Substrate Processing Equipment

Abstract

1. A substrate transport apparatus comprising: a support frame; an articulating arm having at least one movable arm link connected to the support frame; and an end effector connected to the movable arm link and having a substrate holding station disposed thereon, wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing formed of link case modules rigidly coupled to one another and a pulley system housed within and extending through the rigidly coupled link case modules substantially end-to-end of the modular composite arm link casing, the rigidly coupled link case modules including link case end modules connected by at least one interchangeable link case extension module having predetermined characteristics that determine the length of the movable arm link, the at least one interchangeable link case extension module being selectable for connection to the link case end module to form the reconfigurable arm link.

Description

[Technical field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application is a nonprovisional application and claims the benefit of U.S. Provisional Patent Application No. 62 / 970,565, filed February 5, 2020, the entire disclosure of which is incorporated herein by reference.

[0002] [Technical field] SUMMARY OF THE DISCLOSURE The exemplary embodiments relate generally to substrate processing tools, and more specifically to a substrate transport apparatus. [Background technology]

[0003] Semiconductor manufacturing facilities may utilize substrate processing systems that include twin process modules coupled to a common vacuum transport system. In some conventional systems, semiconductor substrates (also referred to as substrates or wafers) are generally delivered to the twin process modules by a transport apparatus that includes side-by-side telescoping arms that can reach side-by-side substrate holding stations of the twin process modules. In other conventional systems, a long-reach "yaw" type transfer apparatus (e.g., having an arm composed of arm links that allow extension of a non-radially aligned substrate holder) is used to transfer substrates one at a time to each of the substrate holding stations of the twin process modules.

[0004] Generally, the yaw type transfer apparatus described above and other articulated link substrate transfer apparatus (such as SCARA type transport apparatus) that transfer substrates to and from substrate holding stations utilize metal band and pulley transmissions to impart motion to at least a portion of the arm links of the yaw type transfer apparatus. Size constraints of the metal band and pulley transmissions at least partially determine, for example, the height and / or overall size of the arm links. Long arm link lengths may also cause the arms to flex under gravitational loads that may affect alignment of the bands and pulleys.

[0005] The transfer devices described above generally utilize a duplex bearing pair held on the shaft with a bearing clamp at the revolute joint between the arm links. The duplex bearing is a set of two bearings configured to mount on the shaft, with a preload and an inner and outer ring clamped together to provide greater axial and radial stiffness. As with metal bands, the size constraints of the duplex bearing pair at least partially determine the height and / or overall size of the arm links. As can be appreciated, the size of the substrate transport arm at least partially determines the size of the transport chamber in which the transport arm operates, which can affect semiconductor throughput. The duplex bearing is generally installed by heating the duplex bearing and then cooling the duplex bearing to shrink onto the shaft to create a shrink fit between the duplex bearing and the shaft. Operation of the duplex bearing in a high temperature environment can affect the stiffness of the shrink fit between the duplex bearing and the shaft. Summary of the Invention

[0006] The foregoing aspects and other features of the present disclosure are explained in the following description taken in conjunction with the accompanying drawings. [Brief description of the drawings]

[0007] [Figure 1A] 1 is a schematic diagram of an exemplary substrate processing apparatus incorporating aspects of the present disclosure; [Figure 1B] 1B is a schematic diagram of a portion of the substrate processing apparatus of FIG. 1A according to an embodiment of the present disclosure. [Figure 1C] 1B is a schematic diagram of a portion of the substrate processing apparatus of FIG. 1A according to an embodiment of the present disclosure. [Figure 2A] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 2B] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 2C]2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 2D] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Diagram 3] 2 is a schematic cross-sectional view of an exemplary drive section of a substrate transport apparatus according to aspects of the present disclosure. [Figure 3A] 2 is a schematic cross-sectional view of an exemplary drive section of a substrate transport apparatus according to aspects of the present disclosure. [Figure 3B] 2 is a schematic cross-sectional view of an exemplary drive section of a substrate transport apparatus according to aspects of the present disclosure. [Figure 3C] 2 is a schematic cross-sectional view of an exemplary drive section of a substrate transport apparatus according to aspects of the present disclosure. [Figure 4] 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. FIG. [Figure 4A] FIG. 3 is a schematic diagram of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 4B] FIG. 3 is a schematic diagram of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 5A] 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. FIG. [Figure 5B] FIG. 4 is a schematic front view of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 5C] FIG. 4 is a schematic perspective view of a modular arm link of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 5D] FIG. 5D is another schematic perspective view of the modular arm link of FIG. 5C according to an embodiment of the present disclosure. [Figure 5E] FIG. 5D is a schematic end view of a portion of the modular arm link of FIG. 5C according to an embodiment of the present disclosure. [Figure 5F] FIG. 3 is a schematic perspective view of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 6A]FIG. 3 is a schematic diagram of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 6B] FIG. 3 is a schematic diagram of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 6C] FIG. 3 is a schematic diagram of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 6D] FIG. 3 is a schematic diagram of a portion of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 6E] 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. FIG. [Figure 6F] 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. FIG. [Figure 6G] FIG. 4 is a schematic diagram of an in-line cable or wire tensioner of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 6H] FIG. 4 is a schematic diagram of an in-line cable or wire tensioner of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 6I] FIG. 3 is a schematic diagram of a cross roller pulley of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 6J] FIG. 3 is a schematic diagram of a cross roller bearing of the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7A] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7B] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7C]FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7D] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7E] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7F] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7G] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7H] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7I] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7J] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7K] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 7L] FIG. 3 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIGS. 2A, 2B, 2C, and 2D according to an embodiment of the present disclosure. [Figure 8] 1 is a schematic diagram of a substrate processing apparatus incorporating a substrate transport apparatus according to aspects of the present disclosure. [Figure 9] 1 is a schematic diagram of a substrate transport apparatus incorporating features of the present disclosure; [Figure 10] 1 is a schematic side view of an exemplary substrate holder for a transport apparatus described herein and incorporating features of the present disclosure; [Figure 11]1 is a schematic side view of an exemplary substrate holder for a transport apparatus described herein and incorporating features of the present disclosure; [Figure 12] 1 is a schematic diagram of a substrate processing apparatus incorporating a substrate transport apparatus according to aspects of the present disclosure. [Figure 13] 1 is a schematic diagram of a substrate transport apparatus incorporating features of the present disclosure; [Figure 14] FIG. 1 is a flow diagram of an exemplary method according to an aspect of the present disclosure. [Figure 15] 1 is a schematic diagram of a substrate processing apparatus incorporating a substrate transport apparatus according to aspects of the present disclosure. [Figure 16] 1 is a schematic diagram of a substrate processing apparatus incorporating a substrate transport apparatus according to aspects of the present disclosure. [Figure 17] FIG. 2 is a flow diagram of an exemplary method according to an aspect of the present disclosure. [Figure 18A] FIG. 2 is an exemplary schematic diagram of multi-axis automatic wafer centering according to aspects of the present disclosure. [Figure 18B] FIG. 2 is an exemplary schematic diagram of multi-axis automatic wafer centering according to aspects of the present disclosure. [Figure 18C] FIG. 2 is an exemplary schematic diagram of multi-axis automatic wafer centering according to aspects of the present disclosure. [Figure 19] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 20] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 21] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 22] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 23] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 23A] 24 is a schematic diagram of an exemplary substrate processing apparatus incorporating the substrate transport apparatus of FIG. 23 according to aspects of the present disclosure. [Figure 24] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Diagram 25] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 26A] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 26B] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 26C] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 26D] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 27A] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 27B] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 27C] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 28] 2 is a schematic diagram of a substrate transport apparatus of the substrate processing apparatus of FIG. 1 according to an aspect of the present disclosure. [Figure 29] FIG. 2 is a flow diagram of an exemplary method according to an aspect of the present disclosure. [Diagram 30] FIG. 2 is a flow diagram of an exemplary method according to an aspect of the present disclosure. [Diagram 31] FIG. 2 is a flow diagram of an exemplary method according to an aspect of the present disclosure. [Diagram 32] FIG. 20 is a schematic diagram of the substrate transport apparatus of FIG. 19 according to an embodiment of the present disclosure. [Figure 33A] 1 is a schematic diagram of a substrate transport apparatus according to an aspect of the present disclosure. [Figure 33B] 1 is a schematic diagram of a substrate transport apparatus according to an aspect of the present disclosure. [Figure 34A] 1 is a schematic diagram of a substrate transport apparatus according to an aspect of the present disclosure. [Figure 34B] 1 is a schematic diagram of a substrate transport apparatus according to an aspect of the present disclosure. [Figure 35A] 1 is a schematic diagram of a substrate transport apparatus according to an aspect of the present disclosure. [Figure 35B]1 is a schematic diagram of a substrate transport apparatus according to an aspect of the present disclosure. [Figure 36A] 1 is a schematic diagram of a substrate transport apparatus according to an aspect of the present disclosure. [Figure 36B] 1 is a schematic diagram of a substrate transport apparatus according to an aspect of the present disclosure. [Figure 37] 1A-1C are schematic comparisons of an as formed end coupling and a finished end coupling according to an embodiment of the present disclosure. [Figure 38] 11A-11C are schematic comparison diagrams of another as-formed end connection and a finished end connection according to an aspect of the present disclosure. [Figure 39] 1A-1C are schematic comparison diagrams of an as-formed and finished central arm section according to aspects of the present disclosure. [Diagram 40] FIG. 1 is a schematic perspective view of a telescoping central arm section according to an aspect of the present disclosure. [Figure 40A] FIG. 13 is a schematic diagram of a segmented arm section according to an aspect of the present disclosure. [Diagram 41] 1 is a schematic cross-sectional view of a connection between an end connector and a central arm section according to an aspect of the present disclosure. FIG. [Diagram 42] 1 is a schematic cross-sectional view of a connection between an end connector and a central arm section according to an aspect of the present disclosure. FIG. [Diagram 43] 1 is a schematic cross-sectional view of a connection between an end connector and a central arm section according to an aspect of the present disclosure. FIG. [Diagram 44] 1A-1C are schematic diagrams of a portion of a substrate transport apparatus and respective cross sections of a central arm section according to aspects of the present disclosure; [Figure 44A] 1 is a schematic cross-sectional view of a central arm section of a substrate transport apparatus according to an aspect of the present disclosure. [Figure 44B] 1 is a schematic cross-sectional view of a central arm section of a substrate transport apparatus according to an aspect of the present disclosure. [Figure 44C] 1 is a schematic cross-sectional view of a central arm section of a substrate transport apparatus according to an aspect of the present disclosure. [Diagram 45]1 is a schematic perspective view of a portion of a substrate transport apparatus according to an aspect of the present disclosure; [Figure 46] 1 is a schematic perspective view of a portion of a substrate transport apparatus according to an aspect of the present disclosure; [Figure 47] 1 is a schematic perspective view of a portion of a substrate transport apparatus according to an aspect of the present disclosure; [Figure 48] 1 is a schematic diagram of thermal expansion of components of a substrate transport arm link according to an aspect of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] 1A illustrates an exemplary substrate processing apparatus 100 according to an embodiment of the present disclosure. Although the embodiments of the present disclosure are described with reference to the drawings, it should be understood that they may be embodied in many forms. Furthermore, any suitable size, shape, or type of elements or materials may be used.

[0009] An aspect of the present disclosure provides a substrate processing apparatus 100 including a substrate transport apparatus 130. The substrate transport apparatus 130 includes an arm 131 having at least two arm links and end effectors (also referred to herein as substrate holders) rotatably joined to one another, and in one aspect having a shoulder joint / axis SX at a fixed location. The substrate transport apparatus 130 is configured to pick (and / or place) substrates at substantially simultaneous positions in a row of substrate processing (or other holding) stations 190-191, 192-193, 194-195, 196-197 while providing high speed swapping of substrates S. The configuration of the substrate transport apparatus 130 allows for substantially simultaneous picking of substrates at each of the row of substrate processing stations on each side of the transport chamber 125, 125A (as described herein) with independent automatic wafer centering for each substrate coincident with substrate transfer by the substrate transport apparatus 130. With brief reference to FIGS. 7E-7J, it is noted that rapid swapping of substrates S is the substantially simultaneous removal of a substrate S (S1, S2) from one set or pair of aligned substrate processing stations (e.g., substrate processing stations 190-191, etc.) using the substrate transport apparatus 130, and the substantially simultaneous placement of another, different substrate S (S3, S4) into the same aligned substrate processing station (i.e., substrate processing stations 188-189) using the substrate transport apparatus 130, where the removal and placement are performed in rapid succession without intervening placement of the removed substrate S (S1, S2) (i.e., with the removed substrate S (S1, S2) held by the substrate transport apparatus). In other aspects, rapid swapping of substrates is performed without substantially intervening Z-axis motion between picking and placing of the substrate(s). In other words, there is substantially no intervening Z-axis motion of the substrate transport apparatus 130 other than raising (picking) or lowering (placing) the substrate into the substrate holding station.For example, each plane 499, 499A (see Figures 2D, 10, and 11) of the substrate holder planes (as described herein and whether the substrate holding stations 203H1, 203H2, 204H1, 204H2 of the dual sided substrate holder form one or more planes) corresponds to and is aligned with at least one plane of a transport opening in the common transport chamber (see Figures 1B and 1C) for transport at a given Z position of the transport opening plane, as further described herein.

[0010] Aspects of the present disclosure also provide a transport arm transmission system utilizing cables or wires and pulleys that reduces the height of at least the transport arm link compared to conventional band and pulley transmissions. The described cable or wire and pulley transmission (referred to herein as cable and pulley transmission for ease of explanation) can also substantially eliminate or reduce alignment issues between the cables and the respective pulleys compared to conventional band and pulley transmissions, and can operate without being affected by arm link deflection due to gravity. By substantially eliminating or reducing alignment issues between the cables and the respective pulleys, the length of the arm link can be made longer, resulting in a longer reach of the substrate transport arm.

[0011] Aspects of the present disclosure may provide a more rigid and compact transport arm through the inclusion of cross roller bearings at the rotary joints of the transport arm (e.g., compared to conventional utilization of duplex bearings). In some aspects, the cross roller bearings may form the pulleys of the transport arm transmission system to further reduce the height of the transport arm links and reduce the part count of the transport arm. According to aspects of the present disclosure, the cross roller bearings may be coupled to their respective shafts in a manner that is substantially unaffected by the high and / or fluctuating operating temperatures of the substrate transport arm's operating environment.

[0012] 2, according to an embodiment of the present disclosure, the arm 131 includes at least two substrate holders (also referred to as end effectors or end effector links) 203, 204. Although the arm 131 is described as having at least two substrate holders, in other embodiments the arm may have less than two (e.g., one or at least one) substrate holders or more than two substrate holders. In one embodiment, the substrate holders 203, 204 are dual-end or dual-pan substrate holders, where each substrate holder has two longitudinally separated ends with at least one substrate holding station or pan at each end, while in other embodiments the substrate holders may have any suitable configuration, such as those described herein. The at least two substrate holders 203, 204 rotate independently and relative to each other about a wrist axis WX of the substrate transport apparatus 130 to provide one or more of automatic wafer centering and variable pitch accommodation between the side-by-side substrate processing stations 190-191, 192-193, 194-195, 196-197.

[0013] Referring again to FIG. 1A, a substrate processing apparatus 100, such as, for example, a semiconductor tool station, is shown in accordance with one embodiment of the disclosure. Although a semiconductor tool station is shown in the drawings, the embodiments of the disclosure described herein may be applied to any tool station or application utilizing a robotic manipulator. In one embodiment, the substrate processing apparatus 100 is shown as having a clustered arrangement (e.g., having substrate processing stations 190-197 connected to a central or common chamber), while in other embodiments, the substrate processing apparatus may be a linearly arranged tool. However, the disclosure may be applied to any suitable tool station. The substrate processing apparatus 100 generally includes an atmospheric front end 101 (also referred to herein as an atmospheric section), two or more vacuum load locks 102A, 102B, and a vacuum back end 103. The two or more vacuum load locks 102A, 102B may be coupled to any suitable port or opening(s) in the front end 101 and / or back end 103 in any suitable arrangement. For example, in one embodiment, two or more vacuum load locks 102A, 102B (and their respective openings in the transport chamber wall 125W) may be arranged in a common horizontal plane in a side-by-side arrangement, as can be seen in Figure 1B. In other embodiments, two or more vacuum load locks 102A, 102B may be arranged in a grid such that two or more vacuum load locks 102A, 102B, 102C, 102D (and their respective openings in the transport chamber wall 125W) are arranged in rows (e.g., having spaced apart horizontal planes) and columns (e.g., having spaced apart vertical planes), as shown in Figure 1C.

[0014] Although two or more vacuum load locks 102A, 102B are illustrated at end 100E1 of the transfer chamber 125, it should be understood that in other embodiments, two or more vacuum load locks 102A, 102B may be located at any number of sides 100S1, 100S2 and / or ends 100E1, 100E2 of the transfer chamber 125. Each of the two or more vacuum load locks 102A, 102B, 102C, 102D may also include one or more wafer / substrate rest surfaces WRP (FIGS. 1B and 1C) where substrates are held on suitable supports within the respective vacuum load locks 102A, 102B, 102C, 102D. In other embodiments, the substrate processing apparatus 100 may have any suitable configuration.

[0015] Each of the components of the front end 101, the two or more vacuum load locks 102A, 102B, and the vacuum back end 103 may be connected to a controller 110, which may be part of any suitable control architecture, such as, for example, a clustered architecture control. The control system may be a closed loop controller having a master controller, a cluster controller, and autonomous remote controllers, such as that disclosed in U.S. Patent No. 7,904,182, entitled "Scalable Motion Control System," issued March 8, 2011, the entire disclosure of which is incorporated herein by reference. In other embodiments, any suitable controller and / or control system may be utilized.

[0016] In one embodiment, the front end 101 generally includes a load port module 105 and a mini-environment 106, such as, for example, an equipment front end module (EFEM). The load port module 105 may be a Box Opener / Loader to Tool Standard (BOLTS) interface conforming to SEMI Standards E15.1, E47.1, E62, E19.5, or E1.9 for 300 mm load ports, front or bottom opening boxes / pods and cassettes. In other embodiments, the load port module may be configured as a 200 mm wafer / substrate interface, a 450 mm wafer / substrate interface, or any other suitable substrate interface, such as, for example, larger or smaller semiconductor wafers / substrates, flat panels for flat panel displays, solar panels, reticles, or any other suitable object. Although two load port modules 105 are shown in FIG. 1A, in other embodiments, any suitable number of load port modules may be incorporated into the front end 101. The load port module 105 may be configured to receive substrate carriers or cassettes C from an overhead transport system, an automated guided vehicle, a manned guided vehicle, a tracked automated guided vehicle, or any other suitable transport method. The load port module 105 may interface with the minienvironment 106 via a load port 107. The load port 107 may allow passage of substrates S between the substrate cassettes C and the minienvironment 106. The minienvironment 106 generally includes any suitable transfer robot 108, which may incorporate one or more aspects of the present disclosure described herein. In one aspect, the robot 108 may be a track mounted robot such as those described in, for example, U.S. Patent No. 6,002,840, issued December 14, 1999, U.S. Patent No. 8,419,341, issued April 16, 2013, and U.S. Patent No. 7,648,327, issued January 19, 2010, the entire disclosures of which are incorporated herein by reference. In other aspects, the robot 108 may be generally similar to those described herein with respect to the vacuum backend 103.The mini-environment 106 may provide a controlled, clean area for substrate transfer between multiple load port modules.

[0017] Two or more vacuum load locks 102A, 102B (and 102C, 120D) may be disposed between and connected to the mini-environment 106 and the back-end 103. In other embodiments, the load port 105 may be substantially directly coupled to at least one of the load locks 102A, 102B or the transfer chamber 125, where the substrate carrier C is pumped down to the vacuum of the transfer chamber 125 and the substrate S is transferred directly between the substrate carrier C and the respective load lock 102A, 102B or the transfer chamber 125. In this embodiment, the substrate carrier C may function as a load lock such that the processing vacuum of the transfer chamber extends into the substrate carrier C. As can be appreciated, when the substrate carrier C is substantially directly coupled to the vacuum load locks 102A, 120B via suitable load ports, any suitable transfer apparatus may be provided within the load locks or otherwise have access to the substrate carrier C for transferring the substrate S to and from the substrate carrier C. It should be noted that the term vacuum as used herein refers to the room temperature in which the substrate S is processed. -5This may mean a high vacuum, such as Torr or less. The two or more vacuum load locks 102A, 102B generally include an atmospheric slot / slit valve ASV and a vacuum slot / slit valve VSV (collectively referred to herein as slot valves SV). The slot valves SV of the load locks 102A, 102B (as well as those for the substrate station module 150) may provide environmental isolation utilized to evacuate the load locks 102A, 102B after loading a substrate S from the atmospheric front end 101 and to maintain a vacuum in the transfer chamber 125 when venting the load locks 102A, 102B with an inert gas, such as nitrogen. The slot valves SV of the processing apparatus 100 may be arranged in the same plane or in different vertically stacked planes (as described above with respect to the vacuum load locks 102A, 102B, 120C, 120D) to accommodate transfer of substrates to and from at least the substrate station module 150 (also referred to herein as processing station) and the load locks 102A, 102B coupled to the transport chamber 125. The two or more load locks 102A, 102B (and / or the front end 101) may also include an aligner 109 for aligning a fiducial of the substrate S to a desired position for processing, or any other suitable substrate metrology equipment. In other embodiments, the two or more vacuum load locks 102A, 120B may be located in any suitable location and have any suitable configuration in the processing apparatus.

[0018] The vacuum backend 103 generally includes a transfer chamber 125, one or more substrate station modules 150, and any suitable number of substrate transfer apparatuses 130, which may include one or more embodiments of the present disclosure described herein. The substrate transfer chamber 125 is configured to hold an isolated atmosphere therein and has a sidewall 125W with a plurality of substrate transfer openings (such as slot valves SV, or openings corresponding to slot valves SV, such as those shown in FIGS. 1B and 1C in the sidewall 125W, where the slot valves are coupled to the sidewall 125W to seal the openings), which are juxtaposed separately from one another along the sidewall 125W at a common level (FIG. 1B) or in other embodiments in rows and columns (FIG. 1C). The transfer chamber 125 may have any suitable shape and size, for example, conforming to SEMI Standard E72 guidelines. The substrate transport apparatus 130, described below, may be disposed at least partially within the transport chamber 125 for transporting substrates between two or more vacuum load locks 102A, 102B (or cassettes C disposed in the load ports) and the various substrate station modules 150. In one aspect, the substrate transport apparatus 130 may be removable from the transport chamber 125 as a modular unit such that the substrate transport apparatus 130 complies with SEMI Standard E72 guidelines.

[0019] The substrate station modules 150 may be arranged side-by-side on a common side or facet of the transfer chamber 125, and / or a single substrate station module 150 may be arranged on a single side or facet of the transfer chamber 125, although in other embodiments the substrate station module may be a single substrate station module 150S (FIG. 8), a triple substrate station module 150T (FIG. 12), and / or a substrate station module having any suitable number of substrate processing / holding stations arranged within a single housing or arranged side-by-side on a common side / facet of the transport chamber 125. In one embodiment, the side-by-side substrate processing stations are arranged within a common (i.e., the same) processing module housing 150H (FIG. 1A) to form what may be referred to as a twin or tandem substrate processing module 150D, while in other embodiments the side-by-side substrate processing stations are a single substrate processing station 150S that are separate from each other and do not share a common housing (FIG. 7A). The twin substrate station module 150D, single substrate station module 150S, triple substrate station module 150T, and any other substrate station module having any suitable number of substrate processing stations may be coupled to the same (i.e., common) transfer chamber 125 in any suitable combination (see, for example, FIG. 8 where a single substrate station module and a twin substrate station module are coupled to the same transfer chamber).

[0020] 1A and the substrate station module 150 on side 100S1 of the transfer chamber 125, for example, the substrate processing stations 190, 191 may be arranged side-by-side in a common housing 150H and accessible from within the transfer chamber 125 through a single slot valve that is common to both of the substrate processing stations (see, for example, substrate processing stations 192, 193), or each substrate processing station may have its own independently operable slot valve (see, for example, substrate processing stations 190, 191). Side-by-side substrate processing stations, such as 190, 191, for example, may be separated or spaced apart from one another by any suitable distance or pitch D, which may be accommodated by varying the distance between the substrate processing stations of the at least two dual-end substrate holders 203, 204 of the substrate transport apparatus 130, as described herein.

[0021] The substrate station module 150 may operate on the substrate S through various deposition, etching, or other types of processes to form electrical circuits or other desired structures on the substrate. Exemplary processes include, but are not limited to, thin film processes using vacuum such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation such as ion implantation, metrology, rapid thermal processing (RTP), dry strip atomic layer deposition (ALD), oxidation / diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonder and evaporation, or other thin film processes using vacuum pressure. The substrate station module 150 may be communicatively connected to the transfer chamber 125 in any suitable manner, such as via a slot valve SV, to allow substrates to pass from the transfer chamber 125 to the substrate station module 150 or vice versa. The slot valve SV of the transfer chamber 125 may be arranged to allow connection of twin processing modules.

[0022] It is noted that transfer of substrates to and from the load locks 102A, 102B (or cassettes C) coupled to the substrate station modules 150 and the transport chamber 125 may occur when at least a portion of the at least two dual-ended substrate holders 203, 204 of the substrate transport apparatus 130 are aligned with respective substrate processing stations of a given set or pair of side-by-side substrate processing stations 190-191, 192-193, 194-195, 196-197. According to aspects of the present disclosure, two substrates S may be transferred to each given substrate station module 150 at approximately the same time (e.g., when substrates are picked / placed from a twin processing module in the manner described herein, etc.).

[0023] Although the substrate transport apparatus 130 is generally described herein as having at least one articulated multi-link arm 131 with drive sections 220, 200A, 220B, 220C connected to the transport chamber 125 at a fixed location, in other aspects the substrate transport apparatus 130 may be mounted on a boom arm or linear carriage such as those described in U.S. Patent Application No. 15 / 103,268, entitled "Processing Apparatus," filed October 16, 2014, and International Patent Application No. PCT / US13 / 25513, entitled "Substrate Processing Apparatus," filed February 11, 2013, the entire disclosures of which are incorporated herein by reference. The at least one articulated multi-link arm 131 has an upper arm 201 and a forearm 202 disposed within the transport chamber 125. The proximal end 201E1 of the upper arm 201 is rotatably joined to the drive sections 220, 220A, 220B, 220C at a fixed location. The forearm 202 is rotatably joined to the upper arm 201 at a distal end 201E2 of the upper arm 201, the upper arm 201 being a substantially rigid non-articulating link between the proximal end 201E1 and the distal end 201E2.

[0024] In the aspects of the disclosure described herein, at least one end effector link (as described herein) is rotatably joined to a joint at the end of the forearm 202 so as to rotate relative to the forearm 202 about a common axis of rotation at the joint (e.g., a wrist joint or axis WX), and the at least one effector link has multiple substrate holding stations (as described herein) depending therefrom, the multiple substrate holding stations being juxtaposed relative to one another along a common plane 499 (see, e.g., Figures 2D, 10, and 11), and configured such that rotation of the at least one end effector link about the common axis of rotation causes the multiple substrate holding stations to rotate about the common axis of rotation. As described herein, the drive section 220, 220A, 220B, 220C of the substrate transport apparatus 130 is configured to at least extend and retract the multi-link arm 131 (and at least one effector coupled thereto) along a non-radial linear path relative to a fixed position, such that the multiple juxtaposed substrate holding stations each linearly traverse along a non-radial path with extension and retraction of the arm 131 and pass through separate corresponding openings (such as the slot valves SV or corresponding openings shown in FIGS. 1B and 1C in the wall 125W to which the slot valves are coupled to seal the openings) of the multiple juxtaposed substrate transport openings at a common level at substantially the same time. In other aspects, the drive section 220, 220A, 220B, 220C of the substrate transport apparatus 130 is configured to extend and retract the multi-link arm 131 along one or both of a radial linear path and a non-radial linear path relative to a fixed position to transport a substrate as described herein.

