT formed in the element region (not shown), thereby controlling the operation of the IGBT. The trench gate electrode TG and the P-type semiconductor layer (collector region) PL constitute the IGBT.

[0039] In a peripheral region surrounding the gate pad GP, the gate wiring W1 and the emitter pad EP in plan view, a wiring WR made of the laminated metal film and spaced apart from the emitter pad EP is formed.

[0040] <Effects of semiconductor device> In this embodiment, by making the insulating film IF4 directly below the built-in resistor GR thicker than the trench gate insulating film, the transient electric field applied to the insulating film IF4 can be mitigated even if a collector voltage of high dV / dt is applied when the IGBT changes from an off state to an on state in its switching operation.

[0041] That is, the electric field can be alleviated by thickening the insulating film to which the electric field is applied. Here, the insulating film IF4 is formed thicker than the insulating film IF5 of the comparative example, thereby alleviating the electric field. This prevents the insulating film IF4 from being destroyed. Specifically, the thickness of the insulating film IF4 is about five times that of the insulating film IF5 of the comparative example, so that the electric field can be alleviated to 1 / 5. Here, the insulating film IF2, which is the trench gate insulating film, and the insulating film IF4 below the built-in resistor GR have different configurations, so that the trench gate insulating film does not become thick even if the insulating film IF4 is made thick. Therefore, only the insulating film IF4 directly below the built-in resistor GR can be formed thick as described above. This eliminates the first room for improvement.

[0042] Moreover, when the insulating film IF2, which is a thermal oxide film, is formed relatively thick, for example, about 100 nm, it is considered that a convex corner (pointed corner) is formed at the corner of the semiconductor substrate SB, which is the upper end of the trench TR. When such a corner is formed in the comparative example, as explained as the second room for improvement, insulation breakdown is likely to occur at the corner. In contrast, in the present embodiment, the interlayer insulating film IL is formed immediately above the corner, and the insulating film IF2 is not formed immediately above the corner. Also, a polysilicon film such as the trench gate electrode TG or the built-in resistor GR is not formed immediately above the corner. That is, each of the trench gate electrode TG and the plug PG connected to the upper surface thereof exposes the upper surface of the semiconductor substrate SB adjacent to the trench TR in the direction along the upper surface of the semiconductor substrate SB. Therefore, the reliability of the gate electrode can be ensured. That is, the second room for improvement can be eliminated.

[0043] <Semiconductor device manufacturing process> The manufacturing method of the semiconductor device of this embodiment will be described below with reference to Fig. 3 to Fig. 12. Fig. 3 to Fig. 12 are cross-sectional views of the semiconductor device of this embodiment during the formation process. Fig. 3 to Fig. 12 are cross-sectional views showing the same part as Fig. 2.

[0044] First, as shown in FIG. 3, a semiconductor substrate SB, which is a disk-shaped semiconductor wafer, is prepared. The semiconductor substrate SB is made of single crystal Si (silicon) doped with an N-type impurity such as P (phosphorus). The semiconductor substrate SB has chip regions arranged in a matrix in a plan view, which will be cut into semiconductor chips in a later process. Each chip region of the semiconductor substrate SB has an element region where an IGBT is formed, a second region 1B where a gate pad and a built-in resistor are formed, and a third region 1C including a power supply path of a trench gate insulating film. Each chip region of the semiconductor substrate SB has an annular peripheral region that collectively surrounds the element region, the second region 1B, and the third region 1C in a plan view. The first region 1A is a region that includes a region where an emitter pad is formed and an inner end of the annular peripheral region.

[0045] Next, an insulating film IF1, which is a field oxide film, is formed on the semiconductor substrate SB. The insulating film IF1 is made of, for example, a silicon oxide film, and can be formed by, for example, a CVD (Chemical Vapor Deposition) method. Here, the insulating film IF1 is initially formed to a thickness of 950 nm, but due to cleaning and other steps in the subsequent intermediate processes, the final thickness becomes about 700 nm.

[0046] Next, as shown in FIG. 4, a portion of the insulating film IF1 is removed using photolithography and dry etching, thereby exposing a portion of the upper surface of the semiconductor substrate SB in the first region 1A and the upper surfaces of the semiconductor substrate SB in each of the second region 1B and the third region 1C.