[0025] Still referring to FIG. 1A, and also referring to FIGS. 2A-2D, the substrate transport apparatus 130 includes a frame 220F (also referred to herein as a support frame), a drive section 220 connected to the frame 220F, and at least one articulated arm 131 (a single arm is illustrated for illustrative purposes only) having at least one movable arm link 201, 202, and end effector link 203, 204 connected to the movable arm link, on which substrate holding stations 203H1, 203H2, 204H1, 204H2 are disposed. In this embodiment, the articulated arm is a multi-link arm 131. In one embodiment, the arm 131 is a horizontal articulated robot arm (referred to herein as a "SCARA arm"), although in other embodiments, the arm may have any suitable configuration. For example, the arm 131 includes an upper arm link 201, a forearm link 202, and at least one end effector link 203, 204 (i.e., a dual link SCARA with at least one end effector), although in other embodiments the arm 131 may have any suitable number of arm links and substrate holders. The upper arm link 201 is a substantially rigid link (i.e., the upper arm link 201 is non-articulated between its longitudinal ends 201E1, 201E2). The upper arm link 201 is rotatably coupled to the drive section 220 at one longitudinal end 201E1 (forming what is referred to as the shoulder joint or axis SX) for rotation about the shoulder axis SX of the arm 131. In one embodiment, the shoulder joint or axis SX is in a fixed position (shown in the drawings along the axis of symmetry of the transport chamber, but in other embodiments it may be offset from the axis of symmetry of the transport chamber). The forearm link 202 is a substantially rigid link (i.e., the forearm link 202 is non-articulated between the longitudinal ends 202E1, 202E2). The longitudinal end 202E1 of the forearm link 202 is rotatably coupled to the longitudinal end 201E2 of the upper arm link 201 such that the forearm link 202 rotates about the elbow axis EX of the arm 131.Here, the forearm link 202 and the upper arm link 201 are of similar length (e.g., between joint centers), however, in other embodiments the forearm link 202 and the upper arm link 201 may have different lengths (e.g., between joint centers).

[0026] 5A-5E, in one embodiment, the movable arm links 201, 202 are reconfigurable arm links 201R, 202R having modular composite arm link casings 201C, 202C formed of link case modules rigidly coupled to one another, and a pulley system 655 (e.g., formed of a transmission member and a pulley pair) contained within and extending through the rigidly coupled link case modules substantially end-to-end (e.g., between the axes of rotation SX, EX, WX at each end of the arm links) of the modular composite arm link casings 201C, 202C. Here, as described in more detail herein, the rigidly connected link case module includes end connections 511, 512, 513, 514 (also referred to herein as link case end modules) connected by at least one central arm section 510A, 510B (also referred to herein as a replaceable link case extension module or extruded arm casing component) having predetermined characteristics that determine the length OAL of the movable arm links 201, 202. According to an aspect of the present disclosure, at least one central arm section 510A, 510B is selectable for connection to end connections 511, 512, 513, 514 from a plurality of different central arm sections (interchangeable link casing extension modules) 510A1-510An, 510B1-510Bn, each having a different corresponding predetermined characteristic that determines a corresponding different length of the movable arm link 201, 202, to selectably set the modular composite arm link casing 201C, 202C and the reconfigurable arm link 201R, 202R to a predetermined arm link length OALn from a plurality of predetermined arm link lengths OALn (each different length OALn corresponding to a different length CAL1-CALn of the different central arm sections 510A1-510An, 510B1-510Bn), forming the reconfigurable arm link 201R, 202R.

[0027] By way of example, each of the upper arm link 201 and the forearm link 202 is a modular arm link having a respective central arm section 510A, 510B and respective end connectors 511-514. For example, the upper arm link 201 includes a proximal end connector 511 that forms the proximal end 201E1 of the upper arm link 201. The central arm section 510A is connected to the proximal end connector 511 in any suitable manner, such as with any suitable removable fastener. A distal end connector 512 is connected to the central arm section 510A opposite the proximal end connector 511 to form the distal end 201E2 of the upper arm 201. Similarly, the forearm link 202 includes a proximal end connector 513 that forms the proximal end 202E1 of the forearm link 202. Central arm section 510B is connected to proximal end connector 511 in any suitable manner, such as with any suitable removable fastener. Distal end connector 514 is connected to central arm section 510B opposite proximal end connector 513 to form the distal end 202E2 of forearm link 202.

[0028] The end connections 511, 512 for the upper arm link 201 are generally similar to each other such that the end connections 511, 512 are interchangeable with each other (i.e., the end connection 511 can be connected to either end of the central arm section 510A to form either the distal end 201E2 or the proximal end 201E1 of the upper arm link 201, and the end connection 512 can be connected to either end of the central arm section 510A to form either the distal end 201E2 or the proximal end 201E1 of the upper arm link 201). Similarly, the end connections 513, 514 for the forearm link 202 are generally similar to one another such that the end connections 513, 514 are interchangeable with one another (i.e., the end connection 513 can be connected to either end of the central arm section 510B to form either the distal end 202E2 or the proximal end 202E1 of the forearm link 202, and the end connection 514 can be connected to either end of the central arm section 510B to form either the distal end 202E2 or the proximal end 202E1 of the forearm link 202). In some embodiments, the end connection for the upper arm link 201 may be interchangeable with the end connection of the forearm link 202. Interchangeable end connections may reduce the part count of the transport arm and reduce costs associated with manufacturing the various parts.

[0029] The central arm sections 510A, 510B have a closed cross-section (e.g., a closed box shape) as described herein. For example, the central arm sections 510A, 510B comprise a monolithic tube frame 510F that may have any suitable cross-section. In the example illustrated in FIGS. 5A-5E, the tube frame 510F is shown as having a rectangular cross-section, but in other embodiments, the cross-section may be square, circular, oval, "I" beam shaped, etc. (see FIG. 44 where the cables extend inside the "I" beam (cross-section AA) or outside the "I" beam (FIG. 44A)). In still other embodiments, the central arm sections 510A, 510B may have an open box shape (see FIG. 44B where one or more sides of the frame 510F' are open (e.g., with or without panel(s) 4400 to close the open side(s)). In other embodiments, the central arm sections 510A, 510B may have a frame 510F″ that is a hybrid open and closed box shape as illustrated in FIG. 44C , where a portion of the frame 510F″ is a closed box, while another adjacent portion of the frame 510F″ is an open box (e.g., where the cables of the pulley transmission extend through one or more of the open and closed boxes). As can be appreciated, the open box shape, closed box shape, “I” beam shape, or any other suitable cross-sectional shape of the central arm sections 510A, 510B may be formed in the manner described herein, such as by extrusion. It is noted that a closed box shape may provide improved stiffness and performance of the substrate transport apparatus 130 compared to an open box shaped (e.g., “U” shaped) cross section (e.g., depending on the stiffness of the material selected for the “U” shaped cross section).

[0030] The central arm sections 510A, 510B are mechanically secured to each of the (respective) end connections 511, 512, 513, 514 to form a modular composite arm link casing 201C, 202C, and the formed modular composite arm link casing 201C, 202C is positioned to match the misalignment tolerance of a pulley transmission (transmission members 490, 492, 493, 494, 495, etc. (FIG. 4)) connecting pulley wheels (pulleys 480, 484, 488, 482, 486, 491, 470, 474, 472, 476, etc. (FIG. 4)) of a (respective) pulley system (pulley systems 655A-655E, etc. (FIG. 4)) for a selected predetermined arm link length OAL, OALn (FIG. 5C). In one aspect, the central arm sections 510A, 510B are mechanically fastened to each of the end connections 511, 512, 513, 514 with mechanical fastener joints (including removable mechanical fasteners as described herein) to form the modular composite arm link casings 201C, 202C, the mechanical fastener joints being configured such that the formed modular composite arm link casings 201C, 202C conform to the misalignment tolerance of the pulley transmission connecting the pulley wheels of the pulley system for a given selected arm link length. By way of example, the fit and converse clearance between the mating and / or complementary parts of the mechanical fasteners of the joints, e.g., bolt or pin fit into corresponding holes at each individual interface and joint, and collectively across the arm link, are configured to conform to the allowable design tolerance of the misalignment of the pulley system at the given arm link length (such that the fit of the mechanical fasteners does not cause excessive play).As a further example, and referring briefly to FIG. 6B, as described in U.S. Patent Application No. 15 / 880,387, filed January 25, 2018 (published October 4, 2018 as U.S. Pregrant Publication No. 2018 / 0286728), entitled “Method and Apparatus for Substrate Transport Apparatus Position Compensation,” the entire disclosure of which is incorporated herein by reference, as the length of the arm links 201, 202 increases, the free ends of the arms may also sag or sag due to the effects of gravity and / or a predetermined amount of load on the arm links 201, 202. The descent of the arm links may define additional misalignment (i.e., the allowable amount that the transmission segments may angularly or axially move relative to the respective pulleys without causing substantial arm position error) that must be accommodated within the misalignment tolerance of the respective pulley systems 655A-655E. This sagging of the arm links 201, 202 causes the pulley transmission (which in FIG. 6B includes cable (or wire) segments 660A, 660B) to be angled at an angle β (within a given misalignment tolerance) relative to the plane of rotation of the pulley 476, or to move axially (within a given misalignment tolerance) along the circumferential surface / side of the pulley. In some embodiments, the angle β of the cable segments 660A, 660B can cause the cable segments 660A, 660B to be misaligned with the pulley 476. Here, the connection between the central arm sections 510A, 510B and the end connections 511, 512, 513, 514 is such that any tolerance in the connection accommodates (or in some embodiments counteracts or corrects) the misalignment tolerance between the pulley transmission and the pulley 476.

[0031] The tube frame 510F includes end flanges 540, 541 configured to couple any one of the end connections 511, 512, 513, 514 to the tube frame 510F. The flanges 540, 541 may be integrally formed with or coupled to the tube frame 510F in any suitable manner. For example, the flanges 540, 541 may be forged, cast, or molded with the tube frame 510F, although in other embodiments the flanges 540, 541 may be coupled to the tube frame by welding, mechanical fasteners, adhesives, friction fit (e.g., shrink fit, press fit, etc.), clamps, or any other suitable method. The end flanges 540, 541 may include positioning features (such as holes 545 and slots 546) and the end connections 511, 512, 513, 514 may include mating positioning features (e.g., pins 547 or other protrusions that engage with positioning features of the end flanges 540, 541 (see FIG. 5C )) that orient / position each of the end connections 511, 512 of the upper arm link 201 (or end connections 513, 514 for the forearm link 202) to the central arm section 510A (or central arm section 510B for the forearm link 202) and relative to each other in at least two degrees of freedom. The positioning features and mating positioning features are asymmetrical in one aspect such that the connection is poka-yoke (e.g., the asymmetric positioning features substantially avoid assembly errors when the end connections are connected to their respective central arm sections). Also referring to FIG. 41, the positioning features may include protrusions 4100 and recesses 4110 formed in the central arm sections 510A, 510B and the end links 511, 512, 513, 514, where the protrusions 4100 and recesses 4110 are configured to position the end links 511, 512, 513, 514, 510B in a predetermined position relative to their respective central arm sections 510A.For example, the central arm sections 510A, 510B may include recess(es) 4110 and the end links 511, 512, 513, 514 may include protrusion(s) 4100, where the recess 4110 receives the respective protrusion 4100 to position the end links 511, 512, 513, 514 in a predetermined position relative to the respective central arm sections 510A, 510B. In other embodiments, the end links may include recesses and the central arm sections may include protrusions. In one embodiment, the recesses and protrusions may be continuous and extend around the entire peripheral edge of the respective end links and central arm sections, while in other embodiments, the recesses and protrusions may be discontinuous to extend around a predetermined portion of the peripheral edge of the respective end links and central arm sections. In one aspect, the protrusions and recesses may be utilized with one or more pins / holes / slots such that the pins / holes / slots define the directional assembly orientation of the end link relative to the central arm section (e.g., which side of the end link is top, bottom, etc.), while the recesses and protrusions position the end link in a predetermined position relative to the central arm section. In one aspect, the end links 511, 512, 513, 514 may be coupled to their respective central arm sections 510A, 510B without positioning features that are secondarily machined such that the assembly of the end links and central arm sections is to a predetermined dimensional tolerance from one end link to the opposite end link.

[0032] In one embodiment, end flanges 540, 541 also include fastener connections 560-563, and end connections 511, 512, 513, 514 include mating fastener connections 560A-563A that together effect connection of end connections 511, 512, 513, 514 to central arm sections 510A, 510B. For example, fastener connections 560-563 and mating fastener connections 560A-563A can be in the form of threaded holes and openings through which bolts / screws are inserted, or any other removable fastener system. Also referring to FIG. 42, as noted herein, end links 511, 512, 513, 514 are illustrated as being connected to central arm sections 510A, 510B with clamps 4200, where each clamp engages with both end links 511, 512, 513, 514 and central arm sections 510A, 510B, thereby forming a compression connection between end links 511, 512, 513, 514 and central arm sections 510A, 510B. Also referring to FIG. 43, as noted herein, the end links 511, 512, 513, 514 are illustrated as being connected to the central arm sections 510A, 510B by a friction fit (e.g., shrink fit, press fit, etc.), where the protrusions 4300 on the end links 511, 512, 513, 514 frictionally engage with the recesses 4310 (or their inner or outer surfaces) on the central arm sections 510A, 510B (or vice versa), thereby connecting the end links 511, 512, 513, 514 to the central arm sections 510A, 510B. The recess 4310 and projection 4300 are generally similar to the recess 4110 and projection 4100 described above, except that rather than a slip fit (as in FIG. 41 ) (e.g., the end link and central arm section slide easily relative to each other during assembly - there is clearance between the parts being assembled), the recess 4310 and projection 4300 have a friction fit (also known as a press fit or interference fit, which is a fastening between two parts that is achieved by friction after the parts are forced together - there is no clearance between the parts being assembled) ( FIG. 43 ).

[0033] In one aspect, the end flanges 540, 541 may be generally similar to one another such that the central arm sections 510A, 510B are mounted to the upper arm link 201 or the forearm link 202 with the end flanges 540, 541 toward the distal end 201E2, 202E2 or proximal end 201E1, 202E1 of the arm (or vice versa).

[0034] In one embodiment, the tube frame 510F includes one or more openings 588 configured to provide access to the interior of each one of the upper arm link 201 and the forearm link 202. Access to the interior may facilitate any suitable maintenance of the upper arm link 201 and the forearm link 202 without substantially disassembling the substrate transport apparatus and / or its arm links. In one embodiment, a cover 510C (FIG. 5C) may be provided to cover the one or more access openings 588, such as to contain any particulates that may be generated by the arm links. As can be appreciated, and with reference to FIG. 5F, removal of the cover 510C provides access to the interior of the respective arm link through the access opening 588. For example, adjustments may be made to the cable and pulley transmissions described herein through the access openings 588 (e.g., adjusting the tension of one or more of the cables / cable segments by operating an in-line cable tensioner 691, as described herein).

[0035] In one embodiment, the central arm sections 510A, 510B may have a length CAL that together with the respective end connections 511, 512, 513, 514 define the overall length OAL (from joint center to joint center (see FIG. 5C)) of the respective upper arm link 201 or forearm link 202. The arm 131 (and other arms described herein) may be configured / reconfigured by changing the length CAL of the central arm sections 510A, 510B. As noted herein, the central arm sections 510A, 510B may be manufactured as described herein to have a variety of predetermined lengths CAL, CAL1-CALn. Thus, each of the central arm sections 510A, 510B may be selectable from a plurality of central arm sections 510A1-510An, 510B1-510Bn, where "n" is an integer indicating an upper limit on the number of central arm sections. Each of the selectable central arm sections 510A1-510An, 510B1-510Bn may have a length CAL1-CALn that is different from the length of another of the selectable central arm sections 510A1-510An, 510B1-510Bn, whereby the selection of the selectable arm section 510A1-510An, 510B1-510Bn for installation in a respective upper arm link 201 or forearm link 202 together with the respective end connectors 511, 512, 513, 514 defines a variable (i.e., via the selection of the central arm section 510A1-510An, 510B1-510Bn) length of the upper arm link 201 or forearm link 202. As can be appreciated, the overall length OAL of one or more of the upper arm link 201 and forearm link 202 can be increased or decreased through selection of the selectable central arm sections 510A1-510An, 510B1-510Bn.

[0036] In other embodiments, and with reference to FIG. 40, one or more of the central arm sections 510A, 510B may be a telescoping central arm section 510T (e.g., arm portions of a telescoping arm section slide relative to one another to change length, similar to a segmented optical telescope). In this embodiment, the telescoping central arm section 510T includes a first frame portion 510T1 and a second frame portion 510T2. The first frame portion 510T1 is shaped and dimensioned to receive the second frame portion 510T2 with a snug fit, such that the first frame portion 510T1 or the second frame portion 510T2 slides linearly longitudinally relative to the other of the first frame portion 510T1 or the second frame portion 510T2 to increase or decrease the length CAL of the telescoping central arm section 510T. The telescoping central arm section 510T may include any suitable removable or non-removable fasteners 4000 (e.g., screws, bolts, pins, clips, welds, etc.) for locking the movement of the first frame portion 510T1 relative to the second frame portion 510T2 to set / fix the length CAL of the telescoping central arm section 510T. If the fasteners are removable, the length of the arm links may be adjusted as needed to accommodate additional or removed substrate processing modules, transfer chamber portions (e.g., the reach of the arm may be increased or decreased as needed).

[0037] 40A, one or more of the central arm sections 510A, 510B may be segmented arm sections 510S, where each segment 4020 has a fixed length CAS and is connected to one another in abutment (e.g., end-to-end) such that when connected together end-to-end, the segments have the length CAL of the central arm sections 510A, 510B. In one embodiment, the fixed length CAS of the different segments 4020 may be the same, while in other embodiments, the fixed lengths of the segments 4020 may be different. In yet another embodiment, referring to FIG. 45, one or more of the central arm sections 510A, 510B may be a plurality of case modules 4500, each of the plurality of case modules 4500 having first and second frame members 4501, 4502 (each of which may be generally similar to frames 510F, 510F', 510F" described herein) arranged side-by-side and extending and connecting between respective end connections 511, 512, 513, 514, where cables of the transmission system are connected to the respective first and second frames. 4502。 In this embodiment, the first and second frame members 4501, 4501 may be separately coupled to their respective end links 511, 512, 513, 514 (e.g., the coupling of frame member 4501 to end link 511 is independent from the coupling of frame member 4502 to end link 512), although in other embodiments, frame members 4501, 4502 may be coupled to an end plate 4030, where end plate 4030 provides coupling of frame members 4501, 4502 to their respective end links 513, 514.

[0038] The different length central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn may be manufactured in any suitable manner from any suitable material as noted herein. For example, at least one replaceable central arm section 510A, 510B and each of the plurality of different replaceable central arm sections 510A1-510An, 510B1-510Bn have corresponding box-shaped cross sections 598, and the predetermined characteristic is that the replaceable central arm section 510A, 510B and each of the plurality of different replaceable central arm sections 510A1-510An, 510B1-510Bn have different corresponding lengths CAL, CAL1-CALn.

[0039] The box-shaped cross section 598 provides a tubular form of the tube frame 510F and facilitates the manufacture of the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn in a low-cost and / or high-volume production manner. For example, the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn may be manufactured by extrusion or casting (e.g., to form an extruded member with a box-shaped cross section 598) that reduces machining requirements (e.g., compared to conventional arm links that are machined from a billet of material). Other manufacturing methods that may be utilized may include, but are not limited to, additive manufacturing, conventional machining, folded and welded sheet metal, forging, and injection molding. The tubular form of the tube frame 510F that may be achieved by the manufacturing process described above affects the extruded member with a monolithic box section 598 that is significantly more rigid when compared to the conventional machined arm links described above. The stiffer box-shaped cross-section 598 allows for a longer arm length than would otherwise be achieved with conventional machined arm links, producing a tube frame 510F with thinner sidewalls 510W, thereby reducing the weight of the arm link and increasing the operating speed of the substrate transport apparatus 130.

[0040] In one embodiment, the corresponding box-shaped cross-sections 598 are sized and shaped to correspond to different corresponding lengths CAL, CAL1-CALn to maintain a predetermined stiffness (end-to-end) for each of the different interchangeable central arm sections 510A, 510A1-510An, 510B, 510B1-510Bn. In another embodiment, the corresponding box-shaped cross-sections 598 are sized and shaped to correspond to different corresponding lengths CAL, CAL1-CALn to maintain a predetermined stiffness (end-to-end) for each of the different selectable predetermined arm link lengths OAL, OALn. For example, for a given stiffness, as the lengths CAL, CAL1-CALn of the central arm sections 510A, 510A1-510An, 510B, 510B1-510Bn increase, the thickness THK (FIG. 5E) of one or more of the walls 510W of the box-shaped cross-sections 598 may also increase. In other embodiments, one or more thicknesses THK of the walls 510W may be tapered along their respective lengths CAL, CAL1-CALn, with the walls being thickest at the proximal end of the arm link (relative to the shoulder axis SX) and thinnest at the distal end of the arm link (relative to the shoulder axis SX; for example, considering the arm link 202, the wall thickness is greatest adjacent the elbow axis AX and thinnest adjacent the wrist axis WX). In other embodiments, for example, reinforcing ribs may be formed in the box-shaped cross section 598 during extrusion of the box-shaped cross section 598. In other embodiments, and referring to FIG. 46, the central arm sections 510A, 510B may have a tapered length, where the proximal end (e.g., supported end) of each of the central arm sections 510A, 510B has a height AHPE1, AHPE2 that is higher than the height AHDE1, AHDE2 of the distal end (e.g., free or unsupported end) of each of the central arm sections 510A, 510B. A tapered length as illustrated in FIG. 46 may maintain a given stiffness of the arm link while reducing the weight of the arm link, which may increase the operating speed of the substrate transport apparatus 130.In other embodiments, the box-shaped cross-section 598 is sized and shaped in any suitable manner to correspond to different corresponding lengths CAL, CAL1-CALn so as to maintain a predetermined stiffness (end-to-end) for each of the different interchangeable central arm sections 510A, 510A1-510An, 510B, 510B1-510Bn.

[0041] In one aspect, the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn may be fabricated from (or have the same coefficient of thermal expansion as) the material used for the arm link transmission cable (described herein), such as aluminum, stainless steel, Inconel, or other metal alloy, or other suitable material as noted herein (note that the use of stainless steel may be prohibitive in conventional arm links fabricated from billets due to cost and weight). By fabricating the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn from the same material as the motion transmission hardware (e.g., cables, bands, pulleys, etc.), the coefficient of thermal expansion between the components is the same, improving the accuracy of the pick / place motion of the substrate transport apparatus 130. In one embodiment, the central arm sections 510A, 510A1-510An, 510B, 510B1-510Bn are made of a material that is the same (or has the same coefficient of thermal expansion) as the material of one or both of the end links 511, 512, 513, 514, while in other embodiments, the central arm sections 510A, 510A1-510An, 510B, 510B1-510Bn are made of a different material than the material of one or both of the end links 511, 512, 513, 514. In one embodiment, the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn, the end links 511, 512, 513, 514, and the motion transmission hardware are made of the same material (or have the same coefficient of thermal expansion). 48, thermal expansion of arm link components is illustrated, where central arm sections 510A, 510A1-510An, 510B, 510B1-510Bn are collectively referred to by reference numeral 510.Here, the materials of the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn, end connections 511, 512, 513, 514, and motion transmission hardware may each be selected to maintain the following equation, which represents the total change in length due to thermal expansion (and contraction) of the arm link and the pulley transmission casing components therein normalized over the length of the arm link:

[0042]

number

[0043] In one embodiment, the material of the at least one replaceable central arm section 510A, 510B and each of the plurality of different replaceable central arm sections 510A1-510An, 510B1-510Bn has a higher stiffness (spring constant) than the material of the end connectors 511, 512, 513, 514. In one embodiment, the material of the at least one replaceable central arm section 510A, 510B and each of the plurality of different replaceable central arm sections 510A1-510An, 510B1-510Bn has a stiffness corresponding to the stiffness of the material of the pulley transmissions 490, 492, 493, 494, 495 of the respective pulley systems 655A-655E (FIG. 4).

[0044] As can be appreciated, the modular arm link configuration also simplifies the manufacture of the ends of the arm links. For example, in a conventional arm link, the ends of the arm links where the arm pulley and pulley shaft connect are machined from a billet of material with the central portion of the arm as a unit. According to aspects of the present disclosure, the modular form of the arm link utilizes separate manufacturing techniques for the end connections 511, 512, 513, 514 and the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn. For example, the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn may be extruded (or manufactured by other methods noted herein), while the end links 511, 512, 513, 514 may be manufactured by casting, forging, additive manufacturing, conventional machining, and injection molding so as to be cast or forged to near net shape (i.e., the initial production of the end links is very close to the final (net) shape of the end links, reducing the need for surface finishing) to reduce machining of the end links and their costs, thus reducing the overall cost of the substrate transport apparatus 130. In some aspects, the end connections 511, 512, 513, 514 may be provided as a pre-assembled / fabricated arm joint 4700, where at least a portion of one transmission member (such as at least one or more pulleys of the transmission members 490, 492, 493, 494, 495) is pre-installed in the pre-assembled arm joint 4700. Pre-assembling the arm joint 4700 may reduce manufacturing costs and shorten lead times for assembly of the transport arm.

[0045] In one embodiment, one or more of the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn and the end links 511, 512, 513, 514 may be constructed of metal components, such as, for example, one or more of aluminum, stainless steel, Inconel, or other metal alloys, or any other suitable material. In other embodiments, one or more of the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn and the end links 511, 512, 513, 514 may be constructed of any suitable material, including, but not limited to, ceramics, polymers, composites, and non-metallic materials including carbon fiber. It is noted that, as described herein, one or more of the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn and the end connections 511, 512, 513, 514 may be constructed using mass production methods (e.g., molding, casting, forging, extrusion, etc.) in one or more of near net shape or rough shape (which requires more extensive secondary machining operations than near net shape casting, forging, molding, etc.), where the interior of one or more of the central arm sections 510A, 510B, 510A1-510An, 510B1-510Bn and the end connections 511, 512, 513, 514 may be forged, cast, etc. to near net shape, while the exterior may be forged, cast, etc. to rough shape. Secondary machining operations include, but are not limited to, conventional machining, cutting, grinding, electromagnetic discharge machining, etc. Examples of arm components having both as-formed (e.g., cast, forged, extruded, etc.) surface(s) and machined surface / features are illustrated in Figures 37-39. In Figures 37-39, the secondary machined surfaces / features are shown as "shaded" (e.g., dark areas), while the as-formed (non-machined) surfaces / features are not shaded.Figure 37 illustrates end connections 511, 513 as formed (e.g., near net shape or rough shape) and corresponding finished end connections 511, 513 with machined surfaces / features (using methods as noted herein). Figure 38 illustrates end connections 512, 514 as formed (e.g., near net shape or rough shape) and corresponding finished end connections 512, 514 with machined surfaces / features (using methods as noted herein). Figure 39 illustrates central arm sections 510A, 510B as formed (e.g., near net shape or rough shape) and corresponding finished central arm sections 510A, 510B with machined surfaces / features (using methods as noted herein).

[0046] 5A, 5B, and 5C, each of the upper arm link 201 and the forearm link 202 has a respective height AH. In one embodiment, the height AH1 of the forearm link 202 can be less than the height AH2 of the upper arm link 201 (or vice versa), while in other embodiments, the height AH1 of the forearm link 202 can be approximately the same as the height AH2 of the upper arm link 201. In one embodiment, the respective heights AH1, AH2 can depend on the number of transmission members disposed on the arms (e.g., see FIG. 4, where the upper arm link 201 includes three sets of transmission members 490, 492, 494 and the forearm link 202 includes two sets of transmission members 493, 495). As can be understood, if the heights of the upper arm link 201 and the forearm link 202 are different, the end connections 513, 514 and central arm section(s) 510B of the forearm link 202 may not be interchangeable with the end connections 511, 512 and central arm section(s) 510A of the upper arm link 201.

[0047] 1A and 2A-2D, in one embodiment, the at least one end effector link 203, 204 (also referred to herein as a substrate holder) comprises two dual (end) substrate holders 203, 204, although in other embodiments, the at least one substrate holder may have any suitable configuration, as described herein. The dual substrate holders 203, 204 are separate and distinct from one another. Each of the dual substrate holders 203, 204 is rotatably and separately joined to a joint at a common end of the forearm link 202 such that each end substrate holder 203, 204 rotates relative to the forearm link 202 about the joint or rotates about a common axis formed thereby (see, e.g., wrist axis or joint WX). Each of the dual substrate holders 203, 204 has at least one corresponding substrate holding station 203H1, 203H2, 204H1, 204H2 depending therefrom and extending from the joint such that the multiple substrate holders 203, 204 are juxtaposed relative to one another along a common plane 499 (see Figures 2D, 4, 10, and 11). The common plane 499 is determined by at least three of the substrate holding stations 203H1, 203H2, 204H1, 204H2 of the plurality of substrate holders 203, 204, where two of the at least three substrate holding stations 203H1, 203H2, 204H1, 204H2 (e.g., substrate holding stations 203H1, 203H2 or 204H1, 204H2) correspond to a common substrate holder 203, 204 of the plurality of substrate holders 203, 204. As described herein, the two substrate holding stations (e.g., substrate holding stations 203H1, 203H2 or 204H1, 204H2) are disposed at opposite ends of the common substrate holder 203, 204, respectively.