[0047] Next, using the insulating film IF1 as a mask (ion implantation blocking mask), a P-type impurity (e.g., B (boron)) is implanted into the upper surface of the upper surface of the semiconductor substrate SB by ion implantation or the like. As a result, a P-type semiconductor region PW1 is formed from the upper surface of the semiconductor substrate SB to a predetermined depth.

[0048] 5, for example, a TEOS film (not shown) is formed on the semiconductor substrate SB by, for example, a CVD method, and then the TEOS film is processed by using photolithography and dry etching to expose a part of the upper surface of the semiconductor substrate SB in the third region 1C. Subsequently, a plurality of trenches TR having a predetermined depth are formed in the upper surface of the semiconductor substrate SB by etching, and then the TEOS film is removed.

[0049] Next, as shown in FIG. 6, the semiconductor substrate SB is heat-treated to diffuse the impurities introduced into the P-type semiconductor region PW1. As a result, a P-type well PW having a depth deeper than the P-type semiconductor region PW1 is formed in the semiconductor substrate SB. Then, the semiconductor substrate SB is heat-treated to form an insulating film IF2 which is a thermal oxide film covering the surface of the semiconductor substrate SB including the surface of the trench TR. This insulating film IF2 may be formed, for example, as follows. First, a sacrificial oxide film (not shown) is formed on the semiconductor substrate SB by heat-treating the semiconductor substrate SB at, for example, 1200° C. for about 30 minutes, and then the sacrificial oxide film is removed by, for example, wet etching. Thereafter, the semiconductor substrate SB is again heat-treated at, for example, 950° C. for about 40 minutes to form an insulating film IF2 made of a thermal oxide film.

[0050] Next, as shown in Fig. 7, a trench gate electrode TG is formed in the trench TR via an insulating film IF2. That is, a polysilicon film (conductive film) is formed on the semiconductor substrate SB including the inside of the trench TR by a CVD method or the like. P (phosphorus) is introduced into this polysilicon film when it is formed. Then, an etch-back is performed to remove the polysilicon film outside the trench TR. This forms a trench gate electrode TG made of the polysilicon film remaining only in the trench TR.

[0051] 8, an insulating film IF3 and a polysilicon film SF are formed in this order over the semiconductor substrate SB including over the trench gate electrode TG by a CVD method or the like. The insulating film IF3 is made of, for example, a TEOS film.

[0052] Next, as shown in Fig. 9, a part of the laminate film consisting of the polysilicon film SF and the insulating films IF3 and IF2 is removed using photolithography and dry etching. This exposes the upper surface of the semiconductor substrate SB in each of the first region 1A, the second region 1B, and the third region 1C. This forms the built-in resistor GR consisting of the polysilicon film SF in the second region 1B. In this way, the built-in resistor GR and the trench gate electrode TG are formed in different processes.

[0053] Next, as shown in FIG. 10, although not shown, a channel region and an emitter region are formed on the upper surface of the semiconductor substrate SB in the element region by using photolithography and ion implantation.

[0054] Subsequently, an interlayer insulating film IL is formed on the semiconductor substrate SB including the trench gate electrode TG, the built-in resistor GR, and the insulating film IF1 by a CVD method etc. The interlayer insulating film IL is made of, for example, a PSG (Phosphorus Silicate Glass) film, that is, a silicon oxide film.

[0055] Next, a part of the interlayer insulating film IL is removed using photolithography and dry etching. This forms a plurality of connection holes (openings) that expose the upper surface of the P-type well PW in the first region 1A, the upper surfaces of both ends of the built-in resistor GR in the second region 1B, and the upper surface of the trench gate electrode TG in the third region 1C. After that, although not shown, a body contact region, which is a P-type semiconductor region, is formed by ion implantation on the upper surface of the semiconductor substrate SB at the bottom of the connection hole in the element region.

[0056] Next, as shown in Fig. 11, plugs PG are formed to fill the inside of each of the multiple connection holes. Here, a TiN (titanium nitride) / Ti (titanium) film, which is a barrier metal film, and a W (tungsten) film, which is a main conductor film, are formed in this order by a sputtering method or the like on the semiconductor substrate SB (on the interlayer insulating film IL) including the inside of the connection holes, to completely fill the inside of the connection holes. After that, the metal films formed outside each connection hole are removed by, for example, etch-back, to form the plugs PG.

[0057] Next, as shown in FIG. 12, a metal film BM, which is a barrier metal film, and a metal film M1, which is a main conductor film, are formed in this order on the semiconductor substrate SB (on the interlayer insulating film IL) including on the multiple plugs PG, for example, by sputtering. This forms a laminated metal film, which is a laminated film made of the metal films BM and M1. The metal film BM is made of, for example, a TiW (titanium tungsten) film, and the metal film M1 is made of, for example, an AlCu (aluminum copper) film. Next, the laminated metal film is processed using the photolithography technique and dry etching method, thereby exposing the upper surface of a part of the interlayer insulating film IL.

[0058] Of the multiple laminated metal films thus separated from one another, the one electrically connected to the P-type well PW via the plug PG in the first region 1A constitutes an emitter pad (emitter electrode) EP. Also, of the multiple laminated metal films, the one connected to the upper surface of one end of the built-in resistor GR via the plug PG in the second region 1B constitutes a gate pad GP. Also, of the multiple laminated metal films, the one connected to the upper surface of the other end of the built-in resistor GR via the plug PG in the second region 1B constitutes a gate wiring W1. The gate wiring W1 is formed from the second region 1B to the third region 1C. The gate wiring W1 in the third region 1C is electrically connected to the trench gate electrode TG via the plug PG. The gate pad GP and the gate wiring W1 are spaced apart from each other.

[0059] In this manner, the gate pad GP and the trench gate electrode TG are electrically connected by a plurality of plugs PG connected in series therebetween, the built-in resistor GR, and the gate wiring W1. Specifically, the gate pad GP and the built-in resistor GR are electrically connected via the plug PG, the built-in resistor GR and the gate wiring W1 are electrically connected via the plug PG, and the gate wiring W1 and the trench gate electrode TG are electrically connected via the plug PG.

[0060] Next, as shown in FIG. 12, an N-type semiconductor layer NL is formed by introducing an N-type impurity (e.g., P (phosphorus)) into the lower surface of the semiconductor substrate SB by ion implantation. The N-type semiconductor layer NL is spaced apart from the P-type well PW and the trench TR. Next, a P-type semiconductor layer PL is formed by introducing a P-type impurity (e.g., B (boron)) into the lower surface of the semiconductor substrate SB by ion implantation. The depth of the P-type semiconductor layer PL from the lower surface of the semiconductor substrate SB is shallower than the depth of the N-type semiconductor layer NL from the lower surface of the semiconductor substrate SB. The P-type semiconductor layer PL constitutes the collector region of the IGBT. In this way, an IGBT including at least the trench gate electrode TG, the emitter region (not shown), and the collector region (P-type semiconductor layer PL) is formed. Next, a collector electrode (not shown) is formed to cover the lower surface of the semiconductor substrate SB.

[0061] Through the above steps, the semiconductor device of this embodiment is substantially completed.

[0062] <Effects of the manufacturing method of the semiconductor device> Next, the effects of the method for manufacturing a semiconductor device according to this embodiment will be described.

[0063] In the semiconductor device of the comparative example shown in FIG. 14, the built-in resistor GR is formed at the same time as the trench gate electrode TG. Therefore, the insulating film under the built-in resistor GR has the same thickness as the trench gate insulating film. The thickness of the trench gate insulating film is limited in order to operate the IGBT normally. Therefore, in the comparative example, the insulating film under the built-in resistor GR cannot be made thicker than a certain amount, and dielectric breakdown is likely to occur between the semiconductor substrate SB and the built-in resistor GR.

[0064] In contrast, in this embodiment, as described with reference to Figs. 7 to 9, the built-in resistor GR and the trench gate electrode TG are formed in different processes. Therefore, the insulating film IF4 directly below the built-in resistor GR can be formed thicker than the trench gate insulating film. For this reason, even if a collector voltage is applied with a high dV / dt when the IGBT changes from an off state to an on state in a switching operation, the transient electric field applied to the insulating film IF4 can be mitigated.

[0065] As a result, it is possible to obtain the same effects as those of the semiconductor device described with reference to FIGS.