[0048] The corresponding at least one substrate holding station 203H1, 203H2, 204H1, 204H2 subordinate to the at least one substrate holder 203, 204 includes one substrate holding station 203H1, 203H2, 204H1, 204H2 at opposite ends of the at least one substrate holder 203, 204. The at least one substrate holder 203, 204 is substantially rigid and non-articulating between the opposite ends, and the substrate holding station 203H1, 203H2, 204H1, 204H2 at one of the opposite ends is substantially coplanar with the corresponding at least one substrate holding station 203H1, 203H2, 204H1, 204H2 of the substrate holder 203, 204 that is separate and distinct from one another. In one embodiment, the substrate holding stations (see substrate holding stations 203H1, 203H2 of substrate holder 203 and substrate holding stations 204H1, 204H2 of substrate holder 204) at opposite ends of at least one substrate holder 203, 204 are substantially coplanar with one another. In another embodiment, the substrate holding stations (see substrate holding stations 203H1, 203H2 or 204H1, 204H2) at opposite ends of at least one substrate holder (see one of substrate holders 203 or 204) are substantially coplanar with at least one corresponding substrate holding station (see the other of substrate holding stations 203H1, 203H2 or 204H1, 204H2) of a separate and distinct end effector link (see the other of substrate holders 203 or 204). In yet another aspect, the corresponding at least one substrate holding station (see substrate holding stations 203H1, 203H2, 204H1, 204H2) of each separate and distinct substrate holder (see each of substrate holders 203, 204) includes one substrate holding station at opposite opposing ends of the at least one substrate holder 203, 204, and each of the separate and distinct substrate holders 203, 204 is substantially rigid and non-articulating between the opposite opposing ends.

[0049] 2A-2D, the dual substrate holders 203, 204 are described in more detail. For example, in one embodiment, the dual substrate holders 203, 204 each include a longitudinally elongated frame 203F, 204F (FIG. 2A) having a respective substrate holding station 203H1, 203H2, 204H1, 204H2 disposed at opposing longitudinal ends of the frame 203F, 204F. In one embodiment, the two substrate holding stations (e.g., substrate holding stations 203H1, 203H2 or 204H1, 204H2) at opposing ends of a common substrate holder are generally coplanar with one another, while in other embodiments, the two substrate holders may be in different stacked planes (see, e.g., FIG. 10).As mentioned above, each plane 499, 499A (see FIGS. 2D, 10, and 11) of the substrate holder surface (as described herein and whether the substrate holding station(s) 203H1, 203H2, 204H1, 204H2 of the dual sided substrate holder form one or more planes) corresponds to and is aligned with at least one plane of a transport opening in the common transport chamber (see FIGS. 1B and 1C) for transfer at a given Z position of the transport opening surface, such that transfer of a substrate through each respective opening on each plane is achieved with substantially no Z axis movement of at least one substrate holding station 203H1, 203H2, 204H1 of each dual end substrate holder 203, 204. 1, 204H2, i.e., extension to a substrate processing station (for each plane) using substrate holding station(s) 203H1, 203H2, 204H1, 204H2 at one end of the substrate holder 203, 204, picking and / or placing of substrate(s) at the substrate processing station, retraction from the substrate processing station, and extension to a different substrate processing station with the same or different dual substrates at the same or different ends of the dual end substrate holder 203, 204, results in rapid swapping of substrates substantially independent of Z axis motion (independent of any intervening Z axis motion or decoupled from any intervening Z axis motion between transfers of substrates). Each of the frames 203F, 204F forms a substantially rigid link from the respective substrate holding station 203H1, 204H1 to the respective substrate holding station 203H2, 204H2 (i.e., the dual end substrate holders 203, 204 are non-articulating between their respective longitudinally separated substrate holding stations 203H1, 203H2, 204H1, 204H2). Each of the dual end substrate holders 203, 204 includes an offset mounting projection 210, 211 extending laterally from the frame 203F, 204F. The offset mounting projections 210, 211 of the dual end substrate holders 203, 204 are rotatably coupled to the forearm 202 about the wrist axis WX such that each of the dual end substrate holders 203, 204 rotates independently of one another about the wrist axis WX.

[0050] The offset mounting projections 210, 211 may have any suitable length that sets or otherwise defines any suitable base pitch BP (such as corresponding to the base pitch BP between side-by-side substrate holding stations 203H1-204H1 and side-by-side substrate holding stations 203H2-204H2) and / or offset distance SD of any suitable substrate holder at each of the substrate holding positions 203H1, 203H2, 204H1, 204H2 relative to the wrist axis WX. In one aspect, the base pitch BP may be approximately equal to the pitch D between side-by-side substrate processing stations, such as 190, 191 (see FIG. 1A). In other aspects, automatic wafer centering is provided by varying the base pitch BP (e.g., the distance between side-by-side substrate holding stations 203H1-204H1, 203H2-204H2 may be increased or decreased) to accommodate variations in pitch D and / or to provide automatic wafer centering for placing wafers at substrate processing stations 190-197, as described herein. For example, one or more of the substrate holders 203, 204 may be independently rotated about the wrist axis WX to increase or decrease (or otherwise change) their respective offset distances SD and cause a corresponding change in the base pitch BP as described herein. In one aspect, the drive section 220 is configured to independently align at least one corresponding substrate holding station 203H1, 203H2, 204H1, 204H2 of each of the substrate holders 203, 204 relative to a corresponding substrate holding station (or stations) 203H1, 203H2, 204H1, 204H2 of another of the substrate holders 203, 204, as described herein.

[0051] The dual end substrate holder 203, 204 is configured in any suitable manner such that the substrate holding stations 203H1, 203H2, 204H1, 204H2 are disposed in a common plane 499 (see FIG. 2D and FIG. 4). For example, the offset mounting projections 210, 211 may each include a first portion 230, 231 that is substantially coplanar with the respective frame 203F, 204F. The offset mounting projections 210, 211 may each include a second portion 232, 233 that is offset to extend outside of the plane defined by the respective frame 203F, 204F. The offset of the second portions 232, 233 is such that the substrate holding stations 203H1, 203H2, 204H1, 204H2 are disposed in a common plane 499 when the second portions are stacked one on top of the other (see FIG. 2D) and rotatably coupled to the forearm 202 about the wrist axis WX.

[0052] The dual substrate holders 203, 204 are arranged such that radial extension and retraction of the arm 131 results in substantially simultaneous extension and retraction of at least one corresponding substrate holding station 203H1, 203H2, 204H1, 204H2 of each substrate holder 203, 204 through respective separate openings (see slot valves SV) in the transport chamber wall 125W (FIG. 1A) that are juxtaposed relative to one another at a substantially common level (see wafer / substrate rest surface(s) WRP in FIGS. 1B and 1C). In other embodiments, the substrate holders 203, 204 may extend through openings in the transport chamber walls that are stacked in different planes.

[0053] 2A-3A, an exemplary drive section 220 is shown according to an embodiment of the disclosure. In one embodiment, the drive section 220 is configured to extend (and retract) the arm 131 in a radial extension, where motion of the wrist axis WX is maintained along an axis or path of radial extension / retraction 700 that extends through the shoulder axis SX (FIG. 7B) such that the substrate holding stations 203H1, 203H2, 204H1, 204H2 (which are offset from the radial axis) pick and place substrates S from the aligned substrate processing stations. In another embodiment, the drive section 220 is configured to extend (and retract) the arm 131 in a non-radial extension, where the wrist motion travels along a path 701 (FIG. 7F) that is offset and / or angled from the axis of radial extension / retraction 700 (i.e., path 701 does not pass through or extend radially from the shoulder axis SX; it is noted that FIG. 7C illustrates a radial path of extension 702 where the wrist axis WX travels along a path of motion that passes through or extends radially from the shoulder axis SX). In yet other embodiments, the drive section 220 is configured to extend the arm along both radial and non-radial paths (see FIGS. 7A-7L).

[0054] In one embodiment, the drive section may have a coaxial drive arrangement, while in other embodiments, the drive section may have any suitable drive arrangement, including, but not limited to, side-by-side motors, harmonic drives, switched or variable reluctance motors, and the like. Suitable examples of drive section arrangements are described in U.S. Patent Nos. 6,485,250, 5,720,590, 5,899,658, 5,813,823, 8,283,813, 8,918,203, and 9,186,799, the entire disclosures of which are incorporated herein by reference. In this embodiment, the drive section 220 includes a housing 310 for at least partially housing a four-axis drive shaft assembly 300 (see also FIG. 4) having four drive shafts 301-304 and four motors 342, 344, 346, 348 (e.g., four degree of freedom motors). In other aspects of the disclosure, the drive section 220 may have any suitable number of drive shafts and motors, such as, for example, two or three coaxial motors or more than four coaxial motors and associated drive shafts. The drive section 220 may also include a Z-axis drive 312 configured to raise and lower the arm 131, for example, for picking and placing a substrate S, although in other aspects a substrate processing station coupled to the transfer chamber in which the arm 131 is disposed may include a Z-axis drive instead of or in addition to the Z drive shaft 312 of the drive section 220, for raising and lowering substrates to and from the arm 131.

[0055] In one embodiment, the drive section 220 is a multi-axis drive section that defines an independent degree of freedom for at least one substrate holder 203, 204 relative to the other substrate holder 203, 204, while in other embodiments there is an independent degree of freedom for at least one substrate holder of the multiple substrate holders, and in still other embodiments there is an independent degree of freedom for each substrate holder. The independent degree of freedom for each substrate holder 203, 204 allows for independent automatic wafer centering at the corresponding at least one substrate holding station 203H1, 203H2, 2034H1, 204H2 of each one of the dual substrate holders 203, 204. In one aspect, the drive section 220 is a multi-axis drive section configured to provide independent automatic wafer centering at at least one corresponding substrate holding station 203H1, 203H2, 2034H1, 204H2 of each of the dual substrate holders 203, 204 substantially coincident with substantially simultaneous extension of at least one corresponding substrate holding station 203H1, 203H2, 2034H1, 204H2 of each of the dual substrate holders 203, 204 through respective separate openings (see slot valves SV) in the transport chamber wall 125W.

[0056] 3A, the drive section includes at least motors 342, 344, 346, 348. The first motor 342 of the drive section 220 includes a stator 342S and a rotor 342R connected to the outer shaft 304. The second motor 344 includes a stator 344S and a rotor 344R connected to the shaft 303. The third motor 346 includes a stator 346S and a rotor 346R connected to the shaft 302. The fourth motor 348 includes a stator 348S and a rotor 348R connected to the fourth or inner shaft 301. The four stators 342S, 344S, 346S, 348S are fixedly mounted to the housing 310 at various vertical heights or positions within the housing. Each stator 342S, 344S, 346S, 348S generally comprises an electromagnetic coil. Each of the rotors 342R, 344R, 346R, 348R generally comprises a permanent magnet, but may alternatively comprise a magnetic induction rotor without a permanent magnet. In yet another embodiment, the motors 342, 344, 346, 348 may be variable or switched reluctance motors such as those described in U.S. Patent Nos. 10,348,172 and 9,948,155, and U.S. Patent Application No. 14 / 540,058, entitled "Position Feedback for Sealed Environments," filed November 13, 2014, the disclosures of which are incorporated herein by reference in their entirety. In yet another embodiment, the motors 342, 344, 346, 348 may be harmonic drives such as those described in U.S. Patent No. 9,656,386, the disclosures of which are incorporated herein by reference in their entirety. If the substrate transport apparatus 130 is to be used in a sealed environment, such as a vacuum environment, for non-limiting example purposes only, a sleeve 362 may be disposed between the rotors 342R, 344R, 346R, 3418R and the stators 342S, 344S, 346S, 348S such that the coaxial drive shaft assembly 300 is disposed in the sealed environment and the stators are disposed outside the sealed environment. It should be understood that if the substrate transport apparatus 130 is intended for use only in an atmospheric environment, such as within the atmospheric section 101 of the substrate processing apparatus 100 (FIG. 1), then the sleeve 362 need not be provided.

[0057] The fourth or inner shaft 301 includes a rotor 348R extending from the lower or fourth stator 348S and substantially aligned with the stator 348S. The shaft 302 includes a rotor 346R extending from the third stator 346S and substantially aligned with the stator 346S. The shaft 303 includes a rotor 344R extending from the second stator 344S and substantially aligned with the stator 344S. The shaft 304 includes a rotor 342R extending from the upper or first stator 342S and substantially aligned with the stator 342S. Various bearings 350-353 are provided around the shafts 301-304 and the housing 310 to allow each shaft 301-304 to rotate independently relative to each other and the housing 310. It is noted that each shaft may be provided with a position sensor 371-374. Position sensors 371-374 may be used to provide signals to any suitable controller, such as controller 170, regarding the rotational positions of the respective shafts 301-304 relative to one another and / or relative to housing 310. Sensors 371-374 may be any suitable sensors, such as, by way of non-limiting example only, optical or inductive sensors.

[0058] 3A, in other embodiments, an exemplary drive section 220A generally similar to drive section 220 includes a housing 310 for at least partially housing a triple coaxial drive shaft assembly 300A having three drive shafts 302-304 and three motors 342, 344, 346 (e.g., three degree of freedom motors). Drive section 220A may also include a Z-axis drive 312 configured to raise and lower an arm (such as those described herein) of substrate transport apparatus 130, for example, to pick and place substrate S, although in other embodiments, a substrate holding station coupled to a transfer chamber in which the arm is located may include a Z-axis drive instead of or in addition to the Z drive shaft 312 of drive section 220 for raising and lowering substrates to and from the arm.

[0059] The first motor 342 of the drive section 220A includes a stator 342S and a rotor 342R connected to the outer shaft 304. The second motor 344 includes a stator 344S and a rotor 344R connected to the shaft 303. The third motor 346 includes a stator 346S and a rotor 346R connected to the shaft 302. The three stators 342S, 344S, 346S are fixedly mounted to the housing 310 at various vertical heights or positions within the housing. Each stator 342S, 344S, 346S generally includes an electromagnetic coil. Each of the rotors 342R, 344R, 346R generally includes a permanent magnet, but may alternatively include a magnetic induction rotor without a permanent magnet. In yet other embodiments, the motors 342, 344, 346 may be variable or switched reluctance motors such as those described in U.S. Patent Nos. 10,348,172 and 9,948,155, the entire disclosures of which are incorporated herein by reference, and U.S. Patent Application No. 14 / 540,058, entitled "Position Feedback for Sealed Environments," filed November 13, 2014. In yet other embodiments, the motors 342, 344, 346 may be harmonic drives such as those described in U.S. Patent No. 9,656,386, the entire disclosures of which are incorporated herein by reference. If the substrate transport apparatus 130 is to be used in a sealed environment, such as a vacuum environment, for non-limiting example purposes only, a sleeve 362 may be disposed between the rotors 342R, 344R, 346R and the stators 342S, 344S, 346S such that the coaxial drive shaft assembly 300A is disposed in the sealed environment and the stators are disposed outside the sealed environment. It should be understood that if the substrate transport apparatus 130 is intended for use only in an atmospheric environment, such as within the atmospheric section 101 of the substrate processing apparatus 100 (FIG. 1), then the sleeve 362 need not be provided.

[0060] The shaft 302 includes a rotor 346R extending from the third stator 346S and substantially aligned with the stator 346S. The shaft 303 includes a rotor 344R extending from the second stator 344S and substantially aligned with the stator 344S. The shaft 304 includes a rotor 342R extending from the upper or first stator 342S and substantially aligned with the stator 342S. Various bearings 350-353 are provided around the shafts 302-304 and the housing 310 to allow each shaft 302-304 to rotate independently relative to each other and the housing 310. It is noted that each shaft may be provided with a position sensor 371-373. The position sensors 371-373 may be used to provide signals to any suitable controller, such as the controller 170, regarding the rotational positions of the respective shafts 302-304 relative to each other and / or relative to the housing 310. Sensors 371-373 may be any suitable sensors, such as, by way of non-limiting example, optical sensors or inductive sensors.

[0061] 3B, in other embodiments, an exemplary drive section 220B generally similar to drive section 220 includes a housing 310 for at least partially housing a hexagonal coaxial drive shaft assembly 300B having six drive shafts 301-306 and six motors 342, 344, 346, 348, 343, 345 (e.g., six degree of freedom motors). Drive section 220B may also include a Z-axis drive 312 configured to raise and lower an arm (such as those described herein) of substrate transport apparatus 130 for picking and placing substrate S, for example, although in other embodiments, a substrate holding station coupled to a transfer chamber in which the arm is located may include a Z-axis drive instead of or in addition to the Z drive shaft 312 of drive section 220 for raising and lowering substrates to and from the arm.

[0062] The first motor 342 of the drive section 220A includes a stator 342S and a rotor 342R connected to the outer shaft 304. The second motor 344 includes a stator 344S and a rotor 344R connected to the shaft 303. The third motor 346 includes a stator 346S and a rotor 346R connected to the shaft 302. The fourth motor 348 includes a stator 348S and a rotor 348R connected to the shaft 301. The fifth motor 343 includes a stator 343S and a rotor 343R connected to the shaft 305. The sixth motor 345 includes a stator 345S and a rotor 345R connected to the shaft 306. The six stators 342S, 344S, 346S, 348S, 343S, 345S are fixedly mounted to the housing 310 at various vertical heights or positions within the housing. Each stator 342S, 344S, 346S, 348S, 343S, 345S generally comprises an electromagnetic coil. Each of the rotors 342R, 344R, 346R, 348R, 343R, 345R generally comprises a permanent magnet, but may alternatively comprise a magnetic induction rotor without a permanent magnet. In yet other embodiments, the motors 342, 344, 346, 348, 343, 345 may be variable or switched reluctance motors, such as those described in U.S. Pat. Nos. 10,348,172 and 9,948,155, and U.S. patent application Ser. No. 14 / 540,058, filed Nov. 13, 2014, entitled "Position Feedback for Sealed Environments," the disclosures of which are incorporated herein by reference in their entirety. In yet another embodiment, motors 342, 344, 346, 348, 343, 345 may be harmonic drives such as those described in US Pat. No. 9,656,386, the entire disclosure of which is incorporated herein by reference.If the substrate transport apparatus 130 is to be used in a sealed environment, such as a vacuum environment, for non-limiting example purposes only, a sleeve 362 may be disposed between the rotors 342R, 344R, 346R, 348R, 343R, 345R and the stators 342S, 344S, 346S, 348S, 343S, 345S such that the coaxial drive shaft assembly 300B is disposed in the sealed environment and the stators are disposed outside the sealed environment. It should be understood that if the substrate transport apparatus 130 is intended for use only in an atmospheric environment, such as within the atmospheric section 101 of the substrate processing apparatus 100 (FIG. 1), then the sleeve 362 need not be provided.

[0063] The shaft 306 includes a rotor 345R extending from the sixth stator 345S and substantially aligned with the stator 345S. The shaft 305 includes a rotor 343R extending from the fifth stator 343S and substantially aligned with the stator 343S. The shaft 302 includes a rotor 346R extending from the third stator 346S and substantially aligned with the stator 346S. The shaft 301 includes a rotor 348R extending from the fourth stator 348S and substantially aligned with the stator 348S. The shaft 303 includes a rotor 344R extending from the second stator 344S and substantially aligned with the stator 344S. The shaft 304 includes a rotor 342R extending from the upper or first stator 342S and substantially aligned with the stator 342S. Various bearings (such as those described above) are provided about the shafts 301-306 and the housing 310 to allow each shaft 301-306 to rotate independently relative to one another and the housing 310. It is noted that each shaft may be provided with a position sensor 371-376. The position sensors 371-376 may be used to provide a signal to any suitable controller, such as the controller 170, regarding the rotational position of the respective shafts 301-306 relative to one another and / or relative to the housing 310. The sensors 371-376 may be any suitable sensor, such as, by way of non-limiting example only, optical or inductive sensors.

[0064] 3C, in other embodiments, an exemplary drive section 220C generally similar to drive section 220 includes a housing 310 for at least partially housing a quintuple coaxial drive shaft assembly 300C having five drive shafts 301-305 and five motors 342, 344, 346, 348, 343 (e.g., five degree of freedom motors). Drive section 220C may also include a Z-axis drive 312 configured to raise and lower an arm (such as those described herein) of substrate transport apparatus 130 for picking and placing substrate S, for example, although in other embodiments, a substrate holding station coupled to a transfer chamber in which arm 131 is disposed may include a Z-axis drive instead of or in addition to Z drive shaft 312 of drive section 220 for raising and lowering substrates to and from the arm.

[0065] The first motor 342 of the drive section 220A includes a stator 342S and a rotor 342R connected to the outer shaft 304. The second motor 344 includes a stator 344S and a rotor 344R connected to the shaft 303. The third motor 346 includes a stator 346S and a rotor 346R connected to the shaft 302. The fourth motor 348 includes a stator 348S and a rotor 348R connected to the shaft 301. The fifth motor 343 includes a stator 343S and a rotor 343R connected to the shaft 305. The five stators 342S, 344S, 346S, 348S, 343S are fixedly mounted to the housing 310 at various vertical heights or positions within the housing. Each stator 342S, 344S, 346S, 348S, 343S generally comprises an electromagnetic coil. Each of the rotors 342R, 344R, 346R, 348R, 343R generally comprises a permanent magnet, but may alternatively comprise a magnetic induction rotor without a permanent magnet. In yet another embodiment, the motors 342, 344, 346, 348, 343 may be variable or switched reluctance motors such as those described in U.S. Patent Nos. 10,348,172 and 9,948,155, and U.S. Patent Application No. 14 / 540,058, entitled "Position Feedback for Sealed Environments," filed November 13, 2014, the disclosures of which are incorporated herein by reference in their entirety. In yet another embodiment, the motors 342, 344, 346, 348, 343 may be harmonic drives such as those described in U.S. Patent No. 9,656,386, the disclosures of which are incorporated herein by reference in their entirety. If the substrate transport apparatus 130 is used in a sealed environment, such as a vacuum environment, for non-limiting example purposes only, a sleeve 362 may be disposed between the rotors 342R, 344R, 346R, 348R, 343R and the stators 342S, 344S, 346S, 348S, 343S such that the coaxial drive shaft assembly 300C is disposed in the sealed environment and the stators are disposed outside the sealed environment.It should be appreciated that if the substrate transport apparatus 130 is intended for use only in an atmospheric environment, such as within the atmospheric section 101 of the substrate processing apparatus 100 (FIG. 1), then the sleeve 362 need not be provided.

[0066] The shaft 305 includes a rotor 343R extending from the fifth stator 343S and substantially aligned with the stator 343S. The shaft 302 includes a rotor 346R extending from the third stator 346S and substantially aligned with the stator 346S. The shaft 301 includes a rotor 348R extending from the fourth stator 348S and substantially aligned with the stator 348S. The shaft 303 includes a rotor 344R extending from the second stator 344S and substantially aligned with the stator 344S. The shaft 304 includes a rotor 342R extending from the upper or first stator 342S and substantially aligned with the stator 342S. Various bearings (such as those described above) are provided around the shafts 301-305 and the housing 310 to allow each shaft 301-305 to rotate independently relative to one another and the housing 310. It is noted that each shaft may be provided with a position sensor 371-375. The position sensors 371-375 may be used to provide a signal to any suitable controller, such as the controller 170, regarding the rotational position of the respective shafts 301-306 relative to one another and / or relative to the housing 310. The sensors 371-375 may be any suitable sensor, such as, by way of non-limiting example only, optical or inductive sensors.

[0067] As described herein, the drive sections 220, 220A, 220B, 220C are configured to extend and retract at least one multi-link arm 131 along a non-radial linear path to substantially simultaneously pass at least one corresponding substrate holding station of each end effector link (e.g., substrate holder) through separate substrate transport openings (such as those shown in Figures 1B and 1C) juxtaposed, for example, along a side wall of the transfer chamber 125, and independently align the at least one corresponding substrate holding station with respect to another substrate holding station of the multiple end effector links (e.g., substrate holders).

[0068] 2A, 3A, and 4, as described above, the substrate transport apparatus 130 includes at least one arm 131 having two dual-ended substrate holders 203, 204. It is noted that the two dual-ended substrate holders 203, 204 of the substrate transport apparatus 130 described herein may enable substantially simultaneous picking and placing of substrates as described herein (e.g., the two dual-ended substrate holders 203, 204 are extended to and retracted from respective substrate processing stations 190-191, 192-193, 194-195, 196-197 side-by-side substantially simultaneously to substantially pick and / or place a substrate).

[0069] In one aspect of the disclosure, the upper arm link 201 is driven in rotation about the shoulder axis SX by the outer shaft 304, the forearm link 202 is driven in rotation about the elbow axis EX by the inner shaft 301, the dual end substrate holder 203 is driven in rotation about the wrist axis WX by shaft 303, and the dual end substrate holder 204 is driven in rotation about the wrist axis WX by shaft 302. For example, the upper arm link 201 is fixedly attached to the outer shaft 304 for rotation by the shaft 304 as a unit on a central axis of rotation (e.g., the shoulder axis SX).

[0070] The forearm link 202 is coupled to the inner shaft 301 by any suitable transmission. For example, a pulley 480 is fixedly attached to the shaft 301. The upper arm link 201 includes a post 481. A pulley 482 is rotatably attached to or otherwise supported by the post 481. The post 481 is fixedly attached to an inner surface of the upper arm link 201. A first set of transmission members 490 extend between the pulleys 480 and 482. It should be understood that any suitable type of transmission member may be used to couple the pulleys 480, 482, such as, for example, a belt, band, or chain. Although two transmission members are shown coupling the pulleys 480, 482 (see FIGS. 6A and 6B), it should also be understood that in other embodiments, any suitable number of transmission members may be used to couple the pulleys 480, 482 (e.g., more or less than two). A shaft 482S is fixedly coupled to the pulley 482 for rotation therewith about the elbow axis EX. The shaft 482S may be rotatably supported on the post 481 in any suitable manner. The forearm link 202 is fixedly attached to the shaft 482S for rotation therewith as a unit about the elbow axis EX.

[0071] The dual end substrate holder 203 is coupled to the shaft 303 by any suitable transmission. For example, pulley 488 is fixedly coupled to the shaft 303 for rotation therewith as a unit about shoulder axis SX. A pulley 491 is rotatably coupled to or otherwise supported on the post 481. A second set of transmission members 492 (substantially similar to transmission member 490) extends between the pulleys 488 and 491. A shaft 491S is fixedly coupled to the pulley 491 for rotation therewith as a unit about elbow axis EX. The shaft 491S may be rotatably supported on the post 481 in any suitable manner. The forearm link 202 includes a pulley 470 that is fixedly attached to an upper end of the shaft 491S for rotation therewith (and pulley 491) as a unit about elbow axis EX. The forearm link 202 also includes a post 471 and a pulley 472 rotatably mounted to or otherwise supported by the post 471. A third set of transmission members 493 (generally similar to transmission members 490) extends between and connects the pulleys 470, 472. The dual end substrate holder 203 is fixedly mounted to the pulley 472 via a shaft 472S such that the pulley 472 and the dual end substrate holder 203 rotate as a unit about the wrist axis WX.

[0072] The dual end substrate holder 204 is coupled to the shaft 302 by any suitable transmission. For example, a pulley 484 is fixedly coupled to the shaft 302 for rotation therewith as a unit about a shoulder axis SX. A pulley 486 is rotatably coupled to or otherwise supported on the post 481. A fourth set of transmission members 494 (substantially similar to the transmission members 490) extends between the pulleys 484 and 486. A shaft 486S is fixedly coupled to the pulley 486 for rotation therewith as a unit about the elbow axis EX. The shaft 486S may be rotatably supported on the post 481 in any suitable manner. The forearm link 202 includes a pulley 474 that is fixedly attached to an upper end of the shaft 486S for rotation therewith (and the pulley 486) as a unit about the elbow axis EX. The forearm link 202 also includes a pulley 476 rotatably mounted to or supported by the post 471. A fifth set of transmission members 495 (generally similar to transmission members 490) extend between and connect the pulleys 474, 476. The dual end substrate holder 204 is fixedly mounted to the pulley 476 via a shaft 476S such that the pulley 476 and the dual end substrate holder 204 rotate as a unit about the wrist axis WX.

[0073] 2A-2C, 3A, and 4, as can be seen, each of the upper arm link 201, the forearm link 202, the dual end substrate holder 203, and the dual end substrate holder 204 are independently driven in rotation about their respective axes (e.g., shoulder axis SX, elbow axis AX, and wrist axis WX) by respective drive motors 342, 344, 346, 348. The independent rotation of each dual end substrate holder 203, 204 about the wrist axis WX provides independent automatic wafer centering of each of the substrates S in each of the substrate holding stations 203H1, 204H1, 203H2, 204H2 substantially coincident with the transport of the substrates by the dual end substrate holders 203, 204 through the openings of their respective juxtaposed substrate processing stations (see FIGS. 1B, 1C).No. 10,134,623, issued on November 20, 2018, entitled "On The Fly Automatic Wafer Centering Method and Apparatus," U.S. Patent No. 9,514,974, issued on December 6, 2016, entitled "Process Apparatus with On-The-Fly Substrate Centering," U.S. Patent No. 7,792,350, issued on September 7, 2010, entitled "Wafer Center Finding," U.S. Patent No. 8,934,706, issued on January 13, 2015, entitled "Wafer Center Finding with Kalman Filter," and U.S. Patent No. 8,934,706, issued on April 12, 2011, entitled "Process Apparatus with On-The-Fly Substrate Centering," the entire disclosures of which are incorporated herein by reference. This may be accomplished using any suitable sensors located in / on the transport chambers 125, 125A, on the slot valves SV, on the transport arm 131, etc., in a manner similar to that described in U.S. Pat. No. 7,925,378 entitled "Automatic Wafer Centering Apparatus with On-The-Fly Workpiece Centering." Accordingly, automatic wafer centering is provided by varying the base pitch BP between side-by-side substrate holding stations 203H1, 204H1 and side-by-side substrate holding stations 203H2, 204H2. For example, by rotating shafts 302, 303 in opposite directions, the dual end substrate holders 203, 204 are rotated in opposite directions about the wrist axis WX. For example, the shafts 302, 303 may be driven in opposite directions to increase the distance between the side-by-side substrate holding stations 203H1, 204H1 (FIG. 2B) to result in any suitable increased pitch WP between the side-by-side substrate holding stations 203H1, 204H1 (and any suitable corresponding decreased pitch NP between the substrate holding stations 203H2, 204H2).For example, the shafts 302, 303 may be driven in opposite directions to reduce the distance (FIG. 2C) between the side-by-side substrate holding stations 203H1, 204H1 to provide any suitable reduced pitch NP between the side-by-side substrate holding stations 203H1, 204H1 (and any suitable corresponding increased pitch WP between the substrate holding stations 203H2, 204H2). Rotation of the shafts 302, 303 in the same direction at approximately the same rotational speed causes the dual-end substrate holders 203, 204 to rotate as a unit about the wrist axis WX to provide rapid swapping of substrates S. In this manner, the transmissions 490, 492, 493, 494, 495 are configured to rotate the dual-end substrate holders 203, 204 as a unit about the wrist axis WX by an amount that rotates at least 180° (degrees). Again, each plane 499, 499A (see FIGS. 2D, 10, and 11) of the substrate holder surface (as described herein and whether the substrate holding station(s) 203H1, 203H2, 204H1, 204H2 of the dual sided substrate holder form one or more planes) corresponds to and is aligned with at least one plane of the transport opening in the common transport chamber (see FIGS. 1B and 1C) for transfer at a given Z position of the transport opening surface, such that transfer of a substrate through each respective opening on each plane is effected by at least one substrate holding station 203H1, 203H2, 204H1, 204H2 of each dual end substrate holder 203, 204 with substantially no Z axis motion. The extension provided by 4H2, i.e., extension to a substrate processing station (for each plane) using substrate holding station(s) 203H1, 203H2, 204H1, 204H2 at one end of the substrate holder 203, 204, picking and / or placing of substrate(s) at the substrate processing station, retraction from the substrate processing station, and extension to a different substrate processing station with the same or different dual substrates at the same or different ends of the dual end substrate holder 203, 204, provides high speed swapping of substrates substantially independent of Z axis motion (independent of any intervening Z axis motion or decoupled from any intervening Z axis motion between transfers of substrates).

[0074] The transmission members 490, 492, 493, 494, 495 and pulleys 480, 484, 488, 470, 474, 482, 486, 491, 472, 476 form respective pulley systems 655A-655E as described herein. As described herein, one or more of the pulley systems 655A-655E are engaged to the modular composite arm link casings 201C, 202C and are arranged to be powered by the drive section 220 such that the one or more pulley systems 655A-655E effect articulation of at least one arm link 201, 202 or end effector 203, 204. It is noted that pulleys 480, 484, 488, 470, 474 may be referred to as "drive" pulleys, while pulleys 482, 486, 491, 472, 476 may be referred to as "driven" or "idler" pulleys. With reference to Figures 5D, 6A, and 6J, at least one of end connections 511, 512, 513, 514 houses at least one pulley wheel 480, 484, 488, 470, 474, 482, 486, 491, 472, 476 of at least one of pulley systems 655A-655E. As an example, one or more of the pulleys (pulleys 488, 484, 480, 486, 482, 470, 474, 472, etc.) are coupled to their respective end links 511, 512, 513, 514, for example, by cross roller bearings 600 (also referred to as table bearings, e.g., the end links receive the pulley wheels of the pulley system mounted with cross roller bearings such that the position and alignment of the pulley wheels is subject to and controlled by engagement with the cross roller bearings as described herein), or in any other suitable manner. In one aspect, end links 511, 512, 513, 514 include bearing seats 566 (see FIGS. 5D and 6A ) to which an outer race 601 (or an inner race, depending on the configuration of the bearing seats) of cross roller bearing 600 is coupled.For example, the outer race 601 may be coupled to the bearing seat 566 with any suitable fastener or retainer feature 663 and may be located relative to the arm with any suitable locating pin 664 extending through both the outer race 601 and the bearing seat 566. In other embodiments, the outer race 601 may be coupled to the bearing seat 566 in any suitable manner. A pulley (such as pulley 474 illustrated in FIG. 6A with other pulleys omitted for clarity) may be coupled to the inner race 602 (or the outer race, depending on the configuration of the bearing seat) using any suitable fastener 668 and any suitable locating pin 669. In other embodiments, the inner race 602 may be coupled to the pulley 474 in any suitable manner. A shaft, such as shaft 486S, may be coupled to the pulley in any suitable manner by friction fit, clamp, or the like, or in any other suitable manner such that the shaft 186S and pulley 474 rotate as a unit about their respective axes of rotation (such as the EX axis).

[0075] The cross roller bearing 600 offers several advantages over duplex (i.e., paired) bearings and other types of bearings commonly used in semiconductor transport arms. For example, the cross roller bearing 600 has a thinner form factor such that the reduced height / thickness 665 (compared to the height / thickness of a duplex bearing or other commonly used bearing for the same size shaft and load requirements) allows for a lower arm link height AH for a given bearing diameter. The cross roller bearing 600 may also reduce part count, cost, and complexity of the substrate transport apparatus 130 because no bearing clamps (such as those used with duplex bearings or other commonly used bearings) are required to couple the cross roller bearing to the arm links and pulleys. Additionally, because fasteners are used to couple the cross roller bearing 600 to the arm links and pulleys, installation of the bearing is easier compared to mounting a duplex bearing or other commonly used bearings (which are typically installed by shrink / interference fit). The cross roller bearing 600 may increase the stiffness of the transport arm and is less dependent on the machining tolerances and operating temperature of the arm links (e.g., as compared to friction-fit duplex bearings or other commonly utilized bearings, where the friction fit may be affected by one or more of the machining tolerances and operating temperature).

[0076] It is noted that the modular composite arm link casing 201C, 202C is a low profile casing having a compact height AH (FIGS. 5C and 5E) for a selected predetermined arm length OAL, OALn, corresponding to a cross roller bearing mounted pulley wheel (as described above) of at least one of the pulley systems 655A-655E housed in at least one of the end connections 511, 512, 513, 514. The compact height AH is less than the housing height of a band pulley transmission for an equivalent number of pulley systems having an equivalent length. For example, briefly referring to FIG. 4A, the arm link 201 has a compact height AH and a length OAL. In this example, the arm link 201 includes three pulley systems 655A-655C, where each pulley system includes opposing cable segments (as described herein) and a pair of pulleys. When compared to arm links having the same length OAL and the same number of pulley systems, where each pulley system includes a conventional combination bearing, the height AH of the arm link 201 including the cable / pulley transmission and three of the cross roller bearings described herein is less than the height of the arm link including the band / pulley transmission and three of the conventional combination bearings.

[0077] 4 and 4A, the cross roller bearing 600 mounts the pulley 486 and respective shaft 486S to a common flange of a respective cross roller bearing 600A. As seen in FIG 4A, both the pulley 486 and the shaft 486S are attached to the same flange of the cross roller bearing 600A (e.g., the flange of the inner race 602) by any suitable fasteners 461, such as screws or bolts, in any suitable manner. For example, fastener 461 may extend through both the flanges of pulley 486 and shaft 486S to connect both pulley 486 and shaft 486S to cross roller bearing 600A, while in other embodiments pulley 486 and shaft 486S may be connected to cross roller bearing 600A by respective fasteners 461, where alternating threaded holes in inner race 602 of cross roller bearing 600A are used to connect pulley 486 and shaft 486S to cross roller bearing 600A in a manner similar to that described herein with respect to FIG. 4B.

[0078] As also seen in FIG. 4A, and with reference to FIG. 4B, the stack height of the arm joint may be reduced, where the pulleys and flanges of the respective drive shafts are interlocked / interleaved together to facilitate coupling of the pulleys and respective shafts to the respective cross roller bearings. For example, the outer race 601 of the cross roller bearing 600B may be coupled to the post 481 such that the cross roller bearing 600B is suspended below the post 481 (although in other embodiments the post 481 may have any suitable configuration and the cross roller bearing may be seated on or suspended from the post). In this example, both the pulley 491 and the shaft 491S are coupled to the inner race 602 of the cross roller bearing 600B. Pulley 491 includes a hub 491H and shaft 491S includes a flange 491SF, where the hub 491H and flange 491SF have complimentary shapes such that they are coplanar (in the same plane, not stacked one on top of the other) when coupled to cross roller bearing 600B (see FIGS. 4A and 4B). For example, hub 491H includes a central opening 491HA that is shaped and sized to allow fasteners 461 to extend through hub 491H and engage alternating fastener holes in inner race 602 of cross roller bearing 600B. Flange 491SF is shaped and dimensioned to complement and fit within the boundaries of central opening 491HA (e.g., flange 491SF interlocks / interleaves with hub 491H) and so that fasteners 461 extend through flange 491SF and engage with alternate fastener holes (not used to connect pulley 491 to inner race 602) of inner race 602 of cross roller bearing 600B (e.g., pulley 491 and shaft 491S are alternately connected to cross roller bearing 600B).

[0079] In one embodiment, the cross roller bearing 600 may be configured as an integral or interlocking cross roller pulley 600PB. For example, and referring to FIGS. 6I and 6J, one or more of the pulleys described herein may be replaced with the cross roller pulley 600PB to further eliminate stacking of the pulleys and their respective bearings, further reducing the height of at least the transport arm link. In this embodiment, the cross roller pulley 600PB is mounted on a fixed shaft (such as, for example, any one of the shafts 491S, 476S in FIG. 4) in place of pulleys 470, 474, 482, 486, 491, 472, 476 (and their bearings), where the peripheral edge of the outer race 601 of the cross roller pulley 600PB includes grooves 635, 636 and cable anchors 643, 644 in a manner generally similar to that described herein with respect to the different pulleys. In this embodiment, the separate pulley and bearing pairs may be eliminated and replaced with cross roller pulleys 600PB, reducing the part count and cost of the transport arm.

[0080] 4 and 6A-6J, a third and fifth set of transmission members 493, 495 are described that are disposed at least partially within the forearm link 202. It is noted that the third and fifth sets of transmission members 493, 495 may be generally similar to the other transmission members 490, 492, 494 described herein.

[0081] The idler pulleys 472 have end effector interfaces where a surface of the idler pulleys 472 seats against a respective dual-ended substrate holder 203, or in other embodiments, the end effector interfaces are formed by the shafts 472S as described above. The idler pulleys 472 are coupled to respective elbow drive pulleys 470 by respective segmented transmission loops 661 (i.e., the third set of transmission members 493). The segmented transmission loops 661 include separate cable segments 661A, 661B, or any other suitable transmission linkages, such as band segments coupled to both the idler pulleys 472 and the elbow drive pulleys 470 that effect rotation of the idler pulleys 472.

[0082] The idler pulley 472 includes a peripheral edge 650 that forms cable wrap grooves 635, 636 that interface with the respective cables 661A, 661B of the segmented transmission loop 661 (note that the pulley grooves described herein provide tracking / guiding of the respective cables as they are wrapped around the pulley). For example, the peripheral edge 650 forms an upper cable wrap groove 635 around which the cable 661B is wrapped. The peripheral edge 650 also forms a lower cable wrap groove 636 around which the cable 661A is wrapped. The upper cable wrap groove 635 and the lower cable wrap groove 636 are positioned at different heights on the idler pulley 472 such that the cables 661A, 661B are positioned in different planes relative to one another (i.e., one cable does not wrap around the other cable). Referring to FIG. 6D, the elbow drive pulley 470 is generally similar to the idler pulley 472 described above.

[0083] Any suitable cable anchor points 643, 644 (FIGS. 6B-6J) join each of the separate cable segments 661A, 661B to the idler pulley 472. For example, each end of the cable segments 661A, 661B includes a retainer feature 666 (e.g., ball, cylinder, etc.) that is coupled to (or integrally formed with) the cable segment end in any suitable manner. The pulleys 470, 472 include respective mating retaining features 667 (grooves, etc.). Each of the mating retaining features 667 intersects with a respective one of the upper and lower cable wrap grooves 635, 636 of the respective pulleys 470, 472. The retainer features 666 of the cable segments 661A, 661B may be inserted into the respective mating retention features 667 and wrapped at least partially around the respective pulleys 470, 472 within a respective one of the upper and lower cable wrap grooves 635, 636. In other embodiments, the ends of the cable segments 661A, 661B may be coupled to the respective pulleys 470, 472 in any suitable manner. It is noted that the cable segments described herein are thinner (e.g., lower in height) as compared to conventional bands resulting in lower arm link heights AH1, AH2 than would otherwise be achieved with a band and pulley transmission.

[0084] In this embodiment, and with reference to FIGS. 6G and 6H, one or more of the opposing cable segments 661A, 661B include any suitable in-line cable tensioner 691. Although each of the cable segments 661A, 661B is illustrated as including an in-line cable tensioner 691, in other embodiments, only one of the cable segments 661A, 661B may include an in-line cable tensioner 691. In one embodiment, as shown in FIG. 6G, the in-line cable tensioner 691 is a turnbuckle cable tensioner 691TBK1 including a body 691B and a threaded portion 691T. It is noted that the in-line cable tensioner 691 may reduce the part count and cost of the transmission arm as compared to conventional band tensioning devices that utilize multiple opposing wedges and screws to tension the band. The body 691B may be coupled to the respective portions CP1 of the cable segments 661A, 661B such that when the body 691B is rotated, the body 691B rotates about its longitudinal axis in the direction 692 independent of the rotation of the cables such that when the body 691B is rotated, the cable segments 661A, 661B are not twisted in the direction 692. The threaded portion 691T may be coupled to the respective portions CP2 of the cable segments 661A, 661B in any suitable manner, and in one embodiment, in a manner generally similar to that described above with respect to the body 691B, where the body 691B is rotated in the direction 692 such that the threaded portion 691T is threaded in and out of the body to adjust the tension in the respective cable segments 661A, 661B. It is noted that cable segments 661A, 661B (as well as other cable segments described herein) are pre-stretched (e.g., pre-tensioned) to substantially eliminate stretching of cable segments 661A, 661B during operation of the transport arm under normal (e.g., designed) loads (the cable segments are not stretched under the normal operating loads of the transport arm).

[0085] 6H illustrates another example of a turnbuckle-style cable tensioner 691TBK2 according to an embodiment of the disclosure. In this example, each cable portion CP1, CP2 includes a threaded portion 691T1, 691T2 generally similar to those described above. The threaded portions 691T1, 691T2 are engaged with the turnbuckle body 691B1 such that as the turnbuckle body 691B1 rotates in the direction 692, the threaded portions 691T1, 691T2 move toward or away from each other to increase or decrease tension in the cable segment 661A.

[0086] Although the in-line cable tensioner 691 is described above as a turnbuckle-type cable tensioner, in other aspects (as discussed above), the in-line cable tensioner 691 can be any suitable cable tensioner that shortens a cable length to apply tension to the cable. For example, in one aspect, the in-line cable tensioner 691 can be an elastic-type cable tensioner 691RM (FIGS. 6C and 6F) that is coupled to each of the cable portions CP1, CP2 of the respective cable segments in a manner similar to that described above with respect to FIGS. 6G and 6H. Here, the elastic-type cable tensioner 691RM includes an elastic member 691BR that couples each of the cable portions CP1, CP2 to one another. The elastic member 691BR may be a spring or other suitable elastic member having a spring force greater than the operating loads applied to the cables 661A, 661B, 660A, 660B during operation of the substrate transport arm described herein, such that the tension in each cable 661A, 661B, 660A, 660B remains steady (or constant) despite the elasticity of the elastic member 691BR. In this embodiment, the elastic member 691BR may be stretched to install the cable segments 661A, 661B, 660A, 660B on their respective pulleys, whereby when the cable segments 661A, 661B, 660A, 660B are installed on their respective pulleys, the elastic member 691BR at least partially relaxes to automatically set a predetermined tension on the opposing respective cable segments 661A, 661B, 660A, 660B.

[0087] Similarly, the idler pulleys 476 have end effector interfaces where a surface of the idler pulleys 476 seats against a respective dual ended substrate holder 204, or in other embodiments, the end effector interfaces are formed by the shafts 476S, as described above. The idler pulleys 476 are coupled to respective elbow drive pulleys 474 by respective segmented transmission loops 660 (i.e., the fifth set of transmission members 495). The segmented transmission loops 660 include separate cable segments 660A, 660B, or any other suitable transmission linkages, such as band segments coupled to both the idler pulleys 476 and the elbow drive pulleys 474 that effect rotation of the idler pulleys 476.

[0088] The idler pulley 476 includes a peripheral edge 650 that forms cable wrap grooves 635, 636 that interface with respective cables 660A, 660B of the segmented transmission loop 660. Cable anchor points 643, 644 (FIG. 6C) join each of the separate cable segments 660A, 660B to the idler pulley 476. For example, the peripheral edge 650 forms an upper cable wrap groove 635 around which the cable 660B is wrapped. The peripheral edge 650 also forms a lower cable wrap groove 636 around which the cable 660A is wrapped. The upper cable wrap groove 635 and the lower cable wrap groove 636 are positioned at different heights on the idler pulley 476 such that the cables 660A, 660B are positioned in different planes relative to one another (i.e., one cable does not wrap around the other cable). Referring to FIG. 6D, elbow drive pulley 474 is generally similar to idler pulley 476 described above.

[0089] In one embodiment, the idler pulleys 472, 476 and the respective elbow drive pulleys 470, 474 to which the idler pulleys 472, 476 are coupled by segmented transmission loops 660, 661 have any suitable drive ratio that provides sufficient rotation of the respective dual end substrate holders 203, 204 for transport of substrates as shown in FIGS. 7A-7L. For example, the ratio between the idler pulleys 472, 476 and the elbow pulleys 470, 474 may be 1:2 or any other suitable ratio. It is noted that conventional band and pulley transmissions provide approximately + / - 160° rotation of the end effector at the wrist joint WX. An embodiment of the present disclosure utilizing a cable and pulley transmission provides greater than ±160° rotation of the end effector at the wrist joint WX or of the pulleys (such as those described herein) about the respective axes SX, EX, WX.

[0090] For example, in one embodiment, the engagement of pulley transmissions 490, 492, 493, 494, 495 with pulley wheels 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 of pulley systems 655A-655E is controlled by the respective pulley wheels 480, 484, 488, 482, 486, 491, 470, 474, 472, 476. 4, the pulley transmission 493 of the pulley system 655E may be arranged to determine the rotation of each of the pulley wheels 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 of the pulley systems 655A-655E through at least 360° rotation of the respective pulley wheels 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 between a wrapped and unwrapped position of the pulley transmission 490, 492, 493, 494, 495 on the pulley transmission 493. For example, referring to FIG. Pulley transmission 495 of pulley system 655D may also be wrapped around pulleys 474, 476 such that pulley 476 (driven by rotation of pulley 474) rotates through at least 360° of rotation between a wrapped and unwrapped position of pulley transmission 495 on pulley 476. In some embodiments, the other pulley systems 655A-655C may be similarly configured such that the driven pulley rotates at least 360°.

[0091] In one aspect, the engagement of pulley transmissions 490, 492, 493, 494, 495 with pulley wheels 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 of each of pulley systems 655A-655E is controlled by the respective pulley wheels 480, 484, 488, 482, 486, 491, 470, 474, 472, 476. 4, the pulley transmission 493 of the pulley system 655E may be wrapped around the pulleys 470, 472 such that the end effector 203 (driven by the rotation of the pulley 472) rotates through at least 360° rotation relative to the arm links 201, 202 between wrapped and unwrapped positions of the pulley transmission 493 on the pulley 472. The pulley transmission 495 of pulley system 655D can be wrapped around pulleys 474, 476 such that the end effector 204 (driven by rotation of pulley 476) rotates through at least 360° rotation relative to the arm links 201, 202 between a wrapped position and an unwrapped position of the pulley transmission 495 on pulley 476.

[0092] In one embodiment, and with reference to FIGS. 6E and 6F, an exemplary cable and pulley transmission is illustrated. The cable and pulley transmission may be substantially similar to those described herein. In this embodiment, each of the grooves 635, 636 may be formed in the outer circumferential surface of the respective pulleys 470, 472 to form a helix configured to guide the winding of the respective cables 661A, 661B around the respective pulleys 470, 472 along a helical path without the cables overlapping on themselves or each other. This helical winding of the cables 661A, 661B around the respective pulleys 470, 472 allows the cables to wind more than one turn (e.g., any suitable number of turns (see FIG. 6F)) around each of the respective pulleys 470, 472 to provide more than ±160°, or at least 360°, rotation of the end effector at the wrist joint WX or of the pulley wheels about the respective axes SX, EX, WX.

[0093] Although the pulleys 470, 472 in Figures 6E and 6F are illustrated as having a substantially 1:1 drive ratio, in other embodiments the pulleys may have any suitable drive ratio, such as a 2:1 or 3:1 drive ratio, to increase the amount of rotation of the end effector about the wrist axis (either alone or in combination with a helically wrapped cable). It is noted that the pulley-to-pulley drive ratios described herein with respect to cable and pulley transmissions may be effected with smaller diameter pulleys as compared to pulleys used in band and pulley transmissions. For example, the cables described herein are generally more flexible than bands and may provide a smaller bend radius when compared to bands. With a smaller bend radius for the cable, the pulley diameter will be smaller in the cable-based transmissions described herein than in band-based transmissions.

[0094] The first set of transmission members 490, the second set of transmission members 492, the fourth set of transmission members 494, the shoulder drive pulleys 480, 484, 488, and the elbow idler pulleys 482, 486, 491 are generally similar to those described above with respect to the idler pulleys 472, 476, the drive pulleys 470, 474, and the segmented transmission loops 660, 661 (see FIGS. 6C and 6D). As noted above, the cable anchor points for the first set of transmission members 490, the second set of transmission members 492, and the fourth set of transmission members 494 are generally similar to those described above with respect to the cable anchor point 643.

[0095] As described herein, the modular composite arm link casing 201C, 202C is a low profile casing having a compact height AH (FIGS. 5C and 5E) for a selected predetermined arm length OAL, OALn corresponding to a symmetrically flexible pulley transmission (such as transmission members 490, 492, 493, 494, 495) connecting each pulley wheel of each pulley system 655A-655E having a compact and substantially symmetrical cross section. For example, the cable segments (such as cable segments 660A, 660B illustrated in FIGS. 6A and 6B) have a generally circular cross section, but may have any other suitable symmetrical cross section. The compact height AH is less than the housing height of a band pulley transmission for an equivalent number of pulley systems having an equivalent length. For example, with brief reference to FIG. 4A, the arm link 201 has a compact height AH and a length OAL. In this example, arm link 201 includes three pulley systems 655A-C, where each pulley system includes opposing cable segments and a pair of pulleys (as described herein). Compared to an arm link having the same length OAL and the same number of pulley systems, where each pulley system includes opposing band segments and a pair of pulleys, the height AH of arm link 201 including three of the cable / pulley transmissions described herein is less than the height of an arm link including three of the band / pulley transmissions.

[0096] Although the substrate transport apparatus 130 is described above with dual pan substrate holders 203, 204, in other embodiments the substrate holders may have any suitable configuration. For example, with reference to Figures 8, 9, and 10, each of a plurality of end effector links (e.g., substrate holders) has a plurality of corresponding substrate holding stations depending therefrom, of a plurality of juxtaposed (e.g., side-by-side) substrate holding stations, each of which is a substantially rigid non-articulating link between the plurality of corresponding substrate holding stations depending from the respective end effector link (e.g., substrate holder). For example, the substrate transport apparatus 130 includes a dual pan substrate holder 203A, 204A generally similar to that described above, but in this embodiment, the substrate holding stations 203H1, 204H1 are arranged side-by-side in a common plane (separated by a base pitch BP), while the substrate holding stations 203H2, 204H2 are arranged in different planes and stacked on top of each other (separated by any suitable height H10, which may correspond to the distance between the stacked holding stations of the stacked substrate processing stations 150, the stacked vacuum load locks 102A, 102B, 102C, 102D, or any other suitable stacked substrate holding positions (see FIG. 1C)). Here, the openings of the transport chambers to the substrate processing stations may be in different planes / levels (see FIG. 1C), where each plane corresponds to the plane / level of both juxtaposed substrate holding stations 203H1-204H1, 203H2-204H2 of the dual / double end substrate holder 203, 204. In yet another embodiment, as shown in FIG. 11, the substrate holding stations 203H1, 204H1 are arranged side-by-side in a common plane (separated by the base pitch BP), while only one of the substrate holders 203A, 204A is configured as a dual-pan substrate holder (in this example, substrate holder 203A includes dual substrate holding stations 203H1, 203H2, while substrate holder 204A includes a single substrate holding station 204H1).Again, each plane 499, 499A (see FIGS. 2D, 10, and 11) of the substrate holder surface (as described herein and whether the substrate holding station(s) 203H1, 203H2, 204H1, 204H2 of the dual sided substrate holder form one or more planes) corresponds to and is aligned with at least one plane of the transport opening in the common transport chamber (see FIGS. 1B and 1C) for transfer at a given Z position of the transport opening surface, such that transfer of a substrate through each respective opening on each plane is effected by at least one substrate holding station 203H1, 203H2, 204H1, 204H2 of each dual end substrate holder 203, 204 with substantially no Z axis motion. 4H2, i.e., extension with substrate holding station(s) 203H1, 203H2, 204H1, 204H2 at one end of the substrate holder 203, 204 to a substrate processing station (for each plane), picking and / or placing substrate(s) at the substrate processing station, retraction from the substrate processing station, and extension to a different substrate processing station with the same or different dual substrates at the same or different end of the dual end substrate holder 203, 204, provides rapid swapping of substrates substantially independent of Z-axis motion (independent of intervening Z-axis motion or decoupled from intervening Z-axis motion between transfers of substrates). Automatic wafer centering, such as according to the embodiment of the present disclosure illustrated in Figures 8, 9, and 10, is provided by varying the base pitch BP (e.g., it can be increased or decreased) between the substrate holding stations 203H1, 204H1 in a manner generally similar to that described above. As can be appreciated, the substrate holder(s) 203H2, 204H2 are also independently rotated about the wrist axis WX, providing automatic wafer centering relative to the substrate holding station 203H2 independent of the substrate holding station 204H2 and / or automatic wafer centering relative to the substrate holding station 204H2 independent of the substrate holding station 203H2.

[0097] 12 and 13, the substrate transport apparatus 130 is illustrated in this embodiment as including three dual pan substrate holders. For example, the substrate transport apparatus 130 includes substrate holders 203, 204 (as described above) as well as substrate holder 205. The substrate holders 203, 204 are driven by the drive section 220 in the manner described above to pivot in directions 1300, 1301 relative to each other and relative to the substrate holder 205 about the wrist axis WX. In this example, the drive section includes an additional drive axis (e.g., a five degree of freedom drive) for independently rotating the substrate holder 205 in direction 1302 relative to each of the substrate holders 203, 204 about the wrist axis WX, although in other embodiments the substrate holder 205 may be slaved to any suitable portion of the substrate transport apparatus 130, such as, for example, the upper arm 201, such that it remains aligned with a radial extension axis passing through the shoulder axis SX.Again, each plane 499, 499A (see FIGS. 2D, 10, and 11) of the substrate holder surface (as described herein and whether the substrate holding station(s) 203H1, 203H2, 204H1, 204H2 of the dual sided substrate holder form one or more planes) corresponds to and is aligned with at least one plane of the transport opening in the common transport chamber (see FIGS. 1B and 1C) for transfer at a given Z position of the transport opening surface, such that transfer of a substrate through each respective opening on each plane is effected by at least one substrate holding station 203H1, 203H2, 204H1, 204H2 of each dual end substrate holder 203, 204 with substantially no Z axis motion. The extension provided by 4H2, i.e., extension to a substrate processing station (for each plane) using substrate holding station(s) 203H1, 203H2, 204H1, 204H2 at one end of the substrate holder 203, 204, picking and / or placing of substrate(s) at the substrate processing station, retraction from the substrate processing station, and extension to a different substrate processing station with the same or different dual substrates at the same or different ends of the dual end substrate holder 203, 204, provides high speed swapping of substrates substantially independent of Z axis motion (independent of any intervening Z axis motion or decoupled from any intervening Z axis motion between transfers of substrates). In this example, automatic wafer centering is provided such that the base pitch BP between substrate holder 203 and substrate holder 204 may be increased or decreased, the base pitch BP between substrate holder 203 and substrate holder 205 may be increased or decreased, the base pitch BP between substrate holder 204 and substrate holder 205 may be increased or decreased, etc., to provide automatic wafer centering for any one or more of substrate holding stations 203H1, 204H1, 205H1, 203H2, 204H2, 205H2 relative to side-by-side substrate processing stations 190-198 and 199A-199C (see FIG. 12). In other aspects, substrate holding stations 203H2-205H2 (or 203H1-205H1) may be stacked one above the other in a manner similar to that shown in FIG.In yet other embodiments, one or more of the substrate holders 203-205 may be single pan substrate holders in a manner similar to that shown in FIG.