[0066] <Modification> This embodiment is also applicable to a semiconductor device having an N-type semiconductor layer on the back surface of a semiconductor substrate. Fig. 13 is a cross-sectional view showing a semiconductor device of this modification. The portion shown in Fig. 13 corresponds to the portion shown in Fig. 2.

[0067] 13, the structure of the semiconductor device of this modification differs from the structure described with reference to FIG. 2 in that a P-type semiconductor layer PL is not uniformly formed on the back surface of the semiconductor substrate SB, but an N-type semiconductor layer BNL is formed locally. That is, an N-type semiconductor layer BNL is formed adjacent to the P-type semiconductor layer PL on the lower surface of the semiconductor substrate SB. The N-type semiconductor layer BNL may be formed intentionally in a reverse-conducting IGBT (RC-IGBT) or the like, or may be formed as a defect.

[0068] In a reverse conducting IGBT, the N-type semiconductor layer BNL can be formed by forming the P-type semiconductor layer PL and then introducing an N-type impurity (e.g., P (phosphorus)) into the lower surface of the semiconductor substrate SB using photolithography technology and ion implantation.

[0069] The invention made by the present inventors has been specifically described above based on an embodiment, but it goes without saying that the present invention is not limited to the above embodiment and can be modified in various ways without departing from the gist of the invention.

[0070] For example, the material of the semiconductor substrate is not limited to Si, but may be SIC (silicon carbide), GaN (gallium nitride), Ga2O3 (gallium oxide), or the like. [Explanation of symbols]

[0071] GP Gate Pad GR built-in resistor IF1~IF4 Insulating film IF4 SB Semiconductor Substrate TG trench gate electrode TR Trench

Claims

1. A semiconductor substrate having a first region, and a second region and a third region surrounded by the first region in a plan view; a first insulating film formed on the semiconductor substrate in the first region and surrounding the second region and the third region in a plan view; a trench formed in an upper surface of the semiconductor substrate in the third region; a gate electrode formed in the trench via a second insulating film; a P-type semiconductor region formed in the semiconductor substrate in the second region; a resistive element formed on the semiconductor substrate via a third insulating film immediately above the P-type semiconductor region and electrically connected to the gate electrode; an interlayer insulating film located on the resistor element in the second region and on the semiconductor substrate in the third region; a first plug and an interconnection formed on the resistor element, the first plug being connected to an upper surface of the resistor element; a second plug connected to an upper surface of the gate electrode; a P-type semiconductor layer formed on a lower surface of the semiconductor substrate; having the gate electrode and the resistance element are separated from each other, the gate electrode and the P-type semiconductor layer constitute an IGBT, the gate electrode and the resistor element are electrically connected via the first plug, the second plug, and the wiring; the interlayer insulating film is located directly above a corner of the semiconductor substrate, which is an upper end of the trench; a thickness of the third insulating film is smaller than a thickness of the first insulating film and is larger than a thickness of the second insulating film; the second insulating film is in contact with the semiconductor substrate and the gate electrode, The semiconductor device, wherein the shortest distance between a surface of the trench and the gate electrode is 70 nm or more.

2. A semiconductor substrate having a first region, and a second region and a third region surrounded by the first region in a plan view; a first insulating film formed on the semiconductor substrate in the first region and surrounding the second region and the third region in a plan view; a trench formed in an upper surface of the semiconductor substrate in the third region; a gate electrode formed in the trench via a second insulating film; a P-type semiconductor region formed in the semiconductor substrate in the second region; a resistive element formed on the semiconductor substrate via a third insulating film immediately above the P-type semiconductor region and electrically connected to the gate electrode; an interlayer insulating film located on the resistor element in the second region and on the semiconductor substrate in the third region; a first plug and an interconnection formed on the resistor element, the first plug being connected to an upper surface of the resistor element; a second plug connected to an upper surface of the gate electrode; a P-type semiconductor layer formed on a lower surface of the semiconductor substrate; having the gate electrode and the resistance element are separated from each other, the gate electrode and the P-type semiconductor layer constitute an IGBT, the gate electrode and the resistor element are electrically connected via the first plug, the second plug, and the wiring; the interlayer insulating film is located directly above a corner of the semiconductor substrate, which is an upper end of the trench; a thickness of the third insulating film is smaller than a thickness of the first insulating film and is larger than a thickness of the second insulating film; The semiconductor device, wherein the third insulating film has a thickness that is 2 to 7 times the thickness of the second insulating film.