[0098] In still other embodiments, the substrate transport apparatus 130 may have substrate holders with any suitable configuration for transporting substrates to and from a single substrate station, any suitable number of substrate stations arranged side-by-side, any suitable number of substrate stations arranged stacked one above the other, etc. Combinations of side-by-side substrate holders and multiple stacked (or single) substrate holders on opposite sides of the wrist axis WX may be utilized, such as when a combination of twin, single, triple, etc. (see FIGS. 1A, 8, and 12) substrate station modules are coupled to the transfer chamber 125. For example, with reference to FIGS. 19 and 32, the substrate transport apparatus 130 includes one dual (side-by-side) substrate holder 1900 rotatably coupled to the arm 131 in a manner similar to that described above. In this embodiment, the arm 131 and the substrate holder 1900 may be driven in rotation and / or extension (e.g., along radial and / or non-radial linear paths) by a three-axis drive section 220A (FIG. 3A), where one drive shaft rotates the upper arm 201 about a shoulder axis SX, one drive shaft rotates the forearm 202 about an elbow axis EX, and one drive shaft rotates the substrate holder 1900 about a wrist axis WX. Each of the upper arm 201, the forearm 202, and the substrate holder 1900 may be coupled to the three-axis drive section 220A (FIG. 3A) by any suitable transmission, such as a cable and pulley transmission generally similar to that described above with respect to FIG. 4. Here, the substrate holder 1900 includes (i.e., has in common) two side-by-side substrate holding stations 1900H1, 1900H2 generally similar to those described above. The distance between the side-by-side substrate holding stations 1900H1, 1900H2 may be approximately the same as the pitch D between the side-by-side substrate processing stations 190-197 (FIG. 1A). The substrate holder 1900 has a first end 1900E1, a second end 1900E2, and is a substantially rigid non-articulating link between the first end 1900E1 and the second end 1900E2. The substrate holder 1900 is rotatably coupled to the forearm 202 about a wrist axis WX at a position between the first end 1900E1 and the second end 1900E2.As described above, the substrate holding stations 1900H1, 1900H2 are disposed on a common plane (generally similar to the plane 499 as described above with respect to FIGS. 2D, 10, and 11). The substrate holders 1900 may be extended along non-radial linear paths and / or radial linear paths by the transport arm 131 and drive section 220A in a manner generally similar to that described herein for substantially simultaneously picking and / or placing substrates into the substrate station modules aligned along the common plane 499.

[0099] 20, the substrate transport apparatus 130 is generally similar to that described above with respect to FIG 19, but in this embodiment the substrate transport apparatus 130 includes two substrate holders 1900A and 1900B rotatably coupled to the arm 131 about the wrist axis WX. Each of the substrate holders 1900A, 1900B is generally similar to the substrate holder 1900. Here, the arm 131 and substrate holders 1900A, 1900B are driven in rotation and / or extension (along non-radial linear paths and / or radial linear paths) by, for example, a four-axis drive section 220 (FIG. 3), where one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, one drive shaft rotates the substrate holder 1900A about the wrist axis WX, and one drive shaft rotates the substrate holder 1900B about the wrist axis WX. Each of the upper arm 201, the forearm 202, and the substrate holders 1900A, 1900B may be coupled to the four-axis drive section 220 (FIG. 3) by any suitable transmission, such as a cable and pulley transmission generally similar to that described above with respect to FIG. In this embodiment, substrate holder 1900A includes substrate holding stations 1900H1, 1900H2, and substrate holder 1900B includes substrate holding stations 1900H3, 1900H4. In a manner similar to that described above, substrate holding stations 1900H1, 1900H2, 1900H3, 1900H4 are disposed on a common plane (generally similar to plane 499 as described above with respect to FIGS. 2D, 10, and 11). Substrate holders 1900A, 1900B may be extended along non-radial linear paths and / or radial linear paths by transport arm 131 and drive section 220 in a manner generally similar to that described herein for substantially simultaneously picking and / or placing substrates into substrate station modules aligned along common plane 499. The arm 131 and / or the substrate holders 1900A, 1900B may also be rotationally driven to rapidly swap the substrate holders 1900A, 1900B (and substrates picked or placed thereby) in a manner generally similar to that described herein.

[0100] 21, the substrate transport apparatus 130 is generally similar to that described above with respect to FIG 19, however, in this embodiment the substrate transport apparatus 130 includes two single sided substrate holders 2100A and 2100B rotatably coupled to the arm 131 about a wrist axis WX. Each of the substrate holders 2100A, 2100B has a respective first end 2100AE1, 2100BE1 coupled to the forearm 202 about the wrist axis, and a respective second end 2100AE2, 2100BE2 at which a respective substrate holding station 2100H1, 2100H2 is disposed. Here, the arm 131 and substrate holders 2100A, 2100B are driven in rotation and / or extension (along non-radial linear paths and / or radial linear paths) by, for example, a four-axis drive section 220 (FIG. 3), where one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, one drive shaft rotates the substrate holder 2100A about the wrist axis WX, and one drive shaft rotates the substrate holder 2100B about the wrist axis WX. Each of the upper arm 201, the forearm 202, and the substrate holders 2100A, 2100B may be coupled to the four-axis drive section 220 (FIG. 3) by any suitable transmission, such as a cable and pulley transmission generally similar to that described above with respect to FIG. 4. In this embodiment, substrate holder 2100A includes substrate holding station 2100H1 and substrate holder 2100B includes substrate holding station 2100H2. In a manner similar to that described above, substrate holding stations 2100H1, 2100H2 are disposed on a common plane (generally similar to plane 499 as described above with respect to Figures 2D, 10, and 11).

[0101] The substrate holders 2100A, 2100B may be extended along non-radial and / or radial linear paths by the transport arm 131 and drive section 220 in a manner generally similar to that described herein for substantially simultaneously picking and / or placing substrates into aligned substrate station modules along a common plane 499. Note that independent rotation of the substrate holders 2100A, 2100B about the wrist axis WX provides automatic wafer centering by varying the base pitch BP (e.g., the distance between aligned substrate holding stations 2100H1, 2100H2 may be increased or decreased in a manner similar to that illustrated in FIGS. 2B and 2C) to accommodate variations in pitch D and / or to provide automatic wafer centering for placing wafers into the substrate processing stations 190-197 (see FIG. 1A).

[0102] 22, the substrate transport apparatus 130 includes a substrate holder 2200 that is rotatably coupled to the arm 131 in a manner similar to that described above. In this embodiment, the arm 131 and the substrate holder 2200 may be driven in rotation and / or extension (e.g., along radial and / or non-radial linear paths) by a three-axis drive section 220A (FIG. 3A), where one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, and one drive shaft rotates the substrate holder 2200 about the wrist axis WX. Each of the upper arm 201, the forearm 202, and the substrate holder 2200 may be coupled to the three-axis drive section 220A (FIG. 3A) by any suitable transmission, such as a cable and pulley transmission generally similar to that described above with respect to FIG. 4. Here, the substrate holder 2200 includes (i.e. has in common) two side-by-side substrate holding stations 2200H1, 2200H2 and one opposing substrate holding station 2200H3 substantially similar to those described above, and the substrate holder 2200 is a substantially rigid non-articulating link between the substrate holding stations 2200H1, 2200H2, 2200H3. The distance between the two side-by-side substrate holding stations 2100H1, 2100H2 may be substantially the same as the pitch D between the side-by-side substrate processing stations 190-197 (FIG. 1A).

[0103] In a manner generally similar to that described above with respect to Figures 8 and 9, the array of substrate holding stations 2100H1, 2100H2 generally simultaneously pick and place substrates S from and to the array of substrate processing stations 190-197 (Figure 1), while the opposing substrate holding station 2200H3 picks and places a single substrate to a single substrate processing station (which may be one of the array of substrate processing stations 190-197 (Figure 1A) or substrate processing station 150S (Figure 8)). The substrate holder 2200 is rotatably coupled to the forearm 202 about the wrist axis WX at a position between the substrate holding stations 2200H1, 2200H2, 2200H3. 2D, 10, and 11, while in other embodiments, one or more of the substrate holding stations 2200H1, 2200H2, 2200H3 may be arranged in various stacked planes. The substrate holder 2200 may be extended along a non-radial linear path and / or a radial linear path by the transport arm 131 and drive section 220A in a manner generally similar to that described herein for substantially simultaneously picking and / or placing a substrate to the aligned substrate station modules 150 along the common plane 499 using aligned substrate holding stations 2200H1, 2200H2, or for substantially simultaneously picking and / or placing a substrate to and from the substrate station modules 150, 150S using substrate holding station 2200H3.In one aspect, the arm 131 and / or end effector 2200 may also be rotated and driven to rapidly swap a substrate using the opposing substrate holding station 2200H3 and one of the aligned substrate holding stations 2200H1, 2200H2 (in a manner generally similar to that described herein), such as when a substrate is picked by the aligned substrate holding stations 2200H1, 2200H2 and the substrate is placed by the opposing substrate holding station 2200H3 at one of the positions just picked by the aligned substrate holding stations 2200H1, 2200H2.

[0104] 23, the substrate transport apparatus 130 includes a substrate holder 1900, 2300 rotatably coupled to an arm 131 in a manner similar to that described above. In this embodiment, the arm 131 and substrate holder 1900, 2300 may be driven in rotation and / or extension (e.g., along radial and / or non-radial linear paths) by a four-axis drive section 220 (FIG. 3), where one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, one drive shaft rotates the substrate holder 1900 about the wrist axis WX, and one drive shaft rotates the substrate holder 2300 about the wrist axis WX. Each of the upper arm 201, the forearm 202, and the substrate holders 1900, 2300 may be coupled to the four-axis drive section 220 (FIG. 3) by any suitable transmission, such as a cable and pulley transmission generally similar to that described above with respect to FIG. 4. Here, the substrate holder 1900 includes two side-by-side substrate holding stations 1900H1, 1900H2 as described above. The substrate holder 2300 is an opposing substrate holder with a single substrate holding station 2300H1 (i.e., opposing the substrate holder 1900 in a manner generally similar to that described above with respect to FIGS. 8, 9, and 22). The substrate holding station 2300H1 is generally similar to that described above. The substrate holder 2300 has a first (or proximal) end coupled to the forearm 202 at the wrist axis WX, and an opposing (or distal) end at which the substrate holding station 2300H1 is located. The substrate holder 2300 is a substantially rigid non-articulating link between the proximal and distal ends. As mentioned above, the distance between the two side-by-side substrate holding stations 2100H1, 2100H2 may be approximately the same as the pitch D between the side-by-side substrate processing stations 190-197 (FIG. 1A).

[0105] As described above, in a manner generally similar to that described above with respect to Figures 8 and 9, the aligned substrate holding stations 1900H1, 1900H2 generally simultaneously pick and place substrates S from and to the aligned substrate processing stations 190-197 (Figure 1), while the opposing substrate holding station 2300H1 picks and places a single substrate to a single substrate processing station (which may be one of the aligned substrate processing stations 190-197 (Figure 1A) or substrate processing station 150S (Figure 8)).

[0106] Independent rotation of the substrate holder 2300 provides automatic wafer centering (as described herein) of the substrate held by the substrate holding station 2300H1 during pick / place operations. Independent rotation of the substrate holders 1900, 2300 may also provide substrate holder conformance of the substrate transport apparatus 130 to the shape (e.g., inner wall 125W) of the transfer chamber 125A. For example, referring also to FIG. 23A, the substrate holders 1900, 2300 may be rotated by the drive section 220 such that the single substrate holder 2300 is rotated to extend into the substrate processing station 150 by an arm extension motion, and the substrate holder 1900 is rotated to maintain a clearance between the substrate holder 1900 and the wall 125W of the transfer chamber 125A. Although a six-sided transfer chamber 125A is illustrated in FIG. 23A, in other embodiments the transfer chamber may have any suitable number of sides and the substrate holders 1900, 2300 may be rotated by the drive section in any suitable manner to conform to the shape of the walls of the transport chamber.

[0107] 2D, 10, and 11, while in other embodiments, one or more of the substrate holding stations 1900H1, 1900H2, 2300H1 may be arranged in various stacked planes. The substrate holders 1900, 2300 may be extended along non-radial linear paths and / or radial linear paths by the transport arm 131 and drive section 220 in a manner generally similar to that described herein for substantially simultaneously picking and / or placing substrates to the aligned substrate station modules 150 along the common plane 499 using aligned substrate holding stations 1900H1, 1900H2, or for substantially simultaneously picking and / or placing substrates to and from the substrate station modules 150, 150S using substrate holding station 2300H1. In one aspect, the arm 131 and / or end effector 2200 may also be rotationally driven to rapidly swap a substrate using the opposing substrate holding station 2300H1 and one of the aligned substrate holding stations 1900H1, 1900H2 (in a manner generally similar to that described herein), such as when a substrate is picked by the aligned substrate holding stations 1900H1, 1900H2 and the substrate is placed by the opposing substrate holding station 2300H1 at one of the positions just picked by the aligned substrate holding stations 1900H1, 1900H2.

[0108] 2A-2D, the substrate transport apparatus 130 is generally similar to that described above with respect to FIGS. 2A-2D, except that in this embodiment, the substrate holders 2403, 2404 have an "S" shaped configuration and cross each other. For example, the substrate holder 2403 has a first portion 2403A, a second portion 2403B having a longitudinal axis disposed generally perpendicular to the longitudinal axis of the first portion 2403A, and a third portion having a longitudinal axis disposed generally parallel to the longitudinal axis of the first portion 2403A, thereby forming a generally "S" shaped substrate holder. The distal end of the first portion forms a first end 2403E1 of the substrate holder 2403, and the distal end of the third portion 2403C forms a second end 2403E2 of the substrate holder 2403. The second portion 2403B is connected to the forearm 202 about the wrist axis WX, where the substrate holder 2403 is a substantially rigid non-articulating link between the first end 2403E1 and the second end 2403E2. The configuration of the substrate holder 2404 is generally similar to the substrate holder 2403, but is reversed.

[0109] Here, the arm 131 and substrate holders 2403, 2404 are driven in rotation and / or extension (along non-radial linear paths and / or radial linear paths) by, for example, a four-axis drive section 220 (FIG. 3), where one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, one drive shaft rotates the substrate holder 2403 about the wrist axis WX, and one drive shaft rotates the substrate holder 2404 about the wrist axis WX. Each of the upper arm 201, forearm 202, and substrate holders 2100A, 2100B may be coupled to the four-axis drive section 220 (FIG. 3) by any suitable transmission, such as a cable and pulley transmission generally similar to that described above with respect to FIG. In this embodiment, the substrate holder 2403 includes substrate holding stations 2403H1, 2403H2, and the substrate holder 2404 includes substrate holding stations 2404H1, 2404H2. In a manner similar to that described above, the substrate holding stations 2403H1, 2403H2, 2404H1, 2404H2 are disposed on a common plane (generally similar to the plane 499 as described above with respect to FIGS. 2D, 10, and 11). The substrate holding stations 2403H1, 2403H2, 2404H1, 2404H2 may be extended along non-radial linear paths and / or radial linear paths by the transport arm 131 and drive section 220 in a manner generally similar to that described herein for substantially simultaneously picking and / or placing substrates into the substrate station modules aligned along the common plane 499. It is noted that independent rotation of the substrate holders 2403, 2404 about the wrist axis WX provides automatic wafer centering by varying the base pitch BP (e.g., the distance between adjacent substrate holding stations 2100H1, 2100H2 can be increased or decreased in a manner similar to that illustrated in Figures 2B and 2C) to accommodate variations in pitch D and / or to provide automatic wafer centering for placing the wafer in the substrate processing stations 190-197 (see Figure 1A).In one embodiment, the arm 131 and / or end effectors 2403, 2404 can also be rotationally driven to rapidly swap substrates in a manner similar to that described above with respect to Figures 7A-7L (substantially similar to that described herein).

[0110] 25, the substrate transport apparatus 130 is generally similar to that described above with respect to FIG 21, but in this embodiment the substrate transport apparatus also includes opposing substrate holders 2300 similar to that described above with respect to FIG 23. Here, the arms 131 and substrate holders 2100A, 2100B, 2300 are driven in rotation and / or extension (along non-radial linear paths and / or radial linear paths) by, for example, a five-axis drive section 220C (FIG. 3C), where one drive shaft rotates the upper arm 201 about the shoulder axis SX, one drive shaft rotates the forearm 202 about the elbow axis EX, one drive shaft rotates the substrate holder 2100A about the wrist axis WX, one drive shaft rotates the substrate holder 2100B about the wrist axis WX, and one drive shaft rotates the substrate holder 2300 about the wrist axis WX. Each of the upper arm 201, the forearm 202, and the substrate holders 2100A, 2100B, 2300 may be coupled to the five-axis drive section 220C (FIG. 3C) by any suitable transmission, such as a cable and pulley transmission generally similar to that described above with respect to FIG. 4. In this embodiment, the substrate holder 2100A includes a substrate holding station 2100H1, the substrate holder 2100B includes a substrate holding station 2100H2, and the substrate holder 2300 includes a substrate holding station 2300H1. In a manner similar to that described above, the substrate holding stations 2100H1, 2100H2, 2300H1 are disposed on a common plane (generally similar to the plane 499 as described above with respect to FIGS. 2D, 10, and 11). The substrate holders 2100H1, 2100H2, 2300H1 may be extended along non-radial linear paths and / or radial linear paths by the transport arm 131 and drive section 220C in a manner generally similar to that described herein for generally simultaneously picking and / or placing substrates to substrate station modules aligned along a common plane 499.

[0111] It is noted that independent rotation of the substrate holders 2100H1, 2100H2 about the wrist axis WX provides automatic wafer centering for picking / placing the substrate S at the side-by-side substrate station module 150 by varying the base pitch BP (e.g., the distance between the side-by-side substrate holding stations 2100H1, 2100H2 may be increased or decreased in a manner similar to that illustrated in FIGS. 2B and 2C) to accommodate variations in pitch D and / or to provide automatic wafer centering for placing the wafer at the substrate processing station 190-197 (see FIG. 1A). It is further noted that the opposing substrate holding station 2300H1 picks and places a single substrate at a single substrate processing station (which may be one of the side-by-side substrate processing stations 190-197 (FIG. 1A) or the substrate processing station 150S (FIG. 8)) in a manner generally similar to that described above with respect to FIGS. 8 and 9. Independent rotation of the substrate holder 2300 provides further automatic wafer centering (as described herein) of the substrate held by the substrate holding station 2300H1 during pick / place operations. In one embodiment, the arm 131 and / or end effector 2100A, 2100B, 2300 may also be rotationally driven to rapidly swap substrates (in a manner generally similar to that described herein) using the opposing substrate holding station 2300H1 and one of the aligned substrate holding stations 2100H1, 2100H2, such as when a substrate is picked by the aligned substrate holding stations 2100H1, 2100H2 and the substrate is placed by the opposing substrate holding station 2300H1 at one of the positions just picked by the aligned substrate holding stations 2100H1, 2100H2.

[0112] In one embodiment, independent rotation of the substrate holders 2100A, 2100B, 2300 may also provide substrate holder conformance of the substrate transport apparatus 130 to the shape (e.g., inner wall 125W) of the transfer chamber 125A in a manner similar to that described above with respect to Figure 23A. However, in this embodiment, one or more of the substrate holders 2100A, 2100B may be rotated by the drive section 220C to maintain clearance between the respective substrate holders 2100A, 2100B and the wall 125W of the transfer chamber 125A.

[0113] 26A, 26B, 26C, and 26D, the substrate transport apparatus 130 is generally similar to that described above with respect to FIG. 24, except that in this embodiment, at least one of the substrate holders 2403, 2404 is movable in the Z direction such that the substrate holders 2403, 2404 (and respective substrate holding stations 2403H1, 2404H1, 2403H2, 3404H2) pass over one another. For example, a wrist Z drive 2660 is provided within or coupled to the forearm 202 (in addition to or instead of the Z drive 312 (see FIGS. 3-3C)). The wrist Z drive 2660 is configured to move one or more of the substrate holders 2403, 2404 in the Z direction relative to another of the substrate holders 2403, 2404. 26C, the wrist Z drive 2660 is configured to move the substrate holder 2403 in the Z direction relative to the substrate holder 2404 and the forearm 202, although in other embodiments, both substrate holders may be movable in the Z direction relative to the forearm 202 and / or relative to each other. The wrist Z drive 2660 may have any suitable configuration for effecting Z motion, including, but not limited to, one or more of a linear actuator, a screw jack, and a magnetic levitation lift. In this embodiment, the pulley 476 is coupled to a shaft 476S, where the shaft 476S includes an outer shaft portion 476B and an inner shaft portion 476A. The inner shaft portion 476A and the outer shaft portion 476B are configured such that the inner shaft portion 476A is movable in the Z direction relative to the outer shaft portion 476B while rotating as a unit with the outer shaft portion 476B. For example, the inner shaft portion 476A includes an internal spline and the outer shaft portion 476B includes an external spline configured to mate with the internal spline. Although an example configuration of the wrist Z drive 2660 and shaft 276S is provided, in other embodiments, the wrist Z drive 2660 and shaft 276S may have any suitable configuration for providing Z-axis motion of the substrate holder 2403.

[0114] The list Z drive 2660 is configured to raise and lower the substrate holder 2403 in a manner similar to that described above such that the substrate holding stations 2403H1, 2403H2, 2404H1, 2404H2 are disposed on a common plane (generally similar to the plane 499 described above with respect to FIGS. 2D, 10, and 11) as illustrated in FIG. 26C for picking / placing substrates to the aligned substrate station modules 150. As described above, the substrate holding stations 2403H1, 2403H2, 2404H1, 2404H2 may be extended along non-radial linear paths and / or radial linear paths by the transport arm 131 and drive section 220 in a manner generally similar to that described herein for substantially simultaneously picking and / or placing substrates along the common plane 499 to the aligned substrate station modules. It is noted that independent rotation of the substrate holders 2403, 2404 about the wrist axis WX provides automatic wafer centering by varying the base pitch BP (e.g., the distance between side-by-side substrate holding stations 2100H1, 2100H2 may be increased or decreased in a manner similar to that illustrated in FIGS. 2B and 2C) to accommodate variations in pitch D and / or provide automatic wafer centering for placing wafers in the substrate processing stations 190-197 (see FIG. 1A). In one embodiment, the arm 131 and / or end effectors 2403, 2404 may also be rotationally driven for rapid swapping in a manner similar to that described above with respect to FIGS. 7A-7L (substantially similar to that described herein).

[0115] The list Z drive 2660 is also configured to raise and lower the substrate holder 2403 such that the substrate holding stations 2403H1, 2403H3 of the substrate holder 2403 are disposed in a different plane than the substrate holding stations 2404H1, 2404H2 of the substrate holder 2404, as can be seen in Figure 26D, where the substrate holding stations 2403H1, 2403H2 are disposed in a plane 499A, while the substrate holding stations 2404H1, 2404H2 are disposed in a plane 499. The planes 499, 499A may be separated by a distance or height H10 as described above. By arranging the substrate holders 2403, 2404 in different planes 499, 499A, the substrate holders 2403, 2404 can be rotated relative to each other about the wrist axis WX so that the centers C of the substrates S held by each of the substrate holding stations 2403H1, 2404H1 (or 2403H2, 2404H2) approximately coincide with each other along the Z direction as shown in FIG. 26B.

[0116] 1C, the substrate holders 2403, 2404 may be independently rotated about a wrist axis, and one or more of the substrate holders 2403, 2404 may be moved in the Z direction by the wrist Z drive 2660 to effect picking of substrates from various stacked and / or side-by-side substrate holding positions. For example, in one aspect, the substrate holding stations 2403H1, 2404H1 (or 2403H2, 2404H2) are arranged along a common plane, such as for substantially simultaneous picking / placing of substrates from side-by-side load locks 102A, 102B or side-by-side load locks 102C, 102D (or other substrate holding positions). In one embodiment, the substrate holding stations 2403H1, 2404H1 (or 2403H2, 2404H2) are positioned one above the other in a stacked plane (see FIG. 26B above), such as for substantially simultaneous picking / placing of substrates from stacked load locks 102A, 102C or stacked load locks 102B, 102D (or other substrate holding locations). In yet other embodiments, the substrate holding stations 2403H1, 2404H1 (or 2403H2, 2404H2) are positioned in different planes and horizontally offset, such as for substantially simultaneous picking / placing of substrates from stacked and horizontally offset load locks 102A, 102D (or other substrate holding locations).

[0117] 27A, 27B, and 27C, the substrate transport apparatus 130 is generally similar to that described above with respect to FIG. 25, except that in this embodiment, at least one of the substrate holders 2100A, 2100B, 2300 is movable in the Z direction such that the substrate holders 2100A, 2100B, 2300 (and respective substrate holding stations 2100H1, 2100H2, 2300H1) pass over one another. For example, a wrist Z drive 2660 is provided within or coupled to the forearm 202 (in addition to or instead of the Z drive 312 (see FIGS. 3-3C)). The wrist Z drive 2660 is configured to move one or more of the substrate holders 2100A, 2100B, 2300 in the Z direction relative to another substrate holder 2100A, 2100B, 2300. 27C, the wrist Z drive 2660 is configured to move the substrate holder 2100B in the Z direction relative to the substrate holders 2100A, 2300 and the forearm 202, although in other embodiments, both substrate holders 2100A, 2100B, or all three substrate holders 2100A, 2100B, 2300 may be movable in the Z direction relative to the forearm 202 and / or relative to each other. A pulley 2770, shaft 2770S, and transmission member 2791 are illustrated for driving rotation of the substrate holder 2100A about the wrist axis WX, where it is noted that the pulley 2770 is coupled to the drive section 220C via a transmission similar to that illustrated in FIG. 4 and described above.

[0118] The list Z drive 2660 is configured to raise and lower the substrate holder 2100B in a manner similar to that described above such that the substrate holding stations 2100H1, 2100H2, 2300H1 are disposed on a common plane (generally similar to plane 499 as described above with respect to FIGS. 2D, 10, and 11) for substrate picking / placing as described above with respect to FIGS. 8, 9, and 25. The list Z drive 2660 is also configured to raise and lower the substrate holder 2100B such that the substrate holding station 2100H2 of the substrate holder 2100B is disposed on a different plane than the substrate holding stations 2100H1, 2300H1 of the substrate holders 2100A, 2300 as seen in FIG. 26C. Here, the substrate holding station 2100H2 is disposed on plane 499A while the substrate holding stations 2100H1, 2300H1 are disposed on plane 499. The planes 499, 499A may be separated by the distance or height H10 described above. With the substrate holders 2100A, 2100B disposed in different planes 499, 499A, the substrate holders 2100A, 2100B may be rotated about the wrist axis WX relative to one another such that the centers C of the substrates S held by each of the substrate holding stations 21000H1, 2100H2 are approximately coincident with one another along the Z direction as shown in FIG.

[0119] As described above, the substrate holders 2100A, 2100B, 2300 may be extended along non-radial linear paths and / or radial linear paths by the transport arm 131 and drive section 220 in a manner generally similar to that described herein for substantially simultaneously picking and / or placing substrates into aligned substrate station modules along a common plane 499. It is noted that independent rotation of the substrate holders 2100A, 2100B about the wrist axis WX provides automatic wafer centering by varying the base pitch BP (e.g., the distance between aligned substrate holding stations 2100H1, 2100H2 may be increased or decreased in a manner similar to that illustrated in FIGS. 2B and 2C) to accommodate variations in pitch D and / or provide automatic wafer centering for placing wafers into the substrate processing stations 190-197 (see FIG. 1A). As noted above, independent rotation of the substrate holder 2300 also provides automatic wafer centering of a substrate held by the substrate holding station 2300H1 during pick / place operations. Also, as noted above, in one aspect, the arm 131 and / or end effector 2200 may also be rotationally driven to rapidly swap a substrate (in a manner generally similar to that described herein) using the opposing substrate holding station 2300H1 and one of the aligned substrate holding stations 2100H1, 2100H2, such as when a substrate is picked by the aligned substrate holding stations 2100H1, 2100H2 and the substrate is placed by the opposing substrate holding station 2300H1 at one of the positions just picked by the aligned substrate holding stations 2100H1, 2100H2.

[0120] 1C, the substrate holders 2100A, 2100B may be independently rotated about a wrist axis, and one or more of the substrate holders 2100A, 2100B may be moved in the Z direction to effect picking of substrates from various stacked and / or side-by-side substrate holding positions by the list Z drive 2660. For example, in one embodiment, the substrate holding stations 2100H1, 2100H2 are arranged along a common plane, such as for substantially simultaneously picking / placing substrates from side-by-side load locks 102A, 102B or side-by-side load locks 102C, 102D (or other substrate holding positions). In one embodiment, the substrate holding stations 2100H1, 2100H2 are arranged one above the other in a stacked plane (see Figures 27B, 27C above) for approximately simultaneous picking / placing of substrates from the stacked load locks 102A, 102C or the stacked load locks 102B, 102D (or other substrate holding locations), etc.

[0121] While the wrist Z drive 2660 is illustrated and described with respect to Figures 26A-26D and Figures 27A-27C, it should be understood that in other embodiments the wrist Z drive may be incorporated into any of the arm configurations described herein in which multiple substrate holders are utilized in a manner generally similar to that illustrated in Figures 26C, 26D, and 27C so that substrates may be transferred to side-by-side substrate station modules 150 in a common plane or to stacked substrate station modules 150 in a stacked plane as described herein (see Figure 1C).

[0122] In one embodiment, as described above with respect to Figures 23 and 25, independent rotation of the substrate holders 2100A, 2100B, 2300 may also provide substrate holder conformance of the substrate transport apparatus 130 to the shape (e.g., inner wall 125W) of the transfer chamber 125A in a manner similar to that described above with respect to Figure 23A. However, in this embodiment, one or more of the substrate holders 2100A, 2100B may be rotated by the drive section 220C to maintain clearance between the respective substrate holders 2100A, 2100B and the wall 125W of the transfer chamber 125A. For example, referring also to Figures 23, 23A, and 25, the substrate transport apparatus 130 may be positioned as shown in Figure 23A such that the substrate holding station of the substrate holder 1900 (or substrate holder 2100A, 2100B) is aligned for picking / placing a substrate from a respective one of the substrate processing stations 2333A, 2333B. The transport arm 131 is extended (Figure 29, block 2900). In one embodiment (using independently rotatable substrate holders 2100A, 2100B, etc.), independent automatic wafer centering is provided in a manner similar to that described herein such that the substrate holding station of the substrate holder 2100A, 2100B is centered under the substrate to be picked or the substrate to be placed is centered at the substrate processing station 2333A, 2333B (Figure 29, block 2910). Substrates are picked or placed simultaneously by the substrate holder 1900 (or substrate holder 2100A, 2100B) from or to the substrate processing stations 2333A, 2333B (FIG. 29, block 2920). The substrate transport arm 131 is retracted and the substrate transport arm 131 and / or the substrate holder 1900 (or 2100A, 2100B) and the substrate holder 2300 are rotated to align the (single) substrate holder 2300 with, for example, the substrate processing station 2333B (FIG. 29, block 2930). The transport arm 131 is extended (FIG. 29, block 2940) and automatic wafer centering may be provided for picking or placing the substrate at the substrate holder 2300 (FIG. 29, block 2950).As can be seen in FIG. 23A, to extend the single substrate holder 2300 to the substrate processing station 2333B, the substrate holder 1900 (or one or more of the substrate holders 2100A, 2100B) (e.g., side-by-side substrate holding stations) is rotated to provide clearance between the substrate holder 1900 (or one or more of the substrate holders 2100A, 2100B) and the inner wall 125W of the transfer chamber 125, resulting in extension of the substrate holder 2300 to the substrate holding station 2333B (FIG. 29, block 2960). With the substrate holder 1900 (or one or more of the substrate holders 2100A, 2100B) rotated to provide said clearance, a substrate is picked or placed from and to the substrate processing station 2333B using the single substrate holder 2300 (FIG. 29, block 2970).

[0123] 28, the substrate transport apparatus 130 is generally similar to that described above with respect to FIG 21, but in this embodiment the substrate transport apparatus 130 includes two opposing single sided substrate holders 2100C and 2100D rotatably coupled to the arm 131 about the wrist axis WX in opposed relationship to the substrate holders 2100A, 2100B. The substrate holders 2100C, 2100D are generally similar to the substrate holders 2100A, 2100B and include respective substrate holding stations 2100H3, 2100H4. Here, arm 131 and substrate holders 2100A, 2100B, 2100C, 2100D are driven in rotation and / or extension (along non-radial linear paths and / or radial linear paths) by, for example, six-axis drive section 220B (FIG. 3B), where one drive shaft rotates upper arm 201 about shoulder axis SX, one drive shaft rotates forearm 202 about elbow axis EX, one drive shaft rotates substrate holder 2100A about wrist axis WX, one drive shaft rotates substrate holder 2100B about wrist axis WX, one drive shaft rotates substrate holder 2100C about wrist axis WX, and one drive shaft rotates substrate holder 2100D about wrist axis WX. Each of upper arm 201, forearm 202, and substrate holders 2100A, 2100B, 2100C, 2100D may be coupled to six-axis drive section 220B (FIG. 3B) by any suitable transmission, such as a cable and pulley transmission generally similar to that described above with respect to FIG 4. In this embodiment, substrate holder 2100A includes substrate holding station 2100H1, substrate holder 2100B includes substrate holding station 2100H2, substrate holder 2100C includes substrate holder 2100H3, and substrate holder 2100D includes substrate holder 2100H4. In a manner similar to that described above, substrate holding stations 2100H1, 2100H2, 2100H3, 2100H4 are arranged on a common plane (generally similar to plane 499 as described above with respect to Figures 2D, 10, and 11), while in other embodiments, one or more of the substrate holding stations may be movable in the Z direction by a list Z drive in a manner similar to that described above.

[0124] The substrate holders 2100A, 2100B, 2100C, 2100D may be extended along non-radial linear paths and / or radial linear paths by the transport arm 131 and drive section 220B in a manner generally similar to that described herein for generally simultaneously picking and / or placing substrates into substrate station modules aligned along a common plane 499. It is noted that independent rotation of substrate holders 2100A, 2100B and / or substrate holders 2100C, 2100D about wrist axis WX provides automatic wafer centering by varying base pitch BP (e.g., the distance between side-by-side substrate holding stations 2100H1, 2100H2, or 2100H3, 2100H4 may be increased or decreased in a manner similar to that illustrated in FIGS. 2B and 2C) to accommodate variations in pitch D and / or provide automatic wafer centering for placing wafers at substrate processing stations 190-197 (see FIG. 1A). In one embodiment, arm 131 and / or end effectors 2403, 2404 may also be rotationally driven to rapidly swap substrates in a manner similar to that described above with respect to FIGS. 7A-7L (substantially similar to that described herein).

[0125] With reference to Figures 19, 20, 22, and 23, in one aspect, a plurality of juxtaposed (e.g., side-by-side) substrate holding stations are slaved to a common end effector link (e.g., a substrate holder) that is a substantially rigid, non-articulating link between the plurality of juxtaposed substrate holding stations.

[0126] 2A-2D, 8-9, 20, 21, 23, 24, 25, 26A-26D, 27A-27C, and 28, at least one end effector link (e.g., substrate holder) comprises a plurality of end effector links (e.g., substrate holders) joined to a distal end 202E2 of the forearm 202 for rotation relative to the forearm 202 about a common axis of rotation (e.g., wrist axis WX), each of the plurality of end effector links (e.g., substrate holders) having at least one corresponding substrate holding station dependent thereon of a plurality of juxtaposed (side-by-side) substrate holding stations.

[0127] 2A-2D, 8, 9, 21, 24, 25, 26A-26D, 27A-27C, and 28, at least one end effector link (e.g., a substrate holder) comprises a plurality of end effector links joined to a distal end 202E2 of the forearm 202 for rotation relative to the forearm 202 about a common axis of rotation (e.g., wrist axis WX), where the drive sections 220, 220A, 220B, 220C are configured such that each of the plurality of end effector links respectively rotates independently of another of the plurality of end effector links about the common axis of rotation, and where each respective one of the plurality of end effector links has at least one corresponding substrate holding station of a plurality of juxtaposed (side-by-side) substrate holding stations dependent thereon.

[0128] 23, 23A, 25, and 27A-27C, in one embodiment, the multi-link arm 131 has at least one substrate holder (e.g., end effector link) 1900, 2100A, 2100B, 2300 that is rotatably joined to a joint (e.g., wrist joint / axis WX) at the end of the forearm 202 so as to rotate relative to the forearm 202 about a common axis of rotation at the wrist joint / axis WX. At least one substrate holder 1900, 2100A, 2100B, 2300 has a plurality of substrate holding stations 1900H1, 1900H2, 2100H1, 2100H2, 2300H1 dependent thereon and arranged in a common plane (e.g., plane 499 (see, e.g., FIGS. 2D and 4) relative to one another, configured such that rotation of the at least one substrate holder 1900, 2100A, 2100B, 2300 about a wrist axis of rotation WX causes each of the plurality of substrate holding stations 1900H1, 1900H2, 2100H1, 2100H2, 2300H1 to rotate about the wrist axis WX. Here, the drive sections 220, 220C at least extend and retract the multi-link arm 131 along a radial or non-radial linear path relative to a shoulder axis SX (fixed position). The arm 131 is configured such that at least two juxtaposed substrate holding stations 1900H1, 1900H2, or 2100H1, 2100H2 of the plurality of substrate holding stations, each of which traverses linearly along a radial or non-radial path, pass through separate corresponding openings (e.g., see Figures 1B and 1C) of the plurality of juxtaposed substrate transport openings at a common level substantially simultaneously by extension and contraction of the arm 131, so that another substrate holding station of the plurality of substrate holding stations 2300H1, which is different from each of the two juxtaposed substrate holding stations 1900H1, 1900H2, or 2100H1, 2100H2, is rotatable about the wrist axis WX independently of the at least two juxtaposed substrate holding stations 1900H1, 1900H2, or 2100H1, 2100H2.

[0129] 23, 23A, 25, and 27A-27C, the at least two juxtaposed substrate holding stations 1900H1, 1900H2, or 2100H1, 2100H2, and at least one other substrate holding station 2300H1 are arranged on the at least one substrate holder 1900, 2100A, 2100B, 2300 such that they are located on opposite sides of a wrist axis WX. In one embodiment, as can be seen in FIG. 23A, the at least two juxtaposed substrate holding stations 1900H1, 1900H2, or 2100H1, 2100H2, and at least one other substrate holding station 2300H1 are rotated about the wrist axis WX by extension and retraction of the arm 131 along a radial or non-radial path to adjust the position of the at least one substrate holder to a position where the opening of the transport chamber is located, and at least one other substrate holding station 2300H1 is located. At least one of the multiple substrate holding stations 1900H1, 1900H2, 2100H1, 2100H2, 2300H1 of at least one substrate holder 1900, 2100A, 2100B, 2300 is positioned on at least one substrate holder 1900, 2100A, 2100B, 2300 so as to selectively adapt to another side wall 125W of the transport chamber 125 that is different from the side wall 125W through which the arm passes by extension and contraction.

[0130] Referring to FIG. 23, at least two juxtaposed substrate holding stations 1900H1, 1900H2 are disposed on at least one substrate holder 1900 operably connected to the drive section 220 and arranged such that the at least two juxtaposed substrate holding stations 1900H1, 1900H2 are rotated by the at least one substrate holder 1900 around a wrist axis of rotation WX with a common and independent degree of freedom.

[0131] 25 and 27A-27C, the at least two juxtaposed substrate holding stations 2100H1, 2100H2 are disposed on at least one substrate holder 2100A, 2100B operably connected to the drive section 220C and are arranged such that each of the at least two juxtaposed substrate holding stations 2100H1, 2100H2 rotates about a wrist axis of rotation WX with different respective independent degrees of freedom by the at least one substrate holder 2100A, 2100B, thereby causing each of the at least two juxtaposed substrate holding stations 2100H1, 2100H2 to rotate independently relative to each other about the wrist axis of rotation WX.

[0132] 26A-26D and 27A-27C, in one embodiment, the multi-link arm 131 has at least one substrate holder 2403, 2404, or 2100A, 2100B rotatably joined to a joint (e.g., wrist axis WX) at an end of the forearm 202 for rotation relative to the forearm 202 about a common axis of rotation at the wrist axis WX, and at least one substrate holder 2403, 2404, or 2100A, 2100B is dependent therefrom and has a common axis of rotation therebetween. The substrate holding apparatus has a plurality of substrate holding stations 3403H1, 3403H2, 3404H1, 2404H2, 2100H1, 2100H2 juxtaposed along different planes 499, 499A (FIGS. 26D, 27C) that are offset in height relative to one another, and is configured to rotate each of the plurality of substrate holding stations 3403H1, 3403H2, 3404H1, 2404H2, 2100H1, 2100H2 about the wrist axis of rotation WX by rotation of at least one substrate holder 2403, 2404 or 2100A, 2100B about the wrist axis of rotation WX.The drive sections 220, 220C are configured to at least extend and retract the multi-link arm 131 along a radial or non-radial linear path relative to the shoulder axis SX (e.g., a fixed position) such that at least two juxtaposed substrate holding stations 2403H1, 2404H1, or 2403H2, 2404H2, or 2100H1, 2100H2 of the plurality of substrate holding stations 3403H1, 3403H2, 3404H1, 2404H2, 2100H1, 2100H2, each of which traverses linearly along a radial or non-radial path, move the respective (or in one aspect, a common) opening of the plurality of juxtaposed substrate transport openings at a common plane (or level) 499 due to the extension and retraction of the arms. At least another substrate holding station of the plurality of substrate holding stations 2403H1, 2404H1, or 2403H2, 2404H2, or 2300H1, each of which is rotatable about a wrist axis of rotation WX independently of the other so as to pass through the respective sections (see, for example, Figures 1B and 1C), and which is different from each of the two juxtaposed substrate holding stations 2403H1, 2404H1, or 2403H2, 2404H2, or 2100H1, 2100H2, is disposed on at least one substrate holder 2403, 2404, 2300 substantially opposite each of the at least two juxtaposed substrate holding stations 2403H1, 2404H1, or 2403H2, 2404H2, or 2100H1, 2100H2. Here, the drive section 220, 220C includes a wrist Z drive 2660 configured to move multiple substrate holding stations of at least one end effector link in height relative to each other so as to position the multiple substrate holding stations at a common level juxtaposed to each other.

[0133] As mentioned above, the substrate transport apparatus 130 (including any suitable end effector(s) such as those described herein) may be attached to a boom arm. For illustrative purposes, FIG. 15 illustrates an arm 131 attached to a two-link boom arm 1500. The two-link boom arm 1500 includes an upper link 1501 and a forearm link 1502. A first end of the upper link 1501 is rotatably coupled to a drive section (such as the drive section 220 described herein) about a boom shoulder axis BSX. A first end of the forearm link 1502 is rotatably coupled to a second end of the upper link 1501 about a boom elbow axis BEX. The arm 131 is rotatably coupled to a second end of the forearm link 1502 about an arm shoulder axis SX. Each of the upper link 1501 and the forearm link 1502 is substantially rigid and non-articulating between their respective ends. In another embodiment, FIG. 16 illustrates an arm 131 attached to a single link boom arm 1600. The single link boom arm 1600 includes a boom link 1601. A first end of the boom link 1601 is rotatably coupled to a drive section (such as the drive section 220 described herein) about a boom shoulder axis BSX. The arm 131 is rotatably coupled to a second end of the boom link 1601 about an arm shoulder axis SX. The boom link 1601 is substantially rigid and non-articulated between the two ends of the boom link 1601. Although a single link boom arm 1600 and a two link boom arm 1500 are illustrated, it should be understood that a boom arm may have any suitable number of links.

[0134] 3, to rotate the boom arms 1500, 1600, the drive sections 220, 220A, 220B, 220C may include at least one boom arm drive shaft (or motor) 390, 391. For example, a single boom arm drive shaft 390 may be provided, for example, when a single link boom arm 1600 is utilized. A single boom arm drive shaft 390 may also be provided when the rotation of the forearm link 1502 of the two link boom arm 1500 about the boom elbow axis BEX is slaved to, for example, the housing 310. In other aspects, two boom arm drive shafts 390, 391 may be provided when the upper link 1501 and the forearm link 1502 of the two link boom arm 1500 are independently rotated about their respective boom shoulder axis BSX and boom elbow axis BEX. The boom arm drive shafts 390, 391 may be disposed coaxially with the motors 342, 344, 346, 348, although in other embodiments the boom arm drive shafts 390, 391 may have any suitable configuration such as a side-by-side motor configuration, and in still other embodiments the boom arm drive shafts 390, 391 may be disposed at the boom arm shoulder axis BEX while the drive motors 342, 344, 346, 348 are disposed at the shoulder axis SX of the arm 131. Any suitable transmission (e.g., generally similar to the cable and pulley transmission shown in FIGS. 4-6B in one embodiment) is provided to couple the link(s) of the boom arms 1500, 1600 to the drive shafts 390, 391.

[0135] 18A and 18B, automatic wafer centering provided by embodiments of the present disclosure may provide for near-simultaneous placement (or picking) of dual substrates S, regardless of the relative eccentricity between each of the dual substrates S and the respective substrate holding stations 203H1, 203H2, 204H1, 204H2. For example, with substrate holding stations 203H1, 204H1 at base pitch BP, automatic wafer centering may determine that eccentricity EC2 of substrate S1 is closer to shoulder axis SX than center 203H1C of substrate holding station 203H1, and eccentricity EC1 of substrate S2 is, for example, to the right (note that the directional term "right" is used herein merely for convenience of explanation) of center 204H1C of substrate holding station 204H1. Thus, to position substrates S1, S2 at, for example, substrate processing stations 190, 191, the position of each substrate S1, S2 is independently adjusted, via automatic wafer centering, not only with respect to the distance D between the substrate processing stations 190, 191, but also independently adjusted in the direction of extension / retraction 17700 to accommodate both eccentricities EC1, EC2. For example, substrate holders 203, 204 are each independently rotated about a wrist axis WX (where the wrist axis is positioned along the axis of radial extension 700 (see FIG. 7B) or non-radial path of extension 701 (see FIG. 7F)) to provide independent automatic wafer centering of substrates S1, S2 at their respective substrate processing stations 190, 191. Similarly, referring to FIG. 18C , automatic wafer centering can also result in positioning of substrates at substrate processing stations 190, 191 having, for example, different radial distances 17020, 17021 from the shoulder axis SX of the substrate transport apparatus 130, where independent rotation of each substrate holding station 203H1, 203H2, 204H1, 204H2 about the wrist axis and / or positioning of the wrist axis results in an increased extension distance (relative to the shoulder axis) of one substrate holding station of the array of substrate holding stations 203H1-204H1, 203H2, 204H2 relative to another substrate holding station of the array of substrate holding stations 203H1-204H1, 203H2, 204H2.

[0136] With reference to Figures 2A-2D, 7A-7L, and 15, an exemplary method of transporting a substrate using the substrate transport apparatus 130 is described. In the described example, the substrate processing apparatus 100 includes a transfer chamber 125A having six sides but otherwise generally similar to that described above with respect to Figure 1, although in other embodiments the transfer chamber may have any suitable number of sides, where side-by-side substrate station modules are coupled to each side of the transfer chamber in a manner similar to that illustrated in Figures 1A, 7A, 8, 12, 15, and 16. Additionally, in the described example, the arm 131 includes dual substrate holders 203, 204, each of which has substrate holding stations 203H1, 203H2, 204H1, 204H2 at opposite ends of the respective substrate holders 203, 204, although it should be understood that the methods described herein are equally applicable to the arm 131 and the embodiments of the present disclosure illustrated in and described with respect to Figures 8-16.

[0137] As described below, the controller 110 is operably coupled to the drive section 220 and configured to extend the arm 131 to simultaneously pick or place a first dual substrate (e.g., see substrates S1, S2) and at least one corresponding substrate holding station (e.g., substrate holding station 203H1, 204H1, or 203H2, 204H2) of the dual substrate holders 203, 204 through their respective separate openings (see slot valves SV) in the transport chamber wall 125W. As will also be described below, the controller 110 is configured to substantially simultaneously rapidly swap a first dual substrate and at least one second substrate (see, e.g., substrates S3, S4) held on at least one corresponding substrate holding station (e.g., substrate holding station 203H1, 204H1, or 203H2, 204H2) of the dual substrate holders 203, 204 through respective separate openings in the transfer chamber wall 125W, with the first dual substrate S1, S2 being simultaneously held on at least one corresponding substrate holding station (e.g., substrate holding station 203H1, 204H1, or 203H2, 204H2) of the dual substrate holders 203, 204. In some embodiments, the drive section is configured to align at least one of the corresponding substrate holding stations 203H1, 203H2, 204H1, 204H2 independently of another of the substrate holder(s), under the control of the controller 110.

[0138] According to aspects of the disclosure, a dual link SCARA with at least one end effector (and / or other arm configurations as described herein) satisfies a rotation Q (FIG. 17, block 1700) of the SCARA arm of greater than or about 360° about a shoulder axis SX (see, e.g., FIGS. 1A and 7A) by extension and retraction (FIG. 17, block 1710) of the arm 131 and end effectors 203, 204 thereon throughout the interior space of the transfer chamber (i.e., at / from any angle Q position / orientation of the dual SCARA arm). A dual link SCARA with at least one end effector (and / or other arm configurations as described herein) as described herein provides independent automatic wafer centering at each end effector in common with extension of the arm 131 and end effectors 203, 204 as described herein (FIG. 17, block 1720). As also described herein, a dual link SCARA with at least one end effector (as described herein with substrate holding stations 203H1, 203H2, 204H1, 204H2 of end effectors 203, 204) can, in one embodiment, rotate on a common plane 499 (see, e.g., FIGS. 2D and 11) and in other embodiments, rotate on different planes 499, 499A (see, e.g., FIG. 10). 7, block 1730), where the end effectors 203, 204 have side-by-side substrate holding stations and at least one of the end effectors 203, 204 is a dual sided end effector (e.g., having at least one substrate holding station disposed at opposite longitudinally spaced ends of the end effector).

[0139] In an exemplary method, a substrate transport apparatus 130 as described herein is provided (FIG. 14, block 1401). A controller 110 may also be provided (FIG. 14, block 1420) and connected to the substrate transport apparatus 130. The controller is configured to extend at least one arm 131 of the substrate transport apparatus 130 such that the substrate holders 203, 204 (and in the case of FIG. 13, the substrate holder 205) extend through the sidewall 125W of the transport chamber 125, 125A. For example, FIG. 7A illustrates the arm 131 of the substrate transport apparatus 130 in a home or retracted configuration relative to a shoulder axis SX. In this example, the retracted configuration is a configuration in which the arm links 201, 202 are disposed above and below each other and are substantially aligned with each other, but in other aspects, the retracted configuration is a configuration in which the wrist axis WX is disposed substantially above the shoulder axis SX, such as when the upper link 201 and the forearm link 202 are approximately the same length between joint centers. The controller 110 is configured to effect motion of the drive section 220 to effect independent automatic wafer centering of each substrate, where the base pitch BP of the substrate holding stations 203H2, 204H2 is increased (FIG. 2B) or decreased (FIG. 2C) such that the distance between the substrate holding stations 203H2, 204H2 approximately matches the pitch between the substrate processing stations 196, 197 to effect automatic wafer centering (in this case centering of the substrates S3, S4 on the respective substrate holding stations 203H2, 204H2). As discussed above, automatic wafer centering can be effected along multiple axes (e.g., along an axis corresponding to the spacing between the substrate processing stations and along an axis corresponding to the extension direction of the substrate holder). The controller 110 is further configured to effect movement of the drive section 220 such that the wrist axis WX moves in a radial direction 700, in one embodiment, and the substrate holding stations 203H2, 204H2 extend through openings in the wall 125W of the transport chamber 125A and into the load locks 102A, 102B (see Figures 7B and 7C).

[0140] In one embodiment, the controller 110 may effect actuation of the Z-axis drive 312 to raise the substrate holding stations 203H2, 204H2 for substantially simultaneous picking of the dual substrates S3, S4 from the substrate processing stations 196, 197 of the load locks 102A, 102B (in other embodiments, the Z motion may be provided at least in part by the substrate processing stations 196, 197). With the substrates S3, S4 held on the substrate holding stations 203H2, 204H2, the controller 110 may effect movement of the drive section 220 to retract the arm 131, for example, to a retracted configuration, thereby removing the substrates S3, S4 from the load locks 102A, 102B (see FIG. 7D). The arm 131 is rotated in direction 777 to position the substrate holding stations 203H1, 204H1 adjacent to any suitable substrate processing station (such as processing stations 188, 189) from which another set of dual substrates S1, S2 is picked.

[0141] In a manner similar to that described above, the controller 110 is configured to effect movement of the drive section 220 to extend the arm 131 (FIG. 14, block 1410), thereby increasing (FIG. 2B) or decreasing (FIG. 2C) the base pitch BP of the substrate holding stations 203H1, 204H1 to effect automatic wafer centering (in this case centering of the substrates S1, S2 on the respective substrate holding stations 203H1, 204H1) (FIG. 14, block 1430), such that the distance between the substrate holding stations 203H1, 204H1 approximately matches the pitch between the substrate processing stations 188, 189 (see FIG. 7E). It is noted that the automatic wafer centering (e.g., increasing or decreasing the base pitch BP) may be performed approximately simultaneously with the extension / retraction of the arm 131, or with the arm 131 in a substantially retracted configuration prior to the extension of the arm 131. To pick / place a substrate from the substrate processing stations 188, 189, the controller 110 is configured to effect motion of the drive section 220 such that the wrist axis WX moves in a non-radial extension, where the motion of the wrist WX moves along a path 701 (FIG. 7F) that, in one embodiment, is offset and / or angled from the axis of radial extension / contraction (i.e., the path 701 does not pass through and extend radially from the shoulder axis SX). Movement of the wrist WX along the path 701 extends the substrate holding stations 203H1, 204H1 through openings in the wall 125W of the transport chamber 125A to the substrate processing stations 188, 189.

[0142] In one embodiment, the controller 110 may effect actuation of the Z-axis drive 312 to raise the substrate holding stations 203H1, 204H1 for substantially simultaneous picking (FIG. 14, block 1440) of the dual substrates S1, S2 from the substrate processing stations 188, 189 of the side-by-side substrate station modules 150 (in other embodiments, the Z motion may be provided at least in part by the substrate processing stations 188, 189). With the substrates S1, S2 held on the substrate holding stations 203H1, 204H1, the controller 110 may effect movement of the drive section 220 to retract the arm 131, for example, to a retracted configuration, thereby removing the substrates S1, S2 from the side-by-side substrate station modules 150 (see FIG. 7G). The base pitch BP of the substrate holding stations 203H1, 204H1 may be restored during (substantially simultaneously) retraction of the arms 131 from the substrate processing stations 188, 189 or with the arms substantially in the retracted configuration (see FIG. 7G).

[0143] In one embodiment, rapid swapping of substrates S1, S2 and S3, S4 is effected in the manner described above ( FIG. 14 , block 1450), where each plane 499, 499A (see FIGS. 2D, 10, and 11 ) of the substrate holder face (as described herein and whether the substrate holding station(s) 203H1, 203H2, 204H1, 204H2 of the dual sided substrate holder form one or more planes) corresponds to and is aligned with at least one plane of a transport opening in the common transport chamber (see FIGS. 1B and 1C ) for transfer at a given Z position of the transport opening face, whereby transfer of a substrate through each respective opening on each plane is effected with substantially no Z axis motion of at least one of the planes of each dual end substrate holder 203, 204. The extension provided by the substrate holding stations 203H1, 203H2, 204H1, 204H2, i.e., extension to a substrate processing station (for each plane) using the substrate holding station(s) 203H1, 203H2, 204H1, 204H2 at one end of the substrate holder 203, 204, picking and / or placing of a substrate(s) at the substrate processing station, retraction from the substrate processing station, and extension to a different substrate processing station with the same or different dual substrates at the same or different ends of the dual end substrate holder 203, 204, provides high speed swapping of substrates substantially independent of Z axis motion (independent of any intervening Z axis motion or decoupled from any intervening Z axis motion between transfers of substrates). For example, arm 131 is rotated in direction 777 (see Figures 7G-7I) to position substrate holding stations 203H2, 204H2 (with substrates S1-S4 held by arm 131) adjacent to processing stations 188, 189, substrates S1, S2 are removed from processing stations 188, 189, and dual substrates S3, S4 are placed in processing stations 188, 189.The controller 110 effects movement of the drive section 220 to extend the arm 131 (FIG. 14, block 1410), which increases (FIG. 2B) or decreases (FIG. 2C) the base pitch BP of the substrate holding stations 203H2, 204H2 to effect automatic wafer centering (in this case centering of the substrates S3, S4 at the respective substrate processing stations 188, 189) (FIG. 14, block 1430), such that the distance between the substrate holding stations 203H2, 204H2 approximately matches the pitch between the substrate processing stations 188, 189 (see FIG. 7I). It is noted that the automatic wafer centering (e.g., increasing or decreasing the base pitch BP) can be performed approximately simultaneously with the extension / retraction of the arm 131, or with the arm 131 in a substantially retracted configuration prior to the extension of the arm 131. To position substrates S3, S4 at substrate processing stations 188, 189, controller 110 is configured to effect movement of drive section 220 such that wrist axis WX moves in a non-radial extension along path 701 (FIG. 7J). Movement of wrist WX along path 701 extends substrate holding stations 203H2, 204H2 through openings in wall 125W of transport chamber 125A and into substrate processing stations 188, 189.