3. a semiconductor substrate having a first region, and a second region and a third region surrounded by the first region in a plan view; a first insulating film formed on the semiconductor substrate in the first region and surrounding the second region and the third region in a plan view; a trench formed in an upper surface of the semiconductor substrate in the third region; a gate electrode formed in the trench via a second insulating film; a P-type semiconductor region formed in the semiconductor substrate in the second region; a resistive element formed on the semiconductor substrate via a third insulating film immediately above the P-type semiconductor region and electrically connected to the gate electrode; a P-type semiconductor layer formed on a lower surface of the semiconductor substrate; having the gate electrode and the P-type semiconductor layer constitute an IGBT, a thickness of the third insulating film is smaller than a thickness of the first insulating film and is larger than a thickness of the second insulating film; the second insulating film is in contact with the semiconductor substrate and the gate electrode, The semiconductor device, wherein the shortest distance between a surface of the trench and the gate electrode is 70 nm or more.

4. a semiconductor substrate having a first region, and a second region and a third region surrounded by the first region in a plan view; a first insulating film formed on the semiconductor substrate in the first region and surrounding the second region and the third region in a plan view; a trench formed in an upper surface of the semiconductor substrate in the third region; a gate electrode formed in the trench via a second insulating film; a P-type semiconductor region formed in the semiconductor substrate in the second region; a resistive element formed on the semiconductor substrate via a third insulating film immediately above the P-type semiconductor region and electrically connected to the gate electrode; a P-type semiconductor layer formed on a lower surface of the semiconductor substrate; having the gate electrode and the P-type semiconductor layer constitute an IGBT, a thickness of the third insulating film is smaller than a thickness of the first insulating film and is larger than a thickness of the second insulating film; The semiconductor device, wherein the third insulating film has a thickness that is 2 to 7 times the thickness of the second insulating film.

5. (a) preparing a semiconductor substrate having a first region, and a second region and a third region surrounded by the first region in a plan view; (b) forming a ring-shaped first insulating film on the semiconductor substrate in the first region so as to surround the second region and the third region in a plan view; (c) forming a P-type semiconductor region on an upper surface of the semiconductor substrate; (d) forming a trench in the top surface of the semiconductor substrate; (e) forming a conductive film on the semiconductor substrate including inside the trench via a second insulating film, and then removing the conductive film outside the trench to form a gate electrode made of the conductive film inside the trench; (f) after the step (e), forming a resistor element on the second insulating film in the second region via a third insulating film; (g) forming a P-type semiconductor layer on the lower surface of the semiconductor substrate; having the gate electrode and the P-type semiconductor layer constitute an IGBT, the resistive element and the gate electrode are electrically connected to each other; a thickness of the third insulating film is smaller than a thickness of the first insulating film and is larger than a thickness of the second insulating film; the second insulating film is in contact with the semiconductor substrate and the gate electrode, a shortest distance between a surface of the trench and the gate electrode is 70 nm or more.

6. (a) preparing a semiconductor substrate having a first region, and a second region and a third region surrounded by the first region in a plan view; (b) forming a ring-shaped first insulating film on the semiconductor substrate in the first region so as to surround the second region and the third region in a plan view; (c) forming a P-type semiconductor region on an upper surface of the semiconductor substrate; (d) forming a trench in the top surface of the semiconductor substrate; (e) forming a conductive film on the semiconductor substrate including inside the trench via a second insulating film, and then removing the conductive film outside the trench to form a gate electrode made of the conductive film inside the trench; (f) after the step (e), forming a resistor element on the second insulating film in the second region via a third insulating film; (g) forming a P-type semiconductor layer on the lower surface of the semiconductor substrate; having the gate electrode and the P-type semiconductor layer constitute an IGBT, the resistive element and the gate electrode are electrically connected to each other; a thickness of the third insulating film is smaller than a thickness of the first insulating film and is larger than a thickness of the second insulating film; A method for manufacturing a semiconductor device, wherein the third insulating film has a thickness that is 2 to 7 times the thickness of the second insulating film.

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