[0144] In one embodiment, the controller 110 may effect actuation of the Z-axis drive 312 to lower the substrate holding stations 203H2, 204H2 for substantially simultaneous placement (FIG. 14, block 1440) of the dual substrates S3, S4 at the substrate processing stations 188, 189 of the side-by-side substrate station modules 150 (in other embodiments, the Z motion may be provided at least in part by the substrate processing stations 188, 189). The controller 110 may effect motion of the drive section 220 to retract the arm 131, for example, to a retracted configuration, thereby removing the substrate holding stations 203H2, 204H2 from the side-by-side substrate station modules 150. The base pitch BP of the substrate holding stations 203H1, 204H1 may be restored during (substantially simultaneously) retraction of the arm 131 from the substrate processing stations 188, 189 or with the arm substantially in the retracted configuration. Although rapid swapping of substrates S1, S2 with substrates S3, S4 is described, it should be understood that in other embodiments substrates S3, S4 may be placed in another location different from the location where substrates S1, S2 were picked.

[0145] The controller 110 effects operation of the drive section 220 such that the arm 131 may be extended into the load locks 102A, 102B in the manner described above to place the dual substrates S1, S2 at the substrate processing stations 196, 197 (see FIG. 7K) in a manner generally similar to that described above with respect to the placement of substrates S3, S4 at the substrate processing stations 188, 189. The arm 131 is retracted from the load locks 102A, 102B, for example to a retracted configuration (see FIG. 7L), for further picking / placing of a substrate.

[0146] 4, 5A-5F, and 30, in accordance with an embodiment of the present disclosure, a method includes providing a substrate transport apparatus such as that described above (FIG. 30, block 3000). The movable arm links 201, 202 of the substrate transport apparatus are reconfigured (FIG. 30, block 3010), where the movable arm links 201, 202 are modular composite arm link casings 201C, 202C formed of link case modules rigidly coupled to one another, and reconfigurable arm links 201R, 202R having pulley systems 255A-255E housed within and extending through the rigidly coupled link case modules substantially end-to-end of the modular composite arm link casings 201C, 202C. As described above, the rigidly connected link case module includes a link case end module (e.g., end connections 511, 512, 513, 514) connected by at least one interchangeable link case extension module (e.g., central arm section 510A, 510B) having predetermined characteristics that determine the lengths OAL, OALn of the movable arm links 201, 202. When reconfiguring the movable arm links 201, 202, at least one interchangeable link case extension module 510A, 510B is selectable for connection to the link case end modules 511, 512, 513, 514 and formation of the reconfigurable arm links 201R, 202R from a plurality of different interchangeable link case extension modules (e.g., central arm sections) 510A, 510A1-510An, 510B, 510B1-510Bn, each having a different corresponding predetermined characteristic that determines a corresponding different length OAL, OALn of the movable arm links 201, 202, so as to selectably set the modular composite arm link casing 201C, 202C and the reconfigurable arm links 201R, 202R to a predetermined arm link length OAL, OALn from a plurality of predetermined arm link lengths OAL, OALn.

[0147] 4, 5A-5F, and 31, in accordance with an embodiment of the disclosure, a method includes providing a substrate transport apparatus such as that described above (FIG. 31, block 3100). Articulation of at least one movable arm link or an end effector relative to at least one movable arm link (such as articulation described above for transporting sub-substrates to different substrate holding positions) is provided by pulley systems 655A-655E attached to and engaged with modular composite arm link casings 201C, 202C of at least one movable arm link 201, 202 (FIG. 31, block 3110), where the modular composite arm link casings 201C, 202C are formed of link case modules (as described above) rigidly coupled to one another, and where the pulley systems 655A-655E are contained within and extend through substantially the entire length of the modular composite arm link casings 201C, 202C. The rigidly connected case link modules include link case end modules (e.g., end connections) 511, 512, 513, 514 connected by at least one link case extension module (e.g., central arm section) that is mechanically secured to and formed with each of the link case end modules 511, 512, 513, 514 to form a modular composite arm link casing 201C, 202C. The modular composite arm link casings 201C, 202C are positioned to conform to the misalignment tolerances of pulley transmissions (such as transmissions 490, 492, 493, 494, 495) that connect pulley wheels 480, 484, 488, 482, 486, 491, 470, 474, 472, 476 of pulley systems 655A-655E housed in link case end modules 511, 512, 513, 514 to the ends of the modular composite arm link casings 201C, 202C.

[0148] 33A-36B, another exemplary substrate transport apparatus 130 is illustrated in which the above-described aspects of the present disclosure may be utilized. In FIG. 33A-36B, the arm link(s) and end effector(s) may be rotated independently, or in some aspects, the rotation of one or more of the arm link(s) and end effector(s) may be slaved to another arm link. It is noted that the arm links and end effectors may be rotationally driven, for example, by a motor / drive and pulley system substantially similar to those described above. For example, FIG. 33A and 33B illustrate a substrate transport arm 131 having an upper arm 201, a forearm 202, and a single-ended substrate holder. FIG. 34A and 34B illustrate a transport arm 131 having an upper arm 201, a forearm 202, and a single dual-ended end effector. 35A and 35B illustrate a transport arm 131 having a single arm link (e.g., upper arm 201) and two independently rotatable single-ended end effectors. FIGs. 36A and 36B illustrate a transport arm 131 having an upper arm 201, a forearm 202, and two independently rotatable single-ended end effectors. While examples of transport arms are provided herein, in other aspects, transport arms utilizing aspects of the disclosure described herein may have any suitable configuration (e.g., any suitable number of arm links, any suitable number of end effectors, where each end effector may hold a single substrate or multiple substrates, etc.).

[0149] In accordance with one or more aspects of the present disclosure, a substrate transport apparatus includes: A support frame; an articulated arm connected to the support frame and having at least one movable arm link and an end effector connected to the movable arm link and having a substrate holding station disposed thereon; the movable arm link is a reconfigurable arm link having a modular composite arm link casing formed of link case modules rigidly coupled to one another and a pulley system housed within and extending through the rigidly coupled link case modules substantially end-to-end of the modular composite arm link casing, the rigidly coupled link case modules including link case end modules connected by at least one interchangeable link case extension module having predetermined characteristics that determine a length of the movable arm link; At least one interchangeable link case extension module is selectable for connection to the link case end module and formation of the reconfigurable arm link from a plurality of different interchangeable link case extension modules, each having a different corresponding predetermined characteristic that determines a corresponding different length of the movable arm link, to selectably set the modular composite arm link casing and the reconfigurable arm link to a predetermined arm link length from a plurality of predetermined arm link lengths.

[0150] According to one or more aspects of the disclosure, the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that the replaceable link case extension module and each of the plurality of different replaceable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-section is sized and shaped corresponding to the different corresponding length to maintain a predetermined stiffness (from end to end) for each of the different replaceable link case extension modules.

[0151] According to one or more aspects of the disclosure, the at least one interchangeable link case extension module and each of the plurality of different interchangeable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that the interchangeable link case extension module and each of the plurality of different interchangeable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-section is sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness (from end to end) for each different selectable predetermined arm link length.

[0152] According to one or more aspects of the present disclosure, the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules is an extruded member having a box-shaped cross-section.

[0153] According to one or more embodiments of the present disclosure, the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules have a box-shaped cross-section made of a material different from the material of the link case end module(s).

[0154] According to one or more embodiments of the present disclosure, the material of the at least one link case extension module and each of the plurality of different interchangeable link case extension modules has a higher stiffness (spring constant) than the material of the link case end module.

[0155] According to one or more aspects of the present disclosure, a material of the at least one link case extension module and each of the plurality of different interchangeable link case extension modules has a stiffness that corresponds to a stiffness of a material of a pulley transmission of the pulley system.

[0156] According to one or more aspects of the present disclosure, a pulley system is engaged to the modular composite arm link casing and arranged such that the pulley system is powered by the drive section to effect articulation of at least one arm link or end effector.

[0157] According to one or more embodiments of the present disclosure, the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules have a box-shaped cross-section made of stainless steel.

[0158] In accordance with one or more aspects of the present disclosure, at least one interchangeable link case extension module is mechanically secured to each of the link case end modules to form a modular composite arm link casing, the formed modular composite arm link casing being positioned to conform to the misalignment tolerance of a pulley transmission connecting the pulley wheels of the pulley system for a selected given arm link length.

[0159] According to one or more aspects of the present disclosure, at least one interchangeable link case extension module is mechanically secured to each of the link case end modules with mechanical fastener joints (including removable mechanical fasteners) to form a modular composite arm link casing, the mechanical fastener joints being configured such that the formed modular composite arm link casing conforms to the misalignment tolerance of a pulley transmission connecting the pulley wheels of the pulley system for a selected given arm link length.

[0160] According to one or more aspects of the present disclosure, at least one of the link case end modules houses a pulley wheel of the pulley system.

[0161] In accordance with one or more aspects of the present disclosure, the modular composite arm link casing is a low profile casing having a compact, substantially symmetric cross section and a compact height for a selected given arm length commensurate with a symmetrically flexible pulley transmission connecting the pulley wheels of a pulley system.

[0162] According to one or more aspects of the present disclosure, the compact height is less than the housing height of a band pulley transmission for an equivalent number of pulley systems having an equivalent length.

[0163] According to one or more aspects of the present disclosure, the flexible pulley transmission connecting the pulley wheels is a cable or wire pulley transmission.

[0164] According to one or more aspects of the disclosure, at least one of the link case end modules houses a pulley wheel of the pulley system that is mounted with a cross roller bearing such that the position and alignment of the pulley wheel is dependent on and controlled by engagement with the cross roller bearing.

[0165] In accordance with one or more aspects of the present disclosure, the modular composite arm link casing is a low profile casing having a compact height for a selected, predetermined arm length that corresponds to the cross-roller bearing mounted pulley wheels of a pulley system housed in at least one of the link case end modules.

[0166] According to one or more aspects of the disclosure, engagement of the pulley transmission with respect to each pulley wheel of the pulley system is arranged to determine rotation of each pulley wheel of the pulley system through at least 360° rotation of the respective pulley wheel between a wrapped position and an unwrapped position of the pulley transmission on the respective pulley wheel.

[0167] According to one or more aspects of the present disclosure, engagement of the pulley transmission with respect to each pulley wheel of the pulley system is arranged to determine rotation of the end effector through at least 360° rotation of the end effector relative to at least one moveable arm link between a wrapped position and an unwrapped position of the pulley transmission on the respective pulley wheel.

[0168] In accordance with one or more aspects of the present disclosure, a substrate transport apparatus includes: A support frame; an articulated arm connected to the support frame and having at least one movable arm link and an end effector connected to the at least one movable arm link and having a substrate holding station disposed thereon; at least one movable arm link has a modular composite arm link casing formed of link case modules rigidly connected to one another, and a pulley system housed within and extending through the rigidly connected link case modules substantially end-to-end of the modular composite arm link casing, the pulley system being attached to and engaged with the modular composite arm link casing and powered by the drive section such that the pulley system provides articulation of the at least one movable arm link or an end effector relative to the at least one movable arm link; and The rigidly coupled case link modules include link case end modules connected by at least one link case extension module that is mechanically secured to each of the link case end modules to form a modular composite arm link casing, the formed modular composite arm link casing being positioned to accommodate misalignment tolerances of a pulley transmission connecting pulley wheels of a pulley system housed in the link case end modules at the ends of the modular composite arm link casing.

[0169] According to one or more aspects of the disclosure, the at least one movable arm link is a reconfigurable arm link, and the link case extension module is interchangeable from a plurality of different interchangeable link case extension modules, each having a different corresponding predetermined characteristic that determines the length of the at least one movable arm link.

[0170] According to one or more aspects of the disclosure, the link case extension module and each of the multiple different replaceable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that the link case extension module and each of the multiple different replaceable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-section is sized and shaped corresponding to the different corresponding length to maintain a predetermined stiffness (from end to end) for each different replaceable link case extension module.

[0171] According to one or more aspects of the disclosure, the link case extension module and each of the plurality of different interchangeable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that the link case extension module and each of the plurality of different interchangeable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-section is sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness (from end to end) for each different selectable predetermined arm link length.

[0172] According to one or more aspects of the present disclosure, the link case extension module and each of the plurality of different interchangeable link case extension modules are extruded members having a box-shaped cross-section.

[0173] According to one or more embodiments of the present disclosure, the link case extension module and each of the multiple different interchangeable link case extension modules have a box-shaped cross-section made of a material different from the material of the link case end module (one or both).

[0174] According to one or more embodiments of the present disclosure, the material of the link case extension module and each of the plurality of different interchangeable link case extension modules has a higher stiffness (spring constant) than the material of the link case end module.

[0175] According to one or more aspects of the present disclosure, the material of the link case extension module and each of the plurality of different interchangeable link case extension modules has a stiffness that corresponds to the stiffness of the material of the pulley transmission of the pulley system.

[0176] According to one or more aspects of the present disclosure, the link case extension module and each of the plurality of different interchangeable link case extension modules have a box-shaped cross-section made of stainless steel.

[0177] In accordance with one or more aspects of the present disclosure, the pulley transmission is a symmetrically flexible pulley transmission and the modular composite arm link casing is a low profile casing having a compact height for a selected predetermined arm length commensurate with the symmetrically flexible pulley transmission that connects the pulley wheels of the pulley system having a compact, substantially symmetric cross-section.

[0178] According to one or more aspects of the present disclosure, the compact height is less than the housing height of a band pulley transmission for an equivalent number of pulley systems having an equivalent length.

[0179] According to one or more aspects of the present disclosure, the flexible pulley transmission connecting the pulley wheels is a cable or wire pulley transmission.

[0180] In accordance with one or more aspects of the present disclosure, the modular composite arm link casing is a low profile casing having a compact height for a selected, predetermined arm length that corresponds to the cross-roller bearing mounted pulley wheels of a pulley system housed in at least one of the link case end modules.

[0181] According to one or more aspects of the disclosure, at least one of the pulley wheels of the pulley system is mounted with a cross roller bearing such that the position and alignment of at least one of the pulley wheels is dependent on and controlled by engagement with the cross roller bearing.

[0182] According to one or more aspects of the disclosure, engagement of the pulley transmission with respect to the pulley wheels of the pulley system is arranged to determine a rotation of at least one of the pulley wheels of the pulley system through at least 360° of rotation of at least one of the pulley wheels between a wrapped position and an unwrapped position of the pulley transmission on at least one of the pulley wheels.

[0183] According to one or more aspects of the present disclosure, engagement of the pulley transmission to the pulley wheels of the pulley system is arranged to determine rotation of the end effector through at least 360° rotation of the end effector relative to at least one moveable arm link between a wrapped position and an unwrapped position of the pulley transmission on at least one of the pulley wheels.

[0184] According to one or more aspects of the present disclosure, a method includes: Providing a substrate transport apparatus, the substrate transport apparatus comprising: A support frame; an articulated arm connected to the support frame and having at least one movable arm link and an end effector connected to the movable arm link and having a substrate holding station disposed thereon; reconfiguring a movable arm link, the movable arm link being a reconfigurable arm link having a modular composite arm link casing formed of link case modules rigidly coupled to one another and a pulley system housed within and extending through the rigidly coupled link case modules substantially end-to-end of the modular composite arm link casing, the rigidly coupled link case modules including link case end modules connected by at least one interchangeable link case extension module having predetermined characteristics that determine a length of the movable arm link; At least one interchangeable link case extension module is selectable for connection to the link case end module and formation of the reconfigurable arm link from a plurality of different interchangeable link case extension modules, each having a different corresponding predetermined characteristic that determines a corresponding different length of the movable arm link, to selectably set the modular composite arm link casing and the reconfigurable arm link to a predetermined arm link length from a plurality of predetermined arm link lengths.

[0185] According to one or more aspects of the disclosure, the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that the replaceable link case extension module and each of the plurality of different replaceable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-section is sized and shaped corresponding to the different corresponding length to maintain a predetermined stiffness (from end to end) for each of the different replaceable link case extension modules.

[0186] According to one or more aspects of the disclosure, the at least one interchangeable link case extension module and each of the plurality of different interchangeable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that the interchangeable link case extension module and each of the plurality of different interchangeable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-section is sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness (from end to end) for each different selectable predetermined arm link length.

[0187] According to one or more aspects of the present disclosure, the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules is an extruded member having a box-shaped cross-section.

[0188] According to one or more embodiments of the present disclosure, the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules have a box-shaped cross-section made of a material different from the material of the link case end module(s).

[0189] According to one or more embodiments of the present disclosure, the material of the at least one link case extension module and each of the plurality of different interchangeable link case extension modules has a higher stiffness (spring constant) than the material of the link case end module.

[0190] According to one or more aspects of the present disclosure, a material of the at least one link case extension module and each of the plurality of different interchangeable link case extension modules has a stiffness that corresponds to a stiffness of a material of a pulley transmission of the pulley system.

[0191] According to one or more aspects of the present disclosure, a pulley system is engaged to the modular composite arm link casing and arranged such that the pulley system is powered by the drive section to effect articulation of at least one arm link or end effector.

[0192] According to one or more embodiments of the present disclosure, the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules have a box-shaped cross-section made of stainless steel.

[0193] According to one or more aspects of the disclosure, the method further includes mechanically fastening at least one interchangeable link case extension module to each of the link case end modules to form a modular composite arm link casing, the formed modular composite arm link casing conforming to the misalignment tolerance of a pulley transmission connecting the pulley wheels of the pulley system for a selected predetermined arm link length.

[0194] According to one or more aspects of the present disclosure, the method further includes mechanically fastening at least one interchangeable link case extension module to each of the link case end modules with mechanical fastener joints (including removable mechanical fasteners) to form a modular composite arm link casing, the mechanical fastener joints configured such that the formed modular composite arm link casing conforms to a misalignment tolerance of a pulley transmission connecting pulley wheels of a pulley system for a selected predetermined arm link length.

[0195] According to one or more aspects of the present disclosure, at least one of the link case end modules houses a pulley wheel of the pulley system.

[0196] In accordance with one or more aspects of the present disclosure, the modular composite arm link casing is a low profile casing having a compact, substantially symmetric cross section and a compact height for a selected given arm length commensurate with a symmetrically flexible pulley transmission connecting the pulley wheels of a pulley system.

[0197] According to one or more aspects of the present disclosure, the compact height is less than the housing height of a band pulley transmission for an equivalent number of pulley systems having an equivalent length.

[0198] According to one or more aspects of the present disclosure, the flexible pulley transmission connecting the pulley wheels is a cable or wire pulley transmission.

[0199] According to one or more aspects of the disclosure, at least one of the link case end modules houses a pulley wheel of the pulley system that is mounted with a cross roller bearing such that the position and alignment of the pulley wheel is dependent on and controlled by engagement with the cross roller bearing.

[0200] In accordance with one or more aspects of the present disclosure, the modular composite arm link casing is a low profile casing having a compact height for a selected predetermined arm length corresponding to the cross roller bearing mounted pulley wheels of a pulley system housed in at least one of the link case end modules.

[0201] According to one or more aspects of the disclosure, engagement of the pulley transmission with respect to each pulley wheel of the pulley system is arranged to determine rotation of each pulley wheel of the pulley system through at least 360° rotation of the respective pulley wheel between a wrapped position and an unwrapped position of the pulley transmission on the respective pulley wheel.

[0202] According to one or more aspects of the present disclosure, engagement of the pulley transmission with respect to each pulley wheel of the pulley system is arranged to determine rotation of the end effector through at least 360° rotation of the end effector relative to at least one moveable arm link between a wrapped position and an unwrapped position of the pulley transmission on the respective pulley wheel.

[0203] According to one or more aspects of the present disclosure, a method includes: Providing a substrate transport apparatus, the substrate transport apparatus comprising: A support frame; an articulating arm connected to the support frame and having at least one movable arm link and an end effector connected to the at least one movable arm link and having a substrate holding station disposed thereon; providing articulation of the at least one movable arm link or an end effector relative to the at least one movable arm link using a pulley system attached to and engaged with a modular composite arm link casing of the at least one movable arm, the modular composite arm link casing being formed of link case modules rigidly connected to one another, the pulley system being contained within and extending through the rigidly connected link case modules substantially end-to-end of the modular composite arm link casing; The rigidly coupled case link modules include link case end modules connected by at least one link case extension module that is mechanically secured to each of the link case end modules to form a modular composite arm link casing, the formed modular composite arm link casing being positioned to accommodate misalignment tolerances of a pulley transmission connecting pulley wheels of a pulley system housed in the link case end modules at the ends of the modular composite arm link casing.

[0204] According to one or more aspects of the disclosure, the method further includes a step of reconfiguring the at least one movable arm link, wherein the link case extension module is interchangeable from a plurality of different interchangeable link case extension modules, each having a different corresponding predetermined characteristic that determines a length of the at least one movable arm link.

[0205] According to one or more aspects of the disclosure, the link case extension module and each of the multiple different replaceable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that the link case extension module and each of the multiple different replaceable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-section is sized and shaped corresponding to the different corresponding length to maintain a predetermined stiffness (from end to end) for each different replaceable link case extension module.

[0206] According to one or more aspects of the disclosure, the link case extension module and each of the plurality of different interchangeable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that the link case extension module and each of the plurality of different interchangeable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-section is sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness (from end to end) for each different selectable predetermined arm link length.

[0207] According to one or more aspects of the present disclosure, the link case extension module and each of the plurality of different interchangeable link case extension modules are extruded members having a box-shaped cross-section.

[0208] According to one or more embodiments of the present disclosure, the link case extension module and each of the multiple different interchangeable link case extension modules have a box-shaped cross-section made of a material different from the material of the link case end module (one or both).

[0209] According to one or more embodiments of the present disclosure, the material of the link case extension module and each of the plurality of different interchangeable link case extension modules has a higher stiffness (spring constant) than the material of the link case end module.

[0210] According to one or more aspects of the present disclosure, the material of the link case extension module and each of the plurality of different interchangeable link case extension modules has a stiffness that corresponds to the stiffness of the material of the pulley transmission of the pulley system.

[0211] According to one or more aspects of the present disclosure, the link case extension module and each of the plurality of different interchangeable link case extension modules have a box-shaped cross-section made of stainless steel.

[0212] In accordance with one or more aspects of the present disclosure, the pulley transmission is a symmetrically flexible pulley transmission and the modular composite arm link casing is a low profile casing having a compact height for a selected predetermined arm length commensurate with the symmetrically flexible pulley transmission that connects the pulley wheels of the pulley system having a compact, substantially symmetric cross-section.

[0213] According to one or more aspects of the present disclosure, the compact height is less than the housing height of a band pulley transmission for an equivalent number of pulley systems having an equivalent length.

[0214] According to one or more aspects of the present disclosure, the flexible pulley transmission connecting the pulley wheels is a cable or wire pulley transmission.

[0215] In accordance with one or more aspects of the present disclosure, the modular composite arm link casing is a low profile casing having a compact height for a selected predetermined arm length corresponding to the cross roller bearing mounted pulley wheels of a pulley system housed in at least one of the link case end modules.

[0216] According to one or more aspects of the disclosure, at least one of the pulley wheels of the pulley system is mounted with a cross roller bearing such that the position and alignment of at least one of the pulley wheels is dependent on and controlled by engagement with the cross roller bearing.

[0217] According to one or more aspects of the disclosure, engagement of the pulley transmission with respect to the pulley wheels of the pulley system is arranged to determine a rotation of at least one of the pulley wheels of the pulley system through at least 360° of rotation of at least one of the pulley wheels between a wrapped position and an unwrapped position of the pulley transmission on at least one of the pulley wheels.

[0218] According to one or more aspects of the present disclosure, engagement of the pulley transmission to the pulley wheels of the pulley system is arranged to determine rotation of the end effector through at least 360° rotation of the end effector relative to at least one moveable arm link between a wrapped position and an unwrapped position of the pulley transmission on at least one of the pulley wheels.

[0219] In accordance with one or more aspects of the present disclosure, a substrate transport apparatus includes: A frame, a drive section connected to the frame; at least one articulated multi-link arm having an upper arm and a forearm, the upper arm being rotatably joined at one end to the drive section, the forearm being rotatably joined to the upper arm at an opposing end of the upper arm, the upper arm being a substantially rigid non-articulated link between the one and opposing ends, one or more of the upper arm and forearm including end connections and a central arm section, the central arm section being selectable from a plurality of different central arm sections each having a different length to define a respective arm link length between joint centers; and at least one end effector link rotatably joined to the forearm.

[0220] According to one or more aspects of the present disclosure, the at least one end effector link includes dual end effector links separate and distinct from one another, each of which is rotatably and separately joined to a common end of the forearm for rotation relative to the forearm about a common axis of rotation, and each end effector link has at least one corresponding substrate holding station dependent thereon.

[0221] According to one or more aspects of the present disclosure, the corresponding at least one substrate holding station dependent on at least one end effector link of the dual end effector link includes one substrate holding station at opposing ends of the at least one end effector link, the at least one end effector link being substantially rigid and non-articulating between the opposing ends, and the substrate holding station at one of the opposing ends being substantially coplanar with the corresponding at least one substrate holding station of the end effector link that is separate and distinct from one another.

[0222] According to one or more aspects of the present disclosure, the dual end effector links are arranged such that radial extension and contraction of the multi-link arm results in substantially simultaneous extension and contraction of at least one corresponding substrate holding station of each end effector link through respective separate openings in the transport chamber wall that are juxtaposed to one another at a substantially common level.

[0223] According to one or more aspects of the present disclosure, the substrate holding stations at opposite ends of at least one end effector link are generally coplanar with one another.

[0224] According to one or more aspects of the present disclosure, the substrate holding stations at opposing ends of at least one end effector link are generally coplanar with at least one corresponding substrate holding station of a separate and distinct end effector link.

[0225] According to one or more aspects of the present disclosure, the corresponding at least one substrate holding station of each separate and distinct end effector link includes one substrate holding station at opposing ends of the at least one end effector link, and each of the separate and distinct end effector links is substantially rigid and non-articulating between the opposing ends.

[0226] According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section that defines an independent degree of freedom of at least one end effector link relative to another end effector link.

[0227] According to one or more aspects of the present disclosure, an independent degree of freedom for each end effector link enables independent automatic wafer centering at at least one corresponding substrate holding station of each one of the dual end effector links.

[0228] According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section configured to provide independent automatic wafer centering at the at least one substrate holding station corresponding to each one of the dual end effector links substantially coincident with substantially simultaneous extension of the at least one substrate holding station corresponding to each of the dual end effector links through their respective separate openings in the transport chamber wall.

[0229] According to one or more aspects of the present disclosure, the substrate transport apparatus further includes a controller operably coupled to the drive section and configured to extend the multi-link arm to substantially simultaneously pick or place the first dual substrates by at least one corresponding substrate holding station of the dual end effector links through respective separate openings in the transport chamber wall.

[0230] According to one or more aspects of the present disclosure, the controller is configured to substantially simultaneously rapidly swap a first dual substrate and at least one second substrate held on a corresponding at least one substrate holding station of the dual end effector link through respective separate openings, with the first dual substrate simultaneously held on the corresponding at least one substrate holding station of the dual end effector link.

[0231] According to one or more aspects of the present disclosure, a substrate processing apparatus includes: a transfer chamber configured to hold an isolated atmosphere therein, the transfer chamber having a sidewall with a plurality of substrate transfer openings, the plurality of substrate transfer openings being juxtaposed separately relative to one another along the sidewall at a common level; at least one articulated multi-link arm comprising a drive section connected to the transport chamber at a fixed location, the at least one articulated multi-link arm having an upper arm and a forearm disposed in the transport chamber, the upper arm being rotatably joined to the drive section at one end, the forearm being rotatably joined to the upper arm at an opposing end of the upper arm, the upper arm being a substantially rigid non-articulated link between the one and opposing ends, one or more of the upper arm and the forearm including an end connection and a central arm section, the central arm section being selectable from a plurality of different central arm sections each having a different length to define a respective arm link length between joint centers; The multi-link arm has a plurality of separate and distinct end effector links, each of which is rotatably and separately joined to a joint at a common end of the forearm so as to rotate relative to the forearm about a common axis of rotation at the joint, each end effector link having at least one corresponding substrate holding station depending therefrom, and extending from the joint such that the multiple end effector links are juxtaposed along a common plane relative to one another.

[0232] According to one or more aspects of the present disclosure, the drive section is configured to at least extend and retract the multi-link arm along a radial axis, the extension and retraction resulting in substantially simultaneous extension and retraction, respectively, of at least one corresponding substrate holding station of each end effector link through separate openings juxtaposed along the sidewall, and the drive section is also configured to independently align at least one of the corresponding substrate holding stations relative to another of the plurality of end effector links.

[0233] According to one or more aspects of the present disclosure, the drive section is configured to independently align at least one corresponding substrate holding station of each of the end effector links relative to a corresponding substrate holding station of another of the end effector links.

[0234] According to one or more aspects of the present disclosure, the corresponding at least one substrate holding station dependent on at least one of the end effector links includes one substrate holding station at opposing ends of at least one of the end effector links that is substantially rigid and non-articulating between the opposing ends.

[0235] According to one or more aspects of the present disclosure, the corresponding at least one substrate holding station at one of the opposing ends is substantially coplanar with the corresponding at least one substrate holding station of a separate and distinct end effector link.

[0236] According to one or more aspects of the present disclosure, corresponding at least one substrate holding station at opposing ends of at least one end effector link are substantially coplanar with one another.

[0237] According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section that defines an independent degree of freedom of at least one end effector link relative to another end effector link.

[0238] According to one or more aspects of the present disclosure, an independent degree of freedom for each end effector link enables independent automatic wafer centering at at least one substrate holding station corresponding to each one of the multiple separate and distinct end effector links.

[0239] According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section configured to provide independent automatic wafer centering at the at least one substrate holding station corresponding to each one of the plurality of separate and distinct end effector links substantially coincident with substantially simultaneous extension of the at least one substrate holding station corresponding to each of the plurality of separate and distinct end effector links through a respective substrate transport opening in a side wall of the transport chamber.

[0240] According to one or more aspects of the present disclosure, the substrate transport apparatus further includes a controller operably coupled to the drive section and configured to extend the multi-link arm to substantially simultaneously pick or place the first dual substrates by corresponding at least one substrate holding station of the multiple separate and distinct end effector links through respective substrate transport openings in the side walls of the transport chamber.

[0241] According to one or more aspects of the present disclosure, the controller is configured to substantially simultaneously rapidly swap a first dual substrate, while simultaneously held on at least one corresponding substrate holding station of the plurality of separate and distinct end effector links, through a respective substrate transport opening with at least one second substrate held on at least one corresponding substrate holding station of the plurality of separate and distinct end effector links.

[0242] According to one or more embodiments of the present disclosure, one or more of the upper arm and forearm include at least one cable and pulley transmission that provides greater than + / - 160° rotation of at least one of the dual end effector links about a common axis of rotation.

[0243] According to one or more embodiments of the present disclosure, each of the at least one cable and pulley transmission includes a pulley and opposing cable segments wrapped around the pulley.

[0244] According to one or more aspects of the present disclosure, each pulley includes a guide groove in which a respective one of the opposing cables is received and guided in its wrapping motion about the respective pulley.

[0245] According to one or more aspects of the present disclosure, one or more of the opposing cable segments includes an in-line cable tensioner.

[0246] According to one or more aspects of the present disclosure, an in-line cable tensioner comprises a turnbuckle cable tensioner.

[0247] According to one or more aspects of the present disclosure, an in-line cable tensioner comprises a resilient cable tensioner.

[0248] According to one or more aspects of the present disclosure, one or more of the pulleys comprise cross roller pulleys.

[0249] According to one or more aspects of the present disclosure, the at least one articulating multi-link arm includes at least one cross roller bearing at an articulation joint of the at least one articulating multi-link arm.

[0250] In accordance with one or more aspects of the present disclosure, a substrate transport apparatus includes: A frame, a drive section connected to the frame; at least one two-link SCARA arm having a first arm link and a second arm link joined to one another at an elbow joint of the SCARA arm and the first arm link joined to the drive section at a shoulder joint; a plurality of end effector links separate and distinct from one another, each rotatably and separately joined to a second arm link at a common wrist joint for rotation relative to the second arm link about a common axis of rotation at the common wrist joint, each end effector link having at least one corresponding substrate holding station dependent thereon; One or more of the elbow joint, shoulder joint and common wrist joint include cross roller bearings, which form pulleys of a drive transmission for at least one two-link SCARA arm.

[0251] According to one or more aspects of the disclosure, the transmission includes a cable and pulley transmission, where the cable is wrapped around an outer circumferential surface of a cross roller bearing.

[0252] According to one or more embodiments of the present disclosure, a cable includes two opposing cable segments wrapped around a cross roller bearing with opposing winding directions.

[0253] According to one or more aspects of the present disclosure, one or more of the opposing cable segments includes an in-line cable tensioner.

[0254] According to one or more aspects of the present disclosure, an in-line cable tensioner comprises a turnbuckle cable tensioner.

[0255] According to one or more aspects of the present disclosure, an in-line cable tensioner comprises a resilient cable tensioner.

[0256] According to one or more aspects of the present disclosure, a cable and pulley transmission provides greater than + / - 160° rotation of at least one of the multiple end effector links about a common axis of rotation.

[0257] According to one or more aspects of the present disclosure, one or more of the first arm link and the second arm link include an end connection and a central arm section, the central arm section being selectable from a plurality of different central arm sections, each having a different length to define a respective arm link length between joint centers.

[0258] According to one or more aspects of the present disclosure, the at least one corresponding substrate holding station dependent on each of the plurality of end effector links is disposed substantially coplanar with the at least one corresponding substrate holding station dependent on each other of the plurality of end effector links on a common plane determined by at least three of the at least one corresponding substrate holding stations of the plurality of end effector links.

[0259] According to one or more aspects of the present disclosure, two of at least three of the corresponding at least one substrate holding station correspond to a common end effector link of the plurality of end effector links.

[0260] According to one or more aspects of the present disclosure, two substrate holding stations are disposed, one at each end of a common end effector link.

[0261] According to one or more aspects of the present disclosure, the two substrate holding stations at opposite ends of a common end effector link are substantially coplanar with each other.

[0262] According to one or more aspects of the present disclosure, two substrate holding stations at opposite ends of a common end effector link are substantially coplanar with at least one corresponding substrate holding station of a separate and distinct end effector link.

[0263] According to one or more aspects of the present disclosure, the common end effector link is substantially rigid and non-articulating between its opposing ends.

[0264] According to one or more aspects of the present disclosure, the multiple end effector links are arranged such that radial extension and contraction of the SCARA arm results in substantially simultaneous extension and contraction of at least one corresponding substrate holding station of each end effector link through respective separate openings in the transport chamber wall that are juxtaposed relative to one another at a substantially common level.

[0265] According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section that defines an independent degree of freedom of at least one end effector link of the multiple end effector links relative to another end effector link.

[0266] According to one or more aspects of the present disclosure, an independent degree of freedom for each end effector link enables independent automatic wafer centering at at least one substrate holding station corresponding to each one of the multiple end effector links.

[0267] According to one or more aspects of the present disclosure, the drive section is a multi-axis drive section configured to provide independent automatic wafer centering at the at least one substrate holding station corresponding to each one of the multiple end effector links substantially coincident with substantially simultaneous extension of the at least one substrate holding station corresponding to each of the multiple end effector links through respective separate openings in the transport chamber wall.

[0268] According to one or more aspects of the present disclosure, the substrate transport apparatus further includes a controller operably coupled to the drive section and configured to extend the SCARA arm to substantially simultaneously pick or place the first dual substrates by at least one corresponding substrate holding station of the multiple end effector links through respective separate openings in the transport chamber wall.

[0269] According to one or more aspects of the present disclosure, the controller is configured to substantially simultaneously rapidly swap a first dual substrate and at least one second substrate held on at least one corresponding substrate holding station of the plurality of end effector links through respective separate openings, with the first dual substrate simultaneously held on at least one corresponding substrate holding station of the plurality of end effector links.

[0270] In accordance with one or more aspects of the present disclosure, a substrate transport apparatus includes: A support frame; an articulated arm connected to the support frame and having at least one movable arm link and an end effector connected to the at least one movable arm link and having a substrate holding station disposed thereon; the at least one movable arm link has a modular composite arm link casing having at least one extruded arm casing component and a pulley system housed within and extending through the extruded arm casing component substantially across the modular composite arm link casing, the pulley system being attached to and engaged with the modular composite arm link casing and arranged to be powered by the drive section such that the pulley system effects articulation of the at least one movable arm link or an end effector relative to the at least one movable arm link; The modular composite arm link casing includes link case end modules connected by at least one extruded arm casing component mechanically secured to each of the link case end modules to form a modular composite arm link casing, the formed modular composite arm link casing being positioned to accommodate misalignment tolerances of a pulley transmission connecting pulley wheels of a pulley system housed in the link case end modules at the ends of the modular composite arm link casing.

[0271] It should be understood that the foregoing description is merely illustrative of aspects of the present disclosure. Various alternatives and modifications may be contemplated by those skilled in the art without departing from the aspects of the present disclosure. Accordingly, the aspects of the present disclosure are intended to embrace all such alternatives, modifications, and variations that are within the scope of any claims appended hereto. Moreover, the mere fact that different features are recited in mutually different dependent or independent claims does not indicate that a combination of these features cannot be used to advantage and that such combination remains within the scope of the aspects of the present disclosure.

Claims

1. A substrate transport apparatus, comprising: A support frame; an articulated arm connected to the support frame and having at least one movable arm link, and an end effector connected to the movable arm link and having a substrate holding station disposed thereon; the movable arm link being a reconfigurable arm link having a modular composite arm link casing formed of link case modules rigidly coupled to one another and a pulley system housed within and extending through the rigidly coupled link case modules substantially from end to end of the modular composite arm link casing, the rigidly coupled link case modules including link case end modules connected by at least one interchangeable link case extension module having predetermined characteristics that determine a length of the movable arm link; A substrate transport apparatus, wherein the at least one interchangeable link case extension module is selectable for connection to the link case end module and formation of the reconfigurable arm link from a plurality of different interchangeable link case extension modules, each having a different corresponding predetermined characteristic that determines a corresponding different length of the movable arm link, so as to selectably set the modular composite arm link casing and reconfigurable arm link to a predetermined arm link length from a plurality of predetermined arm link lengths.

2. 2. The substrate transport apparatus of claim 1, wherein each of the at least one replaceable link case extension module and the plurality of different replaceable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that each of the replaceable link case extension module and the plurality of different replaceable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-sections are sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness for each different replaceable link case extension module.

3. 2. The substrate transport apparatus of claim 1, wherein each of the at least one interchangeable link case extension module and the plurality of different interchangeable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that each of the interchangeable link case extension module and the plurality of different interchangeable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-sections are sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness for each different selectable predetermined arm link length.

4. The substrate transport apparatus of claim 1 , wherein the at least one interchangeable link case extension module and each of the plurality of different interchangeable link case extension modules is an extruded member having a box-shaped cross-section.

5. The substrate transport apparatus of claim 1 , wherein the at least one interchangeable link case extension module and the plurality of different interchangeable link case extension modules each have a box-shaped cross section made of a material different from a material of the link case end module.

6. The substrate transport apparatus of claim 1 , wherein a material of the at least one link case extension module and each of the plurality of different interchangeable link case extension modules has a greater stiffness than a material of the link case end module.

7. The substrate transport apparatus of claim 1 , wherein a material of the at least one link case extension module and each of the plurality of different interchangeable link case extension modules has a stiffness that corresponds to a stiffness of a material of a pulley transmission of the pulley system.

8. The substrate transport apparatus of claim 1 , wherein the pulley system is engaged with the modular composite arm link casing and arranged to be powered by a drive section such that the pulley system provides articulation of the at least one movable arm link or the end effector.

9. The substrate transport apparatus of claim 1 , wherein the at least one interchangeable link case extension module and each of the plurality of different interchangeable link case extension modules have a box-shaped cross-section made of stainless steel.

10. 2. The substrate transport apparatus of claim 1, wherein the at least one replaceable link case extension module is mechanically secured to each of the link case end modules to form the modular composite arm link casing, the formed modular composite arm link casing being positioned to accommodate misalignment tolerances of pulley transmissions connecting pulley wheels of the pulley system for a selected predetermined arm link length.

11. 2. The substrate transport apparatus of claim 1, wherein the at least one replaceable link case extension module is mechanically secured to each of the link case end modules with mechanical fastener joints to form the modular composite arm link casing, the mechanical fastener joints being configured such that the formed modular composite arm link casing conforms to a misalignment tolerance of a pulley transmission connecting pulley wheels of the pulley system for a selected predetermined arm link length.

12. The substrate transport apparatus of claim 1 , wherein at least one of the link case end modules houses a pulley wheel of the pulley system.

13. The substrate transport apparatus of claim 1, wherein the modular composite arm link casing is a low profile casing having a compact height for a selected predetermined arm length corresponding to a symmetrically flexible pulley transmission having a compact and substantially symmetrical cross section connecting the pulley wheels of the pulley system.

14. The substrate transport apparatus of claim 13 , wherein the compact height is less than a housing height of a band pulley transmission for an equivalent number of pulley systems having an equivalent length.

15. The substrate transport apparatus of claim 13 , wherein the flexible pulley transmission connecting the pulley wheels is a cable or wire pulley transmission.

16. 2. The substrate transport apparatus of claim 1, wherein at least one of the link case end modules houses a pulley wheel of the pulley system that is mounted with a cross roller bearing such that the position and alignment of the pulley wheel is dependent on and controlled by engagement with the cross roller bearing.

17. The substrate transport apparatus of claim 1, wherein the modular composite arm link casing is a low-profile casing having a compact height for a selected predetermined arm length corresponding to the cross-roller bearing mounted pulley wheels of the pulley system housed in at least one of the link case end modules.

18. 2. The substrate transport apparatus of claim 1, wherein engagement of a pulley transmission with a respective pulley wheel of the pulley system is arranged to determine rotation of the respective pulley wheel of the pulley system through at least 360° rotation of the respective pulley wheel between a wrapped position and an unwrapped position of the pulley transmission on the respective pulley wheel.

19. 2. The substrate transport apparatus of claim 1, wherein engagement of a pulley transmission with each pulley wheel of the pulley system is arranged to determine rotation of the end effector through at least 360° of rotation of the end effector relative to the at least one movable arm link between a wrapped position and an unwrapped position of the pulley transmission on the respective pulley wheel.

20. A substrate transport apparatus, comprising: A support frame; an articulated arm connected to the support frame, the articulated arm having at least one movable arm link and an end effector connected to the at least one movable arm link and having a substrate holding station disposed thereon; the at least one movable arm link having a modular composite arm link casing formed of link case modules rigidly connected to one another, and a pulley system housed within and extending through the rigidly connected link case modules substantially from end to end of the modular composite arm link casing, the pulley system being mounted and engaged to the modular composite arm link casing and arranged to be powered by a drive section such that the pulley system provides articulation of the at least one movable arm link or the end effector relative to the at least one movable arm link; A substrate transport apparatus, wherein the rigidly connected case link modules include link case end modules connected by at least one link case extension module, the at least one link case extension module being mechanically secured to each of the link case end modules to form the modular composite arm link casing, the formed modular composite arm link casing being positioned to accommodate misalignment tolerances of a pulley transmission connecting pulley wheels of the pulley system housed in the link case end modules at the ends of the modular composite arm link casing.

21. 21. The substrate transport apparatus of claim 20, wherein the at least one movable arm link is a reconfigurable arm link, and the link case extension module is interchangeable from a plurality of different interchangeable link case extension modules, each having a different corresponding predetermined characteristic that determines a length of the at least one movable arm link.

22. 22. The substrate transport apparatus of claim 21, wherein the link case extension module and each of the plurality of different replaceable link case extension modules have corresponding box-shaped cross-sections, and the predetermined characteristic is that the link case extension module and each of the plurality of different replaceable link case extension modules have different corresponding lengths, and the corresponding box-shaped cross-sections are sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness for each different replaceable link case extension module.

23. 22. The substrate transport apparatus of claim 21, wherein the link case extension module and each of the plurality of different interchangeable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that the link case extension module and each of the plurality of different interchangeable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-section is sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness for each different selectable predetermined arm link length.

24. The substrate transport apparatus of claim 21 , wherein the link case extension module and each of the plurality of different interchangeable link case extension modules are extruded members having a box-shaped cross section.

25. 22. The substrate transport apparatus of claim 21, wherein the link case extension module and each of the plurality of different interchangeable link case extension modules have a box-shaped cross section made of a material different from a material of the link case end module.

26. The substrate transport apparatus of claim 21 , wherein a material of the link case extension module and each of the plurality of different interchangeable link case extension modules has a greater stiffness than a material of the link case end module.

27. 22. The substrate transport apparatus of claim 21, wherein a material of the link case extension module and each of the plurality of different interchangeable link case extension modules has a stiffness that corresponds to a stiffness of a material of the pulley transmission of the pulley system.

28. 22. The substrate transport apparatus of claim 21, wherein the link case extension module and each of the plurality of different interchangeable link case extension modules have a box-shaped cross section made of stainless steel.

29. 22. The substrate transport apparatus of claim 21, wherein the pulley transmission is a symmetrically flexible pulley transmission and the modular composite arm link casing is a low profile casing having a compact height for a selected predetermined arm length corresponding to the symmetrically flexible pulley transmission having a compact and substantially symmetric cross section that connects the pulley wheels of the pulley system.

30. 30. The substrate transport apparatus of claim 29, wherein the compact height is less than a housing height of a band pulley transmission for an equivalent number of pulley systems having an equivalent length.

31. 30. The substrate transport apparatus of claim 29, wherein the flexible pulley transmission connecting the pulley wheels is a cable or wire pulley transmission.

32. 22. The substrate transport apparatus of claim 21, wherein the modular composite arm link casing is a low profile casing having a compact height for a selected predetermined arm length corresponding to the cross roller bearing mounted pulley wheels of the pulley system housed in at least one of the link case end modules.

33. 21. The substrate transport apparatus of claim 20, wherein at least one of the pulley wheels of the pulley system is mounted with a cross roller bearing such that the position and alignment of at least one of the pulley wheels is dependent on and controlled by engagement with the cross roller bearing.

34. 21. The substrate transport apparatus of claim 20, wherein engagement of a pulley transmission with respect to the pulley wheels of the pulley system determines a rotation of at least one of the pulley wheels of the pulley system through at least 360° of rotation of at least one of the pulley wheels between a wrapped position and an unwrapped position of the pulley transmission on at least one of the pulley wheels.

35. 21. The substrate transport apparatus of claim 20, wherein engagement of a pulley transmission with respect to the pulley wheels of the pulley system is arranged to determine rotation of the end effector through at least 360 degrees of rotation of the end effector relative to the at least one movable arm link between a wrapped position and an unwrapped position of the pulley transmission on at least one of the pulley wheels.

36. Providing a substrate transport apparatus, the substrate transport apparatus comprising: A support frame; an articulated arm connected to the support frame and having at least one movable arm link and an end effector connected to the movable arm link and having a substrate holding station disposed thereon; reconfiguring the movable arm link, the movable arm link being a reconfigurable arm link having a modular composite arm link casing formed of link case modules rigidly coupled to one another and a pulley system housed within and extending through the rigidly coupled link case modules substantially from end to end of the modular composite arm link casing, the rigidly coupled link case modules including link case end modules connected by at least one interchangeable link case extension module having predetermined characteristics that determine a length of the movable arm link; The method, wherein the at least one interchangeable link case extension module is selectable for connection to the link case end module and formation of the reconfigurable arm link from a plurality of different interchangeable link case extension modules, each having a different corresponding predetermined characteristic that determines a corresponding different length of the movable arm link, so as to selectably set the modular composite arm link casing and reconfigurable arm link to a predetermined arm link length from a plurality of predetermined arm link lengths.

37. 37. The method of claim 36, wherein the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules have corresponding box-shaped cross-sections, and the predetermined characteristic is that the replaceable link case extension module and each of the plurality of different replaceable link case extension modules have different corresponding lengths, and the corresponding box-shaped cross-sections are sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness for each different replaceable link case extension module.

38. 37. The method of claim 36, wherein the at least one interchangeable link case extension module and each of the plurality of different interchangeable link case extension modules have a corresponding box-shaped cross-section, and the predetermined characteristic is that the interchangeable link case extension module and each of the plurality of different interchangeable link case extension modules have a different corresponding length, and the corresponding box-shaped cross-sections are sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness for each different selectable predetermined arm link length.

39. 37. The method of claim 36, wherein the at least one interchangeable link case extension module and each of the plurality of different interchangeable link case extension modules are extruded members having a box-shaped cross-section.

40. 37. The method of claim 36, wherein the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules have a box-shaped cross-section made of a material different from a material of the link case end module.

41. 37. The method of claim 36, wherein a material of the at least one link case extension module and each of the plurality of different interchangeable link case extension modules has a greater stiffness than a material of the link case end module.

42. 37. The method of claim 36, wherein a material of the at least one link case extension module and each of the plurality of different interchangeable link case extension modules has a stiffness that corresponds to a stiffness of a material of a pulley transmission of the pulley system.

43. 37. The method of claim 36, wherein the pulley system is engaged with the modular composite arm link casing and positioned to be powered by a drive section such that the pulley system provides articulation of the at least one movable arm link or the end effector.

44. 37. The method of claim 36, wherein the at least one replaceable link case extension module and each of the plurality of different replaceable link case extension modules have a box-shaped cross-section made of stainless steel.

45. 37. The method of claim 36, further comprising the step of mechanically fastening the at least one interchangeable link case extension module to each of the link case end modules to form the modular composite arm link casing, the formed modular composite arm link casing conforming to a misalignment tolerance of a pulley transmission connecting pulley wheels of the pulley system for a selected predetermined arm link length.

46. 37. The method of claim 36, further comprising mechanically fastening the at least one interchangeable link case extension module to each of the link case end modules with mechanical fastener joints to form the modular composite arm link casing, the mechanical fastener joints configured such that the formed modular composite arm link casing conforms to a misalignment tolerance of a pulley transmission connecting pulley wheels of the pulley system for a selected predetermined arm link length.

47. 37. The method of claim 36, wherein at least one of the link case end modules houses a pulley wheel of the pulley system.

48. 37. The method of claim 36, wherein the modular composite arm link casing is a low profile casing having a compact, substantially symmetrical cross section and a compact height for a selected predetermined arm length commensurate with a symmetrically flexible pulley transmission connecting the pulley wheels of the pulley system.

49. 49. The method of claim 48, wherein the compact height is less than a housing height of a band pulley transmission for an equivalent number of pulley systems having an equivalent length.

50. 49. The method of claim 48, wherein the flexible pulley transmission connecting the pulley wheels is a cable or wire pulley transmission.

51. 37. The method of claim 36, wherein at least one of the link case end modules houses a pulley wheel of the pulley system that is mounted with a cross roller bearing such that position and alignment of the pulley wheel is dependent upon and controlled by engagement with the cross roller bearing.

52. 37. The method of claim 36, wherein the modular composite arm link casing is a low profile casing having a compact height for a selected predetermined arm length corresponding to cross roller bearing mounted pulley wheels of the pulley system housed in at least one of the link case end modules.

53. 37. The method of claim 36, wherein engagement of a pulley transmission with a pulley wheel of each of the pulley systems is arranged to determine rotation of each of the pulley wheels of the pulley system through at least 360 degrees of rotation of the respective pulley wheel between a wrapped position and an unwrapped position of the pulley transmission on the respective pulley wheel.

54. 37. The method of claim 36, wherein engagement of a pulley transmission with each pulley wheel of the pulley system is arranged to determine rotation of the end effector through at least 360 degrees of rotation of the end effector relative to the at least one movable arm link between a wrapped position and an unwrapped position of the pulley transmission on the respective pulley wheel.

55. Providing a substrate transport apparatus, the substrate transport apparatus comprising: A support frame; an articulated arm connected to the support frame, the articulated arm having at least one movable arm link and an end effector connected to the at least one movable arm link, the end effector having a substrate holding station disposed thereon; providing articulation of the at least one movable arm link or the end effector relative to the at least one movable arm link with a pulley system attached to and engaged with a modular composite arm link casing of the at least one movable arm link, the modular composite arm link casing being formed of link case modules rigidly coupled to one another, the pulley system being contained within and extending through the rigidly coupled link case modules substantially end-to-end of the modular composite arm link casing; The method, wherein the rigidly coupled case link modules include link case end modules connected by at least one link case extension module, the at least one link case extension module being mechanically secured to each of the link case end modules to form the modular composite arm link casing, the formed modular composite arm link casing being positioned to accommodate misalignment tolerances of a pulley transmission connecting pulley wheels of the pulley system housed in the link case end modules at the ends of the modular composite arm link casing.

56. 56. The method of claim 55, further comprising the step of reconfiguring the at least one movable arm link, the link case extension module being interchangeable from a plurality of different interchangeable link case extension modules, each having a different corresponding predetermined characteristic that determines a length of the at least one movable arm link.

57. 57. The method of claim 56, wherein the link case extension module and each of the plurality of different replaceable link case extension modules have corresponding box-shaped cross-sections, and the predetermined characteristic is that the link case extension module and each of the plurality of different replaceable link case extension modules have different corresponding lengths, and the corresponding box-shaped cross-sections are sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness for each different replaceable link case extension module.

58. 57. The method of claim 56, wherein the link case extension module and each of the plurality of different interchangeable link case extension modules have corresponding box-shaped cross-sections, and the predetermined characteristic is that the link case extension module and each of the plurality of different interchangeable link case extension modules have different corresponding lengths, and the corresponding box-shaped cross-sections are sized and shaped corresponding to the different corresponding lengths to maintain a predetermined stiffness for each different selectable predetermined arm link length.

59. 57. The method of claim 56, wherein the link case extension module and each of the plurality of different interchangeable link case extension modules are extruded members having a box-shaped cross-section.

60. 57. The method of claim 56, wherein the link case extension module and each of the plurality of different interchangeable link case extension modules have a box-shaped cross-section made of a material different from a material of the link case end module.

61. 57. The method of claim 56, wherein a material of the link case extension module and each of the plurality of different interchangeable link case extension modules has a greater stiffness than a material of the link case end module.

62. 57. The method of claim 56, wherein a material of the link case extension module and each of the plurality of different interchangeable link case extension modules has a stiffness that corresponds to a stiffness of a material of the pulley transmission of the pulley system.

63. 57. The method of claim 56, wherein the link case extension module and each of the plurality of different interchangeable link case extension modules have a box-shaped cross-section made of stainless steel.

64. 57. The method of claim 56, wherein the pulley transmission is a symmetrically flexible pulley transmission and the modular composite arm link casing is a low profile casing having a compact height for a selected predetermined arm length commensurate with the symmetrically flexible pulley transmission connecting the pulley wheels of the pulley system having a compact, substantially symmetric cross section.

65. 65. The method of claim 64, wherein the compact height is less than a housing height of a band pulley transmission for an equivalent number of pulley systems having an equivalent length.

66. 65. The method of claim 64, wherein the flexible pulley transmission connecting the pulley wheels is a cable or wire pulley transmission.

67. 57. The method of claim 56, wherein the modular composite arm link casing is a low profile casing having a compact height for a selected predetermined arm length corresponding to cross roller bearing mounted pulley wheels of the pulley system housed in at least one of the link case end modules.

68. 56. The method of claim 55, wherein at least one of the pulley wheels of the pulley system is mounted with a cross roller bearing such that a position and alignment of at least one of the pulley wheels is dependent upon and controlled by engagement with the cross roller bearing.

69. 56. The method of claim 55, wherein engagement of a pulley transmission with respect to the pulley wheels of the pulley system is arranged to determine a rotation of at least one of the pulley wheels of the pulley system through at least 360 degrees of rotation of at least one of the pulley wheels between a wrapped position and an unwrapped position of the pulley transmission on at least one of the pulley wheels.

70. 56. The method of claim 55, wherein engagement of a pulley transmission to the pulley wheels of the pulley system is arranged to determine rotation of the end effector through at least 360 degrees of rotation of the end effector relative to the at least one movable arm link between a wrapped position and an unwrapped position of the pulley transmission on at least one of the pulley wheels.

71. A substrate transport apparatus, comprising: A support frame; an articulated arm connected to the support frame, the articulated arm having at least one movable arm link and an end effector connected to the at least one movable arm link and having a substrate holding station disposed thereon; the at least one movable arm link has a modular composite arm link casing having at least one extruded arm casing component and a pulley system housed within and extending through the extruded arm casing component substantially across the modular composite arm link casing, the pulley system being attached to and engaged with the modular composite arm link casing and arranged to be powered by a drive section to effect articulation of the at least one movable arm link or the end effector relative to the at least one movable arm link; A substrate transport apparatus, wherein the modular composite arm link casing includes link case end modules connected by the at least one extruded arm casing component, the at least one extruded arm casing component being mechanically fixed to each of the link case end modules to form the modular composite arm link casing, the formed modular composite arm link casing being positioned to accommodate misalignment tolerances of a pulley transmission connecting pulley wheels of the pulley system housed in the link case end modules at the ends of the modular composite arm link casing.

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